Cutting device

Abstract

To efficiently discharge cutting water scattering inside a processing chamber without impairing maintainability.SOLUTION: A cutting device includes a cutting unit for cutting a workpiece held by a chuck table, a processing chamber for storing the cutting unit, a slide cover for opening / closing the processing chamber by sliding, and a duct mechanism having a movable body fixed to the slide cover, wherein the cutting unit has a ring-like cutting blade mounted at the tip of the spindle, and a cutting water supply nozzle for supplying cutting water to the cutting blade; the duct mechanism has a suction port provided on the movable body and provided in a region where the cutting water scatters involved in rotation of the cutting blade when the cutting water is supplied to the cutting blade from the cutting water supply nozzle while rotating the cutting blade, and constitutes an exhaust route whose one end reaches an exhaust unit and the other end reaches the suction port; and the cutting water is sucked from the suction port by a negative pressure generated in the suction source and the cutting water is discharged from the processing chamber.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a cutting apparatus that holds a workpiece such as a semiconductor wafer on a chuck table and cuts the workpiece with an annular cutting blade while supplying cutting water to the workpiece.

Background Art

[0002] Device chips used in electronic devices such as mobile phones and computers are formed by dividing a semiconductor wafer on which a plurality of devices are arranged vertically and horizontally on the surface for each device. When dividing a semiconductor wafer, for example, a cutting apparatus including a cutting blade having an annular cutting edge on its outer periphery is used (see Patent Document 1). By relatively moving the cutting blade and the workpiece while cutting the cutting blade into the workpiece at high speed, the workpiece can be cut.

[0003] When the workpiece is cut with a cutting blade, the workpiece and the cutting blade are consumed and cutting chips are generated. Also, the workpiece and the cutting blade are heated by the processing heat. Therefore, while the workpiece is being cut, cutting water composed of pure water or the like is supplied to the workpiece and the cutting blade, and the cutting chips and the processing heat are removed by the cutting water. However, since the cutting water incorporating the cutting chips is scattered and atomized by the cutting blade rotating at high speed, there is a problem that the cutting water adheres to the workpiece and the inner wall of the cutting apparatus and becomes a source of contamination.

[0004] Therefore, in the cutting apparatus, an exhaust duct is connected to the wall surface of the processing chamber where the cutting of the workpiece is performed, and the processing chamber is exhausted. However, in order to sufficiently remove the floating mist by sucking the inside of the processing chamber, a high output is required for the suction source connected to the duct. Therefore, a technique is known in which a duct is attached to a cutting unit including a cutting blade, and the cutting water scattered as the cutting blade rotates is received by the duct and efficiently removed from the internal space of the cutting apparatus (see Patent Document 2).

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0006] Since the cutting blade gradually wears out, regular replacement work is required. However, if a duct is attached to the cutting unit, it will interfere with the replacement work of the cutting blade, so the duct must be removed from the cutting unit. And after the replacement work of the cutting blade is completed, the duct must be attached to the cutting unit again. Such labor also occurs when performing other maintenance work on the cutting unit etc., which has been a factor in reducing the operating efficiency of the cutting device.

[0007] Also, the cutting device repeatedly moves the cutting unit to switch the processing position of the workpiece. Here, if a duct is connected to the cutting unit, the weight of the duct is applied as a load to the moving mechanism of the cutting unit, resulting in problems such as an increase in the power consumption of the moving mechanism and an acceleration of the deterioration of the moving mechanism.

[0008] The present invention has been made in view of such problems, and an object thereof is to provide a cutting device that can efficiently discharge cutting water scattered inside the processing chamber without impairing maintainability.

Means for Solving the Problems

[0009] According to one aspect of the present invention, there is provided a cutting apparatus comprising: a chuck table; a first cutting unit configured to cut a workpiece held by the chuck table; a processing chamber in which the chuck table and the first cutting unit are accommodated; a first slide cover configured to slide to open and close the processing chamber; and a duct mechanism including a first moving body fixed to the first slide cover and configured to move along with the slide of the first slide cover. The first cutting unit includes: a first spindle disposed above the chuck table and parallel to an upper surface of the chuck table; a first rotation driving source connected to a proximal end of the first spindle; an annular first cutting blade attached to a distal end of the first spindle; and a first cutting water supply nozzle configured to supply cutting water to the first cutting blade. The duct mechanism includes: a first suction port provided in a region where the cutting water scatters as the first cutting blade rotates when the first rotation driving source is operated to rotate the first cutting blade and the cutting water is supplied from the first cutting water supply nozzle to the first cutting blade, the first suction port being provided in the first moving body; and a first exhaust path configured such that one end reaches an exhaust unit having a suction source and the other end reaches the first suction port, and the cutting water is sucked from the first suction port by a negative pressure generated by the suction source and discharged from the processing chamber.

