Laser Processing Equipment

Abstract

To provide a laser processing apparatus capable of preventing degradation in printing quality without adjusting a scan speed of a scanner.SOLUTION: A laser processing apparatus 100 includes an oscillator 20, a scanner 30, a control device 50, and an input device 60. The oscillator 20 repeatedly generates a pulse train including a plurality of optical pulses. The control device 50 changes at least one of the number of optical pulses and a pulse width of each of the plurality of optical pulses in a predetermined region where a speed of scanning changes when a laser beam is scanned by the scanner 30 along a processing pattern received by the input device 60.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a laser processing apparatus. [Background technology]

[0002] Laser markers, a type of laser processing equipment, often use a galvanometer mirror that can be deflected in two directions to scan a laser beam along the desired processing pattern, thereby drawing (hereinafter also referred to as "printing") a processing pattern on the workpiece.

[0003] Because the inertia of a galvanometer mirror causes a delay in response to commands, laser processing devices using a galvanometer mirror can result in uneven line widths and distorted printing, resulting in a decline in printing quality.

[0004] Japanese Patent Application Laid-Open No. 2010-125489 (Patent Document 1) discloses a technique for eliminating the inward turning phenomenon at curved sections by reducing the scanning speed (scanning rate) of the scanner when drawing curved sections compared to when drawing straight sections, and by reducing the pulse oscillation frequency and duty ratio or the pulse oscillation interval that contributes to printing in accordance with the scanning rate. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-125489 Summary of the Invention [Problem to be solved by the invention]

[0006] According to the technology disclosed in JP 2010-125489 A, in order to prevent print quality from deteriorating due to the response delay of the galvanometer mirror, the scanning speed of the scanner must be adjusted taking into account the response delay of the galvanometer mirror. Therefore, it is difficult to prevent print quality from deteriorating in areas where the scanning speed of the scanner cannot be adjusted (for example, the start area of drawing, the end area of drawing, etc.).

[0007] An object of the present disclosure is to provide a laser processing device that can prevent a decrease in print quality without adjusting the scanning speed of a scanner. [Means for solving the problem]

[0008] The laser processing apparatus according to the present disclosure is a laser processing apparatus that draws a processing pattern on a workpiece, and includes: an oscillator that oscillates laser light; a scanner that scans the laser light output from the oscillator; a control device that controls the oscillator and the scanner; and a reception unit that receives an input of the processing pattern for the workpiece. The oscillator includes a seed light source that emits seed light, an excitation light source that emits excitation light, and a light-amplifying fiber configured to amplify the seed light by receiving the seed light and the excitation light. The seed light source repeatedly generates a pulse train including a plurality of light pulses as the seed light, and the control device varies at least one of the number of light pulses emitted by the seed light source and the pulse width of each of the plurality of light pulses emitted by the seed light source in a predetermined region where the scanning speed changes when the scanner scans the laser light along the processing pattern received by the reception unit.

[0009] According to the above disclosure, it is possible to prevent printing from becoming too dark or line width becoming too wide in a predetermined area, thereby preventing a decrease in print quality.

[0010] In the above disclosure, the predetermined area is the area where drawing of the processing pattern begins.

[0011] According to the above disclosure, it is possible to prevent the printing from becoming too dark or the line width from becoming too wide in the region where the drawing starts, thereby preventing a decrease in print quality.

[0012] In the above disclosure, the predetermined area is the area of the processing pattern where drawing has finished.

[0013] According to the above disclosure, it is possible to prevent the printing from becoming darker or the line width from becoming wider in the area where the drawing has finished, thereby preventing a decrease in print quality.

[0014] In the above disclosure, the predetermined region is a curved region of the processing pattern.

[0015] According to the above disclosure, it is possible to prevent printing from becoming darker or line widths from becoming wider in curved areas, thereby preventing a decrease in print quality.

[0016] In the above disclosure, the receiving unit receives the operating conditions of the scanner, and the control device determines the number and pulse width of light pulses when the scanner scans a predetermined area with laser light, based on the processing pattern and the operating conditions of the scanner received by the receiving unit.

[0017] According to the above disclosure, the number and pulse width of light pulses to be used when scanning a predetermined area with laser light by a scanner can be determined before the scanner starts to be driven.

[0018] In the above disclosure, the control device determines the number and pulse width of light pulses when the scanner scans a predetermined area with laser light, based on the operating status of the scanner.

[0019] According to the above disclosure, the number and pulse width of light pulses when a predetermined area is scanned with laser light by a scanner can be corrected based on the operating status of the scanner.

[0020] In the above disclosure, the receiving unit receives a processing pattern having shading, and when the scanner scans the laser light along the processing pattern having shading received by the receiving unit, the control device varies at least one of the number of light pulses and the pulse width according to the gradation of the processing pattern.

[0021] According to the above disclosure, even when drawing a processing pattern with varying shades, it is possible to prevent the printing from becoming too dark or the line width from becoming too wide in a specified area, thereby preventing a decrease in printing quality. [Effects of the Invention]

[0022] According to the present disclosure, a laser processing device is provided that can prevent a decrease in print quality without adjusting the scanning speed of a scanner. [Brief explanation of the drawings]

[0023] [Figure 1] 1 is a diagram illustrating a configuration example of a laser processing device according to an embodiment. [Figure 2] 1 is a diagram illustrating a configuration example of a laser processing device according to an embodiment. [Figure 3] FIG. 2 is a diagram showing the waveform of seed light generated from a seed LD. [Figure 4] FIG. 1 is a diagram for explaining a Q-switch system. [Figure 5] FIG. 1 is a diagram showing the relationship between frequency and pulse train width (pulse width) in the MOPA method and the Q switch method. [Figure 6] 10A and 10B are diagrams illustrating examples of changes in irradiation conditions between a region where drawing starts and a region where drawing ends. [Figure 7] 10A and 10B are diagrams illustrating examples of changes in irradiation conditions at curved portions. [Figure 8] 10A and 10B are diagrams for explaining a method for determining irradiation conditions in a predetermined region. [Figure 9] 10 is a flowchart showing an example of a printing process when the irradiation conditions for a predetermined area are determined using a first method. [Figure 10]10 is a flowchart showing an example of a printing process when the irradiation conditions for a predetermined area are determined using the second method or the third method. [Figure 11] 10 is a flowchart showing an example of a printing process in which irradiation conditions in a predetermined area are determined using a first method and then corrected using a second method or a third method. [Figure 12] FIG. 10 is a diagram showing an example of irradiation conditions when printing a processing pattern with shading. [Figure 13] 10 is a flowchart showing an example of a printing process when printing a processing pattern with shading. DETAILED DESCRIPTION OF THE INVENTION

[0024] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are designated by the same reference numerals and description thereof will not be repeated.

