Filament lamps, light heating devices

Abstract

To provide a filament lamp and a light heating device capable of efficiently heat-treating a work with improved heat exhaust characteristics.SOLUTION: A filament lamp includes a cylindrical arc tube that is transparent to light, a filament extending along the tube axis of the arc tube in the arc tube, and a heat radiating member extending along the tube axis of the arc tube and provided on a part of the outer wall surface on the one-way side as viewed from the tube axis of the arc tube.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a filament lamp and an optical heating device. [Background technology]

[0002] Conventionally, heating devices using filament lamps with a filament inside an arc tube have been known as one type of device for performing heat treatment on objects to be heated (hereinafter referred to as "workpieces") in manufacturing processes. Heat treatment devices using filament lamps heat the workpieces without contact by irradiating them with light, and are therefore particularly used in processes that require heat treatment in a clean environment, such as the processing of semiconductor wafers and substrates for display panels.

[0003] Heat treatment of a workpiece is sometimes carried out in a vacuum to prevent the workpiece from being oxidized by oxygen present in the treatment space, and heating devices equipped with vacuum chambers have also been developed. For example, Patent Document 1 listed below discloses a device equipped with a vacuum chamber. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2008-263189 [Patent Document 2] Japanese Patent Application Laid-Open No. 2009-038230 Summary of the Invention [Problem to be solved by the invention]

[0005] Heat treatment equipment that processes workpieces in a vacuum often has a filament lamp mounted in the processing chamber where the workpiece is placed in the vacuum chamber so that the light emitted from the filament lamp reaches the workpiece without attenuation. In such a configuration, it is not possible to introduce cooling air into the processing chamber to cool the filament lamp, and it is difficult to employ a cooling mechanism that requires a complex structure such as circulating cooling water.

[0006] For this reason, in conventional heat treatment equipment equipped with a vacuum chamber, a cooling mechanism was not provided, and heat treatment was often carried out by supplying power that would not cause the temperature of the arc tube to exceed its heat resistance temperature when the filament lamp was turned on. When such measures were adopted, depending on the heat resistance temperature of the arc tube, it was not possible to input the desired power to the filament lamp, and it was not possible to heat treat the workpiece with the expected light output.

[0007] Incidentally, some heat treatment devices employ a configuration in which a filament lamp is placed in a space separated from the treatment chamber in which the workpiece to be treated is placed. For example, Patent Document 2 above discloses a heat treatment device in which a filament lamp is placed in a lamp unit housing space separated from the heat treatment space in which the workpiece is placed.

[0008] However, in a heat treatment device of this configuration, a significant amount of the light emitted from the filament lamp is absorbed and reflected by the window member that separates the lamp unit housing space from the heat treatment space. As a result, in order to heat treat a workpiece at a desired temperature, it is necessary to supply more power than the specified amount to the filament lamp, taking into account the amount of light absorbed and reflected by the window member.

[0009] In other words, conventional heat treatment devices have had problems such as limitations on the types of workpieces that can be treated and the inability to complete heat treatment within the expected time due to insufficient light intensity irradiated onto the workpieces, etc. Furthermore, in configurations where the heat treatment chamber and the lamp unit housing chamber are separated by a window member or the like, it is necessary to supply more power than expected to achieve heat treatment at the desired temperature, and workpieces cannot be heat-treated efficiently.

[0010] In view of the above problems, an object of the present invention is to provide a filament lamp and an optical heating device that have improved heat dissipation characteristics and can efficiently heat-treat workpieces. [Means for solving the problem]

[0011] The filament lamp according to the present invention comprises: a long arc tube that is transparent to light; a filament extending along the axis of the arc tube within the arc tube; The light emitting device is characterized by comprising a heat dissipation member extending along the tube axis of the light emitting tube and provided on a part of the outer wall surface on one side as viewed from the tube axis of the light emitting tube.

[0012] Here, "transparent to light" means that the transmittance of the light used for heat treatment of the workpiece is 50% or more. The light used for heat treatment of the workpiece is light in a wavelength range that is predetermined depending on the type of workpiece to be heat treated.

[0013] In addition, the term "heat dissipation member" in this specification refers to a member having a thermal conductivity of 0.5 W / mK or more, and specific materials include glass, copper, aluminum, stainless steel, and the like.

