Optimizing the beam position image

Abstract

A method for obtaining a compensation pattern for a workpiece patterning device includes printing a calibration pattern using multiple simultaneously operating exposure beams that can be swept in a second direction according to calibration pattern print data having multiple edges (S11). The positions of the edges are measured (S12). Relative deviations between the measured positions and the calibration pattern are calculated (S13). Each deviation is associated with the exposure beam, sweep position, and grid fraction position used (S14). Edge compensation data is calculated (S15) to adapt the edge representation of the pattern print data before printing to compensate for the calculated deviations. The edge compensation data depends on the exposure beam, sweep position, and grid fraction position used.

Description

[Technical Field]

[0001] The present technology relates to pattern printing and an apparatus therefor, and more particularly to a method for obtaining a compensation pattern for a workpiece patterning device, a method for calibrating print data, a method for printing a pattern, and an apparatus therefor. [Background technology]

[0002] Currently, in the semiconductor industry, masks created by laser-based mask writers are commonly used in the manufacture of various cutting-edge chips and imaging devices. Direct writers, used for packaging electronic components, are also becoming standard. In recent years, displays have become larger and higher resolution. This has led to demands for faster, more accurate, and less expensive microlithography printing processes.

[0003] In the field of microlithography printing processes, a mask writer or direct writer may be based on a printhead that provides one or more precision laser beams. The printhead and the substrate to be written can be moved relative to one another by moving either the printhead or the substrate, or both. By varying the power of the laser beams in conjunction with the relative movement, an exposure pattern can be written onto the substrate.

[0004] By using a printhead with multiple beams for simultaneous exposure, the overall speed can be increased, and by sweeping the beams a small distance perpendicular to the main direction of printhead motion, the width of the print strip can be increased, improving the overall printing speed.

[0005] Printing accuracy is crucial. Deviations from the intended pattern, such as critical dimension (CD) or positioning errors, even in the range of a few to a few hundred nanometers, can adversely affect the final result and lead to quality degradation. Such printing errors are usually caused by imperfections in the mechanical and / or optical properties of the printhead.

[0006] Published U.S. Patent No. US 7,919,218 B2 discloses a method for a multiple exposure beam lithography tool. The method uses multiple exposure beams simultaneously to pattern a workpiece coated with a layer sensitive to electromagnetic radiation. The method determines whether the actual position of any of the multiple exposure beams relative to a reference beam differs from its intended position. If the misaligned beam strikes the edge of the workpiece, an adjustment is made to the exposure dose for that beam.

[0007] While such corrections are intended to correct for beam position errors, deviations from the intended pattern have many other causes that cannot be compensated for by such exposure adjustments. Summary of the Invention [Problem to be solved by the invention]

[0008] The general purpose of this technique is to provide a means to correct the more common types of printhead defects. [Means for solving the problem]

[0009] The above object is achieved by a method and an apparatus according to the independent claims. Preferred embodiments are defined in the dependent claims.

[0010] In general, in a first aspect, a method for obtaining a compensation pattern for a workpiece patterning device includes printing a calibration pattern using multiple simultaneously operating exposure beams separated in a first direction. The multiple simultaneously operating exposure beams are swept in a second direction intersecting the first direction. The printing is performed according to calibration pattern print data. The calibration pattern has multiple edges extending in the second direction. Edge positions in the first direction are measured for multiple sweep positions in the second direction in the printed calibration pattern. Deviations of the measured edge positions relative to intended positions of the edges according to the calibration pattern print data are calculated. Each deviation is related to an exposure beam used among the simultaneously operating exposure beams that prints the respective edge, sweep positions of the multiple positions in the second direction at which the edge was printed, and a grid fraction position of the exposure beam in the first direction among the simultaneously operating exposure beams that prints the respective edge. The grid fraction position is the intended position of the edge relative to an edge of an intended coverage area of ​​the exposure beam among the simultaneously operating exposure beams that prints the respective edge. Edge compensation data for adapting the edge representation of the pattern print data before printing is calculated to compensate for the calculated deviations, and the edge compensation data depends on the exposure beam used, the sweep position in the second direction, and the grid fraction position in the first direction.

[0011] In a second aspect, a method for calibrating print data includes acquiring print data of a pattern to be printed, the print data being adapted by edge compensating data acquired by the method according to the first aspect into edge-compensated print data.

[0012] In a third aspect, a method for printing a pattern includes obtaining edge compensation print data for the pattern to be printed, the edge compensation print data being obtained by the method according to the second aspect. A printing process for a workpiece at least partially covered with a layer sensitive to electromagnetic waves or electron beams is controlled based on the edge compensation print data.

[0013] In a fourth aspect, a system for acquiring a compensation pattern for a workpiece patterning device includes a printing device configured to create a calibration pattern with multiple simultaneously operating exposure beams spaced apart in a first direction. The multiple simultaneously operating exposure beams are swept in a second direction intersecting the first direction. The printing device is configured to print according to calibration pattern print data. The calibration pattern has multiple edges extending in the second direction. A measurement device is arranged to measure positions of the edges in the first direction relative to multiple sweep positions in the second direction in the calibration pattern. The processing device is configured to calculate deviations of the measured positions of the edges from intended positions of the edges according to the calibration pattern print data. The processing device is further configured to associate each deviation with an exposure beam used to print the respective edge, a sweep position of the multiple positions in the second direction at which the edge was printed, and a grid fractional position in the first direction of the simultaneously operating exposure beams to print the respective edge. The grid fractional position is the intended position of the edge relative to an edge of an intended coverage area of ​​the simultaneously operating exposure beams to print the respective edge. The processor is further configured to calculate edge compensation data for adapting the edge representation of the pattern print data before printing to compensate for the calculated deviation, the edge compensation data depending on the exposure beam used, the sweep position in the second direction, and the grid fraction position in the first direction.

[0014] In a fifth aspect, an apparatus for processing print data defining a pattern to be printed comprises a processing circuit and a memory, the memory including instructions executable by the processing circuit whereby the processing circuit is operable to obtain print data of the pattern to be printed and to adapt the print data by edge compensating data obtained by the system for obtaining a compensation pattern according to the fourth aspect into edge-compensated print data.

