Apparatus, system, and method for measuring edge ring distance in a thermal processing chamber

Abstract

To provide a device for measuring an edge ring distance of a heat treatment chamber in which the distance measured is used for determining a shift of a center position of an edge ring, and to provide a system, and a method.SOLUTION: A heat treatment chamber system 200 contains a plurality of distance sensors 160 that are attached to a circumference of an edge ring 114. The distance sensor is attached to a plurality of angle positions with respect to the edge ring, discharges a signal 171 toward an external surface 162 of the edge ring at the same time, measures a first distance D1 and a second distance D2 between the external surface of the edge ring and each distance sensor at the same time at a plurality of angle positions 201 and 202 of the edge ring corresponding to the plurality of angle positions of the distance sensor, and determines a shift of a center position 210 of the edge ring. The determination of the shift of the center position contains averaging of a plurality of distance values in each of the first distance D1 and the second distance D2 over a whole rotation at one or a plurality of times of the edge ring.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] Field Aspects of the present disclosure relate to an apparatus, system, and method for measuring edge ring distance in a thermal processing chamber, in one embodiment, the measured distance is used to determine a shift in the center position of the edge ring. [Background technology]

[0002] During rapid thermal annealing of a substrate, edge-supporting components undergo thermal expansion and contraction, which can cause changes in the position of such components. Such changes in the position of components can cause non-uniformities in the temperature of the substrate, which can lead to non-uniformities in the material on the substrate during thermal processing.

[0003]

[0003] Therefore, there is a need for an apparatus, system, and method that promotes temperature uniformity and material uniformity during heat treatment in a manner that promotes accuracy, efficiency, and time savings. Summary of the Invention

[0004] Aspects of the present disclosure relate to an apparatus, system, and method for measuring edge ring distance in a thermal processing chamber, in one embodiment, the measured distance is used to determine a shift in the center position of the edge ring.

[0005] In one implementation, a thermal processing chamber apparatus includes a chamber body including one or more sidewalls and a processing volume. The thermal processing chamber apparatus also includes a rotor disposed within the processing volume of the chamber body. The thermal processing chamber apparatus also includes an edge ring supported on the rotor. The edge ring includes an inner surface and an outer surface. The thermal processing chamber apparatus also includes a plurality of heat lamps positioned above the edge ring and above the rotor. The thermal processing chamber apparatus also includes one or more distance sensors attached to one or more sidewalls of the chamber body. Each distance sensor is oriented toward the outer surface of the edge ring to measure the distance between the outer surface of the edge ring and the respective distance sensor.

[0006] In one embodiment, a non-transitory computer-readable medium includes instructions that, when executed, cause a thermal processing chamber system to heat a first substrate disposed on an edge ring within a processing volume of a chamber body to a first temperature using a plurality of heat lamps. The instructions also cause the thermal processing chamber system to cool the first substrate to a second temperature lower than the first temperature and measure a distance between a distance sensor and an outer surface of the edge ring. The instructions also cause the thermal processing chamber system to determine a shift in a center position of the edge ring using the distance and to determine a corrective landing position using the shift in center position. The instructions also cause the thermal processing chamber system to direct a robot to align a second substrate to the corrective landing position.

[0007] In one embodiment, a non-transitory computer-readable medium includes instructions that, when executed, cause a thermal processing chamber system to heat a first substrate disposed on an edge ring within a processing volume of a chamber body to a first temperature using a plurality of heat lamps. The instructions also cause the thermal processing chamber system to cool the first substrate to a second temperature lower than the first temperature and rotate the edge ring using a rotor. The edge ring is supported on the rotor. The instructions also cause the thermal processing chamber system to measure a distance between a distance sensor and an outer surface of the edge ring while the edge ring rotates. The instructions also cause the thermal processing chamber system to determine a shift in a center position of the edge ring using the distance and to determine a corrective landing position using the shift in center position. [Brief explanation of the drawings]

[0008]

[0008] In order that the above features of the present disclosure may be understood in detail, a specific description of the present disclosure briefly summarized above will be obtained by reference to implementations, some of which are illustrated in the accompanying drawings. However, since the present disclosure may admit of other equally effective implementations, it should be noted that the accompanying drawings only illustrate general implementations of the present disclosure and therefore should not be considered to limit the scope of the present disclosure.

[0009] [Figure 1A] 1 is a schematic partial cross-sectional view of a thermal processing chamber according to one implementation. [Figure 1B]

[0010] 1B is an enlarged, partial schematic cross-sectional view of the thermal processing chamber shown in FIG. 1A according to one implementation. [Figure 2]

[0011] 1 is a schematic partial top view of a thermal processing chamber system according to one implementation. [Figure 3]

[0012] 1 is a schematic partial top view of a thermal processing chamber system according to one implementation. [Figure 4]

[0013] FIG. 2 is a schematic partial side view of a robotic device used in conjunction with the thermal processing chamber shown in FIGS. 1A and 1B, according to one implementation. [Figure 5]

[0014] FIG. 1 is a schematic diagram of a method of operating a thermal processing chamber, according to one implementation. [Figure 6]

[0015] 1 is a schematic partial top view of a thermal processing chamber system according to one implementation. [Figure 7]

[0016] 1 is a schematic partial top view of a thermal processing chamber system according to one implementation.

[0010]

[0017] To facilitate understanding, the same reference numerals have been used whenever possible to designate identical elements common to the figures, and it is contemplated that elements disclosed in one implementation may be beneficially utilized in other implementations without specific recitation. DETAILED DESCRIPTION OF THE INVENTION

[0011]

[0018] Aspects of the present disclosure relate to an apparatus, system, and method for measuring edge ring distance in a thermal processing chamber, in one embodiment, the measured distance is used to determine a shift in the center position of the edge ring.

[0012]

[0019] 1A is a schematic partial cross-sectional view of a thermal processing chamber 100 according to one implementation. The thermal processing chamber 100 is a rapid thermal processing chamber. The thermal processing chamber 100 is part of a thermal processing chamber system 110.

