Substrate holding structure and substrate housing device

Abstract

The substrate mounting structure (30) has a holding surface (31A) intersecting the first direction, a holding member (31) provided to hold a substrate on the holding surface, at least one guide member (32) extending along the first direction from the holding member, and at least one stopper member (33) disposed on one side in the first direction with respect to the at least one guide member and protruding outward from the at least one guide member when viewed from the first direction.

Description

[Technical field]

[0001] The present disclosure relates to a substrate holding structure and a substrate accommodation device. [Background technology]

[0002] Japanese Patent Application Laid-Open Publication No. 2019-21851 (Patent Document 1) describes a structure for mounting a board to an electronic device housing. The board mounting structure described in Patent Document 1 includes a guide groove formed on an inner wall surface of the electronic device housing, and a board holding frame that is inserted into and removed from the electronic device housing while holding a board. The guide groove extends in the insertion and removal direction of the board. The board holding frame holds the board from a direction perpendicular to the insertion and removal direction of the board. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-21851 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the board mounting structure described in Patent Document 1, one board holding frame that holds one board is inserted into one guide groove, so the number of boards that can be accommodated in the electronic device housing is the same as the number of rows of guide grooves. In this type of board mounting structure, if it is necessary to mount more boards than the number of rows of guide grooves, it is necessary to add an additional housing, which significantly increases costs.

[0005] A primary object of the present disclosure is to provide a substrate holding structure and a substrate accommodating device that make it possible to increase the number of substrates that can be accommodated in a housing without adding an additional housing. [Means for solving the problem]

[0006] The substrate mounting structure according to the present disclosure has a holding surface intersecting a first direction, a holding member provided to hold a substrate on the holding surface, at least one guide member extending along the first direction from the holding member, and at least one stopper member disposed on one side of the first direction with respect to the at least one guide member and protruding outward from the at least one guide member when viewed from the first direction.

[0007] The substrate housing device according to the present disclosure includes a housing having an opening formed at one end in a fourth direction, and a plurality of rails extending along the fourth direction and fixed to the housing. The housing has a first wall and a second wall facing each other with a space therebetween in a fifth direction intersecting the fourth direction. The plurality of rails are arranged on at least one of the inner surfaces of the first wall and the second wall at intervals in a sixth direction orthogonal to each of the fourth direction and the fifth direction. The substrate housing device further includes at least one substrate holding structure that holds a first substrate having a first main surface and a second main surface located on the side opposite to the first main surface in a state where the first main surface intersects the fourth direction. The at least one substrate holding structure has a holding surface facing the second main surface, a holding member that holds the first substrate on the holding surface, at least one guide member inserted into one of the plurality of rails or inserted between two adjacent rails in the fourth direction among the plurality of rails, and at least one stopper member having a surface facing the end surface in the fourth direction of at least one of the plurality of rails in a state where the at least one guide member is inserted into one of the rails.

Advantages of the Invention

[0008] According to the present disclosure, it is possible to increase the number of substrates that can be accommodated in the housing without adding a new housing.

Brief Description of the Drawings

[0009]

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Mode for Carrying Out the Invention

[0010] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the following, the same or corresponding parts are denoted by the same reference numerals, and overlapping descriptions will not be repeated.

[0011] Embodiment 1. <Configuration Example of Substrate Accommodating Device 101> FIGS. 1 and 2 are diagrams for explaining a substrate accommodating device 101 according to Embodiment 1. In FIGS. 1 and 2, for convenience of explanation, a fourth direction DR4, a fifth direction DR5, and a sixth direction DR6 that intersect each other are introduced. Preferably, the fourth direction DR4, the fifth direction DR5, and the sixth direction DR6 are perpendicular to each other. The fourth direction DR4 and the sixth direction DR6 are, for example, along the horizontal direction. The fifth direction DR5 is, for example, along the vertical direction.

[0012] As shown in FIGS. 1 and 2, the substrate accommodating device 101 according to Embodiment 1 mainly includes a housing 10, a plurality of rails 20, and at least one substrate holding structure 30. The substrate accommodating device 101 can accommodate at least one first substrate 40 and a plurality of second substrates 50. Each of the plurality of rails 20 can accommodate the second substrate 50 in the housing 10. The substrate holding structure 30 is provided so as to be accommodated in the housing 10 while holding the first substrate 40.

[0013] The housing 10 has a bottom wall 11, an upper wall 12, a side wall 13, and a side wall 14. Each of the bottom wall 11, the upper wall 12, the side wall 13, and the side wall 14 extends along the fourth direction DR4. The bottom wall 11 and the upper wall 12 face each other with a space therebetween in the fifth direction DR5. The side wall 13 and the side wall 14 face each other with a space therebetween in the sixth direction DR6. The bottom wall 11 is connected to the lower ends of the side wall 13 and the side wall 14. The upper wall 12 is connected to the upper ends of the side wall 13 and the side wall 14.

[0014] The housing 10 is formed with an opening 15. The opening 15 is formed at one end in the fourth direction DR4 of the housing 10. The opening 15 is defined by a bottom wall 11, an upper wall 12, side walls 13, and a side wall 14. The housing 10 further has a restricting member 16 for restricting the movement of each of, for example, the first substrate 40 and the plurality of second substrates 50 toward the opening 15 side in the fourth direction DR4. The restricting member 16 extends in the sixth direction DR6 so as to block at least a part of the opening 15. The housing 10 is provided with a plurality of columnar members 17, for example, arranged on the opening 15 side of the plurality of rails 20 in the sixth direction DR6. The restricting member 16 is, for example, passed between the plurality of columnar members 17.

[0015] The plurality of rails 20, at least one substrate holding structure 30, the first substrate 40, and the plurality of second substrates 50 are accommodated in the housing 10. The plurality of rails 20, at least one substrate holding structure 30, the first substrate 40, and the plurality of second substrates 50 are arranged on the other end side in the fourth direction DR4 of the housing 10 with respect to the restricting member 16.

[0016] The plurality of rails 20 guide the movement of each of the at least one substrate holding structure 30 and the plurality of second substrates 50 in the fourth direction DR4. The plurality of rails 20 restrict the movement of each of the at least one substrate holding structure 30 and the plurality of second substrates 50 in the fifth direction DR5 and the sixth direction DR6.

