Stage device, transfer device, and article manufacturing method

Abstract

To provide a technique advantageous for reducing a moment acting on a micromotion stage.SOLUTION: A transfer device for transferring a pattern of an original plate onto a substrate includes a coarse motion stage, a coarse motion actuator for driving the coarse motion stage along a predetermined plane, a micromotion stage for holding the substrate, a micromotion actuator for adjusting the position and the attitude of the micromotion stage relative to the coarse motion stage, and an electromagnetic actuator for transmitting thrust given to the coarse motion stage by the coarse motion actuator to the micromotion stage in a non-contact manner, wherein the electromagnetic actuator includes a movable iron core fixed to the micromotion stage, a fixed iron core fixed to the coarse motion stage, and a coil wound around the fixed iron core, and a shortest distance between the substrate held by the micromotion stage and the coil is larger than a shortest distance between the substrate and the fixed iron core.SELECTED DRAWING: Figure 9

Description

[Technical Field]

[0001] The present invention provides Stage equipment, The present invention relates to a transfer device and an article manufacturing method. [Background technology]

[0002] A transfer device that transfers a pattern from an original onto a substrate may include a coarse movement stage driven by a coarse movement actuator and a fine movement stage that is disposed on the coarse movement stage and holds the substrate. A fine movement actuator may be disposed between the coarse movement stage and the fine movement stage for adjusting the position and attitude of the fine movement stage relative to the coarse movement stage. An electromagnetic actuator may also be disposed between the coarse movement stage and the fine movement stage for transmitting the thrust applied to the coarse movement stage by the coarse movement actuator to the fine movement stage in a non-contact manner. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2005-109522 [Patent Document 2] Japanese Patent Application Publication No. 8-130179 Summary of the Invention [Problem to be solved by the invention]

[0004] When the fine stage is accelerated, a moment may act on the fine stage. Operating the fine actuator to offset this moment may increase heat generation from the fine actuator. This heat may cause deformation of the fine stage, which may result in a decrease in overlay accuracy.

[0005] An object of the present invention is to provide an advantageous technique for reducing the moment acting on a fine movement stage. [Means for solving the problem]

[0006] One aspect of the present invention is a method for producing a medicament for the treatment of a pulmonary arthritis. A stage device for holding a substrate, the stage device comprising: The apparatus includes a coarse movement stage, a coarse movement actuator that drives the coarse movement stage along a predetermined plane, a fine movement stage that holds the substrate, a fine movement actuator that adjusts the position and attitude of the fine movement stage relative to the coarse movement stage, and an electromagnetic actuator that transmits the thrust applied to the coarse movement stage by the coarse movement actuator to the fine movement stage in a non-contact manner, wherein the electromagnetic actuator includes a movable iron core fixed to the fine movement stage, a fixed iron core fixed to the coarse movement stage, and a coil wound around the fixed iron core, and the shortest distance between the substrate held by the fine movement stage and the coil is greater than the shortest distance between the substrate and the fixed iron core. [Effects of the Invention]

[0007] The present invention provides an advantageous technique for reducing the moment acting on the fine stage. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a diagram illustrating the configuration of an exposure apparatus according to an embodiment. [Figure 2] FIG. 1 is a diagram illustrating an example of the configuration of a wafer stage apparatus according to an embodiment. [Figure 3] FIG. 1 is a diagram illustrating an example of the configuration of a wafer stage apparatus according to an embodiment. [Figure 4] FIG. 1 is a diagram illustrating an example of the configuration of a fine movement stage device according to an embodiment. [Figure 5] FIG. 2 is a diagram illustrating an example of the configuration of a coarse adjustment stage device according to an embodiment. [Figure 6] FIG. 1 is a diagram illustrating an example of the configuration of a coarse motion linear motor according to an embodiment. [Figure 7] FIG. 10 is a diagram showing an example of a shot layout diagram. [Figure 8] FIG. 2 is a diagram showing an example of the configuration of a fine-motion electromagnet incorporated in the exposure apparatus or wafer stage apparatus of the first embodiment. [Figure 9]FIG. 2 is a diagram showing an example of the configuration of a fine-motion electromagnet incorporated in the exposure apparatus or wafer stage apparatus of the first embodiment. [Figure 10] FIG. 2 is a diagram showing an example of the configuration of a fine movement stage device incorporated into the exposure apparatus or wafer stage device of the first embodiment. [Figure 11] FIG. 10 is a diagram illustrating the configuration of an improved example of a fine-motion electromagnet incorporated in the exposure apparatus or wafer stage apparatus of the first embodiment. [Figure 12] FIG. 10 is a diagram illustrating the configuration of another improved example of the fine-motion electromagnet incorporated in the exposure apparatus or wafer stage apparatus of the first embodiment. [Figure 13] FIG. 10 is a diagram showing an example of the configuration of a fine-motion electromagnet incorporated into an exposure apparatus or wafer stage apparatus according to the second embodiment. [Figure 14] FIG. 10 is a diagram showing an example of the configuration of a fine-motion electromagnet incorporated into an exposure apparatus or wafer stage apparatus according to the second embodiment. [Figure 15] FIG. 10 is a diagram showing an example of the configuration of a fine movement stage device incorporated into an exposure apparatus or wafer stage device of the second embodiment. [Figure 16] FIG. 10 is a diagram showing an example of the configuration of a fine-motion electromagnet incorporated into an exposure apparatus or wafer stage apparatus according to the third embodiment. [Figure 17] FIG. 10 is a diagram showing an example of the configuration of a fine-motion electromagnet incorporated into an exposure apparatus or wafer stage apparatus according to the third embodiment. [Figure 18] FIG. 10 is a diagram showing an example of the configuration of a fine movement stage device incorporated into an exposure apparatus or wafer stage device of the third embodiment. [Figure 19] FIG. 10 is a diagram illustrating the configuration of an improved example of a fine-motion electromagnet incorporated into the exposure apparatus or wafer stage apparatus of the third embodiment. [Figure 20] FIG. 10 is a diagram illustrating the configuration of an improved example of a fine-motion electromagnet incorporated into the exposure apparatus or wafer stage apparatus of the third embodiment. [Figure 21] FIG. 10 is a diagram illustrating the configuration of another improved example of the fine-motion electromagnet incorporated in the exposure apparatus or wafer stage apparatus of the third embodiment. [Figure 22]FIG. 10 is a diagram showing an example of the configuration of a fine-motion electromagnet incorporated into an exposure apparatus or wafer stage apparatus according to the fourth embodiment. [Figure 23] FIG. 10 is a diagram showing an example of the configuration of a modified example of a fine movement electromagnet incorporated into the exposure apparatus or wafer stage apparatus of the fourth embodiment. [Figure 24] FIG. 10 is a diagram illustrating an example of the configuration of a support member for a movable iron core in a modified example of the fine electromagnet of the fourth embodiment. [Figure 25] FIG. 2 is a diagram showing an example of the configuration of a control system of a wafer stage apparatus according to one embodiment. [Figure 26] 10A and 10B are diagrams showing exemplary position profiles and acceleration profiles; [Figure 27] 10A to 10C are diagrams for explaining an assembly method or a manufacturing method of an improved example of the fine electromagnet of the third embodiment. [Figure 28] 10A to 10C are diagrams for explaining an assembly method or a manufacturing method of an improved example of the fine electromagnet of the third embodiment. [Figure 29] 10A to 10C are diagrams for explaining an assembly method or a manufacturing method of an improved example of the fine electromagnet of the third embodiment. [Figure 30] 10A to 10C are diagrams for explaining an assembly method or a manufacturing method of an improved example of the fine electromagnet of the third embodiment. [Figure 31] 10A to 10C are diagrams for explaining an assembly method or a manufacturing method of an improved example of the fine electromagnet of the third embodiment. [Figure 32] FIG. 2 is a diagram for illustrating an example of a wound core. [Figure 33] 5A to 5C are diagrams for illustrating an example method for manufacturing a wound core. [Figure 34] FIG. 1 is a diagram for explaining eddy currents that occur in an iron core having a complex three-dimensional shape. [Figure 35] 6A and 6B are diagrams showing an example of a moment acting on the fine movement stage when the fine movement stage is accelerated. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the scope of the invention as claimed, and not all combinations of features described in the embodiments are necessarily essential to the invention. Two or more of the features described in the embodiments may be arbitrarily combined. Furthermore, the same reference numerals are used for the same or similar components, and redundant descriptions will be omitted.

[0010] In the following description, directions are described according to the XYZ coordinate system. The XY plane defined by the X and Y axes is typically a horizontal plane, and the Z axis is typically parallel to the vertical direction. The XY directions are directions parallel to the XY plane. The X-axis direction is parallel to the X-axis, the Y-axis direction is parallel to the Y-axis, and the Z-axis direction is parallel to the Z-axis.

[0011] FIG. 1 exemplarily illustrates the configuration of an exposure apparatus according to one embodiment. The exposure apparatus may be understood as an example of an alignment apparatus that relatively aligns a first object (e.g., a substrate) and a second object (e.g., an original), or as an example of a transfer apparatus that transfers a pattern of an original (reticle) to a substrate (wafer). A stage base 692 may be disposed on a floor 691 via a mount, and a wafer stage device 500 may be disposed thereon. A barrel base 696 may also be disposed on the floor 691 via a mount 698. A projection optical system 687 and a reticle base 694 may be supported by the barrel base 696. A reticle stage device 695 may be disposed on the reticle base 694. An illumination optical system 699 may be disposed above the reticle base 694. Illumination optical system 699 projects an image of a reticle placed on a reticle stage of reticle stage device 695 onto a wafer placed on a wafer stage of wafer stage device 500, thereby transferring the pattern of the reticle onto the wafer. The exposure apparatus may be configured as a scanning exposure apparatus.