[0013]

[0020] A substrate 112 to be processed in the thermal processing chamber 100 is provided into a processing volume 118 of the thermal processing chamber 100 through a valve (such as a slit valve) or access port 113. The substrate 112 is supported around its periphery by an annular edge ring 114. The edge ring 114 has an annular sloped shelf 115 that contacts the edge of the substrate 112. The substrate 112 is oriented so that processed features 116 already formed on the top surface of the substrate 112 face upward toward a radiant heating device 124.

[0014]

[0021] The thermal processing chamber 100 includes a chamber body 102 and a processing volume 118 disposed within the chamber body 102. The chamber body 102 includes one or more sidewalls 103. The processing volume 118 is defined at its upper side by a transparent quartz window 120. Although shown in a schematic diagram, the features 116 on the substrate 112 typically do not protrude a substantial distance beyond the surface of the substrate 112, but rather constitute a pattern in and near the plane of the surface of the substrate 112.

[0015]

[0022] The thermal processing chamber 100 processes the substrate 112, for example, by using rapid thermal annealing, to oxidize the substrate and / or to activate species (such as dopants) implanted on the substrate 112.

[0016]

[0023] The three lift pins 122 are raised and lowered to engage and support the bottom surface (e.g., backside surface) of the substrate 112 as the substrate 112 is handled between substrate transfer devices, such as a robot. This disclosure contemplates that the robot device 400 described in connection with FIG. 4 may be used. The robot blade and / or robot arm of the robot extend through a valve or access port 113 to provide the substrate 112 into the thermal processing chamber 100 and onto the edge ring 114. To heat the substrate 112 within the processing volume 118, a radiant heating device 124 is positioned above the window 120 to direct radiant energy toward the substrate 112. In the thermal processing chamber 100, the radiant heating device includes a plurality of heat lamps 126 positioned in respective reflective tubes 127 arranged in a hexagonal close-packed array above the window 120. The heat lamps 126 include high-intensity tungsten-halogen lamps. The heat lamps 126 are positioned above the edge ring 114.

[0017]

[0024] The array of heat lamps 126 may be referred to as a lamp head. However, other radiant heating devices may be substituted to provide radiant heat energy to the thermal processing chamber 100. The heat lamps 126 include resistive heating to rapidly increase the temperature of a radiant source to raise the temperature of the process volume 118 and the substrate 112. The heat lamps 126 may include incandescent and tungsten-halogen incandescent lamps, which have a glass or silica envelope surrounding a filament, and flash bulbs, which include a glass or silica envelope surrounding a gas, such as xenon. The heat lamps 126 may also include arc lamps, which include a glass, ceramic, or silica envelope surrounding a gas or vapor. Such lamps provide radiant heat when the gas is activated. The term lamp, as used herein, is intended to include lamps having an envelope surrounding a heat source. The "heat source" of a lamp refers to a material or element capable of raising the temperature of a substrate, such as a filament or gas that can be activated. Additionally or alternatively, it is contemplated that a laser source may be utilized to increase the temperature of the substrate 112 .

[0018]

[0025] As provided herein, rapid thermal processing (RTP) refers to a process capable of uniformly heating a substrate at a rate of about 10° C. per second or greater, e.g., from about 10° C. per second to about 250° C. per second. The ramp-down (cooling) rate in an RTP chamber ranges from about 80° C. per second to about 150° C. per second. Aspects of the present disclosure may also be applied to flash annealing, e.g., annealing a substrate in less than 5 seconds, e.g., less than 1 second, or multiple milliseconds.

[0019]

[0026] A passive method for improving heating efficiency includes a reflector 128 that extends parallel to the substrate 112, over a larger area than the substrate 112, and faces the bottom surface of the substrate 112. The reflector 128 efficiently reflects thermal radiation emitted from the substrate 112 back to the substrate 112. The spacing between the substrate 112 and the reflector 128 can be within a range of about 3 mm to about 9 mm, and the aspect ratio of the cavity width to thickness is greater than about 20 mm. One embodiment, which can be combined with other embodiments, includes a reflector to increase the apparent emissivity of the substrate 112. The reflector 128, which can have a gold coating or a multilayer dielectric interference mirror, effectively forms a blackbody cavity on the back surface of the substrate 112, which functions to distribute heat from warmer to cooler portions of the substrate 112. The blackbody cavity is filled with a radiation distribution, typically represented as a Planckian distribution, corresponding to the temperature of the substrate 112, while the radiation from the heat lamps 126 has a distribution corresponding to much higher temperatures associated with the heat lamps 126.

[0020]

[0027] The chamber body 102 includes an upper wall 121 and a lower wall 153. The reflector 128 is disposed on a water-cooled base formed in the lower wall 153, which is made of a material, such as metal, selected for its ability to dissipate excess radiation from the substrate 112, such as during cooling. The upper wall 121 includes a quartz window 120, and the lower wall 153 is substantially parallel to the upper wall 121. The lower wall 153 may be made of a highly opaque material, such as metal.

[0021]

[0028] The edge ring 114 is disposed on and supported by the support cylinder 131 and is movable relative to the support cylinder 131 and rotor 130 upon thermal expansion and / or contraction of the edge ring 114. The edge ring 114 can also be moved using the support cylinder 131 and rotor 130. The support cylinder 131 may include a thermally insulating material. The support cylinder 131 may be supported by, coupled to, or formed as part of the rotor 130. The rotor 130 and support cylinder 131 are rotatable. The rotor 130 is cylindrical. The rotor 130 is magnetically levitated within the chamber body 102. The rotor 130 is magnetically coupled to a drive ring 132 positioned outside one or more sidewalls 103 of the chamber body 102. Gravity and a lower shoulder extending downward from the lower surface 166 of the edge ring 114 (shown in FIG. 1B ) facilitate retention of the edge ring 114 on the support cylinder 131 and rotor 130.

[0022]

[0029] In one embodiment, which can be combined with other embodiments, the drive ring 132 is a rotatable flange and is magnetically coupled to the rotor 130 such that the rotor 130 rotates with the rotation of the drive ring 132. In such an embodiment, a motor rotates the drive ring 132 to rotate the rotor 130. In one embodiment, which can be combined with other embodiments, the drive ring 132 is fixed relative to the chamber body 102 and includes electrical coils that, when powered, generate magnetic forces to magnetically rotate and / or levitate the rotor 130. As the rotor 130 rotates, the edge ring 114 and the substrate 112 supported on the edge ring 114 rotate about a central axis 134 of the substrate 112. In the illustrated implementation, the central axis 134 is aligned with the central axis of the edge ring 114.