[0014] As mentioned above, it is difficult to cool a filament lamp placed in a vacuum by introducing cooling air or a cooling medium. For this reason, the temperature that a filament lamp reaches when a specified amount of power is supplied is determined by the difference between the amount of heat generated inside the filament lamp when it is lit and the amount of heat released from the outer wall surface of the arc tube.

[0015] The amount of heat emitted from the outer wall surface of the arc tube is proportional to the surface area of the outer wall surface of the arc tube. Therefore, one possible method for increasing the amount of heat emitted from the arc tube is to simply increase the outer diameter of the arc tube. However, while this method increases the amount of heat emitted from the arc tube, the increased outer diameter of the arc tube also reduces the number of filament lamps that can be placed in the processing chamber, which in turn reduces the amount of light irradiated onto the workpiece.

[0016] Therefore, by adopting the above configuration, the surface area of the arc tube of a filament lamp is increased, so the amount of heat emitted is increased and the temperature reached when a certain amount of power is supplied is lower. As a result, the filament lamp can be supplied with more power and can emit light of a higher intensity.

[0017] In a filament lamp of the above configuration, a heat dissipation member is provided on a portion of the outer wall surface of the arc tube. This causes the arc tube to become larger only in the direction in which the heat dissipation member is attached. Therefore, with filament lamps of the above configuration, by arranging them so that the direction in which the heat dissipation member is attached is the same, more can be placed in a processing chamber compared to when the outer diameter of the arc tube is increased.

[0018] The filament lamp is The material of the light emitting tube and the heat dissipating member may be glass, and the light emitting tube and the heat dissipating member may be integrally formed.

[0019] The heat dissipation member may be manufactured integrally with the arc tube, or may be manufactured from glass separately from the arc tube and joined to the outer wall surface of the arc tube by welding or the like.

[0020] With the above-described configuration, the components that make up the heat dissipation member of the filament lamp will not fall off from the arc tube during heating, thereby improving safety and reliability.

[0021] The filament lamp is A reflecting member that reflects at least a part of the light emitted from the filament toward the filament may be provided on the outer wall surface of the heat dissipation member.

[0022] In addition, the filament lamp is The heat dissipation member may include a reflecting member inside the heat dissipation member that reflects at least a part of the light emitted from the filament toward the filament.

[0023] In addition, the filament lamp is The heat dissipation member may have a hermetically sealed space formed therein, and may be provided with a reflecting member on the inner wall surface of the space that reflects at least a portion of the light emitted from the filament toward the filament.

[0024] With the above configuration, at least a portion of the light emitted from the filament lamp can be reflected in a predetermined direction. In other words, by designing the heating device so that the workpiece is supported in that predetermined direction when the filament lamp is installed in the chamber, it is possible to irradiate the workpiece with light of a higher intensity.

[0025] Furthermore, if the reflective member provided in the filament lamp is formed inside the heat dissipation member or in an airtightly sealed space, it is possible to prevent the reflective member, or part of the reflective member, from falling onto the workpiece during heating treatment.

[0026] In the above filament lamp, The reflecting member may be a metal thin film, a metal plate, or an inorganic particle film.

[0027] The inorganic particle film constituting the reflective member is a film made of a sintered body whose main materials are, for example, SiO2 (silica), Al2O3 (alumina), ZrO2 (zirconia), or BN (boron nitride). In this specification, the term "main material" refers to the material with the highest content of each of the materials contained.

[0028] The light heating device of the present invention is a chamber in which a workpiece to be processed is accommodated; a support member for supporting the workpiece within the chamber; and a plurality of the filament lamps arranged in the chamber and emitting light toward the main surface of the workpiece supported by the support member.

