Measurement device, measurement method, and program

Abstract

To accurately measure the height of the liquid surface.SOLUTION: A measuring device includes: a plurality of sensors each mounted at different heights, that irradiate liquid surfaces of liquid contained in one or more containers with distance measuring light from above, receive light reflected by the liquid surfaces, and output measured values; a moving mechanism for moving either of the sensors or each container; and a controller that controls the moving mechanism and acquires the measured values output from the plurality of sensors. The plurality of sensors are arranged side by side along the direction in which the plurality of sensors move or the direction in which each container moves. The controller obtains from the plurality of sensors the measured value for a predetermined position on the liquid surface by moving either of the plurality of sensors or each container, selects one of the measured values obtained from the plurality of sensors, and measures a height of the liquid level for the predetermined position on the liquid surface based on the selected measured values.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a measurement device, a measurement method, and a program. [Background technology]

[0002] When a liquid such as a chemical solution is contained in a container such as a test tube, the amount of the liquid contained in the container is inspected visually. The inspection of the amount of the liquid is performed by measuring the height of the liquid surface, and the accuracy of the measurement of the liquid surface is what attracts customers. Patent Document 1 discloses a processing liquid amount measurement mechanism including a plurality of liquid surface sensors that detect different liquid surface levels in a processing liquid tank. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-232520 Summary of the Invention [Problem to be solved by the invention]

[0004] The accuracy of visual inspection varies depending on the skill of the operator. The processing liquid amount measuring mechanism disclosed in Patent Document 1 is not suitable for accurately measuring the liquid level in a scale container such as a test tube.

[0005] The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to provide a technique that can accurately measure the height of a liquid surface. [Means for solving the problem]

[0006] A measuring device according to one aspect of the present invention comprises a plurality of sensors that irradiate distance measuring light from above onto the liquid surface of a liquid contained in one or more containers, receive light reflected from the liquid surface, and output measurement values, the plurality of sensors being mounted at different heights; a movement mechanism for moving either the plurality of sensors or each of the containers; and a control device that controls the movement mechanism and acquires the measurement values output from the plurality of sensors, wherein the plurality of sensors are arranged in a line along the direction in which the plurality of sensors move or the direction in which each of the containers moves, and the control device acquires the measurement values for a predetermined position on the liquid surface from the plurality of sensors by moving either the plurality of sensors or each of the containers, selects one of the measurement values acquired from the plurality of sensors, and measures the height of the liquid surface at the predetermined position on the liquid surface based on the selected measurement value.

[0007] The control device acquires measurement values for a predetermined position on the liquid surface from the plurality of sensors by moving either the plurality of sensors or each container, selects one of the measurement values acquired from the plurality of sensors, and measures the liquid level for the predetermined position on the liquid surface based on the selected measurement value. This allows the liquid level of the liquid in the container to be accurately measured. Because the control device acquires measurement values output from the plurality of sensors while moving either the plurality of sensors or each container, the liquid level can be accurately measured over a wide range of the liquid surface in the container.

[0008] The control device may measure the height of the liquid surface at a plurality of the predetermined positions on the liquid surface. The control device may measure the height of the liquid surface at a plurality of positions on the liquid surface, excluding positions on the liquid surface at and near the boundaries with the containers.

[0009] The control device may select one of the measurement values obtained from the plurality of sensors based on the correspondence between the plurality of sensors and the plurality of containers determined for each of the plurality of containers, and measure the height of the liquid surface at the specified position on the liquid surface based on the selected measurement value.

[0010] The control device may acquire the measurement values and measurement quality values for a predetermined position on the liquid surface from the plurality of sensors by moving either the plurality of sensors or each of the containers, and may select one of the measurement values acquired from the plurality of sensors based on the measurement quality value, and measure the height of the liquid surface for the predetermined position on the liquid surface based on the selected measurement value.

[0011] The measurement quality value may be the amount of light received that is reflected by the liquid surface. The plurality of sensors may have the same measurement center distance.

[0012] The control device may include a reference sensor that irradiates a reference surface of each container with distance measurement light from above, receives the light reflected by the reference surface, and outputs a measurement value, wherein the measurement center distance of each sensor and the measurement center distance of the reference sensor are the same, the measurement value output by each sensor includes the distance from each sensor to the liquid surface, and the measurement value output by the reference sensor includes the distance from the reference sensor to the reference surface, and the control device may acquire the measurement value output by the reference sensor and measure the height of the liquid surface at the specified position on the liquid surface based on the following formula. Liquid level = V1 - V2 + installation offset V1 is the difference between the distance from the reference sensor to the reference surface and the measurement center distance of the reference sensor, V2 is the difference between the distance from each sensor to the liquid level and the measurement center distance of each sensor, and the mounting offset is the difference between the mounting height of the reference sensor and the mounting height of each sensor. The plurality of sensors may be confocal sensors.

[0013] A measurement method for a measurement device according to one aspect of the present invention is a measurement method for a measurement device including a plurality of sensors that irradiate a distance measurement light from above onto the liquid surface of a liquid contained in one or more containers, receive light reflected from the liquid surface, and output measurement values, the plurality of sensors being attached at different heights, and a movement mechanism for moving either the plurality of sensors or the containers, the plurality of sensors being arranged in a line along the direction in which the plurality of sensors are moved or the direction in which the plurality of containers are moved, the measurement method including the steps of controlling the movement mechanism to move the plurality of sensors or one of the containers to obtain the measurement values for a predetermined position on the liquid surface from the plurality of sensors, and selecting one of the measurement values obtained from the plurality of sensors and measuring the height of the liquid surface at the predetermined position on the liquid surface based on the selected measurement value. Each step of the measurement method may be executed by a computer as a program. [Effects of the Invention]

[0014] According to the present invention, it is possible to provide a technique that can accurately measure the height of a liquid surface. [Brief explanation of the drawings]

[0015] [Figure 1] FIG. 1 is a perspective view of a cartridge according to the first embodiment. [Figure 2] 2(A) to 2(C) are schematic diagrams of the cartridge according to the first embodiment. [Figure 3] FIG. 3 is a schematic configuration diagram of the measurement device according to the first embodiment. [Figure 4] FIG. 4 is a side view of multiple sensors. [Figure 5] 5A and 5B are explanatory diagrams of the movement process of a plurality of sensors. [Figure 6] 6A and 6B are explanatory diagrams of patterns in which multiple sensors move over a tray. [Figure 7]FIG. 7 is an explanatory diagram of a measurement process using a plurality of sensors. [Figure 8] 8A and 8B are diagrams showing the positional relationship between the cartridge and a plurality of sensors. [Figure 9] FIG. 9 is a diagram illustrating an example of a process for measuring the height of the liquid surface at a predetermined position on the liquid surface in a container. [Figure 10] FIG. 10 is a diagram illustrating an example of a function block that can be used in the control device. [Figure 11] FIG. 11 is a diagram illustrating an example of a function block that can be used in the control device. [Figure 12] FIG. 12 is a diagram illustrating an example of logging data stored in the storage device. [Figure 13] FIG. 13 is a diagram illustrating an example of profile data generated by the control device. [Figure 14] FIG. 14 is a flowchart showing the flow of processing in which the control device acquires measurement values output from a plurality of sensors. [Figure 15] FIG. 15 is a flowchart showing the flow of processing by the control device to generate profile data. [Figure 16] FIG. 16 is a side view of a plurality of sensors. [Figure 17] FIG. 17 is a diagram showing the relationship between the measurement center distance of the confocal sensor and the amount of received light. [Figure 18] FIG. 18 shows data indicating the height of the liquid surface in the container. [Figure 19] FIG. 19 is a schematic configuration diagram of a measurement device according to the fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0016] Hereinafter, embodiments will be described with reference to the drawings. The embodiment described below is one aspect of the present application and does not limit the scope of the present application. <Application example> An example of a situation in which the present invention is applied will be described below. First Embodiment FIG. 1 is a perspective view of a cartridge 1 according to the first embodiment. FIGS. 2(A) to 2(C) are schematic diagrams of the cartridge 1 according to the first embodiment, with FIG. 2(A) being a plan view of the cartridge 1 and FIGS. 2(B) and 2(C) being side views of the cartridge 1. The cartridge 1 has a plurality of containers 2. In FIGS. 1 and 2, the cartridge 1 has a plurality of containers 2, but the cartridge 1 may have a single container 2. The container 2 can contain a liquid such as a reagent. In FIGS. 1 and 2, a plurality of cartridges 1 are placed on a tray 3, but a single cartridge 1 may be placed on the tray 3. The cartridge 1 shown in FIGS. 1 and 2 has pillar portions 4 for fixing the cartridge 1 on the tray 3 and support portions 5 for supporting the plurality of containers 2.

