Cutting device

Abstract

To provide a dividing device that can sufficiently support a substrate regardless of the position of a lower brake bar.SOLUTION: A dividing device comprises a table unit 30 including a table 31 on which a substrate is placed and a table moving mechanism 32 that moves the table 31. The table 31 is provided with an opening part 31a in which a lower brake bar 50 is housed, and the substrate is positioned inside the opening part 31a. In the opening part 31a is provided a support mechanism 700 that supports the substrate from below. The support mechanism 700 includes a support rope 710 stretched to extend in a moving direction of the table 31 to support the substrate from below in the opening part 31a, and a guide mechanism 720 provided around the lower brake bar 50, and when the table 31 is moved, guiding the support rope 710 so that the support rope 710 moves while bypassing a cutting edge 51 of the lower break bar 50.SELECTED DRAWING: Figure 11

Description

[Technical Field]

[0001] The present invention relates to a cutting device for cutting a substrate. [Background technology]

[0002] Conventionally, there has been known a cutting device that cuts a substrate made of a brittle material such as a glass substrate or a semiconductor wafer by three-point bending between a first blade located on the back side of the substrate and a pair of second blades located on the front side of the substrate on which a scribe line is formed (see, for example, Patent Document 1). The first blade constitutes a first breaking bar, and the pair of second blades constitute second breaking bars.

[0003] The pair of second blades are positioned a small distance apart, and the substrate is positioned so that, during breaking, the scribe line is located midway between the two second blades and the position of the first blade coincides with the position of the scribe line.

[0004] While the lower of the two break bars supports the substrate from below, the upper break bar descends and presses against the substrate. Stress concentrates at the tip of the crack in the scribe line, causing the crack to extend toward the first blade, dividing the substrate.

[0005] The substrate is divided at each position of the plurality of scribe lines while being moved in a direction perpendicular to the scribe lines.

[0006] The substrate is held in a ring-shaped frame via an adhesive sheet attached to its backside and set on a movable table provided in the cutting device. The table has an opening in the center that is larger than the substrate. The substrate set on the table is positioned inside the opening. The lower break bar is housed within the opening and receives the substrate positioned inside the opening. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Laid-Open No. 2013-43414 Summary of the Invention [Problem to be solved by the invention]

[0008] In the above-mentioned cutting device, when the substrate is cut and the cut portion is separated into multiple pieces, there is a risk that the cut portion will bend downward due to its weight. This is because a thin adhesive sheet cannot adequately support the weight of the cut portion. If this happens, there is a risk that the corners of the edge surfaces of adjacent pieces will collide with each other and chip, which could result in a decrease in quality.

[0009] To prevent this type of quality degradation, the substrate needs to be supported from below the adhesive sheet within the table opening. However, when the table moves, the position of the lower break bar within the opening also moves accordingly. Therefore, a support structure that can adequately support the substrate regardless of the position of the lower break bar is required.

[0010] In view of the above problem, an object of the present invention is to provide a cutting device that can sufficiently support a substrate regardless of the position of the lower break bar. [Means for solving the problem]

[0011] A main aspect of the present invention relates to a cutting device that cuts a substrate held by an annular frame via an adhesive sheet along a scribe line formed on the substrate. The cutting device according to this aspect includes a table unit including a table on which the substrate is placed and a table movement mechanism that moves the table; an upper break bar that presses the substrate placed on the table from above; and a lower break bar that receives the substrate placed on the table from below. The table has an opening that accommodates the lower break bar, and the substrate is positioned inside the opening. A support mechanism is provided within the opening that supports the substrate from below. The support mechanism includes a string-like or band-like support that is stretched within the opening so as to extend in the direction of movement of the table and supports the substrate placed on the table from below, and a guide mechanism that is provided around the lower break bar and guides the support so that the support moves around the cutting edge of the lower break bar when the table moves.

[0012] With the cutting device according to this aspect, the cut portions of the substrate are supported from below by the support, so they are less likely to bend downward due to their weight. This makes it less likely that the corners of the end faces of adjacent cut pieces will collide with each other and chip.

[0013] Furthermore, when the table moves, the support is guided by the guide mechanism so that it moves around the cutting edge of the lower break bar. Therefore, even if the position of the table moves, the support is always present under the substrate except in the area near the lower break bar. Therefore, the substrate can be sufficiently supported by the support regardless of the position of the lower break bar.

[0014] In the cutting device according to this aspect, the guide mechanism may include a first guide portion and a second guide portion provided on both sides of the lower break bar in the movement direction, respectively, for guiding the support body, and each of the second guide portions may be located below the corresponding first guide portion. In this case, the support body is hung on each of the first guide portions so as to pass above the first guide portion and on the lower break bar side of the first guide portion, and is hung on each of the second guide portions so as to pass below the second guide portion and on the opposite side to the lower break bar of the second guide portion.

[0015] According to the above configuration, the support is guided by the two first guide members and the two second guide members, so that it moves to pass on both sides of and below the lower break bar, which makes it possible for the support to make a detour over a short distance.

[0016] In the above configuration, each of the first guide portions may further include a first pulley, and each of the second guide portions may further include a second pulley.

[0017] With this configuration, the support body moves smoothly by being fed by the rotating first and second pulleys.

[0018] In the above configuration, the guide mechanism may further include a support member that rotatably supports each of the first pulleys and each of the second pulleys. In this case, the support member may be attached to the attachment member to which the lower break bar is attached.

[0019] With this configuration, the support member and the lower break bar are attached to the same attachment member, which increases the positional accuracy between the lower break bar and each of the first and second pulleys. This allows the support member to be routed as close as possible to the lower break bar, further shortening the route distance.

[0020] The cutting device according to this aspect may be configured to include a plurality of the supports, and the lower break bar may be elongated in a direction perpendicular to the moving direction. In this case, the supports may be arranged symmetrically with respect to a center line that passes through the center of the lower break bar in the elongated direction and extends in the moving direction.

[0021] According to the above configuration, the substrate can be supported in a well-balanced manner by a plurality of supports.

[0022] In the cutting device according to this aspect, the support body may be made of an elastic material.

[0023] According to the above configuration, by stretching the support so as to extend it beyond its natural length, it can be stretched straight without slack, and the substrate can be firmly supported by the support. [Effects of the Invention]

[0024] As described above, according to the present invention, it is possible to provide a cutting device that can sufficiently support a substrate regardless of the position of the lower break bar.

[0025] The effects and significance of the present invention will become clearer from the following description of the embodiments. However, the embodiment described below is merely an example of how the present invention can be put into practice, and the present invention is not limited to the embodiment described below. [Brief explanation of the drawings]

[0026] [Figure 1] 1(a) and 1(b) are respectively a plan view and a cross-sectional view schematically showing a state in which a substrate to be cut by a cutting device according to an embodiment is held by a frame. [Figure 2] FIG. 2 is a perspective view of the cutting device according to the embodiment, as viewed in the negative Y-axis direction. [Figure 3] FIG. 3 is a perspective view of the cutting device according to the embodiment, as viewed in the positive direction of the Y axis. [Figure 4]FIG. 4 is a front view of the periphery of an adjustment unit of the cutting device as viewed in the negative Y-axis direction according to the embodiment. [Figure 5] 5(a) and 5(b) are perspective views of an upper break bar unit according to an embodiment, as viewed in the negative direction of the Y-axis, and a perspective view of an upper break bar unit according to an embodiment, as viewed in the positive direction of the Y-axis. [Figure 6] 6(a) is a perspective cross-sectional view of an upper break bar unit as viewed in the negative Y-axis direction according to an embodiment, and FIG. 6(b) is a perspective view of a bar holder as viewed in the negative Y-axis direction according to an embodiment. [Figure 7] FIG. 7 is a perspective view of a link mechanism connected to two cam plates, as viewed in the negative Y-axis direction, according to the embodiment. [Figure 8] FIG. 8 is a diagram for explaining the opening and closing operation of the pair of blades by the opening and closing mechanism according to the embodiment. [Figure 9] FIG. 9 is a front view of the lifting unit as viewed in the negative Y-axis direction according to the embodiment. [Figure 10] FIG. 10 is a perspective view of the lifting unit according to the embodiment, as viewed in the positive direction of the Y axis. [Figure 11] FIG. 11 is a perspective view showing the configuration of a table unit according to the embodiment. [Figure 12] 12(a) and 12(b) are perspective views of the table unit from which the first table and the moving member have been removed, as viewed in the negative Y-axis direction and the positive Y-axis direction, respectively, according to the embodiment. [Figure 13] 13(a) and 13(b) are front views of the rail member and elevator in a lowered state and a raised state, respectively, according to an embodiment, and FIG. 13(c) is a side view of the turntable and the rotation mechanism in an embodiment. [Figure 14] 14(a) to 14(c) are diagrams for explaining the operation of inserting and removing the first table into and from the second table in the Y-axis direction according to the embodiment. [Figure 15] FIG. 15 is a perspective view of a main part showing the configuration of a support mechanism according to the embodiment. [Figure 16]16(a) and 16(b) are plan views of the main part showing the configuration of the support mechanism according to the embodiment. [Figure 17] 17(a) and 17(b) are diagrams for explaining the configuration of the table unit according to the modified example. DETAILED DESCRIPTION OF THE INVENTION

[0027] Hereinafter, embodiments of the present invention will be described with reference to the drawings. For convenience, each drawing is labeled with an X-axis, a Y-axis, and a Z-axis that are orthogonal to each other. The Z-axis is parallel to the vertical direction. Up and down correspond to the positive and negative Z-axis directions, respectively.