[0012] The wafer stage assembly 500 can be understood as a first positioning mechanism that positions a substrate as a first object, and the reticle stage assembly 695 can be understood as a second positioning mechanism that positions a reticle as a second object. At least one of the first positioning mechanism and the second positioning mechanism can include an electromagnetic device or an electromagnetic actuator, which will be described below.

[0013] The above-described exposure apparatus or transfer apparatus can be used in an article manufacturing method for manufacturing an article such as a semiconductor device. The article manufacturing method can include a transfer step in which the above-described exposure apparatus or transfer apparatus transfers a pattern of an original onto a substrate, and a step in which the substrate that has undergone the transfer step is processed to obtain an article. The substrate processing can include, for example, etching, film formation, dicing, etc.

[0014] 2 shows an example of the overall configuration of wafer stage device 500. An XY slider 104 can be arranged on a stage base 105 so as to be slidable in the X and Y directions. A force in the X-axis direction can be transmitted to the XY slider 104 by an X slider 102, and a force in the Y-axis direction can be transmitted to the XY slider 104 by a Y slider 103. A fine movement stage device 101 can be mounted on the XY slider 104. Coarse movement linear motors 106 can be provided on both sides of the X slider 102 and the Y slider 103 to drive them in the X-axis and Y-axis directions, respectively.

[0015] FIG. 3 illustrates an example in which the fine movement stage (fine movement top plate) 101-1 of the fine movement stage device 101 in the wafer stage device 500 has been moved upward for convenience's sake. The fine movement stage 101-1 holds a wafer. The fine movement stage 101-1 may also be understood as having a chuck that holds the wafer. A fine movement base 101-2 may be fixed onto the XY slider 104. Four fine movement ZLMs (first fine movement actuators) 101-6 that perform precise positioning of the Z tilt may be provided on the fine movement base 101-2. In addition, two fine movement XLMs (second fine movement actuators) 101-4 that perform precise positioning around the X-axis and Z-axis may be provided on the fine movement base 101-2. In addition, two fine movement YLMs (third fine movement actuators) 101-5 that perform precise positioning around the Y-axis and Z-axis may be provided on the fine movement base 101-2. A fine movement electromagnet 101-3 can be provided at the center of the fine movement base 101-2, which functions to transmit the acceleration force in the X-axis and Y-axis directions applied to the XY slider 104 to the fine movement base 101-2.

[0016] Here, the fine movement base 101-2 can be understood as a coarse movement stage. Alternatively, the XY slider 104 and the fine movement base 101-2 can be understood as a coarse movement stage. The coarse movement linear motor 106 can be understood as a coarse movement actuator that drives the fine movement base 101-2 as a coarse movement stage along the XY plane, i.e., a predetermined plane. The fine movement ZLM 101-6, the fine movement XLM 101-4, and the Y fine movement YLM 101-5 can be understood as fine movement actuators for adjusting the position and attitude of the fine movement stage 101-1 relative to the fine movement base 101-2 as a coarse movement stage. The fine movement electromagnet 101-3 can be understood as an electromagnetic actuator for contactlessly transmitting the thrust applied to the fine movement base 101-2 as a coarse movement stage by the coarse movement linear motor 106 as a coarse movement actuator to the fine movement stage 101-1.

[0017] FIG. 4 shows a detailed example of the configuration of the fine movement stage device 101, particularly the fine movement YLM 101-5 and fine movement ZLM 101-6. Note that FIG. 4 shows a state in which part of the yoke has been removed. The fine movement YLM 101-5 can be composed of a linear motor. The fine movement YLM 101-5 can include a fine movement YLM coil base 101-52, a fine movement YLM coil 101-51, a fine movement YLM magnet 101-53, a fine movement YLM yoke 101-54, and a fine movement LM spacer 101-70. The fine movement YLM coil base 101-52 can be fixed onto the fine movement base 101-2, and the fine movement YLM coil 101-51 can be fixed onto that. The fine movement YLM coil 101-51 may be an oval coil with a straight portion extending vertically. Four fine movement YLM magnets 101-53 may be arranged facing this straight portion with a gap between them. Two YLM yokes 101-54 for passing magnetic flux may be arranged on either side of the magnets. The magnets may be magnetized in the X-axis direction, with adjacent magnets in the Y-axis direction having opposite polarities, and magnets aligned in the X-axis direction having the same polarity. The fine movement LM spacer 101-70 may be used to maintain the position of a pair of magnets and yokes against the attractive force acting on them. The magnets, yoke, and spacer may be fixed to the fine movement base 101-2. Passing a current through the YLM coil 101-51 generates a force proportional to the current in the direction perpendicular to the straight portion, i.e., the Y-axis direction. Furthermore, passing currents in opposite directions through the two fine movement YLMs 101-5 generates a moment around the Z-axis.

[0018] The fine movement ZLM 101-6 may be configured as a linear motor. The fine movement ZLM 101-6 may include a fine movement ZLM coil base 101-62, a fine movement ZLM coil 101-61, a fine movement ZLM magnet 101-63, a fine movement ZLM yoke 101-64, and a fine movement LM spacer 101-70. The fine movement ZLM coil base 101-62 may be fixed on top of the fine movement base 101-2, and the fine movement ZLM coil 101-61 may be fixed on top of that. The fine movement ZLM coil 101-61 may be an oval coil with a straight portion extending horizontally, and four fine movement ZLM magnets 101-63 may be arranged facing this straight portion with a gap between them. Two ZLM yokes 101-64 for passing magnetic flux may be arranged to sandwich the magnets. The magnetization direction of the magnets may be along the X-axis, adjacent magnets along the Z-axis may have opposite polarities, and magnets aligned along the X-axis may have the same polarity. The fine-adjustment LM spacer 101-70 can be used to counteract the attractive force acting on a pair of magnets and a yoke and maintain their position. The magnets, yoke, and spacer can be fixed to the fine-adjustment top plate 101. By passing a current through the ZLM coil 101-61, a force proportional to the current can be generated in the direction perpendicular to the linear section, i.e., the Z-axis. Furthermore, by combining the direction of the currents flowing through the four fine-adjustment ZLMs 101-6, a moment about the X-axis and a moment about the Y-axis can be generated.

[0019] The XLM101-4 micro-movement sensor has the same configuration as the YLM101-5 micro-movement sensor, but is rotated 90 degrees from the YLM101-5. This allows it to generate a force in the X-axis direction and a moment around the Z-axis.

[0020] Alternatively, four pin units 101-39 may be provided, which can function as temporary storage areas when retrieving a wafer from the fine movement stage 101 and when placing the wafer on the fine movement stage 101-1. Three or more pin units 101-39 are desirable for stable temporary placement of a wafer, but at least one is sufficient for transfer. The pin unit 101-39 has an elevation mechanism that raises and lowers the pins on which the wafer is temporarily placed or placed. The pin unit 101-39 can have the function of driving the pins so that their upper ends protrude from the top surface of the fine movement stage 101-1 in a first state, and so that their upper ends retract below the top surface of the fine movement stage 101-1 in a second state. In the operation of placing a wafer on fine movement stage 101-1, pin unit 101-39 receives the wafer from a transfer mechanism (not shown) in the first state, and then transfers the wafer on the pins to fine movement stage 101-1 in the process of transitioning to the second state. In the operation of transferring a wafer placed on fine movement stage 101-1 to a transfer mechanism (not shown), pin unit 101-39 transitions the pins from the second state to the first state. In this process, pin unit 101-39 receives the wafer placed on fine movement stage 101-1 with the pins, and transfers it to the transfer mechanism (not shown) in the first state.

[0021] Fine movement stage device 101 does not need to be equipped with pin unit 101-39, in which case wafers can be transferred to and from a transfer mechanism (not shown) by driving fine movement stage 101-1 to an upper position using fine movement ZLM 101-6.

[0022] 5 shows an example of the detailed configuration of the coarse movement stage device, in particular the X-slider 102, Y-slider 103, and XY-slider 104. XY-slider 104 can include an XY-slider lower part 104-3, an XY-slider middle part 104-2, and an XY-slider upper part 104-1. XY-slider lower part 104-3 is supported on stage base 105 so as to be slidable in the X and Y directions, with XY-slider middle part 104-2 arranged thereon and XY-slider upper part 104-1 arranged thereon.

[0023] The X-slider 102 may include an X beam 102-1, two X feet 102-2, and two X yaw guides 102-3. The two X yaw guides 102-3 may be fixed to two side surfaces of the stage base 105. The two X feet 102-2 may be connected by the X beam 102-1. One X foot 102-2 may face a side surface of one X yaw guide 102-3 and the upper surface of the stage base 105 via a gap, and may be supported so as to be slidable in the X-axis direction. The other X foot 102-2 may face a side surface of the other X yaw guide 102-3 and the upper surface of the stage base 105 via a gap, and may be supported so as to be slidable in the X-axis direction. In this way, the integrated unit of the X beam 102-1 and the two X feet 102-2 may be arranged so as to be slidable in the X-axis direction. Furthermore, both side surfaces of the X beam 102-1 slidably face the inner surface of the XY slider middle part 104-2 via a minute gap, and can restrain the XY slider 104 slidably in the X and Y directions.