[0029] The light heating device is In the direction in which the filament lamp and the support member face each other, the heat dissipation member may be disposed at a position farther away from the support member than the light emitting tube. [Effects of the Invention]

[0030] According to the present invention, a filament lamp and an optical heating device are realized that have improved heat dissipation characteristics and can efficiently heat-treat a workpiece. [Brief explanation of the drawings]

[0031] [Figure 1] 1 is a diagram schematically illustrating the configuration of an embodiment of a light heating device when viewed in the Y direction. [Figure 2] 2 is a view of the light heating device of FIG. 1 as viewed in the X direction. [Figure 3] 2 is a diagram of a filament lamp mounted in the light heating device of FIG. 1. [Figure 4] 4 is a view of the filament lamp of FIG. 3 as viewed in the X direction. [Figure 5] 1 is a graph showing the temperature change on the surface of the arc tube of a filament lamp. [Figure 6]1 is a diagram showing an example of the configuration of a filament lamp. [Figure 7] 1 is a diagram showing an example of the configuration of a filament lamp. [Figure 8] 1 is a diagram showing an example of the configuration of a filament lamp. [Figure 9] 1 is a diagram showing an example of the configuration of a filament lamp. [Figure 10] 10 is a view of the filament lamp of FIG. 9 as viewed in the X direction. DETAILED DESCRIPTION OF THE INVENTION

[0032] Hereinafter, various embodiments of the filament lamp and light heating device according to the present invention will be described with reference to the drawings as appropriate. Note that the drawings are all schematic illustrations, and the actual dimensional ratios do not necessarily match the dimensional ratios shown in the drawings.

[0033] [Light heating device 1] Fig. 1 is a diagram showing a schematic configuration of one embodiment when the optical heating device 1 is viewed in the Y direction, and Fig. 2 is a diagram showing the optical heating device 1 of Fig. 1 when viewed in the X direction. As shown in Figs. 1 and 2, the optical heating device 1 comprises a chamber 10, a support member 11 that supports the workpiece W to be treated, and multiple filament lamps 20. However, as mentioned above, Fig. 1 is a diagram showing the optical heating device 1 when viewed in the Y direction, and in this case multiple filament lamps 20 appear to overlap, so only a single filament lamp 20 is shown in the drawing. The workpiece W is expected to be a semiconductor wafer, a display panel, a glass substrate, or the like.

[0034] In the following explanation, as shown in Figures 1 and 2, the direction of the tube axis T1 of the light-emitting tube 21 of the filament lamp 20 is the X direction, the direction in which the filament lamps 20 are arranged is the Y direction, and the direction in which the filament lamps 20 face the workpiece W supported by the support member 11 is the Z direction.

[0035] Also, when expressing a direction, if a distinction is made between positive and negative directions, the direction is written with a positive or negative sign, such as "+Z direction" and "-Z direction," and when a direction is expressed without distinguishing between positive and negative directions, it is simply written as "Z direction."

[0036] The chamber 10 has a processing chamber A1 formed therein that includes a support member 11 for supporting the workpiece W to be processed. The optical heating device 1 of this embodiment heats the workpiece W by creating a vacuum inside the processing chamber A1, but the workpiece W may also be heated in a non-vacuum state.

[0037] 1 and 2, the support member 11 is provided with a plurality of protrusions 11a, and the workpiece W is placed and supported on the tip of each of the protrusions 11a. Note that the configuration of the support member 11 is not limited to a configuration in which the workpiece W is supported by a plurality of protrusions 11a, and it may be a configuration in which both ends of the workpiece W are gripped and supported, or a configuration in which only the peripheral edge of the workpiece W is supported, etc.

[0038] [Filament Lamp 20] Fig. 3 is a diagram of the filament lamp 20 mounted in the light heating device 1 of Fig. 1, and Fig. 4 is a diagram of the filament lamp 20 of Fig. 3 as viewed in the X direction. As shown in Fig. 3, the filament lamp 20 comprises an arc tube 21, a filament 22, and a pair of pinch seal portions (23, 23) provided at both ends of the arc tube 21.

[0039] As shown in FIG. 4, the light emitting tube 21 in this embodiment is a long member extending in the X direction, and a tube body 21a, which is a heat dissipation member, is provided on a portion of the outer wall surface 21p on the +Z side as viewed from the tube axis T1.

[0040] In this embodiment, the arc tube 21 and the tube body 21a are both made of glass that is transparent to the heating light L1 and are welded together to form a single unit. For this reason, in Figures 3 and 4, part of the outer edge of the arc tube 21 before the tube body 21a is welded is shown by a broken line.

