Seal structure, chamber, substrate processing apparatus, and method for attaching seal material

Abstract

To fix a sealing material in a groove without twisting.SOLUTION: This seal structure includes: a groove having a width formed greater than a seal material; a pressing member provided in a region in the groove on one side in the groove width direction so as to be capable of adjusting a groove-width-direction position, the pressing member forming a slit that extends toward the other side in the groove width direction and that allows communication between the inside and outside of the groove, and having an eaves part that presses the seal material inside the groove; and a fixing mechanism for fixing the pressing member.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present disclosure relates to a seal structure, a chamber, a substrate processing apparatus, and a method for attaching a seal material. [Background technology]

[0002] Patent Document 1 discloses a sealing structure between a lower chamber and an upper chamber as a sealing structure between an internal processing region and an external region of a substrate processing apparatus. In this sealing structure, a dovetail groove is formed on the sealing surface of the lower chamber, and a sealing member such as an O-ring is fitted into the dovetail groove. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2020-196053 Summary of the Invention [Problem to be solved by the invention]

[0004] The technology according to the present disclosure fixes the sealing material in the groove without twisting. [Means for solving the problem]

[0005] One aspect of the present disclosure is a sealing structure having a groove formed to be wider than a sealing material, a pressing member arranged in a region on one side of the groove in the groove width direction so as to be adjustable in its position in the groove width direction, extending toward the other side of the groove width direction to form a slit connecting the inside and outside of the groove and having a visor portion that presses the sealing material into the groove, and a fixing mechanism that fixes the pressing member. [Effects of the Invention]

[0006] According to the technology of the present disclosure, the sealing material can be fixed in the groove without twisting. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is an explanatory diagram showing a schematic outline of the configuration of a film forming apparatus as a substrate processing apparatus according to an embodiment of the present invention, showing a cross section of a part of the film forming apparatus. [Figure 2] FIG. 2 is a top view of the chamber body. [Figure 3] FIG. 2 is a partially enlarged perspective cross-sectional view of the chamber body. [Figure 4] FIG. 10 is a cross-sectional view of a non-locking groove. [Figure 5] FIG. [Figure 6] FIG. 2 is a partially enlarged perspective view of the chamber body. [Figure 7] FIG. [Figure 8] 10A and 10B are diagrams showing other examples of the seal structure. [Figure 9] 10A and 10B are diagrams showing other examples of the tension portion. [Figure 10] 10A and 10B are diagrams illustrating another example of a fixing mechanism for a pressing member. [Figure 11] 10A and 10B are diagrams illustrating another example of a fixing mechanism for a pressing member. DETAILED DESCRIPTION OF THE INVENTION

[0008] In the manufacturing process of semiconductor devices and the like, various substrate processing operations, such as film formation processing for forming a predetermined film on a substrate such as a semiconductor wafer (hereinafter referred to as "wafer"), are performed in a substrate processing apparatus, specifically, with the substrate accommodated in a depressurized chamber of the substrate processing apparatus.

[0009] The substrate processing apparatus also has a seal structure that isolates the internal reduced-pressure atmosphere from the external atmosphere. This seal structure isolates the internal reduced-pressure atmosphere from the external atmosphere using a seal material, such as an O-ring, provided between two components that form the substrate processing apparatus. The seal material is fixed in a groove provided on the sealing surface of one of the two components. A dovetail groove may also be used to secure the seal material in the groove. However, with a dovetail groove, the seal material must be pushed into the groove to accommodate it, which can cause twisting of the seal material when it is accommodated in the groove. This twist is difficult to remove after the seal material is accommodated in the groove. Furthermore, leaving the seal material in this twisted state may adversely affect the seal material's lifespan, etc.

[0010] Therefore, the technology according to the present disclosure fixes the sealing material in the groove without twisting.

[0011] The seal structure, chamber, substrate processing apparatus, and method for attaching a seal material according to the present embodiment will be described below with reference to the drawings. In this specification and the drawings, elements having substantially the same functional configurations are designated by the same reference numerals, and redundant description will be omitted.

