Measurement System and Measurement Unit

Abstract

To provide a measurement system and a measurement unit that can appropriately use the measurement unit based on calibration information.SOLUTION: A measurement system equipped with a measurement unit J that is temporarily placed in production equipment (printing inspection equipment M3, component mounting equipment M4, M5) and measures physical quantities related to the production equipment, includes: a storage unit that stores at least calibration information related to calibration of the measurement unit J; a transmission unit that transmits information in a non-contact manner (substrate recognition camera 29, substrate illumination 29a, photodetector 40, image display means 41); and a control unit that controls the measurement of physical quantities related to the production equipment based on the calibration information.SELECTED DRAWING: Figure 8

Description

Technical Field

[0001] The present invention relates to a measurement system and a measurement unit including a measurement unit for measuring a physical quantity.

Background Art

[0002] In the maintenance of production equipment such as a component mounting device for mounting components on a substrate, a method of arranging a measurement unit on the production equipment to measure a physical quantity for maintenance is known (see, for example, Patent Document 1). Patent Document 1 describes a method of transporting a measurement unit (fixture) including an acceleration sensor or a load cell for measuring a physical quantity such as vibration or load inside a component mounting device instead of a substrate to measure the physical quantity. The measurement unit and the component mounting device described in Patent Document 1 each include wireless communication means, and transmit and receive measurement results and the like by wireless communication.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, although a measurement unit for measuring a physical quantity needs to be calibrated regularly to ensure the quality of products produced by production equipment, in the prior art including Patent Document 1, there is no disclosure regarding the calibration of the measurement unit, and there is room for further improvement in ensuring the quality using the measurement unit.

[0005] Therefore, an object of the present invention is to provide a measurement system and a measurement unit that can appropriately use the measurement unit based on calibration information.

Means for Solving the Problems

[0006] The measurement system of the present invention temporarily arranges a work a substrate for processing to manufacture a mounting substrate in a transport section of production equipment, and includes a measurement unit for measuring a physical quantity related to the production equipment. The measurement unit includes a storage unit that stores at least calibration information related to calibration of the measurement unit, a transmission unit that transmits information in a non-contact manner, and a control unit that controls measurement of the physical quantity based on the calibration information. The measurement unit is transported to a predetermined location by a transport belt included in the transport section to measure a physical quantity related to the production equipment and the storage unit is provided in the measurement unit, the transmission unit includes first transmission means and first reception means provided in the measurement unit, the first transmission means transmits at least the calibration information non-contact from the measurement unit to another transmission unit, the first reception means receives information non-contact from another transmission unit, the first transmission means is image display means for displaying an image, and the first reception means includes a photodetector provided with an optical sensor .

[0007] The measurement unit of the present invention includes a measurement unit for measuring a physical quantity, a storage unit that stores at least calibration information related to calibration of the measurement unit, a control unit that controls the measurement unit based on the calibration information, a first receiving means for receiving information from the outside in a non-contact manner, and a first transmitting means for transmitting at least the physical quantity to the outside in a non-contact manner. A work a substrate for processing to manufacture a mounting substrate is temporarily arranged in a transport section of production equipment, and is transported to a predetermined location by a transport belt included in the transport section, and the physical quantity related to the production equipment is measured by the measurement unit and the first transmission means is image display means for displaying an image, and the first reception means includes a photodetector provided with an optical sensor .

Advantages of the Invention

[0008] According to the present invention, the measurement unit can be appropriately used based on calibration information.

Brief Description of the Drawings

[0009]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Embodiments for Carrying Out the Invention

[0010] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. The configurations, shapes, etc. described below are illustrative for the purpose of explanation, and can be appropriately changed according to the specifications of the component mounting line, component mounter, inspection device, management computer, and measurement unit. Hereinafter, corresponding elements in all the drawings are denoted by the same reference numerals, and redundant explanations are omitted. In FIG. 2 and a part described later, as two axial directions orthogonal to each other in the horizontal plane, the X-axis in the substrate conveyance direction (the left-right direction in FIG. 2) and the Y-axis orthogonal to the substrate conveyance direction (the left-right direction in FIG. 3) are shown. In FIG. 2 and a part described later, the Z-axis (the up-down direction in FIG. 2) is shown as the height direction orthogonal to the horizontal plane.

[0011] First, referring to FIG. 1, the configuration of the component mounting line 1 will be described. The component mounting line 1 includes, in order from the upstream in the substrate conveyance direction, a substrate supply device M1, a solder printing device M2, a printing inspection device M3, component mounting devices M4 to M6, a mounting inspection device M7, a reflow device M8, a post-reflow inspection device M9, and a substrate recovery device M10. Each production facility is connected to a management computer 3 via a communication network 2, either wired or wireless, and data is transmitted and received between production facilities or between a production facility and the management computer 3.

[0012] Each production facility has a substrate conveyance mechanism including a belt conveyor or the like, and manufactures a mounted substrate while conveying the substrate from the upstream to the downstream by the substrate conveyance mechanism of each production facility. Each production facility has a function of continuously conveying substrates with different widths or a measurement unit J (see FIG. 4) described later by changing the conveyance width of the substrate conveyance mechanism according to an instruction from the management computer 3.

[0013] In FIG. 1, the substrate supply device M1 supplies a substrate taken out from a rack storing a plurality of substrates, a substrate carried in from the upstream substrate inlet La, or the measurement unit J to the downstream production facility. The solder printing device M2 prints solder on the substrate to be mounted through a screen mask. The printing inspection device M3 inspects the state of the solder printed on the substrate by a solder inspection camera. The component mounting devices M4 to M6 mount components on the substrate.

[0014] The mounting inspection device M7 inspects the state of the components mounted on the substrate by a component inspection camera. The reflow device M8 heats the substrate carried into it and solder-joins the electrode portions of the substrate and the terminals of the components. The post-reflow inspection device M9 inspects the state of the components solder-joined to the substrate by a post-reflow inspection camera. The substrate recovery device M10 receives the substrate from the upstream production facility and stores it in a rack, or receives the substrate or the measurement unit J from the upstream production facility and discharges it from the downstream substrate outlet Lb.

[0015] In FIG. 1, the solder printing apparatus M2, the component mounting apparatuses M4 to M6, and the reflow apparatus M8 are production facilities (processing apparatuses) for processing a substrate (workpiece). Further, the printing inspection apparatus M3, the mounting inspection apparatus M7, and the post-reflow inspection apparatus M9 are production facilities (inspection apparatuses) having cameras (solder inspection camera, component inspection camera, post-reflow inspection camera) for imaging the substrates processed by the processing apparatuses. The inspection results (printing state, component mounting state, solder joint state) by the inspection apparatuses are transmitted to the management computer 3.

[0016] Next, with reference to FIG. 2, the configurations and functions of the printing inspection apparatus M3, the mounting inspection apparatus M7, and the post-reflow inspection apparatus M9 will be described. Note that since the inspection targets of these inspection apparatuses are different, the detailed configurations are different for each inspection apparatus. However, since they are common in that the inspection targets are imaged by cameras and optically recognized, they will be described in the same drawing.

[0017] In FIG. 2, an inspection processing apparatus 10 is built in the base 11. The inspection processing apparatus 10 controls various work operations and processes in these inspection apparatuses, such as substrate conveyance operations, imaging processes, recognition processes of images obtained by imaging, and inspection / measurement processes based on the images. On the upper surface of the base 11, a substrate conveyance mechanism 12 is arranged. The substrate conveyance mechanism 12 runs a conveyance belt to convey the inspection target substrate 4 (workpiece) or the measurement unit J carried in from the upstream and positions it at the inspection work position by the inspection head 13 described below. That is, the substrate conveyance mechanism 12 is a conveyance unit that conveys the workpiece (substrate 4).

