Screen printing machine

Abstract

To vibrate a mask efficiently when a lower surface of the mask is cleaned.SOLUTION: A screen printer 1 prints cream solder 60 on a substrate P by using a mask 11C and includes: a cleaning head 14A which uses cleaning paper 22 to clean a lower surface of the mask 11C; a vibration generation part 40 which contacts with an upper surface of the mask 11C to cause the mask 11C to vibrate; and moving parts (a first moving part 14B and a second moving part 41) which synchronously move the cleaning head 14A and the vibration generation part 40.SELECTED DRAWING: Figure 8

Description

Technical Field

[0001] The technology disclosed in this specification relates to a screen printing machine.

Background Art

[0002] A screen printing machine that prints cream solder onto a substrate using a mask prints the cream solder onto the substrate by leveling the cream solder on the mask with the substrate in close contact with the lower surface of the mask. The mask is a plate-like member in which openings corresponding to circuit patterns formed on the substrate are formed. When leveling the cream solder, the cream solder may adhere to the lower surface of the mask. For this reason, generally, a screen printing machine is provided with a cleaning head for cleaning the lower surface of the mask, and when predetermined conditions are satisfied, the cleaning head is moved to clean the lower surface of the mask.

[0003] The cream solder adhering to the lower surface of the mask may be gelled (increased in viscosity). If the cream solder is gelled, it may not be possible to sufficiently remove the cream solder even when cleaning is performed. When the mask is vibrated, the cream solder becomes solated (decreased in viscosity), making it easier to remove the cream solder. For this reason, conventionally, a screen printing machine that cleans while applying vibration to the mask has been known (see, for example, Patent Document 1). Specifically, the metal mask cleaning device of the solder paste printing machine described in Patent Document 1 includes a cleaning paper shaft disposed below the solder mask and an ultrasonic vibration generator that vibrates the cleaning paper shaft, and cleans the solder mask by moving it while vibrating the cleaning shaft.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, the metal mask cleaning device described in Patent Document 1 mentioned above had room for improvement in vibrating the solder mask efficiently. In this specification, a technique capable of efficiently vibrating a mask when cleaning the lower surface of the mask is initiated.

Means for Solving the Problems

[0006] A screen printing machine for printing cream solder on a substrate using a mask, comprising: a cleaning head for cleaning the lower surface of the mask using a cleaning medium; a vibration generating unit that abuts on the upper surface of the mask to vibrate the mask; and a moving unit that synchronously moves the cleaning head and the vibration generating unit.

Effects of the Invention

[0007] According to the above configuration, the mask can be efficiently vibrated when cleaning the lower surface of the mask.

Brief Description of the Drawings

[0008]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Embodiments for Carrying Out the Invention

[0009] (Outline of this Embodiment) (1) The screen printing machine according to the present disclosure is a screen printing machine that prints cream solder on a substrate using a mask, and includes a cleaning head that cleans the lower surface of the mask using a cleaning medium, a vibration generating unit that contacts the upper surface of the mask and vibrates the mask, and a moving unit that synchronously moves the cleaning head and the vibration generating unit.

[0010] The metal mask cleaning device described in Patent Document 1 mentioned above vibrates the solder mask by vibrating the cleaning paper shaft. However, since the cleaning paper shaft has a certain weight, a large force is required to vibrate it. Furthermore, since the cleaning paper shaft has a certain weight, it is difficult to vibrate at a high frequency, making it difficult for the cream solder to solvate. Patent Document 1 also describes a configuration in which a solder mask frame is vibrated by contacting it from above. However, generally, since the solder mask is supported by the solder mask frame via an elastic member such as resin or rubber, even if the solder mask frame is vibrated, the vibration is absorbed by the elastic member and difficult to transmit to the solder mask. Therefore, the metal mask cleaning device described in Patent Document 1 had room for improvement in vibrating the solder mask efficiently.

[0011] The above screen printing machine is provided with a vibration generating unit that abuts against the upper surface of the mask and vibrates the mask. Since the vibration generating unit does not need to vibrate the cleaning paper shaft, it can vibrate the mask with a small force. Furthermore, since there is no need to vibrate the cleaning paper shaft, the mask can be vibrated at a high frequency. Further, in the above screen printing machine, since the mask is vibrated directly, vibration is more likely to be transmitted to the mask than when vibrating the mask frame. Therefore, according to the above screen printing machine, the mask can be vibrated efficiently when cleaning the lower surface of the mask.

