Cutting device

Abstract

To provide a cutting device capable of reducing the size of a frame used for holding a substrate.SOLUTION: A cutting device 1 cuts a substrate F along a scribe line formed on the substrate F. The cutting device 1 includes a plurality of upper break bars 60 having different length of a cutting edge in a direction along a scribe line, and a switching mechanism 100 for switching a plurality of upper break bars 60 so that one upper break bar 60 out of the plurality of upper break bars 60 is arranged at a use position where a cutting edge thereof can come into contact with the substrate F. The switching mechanism 100 includes: a bar holder in which a plurality of upper break bars 60 is arranged in a circumferential direction and which can rotate around a rotation axis parallel to the direction in which the plurality of upper break bars 60 extends; and a first actuator that rotates the bar holder.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a cutting device for cutting a substrate. [Background technology]

[0002] Conventionally, there has been known a cutting device that cuts a substrate made of a brittle material such as a glass substrate or a semiconductor wafer by three-point bending between a first blade located on the back side of the substrate and a pair of second blades located on the front side of the substrate on which a scribe line is formed (see, for example, Patent Document 1). The first blade constitutes a first breaking bar, and the pair of second blades constitute second breaking bars.

[0003] The pair of second blades are positioned a small distance apart. During breaking, the scribe line is located midway between the two second blades, and the substrate is positioned so that the position of the first blade coincides with the position of the scribe line. The first blade then moves closer to the second blade, pressing against the substrate. This causes stress to concentrate at the tip of the crack in the scribe line, causing the crack to extend toward the first blade, and the substrate is divided. As the substrate is moved in a direction perpendicular to the scribe lines, it is divided at each of the multiple scribe line positions.

[0004] The cutting device may be configured so that the second blade moves closer to the first blade and presses against the substrate. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2013-43414 Summary of the Invention [Problem to be solved by the invention]

[0006] The substrate is formed into a circular shape, and its inner peripheral edge can be held in a circular annular frame via an adhesive sheet attached to the backside of the substrate. The frame holding the substrate is set on a moving table provided in the cutting device.

[0007] In a frame with a circular inner periphery, the spacing between the inside of the frame in the direction perpendicular to the scribe line decreases as you move away from the center to both sides. For this reason, in the past, it was necessary to make the frame significantly larger than the size of the substrate to prevent interference between the frame and the blade at positions away from the center during breaking, which would hinder three-point bending, and this could increase the running costs of the adhesive sheet and increase the size of the cutting device.

[0008] In consideration of the above-mentioned issues, if it were possible to switch to a break bar with a cutting edge of a length appropriate for the width of the portion to be divided (the length of the scribe line), it would be unnecessary to significantly increase the size of the frame relative to the size of the substrate. This also applies when the substrate is held by a frame with a non-circular inner periphery.

[0009] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a cutting device that can reduce the size of the frame used to hold the substrate. [Means for solving the problem]

[0010] A main aspect of the present invention relates to a cutting device for cutting a substrate along a scribe line formed on the substrate. The cutting device according to this aspect includes a plurality of breaking bars having cutting edges with different lengths along the scribe line, and a switching mechanism for switching the plurality of breaking bars so that one of the plurality of breaking bars is positioned at a use position where the cutting edge can come into contact with the substrate. Each of the break bars may be configured with a pair of blades having the same cutting edge length aligned in a direction perpendicular to the direction in which the break bar extends. In this case, an opening / closing mechanism may be further provided for simultaneously opening and closing the pair of blades of the plurality of break bars.

[0011] According to the cutting device of this aspect, the substrate can be cut using a break bar having a cutting edge of a length suitable for the width of the portion to be cut (the length of the scribe line). This eliminates the need to use a frame that is significantly larger than the size of the substrate to hold the substrate, which is limited by the length of the cutting edge of the break bar, and as a result, the size of the frame can be reduced. Furthermore, the spacing between pairs of blades of multiple break bars, i.e., the blade spacing, can be adjusted to a desired spacing all at once, allowing for efficient adjustment of the blade spacing.

[0012] In the cutting device according to this aspect, the substrate may be configured to be circular, held by an annular frame having a circular inner periphery via an adhesive sheet, and divided into a plurality of regions in a direction perpendicular to the scribe line. In this case, the cutting device may further include a control unit that controls the switching mechanism so that the plurality of break bars are switched according to the region.

[0013] According to the above configuration, when the substrate is held by a circular frame with a circular inner periphery, interference between the frame and the upper break bar can be prevented at positions away from the center on both sides in the direction perpendicular to the scribe line, thereby allowing the size of the frame to be reduced.

[0014] In the cutting device according to this aspect, the switching mechanism may be configured to include a bar holder on which the plurality of break bars are arranged in a circumferential direction and which is rotatable about a rotation axis parallel to the direction in which the plurality of break bars extend, and a first actuator that rotates the bar holder. Note that the rotation axis does not rotate.

[0015] According to the above configuration, the break bar can be switched by operating the first actuator to rotate the bar holder.

[0018] When the above configuration is adopted, the opening / closing mechanism may further be configured to include a rotating body arranged next to the bar holder and rotatable around the rotation axis, a second actuator that rotates the rotating body in opposing first and second directions, and a link mechanism that is provided between the pair of blades and the rotating body and moves the pair of blades in an opening direction when the rotating body rotates in the first direction, and moves the pair of blades in a closing direction when the rotating body rotates in the second direction.

[0019] With this configuration, the opening and closing mechanism is configured around the same rotation axis as the switching mechanism, so the entire structure including the switching mechanism and the opening and closing mechanism can be configured compactly.

[0020] In the above configuration, the first actuator and the second actuator may be arranged to sandwich the bar holder in the direction of the rotation axis.

[0021] With this configuration, it is possible to improve the weight balance on both sides of the bar holder in the direction of the rotation axis.

[0022] In the cutting device according to this aspect, one of the remaining break bars may be disposed on the bar holder at a position opposite the break bar disposed at the use position. In this case, an imaging device may be provided at a position where it can image the gap between the pair of blades of the break bar at the use position through the gap between the pair of blades of the break bar at the opposite position.

[0023] According to the above configuration, the positional relationship between the pair of blades in the use position and the scribe line on the substrate can be monitored well using the imaging device. [Effects of the Invention]

[0026] As described above, according to the present invention, it is possible to reduce the size of the frame used to hold the substrate, and to provide a cutting device in which the break bar and the frame do not interfere with each other during the breaking operation even if the frame size is small.