[0028] [Board configuration] 1(a) and 1(b) are respectively a plan view and a cross-sectional view that schematically show a state in which a substrate F to be cut by a cutting device 1 is held by a frame 3.

[0029] In this embodiment, the substrate F is, for example, a brittle material substrate (including a substrate having a brittle material layer), and may be a wafer. The material, thickness, and size of the substrate F are appropriately selected and designed depending on the type, function, etc. of the product to be manufactured (for example, a semiconductor chip or a semiconductor device).

[0030] Examples of brittle materials include single crystal materials, polycrystalline materials (ceramics, etc.), and glass.

[0031] The substrate F is, for example, a semiconductor wafer that serves as the base material for semiconductor chips widely used in electronic devices, or a semiconductor package substrate that serves as the base material for semiconductor devices.

[0032] Examples of single-crystal materials include single-crystal silicon (Si), silicon carbide (SiC), gallium nitride (GaN), gallium arsenide (GaAs), sapphire, and quartz. Examples of ceramics include low-temperature fired ceramics and high-temperature fired ceramics. The substrate F may have attached to its surface or interior a layer such as a thin film (e.g., a resin layer, a metal layer) or a semiconductor material that is not a brittle material.

[0033] The substrate F may be a laminated substrate formed by laminating two or more substrates together. For example, such a substrate F may have a color filter (CF) formed on one substrate and a thin film transistor (TFT) formed on the other substrate.

[0034] In this embodiment, the substrate F has a circular shape. A plurality of scribe lines L are formed vertically and horizontally (in a grid pattern) on the front surface of the substrate F. The rear surface of the substrate F is attached to a dicing tape 2, which is an adhesive sheet, and the substrate F is held by a frame 3 via the dicing tape 2. The frame 3 is formed in an annular shape with a circular inner periphery, and surrounds the substrate F.

[0035] 1(b), the thickness of the substrate F is smaller than the thickness of the frame 3. Therefore, the surface of the frame 3 protrudes beyond the surface of the substrate F. Normally, the frame 3 and the substrate F are attached to the same surface of the dicing tape 2, so the back surface of the frame 3 is flush with the back surface of the substrate F.

[0036] In FIG. 1(a), the scribe lines L are formed in a grid pattern, but the method for forming the scribe lines L is not limited to this.

[0037] The substrate F is set in the cutting device 1 while being held by the frame 3, and is cut by the cutting device 1.

[0038] [Configuration of the cutting device] Fig. 2 is a perspective view of the cutting device 1 as seen in the negative direction of the Y axis. Fig. 3 is a perspective view of the cutting device 1 as seen in the positive direction of the Y axis. Fig. 4 is a front view of the periphery of the adjustment unit 40 of the cutting device 1 as seen in the negative direction of the Y axis. In Figs. 2 and 3, a substrate F is set in the cutting device 1. In Fig. 4, the stand 10 and the table unit 30 are omitted.

[0039] The cutting device 1 includes a stand 10, a support frame 20, a table unit 30, an adjustment unit 40, a lower break bar 50, four switchable upper break bars 60, a lifting unit 70, and two imaging devices 80. The four upper break bars 60 are included in an upper break bar unit BU.

[0040] The mount 10 has a rectangular parallelepiped outer shell and is configured by assembling multiple linear frames 11 that extend in the X-axis, Y-axis, and Z-axis directions. Multiple adjustable legs 12 are provided on the bottom surface of the mount 10.

[0041] The support frame 20 is formed by assembling two linear frames 21 extending in the Y-axis direction and two linear frames 22 extending in the Z-axis direction in a rectangular shape. The support frame 20 is installed on the top surface of the pedestal 10. A pair of cylindrical guide poles 23 extending in the Z-axis direction are provided on the support frame 20 near the inside of the two linear frames 22 so as to follow the linear frames 22. The upper ends of the pair of guide poles 23 are fixed to the upper linear frame 21, and the lower ends are fixed to the lower linear frame 21.

[0042] Inside the support frame 20, a table unit 30, an adjustment unit 40, a lower break bar 50, an upper break bar unit BU, and a lifting unit 70 are arranged.

[0043] The table unit 30 includes a table 31 on which a substrate F is placed. The table 31 moves linearly in the Y-axis direction by the operation of a table moving mechanism 32. At this time, the table 31 is guided by a pair of guide members 35 extending in the Y-axis direction. The table 31 includes a turntable 440 having a disk shape. The turntable 440 rotates by the operation of a rotation mechanism 34.

[0044] A rectangular opening 31a is formed in the table 31, penetrating the table 31 in the vertical direction (Z-axis direction). A substrate F held by a frame 3 is placed on the turntable 440. The frame 3 contacts the turntable 440, and the substrate F is positioned inside the opening 31a.

[0045] The configuration of the table unit 30 will be described in detail later.

[0046] The adjustment unit 40 is provided below the table unit 30 and adjusts the height of the table unit 30. The adjustment unit 40 includes a slider 41, an actuator 42, and a ball screw 43.

[0047] The slider 41 has a square rod shape and extends in the X-axis direction. Both ends of the slider 41 are connected to a pair of guide poles 23 via linear bushings 44, and the slider 41 is supported by the pair of guide poles 23 so as to be slidable in the Z-axis direction (up and down direction). The actuator 42 is, for example, a servo motor with a reducer. The ball screw 43 includes a nut 43a fixed to the slider 41 and a screw shaft 43b connected to the actuator 42, and the slider 41 is raised and lowered by rotation of the screw shaft 43b driven by the actuator 42.

[0048] The central portions of the pair of guide members 35 of the table unit 30 are fixed to the slider 41. When the slider 41 moves up and down, the table unit 30 moves up and down.

[0049] The lower break bar 50 is a long, thin blade extending in the X-axis direction and having a cutting edge 51 with a mountain-shaped cross section. The lower break bar 50 is supported from below by two load cells 45 arranged side by side in the X-axis direction in the center of the upper surface of the slider 41. The lower break bar 50 has shafts 52 extending downward at both ends, and these shafts 52 are inserted into linear bushings 46 provided on the upper surface of the slider 41. This fixes the lower break bar 50 in the X-axis and Y-axis directions (horizontal direction) relative to the slider 41. On the other hand, because the lower break bar 50 is movable in the up and down directions, the load applied to the lower break bar 50 can be detected by the two load cells 45.

[0050] The lower break bar 50 is housed in the opening 31a of the table 31, and the height of its cutting edge 51 is the same as the height of the upper surface of the turntable 440. The lower break bar 50 is fixed to the slider 41, just like the table unit 30, and therefore moves up and down integrally with the table unit 30 by the operation of the adjustment unit 40.

[0051] The upper break bar unit BU is disposed above the table unit 30. The upper break bar unit BU includes four upper break bars 60, each having a cutting edge 61 with a different length in the X-axis direction, which is the direction along the scribe line L of the substrate F, and a switching mechanism 100 that automatically switches between the four upper break bars 60 so that one of the upper break bars 60 is positioned in the use position. The use position is a position where the upper break bar 60 is used to cut the substrate F, and is a position where the upper break bar 60 can abut against the substrate F placed on the table unit 30, i.e., a position where the upper break bar 60 abuts against the substrate F when lowered. In addition, the upper break bar 60 in the use position faces the lower break bar 50, with the substrate F sandwiched between them.