[0015] In a sixth aspect, a printing apparatus includes an apparatus for processing edge-compensated print data acquired by the apparatus for processing print data according to the fifth aspect. The printing apparatus is the printing apparatus of the system for acquiring a compensation pattern for a workpiece patterning device according to the fourth aspect. The printing apparatus further includes a print head having a plurality of simultaneously operating exposure beams spaced apart in a first direction. The plurality of simultaneously operating exposure beams are capable of sweeping in a second direction intersecting the first direction. The printing apparatus further includes a controller. The controller is arranged to control the operation and relative movement of the print head based on the edge-compensated print data.

[0016] One advantage of the techniques of the present invention is that they are able to compensate for a wide variety of imperfections in the optical and / or mechanical properties of the printhead. Other advantages will become apparent from the detailed description. [Brief explanation of the drawings]

[0017] The invention, together with further objects and advantages thereof, may best be understood by reference to the following description taken together with the accompanying drawings, in which: [Figure 1] FIG. 1 is a diagram illustrating a printing apparatus. [Figure 2] FIG. 2 is a diagram illustrating printing using multiple exposure beams and microsweeps. [Figure 3] FIG. 3 is a diagram showing a schematic diagram of how the entire surface is covered by multiple exposure beams. [Figure 4A-4B] 4A and 4B are diagrams showing examples of calibration pattern lines relative to a beam grid. [Figure 5A] FIG. 5A is a diagram illustrating compensation for edge deviation. [Figure 5B] FIG. 5B is a diagram illustrating compensation for edge deviation. [Figure 6] FIG. 6 illustrates a partial method of an embodiment of a printing method. [Figure 7] FIG. 7 is a flow diagram of steps in one embodiment of a method for obtaining a compensation pattern for a workpiece patterning device. [Figure 8] FIG. 8 is a flow diagram of steps in one embodiment of a method for calibrating print data. [Figure 9A] FIG. 9A is a diagram illustrating edge compensation for vector print data. [Figure 9B] FIG. 9B is a diagram illustrating edge compensation for vector print data. [Figure 9C] FIG. 9C is a diagram illustrating edge compensation for vector print data. [Figure 10A] FIG. 10A is a diagram for explaining edge compensation of bitmap print data. [Figure 10B] FIG. 10B is a diagram for explaining edge compensation of bitmap print data. [Figure 10C] FIG. 10C is a diagram for explaining edge compensation of bitmap print data. [Figure 11] FIG. 11 is a flow diagram of steps in one embodiment of a method for printing a pattern. [Figure 12] FIG. 12 is a schematic diagram of one embodiment of a system for obtaining a compensation pattern for a workpiece patterning device. [Figure 13A] FIG. 13A is a schematic diagram of one embodiment of an apparatus for processing print data that defines a pattern to be printed. [Figure 13B]FIG. 13B is a schematic diagram of one embodiment of an apparatus for processing print data that defines the pattern to be printed. [Figure 14] FIG. 14 is a schematic diagram of one embodiment of a printing device. DETAILED DESCRIPTION OF THE INVENTION

[0018] Throughout the drawings, the same reference numbers are used for similar or corresponding elements.

[0019] To better understand this technology, it may be useful to first provide an overview of a printing system that utilizes multiple exposure beams with micro-sweeping capabilities.

[0020] 1 shows a schematic diagram of a printing apparatus 1 including a table 10 on which a workpiece support 12 is arranged. The workpiece support 12 is movable in a direction Y relative to the table 10. A workpiece 20 is fixed onto the workpiece support 12. The surface of the workpiece 20 is provided with a layer that is sensitive to electromagnetic waves or radiation.

[0021] The printing apparatus 1 further includes a workpiece patterning device 2. The workpiece patterning device 2 has a stand 30 that supports a print head 32. The print head 32 is movable in a direction X along the stand 30. The print head 32 is arranged to provide a plurality of exposure beams 34 for exposure with electromagnetic waves or radiation, which are directed toward the workpiece 20.

[0022] The combined movement of the workpiece support 12 and the print head 32, as further described below, allows the micro-sweep of the exposure beam 34 to reach all areas of the workpiece 20 that are to be irradiated. In the figure, exposed areas 24 and unexposed areas 22 are shown.

[0023] As will be appreciated by those skilled in the art, other embodiments may provide relative mechanical motion, such as two-dimensional movement of the print head 30 and / or two-dimensional movement of the work support 12.

[0024] This type of printing apparatus utilizes multiple exposure beams and micro-sweeps of each exposure beam. This is shown diagrammatically in Figure 2. A portion of a workpiece 20 is shown. In the illustrated scene, exposed areas 24 are shown hatched, while unexposed areas 22 are shown unhatched. It will be understood that the actual degree of exposure also depends on the intensity of the exposure beam at each location. However, in this illustration, the "exposed area" 24 is the area through which the exposure beam passed, or would have passed, if the exposure beam had been applied at that intensity at that time.

[0025] In the diagram, five exposure beams 34A-E are shown. As will be appreciated by those skilled in the art, the number of exposure beams can be selected depending on, for example, the desired printing speed, the available exposure beam size, the overall complexity, etc. However, in this exemplary diagram, five exposure beams 34A-E have only been selected to facilitate an easy to understand illustration of the printing principles.

[0026] In this diagram, the print head (not shown) can be moved in steps downward in the X direction of the diagram. The print head moves a fixed distance, shown as exposure beam step 50. At each position, the exposure beam is swept upward in the Y direction in a so-called microsweep to cover a sweep width 52. In the illustrated example, the microsweep occurs approximately halfway through the position. Once the microsweep is complete, the print head is moved another exposure beam step in the X direction, and a new microsweep is performed. As can be seen from the diagram, when all exposure beams have passed a certain X position, the entire surface of the workpiece has been (or could have been) exposed. In this way, the different exposure beams are designed to fill the spaces between each other to expose the entire surface. The exposure beam width 56 corresponds to the width of the microstripes exposed during the microsweep; to cover the entire surface, the exposure beam width 56 multiplied by the number of exposure beams is equal to the exposure beam step 50. However, it can be seen that the exposure beam spacing 54 is different from the exposure beam step 50.