[0024] The Y slider 103 may include a Y beam 103-1, a Y foot 103-2, and a Y yaw guide 103-3. The two Y yaw guides 103-3 may be fixed to two side surfaces of the stage base 105, and the two Y feet 103-2 may be connected by the Y beam 103-1. One Y foot 103-2 may face a side surface of one Y yaw guide 103-3 and the upper surface of the stage base 105 via a gap, and be supported so as to be slidable in the Y axis direction. The other Y foot 103-2 may face a side surface of the other Y yaw guide 103-3 and the upper surface of the stage base 105 via a gap, and be supported so as to be slidable in the Y axis direction. This allows the Y beam 103-1 and the two Y feet 103-2 as a unit to be slidable in the X axis direction. Furthermore, both side surfaces of Y beam 103-1 slidably face the inner surface of XY slider upper part 104-1 via a minute gap, and can restrain XY slider 104 slidably in the X and Y directions.

[0025] 6 exemplarily illustrates a detailed configuration of the coarse motion linear motor 106. The coarse motion linear motor 106 may include a plurality of linear motor coils 106-1, a coil support plate 106-2, a support column 106-3, a coil base 106-4, two linear motor magnets 106-5, a yoke 106-6, two spacers 106-7, and an arm 106-8.

[0026] The multiple linear motor coils 106-1 may be two-phase coil units in which adjacent linear motor coils 106-1 are out of phase with each other by 90 degrees. The multiple linear motor coils 106-1 may be fixed to a coil support plate 106-2 and fixed to a coil base 106-4 via supports 106-3. The coil base 106-4 may be fixed to the stage surface plate 692, or may be supported by the stage surface plate 692 so as to be slidable in the coil arrangement direction. A configuration in which the coil base 106-4 is supported so as to be slidable can absorb reaction to acceleration. The two linear motor magnets 106-5 may each be a four-pole magnet unit, and may be arranged so as to sandwich the linear motor coil 106-1 from above and below with an air gap between them.

[0027] A yoke 106-6 may be disposed behind each linear motor magnet 106-5. A spacer 106-7 may be used to maintain a gap between the two linear motor magnets 106-5 against the attractive force. The structure consisting of the linear motor magnets 106-5, yoke 106-6, and spacer 106-7 may be fixed to the X foot 102-2 or Y foot 103-2 via an arm 106-8. This structure may impart thrust in the X-axis and Y-axis directions to the combined X beam and two X feet or the combined Y beam and two Y feet. In this configuration, a continuous force may be generated by passing a sinusoidal current according to the position through the coil facing the magnet out of the two-phase coils.

[0028] FIG. 7 exemplarily shows a shot layout diagram, which is an arrangement of multiple shot areas on a wafer 700. Shot areas 701 with sizes Sx and Sy in the X-axis and Y-axis directions, respectively, can be arranged on the wafer 700. Scan exposure of the multiple shot areas 701 is performed, for example, along a step-scan trajectory. During scan exposure, the fine movement stage 101-1 can be driven to scan in the Y-axis direction by a scan amount that is 1 / projection magnification of the scan amount of the reticle stage in synchronization with the reticle stage. After scan exposure is completed, the fine movement stage 101-1 can perform a U-turn in the Y-axis direction while stepping in the X-axis direction to perform scan exposure of the next shot area. Using an electromagnet to accelerate the fine movement stage 101-1 and a linear motor for position control allows for both high-precision position control and low heat generation.

[0029] When fine movement stage 101-1 is accelerated, a moment may act on fine movement stage 101-1. If fine movement ZLM 101-6 is operated to offset this moment, this may increase heat generation from fine movement ZLM 101-6. This heat generation may cause deformation of fine movement stage 101-1, and this deformation may result in a decrease in overlay accuracy.

[0030] To suppress heat generation from the fine movement ZLM 101-6, it is effective to reduce the moment acting on fine movement stage 101-1 when accelerating fine movement stage 101-1. To reduce the moment acting on fine movement stage 101-1 when accelerating fine movement stage 101-1, it is effective to reduce the distance between the fine movement XLM 101-4, fine movement YLM 101-5, fine movement ZLM 101-6 and the center of gravity of fine movement stage 101-1. To achieve this, it is advantageous to reduce the height of fine movement electromagnet 101-3 above fine movement base 101-2.

[0031] 8, 9, and 10 show an example of the configuration of the fine movement electromagnet 101-3 incorporated into the exposure apparatus or wafer stage apparatus 500 of the first embodiment. The fine movement electromagnet 101-3 of the first embodiment has an advantageous structure for reducing the moment acting on the fine movement stage 101-1 when accelerating the fine movement stage 101-1. The fine movement electromagnet 101-3 can include a fixed iron core (first member) SC, a support member 101-30 that supports the fixed iron core SC, a movable iron core (second member) MC, a support member 101-31 that supports the movable iron core MC, and a coil 101-36. The support member 101-30 fixes the fixed iron core SC to a fine movement base 101-2 that serves as the coarse movement stage, and the support member 101-31 fixes the movable iron core MC to the fine movement stage 101-1. The coil 101-36 is wound around the fixed iron core SC. The central axis of coil 101-36 may be parallel to the XY plane (the plane on which fine movement base 101-2, which serves as a coarse movement stage, moves). Fixed core SC has a first end face facing movable core MC, and the distance between wafer 700 held by fine movement stage 101-1 and the central axis of coil 101-36 may be greater than the distance between wafer 700 held by fine movement stage 101-1 and the center of the first end face.

[0032] In the examples of FIGS. 8, 9, and 10, four support members 101-30 are fixed on the fine movement base 101-2, and a fixed core SC is placed on each of them. A coil 101-36 can be wound around each fixed core SC. The fixed core SC and the movable core MC face each other across a small gap. Here, the shortest distance Hcw between the wafer (substrate) 700 held by the fine movement stage 101-1 and the coil 101-36 is greater than the shortest distance Hew between the wafer (substrate) 700 held by the fine movement stage 101-1 and the fixed core SC. This configuration can be achieved, for example, by having the fixed core SC have a crank shape in a cross section perpendicular to the XY plane and parallel to the central axis of the coil 101-36. By making Hcw > Hew, the fixed core SC can be positioned vertically lower than in the configurations shown in FIGS. 4 and 35. This allows the height of fine movement electromagnet 101-3 above fine movement base 101-2 to be reduced.

[0033] 8, 9, and 10, the moment M acting on fine movement stage 101-1 when fine movement stage 101-1 of mass m is accelerated at acceleration a is M = m·a·(hg+hu+he). On the other hand, in the configurations shown in FIGS. 4 and 35, the moment M acting on fine movement stage 101-1 when fine movement stage 101-1 of mass m is accelerated at acceleration a is M = m·a·(hg+hu+he+hc). Therefore, in the configurations shown in FIGS. 8, 9, and 10, the moment M acting on fine movement stage 101-1 when fine movement stage 101-1 of mass m is accelerated at acceleration a is reduced by m·a·hc compared to the configurations shown in FIGS. 4 and 35. This allows the heat generated by fine movement stage 101-6 to be reduced by operating fine movement stage ZLM 101-6 to offset the moment. This is advantageous for suppressing deformation of the fine movement stage 101-1 and further suppressing deterioration of overlay accuracy. hg is the Z-axis distance between the center of gravity G of the structure consisting of the fine movement stage 101-1 and the components that move with the fine movement stage 101-1 (such as the movable iron core MC and support member 101-31) and the lower surface of the fine movement stage 101-1 (the surface on the fine movement base 101-2 side). hu is the Z-axis distance between the lower surface of the fine movement stage 101-1 and the upper end of the fine movement electromagnet 101-3 (the end on the fine movement stage 101-1 side). he is the Z-axis distance between the upper end of the fixed iron core SC and the point of action of the fine movement electromagnet 101-3. hc is the Z-axis distance between the upper end of the coil 101-36 (the end on the fine movement stage 101-1 side) and the upper end of the fixed iron core SC.

[0034] FIG. 34 shows an example of the configuration of the fixed core SC. In the example of FIG. 34, the fixed core SC is composed of a laminate of multiple electromagnetic steel sheets, stacked in the Z-axis direction. Each electromagnetic steel sheet is coated with an insulating film. In FIG. 34, the direction of magnetic flux in the magnetic circuit is indicated by a black arrow, and the magnetic flux flows through a three-dimensional path. The magnetic flux flowing in the Z-axis direction is indicated by a thick black arrow. Because the direction of the thick black arrow is parallel to the normal direction of the electromagnetic steel sheets, eddy currents generated by changes in current flow along the surfaces of the electromagnetic steel sheets and are not suppressed. Therefore, large eddy currents can occur, as shown by the thick white arrows. This heats the fixed core SC, and the heat is transferred to the fine movement stage 101-1, causing deformation of the fine movement stage 101-1 and potentially reducing overlay accuracy. Furthermore, because the magnetic flux in the Z-axis direction indicated by the thick black arrow is parallel to the normal direction of the electromagnetic steel sheets, it can result in large magnetic resistance, a reduced magnetic flux value, and reduced magnetic attraction force.

