Reticle press device and reticle box to which it is applied

Abstract

To provide a reticle pressing machine.SOLUTION: A reticle pressing machine used for a reticle box that houses a reticle, contains: a reticle press plate; pressing means that is arranged to the reticle press plate, and contains a pressing part, in which the pressing part presses the reticle press plate in accordance with a movement width corresponded to the reticle press plate of the pressing means, and moving the reticle press plate to a lateral direction to the pressing means; and an adjustment element that is provided to an inside of the reticle press plate via the pressing means, and presses the pressing part to the reticle press plate until the reticle is fixed by adjusting the movement width of the pressing means, or adjusts the pressing part of the pressing means so as to be separated from the reticle and cancels a pressing force.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a reticle press device and a reticle box to which the same is applied. [Background technology]

[0002] In the semiconductor industry, reticles play a very important role in the process, and neither traditional techniques such as yellow light photolithography or etching, nor the recent extreme ultraviolet lithography (EUVL) process, can be separated from the use of reticles.

[0003] Among the many industries directly or indirectly related to semiconductors, the photoelectric industry is also quite important. When manufacturing large-sized panels, the size of the reticle used in the process varies depending on the size of the panel. Summary of the Invention [Problem to be solved by the invention]

[0004] However, when large reticles are loaded into the reticle box, the associated inertial motion becomes more severe. Large reticles are prone to shaking, collisions, and even tilting of the entire reticle container during transportation or handling due to insufficient handling accuracy, resulting in damage to the large reticles. Furthermore, the clamping method used in large reticle boxes currently on the market has a looseness issue, which causes large reticles to fly around inside the reticle box during transportation, generating particles that contaminate the reticles. Furthermore, because the elements contained in conventional reticle press devices used in reticle boxes are independent of each other, users must use both hands during assembly and disassembly (e.g., holding the device with one hand and locking the reticle box with a screw with the other), making operation difficult and unstable.

[0005] Therefore, how to propose a reticle press device and a reticle box that can solve the above problems is one of the problems that the industry is currently investing research and development resources to solve. [Means for solving the problem]

[0006] In view of this, one object of the present disclosure is to propose a reticle press device that can solve the above-mentioned problems and a reticle box to which the same is applied.

[0007] In order to achieve the above object, according to one embodiment of the present disclosure, there is provided a reticle press device for use in a reticle box for accommodating a reticle, the reticle press device comprising: a reticle press plate; Pressing part A pressing means comprising: Pressing part teeth 、 Reticle press plate of the pressing means along the first axis move range Reticle press plate according to Press , the reticle press plate is moved laterally relative to the press means Along the second axis Move Clamp the reticle laterally a press means and a reticle press via the press means; On the board The movement of the pressing means range By adjusting 、 Reticle press plate but Until the reticle is fixed Press the pressing part towards the reticle press plate. , or press means Pressing part away from the reticle Move it in the direction and Press and an adjustment element for adjusting the release force.

[0008] In one or more embodiments of the present disclosure, Pressing part The pressing means includes an elastic portion and an inclined surface coupled to the elastic portion, and the pressing means moves the reticle pressing plate toward or away from the reticle along the inclination angle of the inclined surface according to the adjustment of the adjustment element. Press At the same time, the elastic part Press It elastically deforms in response to force.

[0009] In one or more embodiments of the present disclosure, Pressing part teeth 、 It is inclined with respect to the first axis direction and the second axis direction.

[0010] In one or more embodiments of the present disclosure, the pressing means further includes a body portion, the body portion comprising: Pressing part and providing a location for the adjustment element; Pressing part includes an elastic portion that elastically deforms in response to lateral movement of the main body portion.

[0011] In one or more embodiments of the present disclosure, the adjustment element is rotatably coupled to the pressing means.

