Processing equipment

Abstract

To provide a processing device capable of supplying a proper liquid to a workpiece and the like.SOLUTION: A processing device for processing a workpiece comprises: a supply pipe which is connected to a tank for storing a liquid used to process the workpiece and feeds the liquid; a reading unit which reads liquid information from an identification unit attached to the tank and including liquid information on the liquid; and a determination unit which determines whether the liquid stored in the tank is suitable for processing the workpiece on the basis of the liquid information read by the reading unit.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a processing device for processing a workpiece. [Background technology]

[0002] The device chip manufacturing process uses a wafer in which devices are formed in multiple areas defined by multiple streets (planned division lines) arranged in a grid pattern. By dividing this wafer along the streets, multiple device chips, each equipped with a device, are obtained. The device chips are incorporated into various electronic devices, such as mobile phones and personal computers.

[0003] For example, a cutting device is used to divide the wafer. The cutting device includes a chuck table that holds the workpiece and a cutting unit to which an annular cutting blade that cuts the workpiece is attached. The wafer is held by the chuck table, and the cutting blade is rotated to cut into the wafer, thereby cutting and dividing the wafer.

[0004] Recently, development has been progressing on processes for dividing wafers using laser processing. Laser processing equipment is used for laser processing of wafers. The laser processing equipment is equipped with a chuck table that holds the workpiece and a laser irradiation unit that irradiates the workpiece with a laser beam.

[0005] For example, a laser processing device performs ablation processing on a wafer. Specifically, a laser beam is focused on the surface or inside of a wafer held by a chuck table and scanned along the streets, forming grooves (laser-processed grooves) in the wafer along the streets. When an external force is then applied to the wafer, the laser-processed grooves function as splitting starting points, and the wafer is split along the streets.

[0006] Various liquids are used when processing workpieces using processing devices such as the cutting device and laser processing device described above. For example, when processing a workpiece using a laser processing device, a protective film may be formed on the workpiece in advance to prevent debris generated by the laser processing from adhering to the workpiece. For example, a protective film is formed by dripping a solution (protective film material) containing a water-soluble resin onto the workpiece (see Patent Document 1). Then, after laser processing of the workpiece is completed, the protective film is removed together with the debris. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Laid-Open No. 2006-140311 Summary of the Invention [Problem to be solved by the invention]

[0008] The processing device includes a tank placement area in which a tank containing a liquid used to process the workpiece is placed, and a supply pipe connected to the tank. The liquid is supplied from the tank to the workpiece via the supply pipe depending on the processing status of the workpiece. For example, a tank containing a protective film material used to form a protective film is placed in the tank placement area of ​​a laser processing device. The protective film material supplied from the tank is then applied to the workpiece, thereby forming a protective film on the workpiece. The material of the protective film material is selected depending on the material of the workpiece, processing conditions, etc.

[0009] When the liquid stored in the tank is used up, the tank is replaced and a new tank filled with liquid is placed in the tank placement area. At this time, if an operator mistakenly places a tank containing a different liquid in the tank placement area, the unintended liquid will be supplied to the workpiece. This may cause poor processing or contamination of the workpiece, resulting in a decrease in processing quality.

[0010] The present invention has been made in view of the above problems, and has an object to provide a processing apparatus that can supply an appropriate liquid to a workpiece or the like. [Means for solving the problem]

[0011] According to one aspect of the present invention, a processing device for processing a workpiece includes: a supply pipe connected to a tank that contains a protective film material for forming a protective film on the workpiece and that supplies the protective film material; a reading unit that reads material information from an identification unit that is attached to the tank and contains material information indicating the material of the protective film material contained in the tank; and a determination unit that determines whether the protective film material contained in the tank is a predetermined protective film material based on the material information read by the reading unit. The protective film material is a solution containing polyvinyl alcohol, polyethylene glycol, polyethylene oxide, or polyvinylpyrrolidone. A processing apparatus is provided.

[0012] Preferably, the identification unit includes expiration date information indicating an expiration date for the protective film material, and the determination unit determines whether the expiration date for the protective film material stored in the tank has passed based on the expiration date information. Also preferably, the identification unit includes manufacturer information indicating a manufacturer of the protective film material, and the determination unit determines whether the manufacturer of the protective film material stored in the tank is a predetermined manufacturer based on the manufacturer information. Preferably, the processing device further includes a laser irradiation unit that irradiates the workpiece with a laser beam. Preferably, the tank includes an insertion opening for inserting the supply pipe, the insertion opening being blocked by a sheet having the identification part attached thereto, and the supply pipe is inserted into the insertion opening by breaking the area of ​​the sheet having the identification part attached thereto. [Effects of the Invention]

[0013] A processing device according to one aspect of the present invention includes a reading unit that reads liquid information from an identification unit attached to a tank, and a determining unit that determines whether the liquid contained in the tank is suitable for processing a workpiece based on the liquid information read by the reading unit. This confirms that the intended predetermined liquid is contained in the tank, and the appropriate liquid is supplied from the tank to the workpiece, etc. [Brief explanation of the drawings]

[0014] [Figure 1] FIG. [Figure 2] FIG. [Figure 3]FIG. 3(A) is a perspective view showing the liquid supply unit, and FIG. 3(B) is a partial cross-sectional front view showing the liquid supply unit. [Figure 4] FIG. 2 is a partial cross-sectional front view showing a liquid supply unit that supplies a protective film material to a workpiece. [Figure 5] FIG. 5(A) is a perspective view showing the tank, and FIG. 5(B) is a cross-sectional view showing the tank. [Figure 6] FIG. 2 is a perspective view showing a tank arranged in a tank arrangement area. [Figure 7] FIG. 2 is a block diagram showing a control unit. [Figure 8] 10 is a flowchart showing the procedure for installing a tank and operating the processing device. DETAILED DESCRIPTION OF THE INVENTION

[0015] The present embodiment will be described below with reference to the accompanying drawings. First, an example of the configuration of a processing device according to the present embodiment will be described. FIG. 1 is a perspective view showing a processing device 2. The processing device 2 is a laser processing device that performs laser processing on a workpiece. In FIG. 1, the X-axis direction (processing feed direction, left-right direction, first horizontal direction) and the Y-axis direction (indexing feed direction, front-back direction, second horizontal direction) are perpendicular to each other. Furthermore, the Z-axis direction (vertical direction, up-down direction, height direction) is perpendicular to the X-axis direction and the Y-axis direction.

