socket

Abstract

To improve the positional accuracy of the tip of a plunger.SOLUTION: A socket 10 includes a probe 100 having a first taper portion 102, and an insulating support body 200 provided with a through hole 230 having a second taper portion 202 for receiving the first taper portion 102. A first taper angle α of the first taper portion 102 is lower than a second taper angle β of the second taper portion 202.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a socket. [Background technology]

[0002] In order to test a test object such as an integrated circuit, the test object may be electrically connected to a test board via a socket. For example, as described in Patent Document 1, the socket includes a probe and an insulating support having a through-hole through which the probe passes. The probe includes a first plunger that contacts a first electrode of the test object, a second plunger that contacts a second electrode of the test board, and a spring. In testing the test object, the second plunger is brought into contact with the second electrode of the test board, and the first plunger is biased upward by the spring, and then the first plunger is brought into contact with the first electrode of the test object. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2006-308486 Summary of the Invention [Problem to be solved by the invention]

[0004] To allow the probe to slide within the through-hole of the insulating support, a gap is provided between the outer surface of the probe and the inner surface of the through-hole. During testing of the test object, after the second plunger is brought into contact with the second electrode of the test board, the first plunger may be urged upward with the tip of the first plunger in a released state (i.e., with no external force acting on the tip of the first plunger in a direction from the tip of the first plunger to the base end (the side opposite the tip of the first plunger) of the first plunger). However, in this case, the gap between the outer surface of the probe and the inner surface of the through-hole may cause the first plunger to tilt, deteriorating the positional accuracy of the tip of the first plunger.

[0005] One example of an object of the present invention is to improve the positional accuracy of the tip of the plunger. Other objects of the present invention will become apparent from the description of this specification. [Means for solving the problem]

[0006] One aspect of the present invention is a probe having a first tapered portion; an insulating support member provided with a through hole having a second tapered portion that receives the first tapered portion; Equipped with The socket has a taper angle of the first tapered portion that is less than a taper angle of the second tapered portion. [Effects of the Invention]

[0007] According to the above aspect of the present invention, the positional accuracy of the tip of the plunger can be improved. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 2 is a cross-sectional view of a socket according to an embodiment. [Figure 2] 10 is a view for explaining a state in which the first plunger is pressed upward into the through hole with the first contact portion in an open state in the socket according to the embodiment. FIG. [Figure 3] FIG. 3 is an enlarged view of a portion of FIG. 2. [Figure 4] 10 is a view illustrating a state in which the first plunger is pressed upward into the through hole with the first contact portion in an open state in the socket according to the comparative embodiment. FIG. [Figure 5] FIG. 5 is an enlarged view of a portion of FIG. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, similar components are designated by similar reference numerals, and the description thereof will be omitted as appropriate.

[0010] In this specification, ordinal numbers such as "first," "second," and "third" are used merely to distinguish between similarly named configurations, unless otherwise specified, and do not imply any particular characteristics (e.g., order or importance) of the configurations.

[0011] FIG. 1 is a cross-sectional view of a socket 10 according to an embodiment.

[0012] In Figure 1, arrows marked with "+Z" indicate the vertically upward direction, and arrows marked with "-Z" indicate the vertically downward direction. Hereinafter, where necessary, the direction perpendicular to the vertical direction will be referred to as the horizontal direction. This also applies to Figure 2 and subsequent figures.

[0013] The socket 10 is positioned vertically between the test object 20 and the test board 30. The test object 20 is positioned above the socket 10. The test board 30 is positioned below the socket 10. The test object 20 is, for example, an integrated circuit.

[0014] The socket 10 includes a probe 100 and an insulating support 200. A first electrode 22 provided on the lower surface of the test object 20 and a second electrode 32 provided on the upper surface of the test substrate 30 are electrically connected to each other via the probe 100. In this embodiment, the first electrode 22 is a bump, and the second electrode 32 is a pad. The probe 100 includes a tube 110, a spring 112, a first plunger 120, and a second plunger 130. The first plunger 120 includes a flange 122, a first pillar portion 124, and a first contact portion 126. The second plunger 130 includes a second pillar portion 134 and a second contact portion 136. The insulating support 200 includes a first insulating support 210 and a second insulating support 220.

