Image display method, analysis system, and program

Abstract

To provide an image display method for enabling a user to accurately recognize the appearance of each sample on a base where multiple samples are fixed in an analysis system.SOLUTION: An analysis system 100 includes a base B having a plurality of areas. Each of the plurality of areas is an area for fixing a sample to be irradiated with the charged particle beam E. An image display method includes the steps of: acquiring an individual area image IM12 in which a part of the plurality of areas is imaged; generating an all-area image IM11 corresponding to the entire area of the base using each individual area image; and displaying an image including the all-area image as reference images IM1, IM2.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an image display method, an analysis system, and a program. [Background technology]

[0002] Various proposals have been made for analytical systems including X-ray analyzers. For example, Japanese Patent Laid-Open Publication No. 2002-310957 (Patent Document 1) describes an electron probe micro analyzer (EPMA) as an example of an X-ray analyzer. Patent Document 1 also describes a scanning electron microscope (SEM) equipped with an X-ray spectrometer as an example of an X-ray analyzer. Patent Document 1 also discloses a technology for obtaining various findings about a sample by detecting the secondary distribution of elements present on the surface of the sample using the X-ray analyzer. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2002-310957 Summary of the Invention [Problem to be solved by the invention]

[0004] In the analysis system, the user can roughly estimate which part of the sample will be the target part for analysis by observing the appearance of the sample surface.

[0005] The analytical system may use a base capable of fixing multiple samples. The base on which the multiple samples are fixed is placed on a stage in the analytical system. A user moves the stage to closely observe each portion of each of the multiple samples, including the estimated target portion. The user can determine the target portion in the sample through this detailed observation. In such an analytical system, if the user can accurately recognize the appearance of each of the multiple samples fixed on the base, this will help determine the target portion of each sample to be analyzed.

[0006] The present disclosure has been made to solve such problems, and its purpose is to provide an image display method in an analysis system that allows a user to accurately recognize the appearance of each sample on a base on which multiple samples are fixed. [Means for solving the problem]

[0007] A first aspect of the present invention relates to a method for displaying a reference image to be referenced for controlling the irradiation position of a charged particle beam in an analysis system. The analysis system includes a base having a plurality of regions, each of which is an area for fixing a sample to be irradiated with the charged particle beam. The image display method includes the steps of acquiring individual region images obtained by photographing a portion of the plurality of regions, generating a full-region image corresponding to the entire area of ​​the base using each individual region image, and displaying an image including the full-region image as a reference image.

[0008] A second aspect of the present invention relates to an analysis system comprising a base, a display, an irradiation unit, and a control unit. The base includes a plurality of regions. A sample is fixed to each of the plurality of regions. The irradiation unit irradiates the sample with a charged particle beam. The control unit displays a reference image on the display for controlling the irradiation position of the charged particle irradiation beam by the irradiation unit. The reference image includes a whole-region image corresponding to the entire area of ​​the base. The whole-region image is generated from individual region images obtained by photographing a portion of the plurality of regions.

[0009] A third aspect of the present invention relates to a program for displaying a reference image to be referenced for adjusting the irradiation position of a charged particle beam in an analysis system. The analysis system includes a base having a plurality of regions, each of which is an area for fixing a sample to be irradiated with the charged particle beam. When executed by a computer, the program causes the computer to perform the following steps: acquiring individual region images of some of the regions; generating a full-region image corresponding to the entire area of ​​the base using each individual region image of the regions; and displaying the full-region image in the reference image. [Effects of the Invention]

[0010] According to the present disclosure, individual area images are obtained by photographing some of the multiple areas included in the base, a whole area image is generated using each individual area image of the multiple areas, and an image including the whole area image is displayed as a reference image.

[0011] As a result, images including an image that allows the user to accurately recognize the appearance of each sample are displayed as reference images. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a schematic diagram showing a configuration of an analysis system 100 according to an embodiment of the present invention. [Figure 2] FIG. 2 illustrates an example of a hardware configuration of a computer. [Figure 3] FIG. 2 is a plan view illustrating a base region. [Figure 4] FIG. 10 is a diagram showing the base on which the sample is fixed as viewed from above. [Figure 5] FIG. 2 is a plan view of a base on which a sample is fixed. [Figure 6] 1A and 1B are diagrams illustrating an individual region image and a whole region image. [Figure 7] FIG. 10 is a diagram illustrating an example of a control image. [Figure 8]FIG. 10 is a diagram showing another example of a control image. [Figure 9] 10 is a flowchart illustrating a process related to display of a reference image. [Figure 10] FIG. 10 is a diagram illustrating a modified example of the embodiment. [Figure 11] 10 is a flowchart illustrating a process for correcting the positional relationship between an SEM image and a full-area image. DETAILED DESCRIPTION OF THE INVENTION

[0013] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are designated by the same reference numerals and description thereof will not be repeated.

[0014] [1. Analysis system configuration] 1 is a schematic diagram showing the configuration of an analysis system 100 according to an embodiment of the present invention. Analysis system 100 according to the present embodiment is configured to irradiate a sample with an electron beam and detect a signal generated from the sample to observe and analyze the sample. Analysis system 100 is, for example, an electron probe microanalyzer (EPMA).

[0015] Referring to FIG. 1, an analysis system 100 according to this embodiment includes a base B, a computer 1, an irradiation unit 5, a display 16, and an input unit 17.

[0016] The base B fixes one or more samples. The computer 1 controls the analysis system 100.

[0017] The irradiation unit 5 includes an electron gun 52, a deflection coil 53, an objective lens 54, an analysis stage 57, an analysis stage control unit 50, a plurality of spectrometers 60a, a deflection coil control unit 51, a secondary electron detector 55, and a backscattered electron detector 56. The electron gun 52, the deflection coil 53, the objective lens 54, the analysis stage 57, the spectrometers 60a, the secondary electron detector 55, and the backscattered electron detector 56 are provided in an irradiation chamber 59. During analysis of a sample by the irradiation unit 5, the inside of the irradiation chamber 59 is evacuated to a near-vacuum state.

[0018] The electron gun 52 is an excitation source that generates the electron beam E. The electron beam E corresponds to one example of a "charged particle beam." The electron beam E is irradiated onto an irradiation position of a sample fixed to a base B on the analysis stage 57. A converging lens (not shown) adjusts the beam of the electron beam E. The deflection coil 53 forms a magnetic field using a driving current supplied from the deflection coil control unit 51. The magnetic field formed by the deflection coil 53 deflects the electron beam E. The objective lens 54 is provided between the deflection coil 53 and the sample placed on the analysis stage 57. The objective lens 54 focuses the electron beam E that has passed through the deflection coil 53.