[0012] In one or more embodiments of the present disclosure, the pressing means has a through hole, the through hole has an enlarged portion and a reduced portion that communicate with each other, the diameter of the enlarged portion is larger than the diameter of the reduced portion, the adjustment element is inserted into the enlarged portion, and the adjustment element is inserted into the reduced portion. Combined into The position is determined by the

[0013] In one or more embodiments of the present disclosure, The department a flange for coupling and positioning into one annular engagement groove in the adjustment element; Inside Has.

[0014] In one or more embodiments of the present disclosure, the adjustment element abuts against the pressing means. To do so , reticle press plate On the opposite side of The head portion and the reticle box are locked, and the movement of the pressing means relative to the reticle pressing plate is controlled according to the degree of locking. range and a column having one end connected to the head portion and the other end connected to the lock portion, the column being provided in the reticle press plate via a press means.

[0015] In one or more embodiments of the present disclosure, the reticle press plate, the press means, and the adjustment element are coupled together, and the adjustment element includes a locking portion for locking the reticle box, and a locking portion for unlocking the locking portion from the reticle box. andThe reticle pressing plate, pressing means and adjustment element can be removed together from the reticle box.

[0016] In one or more embodiments of the present disclosure, the reticle press plate has a mounting hole and first limiting portions on both sides of the mounting hole, and the press means includes a mounting portion and has second limiting portions on both sides of the mounting portion, the second limiting portions corresponding to the first limiting portions and arranged to limit each other.

[0017] In order to achieve the above object, according to one embodiment of the present disclosure, there is provided a reticle box including a box body having a wall portion and a plurality of stage portions arranged around the inside of the wall portion, each of the plurality of stage portions having a locking hole; and a reticle press device disposed within the box body having an accommodation space for accommodating a reticle, the reticle press device including: a reticle press plate disposed on one of the plurality of stage portions; Pressing part A pressing means comprising: Pressing part teeth 、 Reticle press plate of the pressing means along the first axis move range Reticle press plate according to Press , the reticle press plate is moved laterally relative to the press means Along the second axis Move Clamp the reticle laterally a press means and a reticle press via the press means; On the board The locking portion is provided for locking with the locking hole, and the movement of the pressing means relative to the reticle pressing plate is controlled according to the degree of locking of the locking portion. range and an adjustment element for adjusting the reticle. (Effects of the Invention)

[0018] As described above, in the reticle press apparatus of the present disclosure, when the adjusting element is adjusted (locked) to the reticle press plate, the pressing means, which moves toward the reticle press plate together, uses its inclined surface to push the reticle press plate to move laterally, thereby achieving the purpose of the reticle press plate laterally clamping the reticle. In an embodiment in which the adjusting element is coupled to the reduced hole portion of the pressing means, when the adjusting element rotates, the reticle press plate restricts the pressing means so that the pressing means does not rotate with the adjusting element. In an embodiment in which the pressing means has an engaging portion for engaging with the reticle press plate, the coupling relationship between the adjusting element and the reduced hole portion of the pressing means allows the reticle press plate to move upward with the adjusting element after the adjusting element is completely loosened from the locking hole of the reticle box, thereby allowing the entire reticle press apparatus to be removed from the reticle box (i.e., improving operational convenience).

[0019] The above is used to explain the problems that the present disclosure aims to solve, the technical means for solving the problems, and the effects that result therefrom, and specific details of the present disclosure will be described in detail in the following embodiments and related drawings. [Brief explanation of the drawings]