[0012] (2) The cleaning head has a bottom wall portion and side wall portions rising from the bottom wall portion, and the side wall portions are two side walls spaced apart from each other in the moving direction of the cleaning head, and the wall surfaces of the two side walls intersect the moving direction. The vibration generating unit may abut between the two side walls in the mask in a top view.

[0013] In the metal mask cleaning device described in Patent Document 1 mentioned above, since the entire solder mask vibrates, the cream solder in the region of the solder mask that does not overlap with the metal mask cleaning device in a top view also solates, and the solated cream solder may fall into the machine. In the above screen printing machine, the two side walls of the side wall portion are spaced apart in the moving direction of the cleaning head, and the vibration generating unit abuts between the two side walls in the mask in a top view. By doing so, it becomes difficult for vibration to be transmitted to the regions outside the two side walls in the mask. For this reason, it becomes difficult for the cream solder adhering to the outside of the two side walls in the mask to solate. Therefore, according to the above screen printing machine, it is possible to suppress the cream solder (more specifically, the cream solder adhering to the regions outside the two side walls on the lower surface of the mask) from falling into the machine of the screen printing machine due to the vibration of the mask.

[0014] (3) A plurality of suction holes may be formed on the upper surface of the side wall portion, and a suction unit for sucking the air in the suction holes may be provided.

[0015] According to the above-described screen printing machine, by sucking the air in the suction holes in a state where the upper surface of the side wall portion is in close contact with the lower surface of the mask via the cleaning medium, the upper surface of the side wall portion is adsorbed to the lower surface of the mask via the cleaning medium. Therefore, the vibrating range of the mask can be reliably limited by the range inside the two side walls.

[0016] (4) The side wall portion is formed in an annular shape, and the suction portion may also suck the air in the space inside the annular side wall portion.

[0017] According to the above-described screen printing machine, since the air in the space inside the annular side wall portion is sucked, the cream solder adhering to the area inside the side wall portion on the lower surface of the mask is likely to fall. Therefore, the lower surface of the mask can be more reliably cleaned.

[0018] (5) The side wall portion is formed in an annular shape, and a suction portion for sucking the air in the space inside the annular side wall portion may be provided.

[0019] According to the above-described screen printing machine, by sucking the air in the space inside the annular side wall portion, the cream solder adhering to the area inside the side wall portion on the lower surface of the mask is likely to fall. Therefore, the lower surface of the mask can be more reliably cleaned.

[0020] (6) The cleaning head has a fulcrum member provided between the two side walls, and the cleaning medium may pass under the fulcrum member between the two side walls.

[0021] According to the above-described screen printing machine, since a space is formed between the lower surface of the mask and the cleaning medium, the cream solder adhering to the lower surface of the mask is likely to fall.

[0022] [Details of Embodiments of the Present Disclosure] Embodiments of the present disclosure will be described below. The present disclosure is not limited to these examples, but is indicated by the claims, and is intended to include all modifications within the meaning and scope equivalent to the claims. Embodiments of the present disclosure can be realized in various forms such as an apparatus, a method, a computer program for realizing the functions of these apparatuses or methods, and a recording medium recording the computer program.

[0023] <Embodiment 1> Embodiment 1 will be described with reference to FIGS. 1 to 8. In the following description, the front-rear direction, the up-down direction, and the left-right direction are based on the front-rear direction, the up-down direction, and the left-right direction shown in FIG. 1. In the following description, the right side shown in FIG. 1 is referred to as the upstream side, and the left side is referred to as the downstream side. In the following description, reference numerals of the drawings may be omitted for some of the same components.

[0024] (1) Configuration of Screen Printer Referring to FIG. 1, the appearance of the screen printer 1 according to Embodiment 1 will be described. The screen printer 1 is a device that prints cream solder on a substrate using a mask. The screen printer 1 includes a box-shaped housing 10. An opening through which a substrate is carried in is formed in the right wall of the housing 10. An opening through which the substrate is carried out is formed in the left wall of the housing 10. The substrate is carried into the inside of the housing 10 through the opening in the right wall, and after cream solder is printed inside the housing 10, it is carried out through the opening on the left side.