[0041] 3, the tubular body 21a in this embodiment is a member extending in the X direction. A hermetically sealed space 21c is formed in the tubular body 21a, and a reflective film 21b is formed on an inner wall surface 21d of the space 21c as a reflective member that reflects light L1 emitted from the filament 22 to the +Z side toward the filament 22 side (-Z side).

[0042] In the filament lamp 20 of this embodiment, the arc tube 21 and the tube body 21a are constructed as cylindrical glass tubes with the same outer diameter, but they may each have a shape other than cylindrical, such as a polygonal or elliptical cylindrical shape, and the arc tube 21 and the tube body 21a may have different shapes. This configuration is intended to allow as many as possible to be placed within the chamber 10 and to prevent the tube body 21a from obstructing the progression of the light L1.

[0043] As shown in Fig. 2, the filament lamp 20 of this embodiment is arranged within the chamber 10 so that the tube body 21a is located on the +Z side of the arc tube 21. It is preferable that the filament lamp 20 is arranged so that the tube body 21a is farther away from the support member 11 in the Z direction than the arc tube 21, and it is more preferable that the filament lamp 20 is arranged so that the tube axis T1 and the tube axis T2 are aligned along the Z direction, as shown in Fig. 2.

[0044] In the light heating device 1 of this embodiment, the arc tubes 21 of the filament lamps 20 are arranged at intervals of 15 mm, and the diameter of the arc tubes 21 is 11 mm. In other words, the arc tubes 21 of adjacent filament lamps 20 are spaced 4 mm apart.

[0045] The reflective film 21b of this embodiment is an inorganic particle film whose main material is silica (SiO2). However, as described above, the main material of the inorganic particle film that forms the reflective film 21b may be Al2O3 (alumina), ZrO2 (zirconia), BN (boron nitride), or the like.

[0046] Furthermore, the member that reflects light L1 traveling on the +Z side toward the -Z side may be made of a thin metal film or metal plate. Materials for the thin metal film or metal plate include, for example, gold or aluminum. Note that the filament lamp 20 does not need to be provided with a reflective member if the light emitted from the filament 22 toward the -Z side can sufficiently heat-treat the workpiece W, or if the tube body 21a itself also functions as a reflective member.

[0047] As shown in FIG. 4, in the filament lamp 20 of this embodiment, the reflective film 21b is formed on the inner wall surface 21d of the tube body 21a over the entire surface on the +Z side, but the shape, size, etc. of the reflective film 21b are designed as desired depending on the shape and use of the chamber 10 of the light heating device 1.

[0048] As shown in Fig. 3, the filament 22 extends along the X direction within the arc tube 21. Also as shown in Fig. 3, supporters 22a for maintaining the position of the filament 22 at predetermined intervals are provided within the arc tube 21. Note that if the overall length of the filament 22 is short and the position can be maintained within an acceptable range without the supporters 22a, the supporters 22a do not have to be provided.

[0049] Both ends of the filament 22 are connected to a power supply mechanism (not shown) via metal foil provided in the pinch seal portion 23 .

[0050] [Verification experiment 1] Here, a verification experiment was carried out to confirm that when the filament lamp 20 of this embodiment was lit in a vacuum by applying a predetermined voltage, the temperature was lower than that of a filament lamp of a conventional configuration, and the details of this verification experiment will now be described.

[0051] Example 1 Example 1 is the filament lamp 20 described above.

[0052] Example 2 Example 2 is a filament lamp having the same configuration as Example 1, except that the reflective film 21b is not formed.

[0053] (Comparative Example 1) Comparative Example 1 is a filament lamp having the same configuration as Example 1, except that the tubular body 21a is not provided on the outer wall surface 21p of the arc tube 21.

[0054] As mentioned above, if the outer diameter of the arc tube 21 is increased, the number of filament lamps 20 that can be placed within the chamber 10 decreases, and when looking at the light heating device 1 as a whole, the effect of the number of filament lamps 20 that can be placed within the chamber 10 must also be taken into consideration. Therefore, in this verification experiment, it was assumed that the number of filament lamps 20 that can be placed within the chamber 10 would not be changed, and so a comparison was made between the configurations of Example 1, Example 2, and Comparative Example 1 described above.