[0020] To make the above and other objects, features, advantages and embodiments of the present disclosure more clearly and comprehensibly, the drawings are described as follows. [Figure 1] FIG. 1 is a perspective combined view illustrating a reticle press apparatus according to one embodiment of the present disclosure. [Figure 2] FIG. 2 is an exploded perspective view showing the reticle press device in FIG. [Figure 3] FIG. 2 is a perspective view showing an adjustment element in FIG. [Figure 4] FIG. 2 is a cross-sectional view showing the pressing means and the adjusting element in FIG. [Figure 5] FIG. 2 is a perspective view showing a pressing means in FIG. [Figure 6]FIG. 1 is a perspective view illustrating a reticle box according to an embodiment of the present disclosure. [Figure 7] 7 is an enlarged perspective exploded view showing a part of the box body and the reticle press device in FIG. 6. [Figure 8] 8 is an enlarged perspective combination view showing a part of the box body and the reticle press device in FIG. 7. FIG. [Figure 9] 8 is another perspective combination view showing an enlarged view of a part of the box body and the reticle press device in FIG. 7. FIG. [Figure 10] FIG. 8 is a partial cross-sectional view showing the box body and the reticle press device in FIG. 7. DETAILED DESCRIPTION OF THE INVENTION

[0021] In the following, in order to clearly illustrate and disclose multiple embodiments of the present disclosure in the drawings, many practical details are described in the following description. However, it should be understood that these practical details are not applied to limit the present disclosure. That is, in some embodiments of the present disclosure, these practical details are not necessary. Furthermore, in order to simplify the drawings, some conventional structures and elements are simply illustrated in the drawings.

[0022] 1 and 2, FIG. 1 is a perspective combined view showing a reticle press apparatus 200 according to one embodiment of the present disclosure. FIG. 2 is a perspective exploded view showing the reticle press apparatus 200 in FIG. 1. As shown in FIGS. 1 and 2, in this embodiment, the reticle press apparatus 200 includes a reticle press plate 210, a press means 220, and an adjustment element 230. The press means 220 includes: Pressing part Including 222. Pressing part 222 is a part for moving the reticle pressing plate 210 in accordance with the movement width of the pressing means 220 relative to the reticle pressing plate 210. Press , configured to move the reticle press plate 210 laterally relative to the press means 220. The adjustment element 230 is provided within the reticle press plate 210 via the press means 220 and configured to adjust the movement width of the press means 220. Pressing part222 to fix the reticle 900 to the reticle press plate 210 Press (See FIG. 9), or the pressing means 220 Pressing part 222 away from the reticle 900 and Press Adjust to release the force (see Figure 8).

[0023] For example, as shown in FIG. 2, the adjustment element 230 may include: Pressing part 222 is the reticle press plate 210 Press The pressing means 220 is configured to move laterally relative to the pressing means 220 along the second axis direction A2, and to move the pressing means 220 along the first axis direction A1 toward the reticle pressing plate 210. Specifically, the pressing means 220 further includes a main body portion 221. The main body portion 221 provides for the placement of the adjustment element 230. Pressing part 222 is coupled to the main body portion 221. Pressing part 222 includes an elastic portion 222b and an inclined surface 222a coupled to the elastic portion 222b. The inclined surface 222a is located on the elastic portion 222b, on the side of the elastic portion 222b that is away from the main body portion 221. The inclined surface 222a is inclined with respect to the first axial direction A1 and the second axial direction A2. The pressing means 220 presses the reticle pressing plate 210 toward or away from the reticle 900 along the inclination angle of the inclined surface 222a in accordance with adjustment of the adjustment element 230. Press At the same time, the elastic portion 222b moves in the direction of the inclined surface 222a. Press As can be seen from this, the elastic portion 222b is elastically deformed in response to the lateral movement of the main body portion 221. Pressing part 222, the pressing means 220 is in contact with the reticle pressing plate 210 and Pressing part 222 moves the reticle press plate 210 laterally. Press The objective can be achieved.

[0024] In some embodiments, the inclined surface 222a is an inclined surface inclined with respect to the first axis direction A1 and the second axis direction A2, but the present disclosure is not limited thereto. In practical application, the inclined surface 222a may be an arcuate surface.

[0025] In some embodiments, the first axis direction A1 and the second axis direction A2 are perpendicular to each other, although the present disclosure is not limited thereto.