[0025] [Application example] First, an example of a situation in which the present invention is applied will be described with reference to Figures 1 and 3. The situation in which the present invention is applied is a situation in which a processing pattern is drawn (hereinafter also referred to as "printed") on a processing object 90 using a laser processing device 100.

[0026] The laser processing device 100 uses galvanometer mirrors (X scan mirror 31, Y scan mirror 32) that can be deflected in two dimensions to scan the laser light output from the oscillator 20 in two dimensions on the surface of the workpiece 90, thereby forming processing marks (dots) on the workpiece 90 along the processing pattern. In this way, the processing pattern is written on the workpiece 90.

[0027] Generally, when a processing pattern is drawn using a laser processing device that uses such a galvanometer mirror, the printing becomes darker and the line width becomes wider in areas where the scanning speed at which the scanner 30 scans the laser light (hereinafter also referred to as the "scanning speed") changes, compared to areas where the scanning speed is constant (hereinafter also referred to as the "constant speed area"). This is because in constant speed areas, the scanning speed is maintained at a set speed (including speeds that are close to the set speed), whereas in areas where the scanning speed changes, the scanning speed is slower than the set speed. Within the processing pattern, the areas where the drawing starts, ends, and curved areas correspond to areas where the scanning speed changes, and are therefore "predetermined areas."

[0028] In detail, the start-of-drawing area is the area where laser printing begins, where the laser light starts to be emitted, and where the scanner 30 exhibits accelerating behavior from a stopped or low-speed state to a constant-speed state within the set speed range.

[0029] The end-of-drawing area is the area where laser printing ends, the area immediately before the laser light emission stops, and the area where the scanner 30 exhibits deceleration behavior from a constant speed state to a stopped state or a low speed state within the set speed range.

[0030] The curved region is a region where the scanner 30 exhibits accelerating or decelerating behavior in two axial directions (X-axis direction and Y-axis direction) simultaneously within the set speed range during laser printing, or a region where the scanner 30 exhibits accelerating or decelerating behavior within the set speed range in one axial direction, while exhibiting constant speed behavior within the set speed range in the other axial direction.

[0031] When the laser processing apparatus 100 scans the laser beam using the scanner 30 along the processing pattern, it achieves uniform printing by varying at least one of the laser beam parameters shown in FIG. 3, the number of optical pulses included in one pulse train and the pulse width tw of each of the optical pulses, between the predetermined region and the constant speed region. The number of optical pulses included in one pulse train and the pulse width tw of each of the optical pulses are factors that determine the width of dots (i.e., pulse train width tw), which affects the thickness and darkness of line segments. Therefore, the laser processing apparatus 100 can prevent a deterioration in printing quality without adjusting the scanning speed of the scanner 30.

[0032] More specific application examples of the embodiments will be described below. In the following, "LD" means Laser Diode (semiconductor laser).

[0033] [Embodiment Mode] (Configuration of laser processing device 100) An example of the configuration of a laser processing apparatus according to an embodiment will be described with reference to Figures 1 and 2. Figures 1 and 2 are diagrams showing an example of the configuration of a laser processing apparatus 100 according to an embodiment.

[0034] 1 and 2, the laser processing apparatus 100 is a laser marker including an oscillator 20, a scanner 30, a control device 50, and an input device 60. The oscillator 20 emits laser light. The scanner 30 scans the laser light output from the oscillator 20. The control device 50 controls the oscillator 20 and the scanner 30. The input device 60 is an example of a "reception unit" and receives information input from a user.

[0035] Referring mainly to Fig. 2, the oscillator 20 employs a MOPA (Master Oscillator and Power Amplifier) system. The MOPA system separates a highly stable master oscillator (or seed light) for generating a high-quality beam from a high-output optical amplifier, and controls each independently. In detail, the oscillator 20 includes optical fibers 1 and 8, a seed LD 2, pumping LDs 3, 9A, and 9B, isolators 4, 6, and 11, couplers 5 and 10, an end cap 12, and drivers 13, 14, 15A, and 15B, and is configured to amplify seed light generated from the seed LD 2 by the optical fibers 1 and 8 and output the amplified seed light.

[0036] The optical fibers 1 and 8 are optical amplifying fibers. The optical fibers 1 and 8 may be silica-based fibers whose main component is silica, or may be plastic optical amplifying fibers.

[0037] The optical fibers 1 and 8 have a core doped with a rare earth element that is an optical amplification component, and a cladding provided around the core.

[0038] The seed LD 2 is a laser light source that emits seed light. The seed LD 2 repeatedly outputs a pulse train (see FIG. 3) including a plurality of optical pulses as the seed light. The wavelength of the seed light is selected from a range of 1000 to 1100 nm, for example. The driver 13 pulse-drives the seed LD 2 by repeatedly applying a pulsed current to the seed LD 2 in accordance with an instruction from the control device 50, and causes the seed LD 2 to repeatedly generate seed light (a pulse train) including a plurality of optical pulses.

[0039] The seed light emitted from the seed LD 2 passes through the isolator 4. The isolator 4 has the function of transmitting only light in one direction and blocking light incident in the opposite direction. In this example, the isolator 4 transmits the seed light from the seed LD 2 and blocks returning light from the optical fiber 1. This makes it possible to prevent returning light from the optical fiber 1 from entering the seed LD 2. If returning light from the optical fiber 1 enters the seed LD 2, there is a risk that the seed LD 2 may be damaged, but providing the isolator 4 makes it possible to prevent such a problem.

[0040] The pumping LD 3 is a pumping light source that emits pumping light for exciting atoms of a rare earth element doped in the core of the optical fiber 1. The driver 14 drives the pumping LD 3 in a CW (Continuous Wave) manner (continuous operation) in accordance with instructions from the control device 50.

[0041] The coupler 5 couples the seed light from the seed LD 2 and the pump light from the pump LD 3 and makes the combined light enter the optical fiber 1 .

