Dual pod with guide mechanism

Abstract

To reduce the generation of contamination particles by suppressing a lid movement of an inner pod against a base when a reticle transfer dual pod is closed in an EUV lithography process.SOLUTION: The present invention provides a dual pod (3) including an inner pod (40) and an outer pod (30). The inner pod has at least one engagement portion (i.e., a notch provided in a handle (411)) provided on the relative outer side of the inner pod. The outer pod defines a housing space that receives the inner pod. The outer pod has at least one guidance mechanism (313) provided on the relative inner side of the outer pod. The guidance mechanism is guided by the engagement part and is constrained at this engagement part to restrict the offset movement of the inner pod within the outer pod.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to reticle transport pods, particularly dual pods, and more particularly to dual pods with guide mechanisms for the inner pod. [Background technology]

[0002] Current extreme ultraviolet (EUV) lithography processes require reticles to be protected by EUV reticle transfer pods (EUV pods). Referring to the schematic diagram shown in FIG. 1 , the EUV reticle transfer pod is a dual pod (1) including an outer pod (30) and an inner pod (40). The reticle is received in the inner pod (20), which is received in the outer pod (40). The outer pod (10) has, as its main components, a housing (11) and a door (12), which are joined together to define a storage space. The inner pod (20) has, as its main components, a lid (21) and a base (22), which are joined together to define a storage space.

[0003] Once the dual pod (1) is closed, a kinematic coupling element (121) on the upward surface of the door (12) joins with and constrains the base (22) of the inner pod (20), thereby restricting horizontal movement of the base (22) (i.e., movement along the X-, Y-, and C-axes in FIG. 2). A number of pressing members (111) on the inside of the housing (11) press against the upper surface of the lid (21) of the inner pod (20) and apply downward pressure, thereby causing the lid (21) and base (22) of the inner pod (20) to fit together and restrict vertical movement of the lid (21) (i.e., movement along the Z-, A-, and B-axes in FIG. 2), further achieving the purpose of holding the inner pod (20).

[0004] However, the pressing element (111) only applies downward pressure in one direction along the Z axis, but cannot restrain the lid (21) of the inner pod (20) from horizontal movement (i.e., movement along the X, Y, and C axes indicated by thin lines in FIG. 2). Therefore, when the dual pod (1) is subjected to an external force during transportation, the lid (21) of the inner pod (20) will undergo horizontal movement relative to the base (22), for example, movement along the X or Y axis or deflection around the C axis, in such a manner that the contact areas between the lid (21) and the base (22) will rub against each other, generating particles and thereby posing a risk of contamination.

[0005] In FIG. 3, when the lid (21) and the base (22) are fitted together, the restraining member (211) on one side of the lid (21) can limit the horizontal movement of the lid (21) and the base (22) along the Y axis to, for example, 0.2 mm to 0.4 mm, but this level of movement is still not enough to prevent particle generation. Summary of the Invention [Problem to be solved by the invention]

[0006] Thus, there is a need in the industry for a solution to restrict movement of the inner pod lid relative to the base when closing the dual pod. [Means for solving the problem]

[0007] One object of the present invention is to provide a dual pod, the dual pod including an inner pod, at least one engagement portion provided relatively outside the inner pod, the dual pod further including an outer pod defining a storage space for receiving the inner pod, and at least one guide mechanism provided relatively inside the outer pod, the guide mechanism being guided by the engagement portion and restrained at the engagement portion so as to limit offset movement of the inner pod within the outer pod.

[0008] In certain embodiments, the guide mechanism includes a guide portion and a coupling portion coupled to the guide portion, the coupling portion being coupled to an interior of the outer pod and the guide portion abutting an engagement portion of the inner pod while spaced apart from the interior of the outer pod.

[0009] In certain embodiments, the guide portion is flexible, the engagement portion is a notch, and the guide portion deforms in a corresponding relationship according to a force applied to the notch and is accordingly guided by and constrained at the notch.

[0010] In certain embodiments, a gap with a stroke distance is provided between the guide portion and the inside of the outer pod, which serves as a tolerance for allowing the guide portion to flexibly abut against the mating portion of the inner pod.