[0026] In some embodiments, the adjustment element 230 is rotatably coupled to the pressing means 220. For example, refer to FIG. 3, which is a perspective view showing the adjustment element 230 in FIG. 1. As shown in FIGS. 2 and 3, in this embodiment, the pressing means 220 has a through hole 221a. The through hole 221a has an enlarged portion 221a1 and a narrowed portion 221a2 that communicate with each other. The diameter of the enlarged portion 221a1 is larger than the diameter of the narrowed portion 221a2. For example, the outline of the through hole 221a, which has the enlarged portion 221a1 and the narrowed portion 221a2, resembles a gourd. The adjustment element 230 is configured to be inserted into the enlarged portion 221a1 and coupled and positioned toward the narrowed portion 221a2.

[0027] Specifically, the adjustment element 230 includes a pillar 231 and a head portion 233. The head portion 233 is configured to abut against the pressing means 220 and be spaced apart from one side of the reticle pressing plate 210. One end of the pillar 231 is coupled to the head portion 233. The pillar 231 is disposed within the reticle pressing plate 210 via the pressing means 220. The size of the through hole 221a is not suitable for the head portion 233 to pass through. For example, the enlarged hole portion 221a1 may be (but is not limited to) a portion of a circular hole, and the diameter of the enlarged hole portion 221a1 is equal to or greater than the outer diameter of the pillar 231, allowing the pillar 231 to pass through the enlarged hole portion 221a1.

[0028] Referring to FIG. 4, a cross-sectional view of the pressing means 220 and the adjustment element 230 in FIG. 1 is shown. As shown in FIGS. 3 and 4, in this embodiment, the adjustment element 230 is configured to be rotatably coupled to the reduced hole portion 221a2 of the through hole 221a. Specifically, a flange 221a3 is provided within the reduced hole portion 221a2. The column 231 of the adjustment element 230 has an annular engagement groove 231a. The flange 221a3 is used for coupling with and positioning the annular engagement groove 231a. For example, the reduced hole portion 221a2 is a part of a circular hole, and its hole diameter is equal to or greater than the outer diameter of the annular engagement groove 231a but smaller than the outer diameter of the column 231, so that the flange 221a3 is rotatably engaged with the annular engagement groove 231a.

[0029] In some embodiments, the contour of the narrowed portion 221a2 is slightly larger than a semicircle, so that the column 231 originally positioned in the enlarged portion 221a1 can be pressed into the narrowed portion 221a2 through the annular engagement groove 231a. Therefore, when the flange 221a3 is rotatably engaged with the annular engagement groove 231a, the adjusting element 230 can rotate relative to the pressing means 220. As a result, when the adjusting element 230 rotates, the pressing means 220 does not rotate with the adjusting element 230.

[0030] 5 is a perspective view showing the pressing means 220 in FIG. 2. As shown in FIGS. 2 and 5, in this embodiment, the reticle pressing plate 210 has a mounting hole 211. The pressing means 220 is configured to pass through the mounting hole 211 and slide along the mounting hole 211. Pressing part The inclined surface 222a of the reticle pressing plate 210 is located at the inner edge of the mounting hole 211 so as to move the reticle pressing plate 210 laterally relative to the pressing means 220. PressSpecifically, the mounting hole 211 extends, for example, along the second axis direction A2, and both sides of the mounting hole 211 have two opposing first limiting portions 211a. The pressing means 220 further includes a mounting portion 223. The main body portion 221 of the pressing means 220 is configured to abut against one side of the reticle pressing plate 210 (for example, the top side of the reticle pressing plate 210 in FIG. 2). The mounting portion 223 is connected to the main body portion 221 and passes through the mounting hole 211. Both sides of the mounting portion 223 have two opposing second limiting portions 223a. The two second limiting portions 223a are configured to abut against the two first limiting portions 211a, respectively. As a result, while the pressing means 220 passes through the mounting hole 211 and slides along the mounting hole 211, the two first limiting portions 211a of the mounting hole 211 limit the two second limiting portions 223a of the mounting portion 223, thereby preventing the pressing means 220 from rotating around the first axial direction A1 relative to the reticle pressing plate 210. As can be seen from this, when the adjusting element 230 rotates, the pressing means 220, whose rotation is restricted by the reticle pressing plate 210, does not rotate along with the adjusting element 230.