[0010] Preferably, it further includes a second cutting unit that has a function of cutting a workpiece held by the chuck table and is accommodated in the processing chamber, and a second slide cover that slides to open and close the processing chamber together with the first slide cover. The second cutting unit includes a second spindle that is parallel to the upper surface of the chuck table and above the chuck table and is arranged above the first spindle, a second rotation drive source connected to the base end of the second spindle, an annular second cutting blade mounted on the tip of the second spindle, and a second cutting water supply nozzle that supplies the cutting water to the second cutting blade. The duct mechanism includes a second moving body fixed to the second slide cover and moving along with the slide of the second slide cover. When the second cutting water supply nozzle supplies the cutting water to the second cutting blade while rotating the second cutting blade by operating the second rotation drive source, the second moving body is provided with a second suction port provided in a region where the cutting water scatters with the rotation of the second cutting blade. A second exhaust path is configured such that one end reaches the exhaust unit having the suction source and the other end reaches the second suction port, and the cutting water is sucked from the second suction port by the negative pressure generated by the suction source and discharged from the processing chamber.

[0011] Furthermore, preferably, the duct mechanism further includes a connection duct box that is connected to a first pipe connected to the first moving body, a second pipe connected to the second moving body, and a third pipe connected to the exhaust unit and is fixed in the processing chamber. The connection duct box is included in the first exhaust path and the second exhaust path.

[0012] Alternatively, preferably, the first moving body has a first connection port, the second moving body has a second connection port, the duct mechanism includes a fixed duct box connected to the exhaust unit, the fixed duct box is in contact with the first moving body while allowing movement of the first moving body and is in contact with the second moving body while allowing movement of the second moving body, the fixed duct box has a third connection port and a fourth connection port, when the first slide cover is slid to close the processing chamber, the first connection port of the first moving body and the third connection port of the fixed duct box overlap to form the first exhaust path, when the first slide cover is slid to open the processing chamber, the first connection port of the first moving body and the third connection port of the fixed duct box do not overlap and the first exhaust path is cut off, when the second slide cover is slid to close the processing chamber, the second connection port of the second moving body and the fourth connection port of the fixed duct box overlap to form the second exhaust path, when the second slide cover is slid to open the processing chamber, the second connection port of the second moving body and the fourth connection port of the fixed duct box do not overlap and the second exhaust path is cut off.

[0013] Also, preferably, the first moving body has a first connection port, the duct mechanism includes a fixed duct box connected to the exhaust unit, the fixed duct box is in contact with the first moving body while allowing movement of the first moving body, the fixed duct box has a third connection port, when the first slide cover is slid to close the processing chamber, the first connection port of the first moving body and the third connection port of the fixed duct box overlap to form the first exhaust path, when the first slide cover is slid to open the processing chamber, the first connection port of the first moving body and the third connection port of the fixed duct box do not overlap and the first exhaust path is cut off.

Advantages of the Invention

[0014] A cutting device according to an aspect of the present invention includes a duct mechanism having a moving body fixed to a slide cover that opens and closes a processing chamber. A suction port is provided in the moving body in a region where cutting water scatters as the cutting blade rotates. The duct mechanism constitutes an exhaust path with one end reaching an exhaust unit and the other end reaching the suction port. In this case, when the workpiece is cut with the cutting blade, the cutting water scatters to the suction port of the moving body, is sucked into the suction port, and is discharged from the processing chamber.

[0015] When performing maintenance work inside the processing chamber of the cutting device, when the operator slides the slide cover to open the processing chamber, the moving body moves together with the slide cover and moves away from the cutting unit. Therefore, maintenance work on the duct mechanism is not hindered. Further, after the maintenance work is completed, the operator can simply slide the slide cover to close the processing chamber to return the suction port to the region where the cutting water scatters again. Therefore, the work of attaching and detaching the duct during maintenance work is omitted, and the operating efficiency of the cutting device is improved.

[0016] Furthermore, unlike the case where a duct is attached to the cutting unit, in the cutting device according to an aspect of the present invention, the weight of the duct is not applied as a load to the moving mechanism of the cutting unit. Therefore, the power consumption of the moving mechanism is kept low, and the progress of deterioration of the moving mechanism is also suppressed.

[0017] Therefore, according to an aspect of the present invention, there is provided a cutting device capable of efficiently discharging cutting water scattered inside the processing chamber without impairing maintainability.

