Dark wet laboratory for scientific research

Abstract

Provided is a dark wet laboratory for scientific research that can achieve experimental operation without interruption for 24 hours and unmanned shifts, realize a dark laboratory, significantly improve the efficiency of scientific research and the utilization rate of equipment, improve the reliability of experimental results, reduce experimental costs, and effectively guarantee the safety of experimenters. 【Solution means】A dark wet laboratory for scientific research including a laboratory main body, a wet machine base, a transfer robot, a sample supply and recovery device, a chemical solution supply and recovery device, and a control device, which is used to provide a clean space. The transfer robot includes a moving device 21, a robot arm device 22, at least one end effector 23, and an accessory device 24. The accessory device is movable following the moving device, provides a temporary storage space, the robot arm device is attached to the moving device, and at least one end effector is attached to the robot arm device to grip a semiconductor sample and / or a chemical solution tank.

Description

Technical Field

[0001] This application relates to the field of semiconductor cleaning and etching technology, and particularly to a dark wet laboratory for scientific research.

Background Art

[0002] In the semiconductor micro-nano device manufacturing process, it is necessary to perform wafer surface cleaning and acid-alkali etching using a wet machine tool. Conventional enterprise-level wet machine tools have a high degree of automation but are only suitable for mass production and cannot meet flexible and diverse scientific research scenarios. To solve the above problems, Patent Document 1 discloses a fully automated wet etching system and machine tool for scientific research that meets the scientific research needs of universities and improves scientific research efficiency and process stability. However, this design can only achieve the automation of one unit, and the wet laboratory constructed thereby still depends on manual operation by personnel and has the following deficiencies.

[0003] 1. It is difficult to further improve scientific research efficiency. 2. It is difficult to fully utilize wet machine tools for scientific research. 3. The experimental results are unstable and lack reliability. 4. The difficulty of laboratory management is high, and the experimental cost is relatively high. 5. There are risks to personnel safety. 6. The efficiency of data collection and analysis is low.

[0004] Therefore, it is necessary to provide a new design solution to solve the above deficiencies.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] In view of this, an object of the present application is to provide a dark wet laboratory for scientific research to solve the problems caused by the fact that conventional wet laboratories for scientific research still rely on manual operations of personnel.

Means for Solving the Problems

[0007] To achieve the above technical object, the present application provides a dark wet laboratory for scientific research. The dark wet laboratory for scientific research includes a laboratory main body, a wet machine base, a transfer robot, a sample supply and recovery device, a chemical solution supply and recovery device, and a control device. The laboratory main body is used to provide a clean space. The wet machine base is installed in the clean space for processing semiconductor samples. The sample supply and recovery device is installed in the clean space to provide semiconductor samples to be processed and store the processed semiconductor samples. The chemical solution supply and recovery device is installed in the clean space to provide chemical solution tanks to be replaced and store the replaced chemical solution tanks. The transfer robot is attached to the clean space to transfer semiconductor samples and / or chemical solution tanks among the wet machine base, the transfer robot, the sample supply and recovery device, and the chemical solution supply and recovery device. The transfer robot includes a moving device, a robot arm device, at least one end effector, and an accessory device. The accessory device is movable following the moving device and provides a temporary storage space. The robot arm device is attached to the moving device. At least one of the end effectors is attached to the robot arm device to grip semiconductor samples and / or chemical solution tanks. The control device is communicatively connected to the wet machine base, the transfer robot, the sample supply and recovery device, and the chemical solution supply and recovery device.

[0008] Furthermore, the accessory device is removably connected to the moving device, The scientific research dark wet laboratory further includes an accessory fixing frame, The accessory fixing frame is attached to the clean space to fix the accessory device, The transport robot further includes a fork device, The fork device is attached to the moving device to lift the accessory device located on the accessory fixing frame.

[0009] Furthermore, the fork device includes a fork lifting device and a pallet, A relief cavity for the pallet to penetrate is provided at a position below the accessory device of the accessory fixing frame, The fork lifting device is attached to the top of the moving device, and the driving end is connected to the pallet to move the pallet up and down, so as to fork and detach the accessory device from the accessory fixing frame or fork and return the accessory device to the accessory fixing frame.

[0010] Furthermore, several first fork positioning structures are provided on the top of the pallet, Several second fork positioning structures that are positioned and fitted one by one with the first fork positioning structures are provided at the bottom of the accessory device.

[0011] Furthermore, a chamber for forming the temporary storage space is provided inside the accessory device, An accessory opening and closing door mechanism for controlling the opening and closing of the chamber is attached to the accessory device.

[0012] Furthermore, a first docking structure is provided at the bottom of the accessory device, A first conductive structure electrically connected to the accessory opening and closing door mechanism is provided on the first docking structure, The mobile device is provided with a second docking structure that can be docked with the first docking structure. The second docking structure is provided with a second conductive structure that can come into contact with the first conductive structure and conduct electricity. The transfer robot is further used to supply power to the accompanying opening and closing door mechanism when the first conductive structure and the second conductive structure come into contact and conduct electricity.

[0013] Furthermore, the first docking structure is provided with a first ventilation structure that communicates with the temporary storage space. The second docking structure is provided with a second ventilation structure that can be docked with the first ventilation structure and conduct. A gas supply device that is connected to and conducts with the second ventilation structure is attached to the mobile device.

[0014] Furthermore, the accompanying fixed frame includes two support plates that are symmetrically installed at intervals. On both side surfaces of the accompanying device, stopper protrusions that can come into contact and abut in a one-to-one correspondence with the top of the support plate are provided respectively.

[0015] Furthermore, a floating correction module is provided in the accompanying fixed frame. The floating correction module is used to correct the position of the mobile device or the fork device that penetrates into the accompanying fixed frame so that the first fork positioning structure faces the second fork positioning structure.

[0016] Furthermore, an anticorrosion lining is provided in the temporary storage space.

[0017] Furthermore, there are at least two end effectors. One of the end effectors is used to grip semiconductor samples. Another end effector is used to grip the chemical solution tank. The end effector is removably connected to the robotic arm device via a joint assembly. The accessory device is provided with a mounting station for mounting the end effector.

[0018] Furthermore, below the position of the sample input / output port of the wet machine base, a sample carrier mechanism for placing the semiconductor material to be sent to the sample input / output port or for placing the semiconductor material sent out from the sample input / output port is attached.

[0019] Furthermore, the sample carrier mechanism includes a carrier plate and a sample carrier drive assembly. The carrier plate is rotatably attached to the wet machine base. The sample carrier drive assembly is attached to the wet machine base and connected to the carrier plate in order to rotate the carrier plate.

[0020] Furthermore, at the position of the liquid storage chamber of the wet machine base, a chemical solution carrier mechanism for placing a chemical solution tank is attached. The chemical solution carrier mechanism includes a support base, a chemical solution carrier drive assembly, and a liquid extraction member. The support base is used for placing a chemical solution tank. The chemical solution carrier drive assembly is connected to the support base in order to drive the support base to extend or retract from the liquid storage chamber. The liquid extraction member is removably attached to the chemical solution tank.

[0021] Furthermore, the liquid extraction member includes a liquid extraction tube and a liquid extraction cover. The liquid extraction tube can penetrate into the chemical solution tank through the chemical solution port of the chemical solution tank. The liquid extraction cover is sleeved on the liquid extraction tube and can be fitted with the chemical solution port to block the chemical solution port. On the support table, a fixing member for fixing the liquid collecting member to be attached is vertically attached. The fixing member has a hollow columnar structure for movably inserting the liquid collecting tube.