[0031] 2 and 5, in this embodiment, the pressing means 220 further includes two engaging portions 224. The two engaging portions 224 are respectively connected to the two second limiting portions 223a of the mounting portion 223 and protrude in opposite directions relative to the mounting portion 223. The two engaging portions 224 are configured to engage with the other side of the reticle pressing plate 210 (the bottom side of the reticle pressing plate 210 in FIG. 2; see FIG. 10 first) so as to limit the reticle pressing plate 210 between the main body 221 of the pressing means 220 and the two engaging portions 224. During actual assembly, the mounting portions 223 of the pressing means 220 can be inserted through the mounting holes 211 of the reticle pressing plate 210. While the mounting portions 223 penetrate the mounting holes 211, the two first limiting portions 211a of the mounting holes 211 press the two engaging portions 224 against each other. After being pressed through the mounting holes 211 , the two engaging portions 224 can engage with the other side of the reticle pressing plate 210 .

[0032] Based on the above-described structural arrangement, in addition to adjusting the coupling relationship between the element 230 and the contracted hole portion 221a2 of the pressing means 220, by combining the engagement relationship between the engagement portion 224 of the pressing means 220 and the reticle pressing plate 210, the reticle pressing plate 210 can move together with the pressing means 220 in accordance with the adjustment element 230, thereby improving the convenience of operating the reticle pressing device 200.

[0033] As shown in FIG. 5, in this embodiment, the engaging portion 224 is hook-shaped, but the present disclosure is not limited thereto.

[0034] Referring to FIG. 6, a perspective view of a reticle box 10 according to one embodiment of the present disclosure is shown. As shown in FIG. 6, in this embodiment, the reticle box 10 includes a box body 100 and a plurality of reticle press apparatuses 200. The box body 100 includes a wall portion 110. The wall portion 110 surrounds and forms a storage space. A plurality of stage portions 111 are provided around the inside of the wall portion 110. The reticle press apparatuses 200 are configured to be assembled to the stage portion 111.

[0035] 7, 8, and 9, FIG. 7 is an exploded perspective view showing an enlarged portion of the box body 100 and reticle press apparatus 200 in FIG. 6. FIG. 8 is a combined perspective view showing an enlarged portion of the box body 100 and reticle press apparatus 200 in FIG. 7. FIG. 9 is another combined perspective view showing an enlarged portion of the box body 100 and reticle press apparatus 200 in FIG. 7. The assembler can attach the reticle press apparatus 200 to the box body 100 in the order shown in FIGS. 7 to 9, and then use the reticle press apparatus 200 to fix and hold the reticle 900 located in the storage space of the wall portion 110.

[0036] 7, in this embodiment, each stage 111 of the wall 110 has a locking hole 111a. As described above, by adjusting the coupling relationship between the element 230 and the contracted hole 221a2 of the pressing means 220 and the engagement relationship between the engagement portion 224 of the pressing means 220 and the reticle pressing plate 210, the assembler can move the entire reticle pressing apparatus 200 above the stage 111 by gripping the adjustment element 230.

[0037] As shown in FIG. 8, with reference to FIG. 3 as well, in this embodiment, the adjustment element 230 further includes a locking portion 232. The locking portion 232 is provided at the end of the column 231 away from the head portion 233. The locking portion 232 is located on the side of the reticle press plate 210 away from the pressing means 220. An assembler holding the adjustment element 230 can move the entire reticle press apparatus 200 toward the stage portion 111 to bring the locking portion 232 into contact with the locking hole 111a, thereby initially aligning the reticle press apparatus 200 and the stage portion 111. The movement range of the pressing means 220 relative to the reticle press plate 210 can be adjusted depending on the degree of locking of the locking portion 232.