[0027] The printhead operation is designed so that different exposure beams cover the entire surface of the workpiece 20. Figure 3 shows an example of how this can be achieved. In this example, five exposure beams are selected. The time axis of interest is oriented downwards, and the printhead moves horizontally by exposure beam steps 50 between each row of symbols. Each microsweep is labeled here with a letter to identify the time it occurred. At the top of the figure, a schematic representation of the entire print is shown, along with the exposure beam number and the time each part was printed.

[0028] In FIG. 4A , a portion of the exposure beam grid is shown enlarged. The lines 60 to be printed are shown superimposed on the exposure beam grid. The print direction X is to the left in this example. Therefore, the printed lines 60 have a leading edge 62 and a trailing edge 64. The entire printed line 60 covers one or more exposure beam widths 56. Furthermore, the edges 62, 64 of the printed line 60 are located within one respective exposure beam width 56. The intended locations of the edges 62, 64 of the lines 60 to be printed relative to the edges 55 of the intended coverage area of ​​the exposure beam that print them are defined as fractional grid positions 66L, 66T. In this example, the leading edge 62 has fractional grid position 66L, and the trailing edge 64 has fractional grid position 66T.

[0029] 4B shows another line 60 being printed, this time somewhat wider, and the grid fractional positions 66L, 66T are changed accordingly.

[0030] During printing, various types of errors and defects can occur. The actual illuminated area may differ in shape and size from the design of the printing device, resulting in unintended intensity variations in both the microsweep and exposure beam step directions. These geometric imperfections may also vary along the microsweep direction. Furthermore, different exposure beam behavior may result in exposure beam separations that are not precisely as intended. Also, the exposure beam microsweep may not be perfectly straight, resulting in slightly curved or tilted microsweeps. Each of these defects may be too small to be corrected mechanically or optically with reasonable effort, but together they can result in unacceptable print errors.

[0031] All such imperfections affect, in some way, the printing of a perfect straight line. In Figure 5A, the intended edge 64 of straight line 60 is shown as a dashed line. An example of an actually printed line would instead have a non-straight edge 67. The position of actual edge 67 relative to intended edge 64 may be determined at multiple positions in the Y direction, preferably along the entire length. Thus, it is possible to quantify the error at each point in the Y direction. Furthermore, it is known which exposure beam is responsible for printing the edge.

[0032] Features smaller than the exposure beam width are typically corrected by adjusting the exposure beam intensity. Features that exhibit edges within the exposure beam width can be approximated by reducing the intensity of the corresponding exposure beam at that location. Thus, the actual behavior of a straight edge located within the exposure beam width may depend on where the edge is specified to be located within the exposure beam width. In other words, the shape of the actual edge 67 may also depend on the grid fractional position of the intended edge 64. Thus, the quantified error of each point in the Y direction may be characterized by the corresponding grid fractional position.

[0033] One approach to correcting the printing errors in Figure 5A is to intentionally distort the intended edge 64 so that the printing errors result in an actually printed edge 67 that is straight. This is shown in Figure 5B, where the "intended edge" 69 of the printed pattern 61 is defined to be curved. This curvature compensates for the printing errors that are assumed to be present during actual printing. Thus, due to the printing errors, the actually printed edge 67 will generally appear straight.

[0034] This compensation may be different from one position along the microsweep to another, may vary depending on the exposure beam used to print the edge, and may also vary depending on the fractional grid position of the line being printed. That is, there may be a need for compensation for each combination of microsweep position, number of exposure beams, and fractional grid position.

[0035] By measuring the actual errors that occur when printing a line in the Y direction for every combination of a set of microsweep positions, a set of grid fraction positions, and the number of exposure beams, a data matrix of the necessary corrections can be constructed. Then, when printing the actual pattern, the pattern can be intentionally distorted according to the data matrix that uses the microsweep positions, grid fraction positions, and the number of exposure beams as matrix indices.

[0036] 6 is a flow diagram of an embodiment of three methods used together to achieve compensated printing. The first method, M1, is a method for obtaining a compensation pattern for a workpiece patterning device. This is preferably performed by printing an intentionally linear pattern and measuring deviations in the final printed pattern, as described further below. The deviations are used to calculate edge compensation data for adapting the edge representation of the pattern printing data before printing to compensate for the deviations.

[0037] The second partial method M2 is a method for calibrating print data. The calibration is performed according to the edge compensation data calculated in the first partial method M1. Methods M1 and M2 may be executed in the same location, or even by a common processor. However, method M2 may also be executed separately in time and space from method M1. For example, the edge compensation data may be provided to a separate processor to perform the actual calibration of the print data.

[0038] The third partial method M3 is a method for printing the pattern. Because edge compensation data is typically unique to each printing device, partial method M3 must be performed on the same printing device used for first partial method M1. Furthermore, printing must be performed using the calibrated print data from partial method M2. However, again, the location where partial method M3 is performed may be separate in time and space from the location where partial method M2 was performed. Also, partial method M2 may be performed by someone other than the person operating the actual printing device. Furthermore, partial method M3 may be performed multiple times using the same calibrated print data from partial method M2. Similarly, partial method M2 may be performed multiple times for different patterns using the same edge compensation data as partial method M1.

[0039] 7 is a flow diagram showing steps of an embodiment of a compensation pattern acquisition method for a workpiece patterning device according to the present invention. In step S11, a calibration pattern is printed using multiple simultaneously operating exposure beams spaced apart in a first direction. The multiple simultaneously operating exposure beams can be swept in a second direction intersecting the first direction. The printing is performed according to print data of the calibration pattern. The calibration pattern has multiple edges extending in the second direction.