[0019] The analysis stage 57 is a stage for placing the base B on which the sample is fixed. The analysis stage 57 is configured to be movable within a horizontal plane by the analysis stage control unit 50. The position on the analysis stage 57 where the analysis of the sample fixed to the base B is performed is referred to as the analysis position 58.

[0020] In the irradiation unit 5, the irradiation position of the electron beam E on the base B can be scanned two-dimensionally by controlling the analysis stage 57 by the analysis stage control unit 50 and / or driving the deflection coil 53 by the deflection coil control unit 51. When the scanning range is relatively narrow, scanning is performed by the deflection coil 53. When the scanning range is relatively wide, scanning is performed by moving the analysis stage 57. Controlling the irradiation position of the charged particle beam in this analysis system 100 includes controlling the irradiation position on the base B by moving the analysis stage 57.

[0021] The spectroscope 60a is a device for detecting the detection signal of the characteristic X-rays emitted from the irradiation position of the sample. Although only one spectroscope 60a is shown in Fig. 1, in reality, a total of four spectroscopes are provided in the irradiation unit 5 so as to surround the sample. The configuration of each spectroscope is the same except for the analyzing crystal.

[0022] The spectrometer 60a includes an analyzing crystal 61a, an X-ray detector 63a, and a slit 64a. The irradiation position of the electron beam E on the base B, the analyzing crystal 61a, and the X-ray detector 63a are arranged on a Rowland circle (not shown). The analyzing crystal 61a is tilted while moving along a straight line 62a by a drive mechanism (not shown). The X-ray detector 63a is rotated as shown in the figure in response to the movement of the analyzing crystal 61a by a drive mechanism (not shown) so that the incident angle of the characteristic X-rays with respect to the analyzing crystal 61a and the exit angle of the diffracted X-rays satisfy the Bragg diffraction condition. This enables wavelength scanning of the characteristic X-rays emitted from the sample. The detection signal from the spectrometer 60a is sent to the computer 1. The configuration of the spectrometers (not shown) is the same as that of the spectrometer 60a except for the analyzing crystal, and therefore will not be described repeatedly. Note that the configuration of each spectrometer is not limited to the above configuration, and various conventionally known configurations can be adopted.

[0023] The secondary electron detector 55 detects a detection signal of the secondary electrons emitted from the irradiation position of the sample. The detection signal of the secondary electron detector 55 is sent to the computer 1.

[0024] The backscattered electron detector 56 detects a detection signal of the backscattered electrons emitted from the irradiation position of the sample. The detection signal of the backscattered electron detector 56 is sent to the computer 1.

[0025] The deflection coil control unit 51 controls the drive current supplied to the deflection coil 53 in accordance with instructions from the computer 1. The deflection coil control unit 51 controls the drive current in accordance with a predetermined drive current pattern (magnitude and change speed). This allows the irradiation position of the electron beam E on the sample to be scanned at a desired scan speed.

[0026] The computer 1 corresponds to one embodiment of the "control unit." The computer 1 is communicably connected to the irradiation unit 5. The computer 1 generates control signals for controlling the operation of each part of the irradiation unit 5 according to a built-in program and table. The computer 1 outputs the generated control signals to the irradiation unit 5.

[0027] Furthermore, the computer 1 generates an image of the irradiation position on the sample in response to scanning of the electron beam E at the irradiation position. Specifically, the computer 1 generates an SEM image, which is a secondary electron image of the irradiation position on the sample, based on a detection signal of the secondary electrons detected by the secondary electron detector 55. Furthermore, the computer 1 generates a backscattered electron image of the irradiation position on the sample based on a detection signal of the backscattered electrons detected by the backscattered electron detector 56.

[0028] The computer 1 further generates a distribution image (X-ray image) of the analysis target element at the irradiation position of the sample based on the detection signals of the characteristic X-rays detected by the four spectrometers. Furthermore, the computer 1 receives a wavelength scan of the X-rays at the irradiation position. The computer 1 generates an X-ray spectrum based on the wavelength scan of the received X-rays. The computer 1 performs qualitative analysis and / or quantitative analysis based on the X-ray spectrum.

[0029] The display 16 is configured to be able to communicate with the computer 1. The display 16 displays images related to the control of the irradiation unit 5 in response to commands from the computer 1. The display 16 also displays reference images that the user refers to in order to control the irradiation position of the charged particle beam in response to commands from the computer 1. The reference images include at least one of an X-ray image, an SEM image, and a backscattered electron image. The display 16 may also be configured to display processing information related to the analysis of backscattered electrons, secondary electrons, and characteristic X-rays. In such a configuration, for example, the display 16 displays an X-ray spectrum and the results of qualitative and quantitative analysis based thereon.

[0030] Therefore, the user can give various instructions to the computer 1 for controlling the irradiation unit 5 based on the display on the display 16. Furthermore, the user can use the computer 1 to analyze data detected by the irradiation unit 5 based on the display on the display 16. That is, the user can use the display on the display 16 to view, for example, numerical values ​​indicating the observation conditions, observed images (e.g., X-ray images, SEM images, backscattered electron images), and graphs showing the analysis results of the obtained characteristic X-rays, secondary electrons, and backscattered electrons.

[0031] The input unit 17 is connected to the computer 1 and is configured to be able to communicate with the computer 1. The input unit 17 is used to input user commands to the computer 1. The input unit 17 is a pointing device (hereinafter also referred to as a PD), a keyboard, a touch panel, etc. The pointing device is, for example, a mouse.

[0032] The analysis system 100 further includes an imaging device 2. The imaging device 2 includes an imaging unit 20, an xyz stage 24, an imaging stage 27, rails 23, a rail control unit 29, an xyz stage control unit 30, and a camera control unit 31.

[0033] The photographing unit 20 includes a camera 21, a frame 22, a mirror 25, and a light 26. The photographing unit 20 is used to photograph individual area images of the areas A1 to A9 of the base B.

[0034] The camera 21 includes a CCD (Charge Coupled Device) and an optical system. The camera 21 generates an individual area image that captures only a partial area of ​​the base B. In the example of FIG. 1, the camera 21 captures an image of the base B reflected by a mirror 25. The lower part of the camera 21 is fixed onto the xyz stage 24. The upper part of the camera 21 is fixed to the frame 22.

[0035] The frame 22 is a structure for supporting the camera 21, the mirror 25 and the light 26.

[0036] The mirror 25 is provided so that the image of the base B can be captured by the camera 21. The mirror 25 is fixed to the frame 22 at a predetermined angle and position so that the image of the base B is reflected to the camera 21.

[0037] The light 26 is a light source for illuminating the base B from above. The light 26 is, for example, a ring-shaped LED light.