[0012] <Film forming equipment> FIG. 1 is an explanatory diagram showing a schematic outline of the configuration of a film forming apparatus as a substrate processing apparatus according to this embodiment, showing a part of the film forming apparatus in cross section.

[0013] The film forming apparatus 1 of FIG. 1 is configured to perform a film forming process on a wafer W as a substrate, and to form, for example, a metal film on the wafer W.

[0014] The film forming apparatus 1 includes a chamber 10 . The chamber 10 accommodates the wafer W and is configured to be decompressible. The chamber 10 includes a chamber body 10a and a cover member 10b.

[0015] The chamber body 10a is formed, for example, in the shape of a cylinder (specifically, a rectangular cylinder) that is open at the top and has a bottom. The chamber body 10a is formed, for example, from ceramic. The chamber body 10a is formed by molding. The chamber body 10a may be provided with a heating mechanism (for example, a resistance heater or a flow path for a high-temperature refrigerant) that heats the chamber body 10a.

[0016] A loading / unloading port (not shown) for the wafer W is provided in the side wall 11 of the chamber body 10a, and a gate valve (not shown) for opening and closing the loading / unloading port is provided at the loading / unloading port.

[0017] An exhaust port 12a is formed in the bottom wall 12 of the chamber main body 10a. The accommodation unit 20, which accommodates a bellows 33 (described later), is connected to the bottom wall 12 so that an opening 20a at the top of the accommodation unit 20 communicates with the exhaust port 12a. The accommodation unit 20 has openings 20a and 20b at the top and side, and the openings 20a and 20b communicate with each other. One end of an exhaust pipe 21 is connected to the side of the accommodation unit 20 so that the chamber 10 is evacuated through these openings 20a and 20b. The other end of the exhaust pipe 21 is connected to an exhaust mechanism 22 having a vacuum pump or the like.

[0018] The lid member 10b closes the upper opening of the chamber body 10a. The lid member 10b is formed, for example, in a rectangular shape when viewed from above. The lid member 10b is formed, for example, from ceramic. A hinge 10c is provided at one horizontal end of the chamber body 10a (the right end in FIG. 1). The lid member 10b is pivotally supported by the hinge 10c, and the hinge 10c allows the lid member 10b to open and close the upper opening of the chamber body 10a.

[0019] An O-ring 10d is provided as a seal between the chamber body 10a and the lid member 10b to maintain airtightness. In other words, the chamber 10 has a seal structure S that uses the O-ring 10d as a seal to isolate the reduced pressure atmosphere inside the chamber 10 from the atmosphere outside the chamber 10. A more specific configuration of the seal structure S will be described later.

[0020] A mounting table 30 having a circular shape in a plan view on which a wafer W is horizontally placed is provided within the chamber 10. A heater (not shown) for heating the wafer W is provided inside the mounting table 30. An upper end of a support member 31 extending in the vertical direction is connected to the center of the underside of the mounting table 30. The support member 31 penetrates the bottom wall 12 of the chamber body 10a through an exhaust port 12a in the bottom wall 12 and further penetrates the bottom wall 20c of the accommodation section 20. The lower end of the support member 31 is connected to a lifting mechanism 32. The lifting mechanism 32 is controlled by a control section 50 (described later) to move the mounting table 30 up and down between an upper first position and a lower second position.

[0021] The first position is a processing position where the wafer W is processed. The second position is a waiting position where the mounting table 30 waits while transferring the wafer W between a transfer mechanism (not shown) for the wafer W entering the chamber 10 through the aforementioned loading / unloading entrance (not shown) of the chamber 10 and a transfer pin (not shown) provided below the chamber 10.

[0022] Furthermore, a flange 31a is provided on the support member 31. A bellows 33 is provided between the lower surface of this flange 31a and the upper surface of the bottom wall 20c of the storage section 20 so as to surround the outer periphery of the support member 31. Because this bellows 33 is provided, the airtightness of the chamber 10 is not lost due to the portion of the bottom wall 20c of the storage section 20 where the support member 31 penetrates.

