charged particle beam equipment

Abstract

The present invention suppresses a reduction in resolution that is likely to occur when a scanning region is expanded in a charged particle beam device equipped with an aberration corrector. A charged particle source (ES) generates charged particle beams (EB). An aberration corrector (20) is provided on a path through which the charged particle beams pass, and corrects aberration by using multipole lenses HEX 1, HEX 2 having a multiple-stage configuration. A first deflector (SC) is provided between the aberration corrector and a sample stage on which a sample SPL is to be placed, and controls the irradiation position IP of the charged particle beams on the sample. A second deflector DEF1 is provided between the charged particle source and the aberration corrector, and controls the orbit in which the charged particle beams pass in the aberration corrector. A controller (17) controls a deflection amount of the second deflector on the basis of the irradiation position IP controlled by the first deflector.

Description

[Technical Field]

[0001] The present invention relates to a charged particle beam device, for example, a charged particle beam device equipped with an aberration corrector. [Background technology]

[0002] Patent Document 1 discloses a charged particle beam device equipped with a high-order aberration corrector capable of correcting fifth-order spherical aberration and third-order chromatic aberration. In this charged particle beam device, a transfer lens is positioned so that its principal plane coincides with the image point of the aberration corrector. The lens strength of the transfer lens is set so that the aberration generating point of the aberration corrector is projected onto the front focus of the objective lens.

[0003] Patent Document 2 discloses a charged particle beam device that can simultaneously cancel multiple aberrations caused by the distribution of energy and aperture angles of a charged particle beam. The charged particle beam device includes an aberration-generating lens that generates aberrations when the charged particle beam passes off-axis, and a correction lens that focuses the trajectory of the charged particle beam onto the principal plane of the objective lens regardless of its energy. The principal plane of the correction lens is located at a crossover position where multiple charged particle beams with different aperture angles converge after passing through the aberration-generating lens.

[0004] Patent Document 3 discloses a charged particle beam device that can reduce the man-hours and time required for axial adjustment even when equipped with a multistage multipole aberration corrector. The charged particle beam device includes a multistage multipole aberration corrector, a deflector disposed in a stage preceding the multistage multipole aberration corrector, a power supply including a quadrupole wobbler circuit that independently finely adjusts the quadrupole strength at each stage of the multipole, an axis shift calculation unit that calculates the amount of image shift due to the fine adjustment of the quadrupole strength, and a deflection amount calculation unit that calculates the amount of deflection to be fed back to the multipole and deflector in accordance with the shift amount. The deflection amount calculated by the deflection amount calculation unit is obtained by performing multiple stages of deflection in the aberration corrector in conjunction with each other. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2007-128656 [Patent Document 2] Japanese Patent Application Laid-Open No. 2015-95297 [Patent Document 3] Japanese Patent Application Laid-Open No. 2016-143558 Summary of the Invention [Problem to be solved by the invention]

[0006] For example, as shown in Patent Documents 1 to 3, charged particle beam devices equipped with an aberration corrector are known. The aberration corrector is composed of multiple stages of multipole lenses made up of magnetic poles or electrodes, and corrects aberrations that may occur in objective lenses, etc. Charged particle beam devices equipped with an aberration corrector can perform high-resolution observations by increasing the aperture angle compared to devices without an aberration corrector, thereby reducing diffraction aberrations. However, when performing large-field observations or observations using image shift, i.e., when the scanning area of ​​the charged particle beam is expanded, a large aperture angle increases blurring at positions away from the central axis, which can result in a decrease in resolution.

[0007] The present invention has been made in consideration of the above, and one of its purposes is to suppress the decrease in resolution that can occur when the scanning area is widened in a charged particle beam device equipped with an aberration corrector.

[0008] The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings. [Means for solving the problem]

[0009] A brief summary of a representative embodiment of the invention disclosed in this application will be given below.

[0010] A charged particle beam device according to a representative embodiment of the present invention includes a charged particle source, a sample stage, an aberration corrector, a first deflector, a second deflector, and a controller. The charged particle source generates a charged particle beam. The sample stage mounts a sample. The aberration corrector is provided on a path through which the charged particle beam passes and corrects aberrations using a multi-stage multipole lens. The first deflector is provided between the aberration corrector and the sample stage and controls the irradiation position of the charged particle beam on the sample. The second deflector is provided between the charged particle source and the aberration corrector and controls the trajectory of the charged particle beam within the aberration corrector. The controller controls the deflection amount of the second deflector based on the irradiation position by the first deflector. [Effects of the Invention]

[0011] To briefly outline a representative embodiment of the invention disclosed in this application, in a charged particle beam device equipped with an aberration corrector, it is possible to suppress the decrease in resolution that can occur when the scanning area is expanded. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a schematic diagram showing a configuration example of a main part of a charged particle beam device according to a first embodiment. [Figure 2] FIG. 2 is a schematic diagram illustrating an example of an observation method using the charged particle beam device shown in FIG. [Figure 3] 2 is a schematic diagram showing an example of the configuration and operation of a part of the charged particle beam device shown in FIG. 1. FIG. [Figure 4A] FIG. 4 is a schematic diagram showing an example of the configuration of a control table in FIG. 3. [Figure 4B] 4B is a schematic diagram showing an example of the relationship between the scanning position and the deflection amount based on the control table of FIG. 4A. FIG. [Figure 5A] 4 is a diagram showing an example of the results of verifying the relationship between the scanning position and the amount of blur for each of different device configurations in the charged particle beam device shown in FIG. 3. FIG. [Figure 5B]4 is a diagram showing an example of the results of verifying the relationship between the scanning position and the amount of blur for each of different device configurations in the charged particle beam device shown in FIG. 3. FIG. [Figure 6A] FIG. 4 is a diagram showing an example of the results of comparing the maximum amount of blurring for each of different device configurations in the charged particle beam device shown in FIG. 3. [Figure 6B] FIG. 4 is a diagram showing an example of the results of comparing the maximum amount of blurring for each of different device configurations in the charged particle beam device shown in FIG. 3. [Figure 7] 4 is a schematic diagram showing an example of the display content displayed on a display device in the charged particle beam device shown in FIGS. 1 and 3. FIG. [Figure 8] 1. FIG. 6 is a schematic diagram showing an example of the configuration and operation of a part of the charged particle beam device shown in FIG. [Figure 9] FIG. 9 is a diagram showing an example of the results of comparing the maximum amount of blurring for each of different device configurations in the charged particle beam device shown in FIG. 8. [Figure 10] 1. FIG. 9 is a schematic diagram showing an example of the configuration and operation of a part of the charged particle beam device shown in FIG. [Figure 11A] FIG. 11 is a schematic diagram showing an example of the configuration of a control table in FIG. [Figure 11B] 11B is a schematic diagram showing an example of the relationship between the scanning position and the deflection amount after the image shift based on the control table of FIG. 11A. FIG. [Figure 12A] FIG. 10 is a diagram showing an example of blurring caused by electron beam scanning. [Figure 12B] 10A and 10B are diagrams illustrating an example of scanning distortion caused by scanning with an electron beam. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In all drawings for explaining the embodiments, the same components are generally designated by the same reference numerals, and repeated description thereof will be omitted.