[0018] The inspection head 13 is configured by providing an illumination unit 13b at the lower end of the lens barrel part 13a, and horizontally moves in the X-axis direction and the Y-axis direction by an inspection head movement mechanism 14 composed of an XY table. As a result, it is possible to position the inspection camera 15 built in the lens barrel part 13a with the imaging direction facing downward above a desired part of the substrate 4. The illumination unit 13b provided at the lower end of the lens barrel part 13a incorporates inspection illumination 16. When imaging is performed by the inspection camera 15, the inspection illumination 16 is turned on under illumination conditions suitable for the imaging target. That is, the inspection illumination 16 is the illumination for the inspection camera 15 (camera) that images the substrate 4 (workpiece).

[0019] Next, with reference to FIG. 3, the configuration and functions of the component mounting devices M4 to M6 will be described. The component mounting devices M4 to M6 hold components with component holding nozzles 27b and mount them on the mounting points of the substrate 4. The base 21 incorporates a mounting processing device 20. The mounting processing device 20 has functions of controlling the working operations of the component mounting devices M4 to M6 and performing recognition processing on images acquired by cameras provided in each device. For example, operations such as substrate conveyance operations, component mounting operations by the component mounting mechanism, and recognition processing by the component recognition camera 26 and the substrate recognition camera 29 are controlled by the mounting processing device 20.

[0020] On the upper surface of the base 21, a substrate conveyance mechanism 25 having a pair of conveyance belts is arranged along the X-axis, which is the substrate conveyance direction (in the direction perpendicular to the paper surface in FIG. 3). The substrate conveyance mechanism 25 has a function of conveying the work substrate 4 (workpiece) or the measurement unit J along the X-axis by running the conveyance belts. The substrate conveyance mechanism 25 receives the substrate 4 or the measurement unit J from the upstream production facility and positions it at the mounting work position. Also, the substrate conveyance mechanism 25 conveys the component-mounted substrate 4 or the measurement unit J, on which components have been mounted, to the downstream production facility. That is, the substrate conveyance mechanism 25 is a conveyance unit that conveys the workpiece (substrate 4) or the measurement unit J.

[0021] In FIG. 3, a substrate lower receiving portion 24 is provided between a pair of transport belts of the substrate transport mechanism 25 on the upper surface of the base 21. The substrate lower receiving portion 24 is configured to raise and lower a plurality of support pins 24a by a support pin lifting mechanism 24b. In a state where the substrate 4 is carried into the mounting work position, the support pin 24a is raised by driving the support pin lifting mechanism 24b, and the lower surface of the substrate 4 is supported by the plurality of support pins 24a.

[0022] At both ends of the base 21 in the Y-axis direction, component supply carts 22 are respectively set. A tape feeder 23, which is a component supply unit, is mounted on the upper surface of the cart 22. The tape feeder 23 feeds a carrier tape containing components to be mounted on the substrate 4 in pitch, and supplies the components to a component pickup position by a component mounting mechanism described below.

[0023] Here, the configuration of the component mounting mechanism will be described. In FIG. 3, a mounting head moving portion 28 is arranged along the Y-axis on a frame portion (not shown) supported by the base 21. A mounting head 27 is mounted on the mounting head moving portion 28 via a moving member 27a. A component holding nozzle 27b for sucking and holding a component is mounted on the lower end portion of the mounting head 27. The mounting head 27 is provided with a nozzle lifting mechanism for raising and lowering the component holding nozzle 27b up and down. By driving the mounting head moving portion 28, the mounting head 27 moves in the X-axis direction and the Y-axis direction.

[0024] Thereby, the mounting head 27 moves between the substrate 4 positioned and held by the substrate transport mechanism 25 and the tape feeder 23, and mounts the component taken out from the tape feeder 23 on the substrate 4 by the component holding nozzle 27b provided at the lower end portion. In this way, the mounting head moving portion 28 moves the mounting head 27 that holds the component and mounts it on the substrate 4.

[0025] In FIG. 3, a component recognition camera 26 is arranged between the substrate transfer mechanism 25 and the tape feeder 23. By positioning the mounting head 27 that has picked up a component from the tape feeder 23 above the component recognition camera 26, the component recognition camera 26 images the component held by the mounting head 27 from below. Thereby, the component held by the mounting head 27 is recognized, and the identification and detection of misalignment of the component are performed.

[0026] A substrate recognition camera 29 is arranged on the moving member 27a with its imaging direction facing downward. The substrate recognition camera 29 incorporates a substrate illumination 29a that illuminates the substrate 4 (workpiece). When imaging by the substrate recognition camera 29, the substrate illumination 29a is turned on under illumination conditions suitable for the imaging target. That is, the substrate illumination 29a is the illumination for the substrate recognition camera 29 (camera) that images the substrate 4 (workpiece).

[0027] In FIG. 3, by moving the substrate recognition camera 29 together with the mounting head 27 and positioning it above the substrate 4, the substrate recognition camera 29 images the substrate 4 held by the substrate transfer mechanism 25. By recognizing the reference mark (not shown) of the substrate 4 obtained by this imaging, the position of the substrate 4 can be detected. In component mounting by the component mounting apparatuses M4 to M6, based on the position detection result of the substrate 4 obtained in this way, position correction of the substrate 4 by the substrate transfer mechanism 25 and correction of the component mounting operation by the component mounting mechanism are performed.

[0028] Next, referring to FIG. 4, a measurement unit J that is temporarily arranged in the production equipment included in the component mounting line 1 and measures physical quantities related to the production equipment will be described. The measurement unit J is placed by an operator on the transport units (substrate transport mechanisms 12 and 25) of the production equipment to be measured. Alternatively, the measurement unit J is carried in from the substrate loading port La of the substrate supply device M1 and is transported to the measurement position of the production equipment to be measured while being sequentially transferred by the substrate transport mechanism (transport unit) of the production equipment including the processing device and the inspection device. That is, the measurement unit J is transported to a predetermined location (measurement position) by the transport unit that transports the workpiece (substrate 4) and measures the physical quantities related to the production equipment. Further, the measurement unit J measures physical quantities even during transportation by the transport unit.

[0029] On the upper surface of the main body 30 of the measurement unit J, alignment marks 31 used for position correction at the measurement position are arranged. In this example, the alignment marks 31 are arranged at two locations on the upper surface. Inside the main body 30, a measurement processing device 32 and a battery 33 are arranged. The measurement processing device 32, the measurement unit, the transmission unit (first transmission means), the reception unit (first reception means), and the indicator lamp included in the measurement unit J described later are supplied with power from the battery 33. On the front surface of the main body 30, a measurement camera 34 that images the components of the substrate transport mechanism and the transport belt to detect the presence or absence of distortion, scratches, dust, etc. of the structure is arranged. The measurement camera 34 incorporates lighting for illuminating the imaging target. In this example, two measurement cameras 34 are arranged side by side corresponding to a pair of transport belts.

[0030] In FIG. 4, on the upper surface of the main body 30, a temperature measurement unit 35 equipped with a temperature sensor and the like, and a load measurement unit 36 equipped with a load cell and the like are arranged. The load measurement unit 36 measures the load applied to the component when the component holding nozzle 27b mounted on the mounting head 27 mounts the component on the substrate 4. Inside the main body 30, an acceleration measurement unit 37 equipped with an acceleration sensor and the like, a rotation measurement unit 38 equipped with a gyro sensor and the like, and a sound measurement unit 39 equipped with a microphone and the like are arranged. The acceleration measurement unit 37 measures the conveyance speed, vibration, and the like. The rotation measurement unit 38 measures vibration, the inclination of the conveyance unit, and the like. The sound measurement unit 39 measures the magnitude of the sound generated inside the apparatus.