[0052] FIG. 5(a) is a perspective view of the upper break bar unit BU as seen in the negative direction of the Y-axis. FIG. 5(b) is a perspective view of the upper break bar unit BU as seen in the positive direction of the Y-axis. FIG. 6(a) is a perspective cross-sectional view of the upper break bar unit BU as seen in the negative direction of the Y-axis. FIG. 6(b) is a perspective view of the bar holder 110 as seen in the negative direction of the Y-axis. FIG. 7 is a perspective view of the link mechanism 230 connected to two cam plates 210 as seen in the negative direction of the Y-axis. Note that in FIG. 7, for convenience, the slider 231 is shown disengaged from the link member 232.

[0053] Each upper break bar 60 extends in the X-axis direction and is composed of a pair of elongated blades 60a, 60b aligned in a direction perpendicular to the X-axis. The pair of blades 60a, 60b are symmetrical in the alignment direction and have cutting edges 61a, 61b with right-angled triangular cross sections at adjacent ends. The opposing surfaces of the two cutting edges 61a, 61b are parallel to each other. The two cutting edges 61a, 61b form a cutting edge 61.

[0054] Three of the four upper break bars 60 have cutting edges 61, i.e., both ends in the X-axis direction of the cutting edges 61a of the pair of blades 60a, 60b, that are recessed (shaved). The lengths (cutting amounts) of the recessed portions of the cutting edges 61 of the three upper break bars 60 are different from one another, resulting in four upper break bars 60 (four pairs of blades 60a, 60b) with cutting edges 61 of different lengths. The cutting edges 61a, 61b of the pair of blades 60a, 60b have the same length.

[0055] Hereinafter, the upper break bars 60 with the longer cutting edges 61 will be referred to as the XL break bar 60A, the L break bar 60B, the M break bar 60C, and the S break bar 60D, in that order.

[0056] The switching mechanism 100 includes a bar holder 110 in which four upper break bars 60 are arranged at equal intervals in the circumferential direction, i.e., at 90-degree intervals, and which is rotatable around a rotation axis R parallel to the X-axis direction along which the four upper break bars 60 extend, and a first actuator 120 that rotates the bar holder 110.

[0057] The bar holder 110 includes two holder plates 111, four shafts 112, and two hubs 113. The two holder plates 111 are substantially square-shaped and are arranged in the X-axis direction at intervals slightly wider than the length of the four upper break bars 60. Each holder plate 111 has a shaft hole 111a formed in its center. Each holder plate 111 also has first slide holes 111b formed near its four sides, extending along each of the sides. Each holder plate 111 also has second slide holes 111c formed in its four corners, extending toward the center at approximately 45-degree angles relative to the two sides that make up each corner. Each holder plate 111 also has four arc-shaped insertion holes 111d formed in its center at 90-degree intervals.

[0058] The four shafts 112 are round rod-shaped, and both ends thereof are connected to the four corners of the two holding plates 111. The two hubs 113 are attached to the surfaces of the two holding plates 111 opposite to the surfaces that face each other so as to align with the shaft holes 111a. A gear 115 is fixed via a flange 114 to the hub 113 on the X-axis negative side.

[0059] The outer shape of the bar holder 110 is a substantially regular square prism that is long in the X-axis direction, and each upper break bar 60 is disposed on each of the four circumferential faces of the bar holder 110.

[0060] A cylindrical fixed shaft 130 is passed through the shaft holes 111a and hubs 113 on both sides of the bar holder 110. Two bearings 140 are interposed between the fixed shaft 130 and each hub 113. This allows the bar holder 110 to be rotatably supported by the fixed shaft 130. The center of the fixed shaft 130 becomes the rotation axis R.

[0061] A long and narrow opening 131 that penetrates the fixed shaft 130 in the Z-axis direction is formed in the center of the fixed shaft 130 in the X-axis direction. The opening 131 is an opening that allows the imaging device 80, which is arranged above the fixed shaft 130, to observe through the opening 131 something that serves as a reference for the break position, such as a scribe line on the substrate F, and the length of the opening 131 in the X-axis direction is made approximately equal to the length of the four upper break bars 60.

[0062] First actuator 120 is, for example, a servo motor with a reducer, and includes a sensor that detects the rotation angle (rotation position). First actuator 120 is fixed to fixed shaft 130 via bracket 150 on the negative X-axis side of bar holder 110. A pinion 121 that meshes with gear 115 is attached to the output shaft of first actuator 120. When the output shaft of first actuator 120 rotates, pinion 121 and gear 115 rotate, and so does bar holder 110.

[0063] The switching mechanism 100 is provided with a position detector 160 that detects the reference rotation position of the bar holder 110. The position detector 160 includes a sensor disk 161 fixed to the flange 114 and a photosensor 162 fixed to the bracket 150 via a mounting plate 163. A notch (not shown) is formed at a predetermined position on the outer periphery of the sensor disk 161. When the XL break bar 60A is in the use position, the notch comes into contact with and is detected by the photosensor 162. This position is the reference rotation position of the bar holder 110. The rotation position of the bar holder 110 can be detected by detecting the rotation angle (number of rotations) of the first actuator 120 from the reference rotation position.

[0064] By rotating the first actuator 120, the bar holder 110 rotates clockwise as viewed in the negative direction of the X axis by 90 degrees from the rotation reference position. As a result, each time the bar holder 110 rotates by 90 degrees, the four upper break bars 60 are set to their usage positions in the order of S break bar 60D, M break bar 60C, L break bar 60B, and XL break bar 60A.

[0065] The four upper break bars 60 have the same distance from the rotation axis R to the tip of the cutting edge 61 of each upper break bar 60. Therefore, when the height position of the upper break bar unit BU is the same, the height positions of the cutting edges 61 of the four upper break bars 60 in the use position are all the same. Therefore, regardless of which upper break bar 60 is in the use position, the cutting edges 61 abut against the substrate F at the same height position.

[0066] The upper break bar unit BU includes an opening / closing mechanism 200 in addition to the switching mechanism 100. The opening / closing mechanism 200 simultaneously opens and closes pairs of blades 60a, 60b of the four upper break bars 60. The opening / closing mechanism 200 includes two cam plates 210 that are rotating bodies, a second actuator 220, and a link mechanism 230.

[0067] Each cam plate 210 is made up of an annular cam portion 211 and a cylindrical boss portion 212. Four hinge pins 213 are provided on the cam portion 211 at 90-degree intervals. A gear 215 is fixed to the cam plate 210 on the X-axis positive direction side via a flange 214. The two cam plates 210 and flanges 214 are passed through two hubs 113 of the bar holder 110. As a result, the two cam plates 210 are arranged on either side of the bar holder 110 in the X-axis direction.

[0068] Three bearings 240 are interposed between each cam plate 210 and each flange 214 and each hub 113. As a result, the two cam plates 210 are rotatably supported by the two hubs 113 and can rotate coaxially with the bar holder 110, i.e., around the rotation axis R.

[0069] The two cam plates 210 are connected by four round rod-shaped connecting shafts 216. Each connecting shaft 216 passes through a corresponding insertion hole 111d of the two holding plates 111.

[0070] The second actuator 220 is, for example, a servo motor with a reducer, and includes a sensor that detects the rotation angle (rotation position). The second actuator 220 is fixed to the fixed shaft 130 via a bracket 250 on the X-axis positive side of the bar holder 110. That is, in the upper break bar unit BU, the first actuator 120 and the second actuator 220 are arranged so as to sandwich the bar holder 110 in the direction of the rotation axis R (X-axis direction). A pinion 221 that meshes with a gear 215 is attached to the output shaft of the second actuator 220. The rotation of the output shaft of the second actuator 220 is transmitted to the cam plate 210 on the X-axis positive side by the pinion 221 and the gear 215. This causes the two cam plates 210, which are connected by four connecting shafts 216, to rotate.

[0071] The link mechanism 230 is provided between four pairs of blades 60a, 60b and two cam plates 210. The link mechanism 230 includes four pairs of sliders 231, eight link members 232, and four round bar-shaped connecting shafts 233. Four link members 232 are provided between each of the four pairs of sliders 231 and each of the cam plates 210.

