Disk drive suspension, method for adjusting vibration characteristics thereof, and method for manufacturing the same

Abstract

To provide a disk device suspension with excellent performance capable of effectively suppressing flexure vibration, vibration characteristics adjustment method, and manufacturing method thereof.SOLUTION: In a disk device, a suspension 10 includes: a load beam 20 having a dimple 24; and a flexure 30 stacked on the load beam. The load beam and the flexure are fixed in first fixed portions 22L, 22R and a second fixed portion 23 closer to the tip of the load beam than the first fixed portions. The flexure has a tongue 42 facing the dimple and the outriggers 50L and 50R connected to the tongue. The outrigger is bent in the thickness direction of the load beam at the bend positioned between the dimple and the first fixed portion in the length direction of the load beam.SELECTED DRAWING: Figure 8

Description

[Technical Field]

[0001] The present invention relates to a suspension for a disk drive used in a hard disk drive or the like, a method for adjusting the vibration characteristics thereof, and a manufacturing method thereof. [Background technology]

[0002] Hard disk drives (HDDs) are used in information processing devices such as personal computers. Hard disk drives include a magnetic disk that rotates around a spindle and a carriage that rotates around a pivot shaft. The carriage has an actuator arm and rotates around the pivot shaft in the track width direction of the disk by a positioning motor such as a voice coil motor.

[0003] A disk drive suspension (hereinafter simply referred to as the suspension) is attached to the actuator arm. The suspension includes a load beam and a flexure placed on the load beam. A slider that constitutes a magnetic head is mounted on a gimbal portion formed near the tip of the flexure. The slider is equipped with an element (transducer) for accessing the disk, such as reading or writing data. The load beam, flexure, and slider constitute a head gimbal assembly.

[0004] The gimbal portion includes a tongue on which the slider is mounted and a pair of outriggers formed on both sides of the tongue. These outriggers each have a shape that protrudes outward from both sides of the flexure. The vicinities of both ends of each outrigger in the longitudinal direction are fixed to the load beam by, for example, laser welding. Each outrigger can bend like a spring in the thickness direction, and plays an important role in ensuring the gimbal movement of the tongue.

[0005] To accommodate the increasing recording density of disks, it is necessary to further miniaturize the head gimbal assembly and enable the slider to be positioned with higher precision relative to the disk's recording surface. To achieve this, it is necessary to minimize flexure vibration while ensuring the gimbal motion required of the head gimbal assembly. For example, as described in Patent Documents 1-3, it is known to provide a damper material in part of the flexure to suppress flexure vibration. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] U.S. Patent No. 6,967,821 [Patent Document 2] Japanese Patent Application Laid-Open No. 2006-221726 [Patent Document 3] Japanese Patent Application Laid-Open No. 2010-86630 Summary of the Invention [Problem to be solved by the invention]

[0007] While attaching a damper material to the flexure can suppress the vibration of the flexure, it also changes the rigidity of the flexure. This change can have an undesirable effect on gimbal motion. In addition, the process of attaching the damper material is required, which increases the manufacturing cost of the suspension.

[0008] An object of the present invention is to provide a disk drive suspension that can effectively suppress vibrations of a flexure and has excellent performance. [Means for solving the problem]

[0009] A disk drive suspension according to one embodiment includes a load beam having a dimple and a flexure overlapped on the load beam. The load beam and the flexure are fixed at a first fixed portion and a second fixed portion that is closer to the tip of the load beam than the first fixed portion. The flexure has a tongue facing the dimple and an outrigger connected to the tongue. The outrigger is bent in the thickness direction of the load beam at a bend located between the dimple and the first fixed portion in the longitudinal direction of the load beam.

[0010] For example, the bent portion may be located between the tongue and the first fixed portion in the length direction. The outrigger may have a first surface at least a portion of which faces the load beam and a second surface opposite to the first surface in the thickness direction, and may be bent at the bent portion so that the first surface is convex.

[0011] The outriggers may include a first outrigger and a second outrigger aligned in a width direction of the load beam, in which case the tongue may be located between the first outrigger and the second outrigger in the width direction, and each of the first outrigger and the second outrigger may have the bent portion.

[0012] In one embodiment of a method for adjusting the vibration characteristics of a suspension for a disk drive, for a specific vibration mode, a first gain of the flexure is measured when the bent portion is not formed in the outrigger, and for that vibration mode, for each of a plurality of positions on the outrigger, a second gain of the flexure is measured when the bent portion is formed at that position, and the position among the plurality of positions at which the second gain smaller than the first gain is obtained is determined to be the formation position of the bent portion to be applied to the suspension for the disk drive to be manufactured.

