Expansion Unit

Abstract

To provide good clamping of the corners of a tape by a corner clamping portion.SOLUTION: A corner portion 73 of a rectangular tape 7 following a support surface 540 of a corner stage 520 is clamped between a support surface 540 and the lower surface of a pressing portion 521 by air jetted from an air ejection port 264 of a tape support plate 26. Therefore, even when the corner portion 73 of the rectangular tape 7 is curled up, the air ejected from the air ejection port 264 can cause the corner portion 73 of the rectangular tape 7 to follow the support surface 540, such that the corner portion 73 of the rectangular tape 7 can be satisfactorily clamped between the support surface 540 and the lower surface of the pressing portion 521.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to an expansion device. [Background technology]

[0002] As disclosed in Patent Document 1, there is an expansion device that expands a rectangular tape to which a wafer having division starting points formed thereon that can be divided into chips is attached, thereby dividing the wafer into chips and forming gaps between adjacent chips.

[0003] This expansion device includes an application unit that applies a rectangular tape to a wafer held by a holding mechanism, an expansion unit, and a transport unit. The expansion unit clamps each of the four sides of the tape applied to the wafer by the application unit with four independent side clamps and expands the tape by moving the opposing side clamps away from each other. The transport unit clamps the four corners of the tape with four independent corner clamps and transports the tape from the holding mechanism to the expansion unit. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2019-110188 Summary of the Invention [Problem to be solved by the invention]

[0005] The application unit of the expansion device grips the four sides of the tape, leaving the corners of the tape free to be clamped by the corner clamps of the transport unit. However, when the four sides are gripped, the corners of the tape may curl up, making it difficult for the corner clamps of the transport unit to clamp the corners of the tape.

[0006] SUMMARY OF THE INVENTION It is therefore an object of the present invention to enable the corner clamping portion of the transport unit in the expansion device to properly clamp the corner portion of the tape. [Means for solving the problem]

[0007] The expansion device of the present invention (the present expansion device) is an expansion device that expands a rectangular tape having a plate-like object having a division starting point attached to the center, and includes: a holding mechanism having a holding surface that suction-holds the top surface of the plate-like object; an attachment unit that attaches the tape to the plate-like object held by the holding mechanism; an expansion unit that has four side clamping mechanisms that clamp each of the four sides of the tape to which the plate-like object is attached, and expands the tape to which the plate-like object is attached by moving the opposing side clamping mechanisms in directions away from each other; and a transport unit that has corner clamping mechanisms that clamp each of the four corners of the tape to which the plate-like object is attached, and transports the tape to which the plate-like object is attached from the holding mechanism to the expansion unit, and the corner clamps The clamping mechanism includes a corner stage that supports the underside of the corners of the tape on a support surface, a presser section that presses the tape supported on the support surface, and a clamp drive section that moves the presser section closer to the support surface from above the corner stage. The holding mechanism includes a support mechanism that supports the four sides of the tape, leaving the four corners of the tape free so that the corner clamping mechanism can clamp them, and an air nozzle that sprays air from the center outward onto the upper surface of the corners of the tape supported by the support mechanism, causing the corners of the tape to conform to the support surface. The transport unit clamps the corners of the tape that have conformed to the support surface with the air sprayed from the air nozzle, between the support surface and the underside of the presser section, and transports the tape to the expansion unit. [Effects of the Invention]

[0008] With this expansion device, even if the corners of the tape are curled up, the air sprayed from the air nozzles can make the corners of the tape conform to the support surface. Therefore, the corners of the tape can be properly clamped between the support surface and the underside of the pressing part. This prevents clamping errors, allowing the tape with the plate-like object attached to it to be transferred smoothly from the holding mechanism to the transport unit. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 2 is a perspective view showing the configuration of an expansion device. [Figure 2] FIG. 2 is an explanatory diagram showing the movement areas of each mechanism in the expansion device. [Figure 3] 3(a) to 3(c) are perspective views showing the configuration of the holding mechanism. [Figure 4] FIG. 2 is a perspective view showing the configuration of a transport unit. [Figure 5] FIG. 2 is a cross-sectional view showing the configuration of a transport unit. [Figure 6] 6(a) and (b) are cross-sectional views showing the configuration of the angle clamp mechanism. [Figure 7] 10A to 10C are explanatory diagrams showing the operation of the adhering unit. [Figure 8] 10A to 10C are explanatory diagrams showing the operation of the adhering unit. [Figure 9] 10A to 10C are explanatory diagrams showing the operation of the adhering unit. [Figure 10] FIG. 10 is an explanatory diagram showing a state in which a rectangular tape is attached to a plate-like object. [Figure 11] 10 is a perspective view showing a state in which a plate-shaped object attached to a rectangular tape is transferred from the holding mechanism to a transfer mechanism of the transport unit. FIG. [Figure 12] 10 is a plan view illustrating a state in which the four sides of the rectangular tape are clamped by the expansion mechanism. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0010] In the expansion device 1 according to this embodiment, a plate-like object 100 as shown in FIG. 1 is used as a plate-like object having division starting points. The plate-like object 100 according to this embodiment is a circular semiconductor wafer, and lattice-shaped division starting points 103 are formed on a surface 101. The division starting points 103 are, for example, modified layers formed by irradiation with a laser beam. The division starting points 103 of the plate-like object 100 may also be cut grooves formed by a cutting blade or the like.

