Surface Inspection Equipment

Abstract

A new surface inspection device is provided that enables inspection of the surface of a product or part. [Solution] The surface inspection device includes an installation device, an imaging device, and a support device. The installation device includes an installation tool. An inspection object is placed on the installation tool. The imaging device images the inspection surface of the inspection object placed on the installation tool. The support device supports the imaging device. The installation device includes a vibration generator. The vibration generator vibrates the installation tool. The imaging device includes an event-based vision sensor. The support device positions the imaging device facing the installation tool in the first direction, with the imaging device on a first side in the first direction relative to the installation tool. The vibration generator vibrates the installation tool when the imaging device images the inspection surface.

Description

[Technical Field]

[0001] The present invention relates to a surface inspection device for inspecting the surface of an object to be inspected. [Background technology]

[0002] Patent Document 1 discloses a surface roughness measurement method. In this method, parallel light is irradiated perpendicularly onto an object to be measured, the reflected light from the object is imaged using an optical lens, the standard deviation of the brightness histogram of the reflected light image is calculated, and the surface roughness of the object is measured based on the standard deviation. When parallel light is irradiated perpendicularly onto the object to be measured, the parallel light is specularly reflected from the surface of the object to be measured. The direction of the reflected light varies depending on the irregularities formed on the surface. The reflected light is imaged on an imaging plane by the optical lens. Areas with a large inclination angle of the irregularities and where the reflected light does not enter the lens aperture appear dark. Areas with almost no inclination angle and where the reflected light enters the lens appear bright.

[0003] Non-Patent Document 1 discloses an event-based vision sensor (EVS). The EVS is a vision sensor that seamlessly captures "movement" with high temporal resolution.

[0004] Non-Patent Document 2 discloses event-based vision sensor (EVS) technology. EVS detects changes in luminance of each pixel and outputs only the changed data, combining it with "coordinate" and "time information," achieving high-speed, low-latency data output. In EVS, incident light is converted into an electrical signal by the sensor's light-receiving circuit. The electrical signal is then passed through an amplifier and separated by a comparator according to the luminance change, resulting in a light signal (positive event) and a dark signal (negative event). These signals are then output as EVS image data after subsequent signal processing. When the luminance change of the light captured by each pixel exceeds a set threshold, EVS detects it as an event and outputs the coordinates, time, and polarity of the pixel where the event occurred. This operation is performed independently and asynchronously for each pixel.

[0005] Non-Patent Documents 3 and 4 disclose a camera equipped with an event-based vision sensor. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Publication No. 59-79804 [Non-patent literature]

[0007] [Non-Patent Document 1] Sony Semiconductor Solutions Corporation, "Event-Based Vision Sensor (EVS)", [online], [Retrieved January 18, 2025], Internet<URL:https: / / www.sony-semicon.com / ja / products / is / industry / evs.html> [Non-patent document 2] Sony Semiconductor Solutions Corporation, "Event-Based Vision Sensor (EVS) Technology", [online], [Retrieved January 19, 2025], Internet<URL:https: / / www.sony-semicon.com / ja / technology / industry / evs.html> [Non-patent document 3] PROPHESEE, "EVALUATION KITS", [online], [Retrieved January 18, 2025], Internet<URL:https: / / www.prophesee.ai / event-based-evaluation-kits / > [Non-patent document 4] PROPHESEE, "EVK4 HD", [online], [Retrieved January 27, 2025], Internet<URL:https: / / www.prophesee.ai / event-camera-evk4 / > Summary of the Invention [Problem to be solved by the invention]

[0008] The surface of a product or part is formed by machining a raw material. Examples of this machining include cutting, forging, and casting. Some or all of the surface formed by machining may be further machined to be finished to tolerances specified in the design. Examples of this machining include cutting, grinding, and polishing. For example, a surface formed by cutting is then ground or polished. An example of polishing is buffing. Examples of tolerances include surface roughness and flatness.

