Method for controlling a drive device, drive device, lithography apparatus, and method for manufacturing an article

Abstract

To provide a technique advantageous for reducing local deterioration in a stator of a linear motor.SOLUTION: In a control method for a drive device which repeatedly performs processing for driving an object within a predetermined range with a linear motor, the linear motor comprises a stator in which a plurality of coils is arrayed, and a rotor in which the object is provided. A position of the stator with respect to the predetermined range is changed in arbitrary timing and in accordance with the change of the position of the stator, an output ratio of the plurality of coils in the processing is changed before and after the arbitrary timing.SELECTED DRAWING: Figure 8

Description

[Technical Field]

[0001] The present invention relates to a method for controlling a drive device, a drive device, a lithographic apparatus, and a method for manufacturing an article. [Background technology]

[0002] In lithography apparatuses used in the manufacture of semiconductor devices and the like, a driving device for driving a stage that holds an original and / or a substrate is known that uses a polyphase linear motor that selectively switches coils to be energized depending on the position of a mover. Patent Document 1 describes a method for controlling the driving current of a polyphase linear motor using a sin 2 (x)+cos 2 A multi-phase excitation drive method has been proposed that utilizes the principle of (x) = 1. In a linear motor with a multi-phase excitation drive method, when driving a stage, currents equivalent to the magnetic flux densities of two phase coils located at positions separated by a phase angle of 90 degrees (two-phase excitation) are simultaneously passed through the coils, making it possible to obtain a constant thrust with reduced thrust unevenness.

[0003] In such a multi-phase linear motor, when accelerating a stage, current may flow through only one of the two-phase coils. In this case, the power load is concentrated on only that one-phase coil, causing a significant temperature rise, which results in localized heat generation in the coil, potentially deteriorating the performance and shortening of the linear motor's lifespan. Patent Document 2 proposes a method of positioning the stator so that the electrical phase angle of the linear motor when accelerating or decelerating a driven object is in a predetermined state (for example, so that the phase angle and current are uniform in the two-phase coils). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 9-19178 [Patent Document 2] Japanese Patent Application Laid-Open No. 2006-67761 Summary of the Invention [Problem to be solved by the invention]

[0005] In the method described in Patent Document 2, for example, if the stator is positioned so that the phase angles of the two-phase coils are uniform at the point of acceleration of the driven object, an imbalance in the power load on the coils may occur at the point of deceleration of the driven object. In other words, the method described in Patent Document 2 was insufficient in reducing the imbalance in the power load on the coils at both the points of acceleration and deceleration and in reducing local deterioration of the stator.

[0006] Therefore, an object of the present invention is to provide an advantageous technique for reducing local deterioration in the stator of a linear motor. [Means for solving the problem]

[0007] In order to achieve the above object, one aspect of the present invention provides a control method for a drive device that repeatedly performs a process of driving an object within a predetermined range using a linear motor having a stator in which a plurality of coils are arranged and a mover on which an object is provided, the control method comprising: a determination step of determining whether or not it is a predetermined timing to change the position of the stator relative to the predetermined range during a period between the plurality of processes; Predetermined timing If it is determined that Changing the position of the stator relative to the predetermined range change The process and By the above-mentioned modification process The output ratio of the plurality of coils in the process is determined according to the change in the position of the stator. decision and a step of: determining whether the predetermined timing is a timing when the number of times the object is driven reaches a threshold value; determining whether the temperature of the linear motor reaches a threshold value; and determining whether the deviation between a measured value indicating the driving state of the object and a target value reaches a threshold value, and the driving state includes at least one of a speed, an acceleration, and a position.

[0008] Further objects and other aspects of the present invention will become apparent from the following description of preferred embodiments with reference to the accompanying drawings. [Effects of the Invention]

[0009] According to the present invention, for example, it is possible to provide an advantageous technique for reducing local deterioration in the stator of a linear motor. [Brief explanation of the drawings]

[0010] [Figure 1] Schematic diagram showing an example of the configuration of an exposure apparatus [Figure 2] Schematic diagram showing an example of the configuration of a drive device [Figure 3] Schematic diagram showing an example of the configuration of a part of a polyphase linear motor [Figure 4] FIG. 1 is a diagram showing an example of a magnetic flux density distribution passing through coils of each phase with respect to the position of a mover in a polyphase linear motor. [Figure 5] FIG. 10 is a diagram showing an example of driving a mover within a predetermined range in a polyphase linear motor. [Figure 6] FIG. 10 is a diagram illustrating an example of a stator movement process. [Figure 7] FIG. 10 is a diagram illustrating an example of a stator movement process. [Figure 8] 10 is a flowchart showing an example of the operation of the driving device; DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the scope of the invention claimed. Although multiple features are described in the embodiments, not all of these multiple features are necessarily essential to the invention, and multiple features may be combined arbitrarily. Furthermore, in the accompanying drawings, the same reference numerals are used to designate the same or similar components, and redundant explanations will be omitted.