[0014] (Embodiment 1) <Outline of charged particle beam equipment> FIG. 1 is a schematic diagram showing an example of the configuration of a main part of a charged particle beam device according to a first embodiment. The charged particle beam device 10 shown in FIG. 1 is, for example, a scanning electron microscope (SEM) or a scanning transmission electron microscope (STEM). In addition, although an electron beam is used as the charged particle beam in this specification, the charged particle beam may also be used as the charged particle beam. The beam is not limited to an electron beam, but may be, for example, an ion beam.

[0015] 1 includes a vacuum vessel 15, a control power supply unit 16, a controller 17, a storage device 18, and a display device 19. Inside the vacuum vessel 15, there are provided an electron source ES, which is a charged particle source, condenser lenses CL1 to CL4, an aperture APT, a deflector (second deflector) DEF1, an aberration corrector 20, a scanning coil (first deflector) SC, an objective lens OBL, and a sample stage STG.

[0016] The electron source ES generates an electron beam EB. The condenser lens CL1 focuses the electron beam EB generated by the electron source ES. The aperture APT controls the aperture angle α of the electron beam EB by removing unnecessary regions of the electron beam EB. The condenser lens CL2 focuses the electron beam EB that has passed through the aperture APT. The condenser lens CL3 converts the electron beam EB focused by the condenser lens CL2 into a parallel electron beam EB and emits it to the aberration corrector 20.

[0017] The deflector (second deflector) DEF1 is provided between the electron source ES and the aberration corrector 20, more specifically, between the condenser lenses CL2 and CL3. The deflector DEF1 deflects the electron beam EB that has passed through the condenser lens CL2, thereby controlling the trajectory of the electron beam EB within the aberration corrector 20 through which the electron beam EB passes, as will be described in detail later.

[0018] The aberration corrector 20 corrects aberrations occurring in the objective lens OBL and the like using a multi-stage multipole lens provided on the path through which the electron beam EB passes. In this example, the aberration corrector 20 includes two-stage hexapole multipole lenses HEX1 and HEX2 and transfer lenses TL1 and TL2. The parallel electron beam EB passes through the condenser lens CL3 and then passes through the multipole lens HEX1. The electron beam EB passes through the multipole lens HEX1 and is transferred to the multipole lens HEX2 by the two transfer lenses TL1 and TL2.

[0019] Each of the two-stage multipole lenses HEX1 and HEX2 has, for example, a 12-pole configuration and excites a hexapole field. The two-stage multipole lenses HEX1 and HEX2 generate rotationally symmetric negative spherical aberration with an intensity according to the distance from the central axis 25, thereby canceling out positive spherical aberration generated in the objective lens OBL, etc. The central axis 25 is the trajectory of the electron beam EB when it travels in a straight line, and is also the optical axis of the objective lens OBL. The second-stage multipole lens HEX2 excites a hexapole field that cancels out the three-fold astigmatism generated in the first-stage multipole lens HEX1.

[0020] The aberration corrector 20 may include deflectors (not shown), for example, between the transfer lenses TL1 and TL2, or between the multipole lens HEX2 and the condenser lens CL4. In this case, these deflectors or the deflector DEF1 shown in FIG. 1 can be used to adjust the optical axis with reference to the central axis 25. The aberration corrector 20 is not limited to a configuration including such hexapole-type two-stage multipole lenses HEX1 and HEX2, but may also be a configuration including, for example, a 4-stage quadrupole-octopole multipole lens that corrects spherical aberration and chromatic aberration.

[0021] The condenser lens CL4 focuses the electron beam EB that has passed through the multipole lens HEX2 in the aberration corrector 20. The sample stage STG carries the sample SPL. The objective lens OBL focuses the electron beam EB that has passed through the condenser lens CL4 onto the irradiation position IP on the sample SPL. At this time, the focusing half angle of the electron beam EB focused on the sample SPL is called the aperture angle α.

[0022] The scanning coil (first deflector) SC is provided between the aberration corrector 20 and the sample stage STG, more specifically, between the condenser lens CL4 and the objective lens OBL, and controls the irradiation position IP of the electron beam EB on the sample SPL. Specifically, the scanning coil SC scans the electron beam EB, in other words, the irradiation position IP of the electron beam EB, on the sample SPL. Alternatively, when the scanning coil SC moves the scanning area of ​​the electron beam EB on the sample SPL, it shifts the irradiation position IP, which is the origin of the scanning area. This operation is called image shift.

[0023] The scanning coil SC can move the scanning area by image shifting and then perform scanning within that scanning area. In this case, the scanning coil SC scans the scanning area after the image shift by, for example, superimposing an offset component representing the amount of deflection associated with the image shift on a variable component representing the amount of deflection associated with scanning within the scanning area. Note that, although an example in which the image shift and scanning are performed by a common scanning coil SC has been shown, they can also be performed by separate coils. In this case, in addition to the scanning coil that performs scanning, a separate image shift coil that performs image shifting is provided.