[0022] Furthermore, the sample supply and recovery device includes a device main body and a sample displacement device. A sample chamber is provided inside the device main body. At the bottom of the sample chamber, a first load / unload station, a second load / unload station, a first temporary storage station, and a second temporary storage station are provided. At a position corresponding to the first load / unload station of the device main body, a first load / unload opening communicating the sample chamber with the outside of the clean space is provided. A first door that can be opened and closed is attached to the first load / unload opening. At a position corresponding to the second load / unload station of the device main body, a second load / unload opening communicating the sample chamber with the inside of the clean space is provided. A second door that can be opened and closed is attached to the second load / unload opening. The sample displacement device is attached to the sample chamber to move the semiconductor sample among the first load / unload station, the second load / unload station, the first temporary storage station, and the second temporary storage station.

[0023] Furthermore, on the side of the first load / unload opening of the device main body, a human-computer interaction device that is communicatively connected to the control device and extends outside the clean space is attached.

[0024] Furthermore, the chemical solution supply and recovery device includes a chemical solution buffer box. Inside the chemical solution buffer box, there is a buffer chamber for storing the chemical solution tank to be loaded or the replaced chemical solution tank. The chemical solution buffer box is provided with a buffer opening. A buffer door that can be opened and closed is attached to the buffer opening.

[0025] Furthermore, the floor of the clean space is divided from the outside to the inside into an external annular region, an internal annular region, and a central region located within the internal annular region. The wet machine base is installed in the external annular region or the central region. The sample supply and recovery equipment and the chemical solution supply and recovery equipment are installed in the external annular region.

[0026] Furthermore, the robot arm device is a collaborative robot arm.

[0027] Furthermore, the mobile device is an AGV (Automated Guided Vehicle).

Advantages of the Invention

[0028] As can be seen from the above technical solutions, the dark wet laboratory for scientific research according to this application is configured to interlock a transfer robot, sample supply and recovery equipment, chemical solution supply and recovery equipment, and control equipment with a wet machine base, thereby realizing 24-hour uninterrupted experimental operation and unmanned shift work, and can realize a dark laboratory, and has the following beneficial effects.

[0029] 1. Automatically schedule according to the work instructions input by the experimenter, and perform automatic circulation of semiconductor samples, automatic replacement of chemical solution tanks, automated processing of semiconductor samples, automatic collection and analysis of experimental data, etc. according to the schedule, which can significantly improve the efficiency of scientific research and the utilization rate of equipment.

[0030] 2. There is no need for the experimenter to contact the chemical solution, effectively guaranteeing the safety of the experimenter.

[0031] 3. Avoid situations such as waste of chemical solutions, waste of samples, and damage to equipment due to incorrect operations caused by the instability of the manual operations of traditional experimenters, and effectively reduce the experimental costs.

[0032] 4. Automatically implement the experimental process of semiconductor materials, and improve the reliability of experimental results by enhancing the stability and accuracy of the tests.

[0033] 5. Achieve unmanned shift operation through automation and improve the management level of the laboratory.

[0034] 6. Arrange an accompanying device that moves following the moving device, realize the transportation of a plurality of semiconductor samples or a plurality of chemical solution tanks at one time, reduce the frequency of reciprocating to pick up materials, and further improve the efficiency.

[0035] 7. It has great significance in promoting the development of scientific research technology, improves the research and development efficiency of semiconductor technology, and accelerates the progress of research and development.

[0036] To more clearly explain the technical solutions in the embodiments of the present application or the prior art, the following briefly introduces the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can also obtain other drawings based on these drawings on the premise of not paying creative labor.

Brief Description of the Drawings

[0037]

Figure 1

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Figure 4

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Figure 10

Embodiments for Carrying Out the Invention

[0038] The following clearly and completely describes the technical solutions of the embodiments of the present application with reference to the drawings. Obviously, the described embodiments are some embodiments of the embodiments of the present application, not all embodiments. All other embodiments obtained by those skilled in the art on the premise of not paying creative labor based on the embodiments of the present application belong to the protection scope of the embodiments of the present application.

[0039] In the description of the embodiments of the present application, the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is the orientation or positional relationship shown based on the drawings, and is only for the convenience of description and simplification of the description of the present application, and does not indicate or imply that the indicated device or element must have a specific orientation and be configured and operated in a specific orientation. Therefore, it should not be understood as a limitation to the embodiments of the present application. Note that the terms "first", "second", "third" are only used for the purpose of description and should not be understood as indicating or implying relative importance.

[0040] In the description of the embodiments of the present application, unless specifically defined and limited, the terms "attachment", "connection", "connection" should be understood in a broad sense. For example, it may be a fixed connection, a replaceable connection, or an integral connection, a mechanical connection, an electrical connection, a direct connection, an indirect connection through an intermediate medium, or a communication inside two elements. Those skilled in the art may understand the specific meaning of the above terms in the embodiments of the present application according to specific situations.

[0041] The embodiments of the present application disclose a dark wet laboratory for scientific research.

[0042] Referring to FIGS. 1 and 2, as an embodiment, the dark wet laboratory for scientific research according to the embodiments of the present application includes a laboratory main body (not shown), a wet machine base 1, a transfer robot 2, a sample supply and recovery device 3, a chemical solution supply and recovery device 4, and a control device 5.

[0043] The laboratory main body is used to provide a clean space. The laboratory main body is constructed of, for example, fire-resistant and explosion-proof plates, and devices such as fire prevention and air purification devices may be arranged thereon to ensure the cleanliness and safety of the clean space. Those skilled in the art may make appropriate design changes based on this, and are not limited thereto.

[0044] The wet tool 1 is installed in a clean space for processing semiconductor samples. In this application, multiple wet tools 1 may be installed as needed. They are different types of tool equipment. Taking multiple wet tools 1 as an example, one of the wet tools 1 may be an organic wet tool, two of them may be oxide cleaning tools, one of them may be a metal etching tool, one of them may be a KOH cleaning tool, one of them may be an HF cleaning tool, one of them may be a mask cleaning tool, etc. Those skilled in the art may select as needed, and it is not limited thereto. Each tool equipment is designed or adapted based on the wet etching fully automated system and tool disclosed in Patent Document 1, and specific descriptions are omitted.

[0045] In the case of multiple wet tools 1, the interconnection of processes can be realized and the sequence can be determined.

[0046] In wet experiments, there are few processes that are carried out continuously. Generally, they are carried out step by step with processes such as dry / photoetching / film coating. Therefore, when multiple tools are interconnected, it is also necessary to cooperate with other equipment. For example, In the organic wet tool / oxide cleaning tool No. 2, clean the surface of the wafer (it can be a short time, several minutes), perform processes such as photoetching / dry etching, and in the organic wet tool / oxide cleaning tool No. 2 / HF cleaning tool, remove the adhesive (the time may vary from 10 min to 2 hours), and perform wet etching on the KOH cleaning tool (about 8 hours).

[0047] In the case of multiple wet tools 1, reasonably plan the usage order of each wet tool 1 according to the process sequence, reserved time, process time length, sampling time, etc., and realize simultaneous performance of multiple sets of experiments and sequential and orderly performance.

[0048] Realize the performance of multiple sets of experiments on the corresponding wet tool 1 according to the planned order / experiment type.

