Removal and classification equipment

Abstract

To remove particles attached to a workpiece while preventing reattachment of the particles.SOLUTION: In an ultrasonic cleaning nozzle 2, a vibration surface 59 is ultrasonically vibrated to vary an air pressure between the vibration surface 59 and a surface to be cleaned 112, thereby floating particles from the surface to be cleaned 112, and the floated particles are sucked through a suction port 76 of a suction unit 70 to remove the particles from the surface 112 to be cleaned. In this manner, the ultrasonic cleaning nozzle 2 removes particles from the surface 112 to be cleaned without injecting fluid (such as air) onto the surface 112 to be cleaned. Therefore, it is possible to prevent the particles from scattering together with the fluid and reattaching to a workpiece 110 or attaching to the ultrasonic cleaning device 1 or to equipment including the ultrasonic cleaning device 1.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a removal device and a classification device. [Background technology]

[0002] In the technology disclosed in Patent Document 1, ultrasonically vibrated fluid is sprayed to blow off particles (dirt, dust) adhering to the top surface of the object to be cleaned, and the particles are sucked in together with the fluid to perform cleaning. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2018-158524 [Patent Document 2] Japanese Patent Application Laid-Open No. 2001-079443 [Patent Document 3] Japanese Patent Application Publication No. 2019-214006 Summary of the Invention [Problem to be solved by the invention]

[0004] However, since it is difficult to suck up all of the jetted fluid, particles blown away by the jetted fluid may re-adhere to the workpiece. Therefore, when removing particles adhering to the top surface of an object to be cleaned, there is a problem to be solved in that it is necessary to prevent the particles from adhering again.

[0005] Furthermore, as disclosed in Patent Documents 2 and 3, classification devices that classify particles by size place particles in a water tank, rotate the water in the tank, and classify the particles based on the rate at which they settle. Therefore, it takes time for small particles to settle, and it also takes time for the classified particles to dry after being removed from the tank. Therefore, there is a problem to be solved in the classification device, that is, to perform classification in a short time. [Means for solving the problem]

[0006] The removal device of the present invention (the present removal device) is a removal device for removing particles adhering to the upper surface of a workpiece, and includes an ultrasonic vibration unit in which an ultrasonic vibration plate is arranged, suction ports arranged in a ring shape outside the outer periphery of the lower surface of the ultrasonic vibration unit, and a suction port for removing particles adhering to the area of ​​the upper surface of the workpiece facing the lower surface of the ultrasonic vibration unit by vibrating the ultrasonic vibration plate and varying the air pressure between the lower surface of the ultrasonic vibration unit and the upper surface of the workpiece. 、 Levitating from the area, Further, the area is pushed out of the region, and the area is arranged outside the region. At the suction port The particles Suction and remove particles from the workpiece a control unit; , The ultrasonic vibration unit comprises a first cylindrical portion which forms the lower end of the ultrasonic vibration unit and has a vibration surface as the lower surface of the ultrasonic vibration unit facing the upper surface of the workpiece, a second cylindrical portion which is connected to the first cylindrical portion above the first cylindrical portion and has a diameter larger than that of the first cylindrical portion, a third cylindrical portion which is connected to the second cylindrical portion above the second cylindrical portion, the ultrasonic vibration plate which is arranged above the third cylindrical portion, and a fixing plate which is arranged on the ultrasonic vibration plate and which sandwiches and fixes the ultrasonic vibration plate together with the third cylindrical portion. . The classification device of the present invention (the present classification device) is a classification device that classifies particles placed on the upper surface of a stage, and is equipped with an ultrasonic vibration unit in which an ultrasonic vibration plate is arranged, a suction port that is arranged in a ring shape outside the outer periphery of the lower surface of the ultrasonic vibration unit, a suction path for connecting the suction port to a suction source, a collection unit that is arranged in the suction path and collects particles sucked in through the suction port, and a control unit that controls the frequency at which the ultrasonic vibration plate vibrates to a predetermined frequency corresponding to the diameter of the particles to be collected.The ultrasonic vibration plate vibrates at the predetermined frequency to ultrasonically vibrate the lower surface of the ultrasonic vibration unit, and by varying the air pressure between the lower surface of the ultrasonic vibration unit and the upper surface of the stage, particles are floated from the area on the upper surface of the stage facing the lower surface of the ultrasonic vibration unit, and the floated particles are sucked in by the suction port and collected by the collection unit. [Effects of the Invention]