[0023]

[0030] The heat lamps 126 may be divided into heating zones arranged in a generally ring-like configuration around a central axis 134. A control circuit varies the voltage delivered to the heat lamps 126 in the different zones, thereby adjusting the radial distribution of radiant energy. One or more pyrometers 140 are coupled through one or more light pipes 142 positioned opposite the bottom surface of the substrate 112 through apertures in the reflector 128. The one or more pyrometers 140 measure the temperature across the radius of the stationary or rotating substrate 112. The light pipes 142 may be formed from a variety of structures, including sapphire, metal, and silica fiber. The pyrometers 140 are positioned below the edge ring 114, which is positioned between the pyrometers 140 and the plurality of heat lamps 126.

[0024]

[0031] In one embodiment, which can be combined with other embodiments, a film of reflective coating 150 can be disposed on the side of window 120 facing heat lamp 126. In one embodiment, which can be combined with other embodiments, reflective coating 151 is disposed on the side of window 120 facing substrate 112. In the implementation shown in FIG. 1 , reflective coatings 150 and 151 are disposed on opposite sides of window 120. Reflective coatings 150 and 151 facilitate blocking radiation within the bandwidth of the pyrometer from propagating through reflective coatings 150 and 151 to facilitate accurate measurements by pyrometer 140.

[0025]

[0032] The thermal processing chamber system 110 includes one or more distance sensors 160 mounted on one or more side walls 103 between the top wall 121 and the bottom wall 153. The one or more distance sensors 160 are oriented horizontally (e.g., radially inward) toward the edge ring 114.

[0026]

[0033] FIG. 1B is an enlarged, partial schematic cross-sectional view of the thermal processing chamber 100 shown in FIG. 1A according to one implementation. The edge ring 114 includes an inner surface 161, a concave inner surface 165 formed in the inner surface 161, an outer surface 162 facing one or more sidewalls 103, an upper surface 163, a concave upper surface 164 formed in the upper surface 163, and a lower surface 166. One or more distance sensors 160 attached to the one or more sidewalls 103 are directed toward the outer surface 162 of the edge ring 114 to measure a distance D1 between the outer surface 162 and each distance sensor 160. In one embodiment that can be combined with other embodiments, the distance D1 is a horizontal distance. Each distance sensor 160 includes a signal emitter 168 and a signal receiver 169. In one embodiment that can be combined with other embodiments, each distance sensor 160 includes an on-board controller 170, such as an on-board processor. The signal emitter 168 is directed to emit one or more signals 171 toward the outer surface 162 of the edge ring 114 at a signal velocity. The signal receiver 169 is configured to recognize and receive the one or more signals 171 reflected from the outer surface 162 and returning toward the respective distance sensor 160 as one or more reflected signals. The on-board controller 170 determines the distance D1 using the reflected signals, the activation time, and the signal velocity. In one embodiment that can be combined with other embodiments, the distance sensor 160 includes a laser distance sensor 160 in which the signal emitter 168 is a laser emitter and the signal receiver 169 is a laser receiver, such as an optical lens. In such an embodiment, the signal 171 includes laser light. In one example that can be combined with other embodiments, the laser light includes a beam having a beam diameter of 0.5 mm or greater, e.g., 1.0 mm or greater. In one example that can be combined with other embodiments, the laser light includes visible light. In one embodiment, which can be combined with other examples, the laser light includes a wavelength in the range of 400 nm to 700 nm, for example in the range of 640 nm to 670 nm.

[0027]

[0034] The one or more side walls 103 include one or more window portions 167 (e.g., one or more viewports). The one or more distance sensors 160 are mounted adjacent to the window portions 167 of the one or more side walls 103. The one or more distance sensors 160 emit a signal 171 through the respective window portions 167 of the respective side walls 103. The window portions 167 are transparent to the signal 171 such that the signal 171 propagates through the window portions 167. The window portions 167 may comprise quartz. The present disclosure contemplates that the respective window portions 167 may form part of or the entirety of the respective side walls 103. Each of the one or more side walls 103 includes an inner surface 172 and an outer surface 173. The one or more distance sensors 160 are mounted on the outer surface 173 of the respective side walls 103.

[0028]

[0035] Referring to FIG. 1A, the thermal treatment chamber system 110 includes a controller 180 that controls aspects of the thermal treatment chamber 100 during thermal processing. The controller 180 includes a processor 181, such as a central processing unit (CPU), a memory 182, and support circuits 183 for the processor 181. The controller 180 can be any form of general-purpose computer that can be used in an industrial environment to control various chamber components and subprocessors. The memory 182 stores software (source or object code), such as a computer program, that can be executed or invoked to control the overall operation of the thermal treatment chamber 100 in the manner described herein. The controller 180 operates the operation of each of the controllable components within the thermal treatment chamber 100. For example, the controller 180 communicates with and controls the operation of the pyrometer 140, one or more distance sensors 160, the plurality of heat lamps 126, the drive ring 132 (or the motor that drives the drive ring 132), and the lift pins 122. The controller 180 communicates with and controls a robot used to extend through the valves or access ports 113 to transfer the substrates 112 into and out of the processing volume 118 .

[0029]

[0036] The controller 180 receives the output of the pyrometer 140 and accordingly controls the voltage supplied to the different rings of the heat lamps 126, thereby dynamically controlling the radiation heating intensity and pattern during thermal processing. The pyrometry can be improved by further including a radiometer or reflectometer to optically probe the substrate 112, measuring the emissivity or reflectivity of the portion of the substrate 112 facing the pyrometer within the relevant wavelength range, and controlling an algorithm in the controller 180 to include the measured emissivity.

[0030]

[0037] The controller 180 includes a non-transitory computer-readable medium (e.g., memory 182) that includes instructions (e.g., software) that, when executed (e.g., by the processor 181), cause one or more of the operations described herein to be performed. In one embodiment that can be combined with other embodiments, the instructions in the non-transitory computer-readable medium of the controller 180, when executed, cause one or more operations of the method 500 to be performed. In one embodiment that can be combined with other embodiments, the instructions cause one or more of operations 501, 503, 505, 507, 509, 511, 513, 515, and / or 517 to be performed in connection with the thermal processing chamber 100 and its aspects and components.