[0009] In production sites, it is necessary to manufacture multiple copies of the same product or part with consistent quality. However, it is impossible or extremely difficult to achieve the same finish on the surface of a product or part using machining, resulting in variations between individual products or parts. In production sites, the surface of a product or part is sometimes visually inspected by a skilled worker. This visual inspection may result in a product or part being judged as "defective" even when the surface is finished to the tolerance specified in the design. After various studies, the inventor realized that the judgment result of the visual inspection of the surface of a product or part is related to the reflection of light on the surface of the product or part.

[0010] An object of the present invention is to provide a new surface inspection device that enables inspection of the surface of a product or part. [Means for solving the problem]

[0011] One aspect of the present invention is an installation device including an installation tool on which an inspection object is placed, an imaging device that is placed on the installation tool and that images an inspection surface of the inspection object, and a support device that supports the imaging device. an illumination device provided on the installation tool that irradiates the inspection surface of the object to be inspected with illumination light that is white diffused light; The installation device includes: In the first direction a vibration generator for vibrating the installation tool, the image capture device including an event-based vision sensor, and the support device a fixing jig for fixing the photographing device, the fixing jig supporting the photographing device in a fixed state in which the photographing device is fixed to the fixing jig, the fixing jig including a reference plane having a certain relationship with the photographing direction of the photographing device in the fixed state, The photographing device is attached to the installation tool. The aforementioned The imaging device is disposed on a first side in a first direction, facing the installation tool in the first direction; With the reference plane as a reference, the photographing device is set in a state where the photographing direction coincides with the first side to the second side of the first direction;When the imaging device images the inspection surface, the vibration generator The vibration frequency is set in the range of 10 to 300 Hz, and the acceleration is set in the range of 0.1 to 2.0 G, and the vibration is performed in the first direction. Vibrating the installation tool When the photographing device photographs the inspection surface, the lighting device irradiates the inspection surface with the illumination light, and the photographing device photographs the inspection surface in a state where the photographing direction coincides with the first side to the second side of the first direction, the installation tool vibrates in the first direction, and the inspection surface is illuminated with the illumination light. It is a surface inspection device.

[0012] This surface inspection device vibrates the fixture on which the object to be inspected is mounted, thereby vibrating the fixture and the object to be inspected together. The surface inspection device vibrates the object to be inspected, thereby causing a change in brightness on the surface to be inspected. An event-based vision sensor detects the change in brightness of each pixel, which can be output in combination with coordinate and time information. A "good" or "bad" judgment can be made based on the area where the brightness change occurs. For example, even if the surface of a product or part is finished to a tolerance specified by design, it is possible to detect the area where the brightness change occurs as a defect and judge it to be "bad."

[0014] Photography When the inspection surface is photographed by the imaging device, the relative positions of the inspection surface with respect to the imaging device in the second and third directions can be constant, the second and third directions being perpendicular to the first direction, and the third direction being perpendicular to the second direction.

[0016] Examination By irradiating the inspection surface with illumination light while the object being inspected is vibrating, the illumination light can be diffused on the inspection surface, making the brightness change clearer. [Effects of the Invention]

[0017] According to the present invention, a new surface inspection device can be obtained that enables inspection of the surface of a product or part. [Brief explanation of the drawings]

[0018] [Figure 1] 1 is a perspective view showing an example of a surface inspection apparatus, the perspective view showing the front, top, and right side of the surface inspection apparatus, and shows a state in which an inspection target object to be placed on the surface inspection apparatus has been placed. [Figure 2] FIG. [Figure 3] FIG. 10 is a perspective view showing an example of a first step of an operation of placing an inspection target on a surface inspection device. [Figure 4] FIG. 10 is a perspective view showing an example of a second step of the installation operation of the inspection target to be performed on the surface inspection device. [Figure 5] The upper part is a perspective view showing an example of an object to be inspected, and the lower part is a cross-sectional view taken along line AA. [Figure 6] 1 shows an example of an image captured by a camera of a surface inspection device. The top image shows an image of the surface of an inspection object that has been visually inspected by an operator and judged to be "good." The bottom image shows an image of the surface of an inspection object that has been visually inspected by an operator and judged to be "bad." DETAILED DESCRIPTION OF THE INVENTION

[0019] Embodiments for carrying out the present invention will be described with reference to the drawings. The present invention is not limited to the configurations described below, and various configurations can be adopted within the same technical concept. For example, some of the configurations described below may be omitted or replaced with other configurations. The present invention may also include other configurations. The drawings are explanatory diagrams for understanding the present invention. The correspondence between each drawing and other drawings may not be exact. Hatching indicates a cross section.