[0027] The effects and significance of the present invention will become clearer from the following description of the embodiments. However, the embodiment described below is merely an example of how the present invention can be put into practice, and the present invention is not limited to the embodiment described below. [Brief explanation of the drawings]

[0028] [Figure 1] 1(a) and 1(b) are respectively a plan view and a cross-sectional view schematically showing a state in which a substrate to be cut by a cutting device according to an embodiment is held by a frame. [Figure 2] FIG. 2 is a perspective view of the cutting device according to the embodiment, as viewed in the negative Y-axis direction. [Figure 3] FIG. 3 is a perspective view of the cutting device according to the embodiment, as viewed in the positive direction of the Y axis. [Figure 4] FIG. 4 is a front view of the periphery of an adjustment unit of the cutting device as viewed in the negative Y-axis direction according to the embodiment. [Figure 5] 5(a) and 5(b) are perspective views of an upper break bar unit according to an embodiment, as viewed in the negative direction of the Y-axis, and a perspective view of an upper break bar unit according to an embodiment, as viewed in the positive direction of the Y-axis. [Figure 6] 6(a) is a perspective cross-sectional view of an upper break bar unit as viewed in the negative Y-axis direction according to an embodiment, and FIG. 6(b) is a perspective view of a bar holder as viewed in the negative Y-axis direction according to an embodiment. [Figure 7] FIG. 7 is a perspective view of a link mechanism connected to two cam plates, as viewed in the negative Y-axis direction, according to the embodiment. [Figure 8] FIG. 8 is a diagram for explaining the opening and closing operation of the pair of blades by the opening and closing mechanism according to the embodiment. [Figure 9]FIG. 9 is a front view of the lifting unit as viewed in the negative Y-axis direction according to the embodiment. [Figure 10] FIG. 10 is a perspective view of the lifting unit according to the embodiment, as viewed in the positive direction of the Y axis. [Figure 11] FIG. 11 is a block diagram showing the configuration of a cutting device according to an embodiment. [Figure 12] FIG. 12 is a flowchart showing the height adjustment process according to the embodiment. [Figure 13] FIG. 13 is a diagram for explaining an area set on a substrate for the break bar switching process according to the embodiment. [Figure 14] FIG. 14 is a flowchart illustrating a break bar switching process according to the embodiment. [Figure 15] FIG. 15 is a diagram for explaining switching of the upper break bar depending on the region according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0029] Hereinafter, embodiments of the present invention will be described with reference to the drawings. For convenience, each drawing is labeled with an X-axis, a Y-axis, and a Z-axis that are orthogonal to each other. The Z-axis is parallel to the vertical direction. Up and down correspond to the positive and negative Z-axis directions, respectively.

[0030] [Board configuration] 1(a) and 1(b) are respectively a plan view and a cross-sectional view that schematically show a state in which a substrate F to be cut by a cutting device 1 is held by a frame 3.

[0031] In this embodiment, the substrate F is, for example, a brittle material substrate (including a substrate having a brittle material layer), and may be a wafer. The material, thickness, and size of the substrate F are appropriately selected and designed depending on the type, function, etc. of the product to be manufactured (for example, a semiconductor chip or a semiconductor device).

[0032] Examples of brittle materials include single crystal materials, polycrystalline materials (ceramics, etc.), and glass.

[0033] The substrate F is, for example, a semiconductor wafer that serves as the base material for semiconductor chips widely used in electronic devices, or a semiconductor package substrate that serves as the base material for semiconductor devices.

[0034] Examples of single-crystal materials include single-crystal silicon (Si), silicon carbide (SiC), gallium nitride (GaN), gallium arsenide (GaAs), sapphire, and quartz. Examples of ceramics include low-temperature fired ceramics and high-temperature fired ceramics. The substrate F may have attached to its surface or interior a layer such as a thin film (e.g., a resin layer, a metal layer) or a semiconductor material that is not a brittle material.

[0035] The substrate F may be a laminated substrate formed by laminating two or more substrates together. For example, such a substrate F may have a color filter (CF) formed on one substrate and a thin film transistor (TFT) formed on the other substrate.

[0036] In this embodiment, the substrate F has a circular shape. A plurality of scribe lines L are formed vertically and horizontally (in a grid pattern) on the front surface of the substrate F. The rear surface of the substrate F is attached to a dicing tape 2, which is an adhesive sheet, and the substrate F is held by a frame 3 via the dicing tape 2. The frame 3 is formed in an annular shape with a circular inner periphery, and surrounds the substrate F.

[0037] 1(b), the thickness of the substrate F is smaller than the thickness of the frame 3. Therefore, the surface of the frame 3 protrudes beyond the surface of the substrate F. Normally, the frame 3 and the substrate F are attached to the same surface of the dicing tape 2, so the back surface of the frame 3 is flush with the back surface of the substrate F.

[0038] In FIG. 1(a), the scribe lines L are formed in a grid pattern, but the method for forming the scribe lines L is not limited to this.

[0039] The substrate F is set in the cutting device 1 while being held by the frame 3, and is cut by the cutting device 1.

[0040] [Configuration of the cutting device] Fig. 2 is a perspective view of the cutting device 1 as seen in the negative direction of the Y axis. Fig. 3 is a perspective view of the cutting device 1 as seen in the positive direction of the Y axis. Fig. 4 is a front view of the periphery of the adjustment unit 40 of the cutting device 1 as seen in the negative direction of the Y axis. In Figs. 2 and 3, a substrate F is set in the cutting device 1. In Fig. 4, the stand 10 and the table unit 30 are omitted.

[0041] The cutting device 1 includes a stand 10, a support frame 20, a table unit 30, an adjustment unit 40, a lower break bar 50, four switchable upper break bars 60, a lifting unit 70, and two imaging devices 80. The four upper break bars 60 are included in an upper break bar unit BU.

[0042] The mount 10 has a rectangular parallelepiped outer shell and is configured by assembling multiple linear frames 11 that extend in the X-axis, Y-axis, and Z-axis directions. Multiple adjustable legs 12 are provided on the bottom surface of the mount 10.

[0043] The support frame 20 is formed by assembling two linear frames 21 extending in the Y-axis direction and two linear frames 22 extending in the Z-axis direction in a rectangular shape. The support frame 20 is installed on the top surface of the pedestal 10. A pair of cylindrical guide poles 23 extending in the Z-axis direction are provided on the support frame 20 near the inside of the two linear frames 22 so as to follow the linear frames 22. The upper ends of the pair of guide poles 23 are fixed to the upper linear frame 21, and the lower ends are fixed to the lower linear frame 21.

[0044] Inside the support frame 20, a table unit 30, an adjustment unit 40, a lower break bar 50, an upper break bar unit BU, and a lifting unit 70 are arranged.

[0045] The table unit 30 includes a linear table 31 and a turntable 32. The linear table 31 has a rectangular plate shape. The linear table 31 is driven by an actuator 33 (for example, a servo motor with a reducer) to move linearly in the Y-axis direction. At this time, the linear table 31 is guided by a pair of guide shafts 34 extending in the Y-axis direction.

[0046] The turntable 32 has a disk shape and is disposed on the linear table 31. The turntable 32 is driven to rotate by an actuator 35 (for example, a servo motor with a reducer).

[0047] A rectangular opening 36 is formed in the table unit 30, penetrating the linear table 31 and the turntable 32. A frame 3 holding a substrate F is placed on the turntable 32. The frame 3 contacts the turntable 32, and the substrate F is positioned inside the opening 36.

[0048] The adjustment unit 40 is provided below the table unit 30 and adjusts the height of the table unit 30. The adjustment unit 40 includes a slider 41, an actuator 42, and a ball screw 43.

[0049] The slider 41 has a square rod shape and extends in the X-axis direction. Both ends of the slider 41 are connected to a pair of guide poles 23 via linear bushings 44, and the slider 41 is supported by the pair of guide poles 23 so as to be slidable in the Z-axis direction (up and down direction). The actuator 42 is, for example, a servo motor with a reducer. The ball screw 43 includes a nut 43a fixed to the slider 41 and a screw shaft 43b connected to the actuator 42, and the slider 41 is raised and lowered by rotation of the screw shaft 43b driven by the actuator 42.

[0050] The central portions of a pair of guide shafts 34 of the table unit 30 are fixed to a slider 41. When the slider 41 moves up and down, the table unit 30 moves up and down.