[0017] Each of the plurality of rails 20 extends along a fourth direction DR4. The plurality of rails 20 are disposed, for example, on the inner surfaces of each of the bottom wall 11 and the upper wall 12. The length of each of the plurality of rails 20 in the fourth direction DR4 is longer than the length of the second substrate 50 in the fourth direction DR4. The plurality of rails 20 includes, for example, a plurality of first rails 21 and a plurality of second rails 22. The plurality of first rails 21 are spaced apart from each other in a sixth direction DR6 on the inner surface of the bottom wall 11. The plurality of second rails 22 are spaced apart from each other in a sixth direction DR6 on the inner surface of the upper wall 12. Each of the plurality of second rails 22 is disposed opposite to each of the plurality of first rails 21 in a fifth direction DR5. The shape and dimensions of each of the plurality of second rails 22 are, for example, equivalent to those of each of the plurality of first rails 21.

[0018] Each of the plurality of rails 20 can limit the movement of the second substrate 50 in the fifth direction DR5 and the sixth direction DR6. Each of the plurality of rails 20 can guide the movement of the second substrate 50 in the fourth direction DR4 when the second substrate 50 is inserted into the housing 10 or removed from the housing 10. In a cross-section orthogonal to the fourth direction DR4, each of the plurality of rails 20 is provided to fit with one end or the other end of the second substrate 50 in the fifth direction DR5.

[0019] Each of the plurality of rails 20 has, for example, a set of protrusions 23 arranged at intervals from each other in the sixth direction DR6. The set of protrusions 23 protrudes inside the housing 10 with respect to the inner surface of the bottom wall 11 or the upper wall 12 in the fifth direction DR5 and the surface located between the set of protrusions 23 in the sixth direction DR6. The set of protrusions 23 extends along the fourth direction DR4 from one end of each of the plurality of rails 20 in the fourth direction DR4. The distance in the sixth direction DR6 between the set of protrusions 23 is equal to or greater than the dimension (thickness) of the second substrate 50 in the sixth direction DR6. The length of each of the plurality of rails 20 in the fourth direction DR4 is longer than the length of the second substrate 50 in the fourth direction DR4. The distance in the fifth direction DR5 between the top surfaces of the set of protrusions 23 of the first rail 21 and the top surfaces of the set of protrusions 23 of the second rail 22 is smaller than the dimension (width) of the second substrate 50 in the fifth direction DR5.

[0020] From a different perspective, grooves are formed in each of the plurality of rails 20. The distance in the fifth direction DR5 between the bottom surfaces of the grooves of the first rail 21 and the bottom surfaces of the grooves of the second rail 22 is equal to or greater than the dimension (width) of the second substrate 50 in the fifth direction DR5.

[0021] The substrate holding structure 30 can hold the first substrate 40 in the substrate housing device 101 in a state where the first main surface 40A intersects the fourth direction DR4. The substrate holding structure 30 is insertable into the housing 10 and removable from the housing 10. The substrate holding structure 30 is positioned within the housing 10 by being inserted into at least one of the plurality of rails 20.

[0022] As shown in FIG. 2, the substrate holding structure 30 is provided, for example, to be inserted into each of two sets of rails (four rails) facing the fifth direction DR5 among the plurality of rails 20. The two sets of rails are adjacent to each other, for example, in the sixth direction DR6.

[0023] The first substrate 40 has a first main surface 40A and a second main surface 40B located on the side opposite to the first main surface 40A. Each of the plurality of second substrates 50 has a third main surface 50A. In the present disclosure, the main surface means the surface with the largest area among the surfaces of the substrate. Electronic components (not shown) such as semiconductor elements and transformers are mounted on each of the first main surface 40A of the first substrate 40 and the third main surface 50A of the second substrate 50. Preferably, the mounting density of the first substrate 40 is lower than that of the second substrate 50. In the substrate housing device 101, among the plurality of substrates to be housed in the housing 10, the substrate with a high mounting density is provided to be inserted into the rail 20 as the second substrate 50, and the substrate with a low mounting density is provided to be held by the substrate holding structure 30 as the first substrate 40. In the present disclosure, the mounting density means the ratio of the occupied area of the electronic components mounted on the main surface to the area of the main surface of the substrate.

[0024] Each of the first substrate 40 and the second substrate 50 housed in the housing 10 is electrically connected to a terminal block provided on the other side of the fourth direction DR4 of the housing 10 via a connection member (not shown). The first substrate 40 may be electrically connected to the second substrate 50 inserted into the rail 20 into which the substrate holding structure 30 is inserted via a connection member (not shown). The first substrate 40 may be electrically connected to the second substrate 50 inserted into the rail 20 into which the substrate holding structure 30 is not inserted via a connection member (not shown). The first substrate 40 may be electrically connected to the terminal block via the connection member and the second substrate 50. The first substrate 40 may be electrically connected to the terminal block via only a connection member (not shown) without passing through the second substrate 50.

[0025] Known housings and rails can be used for the housing 10 and the plurality of rails 20. From a different perspective, the substrate holding structure 30 according to Embodiment 1 is applicable to known housings and rails. The housing 10 and the plurality of rails may be standardized for deploying the substrate housing device 101 to a plurality of applications. The substrate holding structure 30 is applicable to standardized housings and rails.

[0026] <Configuration example of substrate holding structure 30> Figs. 3 to 7 are diagrams for explaining the substrate holding structure 30 according to Embodiment 1. In Figs. 3 to 7, for convenience of explanation, a first direction DR1, a second direction DR2, and a third direction DR3 that intersect each other are introduced. Preferably, the first direction DR1, the second direction DR2, and the third direction DR3 are orthogonal to each other. In a state where the substrate holding structure 30 is properly inserted into the substrate housing device 101, the first direction DR1 is along the fourth direction DR4, the second direction DR2 is along the fifth direction DR5, and the third direction DR3 is along the sixth direction DR6.

[0027] As shown in Figs. 3 to 7, the substrate holding structure 30 according to Embodiment 1 includes a holding member 31, a plurality of guide members 32, and a plurality of stopper members 33.

[0028] The holding member 31 has a holding surface 31A that intersects the first direction DR1. The holding member 31 is provided to hold the first substrate 40 on the holding surface 31A. The holding surface 31A is orthogonal to the first direction DR1, for example, and extends along each of the second direction DR2 and the third direction DR3. The holding member 31 further has a back surface 31B (see Fig. 5) located on the side opposite to the holding surface 31A.

[0029] The holding surface 31A has, for example, a pair of short sides that face each other with a space therebetween in the second direction DR2, and a pair of long sides that face each other with a space therebetween in the third direction DR3. The dimension (length) of the holding surface 31A in the second direction DR2 is larger than the dimension (length) of the holding surface 31A in the third direction DR3, for example. The dimension (thickness) of the holding member 31 in the first direction DR1 is smaller than the dimension of the holding surface 31A in the third direction DR3, for example. The holding member 31 is, for example, a plate-shaped member. The holding surface 31A is, for example, the main surface of the holding member 31. The material constituting the holding member 31 is not particularly limited, but is, for example, a metal material.