[0023] Furthermore, a supply unit 13 for a film formation gas serving as a processing gas is provided on the lid member 10b of the chamber 10 so as to face the mounting table 30. The supply unit 13 supplies a film formation gas into the chamber 10. The film formation gas supplied by the supply unit 13 is, for example, a film formation gas for forming a metal film. One end of a supply pipe 40 is connected to the supply unit 13. The other end of the supply pipe 40 is connected to a supply mechanism 41 having a flow rate control valve (not shown) for controlling the flow rate of the film formation gas from a gas supply source.

[0024] The film forming apparatus 1 configured as above is provided with a control unit 50, as shown in Fig. 1. The control unit 50 is configured by a computer including a processor such as a CPU and a memory, and has a program storage unit (not shown). The program storage unit stores a program for realizing wafer processing in the film forming apparatus 1. The program may be recorded on a computer-readable storage medium and installed into the control unit 50 from the storage medium. The storage medium may be temporary or non-temporary.

[0025] <Seal structure S> Next, a configuration example of the seal structure S will be described. FIG. 2 is a top view of the chamber body 10a, showing a state in which an O-ring 10d is accommodated in a groove 11a (described below), but the holding members 100 and 110 (described below) are not disposed in a fixed groove 11c (described below). FIG. 3 is a partially enlarged perspective cross-sectional view of the chamber body 10a, showing a state in which the O-ring 10d is not accommodated in the groove 11a and the holding members 100 and 110 are not disposed in the fixed groove 11c (described below). FIG. 4 is a cross-sectional view of the non-fixed groove 11b (described below). FIG. 5 is a cross-sectional view of the fixed groove 11c (described below). FIG. 6 is a partially enlarged perspective view of the chamber body 10a, showing a state in which the O-ring 10d is accommodated in the groove 11a and the holding members 100 and 110 are disposed in the fixed groove 11c (described below). FIG. 7 is an explanatory diagram of a fixing mechanism 120 (described below).

[0026] As described above, the seal structure S uses the O-ring 10d to isolate the reduced pressure atmosphere inside the chamber 10 from the atmosphere outside the chamber 10. The O-ring 10d is disposed between two sealing surfaces, namely, the upper surface of the side wall 11 of the chamber body 10a and the lower surface of the peripheral edge of the cover member 10b.

[0027] 2, the O-ring 10d is housed in a groove 11a formed in, for example, the upper surface of the side wall 11 of the chamber body 10a. The groove 11a is formed to follow the shape of the chamber 10, and is formed, for example, in a rectangular ring shape in plan view.

[0028] As shown in FIGS. 2 and 3, the groove 11a has a non-fixed groove 11b and a fixed groove 11c.

[0029] The non-fixed groove 11b accommodates the O-ring 10d therein. However, the O-ring 10d is not fixed inside the non-fixed groove 11b. The non-fixed groove 11b is, for example, a square groove with a flat bottom and vertical side surfaces, as shown in FIG.

[0030] Furthermore, the width W1 of the opening of the non-fixed groove 11b is greater than the width (ie, diameter) of the O-ring 10d. Furthermore, non-fixed groove 11b supports O-ring 10d on its bottom surface. Depth D1 of non-fixed groove 11b is smaller than the thickness (i.e., diameter) of O-ring 10d by a predetermined amount. Therefore, while O-ring 10d is supported on the bottom surface of non-fixed groove 11b, i.e., while housed in non-fixed groove 11b, it protrudes a predetermined amount (e.g., 1 mm) from the top surface of sidewall 11 of chamber body 10a through the opening of non-fixed groove 11b.

[0031] 5 and 6, the fixing groove 11c accommodates and fixes the O-ring 10d therein. The fixing groove 11c is, for example, a square groove formed so that the side surfaces rise vertically from the flat portion of the bottom surface.