[0007] In this removal device, the underside of the ultrasonic vibration unit is ultrasonically vibrated, and the air pressure between this underside and the top surface of the workpiece is changed, causing particles to float up from the top surface of the workpiece, and the floated particles are then sucked up through a suction port. In this way, the removal device removes particles from the upper surface of the workpiece without spraying a fluid (such as air) onto the upper surface of the workpiece, which prevents particles from scattering along with the fluid, and therefore prevents the scattered particles from re-adhering to the workpiece or the device.

[0008] In addition, in this classification device, the lower surface of the ultrasonic vibration unit is ultrasonically vibrated, and the air pressure between this lower surface and the upper surface of the stage is changed, causing particles to float from the upper surface of the stage, and the floated particles are sucked in by the suction port and collected by the collection section. In this way, the present classification device collects particles without injecting a fluid onto the upper surface of the stage, thereby preventing the particles from scattering along with the fluid. Furthermore, by vibrating the ultrasonic vibration plate at a frequency corresponding to the diameter of the particles to be collected, the particles can be easily collected, making it possible to classify the particles easily and in a short time. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a perspective view showing a configuration of an ultrasonic cleaning device. [Figure 2] FIG. 2 is an explanatory diagram showing the configuration of an ultrasonic cleaning nozzle as a removal device. [Figure 3] FIG. 2 is an explanatory diagram showing the configuration of a classification device. DETAILED DESCRIPTION OF THE INVENTION

[0010] 1 is a perspective view showing the configuration of an ultrasonic cleaning device 1 according to this embodiment. The ultrasonic cleaning device 1 cleans a workpiece 110 as an object to be cleaned by sucking particles adhering to the workpiece 110.

[0011] The workpiece 110 is, for example, a circular plate-shaped semiconductor wafer made of a silicon base material or the like, and has a substantially flat surface to be cleaned 112. The surface to be cleaned 112 is, for example, a surface that has been ground using a grinding wheel. Particles of various sizes (such as dirt or dust) are attached to the surface to be cleaned 112.

[0012] A surface 111 of the workpiece 110 facing downward in FIG. 1 has, for example, a plurality of devices formed thereon and is protected by a protective tape (not shown).

[0013] The workpiece 110 may be an as-sliced ​​wafer that does not include devices and that is cut or peeled from a silicon ingot.

[0014] As shown in FIG. 1, the ultrasonic cleaning device 1 includes a stage 10 as a holding table for holding the workpiece 110, a casing 20 for accommodating the stage 10, a stage rotation mechanism 30 for rotating the stage 10, an ultrasonic cleaning nozzle 2 as a removal device for removing particles from the workpiece 110, a nozzle moving mechanism 40 for moving the ultrasonic cleaning nozzle 2, and a control unit 7 for controlling the operation of the ultrasonic cleaning device 1.

[0015] The stage 10 has a circular holding surface 11. The holding surface 11 is connected to a suction source (not shown), so that the workpiece 110 can be held by suction with the surface 112 to be cleaned facing upward.

[0016] For example, the workpiece 110 may form a work set including a tape with a larger diameter than the workpiece 110 attached to the surface 111, and an annular frame attached to the tape. In this case, the stage 10 may be equipped with, for example, a pendulum-type fixing clamp or a mechanical clamp. The stage 10 may then hold the workpiece 110 via the annular frame by fixing the annular frame with these clamps.

[0017] The stage 10 may also be configured to be movable up and down by a lifting mechanism (not shown) made up of an air cylinder or the like. The lifting mechanism raises the stage 10 to position it at a height suitable for loading and unloading the workpiece 110. The lifting mechanism also lowers the stage 10 while holding the workpiece 110 to position the stage 10 at a height suitable for cleaning within the casing 20.

[0018] The stage 10 is housed in the internal space of a casing 20. The casing 20 includes an outer wall 21 that surrounds the stage 10, and a bottom plate 23. The bottom plate 23 is integrally connected to the lower part of the outer wall 21, and has a through-hole (not shown) in the center through which the spindle 31 is inserted. Note that in FIG. 1, part of the outer wall 21 of the casing 20 is cut away to show the interior of the casing 20.