[0012] In the following embodiments, an example will be described in which a driving device and a control method thereof according to the present invention are applied to an exposure apparatus that exposes a substrate to light and transfers a pattern of an original (mask) onto the substrate, but the present invention is not limited to this. The driving device and a control method thereof according to the present invention can also be applied to other lithography apparatuses, such as an imprint apparatus that forms a pattern of an imprint material on a substrate using a mold. Furthermore, the driving device and a control method thereof according to the present invention are not limited to lithography apparatuses, but can be applied to any apparatus that performs a process of driving an object (a driven object).

[0013] First Embodiment A first embodiment of the present invention will be described. FIG. 1 is a schematic diagram showing an example configuration of an exposure apparatus 10 of this embodiment. The exposure apparatus 10 of this embodiment may include, for example, an illumination optical system 12, an original stage 13 capable of holding and moving an original M such as a mask, a projection optical system 14, a substrate stage 15 capable of holding and moving a substrate S such as a wafer, and a controller 16. The controller 16 is configured by a computer including, for example, a CPU (Central Processing Unit) and memory, and controls the various components of the exposure apparatus 10 to control the exposure process of the substrate S. Note that, in the following description, a step-and-scan exposure apparatus (a so-called scanning exposure apparatus) will be used as an example of the exposure apparatus 10.

[0014] The illumination optical system 12 shapes the light emitted from the light source 11 into, for example, a strip-shaped or arc-shaped slit light and illuminates a portion of the original M with the slit light. The light that passes through a portion of the original M is incident on the projection optical system 14 as pattern light that reflects a portion of the pattern of the original M. The projection optical system 14 has a predetermined projection magnification and projects an image of the pattern of the original M onto the substrate S (specifically, onto the resist on the substrate) using the pattern light. The original M and the substrate S are held by an original stage 13 and a substrate stage 15, respectively, and are positioned at optically conjugate positions (the object plane and the image plane of the projection optical system 14) via the projection optical system 14. The control unit 16 synchronizes the original stage 13 and the substrate stage 15 and relatively scans them in a predetermined scanning direction at a speed ratio corresponding to the projection magnification of the projection optical system 14. This allows an exposure process to be performed in which the substrate S is exposed to light and the pattern of the original M is transferred onto the substrate. The exposure process can be performed for each of multiple shot areas on the substrate.

[0015] The original stage 13 and the substrate stage 15 are driven by a driving device 20. FIG. 2 is a schematic diagram showing an example of the configuration of the driving device 20 of this embodiment, illustrating an example in which the original stage 13 is driven as the driven object. In FIG. 2, the original stage 13 is levitated at a small distance from a stage base 28 by a gas bearing (not shown), and is driven in the Y-axis direction by a linear motor 21 (described later). The right half of FIG. 2 is similar in configuration to the left half, and is therefore not shown. The driving device 20 may be used to drive not only the original stage 13, but also the substrate stage 15.

[0016] As shown in FIG. 2, the driving device 20 of this embodiment includes a linear motor 21 and a control unit 25. The linear motor 21 may include a stator 22 in which multiple coils 22a are arranged along the driving direction of the original stage 13 (the Y-axis direction in the figure), and a mover 23 to which the original stage 13 is attached. The control unit 25 is configured by a computer including, for example, a CPU, a memory, and the like, and controls the driving of the substrate stage 15 by the linear motor 21 by controlling the supply of electricity to the stator 22 (multiple coils 22a) of the linear motor 21. The control unit 25 may be configured as part of the control unit 16 of the exposure apparatus 10 described above, or may be configured separately from the control unit 16. Here, the position of the original stage 13 in the Y-axis direction may be measured by a laser interferometer 26, and the position of the stator 22 in the Y-axis direction may be measured by a laser interferometer 27. The control unit 25 can control the position of the original stage 13 in the Y-axis direction based on the measurement results of the laser interferometer 26, and can control the position of the stator 22 in the Y-axis direction based on the measurement results of the laser interferometer 27.