[0032] The width W2 of the fixing groove 11c, including the opening, is greater than the width (ie, diameter) of the O-ring 10d.

[0033] A protrusion 11d protrudes from the center of the bottom surface of fixing groove 11c in the groove width direction. The top surface of protrusion 11d is formed flat, and the portion of the groove bottom surface of fixing groove 11c other than protrusion 11d, i.e., the outer region on the outer side in the groove width direction, is also formed flat.

[0034] In the fixing groove 11c, the O-ring 10d is supported by the top surface of the protrusion 11d. The height H1 of the protrusion 11d is a height at which the O-ring 10d supported by the top surface of the protrusion 11d protrudes a predetermined amount from the upper surface of the side wall 11 of the chamber body 10a.

[0035] Pressing members 100 and 110 are disposed in the fixing groove 11c to fix the O-ring 10d. The pressing members 100 and 110 are formed of, for example, stainless steel. Furthermore, at least the pressing members 100 and 110 on the vacuum atmosphere side may be coated to enhance corrosion resistance.

[0036] The pressing member 100 is disposed in a region on one side in the groove width direction (the left side in FIG. 5) within the fixing groove 11c so that its position in the groove width direction can be adjusted. The pressing member 100 also has a visor portion 101. The visor portion 101 extends toward the other side in the groove width direction (the right side in FIG. 5) and forms a slit SL that connects the inside and outside of the fixing groove 11c.

[0037] In addition, the portion of the surface of the pressing member 100 on the other side in the groove width direction (right side in Figure 5) that is above the convex portion 11d is a tapered surface in which the opening side of the fixing groove 11c protrudes to the other side in the groove width direction (right side in Figure 5) to form the eave portion 101.

[0038] Furthermore, the lower surface of the pressing member 100 is formed flat so that it can slide smoothly on the bottom surface of the fixing groove 11c. Also, the lower part of the pressing member 100 is formed thicker than the upper part of the pressing member 100, which is formed thin because it has a tapered surface, so that it does not fall over during the above-mentioned sliding. The height of the pressing member 100 is such that the pressing member 100 does not protrude from the upper surface of the side wall 11 of the chamber body 10a when the pressing member 100 is supported on the bottom surface of the fixing groove 11c.

[0039] Similarly, the pressing member 110 is disposed in a region on one side in the groove width direction (the right side in FIG. 5) within the fixing groove 11c so that its position in the groove width direction can be adjusted. The pressing member 110 also has a visor portion 111. The visor portion 111 extends toward the other side in the groove width direction (the left side in FIG. 5) and forms the slit SL.

[0040] In addition, the portion of the surface of the pressing member 110 on the other side in the groove width direction (left side in Figure 5) that is above the convex portion 11d is a tapered surface in which the opening side of the fixing groove 11c protrudes to the other side in the groove width direction (left side in Figure 5) to form the eave portion 111.

[0041] Furthermore, the lower surface of the pressing member 110 is formed flat so that it can slide smoothly on the bottom surface of the fixing groove 11c. Also, the lower part of the pressing member 110 is formed thicker than the upper part of the pressing member 110, which is formed thin because it has a tapered surface, so that it does not fall over during the above-mentioned sliding. The height of the pressing member 110 is such that the pressing member 110 does not protrude from the upper surface of the side wall 11 of the chamber body 10a when the pressing member 110 is supported on the bottom surface of the fixing groove 11c.

[0042] By adjusting the positions of these pressing members 100 and 110 in the groove width direction, the width W3 of the slit SL formed by the overhanging portions 101 and 111 can be adjusted.