[0013] For example, the first gain and the second gain at the plurality of positions may be measured for each of a plurality of vibration modes, and in this case, a position among the plurality of positions at which the second gain smaller than the first gain is obtained for at least one of the plurality of vibration modes may be determined as a formation position of the bent portion to be applied to the disk drive suspension to be manufactured.

[0014] In addition, in one embodiment of a method for adjusting the vibration characteristics of a suspension for a disk drive, for a specific vibration mode, a first gain of the flexure is measured when the bending portion is not formed in the outrigger, and for the vibration mode, a second gain of the flexure is measured for each of a plurality of bending angles of the outrigger at the bending portion, and the angle among the plurality of bending angles at which the second gain smaller than the first gain is obtained is determined as the bending angle of the bending portion to be applied to the suspension for the disk drive to be manufactured.

[0015] For example, the first gain and the second gain for the plurality of bending angles may be measured for each of a plurality of vibration modes, and in this case, a bending angle at which the second gain smaller than the first gain is obtained in at least one of the plurality of vibration modes may be determined as the bending angle of the bending portion to be applied to the disk drive suspension to be manufactured.

[0016] In the method for manufacturing a disk drive suspension according to one embodiment, a suspension whose vibration characteristics are adjusted by the above-described adjustment method is manufactured. [Effects of the Invention]

[0017] According to the present invention, it is possible to provide a disk drive suspension that can effectively suppress vibrations of a flexure and has excellent performance. [Brief explanation of the drawings]

[0018] [Figure 1]FIG. 1 is a schematic perspective view showing an example of a disk device according to an embodiment. [Figure 2] FIG. 2 is a schematic cross-sectional view of the disk drive shown in FIG. [Figure 3] FIG. 3 is a schematic plan view of a suspension according to one embodiment. [Figure 4] FIG. 4 is a schematic plan view of a flexure according to an embodiment. [Figure 5] FIG. 5 is a schematic cross-sectional view of an outrigger and load beam including a bend according to one embodiment. [Figure 6] FIG. 6 is a schematic perspective view showing a flexure vibrating in (a) the primary torsion mode, (b) the secondary torsion mode, and (c) the tertiary torsion mode, together with a load beam. [Figure 7] FIG. 7 is a schematic perspective view of a flexure vibrating in (a) the primary torsion mode, (b) the secondary torsion mode, and (c) the tertiary torsion mode. [Figure 8] FIG. 8 is a diagram showing a specific example of the position where the bent portion is formed in the suspension according to one embodiment. [Figure 9] FIG. 9 is a flowchart showing an example of a method for adjusting vibration characteristics and a method for manufacturing a suspension according to an embodiment. [Figure 10] FIG. 10 is a diagram showing an example of the results of measuring the first gain and the second gain for a suspension according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0019] An embodiment of the present invention will be described with reference to the drawings. 1 is a schematic perspective view showing an example of a disk drive (HDD) 1. This disk drive 1 has a case 2, multiple disks 4 that rotate around a spindle 3, a carriage 6 that can rotate around a pivot shaft 5, and a positioning motor (voice coil motor) 7 for driving the carriage 6. The case 2 is sealed with a lid (not shown).

[0020] 2 is a schematic cross-sectional view showing a part of the disk device 1. As shown in FIGS. 1 and 2, a carriage 6 is provided with a plurality of arms (carriage arms) 8. A suspension 10 is attached to the tip of each arm 8. A slider 11 constituting a magnetic head is provided at the tip of each suspension 10. When the disk 4 rotates at high speed, air flows in between the disk 4 and the slider 11, forming an air bearing.

[0021] 2, the suspension 10 includes a base plate 12. The base plate 12 is formed with a boss portion 12a that is inserted into a hole 8a formed in the arm 8.

[0022] When the carriage 6 is rotated by the positioning motor 7 , the suspension 10 moves in the radial direction of the disk 4 , and the slider 11 moves to the desired track on the disk 4 .

[0023] 3 is a schematic plan view of a suspension 10 according to this embodiment. The suspension 10 includes a load beam 20 and a flexure 30. In this embodiment, a width direction X, a length direction Y, and a thickness direction Z are defined, which are perpendicular to each other as shown in the figure. A sway direction S is also defined, as indicated by an arc-shaped arrow near the tip of the load beam 20. The load beam 20, the flexure 30, and the suspension 10 all have an elongated shape in the length direction Y.

[0024] The length direction Y is parallel to the central axis AX of the suspension 10. The load beam 20 and the flexure 30 have shapes that are substantially symmetrical with respect to the central axis AX.