[0017] The linear motor 21 in the drive device 20 of this embodiment can be configured as a linear motor of a multi-phase excitation drive type (hereinafter, sometimes referred to as a multi-phase linear motor 21). FIG. 3 shows a configuration example of a portion of the multi-phase linear motor 21. In the multi-phase linear motor 21, the multiple coils 22a in the stator 22 have a configuration in which A-phase (first phase) coils and B-phase (second phase) coils are alternately arranged, and the mover 23 includes multiple permanent magnets 23a in a Halbach array that form a magnetic flux density waveform. The multiple permanent magnets 23a are arranged along the arrangement direction of the multiple coils 22a in the stator 22. A current corresponding to a phase angle determined by the relative positions of the multiple coils 22a in the stator 22 and the permanent magnets 23a in the mover 23 is supplied to the multiple coils 22a.

[0018] 4 shows an example of the distribution of magnetic flux density passing through the coils of each phase with respect to the position of mover 23 in multi-phase linear motor 21. When the position of mover 23 is X and the magnetic flux density passing through the A-phase coil is expressed as cos(X), a current proportional to cos(X) is supplied to the A-phase coil. On the other hand, the magnetic flux density passing through the B-phase coil, whose magnetic flux density phase angle is shifted by 90 degrees from the A-phase coil, is expressed as sin(X), and therefore a current proportional to sin(X) is supplied to the B-phase coil. This generates a thrust force due to the Lorentz force in multi-phase linear motor 21, and moves mover 23 relative to stator 22 in the drive direction indicated by arrow AR in FIG. 3.

[0019] The driving device 20 described above repeatedly performs a driving process for driving the original stage 13 within a predetermined range R using the multi-phase linear motor 21 for each exposure process. In one driving process, when the mover 23 is driven within the predetermined range R from point A to point B, as shown in FIG. 5 , for example, a current may be supplied to the coil 22a of the stator 22 at point A where the mover 23 is accelerated and at point B where the mover 23 is decelerated. Here, point A may be understood as an acceleration point (acceleration section) where the mover 23 is accelerated, and point B may be understood as a deceleration point (deceleration section) where the mover 23 is decelerated. The predetermined range R refers to a driving range of the original stage 13 that is set in advance to drive the original stage 13 in scanning exposure, and may also be understood as a driving range of the mover 23 in the multi-phase linear motor 21.

[0020] When a driving process for driving the original stage 13 (movable element 23) within the predetermined range R is repeatedly performed, a current load is generated in the coils 22a of the stator 22 at the acceleration and deceleration points, which may accelerate deterioration of the coils 22a. Therefore, the driving device 20 of this embodiment includes a movement mechanism 24 that moves the stator 22 in the driving direction (Y-axis direction) of the mover 23 (see FIG. 3 ). At any given timing, the position of the stator 22 relative to the predetermined range R is changed by the movement mechanism 24, and the output ratio of the multiple coils 22a in the driving process is changed before and after the given timing in accordance with the change in the position of the stator 22. This process (hereinafter sometimes referred to as a movement process of the stator 22) reduces the bias in the current load of the coils 22a at the acceleration and / or deceleration points, thereby reducing local deterioration of the stator 22 (multiple coils 22).

[0021] The moving mechanism 24 may have, for example, an electric actuator, and may move the stator 22 under the control of the control unit 25. In this case, the control unit 25 may supply a signal to the moving mechanism 24 at any timing, thereby automatically changing the position of the stator 22 with respect to the predetermined range R. The moving mechanism 24 may also have a manual actuator, such as a ball screw. In this case, an operator may operate the moving mechanism 24 at any timing, thereby manually changing the position of the stator 22 with respect to the predetermined range R. Note that, hereinafter, an example will be described in which the moving mechanism 24 is provided with an electric actuator, and the moving mechanism 24 is controlled by the control unit 25.