[0042] The pumping light incident on the optical fiber 1 is absorbed by the atoms of the rare earth element contained in the core, exciting the atoms. When the seed light from the seed LD 2 propagates through the core of the optical fiber 1, the excited atoms cause stimulated emission due to the seed light, and the seed light is amplified.

[0043] The isolator 6 allows the seed light (light pulse) that has been amplified by the optical fiber 1 and emitted from the optical fiber 1 to pass through, while blocking light that returns to the optical fiber 1.

[0044] The pumping LDs 9A and 9B emit pumping light for exciting atoms of a rare earth element contained in the core of the optical fiber 8. The drivers 15A and 15B follow instructions from the control device 50 to CW-drive the pumping LDs 9A and 9B, respectively.

[0045] The coupler 10 couples the optical pulse output from the optical fiber 1 with the pumping light from the pumping LDs 9A and 9B, and inputs the combined light into the optical fiber 8. The optical pulse input into the optical fiber 8 is amplified by the same action as the optical amplification action in the optical fiber 1.

[0046] The isolator 11 passes the optical pulse emitted from the optical fiber 8 and blocks the light returning to the optical fiber 8. The optical pulse that has passed through the isolator 11 is emitted into the atmosphere from the end face of the optical fiber attached to the isolator 11. The end cap 12 is provided to prevent damage that occurs at the interface between the end face of the optical fiber and the atmosphere when an optical pulse with high peak power is emitted from the optical fiber into the atmosphere. Note that the end cap 12 may be provided inside the isolator 11.

[0047] In the configuration shown in FIG. 2, the number of pumping LDs in the first stage is 1 and the number of pumping LDs in the second stage is 2, but the numbers of pumping LDs are not limited to these values.

[0048] 1, scanner 30 scans the laser light output from oscillator 20 in two-dimensional directions on the surface of workpiece 90. In detail, scanner 30 includes an X-scan mirror 31, a Y-scan mirror 32, an X-axis motor 33, a Y-axis motor 34, a driver 35, and a condenser lens 36, and uses these elements to scan the laser light along a processing pattern. The processing pattern is received by input device 60, which will be described later.

[0049] X-scan mirror 31 is a galvanometer mirror that can be deflected in the X-axis direction and deflects the laser light in the X-axis direction. Y-scan mirror 32 is a galvanometer mirror that can be deflected in the Y-axis direction and deflects the laser light in the Y-axis direction. X-axis motor 33 is a drive source for X-scan mirror 31. Y-axis motor 34 is a drive source for Y-scan mirror 32. Driver 35 drives X-axis motor 33 and Y-axis motor 34 in accordance with instructions from control device 50. Collecting lens 36 is an fθ lens or the like for collecting the laser light.

[0050] The laser light output from the oscillator 20 is scanned in two-dimensional directions on the surface of the workpiece 90 by the scanner 30, thereby forming dots on the workpiece 90 according to the processing pattern.

[0051] 1 and 2, the control device 50 controls the drivers 13, 14, 15A, 15B, and 35 to comprehensively control the operation of the laser processing device 100. The input device 60 accepts information input from a user and transmits the accepted information to the control device 50. The information accepted by the input device 60 is, for example, the processing pattern of the workpiece 90, the driving conditions of the scanner 30, etc.

[0052] The processing pattern received by the input device 60 may be a processing pattern consisting of an area irradiated with laser light (hereinafter also referred to as "irradiation area") and an area not irradiated with laser light, or a processing pattern consisting of only an irradiation area. In addition, the irradiation area may or may not have shading.

[0053] The operating conditions of the scanner 30 accepted by the input device 60 are types related to the scanning speed of the scanner 30, such as "standard," "low speed," "high speed," etc. When the type related to the scanning speed of the scanner 30 is accepted by the input device 60, the control device 50 sets the scanning speed corresponding to the type as the set speed.

[0054] A personal computer that executes a predetermined program is used as the control device 50. A mouse, a keyboard, a touch panel, or the like is used as the input device 60. The control device 50 controls the operations of the drivers 13, 14, 15A, and 15B based on information received from the input device 60, and also controls the operation of the driver 35 while the drivers 13, 14, 15A, and 15B are operating (i.e., while the oscillator 20 is emitting laser light).

[0055] (Seed light waveform) Next, the waveform of the seed light generated from the seed LD 2 will be described with reference to FIGS.

[0056] 3 is a diagram showing the waveform of the seed light generated from the seed LD 2. The seed light generated from the seed LD 2 is a pulse train (multi-pulse) including multiple optical pulses. The driver 13 drives the seed LD 2 in accordance with instructions from the control device 50, so that a pulse train including multiple optical pulses is generated from the seed LD 2 at a repetition period tprd. The time interval (pulse interval) between the multiple optical pulses is tp.

[0057] The repetition period tprd and pulse interval tp are set based on the processing conditions of the workpiece, such as the material of the workpiece (metal, resin, etc.), processing time, processing quality, etc. For example, the repetition period tprd is selected from the range of 1 μs to 1 ms. On the other hand, the pulse interval tp is shorter than the repetition period tprd and is selected from the range of 1 ns to 100 ns, for example.

[0058] Because the pulse interval tp is short, the scanning distance between one pulse and the next pulse in the pulse train that makes up one multi-pulse is very short. Therefore, the next pulse is irradiated within the range of the processing mark on the surface of the workpiece caused by the previous pulse. As a result, the pulse train that makes up one multi-pulse is irradiated at almost the same location on the workpiece, forming a dot. In other words, a dot is composed of multiple light pulses (pulse trains).

[0059] The laser processing apparatus 100 employs a MOPA system using an optically amplifying fiber and uses light from a semiconductor laser as seed light. The seed light generated from the seed LD 2 is amplified by optical fibers 1 and 8 and output from the laser processing apparatus 100. The seed LD 2 outputs a pulse train containing multiple optical pulses as seed light, and therefore the laser processing apparatus 100 outputs a pulse train containing multiple optical pulses, in other words, multi-pulsed laser light.

[0060] The driver 13 drives the seed LD 2, causing the seed LD 2 to generate seed light (a pulse train). The driver 13 controls the current supplied to the seed LD 2, thereby making it possible to independently control multiple parameters related to the seed light, such as the repetition period tprd of the seed light (a pulse train) generated from the seed LD 2, the number of optical pulses included in one pulse train, the pulse interval tp, the peak power (pulse amplitude) of each optical pulse, and the pulse width tw of each optical pulse. The laser light output from the laser processing apparatus 100 is seed light amplified by the optical fibers 1 and 8. By controlling the parameters related to the seed light, it is possible to independently control multiple parameters related to the laser light (a pulse train) output from the laser processing apparatus 100 (such as the number of optical pulses included in one pulse train, the repetition period (corresponding to the frequency), the pulse interval, the peak power (pulse amplitude) of each optical pulse, and the pulse width of each optical pulse).