[0072] Each pair of sliders 231 is disposed on each of the four circumferential surfaces of the bar holder 110. The pair of sliders 231 has a substantially rectangular plate shape that is long in the X-axis direction and is aligned in a direction perpendicular to the X-axis. Each slider 231 is composed of a base 231a and a spacer 231b that overlaps the base 231a. Two roller followers 231c and a hinge pin 231d are provided on both end surfaces of the base 231a in the X-axis direction. The hinge pin 231d is provided between the two roller followers 231c. The two roller followers 231c and the hinge pin 231d on both ends of the base 231a are inserted into the first slide holes 111b of the two holder plates 111. The tip of the hinge pin 231d protrudes outside the holder plate 111, i.e., toward the cam plate 210. Four pairs of sliders 231 are held by the bar holder 110 so as to be slidable in a direction perpendicular to the X-axis.

[0073] A rectangular slide guide 116 extending along each side of the two holding plates 111 is provided. The slide guides 116 contact the spacers 231b of the sliders 231 from both sides. This allows the pair of sliders 231 to slide straight in a direction perpendicular to the X-axis.

[0074] Each pair of blades 60a, 60b of each upper break bar 60 is fixed to each pair of sliders 231. That is, the pair of blades 60a, 60b is held by the bar holder 110 via the pair of sliders 231 and slides together with the pair of sliders 231.

[0075] It should be noted that by preparing a plurality of spacers 231b with different thicknesses and replacing the spacers 231b, the distance (height) of each upper break bar 60 from each surface of the bar holder 110 can be adjusted.

[0076] One link member 232 is provided for two sliders 231 adjacent to each other across a corner of the bar holder 110. Each link member 232 is composed of a first lever 232a and two second levers 232b. One end of the first lever 232a is rotatably connected to the hinge pin 213 of the cam plate 210. One end of one of the second levers 232b is rotatably connected to the hinge pin 231d of one of the sliders 231, and one end of the other second lever 232b is rotatably connected to the hinge pin 231d of the other slider 231. Furthermore, the other ends of the first lever 232a and the two second levers 232b are rotatably connected to a connecting shaft 233 that is passed through the second slide holes 111c of the two holder plates 111.

[0077] The opening / closing mechanism 200 is provided with a position detector 260 that detects the rotation reference position of the cam plate 210. The position detector 260 includes a sensor disk 261 fixed to the flange 214 and a photosensor 262 fixed to the bracket 250 via a mounting plate 263. A notched hole (not shown) is formed at a predetermined position on the outer periphery of the sensor disk 261. When the cam plate 210 is in the rotation reference position, the notched hole comes to the position of the photosensor 262 and is detected by the photosensor 262. The rotation position of the cam plate 210 can be detected by detecting the rotation angle (number of rotations) of the second actuator 220 from the rotation reference position.

[0078] FIG. 8 is a diagram for explaining the opening and closing operation of the pair of blades 60a and 60b by the opening and closing mechanism 200. As shown in FIG.

[0079] When the cam plate 210 is in the rotation reference position, as shown in Figure 8, the pair of blades 60a, 60b are in an intermediate open / close state, and the distance between the pair of blades 60a, 60b (hereinafter referred to as the "blade distance") is an intermediate distance.

[0080] When the cam plates 210 on both sides are rotated counterclockwise, which is the first direction, from the rotation reference position as viewed in the negative direction of the X axis, as shown by the solid arrows by the operation of the second actuator 220, the other ends of the first lever 232a and the two second levers 232b of the four link members 232 on both sides move along the second slide holes 111c as shown by the solid arrows in a direction approaching the corners of the holding plate 111, and one ends of the two second levers 232b move along the first slide holes 111b as shown by the solid arrows in a direction approaching the corners of the holding plate 111. As a result, the pair of blades 60a, 60b move together with the pair of sliders 231 in a direction in which the pair of blades 60a, 60b open, and the blade spacing increases.

[0081] On the other hand, when the cam plates 210 on both sides are rotated in the second direction, that is, clockwise, from the rotation reference position as viewed in the negative direction of the X axis, as indicated by the dashed arrows, by the operation of the second actuator 220, the other ends of the first lever 232a and the two second levers 232b of the four link members 232 on both sides move along the second slide holes 111c toward the center of the holding plate 111 as indicated by the dashed arrows, and one ends of the two second levers 232b move along the first slide holes 111b in directions away from the corners of the holding plate 111 as indicated by the dashed arrows. As a result, the pair of blades 60a, 60b move together with the pair of sliders 231 in directions that close the pair of blades 60a, 60b, narrowing the blade spacing.

[0082] In this way, the blade spacing is adjusted by opening and closing the pair of blades 60a, 60b using the opening and closing mechanism 200.

[0083] When the pair of blades 60a, 60b are opened or closed, the center position of the gap between the two blades 60a, 60b does not change. When the upper break bar 60 is in the use position, the cutting edge 51 of the lower break bar 50 is aligned with the center of the gap between the two blades 60a, 60b.

[0084] 4, in the upper break bar unit BU, linear bushings 172 are attached to both ends of the fixed shaft 130 using brackets 171. The upper break bar unit BU is connected to a pair of guide poles 23 via the linear bushings 172 at both ends, and is supported by the pair of guide poles 23 so as to be slidable in the Z-axis direction (up and down direction).

[0085] 2 and 3, the lifting unit 70 is disposed above the upper break bar unit BU, and lifts and lowers the upper break bar unit BU, that is, the upper break bar 60 set in the use position.

[0086] The lifting unit 70 includes a slider 310 , two crank mechanisms 320 , an actuator 330 , and a transmission mechanism 340 .

[0087] Fig. 9 is a front view of the lifting unit 70 as seen in the negative direction of the Y axis. Fig. 10 is a perspective view of the lifting unit 70 as seen in the positive direction of the Y axis. In addition to the lifting unit 70, Figs. 9 and 10 also show the linear frame 21 above the support frame 20 and a pair of guide poles 23.

[0088] The slider 310 has a square rod shape and extends in the X-axis direction. Both ends of the slider 310 are connected to a pair of guide poles 23 via linear bushings 350, and the slider 310 is supported by the pair of guide poles 23 so as to be slidable in the Z-axis direction (up and down direction). A round rod-shaped shaft 311 is embedded in the slider 310 at a position a predetermined distance to the left and right from the center in the X-axis direction (longitudinal direction) so as to penetrate the slider 310 in the Y-axis direction. Furthermore, the slider 310 is formed with an opening 312 that is long in the X-axis direction and penetrates in the up and down direction (Z-axis direction).

[0089] An upper break bar unit BU is attached to the underside of the slider 310 via two brackets 173 fixed to both sides of the fixed shaft 130 (see FIGS. 2 and 3). By attaching the upper break bar unit BU to the slider 310, four upper break bars 60 are attached to the slider 310.

[0090] The two crank mechanisms 320 are connected to both the left and right sides in the longitudinal direction (X-axis direction) of the slider 310. The two crank mechanisms 320 are provided at equal distances from the center of the upper brake bar 60 in the X-axis direction.

[0091] Each crank mechanism 320 includes a crankshaft 321 , two crank plates 322 , and two connecting rods 323 .

[0092] The crankshaft 321 passes through the upper linear frame 21 of the support frame 20 in the Y-axis direction and is rotatably supported by the linear frame 21 via a bearing (not shown). The crankshaft 321 rotates due to the torque of the actuator 330 transmitted via the transmission mechanism 340.

[0093] The two crank plates 322 have a disk shape, and are fixed at positions offset from the center to portions on both sides of the crank shaft 321 protruding from the linear frame 21.

[0094] The two connecting rods 323 have elongated, approximately square plates that taper slightly in the negative Z-axis direction (downward). The two connecting rods 323 are arranged on either side of the slider 310 and linear frame 21 in the Y-axis direction. The upper end of each connecting rod 323 is rotatably connected to the crank plate 322 via a bearing 324, and the lower end is rotatably connected to the shaft 311 of the slider 310 via a bearing 325. The two connecting rods 323 are connected by a connecting plate 326 at a position between the slider 310 and the linear frame 21.

[0095] Actuator 330 is, for example, a servo motor with a reducer, and includes a sensor that detects the rotation angle (rotation position). Actuator 330 is disposed on the Y-axis negative side of linear frame 21, and is fixed to linear frame 21 via bracket 361. A pinion 331 is attached to the output shaft of actuator 330.

