High-resolution imaging of microelectronic devices

Abstract

In the imaging method, the focal point of a focused optical beam is mechanically positioned sequentially at coarse locations of a set of coarse locations in or on an integrated circuit (IC) wafer or chip. At each coarse location, a two-dimensional (2D) image or mapping tile is obtained by steering the focal point to a fine location on or within the IC wafer or chip using electronic beam steering, and using the focal point positioned at each fine location to obtain an output signal produced in response to charges optically injected into the IC wafer or chip at the fine location by the focused optical beam. The 2D image or mapping tiles are combined, including stitching overlapping 2D image or mapping tiles together, to generate an image or mapping of the IC wafer or chip. Electronic beam steering may be implemented using galvo mirrors.

Description

[Technical Field]

[0001] This application claims the benefit of U.S. Provisional Application No. 63 / 208,347, filed June 8, 2021, and entitled "HIGH RESOLUTION IMAGING OF MICROELECTRONIC DEVICES," which is incorporated herein by reference in its entirety.

[0002] The following relates to microelectronics technology, integrated circuit (IC) technology, non-destructive IC testing and characterization technology, non-destructive memory extraction technology, IC failure analysis technology, non-destructive IC imaging technology, and similar applications. [Background technology]

[0003] (background) Optical carrier injection employs an optical beam (typically a laser beam) focused onto a specific location in the active layer of an IC to excite electron-hole pairs at that location. The excited electron-hole pairs constitute the optically injected carriers. To produce the desired carrier injection, the photon energy of the optical beam is typically higher than the bandgap of the active layer.

[0004] There are many applications of optical carrier incidence. For example, scanning an optical carrier incidence across an IC wafer or chip can be used to produce an image of the IC. The output signal for such imaging can be a voltage or current measured across selected terminals of the IC, or an impedance, a reflectance measurement, etc.

[0005] Generally, an IC wafer or chip includes a substrate that provides structural support and an active layer disposed on the front side of the substrate. The active layer is typically very thin, e.g., tens of microns or less in thickness, and therefore is usually not self-supporting. The substrate, usually in the form of a wafer or chip about 100 microns thick or thicker, provides structural support for the IC wafer or chip. In processing, it is common to fabricate two-dimensional arrays of partially or fully completed ICs by wafer-level processing performed on large substrate wafers (e.g., 300 mm diameter, 400 mm diameter, or larger or smaller diameters), after which the wafer is diced to separate the individual ICs. Thus, the term "IC wafer or chip" broadly encompasses ICs before dicing (IC "wafer") or after dicing (IC "chip"). The "front side" of a substrate is the side on which the active layer is disposed or processed. The active layer may be a single layer or a stack of layers, possibly including doping features such as n-wells or p-wells, features such as quantum wells or dots, polysilicon layers, and / or others. Various metallization traces, insulating layers, and / or the like may be disposed on the active layer, or if the active layer is a stack, metallization trace layers and / or insulating layers may be interspersed between the layers of the stack. The substrate also has a "back side" opposite the front side. Because the active layer is fabricated on the front side of the substrate, optical carrier incidence, in which an optical beam is applied to the front side (i.e., front-side optical carrier incidence), can, in principle, achieve tight focus and consequent high spatial resolution for optical carrier incidence. However, in practice, front-side optical carrier incidence can be adversely affected by metallization traces, insulating layers, or the like, which are typically disposed on top of or near (i.e., distal from) the active layer.

[0006] Rear-side optical carrier injection is used to optically inject carriers into the active layer while avoiding interference from metallization traces or other IC features located on or near the active layer. In this approach, an optical beam is applied to the rear side of the substrate and travels through the substrate to reach the active layer located on the front side of the substrate. However, difficulties exist with rear-side optical carrier injection. In many cases, the active layer is typically fabricated from the same material as the substrate, as in well-developed silicon technology, or from a material with a higher bandgap than the substrate material. In these cases, the bandgap of the substrate is comparable to or smaller than the bandgap of the active layer, and the rear-side illumination used for optical carrier injection has a higher photon energy than the bandgap of the substrate. Therefore, the illumination will be absorbed by the substrate before it can reach and be absorbed by the active layer.

[0007] To reduce or eliminate optical absorption in the substrate, the substrate can be thinned or removed by mechanical, chemical, or mechanochemical processes and / or polished to reduce optical roughness. However, these are destructive processes, which are undesirable for some applications. Wafer thinning or removal is also a time-consuming and often delicate process when the IC with the thinned or removed substrate is fragile (as mentioned earlier, the active layer is typically too thin to be self-supporting). In addition, substrate thinning or removal can alter the functional behavior of the IC wafer or chip by mechanisms such as introducing mechanical strain and / or structural defects into the active layer, modifying thermal heat sinking of the active layer, modifying the optical behavior of optoelectronic ICs (e.g., if the substrate acts as a light guide), and / or other.

[0008] In some applications, optical carrier injection is used to generate an image of an IC wafer or chip. To do so, the IC wafer or chip is typically mounted on a mechanical translation stage and moved relative to the optical beam used for optical carrier injection to perform optical carrier injection at a grid of locations. At each location, an output signal is measured, which is generated by the optically injected charges. The output signal may be, for example, an optical output signal or an electrical signal measured at the terminals of the IC wafer or chip. The output signals measured at the grid locations then form an image of the IC wafer or chip.

[0009] However, a problem with such imaging methods is that it can be a time-consuming process, especially if the grid of locations is desired to be dense so as to provide an image at high spatial resolution. Furthermore, the limited tolerances of the mechanical translation mechanism of the mechanical translation stage can limit the achievable spatial resolution of the image.