[0061] As described above, according to the embodiment, a pulse train (multi-pulse) can be output as laser light from the laser processing apparatus 100. Furthermore, a plurality of parameters related to the laser light (pulse train) output from the laser processing apparatus 100 can be controlled independently of each other. Therefore, according to the embodiment, a laser light (pulse train) for performing desired processing can be output from the laser processing apparatus 100.

[0062] (Advantages of the MOPA method) Here, the advantages of the MOPA method will be described in comparison with the Q-switch method with reference to FIGS.

[0063] Figure 4 is a diagram for explaining the Q-switch method. The Q-switch method is a laser oscillation method that can be compared to the MOPA method. In the Q-switch method, pulsed laser light is output by momentarily opening an element called a Q-switch. In detail, laser energy is increased between a total reflection mirror and a partial transmission mirror using the principle of laser resonance, and pulsed laser light is output by momentarily opening the Q-switch.

[0064] 5 is a diagram showing the relationship between frequency and pulse train width (pulse width) in the MOPA system and the Q-switch system. The vertical axis shows the pulse train width Tw (pulse width in the Q-switch system), and the horizontal axis shows the frequency.

[0065] In the case of the Q-switching method, when the frequency changes, the pulse width changes accordingly, as shown in Figure 5. In other words, in the case of the Q-switching method, the pulse width of the pulsed laser light is uniquely determined in relation to the frequency.

[0066] On the other hand, with the MOPA method, the pulse train width does not change even if the frequency changes. The pulse train width is the width of a pulse train containing multiple optical pulses, i.e., the width of a dot, and is indicated by Tw in Figure 3. In other words, with the MOPA method, a pulse train with the same pulse train width Tw can be output by changing the frequency. This is because with the MOPA method, the pulse train width Tw can be set arbitrarily by changing at least one of the number of optical pulses contained in one pulse train and the pulse width tw of each optical pulse (see Figure 3).

[0067] In this way, by adopting the MOPA system, the laser processing apparatus 100 can increase the degree of freedom in changing the pulse train width Tw compared to a Q-switched laser processing apparatus. The pulse train width Tw is a factor that affects the thickness and density of a line segment. The laser processing apparatus 100 adjusts the pulse train width Tw in a predetermined region by changing at least one of the number of light pulses included in one pulse train and the pulse width of each light pulse between a predetermined region and a constant speed region, i.e., by changing the laser light irradiation conditions between a predetermined region and a constant speed region, thereby achieving uniform printing.

[0068] (Example of changing irradiation conditions) 2, 6, and 7, a description will be given of an example of changing the laser light irradiation conditions (hereinafter also simply referred to as "irradiation conditions") performed by the laser processing apparatus 100. The irradiation conditions are changed by changing the values of parameters related to the laser light.

[0069] Fig. 6 is a diagram showing an example of changing the irradiation conditions in the drawing start region and the drawing end region. Fig. 7 is a diagram showing an example of changing the irradiation conditions in the curved portion. Patterns 1A to 3A and patterns 1B to 3B are examples of changing the irradiation conditions performed by the laser processing apparatus 100, and comparative examples A and B are examples of cases where the irradiation conditions are not changed. The drawing start region, the drawing end region, and the curved portion region are examples of predetermined regions, and the region midway along the line segment and the straight portion region are examples of constant speed regions.

[0070] Pattern 1A and Pattern 1B are examples of cases where the frequency and the number of light pulses included in one pulse train (dot) are changed between the predetermined region and the constant speed region. Specifically, the irradiation conditions in the constant speed region are a frequency of 100 kHz, eight light pulses included in one pulse train, and a pulse width of each of the light pulses of 8 ns, while the irradiation conditions in the predetermined region are a frequency of 75 kHz, four light pulses included in one pulse train, and a pulse width of each of the light pulses of 8 ns.

[0071] That is, when the laser light is scanned over a predetermined area, the frequency is changed from 100 kHz to 75 kHz, and the number of light pulses in one pulse train is changed from eight to four. By changing the frequency from 100 kHz to 75 kHz, the number of dots formed on the workpiece 90 is reduced from four (see Comparative Examples A and B) to three, preventing the dots from becoming densely packed in the predetermined area. Furthermore, by changing the number of light pulses in one pulse train from eight to four, the pulse train width Tw is reduced, preventing the line width from becoming thick in the predetermined area. Therefore, the density and line width of the processed pattern formed on the workpiece become uniform.

[0072] Pattern 2A and Pattern 2B are examples of cases where the frequency and the pulse width of each optical pulse included in one pulse train are changed between the predetermined region and the constant speed region. Specifically, the irradiation conditions in the constant speed region are a frequency of 100 kHz, the number of optical pulses included in one pulse train is 8, and the pulse width of each optical pulse is 8 ns, while the irradiation conditions in the predetermined region are a frequency of 75 kHz, the number of optical pulses included in one pulse train is 8, and the pulse width of each optical pulse is 4 ns.

[0073] That is, when the laser light is scanned over a predetermined area, the frequency is changed from 100 kHz to 75 kHz, and the pulse width of each light pulse included in one pulse train is changed from 8 ns to 4 ns. By changing the frequency from 100 kHz to 75 kHz, the number of dots formed on the workpiece 90 is reduced from four (see Comparative Examples A and B) to three, preventing the dots from becoming densely packed in the predetermined area. Furthermore, by changing the pulse width of each light pulse included in one pulse train from 8 ns to 4 ns, the pulse train width Tw is reduced, preventing the line width from becoming thick in the predetermined area. Therefore, the density and line width of the processed pattern formed on the workpiece are uniform.

[0074] Pattern 3A and Pattern 3B are examples of cases in which the frequency, the number of light pulses included in one pulse train, and the pulse width of each of the light pulses are changed between the predetermined region and the constant speed region. Specifically, the irradiation conditions in the constant speed region are a frequency of 100 kHz, eight light pulses included in one pulse train, and a pulse width of each of the light pulses of 8 ns, while the irradiation conditions in the predetermined region are a frequency of 75 kHz, two light pulses included in one pulse train, and a pulse width of each of the light pulses of 16 ns.