[0035] An improved example of the fine-motion electromagnet 101-3 incorporated in the exposure apparatus or wafer stage apparatus 500 of the first embodiment will be described below.

[0036] 11 exemplarily shows the configuration of an improved example of the fine electromagnet 101-3 of the first embodiment. The fine electromagnet 101-3 may include a fixed core (first member) SC, a support member 101-30 that supports the fixed core SC, a movable core (second member) MC, a support member 101-31 that supports the movable core MC, and a coil 101-36. The fixed core (first member) SC may include a first element 101-32, a second element 101-33, a third element 101-34, and a fourth element 101-35. The movable core (second member) MC may include element 101-38, but may also include one or more other elements in addition to element 101-38. The fixed core (first member) SC may have a first end face E1, and the movable core (second member) MC may have a second end face E2 facing the first end face E1 across a gap. In this example, the first end face E1 is provided on each of the second element 101-33, the third element 101-34, and the fourth element 101-35, and the second end face E2 is provided on the element 101-38.

[0037] The fixed core (first member) SC may be formed from a laminate of multiple electromagnetic steel sheets. Each of the multiple electromagnetic steel sheets may be coated with an insulating film. From another perspective, each of the first element 101-32, the second element 101-33, the third element 101-34, and the fourth element 101-35 constituting the fixed core (first member) SC may be formed from a laminate of multiple electromagnetic steel sheets. The movable core (second member) MC may be formed from a laminate of multiple electromagnetic steel sheets. From another perspective, element 101-38, which is at least one element constituting the movable core (second member) MC, may be formed from a laminate of multiple electromagnetic steel sheets. Each of the multiple electromagnetic steel sheets may be coated with an insulating film.

[0038] The magnetic circuit formed by the fixed core (first member) SC, the movable core (second member) MC, and the gap (the space between the first end face E1 and the second end face E2) may include at least one transition portion CP where the lamination direction of the laminate of multiple electromagnetic steel sheets changes at a right angle. The transition portion CP may include a contact portion between a first portion (e.g., first element 101-32) whose lamination direction is in a first direction (e.g., the Z-axis direction) and a second portion (e.g., third element 101-34) whose lamination direction is in a second direction (e.g., the X-axis direction) perpendicular to the first direction. The transition portion CP may include a portion where the first portion (e.g., first element 101-32) whose lamination direction is in the first direction faces the second portion (e.g., the third element 101-34) whose lamination direction is in the second direction perpendicular to the first direction, via a solid member. The solid member may be, for example, an insulating film that covers each of the multiple electromagnetic steel sheets.

[0039] In the improved example of FIG. 11, the change portion CP is provided on the fixed iron core (first member) SC. Also, in the improved example of FIG. 11, the change portion CP includes a portion where the fixed iron core (first member) SC and the movable iron core (second member) MC face each other with a gap between them. The latter configuration may be understood as a configuration in which, of the first and second portions that make up the change portion CP, the first portion is provided on the fixed iron core (first member) SC and the second portion is provided on the movable iron core (second member) MC. The change portion CP may be provided in addition to the movable iron core (second member) MC, or may be provided only on the movable iron core (second member) MC.

[0040] Each of the fixed core (first member) SC and the movable core (second member) MC may be composed of at least one stacked core. Alternatively, at least one of the fixed core (first member) SC and the movable core (second member) MC may be composed of multiple stacked cores. Such multiple stacked cores may be arranged close to each other and fixed by a fixing member. The stacked core may be composed of stacked electromagnetic steel sheets of the same shape.

[0041] The first element 101-32, the second element 101-33, the third element 101-34, and the fourth element 101-35 may be configured as a stacked core. The first element 101-32, the second element 101-33, the third element 101-34, and the fourth element 101-35 may be integrated using an adhesive or by fastening using clamping components. In this example, at least one transition portion CP is provided on the fixed core (first member) SC, and the coil 101-36 is wound around the fixed core (first member) SC. The coil 101-36 may be wound around a portion of the fixed core (first member) SC other than the portion where the transition portion CP is located. By passing a current through the coil 101-36, an attractive force is generated between the first end face E1 and the second end face E2. In the refinement of FIG. 11, the first element 101-32 has an E-shape, and the coil 101-36 is wound around the central tooth of the first element 101-32.

[0042] The change portion CP is provided so that magnetic flux passing through the magnetic circuit formed by the fixed core (first member) SC, the movable core (second member) MC, and the air gap does not flow in the stacking direction of the multiple electromagnetic steel sheets that make up the fixed core (first member) SC and the movable core (second member) MC. Alternatively, the change portion CP can be provided so that the magnetic flux passing through the fixed core (first member) SC and the movable core (second member) MC flows along the surface direction of each electromagnetic steel sheet. Alternatively, the change portion CP can be provided so that the magnetic resistance of the magnetic circuit formed by the fixed core (first member) SC, the movable core (second member) MC, and the air gap is smaller than when the change portion CP is not provided. Alternatively, the change portion CP can be provided so that eddy currents generated in the magnetic circuit formed by the fixed core (first member) SC, the movable core (second member) MC, and the air gap are smaller than when the change portion CP is not provided.

[0043] Constructing a magnetic circuit using an iron core including a transition portion CP is advantageous for increasing the degree of freedom in the shape of the magnetic circuit. Furthermore, constructing an iron core, such as a fixed iron core (first member) SC and a movable iron core (second member) MC, from multiple elements can facilitate the manufacture of iron cores with complex shapes and can also facilitate the installation and replacement of coils. A configuration in which multiple elements are fastened with clamping members is particularly advantageous for facilitating the replacement of coils.

[0044] FIG. 12 exemplarily illustrates the configuration of another improved example of the fine electromagnet 101-3 of the first embodiment. Matters not mentioned here may follow the configuration of the improved example illustrated in FIG. 11. The fine electromagnet 101-3 may include a fixed core (first member) SC, a support member 101b-30 supporting the fixed core SC, a movable core (second member) MC, a support member (not shown) supporting the movable core MC, and a coil 101-36. The fixed core (first member) SC may include a first element 101b-32, a second element 101b-33, a third element 101b-34, and a fourth element 101b-35. The movable core (second member) MC may include the element 101-38, but may also include one or more other elements in addition to the element 101-38. 8, the fixed core (first member) SC may have a first end face, and the movable core (second member) MC may have a second end face facing the first end face across a gap. In this example, the second element 101b-33, the third element 101b-34, and the fourth element 101b-35 each have a first end face, and the second end face is provided on the element 101-38. In the improved example of FIG. 12, the second element 101b-33, the third element 101b-34, and the fourth element 101b-35 each have a crank shape in a cross section perpendicular to the XY plane and parallel to the central axis of the coil 101-36, and the first element 101b-32 has a rectangular parallelepiped shape.

[0045] 13, 14, and 15 exemplify the configuration of a fine movement electromagnet 101-3 incorporated into an exposure apparatus or wafer stage apparatus 500 of the second embodiment. Matters not mentioned in the second embodiment may follow the first embodiment. The fine movement electromagnet 101-3 of the second embodiment has an advantageous structure for reducing the moment acting on the fine movement stage 101-1 when accelerating the fine movement stage 101-1. The fine movement electromagnet 101-3 may include a fixed iron core (first member) SC, a support member 101-30 that supports the fixed iron core SC, a movable iron core (second member) MC, a support member 101-31 that supports the movable iron core MC, and a coil 101-36. The support member 101-30 fixes the fixed iron core SC to a fine movement base 101-2 that serves as a coarse movement stage, and the support member 101-31 fixes the movable iron core MC to the fine movement stage 101-1. The coil 101-36 is wound around the fixed core SC. The central axis of the coil 101-36 may be disposed at an angle inclined with respect to the XY plane (the plane on which the fine movement base 101-2 serving as the coarse movement stage moves). Similarly, at least the portion of the fixed core SC around which the coil 101-36 is wound may include a portion extending in a direction inclined with respect to the XY plane. As in the improved example of the first embodiment, the fixed core SC preferably includes a transition portion CP.

[0046] 16, 17, and 18 exemplarily show the configuration of a fine movement electromagnet 101-3 incorporated into an exposure apparatus or wafer stage apparatus 500 of the third embodiment. Matters not mentioned in the third embodiment may follow the first embodiment. The fine movement electromagnet 101-3 of the third embodiment has an advantageous structure for reducing the moment acting on the fine movement stage 101-1 when accelerating the fine movement stage 101-1. The fine movement electromagnet 101-3 may include a fixed iron core (first member) SC, a support member 101-30 that supports the fixed iron core SC, a movable iron core (second member) MC, a support member 101-31 that supports the movable iron core MC, and a coil 101-36. The support member 101-30 fixes the fixed iron core SC to a fine movement base 101-2 that serves as a coarse movement stage, and the support member 101-31 fixes the movable iron core MC to the fine movement stage 101-1. Coil 101-36 is wound around fixed core SC. The central axis of coil 101-36 may be positioned at a perpendicular angle to the XY plane (the plane in which fine movement base 101-2, which serves as a coarse movement stage, moves). In a cross section perpendicular to the XY plane and parallel to the central axis of coil 101-36, fixed core SC may include an L-shaped portion. Fine movement base 101-2 may have an opening, and a portion of fine movement electromagnet 101a-3 may be disposed within the opening.