Brief Description of the Drawings

[0018]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Embodiments for Carrying Out the Invention

[0019] With reference to the accompanying drawings, an embodiment according to an aspect of the present invention will be described. The cutting device according to this embodiment cuts a workpiece such as a semiconductor wafer with an annular cutting blade. FIG. 1 is a perspective view schematically showing the cutting device 2, and FIG. 2 is a front view schematically showing the cutting device 2.

[0020] The workpiece to be cut by the cutting device 2 is, for example, a wafer formed of a material such as Si (silicon), SiC (silicon carbide), GaN (gallium nitride), GaAs (gallium arsenide), or other semiconductors. Alternatively, the workpiece is a substantially disc-shaped substrate or the like made of a material such as sapphire, glass, or quartz. The glass is, for example, alkali glass, non-alkali glass, soda-lime glass, lead glass, borosilicate glass, quartz glass, or the like.

[0021] A plurality of devices such as IC (Integrated Circuit) and LSI (Large Scale Integration) are formed on the surface of the workpiece. When the workpiece is cut and divided for each device, individual device chips can be formed. However, the workpiece to be cut by the cutting device 2 is not limited to this.

[0022] The cutting device 2 includes a base 4 that supports each component, and a housing 6 that covers each component supported by the base 4. At one corner of the base 4 not covered by the housing 6, a cassette support base 8 is provided. On the upper surface of the cassette support base 8, a cassette for accommodating a plurality of workpieces is mounted.

[0023] On the outer surface of the cutting device 2, a display 10 with a touch panel is provided. The display 10 with a touch panel displays various information and operation screens. An operator can input various commands to the cutting device 2 by touching a predetermined position on the display 10 with a touch panel that displays the display screen.

[0024] The inside of the housing 6 of the cutting device 2 is a processing chamber 12. The cutting device 2 cuts a workpiece in the processing chamber 12. In the processing chamber 12, a chuck table 14 capable of sucking and holding a workpiece is accommodated. The chuck table 14 is moved in the X-axis direction by an X-axis movement mechanism (not shown). Further, the chuck table 14 is connected to a rotational drive source (not shown) such as a motor, and rotates around a rotational axis substantially parallel to the Z-axis direction (vertical direction).

[0025] The upper surface 14a of the chuck table 14 is a holding surface for sucking and holding a workpiece. The upper surface 14a of the chuck table 14 is formed substantially parallel to the X-axis direction and the Y-axis direction, and is connected to a suction source (not shown) such as an ejector via a suction path (not shown) provided inside the chuck table 14.

[0026] FIG. 3(A) schematically shows the internal configuration of the processing chamber 12. Inside the processing chamber 12, a first cutting unit 16a and a second cutting unit 16b for cutting a workpiece held by the chuck table 14 are accommodated. FIG. 3(A) includes a plan view schematically showing both cutting units 16a, 16b and the chuck table 14 accommodated inside the processing chamber 12. Both cutting units 16a, 16b are supported by a lifting mechanism (Z-axis movement mechanism) and a Y-axis movement mechanism (not shown), and are movable in the Z-axis direction and the Y-axis direction.

[0027] The first cutting unit 16a has a first spindle 18a that is parallel to the upper surface 14a of the chuck table 14 and is disposed above the chuck table 14. The first spindle 18a is arranged along the Y-axis direction. The first cutting unit 16a further includes a first rotational drive source 20a composed of a motor or the like connected to the proximal end of the first spindle 18a, and an annular first cutting blade 22a attached to the tip of the first spindle 18a.

[0028] The first cutting unit 16a has a first spindle 18a that is parallel to the upper surface 14a of the chuck table 14 and is disposed above the chuck table 14. The first spindle 18a is arranged along the Y-axis direction. The first cutting unit 16a further includes a first rotational drive source 20a composed of a motor or the like connected to the proximal end of the first spindle 18a, and an annular first cutting blade 22a attached to the tip of the first spindle 18a.

[0029] The second cutting unit 16b has a second spindle 18b that is parallel to the upper surface 14a of the chuck table 14 and is disposed above the chuck table 14. The second spindle 18b is arranged along the Y-axis direction and is parallel to the first spindle 18a. The two spindles 18a and 18b may be arranged in a straight line. The second cutting unit 16b further includes a second rotational drive source 20b composed of a motor or the like connected to the proximal end of the second spindle 18b, and an annular second cutting blade 22b attached to the tip of the second spindle 18b.

[0030] When machining a workpiece with the cutting device 2, first, the workpiece is unloaded from the cassette placed on the cassette support base 8, placed on the upper surface 14a of the chuck table 14, and the workpiece is sucked and held by the chuck table 14. Then, the chuck table 14 is rotated to align the direction of the planned division line of the workpiece with the X-axis direction. Also, the heights of the cutting units 16a and 16b are adjusted, and the cutting blades 22a and 22b are rotated at high speed. After that, the chuck table 14 is moved along the X-axis direction, and the cutting blades 22a and 22b are cut into the workpiece along the planned division line to cut the workpiece.