[0020] <Surface inspection device 10> The surface inspecting device 10 will be described with reference to Figures 1 to 6. In the embodiment, the terms "first direction," "second direction," and "third direction" are used to identify the surface inspecting device 10 (see Figures 1 to 4). The second direction and the third direction are perpendicular to the first direction. The third direction is perpendicular to the second direction. One side of the first direction is referred to as the "first side," and the other side of the first direction is referred to as the "second side." The first direction is referred to as the vertical direction, and the second direction and the third direction are referred to as the horizontal direction. The first side of the first direction is referred to as the upper side in the vertical direction, and the second side of the first direction is referred to as the lower side in the vertical direction.

[0021] The surface inspection device 10 is used to inspect the surface of an inspection object 60 (see FIGS. 1 to 4). In the embodiment, the surface of the inspection object 60 to be inspected is referred to as an "inspection surface 61" (see FIG. 5). Examples of the inspection object 60 include a product or a part (see FIGS. 1 to 5). A product or a part is formed by machining a raw material. Examples of this machining include cutting, forging, and casting. A part or all of the surface formed by machining may be further machined to be finished to a tolerance specified in the design. Examples of this machining include cutting, grinding, and polishing. In a production site, a visual inspection may be performed on the surface of the inspection object 60 that has been finished by a skilled worker to a tolerance specified in the design, using the surface 61 as the inspection surface. The surface inspection device 10 can be used for inspection using the surface of the inspection object 60 that has been finished to a tolerance specified in the design as the inspection surface 61.

[0022] In this embodiment, the inspection object 60 is a machined product having a recess with a stepped inner surface, and the inspection surface 61 is an annular flat surface that forms a step in the middle of the recess (see FIG. 5). This recess is provided on a first side surface of the inspection object 60 in a first direction when the inspection object 60 is mounted in a surface inspection device 10 (described later), and further, in the above-described state, the first direction is the depth direction (see FIGS. 1 to 5). Examples of materials for forming the machined product include metal and resin. For example, in machined products, cutting and polishing are used to form the recess with a stepped inner surface. An example of polishing is buffing. For example, the annular flat surface that forms the step on the inner surface of the recess is finished to a tolerance specified in the design by buffing after cutting. Examples of tolerances include surface roughness and flatness.

[0023] The shapes of the test object 60 and the test surface 61 are examples. The test object may have a different shape from the test object 60. The test object may not include a concave portion. The test object may include a convex portion, or may include a concave portion and a convex portion. The test object may be a sphere, an ellipsoid, a columnar shape, a cylindrical shape, or a cone shape. The test surface may have a different shape from the test surface 61. The test surface may be an inclined surface or a curved surface. Examples of inclined surfaces include an inclined flat surface and an inclined curved surface. A curved surface has a predetermined curvature. Examples of curved surfaces include a cylindrical surface, a circular columnar surface, a curved surface, and an arc-shaped surface. The same applies to curved surfaces that form inclined curved surfaces. The shapes of the test object and the test surface are determined appropriately taking into account various conditions.

[0024] The surface inspection device 10 includes an installation device 20, an imaging device 30, a support device 40, and an illumination device 50 (see FIGS. 1 to 4). The installation device 20 includes an installation tool 21 and a vibration generator 28. The installation tool 21 is provided with an inspection target 60. In the embodiment, the installation tool 21 includes a container 22 and a lid 24. The container 22 has a storage chamber 23, and the inspection target 60 is stored in the storage chamber 23 (see FIGS. 2 to 4). When performing an inspection using the surface inspection device 10, the inspector stores the inspection target 60 in the storage chamber 23 (see FIGS. 3 to 4). Thereafter, the inspector attaches the lid 24 to the container 22 on a first side in the first direction (see FIGS. 4, 1, and 2). When the inspection target 60 is stored in the storage chamber 23, the position of the inspection target 60 in the installation tool 21 in the second direction and the position of the inspection target 60 in the third direction are fixed. Furthermore, when the lid body 24 is attached to the container 22, the position of the inspection object 60 in the installation tool 21 in the first direction is fixed.