[0015] The tube 110 extends parallel to the vertical direction. A first plunger 120 is provided at the upper end of the tube 110. A second plunger 130 is provided at the lower end of the tube 110. A spring 112 is provided inside the tube 110. The spring 112 biases the first plunger 120 and the second plunger 130 in directions that move them away from each other in the vertical direction. In another example different from this embodiment, the tube 110 may not be provided, and the spring 112 may be provided between the first plunger 120 and the second plunger 130 in the vertical direction.

[0016] The flange 122 is located higher than the upper end of the tube 110. The horizontal diameter of the flange 122 is approximately equal to the horizontal outer diameter of the tube 110. The first columnar portion 124 extends vertically upward from the upper end of the flange 122. The horizontal diameter of the first columnar portion 124 is smaller than the horizontal diameter of the flange 122. The first contact portion 126 is provided at the tip of the first columnar portion 124, i.e., at the upper end of the first columnar portion 124. During testing of the test object 20, the tube 110 and the first plunger 120 are biased together by the spring 112 toward the test object 20, and the first contact portion 126 is in contact with the first electrode 22.

[0017] The second pillar portion 134 extends in the vertical direction. The horizontal diameter of the second pillar portion 134 is smaller than the horizontal inner diameter of the tube 110. With at least a portion of the second pillar portion 134 inserted into a hole provided at the bottom end of the tube 110, the second pillar portion 134 is attached to the tube 110 so as to be movable in the vertical direction. The second contact portion 136 is provided at the tip of the second pillar portion 134, i.e., at the bottom end of the second pillar portion 134. During testing of the test object 20, the second plunger 130 is biased by the spring 112 toward the test board 30, and the second contact portion 136 comes into contact with the second electrode 32.

[0018] The first insulating support 210 and the second insulating support 220 are stacked vertically. The first insulating support 210 is located above the second insulating support 220. The second insulating support 220 is located below the first insulating support 210. The first insulating support 210 is, for example, a pin block, and the second insulating support 220 is, for example, a pin plate.

[0019] The insulating support 200 is provided with a through-hole 230. The through-hole 230 passes through the insulating support 200 in the vertical direction. The through-hole 230 includes a first hole 232, a second hole 234, and a third hole 236. At least a portion of the probe 100 is disposed in the through-hole 230 so as to pass through in the vertical direction.

[0020] The first hole 232 vertically penetrates a portion of the first insulating support 210 including the lower end and vertical center of the first insulating support 210, and a portion of the second insulating support 220 including the upper end and vertical center of the second insulating support 220. The portion of the first hole 232 that penetrates the lower end of the first insulating support 210 and the portion of the first hole 232 that penetrates the upper end of the second insulating support 220 are vertically connected to each other. At least a portion of the tube 110 and at least a portion of the flange 122 are disposed to penetrate the first hole 232 in the vertical direction. The horizontal diameter of the first hole 232 of the first insulating support 210 is larger than both the horizontal outer diameter of the portion of the tube 110 that penetrates the first hole 232 of the first insulating support 210 and the horizontal diameter of the flange 122. Furthermore, the horizontal diameter of the first hole 232 of the second insulating support 220 is larger than the horizontal outer diameter of the portion of the tube 110 that is disposed to pass through the first hole 232 of the second insulating support 220. Therefore, gaps are provided between the outer surface of the portion of the tube 110 that is disposed to pass through the first hole 232 of the first insulating support 210 and the inner surface of the first hole 232 of the first insulating support 210, and between the outer surface of the flange 122 and the inner surface of the first hole 232 of the first insulating support 210. Furthermore, gaps are provided between the outer surface of the portion of the tube 110 that is disposed to pass through the first hole 232 of the second insulating support 220 and the inner surface of the first hole 232 of the second insulating support 220. Therefore, the tube 110 and the flange 122 are slidable in the vertical direction within the first hole 232.