[0040] In step 21, the position of the edge in the first direction is measured for multiple sweep positions in the second direction on the printed calibration pattern. The more positions in the second direction that are measured, the better the compensation for imperfections along the microsweep. However, the number of measurement positions also increases the size of the final compensation data.

[0041] In step S13, deviations of the measured positions of the edges relative to the intended positions of the edges according to the calibration pattern print data are calculated. In step S14, each deviation is associated with the exposure beam used among the simultaneously operating exposure beams that prints the respective edge. Each deviation is also associated with a specific sweep position among the multiple positions in the second direction at which the edge was printed. Finally, each deviation is also associated with a grid fractional position in the first direction among the simultaneously operating exposure beams that prints the respective edge. As described above, the grid fractional position is the intended position of the edge relative to the edge of the intended target area of ​​the exposure beam among the simultaneously operating exposure beams that prints the respective edge.

[0042] In step S15, edge compensation data is calculated to adapt the edge representation of the pattern print data before printing to compensate for the calculated deviations. The edge compensation data depends on the exposure beam used, the sweep position in the second direction, and the grid fraction position in the first direction.

[0043] As briefly mentioned above, the edges of a calibration pattern can be of two different types: leading edges or trailing edges. In many printing systems, these different edge behaviors result from the same type of imperfection, depending on the number of exposure beams, sweep position, and grid fraction position. In such cases, the same compensation data is valid for both edges.

[0044] However, in some printing devices, the required compensation may depend on whether the edge is a leading edge or a trailing edge. Thus, in one embodiment, associating each deviation further includes associating each deviation with a leading edge or a trailing edge relative to the first direction. Thus, the edge compensation data further depends on whether the edge to be compensated is a leading edge or a trailing edge.

[0045] The calibration pattern preferably includes an edge oriented in the second direction, i.e., parallel to the microsweep direction. In a preferred embodiment, for space-efficient use, the calibration pattern includes lines in the second direction. The edges can then be easily provided at different exposure beam positions. In other words, the width and position of the lines in the calibration pattern are adapted to cover all exposure beams operating simultaneously to generate at least one edge of the calibration pattern. Preferably, edges are also provided at different fractional grid positions for each exposure beam. The more different fractional grid positions of the edge in the first direction are provided, the better the compensation for imperfections across the microsweep. However, the number of fractional grid positions increases the size of the final compensation data and the time required to perform the calibration. Therefore, the number of fractional grid positions used is preferably determined as a compromise between time, data size, and correction quality.

[0046] In a preferred embodiment, the calibration pattern includes a reference line. The reference line has a width that ensures that the leading and trailing edges are provided by the same sweep in the second direction of multiple simultaneously operating exposure beams. That is, both ends of the reference line are preferably printed without moving the print head in the X direction. Conversely, the inside of the reference line may be provided by a fast or slow sweep by any of the exposure beams. By printing the edges with the same sweep, imperfections in the print head movement in the X direction can be eliminated.

[0047] 8 is a flow diagram showing steps of a method for calibrating print data. In step S21, print data of a pattern to be printed is obtained. In step S22, the print data is adapted to edge-compensated print data using edge compensation data. The edge compensation data is obtained, for example, by the submethod M1 of FIG. 6 according to FIG. 7.

[0048] Generally, print data is initially provided as vector print data. Objects to be printed are typically specified by parameters describing the object's type, size, position, and so on. For example, to print a square, the object can be specified by specifying the square's code, width, height, rotation, and corner positions in the X and Y directions. Alternatively, the object's edge can be specified by its shape, start position, and end position. A square is represented by four lines connecting four points. Vector print data is a convenient method for efficiently representing relatively simple shapes. This is shown diagrammatically in Figure 9A, which shows a square.

[0049] In one embodiment, the edge compensation data is vector edge compensation data, which includes data defining shape variations of pattern features representing edges in a first direction in the vector print data, meaning that their position, size, and even shape may need to be redefined.

[0050] In certain embodiments, the vector edge compensation data includes data that causes an equal but opposite movement of the edge in a first direction compared to a corresponding deviation of the measured position of the edge from the intended position of the edge according to the calibration pattern print data. A print of the calibration pattern of the same area is shown in Figure 9B. The lines of the printed calibration pattern are tilted relative to the intended lines, shown as dotted lines.

[0051] In FIG. 9C, compensated vector print data is shown in which the sides of the original square are tilted to compensate for errors detected during calibration.

[0052] It should be noted that the errors shown in FIGS. 9A and 9B are extremely exaggerated compared to typical actual cases in order to visualize the compensation method.

[0053] 8, the edge compensation data in the adaptation of step S22 is vector edge compensation data. This vector edge compensation data includes data that defines shape changes of pattern features representing edges in a first direction in the vector print data. Thus, step S22 of adapting the print data includes changing the shape of pattern features in the vector print data in accordance with the vector edge compensation data obtained using the concepts described hereinabove.

[0054] In a preferred embodiment based on vector print data, the vector edge compensation data includes data that causes a movement in a first direction of the edge by the same amount but in the opposite direction as the corresponding deviation of the measured position of the edge from the intended position of the edge according to the calibration pattern print data.

[0055] As will be appreciated by those skilled in the art, the resulting shape of an object in compensated vector print data may be complex and difficult to define in a simple vector representation, depending on the compensation actually performed. However, many printing devices convert vector print data to bitmap print data before the actual printing occurs. Other printing devices require the original data to be provided in bitmap print data format from the beginning. In either of these cases, compensation according to the present invention can be performed on the bitmap print data instead.

[0056] FIG. 10A shows an example of bitmap print data, where a square is defined by a matrix of bits marked with a certain intensity. Compensation in the bitmap print data can be achieved by adjusting the intensity settings of the bits near the edge. FIG. 10B shows the measured deviation between the intended calibration pattern and the measured calibration pattern. FIG. 10C shows the compensated bitmap print data, where the intensities of the bits near the edge have been adjusted.

[0057] In other words, in one embodiment, the edge compensation data is bitmap edge compensation data, which includes data that defines intensity adjustments for individual bits representing edges in a first direction in the bitmap print data.