[0010] Certain improvements are disclosed herein. Summary of the Invention [Means for solving the problem]

[0011] (Brief summary) According to some exemplary embodiments disclosed herein, an imaging method is disclosed. The focal point of a focused optical beam is mechanically positioned sequentially at a set of coarse locations within or on an integrated circuit (IC) wafer or chip. Using the focal point of the focused optical beam positioned at each coarse location, a two-dimensional (2D) image or mapping tile is obtained by steering the focal point of the focused optical beam to a fine location of the 2D set of fine locations on or within the IC wafer or chip using electronic beam steering of the focused optical beam. The focal point of the focused optical beam positioned at each fine location is used to obtain an output signal produced in response to charge optically injected into the IC wafer or chip at the fine location by the focused optical beam. Using an electronic processor, the 2D images or mapping tiles are combined, including stitching overlapping 2D images or mapping tiles together, to generate an image of the IC wafer or chip. The method optionally further includes displaying the image of the IC wafer or chip on a display. In some embodiments, electron beam steering is performed using galvo mirrors. The set of coarse locations within or on the IC wafer or chip can optionally span a three-dimensional (3D) volume, and the image of the IC wafer or chip is then a 3D image of the IC wafer or chip.

[0012] In some embodiments of the imaging method of the immediately preceding paragraph, the IC wafer or chip comprises an active layer disposed on the front side of a substrate, the focused optical beam comprises a pulsed focused optical beam having a pulse duration of 900 femtoseconds or less and a photon energy lower than the bandgap of the substrate, a set of coarse locations in or on the IC wafer or chip are within the active layer, the focused laser beam is arranged to pass through the substrate and reach the coarse locations, and the output signals are produced in response to charge optically injected into the IC wafer or chip at the fine locations by two-photon absorption of the focused laser beam at the fine locations. In some such embodiments, the focused optical beam is generated using a fiber laser in which the fiber is doped with ytterbium and / or erbium.

[0013] According to some illustrative embodiments disclosed herein, an imaging device includes: means for sequentially mechanically positioning a focal point of a focused optical beam at a set of coarse locations within or on an IC wafer or chip; means for obtaining a 2D image tile using the focal point of the focused optical beam positioned at each coarse location; and means, including an electronic processor, for combining the 2D image tiles, including stitching overlapping 2D image tiles together, to generate an image of the IC wafer or chip. The means for obtaining the 2D image tiles includes: (i) means for steering the focal point of the focused optical beam at fine locations of the 2D set of fine locations on or within the IC wafer or chip using electronic beam steering; and (ii) means for obtaining, using the focal point of the focused optical beam positioned at each fine location, an output signal produced in response to charge optically injected into the IC wafer or chip at the fine location by the focused optical beam. The means for sequential mechanical positioning may include a mechanical translation stage on which the IC wafer or chip is positioned. The steering means may comprise a galvo mirror for electronically steering the focused optical beam. The imaging device may further include means for generating the focused optical beam, wherein the fiber comprises a fiber laser, the fiber being doped with ytterbium and / or erbium.