[0025] In the installation tool 21, the lid 24 is positioned relative to the container 22 and provided on the end surface of the container 22 on the first side in the first direction (see FIGS. 1 and 2). The installation tool 21 employs the fitting of positioning pins 25 and positioning holes 26 for this positioning (see FIGS. 1, 3, and 4). That is, the container 22 has two positioning pins 25 provided on the end surface on the first side in the first direction, and the lid 24 has two positioning holes 26 provided. The positioning holes 26 penetrate the lid 24 in the first direction. However, this positioning structure in the installation tool 21 is an example. The positioning structure of the container 22 and the lid 24 is appropriately determined taking various conditions into consideration. The lid 24 has a photography hole 27 provided therein. The photography hole 27 penetrates the lid 24 in the first direction. The inspection surface 61 is exposed to the first side in the first direction from the photography hole 27 when the inspection object 60 is provided in the installation tool 21.

[0026] The vibration generator 28 vibrates the installation tool 21 (see FIGS. 1 and 2). The installation tool 21 is installed on the vibration generator 28 in the following state. In this state, the second direction position and the third direction position of the installation tool 21 relative to the vibration generator 28 are respectively determined. Accordingly, the inspection object 60 is installed on the installation device 20 with its second direction position and third direction position determined. The inspection surface 61 is parallel to the mounting surface 29 of the vibration generator 28. However, the mounting surface 29 is based on the state in which the vibration generator 28 is stationary. The installation tool 21 is placed on the mounting surface 29. In this embodiment, the mounting surface 29 is set horizontally when the vibration generator 28 is stationary.

[0027] The vibration generator 28 may have a vibration frequency set in the range of 10 to 300 Hz, and an acceleration set in the range of 0.1 to 2.0 G. In experiments conducted by the inventors, the preferred vibration frequency setting was 30 Hz, and the preferred acceleration setting was 0.9 G. However, these vibration frequency and acceleration setting values are merely examples. The vibration frequency and acceleration are appropriately determined taking into consideration various conditions. An example of the aforementioned conditions is the change in brightness on the inspection surface 61. In the surface inspection device 10, a known vibration generator can be used as the vibration generator 28. Therefore, further explanation of the vibration generator 28 will be omitted.

[0028] The image capturing device 30 captures an image of the inspection surface 61 of the inspection object 60 mounted on the installation fixture 21 (see FIGS. 1, 2, and 6). The image capturing device 30 includes an event-based vision sensor. The image capturing device 30 includes a camera body 31 and a lens 32 (see FIGS. 1 to 4). The image capturing device 30 can use the "Metavision (registered trademark) EVK4-HD" camera manufactured by PROPHESEE, as described in Non-Patent Documents 3 and 4, as the camera body 31. The camera described in Non-Patent Documents 3 and 4 as the camera body 31 includes the event-based vision sensor "IMX636 (1280 x 720 px)." In other words, the image capturing device 30 includes an event-based vision sensor in the camera body 31.

[0029] The imaging device 30 can employ a known optical system as the lens 32. The lens 32 may be a telecentric optical system. By employing the lens 32 as a telecentric optical system, the inspection surface 61 can be photographed at a constant size with reduced distortion. The imaging device 30 employs a bilaterally telecentric optical system as the lens 32. However, the lens 32 does not have to be a bilaterally telecentric optical system. The lens 32 may be a unilaterally telecentric optical system. The optical system of the imaging device 30 is determined appropriately taking into consideration various conditions. The camera body 31 and the lens 32 are already in practical use and are known. Therefore, further description of the imaging device 30 will be omitted. In the embodiment, the direction in which the imaging device 30 photographs is referred to as the "imaging direction" (see FIG. 2). In the embodiment, the imaging direction coincides with the first side to the second side of the first direction.