[0016] The processing device 2 includes a base 4 that supports and houses each of the components that make up the processing device 2. An opening 4a is provided at a corner on the front end side of the base 4. Inside the opening 4a, a cassette support table 6 is provided that moves (lifts and lowers) along the Z-axis direction by an elevation mechanism (not shown). A cassette 8 that can house multiple workpieces 11 to be processed by the processing device 2 is mounted on the cassette support table 6. In FIG. 1, the outline of the cassette 8 is indicated by a two-dot chain line.

[0017] 2 is a perspective view showing a workpiece 11. For example, the workpiece 11 is a disk-shaped wafer made of a semiconductor material such as silicon, and has a front surface 11a and a back surface 11b that are generally parallel to each other. The workpiece 11 is divided into a plurality of rectangular regions by a plurality of streets (planned division lines) 13 that are arranged in a grid pattern so as to intersect with each other. Furthermore, devices 15, such as ICs (Integrated Circuits), LSIs (Large Scale Integration), LEDs (Light Emitting Diodes), and MEMS (Micro Electro Mechanical Systems) devices, are formed on the front surface 11a side of each of the regions divided by the streets 13.

[0018] However, there are no limitations on the material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may be a wafer (substrate) made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, etc.), sapphire, glass (quartz glass, borosilicate glass, etc.), resin, ceramics, metal, etc. Furthermore, there are no limitations on the type, number, shape, structure, size, arrangement, etc. of the devices 15.

[0019] A workpiece 11 is processed by a processing device 2 (see FIG. 1 ) and divided along streets 13 to produce a plurality of device chips, each including a device 15. When processing the workpiece 11 by the processing device 2, the workpiece 11 is supported by an annular frame 17.

[0020] The frame 17 is made of a metal such as SUS (stainless steel). A cylindrical opening 17a having a diameter larger than that of the workpiece 11 is provided in the center of the frame 17 so as to penetrate the frame 17 in the thickness direction. The workpiece 11 is placed inside the opening 17a.

[0021] Tape 19 is attached to workpiece 11 and frame 17. Tape 19 includes a circular film-like substrate and an adhesive layer (glue layer) provided on the substrate. For example, the substrate is made of a resin such as polyolefin, polyvinyl chloride, or polyethylene terephthalate. The adhesive layer is made of an epoxy-based, acrylic-based, or rubber-based adhesive. The adhesive layer may be an ultraviolet-curable resin that hardens when exposed to ultraviolet light.

[0022] When the center of the tape 19 is attached to the back surface 11b of the workpiece 11 and the outer periphery of the tape 19 is attached to the frame 17, the workpiece 11 is supported by the frame 17 via the tape 19. Then, the workpiece 11, supported by the frame 17, is housed in the cassette 8 (see FIG. 1).

[0023] 1, a transport unit (transport mechanism) 10 that transports workpiece 11 is provided behind opening 4a. Transport unit 10 is configured to be movable along the Y-axis direction, and transports workpiece 11 out of cassette 8 and into cassette 8. A gripper 10a that grips frame 17 is provided at the end of transport unit 10 on the opening 4a side (cassette 8 side).

[0024] Between the opening 4a and the transport unit 10, there is provided a temporary placement area 12 where the workpiece 11 carried out from the cassette 8 or the workpiece 11 to be carried into the cassette 8 is temporarily placed. A pair of guide rails 14 arranged roughly parallel to each other along the Y-axis direction is provided in the temporary placement area 12. The pair of guide rails 14 move toward and away from each other along the X-axis direction, sandwiching a frame 17 therebetween to align the workpiece 11.

[0025] A transport unit (transport mechanism) 16 for transporting the workpiece 11 is provided near the temporary placement area 12. For example, the transport unit 16 includes a plurality of suction pads for holding the upper surface of a frame 17 by suction.

[0026] A rectangular opening 4b is provided on the side of opening 4a, with its longitudinal direction aligned with the X-axis direction. A moving unit (moving mechanism) 18 including a flat moving table 18a is provided inside opening 4b. For example, moving unit 18 is a ball screw type moving mechanism including a ball screw (not shown) arranged along the X-axis direction, and moves moving table 18a along the X-axis direction. In addition, accordion-shaped dustproof and drip-proof covers 20 that expand and contract along the X-axis direction are provided on both sides of moving table 18a so as to cover the components of moving unit 18.

[0027] A chuck table (holding table) 22 that holds the workpiece 11 is provided on the moving table 18a. The upper surface of the chuck table 22 is a flat surface that is roughly parallel to the horizontal direction (XY plane direction) and constitutes a holding surface 22a that holds the workpiece 11. The holding surface 22a is connected to a suction source (not shown) such as an ejector via a flow path (not shown), a valve (not shown), and the like that are provided inside the chuck table 22. In addition, a plurality of clamps 24 that grip and fix the frame 17 are provided around the periphery of the chuck table 22.

[0028] The moving unit 18 moves the chuck table 22 together with the moving table 18a along the X-axis direction. This positions the chuck table 22 in a transfer area A where the workpiece 11 is transferred and in a processing area B where the workpiece 11 is processed. In addition, the chuck table 22 is connected to a rotation drive source (not shown) such as a motor that rotates the chuck table 22 around a rotation axis that is approximately parallel to the Z-axis direction.