[0014] According to some exemplary embodiments disclosed herein, an imaging device is disclosed. A laser and an optical train are configured to generate a focused optical beam. A mechanical translation stage is provided on which an IC wafer or chip is disposed. The mechanical translation stage is operable to sequentially position a focal point of the focused optical beam at a set of coarse locations within or on the IC wafer or chip. The beam steering device is configured to steer the focal point of the focused optical beam to a fine location of a 2D set of fine locations on or within the IC wafer or chip using electronic beam steering, using the focal point of the focused optical beam positioned at each coarse location. The readout device is configured to obtain a 2D image or mapping tile for each coarse location by obtaining output signals produced by the focused optical beam in response to charges optically injected into the IC wafer or chip at the fine locations of the 2D set of fine locations, using the focal point of the focused optical beam positioned at each coarse location. In some embodiments, the electronic processor is programmed to combine the 2D images or mapping tiles, including stitching overlapping 2D images or mapping tiles together, to generate an image of the IC wafer or chip. The beam steering device may include a galvo mirror. The optical train may include an f-theta scan lens and an objective lens. The readout device may include one or more of a voltmeter, an ammeter, an ohmmeter, a spectrometer, a spectroscope, and / or a photodetector. The imaging device may further optionally include a display configured to display the image of the IC wafer or chip. The present invention provides, for example, the following items. (Item 1) 1. An imaging method comprising: sequentially mechanically positioning a focal point of a focused optical beam at a set of coarse locations within or on an integrated circuit (IC) wafer or chip; obtaining a two-dimensional (2D) image or mapping tile by steering the focus of the focused optical beam to fine locations of a 2D set of fine locations on or within the IC wafer or chip using electronic beam steering of the focused optical beam with the focus of the focused optical beam positioned at each coarse location, and obtaining an output signal produced in response to charge optically injected into the IC wafer or chip at the fine locations by the focused optical beam with the focus of the focused optical beam positioned at each fine location; combining said 2D images or mapping tiles, including stitching together overlapping 2D images or mapping tiles using an electronic processor to generate an image of said IC wafer or chip; A method comprising: (Item 2) Item 10. The imaging method of item 1, wherein sequentially mechanically positioning the focal point of the focused optical beam comprises translating the IC wafer or chip relative to the focal point of the focused optical beam using a mechanical translation stage on which the IC wafer or chip is placed. (Item 3) 3. The imaging method according to any one of items 1-2, wherein the electron beam steering is performed using a galvo mirror. (Item 4) Item 4. The imaging method of item 3, further comprising generating the focused optical beam by focusing an optical beam to the focal point using an optical train including a theta scan lens and an objective lens. (Item 5) 5. The imaging method of any one of items 1-4, wherein the set of coarse locations within or on the IC wafer or chip spans a three-dimensional (3D) volume, and the image of the IC wafer or chip is a 3D image of the IC wafer or chip. (Item 6) 6. The imaging method of any one of items 1-5, wherein obtaining the output signal includes obtaining an electrical signal produced by the IC wafer or chip in response to the charge optically injected into the IC wafer or chip at the fine location by the focused optical beam. (Item 7) 7. The imaging method of any one of items 1-6, wherein the output signal is produced by a nonlinear optical interaction. (Item 8) the IC wafer or chip comprises an active layer disposed on a front side of a substrate; the focused optical beam comprises a pulsed focused optical beam having a pulse duration of 900 femtoseconds or less and a photon energy lower than the bandgap of the substrate; the set of coarse locations in or on the IC wafer or chip are in the active layer; the focused laser beam is arranged to pass through the substrate and strike the general location; 7. The imaging method of any one of items 1-6, wherein the output signal is produced by a nonlinear optical interaction in response to charges optically injected into the IC wafer or chip at the fine location. (Item 9) Item 9. The imaging method of item 8, wherein the photon energy of the pulsed focused optical beam is lower than a band gap of the active layer, and the photon energy of the pulsed focused optical beam is 1.0 eV or lower. (Item 10) 10. The imaging method of any one of items 1-9, further comprising generating the focused optical beam using a fiber laser, wherein the fiber is doped with ytterbium and / or erbium. (Item 11) 10. The imaging method of any one of items 1-9, further comprising generating the focused optical beam using a fiber-based femtosecond laser. (Item 12) the output signal obtained at each fine location comprises a waveform; 12. The imaging method of any one of items 1-11, wherein obtaining the 2D image or mapping tile further comprises using the electronic processor to process the waveform obtained at each fine location to produce a single value or a data set of values ​​for the fine location within the 2D image or mapping tile. (Item 13) the output signal obtained at each fine location includes data collected from two or more sensors; 12. The imaging method of any one of items 1-11, wherein obtaining the 2D image or mapping tile further comprises using the electronic processor to process the data collected from two or more sensors at each fine location to produce a single value or a dataset of values ​​for the fine location within the 2D image or mapping tile. (Item 14) 14. The imaging method of any one of items 12-13, wherein alignment data generated by stitching together the overlapping 2D image or mapping tiles is used to determine the spatial relationship of the output signals obtained at each fine location between different tiles. (Item 15) the focused optical beam comprises a pulsed focused optical beam generated by a laser driven by a radio frequency (RF) signal; 15. The imaging method of any one of items 1-14, wherein obtaining the output signal comprises lock-in amplification of the output signal using a reference signal generated at the repetition rate of the pulsed focused light beam and phase-locked thereto. (Item 16) 1. An imaging device comprising: means for sequentially mechanically positioning a focal point of a focused optical beam at a set of coarse locations within or on an integrated circuit (IC) wafer or chip; a means for obtaining a two-dimensional (2D) image tile with the focal point of the focused optical beam positioned at each coarse location, the means for obtaining the 2D image tile comprising: (i) means for steering the focal point of the focused optical beam to fine locations of a 2D set of fine locations on or within the IC wafer or chip using electronic beam steering; (ii) means for obtaining, with the focal point of the focused optical beam positioned at each fine location, an output signal produced in response to charges optically injected into the IC wafer or chip at the fine locations by the focused optical beam; a means for means, including an electronic processor, for combining the 2D image tiles, including stitching overlapping 2D image tiles together to generate an image of the IC wafer or chip; An imaging device comprising: (Item 17) Item 17. The imaging device of item 16, wherein the means for sequential mechanical positioning comprises a mechanical translation stage on which the IC wafer or chip is placed. (Item 18) 18. The imaging device of any one of items 16-17, wherein the steering means comprises a galvo mirror for electronically steering the focused optical beam. (Item 19) 19. The imaging device of any one of items 16-18, further comprising means for generating the focused optical beam, the means comprising a femtosecond fiber laser. (Item 20) 20. The imaging device of item 19, wherein the femtosecond fiber laser comprises a fiber doped with ytterbium and / or erbium. (Item 21) 1. An imaging device comprising: a laser and optical train configured to generate a focused optical beam; a mechanical translation stage on which an integrated circuit (IC) wafer or chip is placed, the mechanical translation stage operable to sequentially position a focal point of the focused optical beam at coarse locations of a set of coarse locations within or on the IC wafer or chip; a beam steering device configured to steer the focal point of the focused optical beam to a two-dimensional (2D) set of fine locations on or within the IC wafer or chip using electronic beam steering, with the focal point of the focused optical beam positioned at each coarse location; a readout device configured to obtain a 2D image or mapping tile for each coarse location by obtaining output signals produced in response to charges optically injected into the IC wafer or chip at the fine locations of the 2D set of fine locations by the focused optical beam, with the focal point of the focused optical beam positioned at each coarse location; and An imaging device comprising: (Item 22) Item 22. The imaging device of item 21, further comprising an electronic processor programmed to combine the 2D image or mapping tiles, including stitching overlapping 2D image or mapping tiles together, to generate an image or mapping of the IC wafer or chip. (Item 23) 23. The imaging device of any one of items 21-22, wherein the beam steering device comprises a galvo mirror and the optical train includes an f-theta scan lens and an objective lens. [Brief explanation of the drawings]

[0015] Any quantitative dimensions shown in the drawings are to be understood as non-limiting illustrative examples. Unless otherwise indicated, the drawings are not to scale, and if any aspect of a drawing is shown as being to scale, the depicted scale is to be understood as a non-limiting illustrative example.

[0016] [Figure 1] FIG. 1 illustrates diagrammatically an optical carrier injection device.

[0017] [Figure 2]FIG. 2 diagrammatically illustrates optical carrier injection via nonlinear optical interactions achieved using the optical carrier injection device of FIG.

[0018] [Figure 3] FIG. 3 illustrates diagrammatically an IC wafer or chip imaging process that is preferably performed using the optical carrier injection device of FIG. DETAILED DESCRIPTION OF THE INVENTION

[0019] (Detailed explanation) Referring to FIG. 1 , the optical carrier injection device includes a light source (e.g., an illustrative laser) 10 that outputs a pulsed optical beam 12 (shown diagrammatically by a dashed line in FIG. 1 ). A mechanical translation stage 14 holds an IC wafer or chip 20 using adhesive, a vacuum chuck, sample clips, or the like (details not shown). In another approach, the IC wafer or chip 20 may be mounted on a printed circuit board (PCB), which is in turn mounted to the translation stage 14 by screws or other fasteners. The illustrative mechanical translation stage 14 is a three-axis translation stage that provides controllable translation in any of three mutually orthogonal directions, labeled (without loss of generality) in FIG. 1 as the x-, y-, and z-directions. An optical train 16 is arranged to apply the pulsed optical beam 12 output by the laser 10 to the IC wafer or chip 20 held by the translation stage 14.