[0024] The control power supply unit 16 includes multiple power supplies, which operate the electron source ES, condenser lenses CL1-CL4, aperture APT, aberration corrector 20, scanning coil SC, objective lens OBL, and sample stage STG. The sample stage STG is movable on a plane. The scanning area on the sample SPL is determined by appropriately combining the movement of the sample stage STG with image shifting. In addition, the control power supply unit 16 applies a negative voltage called a retarding voltage to the sample stage STG.

[0025] The controller 17 is realized by, for example, a control computer including a processor and a memory. The controller 17 controls the power supplies in the control power supply unit 16 to control, for example, the acceleration voltage of the electron beam EB from the electron source ES, the focal length of each lens, the aperture value of the aperture APT, the correction coefficient of the aberration corrector 20, the deflection amount of each deflector, etc. The storage device 18 is, for example, a non-volatile memory such as an HDD (Hard Disk Drive) or an SSD (Solid State Drive), and stores various data, various programs used by the controller 17, etc. The display device 19 serves as an interface with the user by displaying various information.

[0026] Although omitted in FIG. 1 for simplicity, a detector and the like are also provided inside the vacuum chamber 15. The detector detects the amount of secondary electrons and reflected electrons emitted from the sample SPL in response to irradiation with the electron beam EB, in other words, the primary electron beam. The amount of these secondary electrons and reflected electrons varies depending on the surface shape, etc. of the sample SPL. The detection signal from the detector passes through various signal processing circuits and is then output to the controller 17. Based on the detection signal, the controller 17 creates a detection image representing the surface shape, etc. of the sample SPL and displays it on the display device 19.

[0027] <Problems when using an aberration corrector> 2 is a schematic diagram illustrating an example of an observation method using the charged particle beam device shown in FIG. 1. FIG. 2 shows a state in which a sample SPL such as a semiconductor device is mounted on a sample stage STG. Observation methods using the charged particle beam device 10 mainly include large-field-of-view observation, observation by image shift, and high-resolution observation. Large-field-of-view observation is a method of observing a relatively wide large-field-of-view observation area 30 at low magnification, as shown in FIG. 2, by significantly changing the deflection amount of the scanning coil SC shown in FIG. 1, i.e., by widening the scanning area.

[0028] Observation by image shift is a method of observing relatively narrow observation regions 31a and 31b at high magnification, as shown in FIG. 2, by slightly changing the deflection amount of the scanning coil SC shown in FIG. 1, i.e., narrowing the scanning region. In this case, for example, an offset is added to the deflection amount of the scanning coil SC, so that the observation region 31a is moved to the observation region 31b, and then observation is performed. The amount of movement by image shift is, for example, several μm to several tens of μm. Furthermore, the size Ax of the observation regions 31a and 31b, in other words, the size Ay of the scanning region in the X-axis direction, is, for example, 1 μm or less. The magnification is determined by the ratio between the size of the observation region and the size of the detected image.

[0029] High-resolution observation is a method of observing a narrow observation region around the central axis 25 in FIG. 1 at high magnification by slightly changing the deflection amount of the scanning coil SC without image shifting. By using the aberration corrector 20, it is possible to reduce diffraction aberrations by increasing the opening angle α of the electron beam EB, while mainly correcting spherical aberration, which is a third-order aberration according to the opening angle α. This makes it possible to perform high-resolution observation in a narrow observation region around the central axis 25 compared to a charged particle beam device not equipped with the aberration corrector 20.

[0030] Here, when performing large field of view observation or image shifting, i.e., when the scanning area of ​​the electron beam EB is widened, aberrations caused by the combination of a large opening angle α and the tilt angle of the electron beam EB increase blurring at the irradiation position IP away from the central axis 25, which may result in a decrease in resolution. In this case, there is a risk that the resolution may be lower than in a charged particle beam device using a small opening angle α, i.e., a charged particle beam device not equipped with the aberration corrector 20.

[0031] FIG. 12A is a diagram showing an example of blurring caused by electron beam scanning. FIG. 12A shows the blurring of the electron beam EB at each irradiation position IP when scanning is performed over a 2 μm square scanning area. As shown in FIG. 12A, the blurring becomes larger in peripheral areas away from the central axis 25. FIG. 12B is a diagram showing an example of scanning distortion caused by electron beam scanning. FIG. 12B shows how the actual irradiation position IP deviates from the ideal irradiation position IP′ when the scanning area is wide. When such blurring or scanning distortion occurs, the resolution may decrease.

[0032] For this reason, even when performing large-field-of-view observation or observation using image shift, it is desirable to suppress blurring and scanning distortion in the peripheral region as shown in Figures 12A and 12B, and to suppress a decrease in resolution. At the very least, even when performing large-field-of-view observation or observation using image shift with the charged particle beam device 10 equipped with the aberration corrector 20, it is desirable to achieve a resolution equal to or higher than that of a charged particle beam device not equipped with the aberration corrector 20.

[0033] <Operation of charged particle beam equipment> Figure 3 is a schematic diagram showing an example of the configuration and operation of part of the charged particle beam device shown in Figure 1. Figure 3 shows the electron source ES, condenser lenses CL1 to CL4, aperture APT, deflector DEF1, aberration corrector 20, scanning coil SC, objective lens OBL, sample SPL, control power supply unit 16, controller 17, and storage device 18 shown in Figure 1. Furthermore, a condenser lens (correction lens) CL5 is added to Figure 3.

[0034] The condenser lens CL5 is disposed between the scanning coil SC and the objective lens OBL and functions to correct high-order aberrations. The focal length of the condenser lens CL4 and the position of the condenser lens CL5 are adjusted so that the crossover position of the condenser lens CL4 coincides with the principal plane of the condenser lens CL5. The condenser lens CL5 is controlled so that the deflection fulcrum of the scanning coil SC is located at the position of the objective lens OBL. The scanning coil SC performs two-stage deflection using a two-stage configuration consisting of an upper coil SCu and a lower coil SC1.