[0021] The second hole 234 vertically penetrates a portion of the first insulating support 210, including the upper end of the first insulating support 210. The lower end of the second hole 234 is vertically connected to the upper end of the first hole 232. At least a portion of the first columnar portion 124 is disposed to penetrate the second hole 234. The horizontal diameter of the second hole 234 is less than the horizontal diameter of the first hole 232. The horizontal diameter of the second hole 234 is equal to or less than the horizontal outer diameter of the tube 110 and the horizontal diameter of the flange 122, and is greater than the horizontal diameter of the first columnar portion 124. Therefore, the tube 110 and the flange 122 are prevented from slipping upward through the second hole 234. A gap is provided between the outer surface of the first columnar portion 124 and the inner surface of the second hole 234. Therefore, the first pillar portion 124 is slidable in the second hole 234 in the vertical direction.

[0022] The third hole 236 vertically penetrates a portion of the second insulating support 220, including the lower end of the second insulating support 220. The upper end of the third hole 236 is vertically connected to the lower end of the first hole 232. At least a portion of the second pillar portion 134 is disposed vertically penetrating the third hole 236. The horizontal diameter of the third hole 236 is less than the horizontal diameter of the first hole 232. The horizontal diameter of the third hole 236 is equal to or less than the horizontal outer diameter of the tube 110 and is greater than the horizontal diameter of the second pillar portion 134. This prevents the tube 110 from slipping downward through the third hole 236. A gap is provided between the outer surface of the second pillar portion 134 and the inner surface of the third hole 236. This allows the second pillar portion 134 to slide vertically within the third hole 236.

[0023] The first plunger 120 has a first tapered portion 102. The first tapered portion 102 is located vertically between the upper end of the flange 122 and the lower end of the first columnar portion 124. The horizontal diameter of the first plunger 120 at the first tapered portion 102 decreases from the upper end of the flange 122 to the lower end of the first columnar portion 124. The first taper angle α of the first tapered portion 102 is the sum of the angles formed by the outer surfaces of both horizontal sides of the first plunger 120 at the first tapered portion 102 with respect to an imaginary line IL that passes through the horizontal center of the through hole 230 and is parallel to the extension direction of the through hole 230. The first taper angle α is also the angle formed by the tangents to the outer surfaces of both horizontal sides of the first plunger 120 at the first tapered portion 102.

[0024] The through hole 230 has a second tapered portion 202. The second tapered portion 202 is located vertically between the upper end of the first hole 232 and the lower end of the second hole 234. The value of the horizontal diameter of the through hole 230 at the second tapered portion 202 decreases from the upper end of the first hole 232 to the lower end of the second hole 234. The second taper angle β, which is the taper angle of the second tapered portion 202, is the sum of the angles formed by the inner surfaces on both sides of the through hole 230 in the horizontal direction with respect to an imaginary line IL that passes through the horizontal center of the through hole 230 and is parallel to the extension direction of the through hole 230. The second taper angle β is also the angle formed by the tangents to the inner surfaces on both sides of the through hole 230 in the horizontal direction at the second tapered portion 202.

[0025] In the embodiment, the first taper angle α of the first tapered portion 102 is less than the second taper angle β of the second tapered portion 202 .

[0026] The ratio of the first taper angle α to the second taper angle β is not limited to the following, but may be, for example, 3 / 5 or more (i.e., 90% or more of 2 / 3) or 33 / 40 or less (i.e., 110% or less of 3 / 4).

[0027] The first taper angle α is not limited to the following, but may be, for example, 55.0° or more and 95.0° or less, 57.5° or more and 92.5° or less, or 60.0° or more and 90.0° or less.

[0028] The second taper angle β is not limited to the following, but may be, for example, 85.0° or more and 125.0° or less, 87.5° or more and 122.5° or less, or 90.0° or more and 120.0° or less.

[0029] Fig. 2 is a diagram illustrating a state in which the first plunger 120 is pressed upward into the through-hole 230 with the first contact portion 126 in the open state in the socket 10 according to the embodiment. Fig. 3 is an enlarged view of a portion of Fig. 2. Fig. 4 is a diagram illustrating a state in which the first plunger 120K is pressed upward into the through-hole 230K with the first contact portion 126K in the open state in the socket 10K according to the comparative embodiment. Fig. 5 is an enlarged view of a portion of Fig. 4.

[0030] The embodiment shown in FIGS. 2 and 3 will be described with reference to FIG.