[0020] Referring to FIG. 2 , an expanded diagrammatic representation of an IC wafer or chip 20 is shown. The IC wafer or chip 20 includes a substrate 22 having a front side 24 and a back side 26, and an active layer 28 disposed on the front side 24 of the substrate 22. Generally, the active layer 28 can be disposed on the front side 24 of the substrate 22 in a variety of ways, depending on the IC technology employed. In the case of some silicon processing processes, the active layer 28 is processed on the front side 24 of the substrate 22 by process steps such as ion implantation, dopant diffusion, or the like, which modify the top portion of the front side 24 of the substrate 22 and form the active layer 28. In other silicon processing techniques, the active layer 28 may comprise one or more epitaxial silicon layers deposited on the front side 24 by deposition techniques such as vacuum evaporation, sputtering, chemical vapor deposition, or the like. In an alternative approach, one or more of the deposited layers may be of a Group IV material other than silicon, such as germanium (Ge) or an alloy of silicon and germanium (SiGe). Active layer 28 may additionally or alternatively include one or more deposited layers of different material types, such as III-V or II-VI compound semiconductors. In the foregoing example, substrate 22 is a silicon substrate. However, more commonly, substrate 22 may be made of a different material, such as gallium arsenide (GaAs), indium phosphide (InP), or others, because technologies employing these materials are often used for optoelectronic IC wafers or chips. Typically (though not necessarily), active layer 28 is made of the same material as substrate 22 or a compatible similar material. Some examples of the latter include SiGe active layers on silicon substrates, GaAs active layers on GaAs substrates, and aluminum gallium arsenide (AlGaAs) active layers on GaAs substrates, active layers comprising a stack of alternating GaAs / AlGaAs layers on GaAs substrates, spatially lattice-matched InGaAs layers on InP substrates, and / or others. These are merely non-limiting illustrative examples. In the following, for illustrative purposes only, it is assumed that the substrate 22 is a silicon substrate, and that the active layer 28 is likewise silicon or a stack of silicon layers (e.g., with different doping types / levels).Although not shown, it will be understood that the IC wafer or chip 22 may include additional features such as metallized traces, electrically insulating layers (e.g., a deposited oxide layer and / or a silicon oxide layer formed by oxidation of the top portion of the front side 24 of the substrate 22), and / or the like.

[0021] 1 and 2 , optical train 16 includes objective lens 30 arranged to focus pulsed optical beam 12 at focal point 32 within active layer 28 disposed on front side 24 of substrate 22. As seen in FIG. 2 , the illustrated optical carrier incidence therefore employs rear-side optical carrier incidence, in which pulsed optical beam 12 passes through substrate 22 and reaches active layer 28 disposed on front side 24 of substrate 22. As previously mentioned, rear-side optical carrier incidence has advantages in avoiding scattering from metallization traces or other IC features located on or near the active layer. However, rear-side optical carrier incidence is typically impractical when the bandgap of the substrate is comparable to or smaller than the bandgap of the active layer, because for optical carrier incidence, the optical beam would have a higher photon energy than the bandgap of the substrate, and therefore, the illumination would be absorbed by the substrate before it could reach and be absorbed by the active layer. This can be addressed by thinning or removing the substrate, but as mentioned earlier, there are a number of disadvantages to this approach.

[0022] Various aspects of the disclosed optical carrier injection address this problem by using back-side optical carrier injection using a laser (or other light source) 10 that outputs light with a photon energy below the bandgap of the substrate 22, and preferably also below the bandgap of the active layer 28, to utilize absorption via nonlinear optical interactions to inject charge into the active layer 28. A corollary to the photon energy of the pulsed optical beam 12 being below the bandgap of the substrate 22 is that the beam 12 passes through the substrate 22 with little or no absorption. Therefore, the optical carrier injection methods disclosed herein preferably do not involve thinning or removing the substrate 22 of the IC wafer or chip 20. Additionally, polishing of the backside 26 of the substrate 22 is typically not required. Typically, the backside is polished in conventional applications employing back-side illumination to reduce spurious signals due to scattering. However, with respect to absorption due to nonlinear optical interactions, scattering on optically rough surfaces does not significantly degrade resolution because the scattered light is of such low intensity that it cannot generate nonlinear optical interactions and will only have a minimal effect on the signal.

[0023] If only linear absorption were considered, the pulsed optical beam 12 would also pass through the active layer 28 with little or no absorption resulting in carrier injection. However, as shown diagrammatically in FIG. 2 , the objective lens 30 operates to focus the pulsed optical beam 30 at a focal point 32 within the active layer 28. This results in a high optical intensity (and correspondingly, a high electric field strength) at the focal point 28 when all of the optical energy of the beam 30 is concentrated at the focal point 32. The high electric field can induce absorption due to a nonlinear optical interaction, such as two-photon absorption (TPA), absorption of the optical beam generated by third harmonic generation (THG) in the active layer, absorption of the optical beam generated by higher harmonic generation in the active layer, or another nonlinear optical interaction or combination of nonlinear optical interactions. In a nonlinear optical interaction process, such as two-photon absorption, absorption is typically proportional to the square, cube, or higher-order polynomial of the optical intensity. The focused beam produces sufficient intensity at focal point 32 so that a portion of the optical energy of pulsed optical beam 30 is absorbed by active layer 28 at focal point 32 using two-photon absorption or other nonlinear optical interactions, and this absorbed optical energy is sufficient to (optically) inject carriers into active layer 28 at focal point 32.