[0030] The support device 40 supports the imaging device 30 (see Figures 1 to 4). The support device 40 positions the imaging device 30 on the first side in the first direction relative to the installation tool 21. The surface inspection device 10 employs a vertical articulated robot as the support device 40. Vertical articulated robots are already in practical use and are well known. Therefore, a description of the structure of the support device 40 will be omitted. The support device 40 includes a fixing jig 41. The support device 40 supports the imaging device 30 via the fixing jig 41. When the support device 40 is a vertical articulated robot, the fixing jig 41 is attached to the tip of the robot arm, and the imaging device 30 is fixed to the fixing jig 41.

[0031] The support device 40 adjusts the posture of the image capturing device 30 and supports the image capturing device 30 in the adjusted posture. In this embodiment, the support device 40 aligns the image capturing direction of the image capturing device 30 from the first side to the second side of the first direction (see FIG. 2). The fixing jig 41 has a reference plane 42. The reference plane 42 has a fixed relationship with the image capturing direction in the fixed state. In the fixed state, the image capturing device 30 is fixed to the fixing jig 41 (see FIGS. 1 to 4). In this embodiment, the reference plane 42 has a perpendicular relationship with the image capturing direction in the fixed state (see FIG. 2). In the support device 40, the vertical articulated robot is driven to adjust the reference plane 42 to the next state. In this state, the reference plane 42 is set horizontally. In this case, the reference plane 42 is set parallel to the horizontal mounting surface 29 of the vibration generator 28.

[0032] The horizontality of the reference surface 42 may be confirmed using a level. In this embodiment, the level includes a measuring instrument called a spirit level. Levels are already in practical use and are well known. Therefore, further explanation regarding the level will be omitted. The reference surface 42 is preferably an area where a spirit level can be installed for this adjustment.

[0033] In the surface inspection apparatus 10, the support device 40 positions the imaging device 30 facing the installation tool 21 in the first direction, with the imaging device 30 on the first side in the first direction relative to the installation tool 21 (see FIGS. 1 and 2). In the embodiment, the imaging device 30 faces directly in the first direction an inspection surface 61 of an inspection object 60 mounted on the installation tool 21 on the vibration generator 28. In the embodiment, the "installation tool 21 on the vibration generator 28" can also be referred to as "the installation tool 21 placed on the mounting surface 29 of the vibration generator 28."

[0034] In the surface inspection device 10, the vibration generator 28 vibrates the installation fixture 21 when the imaging device 30 images the inspection surface 61 (see FIGS. 1 and 2). The vibration generator 28 vibrates the installation fixture 21 in a first direction. By vibrating the installation fixture 21 in the first direction, the vibration generator 28 vibrates the inspection object 60 attached to the installation fixture 21 in the first direction. The imaging device 30 vibrates the inspection object 60 in the first direction, thereby imaging the inspection surface 61 vibrating in the first direction from a first side in the first direction.

[0035] The lighting device 50 irradiates the inspection surface 61 with illumination light when the imaging device 30 images the inspection surface 61. An example of the light source of the lighting device 50 is an LED light source. An example of the illumination light is white diffused light. However, the light source of the lighting device 50 may be different from an LED light source. The illumination light may be different from white diffused light. In the lighting device 50, the light source and illumination light are appropriately determined taking into consideration various conditions. The lighting device 50 is provided on a first side in the first direction from the installation fixture 21 and on a second side in the first direction from the imaging device 30. The surface inspection device 10 employs a ring light as the lighting device 50. By using a ring light as the lighting device 50, the lighting device 50 can illuminate the inspection surface 61 without blocking the inspection surface 61 from the imaging device 30.

[0036] In the surface inspection apparatus 10, the lighting device 50 is provided on the support device 40. The lighting device 50 is provided on the support device 40 so that its position in the following direction is adjustable. This direction coincides with the first direction when the imaging device 30 and the installation tool 21 are arranged facing each other in the first direction. For this adjustment, the following adjustment mechanism can be used. An example of this adjustment mechanism is a combination of a shaft and a collar. In this case, the shaft is fixed to the support device 40, the collar is fixed to the shaft, and the lighting device 50 is fixed to the collar. The position of the lighting device 50 in the first direction is adjusted by changing the fixed position of the collar relative to the shaft.