[0049] The sample supply and recovery device 3 is installed in the clean space to provide the semiconductor sample to be processed and store the processed semiconductor sample.

[0050] The chemical solution supply and recovery device 4 is installed in the clean space to provide the chemical solution tank 15 to be replaced and store the replaced chemical solution tank 15.

[0051] The transfer robot 2 is attached to the clean space to transfer the semiconductor sample and / or the chemical solution tank 15 among the wet processing machine 1, the transfer robot 2, the sample supply and recovery device 3, and the chemical solution supply and recovery device 4.

[0052] The transfer robot 2 includes a moving device 21, a robot arm device 22, at least one end effector 23, and an accessory device 24.

[0053] The accessory device 24 is movable following the moving device 21 and provides a temporary storage space, which can be used to temporarily store the semiconductor sample to be loaded, the processed semiconductor sample, the chemical solution tank 15 to be replaced, or the replaced chemical solution tank 15.

[0054] The robot arm device 22 is attached to the moving device 21, and at least one end effector 23 is attached to the robot arm device 22 to grip the semiconductor sample and / or the chemical solution tank 15. The end effector 23 may be a conventional mechanical jaw, which can grip the cassette 33 or the jig holder on which the semiconductor sample is loaded, further grip the chemical solution tank 15, and grip the tank cover of the chemical solution tank 15, and may be used to loosen or tighten the tank cover by the rotation mechanism at the end of the robot arm, and is not specifically limited.

[0055] The control device 5 is communicatively connected to the wet processing machine 1, the transfer robot 2, the sample supply and recovery device 3, and the chemical solution supply and recovery device 4.

[0056] The dark wet laboratory for scientific research according to the present application is configured to interlock a transfer robot 2, a sample supply and recovery device 3, a chemical solution supply and recovery device 4, and a control device 5 with a wet machine base 1, so as to realize an uninterrupted 24-hour experimental operation and unmanned shift work, and a dark laboratory can be realized, and it has the following beneficial effects.

[0057] 1. Automatically schedule according to the work instructions input by the experimenter, and according to the schedule, perform automatic circulation of semiconductor samples, automatic replacement of the chemical solution tank 15, automated processing of semiconductor samples, automatic collection and analysis of experimental data, etc., which can significantly improve the efficiency of scientific research and the utilization rate of equipment.

[0058] 2. The experimenter does not need to contact the chemical solution, effectively guaranteeing the safety of the experimenter.

[0059] 3. Avoid situations such as waste of chemical solutions, waste of samples, and damage to equipment due to incorrect operations caused by the instability of the manual operations of conventional experimenters, and effectively reduce the experimental costs.

[0060] 4. Automatically implement the experimental process of the semiconductor material 331, improve the stability and accuracy of the test, and improve the reliability of the experimental results.

[0061] 5. Automate and unmanned shift work to improve the management level of the laboratory.

[0062] 6. An accompanying device 24 that moves following the moving device 21 is arranged, realizing the transfer of a plurality of semiconductor samples or a plurality of chemical solution tanks 15 at one time, reducing the frequency of reciprocating to pick up materials, and further improving the efficiency.

[0063] 7. It has great significance in promoting the development of scientific research technology, improving the research and development efficiency of semiconductor technology, and accelerating the progress of research and development.

[0064] The above is Embodiment 1 of the dark wet laboratory for scientific research according to the embodiments of the present application. The following is Embodiment 2 of the dark wet laboratory for scientific research according to the embodiments of the present application. Specifically, refer to FIGS. 1 to 10.

[0065] Based on the solution of the above Embodiment 1, Furthermore, in order to improve the convenience of use, different accessory devices 24 can be selectively used as needed. This accessory device 24 is arranged to be removably connected to the moving device 21. Specifically, different accessory devices 24 are arranged to correspond to one wet machine base 1. When it is necessary to perform loading / unloading / chemical solution exchange on the corresponding wet machine base 1, the corresponding accessory device can be replaced.

[0066] Specifically, as shown in FIG. 3, the present application arranges an accessory fixing frame 26. The accessory fixing frame 26 is attached to the clean space to fix the accessory device 24.

[0067] As shown in FIG. 4, the transport robot 2 further includes a fork device 27. The fork device 27 is attached to the moving device 21 to lift the accessory device 24 located in the accessory fixing frame 26. A plurality of accessory devices 24 are arranged, and a plurality of corresponding accessory fixing frames 26 are arranged. The accessory devices 24 are attached and fixed one by one in correspondence. When it is necessary to use, by using the fork device 27 to take the corresponding accessory device 24, the connection between the accessory device 24 and the moving device 21 can be realized. On the other hand, when it is not necessary to use, the accessory device 24 can be returned to the accessory fixing frame 26.

[0068] Furthermore, as shown in FIG. 4, the fork device 27 includes a fork lifting device 271 and a pallet 272.

[0069] A relief cavity for the pallet 272 to penetrate is provided at the lower position of the accessory device 24 of the accessory fixing frame 26, thereby ensuring that the moving device 21 can move below the corresponding accessory device 24 together with the pallet 272.

[0070] The fork lifting device 271 is attached to the top of the moving device 21, and its driving end is connected to the pallet 272 to move the pallet 272 up and down to fork the accessory device 24 away from the accessory fixing frame 26 or fork the accessory device 24 back to the accessory fixing frame 26.

[0071] When taking it out for use, the moving device 21 enters the escape cavity and positions the pallet 272 directly below the corresponding accessory device 24. Then, the fork lifting device 271 moves the pallet 272 upward until it can lift the accessory device 24. The moving device 21 further moves and exits the escape cavity, detaching the accessory device 24 from the accessory fixing frame 26. Then, the fork lifting device 271 moves the pallet 272 downward to the initial position.

[0072] When returning, the fork lifting device 271 moves the pallet 272 upward to a certain height. Then, the moving device 21 enters the escape cavity and positions the pallet 272 above the corresponding accessory fixing frame 26. Then, the fork lifting device 271 moves the pallet 272 downward by a certain height to return the accessory device 24 to the accessory fixing frame 26.

[0073] The robot arm device 22 in the present application may be attached to the top of the fork lifting device 271. The fork lifting device 271 may be a screw slide or the like, as long as it meets the lifting control requirements, and is not limited thereto.

[0074] Furthermore, as shown in FIGS. 4 and 5, in order to realize accurate forking and enable a reliable connection between the accessory device 24 and the pallet 272 after forking, several first fork positioning structures 2721 are provided on the top of the pallet 272. Correspondingly, several second fork positioning structures 241 that are positioned and fitted with the first fork positioning structures 2721 one by one are provided on the bottom of the accessory device 24.

[0075] The first fork positioning structure 2721 may be a positioning protrusion, and the number thereof may be four. Correspondingly, the second fork positioning structure 241 may be a positioning concave groove, and the number thereof is consistent with the number of the positioning protrusions. Those skilled in the art may make appropriate design changes based on this, and are not limited thereto.

[0076] To meet the power supply of the electric door mechanism, a power supply battery is arranged in the accessory device 24. Correspondingly, a charging device may be arranged in the accessory fixing frame 26 to charge the battery in the fixed accessory device 24. The charging method may be wireless charging or contact charging. Of course, the accessory opening and closing door mechanism 242 is a manual door mechanism, and the end effector 23 may be further moved by the robot arm device 22 to simulate a human hand to perform the door opening and closing operation.