[0058] Preferably, the bitmap edge compensation data includes data specifying an increase in intensity adjustment of individual bits representing an edge in a first direction when an edge of the print pattern is located inside a corresponding edge location in the bitmap print data according to the calibration pattern print data, and a decrease in intensity adjustment of individual bits representing an edge in the first direction when an edge of the print pattern is located outside a corresponding edge location in the bitmap print data according to the calibration pattern print data.

[0059] Preferably, the respective amount of increase or decrease in intensity depends on the magnitude of the corresponding deviation of the measured position of the edge from the intended position of the edge according to the calibration pattern print data.

[0060] In one embodiment, the bitmap edge compensation data is provided as a data matrix having the exposure beam used, the sweep position in the second direction, and the grid fraction position in the first direction as matrix indices.

[0061] 8, in this embodiment, the edge compensation data is bitmap edge compensation data. Preferably, this bitmap edge compensation data includes data that specifies intensity adjustments for individual bits in the bitmap print data that represent edges in a first direction. Thus, step S22 of adapting the print data includes adjusting the intensity of individual bits in the bitmap print data in accordance with the bitmap edge compensation data. The bitmap edge compensation data is preferably obtained by a method in accordance with the concepts described hereinabove.

[0062] Preferably, the bitmap edge compensation data is provided as a data matrix, and the step S22 of adapting the print data includes obtaining intensity adjustment values ​​for individual bits in the bitmap print data using the exposure beam used, the sweep position in the second direction, and the grid fraction position in the first direction as matrix indices.

[0063] 11 is a flow diagram of steps of one embodiment of a pattern printing method according to the present invention. In step S31, edge-compensated print data obtained by a method for calibrating print data is acquired. The method for calibrating print data is submethod M2 of FIG. 2, and is preferably performed according to FIG. 8. In step S32, a printing process of a workpiece is controlled based on the edge-compensated print data. The workpiece is at least partially covered with a layer sensitive to electromagnetic waves or electron beams.

[0064] Preferably, step S32 of controlling the printing process includes controlling the exposure beams operating simultaneously to provide a micro-sweep in a second direction while being scanned in a first direction, thereby creating a scan strip.

[0065] More preferably, the step S32 of controlling the printing process further includes creating a plurality of scan strips displaced in the second direction.

[0066] In one embodiment, the printing process is a microlithography printing process. Preferably, the printing process is a mask writing process or a direct writing process.

[0067] FIG. 12 schematically illustrates one embodiment of a system 70 for obtaining a compensation pattern for a workpiece patterning device. The system 70 for obtaining a compensation pattern for a workpiece patterning device includes a printing apparatus 1 configured to create a calibration pattern with multiple simultaneously operating exposure beams spaced apart in a first direction. The multiple simultaneously operating exposure beams can be swept in a second direction intersecting the first direction. An example of such a printing apparatus 1 is also shown in FIG. 1. The printing apparatus is configured to perform printing according to print data for a calibration pattern. The calibration pattern has multiple edges extending in the second direction.

[0068] The system 70 for acquiring a compensation pattern for a workpiece patterning device further includes a measurement device 4 arranged to measure the position of an edge in a first direction for a plurality of sweep positions in the calibration pattern in a second direction. In the figures, the measurement device 4 is shown as a separate entity arranged on the stand 30 of the printing apparatus 1. However, the measurement device 4 may be provided as an entirely separate unit or as an integral part of the print head 32. Such measurement devices 4 are well known in the prior art and are available in many different configurations. However, details of the measurement device 4 are not required and will not be described further, so long as the measurement device provides edge positions, data representative of such edge positions, or data from which such edge positions are inferred.

[0069] The system 70 for acquiring a compensation pattern for a workpiece patterning device further comprises a processing device 6. The processing device 6 is connected to the printing device 1 as well as the measurement device 4. The processing device 6 is configured to calculate deviations of the measured positions of the edges relative to the intended positions of the edges according to the calibration pattern printing data. The processing device 6 is further configured to associate each deviation with the exposure beam used to print the respective edge, the sweep position of the plurality of positions in the second direction at which the edge was printed, and the grid fractional position of the exposure beam used to print the respective edge in the first direction. As previously mentioned, the grid fractional position is the intended position of the edge relative to the edge of the intended coverage area of ​​the exposure beam used to print the respective edge.

[0070] The processing device 6 is further configured to calculate edge compensation data for adapting the edge representation of the pattern print data before printing to compensate for the calculated deviation, the edge compensation data depending on the exposure beam used, the sweep position in the second direction and the grid fraction position in the first direction.

[0071] In one embodiment, the edge compensation data is bitmap edge compensation data and includes data specifying an intensity adjustment of individual bits in the bitmap print data representing an edge in a first direction. Preferably, the bitmap edge compensation data includes data specifying an increase in intensity adjustment of individual bits in the bitmap print data representing an edge in a first direction when the edge of the print pattern is located inside a corresponding edge position according to the calibration pattern print data. Similarly, the bitmap edge compensation data includes data specifying a decrease in intensity adjustment of individual bits representing an edge in a first direction when the edge of the print pattern is located outside a corresponding edge position according to the calibration pattern print data. More preferably, the amount of each intensity increase or decrease depends on the magnitude of the corresponding deviation of the measured position of the edge from the relative intended position of the edge according to the calibration pattern print data.

[0072] In one embodiment, the bitmap edge compensation data is provided as a data matrix having the exposure beam used, the sweep position in the second direction, and the grid fraction position in the first direction as the matrix indices.

[0073] In another embodiment, the edge compensation data is vector edge compensation data and includes data defining a geometric variation of a pattern feature representing an edge in a first direction in the vector print data. Preferably, the vector edge compensation data includes data for causing an equal but opposite movement of the edge compared to a corresponding deviation of a measured position of the edge from an intended position of the edge according to the calibration pattern print data.