[0031] The measurement results by the measurement camera 34, the temperature measurement unit 35, the load measurement unit 36, the acceleration measurement unit 37, the rotation measurement unit 38, and the sound measurement unit 39 are transmitted to the measurement processing device 32, and various physical quantities are calculated through information processing in the measurement processing device 32. That is, the measurement camera 34, the temperature measurement unit 35, the load measurement unit 36, the acceleration measurement unit 37, the rotation measurement unit 38, and the sound measurement unit 39 are constituent elements that constitute a measurement unit 42 (see FIG. 7) for measuring physical quantities related to the production equipment. Note that, depending on the configuration of the production equipment and the physical quantities to be measured, constituent elements other than the above are also arranged in the measurement unit 42. Each constituent element of the measurement unit 42 is periodically calibrated to check the state and adjust the measurement value. As a result of the periodic calibration, calibration information regarding the calibration of the measurement unit J, such as the timing of the next periodic calibration and the calibration deadline, is recorded (stored) in the measurement processing device 32.

[0032] In FIG. 4, on the upper surface of the main body 30, a photodetector 40 equipped with an optical sensor such as a photodiode and an image display means 41 equipped with an organic EL panel, a liquid crystal panel, electronic paper, etc. are arranged. The photodetector 40 detects the blinking and illuminance change of the illumination (inspection illumination 16, substrate illumination 29a) of a camera (inspection camera 15, substrate recognition camera 29, etc.) that images the substrate 4 (workpiece). The detection result by the photodetector 40 is transmitted to the measurement processing device 32. The image display means 41 displays physical quantities measured by the measurement unit 42, calibration information stored in the measurement processing device 32, etc. in characters or numbers. Further, the image display means 41 displays an image in which the measurement processing device 32 encodes physical quantities, calibration information, etc. into a one-dimensional code or a two-dimensional code.

[0033] On the upper surface of the main body 30, an indicator lamp S that displays the state of the measurement unit J by lighting a lamp is arranged. In this example, a blue lamp SG, a yellow lamp SY, and a red lamp SR equipped with an LED or the like are arranged. The lighting and extinguishing of the indicator lamp S are controlled by the measurement processing device 32. For example, when there is still time until the calibration deadline of the measurement unit 42 and the measurement unit J can be used, the blue lamp SG is lit. When the measurement unit J can be used but the calibration deadline of the measurement unit 42 is approaching (for example, within two months of the calibration deadline), the yellow lamp SY is lit. When the calibration deadline of the measurement unit 42 has passed and the measurement unit J cannot be used, the red lamp SR is lit. Note that the number of lamps provided in the indicator lamp S and the display content are appropriately changed.

[0034] Next, with reference to FIGS. 5 to 7, the configuration of the control system of the component mounting line 1 will be described. Here, among the functions of the component mounting line 1, the measurement of physical quantities related to production equipment including a processing device or an inspection device that processes a work (substrate 4) using the measurement unit J, and the configuration related to the calibration management of the measurement unit J will be described. When measuring while transporting the measurement unit J with the devices on the component mounting line 1, the management computer 3 comprehensively manages the transportation of the measurement unit J and the like. Also, when directly mounting the measurement unit J on the production equipment for measurement, each production equipment executes measurement independently. Hereinafter, the configuration of the control system of each device when measuring physical quantities while transporting the measurement unit J on the component mounting line 1 will be described.

[0035] In FIG. 5, the management computer 3 includes a management storage unit 50, a management measurement control unit 51, and a management communication unit 52. The management storage unit 50 is a storage device and stores measurement-related data 50a, measurement collection data 50b, calibration management data 50c, and the like. The management communication unit 52 transmits and receives various information to and from each production equipment via the communication network 2. The management communication unit 52 collects the measurement data received by the production equipment from the measurement unit J and stores it in the management storage unit 50 as the measurement collection data 50b. The measurement-related data 50a stores control information including commands for measurement on the production equipment and measurement conditions to be stored in the measurement unit J. The management measurement control unit 51 transmits commands and control information to each production equipment at a predetermined timing based on the measurement-related data 50a.

[0036] The calibration management data 50c stores calibration information related to the calibration of the measurement unit J and the like in association with information identifying the measurement unit J. When the measurement unit J stores its own calibration information, the calibration information collected by the management communication unit 52 from the measurement unit J is stored. When the measurement unit J cannot store its own calibration information, the calibration result sent from a service company or the like that undertakes the calibration of the measurement unit J is stored. The calibration information includes the date and time when the calibration was performed, the pass / fail result, and the timing of the next calibration (calibration expiration date). When the calibration intervals (cycles) of the components of the measurement unit 42 are different, the calibration information stores the calibration results, calibration expiration dates, etc. for each component of the measurement unit 42 of the measurement unit J (see FIG. 10).

[0037] In FIG. 5, among the production facilities, the substrate supply device M1, the substrate recovery device M10, the solder printing device M2, and the reflow device M8 convey the measurement unit J by the substrate transfer mechanism based on commands transmitted from the management computer 3. Here, taking the substrate supply device M1 as an example, the configuration of the control system will be described. The substrate supply device M1 includes a transfer control unit 53, a substrate transfer mechanism 54, and a facility communication unit 55. The facility communication unit 55 transmits and receives various commands and information to and from the management computer 3 via the communication network 2.

[0038] The transfer control unit 53 controls the substrate transfer mechanism 54 based on commands from the management computer 3, receives the measurement unit J from the upstream, loads it, stops it at a predetermined position, and unloads it downstream. When the measurement camera 34 of the measurement unit J images the damage on the conveyor belt, when the measurement unit J stops at a predetermined position of the device adjacent to the upstream, the transfer control unit 53 circulates the conveyor belt of the substrate transfer mechanism 54 based on commands from the management computer 3 (see FIG. 8(b)).

[0039] In FIG. 5, the inspection apparatuses (print inspection apparatus M3, mounting inspection apparatus M7, post-reflow inspection apparatus M9) convey the measurement unit J by the substrate conveyance mechanism based on a command transmitted from the management computer 3, and also transmit and receive control information, calibration information, etc. to and from the measurement unit J in a non-contact manner. The inspection apparatus includes an inspection processing unit 10, a substrate conveyance mechanism 12, an inspection head movement mechanism 14, an inspection camera 15, inspection illumination 16, and an inspection communication unit 58.

[0040] The inspection processing unit 10 includes an inspection storage unit 56 and an inspection communication control unit 57. The inspection storage unit 56 is a storage device and stores measurement command data 56a, measurement received data 56b, etc. The inspection communication control unit 57 includes a transmission processing unit 57a, a reception processing unit 57b, and a decoding processing unit 57c as internal processing units. The inspection communication unit 58 transmits and receives various commands and information to and from the management computer 3 via the communication network 2.

[0041] In FIG. 6, the component mounting apparatuses M4 to M6 convey the measurement unit J by the substrate conveyance mechanism based on a command transmitted from the management computer 3, and also transmit and receive control information, calibration information, etc. to and from the measurement unit J in a non-contact manner. Further, the component mounting apparatuses M4 to M6 cause the physical quantities of the component mounting apparatuses M4 to M6 to be measured in conjunction with the measurement unit J. The component mounting apparatuses M4 to M6 include a mounting processing unit 20, a substrate conveyance mechanism 25, a substrate lower receiving unit 24, a tape feeder 23, a mounting head 27, a mounting head movement unit 28, a component recognition camera 26, a substrate recognition camera 29, a touch panel 66, and a mounting communication unit 67. The touch panel 66 has a display function for displaying an operation screen of the component mounting apparatuses M4 to M6 and an input function for inputting commands and various information by operating the displayed operation screen.

[0042] The mounting processing device 20 includes a mounting storage unit 60, a mounting control unit 61, a mounting communication control unit 62, a measurement determination processing unit 63, a load measurement processing unit 64, and a vibration measurement processing unit 65. The mounting storage unit 60 is a storage device that stores component data 60a, mounting data 60b, measurement command data 60c, measurement reception data 60d, measurement calibration data 60e, and the like. The mounting communication control unit 62, as an internal processing unit, includes a transmission processing unit 62a, a reception processing unit 62b, and a decoding processing unit 62c. The mounting communication unit 67 transmits and receives various commands and information to and from the management computer 3 via the communication network 2.