[0017] The cartridge 1 and the multiple containers 2 may be molded integrally, or the cartridge 1 and the multiple containers 2 may be molded separately. The cartridge 1 and the containers 2 may be formed from materials such as resin, glass, or metal. When the cartridge 1 and the multiple containers 2 are molded integrally, the cartridge 1 and the containers 2 may be made of the same material. The container 2 may be a groove (recess) provided in the cartridge 1. When the cartridge 1 and the multiple containers 2 are molded separately, the cartridge 1 and the containers 2 may be made of the same material or different materials. The container 2 may be detachable from the cartridge 1.

[0018] FIG. 3 is a schematic diagram of the measuring device 10 according to the first embodiment. The measuring device 10 includes a control device 11, a storage device 12, an input device 13, a display device 14, and a sensor unit 15. The control device 11 controls the storage device 12, the input device 13, the display device 14, and the sensor unit 15. The control device 11 includes a processor such as a CPU (Central Processing Unit), The control device 11 may be a programmable logic controller (PLC). The storage device 12 stores data such as the results of calculations performed by the control device 11. and information. The display device 14 outputs data and information such as the results of arithmetic processing by the control device 11, and outputs data and information stored in the storage device 12. The input device 13 is a device operated by the user, and may include, for example, a keyboard, buttons, a touch panel, etc. The measuring device 10 may also be provided with a communication device that transmits information to an external device (for example, an external computer or server, etc.).

[0019] The sensor unit 15 includes sensors 21 to 24 and a servo motor 25. The number of sensors included in the sensor unit 15 can be set arbitrarily and is not limited to the number of sensors shown in FIG. 3. The sensors 21 to 24, which serve as distance measurement sensors, irradiate an object with distance measurement light, receive the light reflected by the object, and output a measurement value. For example, white light or laser light may be used as the distance measurement light. The measurement values output from the sensors 21 to 24 are input to the control device 11. The sensors 21 to 24 may be confocal sensors, triangulation sensors, or the like. When the sensors 21 to 24 use triangulation sensors, the sensors 21 to 24 irradiate the object with laser light as distance measurement light. When the sensors 21 to 24 use confocal sensors, the sensors 21 to 24 irradiate the object with white light as distance measurement light and receive the light reflected by the object (light with a wavelength corresponding to the distance to the object). By using confocal sensors as the sensors 21 to 24, it is possible to measure the liquid level in the deep container 2, which has a small diameter and cannot be measured by a triangulation type sensor.

[0020] The servo motor 25 is a movement mechanism for moving the sensor unit 15. The control device 11 controls the servo motor 25 to move the sensor unit 15 in the horizontal direction, whereby the sensors 21 to 24 provided in the sensor unit 15 and the servo motor 25 move in the horizontal direction. The control device 11 acquires the measurement values output from the sensors 21 to 24.

[0021] FIG. 4 is a side view of sensors 21 to 24. Sensors 21 to 24 are arranged so that distance measurement light is emitted vertically downward, and the sensors 21 to 24 are installed at different heights. That is, sensors 21 to 24 are installed at different heights, and their vertical distances from the object are different. The sensors 21 to 24 have the same measurement center distance. In FIG. 4, the measurement center distances of sensors 21 to 24 are indicated by WD1 to WD4.

[0022] A measurement center distance is set for the sensors 21 to 24. The measurement center distance is the distance (focal length) at which the spot diameter of the distance measurement light emitted from the sensors 21 to 24 is smallest. For example, the measurable range (measurement target distance range) of the sensors 21 to 24 is a range of ±3 mm in the vertical direction from the measurement center distance of the sensors 21 to 24. Note that the measurable range of the sensors 21 to 24 is not limited to a range of ±3 mm in the vertical direction from the measurement center distance of the sensors 21 to 24, and may be set to another range. The difference between the mounting height of the sensor 22 and the mounting height of the sensor 23 (mounting height offset) may be the same value as the measurable range of the sensor 22 or 23. The difference between the mounting height of the sensor 23 and the mounting height of the sensor 24 (mounting height offset) may be the same value as the measurable range of the sensor 23 or 24.

[0023] 5(A) and (B) are explanatory diagrams of the movement process of the sensors 21 to 24. FIG. 5(A) is a diagram of the sensors 21 to 24 viewed from above, and FIG. 5(B) is a diagram of the sensors 21 to 24 viewed from the side. The sensors 21 to 24 are moved in the horizontal direction (in the X-axis direction in FIGS. 5(A) and 5(B)) to pass above the cartridge 1. While the sensors 21 to 24 are passing above the cartridge 1, the sensors 21 to 24 irradiate the cartridge 1 with distance-measuring light from above the cartridge 1. The sensors 21 to 24 receive the light reflected by the cartridge 1 and output a measurement value.

[0024] The sensors 21 to 24 are arranged side by side in the direction in which the sensors 21 to 24 move (the X-axis direction in FIGS. 5A and 5B). That is, the centers of the sensors 21 to 24 are offset from each other in the direction in which the sensors 21 to 24 move. Therefore, when the sensors 21 to 24 emit distance measurement light at the same timing, the irradiation positions of the distance measurement light on the sensors 21 to 24 are different. The sensor 21 is arranged offset from the sensors 22 to 24 in a direction perpendicular to the direction in which the sensors 21 to 24 move (the Y-axis direction in FIG. 5A). That is, the center of the sensor 21 is offset from the centers of the sensors 22 to 24 in the direction perpendicular to the direction in which the sensors 21 to 24 move.

[0025] When sensors 21 to 24 move, the center of sensor 21 passes above the upper surface of support part 5, but the center of sensor 21 does not pass above the liquid level of the liquid in the multiple containers 2. For example, if an imaginary line L1 that passes above the upper surface of support part 5 is drawn in the direction in which sensors 21 to 24 move, sensor 21 moves so that the center of sensor 21 passes on imaginary line L1. When sensors 21 to 24 move, the centers of each of sensors 22 to 24 pass above the liquid level of the liquid in the multiple containers 2. For example, if an imaginary line L2 that passes above the liquid level of the liquid in the multiple containers 2 is drawn in the direction in which sensors 21 to 24 move, sensors 22 to 24 move so that the centers of each of sensors 22 to 24 pass on imaginary line L2.