[0025] The load beam 20 is made of a metal material and has a flat plate shape. A tab 21 is provided at the tip of the load beam 20. The load beam 20 has a planar shape that tapers toward the tab 21. The load beam 20 is connected to the base plate 12 shown in FIG. 2.

[0026] The flexure 30 is placed on the load beam 20. The flexure 30 includes a metal base 31, a wiring layer 32, and an insulating layer 33. The metal base 31 is made of a metal material such as stainless steel, and most of it faces the load beam 20.

[0027] The thickness of the metal base 31 is smaller than that of the load beam 20. The thickness of the metal base 31 is preferably 12 to 25 μm, and is 20 μm in one example. The thickness of the load beam 20 is 30 μm in one example.

[0028] The load beam 20 and the metal base 31 are fixed by a pair of first fixing portions 22L, 22R and a second fixing portion 23. The fixing portions 22L, 22R, 23 can be fixed by, for example, laser spot welding. The first fixing portions 22L, 22R are aligned in the width direction X. The distances from the first fixing portions 22L, 22R to the central axis AX are the same. The second fixing portion 23 is located closer to the tab 21 (the tip of the load beam 20) than the first fixing portions 22L, 22R. The second fixing portion 23 is located on the central axis AX.

[0029] The wiring layer 32 includes a plurality of wires made of a metal material with excellent conductivity, such as copper. The insulating layer 33 includes a plurality of layers, such as a layer that underlies each wire and a layer that covers each wire. These layers can be made of, for example, polyimide.

[0030] Most of the wiring layer 32 and the insulating layer 33 are formed on the metal base 31. In the example of Fig. 3, the wiring layer 32 and the insulating layer 33 include portions that are not supported by the metal base 31, such as a pair of aerial wiring portions 34L and 34R.

[0031] 4 is a schematic plan view of the flexure 30 seen from the metal base 31 side. As shown in FIGS. 3 and 4, the metal base 31 has a tip end 40 and a base end 41 that are spaced apart in the longitudinal direction Y. As shown in FIG. 3, the tip end 40 is located near the tab 21 and is fixed to the load beam 20 by the second fixing portion 23 described above.

[0032] The flexure 30 further includes a tongue 42, a first outrigger 50L, and a second outrigger 50R. In most of the tongue 42, an insulating layer 33 is laminated on a metal base 31. In the example of FIGS. 3 and 4, the outriggers 50L, 50R are formed by the metal base 31. That is, the outriggers 50L, 50R do not include the wiring layer 32 or the insulating layer 33.

[0033] The tongue 42 is located between the tip end 40 and the base end 41 in the longitudinal direction Y. The outriggers 50L, 50R are disposed on both outer sides of the tongue 42 in the width direction X. In other words, the tongue 42 is located between the first outrigger 50L and the second outrigger 50R in the width direction X.

[0034] 4, the tongue 42 has a first portion 42a, a second portion 42b, and a connecting portion 42c that connects the first portion 42a and the second portion 42b. The second portion 42b is located between the first portion 42a and the tip portion 40 in the longitudinal direction Y. The width of the connecting portion 42c is smaller than the widths of the first portion 42a and the second portion 42b.

[0035] 3, the slider 11 is mounted on the tongue 42. The tongue 42 has a plurality of terminals 42d used for electrical connection with the slider 11. These terminals 42d are provided on the second portion 42b.

[0036] The slider 11 has an element, such as an MR element, that can convert magnetic signals to electric signals. These elements are used to access the disk 4, such as to write or read data. The slider 11, load beam 20, and flexure 30 constitute a head gimbal assembly.

[0037] As shown in Figure 3, a dimple 24 protruding toward the tongue 42 is formed near the tip of the load beam 20. The dimple 24 is located on the central axis AX. The tip of the dimple 24 is in contact with the tongue 42. The tongue 42 swings around the tip of the dimple 24, thereby performing the desired gimbal movement. The tongue 42, outriggers 50L and 50R, dimple 24, etc. form a gimbal portion 43.

[0038] The first outrigger 50L has a base end 51, a base end arm 52, a tip arm 53, and a connecting portion 54. The base end 51 is fixed to the load beam 20 by the first fixing portion 22L. The base end arm 52 extends from the base end 51 toward the side of the tongue 42. In the example of FIGS. 3 and 4 , the base end arm 52 is inclined with respect to the longitudinal direction Y so as to move away from the central axis AX as it approaches the tongue 42. One end of the tip arm 53 is connected to the base end arm 52, and the other end is connected to the tip end 40. The connecting portion 54 is curved in a U shape and connects the tip of the base end arm 52 and the first portion 42a of the tongue 42.