[0075] That is, when the laser light is scanned over a predetermined area, the frequency is changed from 100 kHz to 75 kHz, the number of light pulses in one pulse train is changed from eight to two, and the pulse width is changed from 8 ns to 16 ns. Changing the frequency from 100 kHz to 75 kHz reduces the number of dots formed on the workpiece 90 from four (see Comparative Examples A and B) to three, preventing the dots from becoming densely packed in the predetermined area. Furthermore, although the pulse width of each light pulse in one pulse train is increased from 8 ns to 16 ns, the number of light pulses in one pulse train is reduced from eight to two, suppressing the pulse train width Tw in the predetermined area. Therefore, the density and line width of the processed pattern formed on the workpiece are uniform.

[0076] As shown in Comparative Examples A and B, when the values of the parameters related to the laser light are the same in the predetermined area and the constant speed area (i.e., the irradiation conditions are the same), the scanning speed of the scanner 30 in the predetermined area is slower than the set speed, so the dots become denser in the predetermined area, resulting in darker printing and wider line widths in the predetermined area. Therefore, as shown in Patterns 1A to 3A or Patterns 1B to 3B, the laser processing apparatus 100 achieves uniform printing by changing at least one of the parameters related to the laser light, namely the number of light pulses included in one pulse train and the pulse width of each of the light pulses, between the predetermined area and the constant speed area.

[0077] The values of the parameters shown in FIGS. 6 and 7 are merely examples, and the values of the parameters are not limited to these.

[0078] In addition, in the examples shown in Figures 6 and 7, at least one of the number of optical pulses included in one pulse train and the pulse width of each of the optical pulses, and the frequency are changed between the specified region and the constant speed region, but it is also possible to change only at least one of the number of optical pulses included in one pulse train and the pulse width of each of the optical pulses between the specified region and the constant speed region.

[0079] Furthermore, in the examples shown in FIGS. 6 and 7, the parameter values are not changed within one predetermined region, but the parameter values may be changed in stages within one predetermined region.

[0080] (Method of determining irradiation conditions) With reference to FIG. 8, a method for determining irradiation conditions in a predetermined area (specifically, the frequency, the number of light pulses included in one pulse train, and the pulse width of each of the light pulses) will be described.

[0081] 8 is a diagram for explaining a method for determining the irradiation conditions for a predetermined area. The irradiation conditions for a predetermined area are determined by the control device 50.

[0082] 8, the control device 50 predicts the acceleration of the scanner 30 in a predetermined region, and determines the irradiation conditions for the predetermined region, i.e., the frequency, the number of light pulses included in one pulse train, and the pulse width of each of the light pulses, based on the predicted acceleration of the scanner 30 and the irradiation conditions for the constant-speed region. Because the acceleration of the scanner 30 is zero (including values close to zero) in the constant-speed region, predicting the value of the acceleration of the scanner 30 in the predetermined region makes it possible to determine the frequency, the number of light pulses included in one pulse train, and the pulse width of each of the light pulses required to achieve uniform printing.

[0083] Here, we will explain three methods for predicting the acceleration of the scanner 30. In the first method for predicting the acceleration, the control device 50 predicts the acceleration of the scanner 30 in a predetermined area based on the processing pattern and the driving conditions of the scanner 30 received by the input device 60.

[0084] According to the first method, the control device 50 can determine the irradiation conditions for all predetermined areas (the area at the start of drawing, the area of the curved portion, and the area at the end of drawing) before issuing an instruction to the scanner 30 to start scanning.

[0085] In addition, after issuing an instruction to the scanner 30 to start scanning, the control device 50 may determine the irradiation conditions for the specified area (the area where drawing begins, the area of the curved portion, or the area where drawing ends) before scanning of the laser light for the specified area begins.

[0086] In contrast to this, in the second and third methods, the control device 50 predicts the acceleration in a predetermined area based on the driving status of the scanner 30. Therefore, according to the second or third method, the irradiation conditions in the predetermined area are determined after the scanner 30 receives an instruction (input signal) to start scanning.

[0087] In the second method, the control device 50 predicts a subsequent change in the current value based on an input value (input signal) input to the motors (X-axis motor 33 and Y-axis motor 34 shown in FIG. 1) of the scanner 30. Because the positions of the mirrors (X-scan mirror 31 and Y-scan mirror 32 shown in FIG. 1) change in accordance with a change in the current value, the control device 50 can predict the acceleration of the scanner 30 by predicting the change in the current value.

[0088] According to the second method, the irradiation conditions for a predetermined area are determined after the scanner 30 receives an input signal and before the scanning of the laser light for the corresponding predetermined area (the area where drawing begins, the area of the curved portion, or the area where drawing ends) begins.

[0089] In the third method, the control device 50 uses a rotary encoder to detect the rotational position of the motor of the scanner 30, calculates the difference between the actual mirror position and the desired mirror position, and predicts the acceleration of the scanner 30 based on the calculated difference.

[0090] The third method requires that the motor has started rotating, and therefore, according to the third method, the irradiation conditions for the predetermined area are determined after the scanner 30 receives the input signal, during the period from when the current value starts to change until when the laser light starts scanning the corresponding predetermined area (the area where drawing starts, the area where the curved portion is drawn, or the area where drawing ends).

[0091] In the third method, the control device 50 may detect the value of the current supplied to the motor of the scanner 30 instead of the rotational position of the motor of the scanner 30.

[0092] The control device 50 predicts the acceleration of the scanner 30 using any one of the three methods described above before scanning of the specified area with laser light begins, thereby determining the irradiation conditions for the specified area, i.e., the frequency, the number of light pulses contained in one pulse train, and the pulse width of each of the light pulses, and instructs the oscillator 20 to change the value of each parameter to the determined content.

[0093] The control device 50 may determine the irradiation conditions for all predetermined regions (the drawing start region, the curved region, and the drawing end region) using any one of the three methods described above, or may change the method used for each region. As an example, the control device 50 may determine the irradiation conditions for only the drawing start region using the first method, and determine the irradiation conditions for the curved region and the drawing end region using the second or third method.

[0094] In addition, the control device 50 may determine the irradiation conditions for all specified areas using the first method, and then determine them using the second or third method, and correct the contents determined using the first method based on the contents determined using the second or third method.