[0051] The lower break bar 50 is a long, thin blade extending in the X-axis direction and having a cutting edge 51 with a mountain-shaped cross section. The lower break bar 50 is supported from below by two load cells 45 arranged side by side in the X-axis direction in the center of the upper surface of the slider 41. The lower break bar 50 has shafts 52 extending downward at both ends, and these shafts 52 are inserted into linear bushings 46 provided on the upper surface of the slider 41. This fixes the lower break bar 50 in the X-axis and Y-axis directions (horizontal direction) relative to the slider 41. On the other hand, because the lower break bar 50 is movable in the up and down direction, the load applied to the lower break bar 50 can be detected by the two load cells 45.

[0052] The lower break bar 50 is positioned inside the opening 36 of the table unit 30, and the height of its cutting edge 51 is the same as the height of the upper surface of the turntable 32. The lower break bar 50 is fixed to the slider 41, just like the table unit 30, and therefore moves up and down integrally with the table unit 30 by the operation of the adjustment unit 40.

[0053] The upper break bar unit BU is disposed above the table unit 30. The upper break bar unit BU includes four upper break bars 60, each having a cutting edge 61 with a different length in the X-axis direction, which is the direction along the scribe line L of the substrate F, and a switching mechanism 100 that automatically switches between the four upper break bars 60 so that one of the upper break bars 60 is positioned in the use position. The use position is a position where the upper break bar 60 is used to cut the substrate F, and is a position where the upper break bar 60 can abut against the substrate F placed on the table unit 30, i.e., a position where the upper break bar 60 abuts against the substrate F when lowered. In addition, the upper break bar 60 in the use position faces the lower break bar 50, with the substrate F sandwiched between them.

[0054] FIG. 5(a) is a perspective view of the upper break bar unit BU as seen in the negative direction of the Y-axis. FIG. 5(b) is a perspective view of the upper break bar unit BU as seen in the positive direction of the Y-axis. FIG. 6(a) is a perspective cross-sectional view of the upper break bar unit BU as seen in the negative direction of the Y-axis. FIG. 6(b) is a perspective view of the bar holder 110 as seen in the negative direction of the Y-axis. FIG. 7 is a perspective view of the link mechanism 230 connected to two cam plates 210 as seen in the negative direction of the Y-axis. Note that in FIG. 7, for convenience, the slider 231 is shown disengaged from the link member 232.

[0055] Each upper break bar 60 extends in the X-axis direction and is composed of a pair of elongated blades 60a, 60b aligned in a direction perpendicular to the X-axis. The pair of blades 60a, 60b are symmetrical in the alignment direction and have cutting edges 61a, 61b with right-angled triangular cross sections at adjacent ends. The opposing surfaces of the two cutting edges 61a, 61b are parallel to each other. The two cutting edges 61a, 61b form a cutting edge 61.

[0056] Three of the four upper break bars 60 have cutting edges 61, i.e., both ends in the X-axis direction of the cutting edges 61a of the pair of blades 60a, 60b, that are recessed (shaved). The lengths (cutting amounts) of the recessed portions of the cutting edges 61 of the three upper break bars 60 are different from one another, resulting in four upper break bars 60 (four pairs of blades 60a, 60b) with cutting edges 61 of different lengths. The cutting edges 61a, 61b of the pair of blades 60a, 60b have the same length.

[0057] Hereinafter, the upper break bars 60 with the longer cutting edges 61 will be referred to as the XL break bar 60A, the L break bar 60B, the M break bar 60C, and the S break bar 60D, in that order.

[0058] The switching mechanism 100 includes a bar holder 110 in which four upper break bars 60 are arranged at equal intervals in the circumferential direction, i.e., at 90-degree intervals, and which is rotatable around a rotation axis R parallel to the X-axis direction along which the four upper break bars 60 extend, and a first actuator 120 that rotates the bar holder 110.

[0059] The bar holder 110 includes two holder plates 111, four shafts 112, and two hubs 113. The two holder plates 111 are substantially square-shaped and are arranged in the X-axis direction at intervals slightly wider than the length of the four upper break bars 60. Each holder plate 111 has a shaft hole 111a formed in its center. Each holder plate 111 also has first slide holes 111b formed near its four sides, extending along each of the sides. Each holder plate 111 also has second slide holes 111c formed in its four corners, extending toward the center at approximately 45-degree angles relative to the two sides that make up each corner. Each holder plate 111 also has four arc-shaped insertion holes 111d formed in its center at 90-degree intervals.

[0060] The four shafts 112 are round rod-shaped, and both ends thereof are connected to the four corners of the two holding plates 111. The two hubs 113 are attached to the surfaces of the two holding plates 111 opposite to the surfaces that face each other so as to align with the shaft holes 111a. A gear 115 is fixed via a flange 114 to the hub 113 on the X-axis negative side.

[0061] The outer shape of the bar holder 110 is a substantially regular square prism that is long in the X-axis direction, and each upper break bar 60 is disposed on each of the four circumferential faces of the bar holder 110.

[0062] A cylindrical fixed shaft 130 is passed through the shaft holes 111a and hubs 113 on both sides of the bar holder 110. Two bearings 140 are interposed between the fixed shaft 130 and each hub 113. This allows the bar holder 110 to be rotatably supported by the fixed shaft 130. The center of the fixed shaft 130 becomes the rotation axis R.

[0063] A long and narrow opening 131 that penetrates the fixed shaft 130 in the Z-axis direction is formed in the center of the fixed shaft 130 in the X-axis direction. The opening 131 is an opening that allows the imaging device 80, which is arranged above the fixed shaft 130, to observe through the opening 131 something that serves as a reference for the break position, such as a scribe line on the substrate F, and the length of the opening 131 in the X-axis direction is made approximately equal to the length of the four upper break bars 60.

[0064] First actuator 120 is, for example, a servo motor with a reducer, and includes a sensor that detects the rotation angle (rotation position). First actuator 120 is fixed to fixed shaft 130 via bracket 150 on the negative X-axis side of bar holder 110. A pinion 121 that meshes with gear 115 is attached to the output shaft of first actuator 120. When the output shaft of first actuator 120 rotates, pinion 121 and gear 115 rotate, and so does bar holder 110.

[0065] The switching mechanism 100 is provided with a position detector 160 that detects the reference rotation position of the bar holder 110. The position detector 160 includes a sensor disk 161 fixed to the flange 114 and a photosensor 162 fixed to the bracket 150 via a mounting plate 163. A notch (not shown) is formed at a predetermined position on the outer periphery of the sensor disk 161. When the XL break bar 60A is in the use position, the notch comes into contact with and is detected by the photosensor 162. This position is the reference rotation position of the bar holder 110. The rotation position of the bar holder 110 can be detected by detecting the rotation angle (number of rotations) of the first actuator 120 from the reference rotation position.

[0066] By rotating the first actuator 120, the bar holder 110 rotates clockwise as viewed in the negative direction of the X axis by 90 degrees from the rotation reference position. As a result, each time the bar holder 110 rotates by 90 degrees, the four upper break bars 60 are set to their usage positions in the order of S break bar 60D, M break bar 60C, L break bar 60B, and XL break bar 60A.

[0067] The four upper break bars 60 have the same distance from the rotation axis R to the tip of the cutting edge 61 of each upper break bar 60. Therefore, when the height position of the upper break bar unit BU is the same, the height positions of the cutting edges 61 of the four upper break bars 60 in the use position are all the same. Therefore, regardless of which upper break bar 60 is in the use position, the cutting edges 61 abut against the substrate F at the same height position.