[0019] The casing 20 is supported by a plurality of legs 26. The upper ends of the legs 26 are fixed to the lower surface of the bottom plate 23.

[0020] The stage rotation mechanism 30 is disposed below the stage 10 and rotates the stage 10 around a rotation axis passing through the center of the holding surface 11. The stage rotation mechanism 30 includes a spindle 31 and a spindle motor 33 that drives the spindle 31 to rotate.

[0021] The upper end of the spindle 31 is fixed to the lower surface of the stage 10, and extends in the Z-axis direction, which is perpendicular to the holding surface 11. The spindle motor 33 is connected to the lower end side of the spindle 31. When the spindle motor 33 rotates the spindle 31, the stage 10 is rotated, and the workpiece 110 held on the holding surface 11 is rotated.

[0022] The nozzle moving mechanism 40 includes a rotating arm 41 that is inverted L-shaped when viewed from the side, a lifting unit 43 connected to the lower end of the rotating arm 41, and a rotating motor 45 connected to the lower end of the lifting unit 43.

[0023] The ultrasonic cleaning nozzle 2 is disposed at the tip end of the swivel arm 41. The lifting unit 43 moves the swivel arm 41 up and down along the Z axis, thereby moving the ultrasonic cleaning nozzle 2 up and down relative to the workpiece 110 held on the stage 10. The swivel motor 45 moves the lifting unit 43 and the swivel arm 41 in a horizontal direction, thereby moving the ultrasonic cleaning nozzle 2 horizontally relative to the workpiece 110.

[0024] The ultrasonic cleaning nozzle 2 functions as a removal device that removes particles adhering to the surface to be cleaned 112, which is the upper surface of the workpiece 110. As shown in Fig. 2, the ultrasonic cleaning nozzle 2 includes a cylindrical ultrasonic vibration unit 50 having an ultrasonic vibration plate 60 disposed on the upper end side thereof, and a suction part 70 that is a cylindrical casing that houses the ultrasonic vibration unit 50.

[0025] The ultrasonic vibration unit 50 comprises a first cylindrical portion 51 which forms the lower end of the ultrasonic vibration unit 50, a second cylindrical portion 52 which is arranged above the first cylindrical portion 51, a third cylindrical portion 53 which is arranged above the second cylindrical portion 52, and an ultrasonic vibration plate 60 which is arranged above the third cylindrical portion 53.

[0026] The first cylindrical portion 51 has a vibration surface 59 which is the end surface on the -Z direction side. This vibration surface 59 becomes the lower surface of the ultrasonic vibration unit 50 which faces the surface 112 to be cleaned of the workpiece 110. The second cylindrical portion 52 has a diameter larger than the diameter of the first cylindrical portion 51 and is connected to the first cylindrical portion 51 with the same central axis as the first cylindrical portion 51. The first cylindrical portion 51 and the second cylindrical portion 52 are made of a predetermined metal.

[0027] A base 58 of the first cylindrical portion 51 is integrally connected to the second cylindrical portion 52. The outer peripheral surface of this base 58 is formed to have an R-shaped incline that widens toward the end.

[0028] The third cylindrical portion 53 is made of a predetermined metal, and has a lower narrow diameter portion 54 having a relatively small diameter, and an upper wide diameter portion 55 having a relatively large diameter.

[0029] The narrow diameter portion 54 of the third cylindrical portion 53 has approximately the same diameter as the first cylindrical portion 51. The lower end of the narrow diameter portion 54 is connected to the upper end of the second cylindrical portion 52 by a connecting screw or the like (not shown).

[0030] The large diameter portion 55 of the third cylindrical portion 53 is set to have, for example, approximately the same diameter as the diameter of the ultrasonic vibration plate 60. The ultrasonic vibration plate 60 is bonded to the upper end of the large diameter portion 55 by a predetermined brazing member or the like.

[0031] The third cylindrical portion 53 serves as a booster that increases or decreases the amplitude (the magnitude of vibration) of the ultrasonic vibration transmitted from the ultrasonic vibration plate 60. Note that the ultrasonic vibration unit 50 does not necessarily have to include the third cylindrical portion 53.