[0025] Referring to FIG. 2, the schematic configuration of the screen printer 1 will be described. The screen printer 1 includes a mask member 11, a printing table 12, a printing unit 13, a cleaning unit 14, and a mask vibration unit 15. Although not shown in FIG. 2, the screen printer 1 also includes a conveyor 52 (see FIG. 7) that conveys the substrate P carried in from the upstream side to the working position below the mask 11C and discharges the substrate P on which the cream solder 60 is printed at the working position to the downstream side.

[0026] (1-1) Mask Member As shown in FIG. 3, the mask member 11 includes a frame-shaped mask frame 11A and a plate-shaped mask 11C supported inside the mask frame 11A via an elastic member 11B. The mask 11C is formed of aluminum, iron, or the like, and has an opening (not shown) corresponding to the circuit pattern formed on the substrate. The elastic member 11B is a plate-shaped resin, rubber, or the like.

[0027] (1-2) Printing table As shown in FIG. 2, the printing table 12 is disposed below the working position. The printing table 12 is a mechanism that lifts the substrate P conveyed to the working position and brings it into close contact with the lower surface of the mask 11C. The printing table 12 includes a base 12A, a plurality of backup pins 12B, a push-up plate 12C on which these backup pins 12B are erected, a plate lifting / lowering unit 12D that lifts and lowers the push-up plate 12C, and a table moving unit 12E that moves the base 12A in the front-rear direction.

[0028] The plate lifting / lowering unit 12D is a mechanism that lifts and lowers the push-up plate 12C by a ball screw. The plate lifting / lowering unit 12D has a ball screw extending downward from the lower surface of the push-up plate 12C, a ball nut screwed onto the ball screw, and a motor that rotates the ball nut. The table moving unit 12E is a mechanism that moves the printing table 12 to the rear side so that the printing table 12 does not interfere when the lower surface of the mask 11C is cleaned by the cleaning unit 14. The table moving unit 12E is a mechanism that moves the printing table 12 in the front-rear direction by a ball screw, and includes a guide rail that slidably supports the right end portion of the base 12A in the front-rear direction, a ball nut fixed to the left end portion of the base, a ball screw screwed onto the ball nut and extending in the front-rear direction, and a motor that rotates the ball screw around its axis.

[0029] (1-3) Printing unit The printing unit 13 includes a squeegee head 13A, two squeegee support parts 13B, two squeegees 13C, and a squeegee moving part 13D. The squeegee head 13A is a member that is long in the left-right direction. A motor for raising and lowering the squeegee support part 13B is arranged on the squeegee head 13A. The squeegee support part 13B is a rod-shaped member and is supported by the squeegee head 13A so as to be movable up and down. The squeegee 13C is a plate-shaped member that is long in the left-right direction and is fixed to the lower end part of the squeegee support part 13B. The rear squeegee 13C slopes downward toward the rear. The front squeegee 13C slopes downward toward the front.

[0030] The squeegee moving part 13D is a mechanism that moves the squeegee head 13A in the front-rear direction by a ball screw. The squeegee moving part 13D includes a guide rail that slidably supports the right end part of the squeegee head 13A in the front-rear direction, a ball nut fixed to the left end part of the squeegee head 13A, a ball screw that is screwed into the ball nut and extends in the front-rear direction, and a motor that rotates the ball screw.

[0031] (1 - 4) Cleaning unit Referring to FIG. 4, the cleaning unit 14 will be described. The cleaning unit 14 is a mechanism for cleaning the lower surface of the mask 11C. The cleaning unit 14 includes a cleaning head 14A, a first moving part 14B (an example of a moving part) that moves the cleaning head 14A in the front-rear direction, and a suction part 14C (see FIG. 7). As shown in FIG. 2, when the cleaning head 14A is not performing cleaning, it waits at the standby position on the front side.