[0074] 13A schematically illustrates one embodiment of an apparatus 80 for processing print data defining a pattern to be printed. The apparatus 80 for processing print data defining a pattern to be printed includes a processing circuit 8 and a memory 7. The memory 7 includes instructions executable by the processing circuit 8, whereby the processing circuit 8 is operable to obtain print data of a pattern to be printed and to adapt the print data to edge-compensated print data using edge compensation data. The edge compensation data is obtained, for example, by the system 70 for obtaining a compensation pattern according to the embodiment of FIG. 12.

[0075] In one embodiment, processing circuitry 8 is operable to adapt the print data to edge-compensated print data using bitmap edge compensation data obtained by system 70. Processing circuitry 8 is further operable to adjust the intensity of individual bits representing edges in the first direction in the bitmap print data. Preferably, the bitmap edge compensation data is provided as a data matrix, and processing circuitry 8 is further operable to look up the intensity adjustments from the data matrix using the exposure beam, the sweep position in the second direction, and the grid fraction position in the first direction as matrix indices.

[0076] In another embodiment, the processing circuitry 8 is operable to adapt the print data with vector edge compensation data obtained by the system 70 for acquiring compensation patterns. The vector edge compensation data includes data defining a shape change of a pattern feature representing an edge in a first direction in the vector print data. Preferably, the vector edge compensation data includes data that causes an equal but opposite movement of the edge compared to a corresponding deviation of the measured position of the edge from the relative intended position of the edge according to the calibration pattern print data. The processing circuitry is operable to adapt the vector print data accordingly.

[0077] In Figure 13A, the device 80 for processing print data defining the pattern to be printed is shown as a separate unit in communication with the system 70 for obtaining the compensation pattern. However, as shown schematically in Figure 13B, the device 80 for processing print data defining the pattern to be printed may also be provided as part of and / or integrated into the system 70 for obtaining the compensation pattern. Preferably, the processing circuitry 8 forms part of the processing unit 6.

[0078] FIG. 14 schematically illustrates one embodiment of a printing apparatus 1. The printing apparatus 1 includes an apparatus 9 for processing edge-compensated print data acquired by an apparatus 80 for processing print data in accordance with the concepts described hereinabove. The printing apparatus 1 is a printing apparatus of a system 70 for acquiring a compensation pattern for a workpiece patterning device. The printing apparatus 1 includes a print head 32 having a plurality of simultaneously operating exposure beams spaced apart in a first direction. The plurality of simultaneously operating exposure beams are sweepable in a second direction intersecting the first direction. The printing apparatus 1 further includes a controller 5. The controller 5 is arranged to control the operation and relative motion of the print head based on the edge-compensated print data.

[0079] 14, the control unit 5 and the device for processing edge compensated print data 9 are shown as separate units. However, they may be integrated into a common unit. Also, the processing circuitry of the device for processing print data 80 may be integrated into the same unit as the control unit 5 and / or the device for processing edge compensated print data 9. Also, the processing device 6 may be part of the common unit.