[0032] The ultrasonic vibration plate 60 includes a first piezoelectric element 61 and a second piezoelectric element 62, which are stacked on top of each other and expand and contract when a voltage is applied. The first piezoelectric element 61 and the second piezoelectric element 62 are made of, for example, a piezoelectric element, which is a type of ceramic. Electrodes (not shown) are attached to the first piezoelectric element 61 and the second piezoelectric element 62, respectively, and a high-frequency power supply 65 is connected via the electrodes and wiring 64.

[0033] The high-frequency power supply 65 applies an AC voltage to the first piezoelectric element 61 and the second piezoelectric element 62, thereby supplying high-frequency power to the ultrasonic vibration plate 60. The high-frequency power supply 65 repeatedly turns on and off the application of voltage at a predetermined frequency, causing the first piezoelectric element 61 and the second piezoelectric element 62 to expand and contract in the Z-axis direction. This expansion and contraction motion then becomes mechanical ultrasonic vibration. In this way, the ultrasonic vibration plate 60 generates ultrasonic vibration.

[0034] A fixing plate 57 is disposed on the ultrasonic vibration plate 60. The fixing plate 57 is fixed onto the ultrasonic vibration plate 60 by fixing bolts (not shown) that screw into the third cylindrical portion 53. Therefore, the ultrasonic vibration plate 60 is sandwiched and fixed from both sides in the Z-axis direction by the fixing plate 57 and the third cylindrical portion 53. Alternatively, the ultrasonic vibration plate 60 may be formed in a ring shape, a female screw formed at the center of the thick-diameter portion 55 of the third cylindrical portion 53, a through-hole formed at the center of the fixing plate 57, and a screw passing through the through-hole threaded into the female screw of the thick-diameter portion 55, thereby clamping and fixing the ultrasonic vibration plate 60 between the thick-diameter portion 55 and the fixing plate 57.

[0035] In the ultrasonic vibration unit 50, the ultrasonic vibrations (vibrations in the Z-axis direction) generated by the ultrasonic vibration plate 60 are amplified by the third cylindrical portion 53, which acts as a booster, and transmitted to the second cylindrical portion 52, and further transmitted from the second cylindrical portion 52 to the first cylindrical portion 51, causing the vibration surface 59 of the first cylindrical portion 51 to ultrasonically vibrate in the Z-axis direction, which is perpendicular to the vibration surface 59. This causes ultrasonic vibrations to be emitted from the vibration surface 59.

[0036] The suction section 70 that houses the ultrasonic vibration unit 50 has a substantially cylindrical sidewall 72, and the ultrasonic vibration unit 50 is inserted into an intra-cylindrical space formed inside the sidewall 72 so that its longitudinal direction (Z-axis direction) is aligned. The vibration surface 59 of the first cylindrical section 51 of the ultrasonic vibration unit 50 is exposed from an opening 74 at the lower end of the sidewall 72.

[0037] The diameter of the lower end of side wall 72 tapers toward opening 74. A first suction path 75 is formed inside side wall 72, and a suction source 80 is connected to the upper end of first suction path 75 via an exhaust port 77 and a second suction path 81. The lower end of first suction path 75 forms an annular suction port 76 that opens to surround opening 74 of side wall 72. In this way, suction port 76 is connected to suction source 80 via first suction path 75 and second suction path 81.

[0038] The suction port 76 is arranged in a ring shape outside the outer periphery of the vibration surface 59 of the first cylindrical portion 51, which is the lower surface of the ultrasonic vibration unit 50. In the suction unit 70, the suction port 76 is connected to the suction source 80 via the first suction path 75 and the second suction path 81, so that a suction force can be applied to the suction port 76.

[0039] The control unit 7 shown in FIG. 1 controls each component of the ultrasonic cleaning device 1 to perform a cleaning operation on the workpiece 110 held on the stage 10. The cleaning operation of the workpiece 110 by the ultrasonic cleaning device 1 will be described below.

[0040] First, the operator places the workpiece 110 on the holding surface 11 so that the center of the workpiece 110 coincides with the center of the holding surface 11 of the stage 10 and so that the surface 112 to be cleaned faces upward. Then, the control unit 7 activates a suction source (not shown) to apply suction force to the holding surface 11. As a result, the holding surface 11 of the stage 10 suction-holds the surface 111 of the workpiece 110.