[0039] The second outrigger 50R has a shape that is line-symmetrical to the first outrigger 50L with respect to the central axis AX. That is, the second outrigger 51R has a base end portion 51, a base end arm 52, a tip arm 53, and a connecting portion 54. The base end portion 51 is fixed to the load beam 20 by a first fixing portion 22R. In the example of FIGS. 3 and 4, the tip arms 53 of the outriggers 50L, 50R are integrated with each other on the central axis AX between the tip end portion 40 and the tongue 42 and are connected to the tip end portion 40.

[0040] The first outrigger 50L can bend in the thickness direction Z between the first fixed portion 22L and the second fixed portion 23. Similarly, the second outrigger 50R can bend in the thickness direction Z between the first fixed portion 22R and the second fixed portion 23. The tongue 42 is elastically supported by the outriggers 50L, 50R and can swing around the dimple 24 as a fulcrum.

[0041] 3 and 4, a pair of microactuator elements 44L, 44R are mounted on the gimbal portion 43. These microactuator elements 44L, 44R are each made of a piezoelectric material and are arranged on both sides of the slider 11 in the width direction X. One end of the microactuator element 44L in the length direction Y is connected to the first portion 42a of the tongue 42, and the other end is connected to the second portion 42b of the tongue 42. Similarly, one end of the microactuator element 44R in the length direction Y is connected to the first portion 42a, and the other end is connected to the second portion 42b.

[0042] The microactuator elements 44L, 44R have the function of rotating the tongue 42 in the sway direction S. In the example of FIGS. 3 and 4, limiter members 45L, 45R are provided to suppress excessive swing of the tongue 42. One end of the limiter member 45L is connected to the second portion 42b of the tongue 42, and the other end is connected to the tip arm 53 of the first outrigger 50L. One end of the limiter member 45R is connected to the second portion 42b of the tongue 42, and the other end is connected to the tip arm 53 of the second outrigger 50R. The limiter members 45L, 45R can be formed of, for example, the insulating layer 33.

[0043] The outriggers 50L, 50R are each bent in the thickness direction Z at a bent portion 55. In the example of Fig. 3 and Fig. 4, the bent portion 55 is located at the base end arm 52 of each of the outriggers 50L, 50R.

[0044] 5 is a schematic cross-sectional view of the first outrigger 50L (base arm 52) including the bent portion 55 and the load beam 20. The base arm 52 has a first surface F1 facing the load beam 20 and a second surface F2 opposite the first surface F1. At the bent portion 55, the base arm 52 is bent so that the first surface F1 is convex. It can also be said that the base arm 52 is bent so that it is convex toward the load beam 20.

[0045] The bending angle θ of the base end arm 52 at the bending portion 55 can have various values, and is, for example, 0.5° or more and 3° or less. For example, the bending angle θ corresponds to the angle at which the first plane F1 or the second plane F2 changes at the bending portion 55. The base end arm 52 may be smoothly bent at the bending portion 55 so as to have a curvature.

[0046] The bent portion 55 does not necessarily have to be provided at a position facing the load beam 20 as shown in Fig. 5. That is, the bent portion 55 may be provided at a portion of the base end arm 52 shown in Fig. 3 that protrudes laterally from the load beam 20. The bent portion 55 may also be provided at a position different from the base end arm 52, such as the tip arm 53.

[0047] The position and shape of the bent portion 55 of the second outrigger 50R are the same as the position and shape of the bent portion 55 of the first outrigger 50L. That is, the bent portion 55 of the first outrigger 50L and the bent portion 55 of the second outrigger 50R are provided at the same position in the longitudinal direction Y.

[0048] The bent portions 55 of the outriggers 50L, 50R serve to suppress vibration (resonance) of the flexure 30. Various modes of vibration can occur in the flexure 30. Typical examples of vibration modes include a primary torsion mode, a secondary torsion mode, and a tertiary torsion mode.

[0049] 6 and 7 are schematic perspective views of the flexure 30 vibrating in (a) the primary torsional mode, (b) the secondary torsional mode, and (c) the tertiary torsional mode. In Fig. 6, the load beam 20 is shown together with the flexure 30. On the other hand, in Fig. 7, the load beam 20 is not shown.

[0050] In the primary torsional mode shown in Figures 6(a) and 7(a), the outriggers 50L, 50R deform to have one vertex (mountain or valley). For example, in Figure 6(a), the first outrigger 50L is curved so that the middle portion of the tip arm 53 protrudes downward.