[0031]

[0038] FIG. 2 illustrates a schematic partial top view of a thermal processing chamber system 200 according to one implementation. The thermal processing chamber system 200 may include one or more aspects, features, components, and / or characteristics of the thermal processing chamber system 110 described above. The thermal processing chamber system 200 includes multiple distance sensors 160 (two shown) mounted around the edge ring 114. The distance sensors 160 are mounted at multiple angular positions relative to the edge ring 114. The distance sensors 160 are angularly spaced approximately 90 degrees apart. In one implementation, which can be combined with other implementations, the multiple distance sensors 160 are angularly spaced at least 45 degrees apart relative to the edge ring 114. In the implementation illustrated in FIG. 2, the edge ring 114 may or may not rotate relative to the distance sensors 160. The multiple distance sensors 160 simultaneously emit signals 171 toward the outer surface 162 of the edge ring 114. The distance sensor 160 simultaneously measures a first distance D1 and a second distance D2 between the outer surface 162 of the edge ring 114 and each distance sensor 160 at multiple angular positions 201, 202 of the edge ring 114 corresponding to multiple angular positions of the distance sensor 160.

[0032]

[0039] The first distance D1 and the second distance D2 measured by the distance sensor 160 are used to determine a shift in the center position at the center position 210 of the edge ring 114. In one embodiment that can be combined with other embodiments, a difference between the measured first distance D1 and the measured second distance D2 is used to determine the shift in the center position. In one embodiment that can be combined with other embodiments, a phase difference between the measured first distance D1 and the measured second distance D2 is used to determine the shift in the center position. In one embodiment that can be combined with other embodiments, the first distance D1 and the second distance D2 are measured over one or more full rotations of the edge ring 114, and multiple distance values ​​are measured for each of the first distance D1 and the second distance D2. Determining the shift in the center position includes averaging the multiple distance values ​​for each of the first distance D1 and the second distance D2 over one or more full rotations of the edge ring 114.

[0033]

[0040] FIG. 3 shows a schematic partial top view of a thermal processing chamber system 300 according to one implementation. The thermal processing chamber system 300 may include one or more aspects, features, components, and / or characteristics of the thermal processing chamber system 110 described above. The thermal processing chamber system 300 includes a single distance sensor 160 attached to each sidewall 103 and oriented toward an outer surface 162 of the edge ring 114. The edge ring 114 and the substrate 112 are rotated in a rotational direction RD1 using the rotor 130. While the edge ring 114 and the substrate 112 rotate, the single distance sensor 160 emits a signal 171 to measure a distance D1. In one embodiment, which can be combined with other embodiments, the single distance sensor 160 measures the distance D1 along multiple angular positions 301a-301h of the edge ring 114, such as the distance over at least a 180-degree rotation of the edge ring 114, such as the distance over at least a 360-degree rotation of the edge ring 114. By measuring distance D1 along multiple angular positions 301 a-301 h, multiple distance values ​​corresponding to angular positions 301 a-301 h are obtained using a single distance sensor 160. In one embodiment, which can be combined with other embodiments, the single distance sensor 160 measures multiple distance values ​​along the entire circumference of the outer surface 162 of the edge ring 114.

[0034]

[0041] The distance value measured by the single distance sensor 160 is used to determine a shift in the center position at the center position 310 of the edge ring 114. In one embodiment, which can be combined with other embodiments, multiple distance values ​​are measured over a rotation angle, resulting in an oscillation of the measured distance values. The shift in the center position is determined using the maximum amplitude of the oscillation and the phase of the oscillation with respect to the rotation angle.

[0035]

[0042] 4 shows a schematic partial side view of a robotic device 400 for use with the thermal processing chamber 100 shown in FIGS. 1A and 1B, according to one implementation. The robotic device 400 includes a robot blade 401 and a robot arm 402 coupled to the robot blade 401. A second substrate 412 is supported on and transported using the robot blade 401. The robot blade 401 and the robot arm 402 extend through a valve or access port 113 to transfer the second substrate 412 into the processing volume 118. The robotic device 400 is instructed to horizontally align the second substrate 412 with a corrected landing position 410 determined using a center position shift in the center position of the edge ring 114. The center position shift of the edge ring 114 is determined using one or more distances measured by one or more distance sensors 160 during processing of the substrate 112. The second substrate 412 includes a top surface 413 and a bottom surface 414. In one embodiment, which can be combined with other embodiments, the robotic device 400 is instructed to horizontally align the center 415 of the bottom surface 414 with the corrected landing position 410.

[0036]

[0043] After the second substrate 412 is aligned with the corrective landing position 410, the lift pins 122 are raised to lift the second substrate 412 off the robot blade 401. The robot blade 401 includes one or more openings, and the lift pins 122 move through the openings to engage the bottom surface 414 and lift the second substrate 412. The robot blade 401 and robot arm 402 move from below the second substrate 412 through a valve or access port 113 (shown in FIG. 1 ) and out of the processing volume 118 (shown in FIG. 1 ). While supported on the lift pins 122 and in the raised position, the second substrate 412 is preheated and thermally stabilized using heat lamps 126. During preheating, the center 415 of the second substrate 412 is aligned with the corrective landing position 410 for the edge ring 114. The lift pins 122 are lowered to land the second substrate 412 on the concave upper surface 164 of the edge ring 114. The concave upper surface 164 may include the annular sloped shelf 115 described in connection with FIG. 1A. While supported on the edge ring 114 in the lowered position, the second substrate 412 is annealed using the heat lamps 126. During annealing, the center 415 of the second substrate 412 is aligned with the correct landing position 410 of the edge ring 114.

[0037]

[0044] 5 shows a schematic illustration of a method 500 of operating a thermal treatment chamber, according to one implementation. The present disclosure contemplates that one or more aspects, features, components, and / or properties of the method may be combined and / or used in conjunction with one or more aspects, features, components, and / or properties of the thermal treatment chamber system 110, the thermal treatment chamber 100, the thermal treatment chamber system 200, the thermal treatment chamber system 300, and / or the robotic device 400 described in connection with FIGS. 1A, 1B, 2, 3, and 4 above.