[0031] 2 and 3, when first contact portion 126 is in an open state, that is, when first contact portion 126 is not in contact with an object such as first electrode 22 and therefore no downward external force is applied to first contact portion 126, second contact portion 136 is in contact with second electrode 32. Tube 110 and first plunger 120 are urged upward together by spring 112, and first plunger 120 is pushed upward in through-hole 230.

[0032] In the embodiment shown in FIGS. 2 and 3, due to a gap between the outer surface of the first pillar portion 124 and the inner surface of the second hole 234, the first plunger 120 is tilted to the left from the vertical direction when viewed from a direction perpendicular to the paper surface of FIGS. 2 and 3. As a result, the first contact portion 126 is displaced to the left by a first distance Δ1 from an imaginary line IL that passes through the horizontal center of the through-hole 230 parallel to the vertical direction when viewed from a direction perpendicular to the paper surface of FIG. 2. The tilt of the first plunger 120 from the vertical direction is not limited to the embodiment shown in FIGS. 2 and 3. For example, the first plunger 120 may be tilted to the right from the vertical direction when viewed from a direction perpendicular to the paper surface of FIGS. 2 and 3.

[0033] 3, the corner between the upper end of the inner surface of second tapered portion 202 of through hole 230 and the lower end of the inner surface of second hole 234 receives first tapered portion 102. When first plunger 120 is pushed upward in through hole 230 by spring 112, first tapered portion 102 is pushed toward second tapered portion 202, and a preload load F is applied to first tapered portion 102 at the contact portion between first tapered portion 102 and second tapered portion 202.

[0034] In the present embodiment, the preload load F is resolved into a first component force F1 represented by F sinθ and a second component force F2 represented by F cosθ. The angle θ is the angle between a direction parallel to the vertical direction, from below to above, and a direction parallel to the normal to the outer surface of the first tapered portion 102, from the side where the first tapered portion 102 is located to the side where the second tapered portion 202 is located. The first component force F1 is a force that moves the first plunger 120 toward the horizontal center of the through hole 230. The second component force F2 is a force that contributes to a frictional force that prevents the first plunger 120 from moving in the tangential direction of the outer surface of the first tapered portion 102 toward the horizontal center of the through hole 230.

[0035] 2 and 3, the first electrode 22 is brought into contact with the first contact portion 126, and the spring 112 is compressed in the vertical direction. As a result, the first contact portion 126 comes into contact with the first electrode 22, with the tube 110 and the first plunger 120 being biased upward as a unit, as shown in FIG.

[0036] Next, a comparative embodiment will be described, as shown in Figures 4 and 5. A socket 10K according to the comparative embodiment is similar to the socket 10 according to the embodiment, except for the following points.

[0037] The first plunger 120K is biased upward by a spring 112K provided inside the tube 110K. The first plunger 120K has a first tapered portion 102K. The first tapered portion 102K is located vertically between the upper end of the flange 122K and the lower end of the first pillar portion 124K. The horizontal diameter of the first plunger 120K at the first tapered portion 102K decreases from the upper end of the flange 122K toward the lower end of the first pillar portion 124K.

[0038] The through hole 230K of the insulating support member 200K (first insulating support member 210K) has a second tapered portion 202K. The second tapered portion 202K is located vertically between the upper end of the first hole 232K and the lower end of the second hole 234K. The value of the horizontal diameter of the through hole 230K in the second tapered portion 202K decreases from the upper end of the first hole 232K toward the lower end of the second hole 234K.

[0039] In the comparative example, the first taper angle α of the first tapered portion 102K is equal to or greater than the second taper angle β of the second tapered portion 202K.

[0040] 4 and 5, due to a gap between the outer surface of the first pillar portion 124K and the inner surface of the second hole 234K, the first plunger 120K is tilted to the left from the vertical direction when viewed from a direction perpendicular to the paper surface of Figures 4 and 5. As a result, the first contact portion 126K is shifted by a second distance Δ2 to the left from an imaginary line IL that passes through the horizontal center of the through-hole 230K parallel to the vertical direction when viewed from a direction perpendicular to the paper surface of Figure 4.

[0041] 5, the second tapered portion 202K receives the corner of the first plunger 120K between the lower end of the outer surface of the first tapered portion 102K and the upper end of the outer surface of the flange 122K. When the first plunger 120K is pushed upward by the spring 112K toward the through-hole 230K, the first tapered portion 102K is pushed toward the second tapered portion 202K, and a preload load F is applied to the first plunger 120K at the contact portion between the first tapered portion 102K and the second tapered portion 202K.