[0051] In the secondary torsional mode shown in Figures 6(b) and 7(b), the outriggers 50L, 50R deform to have two vertices (peaks or valleys). For example, in Figure 6(b), the first outrigger 50L is curved so that the middle portion of the base arm 52 protrudes upward and the middle portion of the tip arm 53 protrudes downward.

[0052] In the tertiary torsion mode shown in Figures 6(c) and 7(c), the outriggers 50L, 50R deform to have three vertices (peaks or valleys). For example, in Figure 6(c), the first outrigger 50L is curved so that the middle portion of the base arm 52 protrudes upward, the area near the connection part 54 protrudes downward, and the middle portion of the tip arm 53 protrudes upward.

[0053] The specific positions at which the bent portions 55 are formed in the outriggers 50L, 50R can be determined by comprehensively considering the various vibration modes including these first to third torsional modes.

[0054] 8 is a diagram showing a specific example of the position where the bent portion 55 is formed in the suspension 10 according to this embodiment. In this figure, along with a plan view of the suspension 10, (a) a graph showing the cross-sectional shape of the first outrigger 50L, (b) a graph showing the displacement amount (amplitude) of the first outrigger 50L in the secondary torsion mode, and (c) a graph showing the displacement amount (amplitude) of the first outrigger 50L in the tertiary torsion mode are shown.

[0055] In the graph of FIG. 8(a), the horizontal axis represents the position [mm] in the longitudinal direction Y with the origin O as the reference (zero), and the vertical axis represents the height in the direction from the slider 11 toward the dimple 24 (the direction from the tongue 42 toward the dimple 24). The origin O corresponds to the center of the connection between the suspension 10 and the arm 8 shown in FIG. 1. In one example, the origin O is the center of the boss portion 12a provided on the base plate 12 described above.

[0056] The graph in Figure 8(a) shows curves for Comparative Example EX0 and Examples EX1, EX2, and EX3. These curves all represent the shape of the first outrigger 50L along a line CL drawn on the first outrigger 50L. Specifically, Comparative Example EX0 corresponds to the shape of the first outrigger 50L without the bent portion 55, and Examples EX1, EX2, and EX3 correspond to the shapes of the first outrigger 50L with the bent portion 55 provided in different positions.

[0057] 8(a), the change amount (scale) on the vertical axis is made larger than the change amount (scale) on the horizontal axis so that the cross-sectional shape of the first outrigger 50L can be more clearly understood. As can be seen from the curve of comparative example EX0, when the flexure 30 is attached to the load beam 20, the first outrigger 50L is curved so that the apex is near the tongue 42, even when the bent portion 55 is not provided.

[0058] 8(b) and 8(c), the horizontal axis represents the position in the longitudinal direction Y, as in FIG. 8(a), and the vertical axis represents the amplitude of the first outrigger 50L during vibration. These graphs each show an outline of vibration in each mode.

[0059] The amplitude of the second torsion mode shown in Fig. 8(b) has a peak P21 at base arm 52 and a peak P22 at tip arm 53. The amplitude of the third torsion mode shown in Fig. 8(c) has a peak P31 at base arm 52, a peak P32 near connection 54, and a peak P33 near the end of tip arm 53.

[0060] As shown by multiple dashed lines in Figure 8, positions A, B, C, D, E, and F are defined, aligned in order in the longitudinal direction Y. Position A passes through the centers of the first fixed portions 22L and 22R. Position B corresponds to the position of vertex P31 in the amplitude of the third-order torsion mode. Position C corresponds to the position of vertex P21 in the amplitude of the second-order torsion mode. Position C also overlaps with the positions where the aerial wiring portions 34L and 34R are bent so as to protrude in the width direction X.

[0061] Position D corresponds to the position of vertex P32 in the amplitude of the third torsion mode. Position D also overlaps with the boundary between tongue 42 and connecting portion 54 and the vicinity of the boundary between base end arm 52 and distal end arm 53. Position E passes through dimple 24. Position F passes through second fixing portion 23.

[0062] The inventors have considered the positions of the bent portions 55 in the suspension 10 according to this embodiment, taking into account various vibration modes. As a result, it has been found that providing the bent portions 55 of the outriggers 50L, 50R between positions A and E can effectively suppress vibration of the flexure 30. Furthermore, providing the bent portions 55 between positions B and D can further enhance the effect of suppressing vibration.