[0068] The upper break bar unit BU includes an opening / closing mechanism 200 in addition to the switching mechanism 100. The opening / closing mechanism 200 simultaneously opens and closes pairs of blades 60a, 60b of the four upper break bars 60. The opening / closing mechanism 200 includes two cam plates 210 that are rotating bodies, a second actuator 220, and a link mechanism 230.

[0069] Each cam plate 210 is made up of an annular cam portion 211 and a cylindrical boss portion 212. Four hinge pins 213 are provided on the cam portion 211 at 90-degree intervals. A gear 215 is fixed to the cam plate 210 on the X-axis positive direction side via a flange 214. The two cam plates 210 and flanges 214 are passed through two hubs 113 of the bar holder 110. As a result, the two cam plates 210 are arranged on either side of the bar holder 110 in the X-axis direction.

[0070] Three bearings 240 are interposed between each cam plate 210 and each flange 214 and each hub 113. As a result, the two cam plates 210 are rotatably supported by the two hubs 113 and can rotate coaxially with the bar holder 110, i.e., around the rotation axis R.

[0071] The two cam plates 210 are connected by four round rod-shaped connecting shafts 216. Each connecting shaft 216 passes through a corresponding insertion hole 111d of the two holding plates 111.

[0072] The second actuator 220 is, for example, a servo motor with a reducer, and includes a sensor that detects the rotation angle (rotation position). The second actuator 220 is fixed to the fixed shaft 130 via a bracket 250 on the X-axis positive side of the bar holder 110. That is, in the upper break bar unit BU, the first actuator 120 and the second actuator 220 are arranged so as to sandwich the bar holder 110 in the direction of the rotation axis R (X-axis direction). A pinion 221 that meshes with a gear 215 is attached to the output shaft of the second actuator 220. The rotation of the output shaft of the second actuator 220 is transmitted to the cam plate 210 on the X-axis positive side by the pinion 221 and the gear 215. This causes the two cam plates 210, which are connected by four connecting shafts 216, to rotate.

[0073] The link mechanism 230 is provided between four pairs of blades 60a, 60b and two cam plates 210. The link mechanism 230 includes four pairs of sliders 231, eight link members 232, and four round bar-shaped connecting shafts 233. Four link members 232 are provided between each of the four pairs of sliders 231 and each of the cam plates 210.

[0074] Each pair of sliders 231 is disposed on each of the four circumferential surfaces of the bar holder 110. The pair of sliders 231 has a substantially rectangular plate shape that is long in the X-axis direction and is aligned in a direction perpendicular to the X-axis. Each slider 231 is composed of a base 231a and a spacer 231b that overlaps the base 231a. Two roller followers 231c and a hinge pin 231d are provided on both end surfaces of the base 231a in the X-axis direction. The hinge pin 231d is provided between the two roller followers 231c. The two roller followers 231c and the hinge pin 231d on both ends of the base 231a are inserted into the first slide holes 111b of the two holder plates 111. The tip of the hinge pin 231d protrudes outside the holder plate 111, i.e., toward the cam plate 210. Four pairs of sliders 231 are held by the bar holder 110 so as to be slidable in a direction perpendicular to the X-axis.

[0075] A rectangular slide guide 116 extending along each side of the two holding plates 111 is provided. The slide guides 116 contact the spacers 231b of the sliders 231 from both sides. This allows the pair of sliders 231 to slide straight in a direction perpendicular to the X-axis.

[0076] Each pair of blades 60a, 60b of each upper break bar 60 is fixed to each pair of sliders 231. That is, the pair of blades 60a, 60b is held by the bar holder 110 via the pair of sliders 231 and slides together with the pair of sliders 231.

[0077] It should be noted that by preparing a plurality of spacers 231b with different thicknesses and replacing the spacers 231b, the distance (height) of each upper break bar 60 from each surface of the bar holder 110 can be adjusted.

[0078] One link member 232 is provided for two sliders 231 adjacent to each other across a corner of the bar holder 110. Each link member 232 is composed of a first lever 232a and two second levers 232b. One end of the first lever 232a is rotatably connected to the hinge pin 213 of the cam plate 210. One end of one of the second levers 232b is rotatably connected to the hinge pin 231d of one of the sliders 231, and one end of the other second lever 232b is rotatably connected to the hinge pin 231d of the other slider 231. Furthermore, the other ends of the first lever 232a and the two second levers 232b are rotatably connected to a connecting shaft 233 that is passed through the second slide holes 111c of the two holder plates 111.

[0079] The opening / closing mechanism 200 is provided with a position detector 260 that detects the rotation reference position of the cam plate 210. The position detector 260 includes a sensor disk 261 fixed to the flange 214 and a photosensor 262 fixed to the bracket 250 via a mounting plate 263. A notched hole (not shown) is formed at a predetermined position on the outer periphery of the sensor disk 261. When the cam plate 210 is in the rotation reference position, the notched hole comes to the position of the photosensor 262 and is detected by the photosensor 262. The rotation position of the cam plate 210 can be detected by detecting the rotation angle (number of rotations) of the second actuator 220 from the rotation reference position.

[0080] FIG. 8 is a diagram for explaining the opening and closing operation of the pair of blades 60a and 60b by the opening and closing mechanism 200. As shown in FIG.

[0081] When the cam plate 210 is in the rotation reference position, as shown in Figure 8, the pair of blades 60a, 60b are in an intermediate open / close state, and the distance between the pair of blades 60a, 60b (hereinafter referred to as the "blade distance") is an intermediate distance.

[0082] When the cam plates 210 on both sides are rotated counterclockwise, which is the first direction, from the rotation reference position as viewed in the negative direction of the X axis, as shown by the solid arrows by the operation of the second actuator 220, the other ends of the first lever 232a and the two second levers 232b of the four link members 232 on both sides move along the second slide holes 111c as shown by the solid arrows in a direction approaching the corners of the holding plate 111, and one ends of the two second levers 232b move along the first slide holes 111b as shown by the solid arrows in a direction approaching the corners of the holding plate 111. As a result, the pair of blades 60a, 60b move together with the pair of sliders 231 in a direction in which the pair of blades 60a, 60b open, and the blade spacing increases.

[0083] On the other hand, when the cam plates 210 on both sides are rotated in the second direction, that is, clockwise, from the rotation reference position as viewed in the negative direction of the X axis, as indicated by the dashed arrows, by the operation of the second actuator 220, the other ends of the first lever 232a and the two second levers 232b of the four link members 232 on both sides move along the second slide holes 111c toward the center of the holding plate 111 as indicated by the dashed arrows, and one ends of the two second levers 232b move along the first slide holes 111b in directions away from the corners of the holding plate 111 as indicated by the dashed arrows. As a result, the pair of blades 60a, 60b move together with the pair of sliders 231 in directions that close the pair of blades 60a, 60b, narrowing the blade spacing.

[0084] In this way, the blade spacing is adjusted by opening and closing the pair of blades 60a, 60b using the opening and closing mechanism 200.

[0085] When the pair of blades 60a, 60b are opened or closed, the center position of the gap between the two blades 60a, 60b does not change. When the upper break bar 60 is in the use position, the cutting edge 51 of the lower break bar 50 is aligned with the center of the gap between the two blades 60a, 60b.