[0038] The xyz stage 24 adjusts the position of the imaging unit 20 in the xyz directions relative to the base B. In particular, if a plane parallel to the base B is defined as the xy plane and a direction perpendicular to the base B is defined as the z direction, the xyz stage 24 can change the part on the base B to be imaged by moving the imaging unit 20 in the xy directions.

[0039] The imaging stage 27 includes an imaging position 28. The imaging position 28 is a position where the base B is placed when imaging the base B. The imaging stage 27 also supports the xyz stage 24 and a part of the rail 23.

[0040] The rail 23 constitutes a mechanism for moving the base B from the imaging stage 27 to the analysis stage 57. In the example of FIG. 1, the rail 23 connects the imaging position 28 and the analysis position 58. The base B, for which an individual region image has been captured at the imaging position 28, is transported along the rail 23 to the analysis position 58 by driving a motor (not shown). The mechanism of the rail 23 is not limited to the above example. For example, the rail 23 may include a unit that allows the base B to move in a direction other than a straight line, as necessary. Examples of movement other than a straight line include vertical movement and horizontal rotation. In the analysis system 100, the rail 23 also includes a unit that performs detailed position adjustment to accurately position the base B at the analysis position 58 on the analysis stage 57.

[0041] Rail control unit 29 controls the movement of base B from imaging stage 27 to analysis stage 57 on rails 23 in accordance with instructions from computer 1. By using a computer to control the movement on rails 23 from imaging position 28 to analysis position 58 in this way, accurate movement is performed automatically.

[0042] Furthermore, when base B is installed at shooting position 28 on shooting stage 27, rail control unit 29 detects the installation. Rail control unit 29 transmits a signal indicating the installation of base B to computer 1. Upon receiving this signal, computer 1 commands xyz stage control unit 30 and camera control unit 31 to start shooting base B.

[0043] The xyz stage control unit 30 controls the xyz stage 24 according to instructions from the computer 1. By using a computer to control the xyz stage in this way, it is possible to easily control the part of the base B that is photographed by the camera 21.

[0044] The camera control unit 31 controls the camera 21 to photograph the base B in accordance with instructions from the computer 1. By controlling the camera control unit 31 using a computer in this way, the camera control unit 31 can photograph a predetermined portion on the base B, for example, in conjunction with the position of the xyz stage 24. The camera control unit 31 also receives a signal of the individual area image photographed by the camera 21 and sends it to the computer 1. When the camera control unit 31 has finished photographing the base B, it sends a signal indicating that the photographing has been completed to the computer 1. Upon receiving this signal, the computer 1 instructs the rail control unit 29 to move the base B to the analysis position 58 on the analysis stage 57.

[0045] As described above, the analysis system 100 is configured to irradiate the sample surface with an electron beam and detect signals emitted from the sample surface. The detected signals include characteristic X-rays, backscattered electrons, and secondary electrons, each having an energy specific to an element contained on the sample surface. The analysis system 100 can identify and quantify the element present at the analysis position on the sample surface by analyzing the energy and intensity of the detected characteristic X-rays.

[0046] Furthermore, the analysis system 100 can observe the shape and composition of the sample surface using the detected secondary electrons and backscattered electrons. The user can search for the target portion to be analyzed on the sample surface while observing the SEM image or backscattered electron image of the irradiation position. Specifically, the user determines the target portion by observing the electron image and determining that the irradiation position contains the target portion to be analyzed. The user then performs qualitative and quantitative analysis of the target portion on the sample surface.

[0047] [2. Hardware configuration] Fig. 2 is a diagram showing an example of a hardware configuration of computer 1. Referring to Fig. 2, computer 1 includes a processor 10, a storage unit 11, an I / O (Input / Output) interface 13, a communication interface 15, a display 16, and an input unit 17.

[0048] The processor 10 controls the entire computer 1 and is realized by, for example, at least one CPU (Central Processing Unit).

[0049] The storage unit 11 includes a program storage area 110 and a data storage area 111. The computer 1 is configured to operate according to the program in the program storage area 110. The program storage area 110 stores an image display program for displaying a reference image. The data storage area 111 stores data of the reference image.

[0050] The storage unit 11 is realized by a storage device such as a ROM (Read Only Memory), a RAM (Random Access Memory), and an HDD (Hard Disk Drive). The ROM can store programs executed by the processor 10. The RAM can temporarily store data used during execution of a program by the processor 10, and can function as a temporary data memory used as a work area. The HDD is a non-volatile storage device. In addition to or instead of the HDD, a semiconductor storage device such as a flash memory may be used. The programs and / or data may be stored in an external storage device accessible by the processor 10.

[0051] The communication interface 15 is an interface for the computer 1 to communicate with external devices wirelessly or via a wire. The I / O interface 13 is an interface for input to or output from the computer 1. As shown in FIG. 2 , the I / O interface 13 is connected to the display 16, the input unit 17, the imaging device 2, and the irradiation unit 5.

[0052] The display 16 is realized by a display device. The input unit 17 is realized by an input device that accepts input from a user. The input unit 17 is, for example, a keyboard, a mouse, and / or a touch panel that is integrated with the display screen of the display 16.

[0053] Computer 1 does not have to be configured by a single computer, but may be configured by multiple computers. That is, the processing performed by computer 1 may be distributed and performed by multiple computers. For example, computer 1 may be configured by a control computer that controls irradiation unit 5 and imaging device 2, and an analysis computer that analyzes the X-ray detection signal detected by irradiation unit 5. In this case, the control computer and analysis computer may each be equipped with an input unit and a display.

[0054] [3. How to fix the sample] Fig. 3 is a plan view illustrating the regions of the base. Referring to Fig. 3, the base includes a plurality of regions. Each of the plurality of regions is a region for fixing a sample to be irradiated with the electron beam E. In the example of Fig. 3, the base B includes square regions A1 to A9. Each of the regions A1 to A9 is a square with one side measuring 33 mm.

[0055] Fig. 4 is a diagram showing the base on which samples are fixed, viewed from above. Referring to Fig. 4, the analysis system 100 includes holders H1 to H3, H5, H6, and H8. Holders H1 to H3, H5, H6, and H8 are fixed to regions A1 to A3, A5, and A8 of the base, respectively.

[0056] In the example of FIG. 4, the base B includes holders H1 to H3, H5, H6, and H8, each of which has a variety of shapes and sizes. The type of holder to use is determined by the user, for example, based on the shape and size of the sample to be fixed. For example, samples S11 to S14, each of which has a size equal to or less than one-quarter of the area A1, are fixed to holder H1, which can fix four samples. On the other hand, sample S6, which has a size equal to or more than one-half of the area A6, is fixed to holder H6, which can fix one sample. By using the appropriate type of sample stage in this way, multiple samples can be fixed to the base without wasting space. Furthermore, the height of the sample surface of each holder can be made approximately uniform.