[0030] The holding member 31 has a plurality of fixing members 34 for fixing the first substrate 40 on the holding surface 31A. The plurality of fixing members 34 are provided, for example, to hold the first substrate 40 in a state where the holding surface 31A is spaced apart from the second main surface 40B in the first direction DR1. The plurality of fixing members 34 are, for example, bosses or studs having male screw portions or female screw portions. A plurality of through holes (not shown) are formed in the first substrate 40, for example. When the fixing member 34 is a boss having a female screw portion, male screws (not shown) inserted into each of the plurality of through holes of the first substrate 40 are fastened to the female screw portion of the fixing member 34, whereby the first substrate 40 is held by the holding member 31.

[0031] Each of the plurality of guide members 32 extends along the first direction DR1 from the holding member 31. Each of the plurality of guide members 32 is provided so as to be inserted into one rail 20 and removed from one rail in the substrate housing device 101. The plurality of guide members 32 are, for example, four guide members 32. The four guide members 32 are provided so as to be inserted into each of two sets of rails (four rails) facing each other in the fifth direction DR5 among the plurality of rails 20. The two sets of rails are adjacent to each other in the sixth direction DR6, for example. Two of the four guide members 32 are arranged at intervals in the third direction DR3 and are connected to one of a pair of short sides of the holding surface 31A. The remaining two of the four guide members 32 are arranged at intervals in the third direction DR3 and are connected to the other of a pair of short sides of the holding surface 31A. Note that the number of guide members 32 included in the substrate holding structure 30 may be any number of one or more, and may be, for example, two or three.

[0032] Each of the plurality of stopper members 33 is disposed on one side of the plurality of guide members 32 in the first direction DR1. Each of the plurality of stopper members 33 is disposed outside the plurality of guide members 32 when viewed from the first direction DR1. Each of the plurality of stopper members 33 is provided in the substrate housing device 101 so as to contact one end surface of one rail 20 in the fourth direction DR4 and restrict the substrate holding structure 30 from moving to the other side in the fourth direction DR4 from its appropriate housing position. Each of the plurality of stopper members 33 protrudes outward from each of the plurality of guide members 32, for example, in the third direction DR3.

[0033] As shown in FIG. 3, each of the plurality of guide members 32 has a first portion 32A extending from the holding member 31 to one side in the first direction DR1 and a second portion 32B extending from the holding member 31 to the other side in the first direction DR1. In a state where the substrate holding structure 30 is properly inserted into the substrate housing device 101, one side in the first direction DR1 coincides with the opening 15 side with respect to the housing 10. In each of the plurality of guide members 32, the length of the second portion 32B in the first direction DR1 is, for example, longer than the length of the first portion 32A in the first direction DR1.

[0034] Each of the plurality of stopper members 33 is connected to, for example, the first portion 32A of each of the plurality of guide members 32. Each of the plurality of stopper members 33 is connected to, for example, one end portion of the first portion 32A on one side in the first direction DR1.

[0035] As shown in FIGS. 4 and 5, each of the plurality of guide members 32 is disposed outside the holding surface 31A in the second direction DR2 when viewed from the first direction DR1. Each of the plurality of stopper members 33 is disposed outside the holding surface 31A in the second direction DR2 when viewed from the first direction DR1. Each of the plurality of guide members 32 and the plurality of stopper members 33 is provided so as not to contact the first substrate 40 held by the holding member 31. One guide member 32 and one stopper member 33 have, for example, an L shape when viewed from the first direction DR1. One stopper member 33 extends in the third direction DR3 from the outer end portion of the first portion 32A of one guide member 32 in the second direction DR2.

[0036] When viewed from the third direction DR3, the tip portions of each of the plurality of guide members 32 on the other side in the first direction DR1 protrude most on the other side in the first direction DR1 in the substrate holding structure 30. When viewed from the third direction DR3, the tip portions of each of the plurality of guide members 32 on the other side in the first direction DR1 have, for example, chamfered surfaces.

[0037] The dimension (length) in the first direction DR1 of the portion extending from the stopper member 33 to the other side in the first direction DR1 in the plurality of guide members 32 is, for example, larger than the interval in the third direction DR3 between two guide members 32 adjacent to each other in the third direction DR3 among the plurality of guide members 32.

[0038] Each second portion 32B of each of the plurality of guide members 32 has a third portion 32C arranged so as to overlap the back surface 31B. Each third portion 32C of each of the plurality of guide members 32 is fixed to the holding member 31 by a fixing member such as a screw. Thereby, each of the plurality of guide members 32 is fixed to the holding member 31. The third portions 32C of two guide members 32 adjacent to each other in the third direction DR3 are, for example, continuous with each other.

[0039] As shown in FIGS. 6 and 7, the width of each of the plurality of guide members 32 in the third direction DR3 is smaller than the interval in the third direction DR3 between two adjacent guide members 32 among the plurality of guide members 32 in the third direction DR3. The width of each of the plurality of stopper members 33 in the third direction DR3 is smaller than the interval in the third direction DR3 between two adjacent guide members 32 among the plurality of guide members 32 in the third direction DR3.

[0040] Each of the plurality of guide members 32 is, for example, a plate-like member. Each of the plurality of stopper members 33 is, for example, a plate-like member. The thickness of each of the plurality of guide members 32 and the plurality of stopper members 33 may be equal to the thickness of the holding member 31. The material constituting the guide member 32 is not particularly limited, but is, for example, a metal material. The material constituting the stopper member 33 is not particularly limited, but is, for example, a metal material.

[0041] Each of the plurality of stopper members 33 is provided integrally with each of the plurality of guide members 32, for example. For example, two guide members 32 adjacent to each other in the third direction DR3 and two stopper members 33 are formed by performing bending processing or the like on a single plate-like member. Each of the plurality of stopper members 33 may be fixed to at least one of the holding member 31 and the plurality of guide members 32 by any fixing means such as adhesion or welding.

[0042] FIGS. 8 to 10 are diagrams for explaining a state in which the substrate holding structure 30 is accommodated in the substrate housing device 101. As shown in FIGS. 8 to 10, in a state where the substrate holding structure 30 is accommodated in the substrate housing device 101, each of the first direction DR1, the second direction DR2, and the third direction DR3 in the substrate holding structure 30 is along the fourth direction DR4, the fifth direction DR5, and the sixth direction DR6 in the substrate housing device 101, respectively.