[0063] In all of Examples EX1, EX2, and EX3 shown in FIG. 8(a), bent portion 55 is provided between position B and position D, more specifically, between position C and position D. Bent portion 55 in Example EX2 is closer to position D than bent portion 55 in Example EX1. Also, bent portion 55 in Example EX3 is closer to position D than bent portion 55 in Example EX2.

[0064] Next, a method for adjusting the vibration characteristics of the suspension 10 by the bent portion 55 and a method for manufacturing the suspension 10 will be described. 9 is a flowchart showing an example of adjustment method M1 and manufacturing method M2. Adjustment method M1 determines the formation position and bending angle of bent portion 55, and is performed before manufacturing suspension 10. In manufacturing method M2, a manufacturing line is set up so that the formation position and bending angle of bent portion 55 determined by adjustment method M1 are realized, and suspension 10 is manufactured.

[0065] In the adjustment method M1, first, for the suspension 10 without the bent portion 55, the gains of the flexure 30 (outriggers 50L, 50R) in a plurality of vibration modes are measured (step S11). Hereinafter, the gain measured in step S11 is referred to as the first gain.

[0066] Next, for the suspension 10 having the bent portion 55 formed therein, the gains of the flexure 30 (outriggers 50L, 50R) in a plurality of vibration modes are measured (step S12). Hereinafter, the gain measured in step S12 will be referred to as the second gain.

[0067] The measurements in steps S11 and S12 can be performed, for example, by simulation using a three-dimensional model of the suspension 10. These measurements may also be performed on an actually manufactured sample of the suspension 10. The vibration modes for which gains are measured in steps S11 and S12 are, for example, the above-mentioned first torsional mode, second torsional mode, and third torsional mode.

[0068] As an example, in this embodiment, it is assumed that the second gain is measured for each of the first torsion mode, the second torsion mode, and the third torsion mode using multiple three-dimensional models or samples with different formation positions and bending angles of the bending portion 55.

[0069] 10 is a diagram showing an example of the results of measuring the first gain and the second gain for the suspension 10 according to this embodiment. This diagram shows the first gain and the second gain measured for each of (a) the primary torsion mode, (b) the secondary torsion mode, and (c) the tertiary torsion mode.

[0070] 10(a), (b), and (c), the horizontal axis represents the forming position [mm] in the longitudinal direction Y of the bent portion 55, and as in FIG. 8(a), the origin O is used as the reference (zero). The vertical axis represents the gain [dB]. The range of forming positions shown in FIGS. 10(a), (b), and (c) corresponds to a part between positions B and D in FIG. 8.

[0071] In Figures 10(a), (b), and (c), the square plots overlapping the vertical axis indicate the first gain, the open circle plots indicate the second gain when the bending angle θa is 1°, and the closed circle plots indicate the second gain when the bending angle θa is 2°.

[0072] The bending angle θa is the angle when the bent portion 55 is formed on the flexure 30 before it is attached to the load beam 20. When the flexure 30 is attached to the load beam 20, the outriggers 50L, 50R are bent as shown in FIG. 8(a). Therefore, the bending angle θa may be slightly different from the bending angle θ shown in FIG.

[0073] 10(a), in the primary torsion mode, the second gain hardly changes even if the formation position or bending angle θa of the bent portion 55 is changed. This second gain is substantially the same as the first gain at any formation position.

[0074] As shown in Figure 10(b), in the second torsion mode, the second gain is generally smaller than the first gain at both the bending angle θa of 1° and 2°. When the bending angle θa is 1°, the second gain is smallest at around 9.1 mm. When the bending angle θa is 2°, the second gain is smallest at around 8.8 mm.

[0075] As shown in Figure 10(c), in the third torsion mode, when the bending angle θa is 1°, the second gain is generally smaller than the first gain. On the other hand, when the bending angle θa is 2°, a portion of the second gain is larger than the first gain. When the bending angle θa is 1°, the second gain is smallest near 9.0 mm. When the bending angle θa is 2°, the second gain is smallest near 9.2 mm.

[0076] 9, after measuring the first gain and the second gain in steps S11 and S12, the formation position and bending angle θa of the bent portion 55 in the suspension 10 to be actually manufactured are determined based on these gains (step S13). This determination can be made based on various conditions. In one example, the formation position and bending angle θa are selected such that the second gain is equal to or less than the first gain in at least one, preferably a majority, of the vibration modes to be measured.

[0077] When the first gain and second gain as shown in Figures 10(a), (b), and (c) are obtained, the first torsion mode does not need to be taken into consideration because the fluctuation of the second gain is small, and the forming position and bending angle θa can be determined mainly based on the second gain in the second torsion mode and the third torsion mode.