[0057] The sample is fixed to the holder either directly or after being fixed with a fixing material made of a predetermined material. The fixing material is, for example, metal or resin. The holder fixes one or more samples. For example, in holder H1, sample S13 is fixed directly to holder H1. Meanwhile, samples S11, S12, and S14 are fixed on a metal fixing material. Furthermore, sample S5 is fixed by being embedded in resin R5. In this way, by using a fixing material, the vertical height of the sample surface relative to base B can be configured to be approximately uniform within the holder. Holder H3 and holder H7 are holders configured with multiple standard samples embedded therein.

[0058] 5 is a plan view of the base on which the sample is fixed. Referring to FIG. 5, each holder is attached vertically to the base B. This makes the sample surface approximately horizontal to the base B.

[0059] [4. Comparison with conventional analysis systems] In conventional analysis systems, by using an appropriate type of holder for each sample, it is possible to fix multiple samples to the base at once. Therefore, multiple types of samples can be analyzed in a single analysis in the irradiation unit 5. This has the following advantages over analyzing the same type of sample multiple times in a single analysis. For example, the user can avoid the trouble of removing the base from the irradiation chamber 59 and replacing the sample each time a sample is analyzed. In addition, the process of evacuating the irradiation chamber 59 for analysis only needs to be performed once. Furthermore, the user can observe and analyze multiple types of samples while comparing them.

[0060] On the other hand, fixing multiple samples to the base at once makes it difficult to recognize the position of each sample in the base and the target portion estimated from the appearance of each sample during analysis.

[0061] To recognize the location and target area of ​​each sample in the base, one possible approach would be to simultaneously capture the entire base area with an optical camera and display the image on a display. However, as shown in Figures 4 and 5, many different types of samples with different appearances can be placed on the base. In addition, the mounting materials and holders surrounding the samples vary, and this peripheral information also affects the sample's visibility. Because samples differ in appearance and how the peripheral information affects their visibility, the optimal contrast and brightness for capturing optical images of each sample also differ. Therefore, capturing the entire base area with an optical camera simultaneously may result in images with optimal contrast and brightness for some samples, but images with inappropriate contrast and brightness for other samples. In other words, this method may not provide sufficient information for the user to recognize the location and target area of ​​some samples.

[0062] Additionally, because a relatively wide area, the entire base area, is photographed at once, there was concern that the closer to the periphery of the image, the greater the distortion. Similarly, because a relatively wide area, the entire base area, is photographed at once, there was concern that the resolution of each sample and its surroundings would be low. These concerns could also make it difficult for users to properly recognize the location and target area of ​​each sample.

[0063] Therefore, the analysis system 100 according to this embodiment provides an image display method that allows a user to accurately recognize the appearance of each sample on a base on which multiple samples are fixed, thereby enabling the user to properly recognize the position and target portion of each sample.

[0064] [5. Generation of Individual Region Images and Whole Region Images] FIG. 6 is a diagram illustrating an individual area image and a whole area image. An individual area image refers to an image that includes images corresponding to one or more of the multiple areas on the base B, but does not include images corresponding to all of the areas. A whole area image refers to an image that includes images corresponding to all of the multiple areas on the base B. The photographing device 2 acquires, as individual area images, individual area images obtained by photographing each of the multiple areas (areas A1 to A9) on the base B. FIG. 6 illustrates an example of an individual area image IM12 obtained by photographing area A1. The photographing device 2 can change the photographing conditions for each of areas A1 to A9. With this configuration, the photographing device 2 acquires individual area images with optimal contrast and brightness for each individual area.

[0065] Furthermore, the computer 1 generates a full-area image corresponding to the entire area of ​​the base using the individual area images of each of these multiple areas. Therefore, in the example of FIG. 6, the full-area image corresponds to image IM11 of the entire area of ​​base B, which is formed by stitching together the individual area images of areas A1 to A9. In the full-area image generated in this manner, each area has optimal contrast and brightness. Additionally, distortion on the outside of the full-area image is reduced compared to when an image of the entire area of ​​base B is captured all at once. Furthermore, the resolution is higher compared to when an image of the entire area of ​​base B is captured all at once. Therefore, sufficient information is obtained in each of the individual area images and the full-area image to allow the user to recognize the position and target portion of the sample.

[0066] In the example of FIG. 6, the region on the base B satisfies the following preferable conditions, for example. Each of the regions A1 to A9 has a rectangular shape. With this configuration, it is easy to acquire the individual region images as rectangles. Therefore, for example, it is easier to join the individual region images to generate the whole region image compared to when the individual region images are not rectangular. When the individual region images are not rectangular, for example, the individual region images are circular. Also, when the shape of the individual region images is irregular, for example.

[0067] The areas A1 to A9 have a common size. This configuration makes it easy to acquire individual area images of a common size. Therefore, there is no need to change the shooting range of the camera 21 when shooting. It is also easy to join the individual area images together to generate an entire area image.

[0068] Each of the areas A1 to A9 is a square measuring 33 mm on each side. Generally, the sample fixed to the holder is 1 inch (25.4 mm) or less, so with this configuration, most samples can be accommodated within each area.

[0069] Each of the regions A1 to A9 is configured to a size that includes one holder. As described above, specimens are fixed in various types of holders depending on their characteristics. This configuration allows the contrast and brightness to be adjusted according to each holder, even if the shape, hue, saturation, and brightness of each holder differ. This also reduces the possibility that the holder or specimen will be divided into multiple individual region images.

[0070] Furthermore, the individual area images may be configured to correspond to a range wider than each of the areas A1 to A9. In the example of Fig. 6, an individual area image IM120 corresponding to a range wider than area A1 is illustrated for area A1. With this configuration, even a large sample (e.g., a diameter of 40 mm) can be included in a single individual area image.

[0071] Furthermore, when the individual region images are configured to correspond to a range wider than the region in this manner, the whole region image is generated by cutting out the overlapping portions of the individual region images and splicing them together. In the example of Figure 6, image IM12 is cut out from image IM120 to generate the whole region image. With this configuration, compared to when the individual region images are configured to correspond to the same range as the region, even if the camera position is slightly shifted when capturing each individual region image and the edge of the region cannot be captured, it is possible to correct this by using the individual region image that overlaps the edge.

[0072] Furthermore, the individual region image is not limited to an image of one of the regions A1 to A9. It may be an image of only some of the regions A1 to A9 (for example, only the regions A1 and A2) rather than all of the regions A1 to A9. For example, if the specimen and holder in adjacent regions are similar and the optimal contrast and brightness are similar, images of the adjacent regions may be captured together to form an individual region image. Even with this configuration, the influence of possible distortion of the specimen in the individual region image is less than when the entire base B is captured at once.