[0026] Sensor 21 measures the upper surface of support part 5 that supports container 2. That is, sensor 21 irradiates distance measurement light from above onto the upper surface of support part 5, which is the reference surface of container 2, receives the light reflected by the upper surface of support part 5, and outputs a measurement value. In this way, sensor 21 measures the upper surface of support part 5 of cartridge 1. Sensors 22 to 24 measure the liquid level of the liquid in container 2. That is, sensors 22 to 24 irradiate distance measurement light from above onto the liquid level of the liquid in container 2, receive the light reflected by the liquid level of the liquid in container 2, and output a measurement value. In this way, sensors 22 to 24 measure the liquid level of the liquid in container 2.

[0027] Sensors 22-24 for measuring the liquid level in each of the plurality of containers 2 are predetermined. The sensors 22-24 for measuring the liquid level in each of the containers 2 may be predetermined according to the depth of the container 2. In FIGS. 5(A) and 5(B), the containers 2A, 2B, and 2C have the same depth, the containers 2D, 2E, and 2F have the same depth, and the containers 2G and 2H have the same depth. Also, in FIGS. 5(A) and 5(B), the depth of the container 2A, the depth of the container 2D, and the depth of the container 2G are different from each other. For example, the sensor 22 may measure the liquid level in each of the containers 2A, 2B, and 2C, the sensor 23 may measure the liquid level in each of the containers 2D and 2E, and the sensor 24 may measure the liquid level in each of the containers 2F and 2G. The sensors 22-24 for measuring the liquid level in each of the containers 2 may be predetermined according to the shape of the container 2. The sensors 22 to 24 for measuring the liquid level in the container 2 may be determined in advance depending on the size (diameter) of the opening of the container 2 and the shape of the container 2.

[0028] 6A and 6B are explanatory diagrams of patterns in which the sensors 21 to 24 move on the tray 3. In the movement pattern of the sensors 21 to 24 shown in FIG. 6A (hereinafter referred to as "movement pattern A"), the sensors 21 to 24 start to move from the origin of the X-axis in the XY coordinate system toward the positive direction of the X-axis (X-axis + direction, X-axis plus direction). In addition, in movement pattern A, In this case, when changing cartridge 1, sensors 21-24 move in the + direction of the Y axis in the XY coordinate system (Y axis + direction, Y axis plus direction), return to the X axis origin, and resume movement from the X axis origin in the + direction of the X axis. In the case of movement pattern A, sensors 21-24 repeatedly move in the + direction of the X axis in the XY coordinate system. Thus, in movement pattern A, the movement directions of sensors 21-24 are the same when measuring cartridges 1A-1F.

[0029] In the movement pattern of the sensors 21-24 shown in FIG. 6B (hereinafter referred to as "movement pattern B"), the sensors 21-24 start moving from the origin of the X axis toward the positive direction of the X axis. Furthermore, in the case of movement pattern B, when the cartridge 1 is changed, the sensors 21-24 move toward the positive direction of the Y axis and resume moving toward the negative direction of the X axis. In the case of movement pattern B, the sensors 21-24 alternately move toward the positive direction of the X axis in the XY coordinate system and toward the negative direction of the X axis in the XY coordinate system. In the movement pattern B, when measuring cartridges 1A, 1C, and 1E, the sensors 21-24 move toward the positive direction of the X axis in the XY coordinate system. In the movement pattern B, when measuring cartridges 1B, 1D, and 1F, the sensors 21-24 move toward the negative direction of the X axis in the XY coordinate system. In this way, in movement pattern B, the movement direction of the sensors 21 to 24 when measuring the cartridges 1A, 1C, and 1E is opposite to the movement direction of the sensors 21 to 24 when measuring the cartridges 1B, 1D, and 1F.

[0030] FIG. 7 is an explanatory diagram of a measurement process using sensors 22 to 24. FIG. 7 is a diagram showing measurement positions of the liquid level of the liquid contained in container 2. FIG. 7 shows a state in which liquid is contained in container 2. In the example shown in FIG. 7, positions in the X-axis direction in the XY coordinate system corresponding to measurement positions P0 to P9 (10 locations) of the liquid level in container 2 are registered as parameters in storage device 12. The number of measurement positions of the liquid level in container 2 is not limited to 10, and may be any other number. The number of measurement positions of the liquid level in container 2 may be 1 to 9, or may be 11 or more.

[0031] When the sensors 22 to 24 measure the liquid level of the liquid in the container 2, the control device 11 uses the same parameters for the sensors 22 to 24. As a result, the sensors 22 to 24 each measure a plurality of points (P0 to P9 in the example shown in FIG. 7) on the liquid level of the liquid in the container 2. However, since the sensors 22 to 24 are arranged with their positions in the X-axis direction of the XY coordinates shifted from one another, the sensors 22 to 24 measure the liquid level of the liquid in the container 2 at different times. By the sensors 22 to 24 measuring the liquid level of the liquid in the container 2 at different times, the sensors 22 to 24 can each measure the same position on the liquid level of the liquid in the container 2. In other words, the measurement positions of the sensors 22 to 24 on the XY coordinates are the same in the X-axis direction and the Y-axis direction.

[0032] Furthermore, when sensor 21 measures the upper surface (reference surface) of support unit 5 that supports container 2, control device 11 sets the parameters used for sensor 21 and the parameters used for sensors 22 to 24 to be the same. This allows sensor 21 to measure multiple locations on the upper surface of support unit 5 that supports container 2. Sensors 21 to 24 are arranged such that the position of sensor 21 in the Y-axis direction in the XY coordinate system is shifted from the positions of sensors 22 to 24 in the Y-axis direction in the XY coordinate system. Therefore, the measurement position of sensor 21 in the XY coordinate system matches the measurement positions of sensors 22 to 24 in the XY coordinate system in the X-axis direction, but is shifted from the measurement positions of sensors 22 to 24 in the XY coordinate system in the Y-axis direction.

[0033] 8A is a diagram showing the positional relationship between the cartridge 1 and the sensors 21 to 24 when the position of the sensor 24 in the XY coordinate system is on the negative side of the X axis relative to the position of the container 2A. 8A shows a top view of the cartridge 1 and sensors 21 to 24. Fig. 8A shows the state in which the sensor 24 is positioned at the origin of the X axis in the XY coordinate system, before any measurement is performed on the cartridge 1.

[0034] Fig. 8(B) is a diagram showing the positional relationship between the cartridge 1 and the sensors 21-24 when the position of the sensor 21 in the XY coordinate system is on the +X-axis side of the position of the container 2H. Fig. 8(B) shows a diagram of the cartridge 1 and the sensors 21-24 viewed from above. Fig. 8(B) shows the position of the sensor 21 in the XY coordinate system is on the +X-axis side of the position of the container 2H, in which case the cartridge 1 is changed or the measurement process is terminated.

[0035] In the case of movement pattern A shown in Figure 6(A), the order of measuring the liquid level in each container 2 is always the order of measuring measurement positions P0, P1, ... P9. In the case of movement pattern B shown in Figure 6(B), the order of measuring the liquid level in each container 2 varies for each cartridge 1, with the order of measuring measurement positions P0, P1, ... P9 (positive direction) and the order of measuring measurement positions P9, P8, ... P0 (negative direction). In other words, in the case of movement pattern B shown in Figure 6(B), the direction of measuring the liquid level in each container 2 is set each time a cartridge 1 is measured.