[0011] Furthermore, devices 104 are formed in each region defined by division starting points 103 in plate-like object 100. A protective sheet 105 (see FIG. 7) for protecting devices 104 is attached to a front surface 101 of plate-like object 100. A rear surface 102 of plate-like object 100 is a tape attachment surface to which rectangular tape 7 (see FIG. 10) is attached.

[0012] The expansion device 1 shown in Fig. 1 is configured to expand a rectangular tape 7 having a plate-like object 100 with such a division starting point 103 attached to the center. The expansion device 1 has a first device base 10 and a second device base 11 extending in a first direction. The second device base 11 is supported by a plurality of support columns 14 above the first device base 10 on the +Y direction side.

[0013] The first device base 10 is equipped with a holding mechanism 20 having a holding surface 211 that suction-holds the upper surface (surface 101) of the plate-like object 100, an adhering unit 30 that adheres rectangular tape 7 to the plate-like object 100 held by the holding mechanism 20, a moving mechanism 40 that moves the holding mechanism 20, and a transport unit 90 that transports the plate-like object 100.

[0014] The transport unit 90 has a corner clamping mechanism (described later) that clamps each of the four corners of the rectangular tape 7 to which the plate-like object 100 is attached, and transports the rectangular tape 7 to which the plate-like object 100 is attached from the holding mechanism 20 to the expansion unit 80 (described later). The transport unit 90 has a delivery mechanism 50 having a corner clamping mechanism, and a delivery movement mechanism 60 that moves the delivery mechanism 50 in the Y-axis direction.

[0015] The second device base 11 is provided with a peeling mechanism 70 that peels the protective sheet 105 from the plate-like object 100, and an expansion unit 80. The expansion unit 80 has four side clamping mechanisms 801 to 804 that clamp the four sides of the rectangular tape 7 to which the plate-like object 100 is attached, and expands the rectangular tape 7 to which the plate-like object 100 is attached by moving the opposing side clamping mechanisms 801 to 804 in directions away from each other.

[0016] 2, the expansion device 1 has an inlet 12 for carrying in the plate-like object 100. Adjacent to the inlet 12 is a touch panel 13 for inputting processing conditions and the like into the expansion device 1 and displaying the input contents. The area communicating with the inlet 12 is a sticking area R1 where the sticking unit 30 shown in FIG. 1 sticks the rectangular tape 7 to the plate-like object 100. The sticking area R1 includes a delivery area R2 where the plate-like object 100 is delivered from the holding mechanism 20 to the delivery mechanism 50 of the transport unit 90. Adjacent to the delivery area R2 is a peeling area R3 where the peeling mechanism 70 operates, and adjacent to the peeling area R3 is an expansion area R4 where the expansion unit 80 operates.

[0017] The expansion device 1 also includes a frame stocker 17 that stores multiple frames (not shown), a first frame transport mechanism 161 and a second frame transport mechanism 162 (see Figure 1) that transport the frames to a predetermined destination, a cleaning device (not shown) for cleaning the plate-like object 100 expanded by the expansion unit 80, and an ultraviolet irradiation device (not shown) that irradiates ultraviolet rays onto the rectangular tape 7 expanded by the expansion unit 80.

[0018] 2, the area adjacent to the frame stocker 17 is a cleaning area R5 where a cleaning device operates, and the area adjacent to the cleaning area R5 is an ultraviolet irradiation area R6 where an ultraviolet irradiation device operates. Also shown in FIG. 2 are a movement area R10 for the holding mechanism 20, a movement area R11 for the delivery mechanism 50 of the transport unit 90, a movement area R12 for the first frame transport mechanism 161, and a movement area R13 for the second frame transport mechanism 162.