[0035] In this configuration, the controller 17 controls the amount of deflection of the deflector (second deflector) DEF1 based on the irradiation position IP on the sample SPL by the scanning coil (first deflector) SC. Specifically, the deflector DEF1 has a single-stage configuration. The controller 17 controls the amount of deflection of the deflector DEF1 so that the trajectory of the electron beam EB passing through the multipole lenses HEX1 and HEX2 of the aberration corrector 20 is translated from the central axis 25 in accordance with the irradiation position IP by the scanning coil SC. In other words, the trajectory of the electron beam EB is changed from a trajectory 26a passing through the central axis 25 to a trajectory 26b away from the central axis 25.

[0036] 3, the controller 17 controls the deflection amount of the deflector DEF1 so that the trajectory 26b passing through the multipole lens HEX1 via the condenser lens CL3 moves in parallel from 0 to the −X-axis direction as the irradiation position IP moves in the +X-axis direction from 0, with the central axis being 0. That is, the controller 17 controls the deflection amount of the deflector DEF1 so that the trajectory 26b moves in parallel from 0 to a position away from the central axis 25. In addition, in response to this, as shown by the arrow 27c, the trajectory 26b passing through the multipole lens HEX2 is controlled to move in parallel from 0 to the +X-axis direction, that is, to a position away from the central axis 25.

[0037] Similarly, the controller 17 controls the deflection amount of the deflector DEF1 so that the trajectory 26b passing through the multipole lens HEX1 via the condenser lens CL3 moves in parallel from 0 to the +X-axis direction as the irradiation position IP moves in the -X-axis direction from 0. In addition, in response to this, the trajectory 26b passing through the multipole lens HEX2 is controlled to move in parallel from 0 to the -X-axis direction. In this way, the deflection amount of the deflector DEF1 is controlled so that the trajectory 26b in the multipole lenses HEX1 and HEX2 moves in parallel to a position farther from the central axis 25 as the irradiation position IP moves away from the central axis 25.

[0038] The aberration corrector 20 generates aberrations in the opposite direction to the aberrations generated in the objective lens OBL, etc., and functions to cancel out the aberrations generated in the objective lens OBL, etc. The same applies when scanning the electron beam EB; if the trajectory 26b is controlled to move away from the central axis 25 in conjunction with the tilt angle β of the electron beam EB with respect to the sample SPL, the aberration corrector 20 generates aberrations in the opposite direction to the aberrations generated in the objective lens OBL, etc., for example, aberrations in the opposite direction with a similar tendency. As a result, it becomes possible to cancel out the aberrations generated in the objective lens OBL, etc., according to the tilt angle β, by passing the trajectory 26b off the axis of the aberration corrector 20.

[0039] To perform such control, the storage device 18 stores a control table (first control table) 28. Fig. 4A is a schematic diagram showing an example of the configuration of the control table in Fig. 3. The control table 28 represents the relationship between the scanning position by the scanning coil SC, in other words, the irradiation position IP, the control value SCV of the scanning coil SC, and thus the deflection amount, and the control value DCV of the deflector DEF1, and thus the deflection amount. The control table 28 is created in advance based on simulation or actual measurement and stored in the storage device 18.

[0040] Based on the control table 28, the controller 17 controls the scanning position of the scanning coil (first deflector) SC using the control value SCV, and controls the deflection amount of the deflector DEF1 (second deflector) using the control value DCV. In the example shown in FIG. 4A, the control values ​​SCV and DCV are determined for each scanning position in units of 0.2 μm. The control values ​​SCV and DCV within 0.2 μm are approximately calculated by interpolation. The size of the unit of the scanning position may be determined, for example, according to the required resolution.

[0041] 3 controls the power supply, for example, the current value, of the scan coil SC in accordance with the control value SCV from the controller 17, thereby controlling the deflection amount of the scan coil SC in accordance with the control value SCV. Similarly, the control power supply unit 16 controls the power supply, for example, the current value, of the deflector DEF1 in accordance with the control value DCV from the controller 17, thereby controlling the deflection amount of the deflector DEF1 in accordance with the control value DCV.

[0042] FIG. 4B is a schematic diagram showing an example of the relationship between the scanning position and the deflection amount based on the control table of FIG. 4A. As shown in FIG. 4B, as the scanning position moves away from the central axis 25, i.e., 0, the deflection amount of the scanning coil SC increases, and the deflector DEF1 also increases. Note that for simplicity, FIG. 4B shows the characteristics of a linear function, but strictly speaking, the characteristics may be trigonometric functions or the like. Also, while FIGS. 3 and 4A illustrate one-dimensional scanning, i.e., in the X-axis direction, two-dimensional scanning, i.e., in the X-axis and Y-axis directions, is possible, and a control table corresponding to two dimensions is provided.

[0043] <Simulation results> 5A and 5B are diagrams showing examples of the results of examining the relationship between the scanning position and the amount of blur for each of the different device configurations in the charged particle beam device shown in FIG. 5A and 5B. The amount of blur shown in FIGS. 5A and 5B includes the amount of blur caused by spherical aberration and the amount of blur caused by chromatic aberration. However, since the comparison here excludes the effect that the larger the aperture angle α, the more reduced the diffraction aberration is, the amount of blur caused by the diffraction aberration and the amount of blur caused by the light source size x optical magnification are excluded from the amount of blur shown in FIGS. 5A and 5B.

[0044] The characteristics 35a, 35b, and 35c shown in Figure 5A all represent the case where the condenser lens CL5 for correcting high-order aberrations shown in Figure 3 is not provided. Characteristic 35a represents the case where correction by the aberration corrector 20 is performed, but in the case where two-stage deflection is used instead of the three-stage deflection shown in Figure 3, i.e., the deflector DEF1 is not provided, and the opening angle α is set to 15 m [rad]. When two-stage deflection is used, the trajectory of the electron beam EB within the aberration corrector 20 becomes an on-axis trajectory 26a passing through the central axis 25, regardless of the irradiation position IP. Characteristic 35a represents the characteristics of a typical charged particle beam device equipped with the aberration corrector 20.