[0038]

[0045] In operation 501, the method 500 includes heating a first substrate disposed on an edge ring in a chamber body. The first substrate is supported on the edge ring. The edge ring and the first substrate are disposed within a processing volume of the chamber body. The first substrate is heated to a first temperature using a plurality of heat lamps. The heating in operation 501 includes heating the first substrate to the first temperature. In one embodiment, which can be combined with other embodiments, heating the first substrate to the first temperature includes annealing the first substrate to a peak annealing temperature. In one example, the peak annealing temperature is greater than 900°C, e.g., in the range of 1000°C to 1100°C. The heating in operation 501 includes preheating the first substrate to a preheat temperature and thermally stabilizing the first substrate to a stabilization temperature before annealing the first substrate to the peak annealing temperature. In one example, the preheat temperature is in the range of 180°C to 220°C, e.g., 200°C. In one embodiment, the stabilization temperature is in the range of 480° C. to 520° C., for example, 500° C. In one embodiment, the first substrate is raised above the edge ring on lift pins during preheating and stabilization, and the first substrate is lowered to the edge ring supported on the edge ring while the first substrate is heated to the first temperature. The first substrate is loaded onto the lift pins in the chamber body using a robot.

[0039]

[0046] In one embodiment, which can be combined with other embodiments, the first substrate is heated to the first temperature at a heating rate of 10° C. per second or more, for example, 50° C. per second or more, or 75° C. per second or more. In one embodiment, which can be combined with other embodiments, the first substrate is heated to the first temperature at a heating rate in the range of 10° C. per second to 250° C. per second.

[0040]

[0047] In operation 503, the first substrate is cooled to a second temperature lower than the first temperature. The second temperature is selected to facilitate removal of the first substrate from the processing volume of the chamber body of the thermal processing chamber using a robot. In one embodiment, which can be combined with other embodiments, the second temperature is in the range of 380°C to 420°C, for example, 400°C.

[0041]

[0048] In optional operation 505, the edge ring is rotated using a rotor, the edge ring being supported on the rotor, and the edge ring and a first substrate disposed on the edge ring are rotated during one or more of heating the substrate to a first temperature (in operation 501) and / or cooling the first substrate to a second temperature (in operation 505).

[0042]

[0049] In operation 507, a robot is used to remove a first substrate from the processing volume and chamber body of the thermal treatment chamber. The removal includes raising lift pins to lift the first substrate from the edge ring, moving the robot blade under the first substrate, lowering the lift pins to land the first substrate on the robot blade, and moving the robot blade out of the processing volume and chamber body of the thermal treatment chamber. The present disclosure contemplates that distances can be measured (in operation 509) and a shift in center position can be determined (in operation 511) after and / or during removal of the first substrate from the processing volume. In one embodiment, which can be combined with other embodiments, the edge ring is rotated during lifting of the first substrate from the edge ring, and the distance is measured while the edge ring is rotated during removal of the first substrate. In one embodiment, which can be combined with other embodiments, the edge ring is rotated during removal of the first substrate from the processing volume, and the distance is measured while the edge ring is rotated after removal of the first substrate.

[0043]

[0050] In operation 509, a distance between one or more distance sensors and an outer surface of the edge ring is measured. The one or more distance sensors are used to measure the distance. The one or more distance sensors can measure the distance before or after heating in operation 501, during heating in operation 501, before or after cooling in operation 503, and / or during cooling in operation 503. In one embodiment that can be combined with other embodiments, the one or more distance sensors measure the distance after heating the first substrate to a first temperature (in operation 501) and cooling the first substrate to a second temperature (in operation 503). In one embodiment that can be combined with other embodiments, the distance is measured after heating in operation 501, after cooling in operation 503, and after or during removal of the first substrate as described in connection with operation 507.

[0044]

[0051] In one embodiment, which can be combined with other embodiments, the distance is measured before loading the second substrate into the chamber body using the robot.

[0045]

[0052] In one embodiment that can be combined with other embodiments, one or more distance sensors measure distance (in operation 505) while the edge ring rotates. In one embodiment that can be combined with other embodiments, the one or more distance sensors measure distance along multiple angular positions of the edge ring, e.g., distance over at least 180 degrees of rotation of the edge ring, e.g., at least 360 degrees of rotation of the edge ring. In one embodiment that can be combined with other embodiments, a single distance sensor is used to measure distance while the edge ring rotates, and the single distance sensor measures distance along at least 180 degrees of rotation of the edge ring, e.g., distance along at least 360 degrees of rotation of the edge ring.

[0046]

[0053] In one embodiment, which can be combined with other embodiments, the distance is measured after heating in operation 501, after cooling in operation 503, and when the robot enters the thermal treatment chamber to land the second substrate on the edge ring as described in connection with operation 515. In such an embodiment, the distance is measured after the first substrate is removed in operation 507. In such an embodiment, the distance is measured while the second substrate is supported on the robot blade before the second substrate is transferred from the robot blade to the lift pins and before the lift pins land the second substrate on the edge ring. Aspects of such an embodiment facilitate accurate positioning of the second substrate relative to the edge ring when the edge ring is not horizontally translatable.

[0047]

[0054] In one embodiment, which can be combined with other embodiments, the distance is measured after the second substrate is transferred from the robot blade to the lift pins and / or while the lift pins are lowered to land the second substrate on the edge ring. In such an embodiment, the distance is measured while the second substrate is supported on the lift pins and before the second substrate lands on the edge ring.

[0048]

[0055] In one embodiment, which can be combined with other embodiments, the one or more distance sensors include a plurality of distance sensors positioned around the edge ring at a plurality of angular positions relative to the edge ring, the plurality of distance sensors simultaneously measuring distances between an outer surface of the edge ring and each of the distance sensors at a plurality of angular positions of the edge ring corresponding to the plurality of angular positions of the distance sensors.

[0049]

[0056] Measuring distance along multiple angular positions using one or more distance sensors provides multiple distance values ​​corresponding to the angular positions.