[0024] A challenge with this approach, which leverages absorption via nonlinear optical interactions, is that high optical intensity at focal point 32 can result in rapid heating at focal point 32 due to the optical power being deposited there. This is minimized in the disclosed optical carrier injection technique by pulsing optical beam 12, so that each pulse has a pulse duration of 900 femtoseconds or less. In other words, laser 10 is a femtosecond laser. In some embodiments, laser 10 is a fiber-based femtosecond laser, as discussed below. The pulses are separated by a time interval long enough to allow for heat dissipation between pulses. For example, in some non-limiting illustrative embodiments, the femtosecond laser operates at 50-100 MHz, so that consecutive femtosecond pulses are spaced apart by a time interval of approximately 10-20 nanoseconds. Thus, the pulsed optical beam 12 deposits sufficient optical energy in each pulse to produce two-photon absorption or other absorption due to nonlinear optical interactions, but the (time-averaged) power of the pulsed optical beam 12 is low enough to avoid significant heating at the focal point 32.

[0025] As a non-limiting illustrative example, if substrate 22 is a silicon substrate, its bandgap is typically about 1.1 eV, although the precise bandgap energy depends on the type and level of dopants or impurities. In this case, the photon energy of pulsed optical beam 12 is preferably 1.0 eV or less to be below the silicon bandgap. Active layer 28 may be a silicon-based active layer in this case, although active layers comprising other materials are also contemplated. Some suitable femtosecond lasers with this photon energy include fiber lasers in which the fiber is doped with ytterbium (Yb) and / or erbium (Er), which can achieve desirable operating parameters for use with silicon substrates, such as pulse durations of 900 femtoseconds (fs) or less and average optical powers of 150 milliwatts (mW) or higher, although pulsed optical beams with lower powers are also contemplated, e.g., in some broader embodiments, average optical powers of at least 10 mW. Some suitable femtosecond fiber lasers of this type, with photon energies of about 1,550-1,560 nm (photon energy of about 0.80 eV), pulse frequencies in the range of 50-100 MHz, and average optical powers of 150 mW or higher, are available from Menlo Systems GmbH (Martinsried, Germany).

[0026] The optical carrier injection system is further configured to measure an output signal 34 produced in response to the carriers injected at the focal point 32 by absorption due to two-photon absorption or other nonlinear optical interaction process. The output signal 34 may be, for example, an electrical signal produced by the IC wafer or chip 20 in response to the carriers injected at the focal point 32 in the active layer 28, or an optical output signal produced by recombination of the carriers injected at the focal point 32 in the active layer 28 or a nonlinear interaction within the active layer. In the illustrative system of FIG. 1 , the output signal 34 is an optical output signal focused onto the photodetector 36 by an optical output collection objective lens 38 and measured using the photodetector 36 to detect the optical output. If the output signal 34 is an electrical signal produced by the IC wafer or chip 20, it may be measured, for example, as a voltage or current or impedance measured across selected terminals of the IC wafer or chip 20 (the selection of the terminals is preferably based on a priori knowledge of the architecture of the IC wafer or chip 20). As further non-limiting illustrative examples, the readout device producing the output signal 34 may comprise one or more of a voltmeter, an ammeter, an ohmmeter, a spectrometer, a spectroscope, and / or a photodetector. In some applications, multiple output signals may be measured, such as an optical output signal and one or more electrical signals measured across various pairs of terminals of the IC wafer or chip 20.

[0027] Conversely, it should be noted that measuring the output signal is optional, and in some embodiments, such as optically programming an IC memory by setting specific memory elements to specific charge states, the output signal may not be measured.

[0028] In addition to the objective lens 30, the illustrative optical train 16 of FIG. 1 includes a mechanical chopper 40, a beam splitter 42, a galvo mirror 44, an f-theta scan lens 46, and a tube lens 48 input to the objective lens 30. Other optical components, such as an attenuator for reducing laser power, are also contemplated for inclusion in the optical train 16. The beam splitter 42 is an optional component used to match the optical train 16 with a low-power matching laser 50 emitting visible light (e.g., a red or green helium-neon, or HeNe, laser). The chopper 40 operates in conjunction with a lock-in amplifier 52 to provide a highly sensitive detector for detecting the output signal 34. The chopper 40 typically operates at a much lower frequency than the femtosecond laser 10; for example, in one non-limiting illustrative embodiment, the chopper 40 operates at 1 kHz, while the femtosecond laser 10 produces a pulsed optical beam 12 with a pulse frequency of 100 MHz. Rather than employing a chopper 40, another type of lock-in amplification can be used, such as radio frequency (RF) lock-in amplification, in which a lock-in amplifier 52 is generated at the repetition rate of, and phase locked to, the pulsed output laser 10, or boxcar averaging triggered from the laser pulse. Both the phase and magnitude of the signal from the lock-in can be measured, and the phase can advantageously provide information about how data is transferred.

[0029] As mentioned earlier, another problem with optical carrier injection systems is that when used for imaging, it can be a time-consuming process, especially if the grid of locations is dense enough to provide an image at high spatial resolution. Furthermore, the limited tolerances of the mechanical translation mechanism of the mechanical translation stage can limit the achievable spatial resolution of the image.

[0030] To address this issue, the optical carrier injection system of FIG. 1 employs an exemplary galvo mirror 44 (or another electronic beam steering device, such as a MEMS-based deformable mirror, a piezoelectric deformable mirror, acousto-optic beam steering, or electro-optic beam steering) to electronically steer the pulsed optical beam 12 to obtain a small region of the image, referred to herein as a two-dimensional (2D) image tile. More generally, in some embodiments, a multi-value data set is obtained to reach a small region, referred to as a 2D mapping tile. In the exemplary system of FIG. 1 , the beam steering device 44 is a galvo mirror, and the F-theta scan lens 46 corrects for the angular deflection of the pulsed optical beam 12 introduced by the galvo mirror 44. The lateral motion of the beam is therefore determined by the angle of the galvo mirror 44 and the spacing between the galvo mirror 44 and the F-theta scan lens 46.