[0095] Furthermore, the method for predicting the acceleration of the scanner 30 based on the driving status of the scanner 30 is not limited to the second or third method, and may be a method for detecting the movement of a mirror.

[0096] (printing process) 9 to 11, the printing process performed by the control device 50 will be described. The control device 50 performs printing while changing the irradiation conditions between the predetermined area and the constant speed area. The control device 50 determines the irradiation conditions in the constant speed area based on the driving conditions of the scanner 30 input by the user, and determines the irradiation conditions in the predetermined area using at least one of the three methods described in FIG. 8.

[0097] FIG. 9 is a flowchart showing an example of a printing process when the irradiation conditions for a predetermined area are determined using the first method.

[0098] In step S905, the control device 50 accepts the processing pattern and the operating conditions of the scanner 30. The processing pattern and the operating conditions of the scanner 30 are accepted by the input device 60 and transmitted to the control device 50. The operating conditions of the scanner 30 are types related to the scanning speed of the scanner 30, such as "standard," "low speed," or "high speed."

[0099] In step S910, the control device 50 generates print data based on the processing pattern received in step S905.

[0100] In step S915, the control device 50 determines the predetermined area and the constant speed area based on the print data generated in step S910.

[0101] In step S920, the control device 50 determines the irradiation conditions in the constant speed region to be irradiation conditions corresponding to the drive conditions of the scanner 30 received in step S905. As an example, in the examples of Pattern 1A and Pattern 1B in Figures 6 and 7, in step S920, the irradiation conditions in the constant speed region are determined to be a frequency of 100 kHz, the number of light pulses included in one pulse train to be 8, and the pulse width to be 8 ns.

[0102] In step S925, the control device 50 determines the irradiation conditions for the predetermined region using the first method. Specifically, the control device 50 predicts the acceleration for the predetermined region based on the processing pattern and the driving conditions of the scanner 30 received in step S905, and determines the irradiation conditions for the predetermined region based on the predicted acceleration and the irradiation conditions for the constant speed region determined in step S920. As an example, in the examples of Pattern 1A and Pattern 1B in FIGS. 6 and 7, in step S925, the irradiation conditions for the predetermined region are determined to be a frequency of 75 kHz, the number of light pulses included in one pulse train to be 4, and a pulse width of 8 ns.

[0103] In step S930, the control device 50 instructs the oscillator 20 to start printing. Specifically, the control device 50 instructs the oscillator 20 to start outputting laser light and the scanner 30 to start scanning. At this time, the control device 50 instructs the oscillator 20 to output laser light under the irradiation conditions determined in step S920 for the constant speed region, and to output laser light under the irradiation conditions determined in step S925 for the predetermined region. As a result, when the laser light is scanned over the constant speed region, the oscillator 20 outputs laser light under the irradiation conditions determined in step S920, and when the laser light is scanned over the predetermined region, the oscillator 20 outputs laser light under the irradiation conditions determined in step S925.

[0104] In step S935, the control device 50 determines whether or not all of the processing patterns accepted in step S905 have been printed. If all of the processing patterns accepted in step S905 have been printed (YES in step S935), the control device 50 instructs the oscillator 20 to end output of laser light and the scanner 30 to end scanning (step S940). After step S940, the control device 50 ends the series of processes shown in FIG. 9.

[0105] FIG. 10 is a flowchart showing an example of a printing process when the irradiation conditions for a predetermined area are determined using the second method or the third method.

[0106] In steps S1005 to S1020, the control device 50 performs the same processes as in steps S905 to S920.

[0107] In step S1025, the control device 50 instructs the start of printing. Specifically, the control device 50 instructs the oscillator 20 to start outputting laser light and instructs the scanner 30 to start scanning. At this time, the control device 50 instructs the oscillator 20 to output laser light under the irradiation conditions determined in step S1020 to all areas of the processing pattern (predetermined areas and constant speed areas).

[0108] In step S1030, the control device 50 acquires the driving status of the scanner 30. When the control device 50 determines the irradiation conditions for the predetermined area using the second method, it acquires the input value input to the motor of the scanner 30. On the other hand, when the control device 50 determines the irradiation conditions for the predetermined area using the third method, it acquires the rotational position of the motor of the scanner 30 or the value of the current supplied to the motor of the scanner 30.

[0109] In step S1035, the control device 50 determines the irradiation conditions in the predetermined region using the second method or the third method. In detail, according to the second method, the control device 50 predicts the acceleration of the scanner 30 based on the input value input to the motor of the scanner 30 acquired in step S1030, and determines the irradiation conditions in the predetermined region based on the predicted acceleration and the irradiation conditions in the constant speed region determined in step S1020.

[0110] According to the third method, the control device 50 predicts the acceleration of the scanner 30 based on the rotational position of the motor of the scanner 30 or the value of the current supplied to the motor of the scanner 30 acquired in step S1030, and determines the irradiation conditions in a specified area based on the predicted acceleration and the irradiation conditions in the constant speed area determined in step S1020.

[0111] As an example, in the examples of patterns 1A and 1B in Figures 6 and 7, step S1035 determines the irradiation conditions in the specified area to be a frequency of 75 kHz, the number of light pulses included in one pulse train to be 4, and the pulse width to be 8 ns.

[0112] In step S1040, the control device 50 instructs the oscillator 20 to change only the irradiation conditions for a predetermined region of the processing pattern to the irradiation conditions determined in step S1035.

[0113] After step S1040, control device 50 performs steps S1045 and S1050, and ends the series of processes shown in Fig. 10. Steps S1045 and S1050 are similar to steps S935 and S940.

[0114] FIG. 11 is a flowchart showing an example of a printing process in which the irradiation conditions in a predetermined area are determined using the first method and then corrected using the second method or the third method.

[0115] In steps S1105 to S1130, the control device 50 performs the same processes as in steps S905 to S930.

[0116] In step S1135, the control device 50 acquires the driving status of the scanner 30. The process in step S1135 is the same as that in step S1030.

[0117] In step S1140, the control device 50 determines the irradiation conditions for the predetermined region using the second method or the third method. The process of step S1140 is the same as that of step S1035.

[0118] In step S1145, the control device 50 instructs the oscillator 20 to correct the irradiation conditions in the predetermined area to the irradiation conditions determined in step S1140.