[0045] The characteristic 35b is obtained when there is no correction by the aberration corrector 20, i.e., when the aberration corrector 20 is not provided or is not functioning, when two-stage deflection is used, and when the aperture angle α is set to 6 m [rad]. The characteristic 35b represents the characteristic of a general charged particle beam device that is not equipped with the aberration corrector 20.

[0046] 5A, in the case with correction shown by characteristic 35a, the opening angle α is larger than in the case without correction shown by characteristic 35b, and therefore, as the scanning area becomes wider, that is, as the tilt angle β becomes larger, the amount of blur becomes larger than in characteristic 35b. In this example, when the scanning position exceeds about 200 [nm], the amount of blur in the case with correction becomes larger than in the case without correction.

[0047] 5A, characteristic 35d in Fig. 5B is obtained when correction by aberration corrector 20 is performed and when two-stage deflection is used, but unlike characteristic 35a, it is obtained when the aperture angle α is set to 6 m [rad] instead of 15 m [rad]. As can be seen from a comparison between characteristic 35d and characteristic 35b in Fig. 5B, when the aperture angle α is the same, there is no significant difference in the amount of blur between with and without correction.

[0048] On the other hand, characteristic 35c in Fig. 5A differs from characteristic 35a in the case of correction with two-stage deflection, and is obtained when correction is performed and three-stage deflection is used, as shown in Fig. 3. As can be seen from a comparison between characteristic 35a and characteristic 35c in Fig. 5A, when correction is performed, using three-stage deflection instead of two-stage deflection makes it possible to significantly improve the amount of blur at scanning positions away from central axis 25.

[0049] Furthermore, as can be seen from a comparison between characteristics 35b and 35c in Fig. 5A, by using a combination of correction and three-stage deflection, it is possible to achieve an amount of blurring that is the same as or smaller than that without correction, i.e., when the opening angle α is small, even when the scanning area is wide. More specifically, with correction, the amount of blurring is smaller than when no correction is used because it is possible to reduce diffraction aberration by increasing the opening angle α.

[0050] FIG. 5B shows the results of a test performed when the aperture angles α are equal (6 m rad), illustrating the effects of three-stage deflection and the effect of the condenser lens (correction lens) CL5 for correcting high-order aberrations. In FIG. 5B, characteristic 35d corresponds to the case where correction is performed and two-stage deflection is performed, and the condenser lens CL5 is not provided. On the other hand, characteristic 35e corresponds to the case where correction is performed and two-stage deflection is performed, but unlike characteristic 35d, the condenser lens CL5 is provided. As can be seen from a comparison between characteristic 35d and characteristic 35e, providing the condenser lens CL5 significantly improves the amount of blur at scanning positions away from the central axis 25.

[0051] Like characteristic 35e, characteristic 35f is obtained with correction and with condenser lens CL5, but unlike characteristic 35e, characteristic 35f is obtained with three-stage deflection instead of two-stage deflection. As can be seen from a comparison between characteristic 35e and characteristic 35f, the use of three-stage deflection makes it possible to further improve the amount of blur at scanning positions away from central axis 25.

[0052] 6A and 6B are diagrams showing an example of the results of comparing the maximum blurring amount for each different device configuration in the charged particle beam device shown in Fig. 3. Here, the results are shown of a comparison of the blurring amount at the four corner positions where the maximum blurring amount occurs when scanning is performed in a 2 μm square scanning area as shown in Fig. 12A.

[0053] In Figure 6A, results 36a and 36b are for the case where two-stage deflection is used, and results 36c and 36d are for the case where three-stage deflection is used. Furthermore, in each of results 36a to 36d, "A" is for the case where no correction is performed, and "B" is for the case where correction is performed. In Figure 6A, regardless of "A" and "B," that is, regardless of whether correction is performed or not, the opening angle α is the same, here 6 m [rad] for both.

[0054] First, as can be seen from a comparison between "A" and "B" in the results 36a and 36b, when the aperture angle α is the same, the maximum amount of blur is about the same regardless of whether correction is performed or not. Also, as can be seen from a comparison between the results 36a and 36b, the provision of the condenser lens CL5 So, regardless of whether correction is applied or not, the maximum amount of blur will be smaller.

[0055] On the other hand, as shown in "B" of result 36c, when a combination of correction and three-stage deflection is used, the maximum amount of blur is smaller than when a combination of no correction and three-stage deflection is used as shown in "A" of result 36c, or when a combination of no correction and two-stage deflection is used as shown in "A" of result 36a. When the combination of correction and three-stage deflection shown in "B" of result 36c is further combined with condenser lens CL5, the maximum amount of blur is further reduced as shown in "B" of result 36d.

[0056] In Fig. 6B, similar to Fig. 6A, results 37a and 37b are for the case where two-stage deflection is used, and results 37c and 37d are for the case where three-stage deflection is used. Furthermore, for each of results 37a to 37d, "A" is for the case without correction, and "B" is for the case with correction. However, in Fig. 6B, the opening angle α without correction shown in "A" is 6 m [rad], as in Fig. 6A, but the opening angle α with correction is 15 m [rad], unlike Fig. 6A.

[0057] In a typical device configuration, two-stage deflection is used, and for example, without correction, "A" in result 37a is obtained, i.e., the result when α=6 m [rad] and the condenser lens CL5 is not present, and with correction, "B" in result 37b is obtained, i.e., the result when α=15 m [rad] and the condenser lens CL5 is present. However, with correction, the maximum amount of blur can be more than twice as large as with no correction.