[0019] 3(a), the holding mechanism 20 includes a first holding part 21 that includes a holding surface 211 and holds the plate-like object 100, a fixed base 22 fixed to the lower part of the first holding part 21, a base 23 that supports the first holding part 21 and the fixed base 22 from below, a rotating shaft 24 that is passed through the base 23 and rotates the holding surface 211 of the first holding part 21, and a gate-shaped support part 25 that rotatably supports the end of the rotating shaft 24. The first holding part 21 is a disc-shaped porous member that is connected to a suction source (not shown) so that the plate-like object 100 can be suction-held by the holding surface 211.

[0020] 3(b), the holding mechanism 20 is provided with a tape support plate 26 as a support mechanism below the support portion 25. The tape support plate 26 supports the four sides of the rectangular tape 7, to which the plate-like object 100 is attached, leaving the four corners of the rectangular tape 7 open so that it can be clamped by the corner clamp mechanism 52 (see FIG. 4) of the transport unit 90. The tape support plate 26 is formed in the shape of a rectangular plate, and has a circular opening 260 in its center that penetrates an upper surface 261 and a lower surface 262. The diameter of the opening 260 is larger than that of the first holding portion 21.

[0021] Furthermore, in holding mechanism 20, lifting mechanism 27 is attached to support portion 25 and tape support plate 26. Lifting mechanism 27 includes, for example, an air cylinder and a piston, and can raise and lower first holding portion 21 attached to support portion 25 relative to tape support plate 26 in the vertical direction.

[0022] In holding mechanism 20, when holding surface 211 of first holding portion 21 is inverted around rotation axis 24 in support portion 25, holding surface 211 can be made to face opening 260. In this state, first holding portion 21 can be lowered by lifting mechanism 27, so that first holding portion 21 can enter opening 260.

[0023] As shown in FIG. 3(c), the lower surface 262 of the tape support plate 26 is provided with a tape receiving portion 28 and a roller guide 29.

[0024] The tape receiving portions 28 are made of, for example, bar-shaped members. The tape receiving portions 28 extend parallel to the X-axis direction and are disposed opposite each other on the outer edge sides in the Y-axis direction, with the opening 260 sandwiched therebetween. The roller guides 29 are made of, for example, bar-shaped members having a substantially L-shaped cross section. The roller guides 29 extend parallel to the Y-axis direction and are disposed opposite each other on the outer edge sides in the X-axis direction, with the opening 260 sandwiched therebetween.

[0025] 3(c), notches 263 are formed in the four corners of the tape support plate 26 to facilitate the operation of a corner clamping mechanism 52, which will be described later. Furthermore, air outlets 264 serving as air nozzles are provided near the notches 263. The air outlets 264 are connected to an air source 265 (see FIG. 6(a)), so that air can be ejected from the center of the tape support plate 26 outward.

[0026] 1 includes a ball screw 41 disposed on a support plate 400 extending in the Y-axis direction, a motor 42 connected to one end of the ball screw 41, a pair of guide rails 43 extending parallel to the ball screw 41, and a movable base 44 that is movable horizontally in the Y-axis direction. One surface of the movable base 44 is connected to the tape support plate 26 of the holding mechanism 20 (see also FIG. 3(b)).

[0027] Furthermore, as shown in FIG. 1, the moving base 44 is provided so as to be slidable along a pair of guide rails 43, and has a nut portion (not shown) into which the ball screw 41 is screwed.

[0028] In the movement mechanism 40, the ball screw 41 is rotated by the motor 42, thereby moving the holding mechanism 20 together with the moving base 44 in the Y-axis direction along the guide rail 43. The movement mechanism 40 allows the holding mechanism 20 to move within the adhesion region R1 shown in FIG.

[0029] The adhering unit 30 that adheres the rectangular tape 7 to the plate-like object 100 is located below the holding mechanism 20, as shown by the dotted line in FIG. In the illustrated example, a pair of guides 15 extending in the X-axis direction are disposed on the -Y direction side of the first device base 10, and the adhesive unit 30 can slide along the guides 15. This allows the adhesive unit 30 to be pulled out to the outside of the extension device 1 during maintenance work, etc., and can be placed in the adhesive region R1 inside the extension device 1 after the work is completed. The configuration of the adhesive unit 30 will be described later.

[0030] As shown in FIG. 4, the delivery mechanism 50 of the transport unit 90 includes a second holding section 51 and a plurality of corner clamp mechanisms 52.

[0031] The second holding unit 51 holds the plate-like object 100 to which the rectangular tape 7 is attached, which is held by the holding mechanism 20, via the rectangular tape 7. Each corner clamping mechanism 52 clamps a corner portion of the rectangular tape 7 on the outer periphery of the second holding unit 51.