[0043] In FIG. 6, the component data 60a includes, for each type of component, the component name (type), the size of the component, and the like. The mounting data 60b includes, for each type of mounting substrate to be manufactured, the component name (type) of the component mounted on the substrate 4, the mounting position (XY coordinates), and the like. The mounting control unit 61 controls the substrate transfer mechanism 25, the substrate lower receiving unit 24, the tape feeder 23, the mounting head 27, the mounting head moving unit 28, the component recognition camera 26, and the substrate recognition camera 29 to execute a component mounting operation for mounting components on the substrate 4.

[0044] In FIG. 7, the measurement unit J includes a measurement processing device 32, a measurement camera 34, a temperature measurement unit 35, a load measurement unit 36, an acceleration measurement unit 37, a rotation measurement unit 38, a sound measurement unit 39, a photodetector 40, an image display means 41, and an indicator lamp S. The measurement processing device 32 includes a measurement storage unit 43, a measurement control unit 44, a measurement communication control unit 45, a physical quantity calculation unit 46, an image recognition processing unit 47, and a calibration processing unit 48. The measurement storage unit 43 is a storage device that stores control information data 43a, measurement result data 43b, measurement physical quantity data 43c, calibration information data 43d, and the like. The measurement communication control unit 45 includes a measurement reception processing unit 45a, an encoding processing unit 45b, and a measurement transmission processing unit 45c.

[0045] In FIGS. 5 and 6, the control systems for the inspection apparatuses (print inspection apparatus M3, mounting inspection apparatus M7, post-reflow inspection apparatus M9) to transmit and receive data to and from the measurement unit J in a non-contact manner, and the control systems for the component mounting apparatuses M4 to M6 to transmit and receive data to and from the measurement unit J in a non-contact manner are the same. Here, taking the component mounting apparatuses M4 to M6 as an example, the transmission and reception with the measurement unit J will be described, and the description of the transmission and reception between the inspection apparatus and the measurement unit J will be omitted. The measurement command data 60c (measurement command data 56a) stores control information including commands for the component mounting apparatuses M4 to M6 (inspection apparatus) to execute related to the measurement transmitted from the management computer 3, as well as measurement conditions to be stored in the measurement unit J.

[0046] In the measurement using the measurement unit J, first, the mounting processing apparatus 20 controls the substrate transfer mechanism 25 based on the commands included in the measurement command data 60c to transfer the measurement unit J to the mounting operation position (measurement position) and stop it (arrow c in FIG. 8(c)). Next, the mounting processing apparatus 20 images the alignment mark 31 arranged on the upper surface of the measurement unit J with the substrate recognition camera 29 to correct the position of the measurement unit J.

[0047] In FIGS. 6 and 7, when transmitting control information and the like to the measurement unit J, the mounting processing apparatus 20 moves the substrate illumination 29a above the photodetector 40 arranged on the upper surface of the measurement unit J (arrow d in FIG. 8(d)). In this state, the transmission processing unit 62a of the mounting communication control unit 62 modulates the digital signals such as commands and control information to be transmitted to the measurement unit J and blinks the substrate illumination 29a. The measurement reception processing unit 45a of the measurement communication control unit 45 demodulates the signal received by the photodetector 40 into a digital signal. The measurement reception processing unit 45a stores the demodulated commands and control information in the measurement storage unit 43 as control information data 43a.

[0048] In this way, the substrate illumination 29a (inspection illumination 16 of the inspection camera 15) of the substrate recognition camera 29 that images the workpiece (substrate 4) is the equipment-side light-emitting means (second transmission means) of the production equipment. Also, the photodetector 40 and the measurement reception processing unit 45a are the first reception means for receiving control information (control information data 43a) for controlling the measurement unit J from the outside (production equipment) in a non-contact manner. That is, the first reception means can communicate with the outside by visible light communication. Note that the light emitted by the substrate illumination 29a and the light received by the photodetector 40 are not limited to visible light, and may be infrared light or ultraviolet light.

[0049] In FIGS. 6 and 7, when receiving information such as physical quantities and calibration information transmitted from the measurement unit J, the mounting processing device 20 moves the substrate recognition camera 29 above the image display means 41 arranged on the upper surface of the measurement unit J. The encoding processing unit 45b of the measurement communication control unit 45 encodes information such as physical quantities and calibration information to be transmitted to the equipment side into a two-dimensional code. The measurement transmission processing unit 45c of the measurement communication control unit 45 causes the encoded two-dimensional code to be displayed on the image display means 41. Note that the image to be displayed on the image display means 41 may be a one-dimensional code or character information in addition to the two-dimensional code.

[0050] The reception processing unit 62b of the mounting communication control unit 62 causes the component recognition camera 26 to image an image such as the two-dimensional code displayed on the image display means 41. The decoding processing unit 62c of the mounting communication control unit 62 decodes the image information such as the imaged two-dimensional code into information such as physical quantities and calibration information, and stores it in the mounting storage unit 60 as measurement reception data 60d and measurement calibration data 60e. Note that when the amount of transmission is large and cannot be transmitted in one communication, the measurement communication control unit 45 causes the two-dimensional code to be displayed on the image display means 41 in multiple times, and the mounting communication control unit 62 combines the information obtained by decoding the received multiple two-dimensional codes and stores it as measurement reception data 60d and measurement calibration data 60e.

[0051] In this way, the image display means 41 for displaying an image is the first transmission means for non-contact transmission of at least physical quantities or calibration information from the measurement unit J to the external (production facility). Further, the substrate recognition camera 29 (inspection camera 15) for imaging the workpiece (substrate 4) of the production facility is the facility-side receiving means (second receiving means) for imaging the image displayed on the image display means 41.

[0052] That is, the image display means 41 (first transmission means) and the photodetector 40 (first receiving means) provided in the measurement unit J are transmission parts for mutually transmitting information in a non-contact manner with the external (production facility). Further, the substrate illumination 29a (inspection illumination 16) (second transmission means) provided outside the measurement unit J and the substrate recognition camera 29 (inspection camera 15) (second receiving means) are transmission parts for mutually transmitting information in a non-contact manner with the measurement unit J. That is, the first transmission means transmits information in a non-contact manner from the measurement unit J to another transmission part (second receiving means), and the first receiving means receives information in a non-contact manner from another transmission part (second transmission means). Further, the second receiving means receives the information transmitted from the first transmission means, and the second transmission means transmits information to the first receiving means.

[0053] Next, with reference to FIGS. 6 and 7, an example of measurement executed by the component mounting apparatuses M4 to M6 in conjunction with the measurement unit J will be described. The load measurement processing unit 64 of the mounting processing apparatus 20 controls the mounting head 27 and the mounting head moving unit 28 to execute load measurement processing using the measurement unit J held at the measurement position. First, the load measurement processing unit 64 moves the component holding nozzle 27b of the mounting head 27 to be measured above the load measurement unit 36 disposed on the upper surface of the measurement unit J. Next, the load measurement processing unit 64 lowers the component holding nozzle 27b to be measured from above to the load measurement unit 36.

[0054] The measurement control unit 44 of the measurement processing device 32 causes the measurement processing device 32 to store, as measurement result data 43b, the measurement result of the load applied at this time measured by the load measurement unit 36. The physical quantity calculation unit 46 of the measurement processing device 32 calculates physical quantities such as the maximum value of the load (maximum load value) from the measurement result of the load included in the measurement result data 43b, and stores it in the measurement storage unit 43 as measurement physical quantity data 43c. Thereafter, at a predetermined timing, physical quantities such as the maximum load value are encoded into a two-dimensional code and transmitted to the component mounting devices M4 to M6. The transmitted maximum load value is stored in the measurement reception data 60d. The load measurement processing unit 64 updates control parameters for the component mounting operations of the component mounting devices M4 to M6 based on the transmitted maximum load value and the like.