[0038] 9, in this embodiment, the locking portion 232 of the adjusting element 230 is configured to be locked in the locking hole 111a along the first axial direction A1. An assembler can lock the locking portion 232 downward into the locking hole 111a by rotating the head portion 233 of the adjusting element 230. While the locking portion 232 is completely locked in the locking hole 111a, the head portion 233 of the adjusting element 230 moves the pressing means 220 toward the reticle pressing plate 210 along the first axial direction A1. Press towards By doing so, Pressing part 222 inclined surface 222a to Reticle press plate 210 PressThe reticle pressing plate 210 is then moved laterally relative to the pressing means 220 along the second axis direction A2, away from the wall portion 110, and the reticle 900 is fixedly held. When the locking portion 232 is completely locked in the locking hole 111a, the main body 221 of the pressing means 220 and the reticle pressing plate 210 are sandwiched between the stage portion 111 and the head portion 233 of the adjustment element 230.

[0039] 9 to 7, and will not be described further here. As described above, the reticle press plate 210, the press means 220, and the adjustment element 230 are coupled together. When the locking portion 232 is unlocked from the reticle box 10, the reticle press plate 210, the press means 220, and the adjustment element 230 can be removed from the reticle box 10.

[0040] FIG. 10 is a partial cross-sectional view showing the box body 100 and the reticle press apparatus 200 in FIG. 7. As shown in FIG. 10, in this embodiment, the stage portion 111 further includes a guide structure 111b. The guide structure 111b is configured to guide the reticle press plate 210 so that it moves along the second axial direction A2. Specifically, the guide structure 111b of the stage portion 111 is a bump. The bump extends along the second axial direction A2. The bottom of the reticle press plate 210 also includes a corresponding guide structure 211b. The guide structure 211b of the reticle press plate 210 is two ribs. The two ribs extend along the second axial direction A2. The bump is slidably coupled between the two ribs and guides the reticle press plate 210 so that it moves relative to the stage portion 111 along the second axial direction A2.

[0041] In some embodiments, the guide structure 111b of the stage portion 111 and the guide structure 211b of the reticle pressing plate 210 can be interchangeable, and can achieve the same mutual guiding effect.

[0042] As can be clearly seen from the detailed description of specific embodiments of the present disclosure, in the reticle press apparatus of the present disclosure, when the adjusting element is adjusted (locked) to the reticle press plate, the pressing means, which moves toward the reticle press plate accordingly, uses its inclined portion to push the reticle press plate to move laterally, thereby achieving the purpose of the reticle press plate laterally clamping the reticle. In an embodiment in which the adjusting element is coupled to the reduced hole portion of the pressing means, when the adjusting element rotates, the reticle press plate restricts the pressing means so that the pressing means does not rotate with the adjusting element. In an embodiment in which the pressing means has an engaging portion for engaging with the reticle press plate, the coupling relationship between the adjusting element and the reduced hole portion of the pressing means allows the reticle press plate to move upward with the adjusting element after the adjusting element is completely loosened from the locking hole of the reticle box, thereby allowing the entire reticle press apparatus to be removed from the reticle box (i.e., improving operational convenience).

[0043] Although the present disclosure has been disclosed in the embodiments as described above, the above embodiments do not limit the present disclosure, and anyone skilled in the art can make various changes and modifications without departing from the spirit and scope of the present disclosure. Therefore, the scope of protection of the present disclosure should be based on that defined by the scope of the patent application to be attached later. [Explanation of symbols]

[0044] 10: Reticle box 100: Box body 110: Wall 111: Stage Department 111a: Lock hole 111b, 211b: guide structure 200: Reticle press device 210: Reticle press plate 211: Mounting hole 211a: First Restriction Section 220: Pressing means 221: Main body 221a:Through hole 221a1: Expanded hole part 221a2: Shrinking part 221a3: flange 222: Pressing part 222a: Inclined surface 222b: Elastic part 223: Mounting part 223a: Second Restriction 224: Engagement part 230: Adjustment element 231: Column 231a: Annular engagement groove 232: Rock Club 233: Head 900: Reticle A1: 1st axis direction A2: 2nd axis direction