[0077] Of course, the electric door mechanism may be powered through the transfer robot 2. Specifically, a first docking structure (not shown) is provided at the bottom of the accessory device 24.

[0078] The first docking structure is provided with a first conductive structure electrically connected to the accessory opening and closing door mechanism 242. This first conductive structure may be a contact conductive pin head or other conductive joint structure, and is not limited thereto.

[0079] The moving device 21 is provided with a second docking structure 211 that can be docked with the first docking structure. The first docking structure and the second docking structure 211 may be fitted to each other, which is similar to the fitting design of the protrusion and the concave groove mentioned above, and the specific description is omitted. Also, in order to avoid the up and down movement of the pallet 272 being affected, the pallet 272 is provided with a relief opening for the second docking structure 211 to protrude during movement.

[0080] The second docking structure 211 is provided with a second conductive structure that can come into contact with the first conductive structure and conduct electricity. The transfer robot 2 is further used to supply power to the associated opening and closing door mechanism 242 when the first conductive structure and the second conductive structure come into contact and conduct electricity. Specifically, when the pallet 272 rises to lift the associated device 24 from the associated fixing frame 26, then exits from the associated fixing frame 26, and further descends to the initial position, at this time, the first docking structure of the associated device 24 located on the pallet 272 completes docking with the second docking structure 211, the first conductive structure and the second conductive structure come into contact and conduct electricity, and further controls the power management module of the transfer robot 2 to supply power to the associated opening and closing door mechanism 242.

[0081] Furthermore, the first docking structure may be provided with a first ventilation structure communicating with the temporary storage space, and the second docking structure 211 is provided with a second ventilation structure that can be docked and conduct electricity with the first ventilation structure. The first ventilation structure and the second ventilation structure may be gas joints inserted into each other.

[0082] A gas supply device (not shown) that is connected to and conducts electricity with the second ventilation structure is attached to the moving device 21. This gas supply device may be a gas pump device, and it can supply gas to the temporary storage space or exhaust gas from the temporary storage space. By installing the gas supply device, there are the following applications.

[0083] 1. Supply gas to the temporary storage space so that the temporary storage space maintains a micro positive pressure state (a filtering device for filtering the gas supplied to the temporary storage space may be arranged in the gas supply device). In this way, even when in the open state, the overflow gas generated by the micro positive pressure can be used to block the intrusion of external dust into the temporary storage space, and the cleanliness of the temporary storage space can be maintained.

[0084] 2. Purge or suck the temporary storage space to realize the cleaning of the temporary storage space.

[0085] 3. When the accompanying opening and closing door mechanism 242 is pneumatically driven, it can be used as a power source for controlling the accompanying opening and closing door mechanism 242.

[0086] Furthermore, in order to ensure that the subsequent first fork positioning structure 2721 docks exactly with the second fork positioning structure 241 and accurately lifts the accessory device 24 by enabling an accurate alignment and fitting between the first fork positioning structure 2721 and the second fork positioning structure 241, the accessory fixing frame 26 may be provided with a floating correction module (not shown).

[0087] The floating correction module is used to correct the position of the moving device 21 or the fork device 27 that penetrates into the accessory fixing frame 26 so that the first fork positioning structure 2721 faces the second fork positioning structure 241.

[0088] Specifically, this floating correction module may be arranged to include a first direction corrector and a second direction corrector (both the first direction corrector and the second direction corrector include a telescopic device and a push plate. The telescopic device connects the push plate and moves the push plate, and further pushes and moves the penetrating moving device 21 to complete the correction). The first direction corrector consists of two symmetrically installed ones along the direction perpendicular to the direction of the moving device 21 penetrating into and withdrawing from the accessory fixing frame 26. When the moving device 21 penetrates into the accessory fixing frame 26, the two first direction correctors are located on both sides of itself, and the telescopic movement of the first direction corrector corrects the position of the moving device 21 in the first direction. The second direction corrector is installed along the direction of the moving device 21 penetrating into and withdrawing from the accessory fixing frame 26. When the moving device 21 penetrates into the accessory fixing frame 26, the second direction corrector is located at the tip position of the moving device 21, and the telescopic movement of the second direction corrector corrects the position of the moving device 21 in the second direction.

[0089] To better achieve accurate positioning and fitting, positioning guide grooves with a relatively large size may be arranged around the positioning concave grooves to be arranged. It has a guide inclined surface for guiding the positioning protrusion into the positioning concave groove to achieve physical positioning. Of course, in order to achieve sensing positioning, a positioning sensor such as a scanner may be added to the bottom of the accessory device 24, and a sensing structure (such as a label code) that can be sensed by the positioning sensor may be installed on the pallet 272. Those skilled in the art may make appropriate design changes based on this, and are not limited thereto.

[0090] Furthermore, in order to avoid corrosion caused by the chemical solution in the temporary storage space, an anticorrosive lining is provided in the temporary storage space. This anticorrosive lining may be made of materials such as PFA, Teflon (registered trademark), and PP, and is not specifically limited.

[0091] Furthermore, as shown in FIG. 3, the accessory device 24 has a structure like a housing, and a chamber for forming a temporary storage space is provided inside it. An accessory opening and closing door mechanism 242 for controlling the opening and closing of the chamber is attached to the accessory device 24. The accessory opening and closing door mechanism 242 is an electric door mechanism that is controlled by the control device 5 to achieve electric opening and closing, such as a flip - type electric door mechanism. One may refer to the conventional electric door design or directly use it, and specific descriptions are omitted.

[0092] Furthermore, as shown in FIG. 3, the accessory fixing frame 26 may include two support plates 261 that are symmetrically installed at intervals. Accordingly, on both sides of the accessory device 24, stopper protrusions 243 that can contact and abut in a one - to - one correspondence with the tops of the support plates 261 are provided respectively. Regarding contact charging, charging contacts for realizing the charging of the battery inside the accessory device 24 by contact may be installed at the bottom of the stopper protrusion 243 and the top of the support plate 261.

[0093] Furthermore, as shown in FIG. 3, at least two end effectors 23 are provided. Here, one end effector 23 is used to grip a semiconductor sample, and another end effector 23 is used to grip the chemical solution tank 15. In order to more accurately position the corresponding end effector 23, it is realized that different end effectors 23 perform different operations. For example, the opening and closing degree of the jaw mechanism of the end effector 23 for gripping the cassette 33 on which the semiconductor material 331 is placed may be configured to be small, but the opening and closing degree of the jaw mechanism for gripping the chemical solution tank 15 may be configured to be large, and it is not specifically limited.

[0094] Also, the end effector 23 may be an overhaul actuator. The robot arm device 22 moves the end effector 23 that is an overhaul actuator to perform the overhaul of the corresponding device, realizing an automated overhaul operation. Of course, it is not limited to this, and it may be other execution mechanisms, for example, a cleaning mechanism for realizing a cleaning operation, and it is not specifically limited.

[0095] As shown in FIG. 2, the end effector 23 may be arranged to be removably connected to the robot arm device 22 via the joint assembly 25. This joint assembly 25 is a conventional quick connector. Specifically, it includes a first joint 251 fixed to the end of the robot arm device 22 and a second joint 252 fixed to the end effector 23, thereby realizing quick connection and removal.