[0047] Below, an improved example of the fine movement electromagnet 101-3 incorporated in the exposure apparatus or wafer stage apparatus 500 of the third embodiment will be described. Matters not mentioned here may follow the improved example of the first embodiment. Figures 19 and 20 show, by way of example, the configuration of the improved example of the fine movement electromagnet 101-3 of the third embodiment. Note that Figure 20 shows, by way of example, the configuration of the fine movement electromagnet 101-3 with the fine movement base 101-2 removed.

[0048] In this improved example, four openings 301-21 are provided in the fine movement base 101-2, and a portion of each fine movement electromagnet 101-3 can be disposed in the corresponding opening 301-21. A portion of each of the four fine movement electromagnets 101-3 can be disposed below the fine movement base 101-2. Each fine movement electromagnet 101-3 can be supported by the fine movement base 101-2 via a support member 301-30. This configuration is advantageous for reducing the height of the fine movement electromagnet 101-3 above the fine movement base 101-2 and for reducing the dimensions of the fine movement electromagnet 101-3 in the X and Y directions.

[0049] The fine-motion electromagnet 101-3 may include a fixed core (first member) SC, a support member 301-30 supporting the fixed core SC, a movable core (second member) MC, a support member 101-31 supporting the movable core MC, and a coil 301-36. The fixed core (first member) SC may include a first element 301-32, a second element 301-33, a third element 301-34, and a fourth element 301-35. The movable core (second member) MC may include element 101-38, but may also include one or more other elements in addition to element 101-38. The fixed core (first member) SC has a first end face E1, and the movable core (second member) MC may have a second end face E2 facing the first end face E1 with a gap therebetween. In this example, the first end face E1 is provided on each of the second element 301-33, the third element 301-34, and the fourth element 301-35, and the second end face E2 is provided on the element 101-38.

[0050] The fixed core (first member) SC may be formed from a laminate of multiple electromagnetic steel sheets. Each of the multiple electromagnetic steel sheets may be coated with an insulating film. From another perspective, each of the first element 301-32, the second element 301-33, the third element 301-34, and the fourth element 301-35 constituting the fixed core (first member) SC may be formed from a laminate of multiple electromagnetic steel sheets. The movable core (second member) MC may be formed from a laminate of multiple electromagnetic steel sheets. From another perspective, element 101-38, which is at least one element constituting the movable core (second member) MC, may be formed from a laminate of multiple electromagnetic steel sheets. Each of the multiple electromagnetic steel sheets may be coated with an insulating film.

[0051] The magnetic circuit formed by the fixed core (first member) SC, the movable core (second member) MC, and the gap (the space between the first end face E1 and the second end face E2) may include at least one transition portion CP where the lamination direction of the laminate of multiple electromagnetic steel sheets changes at a right angle. The transition portion CP may include a contact portion between a first portion (e.g., first element 301-32) whose lamination direction is in a first direction (e.g., the Y-axis direction) and a second portion (e.g., third element 301-34) whose lamination direction is in a second direction (e.g., the X-axis direction) perpendicular to the first direction. The transition portion CP may include a portion where the first portion (e.g., first element 301-32) whose lamination direction is in the first direction faces the second portion (e.g., the third element 301-34) whose lamination direction is in the second direction perpendicular to the first direction, via a solid member. The solid member may be, for example, an insulating film that covers each of the multiple electromagnetic steel sheets.

[0052] In the examples of FIGS. 19 and 20, the change portion CP is provided on the fixed core (first member) SC. Also, in the examples of FIGS. 19 and 20, the change portion CP includes a portion where the fixed core (first member) SC and the movable core (second member) MC face each other with a gap between them. The latter configuration may be understood as a configuration in which, of the first and second portions constituting the change portion CP, the first portion is provided on the fixed core (first member) SC and the second portion is provided on the movable core (second member) MC. The change portion CP may be provided in addition to the movable core (second member) MC, or may be provided only on the movable core (second member) MC. In the examples of FIGS. 19 and 20, the second element 301-33, the third element 301-34, and the fourth element 301-3 have an L-shape, and the first element 301-32 has a rectangular parallelepiped shape.

[0053] 21 exemplarily illustrates the configuration of another improved example of the fine electromagnet 101-3 of the third embodiment. The fine electromagnet 101-3 may include a fixed core (first member) SC, a support member 201a-30 that supports the fixed core SC, a movable core (second member) MC, a support member 101-31 that supports the movable core MC, and a coil 201a-36. The fixed core (first member) SC may include a first element 201a-32, a second element 201a-33, a third element 201a-34, and a fourth element 201a-35. The movable core (second member) MC may include element 101-38, but may also include one or more other elements in addition to element 101-38. The fixed core (first member) SC may have a first end face E1, and the movable core (second member) MC may have a second end face E2 facing the first end face E1 across a gap. In this example, the first end face E1 is provided on each of the second element 201a-33, the third element 201a-34, and the fourth element 201a-35, and the second end face E2 is provided on the element 101-38. In the improved example of FIG. 21, the first element 201a-32 has an E-shape, and the coil 201a-36 is wound around the central tooth of the first element 201a-32. In the improved example of FIG. 21, the second element 201a-33, the third element 201a-34, and the fourth element 201a-35 have a rectangular parallelepiped shape.

[0054] Hereinafter, a method for assembling or manufacturing the improved fine electromagnet 101-3 of FIG. 21 will be described with reference to FIGS. 27 to 31. FIG. 27 shows an exploded view of the improved fine electromagnet 101-3 of FIG. 21. The first element 201a-32 and the support member 201a-30 can be joined by adhesive, clamps, fitting, etc. The coil 201a-36 and the coil base 201a-42 can be joined by an adhesive, etc. The second element 201b-33, the third element 201b-34, and the fourth element 201b-35 can be joined by adhesive, clamps, fitting, etc. via the tip part spacer 201a-40.

[0055] 28, the first element 201a-32 is inserted into the opening 201a-21 of the fine adjustment base 101-2, and the combination of the first element 201a-32 and the support member 201a-30 is positioned on the fine adjustment base 101-2. The support member 201a-30 can then be fixed to the fine adjustment base 101-2. The support member 201a-30 can be fixed to the fine adjustment base 101-2 by, for example, screw fastening, adhesive, clamping, or fitting.

[0056] Next, as illustrated in Fig. 29, the combination of coil 201a-36 and coil base 201a-42 can be positioned on fine adjustment base 101-2, and coil base 201a-42 can be fixed to fine adjustment base 101-2. Coil base 201a-42 can be fixed to fine adjustment base 101-2 by, for example, screw fastening, adhesive, clamping, fitting, etc.

[0057] Next, as illustrated in FIG. 30, the tip part base 201a-41 can be fixed to the fine adjustment base 101-2 by, for example, screwing, adhesive, clamping, fitting, or the like.

[0058] Next, as illustrated in Figure 31, the second element 201b-33, the third element 201b-34, the fourth element 201b-35 and the combination of the second element 201b-33, the third element 201b-34 and the fourth element 201b-35 can be fixed to the end parts base 201a-41. This can be done by fixing the end parts spacer 201a-40 to the end parts base 201a-41 by screwing, adhesive, clamping, fitting, etc.

[0059] The replacement of the coil 201a-36 can be performed by reversing the above procedure to return to the state shown in Figure 28, fixing a new coil 201a-36 to the fine adjustment base 101-2 as illustrated in Figure 29, and then performing the procedure illustrated in Figures 30 and 31.

[0060] When forming the stationary core SC by joining multiple elements, for example, at the boundary between two elements (for example, the boundary between the second element 201a-33 and the first element 201a-32), there is a concern that a slight relative displacement may occur between the two elements along the boundary surface, resulting in the generation of particles. To address this, a coating to prevent particles may be applied to the boundary surface, a collection pan may be provided near the boundary surface, or a collection magnet may be provided near the boundary surface. Furthermore, when fixing the tip component spacer 201a-40 to the tip component base 201a-41, a thin spacer may be inserted between them to maintain a non-contact state between the first element 201a-32 and the second element 201a-33, the third element 201a-34, and the fourth element 201a-35.

[0061] An exposure apparatus and fine electromagnet 101-3 according to the fourth embodiment will be described below. Matters not mentioned in the fourth embodiment may conform to the first to third embodiments. FIG. 22 shows an exemplary configuration of the fine electromagnet 101-3 according to the fourth embodiment. The fine electromagnet 101-3 may include a fixed core (first member) SC, a support member 301a-30 that supports the fixed core SC, a movable core (second member) MC, a support member 301a-31 that supports the movable core MC, and a coil 301a-36. The fixed core (first member) SC may include a first element 301a-32, a second element 301a-37, a third element 301a-33, a fourth element 301a-34, and a fifth element 301a-35. The movable core (second member) MC may include the element 301a-38, but may also include one or more other elements in addition to the element 301a-38. The fixed core (first member) SC has a first end face E1, and the movable core (second member) MC may have a second end face E2 that faces the first end face E1 across a gap. In this example, the first end face E1 is provided on each of the third element 301a-33, the fourth element 301a-34, and the fifth element 301a-35, and the second end face E2 is provided on the element 301a-38.