[0055] (Verification method) The verification method involved placing a filament lamp in a chamber, creating a vacuum inside the chamber, and then applying a voltage of 100V to both ends of the filament for 300 seconds to check how much the surface temperature of the light-emitting tube of each filament lamp rose to.

[0056] The surface temperature of the arc tube was measured with a thermocouple attached to the outer wall surface of the arc tube at the center in the X direction. In the case of the filament lamps 20 of Examples 1 and 2, the thermocouple was attached to the outer wall surface 21p of the arc tube 21 at the center in the X direction, on the opposite side from the tube body 21a.

[0057] (result) Figure 5 is a graph showing the temperature rise on the surface of the arc tube of a filament lamp. As shown in Figure 5, the surface temperature of the arc tube in Comparative Example 1 reached nearly 500°C, while in Examples 1 and 2 it was below 450°C. The temperature reached in Example 1 was slightly higher than in Example 2 because the temperature of the arc tube rose more due to the light reflected by reflective film 21b.

[0058] [Verification experiment 2] Next, a verification experiment was carried out using the filament lamps of Example 2 and Comparative Example 1 described above to confirm the extent of the difference in light output between the respective filament lamps when the power supplied was controlled so that the temperatures of the arc tubes were the same. Details of this verification experiment will now be described.

[0059] (Verification method) As in Verification Experiment 1, the surface temperatures of the arc tube 21 of Example 2 and the arc tube of Comparative Example 1 were measured by a thermocouple provided on the outer wall surface of the arc tube at the center in the X direction.

[0060] The surface temperature of the arc tube 21 in Example 2 was measured by supplying 2000 W of power to the filament lamp and lighting it, and then checking the temperature of the arc tube and the voltage being supplied 10 minutes after lighting began, when the lamp temperature was considered to have stabilized (temperature fluctuations within ±5°C over 60 seconds).

[0061] In measuring the surface temperature of the arc tube of Comparative Example 1, the power supplied was controlled so that the temperature of the arc tube of the filament lamp in question would stabilize at the temperature measured in Example 2, and once the temperature stabilized, the power and voltage values supplied to the filament lamp of Comparative Example 1 were confirmed.

[0062] (result) For the filament lamp of Example 2, the temperature of the arc tube was 620°C, and the voltage value (V1) supplied to the filament lamp was 197V.

[0063] With regard to the filament lamp of Comparative Example 1, when the temperature of the arc tube was stable at 620°C, the voltage value (V0) supplied to the filament lamp was 147V and the power value was 1267W.

[0064] Here, if the total luminous flux emitted from the filament lamp of Example 2 is I1 and the total luminous flux emitted from the filament lamp of Comparative Example 1 is I0, then I1 and I0 can be expressed as I1 / I0=(V1 / V0) between the voltage values applied to the respective filament lamps. 3.19 According to this relational expression, the light output of the filament lamp of Example 2 is required to be about 2.5 times the light output of the filament lamp of Comparative Example 1.

[0065] In Verification Experiment 2, verification was not carried out using the filament lamp 20 of Example 1, but the results of Verification Experiment 1 shown in Figure 5 show that the light output of the filament lamp 20 of Example 1 is approximately 1.9 times the light output of the filament lamp of Comparative Example 1. Furthermore, because the filament lamp 20 of Example 1 is provided with a reflective film 21b, the amount of light L1 irradiated onto the workpiece W is more than twice as large as that of the filament lamp of Comparative Example 1.

[0066] As described above, the filament lamp 20 of this embodiment has a larger surface area of the outer wall surface 21p of the light-emitting tube 21, so the amount of heat emitted is greater and the temperature reached when a specified amount of power is supplied is lower. This allows for greater power to be input into the filament lamp 20, improving the intensity of the emitted light L1. In other words, an optical heating device 1 equipped with a filament lamp 20 can efficiently heat the workpiece W at a higher temperature.

[0067] Furthermore, since the filament lamps 20 are provided with the tube body 21a, they do not expand in the Y direction, and by arranging them in the chamber 10 as shown in Figure 2, more can be mounted on the optical heating device 1 than when the outer diameter of the arc tube 21 is increased. In other words, the optical heating device 1 can efficiently heat-treat the workpiece W at a higher temperature.