[0041] Thereafter, the control unit 7 controls the rotation motor 45 of the nozzle moving mechanism 40 to rotate the rotation arm 41 in the direction of the arrow 202. As a result, the ultrasonic cleaning nozzle 2 is moved from the retracted position outside the stage 10 to above the workpiece 110, and the vibration surface 59 of the ultrasonic vibration unit 50 in the ultrasonic cleaning nozzle 2 faces the surface 112 to be cleaned of the workpiece 110, as shown in FIG.

[0042] Thereafter, the control unit 7 controls the lifting unit 43 (see Figure 1) of the nozzle moving mechanism 40 to adjust the distance between the vibration surface 59 of the ultrasonic vibration unit 50 and the surface 112 to be cleaned of the workpiece 110 to a value in the range of, for example, 0.3 mm to 1 mm (for example, 0.5 mm).

[0043] Next, the control unit 7 causes the vibration surface 59, which is the lower surface of the ultrasonic vibration unit 50, to ultrasonically vibrate by vibrating the ultrasonic vibration plate 60 in the ultrasonic vibration unit 50 shown in FIG.

[0044] Specifically, the control unit 7 drives the high-frequency power supply 65 to supply high-frequency power to the ultrasonic vibration plate 60 in the ultrasonic vibration unit 50. This causes the ultrasonic vibration plate 60 to vibrate, and the vibrations are transmitted to the vibration surface 59, which is the lower surface of the ultrasonic vibration unit 50, causing the vibration surface 59 to ultrasonically vibrate. This causes ultrasonic vibrations to be emitted from the vibration surface 59.

[0045] By using such ultrasonic vibrations, the control unit 7 varies the air pressure between the vibration surface 59 and the surface to be cleaned 112, which is the upper surface of the workpiece 110, so that particles 300 adhering to the area of ​​the surface to be cleaned 112 of the workpiece 110 facing the vibration surface 59 are pushed out of this area and floated outside this area. In other words, the ultrasonic vibration causes the air pressure between the vibrating surface 59 and the surface 112 to be cleaned to become higher than the pressure of the surrounding air, pushing out the air from the gap, and the air pressure in the gap becomes lower than the pressure of the surrounding air, so that the surrounding air is sent into the gap, causing the particles to float up in the air in the gap, and next, when the air pressure in the gap becomes higher than the pressure of the surrounding air, the air is pushed out from the gap, and the air containing the floated particles 300 is pushed out from the gap, causing the particles 300 to float to the outside of the vibrating surface 59 of the first cylindrical portion 51.

[0046] Furthermore, the control unit 7 vibrates the ultrasonic vibration plate 60, and at the same time, connects the suction source 80 to the suction port 76 of the suction unit 70 in the ultrasonic cleaning nozzle 2 via the second suction path 81 and the first suction path 75. As a result, particles 300 that have floated due to the vibration are sucked through the suction port 76 located outside the vibration surface 59, and the particles 300 are removed from the workpiece 110. In this way, the area of ​​the surface 112 to be cleaned of the workpiece 110 that faces the vibration surface 59 is cleaned.

[0047] 1 to rotate the stage 10 holding the workpiece 110 in the direction of arrow 201, and also controls the turning motor 45 of the nozzle moving mechanism 40 to turn the ultrasonic cleaning nozzle 2 in the direction of arrow 202. That is, the control unit 7 moves the workpiece 110 and the ultrasonic cleaning nozzle 2 relatively in a direction parallel to the surface 112 to be cleaned of the workpiece 110. As a result, the entire surface 112 to be cleaned of the workpiece 110 faces the vibration surface 59 and is cleaned by the ultrasonic cleaning nozzle 2. The sucked particles 300 are collected in a dust box (not shown) connected to the second suction path 81, for example.

[0048] As described above, in the ultrasonic cleaning nozzle 2 of the ultrasonic cleaning device 1 according to this embodiment, the vibration surface 59 is ultrasonically vibrated, and the air pressure between the vibration surface 59 and the surface 112 to be cleaned is changed to cause particles to float from the surface 112 to be cleaned, and the floated particles are then sucked by the suction port 76 of the suction section 70, thereby removing the particles from the surface 112 to be cleaned.