[0119] After step S1145, control device 50 performs steps S1150 and S1155, and ends the series of processes shown in Fig. 11. Steps S1150 and S1155 are similar to steps S935 and S940.

[0120] As described above, when the laser processing apparatus 100 of the embodiment scans the laser beam along the processing pattern using the scanner 30, it changes at least one of the number of light pulses included in one pulse train and the pulse width of each of the light pulses between the predetermined region and the constant-speed region, thereby changing the laser beam irradiation conditions between the predetermined region and the constant-speed region. This prevents the printing from becoming darker or the line width from becoming wider in the predetermined region where the scanning speed of the scanner 30 is slower than the set speed. As a result, the darkness and line width of the processing pattern formed on the workpiece are uniform, preventing a deterioration in printing quality.

[0121] Furthermore, since the value of each parameter related to the seed beam is changed by changing the current supplied by the driver 13 to the seed LD 2, there is no need to stop the scanner 30 when changing the value of each parameter related to the seed beam in the laser processing apparatus 100. In other words, in the laser processing apparatus 100, even if the irradiation conditions of the laser beam are changed between the predetermined area and the constant speed area, the takt time does not increase.

[0122] [Variations] As a modified example, a printing process for printing a processing pattern with shading using the above-described laser processing device 100 will be described with reference to FIGS.

[0123] 1 and 12 are diagrams showing examples of irradiation conditions when printing a processing pattern with shading. In Fig. 12, as an example of a processing pattern with shading, a processing pattern consisting of two areas (area P and area Q) with different gradations is depicted.

[0124] When drawing such a processing pattern with different gradations, the laser processing device 100 sets different irradiation conditions for each area with different gradations. The irradiation conditions for each area are determined by the control device 50 according to the gradation of each area.

[0125] In this example, the irradiation conditions for region P are set to a frequency of 200 kHz, the number of light pulses in one pulse train (dots) to 16, and the pulse width of each of the light pulses to 8 ns, while the irradiation conditions for region Q are set to a frequency of 100 kHz, the number of light pulses in one pulse train to 8, and the pulse width of each of the light pulses to 8 ns. By setting the irradiation conditions in this way, the dots in region P overlap, making region P darker than region Q and resulting in a processed pattern with varying shading.

[0126] 12, in order to draw a processing pattern with light and shade, different values are set for the frequency and the number of light pulses included in one pulse train among the frequency, the number of light pulses included in one pulse train, and the pulse width of each of the light pulses for each region with different gradations, but the combination of parameters for which different values are set is not limited to this. In the laser processing apparatus 100, in order to draw a processing pattern with light and shade, it is sufficient to set different values for at least one of the number of light pulses included in one pulse train and the pulse width of each of the light pulses for each region with different gradations.

[0127] 13 is a flowchart showing an example of a printing process when printing a processing pattern with shading. The process shown in FIG.

[0128] In steps S1305 and S1310, the control device 50 performs the same processes as in steps S905 and S910.

[0129] In step S1315, the control device 50 determines the irradiation conditions for each gradation of the processing pattern based on the print data generated in step S1310. In detail, the control device 50 divides the processing pattern into multiple areas with different gradations based on the print data generated in step S1310, and determines the irradiation conditions for each area according to the gradation of each area.

[0130] As an example, in the example shown in Figure 12, step S1315 determines the irradiation conditions for area P, which is darker than area Q, to be a frequency of 200 kHz, the number of light pulses in one pulse train to be 16, and the pulse width to be 8 ns, and the irradiation conditions for area Q, which is lighter than area P, to be a frequency of 100 kHz, the number of light pulses in one pulse train to be 8, and the pulse width to be 8 ns.

[0131] In step S1315, the frequency, the number of optical pulses included in one pulse train, and the pulse width of each of the optical pulses are determined according to the gradation of each region. Note that in the example shown in Fig. 12, the frequency and the number of optical pulses included in one pulse train are determined to be different values between regions with different gradations, but it is sufficient that at least one of the number of optical pulses included in one pulse train and the pulse width of each of the optical pulses is determined to be a different value between regions with different gradations.

[0132] In the laser processing apparatus 100, the irradiation conditions determined in step S1315 are adopted as the irradiation conditions in the constant speed region, and the irradiation conditions in the predetermined region are determined in step S1325, which will be described later.

[0133] In step S1320, the control device 50 determines the predetermined area and the constant speed area based on the print data generated in step S1310. The process in step S1320 is the same as that in step S915.

[0134] In step S1325, the control device 50 determines the irradiation conditions for the predetermined region using a first method. Specifically, the control device 50 first identifies the irradiation conditions determined in step S1315 for the region to which the predetermined region belongs. For ease of explanation, the identified irradiation conditions are hereinafter referred to as "reference irradiation conditions." Next, the control device 50 predicts acceleration in the predetermined region based on the processing pattern and the operating conditions of the scanner 30 received in step S1305, and determines the irradiation conditions for the predetermined region based on the predicted acceleration and the reference irradiation conditions.

[0135] As an example, if the predetermined area belongs to area Q shown in FIG. 12, step S1325 determines the irradiation conditions for the predetermined area as follows: frequency 75 kHz, number of optical pulses included in one pulse train 4, and pulse width 8 ns.

[0136] In this example, the frequency and the number of optical pulses included in one pulse train are changed between the specified region and the constant speed region, but as in the above-described embodiment, it is sufficient to change at least one of the number of optical pulses included in one pulse train and the pulse width of each of the optical pulses between the specified region and the constant speed region.

[0137] In step S1330, the control device 50 instructs the oscillator 20 to start printing. Specifically, the control device 50 instructs the oscillator 20 to start outputting laser light and the scanner 30 to start scanning. At this time, the control device 50 instructs the oscillator 20 to output laser light to the constant speed region under the irradiation conditions determined in step S1315, and to output laser light to the predetermined region under the irradiation conditions determined in step S1325. As a result, when the laser light is scanned over the constant speed region, the oscillator 20 outputs laser light under the irradiation conditions determined in step S1315, and when the laser light is scanned over the predetermined region, the oscillator 20 outputs laser light under the irradiation conditions determined in step S1325.

[0138] After step S1330, control device 50 performs steps S1335 and S1340, and ends the series of processes shown in Fig. 13. Steps S1335 and S1340 are similar to steps S935 and S940.