[0073] In the example of FIG. 1, the imaging device 2 and the irradiation unit 5 do not need to be connected by rails 23. In other words, even if the imaging device 2 and the irradiation unit 5 are not connected by rails 23, the user may manually move the base B from the imaging position 28 of the imaging device 2 to the analysis position 58 of the irradiation unit 5. Even with this configuration, if the imaging position 28 and the analysis position 58 are set precisely, there will be almost no positional deviation due to manual movement. Furthermore, even if a deviation does occur, it can be eliminated by performing the "correction of the entire area image using an SEM image" described below.

[0074] In the example of FIG. 1, the analysis system 100 includes an imaging device 2 including a camera 21 as a device separate from the irradiation unit 5, but is not limited to this, and any configuration may be used as long as the camera can acquire individual area images of the base and the computer can generate an image of the entire area. For example, a configuration in which a device equivalent to the imaging device is integrated with the irradiation unit may be used. One example of a configuration in which a device equivalent to the imaging device is integrated with the irradiation unit is a configuration in which the camera is attached inside the irradiation chamber of the irradiation unit. Another example is a configuration in which the camera is attached to the side of the irradiation chamber.

[0075] Therefore, a configuration in which the imaging device is a device separate from the irradiation unit, as shown in Figure 1, can be easily realized even when using an existing analysis system that does not include an imaging device. In this case, analysis system 100 is realized by adding a device equivalent to the imaging device and a computer including an environment necessary for processing related to the display of individual area images and full area images to the existing analysis system.

[0076] On the other hand, when a configuration in which a device equivalent to an imaging device is integrated with an irradiation unit is realized in an analysis system that does not include an existing imaging device, additional processes are required inside and outside the irradiation chamber. For example, in a configuration in which a camera is installed inside the irradiation chamber, a process of incorporating the camera into the irradiation chamber is required. Also, in a configuration in which a camera is installed on the side of the irradiation chamber, a process of glazed part of the wall of the irradiation chamber and installing the camera there is required.

[0077] Furthermore, an image with a deep depth of field can be obtained by adjusting the aperture of the lens included in the optical system of the camera 21. This makes it easier to obtain a function (trace mapping image) that corrects for slight differences in height, including steps and grooves in the sample.

[0078] [6. User Interface] Fig. 7 is a diagram showing an example of a control image. Referring to Fig. 7, the control image IM1 includes a whole area image IM11, an individual area image IM12, an X-ray image IM13, buttons BT1 to BT4, a frame E1, symbols E2 to E3, and a pointer P. The control image as shown in Fig. 7 is used to issue user instructions regarding control of the irradiation unit 5. Control of the irradiation unit 5 includes control of the irradiation position.

[0079] In the control image IM1, the frame E1 is an example of an element that indicates (the center of) the irradiation position. Symbols E2 and E3 are other examples of elements that indicate (the center of) the irradiation position. The pointer P is a pointer controlled by the input unit 17 (for example, a mouse).

[0080] Buttons BT1 to BT4 are examples of means by which the user controls the irradiation unit 5. In the example of FIG. 7, buttons BT1, BT2, BT3, and BT4 are used to operate the height, stigma, focus, and magnification of the analysis stage 57, respectively. The means by which the user controls the irradiation unit 5 is not limited to this, and may be, for example, a slide bar. As another example, a mode in which numerical values ​​are directly input using a keyboard may be used.

[0081] The whole area image IM11, the individual area image IM12, and the X-ray image IM13 are referenced to control the irradiation position of the charged particle beam. The control image IM1 including the whole area image IM11, the individual area image IM12, and the X-ray image IM13 corresponds to an example of a "reference image."

[0082] The whole area image IM11 includes a frame E1. The frame E1 is an image used to select an area including a sample to be analyzed from the areas included in the base B. In other words, the irradiation position is moved into the area selected by the frame E1.

[0083] The individual region image IM12 is an individual region image of the region selected by the frame E1 in the whole region image IM11. The individual region image IM12 includes a symbol E2. The symbol E2 is an image used to select a target portion to be analyzed in the sample from the region included in the individual region image IM12. The symbol E2 indicates the center of the irradiation position. In other words, the position selected by the symbol E2 is designated as the irradiation position.

[0084] The X-ray image IM13 is an X-ray image at the irradiation position selected by the symbol E2 in the individual region image IM12. The symbol E3 indicates the center of the irradiation position. Therefore, the center of the symbol E3 coincides with the center of the symbol E2.

[0085] The flow of how a user controls the irradiation position and determines the target position will be described with reference to control image IM1. First, the user selects a region containing the sample to be analyzed using frame E1 based on whole-region image IM11. Next, the user selects a portion of the sample to be analyzed that is estimated to be the target portion using symbol E2 based on individual-region image IM12. Furthermore, if the user determines based on the X-ray image that the irradiation position indicated by the X-ray image is appropriate as the target portion, the user determines that irradiation position is the target portion and performs X-ray analysis.

[0086] FIG. 8 shows another example of a control image. Control image IM2 corresponds to another example of a "reference image." In FIG. 8, an SEM image IM23 is displayed instead of the X-ray image IM13 in FIG. 7. In EPMA, an SEM image generally provides a wider image than an X-ray image. Therefore, after selecting the region to be analyzed in the whole-area image IM11 and selecting the portion estimated to be the target portion in the individual-area image IM12, the user may first observe the SEM image IM23. In this case, if the user determines that the target portion is included in the SEM image IM23, the user switches to the X-ray image IM13. If the user determines based on the X-ray image that the irradiation position is appropriate as the target portion, the user determines the irradiation position as the target portion and performs X-ray analysis.

[0087] [7. Processing flow in the analysis system] 9 is a flowchart illustrating a process for displaying a reference image. The process in FIG. 9 is performed by the processor 10 of the computer 1 executing a predetermined program.

[0088] 9, in step ST02, the processor 10 of the computer 1 detects that the base B has been placed at the photographing position 28 of the photographing stage 27. The base's placement at the photographing position 28 can be detected, for example, by providing a weight sensor (not shown) directly below the photographing position 28 as part of the rail 23. When the weight sensor detects a predetermined weight, the weight sensor transmits a signal indicating the detection to the computer 1. In step ST04, the processor 10 sets the count value N of the counter to 1. The counter is a variable used to execute the process of FIG. 9. This counter counts the order in which individual region images are captured by the photographing device 2. In step ST06, the processor 10 moves the camera 21 to a position for capturing the Nth region. Note that the order in which the regions of the base are captured is set in advance in the computer 1 by the user. In one implementation example, the set order may specify all nine regions, such as regions A1 to A9, in order from smallest to largest numbered order. In another implementation example, the set order may specify only the region to which the sample is fixed. For example, as shown in Figure 4, if samples are fixed to only six of the nine regions on base B (regions A1, A2, A3, A5, A6, and A8), the order to be set may specify only six of the nine regions, such as regions A1, A2, A3, A5, A6, and A8.