[0029] A laser irradiation unit 26 that irradiates a laser beam is provided in the processing area B. The laser irradiation unit 26 includes a laser oscillator (not shown) such as a YAG laser, YVO4 laser, or YLF laser, and a head 28 arranged above the chuck table 22. The head 28 has a built-in optical system that guides the pulsed laser beam emitted from the laser oscillator to the workpiece 11, and the optical system includes optical elements such as a condenser lens that focuses the laser beam. The laser irradiation unit 26 irradiates the workpiece 11 held by the chuck table 22 with the laser beam, thereby performing laser processing on the workpiece 11.

[0030] A moving unit (moving mechanism, not shown) that moves head 28 along the Y-axis direction is connected to laser irradiation unit 26. For example, the moving unit is a ball screw type moving mechanism that includes a ball screw arranged along the Y-axis direction. This moving unit controls the position of head 28 in the Y-axis direction, and adjusts the focusing position of the laser beam in the Y-axis direction.

[0031] An imaging unit 30 is provided at a position overlapping with the movement path of the chuck table 22 (between the transport area A and the processing area B) to capture images of the workpiece 11 held by the chuck table 22. For example, the imaging unit 30 may include a visible light camera equipped with an imaging element that receives visible light and converts it into an electrical signal, or an infrared camera equipped with an imaging element that receives infrared light and converts it into an electrical signal. The image captured by the imaging unit 30 is used for aligning the workpiece 11 with the head 28 of the laser irradiation unit 26, etc.

[0032] A circular opening 4c is provided behind the chuck table 22. A liquid supply unit 32 that supplies liquid to the workpiece 11 is provided inside the opening 4c. For example, the liquid supply unit 32 forms a protective film on the workpiece 11 by supplying a protective film material (protective film liquid) to the workpiece 11. The liquid supply unit 32 also cleans the workpiece 11 by supplying a cleaning liquid to the workpiece 11. Details of the liquid supply unit 32 will be described later.

[0033] A transport unit (transport mechanism) 34 is provided above the liquid supply unit 32 to transport the workpiece 11 between the chuck table 22 and the liquid supply unit 32. For example, the transport unit 34 includes a plurality of suction pads that hold the upper surface of the frame 17 by suction.

[0034] A support stand 36 is provided behind the processing area B, and a display section (display unit, display device) 38 is mounted on the support stand 36. The display section 38 is composed of various displays and displays various information related to the processing device 2. An input section (input unit, input device) 40 for inputting various information to the processing device 2 is provided at the front end of the base 4. The input section 40 may be an operation panel with multiple operation keys, a mouse, a keyboard, or the like.

[0035] The processing device 2 may be equipped with a touch panel that functions as a user interface. In this case, the touch panel functions as the display unit 38 and the input unit 40. The operator can input information such as processing conditions to the processing device 2 by touching the touch panel while referring to the operation screen displayed on the touch panel.

[0036] The processing device 2 is also provided with a tank arrangement area 42 in which a tank (container) 44 is arranged. For example, a space capable of accommodating the tank 44 is provided at the rear end of the base 4, and this space corresponds to the tank arrangement area 42. However, there are no limitations on the form of the tank arrangement area 42 as long as the tank 44 can be arranged therein.

[0037] The tank 44 contains a liquid used in the processing device 2 and is connected to the processing device 2. For example, the tank 44 stores a liquid (protective film material) used to form a protective film on the workpiece 11. Details of the tank 44 will be described later.

[0038] Each of the components that make up the processing device 2 (such as the cassette support table 6, the transport unit 10, the guide rails 14, the transport unit 16, the moving unit 18, the chuck table 22, the clamps 24, the laser irradiation unit 26, the imaging unit 30, the liquid supply unit 32, the transport unit 34, the display unit 38, and the input unit 40) is connected to a control unit (control unit, control device) 46. The control unit 46 controls the operation of the processing device 2 by generating control signals that control the operation of each component of the processing device 2.

[0039] For example, the control unit 46 is configured by a computer. Specifically, the control unit 46 includes a processor such as a CPU (Central Processing Unit) that performs calculations necessary for the operation of the processing device 2, and memories such as a ROM (Read Only Memory) and a RAM (Random Access Memory) that store various information (data, programs, etc.) used for the operation of the processing device 2.

[0040] When processing the workpiece 11 with the processing device 2, first, the transport unit 10 moves toward the cassette 8 and grips the end of the frame 17 housed in the cassette 8 with the gripping portion 10a. Then, the transport unit 10 moves away from the cassette 8 along the Y-axis direction. As a result, the workpiece 11 is pulled out of the cassette 8 and placed on the pair of guide rails 14. Then, the pair of guide rails 14 move toward each other while supporting the frame 17 from below, and sandwich the frame 17. This allows the positioning of the workpiece 11.

[0041] Next, the frame 17 is held by suction by the transport unit 16, and the workpiece 11 is transported to the liquid supply unit 32. Then, a protective film that covers the surface 11a side (the device 15 side, see FIG. 2) of the workpiece 11 is formed by the liquid supply unit 32.

[0042] Next, the frame 17 is held by suction by the transport unit 34, and the workpiece 11 is transported from the liquid supply unit 32 to the chuck table 22 positioned in the transport area A. The workpiece 11 is then placed on the holding surface 22a of the chuck table 22 via the tape 19. The frame 17 is also fixed by a plurality of clamps 24. In this state, when the suction force (negative pressure) of the suction source is applied to the holding surface 22a, the workpiece 11 is held by suction by the chuck table 22 via the tape 19.

[0043] Next, the workpiece 11 is processed by the laser irradiation unit 26. Specifically, the chuck table 22 holding the workpiece 11 is positioned in the processing area B by the moving unit 18. Then, a laser beam is irradiated from the laser irradiation unit 26 onto the workpiece 11, and the workpiece 11 is subjected to laser processing.

[0044] For example, a laser beam is irradiated from the laser irradiation unit 26 along the street 13 (see FIG. 2) onto the surface 11a of the workpiece 11, and ablation processing is performed on the workpiece 11. As a result, linear grooves (laser processed grooves) are formed along the street 13 on the surface 11a of the workpiece 11.