[0086] 4, in the upper break bar unit BU, linear bushings 172 are attached to both ends of the fixed shaft 130 using brackets 171. The upper break bar unit BU is connected to a pair of guide poles 23 via the linear bushings 172 at both ends, and is supported by the pair of guide poles 23 so as to be slidable in the Z-axis direction (up and down direction).

[0087] 2 and 3, the lifting unit 70 is disposed above the upper break bar unit BU, and lifts and lowers the upper break bar unit BU, that is, the upper break bar 60 set in the use position.

[0088] The lifting unit 70 includes a slider 310 , two crank mechanisms 320 , an actuator 330 , and a transmission mechanism 340 .

[0089] Fig. 9 is a front view of the lifting unit 70 as seen in the negative direction of the Y axis. Fig. 10 is a perspective view of the lifting unit 70 as seen in the positive direction of the Y axis. In addition to the lifting unit 70, Figs. 9 and 10 also show the linear frame 21 above the support frame 20 and a pair of guide poles 23.

[0090] The slider 310 has a square rod shape and extends in the X-axis direction. Both ends of the slider 310 are connected to a pair of guide poles 23 via linear bushings 350, and the slider 310 is supported by the pair of guide poles 23 so as to be slidable in the Z-axis direction (up and down direction). A round rod-shaped shaft 311 is embedded in the slider 310 at a position a predetermined distance to the left and right from the center in the X-axis direction (longitudinal direction) so as to penetrate the slider 310 in the Y-axis direction. Furthermore, the slider 310 is formed with an opening 312 that is long in the X-axis direction and penetrates in the up and down direction (Z-axis direction).

[0091] An upper break bar unit BU is attached to the underside of the slider 310 via two brackets 173 fixed to both sides of the fixed shaft 130 (see FIGS. 2 and 3). By attaching the upper break bar unit BU to the slider 310, four upper break bars 60 are attached to the slider 310.

[0092] The two crank mechanisms 320 are connected to both the left and right sides in the longitudinal direction (X-axis direction) of the slider 310. The two crank mechanisms 320 are provided at equal distances from the center of the upper brake bar 60 in the X-axis direction.

[0093] Each crank mechanism 320 includes a crankshaft 321 , two crank plates 322 , and two connecting rods 323 .

[0094] The crankshaft 321 passes through the upper linear frame 21 of the support frame 20 in the Y-axis direction and is rotatably supported by the linear frame 21 via a bearing (not shown). The crankshaft 321 rotates due to the torque of the actuator 330 transmitted via the transmission mechanism 340.

[0095] The two crank plates 322 have a disk shape, and are fixed at positions offset from the center to portions on both sides of the crank shaft 321 protruding from the linear frame 21.

[0096] The two connecting rods 323 have elongated, approximately square plates that taper slightly in the negative Z-axis direction (downward). The two connecting rods 323 are arranged on either side of the slider 310 and linear frame 21 in the Y-axis direction. The upper end of each connecting rod 323 is rotatably connected to the crank plate 322 via a bearing 324, and the lower end is rotatably connected to the shaft 311 of the slider 310 via a bearing 325. The two connecting rods 323 are connected by a connecting plate 326 at a position between the slider 310 and the linear frame 21.

[0097] Actuator 330 is, for example, a servo motor with a reducer, and includes a sensor that detects the rotation angle (rotation position). Actuator 330 is disposed on the Y-axis negative side of linear frame 21, and is fixed to linear frame 21 via bracket 361. A pinion 331 is attached to the output shaft of actuator 330.

[0098] Transmission mechanism 340 includes pinion 341 that meshes with pinion 331 of actuator 330, a round-bar-shaped first shaft 342 connected to pinion 341, a round-bar-shaped second shaft 343 connected to first shaft 342 by coupling 344, a bevel gear 345 attached to the end of first shaft 342, and a bevel gear 346 attached to the end of second shaft 343. First shaft 342 and second shaft 343 are arranged side by side in the X-axis direction on the Y-axis negative side of linear frame 21, and are rotatably supported via bearings (not shown) by bracket 361, the same as actuator 330, and three brackets 362 fixed to linear frame 21. Bevel gear 345 meshes with bevel gear 327 attached to crankshaft 321 on the X-axis positive side. Bevel gear 346 meshes with bevel gear 327 attached to crankshaft 321 on the X-axis negative side.

[0099] The lifting unit 70 is provided with a position detector 370 that detects the rotational reference position of the crank plate 322. The position detector 370 includes a sensor disk 371 fixed to the crankshaft 321 on the negative side of the X-axis and a photosensor 372 fixed to the linear frame 21 via a mounting plate 373. A notch (not shown) is formed at a predetermined position on the outer periphery of the sensor disk 371. When the crank plate 322 is in the rotational reference position, the notch comes to the position of the photosensor 372 and is detected by the photosensor 372. At this time, the two connecting rods 323 are in their uppermost positions, and the slider 310 is in its highest position. By detecting the rotation angle (number of rotations) of the actuator 330 from the rotational reference position, the rotational position of the crank plate 322 can be detected, and the height position (position in the Z-axis direction) of the slider 310 can be detected.

[0100] When the output shaft of the actuator 330 rotates, this rotation is transmitted to the crankshafts 321 of the two crank mechanisms 320 by the pinion 331 and the transmission mechanism 340. In the two crank mechanisms 320, when the crankshafts 321 rotate, the two crank plates 322 rotate eccentrically, causing the two connecting rods 323 to reciprocate up and down. This causes the slider 310 connected to the two crank mechanisms 320, i.e., the four connecting rods 323, to move up and down, as shown by the solid and dashed lines in Figure 9. The upper brake bar unit BU attached to the slider 310 moves up and down (lifts and lowers) between the top position (highest position) and the bottom position (lowest position).

[0101] 2, the two imaging devices 80 are arranged side by side in the X-axis direction above the upper break bar unit BU. The two imaging devices 80 are fixed to a frame 24 that protrudes in the negative Y-axis direction from the top of both linear frames 22 that extend in the Z-axis direction. The two imaging devices 80 are located between the two crank mechanisms 320.

[0102] Each imaging device 80 includes a camera unit 81 and a lens unit 82 extending downward from the camera unit 81. The lens unit 82 is housed in an opening 312 of the slider 310. This prevents the two imaging devices 80 from interfering with the slider 310 as it moves up and down.

[0103] In the upper break bar unit BU, one of the remaining three upper break bars 60 (a pair of blades 60a, 60b) is disposed on the bar holder 110 at a position facing the upper break bar 60 (a pair of blades 60a, 60b) in the use position, i.e., directly above the upper break bar 60. Also, an opening 131 is provided in the fixed shaft 130. As a result, the gap between the pair of blades 60a, 60b in the use position, the opening 131 in the fixed shaft 130, and the gap between the pair of blades 60a, 60b in the opposing position (directly above) overlap in the vertical direction (Z-axis direction).

[0104] The two imaging devices 80 are arranged so that the lens portions 82 are directly above the upper break bar 60 in an opposing position (directly above position). Therefore, the two imaging devices 80 can capture an image of the gap between the pair of blades 60a, 60b in the use position through the opening 131 of the fixed shaft 130 and the gap between the pair of blades 60a, 60b in the opposing position. This allows the two imaging devices 80 to monitor the positional relationship between the pair of blades 60a, 60b in the use position and the scribe line L on the substrate F.

[0105] FIG. 11 is a block diagram showing the configuration of the cutting device 1.