[0011] In certain embodiments, the guide portion includes a pair of first and second guide ribs that elastically deform in unison as the opening of the notch into which the guide ribs are inserted changes, such that the first and second guide ribs are constrained to fit within the notch.

[0012] In certain embodiments, the notch has a notch edge width, and the width of the guide portion is less than the notch edge width.

[0013] In a specific embodiment, the inner pod has a base and a lid joined together to define a storage space for receiving a reticle, and the outer pod has a door and a housing joined together to define the storage space, and the vertical direction of the lid is restrained by a guide mechanism to prevent the inner pod from deflecting offset from the axis due to an external force, and the horizontal direction of the lid is restrained by a guide mechanism.

[0014] In certain embodiments, a flange is provided on each of two opposing surfaces of the lid, an engagement portion is provided on the outside of the flange, and a guide mechanism is positioned to match the flange, and the guide mechanism is guided by and restrained at the engagement portion.

[0015] In a specific embodiment, each of the two opposing surfaces of the lid is provided with a flange, the engagement portion is provided on the outside of the flange, and the guide mechanism has an inclined surface that abuts the flange, and the inclined surface extends from the top portion of the housing toward the inner wall of the housing so that the vertical direction and at least the horizontal direction of the flange are restrained by the inclined surface.

[0016] In certain embodiments, the beveled surface and the top surface of the lid form an included angle in the range of 0.01° to 89.9°.

[0017] In a specific embodiment, each of the two opposing surfaces of the lid is provided with a flange, the engagement portion is provided on the outside of the flange, and the guide mechanism has an inclined surface that abuts the flange, and the inclined surface protrudes upward from the inner top portion of the door so that the vertical direction and at least the horizontal direction of the flange are restrained by the inclined surface.

[0018] In a specific embodiment, each of the two opposing surfaces of the lid is provided with a flange, the engagement portion is provided on the outside of the flange, and the guide mechanism has at least two guide ribs arranged in parallel, the two guide ribs being formed to protrude upward from the inner top portion of the door, and the two guide ribs resiliently abut against the inside of the engagement portion to achieve restraint.

[0019] For a better understanding of the present invention, reference is made to the following drawings and text description. Non-limiting and non-exhaustive embodiments are described below with reference to the drawings. It should be noted that components in the figures are not necessarily drawn to their actual size, but are instead drawn to focus on explaining the structure and principles. [Brief explanation of the drawings]

[0020] [Figure 1] FIG. 1 is a schematic diagram of a conventional dual pod. [Figure 2] FIG. 1 illustrates six axes of motion of a conventional lid. [Figure 3] FIG. 10 is a diagram showing a partial structure when a conventional lid is mated with a base. [Figure 4] FIG. 2 is a plan view of the dual pod of the present invention. [Figure 5] FIG. 5 is a cross-sectional view of the structure taken along the line AA in FIG. 4. [Figure 6] FIG. 1 illustrates the six axes of motion of the lid of the present invention. [Figure 7] FIG. 10 is another partial cross-sectional structural view of the dual pod of the present invention. [Figure 8] 1 is a diagram showing a partial structure of a lid of the present invention. [Figure 9] FIG. 6 is a partially enlarged view of FIG. 5. [Figure 10] FIG. 5 is a cross-sectional view of the structure taken along the line BB in FIG. 4. [Figure 11] 10 is another partially enlarged view showing the relationship between the first guide rib and the second guide rib with respect to the notch. FIG. [Figure 12A] 10 is a schematic diagram showing a notched contact state of a first guide rib and a second guide rib. [Figure 12B] 10 is a schematic diagram showing a notched contact state of a first guide rib and a second guide rib. [Figure 13] 1 is a schematic diagram of a dual pod according to another embodiment of the present invention. [Figure 14] 1 is a schematic diagram of a dual pod according to another embodiment of the present invention. [Figure 15] 1 is a schematic diagram of a dual pod according to another embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0021] To better explain the present invention, specific examples and embodiments will be described with reference to the accompanying drawings. However, it should be understood that the subject matter of the present application can be embodied in various different forms, and that the configurations covered by or provided by the subject matter of the present application are not limited to any exemplary specific embodiments disclosed in the description and specification of the present application, which exemplary specific embodiments are for illustrative purposes only. Similarly, the present invention aims to provide a reasonable and broad scope of the subject matter to which it is applied or covered. Furthermore, the accompanying drawings and the examples of the present invention are not drawn to scale and are not intended to correspond to actual relative dimensions.