[0022] Here, the arbitrary timing may be, for example, a timing within a period between multiple drive processes (exposure processes). The arbitrary timing may also be a timing when the number of drives (which may also be understood as the number of exposure processes) of the original stage 13, which is the object to be driven, reaches a predetermined threshold. Furthermore, the arbitrary timing may also be a timing when the values ​​of various sensors provided in the drive device 20 (exposure apparatus 10), such as values ​​detected by a temperature sensor and / or a pressure sensor, reach a predetermined threshold. The values ​​of the various sensors may include, for example, the temperature of the linear motor 21 detected by a temperature sensor and / or the internal air pressure of the exposure apparatus 10 detected by a pressure sensor. The arbitrary timing may also be a timing when the electrical characteristics of at least one of the multiple coils 22a in the stator 22 reach a predetermined threshold. The electrical characteristics may include at least one of the resistance value, voltage value, current value, and inductance value of the coil. The arbitrary timing may also be a timing when the deviation between a measured value indicating the drive state of the original stage 13 and a target value (design value) reaches a predetermined threshold. The driving state can include at least one of the velocity, acceleration, and position of the original stage 13 in the driving process.

[0023] 6 and 7 are diagrams for explaining an example of the movement process of the stator 22, and show the positional relationship between the stator 22 (coil 22a) and the mover 23 (permanent magnet 23a) at an acceleration point and a deceleration point. Fig. 6 shows the positional relationship between the stator 22 and the mover 23 before the movement process of the stator 22 is performed, and Fig. 7 shows the positional relationship between the stator 22 and the mover 23 after the movement process of the stator 22 has been performed. Note that Figs. 6 and 7 show the case where the polyphase linear motor 21 is in two-phase excitation (phase A and phase B).

[0024] Fig. 6 shows an example of the positional relationship between the stator 22 (coil 22a) and the mover 23 (permanent magnet 23a) before the movement process of the stator 22. Fig. 6(a) shows the positional relationship between the stator 22 and the mover 23 at point A where the mover 23 is accelerated within a predetermined range R, and Fig. 6(b) shows the positional relationship between the stator 22 and the mover 23 at point B where the mover 23 is decelerated within the predetermined range R.

[0025] 6(a), the A-phase coil and B-phase coil used to accelerate the mover 23 at point A are coil No. 1 and coil No. 2, respectively. In this case, the phase angle of coil No. 1 (A-phase coil) is 0 degrees, so α (maximum driving current value) × cos(0°) = α, and the maximum current is applied (supplied) to coil No. 1 when acceleration of the mover 23 begins. Also, the phase angle of coil No. 2 (B-phase coil) is 270 degrees, so α × cos(270°) = 0, and no current is applied (supplied) to coil No. 2 when acceleration of the mover 23 begins.

[0026] 6(b), the A-phase coil and B-phase coil used to decelerate (stop) the mover 23 at point B are coil No. 6 and coil No. 7, respectively. In this case, the phase angle of coil No. 6 (A-phase coil) is -45 degrees, so a current of α×cos(-45°) = 1 / √2×α is applied to coil No. 7 (B-phase coil), generating a deceleration force in the mover 23. Also, the phase angle of coil No. 7 (B-phase coil) is 225 degrees, so a current of α×cos(225°) = -1 / √2×α is applied to coil No. 7 (B-phase coil), similar to coil No. 6 (A-phase coil), generating a deceleration force in the mover 23.

[0027] Here, at point B (deceleration point), the output ratios of coil No. 6 (A-phase coil) and coil No. 7 (B-phase coil) are equal, so the current load can be distributed among these coils. On the other hand, at point A (acceleration point), a large current load is applied only to coil No. 1 (A-phase coil). In other words, if this operation (driving process) is repeated, a biased current load will be continuously applied to coil No. 1 (A-phase coil). Therefore, as described above, in the driving device 20 of this embodiment, the position of the stator 22 relative to the predetermined range R is changed by the moving mechanism 24 at any timing, and the output ratios of the multiple coils 22a in the driving process are changed in accordance with the change in the position of the stator 22.

[0028] 7 shows an example of the positional relationship between the stator 22 (coil 22a) and the mover 23 (permanent magnet 23a) after a process of moving the stator 22 is performed. FIG. 7(a) shows the positional relationship between the stator 22 and the mover 23 at point A where the mover 23 is accelerated within a predetermined range R, and FIG. 7(b) shows the positional relationship between the stator 22 and the mover 23 at point B where the mover 23 is decelerated within the predetermined range R. Here, an example is shown in which, as a process of moving the stator 22, the position of the stator 22 with respect to the predetermined range R is changed by the movement mechanism 24 so that the phase angle between the stator 22 and the mover 23 is changed by 90 degrees, that is, by a distance equivalent to a phase angle of 90 degrees. The distance equivalent to a phase angle of 90 degrees may be understood as, for example, a distance equivalent to one pole dimension of the multiple permanent magnets 23a in the mover 23, or as half the distance of the arrangement pitch of the multiple permanent magnets 23a. Note that the amount of change in the position of the stator 22 by the moving mechanism 24 is not limited to a distance corresponding to a phase angle of 90 degrees, as long as the output ratio of the multiple coils 22a changes during acceleration and / or deceleration of the mover 23.