[0055] In FIGS. 6 and 7, the vibration measurement processing unit 65 controls the mounting head moving unit 28 to execute vibration measurement processing using the measurement unit J held by the substrate transfer mechanism 25. The vibration measurement processing unit 65 moves the mounting head 27 by simulating the component mounting operations in the component mounting devices M4 to M6. During that time, the measurement control unit 44 stores, as measurement result data 43b, the measurement results measured by the acceleration measurement unit 37, the rotation measurement unit 38, and the sound measurement unit 39. The physical quantity calculation unit 46 calculates physical quantities such as the maximum vibration amount (maximum amplitude), the maximum rotation amount, and the maximum volume from the measurement results, and stores them as measurement physical quantity data 43c.

[0056] Thereafter, the physical quantities related to the measured vibration are encoded into a two-dimensional code and transmitted to the component mounting devices M4 to M6, and stored in the measurement reception data 60d. Thus, in the vibration measurement processing, the vibration generated as the mounting head 27 moves is measured. The measurement results are used for determining the presence or absence of abnormalities in the component mounting devices M4 to M6 and the like. In the load measurement processing and the vibration measurement processing, the amount of data (measurement result data 43b) acquired by the measurement unit 42 becomes enormous. Therefore, by narrowing down to the physical quantities (measurement physical quantity data 43c) used for determining the presence or absence of abnormalities and updating control parameters by the physical quantity calculation unit 46, the necessary information can be transmitted to the component mounting devices M4 to M6 by a two-dimensional code in a short time.

[0057] Next, with reference to FIGS. 7 and 8, the measurement of various physical quantities measured while the measurement unit J is being transported by the transport unit (substrate transport mechanism) based on the control information including the measurement conditions stored in the control information data 43a will be described. The control information transmitted by the equipment-side light-emitting means (second transmission means) and the like is received by the photodetector 40 and stored in the control information data 43a in advance in the measurement unit J. The storage of the control information is performed, for example, before the measurement unit J is carried into the component mounting line 1, or at the timing before the start of transportation to the next production equipment after the measurement in the component mounting apparatuses M4 to M6 is completed.

[0058] In FIG. 8(d), after the measurement in the component mounting apparatus M4 is completed, the control information for the measurement during transportation to the component mounting apparatus M5 is transmitted by the substrate illumination 29a (second transmission means) of the component mounting apparatus M4 and stored in the control information data 43a. While the measurement unit J is being transported from the measurement position of the component mounting apparatus M4 to the measurement position of the component mounting apparatus M5 (arrow e in FIG. 8(e)), the thermometer 35 measures the temperature inside the apparatus. Also, the measurement camera 34 images the state of structures such as the rails of the substrate transport mechanism 25, the presence or absence of dust, etc. Further, the acceleration measurement unit 37, the rotation measurement unit 38, and the sound measurement unit 39 measure the vibration during transportation, the inclination due to the distortion of the substrate transport mechanism 25, the loudness of the sound, etc.

[0059] Also, while the substrate transport mechanism 25 of the component mounting apparatus M4 stops the measurement unit J at a predetermined position and the substrate transport mechanism 25 of the component mounting apparatus M5 circulates the transport belt, the measurement camera 34 images the state of the transport belt (scratches, presence or absence of dust, etc.) of the substrate transport mechanism 25 of the component mounting apparatus M5. The measurement control unit 44 stores the measurement results of the thermometer 35, the acceleration measurement unit 37, the rotation measurement unit 38, and the sound measurement unit 39, and the imaging results of the measurement camera 34 in the measurement result data 43b together with the measurement time and the imaging time.

[0060] In FIG. 7, the physical quantity calculation unit 46 calculates (extracts) the measured temperature and measurement time at a predetermined measurement interval, the maximum temperature and its measurement time, etc. from the measurement results of the thermometer measurement unit 35. Further, the physical quantity calculation unit 46 calculates the measurement time when the acceleration of the measurement unit J exceeds a predetermined value, the measured acceleration, the conveyance speed, etc. from the measurement results of the acceleration measurement unit 37. Further, the physical quantity calculation unit 46 calculates the measurement time when the inclination of the measurement unit J exceeds a predetermined value, the amount of inclination, the maximum amount of inclination and its measurement time, etc. from the measurement results of the rotation measurement unit 38.

[0061] Further, the physical quantity calculation unit 46 calculates the measurement time when the volume during conveyance exceeds a predetermined magnitude, the volume, the maximum volume and its measurement time, etc. from the measurement results of the sound measurement unit 39. The calculation results by the physical quantity calculation unit 46 are stored in the measured physical quantity data 43c. The image recognition processing unit 47 performs image recognition on the imaging results of the measurement camera 34 to detect defects such as distortion of structures such as the rails of the substrate conveyance mechanism 25, scratches on the conveyance belt, and dust. The defect detection results and detection times by the image recognition processing unit 47 are stored in the measured physical quantity data 43c.

[0062] When the measurement unit J stops at the measurement position of the component mounting apparatus M5, the information including the physical quantities stored in the measured physical quantity data 43c is encoded in a two-dimensional code and transmitted to the component mounting apparatus M5, and stored in the measurement reception data 60d. Note that when there is information indicating a defect in the measured physical quantities or imaging results, the component mounting apparatus M5 may instruct the measurement unit J to encode and transmit the measurement results and imaging images including the defects included in the measurement result data 43b in a two-dimensional code.

[0063] Next, referring to FIGS. 5 to 7, among the functions of the component mounting line 1, the management of the measurement unit J based on calibration information will be described. First, the measurement unit J that stores calibration information will be described. In FIG. 7, when the measurement unit J is calibrated by a service company or the like, calibration information including information on the components of the calibrated measurement unit 42, the calibration result, the expiration date of the calibration, etc. is stored in the measurement storage unit 43 as calibration information data 43d. The calibration processing unit 48 stores the calibration information input via the photodetector 40 (first receiving means) as calibration information data 43d in the measurement storage unit 43. That is, the calibration processing unit 48 has a function as an update unit that updates the calibration information included in the calibration information data 43d when the measurement unit 42 of the measurement unit J is calibrated.

[0064] When information is mutually transmitted between the measurement unit J and a service company or the like via the transmission unit (photodetector 40, image display means 41) of the measurement unit J, a maintenance device having other transmission units (second transmission means, second receiving means) is used. For example, the maintenance device includes an LED lamp or the like that transmits a signal by flashing light to the photodetector 40 (first receiving means) as the second transmission means. Also, the maintenance device includes a camera or the like that captures an image such as a two-dimensional code displayed on the image display means 41 as the second receiving means. That is, the maintenance device includes a second transmission means and a second receiving means (other transmission units) provided outside the measurement unit J, and mutually transmits information with the measurement unit J in a non-contact manner.

[0065] In FIG. 7, the calibration processing unit 48 of the measurement unit J executes calibration management processing of the measurement unit J based on the calibration information included in the calibration information data 43d in the preparation processing executed immediately after the power-on of the measurement unit J. As calibration management processing, the calibration processing unit 48 executes calibration state determination processing, calibration state notification processing, measurement limit processing, calibration state transmission processing, etc.

[0066] In the calibration status determination process, the calibration processing unit 48 determines whether the measurement unit J is in the expiration margin state, the expiration approaching state, or the expiration exceeded state based on the latest calibration information included in the calibration information data 43d. For example, if all components of the measurement unit 42 have more than two months until the expiration date of calibration, the calibration processing unit 48 determines that it is in the expiration margin state.

[0067] Also, if any of the components of the measurement unit 42 has less than two months until the expiration date, the calibration processing unit 48 determines that it is in the expiration approaching state and that calibration is required before the expiration date. Further, if any of the components of the measurement unit 42 has passed the expiration date, the calibration processing unit 48 determines that it is in the expiration exceeded state and that calibration is required immediately. That is, the calibration processing unit 48 has a function as a determination unit that determines whether calibration of the measurement unit 42 of the measurement unit J is necessary based on the calibration information included in the calibration information data 43d.