[0022] For purposes of consistency and understanding, identical features are designated by symbols and reference numerals in these exemplary accompanying drawings (although in some instances they may not be so labeled). However, features in different embodiments may differ in other respects, and such features should not be narrowly limited to those depicted in the accompanying drawings. Terms such as "first" and "second" in this specification and accompanying drawings are used to distinguish between different objects and should not be construed as describing any particular order.

[0023] FIG. 4 is a plan view of the dual pod (3) of the present invention. FIG. 5 is a cross-sectional view of the dual pod (3) taken along line AA in FIG. 4, where line AA is the centerline of the dual pod (3) along the X-axis. The dual pod (3) includes an outer pod (30) and an inner pod (40). The outer pod (30) has, as its main components, a housing (31) and a door (32), which are joined together to define a space for receiving the inner pod (40). The housing (31) has, as its basic components, a ceiling or ceiling (311) and a wall (312) extending downward from the ceiling (311). Each of the housing (31) and the door (32) includes many elements. For example, the housing 31 has a pair of handles on the exterior, and the door (32) has an operable latch assembly, the details of which are omitted from this application. The housing (31) and door (32) elements may be formed by molding to form a moldable material into a particular configuration.

[0024] The inner pod (40) has, as its main components, a lid (41) and a base (42), which are joined together to define a space for receiving a reticle (not shown in the drawing), for example, an EUV reticle. The lid (41) and the base (42) each have a number of elements. For example, the top portion of the lid (41) is provided with a gas exchange means, a filtering means, and a number of contact portions that can form a mating relationship with the inside of the housing (31), and the inside of the base (42) is provided with a number of support members that support and restrain the reticle.

[0025] To accommodate the inner pod 40 in the outer pod 30, the inner pod 40 is first placed on a number of support members 33, such as commonly known kinematic coupling pins, provided inside the door 32, and then the housing 31 is placed over the door 32. In this case, the hold-down mechanisms provided inside the housing 31 abut against corresponding contact portions of the lid 41 of the inner pod 40, so that the Z-axis, B-axis, and X-axis of the inner pod 40 are restrained as shown in FIG.

[0026] Referring to Figure 5, which shows the cross-sectional structure of the dual pod 3 taken along line AA in Figure 4, a pair of guide mechanisms 313 are provided inside the housing 31 of the present invention. When the housing 31 covers the door 32, the guide mechanisms 313 are configured to abut against the flange (i.e., handle 411) of the lid 41 of the inner pod 40 to limit the horizontal and rotational movement of the lid 41 between the housing 31 and the door 32, and more specifically, to limit the movement and rotation around the X-axis and Y-axis shown in Figure 6. In the present invention, the abutment position of the guide mechanisms 313 against the flange is not specified. For example, such position can be adjusted according to the requirements of the mechanism, and the guide mechanisms 313 can abut against the center or two ends of the handle 411 in Figure 13. The guide mechanism 313 is located substantially where the ceiling 311 and the inner wall 312 join, and the guide mechanism protrudes inward from the housing 31. More specifically, one portion of the guide mechanism 313 is coupled to the ceiling 311 of the housing 31, and another portion of the guide mechanism 313 is coupled to the inner wall 312 of the housing 31.

[0027] In this embodiment, a pair of guide mechanisms 313 are provided inside the housing 31 corresponding to line AA. In other possible embodiments, the guide mechanism 313 is provided on the ceiling 311 or the inner wall 312. The guide mechanism 313 and the housing 31 are made of different materials, and the guide mechanism 313 may be made of a relatively soft and flexible material with high elasticity or flexibility. The material forming the guide mechanism 313 may be plastic, rubber, silicone, metal, or a combination thereof, so that the guide mechanism 313 can deform under external force. The guide mechanism 313 may be formed as a single piece with the housing 31 by molding, or may be heterogeneously joined to the housing 31 by an injection molding process.