[0106] The cutting device 1 includes a control unit 90. The control unit 90 includes a processing circuit such as a CPU, memories such as a ROM, a RAM, and a hard disk, a drive circuit, etc. The control unit 90 controls each unit according to a program stored in the memory.

[0107] The control unit 90 receives detection signals indicating the rotation reference positions from the photosensors 162 and 262 of the switching mechanism 100 and the opening / closing mechanism 200. The control unit 90 also receives a detection signal indicating the rotation reference position from the photosensor 372 of the lifting unit 70. The control unit 90 also receives load signals from the two load cells 45 in accordance with the detected loads.

[0108] The control unit 90 controls the operation of the table unit 30 (linear movement of the linear table 31 and rotation of the turntable 32) by controlling the two actuators 33, 35. The control unit 90 also controls the operation of the adjustment unit 40 (up and down movement of the slider 41) by controlling the actuator 42. Furthermore, the control unit 90 controls the operation of the switching mechanism 100 (rotation of the bar holder 110) by controlling the first actuator 120. Furthermore, the control unit 90 controls the operation of the opening and closing mechanism 200 (opening and closing of the pair of blades 60a, 60b) by controlling the second actuator 220. Furthermore, the control unit 90 controls the operation of the lifting unit 70 (lifting and lowering of the slider 310) by controlling the actuator 330.

[0109] [Severing action] Next, the operation of cutting the substrate F by the cutting device 1 will be described.

[0110] After the substrate F held by the frame 3 is set on the turntable 32 of the table unit 30, the cutting operation is started, and a preparation step and a cutting step are carried out in sequence.

[0111] In the preparation step, the control unit 90 controls the two actuators 33, 35 under the monitoring of the two imaging devices 80 to move the linear table 31 and rotate the turntable 32 so that the scribe line L along which the substrate F is to be initially cut is positioned in the center of the gap between the pair of blades 60a, 60b of the upper break bar 60 and parallel to the pair of blades 60a, 60b. When the scribe line L is positioned in the center of the gap between the pair of blades 60a, 60b, the cutting edge 51 of the lower break bar 50 coincides with the scribe line L.

[0112] Furthermore, in the preparation step, the control unit 90 executes a height adjustment process to adjust the height of the table unit 30. As a result, the height of the table unit 30 is adjusted to a height such that, in the subsequent cutting step, when the upper break bar 60 (a pair of blades 60a, 60b) in the use position is lowered to the lowest position by the operation of the two crank mechanisms 320 of the lifting unit 70, it will be pushed in by a predetermined amount from the position where it abuts against the substrate F.

[0113] FIG. 12 is a flowchart showing the height adjustment process.

[0114] 12, the control unit 90 operates the lifting unit 70 to lower the upper break bar 60 from the use position to the lowest position (S101). At this time, the table unit 30 is at a height position where the substrate F does not come into contact with the upper break bar 60 that has been lowered to the lowest position.

[0115] Next, the control unit 90 operates the adjustment unit 40 to start raising the table unit 30 (S102). Thereafter, the control unit 90 monitors whether or not the cutting edge 61 of the upper break bar 60 (a pair of blades 60a, 60b) has come into contact with the surface of the substrate F, based on the load detected by the two load cells 45 (S103).

[0116] The cutting edge 51 of the lower break bar 50 contacts the backside of the substrate F placed on the table unit 30 via the dicing tape 2. Therefore, when the front side of the substrate F comes into contact with the cutting edge 61 of the upper break bar 60, the load received by the substrate F due to this contact is transmitted to the two load cells 45 via the lower break bar 50, causing a change in the loads detected by the two load cells 45. The control unit 90 can detect that the substrate F has come into contact with the upper break bar 60 by detecting the point at which the loads applied to the two load cells 45 change.

[0117] When the surface of the substrate F comes into contact with the cutting edge 61 of the upper break bar 60 (S103: YES), the control unit 90 stops the operation of the adjustment unit 40 and stops the lifting of the table unit 30 (S104).

[0118] Next, the control unit 90 operates the lifting unit 70 to raise the upper break bar 60 from the use position to the highest position (S105). Thereafter, the control unit 90 operates the adjustment unit 40 to raise the table unit 30 by a predetermined push-in amount from the position where the substrate F contacts the upper break bar 60 (the position where contact is detected) (S106). The push-in amount is set depending on the material and thickness of the substrate F, the size of the chips after cutting, etc.

[0119] This completes the height adjustment of the table unit 30. The preparation process is finished, and the cutting process begins.

[0120] In the cutting process, the control unit 90 rotates the actuator 330 of the lifting unit 70 at a constant rotational speed (uniform speed). As a result, the slider 310 of the lifting unit 70, i.e., the upper break bar 60 at the use position, repeats lifting and lowering movements (up and down movements) at an acceleration and deceleration rate determined by the rotational speed of the actuator 330.

[0121] When the upper break bar 60 (pair of blades 60a, 60b) in the use position descends to its lowest position, it is pushed in by a predetermined amount from the position where it abuts against the substrate F. As a result, the substrate F is bent at three points by the cutting edges 61a, 61b of the two blades 60a, 60b and the cutting edge 51 of the lower break bar 50 at the position of the scribe line L. As a result, stress is concentrated at the tip of the crack in the scribe line L, and the crack extends toward the lower break bar 50, and the substrate F is divided.

[0122] Here, the pressing force when the upper break bar 60 pushes in the substrate F is applied to the upper break bar 60 from the slider 310 of the lifting unit 70. The crank mechanism 320 that constitutes the lifting unit 70 is a power-boosting mechanism, and therefore can greatly amplify the torque of the actuator 330 and convert it into pressing force. Therefore, the upper break bar 60 can push in the substrate F with a large pressing force, and can reliably cut the substrate F at the position where it has been pushed in by the amount of pushing.

[0123] The control unit 90 moves the linear table 31 by the pitch of the scribe line L to move the substrate F while the upper break bar 60 rises from the lowest point and then descends to the lowest point again. As a result, the upper break bar 60 descends to the position of the next scribe line L, and the substrate F is cut at the position of that scribe line L.

[0124] The dividing load when dividing the substrate F is detected by the load cell 45. If the dividing load is outside a predetermined range, the control unit 90 determines that the substrate F has not been divided properly, and stores this history in memory. Furthermore, if the load detected by the load cell 45 is excessively large, the control unit 90 determines that an abnormality such as a breakdown has occurred in the dividing device 1, and stops the dividing process.

[0125] When cutting of the substrate F along the scribe line L in one direction is completed, the turntable 32 rotates 90 degrees, and a similar cutting operation is performed to cut the substrate F along the scribe line L in the other direction. However, in the preparation step, the height adjustment of the table unit 30 is not performed because it has already been completed in the previous preparation step.

[0126] The frame 3 that holds the substrate F has a circular inner periphery, and the spacing inside the frame 3 in the direction perpendicular to the scribe line L becomes smaller as it moves away from the center to both sides. Also, as explained in FIG. 1(b), the surface of the frame 3 protrudes beyond the surface of the substrate F. For this reason, when the upper break bar 60 is brought into contact with the surface of the substrate F in the cutting process, there is a risk that interference will occur between the frame 3 and the upper break bar 60 at a position away from the center.

[0127] Therefore, to prevent such interference between the frame 3 and the upper break bars 60, the control unit 90 executes a break bar switching process to switch between the four upper break bars 60. By the break bar switching process, upper break bars 60 with shorter cutting edges 61 are used in areas of the substrate F away from the center where the length of the scribe line L is shorter, thereby preventing the upper break bars 60 from interfering with the frame 3 at these positions.