[0036] The control device 11 constantly monitors the positions of the sensors 21-24 in the XY coordinate system by acquiring signals from the sensor unit 15. When the measurement positions in the parameters registered in the storage device 12 match the positions of the sensors 21-24 in the X-axis direction in the XY coordinate system, the control device 11 acquires the measurement values output from the sensors 21-24. In this way, the control device 11 acquires measurement values for predetermined positions on the liquid surface of the liquid in each container 2 from the sensors 22-24. The predetermined positions on the liquid surface of the liquid in each container 2 may be one or more. The control device 11 also acquires measurement values for predetermined positions on the upper surface of the support 5 from the sensor 21. The predetermined positions on the upper surface of the support 5 may be one or more. The control device 11 stores the measurement values acquired from the sensors 21-24 in the storage device 12.

[0037] The control device 11 selects one of the measurement values acquired from the sensors 22 to 24, and based on the selected measurement value, measures the liquid level at a predetermined position on the liquid surface in each container 2. This makes it possible to accurately measure the liquid level in each container 2. By changing the size of the cartridge 1 according to the scale of the container 2, it is possible to accommodate containers 2 of large or small scale.

[0038] Since the control device 11 acquires the measurement values of the sensors 21-24 while moving the sensors 21-24, it is possible to accurately measure the height of the liquid level in the container 2 even when the liquid level in the container 2 has a U-shape or other shape. Furthermore, since the control device 11 acquires the measurement values of the sensors 21-24 while moving the sensors 21-24, it is possible to accurately measure the height of the liquid level over a wide range of the liquid level in the container 2.

[0039] When the sensors 21-24 are moved and the control device 11 acquires the measurement values of the sensors 21-24, there is no fluctuation in the liquid level in the container 2. If the liquid level in the container 2 fluctuates, there is a possibility that the accuracy of the measurement of the liquid level height in the container 2 may decrease. Since there is no need to ensure a waiting time until the liquid level in the container 2 stops fluctuating, the time required to measure the liquid level height in the container 2 is shortened.

[0040] The control device 11 may select one of the measured values acquired from the sensors 22 to 24 based on the correspondence relationship between the sensors 22 to 24 and the plurality of containers 2 determined for each of the plurality of containers 2. The correspondence relationship between the sensors 22 to 24 and the plurality of containers 2 may be determined for each of the plurality of containers 2 using the depth of the container 2, the size and shape of the opening, etc. The control device 11 may select one of the measured values acquired from the sensors 22 to 24 based on the correspondence relationship between the sensors 22 to 24 and the plurality of containers 2 determined for each of the plurality of containers 2. When measuring the height of the liquid surface at a predetermined position on the liquid surface of the liquid in each container 2, the selected measurement value and the measurement value obtained from the sensor 21 may be used to measure the height of the liquid surface at a predetermined position on the liquid surface of the liquid in each container 2.

[0041] 9 is a diagram illustrating an example of a process for measuring the height of the liquid surface at a predetermined position on the liquid surface in the container 2. FIG. 9 shows a state in which the liquid is contained in the container 2. Here, a case will be described in which the height of the liquid surface at a predetermined position on the liquid surface in the container 2 is measured using the measurement values output from the sensors 21 and 22. Note that the explanation using FIG. 9 also applies to a case in which the height of the liquid surface at a predetermined position on the liquid surface in the container 2 is measured using the measurement values output from the sensors 21 and 23 or 24.

[0042] The control device 11 may calculate the height of the liquid surface at a predetermined position on the liquid surface of the liquid in the container 2 based on the following formula 1. Liquid level height = Liquid level distance - (Reference level distance - Mounting offset) (Equation 1) In FIG. 9, the height of the liquid level is indicated by H1. The liquid level distance is the distance from the sensor 22 to the liquid level of the liquid in the container 2. The sensor 22 may output the liquid level distance as a measurement value. In FIG. 9, the liquid level distance is indicated by D1. The reference level distance is the distance from the sensor 21 to the upper surface 51 of the support part 5. Here, the upper surface 51 of the support part 5 is used as the reference level. The sensor 21 may output the reference level distance as a measurement value. The mounting offset is the difference between the mounting height of the sensor 21 (the mounting position of the sensor 21 in the vertical direction) and the mounting height of the sensor 22 (the mounting position of the sensor 22 in the vertical direction). In FIG. 9, the difference (mounting offset) between the mounting heights of the sensors 21 and 22 is indicated by OS1. The mounting offset is pre-stored in the storage device 12. The control device 11 may acquire the reference surface distance from the sensor 21, acquire the liquid surface distance from the sensor 22, read the mounting offset from the storage device 12, and calculate the liquid surface height at a predetermined position on the liquid surface of the liquid in the container 2 based on the above formula 1. In Fig. 9, the measurable range of the sensor 21 is indicated by R1, and the measurable range of the sensor 22 is indicated by R2.

[0043] The control device 11 may calculate the height of the liquid surface at a predetermined position on the liquid surface of the liquid in the container 2 based on the following formula 2. Liquid level = (WD1-V1)-(WD2-V2) + mounting offset (Equation 2) WD1 is the measurement center distance of sensor 21, and WD2 is the measurement center distance of sensor 22. WD1 and WD2 are the same value. V1 is the difference between the reference surface distance and WD1. V2 is the difference between the liquid surface distance and WD2. By storing WD1 in advance in the memory (storage unit) of sensor 21, sensor 21 may output V1 as a measurement value. By storing WD2 in advance in the memory (storage unit) of sensor 22, sensor 22 may output V2 as a measurement value. In addition, WD1 and WD2 are stored in advance in storage device 12. Control device 11 may acquire V1 from sensor 21 and V2 from sensor 22, read out the mounting offset, WD1, and WD2 from storage device 12, and calculate the liquid level height at a predetermined position on the liquid surface of container 2 based on the above equation 2.

[0044] Since WD1 and WD2 have the same value, the above equation 2 can be expressed as the following equation 3. Liquid level = V1 - V2 + Mounting offset (Equation 3) Therefore, the control device 11 may acquire V1 from the sensor 21, acquire V2 from the sensor 22, read the mounting offset from the memory device 12, and calculate the liquid level for a predetermined position on the liquid surface of the liquid in the container 2 based on the above equation 3.

[0045] By measuring the liquid level at a predetermined position in the liquid surface of the container 2 using the measurement values output from the sensors 21 to 24, the liquid level of the liquid in the container 2 can be more accurately determined. It is also possible to measure the height of the liquid surface at a predetermined position in the container 2 using the measurement values output from the sensors 22 to 24, without using the measurement value output from the sensor 21.

[0046] The control device 11 acquires measurement values of the sensor 21 at a plurality of predetermined positions on the upper surface of the support part 5 until measurement of the cartridge 1 is completed. Therefore, even if the height of the upper surface of the support part 5 at the front end side of the cartridge 1 differs from the height of the upper surface of the support part 5 at the rear end side of the cartridge 1, that is, even if the upper surface of the support part 5 changes, the height of the liquid level in the container 2 can be accurately measured.