[0037] <Effects of the embodiment> According to the embodiment, the following effects can be obtained.

[0038] (1) The surface inspection device 10 includes an installation device 20, a photographing device 30, a support device 40, and an illumination device 50 (see Figures 1 to 4). The installation device 20 includes a mounting fixture 21. An inspection target 60 is mounted on the mounting fixture 21 (see Figures 1 to 4). The photographing device 30 photographs an inspection surface 61 of the inspection target 60 mounted on the mounting fixture 21 (see Figures 1, 2, and 6). The support device 40 supports the photographing device 30 (see Figures 1 to 4). The installation device 20 includes a vibration generator 28. The vibration generator 28 vibrates the mounting fixture 21 (see Figures 1 and 2). The photographing device 30 includes an event-based vision sensor. The event-based vision sensor includes multiple pixels. The event-based vision sensor detects changes in brightness of each pixel and outputs only the changed data in combination with "coordinate" and "time information" (see Non-Patent Document 2 mentioned above). The support device 40 positions the imaging device 30 facing the installation tool 21 in the first direction with the imaging device 30 on the first side in the first direction relative to the installation tool 21 (see FIGS. 1 and 2). When the imaging device 30 images the inspection surface 61, the vibration generator 28 vibrates the installation tool 21 (see FIGS. 1 and 2).

[0039] According to the surface inspection device 10, the fixture 21 on which the inspection target 60 is mounted can be vibrated, thereby vibrating the fixture 21 and the inspection target 60 together. The surface inspection device 10 can vibrate the inspection target 60 to cause a luminance change on the inspection surface 61. An event-based vision sensor detects the luminance change of each pixel and outputs it in combination with coordinate and time information. It is possible to judge the area where the luminance change occurs as "good" or "bad." For example, even if the surface of a product or part is finished to a tolerance specified by design, it is possible to detect the area where the luminance change occurs as a defect and judge it as "bad." This makes it possible to inspect the surface of a product or part without relying on skilled workers to make such judgments.

[0040] The inventor conducted an experiment to verify the effectiveness of the surface inspection device 10. A surface inspection device equivalent to the surface inspection device 10 was used in the experiment. In the description of this experiment, the same or corresponding elements are designated by the same reference numerals as above to clarify correspondence with the above-described embodiment. The surface inspection device 10 includes a PROPHESEE Metavision (registered trademark) EVK4-HD camera (see Non-Patent Documents 3 and 4) as the imaging device 30. The vibration generator 28 was set to a vibration frequency of 30 Hz and an acceleration of 0.9 G. The surface of the inspection object 60 (the inspection surface 61) was buffed and finished to a tolerance specified by the design of the surface. Examples of the tolerance specified by the design include surface roughness and flatness. The inspection surfaces 61 to be imaged were the surfaces of the inspection object 60 that were visually inspected by a skilled worker and judged "good" and "bad," respectively.

[0041] In the experiment, a different object 60 to be inspected from that shown in Figures 1 to 5 was used as a sample. Therefore, the inspection surface 61 photographed in the experiment has a different shape from the inspection surface 61 in Figures 1 to 5. In each of the photographed images in the upper and lower rows of Figure 6, the following boundary line is drawn superimposed on the outer edge of the inspection surface 61, and the inspection surface 61 is clearly visible in these photographed images. This boundary line has a configuration in which a thinner black two-dot chain line is superimposed on a thick white solid line.

[0042] As a result of the experiment, in the photographed image of the surface of the inspection object 60 for which the judgment result is "bad" (see the bottom row of Figure 6), more pixels on the inspection surface 61 are observed that have undergone a change in brightness due to vibration (see "pixels that appear black" on the inspection surface 61) compared to the photographed image of the surface of the inspection object 60 for which the judgment result is "good" (see the top row of Figure 6).