[0028] Furthermore, the guide mechanism 313 is configured to engage with an engagement portion (described below) formed on the lid 41 of the inner pod 40, particularly when the housing 31 is placed over the door 32. The engagement between the engagement portion and the guide mechanism 313 further reduces horizontal movement or rotation of the cover 41 when subjected to external forces.

[0029] Figure 6 shows the directional constraints imposed on the inner pod 40, particularly on the lid 41. Compared with Figure 2 (where only the Z-axis, A-axis, and B-axis are restricted in the conventional configuration), the effects of all six axes in Figure 6 are achieved. The pair of guide mechanisms 313 complement the constraints not shown in Figure 2, i.e., the X-axis, Y-axis, and C-axis in Figure 2, resulting in the lid 41 being restricted in almost all directions, thereby effectively preventing the lid 41 from sliding relative to the base 42. Due to this structural design, the guide mechanism 313 can even provide a restriction in the Z-axis direction.

[0030] FIG. 7 shows another partial cross-sectional structure of the dual pod (3) of the present invention. FIG. 8 shows a partial structure of the lid (41). FIG. 9 shows a partial enlarged view of FIG. 5. The lid (41) of the inner pod (40) of the present invention is configured to have a pair of engagement portions. Specifically, as shown in FIG. 5, a pair of handles (411) are provided on two opposite sides of the cover (41), and the handles (411) extend outward from these two opposite sides. The handles (411) are designed to form a mating relationship with the lid opening means of the machine. The plan view of the lid (41) in FIG. 13 further shows the pair of handles (411), each having two ends. In this embodiment, the engagement portions are notches (412) formed in the handles (411), as shown in FIG. 8. The notch (412) has a gradually varying width (opening degree), the maximum width of which is the notch edge width (W). As shown in Figure 8, the edge (413) of the handle (411) and the other edge (413) appear discontinuous due to the formed notch (412). In other embodiments, the portion of the notch (412) is not limited to a central position of the handle (411).

[0031] As shown in Figure 7, in this embodiment, the guide mechanism (313) includes a first guide rib (313A) and a second guide rib (313B), which engage with the notch (412) to abut against the handle (411) of the lid (41). The first guide rib (313A) and the second guide rib (313B) are symmetrical structures. The first guide rib (313A) and the second guide rib (313B) are shaped to form a mating relationship with the notch (412), so that the first guide rib (313A) and the second guide rib (313B) can abut against the edge of the notch (412) simultaneously. Furthermore, the first guide rib (313A) and the second guide rib (313B) elastically deform in unison as the width (opening degree) of the notch (412) into which they are inserted changes, so that the first guide rib (313A) and the second guide rib (313B) fit into and are restrained within the notch (412).

[0032] Referring to FIG. 9, the first guide rib 313A has a sloped surface 51 that extends substantially from the ceiling 311 toward the inner wall 312. When the first guide rib 313A is in contact with the edge of the notch 412, the first guide rib 313A exerts a force in the -Z direction (opposite the +Z direction) and the -Y direction (opposite the +Y direction), thereby moving the lid 41 toward the center of the base 42. The sloped surface 51 and the top surface of the lid 41 form an included angle ranging from 0.01° to 89.9°. Similarly, although FIG. 9 does not show the second guide rib 313B, the second guide rib 313B also has a sloped surface 51 that matches the sloped surface of the first guide rib 313A. 9 further shows that the first guide rib (313A) of the guide mechanism (313) has a guide portion (61) and a connecting portion (62). The guide portion (61) is a tooth-like structure, and the connecting portion (62) is for connecting to the inside of the housing (31). The guide portion (61) receives a force when it abuts against the notch (412) and correspondingly elastically deforms, thereby guiding the guide portion (61) through the notch (412) and restraining it at the notch. Preferably, the mechanical thickness of the guide portion (61) is small to exhibit elasticity and flexibility, and the mechanical thickness of the connecting portion (62) is large to obtain good mechanical strength. A gap 52 is formed between the guide portion 61 and the inner wall 312, thereby providing a stroke distance (i.e., tolerance) between the guide portion 61 and the inside of the outer pod 30 (i.e., the inner wall 312), and thus providing a horizontal buffer when the guide portion 61 deforms. For example, the gap 52 provides tolerance when the guide portion 61 moves in the +Y direction to restrain the lid 41. In other possible embodiments, the gap 52 may also be filled with other materials or mechanisms to achieve the same function.