[0043] Moreover, the canopy portions 101 and 111 are formed so as to satisfy the following conditions (1) and (2). (1) When the pressing member 100 is positioned toward one side in the groove width direction (left side in Figure 5) and the pressing member 110 is positioned toward one side in the groove width direction (right side in Figure 5), the width of the slit SL formed by the eave portions 101, 111 is larger than the width of the O-ring 10d. (2) When the pressing member 100 is positioned closer to the other side in the groove width direction (the right side in Figure 5) and the pressing member 110 is positioned closer to the other side in the groove width direction (the left side in Figure 5), the width of the slit SL formed by the eaves portions 101 and 111 is smaller than the width of the O-ring 10d, and the O-ring 10d is pressed by the eaves portions 101 and 111.

[0044] If the width W3 of the slit SL is sufficiently smaller than the O-ring 10d and the pressing members 100, 110 are fixed, the O-ring 10d can be fixed in the fixing groove 11c by the eaves portions 101, 111 so that the O-ring 10d does not come out of the fixing groove 11c through the slit SL.

[0045] Therefore, the seal structure S has fixing mechanisms 120 and 130 that fix the pressing members 100 and 110 in the fixing grooves 11c.

[0046] The fixing mechanism 120 for the pressing member 100 has a screw 121 as a tensioning part that protrudes from the pressing member 100 to one side in the groove width direction (left side in FIG. 5) so that the protrusion length can be adjusted, and the above-mentioned protrusion 11d. 7, the screw 121 is threaded into a screw hole 102 formed in the surface of the pressing member 100 on one side in the groove width direction. By adjusting the threaded length of the screw 121 with a tool T (see FIG. 6), it is possible to adjust the protruding length of the screw 121 from the pressing member 100 to one side in the groove width direction (the left side in FIG. 5).

[0047] In the fixing mechanism 120, when the protruding length of the screw 121 increases and the screw 121 is stretched between the pressing member 100 and the side surface of the fixing groove 11c, the pressing member 100 is pressed against the side surface of the protrusion 11d and fixed.

[0048] The fixing mechanism 130 for the pressing member 110 has a screw 131 as a tensioning part that protrudes from the pressing member 110 to one side in the groove width direction (the right side in FIG. 5) so that the protrusion length can be adjusted, and the protrusion 11d. The screw 131 is screwed into a screw hole (not shown) formed in one surface of the pressing member 110 in the groove width direction. By adjusting the screwing length of the screw 131 with a tool T (see FIG. 6), the protruding length of the screw 131 from the pressing member 110 to one side in the groove width direction (the right side in FIG. 5) can be adjusted.

[0049] In the fixing mechanism 130, when the protruding length of the screw 131 increases and the screw 131 is stretched between the pressing member 110 and the side surface of the fixing groove 11c, the pressing member 100 is pressed against and fixed to the side surface of the convex portion 11d.

[0050] <An example of the method for attaching the O-ring 10d> Subsequently, an example of the method for attaching the O-ring 10d will be described.

[0051] (Step S1: Arrangement of the pressing members 100 and 110) For example, first, the pressing members 100 and 110 are arranged in the region outside the groove width direction. At this time, the protruding lengths of the screws 121 and 131 connected to the pressing members 100 and 110 to the outside in the groove width direction are short, and the eaves portions 101 and 111 form a slit SL that is wider than the O-ring 10d.

[0052] (Step S2: Accommodation of the O-ring 10d) Next, the O-ring 10d is accommodated in the groove 11a. For the non-fixing groove 11b, the O-ring 10d is accommodated through the opening of the non-fixing groove 11b, and for the fixing groove 11c, the O-ring 10d is accommodated through the fixing groove 11c and the slit SL.

[0053] (Step S3: Adjustment of the width of the slit SL and fixing of the pressing members 100 and 110) Thereafter, the width of the slit SL is made smaller than the width (i.e., diameter) of the O-ring 10d, and the pressing members 100 and 110 are fixed. Specifically, the screwed lengths of the screws 121 and 131 are increased, and the pressing members 100 and 110 move inward in the groove width direction. As a result, the width of the slit SL becomes smaller than the width of the O-ring 10d, and the screws 121 and 131 are stretched between the pressing members 100 and 110 and the side surfaces of the fixing groove 11c, and the pressing members 100 and 110 are pressed against and fixed to the side surfaces of the convex portion 11d. With the above steps, the attachment of the O-ring 10d is completed.