[0062] The stator core (first member) SC may be formed of a laminate of multiple electromagnetic steel sheets. Each of the multiple electromagnetic steel sheets may be coated with an insulating film. From another perspective, the third element 301a-33, the fourth element 301a-34, and the fifth element 301a-35, which constitute a portion of the stator core (first member) SC, may be formed of a stacked core in which multiple electromagnetic steel sheets are stacked. Furthermore, the first element 301a-32 and the second element 301a-37, which constitute another portion of the stator core (first member) SC, may be formed of a wound core that may be formed by winding electromagnetic steel sheets. Note that, when used as a component that constitutes the stator core (first member) SC, the wound core has one form of a structure in which multiple electromagnetic steel sheets are stacked. The movable core (second member) MC may be formed of a stacked core in which multiple electromagnetic steel sheets are stacked. From another perspective, at least one element 301a-38 constituting the movable core (second member) MC may be formed from a laminate of multiple electromagnetic steel sheets, each of which may be coated with an insulating film.

[0063] The magnetic circuit formed by the fixed core (first member) SC, the movable core (second member) MC, and the gap (the space between the first end face E1 and the second end face E2) may include transition portions CP, CP' where the lamination direction of the laminate of multiple electromagnetic steel sheets changes at a right angle. The transition portion CP may include a contact portion between a first portion (e.g., the fifth element 301a-38) whose lamination direction is in a first direction (e.g., the Z-axis direction) and a second portion (e.g., the second element 301a-37) whose lamination direction is in a second direction (e.g., the X-axis direction) perpendicular to the first direction. The transition portion CP may include a portion where the first portion (e.g., the fifth element 301a-38) whose lamination direction is in the first direction faces the second portion (e.g., the second element 301a-37) whose lamination direction is in the second direction perpendicular to the first direction, via a solid member. The solid member may be, for example, an insulating film that covers each of the multiple electromagnetic steel sheets. The transition portion CP' includes a portion where the lamination direction gradually changes from a first direction (e.g., the X-axis direction) to a second direction (e.g., the Z-axis direction) perpendicular to the first direction. The transition portion CP' including the portion where the lamination direction gradually changes may be part of a wound core. The fixed core (first member) SC includes a first portion P1 whose lamination direction is the first direction (e.g., the X-axis direction) and a second portion P2 whose lamination direction is the second direction (e.g., the Z-axis direction), and the lamination direction gradually changes between the first portion P1 and the second portion P2. The transition portion CP' is the portion between the first portion P1 and the second portion P2.

[0064] 22, the change portions CP, CP' are provided on the fixed core (first member) SC. At least one of the change portions CP and CP' may be provided in addition to the movable core (second member) MC, or may be provided only on the movable core (second member) MC. One of the fixed core (first member) SC and the movable core (second member) MC may be composed of at least one stacked core, and the other of the fixed core (first member) SC and the movable core (second member) MC may be composed of a wound core, and the change portion may be composed of a wound core.

[0065] The first element 301a-32, the second element 301a-37, the third element 301a-33, the fourth element 301a-34, and the fifth element 301a-35 may be integrated using an adhesive or by fastening using clamping components. In this example, the transition portions CP and CP' are provided on the fixed core (first member) SC, and the coil 301a-36 is wound around the fixed core (first member) SC. The coil 301a-36 may be wound around a portion of the fixed core (first member) SC that is different from the portion where the transition portions CP and CP' are located. By passing a current through the coil 301a-36, an attractive force is generated between the first end face E1 and the second end face E2. In the example of Figure 22, the first element 301a-32 and the second element 301a-37 have a U-shape, and the coil 301a-36 is wound around a portion where one tooth of the first element 301a-32 and one tooth of the second element 301a-37 are integrated.

[0066] The transition portions CP and CP' are arranged so that magnetic flux passing through the magnetic circuit formed by the fixed core (first member) SC, the movable core (second member) MC, and the air gap does not flow in the stacking direction of the multiple electromagnetic steel sheets that make up the fixed core SC and the movable core MC. Alternatively, the transition portions CP and CP' can be arranged so that the magnetic flux passing through the fixed core SC and the movable core MC flows along the surface direction of each electromagnetic steel sheet. Alternatively, the transition portions CP and CP' can be arranged so that the magnetic resistance of the magnetic circuit formed by the fixed core (first member) SC, the movable core (second member) MC, and the air gap is smaller than if the transition portions CP and CP' are not present. Alternatively, the transition portions CP and CP' can be arranged so that eddy currents generated in the magnetic circuit formed by the fixed core (first member) SC, the movable core (second member) MC, and the air gap are smaller than if the transition portions CP and CP' are not present.

[0067] 22, the stacking direction (Z-axis direction) of the third element 301a-33, the fourth element 301a-34, and the fifth element 301a-35 having the first end face E1 is the same as the stacking direction (Z-axis direction) of the element 301a-38 having the second end face E2, which can contribute to reducing the magnetic resistance near the air gap and increasing the magnetic flux.

[0068] 22, the stacking direction of the third element 301a-33, the fourth element 301a-34, and the fifth element 301a-35 may be set to the X-axis direction. This configuration can contribute to reducing the magnetic resistance near the boundaries between the third element 301a-33, the fourth element 301a-34, and the fifth element 301a-35 and the first element 301a-32 and the second element 301a-37, and increasing the magnetic flux.

[0069] FIG. 23 exemplarily illustrates the configuration of a modified example of the fine electromagnet 101-3 of the fourth embodiment. Items not mentioned as modifications may follow the configuration of the fourth embodiment illustrated in FIG. 22. The fine electromagnet 101-3 may include a fixed core (first member) SC, a support member 301b-30 that supports the fixed core SC, a movable core (second member) MC, a support member 301b-31 that supports the movable core MC, and a coil 301b-36. The fixed core (first member) SC may include a first element 301b-32 and a second element 301b-33. The movable core (second member) MC may include a third element 301b-37 and a fourth element 301b-38. The fixed core (first member) SC may have a first end face E1, and the movable core (second member) MC may have a second end face E2 facing the first end face E1 across a gap. In this example, the first end face E1 is provided on each of the first element 301b-32 and the second element 301b-33, and the second end face E2 is provided on each of the third element 301b-37 and the fourth element 301b-38.

[0070] The stator core (first member) SC may be formed from a laminate of multiple electromagnetic steel sheets. Each of the multiple electromagnetic steel sheets may be coated with an insulating film. From another perspective, the first element 301b-32 and the second element 301b-33 constituting part of the stator core (first member) SC may be formed from a laminate of multiple electromagnetic steel sheets. Note that when used as a component constituting the stator core (first member) SC, the wound core also has a structure in which multiple electromagnetic steel sheets are laminated. The movable core (second member) MC may be formed from a laminate of multiple electromagnetic steel sheets. From another perspective, the third element 301b-37 and the fourth element 301b-38 constituting the movable core (second member) MC may be formed from a laminate of multiple electromagnetic steel sheets. Each of the multiple electromagnetic steel sheets may be coated with an insulating film.

[0071] The magnetic circuit formed by the fixed iron core (first member) SC, the movable iron core (second member) MC, and the gap (the space between the first end face E1 and the second end face E2) may include transition portions CP', CP" where the lamination direction of a laminate of multiple electromagnetic steel sheets changes at a right angle. In this example, the transition portion CP' is provided in the fixed iron core (first member) SC, and the transition portion CP" is provided in the movable iron core (second member) MC.

[0072] The transition portion CP' includes a portion where the lamination direction gradually changes from a first direction (e.g., the X-axis direction) to a second direction (e.g., the Z-axis direction) perpendicular to the first direction. The transition portion CP' including the portion where the lamination direction gradually changes may be part of a wound core. The fixed core (first member) SC includes a first portion P1 whose lamination direction is the first direction (e.g., the X-axis direction) and a second portion P2 whose lamination direction is the second direction (e.g., the Z-axis direction), and the lamination direction gradually changes between the first portion P1 and the second portion P2. The transition portion CP' is the portion between the first portion P1 and the second portion P2.

[0073] The movable core (second member) MC includes a third portion P3 whose lamination direction is a first direction (e.g., the X-axis direction) and a fourth portion P4 whose lamination direction is a second direction (e.g., the Y-axis direction), and the lamination direction gradually changes between the third portion P3 and the fourth portion P4. The changing portion CP″ is the portion between the third portion P3 and the fourth portion P4.

[0074] By passing a current through the coil 301b-36, an attractive force is generated between the first end face E1 and the second end face E2. In the example of Fig. 23, the first element 301b-32 and the second element 301b-33 have a U-shape, and the coil 301b-36 is wound around a portion where one tooth of the first element 301a-32 and one tooth of the second element 301a-37 are integrated.

[0075] The changing portions CP', CP" are arranged so that magnetic flux passing through the magnetic circuit formed by the fixed core (first member) SC, the movable core (second member) MC, and the gap does not flow in the stacking direction of the multiple electromagnetic steel plates that make up the fixed core SC and the movable core MC. Alternatively, the changing portions CP', CP" can be arranged so that the magnetic flux passing through the fixed core SC and the movable core MC flows along the surface direction of each electromagnetic steel plate. Alternatively, the changing portions CP', CP" can be arranged so that the magnetic resistance of the magnetic circuit formed by the fixed core (first member) SC, the movable core (second member) MC, and the gap is smaller than if the changing portions CP', CP" are not present. Alternatively, the changing portions CP', CP" can be arranged so that eddy currents generated in the magnetic circuit formed by the fixed core (first member) SC, the movable core (second member) MC, and the gap are smaller than if the changing portions CP', CP" are not present.