[0058] Therefore, when correction is applied, by using three-stage deflection, the maximum amount of blur can be reduced compared to "A" in result 37a, even without the condenser lens CL5, as shown in "B" in result 37c. Furthermore, when the condenser lens CL5 is combined, the maximum amount of blur can be further reduced, as shown in "B" in result 37d. The maximum amount of blur shown in "B" in result 37d is similar to that when no correction is applied and α = 6 m [rad] is combined with the condenser lens CL5, as shown in "A" in result 37b.

[0059] <User setting function> FIG. 7 is a schematic diagram showing an example of the display content displayed on the display device in the charged particle beam device shown in FIGS. 1 and 3. As shown in FIG. 7, the user can select, via the display device 19, whether to enable or disable the operation of controlling the deflection amount of the deflector (second deflector) DEF1. In this example, when the "DEF1 interlocking mode" is set to "on," the interlocking control of the deflector DEF1 according to the scanning position as described in FIG. 3 is enabled, and when the "off" is selected, the interlocking control is disabled. When the interlocking control is disabled, the trajectory of the electron beam EB within the aberration corrector 20 is maintained on the axial trajectory 26a shown in FIG. 3.

[0060] For example, when performing high-resolution observation as described in Fig. 2, that is, when observing a narrow observation region around the central axis 25 at high magnification, it is possible to obtain sufficient resolution without using interlocking control of the deflector DEF1. On the other hand, when interlocking control is used in such high-resolution observation, it is necessary to create a fairly fine unit of the scanning position in the control table 28 shown in Fig. 4A, and it may be necessary to use a deflector DEF1 at the same level as the scanning coil SC, that is, a deflector DEF1 with a high setting resolution of the deflection amount and a fast response speed.

[0061] On the other hand, when performing large-field observation or observation using image shift, the resolution required for high-resolution observation is often not as high. In this case, a deflector DEF1 with a relatively low set resolution and a relatively slow response speed does not pose any particular problems. For example, when using such a deflector DEF1, the user can disable the interlocking control when performing high-resolution observation via the display device 19 shown in FIG. 7, and enable the interlocking control when performing large-field observation or observation using image shift.

[0062] 7, a user can refer to the control table 28 shown in FIG. 4A via the display device 19 and can also change the contents of the control table 28. For example, in the charged particle beam device 10, variations can occur between devices even if they are the same model. Furthermore, the degree of variation may differ depending on the installation location of the device, etc. In such cases, the contents of the control table 28 can be corrected via the display device 19 as shown in FIG. 7.

[0063] Although the control table 28 is stored in the storage device 18, a measurement table may also be stored. For example, in a critical dimension-scanning electron microscope (CD-SEM), a calibration sample whose pattern length is known in advance is used. By measuring the above, the error between the measured value and the known pattern length is calculated, and a measurement table containing correction values ​​for correcting the error may be created. When the interlocking control of the deflector DEF1 is used, the contents of the measurement table may also change, so it is desirable to create a separate measurement table to be used during interlocking control.

[0064] <Major Effects of the First Embodiment> As described above, in the system of the first embodiment, in the charged particle beam device 10 equipped with the aberration corrector 20, a single-stage deflector DEF1 is provided before the aberration corrector 20, and the deflector DEF1 controls the deflection amount according to the scanning position of the electron beam EB, in other words, the irradiation position IP. This makes it possible to suppress a decrease in resolution that can occur when the opening angle α of the electron beam EB is large and the scanning area is widened, i.e., when the tilt angle β of the electron beam EB is large. Furthermore, even when the scanning area is widened, it is possible to achieve a resolution that is equal to or higher than that of a charged particle beam device not equipped with the aberration corrector 20, i.e., a charged particle beam device using a small opening angle α.

[0065] (Embodiment 2) <Operation of charged particle beam equipment> 8 is a schematic diagram showing an example of the configuration and operation of a part of the configuration shown in FIG. 1 in a charged particle beam device according to embodiment 2. FIG. 8 shows an example of a configuration similar to the example of the configuration shown in FIG. 3. However, unlike the case of FIG. 3, in FIG. 8, the deflector DEF1 provided in the stage preceding the aberration corrector 20 is not a single-stage configuration, but a two-stage configuration consisting of an upper-stage deflector DEF1u and a lower-stage deflector DEF1l.

[0066] 3, the controller 17 controls the deflection amount of the deflector (second deflector) DEF1 based on the irradiation position IP on the sample SPL by the scanning coil (first deflector) SC. However, unlike the case of FIG. 3, the controller 17 controls the deflection amount of the deflector DEF1 so that the angles θ1 and θ2 formed between the trajectory of the electron beam EB passing through the multipole lenses HEX1 and HEX2 of the aberration corrector 20 and the central axis 25 change according to the irradiation position IP by the scanning coil SC. In other words, the trajectory of the electron beam EB is changed from a trajectory 26a passing through the central axis 25 to a trajectory 26c angled with respect to the central axis 25.

[0067] More specifically, the controller 17 controls the deflection amount of the deflector DEF1 so that, with the central axis at 0, the angle θ1 of the trajectory 26c passing through the multipole lens HEX1 via the condenser lens CL3 with respect to the central axis 25 increases as the irradiation position IP moves from 0 in the +X-axis direction. Correspondingly, the angle θ2 of the trajectory 26c passing through the multipole lens HEX2 with respect to the central axis 25 is also controlled to increase. This makes it possible to cancel out the aberration occurring in accordance with the tilt angle β of the electron beam EB with respect to the sample SPL by passing the trajectory 26c off the axis of the aberration corrector 20.

[0068] 8, the storage device 18 stores the same control table 40 as in FIG. 4A. However, the control values ​​for the deflector DEF1 include a control value for the upper deflector DEF1u and a control value for the lower deflector DEF1l. More specifically, as in FIG. 3, a control table is provided that corresponds to two-dimensional scanning, i.e., scanning in the X-axis direction and the Y-axis direction.