[0068] In FIG. 7, in the calibration status notification process, when the calibration processing unit 48 determines that the measurement unit J is in the expiration margin state, it turns on the blue lamp SG of the indicator lamp S. Also, when the calibration processing unit 48 determines that the measurement unit J is in the expiration approaching state, it turns on the yellow lamp SY of the indicator lamp S. Further, when the calibration processing unit 48 determines that the measurement unit J is in the expiration exceeded state, it turns on the red lamp SR of the indicator lamp S. Thereby, an operator who sees the lighting of the indicator lamp S can know whether calibration of the measurement unit J is necessary or whether it can be used for measurement.

[0069] Note that the calibration processing unit 48 may display on the image display means 41 in characters or symbols (for example, "〇", "△", "×") that the measurement unit J is in the expiration margin state, the expiration approaching state, or the expiration exceeded state. In this way, the indicator lamp S and the image display means 41 have a function as a notification unit that notifies and prompts calibration of the measurement unit J when it is determined in the calibration processing unit 48 (determination unit) that calibration of the measurement unit 42 of the measurement unit J is necessary (such as the expiration approaching state, the expiration exceeded state, etc.).

[0070] In FIG. 7, in the measurement limit process, when the calibration processing unit 48 determines that the measurement unit J is in an expired state, it restricts the function of the measurement control unit 44 so that the components of the measurement unit 42 that have passed the calibration deadline do not perform measurements. As a result, in the measurement unit J, the function of the measurement unit 42 whose calibration expiration date has passed is restricted until the calibration is completed and the calibration information is updated. That is, when it is determined in the calibration processing unit 48 (judgment unit) that calibration of the measurement unit 42 of the measurement unit J is necessary, the measurement control unit 44 (control unit) controls to restrict the use of the measurement unit 42 of the measurement unit J.

[0071] For example, when the calibration expiration date of the thermometer measurement unit 35 has passed, the function of temperature measurement in the measurement unit J is restricted. Thereby, it is possible to prevent performing temperature measurement using the measurement unit J whose expiration date has passed by mistake and performing quality control of the mounting substrate based on the measurement result. Further, when the calibration of the thermometer measurement unit 35 is completed, the calibration information of the measurement unit J included in the calibration information data 43d is updated by the calibration processing unit 48 (update unit). Then, the measurement control unit 44 (control unit) releases the restriction on the use of the measurement unit J based on the updated calibration information. That is, the temperature measurement function of the measurement unit J becomes available again.

[0072] In FIGS. 5 to 7, in the calibration state transmission process, the calibration processing unit 48 transmits the calibration state (expiration margin state, expiration approaching state, expiration exceeded state) of the measurement unit J or the calibration information included in the calibration information data 43d to the outside (production apparatus) via the image display means 41 (first transmission means). That is, the substrate recognition camera 29 of the component mounting apparatuses M4 to M6 or the inspection camera 15 (second reception means) of the inspection apparatus receives the calibration state or calibration information from the image display means 41 (first transmission means).

[0073] More specifically, the first transmission means transmits the calibration information stored in the measurement storage unit 43 of the measurement unit J from the measurement unit J to another transmission unit (second reception means) in a non-contact manner, and the second reception means receives the calibration information transmitted from the first transmission means. The received calibration state or calibration information is stored in the implementation storage unit 60 as measurement calibration data 60e, and is also transmitted to the management computer 3 and stored in the management storage unit 50 as calibration management data 50c.

[0074] As described above, the measurement unit J of the present embodiment includes a measurement unit 42 that measures a physical quantity, a storage unit (measurement storage unit 43) that stores at least calibration information related to calibration of the measurement unit 42, a control unit (measurement control unit 44) that controls the measurement unit 42 based on the calibration information, a first reception means (photodetector 40) that receives information from the outside (production equipment) in a non-contact manner, and a first transmission means (image display means 41) that transmits at least the physical quantity to the outside in a non-contact manner. Thereby, the measurement unit J can be appropriately used based on the calibration information.

[0075] Next, with reference to FIG. 6, the processing related to the measurement using the measurement unit J in the component mounting apparatuses M4 to M6 that have received the calibration information from the measurement unit J will be described. Here, it is assumed that the measurement unit J has stopped at the measurement position of the component mounting apparatus M4, and calibration information has been transmitted from the measurement unit J and stored in the implementation storage unit 60 as measurement calibration data 60e (FIG. 8(d)). That is, the transmission of the calibration information from the measurement unit J is completed before the measurement using the measurement unit J in the component mounting apparatus M4.

[0076] In FIG. 6, the measurement determination processing unit 63 executes calibration state determination processing for determining that the measurement unit J is in any one of a deadline margin state, a deadline approaching state, and a deadline exceeded state based on the calibration information included in the measurement calibration data 60e. That is, the measurement determination processing unit 63 has a function as a determination unit that determines whether calibration of the measurement unit 42 of the measurement unit J is necessary based on the calibration information. Thereafter, the measurement determination processing unit 63 executes calibration state notification processing for displaying the calibration state of the measurement unit J on the touch panel 66 of the component mounting apparatus M4. Further, in the measurement unit J determined to be in the deadline exceeded state, the measurement determination processing unit 63 executes measurement restriction processing for controlling the component mounting apparatus M4 so that measurement using the function of the measurement unit 42 whose calibration expiration date has passed is not performed.

[0077] Here, with reference to FIG. 9, an example of a normal notification screen 70 that the measurement determination processing unit 63 displays on the touch panel 66 when the measurement unit J is in the deadline margin state will be described. A comment display frame 71 and a calibration information display frame 72 are set on the normal notification screen 70. In the comment display frame 71, it is displayed that all components of the measurement unit 42 of the measurement unit J stopped at the measurement position of the component mounting apparatus M4 are within the calibration expiration date and can be used normally, and that measurement will start soon.

[0078] In the calibration information display frame 72, items measurable by the measurement unit 42 provided in the measurement unit J, the calibration expiration dates of the respective components, and the calibration states of the respective components are displayed. In this example, in the items of the calibration information display frame 72, it is displayed that "camera" is measurement using the measurement camera 34, "temperature" is the temperature measurement unit 35, "load" is the load measurement unit 36, "acceleration" is the acceleration measurement unit 37, "rotation" is the rotation measurement unit 38, and "sound" is measurement using the sound measurement unit 39.

[0079] The expiration date of the calibration information display frame 72 shows the year, month, and day of the calibration expiration date. Components of the measurement unit 42 with "-" displayed in the expiration date indicate that regular calibration is not required. That is, the measurement camera 34 does not require regular calibration. Components of the measurement unit 42 with "〇" displayed in the calibration status of the calibration information display frame 72 mean that there is a margin of a predetermined period (e.g., two months) or more from the expiration date or that regular calibration is not required. When the measurement unit J is in the margin state, the measurement determination processing unit 63 does not restrict the load measurement processing by the load measurement processing unit 64 and the vibration measurement processing by the vibration measurement processing unit 65. That is, after the normal notification screen 70 is displayed on the touch panel 66, the load measurement processing or the vibration measurement processing is started.

[0080] Next, with reference to FIG. 10, an example of the caution notification screen 73 that the measurement determination processing unit 63 causes to be displayed on the touch panel 66 when the measurement unit J is in the approaching expiration state will be described. On the caution notification screen 73, similar to the normal notification screen 70, a comment display frame 71 and a calibration information display frame 72 are set. In the comment display frame 71, it is displayed that some components of the measurement unit 42 of the measurement unit J stopped at the measurement position of the component mounting apparatus M4 are within the expiration date but the expiration date of calibration is approaching, and that measurement can be normally performed and measurement will start soon.

[0081] Components of the measurement unit 42 with "△" displayed in the calibration status of the calibration information display frame 72 are in a state approaching the expiration date with less than a predetermined period (e.g., two months) until the expiration date and no margin, meaning that calibration is required before the expiration date. In this example, the temperature measurement unit 35 and the load measurement unit 36 have no margin until the expiration date and arrangements for calibration are necessary. When the measurement unit J is in the approaching expiration state, the measurement determination processing unit 63 does not restrict the load measurement processing by the load measurement processing unit 64 and the vibration measurement processing by the vibration measurement processing unit 65. That is, after the normal notification screen 70 is displayed on the touch panel 66, the load measurement processing or the vibration measurement processing is started.