[0076] 23, the lamination direction (X-axis direction) of the first element 301b-32 and the second element 301b-33 at the first end face E1 is the same as the lamination direction (X-axis direction) of the third element 301b-37 and the fourth element 301b-38 at the second end face E2. This can contribute to reducing magnetic resistance near the gap and increasing magnetic flux. Also, in the example of FIG. 23, the lamination direction does not change abruptly in the magnetic circuit formed by the fixed core (first member) SC, the movable core (second member) MC, and the gap, which is advantageous for reducing magnetic resistance and increasing magnetic flux.

[0077] 24 shows an example of the structure of a support member 301b-31 that supports the movable iron core MC. The support member 301b-31 may have a star wheel shape to support the movable iron core MC, which may be composed of a wound iron core.

[0078] Here, wound cores will be described with reference to FIG. 32. FIG. 32(a) illustrates an example of a wound core. FIG. 32(b) illustrates a wound core obtained by cutting the wound core illustrated in FIG. 32(a) by wire cutting or the like; such wound cores are also called cut cores. Wound cores can be manufactured by winding a hoop material around a core (not shown). As illustrated in FIG. 33, the hoop material can be manufactured using a slitter, also illustrated in FIG. 33. The hoop material is obtained by feeding the original coil roll in the sheet threading direction and cutting it to the desired width using a slitter with circular blades installed midway. This width is determined by the spacing between the circular blades of the slitter.

[0079] As shown in Figure 32(a), the wound core is a laminate of multiple electromagnetic steel sheets, and one wound core has multiple lamination directions. In other words, the wound core can be used as a component that constitutes the aforementioned transition section. The lamination direction is the direction that passes through a target location in the wound core in a direction perpendicular to the electromagnetic steel sheets. The width direction is the direction determined by the slitter and is also the axial direction. The axial direction is the direction parallel to all points on the widest surface of each electromagnetic steel sheet.

[0080] In one aspect, an electromagnetic device of the present invention may include a plurality of core members each composed of a stacked core or a wound core, and a coil for generating magnetic flux in the core members, wherein the lamination direction of one stacked core may be perpendicular to the width direction of another wound core, or the lamination direction of one stacked core may be perpendicular to the width direction of another wound core, or the width direction of one wound core may be perpendicular to the width direction of another wound core.

[0081] The control system of wafer stage apparatus 500 will be described below. FIG. 25 shows an example of the configuration of the control system of wafer stage apparatus 500. Movement target providing unit 5101 provides movement targets. Position profile generator 5102 generates a position profile indicating the relationship between time and the position of fine movement stage 101-1 at that time, based on the movement targets provided by movement target providing unit 5101. In addition, position profile generator 5102 generates a target position in accordance with the generated position profile. Acceleration profile generator 5103 generates an acceleration profile indicating the relationship between time and the acceleration of fine movement stage 101-1 at that time, based on the movement targets provided by movement target providing unit 5101. In addition, acceleration profile generator 5103 generates a target acceleration in accordance with the generated acceleration profile. FIG. 26 shows an example of the position profile generated by position profile generator 5102 and the acceleration profile generated by acceleration profile generator 5103.

[0082] Fine movement position sensor 5156 measures the position of fine movement stage 101-1. Fine movement position control system 5121 generates a manipulated variable by PID calculation or the like in response to the deviation between a target position given in accordance with the position profile generated by position profile generator 5102 and the current position given by fine movement position sensor 5156. Current amplifier 5122 supplies a current according to the manipulated variable generated by fine movement position control system 5121 to fine movement XLM 101-4 and fine movement YLM 101-5. This provides feedback control of fine movement stage 101-1.

[0083] The coarse position sensor 5135 measures the position of the fine movement base 101-2. The coarse position control system 5133 generates a manipulated variable by PID calculation or the like in accordance with the deviation between a target position given in accordance with the position profile generated by the position profile generator 5102 and the current position given by the coarse position sensor 5135. The current amplifier 5131 supplies a current to the coarse movement linear motor 106 in accordance with the manipulated variable generated by the coarse position control system 5133 and the target acceleration given by the acceleration profile generator 5103. This allows the fine movement base 101-2 to be feedback-controlled and feedforward-controlled.

[0084] The target acceleration generated by the acceleration profile generator 5103 is also supplied to an electromagnet current control system 5515, which controls the fine movement electromagnet 101-3 in accordance with the target acceleration. When the fine movement stage 101-1 (fine movement stage device 101) accelerates, a force is applied to the fine movement stage 101-1 mainly by the fine movement electromagnet 101-3. The fine movement XLM 101-4 and the fine movement YLM 101-5 can be controlled to generate a thrust force to reduce slight positional deviations between the target position and the measured current position. This can reduce the heat generated by the fine movement XLM 101-4 and the fine movement YLM 101-5.

[0085] The coarse position control system 5133 moves the position of the fine movement base 101-2 in accordance with the position profile generated by the position profile generator 5102. The fine movement electromagnet 101-3 is advantageous because it generates a large attractive force with very little heat generation. However, a gap must be maintained between the first end face E1 and the second end face E2 of the fine movement electromagnet 101-3. In other words, to allow the fine movement electromagnet 101-3 to continuously apply a desired force to the fine movement stage 101-1, the stator (stationary iron core and coil) of the fine movement electromagnet 101-3 must move in tandem with the movement of the fine movement stage 101-1 to maintain the gap. In addition, the heat generated by the fine movement ZLM can be reduced by reducing the height of the fine movement electromagnet 101-3 above the fine movement base 101-2. As a result, high-precision position control of the fine movement stage 101-1, reduced heat generation, and reduced overlay error can be achieved.

[0086] This is achieved by coarse position control system 5133. The coarse position, i.e., the position of fine movement base 101-2, is measured by coarse position sensor 5135, typically an encoder, and coarse position control system 5133 drives coarse linear motor 106 based on the deviation between this and a target position. As a result, the positions of fine movement stage 101-1 (the mover of fine movement electromagnet 101-3) and fine movement base 101-2 (the stator of fine movement electromagnet 101-3) are both controlled based on the output of position profile generator 5102, and the air gap is maintained. Fine position sensor 5156, which measures the position of fine movement stage 101-1, may be replaced by a sensor that measures the relative position of fine movement stage 101-1 and fine movement base 101-2.

[0087] The disclosure of the present specification includes the following transfer apparatus and article manufacturing method. (Item 1) A transfer device that transfers a pattern of an original onto a substrate, a coarse movement stage, a coarse movement actuator that drives the coarse movement stage along a predetermined plane, a fine movement stage that holds the substrate, a fine movement actuator that adjusts the position and attitude of the fine movement stage relative to the coarse movement stage, and an electromagnetic actuator that transmits, in a non-contact manner, a thrust force applied to the coarse movement stage by the coarse movement actuator to the fine movement stage; the electromagnetic actuator includes a movable iron core fixed to the fine movement stage, a fixed iron core fixed to the coarse movement stage, and a coil wound around the fixed iron core, and the shortest distance between the substrate held by the fine movement stage and the coil is greater than the shortest distance between the substrate and the fixed iron core; A transfer device characterized by: (Item 2) The central axis of the coil is parallel to the plane. 2. The transfer device according to item 1, (Item 3) the fixed iron core has a first end face facing the movable iron core, and the distance between the substrate held by the fine movement stage and the central axis of the coil is greater than the distance between the substrate held by the fine movement stage and the center of the first end face; 3. The transfer device according to item 2, (Item 4) In a cross section perpendicular to the plane and parallel to the central axis of the coil, the fixed core includes a portion having a crank shape. 2. The transfer device according to item 1, (Item 5) The central axis of the coil is disposed at an oblique angle relative to the plane. 2. The transfer device according to item 1, (Item 6) In a cross section perpendicular to the plane and parallel to the central axis of the coil, the fixed core includes an L-shaped portion. 4. The transfer device according to any one of items 1 to 3, (Item 7) The central axis of the coil is disposed at an angle perpendicular to the plane. 7. The transfer device according to item 6, (Item 8) the coarse movement stage has an opening, and a portion of the fixed core is disposed in the opening. 8. The transfer device according to item 7, (Item 9) The central axis of the coil is disposed at an angle perpendicular to the plane. 4. The transfer device according to any one of items 1 to 3, (Item 10) the fixed iron core and the movable iron core form a magnetic circuit, the magnetic circuit includes a laminated body made up of a plurality of electromagnetic steel plates, and the laminated body includes a transition portion where the lamination direction of the plurality of electromagnetic steel plates changes at a right angle. 10. The transfer device according to any one of items 1 to 9, (Item 11) the changing portion includes a contact portion between a first portion in which the stacking direction is a first direction and a second portion in which the stacking direction is a second direction perpendicular to the first direction, Item 11. The transfer device according to item 10. (Item 12) The transition portion includes a portion where a first portion in which the stacking direction is a first direction and a second portion in which the stacking direction is a second direction perpendicular to the first direction face each other via a solid member. Item 11. The transfer device according to item 10. (Item 13) the varying portion is provided on at least one of the fixed core and the movable core; 13. The transfer device according to any one of items 10 to 12. (Item 14) The transition portion includes a portion where a first portion in which the stacking direction is a first direction and a second portion in which the stacking direction is a second direction perpendicular to the first direction face each other with a gap therebetween. Item 11. The transfer device according to item 10. (Item 15) The first portion is provided on the fixed iron core, and the second portion is provided on the movable iron core. Item 15. The transfer device according to item 14. (Item 16) Each of the fixed core and the movable core is composed of at least one stacked core. 16. The transfer device according to any one of items 10 to 15, (Item 17) At least one of the fixed core and the movable core is composed of a plurality of stacked cores. 16. The transfer device according to any one of items 10 to 15, (Item 18) The plurality of stacked cores are arranged close to each other and fixed by fixing members. Item 18. The transfer device according to item 17. (Item 19) The transition portion includes a portion in which the stacking direction gradually changes from a first direction to a second direction perpendicular to the first direction. Item 11. The transfer device according to item 10. (Item 20) The change portion is constituted by a wound core. Item 12. The transfer device according to item 11. (Item 21) one of the fixed core and the movable core includes at least one stacked core; the other of the fixed core and the movable core includes a wound core, The transition portion is formed by the wound core. Item 11. The transfer device according to item 10. (Item 22) each of the fixed core and the movable core is formed by a wound core; an axial direction of the wound core constituting the fixed core and an axial direction of the wound core constituting the movable core are perpendicular to each other, the wound core constituting the fixed core and the wound core constituting the movable core each constitute the changing portion, Item 11. The transfer device according to item 10. (Item 23) the varying portion is provided on the fixed iron core, and the coil is wound around the fixed iron core. Item 11. The transfer device according to item 10. (Item 24) the coil is wound around a portion of the fixed core different from a portion where the transition portion is arranged. 24. The transfer device according to item 23, (Item 25) A transfer step of transferring a pattern of an original onto a substrate by the transfer device according to any one of items 1 to 24; obtaining an article from the substrate that has undergone the transfer step; A method for manufacturing an article, comprising:

[0088] The invention is not limited to the above-described embodiment, and various modifications and variations are possible within the scope of the gist of the invention. [Explanation of symbols]

[0089] SC: fixed iron core (first member), MC: movable iron core (second member), 101-1: fine movement stage, 101-2: fine movement base, 101-36: coil

Claims

1. A stage device for holding a substrate, a coarse movement stage; a coarse movement actuator that drives the coarse movement stage along a predetermined plane; a fine movement stage for holding the substrate; a fine movement actuator for adjusting the position and attitude of the fine movement stage relative to the coarse movement stage; an electromagnetic actuator for transmitting the thrust applied to the coarse movement stage by the coarse movement actuator to the fine movement stage in a non-contact manner; the electromagnetic actuator includes a movable iron core fixed to the fine movement stage, a fixed iron core fixed to the coarse movement stage, and a coil wound around the fixed iron core, wherein the shortest distance between the substrate held by the fine movement stage and the coil is greater than the shortest distance between the substrate and the fixed iron core; The central axis of the coil is parallel to the plane, the fixed iron core has a first end surface facing the movable iron core, and the distance between the substrate held by the fine movement stage and the central axis of the coil is greater than the distance between the substrate held by the fine movement stage and the center of the first end surface; A stage device characterized by:

2. In a cross section perpendicular to the plane and parallel to the central axis of the coil, the fixed core includes a portion having a crank shape.

2. The stage device according to claim 1.

3. The central axis of the coil is disposed at an oblique angle relative to the plane.

2. The stage device according to claim 1.

4. In a cross section perpendicular to the plane and parallel to the central axis of the coil, the fixed core includes an L-shaped portion.

2. The stage device according to claim 1.

5. The central axis of the coil is disposed at a perpendicular angle to the plane.

5. The stage device according to claim 4.

6. the coarse movement stage has an opening, and a portion of the fixed core is disposed in the opening.

6. The stage device according to claim 5.

7. The central axis of the coil is disposed at an angle perpendicular to the plane.

2. The stage device according to claim 1.

8. A stage device for holding a substrate, a coarse movement stage; a coarse movement actuator that drives the coarse movement stage along a predetermined plane; a fine movement stage for holding the substrate; a fine movement actuator for adjusting the position and attitude of the fine movement stage relative to the coarse movement stage; an electromagnetic actuator for transmitting the thrust applied to the coarse movement stage by the coarse movement actuator to the fine movement stage in a non-contact manner; the electromagnetic actuator includes a movable iron core fixed to the fine movement stage, a fixed iron core fixed to the coarse movement stage, and a coil wound around the fixed iron core, wherein the shortest distance between the substrate held by the fine movement stage and the coil is greater than the shortest distance between the substrate and the fixed iron core; In a cross section perpendicular to the plane and parallel to the central axis of the coil, the fixed core includes a portion having a crank shape. A stage device characterized by:

9. A stage device for holding a substrate, a coarse movement stage; a coarse movement actuator that drives the coarse movement stage along a predetermined plane; a fine movement stage for holding the substrate; a fine movement actuator for adjusting the position and attitude of the fine movement stage relative to the coarse movement stage; an electromagnetic actuator for transmitting the thrust applied to the coarse movement stage by the coarse movement actuator to the fine movement stage in a non-contact manner; the electromagnetic actuator includes a movable iron core fixed to the fine movement stage, a fixed iron core fixed to the coarse movement stage, and a coil wound around the fixed iron core, wherein the shortest distance between the substrate held by the fine movement stage and the coil is greater than the shortest distance between the substrate and the fixed iron core; The central axis of the coil is disposed at an oblique angle relative to the plane. A stage device characterized by:

10. the fixed iron core and the movable iron core form a magnetic circuit, the magnetic circuit includes a laminated body made up of a plurality of electromagnetic steel plates, and the laminated body includes a transition portion where the lamination direction of the plurality of electromagnetic steel plates changes at a right angle.

10. The stage device according to claim 1, wherein the stage device is a stage unit.

11. the changing portion includes a contact portion between a first portion in which the stacking direction is a first direction and a second portion in which the stacking direction is a second direction perpendicular to the first direction, 11. The stage apparatus according to claim 10.

12. the transition portion includes a portion where a first portion, in which the stacking direction is a first direction, and a second portion, in which the stacking direction is a second direction perpendicular to the first direction, face each other via a solid member, 11. The stage apparatus according to claim 10.

13. the varying portion is provided on at least one of the fixed core and the movable core; 11. The stage apparatus according to claim 10.

14. the transition portion includes a portion where a first portion, in which the stacking direction is a first direction, and a second portion, in which the stacking direction is a second direction perpendicular to the first direction, face each other with a gap therebetween; 11. The stage apparatus according to claim 10.

15. The first portion is provided on the fixed iron core, and the second portion is provided on the movable iron core.

15. The stage apparatus according to claim 14.

16. Each of the fixed core and the movable core is composed of at least one stacked core.

11. The stage apparatus according to claim 10.

17. At least one of the fixed core and the movable core is composed of a plurality of stacked cores.

11. The stage apparatus according to claim 10.

18. The plurality of stacked cores are arranged close to each other and fixed by fixing members.

18. The stage apparatus according to claim 17.

19. The transition portion includes a portion in which the stacking direction gradually changes from a first direction to a second direction perpendicular to the first direction.

11. The stage apparatus according to claim 10.

20. The change portion is constituted by a wound core.

12. The stage apparatus according to claim 11.

21. one of the fixed core and the movable core includes at least one stacked core; the other of the fixed core and the movable core includes a wound core, The transition portion is formed by the wound core.

11. The stage apparatus according to claim 10.

22. each of the fixed core and the movable core is formed by a wound core; an axial direction of the wound core constituting the fixed core and an axial direction of the wound core constituting the movable core are perpendicular to each other, the wound core constituting the fixed core and the wound core constituting the movable core each constitute the changing portion, 11. The stage apparatus according to claim 10.

23. the varying portion is provided on the fixed iron core, and the coil is wound around the fixed iron core.

11. The stage apparatus according to claim 10.

24. the coil is wound around a portion of the fixed core different from a portion where the transition portion is arranged.

24. The stage apparatus of claim 23.

25. A stage device for holding a substrate, a coarse movement stage; a coarse movement actuator that drives the coarse movement stage along a predetermined plane; a fine movement stage for holding the substrate; a fine movement actuator for adjusting the position and attitude of the fine movement stage relative to the coarse movement stage; an electromagnetic actuator for transmitting a thrust force applied from the coarse movement actuator to the fine movement stage in a non-contact manner, the electromagnetic actuator includes a movable iron core fixed to the fine movement stage, a fixed iron core fixed to the coarse movement stage, and a coil wound around the fixed iron core, and the center position of a surface where the movable iron core and the fixed iron core face each other is located closer to the substrate than the center axis of the coil; A stage device characterized by:

26. A transfer device that transfers a pattern of an original onto a substrate, A stage device according to any one of claims 1, 8, 9 and 25 is provided. A transfer device characterized by:

27. a transfer step of transferring a pattern of an original onto a substrate by the transfer device according to claim 26; obtaining an article from the substrate that has undergone the transfer step; A method for manufacturing an article, comprising:

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