[0042] The preload load F in the comparative example is resolved into a first component force F1 represented by Fsinθ and a second component force F2 represented by Fcosθ. The angle θ represents the angle between a direction parallel to the vertical direction, from below to above, and a direction parallel to the normal to the inner surface of the second tapered portion 202K, from the side where the first tapered portion 102K is located to the side where the second tapered portion 202K is located. The first component force F1 is a force that moves the flange 122K toward the horizontal center of the through hole 230K. The second component force F2 is a force that contributes to a frictional force that prevents the flange 122K from moving tangentially to the inner surface of the second tapered portion 202K toward the center of the through hole 230K.

[0043] The first distance Δ1 of the horizontal displacement of the first contact portion 126 from the imaginary line IL in the embodiment can be smaller than the second distance Δ2 of the horizontal displacement of the first contact portion 126K from the imaginary line IL in the comparative embodiment. The reason is as follows. That is, in the embodiment, the preload load F can generate a torque that rotates the first plunger 120 counterclockwise as viewed from a direction perpendicular to the paper surface of FIG. 3. In the comparative embodiment, the preload load F can also generate a torque that rotates the first plunger 120K counterclockwise as viewed from a direction perpendicular to the paper surface of FIG. 5. However, in the embodiment, the distance from the horizontal center of the first plunger 120 to the position where the preload load F is applied is shorter than the distance from the horizontal center of the first plunger 120K to the position where the preload load F is applied in the comparative embodiment. Therefore, the torque generated by the preload load F in the embodiment can be smaller than the torque generated by the preload load F in the comparative embodiment. Therefore, the first distance Δ1 of the horizontal deviation of the first contact portion 126 from the virtual line IL in the embodiment can be made smaller than the second distance Δ2 of the horizontal deviation of the first contact portion 126K from the virtual line IL in the comparative embodiment.

[0044] Due to the above-described relationship between the first distance Δ1 in the embodiment and the second distance Δ2 in the comparative example, the positional accuracy of the tip of the first plunger 120 in the embodiment can be made better than the positional accuracy of the tip of the first plunger 120K in the comparative example. That is, the horizontal positional accuracy of the first contact portion 126 in the embodiment can be made better than the horizontal positional accuracy of the first contact portion 126K in the comparative example.

[0045] Furthermore, due to the above-described relationship between the first distance Δ1 in the embodiment and the second distance Δ2 in the comparative embodiment, in the embodiment, compared to the comparative embodiment, when the first plunger 120 is pressed upward in the through-hole 230, the outer surface of the first pillar portion 124 and the inner surface of the second hole 234 are less likely to come into contact. For this reason, the horizontal width of the gap between the outer surface of the first pillar portion 124K and the inner surface of the second hole 234K in the embodiment can be made narrower than the horizontal width of the gap between the outer surface of the first pillar portion 124K and the inner surface of the second hole 234K in the comparative embodiment.

[0046] In the embodiment, the first taper angle α may be an acute angle. When the first taper angle α is an acute angle, the outer surface of the first tapered portion 102 can more easily slide along the corner between the upper end of the inner surface of the second tapered portion 202 and the lower end of the inner surface of the second hole 234 in the through hole 230, compared to when the first taper angle α is a right angle or an obtuse angle, and the first plunger 120 can be more easily moved toward the horizontal center of the through hole 230.

[0047] In the embodiment, the static friction coefficient and dynamic friction coefficient between the outer surface of the first tapered portion 102 and the corner of the through hole 230 between the upper end of the second tapered portion 202 and the lower end of the second hole 234 may be set to a predetermined value or less. When the static friction coefficient and the dynamic friction coefficient are equal to or less than the predetermined value, the outer surface of the first tapered portion 102 can slide more easily against the corner of the through hole 230 between the upper end of the second tapered portion 202 and the lower end of the second hole 234, compared to when the static friction coefficient and the dynamic friction coefficient are greater than the predetermined value, and the first plunger 120 can be more easily moved toward the horizontal center of the through hole 230. [Example]