[0096] Transmission mechanism 340 includes pinion 341 that meshes with pinion 331 of actuator 330, a round-bar-shaped first shaft 342 connected to pinion 341, a round-bar-shaped second shaft 343 connected to first shaft 342 by coupling 344, a bevel gear 345 attached to the end of first shaft 342, and a bevel gear 346 attached to the end of second shaft 343. First shaft 342 and second shaft 343 are arranged side by side in the X-axis direction on the Y-axis negative side of linear frame 21, and are rotatably supported via bearings (not shown) by bracket 361, the same as actuator 330, and three brackets 362 fixed to linear frame 21. Bevel gear 345 meshes with bevel gear 327 attached to crankshaft 321 on the X-axis positive side. Bevel gear 346 meshes with bevel gear 327 attached to crankshaft 321 on the X-axis negative side.

[0097] The lifting unit 70 is provided with a position detector 370 that detects the rotational reference position of the crank plate 322. The position detector 370 includes a sensor disk 371 fixed to the crankshaft 321 on the negative side of the X-axis and a photosensor 372 fixed to the linear frame 21 via a mounting plate 373. A notch (not shown) is formed at a predetermined position on the outer periphery of the sensor disk 371. When the crank plate 322 is in the rotational reference position, the notch comes to the position of the photosensor 372 and is detected by the photosensor 372. At this time, the two connecting rods 323 are in their uppermost positions, and the slider 310 is in its highest position. By detecting the rotation angle (number of rotations) of the actuator 330 from the rotational reference position, the rotational position of the crank plate 322 can be detected, and the height position (position in the Z-axis direction) of the slider 310 can be detected.

[0098] When the output shaft of the actuator 330 rotates, this rotation is transmitted to the crankshafts 321 of the two crank mechanisms 320 by the pinion 331 and the transmission mechanism 340. In the two crank mechanisms 320, when the crankshafts 321 rotate, the two crank plates 322 rotate eccentrically, causing the two connecting rods 323 to reciprocate up and down. This causes the slider 310 connected to the two crank mechanisms 320, i.e., the four connecting rods 323, to move up and down, as shown by the solid and dashed lines in Figure 9. The upper brake bar unit BU attached to the slider 310 moves up and down (lifts and lowers) between the top position (highest position) and the bottom position (lowest position).

[0099] 2, the two imaging devices 80 are arranged side by side in the X-axis direction above the upper break bar unit BU. The two imaging devices 80 are fixed to a frame 24 that protrudes in the negative Y-axis direction from the top of both linear frames 22 that extend in the Z-axis direction. The two imaging devices 80 are located between the two crank mechanisms 320.

[0100] Each imaging device 80 includes a camera unit 81 and a lens unit 82 extending downward from the camera unit 81. The lens unit 82 is housed in an opening 312 of the slider 310. This prevents the two imaging devices 80 from interfering with the slider 310 as it moves up and down.

[0101] In the upper break bar unit BU, one of the remaining three upper break bars 60 (a pair of blades 60a, 60b) is disposed on the bar holder 110 at a position facing the upper break bar 60 (a pair of blades 60a, 60b) in the use position, i.e., directly above the upper break bar 60. Also, an opening 131 is provided in the fixed shaft 130. As a result, the gap between the pair of blades 60a, 60b in the use position, the opening 131 in the fixed shaft 130, and the gap between the pair of blades 60a, 60b in the opposing position (directly above) overlap in the vertical direction (Z-axis direction).

[0102] The two imaging devices 80 are arranged so that the lens portions 82 are directly above the upper break bar 60 in an opposing position (directly above position). Therefore, the two imaging devices 80 can capture an image of the gap between the pair of blades 60a, 60b in the use position through the opening 131 of the fixed shaft 130 and the gap between the pair of blades 60a, 60b in the opposing position. This allows the two imaging devices 80 to monitor the positional relationship between the pair of blades 60a, 60b in the use position and the scribe line L on the substrate F.

[0103] Next, the detailed configuration of the table unit 30 will be described.

[0104] FIG. 11 is a perspective view showing the configuration of the table unit 30. FIGS. 12(a) and 12(b) are perspective views of the table unit 30, with the first table 410 and the moving member 430 removed, viewed in the negative and positive Y-axis directions, respectively. FIGS. 13(a) and 13(b) are front views of the rail member 610 and the elevator 620, with the rail member 610 lowered and raised, respectively. FIG. 13(c) is a side view of the turntable 440 and the rotation mechanism 34. In addition to the table unit 30, FIG. 11 also shows the peripheral configuration of the table unit 30, such as the lower break bar 50 and the slider 41 of the adjustment unit 40. In FIG. 12(b), the cover 517 of the first moving mechanism 510 has been removed.

[0105] The table unit 30 includes a table 31 , a table moving mechanism 32 , a lift mechanism 33 , a rotation mechanism 34 , and a pair of guide members 35 .

[0106] The pair of guide members 35 are, for example, two round rod-shaped shafts, and are fixed to slider 41 of adjustment unit 40 so as to extend in the Y-axis direction. A first mounting plate 36a and a second mounting plate 36b, each having an elongated rectangular shape, are fixed to the ends of the pair of guide members 35 facing the positive and negative Y-axis directions, respectively.

[0107] The table 31 includes a first table 410, a second table 420, and a moving member 430. The first table 410 includes a turntable 440 and an installation table 450 on which the turntable 440 is rotatably installed. The turntable 440 has a disk shape, and the installation table 450 has a rectangular plate shape. A rectangular first opening 411 is formed in the center of the first table 410, penetrating the turntable 440 and the installation table 450 in the Z-axis direction.

[0108] The turntable 440 is provided with two pins 441 aligned in the X-axis direction near the first opening 411 in the negative Y-axis direction, and a locking device 442 is provided near the first opening 411 in the positive Y-axis direction. The locking device 442 includes a pair of rollers 442a, and fixes the frame 3, i.e., the substrate F, to the turntable 440 by sandwiching the frame 3 between the pair of rollers 442a and the two pins 441 from the front and back in the Y-axis direction.

[0109] An unlocking device 37 is provided on the Y-axis positive side of the locking device 442. The unlocking device 37 is fixed to the first mounting plate 36a via a bracket 38. The unlocking device 37 moves the pad 37b using the air cylinder 37a to act on the locking device 442, thereby separating the pair of rollers 442a from the frame 3. This releases the fixation of the substrate F to the turntable 440.

[0110] The installation table 450 is provided with a plurality of (three) rollers 451 around the turntable 440. The rollers 451 fit into grooves 440a formed on the outer periphery of the turntable 440, and rotatably support the turntable 440. Rollers 452 are provided on both ends in the X-axis direction at the end of the installation table 450 (first table 410) on the negative Y-axis side, so as to protrude outward from the installation table 450. Each roller 452 is, for example, a bearing.

[0111] The moving member 430 has a plate shape that is long in the X-axis direction, and is connected to the end of the first table 410 on the Y-axis positive side by three hinges 431. The moving member 430 is disposed perpendicular to the first table 410. Linear bushings 432 are provided on both ends of the moving member 430 in the X-axis direction. The moving member 430 is slidably supported by a pair of guide members 35 via the two linear bushings 432. The first table 410 can tilt with the hinges 431 as a fulcrum so that the Y-axis negative side is higher.

[0112] The moving member 430 is provided with stop pins 433 at both ends in the X-axis direction, protruding in the positive direction of the Y-axis.

[0113] The second table 420 is placed below the first table 410. The second table 420 is composed of a rectangular table body 421 and two support plates 422 that support both ends of the table body 421 in the Y-axis direction from below. A rectangular second opening 423 is formed in the center of the table body 421 of the second table 420. The second opening 423 is larger in size than the first opening 411. The first opening 411 and the second opening 423 overlap in the vertical direction to form the opening 31a.

[0114] Each support plate 422 is provided with a linear bushing 424 at both ends in the X-axis direction. The second table 420 is slidably supported by a pair of guide members 35 via the four linear bushings 424. A moving member 430 is located on the Y-axis positive side of the second table 420 (the side in the pull-out direction of the first table 410).

[0115] As shown in FIG. 11, the lower break bar 50 disposed on the upper surface of the slider 41 is housed in the opening 31 a of the table 31 , that is, in the first opening 411 and the second opening 423 .

[0116] The table moving mechanism 32 includes a first moving mechanism 510 and a second moving mechanism 520. The first moving mechanism 510 linearly moves the first table 410 and the second table 420 together in the Y-axis direction. The second moving mechanism 520 linearly moves the moving member 430 in the Y-axis direction. This causes the first table 410 to move linearly in the Y-axis direction relative to the second table 420 between a stored position and an extended position. The stored position is a position where the majority of the first table 410 overlaps directly above the second table 420, and the extended position is a position where the first table 410 is shifted in the positive direction of the Y-axis from the second table 420 so that the majority of the first table 410 does not overlap the second table 420.