[0096] As shown in FIG. 3, the attachment device 24 is provided with a placement station 244 for placing the end effector 23, in order to place the end effector 23 during attachment and facilitate replacement of the end effector 23. The placement station 244 may be a locking groove structure for the end effector 23 to be engaged. The second joint 252 may be specifically installed on the outer surface of the end effector 23 and reinforced and connected to the end effector 23 via a right-angle connecting plate. For example, if the placement station 244 is a locking groove, a step is further provided therein to support the second joint 252 connected to the end effector 23 to be engaged. By installing the second joint 252 on one side of the end effector 23, the length size of the end effector 23 is reduced, and a protruding structure is formed on the side of the end effector 23 to contact the step and achieve rapid fixing. This design structure is simple, convenient for inserting and removing the end effector 23, and contributes to improving efficiency, and is not specifically limited.

[0097] In order to realize that the mounting station 244 of one of the auxiliary devices 24 can be replaced as necessary, an extension boss 245 is provided at the bottom of one side of the auxiliary device. By providing the extension boss 245, a right-angle mounting area can be formed between the one side of the auxiliary device 24. A removable jig plate 28 is provided on the extension boss 245, and the jig plate 28 may have a "U-shape", and the extension boss 245 is attached to the lower plate of the jig plate 28, and the side plate of the jig plate 28 is attached to one side of the auxiliary device 24 to realize a strong mounting and fixing, and the required mounting station 244 is provided on the upper plate of the jig plate 28. The jig plate 28 may be connected to the auxiliary device 24 via a fastener such as a screw or a bolt, and is not specifically limited.

[0098] Furthermore, since the processing time of the semiconductor material 331 by the wet processing machine 1 varies according to the processing demand, after the control device 5 obtains the processing completion time of the semiconductor material 331 by the wet processing machine 1, it can timely control the transfer robot 2 to take out the processed semiconductor material 331. However, if the mobile robot is moving another semiconductor material 331 or replacing the chemical solution tank 15 at this time, the transfer robot 2 needs to stop its current operation or put the wet processing machine 1 in a standby state, which will affect the usage efficiency of the transfer robot 2 or the wet processing machine 1. To solve the above problems, the following improvements are made.

[0099] As shown in FIG. 6, in the present application, the wet processing machine 1 is improved, and below the position of the sample input and discharge port 11 thereof, a sample carrier mechanism 12 for placing the semiconductor material 331 to be sent to the sample input and discharge port 11 or placing the semiconductor material 331 sent out from the sample input and discharge port 11 is installed. After the wet processing machine 1 completes the processing of the semiconductor material 331, it directly pushes the semiconductor material 331 from the sample input and discharge port 11 into the sample carrier mechanism 12 for extraction and standby, and then waits with the input and discharge port always open or can close the sample input and discharge port 11 without stopping and execute other processes. When the transfer robot 2 loads, it first transports the semiconductor material 331 to the sample carrier mechanism 12, and then executes the next process. When a notification that the wet processing machine 1 is available is sent from the control device 5, it returns to take out the semiconductor material 331 sent out by the wet processing machine 1, and places the semiconductor material 331 located in the sample carrier mechanism 12 at a predetermined position, thereby facilitating the feeding into the wet processing machine 1. Since the semiconductor material 331 to be processed first is placed in the sample carrier mechanism 12, more temporary storage spaces of the accessory device 24 are freed, the processed semiconductor samples are better recovered, and the usage efficiency of the equipment is further improved.

[0100] Furthermore, as shown in FIG. 6, the sample carrier mechanism 12 includes a carrier plate 121 and a sample carrier drive assembly 122.

[0101] The carrier plate 121 is rotatably attached to the wet machine base 1, and the sample carrier drive assembly 122 is attached to the wet machine base 1 and connected to the carrier plate 121 to rotate the carrier plate 121. The sample carrier drive assembly 122 may be an electric push rod, the number of which may be two, and one end is hinged to the wet machine base 1 and the other end is hinged to the bottom of the carrier plate 121, and the carrier plate 121 is rotated by the telescopic movement. When it is necessary to use the carrier plate 121, the carrier plate 121 is inverted to the horizontal state by controlling the sample carrier drive assembly 122 to extend. When it is not necessary to use it, the carrier plate 121 is inverted to the vertical state by controlling the sample carrier drive assembly 122 to retract.

[0102] Furthermore, as shown in FIG. 6, in order to relatively well realize the replacement of the chemical liquid tank 15, the present application improves the wet machine base 1, and a chemical liquid carrier mechanism 14 for placing the chemical liquid tank 15 is attached at the position of the liquid storage chamber 13 of the wet machine base 1.

[0103] The liquid storage chamber 13 has an open structure. As shown in FIGS. 7 and 8, the chemical liquid carrier mechanism 14 includes a support base 141, a chemical liquid carrier drive assembly 142, and a liquid extraction member 143.

[0104] The support base 141 is used to place the chemical liquid tank 15, and a positioning and mounting groove for positioning and mounting the chemical liquid tank 15 is provided thereon.

[0105] The chemical liquid carrier drive assembly 142 is connected to the support base 141 to drive the support base 141 to extend or retract from the liquid storage chamber 13. The chemical liquid carrier drive assembly 142 may be a conventional multi-stage telescopic shaft rod / multi-stage chain drive telescopic mechanism, and specific description is omitted.

[0106] The liquid extraction member 143 is detachably attached to the chemical liquid tank 15.

[0107] When exchanging, the chemical liquid carrier drive assembly 142 first extends the chemical liquid tank 15 that needs to be exchanged out of the liquid storage chamber 13. Then, the robot arm device 22 moves the end effector 23 to first take out the liquid extraction member 143, and further grips the chemical liquid tank 15 that needs to be exchanged and transports it to the temporary storage space. After that, it grips the new chemical liquid tank 15 from the temporary storage space and places it on the support base 141. Then, the robot arm device 22 moves the end effector 23 to loosen the tank cover of the new chemical liquid tank 15, and further puts the liquid extraction member 143 into the new chemical liquid tank 15. After that, the chemical liquid carrier drive assembly 142 retracts the exchanged chemical liquid tank 15 into the liquid storage chamber 13. The liquid extraction mechanism in the wet machine base 1 is connected to the liquid extraction member 143 through a telescopic flexible tube (for example, a telescopic bellows), and is connected using a telescopic flexible tube so as to avoid affecting the attachment and detachment operation of the liquid extraction member 143 and the movement of the support base 141, sucks the chemical liquid from the new chemical liquid tank 15, or the robot arm device 22 may move the end effector 23 to grip the corresponding joint of the wet machine base 1 and connect it to the liquid extraction member 143.

[0108] Furthermore, as shown in FIG. 7, the liquid extraction member 143 includes a liquid extraction tube 1432 and a liquid extraction cover 1431.

[0109] The liquid extraction tube 1432 can penetrate into the chemical liquid tank 15 through the chemical liquid port 151 of the chemical liquid tank 15. The liquid extraction cover 1431 is sleeved on the liquid extraction tube 1432 and can be fitted with the chemical liquid port 151 to block the chemical liquid port 151. Here, the liquid extraction tube 1432 performs the liquid extraction function, while the liquid extraction cover 1431 has the same function as the original tank cover of the chemical liquid tank 15, blocking the chemical liquid port 151 and fixing the liquid extraction tube 1432 (the fitting between the liquid extraction cover 1431 and the chemical liquid port 151 of the chemical liquid tank 15 may be insertion and extraction fitting, screw fitting, etc., and is not limited to this). To facilitate the connection with the liquid extraction mechanism in the wet machine base 1, a liquid extraction joint 1433 is connected to one end of the tube portion located outside the liquid extraction cover 1431 of the liquid extraction tube 1432. This liquid extraction joint 1433 is a one-way valve joint, that is, it can only realize sucking the chemical liquid from the chemical liquid tank 15, and the liquid cannot flow back into the chemical liquid tank 15.