[0043] As shown in FIGS. 8 to 10, the holding member 31 is disposed between the two sets of rails 20 facing each other in the fifth direction DR5 in the substrate housing device 101. The dimension of the holding member 31 in the second direction DR2 is smaller than the interval between the two sets of rails 20 facing each other in the fifth direction DR5. The dimension of the holding member 31 in the third direction DR3 is larger than the interval between the grooves of the two adjacent rails 20 in the sixth direction DR6.

[0044] The holding member 31 is arranged so as to overlap with the two second substrates 50 inserted into each of the two sets of rails 20 in the fourth direction DR4. The holding member 31 is arranged on one side in the fourth direction DR4 with respect to the two second substrates 50 inserted into each of the two sets of rails 20.

[0045] Each of the plurality of guide members 32 is inserted into the groove of each rail 20 in the substrate housing device 101. Each of the plurality of guide members 32 has a main surface parallel to the wall surface of the protruding portion 23 of each rail 20 and an end surface parallel to the bottom surface of the groove of each rail 20.

[0046] Each of the plurality of stopper members 33 contacts the end surface on one side in the fourth direction DR4 of the rail 20 into which the guide member 32 is inserted in a state where each of the plurality of guide members 32 is inserted into the groove of each rail 20. Each of the plurality of stopper members 33 contacts, for example, the end surface of the protruding portion 23.

[0047] As shown in FIG. 9, the substrate holding structure 30 is provided so as to be arranged at a distance from the second substrate 50 in the fourth direction DR4. In FIG. 9, the terminal block 19 of the substrate housing device 101 is illustrated.

[0048] As shown in FIG. 10, the dimension of each of the plurality of guide members 32 in the second direction DR2 is larger than, for example, the dimension (protrusion height) of the protruding portion 23 of each rail 20 in the fifth direction DR5. Each of the plurality of guide members 32 protrudes inside the rail 20 in the fifth direction DR5 in a state of being inserted into the rail 20.

[0049] <Effects of Substrate Holding Structure 30 and Substrate Accommodating Device 101> The substrate holding structure 30 includes a holding member 31 provided to hold the first substrate 40 on a holding surface 31A intersecting the first direction DR1, and a plurality of guide members 32 extending along the first direction DR1 from the holding member 31. Therefore, when each of the plurality of guide members 32 is inserted into the plurality of rails 20 extending along the fourth direction DR4, the first substrate 40 can be held in the substrate accommodating device 101 by the substrate holding structure 30 in a state where its first main surface 40A intersects the fourth direction DR4.

[0050] Furthermore, the substrate holding structure 30 further includes a stopper member 33 disposed on one side of the first direction DR1 with respect to each guide member 32 and protruding outward from each guide member 32 when viewed from the first direction DR1. The stopper member 33 can contact one end of the rail 20 in the fourth direction DR4 when the guide member 32 is inserted into each rail 20. Therefore, it is possible to limit the substrate holding structure 30 from moving to the other side of the fourth direction DR4 from its appropriate accommodation position in the substrate accommodating device 101 and interfering with the second substrate 50. Thereby, the substrate holding structure 30 can be inserted into the plurality of rails 20 into which the second substrate 50 is inserted in the substrate accommodating device 101. According to the substrate holding structure 30, the number of substrates that can be accommodated in the housing 10 can be increased without adding or deforming the housing 10.

[0051] The substrate holding structure 30 is suitable for a substrate housing device 101 including a standardized housing 10 and rails 20. In a standardized housing and rails, it is difficult to adopt a structure required only for a specific application. For example, it is also difficult to provide additional screw holes in the housing for positioning an additional substrate inside the housing. In contrast, the substrate holding structure 30 can be positioned in each of the other side in the fourth direction DR4, the fifth direction DR5, and the sixth direction DR6 only by being inserted into the standardized housing 10 and rails 20. Therefore, according to the substrate holding structure 30, in the substrate housing device 101 including the standardized housing 10 and rails 20, it is possible to increase the number of substrates that can be accommodated in the housing 10 without adding an extension to the housing 10. Note that the substrate holding structure 30 can be positioned on one side in the fourth direction DR4 by, for example, a restricting member 16.

[0052] The guide member 32 is disposed outside the holding surface 31A in the second direction DR2 when viewed from the first direction DR1. The stopper member 33 is disposed on one side in the first direction DR1 with respect to the holding surface 31A. According to such a substrate holding structure 30, when the guide member 32 is inserted into the rail 20, the holding member 31 does not interfere with the rail 20. Therefore, the holding surface 31A of the holding member 31 can be disposed on the other end side rather than one end in the fourth direction DR4 of the rail 20 and can be disposed between a pair of rails 20 facing each other in the fifth direction DR5.

[0053] The holding surface 31A has a pair of short sides facing each other with a space therebetween in the second direction DR2 and a pair of long sides facing each other with a space therebetween in the third direction DR3. A part of each of the plurality of guide members 32 is connected to one of the pair of short sides of the holding surface 31A, and a part of each of the plurality of guide members 32 is connected to the other of the pair of short sides of the holding surface 31A. In this way, when holding the first substrate 40 whose first main surface 40A has a pair of short sides and a pair of long sides, waste of space hardly occurs in the substrate holding structure 30.

[0054] In the substrate housing device 101, it is preferable that the first main surface 40A of the first substrate 40 has a set of short sides and a set of long sides, and the first substrate 40 is provided so as to be held by the substrate holding structure 30. In this way, compared with the case where the first substrate with a low mounting density has the same shape as the second substrate with a high mounting density and is inserted into the rail, waste of space is less likely to occur in the housing 10, and the first substrate 40 and the second substrate 50 can be efficiently housed in the housing 10.

[0055] Each of the plurality of guide members 32 is preferably arranged at intervals from each other in the third direction DR3. Each of the plurality of guide members 32 is inserted into each of a plurality of sets of rails that face the fifth direction DR5 and are arranged side by side in the sixth direction DR6 among the plurality of rails 20. In this way, compared with the case where two guide members 32 are provided so as to be inserted into each of a set of rails facing the fifth direction DR5 among the plurality of rails 20, the positioning accuracy of the substrate holding structure 30 with respect to the plurality of rails 20 can be improved. In particular, according to the substrate holding structure 30 including the plurality of guide members 32, it is possible to suppress the holding surface 31A from being inclined with respect to the sixth direction DR6 when viewed from the fifth direction DR5 and the substrate holding structure 30 from interfering with the second substrate 50.