[0049] In this way, the ultrasonic cleaning nozzle 2 of the ultrasonic cleaning device 1 removes particles from the surface 112 to be cleaned without spraying a fluid (such as air) onto the surface 112 to be cleaned, thereby preventing the particles from scattering along with the fluid. This prevents the scattered particles from re-adhering to the workpiece 110 or to the ultrasonic cleaning device 1 or equipment equipped with the ultrasonic cleaning device 1. Therefore, for example, if the ultrasonic cleaning device 1 is equipped in a tape mounter, it is possible to prevent particles from adhering to the adhesive glue of the tape.

[0050] In the above-described embodiment, the ultrasonic cleaning device 1 has the ultrasonic cleaning nozzle 2 as a removal device for removing particles on the surface 112 to be cleaned of the workpiece 110. In this regard, as shown in FIG. 3, the ultrasonic cleaning device 1 includes an ultrasonic cleaning nozzle 2 and a collection section 3, and may be equipped with a classification device 5 that classifies particles placed on a holding surface 11, which is the upper surface of a stage 10.

[0051] The collection unit 3 is a member that collects particles sucked through the suction port 76 of the ultrasonic cleaning nozzle 2, and is arranged in a suction path that connects the suction port 76 of the ultrasonic cleaning nozzle 2 to the suction source 80. Specifically, the recovery unit 3 includes a cylindrical or rectangular tubular housing 90, and an inlet 101 to which the above-described second suction path 81 is connected is provided near a top plate 92 of a side plate 91 of the housing 90. In addition, an outlet 102 to which a third suction path 83 connected to the suction source 80 is connected is provided in the top plate 92 of the housing 90.

[0052] In this way, the collection unit 3 of the classifier 5 is disposed between the second suction path 81, which is part of the suction path, and the third suction path 83. Therefore, in the classifier 5, the suction source 80 is connected to the suction port 76 via the third suction path 83, the collection unit 3, the second suction path 81, and the first suction path 75 of the ultrasonic cleaning nozzle 2, thereby applying a suction force to the suction port 76.

[0053] A particle recovery member 93 for recovering particles is disposed within the housing 90 of the recovery unit 3. The particle recovery member 93 has a cylindrical or rectangular tubular shape, and is attached to the top plate 92 of the housing 90 so as to extend in the Z-axis direction. The lower end of the particle recovery member 93 is open, forming an intake port 99 for taking in particles that have flowed into the housing 90.

[0054] Furthermore, a plurality of first collection shelves 95 are provided extending in the +X direction on the inner surface on the -X direction side of the particle collection member 93. A predetermined gap is formed between the tip of the first collection shelf 95 and the inner surface on the +X direction side of the particle collection member 93.

[0055] Furthermore, on the inner surface of the particle collection member 93 on the +X direction side, a plurality of second collection shelves 96 are provided so as to extend in the -X direction and to be positioned between the first collection shelves 95. A predetermined gap is also formed between the tip of the second collection shelf 96 and the inner surface of the particle collection member 93 on the -X direction side.

[0056] Furthermore, a filter 97 is provided above the first collection shelf 95 and the second collection shelf 96 of the particle collection member 93 so as to be in contact with the top plate 92 and the outlet 102 of the housing 90 .

[0057] In addition, a lid member 98 for opening and closing the lower part of the housing 90 is provided at the lower end of the side plate 91 of the housing 90. By opening the lid member 98, the lower part of the housing 90 is exposed, and it becomes possible to attach and detach the particle collection member 93 to and from the housing 90.

[0058] The following describes the classification operation using the classification device 5. This classification operation is performed in a state where the holding surface 11 of the stage 10 is not holding the workpiece 110.

[0059] First, as shown in Fig. 1, the control unit 7 controls the rotation motor 45 of the nozzle moving mechanism 40 to rotate the rotation arm 41 in the direction of arrow 202. As a result, the ultrasonic cleaning nozzle 2 is moved from the retracted position outside the stage 10 to above the stage 10, and the vibration surface 59 of the ultrasonic vibration unit 50 in the ultrasonic cleaning nozzle 2 faces the holding surface 11 of the stage 10, as shown in Fig. 3.

[0060] Thereafter, the control unit 7 controls the lifting unit 43 (see Figure 1) of the nozzle moving mechanism 40 to adjust the distance between the vibration surface 59 of the ultrasonic vibration unit 50 and the holding surface 11 of the stage 10 to a value in the range of, for example, 0.3 mm to 1 mm (for example, 0.5 mm).