[0045] Next, the chuck table 22 is positioned in the transfer area A by the moving unit 18. Furthermore, the frame 17 is held by suction by the transfer unit 34, and the processed workpiece 11 is transferred from the chuck table 22 to the liquid supply unit 32. The workpiece 11 is then cleaned by the liquid supply unit 32. The cleaned workpiece 11 is then transported onto the pair of guide rails 14 by the transfer unit 16, and then gripped by the gripping portion 10a of the transfer unit 10 and stored in the cassette 8.

[0046] As described above, the liquid supply unit 32 forms a protective film on the workpiece 11 and cleans the workpiece 11. That is, the liquid supply unit 32 functions as a protective film forming unit and a cleaning unit. FIG. 3(A) is a perspective view showing the liquid supply unit 32, and FIG. 3(B) is a partial cross-sectional front view showing the liquid supply unit 32. Note that some components of the liquid supply unit 32 are not shown in FIG. 3(B).

[0047] The liquid supply unit 32 includes a spinner table 50 that holds and rotates the workpiece 11. The upper surface of the spinner table 50 is a flat surface that is roughly parallel to the horizontal direction, and forms a holding surface 50a that holds the workpiece 11. The holding surface 50a is connected to a suction source (not shown) such as an ejector via a flow path (not shown), a valve (not shown), and the like that are provided inside the spinner table 50.

[0048] A rotational drive source 52 such as a motor is connected to the spinner table 50 to rotate the spinner table 50. The rotational drive source 52 has a cylindrical spindle (output shaft) 54 arranged along the vertical direction, and the upper end of the spindle 54 is connected to the center of the underside of the spinner table 50. When the spindle 54 is rotated, the spinner table 50 rotates around a rotation axis that is approximately perpendicular to the holding surface 50a.

[0049] As shown in Fig. 3(A), an elevation unit (elevating mechanism) 56 is connected to the rotary drive source 52. The elevation unit 56 includes a plurality of air cylinders 58 fixed to the rotary drive source 52. A cylindrical support leg 60 that supports the air cylinder 58 is attached to the lower end of each air cylinder 58. When the plurality of air cylinders 58 are operated simultaneously, the spinner table 50 and the rotary drive source 52 move up and down in the vertical direction.

[0050] A plurality of clamps 62 are provided around the periphery of spinner table 50 to grip and secure frame 17 supporting workpiece 11. When spinner table 50 is rotated by rotation drive source 52, centrifugal force causes the lower portions (weight portions) of clamps 62 to move radially outward from spinner table 50, and the upper portions (gripping portions) of clamps 62 to move radially inward from spinner table 50.

[0051] The spinner table 50 and the clamp 62 are surrounded by a liquid receiving member 64 formed in a hollow cylindrical shape. Specifically, the liquid receiving member 64 includes an annular outer wall 64a surrounding the spinner table 50 and the clamp 62, an annular bottom surface 64b protruding from the lower end of the outer wall 64a toward the inside in the radial direction of the liquid receiving member 64, and an annular inner wall 64c protruding upward from the inside end of the bottom surface 64b in the radial direction. The inside of the inner wall 64c corresponds to an insertion opening 64d through which the spindle 54 is inserted.

[0052] Furthermore, an annular cover 66 that covers the upper end of the inner wall 64c is provided inside the liquid receiving member 64. The cover 66 surrounds the spindle 54 and is arranged so as to overlap with the inner wall 64c of the liquid receiving member 64. By covering the upper part of the inner wall 64c with the cover 66 (see FIG. 4), it is possible to prevent the liquid present inside the liquid receiving member 64 from leaking out of the liquid receiving member 64 through the insertion opening 64d.

[0053] 3(A), a drainage port 68 is provided on the bottom surface 64b of the liquid receiving member 64, and a drainage path 70 is connected to the drainage port 68. The liquid stored in the liquid receiving member 64 is discharged to the outside of the liquid receiving member 64 through the drainage port 68 and the drainage path 70.

[0054] Further, provided inside the liquid receiving member 64 are a protective film material supply unit 72 that supplies a protective film material to the workpiece 11, and a cleaning liquid supply unit 74 that supplies a cleaning liquid to the workpiece 11. The protective film material supply unit 72 and the cleaning liquid supply unit 74 are arranged so as to sandwich the spinner table 50 therebetween.

[0055] The protective film material supply unit 72 includes an arm 72a formed in a hollow cylindrical shape and a protective film material supply nozzle 72b connected to the tip of the arm 72a. A rotation drive source 72c (see FIG. 3(B)) such as a motor is connected to the arm 72a. By rotating the arm 72a with the rotation drive source 72c, the protective film material supply nozzle 72b can be positioned between a position overlapping the spinner table 50 (supply position) and a position not overlapping the spinner table 50 (retracted position).

[0056] The protective film material supply unit 72 is connected to a protective film material supply source 78 that supplies the protective film material via a flow path 76 formed of a tube, a pipe, etc. The protective film material supplied from the protective film material supply source 78 to the arm 72a via the flow path 76 is dropped from the protective film material supply nozzle 72b onto the holding surface 50a of the spinner table 50.

[0057] The cleaning liquid supply unit 74 includes an arm 74a formed in a hollow cylindrical shape and a cleaning liquid supply nozzle 74b connected to the tip of the arm 74a. A rotation drive source 74c (see FIG. 3(B)) such as a motor is connected to the arm 74a. By rotating the arm 74a using the rotation drive source 74c, the cleaning liquid supply nozzle 74b can be positioned between a position overlapping the spinner table 50 (supply position) and a position not overlapping the spinner table 50 (retracted position).

[0058] The cleaning liquid supply unit 74 is connected to a cleaning liquid supply source 82 that supplies the cleaning liquid via a flow path 80 configured by a tube, a pipe, etc. The cleaning liquid supplied to the arm 74a from the cleaning liquid supply source 82 via the flow path 80 is dropped from the cleaning liquid supply nozzle 74b onto the holding surface 50a of the spinner table 50.