[0056] The substrate holding structure 30 has a plurality of stopper members 33 connected to each of the plurality of guide members 32. In this way, it is possible to limit each of the plurality of guide members 32 from moving to the other side in the fourth direction DR4 from their respective appropriate positions with respect to the rail 20. Therefore, compared with the case where only one of the plurality of guide members 32 has the stopper member 33, the positioning accuracy of the substrate holding structure 30 with respect to the plurality of rails 20 can be improved.

[0057] The width of each of the plurality of guide members 32 in the third direction DR3 is narrower than the interval in the third direction DR3 between two adjacent guide members 32 among the plurality of guide members 32 in the third direction DR3. In this way, the substrate holding structure 30 is applicable to known housings and rails.

[0058] Each of the plurality of guide members 32 extends to the other side of the first direction DR1 with respect to the holding surface 31A. Such a plurality of guide members 32 can act as spacers for maintaining a state in which the holding member 31 and the second substrate 50 are arranged at intervals in the fourth direction DR4. The length of each of the plurality of guide members 32 in the first direction DR1 may be longer than the interval in the third direction DR3 between two adjacent guide members 32 in the third direction DR3.

[0059] The substrate holding structure 30 may further include a first substrate 40 held on the holding surface 31A. The plurality of stopper members 33 are preferably arranged on one side of the first main surface 40B of the first substrate 40 in the first direction DR1. According to such a substrate holding structure 30, the first substrate 40 can be accommodated on the other end side rather than on one end in the fourth direction DR4 of the rail 20 in the substrate accommodating device 101.

[0060] In the substrate holding structure 30, the material constituting the holding member 31 may be a metal material. Such a substrate holding structure 30 has an effect of reducing the radiation noise generated from the inside of the housing 10 in the substrate accommodating device 101.

[0061] In the substrate accommodating device 101, the first substrate 40, the substrate holding structure 30, and the second substrate 50 are accommodated in order from the opening 15 side in the fourth direction DR4. Therefore, according to the substrate accommodating device 101, compared with a substrate accommodating device that includes the housing 10 and the plurality of rails 20 but does not include the substrate holding structure 30, the first substrate 40 and the second substrate 50 can be efficiently accommodated, and the number of substrates that can be accommodated can be increased.

[0062] <Modification example> In the substrate holding structure 30, at least one of the guide member 32 and the stopper member 33 may be provided. The number of the guide members 32 and the stopper members 33 included in the substrate holding structure 30 is preferably plural from the viewpoint of improving the positioning accuracy of the substrate holding structure 30 with respect to the plurality of rails 20.

[0063] In the substrate holding structure 30, the plurality of guide members 32 may be provided so as to be inserted into a plurality of rails 20 that are not adjacent to each other in the sixth direction DR6.

[0064] The substrate housing device 101 may include a plurality of substrate holding structures 30. Such a substrate housing device 101 can house a plurality of first substrates 40 and a plurality of second substrates 50.

[0065] Embodiment 2. <Configuration of Substrate Housing Device 102> As shown in FIG. 11, the substrate housing device 102 according to Embodiment 2 has the same configuration and effects as those of Embodiment 1 above unless otherwise specified. Therefore, the same components as those in Embodiment 1 above are denoted by the same reference numerals, and the description will not be repeated.

[0066] As shown in FIG. 11, the housing 10 and the plurality of rails 20 of the substrate housing device 102 are equivalent to the housing 10 and the plurality of rails 20 of the substrate housing device 101. The substrate housing device 102 is different from the substrate housing device 101 in that it includes a substrate holding structure 70 instead of the substrate holding structure 30.

[0067] In the substrate housing device 102, the substrate holding structure 70 can hold the first substrate 40 in a state where the first main surface 40A intersects the fourth direction DR4. The substrate holding structure 70 is insertable into the housing 10 and removable from the housing 10. The substrate holding structure 70 is positioned within the housing 10 by being inserted between two adjacent rails 20 in the sixth direction DR6 among the plurality of rails 20.

[0068] As shown in FIG. 11, the substrate holding structure 70 is provided, for example, so as to be inserted between two sets of rails (four rails) that face each other in the fifth direction DR5 and are adjacent to each other in the sixth direction DR6 among the plurality of rails 20.

[0069] <Configuration of Substrate Holding Structure 70> Figures 12 to 16 are diagrams for explaining the substrate holding structure 70 according to Embodiment 2. Also in Figures 12 to 16, a first direction DR1, a second direction DR2, and a third direction DR3 that intersect each other are introduced. Preferably, the first direction DR1, the second direction DR2, and the third direction DR3 are orthogonal to each other. In a state where the substrate holding structure 70 is appropriately inserted into the substrate housing device 101, the first direction DR1 is along the fourth direction DR4, the second direction DR2 is along the fifth direction DR5, and the third direction DR3 is along the sixth direction DR6.

[0070] As shown in Figures 12 to 16, the substrate holding structure 70 according to Embodiment 2 includes a holding member 71, a plurality of guide members 72, and a plurality of stopper members 73.

[0071] The holding member 71 has a holding surface 71A that intersects the first direction DR1. The holding member 71 is provided to hold the first substrate 40 on the holding surface 71A. The holding member 71 further has a back surface 71B (see Figure 14) located on the side opposite to the holding surface 71A. The holding surface 71A has the same configuration as the holding surface 31A.

[0072] The holding member 71 is, for example, a plate-shaped member. The holding surface 71A is, for example, the main surface of the holding member 71. The material constituting the holding member 71 is not particularly limited, but is, for example, a metal material.

[0073] The holding member 71 has a plurality of fixing members 74 for fixing the first substrate 40 on the holding surface 71A. The plurality of fixing members 74 have the same configuration as the plurality of fixing members 34. The plurality of fixing members 74 may have portions that protrude with respect to the back surface 71B. In this case, the length of the portion of each of the plurality of fixing members 74 that protrudes to one side in the first direction DR1 with respect to the holding surface 71A is longer than the length of the portion of each of the plurality of fixing members 74 that protrudes to the other side in the first direction DR1 with respect to the back surface 71B.

[0074] Each of the plurality of guide members 72 extends from the holding member 71 along the first direction DR1. Each of the plurality of guide members 72 is provided so as to be inserted between two adjacent rails 20 in the sixth direction DR6 in the substrate housing device 102 and removed from between the two rails. The plurality of guide members 72 are, for example, two guide members 72. The two guide members 72 are provided so as to be inserted between two sets of rails that face each other in the fifth direction DR5 and are adjacent to each other in the sixth direction DR6 among the plurality of rails 20. One of the two guide members 72 is connected to one of a pair of short sides of the holding surface 71A. The other of the two guide members 72 is connected to the other of a pair of short sides of the holding surface 71A. Note that the number of guide members 72 included in the substrate holding structure 70 may be any number of one or more, and may be, for example, three or four.