[0089] In step ST08, the processor 10 adjusts the settings of the camera 21 to optimize conditions for capturing the Nth region. For example, the processor 10 adjusts the contrast and brightness of the camera 21 to optimize conditions for capturing the Nth region. In step ST10, the processor 10 captures an individual region image of the Nth region using the camera 21. In step ST12, the processor 10 corrects the individual region image as needed. For example, the processor 10 may readjust the contrast and brightness as needed. Furthermore, if an area wider than the Nth region is captured as an individual region image, the processor 10 performs correction by cutting out an image of only the Nth region from the individual region image. In step ST14, the processor 10 saves the individual region image. In step ST16, the processor 10 determines whether the count value N of the counter is equal to the number of regions to be captured. In other words, the processor 10 determines whether capturing all of the regions to be captured has been completed. For example, when the areas to be photographed are A1 to A9, processor 10 determines whether or not N = 9. If the count value N of the counter is smaller than the number of areas to be photographed (NO in step ST16), processor 10 adds 1 to the count value of the counter in step ST18, and returns the process to step ST06.

[0090] If the count value N of the counter reaches the number of areas to be photographed (YES in step ST16), the processor 10 generates a whole-area image corresponding to the entire area of ​​the base B using the individual-area image in step ST20. In step ST22, the processor 10 commands the rail control unit 29 to transport the base B from the photographing device 2 to the analysis stage 57. In step ST24, the processor 10 detects that it has received a signal from the rail control unit 29 indicating that the base B has arrived at the analysis position 58 on the analysis stage 57. In step ST26, the processor 10 displays a control image on the display 16. The control image includes a reference image. The reference image includes a whole-area image and an individual-area image. In step ST28, the processor 10 performs analysis in accordance with input from the user based on the control image. In step ST30, the processor 10 receives an instruction from the user to end the analysis. In step ST32, the processor 10 saves the analysis results. In step ST34, the processor 10 creates a report on the analysis results and ends the process.

[0091] Before analysis, it is not necessary to capture an individual area image of the entire sample area. Previously acquired individual area images of the same sample area may be reused. For example, individual area images of the area containing the holders holding the standard sample (holders H3 and H7 in FIG. 5) and the holders holding samples used in long-term analysis are suitable for reuse. In this case, the position of the area in the previously acquired individual area image may be changed. For example, in the analysis of base B, where a holder holding a standard sample is included in area A3, an individual area image of the holder holding the standard sample previously placed in area A1 may be used as a new individual area image of area A3. In other words, in the analysis system 100, individual area images do not necessarily need to be captured every time an analysis is performed; as long as they are appropriately acquired, they are sufficient. This configuration allows the imaging device 2 to capture only the areas that need to be captured to generate a full-area image, thereby reducing the time required to capture base B.

[0092] Furthermore, in photographing the individual region images, the configuration in which the photographing unit 20 moves relative to the base B has been shown, but the present invention is not limited to this. For example, the photographing unit 20 may be fixed and the base B may move.

[0093] Furthermore, the process of making each individual region image more easily visible to the user may be performed after capturing the entire region. For example, after step ST16 and before step ST18, the contrast and brightness of each individual region image may be adjusted by processing each individual region image.

[0094] The individual area images and full area images displayed in the control image may use appropriately compressed thumbnails when displayed on the display 16. When including the full area images and individual area images in the report of step ST36, images with more detail and less compression than those used in the control image may be used.

[0095] As described above, in the analysis system 100, the control image of the irradiation position includes an image of the base B captured under appropriate imaging conditions for each region. As a result, the user can accurately recognize the appearance of each sample in the base B.

[0096] [8. Correction of whole image] At the analysis position 58, a discrepancy may occur between the actual position of the base B and the position of the base B displayed as a full-area image. This is because, for example, when the base B is transported from the imaging position 28 to the analysis position 58, an impact causes a discrepancy in the position of the base B, which in turn causes a discrepancy between the actual position of the base B and the position of the base B recognized by the processor 10.

[0097] Since EPMA observes and analyzes minute areas, the impact of even a slight positional deviation is significant. Therefore, after base B arrives at analysis position 58 in step ST24 of Figure 9, processor 10 may correct the whole-area image using the SEM image. Correction of the whole-area image may be achieved by changing the range of cutting out the individual-area images used to generate the whole-area image.

[0098] 10 is a diagram for explaining the correction of the entire region image, which shows, from above, an image IM121, an SEM image IM23, and an image IM122.

[0099] Image IM121 shows a portion of the individual region image displayed in control image IM2. Processor 10 displays symbol E21 in image IM121, just as processor 10 displays symbol E2 in individual region image IM12 in Fig. 8. That is, processor 10 displays symbol E21 in the individual region image at a position corresponding to the center of the irradiation position in base B recognized by processor 10. Symbol E22 will be described later together with an explanation of SEM image IM23.

[0100] SEM image IM23 is an example of an SEM image displayed together with individual region image IM12 in control image IM2 (FIG. 8). SEM image IM23 includes symbol E3 representing the irradiation position. Processor 10 displays symbol E3 to indicate the center of the irradiation position.

[0101] If there is a discrepancy between the actual position of base B and the position of base B recognized by processor 10, there will be a discrepancy between the position on base B corresponding to symbol E21 and the position on base B corresponding to symbol E3.

[0102] By pattern matching between image IM121 and SEM image IM23, processor 10 identifies the position indicated by symbol E22 in image IM121 as the position corresponding to symbol E3. That is, the position indicated by symbol E22 in image IM121 corresponds to the same position on base B as the position indicated by symbol E3 in SEM image IM23.

[0103] The processor 10 then specifies N pixels as the amount of deviation between the symbol E22 and the symbol E21.

[0104] Then, processor 10 generates the whole-area image again to generate a “corrected whole-area image.” The positions cut out as individual region images for generating the corrected whole-area image are changed by N pixels from the positions cut out when the whole-area image before correction was generated.

[0105] 11 is a flowchart of a process for correcting a full-area image. In one implementation example, the process of FIG. 11 is performed by the processor 10 of the computer 1 executing a predetermined program.