[0059] 4 is a partial cross-sectional front view showing the liquid supply unit 32 that supplies the protective film material (protective film liquid) 84 to the workpiece 11. When forming a protective film on the workpiece 11, the workpiece 11 is first held by the spinner table 50. For example, the workpiece 11 is placed on the spinner table 50 so that the front surface 11a is exposed upward and the back surface 11b faces the holding surface 50a. In this state, when the suction force (negative pressure) of the suction source is applied to the holding surface 50a, the workpiece 11 is sucked and held by the spinner table 50 via the tape 19 (see FIG. 3(A)).

[0060] Thereafter, the spinner table 50 is lowered by the lifting unit 56 (see FIG. 3(A)). As a result, the workpiece 11 is positioned inside the liquid receiving member 64, and the upper part of the insertion opening 64d is covered with the cover 66.

[0061] Next, protective film material supply nozzle 72b is positioned directly above holding surface 50a (supply position). Then, protective film material 84 is dropped from protective film material supply nozzle 72b while spinner table 50 is rotated by rotation drive source 52. Note that as spinner table 50 rotates, the upper part (gripping part) of clamp 62 moves radially inward of spinner table 50, and frame 17 is gripped by clamp 62.

[0062] For example, a solution containing a water-soluble resin is used as the protective film material 84. Examples of the water-soluble resin include PVA (polyvinyl alcohol), PEG (polyethylene glycol), PEO (polyethylene oxide), and PVP (polyvinylpyrrolidone).

[0063] The protective film material 84 dropped onto the center of the workpiece 11 flows down the surface 11a and reaches the outer periphery of the workpiece 11. As a result, the protective film material 84 is applied over the entire surface 11a of the workpiece 11. Thereafter, the protective film material 84 is dried to form a protective film that covers the surface 11a side of the workpiece 11. When a solution containing a water-soluble resin is used as the protective film material 84, a protective film made of the water-soluble resin is formed on the workpiece 11.

[0064] When the protective film is formed, the outer wall 64a of the liquid receiving member 64 prevents the protective film material 84 from scattering, and the protective film material 84 that is not used as the protective film is stored at the bottom of the liquid receiving member 64. The protective film material 84 stored in the liquid receiving member 64 is discharged to the outside of the liquid receiving member 64 via the drainage port 68 and the drainage path 70.

[0065] The workpiece 11 on which the protective film is formed is held by a chuck table 22 (see FIG. 1) and processed by a laser irradiation unit 26 (see FIG. 1). Specifically, a laser beam emitted from the laser irradiation unit 26 is irradiated onto the surface 11a of the workpiece 11 through the protective film. As a result, laser processing such as ablation processing is performed on the surface 11a of the workpiece 11.

[0066] When the workpiece 11 is irradiated with a laser beam, melted material (debris) of the workpiece 11 is generated and scattered. However, since a protective film is formed on the surface 11a side of the workpiece 11, debris is less likely to adhere to the surface 11a of the workpiece 11. This prevents contamination of the workpiece 11.

[0067] When the processing of the workpiece 11 is completed, the workpiece 11 is cleaned by the liquid supply unit 32. When cleaning the workpiece 11, the protective film material supply nozzle 72b is positioned at the retracted position, and the cleaning liquid supply nozzle 74b is positioned directly above the holding surface 50a (supply position). Then, cleaning liquid is supplied from the cleaning liquid supply nozzle 74b toward the rotating workpiece 11, thereby cleaning the workpiece 11. As the cleaning liquid, a liquid such as pure water, a mixed fluid obtained by mixing a liquid (such as pure water) with a gas (such as air), or the like is used.

[0068] If the protective film formed on the workpiece 11 is made of a water-soluble resin, the protective film can be easily removed by supplying a cleaning liquid. This simplifies the process of removing the protective film. Furthermore, foreign matter (debris, etc.) attached to the protective film can be removed together with the protective film.

[0069] In this embodiment, the tank 44 (see FIG. 1) is used as the protective film material supply source 78. Specifically, the tank 44 containing the protective film material 84 is disposed in the tank arrangement area 42 (see FIG. 1) and connected to the flow path 76. The protective film material 84 is then supplied from the tank 44 to the protective film material supply unit 72 via the flow path 76.

[0070] Fig. 5(A) is a perspective view showing the tank 44, and Fig. 5(B) is a cross-sectional view showing the tank 44. The tank 44 is formed in a hollow rectangular parallelepiped shape and contains a liquid 90 therein. For example, the tank 44 contains a protective film material 84 (see Fig. 4) used to form a protective film as the liquid 90. There are no limitations on the shape, size, or material of the tank 44.

[0071] 5(B), the tank 44 is provided with an insertion port 44a that connects the outside and inside of the tank 44. For example, the insertion port 44a is formed so as to penetrate the top wall of the tank 44. A supply pipe 92 that delivers the liquid 90 contained in the tank 44 is inserted into the insertion port 44a of the tank 44.

[0072] The supply pipe 92 is a piping such as a tube or pipe built into the processing device 2 (see FIG. 1), and corresponds to a part of the flow path 76 (see FIG. 3(B)) connected to the liquid supply unit 32. For example, the supply pipe 92 is provided in the tank arrangement area 42 (see FIG. 1), and its tip is inserted into the insertion port 44a of the tank 44. This connects the processing device 2 and the tank 44.

[0073] 5(A), the tank 44 is provided with an identification unit 94 that includes information (liquid information) about the liquid 90 contained in the tank 44. For example, the identification unit 94 is a one-dimensional code (barcode) or a two-dimensional code having a pattern corresponding to the liquid information. When the identification unit 94 is a two-dimensional code, the two-dimensional code may be a matrix type or a stack type.

[0074] The liquid information includes information (material information) indicating the material (type) of the liquid 90. For example, the name of the material of the liquid 90, a code (character string) corresponding to the material of the liquid 90, a product number of the liquid 90, etc. are used as the material information. The liquid information may also include information indicating the expiration date of the liquid 90 (expiration date information), information indicating the manufacturer of the liquid 90 (manufacturer information), etc.