[0075] Each of the plurality of stopper members 73 is arranged on one side of the first direction DR1 with respect to the plurality of guide members 72. Each of the plurality of guide members 32 is arranged between the holding surface 31A and each of the plurality of stopper members 73 in the first direction DR1.

[0076] Each of the plurality of stopper members 73 is arranged outside the plurality of guide members 72 when viewed from the first direction DR1. Each of the plurality of stopper members 73 is provided in the substrate housing device 102 so as to contact one end surface of one rail 20 in the fourth direction DR4 and limit the movement of the substrate holding structure 70 to the other side in the fourth direction DR4 from its appropriate accommodation position. Each of the plurality of stopper members 73 protrudes outward from each of the plurality of guide members 72 in the third direction DR3, for example.

[0077] As shown in FIG. 12, each of the plurality of guide members 72 extends only on one side in the first direction DR1 from the holding member 71, for example. In a state where the substrate holding structure 70 is properly inserted into the substrate housing device 102, one side in the first direction DR1 coincides with the opening 15 side with respect to the housing 10.

[0078] As shown in FIGS. 13 and 14, each of the plurality of guide members 72 is disposed outside the holding surface 71A in the second direction DR2 when viewed from the first direction DR1. Each of the plurality of stopper members 73 is disposed outside the holding surface 71A in the second direction DR2 when viewed from the first direction DR1. Each of the plurality of guide members 72 and the plurality of stopper members 73 is provided so as not to contact the first substrate 40 held by the holding member 71.

[0079] Each of the plurality of guide members 72 is, for example, a block-shaped member. The dimension of each of the plurality of guide members 72 in the third direction DR3 is larger than the dimension of the holding member 71 in the first direction DR1. In each of the plurality of guide members 72, the dimension in the third direction DR3 is, for example, larger than the dimension in the second direction DR2. The material constituting the guide member 72 is not particularly limited, but is, for example, a metal material.

[0080] Each of the plurality of stopper members 73 is connected to the holding member 71 via a connection portion 75, for example. The connection portion 75 extends along the first direction DR1. The connection portion 75 has a main surface facing outward in the second direction DR2. Each of the plurality of guide members 72 is disposed, for example, on the main surface of the connection portion 75. Each of the plurality of guide members 72 is fixed to the connection portion 75 by, for example, screws. The guide member 72 may be fixed to the connection portion 75 by any fixing means.

[0081] Each of the plurality of stopper members 73 is provided integrally with the holding member 71, for example. For example, the holding member 71, the two stopper members 73, and the two connection portions 75 are formed by subjecting a single plate-shaped member to bending or the like.

[0082] As shown in FIG. 14, one of the plurality of stopper members 73 has, for example, a fourth portion 73A, a fifth portion 73B, and a sixth portion 73C. The fourth portion 73A, the fifth portion 73B, and the sixth portion 73C have a U shape when viewed from the third direction DR3. The fourth portion 73A is connected to one end of the connection portion 75 in the first direction DR1 and extends toward the guide member 72 side from the connection portion 75 in the second direction DR2. The fifth portion 73B is connected to the outer end of the fourth portion 73A in the second direction DR2 and extends in one side in the first direction DR1. The sixth portion 73C is connected to one end of the fifth portion 73B in the first direction DR1 and extends inward in the second direction DR2. One of the plurality of stopper members 73 is disposed, for example, above the other of the plurality of stopper members 73 in the substrate housing device 102.

[0083] The other of the plurality of stopper members 73 consists of, for example, only a portion corresponding to the fourth portion 73A. Note that the other of the plurality of stopper members 73 may also have portions corresponding to the fifth portion 73B and the sixth portion 73C, similar to one of the plurality of stopper members 73.

[0084] Each of the plurality of stopper members 73 may be fixed to at least one of the holding member 71 and the plurality of guide members 72 by any fixing means such as adhesion or welding. The material constituting the stopper member 73 is not particularly limited, but is, for example, a metal material.

[0085] FIGS. 17 to 19 are diagrams for explaining a state in which the substrate holding structure 70 is housed in the substrate housing device 102. As shown in FIGS. 17 to 19, in a state where the substrate holding structure 70 is housed in the substrate housing device 102, each of the first direction DR1, the second direction DR2, and the third direction DR3 in the substrate holding structure 70 is along the fourth direction DR4, the fifth direction DR5, and the sixth direction DR6 in the substrate housing device 102, respectively.

[0086] As shown in FIGS. 17 to 19, the holding member 71 is disposed between the two sets of rails 20 facing the fifth direction DR5 in the substrate housing device 102. The dimension of the holding member 71 in the second direction DR2 is smaller than the interval between the two sets of rails 20 facing the fifth direction DR5. The dimension of the holding member 71 in the third direction DR3 is larger than the interval between two adjacent rails 20 in the sixth direction DR6.

[0087] The holding member 71 is arranged so as to overlap with the two second substrates 50 inserted into each of the two sets of rails 20 in the fourth direction DR4. The holding member 71 is arranged on one side in the fourth direction DR4 with respect to the two second substrates 50 inserted into each of the two sets of rails 20.

[0088] Each of the plurality of guide members 72 is inserted between two adjacent rails 20 in the sixth direction DR6 in the substrate housing device 101. Each of the plurality of guide members 72 has a main surface parallel to the outer wall surface of each rail 20 in the sixth direction DR6 and an end surface parallel to the inner surface of the bottom wall 11 or the upper wall 12.

[0089] Each of the plurality of stopper members 73 contacts the end surface on one side in the fourth direction DR4 of the two rails 20 in a state where each of the plurality of guide members 72 is inserted between two adjacent rails 20 in the sixth direction DR6. Each of the plurality of stopper members 73 contacts, for example, the end surface of the protruding portion 23.

[0090] As shown in FIG. 18, the substrate holding structure 70 is provided so as to be arranged at a distance from the second substrate 50 in the fourth direction DR4.

[0091] As shown in FIG. 19, the dimension of each of the plurality of guide members 72 in the second direction DR2 is larger than, for example, the dimension (protrusion height) in the fifth direction DR5 of the protruding portion 23 of each rail 20.

[0092] <Effects of the Substrate Holding Structure 70 and the Substrate Housing Device 102> Since the substrate holding structure 70 also includes a holding member 71, at least one guide member 72, and at least one stopper member 73, it has the same effect as the substrate holding structure 30.