[0078] For example, if it is particularly necessary to suppress vibration in the third torsion mode, the formation position may be determined to be 9.0 mm, as shown in the dashed line frame. Furthermore, at 9.0 mm, the second gain when the bending angle θa is 1° is smaller than the second gain when the bending angle θa is 2°, in both the second torsion mode and the third torsion mode. Therefore, the bending angle θa may be determined to be 1°. Under this condition, the second gain is less than the first gain even in the second torsion mode. Therefore, the bending portion 55 can reduce vibration of the flexure 30 in both the second torsion mode and the third torsion mode.

[0079] 9, in the manufacturing method M2 of the suspension 10, first, the components of the suspension 10, such as the load beam 20 and the flexure 30, are manufactured (step S21). Next, in the flexure 30 before it is attached to the load beam 20, a bent portion 55 is formed at the forming position determined in step S13 and with the bend angle θa determined in step S13 (step S22).

[0080] The bent portions 55 can be formed, for example, by press working using a mold or by irradiating the outriggers 50L, 50R with a laser. For example, when forming the bent portions 55 having the shape shown in FIG. 5 using laser irradiation, a laser irradiation device irradiates the second surface F2 with laser light. At this time, the irradiated area of ​​the laser light is heated, and when the irradiated area is subsequently cooled, the outriggers 50L, 50R are deformed so that the second surface F2 becomes concave (the first surface F1 becomes convex). This makes it possible to obtain the bent portions 55 in which the outriggers 50L, 50R are bent so that the first surface F1 becomes convex.

[0081] After forming the bent portion 55, elements such as the load beam 20 and the flexure 30 are assembled to complete the suspension 10 with well-adjusted vibration characteristics (step S23).

[0082] Although FIG. 9 illustrates a case where elements such as the load beam 20 and the flexure 30 are assembled after the bent portion is formed in the flexure, the bent portion may be formed after the elements such as the load beam 20 and the flexure 30 are assembled.

[0083] 9, it is assumed that the formation position of the bent portion 55 and the bending angle θa are determined taking into consideration the first torsion mode, the second torsion mode, and the third torsion mode. However, this is not a limitation. When determining the formation position of the bent portion 55 and the bending angle θa, other vibration modes of the flexure 30 may be considered in addition to or instead of these vibration modes. Furthermore, in addition to the vibration mode of the flexure 30, a coupling mode with the vibration of the load beam 20 may also be considered. The bending angle θa is not limited to 1° or 2°. For example, the bending angle θa may be set in the range of 0.5° to 3°.

[0084] According to the present embodiment described above, by providing the bent portions 55 to the outriggers 50L, 50R, it is possible to obtain a suspension 10 in which vibrations around the gimbal portion 43 are effectively suppressed.

[0085] When adjusting the vibration characteristics using the bent portions 55 of the outriggers 50L, 50R in this way, the rigidity of the flexure 30, etc. is less likely to change compared to, for example, attaching a damper material to the flexure 30. In other words, it is possible to improve the vibration characteristics while suppressing the impact on the gimbal motion. Furthermore, since additional parts such as damper materials and their mounting processes are not required, an increase in the manufacturing cost of the suspension 10 can be suppressed. In addition, various other advantageous effects can be obtained from this embodiment.

[0086] The scope of the present invention is not limited to the configurations disclosed in the above-described embodiments. The present invention can be implemented by modifying the configurations disclosed in the embodiments in various ways.

[0087] For example, in the above embodiment, the outriggers 50L, 50R are bent so that the first surface F1 is convex at the bending portion 55 as shown in Fig. 5. However, if vibration characteristics are improved favorably, the outriggers 50L, 50R may be bent so that the second surface F2 is convex.

[0088] In the above embodiment, it is assumed that the outriggers 50L, 50R are provided with only one bent portion 55. However, if vibration characteristics are improved favorably, the outriggers 50L, 50R may each be provided with bent portions 55 at multiple positions.

[0089] In the above embodiment, the case where the formation position of bent portion 55 and bend angle θa are determined by adjustment method M1 shown in FIG. 9 has been exemplified. As another example, bend angle θa may be determined in advance, and the formation position of bent portion 55 at that bend angle θa may be determined by adjustment method M1. In this case, for example, in step S12, the second gain is measured for each of a plurality of positions on outriggers 50L, 50R for a plurality of vibration modes when bent portion 55 is formed at that position. Furthermore, in step S13, the position at which the second gain smaller than the first gain is obtained in at least one vibration mode among the plurality of positions is determined as the formation position of bent portion 55 to be applied to suspension 10 to be actually manufactured.