[0082] Next, with reference to FIG. 11, an example of a warning notification screen 74 that the measurement determination processing unit 63 causes to be displayed on the touch panel 66 when the measurement unit J is in an expired state will be described. On the warning notification screen 74, similar to the normal notification screen 70, a comment display frame 71 and a calibration information display frame 72 are set. In addition, an all-items measurement start button 75, a guaranteed-items measurement start button 76, and a measurement stop button 77 are set. In the comment display frame 71, it is displayed that some functional elements of the measurement unit 42 of the measurement unit J stopped at the measurement position of the component mounting device M4 have exceeded the expiration date of calibration and that calibration is necessary. Further, in the comment display frame 71, it is displayed that the items that have exceeded the expiration date are not guaranteed in measurement accuracy and that the subsequent measurement process should be selected.

[0083] The components of the measurement unit 42 in which "×" is displayed in the calibration state of the calibration information display frame 72 are in an expired state exceeding the expiration date, meaning that calibration is required immediately. In this example, the temperature measurement unit 35 and the load measurement unit 36 have exceeded the expiration date. When the all-items measurement start button 75 is operated, measurement of all items is performed, including items whose measurement accuracy is not guaranteed. That is, the measurement determination processing unit 63 does not restrict the load measurement processing by the load measurement processing unit 64 and the vibration measurement processing by the vibration measurement processing unit 65. Then, the measurement control unit 44 of the measurement unit J releases the restriction on the functions of the measurement unit 42 whose calibration expiration date has passed and executes the measurement.

[0084] On the other hand, when the guaranteed-items measurement start button 76 is operated, measurement is performed only on items whose measurement accuracy is guaranteed. In this example, measurement other than measurement using the temperature measurement unit 35 and the load measurement unit 36 is performed. That is, the measurement determination processing unit 63 restricts the load measurement processing by the load measurement processing unit 64. Also, when the measurement stop button 77 is operated, measurement of all items is not performed. That is, the measurement determination processing unit 63 restricts the load measurement processing by the load measurement processing unit 64 and the vibration measurement processing by the vibration measurement processing unit 65. Thereafter, the measurement unit J is carried out toward the downstream component mounting device M5.

[0085] In this way, when it is determined in the determination unit (measurement determination processing unit 63) that calibration of the measurement unit 42 of the measurement unit J is necessary (expiration approaching state, expiration exceeded state), the touch panel 66 of the component mounting device M4 functions as a notification unit that notifies (displays the caution notification screen 73 and the warning notification screen 74) to prompt calibration of the measurement unit 42 of the measurement unit J. Also, when it is determined in the determination unit (measurement determination processing unit 63) that calibration of the measurement unit 42 of the measurement unit J is necessary, the control unit (measurement determination processing unit 63) controls to restrict the measurement of the physical quantity using the measurement unit 42 of the measurement unit J.

[0086] In this way, the component mounting line 1 equipped with the measurement unit J that is temporarily arranged in the production facility and measures the physical quantity related to the production facility includes a storage unit (mounting storage unit 60) that stores at least calibration information regarding calibration of the measurement unit J, a transmission unit (first transmission means, first reception means, second transmission means, second reception means) that transmits information without contact, and a control unit (measurement determination processing unit 63) that controls the measurement of the physical quantity related to the production facility based on the calibration information, thereby constituting a measurement system. Accordingly, the physical quantity related to the production facility can be measured by appropriately using the measurement unit J based on the calibration information.

[0087] Next, with reference to FIGS. 8 to 11 along the flow of FIG. 12, a method for measuring the physical quantity related to the production facility using the measurement unit J in the component mounting line 1 will be described. Here, an example will be described in which the physical quantity related to the component mounting device M4 (production facility) is measured by the measurement unit J conveyed within the component mounting line 1. In FIG. 12, the substrate transfer mechanism 25 of the component mounting device M4 carries in the measurement unit J from the printing inspection device M3 (ST1) and stops it at the measurement position (ST2) (arrow c in FIG. 8(c)).

[0088] In FIG. 12, next, the calibration information stored in the measurement unit J is transmitted to the component mounting apparatus M4 in a non-contact manner by the transmission unit (substrate recognition camera 29, substrate illumination 29a, photodetector 40, image display means 41) (ST3: calibration information transmission processing step). The transmitted calibration information is stored in the mounting storage unit 60 as measurement calibration data 60e. Next, the measurement determination processing unit 63 determines the calibration state of the measurement unit 42 of the measurement unit J based on the calibration information included in the measurement calibration data 60e (ST4: calibration state determination step).

[0089] If the measurement unit J is determined to be in the expiration margin state in the calibration state determination step (ST4), the measurement determination processing unit 63 causes the touch panel 66 to display a normal notification screen 70 (FIG. 9) (ST5: normal notification step). Also, if the measurement unit J is determined to be in the approaching expiration state in the calibration state determination step (ST4), the measurement determination processing unit 63 causes the touch panel 66 to display a caution notification screen 73 (FIG. 10) (ST6: caution notification step). Further, if the measurement unit J is determined to be in the expired state in the calibration state determination step (ST4), the measurement determination processing unit 63 causes the touch panel 66 to display a warning notification screen 74 (FIG. 11) (ST7: warning notification step).

[0090] In FIG. 12, if the all-items measurement start button 75 or the guaranteed-items measurement start button 76 is operated on the warning notification screen 74 after the normal notification step (ST5), after the caution notification step (ST6), or after the warning notification step (ST7) (Yes in ST8), then measurement processing such as load measurement processing by the load measurement processing unit 64 and vibration measurement processing by the vibration measurement processing unit 65 is executed in conjunction with the measurement unit 42 of the measurement unit J (ST9: measurement processing step). Note that when the guaranteed-items measurement start button 76 is operated on the warning notification screen 74, measurement is performed only on items for which measurement accuracy is guaranteed.

[0091] Next, the transmission unit (substrate recognition camera 29, substrate illumination 29a, photodetector 40, image display means 41) non - contact transmits the measurement results (such as measured physical quantities) stored in the measurement unit J to the component mounting device M4 (ST10: measurement result transmission processing step). The transmitted measurement results are stored in the mounting storage unit 60 as measurement reception data 60d.

[0092] In FIG. 12, next, the substrate transfer mechanism 25 of the component mounting device M4 carries out the measurement unit J to the downstream component mounting device M5 (ST11: carrying - out step) (arrow e in FIG. 8(e)). Also, when the measurement stop button 77 is operated on the warning notification screen 74 after the warning notification step (ST7) (No in ST8), the measurement processing step (ST9) and the measurement result transmission processing step (ST10) are skipped and the carrying - out step (ST11) is executed. Thus, based on the calibration information, the measurement unit J can be appropriately used to measure the physical quantities related to the production equipment.

[0093] Next, referring to FIG. 5, another embodiment of the measurement system (component mounting line 1) will be described. The measurement system of another embodiment is different from the aforementioned measurement system in that the measurement unit J does not store calibration information, and the management computer 3 stores the calibration information of the measurement unit 42 of the measurement unit J.

[0094] In FIG. 5, the management measurement control unit 51 stores the calibration result obtained from a service company or the like that undertakes the calibration of the measurement unit J as calibration information in the calibration management data 50c. That is, the management measurement control unit 51 has a function as an update unit that updates the calibration information when the measurement unit 42 of the measurement unit J is calibrated. Also, the management measurement control unit 51 executes a calibration state determination process for determining that the measurement unit J is in any of the remaining - deadline state, approaching - deadline state, and overdue state based on the latest calibration information included in the calibration management data 50c. That is, the management measurement control unit 51 has a function as a determination unit that determines whether calibration of the measurement unit J is necessary based on the calibration information.