[0031] Next, the cutting units 16a and 16b are moved along the Y-axis direction, and the workpiece is similarly cut along other planned division lines. After cutting the workpiece along all the planned division lines along one direction of the workpiece, the chuck table 14 is rotated to similarly cut the planned division lines along other directions. Then, when the workpiece is cut along all the planned division lines set on the workpiece, the cutting process in the cutting device 2 is completed.

[0032] When the cutting of the workpiece is repeated with the cutting blades 22a and 22b, the cutting blades 22a and 22b are gradually worn out. Therefore, in the cutting device 2, it is necessary to periodically replace the cutting blades 22a and 22b. An opening 12a communicating with the outside of the housing 6 is formed in the wall surface of the processing chamber 12, and the operator inserts a hand into the processing chamber 12 through this opening 12a to perform predetermined maintenance operations such as replacing the cutting blades 22a and 22b.

[0033] The opening 12a is closed when the workpiece 1 is being cut to prevent contamination of the external environment and to prevent the operator from inadvertently inserting a hand into the processing chamber 12. The cutting device 2 includes a first slide cover 26a and a second slide cover 26b that slide to open and close the processing chamber 12.

[0034] The slide covers 26a and 26b are plate-like members made of, for example, glass, synthetic resin, or the like. The opening 12a is normally closed by the slide covers 26a and 26b, and is opened during maintenance work. The slide covers 26a and 26b may be transparent or semi-transparent, and the interior of the processing chamber 12 may be observed through the slide covers 26a and 26b. However, the slide covers 26a and 26b do not have to be transparent.

[0035] When the workpiece is cut with the cutting blades 22a, 22b, cutting chips and processing heat are generated from the workpiece and the cutting blades 22a, 22b. Therefore, cutting water composed of pure water or the like is supplied to the cutting blades 22a, 22b while the workpiece is being cut. The first cutting unit 16a has a first cutting water supply nozzle 24a that supplies cutting water to the first cutting blade 22a, and the second cutting unit 16b has a second cutting water supply nozzle 24b that supplies cutting water to the second cutting blade 22b.

[0036] When the workpiece is cut, cutting chips and processing heat generated from the workpiece and cutting blades 22a, 22b are taken in by the cutting water and removed. Then, inside the processing chamber 12, the cutting water containing the cutting chips is scattered as the cutting blades 22a, 22b rotate at a high speed of about 30,000 revolutions per minute.

[0037] The cutting water scattered inside the machining chamber 12 turns into mist and floats in the atmosphere, adhering to the inner walls of the machining chamber 12, the cutting units 16a and 16b, and the surface of the workpiece. When the cutting water dries, the cutting chips contained in the cutting water solidify and become a source of contamination. Furthermore, if the mist of cutting water leaks from the machining chamber 12 into the factory where the cutting device 2 is installed, the area around the cutting device 2 will be contaminated.

[0038] Therefore, the cutting device 2 is provided with a duct mechanism 28 that exhausts the inside of the machining chamber 12 and discharges the scattering cutting water from the machining chamber 12. The duct mechanism 28 will be described below. Figure 3(A) and other figures include a plan view that schematically shows the configuration of the duct mechanism 28.

[0039] The duct mechanism 28 includes a first moving body 30a with a hollow structure that is fixed to the first slide cover 26a and moves along with the slide of the first slide cover 26a. Further, the duct mechanism 28 includes a second moving body 30b with a hollow structure that is fixed to the second slide cover 26b and moves along with the slide of the second slide cover 26b. An exhaust pipe 33a that constitutes an exhaust path is connected to the first moving body 30a, and an exhaust pipe 33b is connected to the second moving body 30b. The exhaust pipes 33a and 33b are, for example, expandable hoses.

[0040] The duct mechanism 28 includes a first suction port 32a facing the first cutting unit 16a on the first moving body 30a. The first suction port 32a is arranged in a region where cutting water scatters as the first cutting blade 22a rotates when the first cutting water supply nozzle 24a supplies cutting water to the first cutting blade 22a while operating the first rotation drive source 20a to rotate the first cutting blade 22a.

[0041] Also, the duct mechanism 28 includes a second suction port 32b facing the second cutting unit 16b on the second moving body 30b. The second suction port 32b is arranged in a region where cutting water scatters as the second cutting blade 22b rotates when the second cutting water supply nozzle 24b supplies cutting water to the second cutting blade 22b while operating the second rotation drive source 20b to rotate the second cutting blade 22b.