[0047] 10 and 11 are diagrams showing examples of function blocks that can be used in the control device 11. Fig. 10 shows a measurement value logging function block (FB) 100, and Fig. 11 shows a profile generation function block (FB) 200. The profile generation FB 200 may be a fan (FUN).

[0048] 10, the measurement value logging FB 100 includes input units 110-118 and output units 120-122. The input unit 110, indicated as "Execute," accepts an input indicating whether or not to execute the measurement process for the cartridge 1. As an example, the input unit 110 accepts an input of "True" or "False." Position data of the sensors 21-24 in the X-axis direction of the XY coordinate system is input to the input unit 111. Position data of the sensors 21-24 is input to the input unit 111 each time the sensors 21-24 move. In other words, the current position values of the sensors 21-24 in the X-axis direction of the XY coordinate system are input to the input unit 111.

[0049] The input unit 112 receives input of measurement value data output from the sensor 21. The input unit 113 receives input of measurement value data output from the sensor 22. The input unit 114 receives input of measurement value data output from the sensor 23. The input unit 115 receives input of measurement value data output from the sensor 24. The input unit 116 receives input of data relating to the measurement pattern. As the data relating to the measurement pattern, for example, data relating to movement pattern A or movement pattern B may be input to the input unit 116. The input unit 116 receives input of parameters. As the parameters, for example, data of positions in the X-axis direction in the XY coordinate system corresponding to a plurality of measurement positions (P0 to P9) of the liquid surface in the container 2 may be input to the input unit 116.

[0050] When the processing of the measurement value logging FB 100 is completed normally, the output unit 120 indicated as "Done" outputs a signal indicating that the processing of the measurement value logging FB 100 is completed normally.

[0051] The output unit 121 outputs logging data of the sensor 21. The measurement value logging FB 100 acquires measurement values of the sensor 21 for a plurality of predetermined positions on the upper surface of the support unit 5 based on data input to the input unit 111, data input to the input unit 112, and parameters input to the input unit 116. The plurality of predetermined positions on the upper surface of the support unit 5 correspond to a plurality of measurement positions (P0 to P9) of the liquid level in the container 2. The measurement value logging FB 100 outputs the measurement values of the sensor 21 for the plurality of predetermined positions on the upper surface of the support unit 5 from the output unit 121 as logging data of the sensor 21.

[0052] The output unit 122 outputs logging data of the sensor 22. The measurement value logging FB 100 acquires measurement values of the sensor 22 for a plurality of measurement positions (P0 to P9) of the liquid level in the container 2 based on data input to the input unit 111, data input to the input unit 113, and parameters input to the input unit 116. The measurement value logging FB 100 acquires measurement values of the sensor 22 for a plurality of measurement positions (P0 to P9) of the liquid level in the container 2 based on data input to the input unit 111, data input to the input unit 113, and parameters input to the input unit 116. The measurement values of the sensor 22 at a plurality of measurement positions (P0 to P9) of the liquid level in the vessel 2 are output from the output unit 122 as logging data of the sensor 22.

[0053] The output unit 123 outputs logging data of the sensor 23. The measurement value logging FB 100 acquires measurement values of the sensor 23 for a plurality of measurement positions (P0 to P9) of the liquid level in the container 2 based on data input to the input unit 111, data input to the input unit 114, and parameters input to the input unit 116. The measurement value logging FB 100 outputs the measurement values of the sensor 23 for the plurality of measurement positions (P0 to P9) of the liquid level in the container 2 from the output unit 123 as logging data of the sensor 23.

[0054] The output unit 124 outputs logging data of the sensor 24. The measurement value logging FB 100 acquires measurement values of the sensor 24 for a plurality of measurement positions (P0 to P9) of the liquid level in the container 2 based on data input to the input unit 111, data input to the input unit 115, and parameters input to the input unit 116. The measurement value logging FB 100 outputs the measurement values of the sensor 24 for the plurality of measurement positions (P0 to P9) of the liquid level in the container 2 from the output unit 124 as logging data of the sensor 24.

[0055] 11, the profile generation FB 200 includes input units 210 to 214 and output units 220 and 221. When the processing of the measurement value logging FB 100 is completed normally, a signal indicating that the processing of the measurement value logging FB 100 has been completed normally is input to the input unit 210 indicated as "Execute." The logging data output from the output units 121 to 124 is input to the input units 211 to 214.

[0056] When the processing of the profile generation FB 200 is completed normally, the output unit 220 indicated as "Done" outputs a signal indicating that the processing of the profile generation FB 200 is completed normally.

[0057] The output unit 221 outputs the profile data. The profile generation FB 200 calculates the height of the liquid level at the plurality of measurement positions (P0 to P9) of the liquid level in the container 2 based on the measurement values of the sensor 21 at the plurality of predetermined positions on the upper surface of the support unit 5 and the measurement values of the sensors 22 to 24 at the plurality of measurement positions (P0 to P9) of the liquid level in the container 2. The profile generation FB 200 outputs the height of the liquid level at the plurality of measurement positions (P0 to P9) of the liquid level in the container 2 from the output unit 221 as profile data.

[0058] As described with reference to FIG. 10 , the control device 11 acquires the measurement values of the sensor 21 at a plurality of predetermined positions on the upper surface of the support part 5 as logging data of the sensor 21. The control device 11 may store the measurement values of the sensor 21 at a plurality of predetermined positions on the upper surface of the support part 5 in the storage device 12. As described with reference to FIG. 10 , the control device 11 acquires the measurement values of the sensors 22 to 24 at a plurality of measurement positions of the liquid level in the container 2 as logging data of the sensors 22 to 24. The control device 11 may store the measurement values of the sensors 22 to 24 at a plurality of measurement positions of the liquid level in the container 2 in the storage device 12. The control device 11 may also acquire the measurement value of the sensors 22 to 24 at one measurement position of the liquid level in the container 2 and store it in the storage device 12.

[0059] 11, the control device 11 calculates the height of the liquid level at a plurality of measurement positions of the liquid level in the container 2. The control device 11 may store the height of the liquid level at a plurality of measurement positions of the liquid level in the container 2 in the storage device 12. The control device 11 may also calculate the height of the liquid level at one measurement position of the liquid level in the container 2 and store it in the storage device 12.

[0060] In the first embodiment, sensors 22 to 24 that measure the liquid level in each of the plurality of containers 2 are predetermined. Therefore, the control device 11 calculates the liquid level at one or more measurement positions for each of the plurality of containers 2. For example, if it is determined that the sensor 22 measures the liquid level in each of the containers 2A, 2B, and 2C, the control device 11 uses the measurement value of the sensor 22 to calculate the liquid level at one or more measurement positions for the liquid level in each of the containers 2A, 2B, and 2C. For example, if it is determined that the sensor 23 measures the liquid level in each of the containers 2D, 2E, and 2F, the control device 11 uses the measurement value of the sensor 23 to calculate the liquid level at one or more measurement positions for the liquid level in each of the containers 2D, 2E, and 2F. For example, if it is determined that the sensor 24 measures the liquid level in each of the containers 2G and 2H, the control device 11 uses the measurement value of the sensor 24 to calculate the liquid level at one or more measurement positions for the liquid level in each of the containers 2G and 2H.