[0069] <Simulation results> Fig. 9 is a diagram showing an example of the results of comparing the maximum blurring amounts for different device configurations in the charged particle beam device shown in Fig. 8. Here, similar to the cases of Fig. 6A and Fig. 6B, the results of comparing the blurring amounts at the four corner positions where the maximum blurring amount occurs when scanning is performed in a 2 μm square scanning area as shown in Fig. 12A are shown.

[0070] In Fig. 9, results 41a and 41b are for cases without correction, both using two-stage deflection. Results 41c, 41d, and 41e are for cases with correction, using four-stage deflection, three-stage deflection, and four-stage deflection, respectively. In each of results 41a to 41e, "C" is for the case where the opening angle α is 15 m [rad], and "D" is for the case where the opening angle α is 6 m [rad].

[0071] As can be seen from a comparison between "D" in result 41b and "D" in result 41c, both have the same aperture angle α, and when the condenser lens (corrective lens) CL5 is present, the maximum amount of blur is smaller when using a combination of correction and four-stage deflection as shown in FIG. 8 compared to when there is no correction. Also, as can be seen from a comparison between result 41c and result 41d, when comparing the four-stage deflection shown in FIG. 8 with the three-stage deflection shown in FIG. 3, the maximum amount of blur is smaller with three-stage deflection. Note that "C" in result 41e is different from "C" in result 41c and is for the case without the condenser lens CL5. When the condenser lens CL5 is not present, the maximum amount of blur is larger than when it is present.

[0072] <Major Effects of the Second Embodiment> As described above, even when a four-stage deflector, i.e., a two-stage deflector DEF1 is used instead of a three-stage deflector, i.e., a single-stage deflector DEF1, as in the method of embodiment 2, it is possible to obtain the same effects as those described in embodiment 1. That is, it is possible to suppress the degradation of resolution that can occur when the opening angle α of the electron beam EB is large and the scanning area is widened, i.e., when the tilt angle β of the electron beam EB is large.

[0073] (Embodiment 3) <Operation of charged particle beam equipment> FIG. 10 is a schematic diagram showing an example of the configuration and operation of a part of FIG. 1 in a charged particle beam device according to a third embodiment. FIG. 10 shows a configuration example similar to that shown in FIG. 3. However, unlike the case of FIG. 3, in FIG. 10, the scanning coil (first deflector) SC performs image shifting instead of scanning. That is, when the scanning coil SC moves the scanning area of ​​the electron beam EB on the sample SPL, it shifts the irradiation position IP, which is the origin of the scanning area. Then, the controller 17 controls the deflection amount of the deflector (second deflector) DEF1 based on the shift amount by the scanning coil SC.

[0074] The detailed method for controlling the deflection amount of deflector DEF1 is substantially the same as in the case of Fig. 3. That is, as shown by arrows 46a and 46b in Fig. 10, when shifting the irradiation position IP, which serves as the origin, from 0 to a predetermined position in the +X-axis direction, controller 17 controls the deflection amount of deflector DEF1 so that trajectory 26b passing through multipole lens HEX1 via condenser lens CL3 moves in parallel from 0 to a predetermined position in the -X-axis direction. Correspondingly, as shown by arrow 46c, trajectory 26b passing through multipole lens HEX2 is controlled to move in parallel from 0 to a predetermined position in the +X-axis direction.

[0075] With the image shift performed in this manner, the scanning coil SC further scans the electron beam EB within a scanning region 47 to which the image shift has been performed. However, unlike the case of FIG. 3, the controller 17 maintains the deflection amount of the deflector DEF1 while the scanning coil SC is scanning within the scanning region 47. In addition, in accordance with this operation, the storage device 18 in FIG. 10 stores a control table (second control table) 45 different from that in FIG. 3.

[0076] FIG. 11A is a schematic diagram showing an example of the configuration of the control table in FIG. 10. In the control table (second control table) 45 shown in FIG. 11A, unlike the control table (first control table) 28 shown in FIG. 4A, the unit of the scanning position is a value based on the image shift amount, which in this example is 5 μm. Based on the control table 45, the controller 17 controls the image shift amount by the scanning coil SC using the control value SCV and controls the deflection amount of the deflector DEF1 using the control value DCV. Here, in the case of FIG. 4A, the control value DCV of the deflector DEF1 within the unit of the scanning position is calculated by interpolation, but in the case of FIG. 11A, such interpolation is not necessary.

[0077] Fig. 11B is a schematic diagram showing an example of the relationship between the scanning position and the deflection amount after the image shift based on the control table of Fig. 11A. As shown in Fig. 11B, the deflection amount by the deflector DEF1 is controlled so as to have a one-to-one correspondence with the shift amount by the scanning coil SC. The deflection amount by the deflector DEF1 is maintained while the scanning coil SC scans the electron beam EB within the scanning region 47 after the image shift.

[0078] As described in FIG. 4B, the characteristic shown in FIG. 11B may be a trigonometric function rather than a linear function, as shown in FIG. 4B. Specifically, a control table corresponding to two-dimensional image shifting is provided, as described in FIG. 4B. Although three-stage deflection is used in FIG. 10, a four-stage deflection as shown in FIG. 8 may be used instead. Although the control table 45 is used here for image shift observation, it can also be used for large-scale observation. In this case, the deflection amount of the scanning coil SC changes linearly, and the deflection amount of the deflector DEF1 changes stepwise in FIG. 11B.

[0079] <Major Effects of the Third Embodiment> As described above, in the method of the third embodiment, the deflection amount by the deflector DEF1 is controlled in conjunction with the image shift amount. This also makes it possible to obtain the same effects as those described in the first embodiment. That is, it becomes possible to suppress the degradation of resolution that can occur when the opening angle α of the electron beam EB is large and the scanning area is widened, i.e., when the tilt angle β of the electron beam EB is large.

[0080] When linked to the image shift amount, the resolution may be lower than when linked to the scanning amount as shown in embodiment 1. However, the resolution required for observation using image shift or large field of view observation can be sufficiently obtained. Furthermore, as described in FIG. 7, by sacrificing some resolution when performing observation using image shift or large field of view observation, it becomes possible to reduce the cost of the deflector DEF1.