[0042] A more detailed explanation will be given. Each cutting unit 16a, 16b and the opening 12a are arranged to be aligned along the X-axis direction. First, the rotation directions of the respective cutting blades 22a, 22b will be described when the direction from the opening 12a toward the cutting units 16a, 16b is defined as the front in the X-axis direction and the opposite is defined as the rear in the X-axis direction. Each cutting blade 22a, 22b rotates in a direction in which the lowest point of the cutting blade 22a, 22b cutting into the chuck table 14 moves toward the rear in the X-axis direction.

[0043] In this case, the cutting water supplied to the high-speed rotating cutting blades 22a and 22b scatters vigorously backward in the X-axis direction. That is, the cutting water scatters toward the opening 12a. And the moving bodies 30a and 30b fixed to the slide covers 26a and 26b have suction ports 32a and 32b on the rear side in the X-axis direction of the cutting units 16a and 16b.

[0044] And the duct mechanism 28 constitutes a first exhaust path 34a for sucking and exhausting the air containing the cutting water that has reached the first suction port 32a. The first exhaust path 34a is formed by the first moving body 30a, the exhaust pipe 33a, etc. One end thereof reaches the exhaust unit 38 (see FIG. 1) having a suction source 36, and the other end of the first exhaust path 34a reaches the first suction port 32a.

[0045] Here, the exhaust unit 38 is, for example, a factory facility that is connected to a plurality of other devices installed in the factory where the cutting device 2 is installed and provides negative pressure to each device, and includes a known pump as the suction source 36. However, the exhaust unit 38 is not limited to this, and a dedicated exhaust unit 38 may be provided for the cutting device 2. The duct mechanism 28 sucks the cutting water from the first suction port 32a due to the negative pressure generated at the suction source 36 of the exhaust unit 38 and discharges the cutting water from the processing chamber 12.

[0046] Also, the duct mechanism 28 constitutes a second exhaust path 34b for sucking and exhausting the air containing the cutting water that has reached the second suction port 32b. The second exhaust path 34b is formed by the second moving body 30b, the exhaust pipe 33b, etc. One end thereof reaches the exhaust unit 38 having a suction source 36, and the other end of the second exhaust path 34b reaches the second suction port 32b. The duct mechanism 28 sucks the cutting water from the second suction port 32b due to the negative pressure generated at the suction source 36 of the exhaust unit 38 and discharges the cutting water from the processing chamber 12.

[0047] The duct mechanism 28 described above can efficiently remove the cutting water because it sucks the air containing the cutting water in the area where the cutting water scatters as the cutting blades 22a and 22b rotate.

[0048] When performing maintenance on the cutting device 2, the slide covers 26a and 26b that close the processing chamber 12 are opened. FIG. 3(B) is a plan view schematically showing the opened processing chamber 12 of the cutting device 2. In the cutting device 2 according to the present embodiment, the moving bodies 30a and 30b of the duct mechanism 28 are fixed to the slide covers 26a and 26b, and the moving bodies 30a and 30b move along with the sliding of the slide covers 26a and 26b.

[0049] Therefore, when the operator slides the slide covers 26a and 26b to open the processing chamber 12, the components of the duct mechanism 28 are separated from around the chuck table 14 and the cutting units 16a and 16b. In this state, maintenance work by the operator and the like are not obstructed by the duct mechanism 28.

[0050] On the other hand, when the maintenance work and the like are completed and the operator slides the slide covers 26a and 26b to close the processing chamber 12, the suction ports 32a and 32b of the moving bodies 30a and 30b are returned to a predetermined position where they are likely to receive the scattered cutting water. That is, just by the operator sliding the slide covers 26a and 26b to close the processing chamber 12, the duct mechanism 28 is in a state suitable for use. Therefore, in the cutting device 2 according to the present embodiment, it is extremely easy to restore the duct mechanism 28 after maintenance work.

[0051] Next, a first modification of the cutting device 2 according to the present embodiment will be described. FIG. 4 is a front view schematically showing the duct mechanism 28a according to the first modification. For ease of understanding, only the slide covers 26a and 26b and the duct mechanism 28a are shown in FIG. 4, and the elements hidden by the slide covers 26a and 26b are also shown in solid lines.

[0052] The duct mechanism 28a according to the first modification includes a connection duct box 42 connected to a first pipe 40a connected to the first moving body 30a and a second pipe 40b connected to the second moving body 30b. The connection duct box 42 is connected to a third pipe 33c connected to the exhaust unit 38 (see FIG. 1) and is fixed within the processing chamber 12. The first pipe 40a and the second pipe 40b deform following the movement of the moving bodies 30a, 30b and maintain the connection between the moving bodies 30a, 30b and the connection duct box 42.