[0032] The second holding part 51 is disposed on a disk 54 installed on a support shaft 57 via a lifting mechanism 53. The lifting mechanism 53 includes an air cylinder 530 and a piston 531, and can raise and lower the second holding part 51. The disk 54 is provided with a frame processing section 59. The frame processing section 59 adheres the rectangular tape 7 to a frame and cuts it into a predetermined shape.

[0033] The second holding portion 51 and the angle clamping mechanism 52 will now be described in more detail. 5, the second holding portion 51 is a disk-shaped porous member fitted inside the frame 500. The upper surface of the second holding portion 51 is a holding surface 511 that holds the plate-like object 100. The second holding portion 51 is connected to a suction source (not shown), so that the holding surface 511 can suction-hold the plate-like object 100.

[0034] The frame body 500 is supported by a base 501. A tilt adjustment mechanism 56 is disposed between the frame body 500 and the base 501. The tilt adjustment mechanism 56 includes a cylinder 560 and a spring 561. The spring 561 is, for example, a compression spring. The expansion and contraction of the spring 561 allows the frame body 500 to swing relative to the base 501, and can absorb impacts, for example, when the plate-like object 100 is transferred to and from the holding surface 511. Note that the base 501 is omitted from FIG. 4.

[0035] For example, four angular clamp mechanisms 52 are arranged at equal intervals around the periphery of the second holding part 51. As shown in Figures 6(a) and 6(b), the angular clamp mechanism 52 includes an angular stage 520 having a support surface 540, a hook-shaped pressing part 521, and a clamp driving part 55 that opens and closes the pressing part 521.

[0036] The corner stage 520 supports the lower surface of the corner portion 73 of the rectangular tape 7 with the support surface 540. The pressing portion 521 presses the upper surface of the corner portion 73 of the rectangular tape 7 supported by the support surface 540.

[0037] The clamp driving unit 55 includes a first piston rod 541, a second piston rod 542, a spring 523 connected to one end of the first piston rod 541, a cylinder 524 connected to one end of the second piston rod 542, a first shaft 543 serving as a fulcrum at the other end of the first piston rod 541, and a second shaft 544 serving as a fulcrum at the other end of the second piston rod 542. The upper side of the pressing unit 521 is urged by the spring 523 of the clamp driving unit 55 in a direction approaching the support surface 540 of the corner stage 520.

[0038] 6(a), when the pressing portion 521 is opened by the clamp driving portion 55, the second piston rod 542 moves inward in the cylinder 524, causing the pressing portion 521 to rotate around the first shaft portion 543 and the second shaft portion 544 as a fulcrum, and the pressing portion 521 moves away from the support surface 540. This allows the pressing portion 521 to open.

[0039] On the other hand, when closing the pressing portion 521, the clamp driving portion 55 moves the pressing portion 521 from above the corner stage 520 toward the support surface 540. That is, as shown in FIG. 6(b), the second piston rod 542 moves outward in the cylinder 524, causing the pressing portion 521 to rotate around the first shaft portion 543 and the second shaft portion 544 as fulcrums, and the pressing portion 521 moves toward the support surface 540 from above the corner stage 520. This allows the pressing portion 521 to close, so that the corner portion 73 of the rectangular tape 7 can be clamped between the lower surface of the pressing portion 521 and the support surface 540 of the corner stage 520.

[0040] The transfer mechanism 50 is capable of moving along the Y-axis direction between the transfer area R2 and the expansion area R4 shown in FIG. 2, i.e., between the holding mechanism 20 and the expansion unit 80, by the transfer movement mechanism 60 shown in FIG. 1. As shown in Figure 4, the transfer mechanism 60 includes a ball screw 61 extending in the Y-axis direction, a motor 64 connected to one end of the ball screw 61, a pair of guide rails 62 extending parallel to the ball screw 61, and a moving base 63 supporting the transfer mechanism 50.

[0041] The delivery mechanism 50 is installed on a delivery movement mechanism 60 via a support shaft 57. A movable base 63 is slidably mounted on a pair of guide rails 62 via a slide member 631 (see FIG. 5). The movable base 63 also has a nut portion 611 (see FIG. 5) into which a ball screw 61 is threaded. In the delivery movement mechanism 60, the ball screw 61 is rotated by a motor 64, thereby moving the delivery mechanism 50 together with the movable base 63 along the guide rails 62 in the Y-axis direction.

[0042] As shown in Figure 1, the expansion unit 80 has a first side clamping mechanism 801 and a second side clamping mechanism 802 aligned along the Y-axis direction, and a third side clamping mechanism 803 and a fourth side clamping mechanism 804 aligned along the X-axis direction.