[0090] Alternatively, the position where bent portion 55 is to be formed may be determined in advance, and bend angle θa may be determined assuming that bent portion 55 is to be formed at that position by adjustment method M1. In this case, for example, in step S12, the second gain is measured for each of a plurality of bend angles θa for a plurality of vibration modes when bent portion 55 is formed at the above-mentioned position. Furthermore, in step S13, the angle at which a second gain smaller than the first gain is obtained in at least one vibration mode among the plurality of bend angles θa is determined as the bend angle θa of bent portion 55 to be applied to suspension 10 to be actually manufactured. [Explanation of symbols]

[0091] 1...disk device, 10...suspension, 11...slider, 20...load beam, 22L, 22R...first fixed portion, 23...second fixed portion, 24...dimple, 30...flexure, 42...tang, 50L...first outrigger, 50R...second outrigger, 52...base end arm, 53...tip arm, 55...bending portion.

Claims

1. a load beam having a dimple; a flexure superposed on the load beam; Equipped with the load beam and the flexure are fixed at a first fixing portion and a second fixing portion that is closer to the tip of the load beam than the first fixing portion, The flexure is a tongue facing the dimple; an outrigger connected to the tongue; and the outrigger has a first surface at least a part of which faces the load beam and a second surface opposite to the first surface in the thickness direction of the load beam, and is bent so that the first surface is convex at a bent portion located between the dimple and the first fixing portion in the longitudinal direction of the load beam. Suspension for disk drives.

2. the bent portion is located between the tongue and the first fixing portion in the longitudinal direction.

2. The disk drive suspension according to claim 1.

3. the outriggers include a first outrigger and a second outrigger arranged side by side in a width direction of the load beam, the tongue is located between the first outrigger and the second outrigger in the width direction, Each of the first outrigger and the second outrigger has the bent portion.

3. The disk drive suspension according to claim 1.

4. A method for adjusting vibration characteristics of a suspension for a disk drive, comprising: The disk drive suspension comprises: a load beam having a dimple; a flexure superposed on the load beam; Equipped with the load beam and the flexure are fixed at a first fixing portion and a second fixing portion that is closer to the tip of the load beam than the first fixing portion, The flexure is a tongue facing the dimple; an outrigger connected to the tongue; and the outrigger is bent in a thickness direction of the load beam at a bent portion located between the dimple and the first fixing portion in the length direction of the load beam, The adjustment method includes: measuring a first gain of the flexure for a specific vibration mode when the bent portion is not formed in the outrigger; measuring a second gain of the flexure when the bent portion is formed at each of a plurality of positions on the outrigger in the vibration mode; determining a position among the plurality of positions at which the second gain smaller than the first gain is obtained as a formation position of the bent portion to be applied to the disk drive suspension to be manufactured; The adjustment method includes:

5. measuring the first gain and the second gain at the plurality of positions for each of a plurality of vibration modes; determining a position among the plurality of positions at which the second gain smaller than the first gain is obtained for at least one of the plurality of vibration modes as a formation position of the bent portion to be applied to the disk drive suspension to be manufactured; The adjusting method according to claim 4.

6. A method for adjusting vibration characteristics of a suspension for a disk drive, comprising: The disk drive suspension comprises: a load beam having a dimple; a flexure superposed on the load beam; Equipped with the load beam and the flexure are fixed at a first fixing portion and a second fixing portion that is closer to the tip of the load beam than the first fixing portion, The flexure is a tongue facing the dimple; an outrigger connected to the tongue; and the outrigger is bent in a thickness direction of the load beam at a bent portion located between the dimple and the first fixing portion in the length direction of the load beam, The adjustment method includes: measuring a first gain of the flexure for a specific vibration mode when the bent portion is not formed in the outrigger; measuring a second gain of the flexure for each of a plurality of bending angles of the outrigger at the bending portion with respect to the vibration mode; determining, among the plurality of bending angles, an angle at which the second gain smaller than the first gain is obtained as a bending angle of the bending portion to be applied to the disk drive suspension to be manufactured; The adjustment method includes:

7. measuring the first gain and the second gain at the plurality of bending angles for each of a plurality of vibration modes; determining, among the plurality of bending angles, a bending angle at which the second gain smaller than the first gain is obtained in at least one of the plurality of vibration modes as a bending angle of the bending portion to be applied to the disk drive suspension to be manufactured; The adjusting method according to claim 6.

8. 8. A manufacturing method for manufacturing a disk drive suspension whose vibration characteristics are adjusted by the adjusting method according to claim 4.

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