[0080] The above-described embodiments are to be understood as some illustrative examples of the present invention. Those skilled in the art will understand that various modifications, combinations, and changes can be made to the embodiments without departing from the scope of the present invention. In particular, different part solutions in different embodiments can be combined in other configurations, if technically possible. However, the scope of the present invention is defined by the appended claims. [Configuration 1] 1. A method for obtaining a compensation pattern for a workpiece patterning device, comprising: printing (S11) a calibration pattern (60) using a plurality of simultaneously operating exposure beams (34, 34A-E) spaced apart in a first direction (X); the plurality of simultaneously operating exposure beams (34, 34A-E) can be swept in a second direction (Y) intersecting the first direction (X); the printing is performed in accordance with calibration pattern print data; printing the calibration pattern (60) having a plurality of edges (62, 64) extending in the second direction; measuring (S12) the position of the edge (67) in the first direction for a plurality of sweep positions in the second direction (Y) on the printed calibration pattern; Calculating (S13) the deviation of the measured position of the edge (67) from the intended position of the edges (62, 64) according to the calibration pattern print data; Associating (S14) each deviation with a used exposure beam (34A-E) of the simultaneously operating exposure beams (34, 34A-E) that prints the respective edge, a sweep position of the plurality of positions in the second direction (Y) at which the edge is printed, and a grid fraction position (66L, 66T) in the first direction (X) of the exposure beam (34A-E) of the simultaneously operating exposure beams (34, 34A-E) that prints the respective edge; associating the grid fractional positions (66L, 66T) with the intended positions of the edges relative to the edges (55) of the intended coverage areas of the exposure beams (34A-E) of the simultaneously operating exposure beams (34, 34A-E) that print the respective edges; calculating (S15) edge compensation data for adapting an edge representation of the pattern print data before printing to compensate for the calculated deviation; calculating the edge compensation data, the edge compensation data depending on the exposure beam (34A-E) used, the sweep position in the second direction (Y), and the grid fraction position (66L, 66T) in the first direction (X); A method comprising: [Configuration 2] The edge compensation data is bitmap edge compensation data including data that specifies intensity adjustments of individual bits that represent edges in the first direction (X) in the bitmap print data. 2. The method of claim 1. [Configuration 3] the bitmap edge compensation data includes data defining an increase in intensity adjustment of individual bits representing the edge in the first direction when the edge of the print pattern is located within the corresponding edge location in the bitmap print data according to the calibration pattern print data; the bitmap edge compensation data includes data defining a reduction in intensity adjustment of individual bits in the bitmap print data, representing the edge in the first direction when the edge of the print pattern is located outside the corresponding edge position according to the calibration pattern print data; 3. The method of claim 2. [Configuration 4] the amount of each of the increase or decrease in intensity being dependent on the magnitude of the corresponding deviation of the measured position of the edge from the intended position of the edge according to the calibration pattern print data. 4. The method of claim 3. [Configuration 5] the bitmap edge compensation data is provided as a data matrix having the exposure beam used, the sweep position in the second direction, and the grid fraction position in the first direction as matrix indices; 5. The method according to any one of configurations 2 to 4, characterized in that [Configuration 6] the edge compensation data is vector edge compensation data including data defining a shape change of a pattern structure representing an edge in the first direction in vector print data; 2. The method of claim 1. [Configuration 7] the vector edge compensation data includes data that, when compared to a corresponding deviation of the measured position of the edge from an intended position of the edge according to the calibration pattern print data, causes a movement of the edge in the first direction to be equal in amount but in an opposite direction; 7. The method of claim 6, [Configuration 8] 8. The method of any one of configurations 1 to 7, wherein the associating of each deviation further comprises associating each deviation with a leading edge or a trailing edge relative to the first direction, whereby the edge compensation data further depends on whether the edge to be compensated is a leading edge or a trailing edge. [Configuration 9] 9. A method according to any one of the preceding claims, wherein the calibration pattern includes lines in the second direction (Y). [Configuration 10] 10. The method of claim 9, wherein the calibration pattern includes a reference line having a width that ensures that the leading and trailing edges (62, 64) can be provided by the same sweep in the second direction (Y) of the multiple simultaneously operating exposure beams (34A-E). [Configuration 11] 11. The method of claim 9 or 10, wherein the width and position of the lines in the calibration pattern (60) are adapted to cover all simultaneously operating exposure beams (34A-E) involved in creating at least one edge (62, 64) of the calibration pattern. [Configuration 12] Obtaining print data of the pattern to be printed (S21); edge-compensating the data obtained by the method according to configuration 1 to conform the print data to edge-compensated print data (S22); A method for calibrating print data, including: [Configuration 13] Obtaining edge compensation print data (S31) obtained by the method described in 12 of the configuration of the pattern to be printed; Controlling a printing process of a workpiece at least partially covered with a layer sensitive to electromagnetic waves or electron beams based on the edge correction print data (S32); A method for printing a pattern, including: [Configuration 14] 1. A system (2) for acquiring a compensation pattern for a workpiece patterning device, comprising: 1. A printing apparatus (1) configured to create a calibration pattern (60) using a plurality of simultaneously operating exposure beams (34, 34A-E) spaced apart in a first direction (X), comprising: the plurality of simultaneously operating exposure beams (34, 34A-E) can be swept in a second direction (Y) intersecting the first direction (X); The printing device (1) is configured to perform the printing in accordance with calibration pattern print data, a printing device, wherein the calibration pattern (60) has a plurality of edges (62, 64) extending in the second direction (Y); a measuring device (4) arranged to measure the position of the edge in the first direction for a plurality of sweep positions in the second direction of the printed calibration pattern; a processing device (6) configured to calculate a deviation of the measured position of the edge from an intended position of the edge according to the calibration pattern print data, the processing device (6) is further configured to associate each deviation with a used exposure beam (34A-E) of the simultaneously operating exposure beams (34, 34A-E) that prints the respective edge, a sweep position of the plurality of positions in the second direction (Y) at which the edge is printed, and a grid fraction position (66L, 66T) in the first direction of the simultaneously operating exposure beams (34, 34A-E) that prints the respective edge; the grid fractional positions (66L, 66T) being the intended positions of the edges relative to the edges of the intended coverage areas of the exposure beams (34A-E) of the simultaneously operating exposure beams (34, 34A-E) that print the respective edges; the processing unit (6) is further configured to calculate edge compensation data for adapting an edge representation of the pattern print data before printing to compensate for the calculated deviation; a processing device, the edge compensation data depending on the exposure beam (34A-E) used, the sweep position in the second direction (Y), and the grid fraction position (66L, 66T) in the first direction (X); 2. The method of claim 1, comprising: [Configuration 15] An apparatus (80) for processing print data defining a pattern to be printed, comprising: a processing circuit (8); A memory (7), The memory (7) contains instructions executable by the processing circuitry (8), whereby the processing circuitry (8) obtaining print data for the pattern to be printed; 15. Adapting the print data by edge-compensating the data acquired by the system for acquiring a compensation pattern according to configuration 14 into edge-compensated print data. An apparatus that is operable as follows. [Configuration 16] An apparatus (9) for processing edge-compensated print data obtained by the apparatus (80) for processing print data according to configuration 15, comprising: an apparatus whereby the printing apparatus (1) is the printing apparatus (1) of the system for obtaining a compensation pattern for a workpiece patterning device according to configuration 14; a printhead (32) having a plurality of simultaneously operating exposure beams (34, 34A-E) spaced apart in a first direction (X), a print head, wherein the plurality of simultaneously operating exposure beams (34, 34A-E) are capable of sweeping in a second direction (Y) intersecting the first direction (X); A control unit (5), a control unit configured to control the operation and relative motion of the print head based on the edge compensation print data; A printing device (1) having:

Claims

1. 1. A method of obtaining edge compensation data for a workpiece patterning device for adapting edge representations of pattern print data prior to printing, comprising: Printing (S11) a calibration pattern (60) using a plurality of simultaneously operating exposure beams (34, 34A-E) spaced apart in a first direction (X), the plurality of simultaneously operating exposure beams (34, 34A-E) are swept in a second direction (Y) intersecting the first direction (X); the printing is performed in accordance with calibration pattern print data; printing the calibration pattern (60) having a plurality of edges (62, 64) extending in the second direction; measuring (S12) the position of the edge (67) in the first direction for a plurality of sweep positions in the second direction (Y) on the printed calibration pattern; Calculating (S13) the deviation of the measured position of the edge (67) from the intended position of the edges (62, 64) according to the calibration pattern print data; Associating (S14) each deviation with a used exposure beam (34A-E) of the simultaneously operating exposure beams (34, 34A-E) that prints the respective edge, a sweep position of a plurality of positions in the second direction (Y) at which the edge is printed, and a grid fraction position (66L, 66T) in the first direction (X) of the exposure beam (34A-E) of the simultaneously operating exposure beams (34, 34A-E) that prints the respective edge; associating the grid fractional positions (66L, 66T) with the intended positions of the edges relative to edges (55) of the intended coverage areas of the exposure beams (34A-E) of the simultaneously operating exposure beams (34, 34A-E) that print the respective edges; calculating (S15) the edge compensation data for adapting an edge representation of pattern print data before printing to compensate for the calculated deviation, calculating the edge compensation data depending on the exposure beam (34A-E) used, the sweep position in the second direction (Y), and the grid fraction position (66L, 66T) in the first direction (X); A method comprising:

2. the edge compensation data is bitmap edge compensation data including data defining intensity adjustments of individual bits representing edges in the first direction (X) in the bitmap print data; 2. The method of claim 1.