[0117] First movement mechanism 510 includes actuator 511 and ball screw 512. Actuator 511 is, for example, a servo motor with a reducer, and includes a sensor that detects the rotation angle (rotation position). Ball screw 512 is composed of nut 513 and screw shaft 514. Nut 513 is fixed to the center of support plate 422 on the Y-axis negative direction side of second table 420. Screw shaft 514 is connected to actuator 511 via coupling 515.

[0118] Actuator 511 is fixed to second mounting plate 36b via mounting member 516. Ball screw 512 is covered by cover 517. When screw shaft 514 is rotated by driving actuator 511, first table 410 and second table 420 move together.

[0119] The second movement mechanism 520 includes an air cylinder 521. The air cylinder 521 includes an elongated cylindrical cylinder body 521a and a rod 521b that moves in and out of the cylinder body 521a by the action of air pressure. The air cylinder 521 is fixed to the center of the second table 420 in the X-axis direction so as to span between two support plates 422.

[0120] The tip of rod 521b of air cylinder 521 is fixed to the center in the X-axis direction of moving member 430. When rod 521b extends from cylinder body 521a, moving member 430 moves in the positive Y-axis direction (extension direction), and when rod 521b is retracted into cylinder body 521a, moving member 430 moves in the negative Y-axis direction (retraction direction).

[0121] The lift mechanism 33 lifts the first table 410 so that the first table 410 does not come into contact with the lower break bar 50 when moved by the second movement mechanism 520 (air cylinder 521). The lift mechanism 33 includes two rail members 610 arranged on either side of the table 31 in the X-axis direction, and four elevators 620 that raise and lower the rail members 610. Each elevator 620 is arranged below both ends of each rail member 610 in the Y-axis direction, and both ends are lifted by the elevators 620. Each elevator 620 is fixed to a support plate 422.

[0122] The two rail members 610 extend in the Y-axis direction, with both ends slightly protruding in the Y-axis direction from the table 31. Each rail member 610 is composed of a base portion 611 and a rail portion 612 that rises from the base portion 611 along the table 31. Each roller 452 of the first table 410 rests on the rail portion 612 of each rail member 610.

[0123] 13(a) and (b), each elevator 620 is an air cylinder and includes a rectangular parallelepiped cylinder body 621, a rod 622 that moves in and out of cylinder body 621 by the action of air pressure, and an actuator 623 attached to the tip of rod 622. Actuator 623 is fixed to the end of rail member 610.

[0124] 13(a), when the rod 622 is retracted into the cylinder body 621, the rail member 610 is in a lowered state. As shown in FIG. 13(b), when the rod 622 extends from the cylinder body 621, the rail member 610 rises.

[0125] As shown in FIG. 13(c), the rotation mechanism 34 includes an actuator 34a, a gear 34b, and a pinion 34c. The actuator 34a is, for example, a servo motor with a reducer, and includes a sensor that detects the rotation angle (rotation position). The gear 34b is integrally formed below the turntable 440 and has an outer diameter slightly smaller than that of the turntable 440. The pinion 34c is connected to the output shaft of the actuator 34a and meshes with the gear 34b. When the output shaft of the actuator 34a rotates, the pinion 34c and gear 34b rotate, and the turntable 440 rotates.

[0126] In this embodiment, when the substrate F held by the frame 3 in the table unit 30 is attached to or detached from the table 31 (turntable 440), the first table 410 is pulled out in the positive direction of the Y axis to the pulled-out position relative to the second table 420. This makes it less likely that the upper break bar 60 will get in the way when the substrate F is attached or detached, allowing the substrate F to be attached or detached smoothly.

[0127] Figures 14(a) to (c) are diagrams for explaining the operation of moving the first table 410 in and out in the Y-axis direction relative to the second table 420. For convenience, Figures 14(a) and 14(b) schematically show the upper break bar 60 and the lower break bar 50.

[0128] As shown in FIG. 14(a), when the first table 410 is pulled out to the pull-out position relative to the second table 420 and is horizontal, the substrate F held by the frame 3 is attached to the turntable 440 of the first table 410.

[0129] When the substrate F is placed on the first table 410, the operation of moving the first table 410 to the storage position directly above the second table 420 is performed as follows.

[0130] First, the lifting operation of elevator 620 lifts rail member 610, thereby lifting first table 410. As shown in Fig. 14(b), first table 410 tilts with hinge 431 as a fulcrum so that the negative Y-axis side is higher.

[0131] Next, air cylinder 521 (second movement mechanism 520) operates to retract rod 521b, and first table 410 moves in the negative direction of the Y axis together with moving member 430, as shown by the dashed line in Figure 14(b). Roller 452 rolls on rail member 610, causing first table 410 to move while remaining tilted.

[0132] Here, when the first table 410 is in the storage position, the height of the cutting edge 51 of the lower break bar 50 stored in the opening 31a is the same as the height of the upper surface of the turntable 440 (see FIG. 14(c)). For this reason, when the first table 410 moves to the storage position while remaining horizontal, the portion of the first table 410 on the negative side of the Y axis from the first opening 411 (hereinafter referred to as the "rear portion") collides with the cutting edge 51 of the lower break bar 50. However, in this embodiment, the tilt of the first table 410 makes the rear portion higher than the cutting edge 51 of the lower break bar 50, and therefore it does not collide with the cutting edge 51.

[0133] As shown by the dashed line in Figure 14(c), when first table 410 reaches the storage position in an inclined state, rail member 610 is lowered by the descending operation of elevator 620, and first table 410 returns to a horizontal state. As shown in Figure 14(c), first table 410 overlaps directly above second table 420, and they become an integrated state as table 31.

[0134] Next, when the divided substrate F is to be removed from the table 31, the first table 410 in the storage position is moved to the pull-out position as follows.

[0135] From the state shown in FIG. 14(c), the rail member 610 is raised by the lifting operation of the elevator 620, and the first table 410 is lifted so as to tilt.

[0136] Next, the air cylinder 521 (second movement mechanism 520) operates to extend the rod 521b, and as shown in FIG. 14(b), the first table 410 moves in the positive direction of the Y axis while tilted, and reaches the pulled-out position. At this time, the rear portion of the first table 410 is higher than the cutting edge 51 of the lower break bar 50, so it does not collide with the cutting edge 51. When the table 31 reaches the pulled-out position, the two stop pins 433 (see FIG. 11) of the moving member 430 abut against the first mounting plate 36a, which serves as a stopper, and the moving member 430, i.e., the first table 410, is stopped.

[0137] Because table 31 is movable in the Y-axis direction, the movement distance of first table 410 to the pulled-out position varies depending on the position of second table 420 before first table 410 is pulled out. In this embodiment, first table 410 is stopped by first mounting plate 36a (stopper), so first table 410 can be reliably stopped at the pulled-out position regardless of the position of second table 420.

[0138] 14(a), when first table 410 reaches the extraction position in an inclined state, rail member 610 is lowered by the descending operation of elevator 620, and first table 410 returns to a horizontal state. Substrate F is removed from first table 410.

[0139] Returning to FIG. 11, the table unit 30 is provided with a support mechanism 700 in the opening 31a of the table 31 that supports the substrate F positioned inside the opening 31a from below.

[0140] FIG. 15 is a perspective view of a main part showing the configuration of the support mechanism 700. FIGS. 16(a) and 16(b) are plan views of a main part showing the configuration of the support mechanism 700. In FIG. 16(a), the table 31 (second table 420) is in a state where it has moved to the furthest position in the positive direction of the Y axis, and in FIG. 16(b), the table 31 is in a state where it has moved to the furthest position in the negative direction of the Y axis. For convenience, the first table 410 and the moving member 430 are omitted from the table unit 30 in FIGS. 15, 16(a), and 16(b). For convenience, the substrate F is shown in a transparent state in FIGS. 16(a) and 16(b).

[0141] 11, 15, and 16(a) and (b), the support mechanism 700 includes two support ropes 710 which are string-like supports, and two guide mechanisms 720.

[0142] The two support ropes 710 are made of an elastic material, such as urethane rubber, and are stretched so as to extend horizontally in the Y-axis direction (the direction of movement of the table 31) within the opening 31a (the first opening 411 and the second opening 423) of the table 31. The two support ropes 710 are arranged symmetrically with respect to a center line P that passes through the center of the lower break bar 50 in the X-axis direction (longitudinal direction) and extends in the Y-axis direction (see FIGS. 16(a) and 16(b)).