[0106] 11 , in step ST252, the processor 10 of the computer 1 calculates the number of misaligned pixels by using the result of pattern matching between the SEM image and a portion of the individual region image. The calculation of the number of misaligned pixels in step ST252 follows, for example, the manner described for specifying the amount of misalignment with reference to FIG. 10 . In step ST254, the processor 10 corrects the entire region image by the calculated number of misaligned pixels. In one implementation example, in step ST254, the processor 10 corrects the entire image region by changing the cropping position of each individual region image by N pixels to generate a new entire image region, as described with reference to FIG. 10 .

[0107] As described above with reference to Fig. 11, the position of the whole area image relative to the SEM image is corrected. As a result, the positional relationship between the SEM image and the whole area image (or each individual area image included in the whole area image) is corrected.

[0108] Furthermore, in the above example, the cutout position of the individual region image used to generate the whole region image is corrected using a single point in the SEM image, assuming that the base B shifts in only one direction without rotating during transport. However, this is not limiting. If the base B rotates in a plane parallel to the analysis stage 57 during transport, the above correction may be performed to match two or more points. In this case, the processor 10 can identify not only the linear distance, as described with reference to FIG. 10, but also the rotation angle as the deviation identified from the pattern matching results. This allows the processor 10 to change not only the linear distance but also the rotation angle when cutting out the individual region image to generate the corrected whole image region.

[0109] With this configuration, even if the position of base B is shifted due to rotation on a plane parallel to analysis stage 57 during transport of base B, the shift can be eliminated in the corrected whole image area. Therefore, in analysis system 100, the user can perform accurate analysis by referring to the whole area image and individual area images.

[0110] [Aspect] It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0111] (Item 1) An image display method according to one aspect is a method for displaying a reference image that is used to control an irradiation position of a charged particle beam in an analysis system, the method comprising: The analytical system includes a base having a plurality of regions; each of the plurality of regions is a region for fixing a sample to be irradiated with a charged particle beam; acquiring individual area images by capturing images of some of the plurality of areas; generating a full-area image corresponding to the entire area of ​​the base using each of the individual area images; The method may further comprise the step of displaying an image including the full-area image as the reference image.

[0112] According to the method for displaying a reference image described in paragraph 1, individual area images are acquired by photographing some of the areas included in the base, a whole-area image is generated using each of the individual area images of the areas, and an image including the whole-area image is displayed as a reference image. As a result, an image including an image that allows a user to accurately recognize the appearance of each sample is displayed as a reference image.

[0113] (Item 2) In the image display method described in item 1, the step of acquiring the individual area images may include photographing each of the plurality of areas.

[0114] According to the method for displaying a reference image described in paragraph 2, by photographing each of a plurality of regions, it is possible to obtain individual region images with contrast and brightness suitable for each region.

[0115] (Item 3) In the image display method described in Item 1 or 2, the analysis system includes an irradiation chamber that irradiates the charged particle beam, the step of acquiring the individual area image includes capturing the individual area image outside the irradiation chamber; The method may further include a step of transporting the base on which the individual region images have been taken into the irradiation chamber.

[0116] According to the method for displaying a reference image described in paragraph 3, if an imaging device is included as a device outside the irradiation chamber, even in an analysis system that does not include an existing imaging device, by connecting the imaging device and including in the computer the environment necessary for processing related to the display of individual area images and entire area images, processing related to the display of individual area images and entire area images can be performed.

[0117] (4) In the image display method according to any one of the above (3), the analysis system includes a rail connecting the outside of the irradiation chamber with the inside of the irradiation chamber, The transporting step may include transporting the base along the rail.

[0118] According to the method for displaying a reference image described in item 4, accurate movement can be performed automatically by using a computer to control the movement on the rail from the outside to the inside of the irradiation chamber.

[0119] (Item 5) In the image display method according to any one of Items 1 to 4, the analysis system further comprises a holder; The sample is fixed to the holder; the holder is fixed to a region of the base; The area of ​​the base may be configured to be sized to include one of the holders.

[0120] According to the method for displaying a reference image described in paragraph 5, by photographing each area including one holder to which a sample is fixed, it is possible to obtain individual area images with contrast and brightness appropriate for each holder.

[0121] (Item 6) In the image display method described in any one of Items 1 to 5, each of the plurality of regions may have a rectangular shape.

[0122] According to the method for displaying a reference image described in paragraph 6, it is easy to acquire individual region images as rectangles. Therefore, it is easy to join individual region images to generate a whole region image, for example, compared to when the individual region images are not rectangular. When the individual region images are not rectangular, for example, the individual region images are circular. Also, when the shape of the individual region images is irregular, for example.

[0123] (Item 7) In the image display method described in any one of Items 1 to 6, the plurality of regions may have a common size.

[0124] According to the method for displaying a reference image described in paragraph 7, if configured in this manner, it is easy to acquire individual area images at a common size. Therefore, there is no need to change the camera's shooting range when taking a photo. It is also easy to join individual area images together to generate a whole area image.

[0125] (Item 8) In the image display method described in item 7, the area of ​​the base may be configured to be 33 mm square.

[0126] According to the method of displaying a reference image described in Section 8, since samples typically fixed to a holder are 1 inch (25.4 mm) or less, this configuration allows most samples to be accommodated within each area.

[0127] (Item 9) In the image display method described in any one of Items 1 to 8, the individual area image may correspond to a range wider than each of the plurality of areas.

[0128] According to the method for displaying a reference image described in paragraph 9, even a large sample (e.g., 40 mm in diameter) can be included in a single individual area image. Furthermore, when stitching together individual area images, even if some of the individual area images have cut-off edges, the cut-off edges can be corrected by using the individual area images that overlap the cut-off edges.

[0129] (Item 10) In the image display method described in any one of Items 1 to 9, the analysis system detecting a detection signal of X-rays generated from the sample in response to irradiation with the charged particle beam; generating an X-ray image based on the detection signal; An image including the X-ray image may be displayed as the reference image.

[0130] According to the method for displaying a reference image described in paragraph 10, the reference image can be displayed and used in an analysis system that generates an X-ray image. The analysis system that generates an X-ray image is, for example, an EPMA.

[0131] (Item 11) In the image display method described in any one of Items 1 to 10, the analysis system detecting a detection signal of secondary electrons generated from the sample in response to irradiation with the charged particle beam; generating a secondary electron image based on the detection signal; An image including the secondary electron image may be displayed as the reference image.

[0132] According to the method for displaying a reference image described in paragraph 11, the reference image can be displayed and used in an analysis system that generates an SEM image, which is a secondary electron image. The analysis system that generates an SEM image is, for example, a scanning electron microscope or an EPMA.

[0133] (Item 12) The image display method described in any one of items 1 to 11 may further include a step of correcting the positional relationship between the secondary electron image of the base and the individual area image or the entire area image by utilizing the results of pattern matching between the secondary electron image of the base and the individual area image or the entire area image.