[0054] <Another example of the method for attaching the O-ring 10d> Next, another example of the method for attaching the O-ring 10d will be described.

[0055] (Step S11: Accommodation of the O-ring 10d) In this example, first, the O-ring 10d is accommodated in the groove 11a. The O-ring 10d is accommodated in the non-fixing groove 11b and the fixing groove 11c through the openings of the non-fixing groove 11b and the fixing groove 11c.

[0056] (Step S12: Arrangement of the pressing members 100 and 110) Next, the pressing members 100 and 110 are arranged in the regions outside the groove width direction. At this time, the protruding lengths of the screws 121 and 131 connected to the pressing members 100 and 110 outward in the groove width direction are shortened.

[0057] Thereafter, in the same manner as in the above step S3, the width of the slit SL becomes smaller than the width (i.e., diameter) of the O-ring 10d, and the pressing members 100 and 110 are fixed. With the above steps, the attachment of the O-ring 10d is completed.

[0058] Thus, the order of the step of arranging the pressing members 100 and​​​​​​​​ As described above, in the seal structure S of this embodiment, after the O-ring 10d is accommodated in the fixing groove 11c, which is wider than the O-ring 10d, the eaves 101, 111 of the pressing members 100, 110 form a slit SL narrower than the O-ring 10d and fix the pressing members 100, 110, thereby preventing the O-ring 10d from falling out of the groove. Furthermore, in the seal structure S of this embodiment, when the O-ring 10d is accommodated in the groove 11a, no slit SL narrower than the O-ring 10d exists. Therefore, according to this embodiment, twisting of the O-ring 10d when the O-ring 10d is accommodated in the groove 11a can be suppressed. Therefore, the O-ring 10d can be secured in the groove 11a without twisting. As a result, the life of the O-ring 10d can be extended.

[0061] Furthermore, if the chamber body 10a is made of ceramic, forming a dovetail groove in the chamber body 10a to secure the O-ring 10d, as in the present embodiment, may result in the following problems: The narrow portion forming the opening of the dovetail groove may be damaged during groove processing. Similarly, damage may occur when the O-ring 10d is attached or detached. If a highly corrosion-resistant or hard O-ring 10d is used, the above-described damage may occur, particularly during attachment or detachment. In contrast, in the present embodiment, the groove 11a formed in the chamber body 10a is not a dovetail groove. Therefore, even if the chamber body 10a is made of ceramic, the chamber body 10a is less likely to be damaged during groove processing or when attaching or detaching an O-ring (including a hard O-ring).

[0062] Furthermore, the seal structure S of this embodiment, like the conventional one, provides a seal using two seal surfaces: the upper surface of the side wall 11 of the chamber body 10a and the lower surface of the peripheral edge of the lid member 10b, and compared to the conventional one, the only processing required for the seal surfaces is processing of the fixing groove 11c. Therefore, the seal structure S of this embodiment can obtain sealing performance similar to that of the conventional one.

[0063] If screw holes are drilled in ceramic members, there is a risk of damaging the ceramic members. In contrast, in this embodiment, screw holes are not drilled in the ceramic members (chamber body 10a) and the like that constitute the seal structure S in order to fix the presser members 100 and 110. In other words, in this embodiment, the presser members 100 and 110 can be fixed in the ceramic members (chamber body 10a) and the like that constitute the seal structure S without drilling screw holes that may damage the ceramic members.

[0064] <Modification> FIG. 8 is a diagram showing another example of the seal structure. In the sealing structures of the above examples, the pressing member having the eaves portion is provided on both sides in the groove width direction. However, the pressing member may be provided on only one side in the groove width direction. That is, only one of the pressing members 100 and 110 shown in FIG. 5 may be provided. In the example of FIG. 7, only the pressing member 100 on the reduced pressure atmosphere side is provided. In this way, when the pressing member is provided on only one side in the groove width direction, it is preferable that it be provided only on the reduced pressure atmosphere side between the reduced pressure atmosphere side and the external atmosphere side. This allows the O-ring 10d to be fixed in the fixing groove 11c, just as in the case where the pressing member is provided on both sides in the groove width direction.