[0081] The invention made by the inventor has been specifically described above based on the embodiments, but the present invention is not limited to the above embodiments and can be modified in various ways without departing from the spirit of the invention. For example, the above-described embodiments have been described in detail to clearly explain the present invention, and the present invention is not necessarily limited to those including all of the described configurations. Furthermore, it is possible to replace part of the configuration of one embodiment with the configuration of another embodiment, or to add the configuration of another embodiment to the configuration of one embodiment. Furthermore, it is possible to add, delete, or replace part of the configuration of each embodiment with other configurations. [Explanation of symbols]

[0082] 10...Charged particle beam device, 17...Controller, 18...Storage device, 20...Aberration corrector, 25...Central axis, 26a to 26c...Electron beam trajectory, 28, 40, 45...Control table, CL5...Condenser lens (correction lens), DEF1...Deflector (second deflector), EB...Electron beam (charged particle beam), ES...Electron source (charged particle source), HEX1, HEX2...Multipole lens, IP...Irradiation position, OBL...Objective lens, SC...Scanning coil (first deflector), SPL...Sample, STG...Sample stage

Claims

1. a charged particle source that generates a charged particle beam; a sample stage on which a sample is mounted; an aberration corrector that is provided on a path through which the charged particle beam passes and corrects aberrations using a multi-stage multipole lens; a first deflector provided between the aberration corrector and the sample stage, the first deflector controlling the irradiation position of the charged particle beam on the sample; a second deflector provided between the charged particle source and the aberration corrector, the second deflector controlling a trajectory of the charged particle beam passing through the aberration corrector; a controller that controls the amount of deflection of the second deflector based on the irradiation position of the first deflector; Equipped with the first deflector scans the charged particle beam on the sample; the controller controls the deflection amount of the second deflector in conjunction with the deflection amount associated with the scanning of the first deflector. Charged particle beam device.

2. 2. The charged particle beam device according to claim 1, further comprising a storage device for storing a first control table representing a relationship between a scanning position by the first deflector and a deflection amount by the second deflector; the controller controls a scanning position by the first deflector, and controls a deflection amount by the second deflector based on the first control table; Charged particle beam device.

3. 2. The charged particle beam device according to claim 1, the controller is capable of selecting, by setting, whether to enable or disable an operation of controlling the deflection amount of the second deflector; Charged particle beam device.

4. 2. The charged particle beam device according to claim 1, further comprising a correction lens provided between the first deflector and the sample stage for correcting high-order aberrations; Charged particle beam device.

5. A charged particle source that generates a charged particle beam; a sample stage on which a sample is mounted; an aberration corrector that is provided on a path through which the charged particle beam passes and corrects aberrations using a multi-stage multipole lens; a first deflector provided between the aberration corrector and the sample stage, the first deflector controlling the irradiation position of the charged particle beam on the sample; a second deflector provided between the charged particle source and the aberration corrector, the second deflector controlling a trajectory of the charged particle beam passing through the aberration corrector; a controller that controls the amount of deflection of the second deflector based on the irradiation position of the first deflector; Equipped with the first deflector shifts an irradiation position that is an origin of the scanning area when moving the scanning area of ​​the charged particle beam on the sample; the controller controls the deflection amount of the second deflector based on the shift amount of the first deflector. Charged particle beam device.

6. 6. The charged particle beam device according to claim 5, the first deflector further scans the charged particle beam within the scanning region; the controller maintains the deflection amount of the second deflector while the first deflector is scanning within the scanning region; Charged particle beam device.

7. 6. The charged particle beam device according to claim 5, further comprising a storage device for storing a second control table representing a relationship between a shift amount by the first deflector and a deflection amount by the second deflector; the controller controls the shift amount by the first deflector, and controls the deflection amount by the second deflector based on the second control table; Charged particle beam device.

8. A charged particle source that generates a charged particle beam; a sample stage on which a sample is mounted; an aberration corrector that is provided on a path through which the charged particle beam passes and corrects aberrations using a multi-stage multipole lens; a first deflector provided between the aberration corrector and the sample stage, the first deflector controlling the irradiation position of the charged particle beam on the sample; a second deflector provided between the charged particle source and the aberration corrector, the second deflector controlling a trajectory of the charged particle beam passing through the aberration corrector; a controller that controls the amount of deflection of the second deflector based on the irradiation position of the first deflector; Equipped with the second deflector is a single-stage deflector, the controller controls the deflection amount of the second deflector so that a trajectory in the multipole lens through which the charged particle beam passes is moved parallel to the central axis of the trajectory along which the charged particle beam travels in a straight line, in accordance with the irradiation position by the first deflector. Charged particle beam device.

9. 9. The charged particle beam device according to claim 8, the controller controls the deflection amount of the second deflector so that the further the irradiation position by the first deflector is from the central axis, the more the trajectory in the multipole lens moves in parallel to a position farther from the central axis. Charged particle beam device.

10. A charged particle source that generates a charged particle beam; a sample stage on which a sample is mounted; an aberration corrector that is provided on a path through which the charged particle beam passes and corrects aberrations using a multi-stage multipole lens; a first deflector provided between the aberration corrector and the sample stage, the first deflector controlling the irradiation position of the charged particle beam on the sample; a second deflector provided between the charged particle source and the aberration corrector, the second deflector controlling a trajectory of the charged particle beam passing through the aberration corrector; a controller that controls the amount of deflection of the second deflector based on the irradiation position of the first deflector; Equipped with the second deflector is a two-stage deflector, The controller controlling a deflection amount of the second deflector such that an angle formed between a trajectory of the charged particle beam in the multipole lens through which the charged particle beam passes and the central axis of the trajectory is changed according to the irradiation position of the first deflector; controlling the deflection amount of the second deflector so that the angle formed between the trajectory in the multipole lens and the central axis increases as the irradiation position by the first deflector becomes farther from the central axis; Charged particle beam device.

Images