[0043] Although detailed explanations are omitted, the "good" or "bad" state of the inspection surface 61 can be determined by performing image analysis on the captured image using a computer. For example, the "good" or "bad" state of the inspection surface 61 can be determined by identifying pixels that have undergone a change in luminance and comparing the total amount of pixels that have undergone a change in luminance with a predetermined reference value. However, this determination of the "good" or "bad" state of the inspection surface 61 is merely an example. The "good" or "bad" state of the inspection surface 61 may also be determined by an image analysis process different from the one described above. A known image analysis process can be applied to determine the "good" or "bad" state of the inspection surface 61. A known image analysis process using artificial intelligence may also be used to determine the "good" or "bad" state of the inspection surface 61. Therefore, further explanations regarding the "good" or "bad" state of the inspection surface 61 will be omitted.

[0044] (2) The vibration generator 28 vibrates the installation fixture 21 in a first direction (see FIGS. 1 and 2). With this configuration, when the inspection surface 61 is photographed by the imaging device 30, the relative position of the inspection surface 61 with respect to the imaging device 30 in the second and third directions can be kept constant.

[0045] (3) The surface inspection device 10 includes an illumination device 50. The illumination device 50 irradiates illumination light onto the inspection surface 61 of the inspection object 60 mounted on the installation fixture 21. When the imaging device 30 images the inspection surface 61, the illumination device 50 irradiates the inspection surface 61 with illumination light. With this configuration, by irradiating the inspection surface 61 with illumination light while the inspection object 60 is vibrating, the illumination light can be diffusely reflected by the inspection surface 61. This makes it possible to clearly identify changes in brightness.

[0046] <Modification> The embodiment can also be as follows. Some of the configurations of the modified examples shown below can also be adopted in appropriate combination. Below, we will explain the differences from the above, and will omit explanations of similarities as appropriate.

[0047] (1) The vibration generator 28 vibrates the installation fixture 21 in a first direction (see FIGS. 1 and 2). The vibration generator 28 may vibrate the installation fixture 21 in a direction different from the first direction. The direction different from the first direction intersects with the first direction. An example of a direction different from the first direction is a direction perpendicular to the first direction. Examples of a direction perpendicular to the first direction are a second direction, a third direction, and a direction intersecting both of these directions.

[0048] (2) The support device 40 sets the first area next to the fixing jig 41 as the reference plane 42 (see FIGS. 1 to 4). The first area is perpendicular to the imaging direction in the fixed state. The relationship between the reference plane and the imaging direction in the fixed state may be different. The relationship between the reference plane and the imaging direction in the fixed state is determined appropriately taking various conditions into consideration. The reference plane may be the second area next to the fixing jig. The second area is parallel to the imaging direction in the fixed state. Assume that the reference plane is set to the second area of the fixing jig. In the support device, the vertical articulated robot is driven to adjust this reference plane to the next state. In this state, the reference plane is set vertically. In this case, the reference plane is set perpendicular to the horizontal mounting surface 29 of the vibration generator 28. Similar to the surface inspection device 10 of the above-described embodiment (see FIGS. 1 and 2), the support device positions the imaging device 30 facing the installation fixture 21 in the first direction, with the imaging device 30 on the first side of the installation fixture 21 in the first direction. In this case, as in the above case, the imaging device 30 faces the inspection surface 61 of the inspection object 60 mounted on the installation fixture 21 on the vibration generator 28 in the first direction.

[0049] (3) The surface inspection device 10 includes an illumination device 50 (see FIGS. 1 to 4). The illumination device 50 may be omitted from the surface inspection device 10. Assume that the environment in which the surface inspection device 10 is installed has sufficient brightness. In this case, the illumination device 50 may be omitted from the surface inspection device 10. Whether the illumination device 50 is installed or not is determined appropriately depending on the state of the image captured by the imaging device 30.