[0110] After removing the liquid extraction member 143, in order to facilitate placement, a fixing member 144 for fixing the liquid extraction member 143 to be attached is vertically attached to the support base 141. Taking the arrangement of the liquid extraction tube 1432 and the liquid extraction cover 1431 as an example, this fixing member 144 is arranged in a hollow columnar rod structure for movably inserting the liquid extraction tube 1432. Since there may be some residual chemical liquid remaining in the liquid extraction tube 1432 after removal, after inserting the liquid extraction tube 1432 into the fixing member 144, this part of the residual chemical liquid remains in the fixing member 144, causing contamination and waste. Therefore, a recovery hole (not shown) may be opened at the bottom of the fixing member 144. This recovery hole may be connected to a recovery can through a recovery tube (which may be a telescopic bellows) for recovering the residual chemical liquid in the fixing member 144. Also, this recovery hole may be connected to a cleaning device through a cleaning tube, and the cleaning liquid may be injected into the fixing member 144 through the cleaning device to clean the liquid extraction tube 1432.

[0111] In addition, for this application, a chemical solution tank jig (not shown) for accommodating chemical solution tanks 15 of different sizes may be arranged, and this chemical solution tank jig may be installed on the support base 141.

[0112] The number of chemical solution carrier mechanisms 14 in this application may be arranged as one or more according to requirements, and is not specifically limited.

[0113] Furthermore, this application is provided with a monitoring device (not shown) capable of monitoring the amount of chemical solution in the chemical solution tank 15. In order to avoid affecting the replacement of the chemical solution tank 15, the monitoring device may be installed on the support base 141 and may be a weighing device for weighing the chemical solution tank 15 to be placed. When the weight falls below a preset value, it is considered that the amount of chemical solution in the chemical solution tank 15 has reached the alarm value. At this time, a signal is sent to the control device 5, and the control device 5 may control the transfer robot 2 to perform a liquid replacement operation.

[0114] The monitoring device may be an ultrasonic liquid level gauge or an infrared liquid level gauge. A transparent window (not shown) may be installed at the top of the chemical solution tank 15. However, the monitoring device is attached to the wet machine base 1 and, with respect to the transparent window of the chemical solution tank 15 attached to the support base 141, detects the internal liquid level height through this transparent window, and further monitors the amount of chemical solution in the chemical solution tank 15.

[0115] When the monitoring device monitors that the chemical solution level in the chemical solution tank 15 in use has reached the alarm value, it feeds back the information to the control device 5, and the control device 5 automatically generates a liquid replacement task (manually specify the start time of the liquid replacement for this task (considering the currently scheduled experiment task), and the system automatically calculates the completion time of the liquid replacement with reference to the standard man-hour of the liquid replacement based on this time, thereby completing the automatic scheduling service of the liquid replacement task). During the liquid replacement process, the wet machine base 1 is restricted from being used, and the liquid replacement priority is set to the highest.

[0116] Furthermore, as shown in FIG. 9, the sample supply and recovery device 3 includes a device main body 31 and a sample displacement device 32.

[0117] A sample chamber is provided inside the device main body 31. At the bottom of the sample chamber, a first load / unload station 311, a second load / unload station 312, a first temporary storage station 313, and a second temporary storage station 314 are provided. Here, at least one station groove for placing the cassette 33 is provided in each of the first load / unload station 311, the second load / unload station 312, the first temporary storage station 313, and the second temporary storage station 314.

[0118] A first load / unload opening (not shown) that communicates the sample chamber with the outside of the clean space is provided at a position corresponding to the first load / unload station 311 of the device main body 31. The experimenter can put the semiconductor material 331 that needs to be experimented through this first load / unload opening into the first load / unload station 311, or receive the semiconductor material 331 that has already completed the experiment from the first load / unload station 311 through the first load / unload opening. A first door that can be opened and closed is attached to the first load / unload opening. The first door has a conventional electric door structure, and specific description is omitted.

[0119] At a position corresponding to the second load / unload station 312 of the machine body 31, a second load / unload opening (not shown) that communicates the sample chamber with the clean space is provided. The transfer robot 2 can grip the cassette 33 containing the semiconductor from the second load / unload station 312 through the second load / unload opening, or place the cassette 33 equipped with the processed semiconductor material 331 at the second load / unload station 312. A second door that can be opened and closed is attached to the second load / unload opening. The second door has a conventional electric door structure, and a specific description thereof is omitted.

[0120] The sample displacement device 32 is attached to the sample chamber to move the semiconductor sample among the first load / unload station 311, the second load / unload station 312, the first temporary storage station 313, and the second temporary storage station 314. The first temporary storage station 313 may be used to store the semiconductor material 331 for which processing has already been completed, while the second temporary storage station 314 may be used to store the semiconductor material 331 to be processed.

[0121] The usage process is as follows.

[0122] After detecting that the cassette 33 is present in the first load / unload station 311, the sample displacement device 32 first moves the cassette 33 to the second temporary storage station 314 in sequence. Then, based on the scheduling information, it moves the corresponding cassette 33 in the second temporary storage station 314 to the second load / unload station 312 and waits for the transfer robot 2 to pick it up. After detecting that the cassette 33 is present in the second load / unload station 312, the sample displacement device 32 moves the cassette 33 to the first temporary storage station 313 in sequence. Then, based on the scheduling information, it moves the corresponding cassette 33 in the first temporary storage station 313 to the first load / unload station 311 and waits for the experimenter to pick it up. The order identification of the cassette 33 may be achieved by identifying the QR code (registered trademark) or number of the cassette 33, and is not specifically limited.

[0123] The sample displacement device 32 in this application may be arranged to include a three-axis movement module, a clamping mechanism, an identification sensor, etc. The three-axis movement module, the clamping mechanism, and the identification sensor are conventional arrangements. Taking the identification of the QR code (registered trademark) as an example, the identification sensor may be a scanner. Taking the identification of a number as an example, the identification sensor may be a camera, and it is not specifically limited.

[0124] Furthermore, as shown in FIG. 9, in order to facilitate the experimenter to perform an order recording operation and set desired experimental parameters, etc., a human-computer interaction device 34 that is communicatively connected to the control device 5 and extends outside the clean space is attached to the first load / unload opening side of the device body 31. The control device 5 may be installed in the clean space and is not specifically limited.

[0125] Furthermore, as shown in FIGS. 1 and 10, the chemical solution supply and recovery device 4 includes a chemical solution buffer box 41. Inside the chemical solution buffer box 41, a buffer chamber is provided for storing the chemical solution tank 15 to be loaded or the replaced chemical solution tank 15. The chemical solution buffer box 41 is provided with a buffer opening, and a buffer door 42 that can be opened and closed is attached to the buffer opening. The number of chemical solution buffer boxes 41 is preferably arranged in plural, so that chemical solution tanks 15 of different chemical solution types can be separately stored, and the replaced empty chemical solution tanks 15 can be stored alone, etc. can be realized.