[0029] In the example of FIG. 7(a), the A-phase coil and the B-phase coil used to accelerate the mover 23 at point A are coil No. 1 and coil No. 2, respectively. However, in this case, the phase angle of coil No. 1 (A-phase coil) is changed to 90 degrees, so α×cos(90°)=0, and no current is applied (supplied) to coil No. 1 when acceleration of the mover 23 begins. Also, the phase angle of coil No. 2 (B-phase coil) is changed to 360 degrees, so α×cos(360°)=α, and the maximum current is applied (supplied) to coil No. 2 when acceleration of the mover 23 begins. In other words, in the example of FIG. 7(a), the phase angles of coil No. 1 and coil No. 2 are swapped compared to the example of FIG. 6(a), and the output ratio (output rate) of the multiple coils 22a in the stator 22 can be changed.

[0030] 7(b), the A-phase coil and B-phase coil used to decelerate (stop) the mover 23 at point B are coil No. 6 and coil No. 7, respectively. In this case, the phase angle in coil No. 6 (A-phase coil) is 45 degrees, so a current of α×cos(45°)=1 / √2×α is applied to coil No. 7 (B-phase coil), generating a deceleration force in the mover 23. Also, the phase angle in coil No. 7 (B-phase coil) is 315 degrees, so a current of α×cos(315°)=1 / √2×α is applied to coil No. 7 (B-phase coil), similarly to coil No. 6 (B-phase coil), generating a deceleration force in the mover 23.

[0031] As described above, at the acceleration point (point A) shown in FIGS. 6(a) and 7(a), the phase angles of coils 1 and 2 are swapped before and after the movement process of the stator 22, and the output ratio (output ratio) of the multiple coils 22a in the stator 22 can be changed. This results in a time-averaged current load between coils 1 and 2, thereby reducing the bias in the current load and reducing localized deterioration of the stator 22. On the other hand, at the deceleration point (point B) shown in FIGS. 6(b) and 7(b), the current load between coils 6 and 7 is uniform both before and after the movement process of the stator 22. Therefore, the bias in the current load can be reduced even at the deceleration point, and localized deterioration of the stator 22 can be reduced.

[0032] 6 and 7, the output ratio of the plurality of coils 22a at the deceleration point (point B) is not changed, but the output ratio of the plurality of coils 22a at the deceleration point may be changed instead of or in addition to the acceleration point. For example, at any timing, the position of the stator 22 with respect to the predetermined range R may be changed by the movement mechanism 24 so that the output ratio of the plurality of coils 22a at the deceleration point (point B) is changed instead of or in addition to the acceleration point (point A).

[0033] Next, the operation of the driving device 20 of this embodiment will be described. Fig. 8 is a flowchart showing an example of the operation of the driving device 20 of this embodiment. Here, the operation of the driving device 20 when the driving device 20 is applied to the exposure apparatus 10 described above will be described. Furthermore, each step in the flowchart of Fig. 8 can be executed by the control unit 25.

[0034] In step S11, the control unit 25 performs a drive process to drive the original stage 13 using the polyphase linear motor 21. This drive process may be understood as equivalent to an exposure process for one shot area on the substrate S. Next, in step S12, the control unit 25 determines whether or not to change the position of the stator 22, that is, whether or not to perform a movement process for the stator 22. For example, as described above, the control unit 25 can determine whether or not it is time to perform the movement process for the stator 22 based on the number of times the original stage 13 is driven and the values ​​of various sensors. If it is determined that the movement process for the stator 22 should be performed, the process proceeds to step S13. If it is determined that the movement process for the stator 22 should not be performed, the process proceeds to step S14.