[0031] With the focal point 32 of the focused optical beam 12 positioned at a coarse location reached by operation of the mechanical translation stage 14, a 2D image or mapping tile is obtained by (i) using electronic beam steering (via a galvo mirror 44 or other electronic beam steering device) to steer the focal point 32 of the focused optical beam 12 to a fine location of a 2D set of fine locations on or within the IC wafer or chip 20, and (ii) using the focal point of the focused optical beam positioned at each fine location to obtain an output signal 34 produced in response to charge optically injected into the IC wafer or chip 20 by the focused optical beam 12 at the fine location. In the illustrative embodiment of FIG. 1 , digital acquisition hardware (DAQ) 54 is used to control galvo mirror 44 (or other electronic beam steering device) to perform steering (i) and output signal acquisition (ii), the latter in conjunction with lock-in amplifier 52 used with a reference signal derived from chopping performed by mechanical chopper 40 (or alternatively, using RF lock-in amplification with a signal generated at the repetition rate of, and phase-locked to, the pulsed output of laser 10 as a reference), to provide good noise rejection. In some illustrative embodiments, a DAQ manufactured by National Instruments Corporation (Austin, Texas, USA) is used as DAQ 54. Overall image acquisition is controlled by a computer 56 that controls DAQ 54 to control the acquisition of and receive the acquired images or mapping tiles, and computer 56 controls mechanical translation stage 14 to sequentially mechanically position focal spot 32 of focused optical beam 12 at a set of coarse locations within or on IC wafer or chip 20.If the 2D image or mapping tile is a two-dimensional image while the translation stage 14 is a three-dimensional (3D) translation stage (as illustrated in FIG. 1), the set of coarse locations may be a 2D array of coarse locations that provides a final image that is 2D, or the set of coarse locations may be a 3D array of coarse locations that provides a final image that is 3D (i.e., volumetric), but with a coarse resolution in the depth (z) direction determined by the spacing of the coarse locations along the z direction.

[0032] The computer 56 is programmed with suitable software to combine the 2D images or mapping tiles. To provide smooth image content at tile boundaries, neighboring image or mapping tiles preferably overlap (e.g., achieved by setting the spacing between adjacent rough locations to be smaller than the size of the image or mapping tile), and the image or mapping tiles are combined by stitching the overlapping 2D images or mapping tiles together to generate an image of the IC wafer or chip 20. In one non-limiting illustrative approach, the computer 56 is programmed to perform image stitching by executing pairwise and / or grid / set stitching plugins of the ImageJ image processing suite (available at imagej.net and github.com / imagej / imagej1).

[0033] 1 employs a DAQ 54 and a computer 56 for control and processing of image acquisition, but more generally, these control and processing operations may be performed by an electronic processor. The electronic processor 54, 56 may comprise a computer that directly controls both the stage 14 and the galvo mirror 44, may be connected to receive the signal output from the lock-in amplifier 52, may comprise the illustrated combination of the DAQ 54 and the computer 56, may comprise a specially configured microprocessor or microcontroller or FPGA-based controller, may comprise a cloud-based server computer, or may comprise various combinations thereof, and / or the like.

[0034] An optical carrier injection system with the configuration shown in Figure 1 was actually constructed and tested. The system employed a 1,550-1,560 nm Yb:fiber laser manufactured by Menlo Systems with 100 fs pulses, operating at a pulse rate of 100 MHz and an average optical power of 300 mW. A galvo mirror was used as the electronic beam steering device 44, with a 3° x 3° scan range of scanning parameters, with pauses of 0.5-20 ms / degree. The objective lens 30 was a 10x to 100x objective, depending on the desired imaging magnification. The mechanical translation stage 14 was operated to obtain a two-dimensional 7x7 grid of rough locations with a 0.75 mm step size (4.5 mm scan dimension), or other grid and step size combinations depending on the desired image dimensions. The chopper 40 was operated at 1-5 kHz, and the lock-in amplifier 52 was operated in current input mode in the picoampere (pA) range with a time constant of 1 ms-3 ms. In other experiments, RF lock-in amplification was used, and the reference signal was a 100 MHz RF signal output from the laser 10 locked to the laser's pulsed output. For imaging or spatial mapping tasks, image or mapping tiles were stitched together using the Fiji open-source implementation of ImageJ (Fiji is an acronym for "Fiji Is Just ImageJ"). It should be understood that these are merely illustrative values ​​used in the experiments, and that other values ​​and combinations of values ​​for these various parameters are expected to be suitable depending on the specific hardware and optical carrier injection task being performed.

[0035] 2, in one experiment, output 34 was an optical output signal produced by two-photon absorption or other nonlinear optical interaction, and photodetector 36 was a silicon photodetector. Plot 60 shown in FIG. 2 is a plot of the optical output having a peak in the green range of the visible spectrum, confirming that the optical output signal is generated in response to third harmonic generation in the active layer.

[0036] In another experiment, optical carrier injection imaging was performed on a commercially available 8-bit microcontroller IC. In this case, the image was an optical beam induced current (OBIC) image, in which the output 34 was the voltage across the power terminals, measured in microvolts (μV). Compared to imaging using an 800 nm pump laser providing linear absorption and a 1× telecentric scan lens, images obtained using the system of FIG. 1 were significantly better in both spatial resolution and image contrast.

[0037] Referring to FIG. 3, a preferred imaging method implemented by the optical carrier injection system of FIGS. 1 and 2 is illustrated by way of a flowchart. In operation 70, an IC wafer or chip 20 is loaded onto the mechanical translation stage 14. Preferably, loading operation 70 does not include thinning or removing or polishing the substrate 22 of the IC wafer or chip 20. In operation 72, the mechanical translation stage 14 is operated to move to an initial 2D or 3D stage translation position (2D or 3D depending on whether the stage 14 includes "depth" movement in the z-direction, and if so, whether the set of coarse points is 2D or 3D). In operation 74, the electronic beam steering device 44 scans the image or mapping tile at the current stage translation position (i.e., the current coarse location). More specifically, in operation 74, the beam steering device 44 is operated to steer the focal point 32 of the focused optical beam 12 to a 2D set of fine locations on or within the IC wafer or chip 20, and at each fine location, an output signal 34 produced in response to charge optically injected into the IC wafer or chip 20 at the fine location by the focused optical beam 12 is measured. In illustrative FIG. 1 , the beam steering device 44 is an illustrative galvo mirror 44, which provides electromechanical beam steering. In other embodiments, the beam steering device may employ electro-optical modulation, which can provide faster electronic beam steering. Typically, the set of fine locations defines a two-dimensional grid of fine locations in the x-y plane.