[0065] In the illustrated example, a slit SL that connects the outside and inside of the fixing groove 11c is formed by the eave portion 101 and the side surface of the fixing groove 11c.

[0066] FIG. 9 is a diagram showing another example of the tension portion. In the above examples, the tensioning portions that protrude outward in the groove width direction from the pressing members 100, 110 in an adjustable manner were the screws 121, 131 that screw into threaded holes formed on the outer surfaces of the pressing members 100, 110 in the groove width direction. As shown in Fig. 9, the tensioning portions may also be springs 200, 210 that serve as elastic members having elasticity and are connected to the outer surfaces of the pressing members 100, 110 in the groove width direction. The springs 200 and 210 may be made of spring steel, nickel alloy, stainless steel, or the like.

[0067] Since the springs 200 and 210 do not require threading of the holding members 100 and 110, the holding members 100 and 110 can be made of ceramic.

[0068] 10 and 11 are diagrams showing another example of the fixing mechanism of the pressing member, where FIG. 10 is a cross-sectional view of a seal structure having the fixing mechanism of the pressing member of this example, and FIG. 11 is a plan view of the pressing member. Similar to the pressing member 100 shown in FIG. 5 and other figures, the pressing member 300 shown in FIG. 10 also has a canopy portion 101 extending inward in the groove width direction. 10, fixing mechanism 320 of pressing member 300 differs from fixing mechanism 120 of pressing member 100 in that it has a screw 322 that penetrates pressing member 300 in the groove depth direction and screws into a screw hole 321 formed in the bottom surface of fixing groove 11c. Then, fixing mechanism 320 fixes pressing member 300 with screw 322.

[0069] This configuration involves drilling screw holes in the sidewall 11 of the chamber body 10a, and is therefore suitable for use when the chamber body 10a is made of a metal material such as stainless steel rather than a ceramic material.

[0070] As shown in FIG. 11, the through hole 301 of the pressing member 300 for the screw 322 is an elongated hole that is long in the groove width direction (left and right direction in the figure) in a plan view so that the position of the pressing member 300 in the groove width direction can be adjusted when the screw 322 that has passed through the pressing member 300 is screwed into the screw hole 321. In addition, a countersunk hole 302 is formed on the upper surface of the pressing member 300 to accommodate the screw head 322a, so that the screw head 322a of the screw 322 that fixes the pressing member 300 does not protrude from the upper surface of the pressing member 300 or the upper surface of the side wall 11 of the chamber body 10a.

[0071] 2, multiple fixing grooves 11c are provided on each side of chamber body 10a. That is, multiple pressing members are provided in fixing grooves 11c on each side of chamber body 10a. Alternatively, the pressing members may be formed to be longer than, for example, half the length of each side of the chamber body, and one pressing member may be provided on each side of the chamber body.

[0072] Furthermore, although the shape of the presser member is linear in plan view in the example shown in Fig. 6, it may be arc-shaped or L-shaped in plan view. When the shape of the presser member is arc-shaped or L-shaped in plan view, it is preferable to use fixing mechanism 320 shown in Figs. 10 and 11 as a fixing mechanism for the presser member, which allows easy position adjustment not only in the groove width direction but also in the groove length direction. Furthermore, the arrangement density of the pressure members on each side of the chamber body 10a may be equal between the sides, but the arrangement density of the pressure members on some sides may be higher than on other sides. Specifically, the arrangement density of the pressure members on the side of the hinge 10c and the side opposite the hinge 10c may be higher than on the sides connected to both ends of the side of the hinge 10c. This is because, when the lid member 10b is opened or closed on the side of the hinge 10c and the side opposite the hinge 10c, the O-ring 10d may come off the groove 11a while remaining attached to the underside of the peripheral portion of the lid member 10b. By increasing the arrangement density of the pressure members on the side of the hinge 10c and the side opposite the hinge 10c, the O-ring 10d can be prevented from coming off the groove 11a on the side of the hinge 10c and the side opposite the hinge 10c as described above.