[0143] On the second table 420, two fixed pieces 425 are formed on the inner peripheral edge of the second opening 423 in the positive direction of the Y axis and the inner peripheral edge in the negative direction of the Y axis so as to rise from the inner peripheral edge. One end of each support rope 710 is fixed to the tip of the fixed piece 425 on the positive direction side of the Y axis, and the other end is fixed to the tip of the fixed piece 425 on the negative direction side of the Y axis. Each support rope 710 is fixed to the two fixed pieces 425 in a state where it is stretched longer than its natural length. This allows each support rope 710 to be stretched straight and without slack.

[0144] The height of the two support ropes 710 is set to be equal to the height of the upper surface of the table 31, i.e., the upper surface of the turntable 440. As a result, the two support ropes 710 come into contact with the substrate F placed on the table 31 via the dicing tape 2, and support the substrate F from below.

[0145] Each guide mechanism 720 is provided around the lower break bar 50 and guides each support rope 710 so that when the table 31 moves, the support rope 710 moves around the cutting edge 51 of the lower break bar 50.

[0146] Each guide mechanism 720 includes two first pulleys 721 that are first guide portions, two second pulleys 722 that are second guide portions, and a support member 723.

[0147] The support member 723 has two support pieces 723a that are bifurcated at a predetermined interval in the Y-axis direction. The support member 723 is attached to the upper surface of the slider 41, which is an attachment member to which the lower break bar 50 is attached. The lower break bar 50 is located between the two support pieces 723a.

[0148] Each first pulley 721 is rotatably supported on the upper side of its corresponding support piece 723a, and each second pulley 722 is rotatably supported on the lower side of its corresponding support piece 723a. As a result, one first pulley 721 and one second pulley 722 are provided on each side of the lower break bar 50 in the Y-axis direction. The second pulley 722 is located below the first pulley 721.

[0149] Each support rope 710 is hung around each first pulley 721 so as to pass over the upper side and the lower break bar 50 side of the first pulley 721, and is hung around each second pulley 722 so as to pass over the opposite side of the second pulley 722 from the lower break bar 50 and under the second pulley 722. Below the lower break bar 50, the two support ropes 710 pass through the space between the two load cells 45 that support the lower break bar 50.

[0150] When the table 31 (second table 420) moves between the position furthest in the positive direction of the Y axis shown in FIG. 16(a) and the position furthest in the negative direction of the Y axis shown in FIG. 16(b), the two support ropes 710 move in conjunction with the movement of the table 31. At this time, each support rope 710 is guided by two first pulleys 721 and two second pulleys 722, passing on both sides of and below the lower break bar 50 in the Y axis direction, and moving while bypassing the cutting edge 51 of the lower break bar 50. Therefore, even if the position of the table 31 moves, the support ropes 710 are always present except in the vicinity of the lower break bar 50. Therefore, the two support ropes 710 can adequately support the substrate F regardless of the position of the lower break bar 50.

[0151] 11, notches 411a are formed in the first opening 411 of the first table 410 at positions corresponding to the fixed pieces 425 of the second table 420. The tip of the fixed piece 425 and the first pulley 721 close to the fixed piece 425 are accommodated in each notch 411a.

[0152] [Severing action] Next, the operation of cutting the substrate F by the cutting device 1 will be described.

[0153] As explained in Figures 14(a) to (c), when the substrate F held by the frame 3 is attached to the first table 410 (turntable 440) and the first table 410 is stored directly above the second table 420, the cutting operation begins and the preparation process and the cutting process are carried out sequentially.

[0154] In the preparation process, under the monitoring of the two imaging devices 80, the two actuators 511, 34a are controlled, and the table 31 is moved and the turntable 440 is rotated so that the scribe line L to be initially cut in the substrate F is positioned in the center of the gap between the pair of blades 60a, 60b of the upper break bar 60 and is parallel to the pair of blades 60a, 60b. When the scribe line L is positioned in the center of the gap between the pair of blades 60a, 60b, the cutting edge 51 of the lower break bar 50 is aligned with the scribe line L.

[0155] Furthermore, in the preparation process, the height of the table unit 30 is adjusted to a height such that, in the subsequent cutting process, when the upper break bar 60 (a pair of blades 60a, 60b) in the use position is lowered to the lowest position by the operation of the two crank mechanisms 320 of the lifting unit 70, it is pushed in by a predetermined amount from the position where it abuts against the substrate F.

[0156] After the preparation process is completed, the separation process begins. In the separation process, the actuator 330 of the lifting unit 70 rotates at a constant rotational speed (uniform velocity). As a result, the slider 310 of the lifting unit 70, i.e., the upper break bar 60 in the use position, repeats a lifting and lowering operation (up and down movement) at an acceleration and deceleration rate determined by the rotational speed of the actuator 330.

[0157] When the upper break bar 60 in the use position descends to its lowest position, it is pushed in a predetermined amount from the position where it abuts against the substrate F. As a result, the substrate F is bent at three points by the cutting edges 61a, 61b of the two blades 60a, 60b and the cutting edge 51 of the lower break bar 50 at the position of the scribe line L. As a result, stress is concentrated at the tip of the crack in the scribe line L, and the crack extends toward the lower break bar 50, dividing the substrate F.

[0158] During the operation of the first moving mechanism 510, the upper break bar 60 rises from the lowest point and then descends to the lowest point again, and the table 31 (first table 410 and second table 420) moves by the pitch of the scribe line L, thereby moving the substrate F. As a result, the upper break bar 60 descends to the position of the next scribe line L, and the substrate F is cut at the position of that scribe line L.

[0159] When the substrate F is cut, the cut portion separates into multiple pieces. At this time, the cut portions are supported from below by two support ropes 710, so they are less likely to bend downward due to their weight. This makes it less likely that the corners of the end faces of adjacent pieces will collide with each other and chip off.

[0160] When cutting of the substrate F along the scribe line L in one direction is completed, the turntable 440 rotates 90 degrees, and a similar cutting operation is performed to cut the substrate F along the scribe line L in the other direction. However, in the preparation step, the height adjustment of the table unit 30 is not performed because it has already been completed in the previous preparation step.

[0161] The frame 3 that holds the substrate F has a circular inner periphery, and the spacing inside the frame 3 in the direction perpendicular to the scribe line L becomes smaller as it moves away from the center to both sides. Also, as explained in FIG. 1(b), the surface of the frame 3 protrudes beyond the surface of the substrate F. For this reason, when the upper break bar 60 is brought into contact with the surface of the substrate F in the cutting process, there is a risk that interference will occur between the frame 3 and the upper break bar 60 at a position away from the center.

[0162] Therefore, to prevent such interference between the frame 3 and the upper break bars 60, the four upper break bars 60 are switched, and upper break bars 60 with shorter cutting edges 61 are used in areas of the substrate F away from the center where the length of the scribe line L is shorter. This prevents the upper break bars 60 from interfering with the frame 3.

[0163] When the upper break bar 60 is switched, the operation of the lifting unit 70 is stopped temporarily before the switch, and the upper break bar 60 in the use position stops at the highest point. Then, when the switch is completed, the lifting unit 70 starts operating again.

[0164] Once cutting of the substrate F is complete, as described in Figures 14(a) to (c), the first table 410 is pulled out in the positive direction of the Y axis relative to the second table 420, and the substrate F held by the frame 3 is removed from the first table 410.

[0165] <Effects of the embodiment> According to this embodiment, the following effects are achieved.

[0166] As shown in Figures 15, 16(a), and 16(b), the table 31 has an opening 31a that houses the lower break bar 50, and the substrate F is positioned inside the opening 31a. A support mechanism 700 that supports the substrate F from below is provided inside the opening 31a. The support mechanism 700 includes a support rope 710, which is a string-like support that is stretched inside the opening 31a so as to extend in the movement direction of the table 31 (the Y-axis direction) and supports the substrate F placed on the table 31 from below, and a guide mechanism 720 that is provided around the lower break bar 50 and guides the support rope 710 so that the support rope 710 moves around the cutting edge 51 of the lower break bar 50 when the table 31 moves.

[0167] When the substrate F is cut, the cut portion separates into a plurality of pieces. With the above configuration, the cut portions are supported from below by the support ropes 710, and are therefore less likely to bend downward due to their weight. This makes it less likely that the corners of the end faces of adjacent pieces will collide with each other and chip off.