3. the bitmap edge compensation data includes data defining an increase in intensity adjustment of individual bits representing the edge in the first direction when the edge of a print pattern in the bitmap print data is located within a corresponding edge location according to the calibration pattern print data; the bitmap edge compensation data includes data defining a reduction in intensity adjustment of individual bits in the bitmap print data, representing the edge in the first direction when the edge of the print pattern is located outside the corresponding edge position according to the calibration pattern print data; 3. The method according to claim 2.

4. The amount of each increase or decrease in intensity depends on the magnitude of the corresponding deviation of the measured position of the edge from the intended position of the edge according to the calibration pattern print data.

4. The method according to claim 3.

5. the bitmap edge compensation data is provided as a data matrix having as matrix indices the exposure beam used, the sweep position in the second direction, and the grid fraction position in the first direction; 5. The method according to claim 2, wherein the first and second electrodes are connected to a first electrode.

6. the edge compensation data is vector edge compensation data including data defining a shape change of a pattern structure representing an edge in the first direction in vector print data; 2. The method of claim 1.

7. the vector edge compensation data includes data that, when compared with a corresponding deviation of the measured position of the edge from an intended position of the edge according to the calibration pattern print data, causes a movement of the edge in the first direction to be equal in amount but in an opposite direction; 7. The method according to claim 6.

8. 8. The method of claim 1, wherein the associating of each deviation further comprises associating each deviation with a leading edge or a trailing edge relative to the first direction, whereby the edge compensation data further depends on whether the edge to be compensated is a leading edge or a trailing edge.

9. The method according to any one of claims 1 to 8, characterized in that the calibration pattern comprises lines in the second direction (Y).

10. 10. The method of claim 9, wherein the calibration pattern includes a reference line having a width that ensures that a leading edge and a trailing edge (62, 64) can be provided by the same sweep in the second direction (Y) of the multiple simultaneously operating exposure beams (34A-E).

11. 11. The method according to claim 9 or 10, characterized in that the width and position of the lines in the calibration pattern (60) are adapted to cover all simultaneously operating exposure beams (34A-E) involved in creating at least one edge (62, 64) of the calibration pattern.

12. Obtaining print data of a pattern to be printed (S21); Adapting the print data to edge-compensated print data by edge-compensating the data obtained by the method of claim 1 (S22); A method for calibrating print data, including:

13. Obtaining edge compensation print data (S31) of the pattern to be printed, the data being obtained by the method of claim 12; Controlling a printing process of a workpiece at least partially covered with a layer sensitive to electromagnetic waves or electron beams based on the edge correction print data (S32); A method for printing a pattern, including:

14. 1. A system (2) for obtaining edge compensation data for a workpiece patterning device for adapting edge representations of pattern print data prior to printing, comprising:

1. A printing apparatus (1) configured to create a calibration pattern (60) using a plurality of simultaneously operating exposure beams (34, 34A-E) spaced apart in a first direction (X), comprising: the plurality of simultaneously operating exposure beams (34, 34A-E) are swept in a second direction (Y) intersecting the first direction (X); The printing device (1) is configured to perform the printing in accordance with calibration pattern print data, a printing device, wherein the calibration pattern (60) has a plurality of edges (62, 64) extending in the second direction (Y); a measuring device (4) arranged to measure the position of the edge in the first direction for a plurality of sweep positions in the second direction of the printed calibration pattern; a processing device (6) configured to calculate a deviation of the measured position of the edge from an intended position of the edge according to the calibration pattern print data, the processing device (6) is further configured to associate each deviation with a used exposure beam (34A-E) of the simultaneously operating exposure beams (34, 34A-E) that prints the respective edge, a sweep position of a plurality of positions in the second direction (Y) at which the edge is printed, and a grid fraction position (66L, 66T) in the first direction of the simultaneously operating exposure beams (34, 34A-E) that prints the respective edge; the grid fractional positions (66L, 66T) being the intended positions of the edges of the simultaneously operating exposure beams (34, 34A-E) that print the respective edges relative to the edges of the intended coverage areas of the exposure beams (34A-E); the processing unit (6) is further configured to calculate the edge compensation data for adapting an edge representation of pattern print data before printing to compensate for the calculated deviation; a processing unit, wherein the edge compensation data depends on the exposure beam (34A-E) used, the sweep position in the second direction (Y), and the grid fraction position (66L, 66T) in the first direction (X); 2. The method of claim 1, comprising:

15. An apparatus (80) for processing print data defining a pattern to be printed, comprising: a processing circuit (8); A memory (7), The memory (7) contains instructions executable by the processing circuitry (8), whereby the processing circuitry (8) obtaining print data for the pattern to be printed; Adapting the print data by edge compensating the data acquired by the system for acquiring edge compensation data of claim 14 into edge-compensated print data. The apparatus is operable to:

16. 16. A device (9) for processing edge compensated print data obtained by a device (80) for processing print data according to claim 15, comprising: an apparatus whereby the printing apparatus (1) is a printing apparatus (1) of the system for acquiring edge compensation data for a workpiece patterning device according to claim 14; A printhead (32) having a plurality of simultaneously operating exposure beams (34, 34A-E) spaced apart in a first direction (X), a print head, wherein the plurality of simultaneously operating exposure beams (34, 34A-E) are sweepable in a second direction (Y) intersecting the first direction (X); A control unit (5), a control unit (5) configured to control the operation and relative movement of the print head (32) based on the edge compensation print data; A printing device (1) having:

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