[0126] Furthermore, as shown in FIG. 1, the floor of the clean space is divided from the outside to the inside into an outer annular region 61, an inner annular region 62, and a central region 63 located within the inner annular region 62.

[0127] The wet machine base 1 is installed in the outer annular region 61 or the central region 63, and the sample supply and recovery device 3 and the chemical solution supply and recovery device 4 are installed in the outer annular region 61.

[0128] The above layout forms a "hui" - shaped layout, realizing a compact arrangement of each device, effectively reducing the occupation of the clean space, shortening the stroke of the mobile robot, extending the endurance of the mobile robot, and further reducing the experimental cost.

[0129] In the outer annular region 61, a charging stand for charging the transport robot 2 may be installed, or at least two mobile robots may be installed, thereby improving the experimental efficiency. When the power of one of them is insufficient, the other one can be operated normally to ensure that the experiment is carried out stably.

[0130] Furthermore, in order to realize flexible operation, the robot arm device 22 is preferably a collaborative robot arm equipped with a vision sensor for identification and positioning.

[0131] Furthermore, the mobile device 21 is an AGV equipped with sensors such as a lidar for realizing automatic route search.

[0132] The operation process of the scientific research dark wet laboratory according to this application is as follows.

[0133] 1. After the experimenter verifies their identity using the human-computer interaction device 34, they select the experiment type. After the selection is completed, they set the experiment parameters / process routes, etc., create an experiment work instruction, and the control device 5 schedules the newly created experiment work instruction in order based on the operating status of the conventional wet machine 1 and the status of the already waiting experiment work instructions.

[0134] 2. Put the cassette 33 equipped with the semiconductor material 331 to be processed into the first load / unload station 311 through the first load / unload opening.

[0135] 3. The control device 5 sends a signal to the sample displacement device 32 according to the experiment work instruction. The sample displacement device 32 moves the cassette 33 at the first load / unload station 311 to the second temporary storage station 314, and then waits for the execution signal of the experiment work instruction. When it comes to the order of executing this experiment work instruction, the control device 5 sends the signal to the sample displacement device 32, the transfer robot 2, and the wet machine 1. Then, the displacement device moves the cassette 33 from the second temporary storage station 314 to the second load / unload station 312 and waits for the transfer robot 2 to pick it up.

[0136] 4. The transfer robot 2 loads the cassette 33 at the second load / unload station 312 into the corresponding wet machine 1 according to the experiment work instruction.

[0137] 5. The corresponding wet machine 1 processes the semiconductor material 331 in the cassette 33 according to the experiment parameters in the experiment work instruction. After the processing is completed, it pushes the cassette 33 into the sample carrier mechanism 12 and sends a signal to the transfer robot 2.

[0138] 6. The transfer robot 2 transports the cassette 33 in the sample carrier mechanism 12 to the second load / unload station 312 and transmits a signal to the sample displacement device 32.

[0139] 7. After the sample displacement device 32 moves the cassette 33 at the second load / unload station 312 to the first temporary storage station 313, it waits for the removal of the previous completed cassette 33 to be completed, and then further moves the cassette 33 from the first temporary storage station 313 to the first load / unload station 311, feeds back a signal to the control device 5, and the control device 5 sends a notification to the corresponding experimenter's mobile terminal, reminding the experimenter to receive the semiconductor material 331 for which the experiment has been completed, and synchronously transmits the operation data in the experiment process to the experimenter after sorting and analyzing it.

[0140] The control device 5 can collect the operation data (process records, process parameter collection, abnormal event processing) of each execution device in real time, establish a process library that is traceable and scalable, and optimize the scheduling.

[0141] It can also monitor the abnormalities in the experiment process in real time and automatically issue an alarm.

[0142] It can also comprehensively monitor and record the history, repair, maintenance, and inspection of the equipment.

[0143] As described in detail above about the dark wet laboratory for scientific research according to this application, for those skilled in the art, based on the idea of the embodiments of this application, there may be changes in both the form for implementing the invention and the application scope. To sum up, the content of this specification should not be understood as a limitation to this application.

Explanation of Reference Numerals

[0144] 1. Wet machine table 11. Sample input and discharge port 12. Sample carrier mechanism 121. Carrier plate 122. Sample carrier drive assembly 13. Liquid storage chamber 14. Chemical solution carrier mechanism 141. Support base 142. Chemical solution carrier drive assembly 143. Liquid extraction member 1431. Liquid extraction cover 1432. Liquid extraction tube 1433. Liquid extraction joint 144. Fixing member 15. Chemical solution tank 151. Chemical solution port 2. Conveyor robot 21. Moving device 211. Second docking structure 22. Robot arm device 23. End effector 24. Auxiliary device 241. Second fork positioning structure 242. Auxiliary opening and closing door mechanism 243. Stopper projection 244. Loading station 245. Extension boss 25. Joint assembly 251. First joint 252. Second joint 26. Auxiliary fixing frame 261. Support plate 27. Fork device 271. Fork lifting device 272. Pallet 2721. First fork positioning structure 28. Fixture plate 3. Sample supply and recovery equipment 31. Equipment body 311. First load / unload station 312. Second load / unload station 313. First temporary storage station 314. Second temporary storage station 32. Sample displacement device 33. Cassette 331. Semiconductor material 34. Human-computer interaction device 4. Chemical solution supply and recovery equipment 41. Chemical solution buffer box 42. Buffer door 5. Control equipment 61. External annular region 62. Internal annular region 63. Central region

Claims

Claim 1 A dark wet laboratory for scientific research, comprising a laboratory main body, a wet machine base (1), a transfer robot (2), a sample supply and recovery device (3), a chemical solution supply and recovery device (4), and a control device (5), wherein the laboratory main body is used to provide a clean space, the wet machine base (1) is installed in the clean space for processing semiconductor samples, the sample supply and recovery device (3) is installed in the clean space for providing semiconductor samples to be processed and storing the processed semiconductor samples, the chemical solution supply and recovery device (4) is installed in the clean space for providing chemical solution tanks (15) to be replaced and storing the replaced chemical solution tanks (15), the transfer robot (2) is attached to the clean space for transferring semiconductor samples among the wet machine base (1), the transfer robot (2), and the sample supply and recovery device (3), and for transferring the chemical solution tank (15) among the wet machine base (1), the transfer robot (2), and the chemical solution supply and recovery device (4), the transfer robot (2) includes a moving device (21), a robot arm device (22), at least one end effector (23), and an accessory device (24), the accessory device (24) is movable following the moving device (21) and provides a temporary storage space, the robot arm device (22) is attached to the moving device (21), at least one of the end effectors (23) is attached to the robot arm device (22) for gripping semiconductor samples and for gripping the chemical solution tank (15), the control device (5) is communicatively connected to the wet machine base (1), the transfer robot (2), the sample supply and recovery device (3), and the chemical solution supply and recovery device (4), the accessory device (24) is removably connected to the moving device (21), further including an accessory fixing frame (26) for fixing the accessory devices (24) one by one, the transfer robot (2) further includes a fork device (27), the fork device (27) is attached to the moving device (21) for lifting the accessory device (24) located on the accessory fixing frame (26), the fork device (27) includes a fork lifting device (271) and a pallet (272). The drive end of the fork lifting device (271) is connected to the pallet (272) to move the pallet (272) up and down, so as to fork and disengage the accessory device (24) from the accessory fixing frame (26) or fork and return the accessory device (24) to the accessory fixing frame (26). A dark wet laboratory for scientific research is characterized by this.