[0032] As shown in FIG. 4, the cleaning head 14A includes a flat base 20, a suction body 21 fixed to the upper surface of the base 20, a paper roller 23 around which a cleaning paper 22 (an example of a cleaning medium) is wound, a pair of left and right bearing portions 24 that rotatably support both ends of the paper roller 23, a take-up roller 25 that takes up the used cleaning paper 22, a pair of left and right bearing portions 26 that rotatably support both ends of the take-up roller 25, and a take-up motor (not shown) that rotates the take-up roller 25.

[0033] The suction body 21 is fixed to the upper surface of the base 20. The width of the suction body 21 in the front-rear direction is narrower than the width of the base 20 in the front-rear direction. The suction body 21 has a bottom wall portion 21A and a side wall portion 21B that rises annularly from the outer peripheral edge of the bottom wall portion 21A. The outer peripheral shape of the side wall portion 21B is a rectangular shape that is long in the left-right direction in top view, and a space 21C is formed inside. As shown in FIG. 5, the side wall portion 21B includes two side walls 71 that are spaced apart from each other in the front-rear direction (an example of the moving direction of the cleaning head), and the wall surfaces of the two side walls 71 are orthogonal (an example of intersection) to the front-rear direction, and two side walls 72 that are spaced apart from each other in the left-right direction, and the wall surfaces of the two side walls 72 are orthogonal to the left-right direction.

[0034] A plurality of through holes 31 (an example of suction holes) that penetrate in the vertical direction are formed at intervals on the front and rear side walls 71 of the side wall portion 21B. A plurality of through holes 32 that penetrate in the vertical direction are also formed in the bottom wall portion 21A of the suction body 21. As shown in FIG. 4, on the upper surface of the base 20 (or the lower surface of the suction body 21, or both the upper surface of the base 20 and the lower surface of the suction body 21), there are formed a groove 35 that forms an air flow path 36 for collectively sucking the air in a plurality of through holes 31, and a groove 33 that forms an air flow path 34 for collectively sucking the air in a plurality of through holes 32. The air flow path 34 and the air flow path 36 are configured as independent air flow paths, and are respectively connected to a suction portion 14C (see FIG. 7) via separate air hoses (not shown). The suction portion 14C is a device that supplies positive pressure and negative pressure to the air flow paths 34 and 36. The suction portion 14C may be a device that supplies only negative pressure. The magnitude of the negative pressure (suction pressure) for sucking the air in the air flow path 34 and the magnitude of the negative pressure for sucking the air in the air flow path 36 may be different.

[0035] In the space 21C inside the suction body 21, a columnar fulcrum member 21D is arranged in a posture extending in the left - right direction (the direction perpendicular to the paper surface in FIG. 2). The cleaning paper 22 that enters the space 21C inside the suction body 21 from the front side passes under the fulcrum member 21D, is bent around the fulcrum member 21D, and is pulled out from the rear side. The cleaning paper 22 is formed of a material that allows air to pass through, such as a non - woven fabric.

[0036] The first moving portion 14B is a mechanism that moves the cleaning head 14A in the front - rear direction by a ball screw. The first moving portion 14B includes a guide rail that slidably supports the left end portion of the base 20 in the front - rear direction, a ball nut fixed to the right end portion of the base 20, a ball screw that is screwed into the ball nut and extends in the front - rear direction, and a motor that rotates the ball screw.

[0037] (1 - 5) Mask vibration portion The mask vibration portion 15 is a mechanism that vibrates the mask 11C when the cleaning portion 14 cleans the lower surface of the mask 11C. The mask vibration portion 15 has a vibration generating portion 40 that abuts against the upper surface of the mask 11C to vibrate the mask 11C, and a second moving portion 41 (an example of a moving portion) that moves the vibration generating portion 40 in the front - rear direction.

[0038] The vibration generating unit 40 includes a vibration head 42, a squeegee support member 43, a cleaning metal squeegee 44, an ultrasonic generator 45, and a vibrator 46. When the vibration generating unit 40 does not perform cleaning, it waits at the standby position on the front side. As shown in FIG. 6, the vibration head 42 is a member that is long in the left - right direction. As shown in FIG. 4, the squeegee support member 43 is a rod - shaped member and is supported by the vibration head 42 so as to be movable up and down. A motor 47 for moving the squeegee support member 43 up and down is arranged on the vibration head 42.