[0061] FIG. 12 is a diagram showing an example of logging data stored in storage device 12. FIG. 12 shows logging data stored in storage device 12 when the liquid levels of the liquid in containers 2A to 2E are measured. The "Position" column in FIG. 12 indicates, in the case of sensor 21, a predetermined position on the top surface of support member 5 measured by sensor 21, and in the case of sensors 22 to 24, indicates the measurement position of the liquid level in each container 2 measured by sensors 22 to 24. +0 to +9 in FIG. 12 correspond to multiple measurement positions (P0 to P9) of the liquid level in container 2A in the case of sensors 22 to 24. +10 to +19 in FIG. 12 correspond to multiple measurement positions (P0 to P9) of the liquid level in container 2B in the case of sensors 22 to 24. +20 to +29 in FIG. 12 correspond to multiple measurement positions (P0 to P9) of the liquid level in container 2C in the case of sensors 22 to 24. In the case of sensors 22 to 24, +30 to +39 in Fig. 12 correspond to a plurality of measurement positions (P0 to P9) of the liquid level in container 2D. In the case of sensors 22 to 24, +40 to +49 in Fig. 12 correspond to a plurality of measurement positions (P0 to P9) of the liquid level in container 2E.

[0062] 12, a plurality of predetermined positions on the upper surface of the support part 5 measured by the sensor 21 and the measurement values of the sensor 21 for the plurality of predetermined positions on the upper surface of the support part 5 are associated and stored in the storage device 12. As shown in FIG. 12, a plurality of measurement positions of the liquid level in each container 2 measured by the sensors 22 to 24 and the measurement values of the sensors 22 to 24 for the plurality of measurement positions of the liquid level in each container 2 are associated and stored in the storage device 12.

[0063] FIG. 13 is a diagram showing an example of profile data generated by the control device 11. FIG. 13 shows the liquid level in the profile data when the liquid level in the containers 2A to 2D is measured. As shown in FIG. 13, a plurality of measurement positions of the liquid level in the containers 2A to 2D are associated with the liquid level heights at the plurality of measurement positions of the liquid level in the containers 2A to 2D. Furthermore, the control device 11 may generate profile data for each cartridge 1.

[0064] Fig. 14 is a flowchart showing the flow of processing by which the control device 11 acquires measurement values output from the sensors 21 to 24. Note that the flowchart shown in Fig. 14 is an example, and other processing and steps not shown may be further included as long as no contradiction or inconsistency occurs in the processing results (the same applies to other flowcharts described below).

[0065] The control device 11 determines whether the sensor unit 15 has reached the sampling start monitoring position (S1). The sampling start monitoring position can be calculated by (sampling start position - (movement speed x measurement period). The sampling start position is, for example, a position in the X-axis direction in the XY coordinate system corresponding to the measurement position P0 of the liquid level in the container 2A of the cartridge 1. The movement speed is, for example, the movement speed of the sensor unit 15. The measurement period is, For example, it is the period at which the control device 11 acquires the measurement values from the sensors 21 to 24.

[0066] When the sensor unit 15 reaches the sampling start monitoring position (S1; YES), the control device 11 starts acquiring the measurement values output from the sensors 21-24 (S2). When the measurement position in the parameters registered in the storage device 12 matches the position of the sensors 21-24 in the X-axis direction in the XY coordinate system, the control device 11 acquires the measurement values output from the sensors 21-24 as logging data (S3). The control device 11 stores the logging data in the storage device 12 (S4).

[0067] The control device 11 determines whether the sensor unit 15 has reached the sampling end monitoring position (S5). The sampling end monitoring position can be calculated by adding the sampling end position to the moving speed and the measurement period. The sampling end position is, for example, the position in the X-axis direction in the XY coordinate system that corresponds to the measurement position P9 of the liquid level in the container 2H of the cartridge 1.

[0068] If the sensor unit 15 has not reached the sampling end monitoring position (S5; NO), the process returns to S3. If the sensor unit 15 has reached the sampling end monitoring position (S5; YES), the control device 11 determines whether measurement processing has been performed on all cartridges 1 on the tray 3 (S6). If there is a cartridge 1 for which measurement processing has not been performed (S6; NO), the control device 11 changes the cartridge 1 by moving the sensor unit 15 based on data related to the measurement pattern (S7), and the process returns to S1. If measurement processing has been performed on all cartridges 1 on the tray 3 (S6; YES), the process of the flowchart shown in FIG. 14 ends.

[0069] 15 is a flowchart showing the flow of processing by the control device 11 to generate profile data. The control device 11 sets a data extraction start position as a read pointer and extracts from the storage device 12 the measurement values of the sensor 21, which is the reference sensor (S11). Specifically, the control device 11 extracts from the storage device 12 the measurement values of the sensor 21 at one or more predetermined positions on the upper surface of the support portion 5. The control device 11 extracts from the storage device 12 the measurement values of the sensors 22 to 24, which are liquid level measurement sensors (S12). Specifically, the control device 11 extracts from the storage device 12 the measurement values of the sensors 22 to 24 at one or more measurement positions of the liquid level in the container 2. The control device 11 calculates the liquid level at one or more measurement positions of the liquid level in the container 2 based on the measurement value of the sensor 21 and any of the measurement values of the sensors 22 to 24 (S13).

[0070] The control device 11 generates profile data of the liquid level at one or more measurement positions of the liquid level in the container 2 (S14). The control device 11 stores the profile data in the storage device 12 (S15). The control device 11 repeats the processes of S11 to S15 until the read pointer reaches the data extraction end position or the number of extractions reaches the number of samples. Note that if there is a contradiction in the extracted data, the control device 11 may interrupt the process of the flowchart shown in FIG. 15 as an error has occurred.

[0071] FIG. 16 is a side view of the sensors 22 to 24. As shown in FIG. 16, the sensors 22 to 24 used to measure the height of the liquid surface in the container 2 have a narrow measurable range (measurement target distance range). In FIG. 16, the measurable range of the sensor 22 is indicated by R2, the measurable range of the sensor 23 is indicated by R3, and the measurable range of the sensor 24 is indicated by R4. In FIG. 16, the difference (mounting offset) between the mounting height of the sensor 22 and the mounting height of the sensor 23 is indicated by OS2, the difference (mounting offset) between the mounting height of the sensor 23 and the mounting height of the sensor 24 is indicated by OS3, and the difference (mounting offset) between the mounting height of the sensor 22 and the mounting height of the sensor 24 is indicated by OS4. By shifting the mounting heights of the sensors 22 to 24 by the measurable ranges of the sensors 22 to 24, This prevents the measurable ranges of the sensors 22 to 24 from overlapping, thereby achieving a wide measurable range (R2+R3+R4).

[0072] When measuring the liquid level in the container 2, the liquid level in the container 2 must be present within the measurable range of the sensors 22 to 24. If the liquid level in the container 2 is not present within the measurable range of the sensors 22 to 24, it may be impossible to accurately measure the liquid level in the container 2. Therefore, it is necessary to determine in advance which one of the sensors 22 to 24 will be used for each container 2. A correspondence between the sensors 22 to 24 and the multiple containers 2 may be determined for each of the multiple containers 2 so that the condition that the liquid level in each container 2 is present within the measurable range of the sensors 22 to 24 is met. Repeated trial and error is used to determine in advance which one of the sensors 22 to 24 will be used for each container 2.

[0073] Second Embodiment A second embodiment will be described. In the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and the description thereof will be omitted. In the second embodiment, a method for measuring the height of the liquid surface in the container 2 without determining in advance which of the sensors 22 to 24 to use for each container 2 will be described.