[0093] In the substrate holding structure 70, in the first direction DR1, the guide member 72 is disposed between the holding surface 71A and the stopper member 73. The dimension of the guide member 72 in the first direction DR1 required to guide the first substrate 40 to an appropriate accommodation position by such a substrate holding structure 70 can be set smaller than the dimension of the guide member 32 in the first direction DR1 required to dispose the first substrate 40 at an appropriate accommodation position by the substrate holding structure 30. As a result, the substrate holding structure 70 can be more easily inserted into the housing 10 than the substrate holding structure 30.

[0094] Preferably, the dimension of each of the plurality of guide members 72 in the third direction DR3 is larger than the dimension of each of the plurality of guide members 72 in the second direction DR2. In this way, the positioning accuracy of the substrate holding structure 70 with respect to the plurality of rails 20 can be improved as compared with the case where the dimension of each of the plurality of guide members 72 in the third direction DR3 is smaller than the width of each of the plurality of guide members 72 in the second direction DR2.

[0095] Preferably, the dimension of each of the plurality of guide members 72 in the third direction DR3 is larger than the dimension of the holding member 71 in the first direction DR1. In this way, the positioning accuracy of the substrate holding structure 70 with respect to the plurality of rails 20 can be improved as compared with the case where the dimension of each of the plurality of guide members 72 in the third direction DR3 is smaller than the dimension of the holding member 71 in the first direction DR1.

[0096] <Modification Example> In the substrate holding structure 70, at least one of the guide member 72 and the stopper member 73 may be provided. From the viewpoint of enhancing the positioning accuracy of the substrate holding structure 70 with respect to the plurality of rails 20, it is preferable that the number of the guide members 72 and the stopper members 73 included in the substrate holding structure 70 is plural.

[0097] The substrate holding structure 70 may include a plurality of guide members 72 spaced apart from each other in the third direction DR3. The plurality of rails 20 arranged side by side in the sixth direction DR6 have a plurality of pairs of adjacent rails 20 in the sixth direction DR6. A part of the plurality of guide members 72 may be inserted between one pair of the plurality of pairs of rails 20, and another part of the plurality of guide members 72 may be inserted between another pair of the plurality of pairs of rails 20.

[0098] In the substrate holding structure 70, at least one guide member 72 may have a portion extending to the other side of the first direction DR1 with respect to the holding surface 71A.

[0099] The substrate housing device 102 may include a plurality of substrate holding structures 70. <Supplementary Note> As supplementary notes, various aspects of the present disclosure are collectively described. (Supplementary Note 1) A substrate holding structure including a holding member having a holding surface intersecting the first direction and provided to hold a substrate on the holding surface, at least one guide member extending along the first direction from the holding member, and at least one stopper member disposed on one side of the first direction with respect to the at least one guide member and protruding outward from the at least one guide member when viewed from the first direction. (Supplementary Note 2) The substrate holding structure according to Supplementary Note 1, wherein the at least one guide member is disposed outside the holding member in a second direction intersecting the first direction when viewed from the first direction, and the at least one stopper member is disposed on one side of the first direction with respect to the holding surface. (Supplementary Note 3) The substrate holding structure according to Supplementary Note 2, wherein the holding surface has a pair of short sides facing each other with a space therebetween in the second direction and a pair of long sides facing each other with a space therebetween in a third direction intersecting each of the first direction and the second direction, and the at least one guide member is connected to one of the pair of short sides. (Appendix 4) At least one guide member has a plurality of guide members arranged at intervals in the second direction. A part of the plurality of guide members is connected to one of a pair of short sides, and the remainder of the plurality of guide members is connected to the other of the pair of short sides. The substrate holding structure according to Appendix 3. (Appendix 5) At least one guide member has a plurality of guide members arranged at intervals in the third direction and is connected to one of a pair of short sides. The substrate holding structure according to Appendix 3 or 4. (Appendix 6) At least one stopper member has a plurality of stopper members connected to each of the plurality of guide members. The substrate holding structure according to Appendix 4 or 5. (Appendix 7) The width of each of the plurality of guide members in the third direction is narrower than the interval in the third direction between two adjacent guide members among the plurality of guide members. The substrate holding structure according to any one of Appendices 4 to 6. (Appendix 8) Each of the plurality of guide members extends to the other side in the first direction with respect to the holding surface, and the length of each of the plurality of guide members in the first direction is longer than the interval in the third direction between the two guide members. The substrate holding structure according to Appendix 7. (Appendix 9) In the first direction, at least one guide member is arranged between the holding surface and at least one stopper member. The substrate holding structure according to any one of Appendices 2 to 6. (Appendix 10) The width of at least one guide member in the third direction is wider than the width of at least one guide member in the second direction. The substrate holding structure according to Appendix 9. (Appendix 11) The width of at least one guide member in the third direction is wider than the width of the holding member in the first direction. The substrate holding structure according to Appendix 9 or 10. (Appendix 12) Further includes a substrate held on the holding surface of the holding member. The substrate has a first main surface facing the same side as the holding surface in the first direction and a second main surface located on the opposite side of the first main surface and facing the holding surface. At least one stopper member is arranged on one side in the first direction with respect to the first main surface. The substrate holding structure according to any one of Appendices 1 to 11. (Appendix 13) A substrate accommodating apparatus, comprising at least one substrate holding structure, a housing having an opening formed at one end in a fourth direction, and a plurality of rails extending along the fourth direction and fixed to the housing. The at least one substrate holding structure is the substrate holding structure described in any one of Appendices 1 to 12, and holds a first substrate having a first main surface and a second main surface located on the side opposite to the first main surface, with the first main surface intersecting the fourth direction. The housing has a first wall and a second wall facing each other with a space therebetween in a fifth direction intersecting the fourth direction. The plurality of rails are arranged on at least one of the inner surfaces of the first wall and the second wall, spaced apart from each other in a sixth direction orthogonal to each of the fourth direction and the fifth direction. The at least one substrate holding structure has a holding surface facing the second main surface, a holding member for holding the first substrate on the holding surface, at least one guide member inserted into one of the plurality of rails or inserted between two adjacent rails in the fourth direction among the plurality of rails, and at least one stopper member having a surface facing the end surface in the fourth direction of at least one of the plurality of rails and a surface facing the first direction in a state where at least one guide member is inserted into one of the rails. (Appendix 14) The substrate accommodating apparatus according to Appendix 13, wherein the plurality of rails are arranged on each of the inner surfaces of the first wall and the second wall, and the at least one guide member is inserted into one of the rails arranged on the inner surface of the first wall among the plurality of rails or inserted between two adjacent rails in the fourth direction among the rails arranged on the inner surface of the first wall, and the at least one guide member is inserted into one of the rails arranged on the inner surface of the second wall among the plurality of rails or inserted between two adjacent rails in the fourth direction among the rails arranged on the inner surface of the second wall. (Appendix 15) The substrate accommodating apparatus according to Appendix 13 or 14, further comprising a first substrate held by the at least one substrate holding structure and a plurality of second substrates inserted into each of the plurality of rails, wherein the first substrate, the at least one substrate holding structure, and the second substrates are accommodated in sequence from the opening side in the fourth direction.