[0050]

[0057] Measuring distance using each of the one or more distance sensors in OPERATION 509 includes emitting one or more signals from the respective distance sensors toward the outer surface of the edge ring. Measuring using each distance sensor includes receiving, at the respective distance sensor, one or more reflected signals reflected from the outer surface of the edge ring and determining a distance between the outer surface of the edge ring and the respective distance sensor using the one or more reflected signals. In one embodiment that can be combined with other embodiments, the distance is determined using a signal velocity and an operating time. In one example that can be combined with other embodiments, the signal velocity is the rate at which the one or more signals are emitted, and the operating time is the measured time it takes for the one or more emitted signals to reach the outer surface, be reflected by the outer surface, and be received by the respective distance sensor. In one example that can be combined with other embodiments, the operating time is the elapsed time between emitting one or more signals from the respective distance sensor and receiving one or more reflected signals at the respective distance sensor.

[0051]

[0058] In one embodiment that can be combined with other embodiments, each of the one or more distance sensors includes a laser emitter, and the one or more signals each emitted by a respective distance sensor include laser light emitted by the laser emitter. In one embodiment that can be combined with other embodiments, the one or more reflected signals include reflected laser light, and the signal rate is the laser light rate.

[0052]

[0059] The signal rate and operation time are used to calculate and measure the distance between each distance sensor and the outer surface of the edge ring. This disclosure contemplates that the distance may be calculated by a controller and / or processor on board each respective distance sensor, and the distance may be calculated by a controller and / or processor with which each distance sensor is in communication.

[0053]

[0060] In operation 511, a shift in the center position of the edge ring is determined using the distance between each distance sensor and the outer surface of the edge ring. The shift in the center position is related to a shift in the geometric center of the edge ring in a horizontal plane. The shift in the center position is determined using a controller in communication with the one or more distance sensors. In one embodiment that can be combined with other embodiments, the shift in the center position of the edge ring includes a first horizontal shift along the X-axis and a second horizontal shift along the Y-axis. The X-axis and Y-axis extend along a horizontal plane that extends through the edge ring. Also in operation 511, a corrective landing position of the robot is determined using the determined shift in the center position. In one embodiment that can be combined with other embodiments, the corrective landing position of the robot includes a first horizontal corrective position along the X-axis and a second horizontal corrective position along the Y-axis.

[0054]

[0061] In operation 513, the robot is commanded to align the second substrate to the corrected landing position determined in operation 511. The robot may be commanded using the same controller that determines the shift in the center position of the edge ring and / or the corrected landing position of the robot. In one embodiment that can be combined with other embodiments, the center of the bottom surface of the second substrate is aligned to within an offset of 0.1 mm or less relative to the corrected landing position. In such an embodiment, the center of the bottom surface of the second substrate is aligned to a distance of 0.1 mm or less from the corrected landing position. The robot aligns the second substrate to the corrected landing position. In one embodiment that can be combined with other embodiments, the robot aligns the second substrate to the corrected landing position, and the lift pins rise to lift the second substrate off the robot blade of the robot while the second substrate is aligned to the corrected landing position. In one embodiment that can be combined with other embodiments, in operation 513, a landing location for the robot corresponding to the corrected landing position determined in operation 511 is specified. In one embodiment, which can be combined with other embodiments, in operation 513, a landing location for the robot is preselected, and the corrected landing position determined in operation 511 is used to correct the landing location to a corrected landing location corresponding to the corrected landing location.

[0055]

[0062] This disclosure contemplates that in operation 513, in embodiments where the edge ring is translatable in one or more horizontal directions, the robot and / or edge may be commanded to move or align the second substrate to a correct landing position. In one embodiment, which can be combined with other embodiments, the edge ring is translatable in one or more horizontal directions and one or more vertical directions using a support cylinder and rotor that supports the edge ring. The rotor is magnetically levitated and moves magnetically.

[0056]

[0063] In operation 515, a second substrate is landed on the edge ring. The second substrate is supported on lift pins while aligned to the correct landing position, and the lift pins are lowered until a bottom surface of the second substrate engages the edge ring, landing the second substrate on the edge ring. The second substrate is supported on the edge ring and aligned to the correct landing position.

[0057]

[0064] In operation 517, the second substrate is heated to a first temperature such that it is annealed to a peak annealing temperature. The second substrate is aligned to the correct landing position of the edge ring while the second substrate is heated in operation 517. The heating in operation 517 includes one or more of the aspects, features, components, and / or properties described in connection with the heating of the first substrate in operation 501.

[0058]

[0065] FIG. 6 shows a schematic partial top view of a thermal processing chamber system 600 according to one implementation. Two distance sensors 611, 612 are angularly spaced 90 degrees apart around an edge ring 614. A predetermined position 615 of the edge ring 614 is shown. After thermal processing, the edge ring 614 shifts from the predetermined position 615 to a shifted position 616. The predetermined position 615 of the edge ring 614 corresponds to the geometric center of a rotor (such as rotor 130) used to support and rotate the edge ring 614. During annealing of the substrate, the edge ring 614 moves relative to the rotor, and the center position of the edge ring 614 shifts from the predetermined position 615 to the shifted position 616.

[0059]

[0066] The first distance sensor 611 is aligned along the X-axis and measures a first horizontal distance HD1 between the first distance sensor 611 and the outer surface of the edge ring 614 after the edge ring is shifted to a shifted position 616. The first horizontal shift HS1 along the X-axis is determined by subtracting a predetermined first horizontal distance PH1 from the first horizontal distance HD1. The predetermined first horizontal distance PH1 is the measured horizontal distance between the first distance sensor 611 and the outer surface of the edge ring 614 while the edge ring is in a predetermined position 615.

[0060]

[0067] The second distance sensor 612 is aligned along the Y-axis and measures a second horizontal distance HD2 between the second distance sensor 612 and the outer surface of the edge ring 614 after the edge ring is shifted to the shifted position 616. The second horizontal shift HS2 along the Y-axis is determined by subtracting the second horizontal distance HD2 from the predetermined second horizontal distance PH2. The predetermined second horizontal distance PH2 is the measured horizontal distance between the second distance sensor 612 and the outer surface of the edge ring 614 while the edge ring 614 is in the predetermined position 615.