[0043] Each of the first side clamping mechanism 801 and the second side clamping mechanism 802 includes a rectangular parallelepiped lower clamping portion 811 extending in the X-axis direction, and an upper clamping portion 812 extending parallel to the lower clamping portion 811. In the first side clamping mechanism 801 and the second side clamping mechanism 802, the lower clamping portion 811 and the upper clamping portion 812 can clamp a first side portion 71 (see FIG. 12 ), which is an opposing side along the Y-axis direction of the rectangular tape 7 to which the plate-like object 100 is attached at the center.

[0044] The third-side clamping mechanism 803 and the fourth-side clamping mechanism 804 each include a rectangular parallelepiped lower clamping portion 841 extending in the Y-axis direction, and an upper clamping portion 842 extending parallel to the lower clamping portion 841. In the third-side clamping mechanism 803 and the fourth-side clamping mechanism 804, the lower clamping portion 841 and the upper clamping portion 842 can clamp the second side portion 72 (see FIG. 12 ), which is the side facing along the X-axis direction of the rectangular tape 7 to which the plate-like object 100 is attached at the center.

[0045] The extension unit 80 further includes two Y-axis direction movement mechanisms 881 and two X-axis direction movement mechanisms 882, as shown in FIG. The Y-axis direction moving mechanisms 881 are disposed on the second device base 11, and are connected one by one to the first side clamping mechanisms 801 and the second side clamping mechanisms 802. The Y-axis direction moving mechanisms 881 can move the first side clamping mechanisms 801 and the second side clamping mechanisms 802 along the Y-axis direction.

[0046] The X-axis direction moving mechanisms 882 are disposed on the second device base 11, and are connected one by one to the third-side clamping mechanisms 803 and the fourth-side clamping mechanisms 804. The X-axis direction moving mechanisms 882 can move the third-side clamping mechanisms 803 and the fourth-side clamping mechanisms 804 along the X-axis direction.

[0047] The expansion device 1 also includes a control unit 9. The control unit 9 controls the operation of the expansion device 1 by controlling each member of the expansion device 1. The operation of the extension device 1 controlled by the control unit 9 will be described below.

[0048] [Holding process] In the operation of the expansion device 1, first, an operator places the plate-like object 100 with the surface 101 facing downward on the holding surface 211 of the first holding part 21 in the holding mechanism 20 shown in Fig. 1. Thereafter, the control part 9 causes the holding surface 211 to hold the surface 101 of the plate-like object 100 by suction, and also causes the moving mechanism 40 to move the holding mechanism 20 above the bonding unit 30.

[0049] [Tape application process] Next, the control unit 9 inverts the holding surface 211 of the first holding unit 21 around the rotation axis 24 shown in Figure 3(b). As a result, the back surface 102 of the plate-like object 100 faces downward. Thereafter, the control unit 9 lowers the first holding unit 21 using the lifting mechanism 27, causing the first holding unit 21 to enter the opening 260 of the tape support plate 26, and positions the plate-like object 100 inside the tape-adhered portion 28 provided on the underside 262 of the tape support plate 26.

[0050] 7 shows the configuration of the holding mechanism 20 in this state and the bonding unit 30 located below it. The control unit 9 rotates the feed roller 341 of the bonding unit 30 to feed the strip tape 2 from the tape roll 201 toward the bonding roller 31. When the strip tape 2 passes between the feed roller 341 and the sandwiching roller 342, the peel plate 37 separates the strip tape 2 into the tape main body 3 and the strip release film 4. The tape main body 3 passes through the bonding roller 31 and is fed toward the tape bonding mechanism 36.

[0051] The control unit 9 raises the moving unit 361 of the tape application mechanism 36 and pushes up the tape body 3 with the stamp 360, thereby applying the tape body 3 to the tape application portion 28 on the +Y direction side of the tape support plate 26.

[0052] In addition, the strip-shaped release film 4 separated from the tape body 3 passes between the guide roller 343, the weight 39, the movable roller 344 and the pressure roller 345, and is taken up as a release film roll 401 by the take-up roller 38.

[0053] Thereafter, the control unit 9 causes the movement mechanism 40 (see FIG. 1) to move the holding mechanism 20 in the +Y direction as shown in FIG. 8. As a result, the back surface 102 of the plate-like object 100 comes into contact with the tape main body 3. As the holding mechanism 20 moves, the application roller 31 rotates along the two roller guides 29 of the tape support plate 26 shown in FIG. 3(c), pressing the tape main body 3 upward and adhering the tape main body 3 to the back surface 102 of the plate-like object 100 and the two roller guides 29. In this way, the tape main body 3 is adhered to the entire surface of the back surface 102 of the plate-like object 100 and the entire surface of the roller guides 29.