[0039] The cleaning metal squeegee 44 is a plate - shaped member that is long in the left - right direction. The cleaning metal squeegee 44 is fixed to the lower end of the squeegee support member 43 in a posture that slopes downward from the rear side toward the front side. As shown in FIG. 6, the cleaning metal squeegee 44 abuts within a range (in other words, between the two side walls 71) that overlaps the space 21C inside the side wall portion 21B in the mask 11C in a top view.

[0040] As shown in FIG. 4, the ultrasonic generator 45 is fixed to the vibration head 42. The vibrator 46 is a rod - shaped member that extends in the up - down direction. The vibrator 46 is fixed to the ultrasonic generator 45, and its lower end abuts against the cleaning metal squeegee 44. When the ultrasonic generator 45 generates ultrasonic waves, it vibrates at a high frequency due to the reaction force. When the ultrasonic generator 45 vibrates, the vibration is transmitted to the cleaning metal squeegee 44 via the vibrator 46. As a result, the cleaning metal squeegee 44 vibrates at a high frequency.

[0041] The second moving unit 41 is a mechanism that moves the vibration head 42 in the front - rear direction by a ball screw. The second moving unit 41 includes a guide rail that slidably supports the left end portion of the vibration head 42 in the front - rear direction, a ball nut fixed to the right end portion of the vibration head 42, a ball screw that the ball nut is screwed onto, and a motor that rotates the ball screw.

[0042] (2) Electrical Configuration of the Screen Printing Machine Referring to FIG. 7, the electrical configuration of the screen printing machine 1 will be described. The screen printing machine 1 includes a control unit 50 and an operation panel 51. The control unit 50 includes a CPU 50A, a RAM 50B, and a storage unit 50C. Various programs and data executed by the CPU 50A are stored in the storage unit 50C. The operation panel 51, the conveyor 52, the printing table 12, the printing unit 13, the cleaning unit 14, the mask vibration unit 15, etc. are connected to the control unit 50. The operation panel 51 includes a display device such as a liquid crystal display, and an input device such as a touch panel, a mouse, and a keyboard. The operator can perform various settings and operation instructions for the screen printing machine 1 by operating the operation panel 51.

[0043] (3) Cleaning of the mask Referring to FIG. 8, the cleaning of the mask 11C will be described. When a predetermined condition is satisfied, the control unit 50 cleans the lower surface of the mask 11C. The predetermined conditions are, for example, every time a circuit pattern is printed on a predetermined number of substrates P, at a predetermined time interval, when a preset time is reached, or when the operator instructs cleaning. The predetermined conditions can be determined as appropriate.

[0044] When the above-described predetermined condition is satisfied, the control unit 50 moves the printing table 12 to the rear so that the printing table 12 does not interfere with the cleaning. Next, the control unit 50 moves the cleaning head 14A below the front end of the mask 11C and sucks the air in the through holes 31, 32 of the suction body 21 by the suction unit 14C. When the air in these through holes 31, 32 is sucked, the upper surface of the side wall portion 21B is adsorbed to the lower surface of the mask 11C via the cleaning paper 22, and the air in the space 21C inside the side wall portion 21B is sucked.

[0045] Next, the control unit 50 moves the cleaning metal squeegee 44 above the range overlapping the space 21C inside the side wall portion 21B in the mask 11C, lowers the squeegee support member 43, and brings the cleaning metal squeegee 44 into contact with the mask 11C. Then, while vibrating the mask 11C with the cleaning metal squeegee 44, the control unit 50 synchronously moves the cleaning metal squeegee 44 and the cleaning head 14A backward by the first moving unit 14B and the second moving unit 41. Synchronously moving means moving the cleaning metal squeegee 44 and the cleaning head 14A in the same direction at the same speed while maintaining the state where the cleaning metal squeegee 44 is in contact within the range overlapping the space 21C inside the side wall portion 21B in the mask 11C.