[0038] In an optional image processing operation 75, the acquired image or mapping tile may be processed. For example, translation may be performed from analog signals collected at spatial locations to a multi-channel bitmap image that facilitates subsequent stitching. As another example, the output signal 34 acquired at each fine location may include a waveform, and acquiring the 2D image tile further includes processing the waveform acquired at each fine location using the electronic processors 54, 56 to produce a single value for the fine location within the 2D image tile. As another example, the output signal 34 acquired at each fine location may include data collected from two or more sensors, and acquiring the 2D image tile further includes processing the data collected from the two or more sensors at each fine location using the electronic processors 54, 56 to produce a single value for the fine location within the 2D image tile. In the latter example, the sensor may include an electrical signal produced by the IC wafer or chip 20 in response to incident carriers and measured by a voltmeter or equivalent, and an optical signal produced by nonlinear harmonic generation measured by the photodetector 36. In yet another variation, process 75 produces a reduced data set but may not produce a single value per fine location. For example, if the output signal 34 obtained at each fine location is a peak waveform, process 75 may generate a triplet (A, P, W) where A is the peak amplitude, P is the peak position, and W is the peak full width at half maximum (FWHM). In this case, the output is a triplet (A, P, W) at each fine location, thus constituting a generalized mapping tile rather than an image tile with a single value at each fine location. As another approach, if the reduced data set is relatively small, it is envisioned to combine the values ​​to form a single value in the form of a color pixel value, for example, using a red-green-blue (RGB) color space or a YUV-type color space to encode the triplet data set. In this case, the output is an image with a single value at each fine location, where the single value is an (RGB) or (YUV) color space point, producing a pseudocolor image.

[0039] In operation 76, the acquired image tile (or mapping tile) is stored in storage device 78 (e.g., flash memory, solid state drive, magnetic disk, random access memory, RAM, etc.). In decision 80, it is determined whether this is the last coarse location to be imaged. If not, the flow passes to operation 82, at which point mechanical translation stage 14 is operated to move to the next stage translation position (i.e., the next coarse location), and operations 74, 76, and 80 are thus repeated until image or mapping tiles corresponding to all coarse locations in the set of coarse locations have been acquired. Typically, the set of coarse locations forms a 2D grid in the xy plane or a 3D grid across xyz space.

[0040] When the image or mapping tile for the last coarse location is obtained and stored, decision 80 moves the flow to operation 84, which combines the images or mapping tiles, including stitching the images or mapping tiles together to generate an image of the IC wafer or chip. For example, stitching may employ another implementation of Fiji or ImageJ. Optionally, the image may be displayed in operation 86, for example, on display 88 of computer 56 (see FIG. 1). In the case of mapping involving multi-value data sets at each fine location (rather than an image with a single value at each fine location), where mapping tiles are to be stitched together, various types of stitching may be employed. For the illustrative example in which a triplet (A, P, W) is output at each fine location, stitching operates as already described, but may be applied to each field of the triplet; for example, the amplitude (A), peak position (P), and width (W) values ​​may each be stitched together independently. In another approach, the alignment used in stitching one of the fields in the triplet may also be used to stitch the other fields in the triplet. For example, alignment data generated by stitching overlapping 2D image or mapping tiles together may be used to determine the spatial relationship of the output signals obtained at each fine location between different tiles.

[0041] In the method of FIG. 3 , it is assumed that operation 74, which scans the tile image or mapping, employs optical carrier injection via two-photon absorption or other nonlinear optical interaction processes as described herein with reference to FIGS. 1 and 2 . However, more generally, operation 74 can alternatively employ optical carrier injection using linear absorption of the optical beam (rather than using a nonlinear absorption process such as in the embodiment of FIGS. 1 and 2 ). For example, operation 74 may scan the tile image using conventional optical beam induced current (OBIC), in which photons are absorbed by conventional linear absorption. To achieve linear absorption of light, such techniques would generally be performed with a photon energy of the optical beam higher than the bandgap of the active layer. Furthermore, if the substrate has a bandgap smaller than or comparable to the bandgap of the active layer, either the beam is applied to the front side of the substrate, so that it is not absorbed by the substrate, or the beam is applied from the back side of the substrate, but the substrate is thinned or removed before scanning.

[0042] Those imaging techniques that employ linear absorption are still expected to benefit from the tile image acquisition approach of Figure 3. In one advantage, electronic beam steering is fast compared to scanning using only a mechanical translation stage, thereby providing faster image acquisition. In another advantage, image or mapping tiles acquired using electronic beam steering can achieve higher spatial resolution than can be achieved by using a mechanical translation stage alone, due to limitations on the tolerances of the mechanical translation mechanism of the mechanical translation stage, which often limits the achievable spatial resolution.

[0043] Preferred embodiments have been illustrated and described. Obvious modifications and alterations will occur to those skilled in the art upon reading and understanding the preceding detailed description. It is intended that the present invention be construed as including all such modifications and alterations insofar as they come within the scope of the appended claims or their equivalents.

Claims

1. 1. An imaging method comprising: sequentially mechanically positioning a focal point of a focused optical beam at a coarse location among a set of coarse locations within or on an integrated circuit (IC) wafer or chip; obtaining two-dimensional (2D) image or mapping tiles with the focal point of the focused optical beam positioned at each coarse location by the mechanical positioning, said obtaining including: steering the focal point of the focused optical beam to a fine location of a 2D set of fine locations on or within the IC wafer or chip using electronic beam steering of the focused optical beam; using the focal point of the focused optical beam positioned at each fine location by the steering to obtain an output signal produced in response to charge optically injected into the IC wafer or chip at the fine location by the focused optical beam, wherein obtaining the output signal includes obtaining an electrical signal produced by the IC wafer or chip in response to the charge optically injected into the IC wafer or chip at the fine location by the focused optical beam; and combining, using an electronic processor, the 2D images or mapping tiles to generate an image of the IC wafer or chip, the combining including stitching together overlapping 2D images or mapping tiles; An imaging method comprising:

2. 2. The imaging method of claim 1, wherein sequentially mechanically positioning the focal point of the focused optical beam comprises translating the IC wafer or chip relative to the focal point of the focused optical beam using a mechanical translation stage on which the IC wafer or chip is placed.