[0054] At this time, the application roller 31 rotates while being pressed by the deflection prevention roller 35, so that the deflection of the tape body 3 can be prevented. In addition, the control unit 9 controls the torque of the feed roller 341 and also controls the movement speed of the holding mechanism 20 by the movement mechanism 40, thereby applying slight tension to the tape body 3 that is adhered to the back surface 102 of the plate-like object 100, thereby preventing the tape body 3 from wrinkling or pulling.

[0055] As shown in FIG. 9 , after the tape body 3 is adhered to the entire back surface 102 of the plate-like object 100 and to the tape receiving portion 28 on the −Y direction side, the control unit 9 cuts the tape body 3 with the cutter member 32. Specifically, the control unit 9 protrudes the cutter blade 321 from the cutter housing portion 320 and positions the cutter blade 321 at a height that allows it to cut the tape body 3. Next, the control unit 9 moves the cutter blade 321 in the X-axis direction along the guide rail 323 shown in FIG. 3( b), thereby cutting the tape body 3 and forming the rectangular tape 7. Furthermore, the control unit 9 raises the moving unit 361 of the tape application mechanism 36, and presses the rectangular tape 7 against the tape receiving portion 28 on the −Y side with the stamp 360.

[0056] In this way, the rectangular tape 7 is adhered to the back surface 102 of the plate-like object 100, and to the tape receiving portion 28 and roller guide 29 of the tape support plate 26. As a result, as shown in Fig. 10, the tape support plate 26 can support the four sides of the rectangular tape 7 by the tape receiving portion 28 and the roller guide 29, leaving the four corner portions 73 of the rectangular tape 7 to which the plate-like object 100 is adhered free so that the corner clamp mechanism 52 (see Fig. 4) of the transport unit 90 can clamp.

[0057] In addition, the control unit 9 may connect the tape receiving portion 28 and the roller guide 29 to a suction source not shown, so that the tape receiving portion 28 and the roller guide 29 hold the four sides of the rectangular tape 7 by suction.

[0058] Furthermore, in the tape application process, as described above, tension is applied to the tape body 3, and therefore, as shown in Figure 10, the corner portions 73 of the rectangular tape 7 formed by cutting the tape body 3 may curl up (jump up).

[0059] [First delivery process] In this step, the rectangular tape 7 with the plate-like object 100 attached thereto is transferred from the holding mechanism 20 to the transport unit 90. Specifically, the control unit 9 uses the moving mechanism 40 (see FIG. 1) to move the holding mechanism 20 to above the delivery mechanism 50 of the transport unit 90, as shown in FIG. 11. Note that FIG. 11 does not show the configuration of the holding mechanism 20 near the tape support plate 26.

[0060] Then, the control unit 9 uses the lifting mechanism 53 of the transfer mechanism 50 to raise the second holding unit 51 (see Figure 4) in a direction approaching the holding mechanism 20, thereby holding the plate-like object 100 via the rectangular tape 7 with the holding surface 511 of the second holding unit 51, and places the corner portion 73 of the rectangular tape 7, whose four sides are supported by the tape-receiving portion 28 of the tape support plate 26 and the roller guide 29, on the support surface 540 of the corner stage 520, as shown in Figure 6(a).

[0061] At this time, the control unit 9 connects the air outlet 264 of the tape support plate 26 to the air source 265 via the air communication path 266. As a result, air from the air source 265 is ejected from the air outlet 264 from the inside to the outside of the rectangular tape 7, as shown by arrow 402 in FIG. 6( a). That is, the air outlet 264 ejects air from the center to the outside onto the upper surface of the corner portion 73 of the rectangular tape 7 to which the plate-like object 100 supported by the tape support plate 26 is attached, causing the corner portion 73 of the rectangular tape 7 to conform to the support surface 540.

[0062] Next, as shown in Figure 6(b), the control unit 9 closes the pressing unit 521 using the clamp drive unit 55, thereby clamping the corner portion 73 of the rectangular tape 7 that conforms to the support surface 540 between the underside of the pressing unit 521 and the support surface 540 of the corner stage 520, and also disconnects the air outlet 264 from the air source 265.