[0033] Figure 10 shows a cross-sectional structure taken along line BB in Figure 4, and Figure 10 clearly shows the relationship between one of the pair of guide mechanisms (313) and the handle (411). Figure 11 is another enlarged partial view, which clearly shows the relationship of the first guide rib (313A) and the second guide rib (313B) to the notch (412). Figures 12A and 12B show schematic diagrams of the contact state between the first guide rib (313A) and the second guide rib (313B) and the notch (412). When the first guide rib (313A) and the second guide rib (313B) are not fitted with the notch (412), a first guide width (W') is generated between the first guide rib (313A) and the second guide rib (313B), and the first guide width (W') is smaller than the notch edge width (W). When the notch (412) and the first guide rib (313A) and the second guide rib (313B) are engaged, the first guide rib (313A) and the second guide rib (313B) move toward one end of the notch (412), and the first guide rib (313A) and the second guide rib (313B) approach each other to create a second guide width (W") that is smaller than the first guide width (W'). The first guide width (W') and the second guide width (W") are primarily determined by the relationship between the two guide portions (61), and the connecting portion (62) basically exhibits relatively insufficient elasticity or flexibility, and such connecting portion cannot easily change the width between the two guide portions. When the first guide rib (313A) and the second guide rib (313B) move away from the notch (412), the first guide rib (313A) and the second guide rib (313B) return from their close proximity to each other to a predetermined state, i.e., a first guide width (W') is generated between the two guide portions (61).

[0034] 13, 14, and 15 show a dual pod according to another embodiment of the present invention, with the housing removed and not shown. The difference from the above-described embodiment is that a pair of guide mechanisms 313′ in this embodiment are provided on the inner top portion or upwardly facing surface of the door 32 and are configured to protrude upward so that when the inner pod 40 is placed on the door 32, the guide mechanisms 313′ abut against a flange on the lid 41 of the inner pod 40, thereby limiting rotation of the lid 41 in the C-axis direction.

[0035] In this embodiment, the guide mechanism 313' similarly includes a sloped surface 51' extending upward from the inner top or upwardly facing surface of the door 32 to facilitate contact with the flange structure, i.e., handle 411, of the lid 41. Once the edge of the lid 41 contacts the sloped surface 51', the force provided by the sloped surface 51' restricts the lid 41 in the -Z direction (opposite the +Z direction), the Y axis, and the C axis. In this case, the +Z direction of the lid 41 can still be restricted by the hold-down mechanism of the housing 31. Similarly, the handle 411 may be formed with an engaging portion, such as the notch 412 described above, that mates with the guide mechanism 313'. The guide portion, i.e., end portion, of the guide mechanism 313' may have a first guide rib 313A' and a second guide rib 313B', which have an interacting relationship with the notches 412 as described above with reference to Figures 11 and 12. The overall structure and shape of the guide mechanism 313' may be suitably configured so that a gap is similarly maintained between the first guide rib 313A' and the inside of the housing 31, and between the second guide rib 313B' and the inside of the housing 31, which gap serves as a buffer space.

[0036] In conclusion, the present invention provides a dual pod including at least an outer pod having a pair of guide mechanisms provided therein, the guide mechanisms being specifically designed to abut against one side or flange structure of the lid of the inner pod. Thus, during storage or transportation of the outer pod, horizontal movement (i.e., along the X-axis and Y-axis) and rotational movement (i.e., around the C-axis) of the lid can be further restricted, thereby helping to reduce friction between the lid and the base of the inner pod and therefore the generation of contaminant particles.