[0061] Next, the control unit 7 causes the vibration surface 59, which is the lower surface of the ultrasonic vibration unit 50, to ultrasonically vibrate by vibrating the ultrasonic vibration plate 60 in the ultrasonic vibration unit 50 shown in FIG.

[0062] Specifically, the control unit 7 drives the high-frequency power supply 65 to supply high-frequency power to the ultrasonic vibration plate 60 in the ultrasonic vibration unit 50. This causes the ultrasonic vibration plate 60 to vibrate, and the vibrations are transmitted to the vibration surface 59, which is the lower surface of the ultrasonic vibration unit 50, causing the vibration surface 59 to ultrasonically vibrate. This causes ultrasonic vibrations to be emitted from the vibration surface 59.

[0063] At this time, the control unit 7 controls the frequency at which the ultrasonic vibration plate 60 vibrates to a predetermined frequency corresponding to the diameter of the particles to be collected (particles to be collected) using the high-frequency power supply 65. As a result, the ultrasonic vibration plate 60 vibrates at the predetermined frequency, causing the vibration surface 59 to ultrasonically vibrate. It should be noted that the control unit 7 may, for example, collect particles with smaller particle diameters before particles with larger particle diameters.

[0064] By using such ultrasonic vibrations, the control unit 7 varies the air pressure between the vibration surface 59 and the holding surface 11, pushing out the particles 310 to be collected that are placed in the area of ​​the holding surface 11 facing the vibration surface 59 and floating them outside this area. In other words, the ultrasonic vibration causes the air pressure between the vibration surface 59 and the holding surface 11 to become higher than the pressure of the surrounding air, pushing out the air from the gap, and the air pressure in the gap becomes lower than the pressure of the surrounding air, so that the surrounding air is sent into the gap, causing the particles to float up in the air in the gap, and next, when the air pressure in the gap becomes higher than the pressure of the surrounding air, the air is pushed out from the gap, and the air containing the floated particles 310 is pushed out from the gap, causing the particles 310 to float to the outside of the vibration surface 59 of the first cylindrical portion 51.

[0065] Furthermore, the control unit 7 vibrates the ultrasonic vibration plate 60, and simultaneously connects the suction source 80 to the suction port 76 of the suction unit 70 in the ultrasonic cleaning nozzle 2 via the third suction path 83, the collection unit 3, the second suction path 81, and the first suction path 75. As a result, particles 310 to be collected that have floated up from the holding surface 11 due to the vibration are sucked through the suction port 76 located outside the vibration surface 59. The sucked particles 310 are then collected by the collection unit 3.

[0066] That is, particles 310 sucked through suction port 76 flow into housing 90 of recovery unit 3 via first suction path 75, second suction path 81, and inlet 101. Then, particles 310 that have flowed into housing 90 are subjected to the suction force of suction source 80 within housing 90, travel in the -Z direction between side plate 91 of housing 90 and the outer surface of particle recovery member 93, and then enter particle recovery member 93 through intake port 99 at the lower end of particle recovery member 93.

[0067] Particles 310 that have entered particle collection member 93 move upward due to the suction force of suction source 80. During this movement, particles 310 come into contact with first collection shelf 95 and second collection shelf 96 that extend in the X-axis direction, and are captured by first collection shelf 95 and second collection shelf 96. Particles that are not captured by the first collection shelf 95 and the second collection shelf 96 are captured by a filter 97 disposed at the upper end of the particle collection member 93.

[0068] 1 to rotate the stage 10 in the direction of arrow 201, and also controls the turning motor 45 of the nozzle moving mechanism 40 to turn the ultrasonic cleaning nozzle 2 in the direction of arrow 202. That is, the control unit 7 moves the stage 10 and the ultrasonic cleaning nozzle 2 relatively in a direction parallel to the holding surface 11 of the stage 10. As a result, the entire surface of the holding surface 11 of the stage 10 faces the vibration surface 59, and the particles 310 to be collected are sucked in.

[0069] As described above, when the ultrasonic cleaning device 1 is equipped with the classification device 5, the vibration surface 59 of the ultrasonic cleaning nozzle 2 is ultrasonically vibrated, and the air pressure between the vibration surface 59 and the holding surface 11 is changed to cause particles to float from the holding surface 11, and the floated particles are then sucked by the suction port 76 of the suction section 70, thereby removing and recovering the particles from the holding surface 11.