[0063] Thereafter, the control unit 9 releases the suction hold of the plate-like object 100 by the first holding unit 21 (see FIG. 10) in the holding mechanism 20, and also releases the suction hold of the four sides of the rectangular tape 7 by the tape-receiving unit 28 and the roller guide 29. Furthermore, the control unit 9 causes the second holding unit 51 (see FIG. 4) of the delivery mechanism 50 to suction hold the plate-like object 100 via the rectangular tape 7. In this way, the rectangular tape 7 with the plate-like object 100 attached thereto is delivered from the holding mechanism 20 to the delivery mechanism 50.

[0064] [Peeling process] Next, the control unit 9 causes the delivery movement mechanism 60 of the transport unit 90 shown in Fig. 1 to move the delivery mechanism 50 to a position directly below the peeling mechanism 70 shown in Fig. 1. Then, while maintaining the state in which the delivery mechanism 50 holds the plate-like object 100, the control unit 9 causes the peeling mechanism 70 to peel the protective sheet 105 from the surface 101 of the plate-like object 100.

[0065] [Second delivery process] In this step, the rectangular tape 7 with the plate-like object 100 attached thereto is transferred from the transport unit 90 to the expansion unit 80. Specifically, the control unit 9 causes the delivery movement mechanism 60 of the transport unit 90 to move the delivery mechanism 50 to directly below the expansion unit 80. Then, the control unit 9 controls the lifting mechanism 53 (see FIG. 4) of the delivery mechanism 50 to adjust the height of the second holding unit 51, thereby positioning the rectangular tape 7 to which the plate-like object 100, which is held by the second holding unit 51 and has been affixed, between the four side clamping mechanisms 801 to 804.

[0066] Then, as shown in Figure 12, the control unit 9 uses two Y-axis direction moving mechanisms 881 to bring the first side clamping mechanism 801 and the second side clamping mechanism 802 closer to each other, and clamps the first side portions 71 of the rectangular tape 7 that are opposed along the Y-axis direction using the first side clamping mechanism 801 and the second side clamping mechanism 802. In addition, the control unit 9 uses two X-axis direction moving mechanisms 882 to move the third side clamping mechanism 803 and the fourth side clamping mechanism 804 closer to each other, and clamps the second side portions 72 of the rectangular tape 7 that are opposed along the X-axis direction by the third side clamping mechanism 803 and the fourth side clamping mechanism 804.

[0067] Then, the control unit 9 releases the suction hold of the plate-like object 100 by the second holding unit 51 of the delivery mechanism 50, and releases the clamping of the corner portion 73 of the rectangular tape 7 by the corner clamping mechanism 52. In this way, the rectangular tape 7 with the plate-like object 100 attached thereto is delivered from the transport unit 90 to the expansion unit 80.

[0068] [Extended process] Thereafter, the control unit 9 controls the Y-axis direction moving mechanism 881 of the expansion unit 80 to move the first-side clamping mechanism 801 and the second-side clamping mechanism 802 away from each other in the Y-axis direction, thereby expanding the rectangular tape 7 in the Y-axis direction. Furthermore, the control unit 9 controls the X-axis direction moving mechanism 882 to move the third-side clamping mechanism 803 and the fourth-side clamping mechanism 804 away from each other in the X-axis direction, thereby expanding the rectangular tape 7 in the X-axis direction. As a result, the plate-like object 100 is divided along the division starting points 103 shown in FIG. 1 to form a plurality of chips, each having one device 104, with a predetermined gap between the chips.

[0069] [Cleaning and ultrasonic treatment process] Thereafter, the control unit 9 places the frame on the rectangular tape 7 using the first frame transport mechanism 161 shown in FIG. 1, and then uses the frame processing unit 59 (see FIG. 11) to attach the rectangular tape 7 to the frame and cut it into a predetermined shape. This creates a frame unit (not shown) including the rectangular tape 7, the plate-like object 100, and the frame. Furthermore, the control unit 9 controls the first frame transport mechanism 161 and the second frame transport mechanism 162 to transport the frame unit to the cleaning region R5 (see FIG. 2), where it is cleaned by a cleaning device. Furthermore, the control unit 9 transports the frame unit to the ultraviolet irradiation region R6, where it is cured by an ultraviolet irradiation device.

[0070] As described above, in the expansion device 1 of this embodiment, the transport unit 90 clamps the corner portion 73 of the rectangular tape 7, which conforms to the support surface 540 of the corner stage 520, between the support surface 540 and the underside of the pressing portion 521 using air sprayed from the air outlet 264 of the tape support plate 26, and transports it to the expansion unit 80.