[0074] (Preparation 1) The sensors 22 to 24 are set so that they output abnormal values outside the measurable range of the sensors 22 to 24. Details of preparation 1 will be explained. Settings are made for the sensors 22 to 24 so that they output measurement values and measurement quality values. The measurement quality value is, for example, the amount of light received that is reflected by the liquid surface of the liquid in the container 2. By using confocal sensors as the sensors 22 to 24, settings are made for the sensors 22 to 24 so that they output measurement values and measurement quality values.

[0075] Figure 17 is a diagram showing the relationship between the measurement center distance of the confocal sensor and the amount of received light. The horizontal axis of Figure 17 represents the measurement center distance of the confocal sensor, and the vertical axis of Figure 17 represents the amount of received light. In this way, the measurement value output from the confocal sensor includes the amount of received light as a measurement quality value. Figure 17 shows a case where an object is present within the measurable range of the confocal sensor. The closer the measurement center distance of the confocal sensor is to 0, the greater the amount of received light. Outside the measurable range of the confocal sensor, there is no amount of received light, and the confocal sensor outputs an abnormal value.

[0076] (Step 1) The control device 11 acquires the measurement values and measurement quality values of the sensors 22-24 as logging data of the sensors 22-24. The details of step 1 will be explained. The control device 11 acquires the measurement values and measurement quality values of the liquid level at one or more predetermined positions in each container 2 from the sensors 22-24. In this way, the control device 11 acquires the measurement values and measurement quality values of the sensors 22-24 at one or more measurement positions in the liquid level in the container 2 as logging data of the sensors 22-24. The control device 11 may store the measurement values and measurement quality values of the sensors 22-24 at one or more measurement positions in the liquid level in the container 2 in the storage device 12.

[0077] (Step 2) Based on the measurement quality value, the control device 11 selects one of the measurement values acquired from the sensors 22 to 24, and based on the selected measurement value, measures the liquid level at a predetermined position on the liquid surface in each container 2. When measuring the liquid level at a predetermined position on the liquid surface in each container 2, the control device 11 may measure the liquid level at the predetermined position on the liquid surface in each container 2 using the selected measurement value and the measurement value acquired from the sensor 21.

[0078] According to the second embodiment, one of the sensors 22 to 24 is used for each container 2. The height of the liquid surface in the container 2 can be accurately measured without having to determine in advance which of the sensors 22 to 24 to use for each container 2. This reduces the amount of work required for trial and error to determine in advance which of the sensors 22 to 24 to use for each container 2. Furthermore, since it is not necessary to determine in advance which of the sensors 22 to 24 to use for each container 2, the setup at the time of starting up the measuring device 10 is simplified, improving usability.

[0079] <Third embodiment> A third embodiment will now be described. In the third embodiment, the same components as those in the first and second embodiments are denoted by the same reference numerals as those in the first and second embodiments, and the description thereof will be omitted.

[0080] For example, if the depth of the container 2 is great, it may not be possible to measure the entire liquid level in the container 2. FIG. 18 shows data indicating the liquid level of the liquid in the container 2. The horizontal axis of FIG. 18 indicates the measurement position of the liquid level in the container 2, and the vertical axis of FIG. 18 indicates the relative height of the liquid level in the container 2 from the reference point. FIG. 18 shows samples (1) to (5), and outliers or noise are included in the circled areas of samples (3) and (4). If profile data of the liquid level in the container 2 is generated using data such as samples (3) and (4), the generated profile data will contain noise or outliers. In order to avoid generating profile data containing noise or outliers, the third embodiment describes a method for measuring the liquid level in the container 2 while excluding the boundary between the container 2 and the liquid in the container 2 and positions near the boundary.

[0081] A method for measuring the container 2A using the sensor 22 and determining whether or not the measurement values output from the sensor 22 contain noise (abnormal values) will be described. Here, ten measurement values are output from the sensor 22, and the ten measurement values output from the sensor 22 are the measurement values of the sensor 22 at measurement positions P0 to P9 of the liquid level in the container 2A. The control device 11 calculates the rate of change between two measurement values output consecutively from the sensor 22. For example, the two measurement values output consecutively from the sensor 22 are the measurement values of the sensor 22 at measurement positions P0 and P1 of the liquid level in the container 2A. The control device 11 determines whether or not the rate of change between the two measurement values output consecutively from the sensor 22 is equal to or greater than a threshold. The control device 11 determines whether or not the rate of change between the two measurement values output consecutively from the sensor 22 is equal to or greater than a threshold. In other words, the control device 11 determines whether or not the slope of a line connecting the two measurement values output consecutively from the sensor 22 is within a certain range. The control device 11 determines whether or not the rate of change between two measurement values that are successively output from the sensor 22 is equal to or greater than a threshold value for all ten measurement values that are successively output from the sensor 22.

[0082] If the rate of change between two measurement values successively output from sensor 22 is equal to or greater than a threshold value, control device 11 determines that the two measurement values successively output from sensor 22 are noise. In other words, if the slope of a line connecting two measurement values successively output from sensor 22 does not fall within a certain range, control device 11 determines that the two measurement values successively output from sensor 22 are noise.

[0083] The control device 11 determines whether the rate of change between two measurement values output consecutively from the sensor 22 is less than a threshold value for all measurement values output consecutively from the sensor 22 by a predetermined number or more. That is, the control device 11 determines whether the slope of each line connecting the measurement values output consecutively from the sensor 22 by a predetermined number or more falls within a certain range. When the rate of change between two measurement values output consecutively from the sensor 22 is less than a threshold value for all measurement values output consecutively from the sensor 22 by a predetermined number or more, the control device 11 determines that the measurement values output consecutively from the sensor 22 by a predetermined number or more are valid values. That is, when the slope of each line connecting the measurement values output consecutively from the sensor 22 by a predetermined number or more falls within a certain range, the control device 11 determines that the measurement values output consecutively from the sensor 22 by a predetermined number or more are valid values. The measurement values that are continuously output are determined to be valid values.

[0084] The control device 11 excludes measurement values determined to be noise from the ten measurement values output from the sensor 22, and stores the measurement values determined to be valid from the ten measurement values output from the sensor 22 in the memory device 12. The control device 11 calculates the height of the liquid level at a plurality of measurement positions of the liquid level in the container 2A based on the measurement values determined to be valid from the ten measurement values output from the sensor 22.

[0085] The control device 11 can measure the liquid level of the liquid in the container 2, excluding positions in the liquid in the container 2 that are at the boundary with the container 2 and positions in the vicinity of the boundary, by excluding the measurement values determined to be noise from among the plurality of measurement values output from the sensors 22 to 24. In other words, the control device 11 can measure the liquid level of the liquid in the container 2, excluding positions in the liquid in the container 2 that are at the boundary with the container 2 and positions in the vicinity of the boundary, by using the measurement values determined to be valid from among the plurality of measurement values output from the sensors 22 to 24.

[0086] <Fourth embodiment> A fourth embodiment will be described. In the fourth embodiment, the same components as those in the first to third embodiments are assigned the same reference numerals as those in the first to third embodiments, and the description thereof will be omitted. In the first to third embodiments, an example of a process in which the sensors 21 to 24 are moved and the control device 11 acquires the measurement values of the sensors 21 to 24 is described. However, the present invention is not limited to this example, and one or more containers 2 may be moved and the control device 11 may acquire the measurement values of the sensors 21 to 24.