[0053] The connection duct box 42 is included in the first exhaust path 34a and the second exhaust path 34b and functions as a confluence point of the first exhaust path 34a and the second exhaust path 34b. In the duct mechanism 28a according to the first modification, since the two exhaust paths 34b are integrated by the connection duct box 42, the number of pipes connected to the exhaust unit 38 becomes one. Therefore, the routing of the pipes inside the cutting device 2 becomes easy.

[0054] Next, a second modification of the cutting device 2 according to the present embodiment will be described. FIG. 5(A) is a plan view schematically showing the duct mechanism 28b of the cutting device 2 according to the second modification. For ease of understanding, only the slide covers 26a, 26b and the duct mechanism 28b are shown in FIG. 5(A), and elements hidden by the slide covers 26a, 26b are also shown by solid lines.

[0055] The duct mechanism 28b according to the second modification includes a fixed duct box 46 connected to the exhaust unit 38 (see FIG. 1) in the vicinity of the opening 12a of the processing chamber 12. The fixed duct box 46 is in contact with the first moving body 30a while allowing the movement of the first moving body 30a and is in contact with the second moving body 30b while allowing the movement of the second moving body 30b. The two moving bodies 30a, 30b are movable along the Y-axis direction on the fixed duct box 46.

[0056] FIG. 6(A) is a plan view schematically showing the positional relationship (first positional relationship) between the top plate 48 of the duct mechanism 28b according to the second modified example in a state where the slide covers 26a and 26b are slid to close the processing chamber 12, and the bottom plates 50a and 50b of the slide covers 26a and 26b.

[0057] As shown in FIG. 6(A) and the like, the first moving body 30a has the first connection port 44a in the bottom plate 50a, and the second moving body 30b has the second connection port 44b in the bottom plate 50b. Here, the first connection port 44a penetrates the bottom plate 50a, and the second connection port 44b penetrates the bottom plate 50b. Further, the fixed duct box 46 has the third connection port 44c and the fourth connection port 44d in the top plate 48. Here, the third connection port 44c and the fourth connection port 44d penetrate the top plate 48.

[0058] In the cutting device 2 according to the second configuration example, as shown in FIG. 6(A), when the first slide cover 26a is slid to close the processing chamber 12, the first connection port 44a of the first moving body 30a and the third connection port 44c of the fixed duct box 46 overlap. Then, the first moving body 30a and the fixed duct box 46 are connected via the first connection port 44a and the third connection port 44c, and the first exhaust path 34a (see FIG. 5(A)) is formed.

[0059] Also, when the second slide cover 26b is slid to close the processing chamber 12, the second connection port 44b of the second moving body 30b and the fourth connection port 44d of the fixed duct box 46 overlap. Then, the second moving body 30b and the fixed duct box 46 are connected via the second connection port 44b and the fourth connection port 44d, and the second exhaust path 34b (see FIG. 5(A)) is formed.

[0060] FIG. 5(B) is a front view schematically showing a duct mechanism 28b and slide covers 26a, 26b according to a second modification in a state where the slide covers 26a, 26b are slid to open the processing chamber 12. FIG. 6(B) is a plan view schematically showing the positional relationship (second positional relationship) between the top plate 48 of the duct mechanism 28b according to the second modification and the bottom plates 50a, 50b of the slide covers 26a, 26b in a state where the slide covers 26a, 26b are slid to open the processing chamber 12.

[0061] As shown in FIG. 6(B), when the first slide cover 26a is slid to open the processing chamber 12, the first connection port 44a of the first moving body 30a and the third connection port 44c of the fixed duct box 46 no longer overlap. In this case, the first exhaust path 34a (see FIG. 5(B)) passing through the first connection port 44a and the third connection port 44c is cut off.

[0062] Also, as shown in FIG. 6(B), when the second slide cover 26b is slid to open the processing chamber 12, the second connection port 44b of the second moving body 30b and the fourth connection port 44d of the fixed duct box 46 no longer overlap. In this case, the second exhaust path 34b (see FIG. 5(B)) passing through the second connection port 44b and the fourth connection port 44d is cut off.

[0063] Note that when the slide covers 26a, 26b are slid and the processing chamber 12 is opened, the third connection port 44c of the fixed duct box 46 is blocked by the first moving body 30a, and the fourth connection port 44d is blocked by the second moving body 30b. Therefore, the negative pressure generated in the exhaust unit 38 connected to the fixed duct box 46 does not leak from the connection ports 44c, 44d to the outside of the fixed duct box 46.