[0134] According to the method of displaying a reference image described in paragraph 12, even if a deviation occurs between the actual position of the base in the irradiation unit and the position of the base displayed as a full-area image, the deviation can be corrected.

[0135] (Item 13) In the image display method described in any one of Items 1 to 12, the step of displaying the entire area image may include displaying an element (E1) indicating the irradiation position together with the entire area image.

[0136] According to the method of displaying a reference image described in paragraph 13, the user can set the irradiation position by referring to the full-area image.

[0137] (Item 14) In the image display method described in any one of Items 1 to 13, the step of displaying the individual area image may include displaying an element indicating the irradiation position together with the individual area image.

[0138] According to the method for displaying a reference image described in paragraph 14, the user can set the irradiation position by referring to the individual area image.

[0139] (Item 15) An analysis system according to one aspect includes a base, the base includes a plurality of regions; a sample is fixed to each of the plurality of regions; The display and an irradiation unit that irradiates the sample with a charged particle beam; a control unit that displays a reference image on the display for controlling the irradiation position of the charged particle irradiation beam by the irradiation unit, the reference image includes a full-area image corresponding to the entire area of ​​the base; The whole area image may include individual area images obtained by capturing images of some of the plurality of areas.

[0140] According to the analysis system described in paragraph 15, an entire area image including individual area images obtained by photographing some of the areas included in the base is generated. Then, an image including the entire area image is displayed as a reference image. This allows the user to accurately recognize the appearance of each sample and displays the image as a reference image.

[0141] (Item 16) A program according to one aspect is a program for displaying a reference image to be referred to in order to adjust an irradiation position of a charged particle beam in an analysis system, the program comprising: The analytical system includes a base having a plurality of regions; each of the plurality of regions is a region for fixing a sample to be irradiated with a charged particle beam; When executed by a computer, the program causes the computer to: acquiring individual area images by capturing images of some of the plurality of areas; generating a full-area image corresponding to the entire area of ​​the base using each of the individual area images; and displaying the full-area image on the reference image.

[0142] According to the program described in paragraph 16, individual area images are acquired by photographing some of the areas included in the base, a whole area image is generated using each individual area image, and an image including the whole area image is displayed as a reference image, thereby displaying an image including an image that allows a user to accurately recognize the appearance of each sample as the reference image.

[0143] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not by the above description, and is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0144] 1 computer, 2 imaging device, 5 irradiation unit, 10 processor, 11 memory unit, 13 interface, 15 communication interface, 16 display, 17 input unit, 20 imaging unit, 21 camera, 22 frame, 23 rail, 24 xyz stage, 25 mirror, 26 light, 27 imaging stage, 28 imaging position, 29 rail control unit, 30 stage control unit, 31 camera control unit, 50 analysis stage control unit, 51 deflection coil control unit, 52 electron gun, 53 deflection coil, 54 objective lens, 55 secondary electron detector, 56 backscattered electron detector, 57 analysis stage, 58 analysis position, 60a spectrometer, 61a analyzing crystal, 62a straight line, 63a X Line detector, 64a slit, 100 analysis system, 110 program storage area, 111 data storage area.

Claims

1. 1. A method for displaying a reference image to be referenced for controlling an irradiation position of a charged particle beam in an analysis system, comprising: The analytical system includes a base having a plurality of regions; each of the plurality of regions is a region for fixing a sample to be irradiated with a charged particle beam; acquiring individual area images by capturing images of some of the plurality of areas; generating a full-area image corresponding to the entire area of ​​the base using each of the individual area images; and displaying an image including the full-area image as the reference image.

2. The image display method according to claim 1 , wherein the step of acquiring the individual area images includes photographing each of the plurality of areas.

3. the analysis system includes an irradiation chamber that irradiates the charged particle beam; the step of acquiring the individual area image includes capturing the individual area image outside the irradiation chamber; The image display method according to claim 1 or 2, further comprising the step of transporting the base on which the individual area images have been taken into the irradiation chamber.

4. the analysis system includes a rail connecting the outside of the irradiation chamber to the inside of the irradiation chamber; The image display method according to claim 3 , wherein the transporting step includes transporting the base along the rail.

5. The analysis system further comprises a holder; The sample is fixed to the holder; the holder is fixed to a region of the base; 5. The image display method according to claim 1, wherein the area of ​​the base is configured to have a size that includes one of the holders.

6. 6. The image display method according to claim 1, wherein each of the plurality of regions has a rectangular shape.

7. 7. The image display method according to claim 1, wherein the plurality of regions have a common size.

8. The image display method according to claim 7 , wherein the base region is configured to be 33 mm square.

9. 9. The image display method according to claim 1, wherein the individual area image corresponds to a range wider than each of the plurality of areas.

10. The analysis system comprises: detecting a detection signal of X-rays generated from the sample in response to irradiation with the charged particle beam; generating an X-ray image based on the detection signal; 10. The image display method according to claim 1, wherein an image including the X-ray image is displayed as the reference image.

11. The analysis system comprises: detecting a detection signal of secondary electrons generated from the sample in response to irradiation with the charged particle beam; generating a secondary electron image based on the detection signal; 11. The image display method according to claim 1, wherein an image including the secondary electron image is displayed as the reference image.

12. The image display method according to claim 11, further comprising a step of correcting the positional relationship between the secondary electron image and the individual area image or the full area image by using a result of pattern matching between the secondary electron image of the base and the individual area image or the full area image.

13. 13. The image display method according to claim 1, wherein the step of displaying the entire area image includes displaying an element indicating the irradiation position together with the entire area image.

14. 14. The image display method according to claim 1, wherein the step of displaying the individual region image includes displaying an element indicating the irradiation position together with the individual region image.

15. Equipped with a base, the base includes a plurality of regions; a sample is fixed to each of the plurality of regions; The display and an irradiation unit that irradiates the sample with a charged particle beam; a control unit that displays a reference image on the display for controlling the irradiation position of the charged particle irradiation beam by the irradiation unit, the reference image includes a full-area image corresponding to the entire area of ​​the base; An analysis system, wherein the entire area image is an image generated using individual area images each capturing a portion of the plurality of areas.

16. A program for displaying a reference image to be referred to in order to adjust an irradiation position of a charged particle beam in an analysis system, The analytical system includes a base having a plurality of regions; each of the plurality of regions is a region for fixing a sample to be irradiated with a charged particle beam; When executed by a computer, the program causes the computer to: acquiring individual area images by capturing images of some of the plurality of areas; generating a full-area image corresponding to the entire area of ​​the base using each of the individual area images; and displaying the full-area image in the reference image.

Images