[0071] That is, in this embodiment, even if the corner portion 73 of the rectangular tape 7 is curled up as shown in Fig. 10, the air ejected from the air ejection nozzle 264 can conform the corner portion 73 of the rectangular tape 7 to the support surface 540, that is, the corner portion 73 can be aligned with the support surface 540, as shown in Fig. 6(a). Therefore, the corner portion 73 of the rectangular tape 7 can be properly clamped between the support surface 540 and the lower surface of the pressing portion 521. This can prevent clamping errors from occurring, and ensure proper delivery of the rectangular tape 7 with the plate-like object 100 attached thereto from the holding mechanism 20 to the conveying unit 90. [Explanation of symbols]

[0072] 1: expansion device, 2: strip-shaped tape, 3: tape body, 4: strip-shaped release film, 7: rectangular tape, 9: control section, 10: first device base, 11: second device base, 12: loading entrance, 13: touch panel, 14: support column, 15: guide, 17: frame stocker, 20: holding mechanism, 21: first holding part, 22: fixing base, 23: base, 24: rotation axis, 25: support portion, 26: tape support plate, 27: lifting mechanism, 28: tape receiving portion, 29: roller guide, 30: Adhesion unit, 31: Adhesion roller, 32: Cutter member, 35: deflection prevention roller, 36: tape application mechanism, 37: peel plate, 38: Winding roller, 39: Weight, 40: Moving mechanism, 41: Ball screw, 42: motor, 43: guide rail, 44: moving base, 50: delivery mechanism, 51: second holding portion, 52: angle clamp mechanism, 53: lifting mechanism, 54: disc, 55: clamp drive unit, 56: tilt adjustment mechanism, 57: support shaft, 59: Frame processing unit, 60: Delivery movement mechanism, 61: Ball screw, 62: guide rail, 63: moving base, 64: motor, 70: peeling mechanism, 71: First side part, 72: Second side part, 73: Corner part, 80: Expansion unit, 90: Transport unit, 100: plate-like object, 101: surface, 102: back surface, 103: division starting point, 104: device, 105: protective sheet, 161: First frame transport mechanism, 162: Second frame transport mechanism, 201: tape roll, 211: holding surface, 260: opening, 263: Notch, 264: Air outlet, 265: Air source, 266: air communication passage, 320: cutter housing section, 321: cutter blade, 323: guide rail, 341: feed roller, 342: clamping roller, 343: guide roller, 344: movable roller, 345: pressure roller, 360: stamp, 361: moving part, 400: support plate, 401: release film roll, 402: arrow, 500: frame, 501: base, 511: holding surface, 520: corner stage, 521: pressing part, 523: spring, 524: Cylinder, 530: Air cylinder, 531: Piston, 540: Support surface, 541: First piston rod, 542: Second piston rod, 543: First shaft portion, 544: Second shaft portion, 560: Cylinder, 561: Spring, 611: nut portion, 631: slide member, 801: first side clamping mechanism, 802: second side clamping mechanism, 803: third side clamping mechanism, 804: fourth side clamping mechanism, 811: Lower clamping part, 812: Upper clamping part, 841: Lower clamping part, 842: Upper holding part, 881: Y-axis direction movement mechanism, 882: X-axis direction movement mechanism, R1: pasting area, R10: moving area, R11: moving area, R12: moving area, R13: Transfer area, R2: Handover area, R3: Peeling area, R4: Expansion area, R5: Cleaning area, R6: Ultraviolet irradiation area

Claims

[Claim 1] An expansion device for expanding a rectangular tape having a plate-like object having a dividing point attached to the center thereof, a holding mechanism having a holding surface that suction-holds the upper surface of the plate-like object; an adhering unit that adheres the tape to the plate-like object held by the holding mechanism; an expansion unit having four side clamping mechanisms for clamping four sides of the tape to which the plate-like object is attached, and for expanding the tape to which the plate-like object is attached by moving the opposing side clamping mechanisms in directions away from each other; a conveying unit having a corner clamping mechanism for clamping each of four corners of the tape to which the plate-like object is attached, and for conveying the tape to which the plate-like object is attached from the holding mechanism to the expansion unit, The angle clamping mechanism includes: a corner stage that supports the underside of the corner portion of the tape with a support surface; a pressing portion that presses the tape supported on the support surface; a clamp drive unit that moves the pressing unit from above the corner stage toward the support surface, The holding mechanism includes: a support mechanism for supporting four sides of the tape, leaving four corners of the tape free so that the corner clamp mechanism can clamp the tape; an air nozzle that sprays air from the center toward the outside onto the upper surface of the corner of the tape supported by the support mechanism, causing the corner of the tape to conform to the support surface; the conveying unit clamps the corner portion of the tape that conforms to the support surface by the air jetted from the air nozzle between the support surface and the lower surface of the pressing part, and conveys the tape to the expansion unit. Expansion device.

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