[0075] There is no limitation on the method for attaching the identification part 94 to the tank 44. For example, a sheet (tape) 96 having a one-dimensional code or two-dimensional code attached thereto as the identification part 94 is attached to the tank 44. In this case, it is preferable that the sheet 96 is attached so that the insertion opening 44a is covered by the sheet 96 and the identification part 94 overlaps with the insertion opening 44a. Alternatively, the identification part 94 may be printed directly on the tank 44.

[0076] The tank 44 with the identification part 94 attached thereto is placed in the tank placement area 42. Fig. 6 is a perspective view showing the tank 44 placed in the tank placement area 42. For example, a rectangular parallelepiped opening 4d is formed in a corner of the base 4, extending inward from the side surface of the base 4. The shape and size of the opening 4d are set so that the tank 44 can be placed in the opening 4d.

[0077] The base 4 includes side walls 4e, 4f that are perpendicular to each other and exposed inside the opening 4d, and an upper wall 4g that is formed horizontally and connected to the side walls 4e, 4f. The space surrounded by the side walls 4e, 4f and the upper wall 4g corresponds to the tank arrangement area 42. The tank 44 is accommodated in the tank arrangement area 42 so as to overlap with the upper wall 4g. Although not shown in FIG. 6, a supply pipe 92 (see FIGS. 5(A) and 5(B)) is provided in the tank arrangement area 42.

[0078] Additionally, the tank arrangement area 42 is provided with a reading section (reading unit) 98 that reads liquid information from the identification section 94. The type of reading section 98 is selected depending on the configuration of the identification section 94. For example, if the identification section 94 is a one-dimensional code, a barcode reader is used as the reading section 98. Also, if the identification section 94 is a two-dimensional code, a two-dimensional code reader is used as the reading section 98.

[0079] When the identification unit 94 is attached to the upper surface of the tank 44, the reading unit 98 is provided on the upper wall 4g of the base 4. When the tank 44 is properly installed in the tank arrangement area 42, the identification unit 94 is positioned directly below the reading unit 98, and the information (liquid information) contained in the identification unit 94 is read by the reading unit 98. However, the position of the reading unit 98 can be changed as appropriate depending on the position of the identification unit 94. For example, when the identification unit 94 is attached to the side surface of the tank 44, the reading unit 98 may be disposed on the side walls 4e and 4f of the base 4.

[0080] When the liquid information contained in the identification unit 94 is read by the reading unit 98, the liquid information is input to the control unit 46. Then, the control unit 46 determines, based on the liquid information, whether the tank 44 arranged in the tank arrangement area 42 is an appropriate tank.

[0081] Fig. 7 is a block diagram showing the control unit 46. In addition to the blocks showing the functional configuration of the control unit 46, Fig. 7 also shows a part of the tank 44 and a reading unit 98.

[0082] The control unit 46 includes a processing unit 100 and a storage unit 110. The processing unit 100 processes information (signals, data, etc.) input from the outside, and generates and outputs various types of information (signals, data, etc.) to the outside. The storage unit 110 stores information (data, programs, etc.) used in processing by the processing unit 100.

[0083] The processing unit 100 includes an input unit 102 to which liquid information is input. When the identification unit 94 attached to the tank 44 is read by the reading unit 98, the liquid information included in the identification unit 94 is input to the input unit 102. The liquid information input to the input unit 102 may be stored in the memory unit 110 together with the time when the identification unit 94 was read. This allows a log of the liquid information to be accumulated in the memory unit 110.

[0084] The processing unit 100 also includes a determination unit 104 that determines, based on the liquid information read by the reading unit 98, whether the liquid 90 (see FIG. 5(B)) contained in the tank 44 arranged in the tank arrangement area 42 is a liquid suitable for processing the workpiece 11. Furthermore, the storage unit 110 includes a reference information storage unit 112 that stores reference information used for determining the liquid information. The determination unit 104 then compares the liquid information input from the input unit 102 with the reference information previously stored in the reference information storage unit 112 to determine whether the liquid 90 contained in the tank 44 is a liquid suitable for processing the workpiece 11.

[0085] For example, the liquid information input to the determination unit 104 includes information (material information) indicating the material of the liquid 90 contained in the tank 44. Furthermore, the reference information stored in the reference information storage unit 112 includes information (reference material information) indicating the material of the protective film material 84 (see FIG. 4) to be supplied to the workpiece 11. Then, based on the material information, the determination unit 104 determines whether the liquid 90 contained in the tank 44 is the predetermined protective film material 84 to be supplied to the workpiece 11.

[0086] Specifically, the determination unit 104 determines whether the material information input from the input unit 102 matches the reference material information input from the reference information storage unit 112. If the material information matches the reference material information, it is determined that the intended protective film material 84 is contained in the tank 44. On the other hand, if the material information does not match the reference material information, it is determined that the intended protective film material 84 is not contained in the tank 44.

[0087] However, the method for determining whether the liquid 90 contained in the tank 44 is suitable for treating the workpiece 11 is not limited to the above. For example, if the liquid information includes expiration date information for the liquid 90, it may be determined whether the expiration date for use of the liquid 90 contained in the tank 44 has passed.

[0088] Specifically, expiration date information (expiration date) of liquid 90 is input from input unit 102 to determination unit 104, and the current date (installation date of tank 44) stored in reference information storage unit 112 is input to determination unit 104. Then, determination unit 104 compares the expiration date of liquid 90 with the installation date of tank 44 to determine whether the expiration date of liquid 90 has passed.

[0089] Furthermore, if the liquid information includes manufacturer information of the liquid 90, it may be determined whether the manufacturer of the liquid 90 contained in the tank 44 is a predetermined manufacturer. In this case, the manufacturer information (manufacturer code) of the liquid 90 is input from the input unit 102 to the determination unit 104, and a reference manufacturer code (a code indicating the predetermined manufacturer) stored in the reference information storage unit 112 is input to the determination unit 104. Then, the determination unit 104 determines whether the manufacturer code of the liquid 90 matches the reference manufacturer code.