[0035] In step S13, the control unit 25 executes the movement process of the stator 22 by changing the position of the stator 22 with respect to the predetermined range R using the movement mechanism 24. For example, as described above, the control unit 25 changes the position of the stator 22 with the movement mechanism 24 so that the output ratios of the multiple coils 22a at the acceleration point and / or deceleration point are changed before and after the movement process of the stator 22. Then, the control unit 25 changes the output ratios of the multiple coils 22a in the stator 22 so that the stator 22 whose position has been changed by the movement mechanism 24 can drive the mover 23 within the predetermined range R.

[0036] In step S14, the control unit 25 determines whether or not to continue the drive process, i.e., whether or not there is a next drive process. Step S14 may be understood as a step of determining whether or not there is a shot area to be subjected to the next exposure process. The shot area to be subjected to the next exposure process may be, for example, a shot area among the multiple shot areas on the substrate S that has not yet been subjected to the exposure process, or a shot area of ​​a substrate in a lot having multiple substrates S that has not yet been subjected to the exposure process. If there is a next drive process, the process proceeds to step S11; if there is no next drive process, the process ends. In this way, the movement process of the stator 22 is preferably performed in the period between drive processes.

[0037] As described above, the driving device 20 of this embodiment changes the position of the stator 22 relative to the predetermined range R at any timing using the movement mechanism 24. Then, in response to the change in the position of the stator 22, the output ratio of the multiple coils 22a in the driving process is changed before and after the given timing. This reduces the bias in the current load of the multiple coils 22a in the stator 22, and reduces local deterioration of the stator 22. Here, in this embodiment, a two-phase excitation drive system is used for the polyphase linear motor 21, but this is not limiting, and a three-phase or more excitation drive system may also be used. Furthermore, in this embodiment, a moving magnet type linear motor is used as the polyphase linear motor 21, but a moving coil type linear motor may also be used.

[0038] <Embodiments of manufacturing methods of articles> The method for manufacturing an article according to an embodiment of the present invention is suitable for manufacturing articles such as microdevices, such as semiconductor devices, and elements having a microstructure. The method for manufacturing an article according to this embodiment includes a formation step of forming a pattern on a substrate using the above-described lithography apparatus (exposure apparatus), and a processing step of processing the substrate on which the pattern has been formed in the formation step. Furthermore, this manufacturing method includes other well-known processes (oxidation, film formation, vapor deposition, doping, planarization, etching, resist stripping, dicing, bonding, packaging, etc.). The method for manufacturing an article according to this embodiment is advantageous over conventional methods in at least one of the performance, quality, productivity, and production cost of the article.

[0039] <Other embodiments> The present invention can also be realized by supplying a program that realizes one or more functions of the above-described embodiments to a system or device via a network or a storage medium, and having one or more processors in the computer of the system or device read and execute the program.The present invention can also be realized by a circuit (e.g., ASIC) that realizes one or more functions.

[0040] The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0041] 10: exposure device, 12: illumination optical system, 13: original stage, 14: projection optical system, 15: substrate stage, 16: control unit, 20: drive unit, 21: linear motor, 22: stator, 23: mover, 24: movement mechanism, 25: control unit

Claims

1. A control method for a drive device that repeatedly performs a process of driving an object within a predetermined range using a linear motor having a stator in which a plurality of coils are arranged and a mover on which an object is provided, the method comprising: a determination step of determining whether or not it is a predetermined timing to change the position of the stator relative to the predetermined range during a period between the plurality of processes; a changing step of changing a position of the stator relative to the predetermined range when it is determined in the determining step that the predetermined timing has arrived; a determination step of determining output ratios of the plurality of coils in the processing in accordance with the change in the position of the stator caused by the change step; and a control method for a drive device, characterized in that the specified timing includes at least one of a timing when the number of times the object is driven reaches a threshold value, a timing when the temperature of the linear motor reaches a threshold value, and a timing when a deviation between a measured value indicating the drive state of the object and a target value reaches a threshold value, and the drive state includes at least one of a speed, an acceleration, and a position.

2. 2. The method for controlling a drive device according to claim 1, wherein in the changing step, the position of the stator relative to the predetermined range is changed so that a phase angle between the stator and the mover is changed by 90 degrees.

3. the mover includes a plurality of magnets arranged along the arrangement direction of the plurality of coils, 3. The control method for a drive device according to claim 1, wherein in the changing step, the position of the stator relative to the predetermined range is changed by a distance that is half the arrangement pitch of the plurality of magnets.

