The invention relates to the technical field of optical amplification devices, and particularly discloses an on-
chip integrated optical amplification device and a preparation method thereof, the device comprises a micro-ring
resonant cavity based on an SOI
wafer, a
gain medium, an electric pumping structure, an
optical coupling structure and a
temperature control module; all the functional units are integrated on the same SOI
wafer, so that
miniaturization and high-density integration of the device structure are realized. The preparation method is based on a standard
silicon process, and comprises the steps of manufacturing the
resonant cavity and the heavily doped region on the top
silicon, depositing the insulating layer, integrating the
gain medium, finally forming
metal electrode interconnection and the like. The micro-ring
resonant cavity is used for enhancing the effect of light and the
gain medium, the gain medium is efficiently pumped through the alternating
electric field to achieve light amplification, stable performance is maintained by means of the built-in closed-loop
temperature control system, and the micro-ring resonant cavity pump has the advantages of being compact in structure, high in integration level, high in pumping efficiency, low in
power consumption, stable in work, good in compatibility with the
CMOS technology and the like. The method is suitable for high-speed
optical communication and photoelectric
integrated systems.