[0037] It should be understood, however, that the particular embodiments of the present invention are for illustrative purposes only, and that various modifications can be made without departing from the scope and spirit of the present invention as set forth in the appended claims. Furthermore, such modifications are intended to be included within the scope of the present invention as set forth in the appended claims. Accordingly, the particular embodiments provided in the specification of this disclosure should not be construed as limiting the present invention, the true scope and spirit of the present invention being set forth in the appended claims. [Explanation of symbols]

[0038] 1,3 Dual Pod 10,30 outer pod 20,40 Inner Pod 31 Housing 32 doors 33 Support member 42 base 51 Slope 52 Gap 311 Ceiling 312 Wall 313 Guidance mechanism 411 Handle 412 Notch

Claims

1. A dual pod, an inner pod, the inner pod being provided with at least one engagement portion on a relatively outer side thereof; an outer pod defining a storage space for receiving the inner pod, wherein at least one guide mechanism is provided relatively inside the outer pod, and the guide mechanism is guided by and restrained at the engagement portion so as to limit offset movement of the inner pod within the outer pod; A dual pod, wherein the guide mechanism includes a guide portion and a connecting portion connected to the guide portion, the guide portion is flexible, the engagement portion is a notch, the guide portion is in a corresponding relationship with the guide portion and deforms according to a force applied to the notch, and is accordingly guided by the notch and restrained at the notch.

2. A dual pod as described in claim 1, wherein the connecting portion is connected to the inside of the outer pod, and the guide portion abuts against the engaging portion of the inner pod while being spaced away from the inside of the outer pod.

3. The dual pod according to claim 2, wherein a gap having a stroke distance is provided between the guide portion and the inside of the outer pod, the gap serving as an tolerance for allowing the guide portion to flexibly abut against the engaging portion of the inner pod.

4. 2. The dual pod of claim 1, wherein the guide portion comprises a pair of first and second guide ribs, the first and second guide ribs elastically deforming in unison as the opening degree of the notch into which the guide ribs are inserted changes, so that the first and second guide ribs are fitted into and constrained within the notch.

5. The dual pod of claim 1 , wherein the notch has a notch edge width, and the width of the guide portion is less than the notch edge width.

6. the inner pod has a base and a lid joined together to define a storage space for receiving a reticle; the outer pod has a door and a housing joined together to define the storage space; 2. The dual pod of claim 1, wherein the vertical direction of the lid is restrained by the guide mechanism to prevent the inner pod from deflecting offset relative to an axis due to an external force, and the horizontal direction of the lid is restrained by the guide mechanism.

7. 7. A dual pod as described in claim 6, wherein a flange is provided on each of two opposite surfaces of the lid, the engagement portion is provided on the outside of the flange, the guide mechanism is positioned to match the flange, and the guide mechanism is guided by the engagement portion and restrained at the engagement portion.

8. A dual pod as described in claim 6, wherein a flange is provided on each of two opposite surfaces of the lid, the engagement portion is provided on the outside of the flange, and the guide mechanism has an inclined surface that abuts against the flange, the inclined surface extending from the top portion of the housing toward the inner wall of the housing so that the vertical direction and at least the horizontal direction of the flange are restrained by the inclined surface.

9. The dual pod of claim 8 , wherein the angle between the inclined surface and the top surface of the lid is in the range of 0.01° to 89.9°.

10. A dual pod as described in claim 6, wherein a flange is provided on each of two opposite surfaces of the lid, the engagement portion is provided on the outside of the flange, and the guide mechanism has an inclined surface that abuts the flange, the inclined surface being formed to protrude upward from the inner top portion of the door, so that the vertical direction and at least the horizontal direction of the flange are restrained by the inclined surface.

11. 7. A dual pod as described in claim 6, wherein a flange is provided on each of two opposite surfaces of the lid, the engagement portion is provided on the outside of the flange, the guide mechanism has at least two guide ribs arranged in parallel, the two guide ribs are formed to protrude upward from the inner top portion of the door, and the two guide ribs resiliently abut against the inside of the engagement portion to achieve the restraint.

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