[0048] Table 1 shows the relationship between the first taper angle α, the second taper angle β, the distance Δ, the angle θ, the ratio F1 / F, the ratio F2 / F, and the ratio F1 / F2 in the simulation of the sockets according to each of Example 1, Example 2, Comparative Example 1, and Comparative Example 2. [Table 1]

[0049] Each numerical value in the "α (°)" row in Table 1 indicates the first taper angle α (unit: °). The first taper angle α according to Example 1 and Example 2 corresponds to the first taper angle α of the first taper portion 102 described in the embodiment. The first taper angle α according to Comparative Example 1 and Comparative Example 2 corresponds to the first taper angle α of the first taper portion 102K described in the comparative embodiment.

[0050] Each numerical value in the "β (°)" row in Table 1 indicates the second taper angle β (unit: °). The second taper angle β in Examples 1 and 2 corresponds to the second taper angle β of the second taper portion 202 described in the embodiment. The second taper angle β in Comparative Examples 1 and 2 corresponds to the second taper angle β of the second taper portion 202K described in the comparative embodiment.

[0051] Each numerical value in the "Δ (μm)" row in Table 1 indicates the distance Δ (unit: μm). The distance Δ in Example 1 and Example 2 corresponds to the first distance Δ1 of the horizontal deviation of the first contact portion 126 from the imaginary line IL described in the embodiment. The distance Δ in Comparative Example 1 and Comparative Example 2 corresponds to the second distance Δ2 of the horizontal deviation of the first contact portion 126K from the imaginary line IL described in the comparative embodiment.

[0052] In Table 1, each numerical value in the "F1 / F" row indicates the ratio of the first component force F1 to the preload load F. In Table 1, each numerical value in the "F2 / F" row indicates the ratio of the second component force F2 to the preload load F. In Table 1, each numerical value in the "F1 / F2" row indicates the ratio of the first component force F1 to the second component force F2. The preload load F, the first component force F1, and the second component force F2 in Example 1 and Example 2 correspond to the preload load F, the first component force F1, and the second component force F2, respectively, described in the embodiment. The preload load F, the first component force F1, and the second component force F2 in Comparative Example 1 and Comparative Example 2 correspond to the preload load F, the first component force F1, and the second component force F2, respectively, described in the comparative example.

[0053] In the simulations of Example 1, Example 2, Comparative Example 1, and Comparative Example 2, the first taper angle α and the second taper angle β were set as shown in Table 1. In these simulations, the distance Δ, angle θ, ratio F1 / F, ratio F2 / F, and ratio F1 / F2 were set as shown in Table 1.

[0054] Comparing Examples 1 and 2 with Comparative Examples 1 and 2, it can be said that the distance Δ when the first taper angle α is less than the second angle β can be made smaller than the distance Δ when the first taper angle α is equal to or greater than the second taper angle β.

[0055] A comparison between Example 1 and Example 2 reveals that when the first taper angle α is less than the second angle β, the greater the ratio F1 / F2, the smaller the distance Δ can be. Furthermore, a comparison between Example 1 and Example 2 reveals that the distance Δ when the first taper angle α is an acute angle can be smaller than the distance Δ when the first taper angle α is a right angle.

[0056] In Examples 1 and 2, the ratio of the first taper angle α to the second taper angle β may be, for example, 3 / 5 or more and 33 / 40 or less. The lower limit of this numerical range, 3 / 5, represents 90% of the ratio of the first taper angle α to the second taper angle β, 2 / 3, in Example 1. The upper limit of this numerical range, 33 / 40, represents 110% of the ratio of the first taper angle α to the second taper angle β, 3 / 4, in Example 2.

[0057] In Example 1, the first taper angle α may be 58.0° or greater and 62.0° or less, 58.5° or greater and 61.5° or less, or 59.0° or greater and 61.0° or less, and the second taper angle β may be 88.0° or greater and 92.0° or less, 88.5° or greater and 91.5° or less, or 89.0° or greater and 91.0° or less. The above numerical range of the first taper angle α is estimated from the first taper angle α of 60° in Example 1 and its tolerance. The above numerical range of the second taper angle β is estimated from the second taper angle β of 90° in Example 1 and its tolerance.

[0058] Although the embodiments and examples of the present invention have been described above with reference to the drawings, these are merely examples of the present invention, and various configurations other than those described above can also be adopted.