[0064] If the connection ports 44c and 44d of the fixed duct box 46 are opened when the duct mechanism 28b does not need to suck the gas containing the cutting fluid, the negative pressure generated in the exhaust unit 38 will leak and be wasted. When the exhaust unit 38 is a facility such as a factory, the waste of the negative pressure will impose an excessive load on the exhaust unit 38, which may affect the proper supply of the negative pressure to other devices or the like.

[0065] On the other hand, in the duct mechanism 28b, when it is not necessary to suck the gas containing the cutting fluid, the connection ports 44c and 44d of the fixed duct box 46 are blocked by the moving bodies 30a and 30b. Therefore, the waste of the negative pressure generated in the exhaust unit 38 is suppressed, the exhaust unit 38 is not overloaded, and the proper supply of the negative pressure to other devices or the like is maintained.

[0066] As described above, in the cutting device 2 according to the present embodiment, when the operator opens the processing chamber 12, the moving bodies 30a and 30b move together with the slide covers 26a and 26b and move away from the cutting units 16a and 16b. Therefore, the maintenance work is not hindered. After the maintenance work is completed, the suction ports 32a and 32b can be returned to the area where the cutting fluid scatters only by the operator closing the processing chamber 12. Therefore, the work of attaching and detaching the duct during the maintenance work is omitted, and the operating efficiency of the cutting device 2 is improved.

[0067] Furthermore, different from the case where the ducts are attached to the cutting units 16a and 16b, in the cutting device 2 according to the present embodiment, the weight of the ducts is not applied as a load to the moving mechanism of the cutting units 16a and 16b. Therefore, the power consumption of the moving mechanism is kept low, and the progress of the deterioration of the moving mechanism is also suppressed.

[0068] Note that the present invention is not limited to the description of the above embodiments and can be implemented with various modifications. For example, in the above embodiment, the case where the cutting device 2 has two cutting units 16a and 16b and two slide covers 26a and 26b has been described as an example, but one aspect of the present invention is not limited to this. That is, the cutting device 2 may have only the first cutting unit 16a. Also, the cutting device 2 may have only the first slide cover 26a.

[0069] Even in this case, the operator can move the duct mechanisms 28, 28a, and 28b away from the chuck table 14 to a position where they do not interfere with the maintenance work by simply sliding the first slide cover 26a to open the processing chamber 12. Also, by simply sliding the first slide cover 26a to close the processing chamber 12, the first suction port 32a of the first moving body 30a of the duct mechanisms 28, 28a, and 28b can be positioned at a position suitable for sucking cutting fluid.

[0070] Furthermore, in this case, in the cutting device 2 according to the second modification example described above, the fixed duct box 46 has only the third connection port 44c. And when the first connection port 44a of the first moving body 30a overlaps the third connection port 44c, the first exhaust path 34a is formed, and when the first connection port 44a does not overlap the third connection port 44c, the first exhaust path 34a is cut off. At this time, leakage of negative pressure by the exhaust unit 38 is suppressed.

[0071] Also, in the above embodiment, the case where the two slide covers 26a and 26b slide in the lateral direction (Y-axis direction) to open and close the processing chamber 12 has been described, but one aspect of the present invention is not limited to this. That is, the slide covers 26a and 26b may move in the vertical direction (Z-axis direction). Even in this case, the duct mechanisms 28, 28a, and 28b can be moved by simply opening and closing the slide covers 26a and 26b.

[0072] Furthermore, regarding the duct mechanism 28b according to the second modification of the above embodiment, the case where the first moving body 30a and the second moving body 30b and the fixed duct box 46 overlap in the vertical direction (Z-axis direction) has been described, but one aspect of the present invention is not limited to this. That is, the first moving body 30a and the second moving body 30b and the fixed duct box 46 may overlap in the front-rear direction (X-axis direction).

[0073] Also in this case, when the slide covers 26a and 26b are opened, the third connection port 44c of the fixed duct box 46 is blocked by the first moving body 30a, and the fourth connection port 44d is blocked by the second moving body 30b. Further, when the slide covers 26a and 26b are closed, the third connection port 44c of the fixed duct box 46 overlaps with the first connection port 44a of the first moving body 30a, and the fourth connection port 44d overlaps with the second connection port 44b of the second moving body 30b.

[0074] In addition, the structures, methods, etc. according to the above embodiment and the modifications can be appropriately changed and implemented without departing from the scope of the object of the present invention.