[0139] As described above, there is no need to stop the scanner 30 when changing the values of the parameters related to the seed beam in the laser processing apparatus 100. Therefore, according to the modified example, the laser processing apparatus 100 can draw a processing pattern with varying shading without stopping the scanner 30.

[0140] Furthermore, according to a modification, the laser processing apparatus 100 can change at least one of the number of light pulses included in one pulse train and the pulse width of each light pulse between the predetermined region and the constant speed region, even when drawing a processing pattern with varying shading. This prevents the printing from becoming darker or the line width from becoming thicker in the predetermined region where the scanning speed of the scanner 30 is slower than the set speed, thereby preventing a deterioration in print quality. Furthermore, since the laser processing apparatus 100 does not need to stop the scanner 30 when changing the values of each parameter related to the seed beam, changing the parameter values between the predetermined region and the constant speed region does not increase the takt time.

[0141] 12, the processing pattern is made up of two or more regions with different gradations, but is not limited to this. The processing pattern may be made up of three or more regions with different gradations.

[0142] 13, the control device 50 determines the irradiation conditions for the predetermined area using the first method, but as in the above-described embodiment, the control device 50 may determine the irradiation conditions for the predetermined area using the second method or the third method. Furthermore, the control device 50 may determine the irradiation conditions for the predetermined area using the first method, and then determine them using the second method or the third method, and correct the contents determined using the first method based on the contents determined using the second method or the third method.

[0143] Furthermore, similar to the above-described embodiment, the control device 50 may determine the irradiation conditions for all predetermined areas (the area where drawing begins, the area where the curved line is drawn, and the area where drawing ends) using any one of the above three methods, or may determine the irradiation conditions for each predetermined area by using a different method for each area.

[0144] Furthermore, the above-described embodiments and modifications may be combined selectively as appropriate.

[0145] [Note] The above-described embodiment includes the following technical ideas.

[0146] [Configuration 1] A laser processing device (100) that draws a processing pattern on a processing object (90), an oscillator (20) that emits laser light; a scanner (30) for scanning the laser light output from the oscillator (20); a control device (50) that controls the oscillator (20) and the scanner (30); a receiving unit (60) that receives an input of the processing pattern for the workpiece (90), The oscillator (20) a seed light source (2) that emits seed light; an excitation light source (3, 9A, 9B) that emits excitation light; a light amplifying fiber (1, 8) configured to amplify the seed light by receiving the seed light and the pumping light, the seed light source (2) repeatedly generates a pulse train including a plurality of light pulses as the seed light, The control device (50) of the laser processing device varies at least one of the number of light pulses emitted by the seed light source and the pulse width of each of the plurality of light pulses emitted by the seed light source in a predetermined region where the scanning speed changes when the scanner (30) scans the laser light along the processing pattern received by the receiving unit (60).

[0147] [Configuration 2] 2. The laser processing device according to claim 1, wherein the predetermined area is a starting area of the processing pattern.

[0148] [Configuration 3] 3. The laser processing device according to claim 1, wherein the predetermined area is an area where drawing of the processing pattern has finished.

[0149] [Configuration 4] 4. The laser processing device according to any one of configurations 1 to 3, wherein the predetermined region is a curved portion region of the processing pattern.

[0150] [Configuration 5] The receiving unit (60) receives the driving conditions of the scanner (30), The laser processing device according to any one of configurations 1 to 4, wherein the control device (50) determines the number of light pulses and the pulse width when the laser light is scanned by the scanner (30) over the specified area based on the processing pattern received by the receiving unit (60) and the driving conditions of the scanner (30).

[0151] [Configuration 6] The laser processing device according to any one of configurations 1 to 5, wherein the control device (50) determines the number of light pulses and the pulse width when the scanner (30) scans the laser light over the specified area based on a driving status of the scanner (30).

[0152] [Configuration 7] The receiving unit (60) receives the processing pattern having shading, The laser processing device according to any one of configurations 1 to 6, wherein the control device (50) varies at least one of the number of light pulses and the pulse width according to the gradation of the processing pattern when the scanner (30) scans the laser light along the processing pattern having shading received by the receiving unit (60).

[0153] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not by the above description, and is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0154] 1,8 Optical fiber, 2 Seed LD, 3,9A,9B Pump LD, 4,6,11 Isolator, 5,10 Coupler, 12 End cap, 13,14,15A,15B,35 Driver, 20 Oscillator, 30 Scanner, 31 X scan mirror, 32 Y scan mirror, 33 X axis motor, 34 Y axis motor, 36 Focusing lens, 50 Control device, 60 Input device, 90 Workpiece, 100 Laser processing device, Tw Pulse train width, tp Pulse interval, tprd Repetition period, tw Pulse width.

Claims

1. A laser processing device that draws a processing pattern on a processing object, an oscillator that emits laser light; a scanner that scans the laser light output from the oscillator; a control device for controlling the oscillator and the scanner; a receiving unit that receives an input of the processing pattern of the object to be processed, The oscillator comprises: a seed light source that emits seed light for each repetition period; an excitation light source that emits excitation light; a light amplifying fiber configured to amplify the seed light by receiving the seed light and the pumping light, the seed light is a pulse train including a plurality of light pulses, The control device, when scanning the laser light with the scanner along the processing pattern received by the reception unit, makes at least one of the number of light pulses included in the pulse train and the pulse width of the light pulses different between a predetermined region where the scanning speed changes and a region where the scanning speed is constant.

2. 2. The laser processing device according to claim 1, wherein the predetermined area is a region where drawing of the processing pattern begins.

3. 3. The laser processing device according to claim 1, wherein the predetermined area is an area where drawing of the processing pattern has finished.

4. 4. The laser processing device according to claim 1, wherein the predetermined region is a curved region of the processing pattern.

5. the receiving unit receives the operating conditions of the scanner; The laser processing device according to any one of claims 1 to 4, wherein the control device determines the number of light pulses and the pulse width when the scanner scans the laser light over the specified area based on the processing pattern received by the reception unit and the driving conditions of the scanner.

6. The laser processing device according to any one of claims 1 to 5, wherein the control device determines the number of light pulses and the pulse width when the scanner scans the laser light over the specified area based on the driving status of the scanner.

7. the receiving unit receives the processing pattern having shading; The laser processing device according to any one of claims 1 to 6, wherein when the scanner scans the laser light along the processing pattern having shading received by the reception unit, the control device changes at least one of the number of light pulses and the pulse width according to the gradation of the processing pattern.

Images