[0070] In this way, the classifying device 5 collects particles without injecting a fluid onto the holding surface 11, thereby preventing the particles from scattering along with the fluid. Furthermore, by vibrating the ultrasonic vibration plate 60 at a frequency corresponding to the diameter of the particles to be collected, the particles can be easily collected. Therefore, compared to a configuration in which classification is performed using a water tank, there is no need to settle and dry the particles, making it possible to classify the particles easily and in a short time. [Explanation of symbols]

[0071] 1: ultrasonic cleaning device, 2: ultrasonic cleaning nozzle, 3: collection section, 5: classification device, 7: control unit, 10: stage, 11: holding surface, 20: casing, 21: outer wall, 23: bottom plate, 26: legs, 30: stage rotation mechanism, 31: spindle, 33: spindle motor, 40: nozzle moving mechanism, 41: swivel arm, 43: lifting unit, 45: swivel motor, 50: ultrasonic vibration unit, 51: first cylindrical portion, 52: second cylindrical portion, 53: third cylindrical portion, 54: thin diameter portion, 55: thick diameter portion, 57: fixing plate, 58: base, 59: vibration surface, 60: ultrasonic vibration plate, 61: first piezoelectric element, 62: second piezoelectric element, 64: wiring, 65: high frequency power supply, 70: suction part, 72: side wall, 74: opening, 75: first suction passage, 76: suction port, 77: exhaust port, 80: suction source, 81: second suction path, 83: third suction path, 90: housing, 91: side panel, 92: top plate, 93: particle collection member, 95: first collection shelf, 96: second collection shelf, 97: filter, 98: cover member, 99: intake port, 101: inlet port, 102: outlet port, 110: workpiece, 111: surface, 112: surface to be cleaned, 201: arrow, 202: arrow, 300: Particle, 310: Particle

Claims

1. A removal device for removing particles adhering to the upper surface of a workpiece, an ultrasonic vibration unit in which an ultrasonic vibration plate is disposed; a suction port arranged in an annular shape outside the outer periphery of the lower surface of the ultrasonic vibration unit; a control unit that ultrasonically vibrates the lower surface of the ultrasonic vibration unit by vibration of the ultrasonic vibration plate, and fluctuates the air pressure between the lower surface of the ultrasonic vibration unit and the upper surface of the workpiece, thereby floating particles adhering to an area on the upper surface of the workpiece facing the lower surface of the ultrasonic vibration unit from the area, pushing them out of the area, and sucking the particles through the suction port located outside the area, thereby removing the particles from the workpiece; The ultrasonic vibration unit comprises: a first cylindrical portion that forms a lower end of the ultrasonic vibration unit and has a vibration surface that serves as the lower surface of the ultrasonic vibration unit and faces the upper surface of the workpiece; a second cylindrical portion connected to the first cylindrical portion above the first cylindrical portion and having a diameter larger than that of the first cylindrical portion; a third cylindrical portion connected to the second cylindrical portion above the second cylindrical portion; the ultrasonic vibration plate disposed above the third cylindrical portion; a fixing plate disposed on the ultrasonic vibration plate and sandwiching and fixing the ultrasonic vibration plate together with the third cylindrical portion, removal device.

2. A classification device that classifies particles placed on an upper surface of a stage, an ultrasonic vibration unit in which an ultrasonic vibration plate is disposed; a suction port arranged in an annular shape outside the outer periphery of the lower surface of the ultrasonic vibration unit; a suction path for communicating the suction port with a suction source; a collection unit disposed in the suction path and configured to collect particles sucked through the suction port; a control unit that controls the frequency at which the ultrasonic vibration plate vibrates to a predetermined frequency corresponding to the diameter of the particles to be collected, The ultrasonic vibration plate is vibrated at a predetermined frequency to ultrasonically vibrate the lower surface of the ultrasonic vibration unit, and the air pressure between the lower surface of the ultrasonic vibration unit and the upper surface of the stage is varied to cause particles to float from a region on the upper surface of the stage facing the lower surface of the ultrasonic vibration unit, and the floated particles are sucked by the suction port and collected by the collection section. Classifying device.

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