[0050] (4) The surface inspection device 10 employs a vertical articulated robot as the support device 40 (see FIGS. 1 to 4). The support device may be different from a vertical articulated robot. The support device may be configured so that the image capturing device 30 faces the installation tool 21 in the first direction with the image capturing device 30 on the first side in the first direction relative to the installation tool 21. The support device may not include a mechanism for adjusting the position and attitude of the image capturing device 30, or may include a mechanism for adjusting one or both of the position and attitude of the image capturing device 30.

[0051] The support device includes a linear motion mechanism and may perform all or some of the first, second, and third relative movements of the installation fixture 21 and the camera device 30. The first relative movement moves the camera device 30 relative to the installation fixture 21 in a first direction. The second relative movement moves the camera device 30 relative to the installation fixture 21 in a second direction. The third relative movement moves the camera device 30 relative to the installation fixture 21 in a third direction. In the support device, the first relative movement may be performed automatically or manually, the second relative movement may be performed automatically or manually, and the third relative movement may be performed automatically or manually.

[0052] The support device includes a rotation mechanism and may perform all or some of the first, second, and third relative rotations between the installation fixture 21 and the camera device 30. The first relative rotation rotates the camera device 30 relative to the installation fixture 21 about a rotation axis along the first direction. The second relative rotation rotates the camera device 30 relative to the installation fixture 21 about a rotation axis along the second direction. The third relative rotation rotates the camera device 30 relative to the installation fixture 21 about a rotation axis along the third direction. In the support device, the first relative rotation may be performed automatically or manually, the second relative rotation may be performed automatically or manually, and the third relative rotation may be performed automatically or manually.

[0053] The relative movement of the installation tool 21 and the imaging device 30 may be performed by using the installation tool 21 as the object of movement, or the imaging device 30 as the object of movement, or both the installation tool 21 and the imaging device 30 as the object of movement. The relative rotation of the installation tool 21 and the imaging device 30 may be performed by using the installation tool 21 as the object of rotation, or the imaging device 30 as the object of rotation, or both the installation tool 21 and the imaging device 30 as the object of rotation. The movement of the installation tool 21 may be performed in conjunction with the movement of the installation device 20. The rotation of the installation tool 21 may be performed in conjunction with the rotation of the installation device 20. In the above-described embodiment, the surface inspection device 10 moves and rotates the imaging device 30 using the support device 40, which is a vertical articulated robot (see FIGS. 1 to 4). [Explanation of symbols]

[0054] 10 Surface inspection device, 20 Installation device, 21 Installation tool, 22 Container 23 storage chamber, 24 lid, 25 positioning pin, 26 positioning hole 27 imaging hole, 28 vibration generator, 29 placement surface, 30 imaging device 31 camera body, 32 lens, 40 support device, 41 fixing jig 42 Reference surface, 50 Lighting device, 60 Inspection object, 61 Inspection surface

Claims

[Claim 1] an installation device including an installation tool on which an object to be inspected is placed; an imaging device that is provided on the installation tool and that images an inspection surface of the inspection object; a support device that supports the imaging device; an illumination device that is provided on the installation tool and that irradiates the inspection surface of the inspection object with illumination light that is white diffused light, The installation device includes a vibration generator that vibrates the installation tool in a first direction; the image capture device includes an event-based vision sensor; The support device includes: a fixing jig for fixing the imaging device; supporting the imaging device via the fixing jig in a fixed state in which the imaging device is fixed to the fixing jig; the fixing jig includes a reference surface that has a certain relationship with the imaging direction of the imaging device in the fixed state; The support device includes: The imaging device is disposed opposite the installation tool in the first direction with the imaging device on a first side in the first direction relative to the installation tool; With the reference plane as a reference, the photographing device is set in a state where the photographing direction coincides with the first side to the second side of the first direction; When the imaging device images the inspection surface, the vibration generator sets a vibration frequency in a range of 10 to 300 Hz and an acceleration in a range of 0.1 to 2.0 G to vibrate the installation tool in the first direction; the illumination device irradiates the inspection surface with the illumination light when the imaging device images the inspection surface; The photographing device photographs the inspection surface while the photographing direction coincides with the first side to the second side of the first direction, the installation tool vibrates in the first direction, and the inspection surface is illuminated by the illumination light.

Images