Explanation of Reference Numerals

[0075] 2 Cutting device 4 Base 6 Housing 8 Cassette support base 10 Touch panel display 12 Processing chamber 12a Opening 14 Chuck table 14a Upper surface 16a, 16b Cutting unit 18a, 18b Spindle 20a, 20b Rotation drive source 22a, 22b Cutting blade 24a, 24b Cutting water supply nozzle 26a, 26b Slide cover 28, 28a, 28b Duct mechanism 30a, 30b Moving body 32a, 32b Suction port Exhaust pipes 33a, 33b Exhaust paths 34a, 34b Suction source 36 Exhaust unit 38 Pipes 33c, 40a, 40b Connection duct box 42 Connection ports 44a, 44b, 44c, 44d Fixed duct box 46 Top plate 48 Bottom plates 50a, 50b

Claims

1. A chuck table, a first cutting unit that cuts a workpiece held by the chuck table, a processing chamber that houses the chuck table and the first cutting unit, a first slide cover that slides to open and close the processing chamber, and a duct mechanism including a first moving body fixed to the first slide cover and moving along with the slide of the first slide cover. The first cutting unit includes a first spindle parallel to the upper surface of the chuck table and disposed above the chuck table, a first rotation drive source connected to the base end of the first spindle, an annular first cutting blade attached to the tip of the first spindle, and a first cutting water supply nozzle that supplies cutting water to the first cutting blade. The duct mechanism has a first suction port provided in a region where the cutting water scatters as the first cutting blade rotates when the first rotation drive source is operated to rotate the first cutting blade and the cutting water is supplied from the first cutting water supply nozzle to the first cutting blade, and the first suction port is provided in the first moving body. constitutes a first exhaust path with one end reaching an exhaust unit having a suction source and the other end reaching the first suction port. A cutting apparatus characterized by sucking the cutting water from the first suction port by a negative pressure generated by the suction source and discharging the cutting water from the processing chamber.

2. a second cutting unit that has a function of cutting a workpiece held by the chuck table and is housed in the processing chamber, and a second slide cover that slides to open and close the processing chamber together with the first slide cover. The second cutting unit includes a second spindle parallel to the upper surface of the chuck table and the first spindle and disposed above the chuck table, a second rotation drive source connected to the base end of the second spindle, an annular second cutting blade attached to the tip of the second spindle, and a second cutting water supply nozzle that supplies the cutting water to the second cutting blade. The duct mechanism includes a second moving body fixed to the second slide cover and moving along with the slide of the second slide cover. When the second rotational drive source is operated to rotate the second cutting blade and cutting water is supplied from the second cutting water supply nozzle to the second cutting blade, a second suction port is provided in a region where the cutting water scatters as the second cutting blade rotates, and the second moving body is provided with the second suction port. A second exhaust path is configured such that one end reaches the exhaust unit having the suction source and the other end reaches the second suction port. The cutting device according to claim 1, wherein the cutting water is sucked from the second suction port by the negative pressure generated by the suction source and the cutting water is discharged from the processing chamber.

3. The duct mechanism further includes a connection duct box that is connected to a first pipe connected to the first moving body, a second pipe connected to the second moving body, and a third pipe connected to the exhaust unit and is fixed in the processing chamber. The cutting device according to claim 2, wherein the connection duct box is included in the first exhaust path and the second exhaust path.

4. The first moving body has a first connection port. The second moving body has a second connection port. The duct mechanism includes a fixed duct box connected to the exhaust unit. The fixed duct box is in contact with the first moving body while allowing the movement of the first moving body and is in contact with the second moving body while allowing the movement of the second moving body. The fixed duct box has a third connection port and a fourth connection port. When the first slide cover is slid to close the processing chamber, the first connection port of the first moving body and the third connection port of the fixed duct box overlap, and the first exhaust path is formed. When the first slide cover is slid to open the processing chamber, the first connection port of the first moving body and the third connection port of the fixed duct box do not overlap, and the first exhaust path is cut off. When the second slide cover is slid to close the processing chamber, the second connection port of the second moving body and the fourth connection port of the fixed duct box overlap, and the second exhaust path is formed. The cutting device according to claim 2, wherein when the second slide cover is slid to open the processing chamber, the second connection port of the second moving body and the fourth connection port of the fixed duct box do not overlap, and the second exhaust path is cut off.

5. The first moving body has a first connection port. The duct mechanism includes a fixed duct box connected to the exhaust unit. The fixed duct box is in contact with the first moving body while allowing the movement of the first moving body. The fixed duct box has a third connection port. When the first slide cover is slid to close the processing chamber, the first connection port of the first moving body and the third connection port of the fixed duct box overlap to form the first exhaust path. The cutting device according to claim 1, characterized in that when the first slide cover is slid to open the processing chamber, the first connection port of the first moving body and the third connection port of the fixed duct box do not overlap and the first exhaust path is cut off.

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