[0059] For example, a third tapered portion may be provided on the outer surface of the probe 100, in a portion located vertically between the tube 110 and the second plunger 130, such that the horizontal diameter of the probe 100 decreases from top to bottom. Furthermore, a fourth tapered portion may be provided on the inner surface of the through-hole 230, in a portion located vertically between the first hole 232 and the third hole 236, such that the horizontal diameter of the through-hole 230 decreases from top to bottom. When the second plunger 130 is pushed downward, the fourth tapered portion receives the third tapered portion. The third taper angle of the third tapered portion is less than the fourth taper angle of the fourth tapered portion. The positional accuracy of the tip of the second plunger 130 when the third taper angle is less than the fourth taper angle, i.e., the horizontal positional accuracy of the second contact portion 136, is better than the positional accuracy of the tip of the second plunger 130 when the third taper angle is equal to or greater than the fourth taper angle, i.e., the horizontal positional accuracy of the second contact portion 136.

[0060] According to the present specification, the following aspects are provided. (Aspect 1) Aspect 1 is a probe having a first tapered portion; an insulating support member provided with a through hole having a second tapered portion that receives the first tapered portion; Equipped with The socket has a taper angle of the first tapered portion that is less than a taper angle of the second tapered portion. According to the first aspect, the inclination of the plunger provided with the first tapered portion can be reduced when the first tapered portion is pressed toward the second tapered portion, compared to when the taper angle of the first tapered portion is equal to or greater than the taper angle of the second tapered portion. Therefore, the positional accuracy of the plunger tip in the first aspect can be improved compared to when the taper angle of the first tapered portion is equal to or greater than the taper angle of the second tapered portion. The taper angle of the first tapered portion is the sum of the angles formed by the outer surfaces on both sides of the probe in the first tapered portion with respect to an imaginary line passing through the center of the through hole parallel to the extension direction of the through hole. The taper angle of the second tapered portion is the sum of the angles formed by the inner surfaces on both sides of the through hole in the second tapered portion with respect to an imaginary line passing through the center of the through hole parallel to the extension direction of the through hole. (Aspect 2) Aspect 2 is 2. The socket according to claim 1, wherein the taper angle of the first tapered portion is an acute angle. According to aspect 2, compared to when the taper angle of the first tapered portion is a right angle or an obtuse angle, the outer surface of the first tapered portion can be made to slide more easily relative to the through hole, making it easier to move the plunger provided with the first tapered portion toward the center of the through hole. [Explanation of symbols]

[0061] 10 sockets 10K socket 20 Inspection object 22 1st electrode 30 Inspection board 32 2nd electrode 100 probes 102 First tapered section 102K First taper section 110 tubes 110K tube 112 Spring 112K spring 120 First plunger 120K First plunger 122 flange 122K flange 124 1st pillar section 124K 1st pillar section 126 1st contact part 126K 1st contact part 130 Second plunger 134 Second pillar section 136 Second contact part 200 Insulating support 200K Insulator 202 Second tapered section 202K Second taper section 210 First insulating support 210K First insulator support 220 Second insulating support 230 Through hole 230K through hole 232 Hole 1 232K 1st hole 234 Hole 2 234K 2nd hole 236 Hole 3 IL Virtual Line

Claims

1. A probe having a plunger, a tube, and a spring disposed inside the tube; an insulating support provided with a through hole through which at least a portion of the probe is disposed; Equipped with the plunger includes a first tapered portion and a flange located between the first tapered portion and the tube; the through hole has a second tapered portion that receives the first tapered portion; a horizontal diameter of the flange is approximately equal to a horizontal outer diameter of the tube; With the flange located outside the tube, the plunger and the tube are movable together in the through hole by the spring; A socket, wherein a ratio of a taper angle of the first tapered portion to a taper angle of the second tapered portion is equal to or greater than 3 / 5 and equal to or less than 33 / 40.

2. The socket according to claim 1 , wherein the taper angle of the first tapered portion is equal to or greater than 55.0° and equal to or less than 95.0°.

3. 3. The socket according to claim 1, wherein the taper angle of the second tapered portion is equal to or greater than 85.0° and equal to or less than 125.0°.

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