[0090] The processing unit 100 also includes a driving unit 106 that controls the operation of each component of the processing device 2. The result of the determination by the determining unit 104 is input to the driving unit 106. Then, the driving unit 106 generates a control signal to be output to each component of the processing device 2 based on the result of the determination by the determining unit 104.

[0091] If it is determined that the liquid 90 contained in the tank 44 is not suitable for processing the workpiece 11, the driving unit 106 may prohibit the use of the liquid 90 in the processing device 2. For example, if it is determined that the tank 44 does not contain a predetermined protective film material 84 (see FIG. 4), the driving unit 106 outputs a control signal to the liquid supply unit 32 to stop the operation of the liquid supply unit 32 until an appropriate tank 44 is installed in the tank arrangement area 42. This makes it possible to prevent the liquid 90 from being unintentionally supplied to the workpiece 11.

[0092] Furthermore, the driving unit 106 outputs a control signal to the display unit 38 (see FIG. 1), thereby causing the display unit 38 to display the result of the determination. For example, the display unit 38 displays a message indicating whether or not the liquid 90 contained in the tank 44 is a liquid (such as a protective film material) suitable for treating the workpiece 11. At this time, the display unit 38 may also simultaneously display the name of the material of the liquid 90 contained in the tank 44, the expiration date, the name of the manufacturer, etc.

[0093] Furthermore, when it is determined that the liquid 90 contained in the tank 44 is not suitable for processing the workpiece 11, the driving unit 106 may cause the components of the processing device 2 to issue a warning (error). For example, the driving unit 106 may cause the display unit 38 to display a warning message. Furthermore, if the processing device 2 is equipped with a speaker, the driving unit 106 may cause the speaker to issue a sound (warning sound) or a message (warning message) to notify the warning.

[0094] Next, a specific example of an operation method of the processing apparatus 2 will be described. Fig. 8 is a flowchart showing the procedure for installing the tank 44 and operating the processing apparatus 2. Below, an example will be described, mainly with reference to Figs. 7 and 8, in which it is determined whether the liquid 90 contained in the tank 44 is a predetermined protective film material that has been selected in advance.

[0095] First, liquid information is read from the identifier 94 attached to the tank 44 (reading step). Specifically, the tank 44 is placed in the tank arrangement area 42 (see FIGS. 1 and 6) (step S1). Then, the liquid information included in the identifier 94 attached to the tank 44 is read by the reading unit 98 (step S2). The liquid information includes information indicating the material of the liquid 90 contained in the tank 44 (material information). Then, the liquid information read by the reading unit 98 is output from the reading unit 98 to the control unit 46.

[0096] Next, based on the liquid information read by the reading unit 98, it is determined whether or not the liquid 90 contained in the tank 44 is a liquid suitable for treating the workpiece 11 (determination step). Specifically, the determination unit 104 determines whether or not the material information input from the input unit 102 matches the reference material information input from the reference information storage unit 112. This determines whether or not the liquid 90 in the tank 44 is a predetermined protective film material selected in advance (step S3).

[0097] If it is determined that the liquid 90 in the tank 44 is a predetermined protective film material (YES in step S3), a protective film is formed on the workpiece 11 using the liquid 90 (protective film forming step). Specifically, first, the processing device 2 is permitted to form a protective film (step S4). This puts the liquid supply unit 32 into an operating state.

[0098] Further, the supply pipe 92 is inserted into the tank 44 (step S5). Specifically, as shown in Figures 5(A) and 5(B), the supply pipe 92 is inserted into the insertion port 44a of the supply pipe 92. This connects the processing device 2 and the tank 44.

[0099] A sheet 96 with an identification portion 94 attached thereto is attached to the tank 44. For example, the sheet 96 is attached so that the insertion opening 44a is blocked by the sheet 96 and the identification portion 94 overlaps the insertion opening 44a. In this case, when the supply pipe 92 is inserted into the insertion opening 44a, the area of ​​the sheet 96 with the identification portion 94 attached is broken by the tip of the supply pipe 92. This destroys the identification portion 94, preventing the identification portion 94 from being reused after the tank 44 is opened.

[0100] 5(A) and 5(B), the tip surface of the supply pipe 92 is preferably inclined with respect to the width direction (radial direction) of the supply pipe 92. This forms an acute angle at the tip of the supply pipe 92, making it easier to tear the sheet 96.

[0101] Thereafter, a protective film is formed on the workpiece 11 using the liquid 90 (protective film material) contained in the tank 44 (step S6, see FIG. 4). Then, the workpiece 11 on which the protective film has been formed is transferred to the chuck table 22 (see FIG. 1) and processed by the laser irradiation unit 26 (see FIG. 1).

[0102] On the other hand, if it is determined that the liquid 90 in the tank 44 is not the predetermined protective film material (NO in step S3), the formation of the protective film by the processing device 2 is prohibited (step S7). As a result, the liquid supply unit 32 is stopped, and the liquid supply unit 32 cannot form a protective film on the workpiece 11.

[0103] Furthermore, the processing device 2 issues a warning (warning step, step S8). Specifically, a warning message is displayed on the display unit 38 (see FIG. 1), and a warning sound or warning message is emitted from a speaker (not shown). This notifies the operator that an inappropriate tank 44 has been placed in the tank placement area 42, and the worker places an appropriate tank 44 in the tank placement area 42 (step S1).

[0104] The above-described method of operating the processing apparatus 2 is realized by the control unit 46 controlling the operation of each component of the processing apparatus 2. Specifically, the memory unit 110 of the control unit 46 stores programs for causing the processing apparatus 2 to execute a reading step, a determination step, a protective film formation step, a warning step, etc. The control unit 46 then reads and executes the programs from the memory unit 110 and outputs control signals to each component of the processing apparatus 2. As a result, the processing apparatus 2 automatically performs operations such as reading liquid information, determining the liquid 90, forming a protective film, and issuing a warning.