[0046] (4) Effects of the Embodiment According to the screen printing machine 1 according to Embodiment 1, it is provided with a vibration generating unit 40 that contacts the upper surface of the mask 11C and vibrates the mask 11C. Since the vibration generating unit 40 does not need to vibrate the paper roller 23 (corresponding to the cleaning paper shaft in Patent Document 1), the mask 11C can be vibrated with a small force. Furthermore, since there is no need to vibrate the paper roller 23, the mask 11C can be vibrated at a higher frequency compared to the case of vibrating the paper roller 23. Moreover, in the screen printing machine 1, since the mask 11C is directly vibrated by the vibration generating unit 40, vibration is more easily transmitted to the mask 11C compared to the case of vibrating the mask frame 11A. Therefore, according to the screen printing machine 1, the mask 11C can be efficiently vibrated when cleaning the lower surface of the mask 11C.

[0047] According to the screen printing machine 1, the two side walls 71 of the side wall portion 21B are spaced apart in the front-rear direction, and the vibration generating portion 40 abuts between the two side walls 71 in the mask 11C in a top view. In this way, vibration is less likely to be transmitted to the regions outside the two side walls 71 in the mask 11C. For this reason, the cream solder 60 adhering to the outside of the two side walls 71 in the mask 11C is less likely to become solubilized, and it is possible to suppress the cream solder 60 (more specifically, the cream solder 60 adhering to the regions outside the two side walls 71 on the lower surface of the mask 11C) from falling into the screen printing machine 1 due to the vibration of the mask 11C.

[0048] According to the screen printing machine 1, by sucking the air in the through hole 31 in a state where the upper surface of the side wall portion 21B is in close contact with the lower surface of the mask 11C via the cleaning paper 22, the upper surface of the side wall portion 21B is adsorbed to the lower surface of the mask 11C via the cleaning paper 22. For this reason, the vibrating range in the mask 11C can be reliably limited by the range inside the side wall portion 21B.

[0049] According to the screen printing machine 1, since the air in the space 21C inside the annular side wall portion 21B is sucked, the solubilized cream solder 60 adhering to the region inside the side wall portion 21B on the lower surface of the mask 11C is likely to fall. For this reason, the lower surface of the mask 11C can be more reliably cleaned.

[0050] According to the screen printing machine 1, the cleaning head 14A has a fulcrum member 21D provided inside the space 21C of the side wall portion 21B (in other words, between the two side walls 71), and since the cleaning paper 22 passes under the fulcrum member 21D inside the space 21C of the side wall portion 21B, a space is formed between the lower surface of the mask 11C and the cleaning paper 22. For this reason, the cream solder 60 adhering to the lower surface of the mask 11C is likely to fall.

[0051] <Other embodiments> The technology disclosed by this specification is not limited to the embodiments described by the above description and drawings. For example, the following embodiments are also included in the technical scope disclosed by this specification.

[0052] (1) In the above embodiment, the case where the air in the through-hole 31 and the air in the space 21C inside the side wall portion 21B are sucked by the suction portion 14C was described as an example. In contrast, the through-hole 31 may not be formed in the side wall portion 21B, and only the air in the space 21C inside the side wall portion 21B may be sucked.

[0053] (2) In the above embodiment, the case where the air in the space 21C inside the side wall portion 21B is sucked was described as an example. However, the configuration may be such that the air in the space 21C is not sucked.

[0054] (3) In the above embodiment, the case where the side wall portion 21B is formed in an annular shape was described as an example. However, the side wall portion 21B may be configured to include only two side walls 71. In that case, since the space 21C inside the side wall portion 21B is in an open state, the air in the space 21C inside the side wall portion 21B is not sucked.

[0055] (4) In the above embodiment, the through-hole 31 was described as an example of the suction hole. However, the suction hole does not necessarily have to penetrate the side wall portion 21B.

[0056] (5) In the above embodiment, the case where the vibration generating portion 40 includes the ultrasonic generator 45 as the vibration generating source was described as an example. However, the vibration generating source is not limited to the ultrasonic generator 45. For example, the vibration generating source may be a sound wave generating device that generates sound waves with a lower frequency than ultrasonic waves, or a motor.