[0068] 6 to 8 are drawings showing one example of the construction of a filament lamp 20. The filament lamp 20 of this embodiment is constructed such that a tubular body 21a in which a hermetically sealed space 21c is formed is welded to the outer wall surface 21p of the arc tube 21 as a heat dissipation member. As shown in Fig. 6, the heat dissipation member may be a tubular body 60 having an opening 21h at the end of the space 21c in the X direction. The openings 21h are provided at both ends of the tubular body 60 in the X direction.

[0069] 7 and 8, the heat dissipation member may be a rod 70 extending in the X direction in which no space 21c is formed. In FIGS. 7 and 8, hatching is applied to the inside of the outer edge of the rod 70 to indicate that no space 21c (see FIG. 3) is formed (the interior is filled). In the case of a filament lamp 20 having this configuration, the reflective member may be configured to be embedded inside the rod 70, as shown in FIG. 7, or may be provided on the outer surface 70a of the rod 70, as shown in FIG. 8. The rod 70 is made primarily of glass and is a member that is transparent to light L1.

[0070] Fig. 9 is a drawing showing another example of the construction of a filament lamp 20 different from those in Figs. 6 to 8, and Fig. 10 is a drawing of the filament lamp 20 shown in Fig. 10 as viewed in the X direction. As shown in Fig. 9, the filament lamp 20 may be mounted such that an engaging portion 91 is provided on the outer wall surface 21p of the arc tube 21, and a rod 90, which is a heat dissipating member, is engaged with the engaging portion 91 as shown by the dashed arrow.

[0071] 10, a rod 90 is attached to the outer wall surface 21p of the arc tube 21 on the +Z direction side as viewed from the tube axis T1. The material of the rod 90 may be glass, but it may also be a member made of a metal such as copper or aluminum.

[0072] In the above-described embodiment, for simplicity of explanation, the filament lamp 20 has been described as having a straight arc tube 21 extending in the X direction, and a tubular body 21a which is a heat dissipation member also extending in the X direction, but the shapes of the arc tube and heat dissipation member provided in the filament lamp 20 of the present invention are not limited to these shapes. For example, the filament lamp 20 may have a configuration including a long, curved arc tube and a heat dissipation member which extends along the tube axis of the arc tube and is provided on part of the outer wall surface on one side as viewed from the tube axis. As a specific example, the filament lamp 20 may also have a configuration including an arc tube and heat dissipation member which are curved so as to present a circular ring shape.

[0073] The configurations of the light heating device 1 and filament lamp 20 described above are merely examples, and the present invention is not limited to the configurations shown in the drawings. [Explanation of symbols]

[0074] 1 : Optical heating device 10: Chamber 11: Support member 11a : Protrusion 20: Filament lamp 21: Arc tube 21a: Body 21b: Reflective film 21c: space 21d: Inner wall 21h: Opening 21p: External wall surface 22: Filament 22a: Supporter 23: Pinch seal part 60: Body 70 : Bar material 70a : Outer surface 90: Bar material 91: Engagement part A1: Processing room L1: light W: Work

Claims

1. a long arc tube that is transparent to light; a filament extending along the axis of the arc tube within the arc tube; a heat dissipation member extending along the tube axis of the arc tube and provided on a part of an outer wall surface on one side as viewed from the tube axis of the arc tube, the heat dissipation member having an airtightly sealed space; a reflecting member that reflects at least a part of the light emitted from the filament onto an inner wall surface of the space toward the filament, A filament lamp characterized in that the light emitting tube and the heat dissipating member are made of glass, and the light emitting tube and the heat dissipating member are integrally formed.

2. 2. A filament lamp according to claim 1, wherein said reflecting member is made of a thin metal film, a metal plate, or an inorganic particle film.

3. a chamber in which a workpiece to be processed is accommodated; a support member for supporting the workpiece within the chamber; 10. An optical heating device comprising: a plurality of filament lamps according to claim 1, which are arranged in the chamber and emit light toward the main surface of the workpiece supported by the support member.

4. 4. The light heating device according to claim 3, wherein the heat dissipation member is disposed at a position farther from the support member than the light emitting tube in the direction in which the filament lamp and the support member face each other.

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