[0105] As described above, the processing device 2 according to this embodiment includes the reading unit 98 that reads liquid information from the identification unit 94 attached to the tank 44, and the control unit 46 (determination unit 104) that determines whether the liquid 90 contained in the tank 44 is suitable for processing the workpiece 11 based on the liquid information read by the reading unit 98. This allows confirmation that the intended predetermined liquid is contained in the tank 44, and an appropriate liquid is supplied from the tank 44 to the workpiece 11, etc.

[0106] In the above embodiment, an example has been described in which liquid information is read from the identification unit 94 (see FIGS. 5(A) to 7) that is configured as a one-dimensional code or a two-dimensional code, but there are no limitations on the manner in which the liquid information may be read. For example, the liquid information may be read using RFID (Radio Frequency Identification).

[0107] Specifically, an RF (Radio Frequency) tag can be attached to the tank 44 as the identification unit 94. The RF tag includes a control circuit including an IC and memory, and an antenna used for transmitting and receiving information. The memory of the RF tag stores liquid information including material information, expiration date information, manufacturer information, etc. An RFID reader is used as the reading unit 98 (see FIGS. 6 and 7). The liquid information stored in the RF tag is read by the RFID reader and output to the control unit 46.

[0108] In the above embodiment, the liquid 90 contained in the tank 44 is a protective film material. However, there are no limitations on the liquid 90 contained in the tank 44 as long as it is a liquid used to treat the workpiece 11 in the processing device 2 (see FIG. 1). For example, the tank 44 may contain a chemical liquid or a cleaning liquid used in the processing device 2.

[0109] Furthermore, in the above embodiment, an example has been described in which the processing device 2 is a laser processing device equipped with the laser irradiation unit 26, but there is no limitation on the type of processing device 2. For example, the processing device 2 may be a cutting device equipped with a cutting unit that cuts the workpiece 11, a grinding device equipped with a grinding unit that grinds the workpiece 11, a polishing device equipped with a polishing unit that polishes the workpiece 11, or the like.

[0110] The cutting unit of the cutting device has a spindle, and an annular cutting blade is attached to the tip of the spindle. The cutting blade is rotated and cuts into the workpiece 11, thereby cutting the workpiece 11. The grinding unit of the grinding device has a spindle, and an annular grinding wheel including a grinding stone is attached to the tip of the spindle. The grinding wheel is rotated and the grinding stone is brought into contact with the workpiece 11, thereby grinding the workpiece 11. The polishing unit of the polishing device has a spindle, and a disc-shaped polishing pad is attached to the tip of the spindle. The polishing pad is rotated and brought into contact with the workpiece 11, thereby polishing the workpiece 11.

[0111] In addition, the structure, method, etc. according to this embodiment can be modified as appropriate without departing from the scope of the object of the present invention. [Explanation of symbols]

[0112] 11 Workpiece 11a surface 11b Back side 13th Street (Planned division line) 15 devices 17 frames 17a aperture 19 Tape 2 Processing equipment 4 Foundation 4a,4b,4c,4d opening 4e,4f side wall 4g Upper wall 6 Cassette support stand 8 cassettes 10. Transport unit (transport mechanism) 10a Grip part 12 Temporary Storage Area 14 Guide rail 16 Transport unit (transport mechanism) 18 Mobile unit (mobile mechanism) 18a Mobile Table 20 Dustproof and water-resistant cover 22 Chuck table (holding table) 22a Holding surface 24 Clamp 26 Laser irradiation unit 28 heads 30 Imaging unit 32 Liquid supply unit 34 Transport unit (transport mechanism) 36 Support stand 38 Display unit (display unit, display device) 40 Input section (input unit, input device) 42 Tank placement area 44 Tank (container) 44a insertion port 46 Control unit (control unit, control device) 50 Spinner Table 50a holding surface 52 Rotational drive source 54 Spindle (output shaft) 56 Lifting unit (lifting mechanism) 58 Air Cylinder 60 Support legs 62 Clamp 64 Liquid receiving member 64a Exterior wall 64b Bottom 64c inner wall 64d insertion port 66 Cover 68 Drainage port 70 Drainage Channel 72 Protective film supply unit 72a Arm 72b Protective film material supply nozzle 72c Rotational drive source 74 Cleaning liquid supply unit 74a Arm 74b Cleaning liquid supply nozzle 74c Rotational drive source 76 Flow path 78 Protective membrane material supply source 80 flow path 82 Cleaning fluid supply source 84 Protective film material (protective film liquid) 90 liquid 92 Supply pipe 94 Identification section 96 sheets (tape) 98 Reading unit 100 Processing section 102 Input section 104 Judgment section 106 Drive unit 110 Storage section 112 Reference information storage unit

Claims

1. A processing device for processing a workpiece, a supply pipe connected to a tank containing a protective film material for forming a protective film on the workpiece, the supply pipe supplying the protective film material; a reading unit that reads material information from an identification unit that includes material information indicating the material of the protective film material attached to the tank and contained in the tank; a determination unit that determines whether the protective film material contained in the tank is a predetermined protective film material based on the material information read by the reading unit, The processing device is characterized in that the protective film material is a solution containing polyvinyl alcohol, polyethylene glycol, polyethylene oxide, or polyvinylpyrrolidone.

2. the identification portion includes expiration date information indicating an expiration date of the protective film material; 2. The processing device according to claim 1, wherein the determining unit determines whether the expiration date of the protective film material stored in the tank has passed, based on the expiration date information.

3. the identification portion includes manufacturer information indicating a manufacturer of the protective film material, 3. The processing device according to claim 1, wherein the determining unit determines whether the protective film material stored in the tank is manufactured by a predetermined manufacturer based on the manufacturer information.

4. 4. The processing apparatus according to claim 1, further comprising a laser irradiation unit for irradiating the workpiece with a laser beam.

5. the tank has an insertion port into which the supply pipe is inserted; the insertion opening is closed by a sheet having the identification part attached thereto; 5. The processing device according to claim 1, wherein the supply pipe is inserted into the insertion opening by tearing the area of ​​the sheet where the identification part is attached.

Images