2. The accessory fixing frame (26) is attached to the clean space. The dark wet laboratory for scientific research according to claim 1 is characterized by this.

3. A clearance cavity for the pallet (272) to penetrate is provided at a position below the accessory device (24) of the accessory fixing frame (26). The fork lifting device (271) is attached to the top of the moving device (21). The dark wet laboratory for scientific research according to claim 1 is characterized by this.

4. Several first fork positioning structures (2721) are provided at the top of the pallet (272). Several second fork positioning structures (241) that are positioned and fitted one by one with the first fork positioning structure (2721) are provided at the bottom of the accessory device (24). The dark wet laboratory for scientific research according to claim 3 is characterized by this.

5. A chamber for forming the temporary storage space is provided inside the accessory device (24). An accessory opening and closing door mechanism (242) for controlling the opening and closing of the chamber is attached to the accessory device (24). The dark wet laboratory for scientific research according to claim 4 is characterized by this.

6. A first docking structure is provided at the bottom of the accessory device (24). A first conductive structure electrically connected to the accessory opening and closing door mechanism (242) is provided on the first docking structure. A second docking structure (211) that can be docked and fitted with the first docking structure is provided on the moving device (21). A second conductive structure that can come into contact with the first conductive structure and conduct electricity is provided on the second docking structure (211). The transport robot (2) is further used to supply power to the accessory opening and closing door mechanism (242) when the first conductive structure and the second conductive structure come into contact and conduct electricity. The dark wet laboratory for scientific research according to claim 5 is characterized by this.

7. The first docking structure is provided with a first ventilation structure communicating with the temporary storage space. The second docking structure (211) is provided with a second ventilation structure that can be docked and conduct electricity with the first ventilation structure. The mobile device (21) is attached with a gas supply device connected to and conducting electricity with the second ventilation structure. The dark wet laboratory for scientific research according to claim 6 is characterized by this.

8. The accompanying fixed frame (26) includes two support plates (261) symmetrically installed at intervals. On both side surfaces of the accompanying device (24), stopper protrusions (243) are provided that can come into contact and abut in a one-to-one correspondence with the tops of the support plates (261). The dark wet laboratory for scientific research according to claim 5 is characterized by this.

9. The accompanying fixed frame (26) is provided with a floating correction module. The floating correction module is used to correct the position of the mobile device (21) or the fork device (27) that penetrates into the accompanying fixed frame (26) so that the first fork positioning structure (2721) faces the second fork positioning structure (241). The dark wet laboratory for scientific research according to claim 6 is characterized by this.

10. An anticorrosion lining is provided in the temporary storage space. The dark wet laboratory for scientific research according to claim 1 is characterized by this.

11. There are at least two end effectors (23). One of the end effectors (23) is used to grip a semiconductor sample. Another end effector (23) is used to grip a chemical solution tank (15). The end effector (23) is removably connected to the robot arm device (22) via a joint assembly (25). The accompanying device (24) is provided with a mounting station (244) for mounting the end effector (23). The dark wet laboratory for scientific research according to claim 1 is characterized by this.

12. Below the position of the sample input and discharge port (11) of the wet machine table (1), a sample carrier mechanism (12) is attached for placing the semiconductor material (331) to be sent to the sample input and discharge port (11) or for placing the semiconductor material (331) sent out from the sample input and discharge port (11). The dark wet laboratory for scientific research according to claim 1 is characterized in that.

13. The sample carrier mechanism (12) includes a carrier plate (121) and a sample carrier drive assembly (122). The carrier plate (121) is rotatably attached on the wet machine table (1). The sample carrier drive assembly (122) is attached to the wet machine table (1) and connected to the carrier plate (121) in order to rotate the carrier plate (121). The dark wet laboratory for scientific research according to claim 12 is characterized in that.

14. At the position of the liquid storage chamber (13) of the wet machine table (1), a chemical solution carrier mechanism (14) for placing a chemical solution tank (15) is attached. The chemical solution carrier mechanism (14) includes a support base (141), a chemical solution carrier drive assembly (142), and a liquid extraction member (143). The support base (141) is used for placing the chemical solution tank (15). The chemical solution carrier drive assembly (142) is connected to the support base (141) in order to drive the support base (141) to extend or retract from the liquid storage chamber (13). The liquid extraction member (143) is detachably attached to the chemical solution tank (15). The dark wet laboratory for scientific research according to claim 1 is characterized in that.

15. The liquid extraction member (143) includes a liquid extraction tube (1432) and a liquid extraction cover (1431). The liquid extraction tube (1432) can penetrate into the chemical solution tank (15) through the chemical solution port (151) of the chemical solution tank (15). The liquid extraction cover (1431) is sleeved on the liquid extraction tube (1432) and can be fitted with the chemical solution port (151) to block the chemical solution port (151). On the support base (141), a fixing member (144) for fixing the liquid extraction member (143) to be attached is vertically attached. The fixed member (144) is a hollow columnar structure for movably inserting the liquid extraction pipe (1432). The scientific research dark wet laboratory according to claim 14, characterized in that.

16. The sample supply and recovery device (3) includes a device main body (31) and a sample displacement device (32). A sample chamber is provided in the device main body (31). At the bottom of the sample chamber, a first load / unload station (311), a second load / unload station (312), a first temporary storage station (313), and a second temporary storage station (314) are provided. At a position corresponding to the first load / unload station (311) of the device main body (31), a first load / unload opening communicating the sample chamber with the outside of the clean space is provided. A first door that can be opened and closed is attached to the first load / unload opening. At a position corresponding to the second load / unload station (312) of the device main body (31), a second load / unload opening communicating the sample chamber with the inside of the clean space is provided. A second door that can be opened and closed is attached to the second load / unload opening. The sample displacement device (32) is attached to the sample chamber in order to move a semiconductor sample among the first load / unload station (311), the second load / unload station (312), the first temporary storage station (313), and the second temporary storage station (314). The scientific research dark wet laboratory according to claim 1, characterized in that.

17. On the first load / unload opening side of the device main body (31), a human-computer interaction device (34) that is communicatively connected to the control device (5) and extends outside the clean space is attached. The scientific research dark wet laboratory according to claim 16, characterized in that.

18. The chemical solution supply and recovery device (4) includes a chemical solution buffer box (41). A buffer chamber for storing the chemical solution tank (15) to be loaded or the replaced chemical solution tank (15) is provided in the chemical solution buffer box (41). The chemical solution buffer box (41) is provided with a buffer opening, A buffer door (42) that can be opened and closed is attached to the buffer opening. The dark wet laboratory for scientific research according to claim 1 is characterized by this.

19. The floor of the clean space is divided from the outside to the inside into an external annular region (61), an internal annular region (62), and a central region (63) located within the internal annular region (62). The wet machine base (1) is installed in the external annular region (61) or the central region (63). The sample supply and recovery equipment (3) and the chemical solution supply and recovery equipment (4) are installed in the external annular region (61). The dark wet laboratory for scientific research according to claim 1 is characterized by this.

20. The robot arm device (22) is a collaborative robot arm. The dark wet laboratory for scientific research according to claim 1 is characterized by this.

21. The moving device (21) is an AGV. The dark wet laboratory for scientific research according to claim 1 is characterized by this.

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