[0061]

[0068] A corrective landing position of the robot associated with a shift in the center position of the edge ring 614 is determined using a first horizontal shift HS1 and a second horizontal shift HS2. The first horizontal corrective position along the X axis is determined by adding the first horizontal shift HS1 to a first predetermined landing position PL1 of the robot along the X axis that was used when the edge ring 614 was in the predetermined position 615. The second horizontal corrective position along the Y axis is determined by adding the second horizontal shift HS2 to a second predetermined landing position PL2 of the robot along the Y axis that was used when the edge ring 614 was in the predetermined position 615. The robot is used to adjust the landing position of a substrate to be subsequently processed to the corrective landing position, which includes the first horizontal corrective position and the second horizontal corrective position.

[0062]

[0069] 7 shows a schematic partial top view of a thermal processing chamber system 700 according to one implementation. The thermal processing chamber system 700 is similar to the thermal processing chamber system 600 shown in FIG. 6 and includes one or more of its aspects. Four distance sensors 611, 612 and 711, 712 are angularly spaced 90 degrees apart around the edge ring 614. After thermal processing, the edge ring 614 shifts from a predetermined position 615 to a shifted position 616.

[0063]

[0070] The third distance sensor 711 is aligned along the X-axis and measures a third horizontal distance HD3 between the third distance sensor 711 and the outer surface of the edge ring 614 after the edge ring has shifted to the shifted position 616. The third horizontal shift HS3 along the X-axis is determined by subtracting a predetermined third horizontal distance PH3 from the third horizontal distance HD3. The predetermined third horizontal distance PH3 is the measured horizontal distance between the third distance sensor 711 and the outer surface of the edge ring 614 while the edge ring 614 is in the predetermined position 615.

[0064]

[0071] The fourth distance sensor 712 is aligned along the Y-axis and measures a fourth horizontal distance HD4 between the fourth distance sensor 712 and the outer surface of the edge ring 614 after the edge ring is shifted to the shifted position 616. The fourth horizontal shift HS4 along the Y-axis is determined by subtracting the fourth horizontal distance HD4 from the predetermined second horizontal distance PH4. The predetermined fourth horizontal distance PH4 is the measured horizontal distance between the fourth distance sensor 712 and the outer surface of the edge ring 614 while the edge ring 614 is in the predetermined position 615.

[0065]

[0072] A corrective landing position of the robot is determined that is associated with a shift in the center position of the edge ring 614. The corrective landing position is determined using a first horizontal shift HS1, a second horizontal shift HS2, a third horizontal shift HS3, and a fourth horizontal shift HS4.

[0066]

[0073] A first horizontal correction position along the X axis is determined by adding a first horizontal correction C1 to the first predetermined landing position PL1 of the robot along the X axis that was used when the edge ring 614 was in position 615. The first horizontal correction C1 along the X axis is determined using Equation 1 shown below: C1=0.5x((PH3-HD3)-(PH1-HD1))(Equation 1)

[0067]

[0074] A second horizontal correction position along the Y axis is determined by adding a second horizontal correction C2 to a second predetermined landing position PL2 of the robot along the Y axis that was used when the edge ring 614 was in position 615. The second horizontal correction C2 along the Y axis is determined using Equation 2 shown below: C2=0.5x((PH2-HD2)-(PH4-HD4))(Equation 2)

[0068]

[0075] The robot is used to adjust the landing position of a subsequently processed substrate to a corrected landing position including a first horizontal corrected position and a second horizontal corrected position.

[0069]

[0076] Measuring the distance between the outer surface 162 of the edge ring 114 and one or more distance sensors 160 facilitates simple, rapid, accurate, and effective determination of shifts in the center position of the edge ring 114 due to thermal expansion and / or contraction. By accounting for changes in the center position of the edge ring 114 and aligning the substrate to the changed center position during thermal processing, temperature uniformity along the substrate, including adjacent the edge of the substrate, is promoted. Temperature uniformity promotes feature uniformity, which in turn promotes increased throughput, reduced costs, and increased operating efficiency.

[0070]

[0077] The present disclosure contemplates that measuring the change in the center position of the edge ring 114 and using the corrected landing position to align the substrate to the changed center position of the edge ring 114 promotes uniformity more effectively, accurately, and quickly than implementations that only vary and / or measure other operating parameters.

[0071]

[0078] Additionally, aspects disclosed herein facilitate accurate and simple accounting for shifts in the center position of the edge ring 114 that are 0.1 mm or less. As one example, the use of a single distance sensor 160 and rotation of the edge ring 114 facilitates accurate measurements in a measurement system that is easy to implement and use. Measurements can also be made in real time, allowing substrate landing adjustments to be made in real time, facilitating rapid measurements and reducing machine downtime to make adjustments.

[0072]

[0079] Measuring the distance between the sidewall-mounted distance sensor 160 and the outer surface 162 of the edge ring 114 also reduces or eliminates interference of heat light from the heat lamps 126 with the signal 171 emitted by the distance sensor 160, facilitating accurate and effective measurements. The embodiments disclosed herein also facilitate modularity in application in systems. As an example, the embodiments disclosed herein can be used to account for changes in the center position of the edge ring in systems that do not allow for vertical and / or horizontal edge translation.

[0073]

[0080] Advantages of the present disclosure include: using modularity in system applications; effectively, quickly, and accurately measuring changes in edge ring center position in real time; accurately measuring changes in edge ring center position that are 0.1 mm or less; effectively, quickly, and accurately adapting the substrate to changes in edge ring center position in real time; substrate temperature uniformity; substrate feature uniformity; increased throughput; increased efficiency; and reduced machine downtime.

[0074]

[0081] Aspects of the present disclosure include one or more distance sensors 160 oriented toward the outer surface 162, using the distance measurements to determine a shift in the center position of the edge ring 114, using the shift in center position to determine a corrective landing position of the edge ring 114, instructing a robot to align the substrate to the corrective landing position of the edge ring 114, a thermal treatment chamber 100, a controller 180, a thermal treatment chamber system 110, a thermal treatment chamber system 200, a thermal treatment chamber system 300, a robotic device 400, and a method 500. It is contemplated that one or more aspects disclosed herein can be combined. Furthermore, it is contemplated that one or more aspects disclosed herein can include some or all of the advantages described above.