3. 10. The imaging method of claim 1, wherein the electron beam steering is performed using a galvo mirror.

4. 4. The imaging method of claim 3, further comprising generating the focused optical beam by focusing an optical beam to the focal point using an optical train including an f-theta scan lens and an objective lens.

5. 2. The imaging method of claim 1, wherein the set of coarse locations within or on the IC wafer or chip spans a three-dimensional (3D) volume, and the image of the IC wafer or chip is a 3D image of the IC wafer or chip.

6. The imaging method of claim 1 , wherein the output signal is produced by a nonlinear optical interaction.

7. the IC wafer or chip comprises an active layer disposed on a front side of a substrate; the focused optical beam comprises a pulsed focused optical beam having a pulse duration of 900 femtoseconds or less and a photon energy lower than the bandgap of the substrate; the set of coarse locations within or on the IC wafer or chip are within the active layer; the focused laser beam is arranged to pass through the substrate and strike the general location; 2. The imaging method of claim 1, wherein the output signal is produced by a nonlinear optical interaction in response to charges optically injected into the IC wafer or chip at the fine location.

8. 8. The imaging method of claim 7, wherein the photon energy of the pulsed focused optical beam is lower than a band gap of the active layer, and the photon energy of the pulsed focused optical beam is 1.0 eV or less.

9. 10. The imaging method of claim 1, further comprising generating the focused optical beam using a fiber laser, wherein the fiber in the fiber laser is doped with ytterbium and / or erbium.

10. The imaging method of claim 1 , further comprising generating the focused optical beam using a fiber-based femtosecond laser.

11. the output signal obtained at each fine location comprises a waveform; 2. The imaging method of claim 1, wherein obtaining the 2D image or mapping tile further comprises using the electronic processor to process the waveform obtained at each fine location to produce a single value or a data set of values ​​for the fine location within the 2D image or mapping tile.

12. the output signal obtained at each fine location comprises data collected from two or more sensors; 2. The imaging method of claim 1, wherein obtaining the 2D image or mapping tile further comprises using the electronic processor to process the data collected from two or more sensors at each fine location to produce a single value or a data set of values ​​for the fine location within the 2D image or mapping tile.

13. 13. The imaging method of claim 12, wherein alignment data generated by stitching together the overlapping 2D image or mapping tiles is used to determine spatial relationships of the output signals obtained at each fine location between different tiles.

14. the focused optical beam comprises a pulsed focused optical beam generated by a laser driven by a radio frequency (RF) signal; 2. The imaging method of claim 1, wherein obtaining the output signal comprises lock-in amplification of the output signal using a reference signal generated at a repetition rate of the pulsed focused light beam and phase locked to the pulsed focused light beam.

15. 1. An imaging device comprising: means for sequentially mechanically positioning a focal point of a focused optical beam at a coarse location among a set of coarse locations within or on an integrated circuit (IC) wafer or chip; a means for obtaining a two-dimensional (2D) image tile with the focal point of the focused optical beam positioned at each coarse location, the means for obtaining the 2D image tile comprising: (i) means for steering the focal point of the focused optical beam to a fine location of a 2D set of fine locations on or within the IC wafer or chip using electronic beam steering; (ii) means for obtaining, using the focal point of the focused optical beam positioned at each fine location, an output signal produced in response to electric charges optically injected into the IC wafer or chip at the fine location by the focused optical beam, wherein obtaining the output signal includes obtaining an electrical signal produced by the IC wafer or chip in response to the electric charges optically injected into the IC wafer or chip at the fine location by the focused optical beam; a means for means, including an electronic processor, for combining the 2D image tiles to generate an image of the IC wafer or chip, the combining including stitching together overlapping 2D image tiles; An imaging device comprising:

16. 16. The imaging device of claim 15, wherein the means for sequential mechanical positioning comprises a mechanical translation stage on which the IC wafer or chip is placed.

17. 16. The imaging device of claim 15, wherein the steering means comprises a galvo mirror for electronically steering the focused optical beam.

18. 16. The imaging device of claim 15, further comprising means for generating the focused optical beam comprising a femtosecond fiber laser.

19. 20. The imaging device of claim 18, wherein the femtosecond fiber laser comprises a fiber doped with ytterbium and / or erbium.

20. 1. An imaging device comprising: a laser and optical train configured to generate a focused optical beam; a mechanical translation stage on which an integrated circuit (IC) wafer or chip is placed, the mechanical translation stage operable to sequentially position a focal point of the focused optical beam at coarse locations within or on the IC wafer or chip, among a set of coarse locations; a beam steering device configured to steer the focal point of the focused optical beam to fine locations of a two-dimensional (2D) set of fine locations on or within the IC wafer or chip using electronic beam steering, with the focal point of the focused optical beam positioned at each coarse location using the mechanical translation stage; a readout device configured to obtain a 2D image or mapping tile for each coarse location by obtaining electrical output signals produced by the IC wafer and chip in response to charges optically injected into the IC wafer or chip by the focused optical beam at the fine locations of the 2D set of fine locations, with the focal point of the focused optical beam mechanically positioned at each coarse location by the mechanical translation stage; and An imaging device comprising:

21. 21. The imaging device of claim 20, further comprising an electronic processor programmed to combine the 2D image or mapping tiles to generate an image or mapping of the IC wafer or chip, said combining comprising stitching together overlapping 2D image or mapping tiles.

22. 22. The imaging device of claim 21, wherein the beam steering device comprises a galvo mirror and the optical train includes an f-theta scan lens and an objective lens.

Images