4. the predetermined timing includes timing when an electrical characteristic of at least one of the plurality of coils reaches a threshold value; 4. The method for controlling a drive device according to claim 1, wherein the electrical characteristics include at least one of a resistance value, a voltage value, a current value, and an inductance value.

5. 5. The method for controlling a drive device according to claim 1, wherein the linear motor is a linear motor of a multi-phase excitation drive system.

6. A control method for a drive device described in any one of claims 1 to 5, characterized in that in the processing performed after the position of the stator relative to the specified range is changed by the change process, the current supplied to the stator for driving the object within the specified range is controlled based on the output ratio determined in the determination process.

7. A control method for a drive device that drives an object using a linear motor having a stator on which a plurality of coils are arranged and a mover on which the object is provided, comprising: a first driving step of driving the mover within a predetermined range by the linear motor; a changing step of changing a position of the stator relative to the predetermined range after the first driving step; a second driving step of driving the mover within the predetermined range by the linear motor after the changing step, a first current is applied to a first coil included in the plurality of coils when accelerating the mover in a predetermined direction in the first driving step; a second current smaller than the first current is applied to the first coil when accelerating the mover in the predetermined direction in the second driving step; The method for controlling a drive device, characterized in that the change process is performed at least at one of the following times: when the number of times the object is driven reaches a threshold value; when the temperature of the linear motor reaches a threshold value; and when the deviation between a measured value indicating the drive state of the object and a target value reaches a threshold value; and the drive state includes at least one of speed, acceleration, and position.

8. 8. The control method for a drive device according to claim 7, wherein a fourth current greater than the third current is applied to a second coil included in the plurality of coils and adjacent to the first coil, to which a third current is applied when accelerating the mover in the first driving step.

9. 9. The control method for a drive device according to claim 7 or 8, further comprising a determination step of determining whether or not to change the position of the stator between the first drive step and the second drive step based on at least one of the number of times the object is driven, the temperature of the linear motor, the electrical characteristics of at least one of the plurality of coils, and a measurement value indicating the drive state of the object.

10. A drive device for driving an object, a linear motor having a stator on which a plurality of coils are arranged and a mover on which the object is provided; a moving mechanism that moves the stator along an arrangement direction of the plurality of coils; a control unit that repeatedly controls a process of driving the object within a predetermined range by the linear motor; Equipped with the control unit determines whether or not a predetermined timing has come to change the position of the stator relative to the predetermined range during a period between the plurality of processes, and when it has been determined that the predetermined timing has come, changes the position of the stator relative to the predetermined range using the movement mechanism, and determines output ratios of the plurality of coils in the process in accordance with the change in the position of the stator; a driving device characterized in that the specified timing includes at least one of a timing when the number of times the object is driven reaches a threshold value, a timing when the temperature of the linear motor reaches a threshold value, and a timing when a deviation between a measured value indicating the driving state of the object and a target value reaches a threshold value, and the driving state includes at least one of a speed, an acceleration, and a position.

11. A drive device for driving an object, a linear motor having a stator on which a plurality of coils are arranged and a mover on which the object is provided; a moving mechanism that moves the stator along an arrangement direction of the plurality of coils; a control unit that controls the linear motor and the movement mechanism; Equipped with The control unit a first drive is performed to drive the mover within a predetermined range by the linear motor; After the first driving, the position of the stator is changed relative to the predetermined range; After the change, a second drive is performed to drive the mover within the predetermined range by the linear motor; a first current is applied to a first coil included in the plurality of coils when accelerating the mover in a predetermined direction in the first driving, and a second current smaller than the first current is applied to the first coil when accelerating the mover in the predetermined direction in the second driving, a drive device characterized in that the position of the stator relative to the specified range is changed at at least one of the following times: when the number of times the object is driven reaches a threshold value; when the temperature of the linear motor reaches a threshold value; and when the deviation between a measured value indicating the driving state of the object and a target value reaches a threshold value; and the driving state includes at least one of speed, acceleration, and position.

12. 1. A lithographic apparatus for forming a pattern on a substrate, comprising:

12. A drive device according to claim 10 or 11, The lithography apparatus, wherein the driving device drives a stage that holds the substrate or an original having a pattern to be transferred onto the substrate as the object.

13. forming a pattern on a substrate using the lithography apparatus of claim 12; a processing step of processing the substrate on which the pattern has been formed in the forming step, A method for manufacturing an article, comprising manufacturing an article from the substrate processed in the processing step.

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