[0100] The embodiments disclosed this time should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is shown not by the description of the above embodiments but by the claims, and it is intended that all modifications within the meaning and scope equivalent to the claims be included.

Explanation of Reference Numerals

[0101] 10 housing, 11 bottom wall, 12 upper wall, 13, 14 side walls, 15 opening, 16 connecting member, 19 terminal block, 20 rail, 21 first rail, 22 second rail, 23 protruding portion, 30, 70 substrate holding structures, 31, 71 holding members, 31A, 71A holding surfaces, 31B, 71B back surfaces, 32, 72 guide members, 32A first portion, 32B second portion, 32C third portion, 33, 73 stopper members, 34, 74 fixing members, 40 first substrate, 40A first main surface, 40B second main surface, 50 second substrate, 50A third main surface, 73A fourth portion, 73B fifth portion, 73C sixth portion, 75 connection portion, 101, 102 substrate housing devices.

Claims

1. A holding member having a holding surface intersecting a first direction and provided to hold a substrate on the holding surface; At least one guide member extending along the first direction from the holding member; At least one stopper member disposed on one side of the first direction with respect to the at least one guide member and protruding outward from the at least one guide member when viewed from the first direction, and comprising: The at least one guide member is disposed outside the holding member in a second direction intersecting the first direction when viewed from the first direction; The at least one stopper member is disposed on one side of the first direction with respect to the holding surface; The at least one guide member is inserted into one of a plurality of rails fixed to the housing with a space therebetween, or inserted between two adjacent rails of the plurality of rails, so that the at least one stopper member contacts at least one of the plurality of rails and is positioned in the housing. A substrate holding structure.

2. A holding member having a holding surface extending along a second direction intersecting a first direction and provided to hold a substrate on the holding surface; At least one guide member extending along the first direction from the holding member; At least one stopper member disposed on one side of the first direction with respect to the at least one guide member and protruding outward from the at least one guide member when viewed from the first direction; The substrate held on the holding surface of the holding member, and comprising: The substrate has a first main surface facing the same side as the holding surface in the first direction and a second main surface located on the opposite side of the first main surface and facing the holding surface; The at least one stopper member is disposed on one side of the first direction with respect to the first main surface; The at least one guide member is inserted into one of a plurality of rails fixed to the housing with a space therebetween, or inserted between two adjacent rails of the plurality of rails, so that the at least one stopper member contacts at least one of the plurality of rails and is positioned in the housing. A substrate holding structure.

3. The holding surface has a pair of short sides facing each other with a space therebetween in the second direction, and a pair of long sides facing each other with a space therebetween in a third direction intersecting each of the first direction and the second direction. The substrate holding structure according to claim 1 or 2, wherein the at least one guide member is connected to one of the pair of short sides.

4. The at least one guide member has a plurality of guide members arranged with a space therebetween in the second direction. A part of the plurality of guide members is connected to one of the pair of short sides. The substrate holding structure according to claim 3, wherein the remaining part of the plurality of guide members is connected to the other of the pair of short sides.

5. The substrate holding structure according to claim 3, wherein the at least one guide member has a plurality of guide members arranged with a space therebetween in the third direction and connected to one of the pair of short sides.

6. The substrate holding structure according to claim 4, wherein the at least one stopper member has a plurality of stopper members connected to each of the plurality of guide members.

7. The substrate holding structure according to claim 4, wherein the width of each of the plurality of guide members in the third direction is narrower than the interval in the third direction between two adjacent guide members among the plurality of guide members in the third direction.

8. Each of the plurality of guide members extends to the other side in the first direction with respect to the holding surface. The substrate holding structure according to claim 7, wherein the length of each of the plurality of guide members in the first direction is longer than the interval in the third direction between the two guide members.

9. In the first direction, the substrate holding structure according to claim 3, wherein the at least one guide member is disposed between the holding surface and the at least one stopper member.

10. The substrate holding structure according to claim 9, wherein the width of the at least one guide member in the third direction is wider than the width of the at least one guide member in the second direction.

11. The substrate holding structure according to claim 9, wherein the width of the at least one guide member in the third direction is wider than the width of the holding member in the first direction.

12. A housing having an opening formed at one end in a fourth direction, and a plurality of rails extending along the fourth direction and fixed to the housing. The housing has a first wall and a second wall that face each other with a space therebetween in a fifth direction intersecting the fourth direction. The plurality of rails are arranged on at least one of the inner surfaces of the first wall and the second wall, spaced apart from each other in a sixth direction orthogonal to each of the fourth direction and the fifth direction. The apparatus further includes at least one substrate holding structure that holds a first substrate having a first main surface and a second main surface located on the side opposite to the first main surface, with the first main surface intersecting the fourth direction. The at least one substrate holding structure includes: a holding member having a holding surface facing the second main surface and holding the first substrate on the holding surface; at least one guide member inserted into one of the plurality of rails or inserted between two adjacent rails in the sixth direction among the plurality of rails; a substrate housing device including at least one stopper member having a surface facing an end surface of at least one of the plurality of rails in the fourth direction in a state where the at least one guide member is inserted into the one rail.

13. The plurality of rails are arranged on each of the inner surfaces of the first wall and the second wall. The at least one guide member includes: at least one guide member inserted into one of the rails arranged on the inner surface of the first wall among the plurality of rails or inserted between two adjacent rails in the sixth direction among the rails arranged on the inner surface of the first wall; The substrate housing device according to claim 12, further comprising at least one guide member inserted into one of the rails arranged on the inner surface of the second wall among the plurality of rails or inserted between two adjacent rails in the sixth direction among the rails arranged on the inner surface of the second wall.

14. The apparatus further includes the first substrate held by the at least one substrate holding structure and a plurality of second substrates inserted into each of the plurality of rails. The substrate housing device according to claim 12 or 13, wherein the first substrate, the at least one substrate holding structure, and the second substrates are accommodated in order from the opening side in the fourth direction.

Images