[0128] When the upper break bar 60 is switched by the break bar switching process, the control unit 90 temporarily stops the operation of the lifting unit 70 before the switching and positions the upper break bar 60 in the use position at the highest point. Then, when the switching is complete, the control unit 90 operates the lifting unit 70 again.

[0129] FIG. 13 is a diagram for explaining the areas set on the substrate F for the break bar switching process.

[0130] 13, the substrate F is divided into seven regions of four types in a direction perpendicular to the scribe line L. The two regions at both ends of the substrate F in the direction perpendicular to the scribe line L are S regions, the two regions adjacent to the S regions are M regions, the two regions adjacent to the center of the M regions are L regions, and the central region is XL region.

[0131] The S area, M area, L area, and XL area are set within a range that allows cutting along the scribe line L in the area when using the S break bar 60D, M break bar 60C, L break bar 60B, and XL break bar 60A, respectively, and does not interfere with the frame 3.

[0132] The control unit 90 controls the switching mechanism 100 so that the multiple (four) upper break bars 60 are switched in accordance with the areas set on the substrate F.

[0133] Fig. 14 is a flowchart showing the break bar switching process Fig. 15 is a diagram for explaining switching of the upper break bar 60 according to the region.

[0134] 14, the control unit 90 controls the first actuator 120 of the switching mechanism 100 to move the upper break bar 60 corresponding to the first region to the use position (S201). At this time, the control unit 90 controls the second actuator 220 of the opening / closing mechanism 200 to rotate the cam plate 210 by the same angle (rotation amount) as the bar holder 110 so that the relative position between the bar holder 110 and the link mechanism 230 does not change.

[0135] When the upper break bar 60 corresponding to the area is set in the use position, the control unit 90 controls the second actuator 220 to simultaneously open and close the pairs of blades 60a, 60b of the four upper break bars 60 using the opening and closing mechanism 200, thereby adjusting the blade spacing (S202).

[0136] Next, the control unit 90 monitors whether the upper break bar 60 has moved to the next area (S203). The control unit 90 can determine the transition of areas based on the amount of movement of the table unit 30. When the upper break bar 60 has moved to the next area (S203: YES), the control unit 90 moves the upper break bar 60 corresponding to the next area to the use position (S204). Furthermore, the control unit 90 simultaneously opens and closes the pairs of blades 60a, 60b of the four upper break bars 60 to adjust the blade spacing (S205). Note that if the required blade spacing is the same as that of the previous area, the blade spacing adjustment by the processing of step S205 is not executed.

[0137] Thereafter, the processes of steps S204 and S205 are repeated, and the upper break bar 60 is switched depending on the region. Also, the blade spacing is adjusted as necessary. When there is no next region (S206: YES), the control unit 90 ends the break bar switching process.

[0138] In this embodiment, the table unit 30 moves in the negative direction of the Y axis, and cutting is performed from the end of the substrate F on the negative side of the Y axis to the end on the positive side of the Y axis. At this time, as shown in Fig. 15, cutting of the substrate F is performed in the order of S region → M region → L region → XL region → L region → M region → S region, and the upper break bars 60 are switched to their usage positions in the order of S break bar 60D → M break bar 60C → L break bar 60B → XL break bar 60A → L break bar 60B → M break bar 60C → S break bar 60D.

[0139] <Effects of the embodiment> According to this embodiment, the following effects are achieved.

[0140] As shown in Figures 5(a) and (b), the upper break bar unit BU comprises multiple (four) upper break bars 60 having different lengths of cutting edge 61 in the direction along the scribe line L of the substrate F, and a switching mechanism 100 that switches between the multiple upper break bars 60 so that one of the multiple upper break bars 60 is positioned in a usage position where its cutting edge 61 can abut against the substrate F.

[0141] According to this configuration, the substrate F can be cut using an upper break bar 60 having a cutting edge 61 with a length suitable for the width of the portion to be cut (the length of the scribe line L). This eliminates the need to use a frame 3 that is significantly larger than the size of the substrate F, which is limited by the length of the cutting edge 61 of the upper break bar 60, to hold the substrate F. Therefore, the size of the frame 3 relative to the size of the substrate F can be made smaller than before.

[0142] As shown in Figures 1(a) and 1(b), the substrate F is formed in a circular shape and is held by an annular frame 3 with a circular inner periphery via a dicing tape 2. Furthermore, as shown in Figure 13, the substrate F is divided into multiple regions (S region, M region, L region, XL region) in a direction perpendicular to the scribe line L. As shown in Figure 14, the control unit 90 executes a break bar switching process and controls the switching mechanism 100 so that multiple upper break bars 60 are switched depending on the region.

[0143] According to this configuration, when the substrate F is held by a frame 3 that is formed in a circular shape and has a circular inner peripheral edge, interference between the frame 3 and the upper break bar 60 can be prevented at positions away from the center on either side in a direction perpendicular to the scribe line L, so the size of the frame 3 relative to the size of the substrate F can be made smaller than before.

[0144] As shown in Figures 5(a) and (b), the switching mechanism 100 includes a bar holder 110 on which a plurality of upper break bars 60 are arranged in a circumferential direction and which is rotatable around a rotation axis R parallel to the direction in which the plurality of upper break bars 60 extend, and a first actuator 120 that rotates the bar holder 110.

[0145] According to this configuration, by operating the first actuator 120 to rotate the bar holder 110, the upper break bar 60 can be switched.

[0146] 5(a), (b) and 8, each upper break bar 60 is composed of a pair of blades 60a, 60b with cutting edges 61a, 61b of equal length that are aligned in a direction perpendicular to the direction in which the scribe line L extends. In addition to the switching mechanism 100, the upper break bar unit BU further includes an opening / closing mechanism 200 that simultaneously opens and closes the pairs of blades 60a, 60b of the multiple upper break bars 60.

[0147] With this configuration, the spacing between pairs of blades 60a, 60b of multiple upper break bars 60, i.e., the blade spacing, can be adjusted to a desired spacing all at once, allowing for efficient blade spacing adjustment. However, adjusting the blade spacing for each pair of blades 60a, 60b individually is a cumbersome task.

[0148] As shown in Figures 5(a) and (b), the opening / closing mechanism 200 includes a cam plate 210 that is arranged next to the bar holder 110 and is rotatable around a rotation axis R, a second actuator 220 that rotates the cam plate 210 in opposing first and second directions, and a link mechanism 230 that is provided between the pair of blades 60a, 60b and the cam plate 210 and that moves the pair of blades 60a, 60b in an opening direction when the cam plate 210 rotates in the first direction, and moves the pair of blades 60a, 60b in a closing direction when the cam plate 210 rotates in the second direction.

[0149] According to this configuration, the opening and closing mechanism 200 is configured around the same rotation axis R as the switching mechanism 100, so the entire structure including the switching mechanism 100 and the opening and closing mechanism 200, i.e., the entire upper break bar unit BU, can be configured compactly.

[0150] As shown in FIGS. 5(a) and 5(b), the first actuator 120 and the second actuator 220 are arranged to sandwich the bar holder 110 in the direction of the rotation axis R (Y-axis direction).

[0151] This configuration improves the weight balance on both sides of the bar holder 110 in the direction of the rotation axis R (Y-axis direction), thereby improving the balance of the pressure exerted on the substrate F by the upper break bar 60.