[0087] FIG. 19 is a schematic diagram of a measuring device 10 according to a fourth embodiment. The measuring device 10 includes a control device 11, a storage device 12, an input device 13, a display device 14, a sensor unit 15, and a moving device 61 on which a tray 3 can be placed. The control device 11 controls the storage device 12, the input device 13, the display device 14, the sensor unit 15, and the moving device 61. The moving device 61 has a servo motor (moving mechanism) 62 that can move the tray 3. The servo motor 62 moves the tray 3, thereby moving one or more cartridges 1 placed on the tray 3. Furthermore, the movement of the multiple cartridges 1 moves one or more containers 2. In this way, the servo motor 62 included in the moving device 61 moves one or more containers 2. The sensors 21 to 24 are arranged side by side along the direction in which the one or more containers 2 move.

[0088] The control device 11 may move either the sensors 21-24 or each container 2 by controlling the servo motor 25 of the sensor unit 15 or the servo motor 62 of the moving device 61. The control device 11 may move either the sensors 21-24 or each container 2 by controlling the servo motor 25 of the sensor unit 15 or the servo motor 62 of the moving device 61. The control device 11 may move either the sensors 21-24 or each container 2 by controlling the servo motor 25 of the sensor unit 15 and the servo motor 62 of the moving device 61.

[0089] <Modification> In the first to fourth embodiments, an example has been described in which a plurality of measurement positions are set along a single straight line passing through the liquid level in the container 2. This example is not limiting, and a plurality of measurement positions may be set along a plurality of straight lines passing through the liquid level in the container 2. By setting a plurality of measurement positions along a plurality of straight lines passing through the liquid level in the container 2, the number of measurement positions for the liquid level in the container 2 increases compared to when a plurality of measurement positions are set along a single straight line passing through the liquid level in the container 2. This makes it possible to accurately measure the liquid level over a wider range of the liquid level in the container 2. Therefore, the liquid level in the container 2 can be measured more accurately.

[0090] Furthermore, each of the processes described in the first to fourth embodiments may be understood as a measurement method, a control method, or the like, of the measuring device 10. Each of the processes described in the first to fourth embodiments may be understood as a method executed by a computer. Furthermore, a program for causing a computer to execute each of the processes described in the first to fourth embodiments may be provided to the computer via a network or from a computer-readable recording medium that non-temporarily stores data. Note that the present invention can be configured by combining each of the above means and processes with each other as much as possible.

[0091] <Additional Notes> a plurality of sensors (22-24) that irradiate a distance measuring light from above onto the liquid surface contained in one or more containers (2), receive the light reflected from the liquid surface, and output a measurement value, the plurality of sensors (22-24) being attached at different heights; a movement mechanism (25, 62) for moving either the plurality of sensors (22 to 24) or each of the containers (2); a control device (11) that controls the moving mechanisms (25, 62) and acquires measurement values output from the plurality of sensors (22 to 24); Equipped with the plurality of sensors (22 to 24) are arranged side by side along the direction in which the plurality of sensors (22 to 24) move or along the direction in which each of the containers (2) moves; the control device (11) acquires the measurement values for a predetermined position on the liquid surface from the plurality of sensors (22-24) by moving either the plurality of sensors (22-24) or the container (2), selects one of the measurement values acquired from the plurality of sensors (22-24), and measures the height of the liquid surface for the predetermined position on the liquid surface based on the selected measurement value; Measuring equipment (10). [Explanation of symbols]

[0092] 1: Cartridge 2: Container 3: Tray 4: Pillar part 5: Support part 10: Measuring equipment 11: Control device 12:Storage device 13: Input device 14:Display device 15: Sensor unit 21~24: Sensor 25,62:Servo motor

Claims

1. a plurality of sensors that irradiate distance measurement light from above onto the liquid surface of one or more containers, receive light reflected from the liquid surface, and output measurement values, the plurality of sensors being attached at different heights; a movement mechanism for moving one of the plurality of sensors or each of the containers; a control device that controls the moving mechanism and acquires measurement values output from the plurality of sensors; Equipped with the plurality of sensors are arranged side by side along a direction in which the plurality of sensors move or a direction in which each of the containers moves, the control device acquires the measurement values for a predetermined position on the liquid surface from the plurality of sensors by moving either the plurality of sensors or each of the containers, selects one of the measurement values acquired from the plurality of sensors, and measures the height of the liquid surface for the predetermined position on the liquid surface based on the selected measurement value; Measuring equipment.

2. the control device measures the height of the liquid surface at a plurality of the predetermined positions on the liquid surface; The measurement device according to claim 1 .

3. the control device measures the height of the liquid surface at a plurality of positions on the liquid surface, excluding positions on the liquid surface at and near the boundaries with the respective containers; The measurement device according to claim 2 .

4. the control device selects one of the measurement values acquired from the plurality of sensors based on a correspondence relationship between the plurality of sensors and the plurality of containers determined for each of the plurality of containers, and measures the height of the liquid surface at the predetermined position on the liquid surface based on the selected measurement value. The measuring device according to any one of claims 1 to 3.

5. the control device acquires the measurement values and measurement quality values for a predetermined position on the liquid surface from the plurality of sensors by moving either the plurality of sensors or each of the containers, selects one of the measurement values acquired from the plurality of sensors based on the measurement quality value, and measures the height of the liquid surface for the predetermined position on the liquid surface based on the selected measurement value; The measuring device according to any one of claims 1 to 3.

6. The measurement quality value is the amount of light reflected by the liquid surface. The measurement device according to claim 5 .

7. the measurement center distances of the plurality of sensors are the same; The measuring device according to any one of claims 1 to 6.

8. a reference sensor that irradiates a distance measurement light from above onto a reference surface of each of the containers, receives the light reflected by the reference surface, and outputs a measurement value; the measurement center distance of each sensor and the measurement center distance of the reference sensor are the same; the measurement value output by each of the sensors includes a distance from each of the sensors to the liquid level, the measurement value output by the reference sensor includes a distance from the reference sensor to the reference surface; The control device acquires the measurement value output by the reference sensor and measures the height of the liquid surface at the predetermined position on the liquid surface based on the following equation: The measuring device according to any one of claims 1 to 6. Liquid level = V1 - V2 + installation offset V1 is a difference between the distance from the reference sensor to the reference surface and the measurement center distance of the reference sensor, V2 is a difference between the distance from each sensor to the liquid surface and the measurement center distance of each sensor, The mounting offset is the difference between the mounting height of the reference sensor and the mounting height of each of the sensors.

9. the plurality of sensors are confocal sensors; The measuring device according to any one of claims 1 to 8.

10. a plurality of sensors that irradiate distance measurement light from above onto the liquid surface of one or more containers, receive light reflected from the liquid surface, and output measurement values, the plurality of sensors being attached at different heights; a movement mechanism for moving one of the plurality of sensors or each of the containers; A measurement method for a measurement device comprising: the plurality of sensors are arranged side by side along a direction in which the plurality of sensors move or a direction in which each of the containers moves, The computer a step of controlling the movement mechanism to move one of the plurality of sensors or each of the containers, thereby acquiring the measurement values for a predetermined position on the liquid surface from the plurality of sensors; selecting one of the measurement values acquired from the plurality of sensors, and measuring the height of the liquid surface at the predetermined position on the liquid surface based on the selected measurement value; Measurement method to perform.

11. A program for causing a computer to execute the steps set forth in claim 10.

Images