[0168] Furthermore, when the table 31 moves, the support ropes 710 are guided by the guide mechanism 720 and move around the cutting edge 51 of the lower break bar 50. Therefore, even if the position of the table 31 moves, the support ropes 710 are always present under the substrate F except in the vicinity of the lower break bar 50. Therefore, the support ropes 710 can adequately support the substrate F regardless of the position of the lower break bar 50.

[0169] 15 and 16(a) and (b), the guide mechanism 720 includes a first pulley 721 and a second pulley 722 that are provided on both sides of the lower break bar 50 in the movement direction (Y-axis direction) of the table 31 and guide the support rope 710. Each second pulley 722 is located below each first pulley 721. The support rope 710 is looped around each first pulley 721 so as to pass above the first pulley 721 and on the side of the lower break bar 50, and is looped around each second pulley 722 so as to pass below and on the side of the second pulley 722 opposite the lower break bar 50.

[0170] According to this configuration, the support rope 710 moves so as to slip between both sides of and below the lower break bar 50 by being guided by the two first pulleys 721 and the two second pulleys 722. This allows the support rope 710 to be detoured over a short distance. Furthermore, the support rope 710 moves smoothly by being fed by the rotating first pulley 721 and second pulley 722.

[0171] 15 and 16(a) and (b), the guide mechanism 720 includes a support member 723 that rotatably supports each of the first pulleys 721 and each of the second pulleys 722. The support member 723 is attached to the slider 41, which is an attachment member to which the lower break bar 50 is attached.

[0172] According to this configuration, the support member 723 and the lower break bar 50 are attached to the same attachment member (slider 41), thereby improving the positional accuracy between the lower break bar 50 and the four pulleys 721, 722. This allows the support rope 710 to be routed as close as possible to the lower break bar 50, further shortening the route distance. In addition, the support rope 710 supports the substrate F over a larger area.

[0173] As shown in Figures 16(a) and (b), the lower break bar 50 is long in a direction (X-axis direction) perpendicular to the movement direction (Y-axis direction) of the table 31, and multiple (two) support ropes 710 are arranged symmetrically with respect to a center line P that passes through the center of the lower break bar 50 in the long direction and extends in the movement direction.

[0174] According to this configuration, the substrate F can be supported in a well-balanced manner by the plurality of (two) support ropes 710.

[0175] The support rope 710 is made of an elastic material.

[0176] According to this configuration, by stretching the support ropes 710 so that they are longer than their natural length, the support ropes 710 can be stretched straight without slack, and the substrate F can be firmly supported by the support ropes 710.

[0177] Although the embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications of the embodiment of the present invention are possible.

[0178] For example, in the above embodiment, the support mechanism 700 is composed of two support ropes 710 and two guide mechanisms 720. However, the number of support ropes 710 and guide mechanisms 720 constituting the support mechanism 700 may be any number as long as it is one or more. For example, as shown in FIG. 17(a), the support mechanism 700 may be composed of three support ropes 710 and three guide mechanisms 720. In this case, too, it is preferable that the three support ropes 710 are arranged symmetrically with respect to the center line P.

[0179] Furthermore, in the above embodiment, the support mechanism 700 includes the support rope 710, which is a string-like support. However, as shown in FIG. 17(b), the support mechanism 700 may include the support belt 730, which is a band-like support. In this case, the support belt 730 may be made of an elastic material. In the guide mechanism 720, the widths of the first pulley 721 and the second pulley 722 are made wider to fit the support belt 730 than in the case of the support rope 710.

[0180] Furthermore, in the above embodiment, guide mechanism 720 includes rotatable first pulley 721 as the first guide portion and rotatable second pulley 722 as the second guide portion. However, guide mechanism 720 may include first guide portion and second guide portion configured of non-rotating members formed from a low-friction material. Furthermore, guide mechanism 720 may have a configuration other than a configuration including a first guide portion and a second guide portion.

[0181] Furthermore, in the above embodiment, the support rope 710 is made of an elastic material. However, the support rope 710 may be made of a material other than an elastic material, such as a metal material or a resin material. Similarly, the support belt 730 in FIG. 17(b) may also be made of a metal material or a resin material.

[0182] Furthermore, in the above embodiment, the support rope 710 is passed through the space between the two load cells 45 formed below the lower break bar 50 between the two second pulleys 722. However, if there is no space below the lower break bar 50 for the support rope 710 to pass through, an opening may be provided below the cutting edge 51 of the lower break bar 50, and the support rope 710 may be passed through the opening.

[0183] Furthermore, in the above embodiment, the cutting device 1 is provided with four upper break bars 60 that can be switched by the switching mechanism 100. However, the cutting device 1 may be provided with one upper break bar 60, and the upper break bar 60 may be attached to the slider 310 directly or via a holder.

[0184] Furthermore, contrary to the above embodiment, the lower break bar 50 may be configured with a pair of blades, and the upper break bar 60 may be configured with a single blade. In this case, a configuration is adopted in which multiple (four) lower break bars 50 are included in a lower break bar unit having a switching mechanism 100 and an opening / closing mechanism 200. The substrate F is set on the table unit 30 so that the front surface on which the scribe line L is formed faces downward and the back surface faces upward.

[0185] As described above, even when the back surface of the substrate F, which is flush with the back surface of the frame 3 (is not lower than the back surface of the frame 3), faces upward, the upper break bar 60 is pushed in by the push-in amount from the back surface of the substrate F, so there remains a risk that the upper break bar 60 will interfere with the frame 3. Therefore, a configuration is adopted in which multiple (four) upper break bars 60 are provided and included in an upper break bar unit having only the switching mechanism 100.

[0186] When the lower break bar 50 is configured by a pair of blades and the upper break bar 60 is configured as one blade as described above, one upper break bar 60 and one lower break bar 50 may be provided.

[0187] Furthermore, the shapes of the upper break bar 60 (the pair of blades 60a, 60b) and the lower break bar 50 are not limited to those in the above embodiment, and may be any shape as long as the substrate F can be properly cut.

[0188] In addition, the embodiments of the present invention can be modified in various ways as appropriate within the scope of the technical ideas set forth in the claims. [Explanation of symbols]

[0189] 1...Cutting device 2...Dicing tape (adhesive sheet) 3...Frame 30...Table unit 31...Table 31a...Opening 32...Table movement mechanism 41...Slider (mounting member) 50…Lower break bar 51...Cutting edge 60...Upper break bar 700...Support mechanism 710...Support rope (string-like support) 730...Support belt (belt-shaped support) 720...Guide mechanism 721...First pulley (first guide part) 722...Second pulley (second guide part) 723...Support member F...Substrate L...Scribe line P…center line

Claims

1. A cutting device that cuts a substrate held by an annular frame via an adhesive sheet along a scribe line formed on the substrate, a table unit including a table on which a substrate is placed and a table moving mechanism that moves the table; an upper break bar that presses the substrate placed on the table from above; a lower break bar that receives the substrate placed on the table from below, The table has an opening for receiving the lower break bar. The substrate is located inside the opening, a support mechanism that supports the substrate from below is provided within the opening, The support mechanism includes: a string-like or band-like support member that is stretched within the opening so as to extend in the direction of movement of the table and supports the substrate placed on the table from below; a guide mechanism provided around the lower break bar and configured to guide the support body so that the support body moves around the cutting edge of the lower break bar when the table moves, A cutting device characterized by:

2. The cutting device according to claim 1, The guide mechanism includes a first guide portion and a second guide portion that are provided on both sides of the lower break bar in the movement direction and guide the support body, Each of the second guide portions is located below each of the first guide portions, The support is The first guide portion is hung on the upper side of the first guide portion and the lower break bar side, The lower break bar is hung on each of the second guide portions so as to pass through the opposite side and lower side of the second guide portion. A cutting device characterized by:

3. The cutting device according to claim 2, Each of the first guide portions includes a first pulley, Each of the second guide portions includes a second pulley. A cutting device characterized by:

4. The cutting device according to claim 3, the guide mechanism further includes a support member that rotatably supports each of the first pulleys and each of the second pulleys; The support member is attached to a mounting member to which the lower break bar is attached. A cutting device characterized by:

5. The cutting device according to any one of claims 1 to 4, A plurality of the supports are provided, The lower break bar is elongated in a direction perpendicular to the moving direction, The plurality of supports are arranged symmetrically with respect to a center line that passes through the center of the lower break bar in the longitudinal direction and extends in the movement direction. A cutting device characterized by:

6. The cutting device according to any one of claims 1 to 5, The support is formed of an elastic material. A cutting device characterized by:

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