[0152] As shown in Fig. 6(a), one of the remaining upper break bars 60 is disposed in a position opposite the upper break bar 60 disposed in the use position on the bar holder 110. As shown in Fig. 2, the two imaging devices 80 are provided in positions where they can image the gap between the pair of blades 60a, 60b of the upper break bar 60 in the use position through the gap between the pair of blades 60a, 60b of the upper break bar 60 in the opposing position.

[0153] According to this configuration, the positional relationship between the pair of blades 60a, 60b in the use position and the scribe line L on the substrate F can be monitored well using the two imaging devices 80.

[0154] Although the embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications of the embodiment of the present invention are possible.

[0155] For example, in the above embodiment, the upper break bar unit BU includes four upper break bars 60. However, the number of upper break bars 60 included in the upper break bar unit BU is not limited to four and may be any plural number. For example, the number of upper break bars 60 may be six. In this case, in the switching mechanism 100, the outer shape of the bar holder 110 is approximately hexagonal prism-shaped, and each upper break bar 60 is arranged on each of the six faces. In the opening / closing mechanism 200, the link mechanism 230 includes six pairs of sliders 231 and six link members 232 on each side.

[0156] Furthermore, in the above embodiment, the substrate F is held by a frame 3 that is circular and has a circular inner periphery. The substrate F is then divided into multiple regions in a direction perpendicular to the scribe line L, and the control unit 90 controls the switching mechanism 100 to switch between multiple upper break bars 60 according to the regions. However, the substrate F may also be held by a frame that is rectangular and has a rectangular inner periphery. In this case, the substrate F is not divided into regions, and when the substrate F is cut, an upper break bar 60 is selected and set to the use position according to the width of the substrate F in the direction of the scribe line L.

[0157] Furthermore, contrary to the above embodiment, the lower break bar 50 may be composed of a pair of blades (two blades), and each of the multiple upper break bars 60 may consist of only one blade. In this case, a configuration is adopted in which multiple (four) lower break bars 50 are included in a lower break bar unit having a switching mechanism 100 and an opening / closing mechanism 200. The frame 3 holding the substrate F is set on the table unit 30 so that the front surface of the substrate F on which the scribe line L is formed faces downward and the back surface of the substrate F faces upward.

[0158] As described above, even when the back surface of the substrate F, which is flush with the back surface of the frame 3 (is not lower than the back surface of the frame 3), faces upward, the upper break bar 60 is pushed in by the push-in amount from the back surface of the substrate F, so there remains a risk that the upper break bar 60 will interfere with the frame 3. Therefore, a configuration is adopted in which multiple (four) upper break bars 60 are provided and included in an upper break bar unit having only the switching mechanism 100.

[0159] Furthermore, the configuration may be reversed, i.e., the lower break bar may be composed of multiple pairs of blades and the upper break bar may be composed of a single blade, or the lower break bar may be composed of multiple break bars each composed of a single blade and the upper break bar may be composed of a single break bar.

[0160] Furthermore, the switching mechanism 100 is not limited to the configuration of the above embodiment. For example, the switching mechanism 100 may be configured such that multiple upper break bars 60 are arranged horizontally and one of them is set to the use position by moving horizontally. In other words, the switching mechanism 100 may have any configuration as long as it can switch between multiple upper break bars 60.

[0161] Similarly, the opening / closing mechanism 200 is not limited to the configuration of the above embodiment, and may have any configuration as long as it can simultaneously open and close pairs of blades 60a, 60b of multiple upper break bars 60.

[0162] Furthermore, in the above embodiment, the four upper break bars 60 have different lengths of the cutting edges 61 in the X-axis direction, but the overall lengths in the X-axis direction are the same. However, the four upper break bars 60 may have different lengths not only of the cutting edges 61 but also of the overall lengths, by making the overall lengths of the four upper break bars 60 the same as the length of the cutting edges 61.

[0163] Furthermore, the shapes of the upper break bar 60 (the pair of blades 60a, 60b) and the lower break bar 50 are not limited to those in the above embodiment, and may be any shape as long as the substrate F can be properly cut.

[0164] Furthermore, in the above embodiment, the bar holder 110 is rotatably supported by a single fixed shaft 130 that penetrates the bar holder 110 in the X-axis direction. An opening 131 is provided in the fixed shaft 130 inside the bar holder 110 so as not to interfere with imaging by the imaging device 80. However, by configuring the hubs 113 on both sides of the bar holder 110 to be rotatably supported by two fixed shafts, it is also possible to eliminate the presence of fixed shafts inside the bar holder 110.

[0165] Furthermore, in the above embodiment, two imaging devices 80 are provided, but the number of imaging devices 80 may be one, or three or more.

[0166] In addition, the embodiments of the present invention can be modified in various ways as appropriate within the scope of the technical ideas set forth in the claims. [Explanation of symbols]

[0167] 1...Cutting device 2...Dicing tape (adhesive sheet) 3...Frame 60...Upper break bar (break bar) 60a, 60b...a pair of blades 61...Cutting edge 61a, 61b...Cutting edge 80...imaging device 90...Control unit 100...Switching mechanism 110...Bar holder 120...First actuator 200...Opening and closing mechanism 210... Cam plate (rotating body) 220...Second actuator 230...Link mechanism F...Substrate L...Scribe line R...Rotation axis

Claims

1. A cutting apparatus that cuts a substrate along a scribe line formed on the substrate, a plurality of break bars having cutting edges with different lengths in a direction along the scribe line; a switching mechanism that switches between the plurality of break bars so that one of the plurality of break bars is positioned at a use position where the cutting edge can come into contact with the substrate; Equipped with Each of the break bars is composed of a pair of blades having the same cutting edge length and arranged in a direction perpendicular to the direction in which the break bar extends, Further provided is an opening / closing mechanism for simultaneously opening and closing the pair of blades of the plurality of break bars. A cutting device characterized by:

2. The cutting device according to claim 1, The substrate is It is formed in a circular shape, The inner periphery is held by an annular frame with a circular edge via an adhesive sheet. The substrate is divided into a plurality of regions in a direction perpendicular to the scribe line, Further provided is a control unit that controls the switching mechanism so that the multiple break bars are switched according to the region. A cutting device characterized by:

3. The cutting device according to claim 1 or 2, The switching mechanism is a bar holder in which the plurality of break bars are arranged in a circumferential direction and which is rotatable around a rotation axis parallel to the direction in which the plurality of break bars extend; a first actuator that rotates the bar holder; A cutting device characterized by:

4. The cutting device according to claim 3, The opening and closing mechanism is a rotating body arranged adjacent to the bar holder and rotatable around the rotation axis; a second actuator that rotates the rotating body in a first direction and a second direction that are opposite to each other; a link mechanism provided between the pair of blades and the rotating body, which moves the pair of blades in an opening direction when the rotating body rotates in the first direction, and moves the pair of blades in a closing direction when the rotating body rotates in the second direction.

5. The cutting device according to claim 4, The first actuator and the second actuator are arranged to sandwich the bar holder in the direction of the rotation axis. A cutting device characterized by:

6. The cutting device according to any one of claims 3 to 5, One of the remaining break bars is disposed on the bar holder at a position opposite the break bar disposed at the use position, An imaging device is installed at a position where it can image the gap between the pair of blades of the break bar in the use position through the gap between the pair of blades of the break bar in the opposing position. Can be A cutting device characterized by:

Images