Claims

1. A reticle press device used in a reticle box for storing reticles, A reticle press plate, a press means disposed on the reticle press plate and including a pressing portion, the pressing portion pressing the reticle press plate in accordance with a range of movement of the press means along a first axis direction relative to the reticle press plate, and moving the reticle press plate laterally relative to the press means along a second axis direction to laterally clamp the reticle; and an adjustment element that is provided on the reticle press plate via the press means and that adjusts the movement range of the press means so that the pressing portion presses toward the reticle press plate until the reticle press plate fixes the reticle, or so that the pressing portion of the press means moves in a direction away from the reticle and releases the pressing force.

2. 2. The reticle press device of claim 1, wherein the pressing portion includes an elastic portion and an inclined surface coupled to the elastic portion, and the press means presses the reticle press plate toward or away from the reticle along the inclination angle of the inclined surface in accordance with adjustment of the adjustment element, and at the same time, the elastic portion elastically deforms in accordance with the pressing force of the inclined surface.

3. A reticle press device as described in claim 1, wherein the pressing portion is inclined with respect to the first axial direction and the second axial direction.

4. 2. The reticle press apparatus of claim 1, wherein the pressing means further includes a main body portion coupled to the pressing portion and providing a location for the adjustment element, the pressing portion including an elastic portion that elastically deforms in response to lateral movement of the main body portion.

5. 2. The reticle pressing apparatus of claim 1, wherein said adjustment element is rotatably coupled to said pressing means.

6. 2. The reticle press apparatus of claim 1, wherein the pressing means has a through hole, the through hole having an enlarged portion and a reduced portion that communicate with each other, the diameter of the enlarged portion being larger than the diameter of the reduced portion, and the adjustment element is inserted into the enlarged portion and coupled to the reduced portion to be positioned.

7. 7. The reticle pressing device according to claim 6, wherein the reduced hole portion has a flange therein for coupling with and positioning one annular engagement groove in the adjustment element.

8. The adjustment element is a head portion configured on the opposite side of the reticle press plate so as to contact the press means; a locking unit for locking the reticle box and adjusting the range of movement of the pressing means relative to the reticle pressing plate according to the degree of locking; a column having one end connected to the head portion and the other end connected to the lock portion, the column being disposed within the reticle press plate via the press means; 10. The reticle press apparatus of claim 1, comprising:

9. 2. The reticle press apparatus of claim 1, wherein the reticle press plate, the press means, and the adjustment element are coupled together, the adjustment element includes a locking portion for locking the reticle box, and when the locking portion is unlocked from the reticle box, the reticle press plate, the press means, and the adjustment element can be removed together from the reticle box.

10. The reticle press plate has a mounting hole and first limiting portions on both sides of the mounting hole; and 2. The reticle press apparatus of claim 1, wherein the pressing means includes a mounting portion and has second limiting portions on both sides of the mounting portion, the second limiting portions corresponding to the first limiting portions and arranged to limit each other.

11. A reticle box, a box body including a wall portion, a plurality of stage portions provided around the inside of the wall portion, each of the plurality of stage portions having a lock hole; a reticle press device disposed within the box body having an accommodation space for accommodating a reticle; a reticle press plate disposed on one of the plurality of stage portions; a press means disposed on the reticle press plate and including a pressing portion, the pressing portion pressing the reticle press plate in accordance with a range of movement of the press means along a first axis direction relative to the reticle press plate, and moving the reticle press plate laterally relative to the press means along a second axis direction to laterally clamp the reticle; an adjustment element that is provided on the reticle press plate via the press means, has a locking portion for locking with the locking hole, and adjusts the movement range of the press means relative to the reticle press plate in accordance with the degree of locking of the locking portion; a reticle press device including: Includes a reticle box.

Images