[0057] (6) In the above embodiment, the case where the moving unit that moves the cleaning head 14A and the vibration generating unit 40 synchronously is composed of two units, i.e., the first moving unit 14B and the second moving unit 40, has been described as an example. However, the cleaning head 14A and the vibration generating unit 40 may be moved by a single moving unit. For example, the cleaning head 14A may support the vibration generating unit 40, and the cleaning head 14A and the vibration generating unit 40 may be moved by the first moving unit 14B.

[0058] (7) The speed at which the cleaning head 14A and the vibration generating unit 40 are moved synchronously may be changed according to the circuit pattern formed on the mask 11C.

Explanation of Reference Numerals

[0059] 1: Screen printing machine 11C: Mask 14A: Cleaning head 14B: First moving unit (an example of a moving unit) 14C: Suction unit 21A: Bottom wall portion 21B: Side wall portion 21D: Fulcrum member 22: Cleaning paper (an example of a cleaning medium) 31: Through hole (an example of a suction hole) 40: Vibration generating unit 41: Second moving unit (an example of a moving unit) 60: Cream solder 71: Side wall P: Substrate

Claims

1. A screen printing machine for printing cream solder onto a substrate using a mask, comprising: a cleaning head for cleaning the lower surface of the mask using a cleaning medium; a vibration generating unit that contacts the upper surface of the mask and vibrates the mask; a moving unit that moves the cleaning head and the vibration generating unit synchronously; wherein the cleaning head has a bottom wall portion and side wall portions rising from the bottom wall portion; the side wall portions are two side walls spaced apart from each other in the moving direction of the cleaning head, and the wall surfaces of the two side walls intersect the moving direction; the vibration generating unit contacts between the two side walls of the mask in a top view; a plurality of suction holes are formed in the upper surface of the side wall portion; a screen printing machine comprising a suction unit for sucking air in the suction holes.

2. A screen printing machine for printing cream solder onto a substrate using a mask, comprising: a cleaning head for cleaning the lower surface of the mask using a cleaning medium; a vibration generating unit that contacts the upper surface of the mask and vibrates the mask; a moving unit that moves the cleaning head and the vibration generating unit synchronously; wherein the cleaning head has a bottom wall portion and side wall portions rising from the bottom wall portion; the side wall portions are two side walls spaced apart from each other in the moving direction of the cleaning head, and the wall surfaces of the two side walls intersect the moving direction; the vibration generating unit contacts between the two side walls of the mask in a top view; a screen printing machine, wherein the upper surfaces of the two side walls contact the lower surface of the mask via the cleaning medium.

3. The screen printing machine according to claim 2, wherein a plurality of suction holes are formed in the upper surface of the side wall portion; a screen printing machine comprising a suction unit for sucking air in the suction holes.

4. The screen printing machine according to claim 1 or claim 3, wherein the side wall portion is formed in an annular shape; a screen printing machine, wherein the suction unit also sucks air in the space inside the annular side wall portion.

5. A screen printing machine for printing cream solder onto a substrate using a mask, comprising: a cleaning head for cleaning the lower surface of the mask using a cleaning medium; a vibration generating unit that contacts the upper surface of the mask and vibrates the mask; A moving part that moves the cleaning head and the vibration generating part in synchronization, comprising: The cleaning head has a bottom wall part and side wall parts rising from the bottom wall part, The side wall parts are two side walls spaced apart from each other in the moving direction of the cleaning head, and have two side walls whose wall surfaces intersect the moving direction, The vibration generating part abuts between the two side walls in the mask in a top view, The side wall parts are formed in an annular shape, A screen printing machine comprising a suction part that sucks air in the space inside the annular side wall part. **Claim 6**: A screen printing machine for printing cream solder on a substrate using a mask, a cleaning head that cleans the lower surface of the mask using a cleaning medium, a vibration generating part that abuts on the upper surface of the mask and vibrates the mask, a moving part that moves the cleaning head and the vibration generating part in synchronization, comprising: The cleaning head has a bottom wall part and side wall parts rising from the bottom wall part, The side wall parts are two side walls spaced apart from each other in the moving direction of the cleaning head, and have two side walls whose wall surfaces intersect the moving direction, The vibration generating part abuts between the two side walls in the mask in a top view, The cleaning head has a fulcrum member provided between the two side walls, A screen printing machine in which the cleaning medium passes under the fulcrum member between the two side walls.

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