[0095] The management measurement control unit 51 executes calibration status notification processing to display the calibration status of the measurement unit 42 of the measurement unit J on at least one of the display units (touch panels) of the management computer 3, the production equipment, and the information terminal carried by the operator. When the measurement unit J is in the expiration margin state, the management measurement control unit 51 displays a normal notification screen 70 (FIG. 9) on the display unit. When the measurement unit J is in the approaching expiration state, the management measurement control unit 51 displays a caution notification screen 73 (FIG. 10) on the display unit. When the measurement unit J is in the expired state, the management measurement control unit 51 displays a warning notification screen 74 (FIG. 11) on the display unit. That is, when it is determined in the management measurement control unit 51 (judgment unit) that calibration of the measurement unit 42 of the measurement unit J is necessary, the display unit functions as a notification unit that notifies to prompt calibration of the measurement unit J.

[0096] In FIG. 5, when the management measurement control unit 51 determines that the measurement unit J is in the expired state, it executes measurement limit processing for controlling the production equipment so that the components of the measurement unit 42 that have passed the calibration deadline do not perform measurement. Specifically, when the guarantee item measurement start button 76 is operated on the warning notification screen 74, the management measurement control unit 51 sends a command so that only the measurement of the items for which the measurement accuracy is guaranteed is performed. Also, when the measurement stop button 77 is operated on the warning notification screen 74, the management measurement control unit 51 sends a command so that the measurement of all items is not performed.

[0097] As described above, when it is determined in the management measurement control unit 51 (judgment unit) that calibration of the measurement unit 42 of the measurement unit J is necessary, the management measurement control unit 51 (control unit) controls to limit the measurement of the physical quantity related to the production equipment using the measurement unit J. Also, based on the calibration information updated by the management measurement control unit 51 (update unit) after the calibration is executed after the expiration date, the management measurement control unit 51 (control unit) releases the restriction on the measurement of the physical quantity using the measurement unit J.

[0098] As described above, the component mounting line 1 including the measurement unit J of other embodiments constitutes a measurement system including a storage unit (management storage unit 50) that stores at least calibration information regarding calibration of the measurement unit 42 of the measurement unit J, a transmission unit (first transmission means, first reception means, second transmission means, second reception means) that transmits information in a non-contact manner, and a control unit (management measurement control unit 51) that controls measurement of a physical quantity regarding production equipment based on the calibration information. Accordingly, even when the measurement unit J does not store the calibration information, the measurement unit J can be appropriately used based on the calibration information to measure the physical quantity regarding the production equipment.

[0099] In the above description, the transmission unit (first transmission means, first reception means) included in the measurement unit J and other transmission units (second transmission means, second reception means) included in the external device (component mounting apparatuses M4 to M6, inspection device, etc.) transmit information in a non-contact manner by light and image, but the information transmission method in the transmission unit is not limited thereto. For example, the measurement unit J may include a light emitting means (first transmission means) including an LED, a laser, etc. instead of the image display means 41, and the external device may include a light receiving means (second reception means) including an optical sensor such as a photosensor. Further, the measurement unit J and the external device may transmit information in a non-contact manner by a communication method using radio waves.

[0100] Also, in the above description, an example in which a production line including production equipment measures a physical quantity regarding the production equipment using the measurement unit J has been described by taking the component mounting line 1 for mounting components on the substrate 4 as an example, but the production line (measurement system) of the present embodiment is not limited to the component mounting line 1. For example, the production line and the production equipment may be a semiconductor manufacturing line and semiconductor manufacturing equipment for manufacturing a semiconductor by processing a semiconductor wafer (workpiece), an assembly production line and assembly equipment for assembling components (workpieces) to manufacture electro-mechanical appliances, general mechanical appliances, etc., or a food processing line and food processing equipment for processing food (workpiece) to produce food processed products. Further, the measurement unit 42 (various sensors, etc.) included in the measurement unit J is freely changed according to the physical quantity to be measured.

Industrial Applicability

[0101] The measurement system and measurement unit of the present invention have the effect that the measurement unit can be appropriately used based on calibration information, and are useful in the field of mounting components on a substrate.

Explanation of reference numerals

[0102] 1 Component mounting line (measurement system) 4 Substrate (workpiece) 29 Substrate recognition camera (second receiving means, transmission unit) 29a Substrate illumination (second transmitting means, transmission unit) 40 Photodetector (first receiving means, transmission unit) 41 Image display means (first receiving means, transmission unit) 42 Measuring unit J Measurement unit M1 Substrate supply device (production equipment) M2 Solder printing device (production equipment) M3 Printing inspection device (production equipment) M4 - M6 Component mounting devices (production equipment) M7 Mounting inspection device (production equipment) M8 Reflow device (production equipment) M9 Post - reflow inspection device (production equipment) M10 Substrate recovery device (production equipment)

Claims

1. A measurement unit is provided that is temporarily arranged in a transport unit of a production facility for manufacturing a mounting substrate by processing a substrate that is a workpiece, and measures a physical quantity related to the production facility. The measurement unit includes: a storage unit that stores at least calibration information related to calibration of the measurement unit; a transmission unit that transmits information in a non-contact manner; a control unit that controls measurement of the physical quantity based on the calibration information, and is transported to a predetermined location by a transport belt included in the transport unit to measure a physical quantity related to the production facility. The storage unit is provided in the measurement unit. The transmission unit includes a first transmission means and a first reception means provided in the measurement unit. The first transmission means transmits at least the calibration information in a non-contact manner from the measurement unit to another transmission unit. The first reception means receives information in a non-contact manner from another transmission unit. The first transmission means is an image display means for displaying an image. The first reception means includes a photodetector provided with an optical sensor, and is a measurement system.

2. The transmission unit further includes a second transmission means and a second reception means provided outside the measurement unit. The second reception means receives the calibration information transmitted from the first transmission means. The second transmission means transmits information to the first reception means. The second reception means is a camera that captures an image displayed on the image display means. The second transmission means is a substrate illumination for illuminating the substrate, and is the measurement system according to Claim 1.

3. The measurement system according to Claim 1 or 2, further comprising a determination unit that determines whether calibration of the measurement unit is necessary based on the calibration information.

4. The measurement system according to Claim 3, wherein when it is determined in the determination unit that calibration of the measurement unit is necessary, the control unit controls to limit measurement of the physical quantity using the measurement unit.

5. The measurement system according to Claim 3 or 4, further comprising a notification unit that notifies to prompt calibration of the measurement unit when it is determined in the determination unit that calibration of the measurement unit is necessary.

6. The measurement system according to any one of Claims 1 to 5, further comprising an update unit that updates the calibration information when the measurement unit is calibrated.

7. The measurement system according to claim 6, wherein based on the calibration information updated by the update unit, the control unit releases the restriction on the measurement of the physical quantity using the measurement unit.

8. A measurement unit that measures a physical quantity; A storage unit that stores at least calibration information regarding calibration of the measurement unit; A control unit that controls the measurement unit based on the calibration information; First receiving means for receiving information non - contact from the outside; First transmitting means for transmitting at least the physical quantity non - contact to the outside, Temporarily placed on a transport unit of production equipment that processes a substrate as a workpiece to manufacture a mounted substrate, and transported to a predetermined location by a transport belt provided in the transport unit, and the physical quantity regarding the production equipment is measured by the measurement unit, The first transmitting means is an image display means for displaying an image; The first receiving means is a measurement unit including a photodetector equipped with an optical sensor.

9. The measurement unit according to claim 8, further comprising a determination unit that determines whether calibration of the measurement unit is necessary based on the calibration information.

10. The measurement unit according to claim 9, wherein when it is determined in the determination unit that calibration of the measurement unit is necessary, the control unit controls to limit the use of the measurement unit.

11. The measurement unit according to claim 9 or 10, further comprising a notification unit that notifies to prompt calibration of the measurement unit when it is determined in the determination unit that calibration of the measurement unit is necessary.

12. The measurement unit according to any one of claims 8 to 11, further comprising an update unit that updates the calibration information when the measurement unit is calibrated.

13. The measurement unit according to claim 12, wherein based on the calibration information updated by the update unit, the control unit releases the restriction on the use of the measurement unit.

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