[0075]

[0082] While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the present disclosure may be devised without departing from the basic scope thereof. It is also contemplated in the present disclosure that one or more aspects of the embodiments described herein may be substituted for one or more of the other aspects described. The scope of the present disclosure is determined by the claims.

Claims

1. A thermal processing chamber apparatus, comprising: a chamber body including one or more sidewalls and a processing volume; a rotor disposed within the processing volume of the chamber body; an edge ring supported on the rotor, the edge ring including an inner surface and an outer surface; and one or more distance sensors attached to the one or more sidewalls of the chamber body, each distance sensor oriented toward the outer surface of the edge ring to measure a distance between the outer surface of the edge ring and a respective one of the distance sensors; A thermal processing chamber apparatus comprising:

2. 10. The thermal processing chamber apparatus of claim 1, further comprising a drive ring disposed outside the rotor, the drive ring magnetically coupled to the rotor to rotate the rotor.

3. 2. The thermal processing chamber apparatus of claim 1, wherein the one or more side walls include one or more window portions, each side wall including an inner surface and an outer surface, and each distance sensor of the one or more distance sensors is attached to the outer surface of a respective one of the side walls and adjacent to a respective one of the window portions.

4. The thermal processing chamber apparatus of claim 1 , further comprising one or more pyrometers disposed below the edge ring.

5. each distance sensor of the one or more distance sensors includes a laser emitter directed to emit laser light toward the outer surface of the edge ring; each distance sensor is directed toward the outer surface of the edge ring to receive reflected laser light reflected from the outer surface of the edge ring, and uses the reflected laser light to determine a distance between the outer surface of the edge ring and a respective distance sensor; The thermal processing chamber apparatus of claim 1 .

6. and a non-transitory computer-readable medium containing instructions that, when executed, causing a plurality of heat lamps to heat a first substrate disposed within the processing volume; causing the one or more distance sensors to measure a distance between the outer surface of the edge ring and each of the distance sensors; determining a shift in a center position of the edge ring using the distance; using said shift in center position to determine a corrected landing position; causing the robot to align a second substrate to the corrected landing position; 2. The thermal processing chamber apparatus of claim 1.

7. 7. The thermal processing chamber apparatus of claim 6, wherein the shift in center position comprises a first horizontal shift along an X-axis and a second horizontal shift along a Y-axis.

8. 7. The thermal processing chamber apparatus of claim 6, wherein the instructions, when executed, cause the rotor to rotate the edge ring while the one or more distance sensors measure the distance along multiple angular positions of the edge ring.

9. 1. A non-transitory computer readable medium containing instructions that, when executed, cause a thermal processing chamber system to: heating a first substrate disposed on an edge ring within the processing volume of the chamber body; a first distance sensor attached to a sidewall of the chamber body; emitting a first signal toward an outer surface of the edge ring such that the first signal reflects from the outer surface to form a first reflected signal; and receiving the first reflected signal; The second distance sensor emitting a second signal toward an outer surface of the edge ring such that the second signal reflects from the outer surface as a second reflected signal; and receiving the second reflected signal; determining a first distance between the first distance sensor and an outer surface of the edge ring using the first reflected signal; determining a second distance between the second distance sensor and an outer surface of the edge ring using the second reflected signal; repeatedly determining the first distance and the second distance while rotating the edge ring; and a non-transitory computer-readable medium for determining a shift in a center position of the edge ring based on repeated determinations of the first distance and the second distance;

10. A non-transitory computer-readable medium as described in claim 9, wherein the instructions cause the thermal treatment chamber system to rotate the edge ring at least 180 degrees while repeatedly determining the first distance and the second distance.

11. The non-transitory computer-readable medium of claim 9, wherein the instructions cause the thermal treatment chamber system to determine a corrective landing position using the shift in center position.

12. The non-transitory computer-readable medium of claim 11, wherein the instructions cause the robot to align a second substrate with the corrected landing position, the second substrate being different from the first substrate.

13. The non-transitory computer-readable medium of claim 9, wherein the instructions cause the thermal processing chamber system to repeatedly determine the first distance and the second distance during or after removal of the first substrate from the processing volume.

14. A non-transitory computer-readable medium as described in claim 13, wherein the instructions cause the thermal processing chamber system to repeatedly determine the first distance and the second distance before moving a second substrate into the chamber body.

15. A non-transitory computer-readable medium as described in claim 13, wherein the instructions cause the thermal treatment chamber system to repeatedly determine the first distance and the second distance before a second substrate is transferred from a robot blade to lift pins within the chamber body.

16. A non-transitory computer-readable medium containing instructions that, when executed, cause a thermal processing chamber system to: determining a first distance between a first distance sensor and an outer surface of an edge ring while the edge ring is disposed at a predetermined position within the processing volume of the chamber body; determining a second distance between a second distance sensor and the outer surface of the edge ring while the edge ring is in the predetermined position; performing a processing operation on a first substrate disposed on the edge ring; repeatedly performing the determination of the first distance and the second distance after performing a processing operation on the first substrate; and a non-transitory computer-readable medium for determining a shift of the edge ring from the predetermined position based on repeated determinations of the first distance and the second distance;

17. The non-transitory computer-readable medium of claim 16, wherein the instructions cause the thermal processing chamber system to rotate the edge ring at least 180 degrees while repeatedly determining the first distance and the second distance.

18. The non-transitory computer-readable medium of claim 16, wherein the instructions cause the thermal processing chamber system to repeatedly determine the first distance and the second distance during or after removal of the first substrate from the processing volume.

19. The method of claim 18, wherein the instructions are: determining a third distance between a third distance sensor and the outer surface of the edge ring while the edge ring is disposed at the predetermined position; repeatedly performing the determination of the third distance after performing a processing operation on the first substrate; and 17. The non-transitory computer-readable medium of claim 16, further comprising determining the shift of the edge ring from the predetermined position based on repeated determinations of the third distance.

20. The method of claim 1, wherein the instructions are: determining a fourth distance between a fourth distance sensor and the outer surface of the edge ring while the edge ring is in the predetermined position; repeatedly performing the determination of the fourth distance after performing a processing operation on the first substrate; and 20. The non-transitory computer-readable medium of claim 19, further comprising determining the shift of the edge ring from the predetermined position based on repeated determinations of the fourth distance.

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