[0073] In the above example, the groove 11a is formed on the upper surface of the side wall of the chamber body 10a, which is the lower sealing surface, but instead, it may be formed on the lower surface of the peripheral portion of the lid member 10b, which is the upper sealing surface.

[0074] Furthermore, in the above example, the non-fixed groove 11b is a square groove, but as long as the width of the groove opening is larger than the width of the O-ring 10d, the non-fixed groove 11b may have a groove shape other than a square groove, for example, a one-sided dovetail groove shape having a tapered surface on only one side in the groove width direction.

[0075] In the above example, an O-ring, i.e., a member having a circular cross section, is used as the sealing material, but the sealing material may have a cross section other than a circular shape. Also, the shape of the inner side surface in the width direction of the pressing member can be changed as appropriate to match the cross section of the sealing material.

[0076] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive. The above-described embodiments may be omitted, substituted, or modified in various ways without departing from the spirit and scope of the appended claims, the appended claims described below, and the spirit thereof. For example, the components of the above-described embodiments may be combined in any manner without impairing the above-described effects. Furthermore, the technology disclosed herein may achieve other effects that are apparent to those skilled in the art from the description of this specification, in addition to or in place of the above-described effects.

[0077] The following configurations also fall within the technical scope of the present disclosure. [Additional note 1] a groove formed with a width larger than that of the sealing material; a pressing member that is disposed in an area on one side in the groove width direction so as to be adjustable in its position in the groove width direction, that extends toward the other side in the groove width direction, that forms a slit that connects the inside and outside of the groove, and that has a canopy portion that presses the sealing material into the groove; a fixing mechanism for fixing the pressing member. [Additional note 2] The fixing mechanism includes: a tension portion that protrudes from the pressing member toward one side in the groove width direction in an adjustable manner; a protrusion protruding from the bottom of the groove, The sealing structure according to appended item 1, wherein the pressing member is pressed against the protruding portion by the tensioning portion to fix the pressing member. [Additional note 3] The sealing structure according to appended item 2, wherein the tensioning portion is a screw that is screwed into a screw hole formed on a surface of the pressing member on one side in the groove width direction. [Additional note 4] 3. The sealing structure according to claim 2, wherein the tensioning portion is an elastic member having elasticity. [Additional note 5] The fixing mechanism includes: a screw that penetrates the pressing member in the groove depth direction and is screwed into a screw hole formed in the bottom surface of the groove; The sealing structure according to appended item 1, wherein the pressing member is fixed by the screw. [Additional note 6] 6. The sealing structure according to any one of claims 1 to 5, wherein the pressing members are disposed on both sides of the groove in the width direction. [Additional note 7] 6. The sealing structure according to any one of appended items 1 to 5, wherein the pressing member is disposed on only one side in the groove width direction. [Additional note 8] The sealing structure described in any one of appended items 1 to 7, wherein when the pressing member is positioned closer to one side in the groove width direction, the eave portion forms the slit wider than the sealing material, and when the pressing member is positioned closer to the other side in the groove width direction, the eave portion forms the slit narrower than the sealing material and presses the sealing material. [Additional note 9] The seal structure according to any one of appended items 1 to 7, wherein the groove is formed in a ceramic member. [Additional Note 10] A chamber having the seal structure according to any one of appended items 1 to 9, configured to be depressurized, and configured to accommodate a substrate to be processed in a substrate processing operation. [Additional Note 11] A substrate processing apparatus comprising the chamber according to supplementary item 10. [Claim 12] a step of disposing a pressing member having an eave portion extending to one side of the groove width direction in a region of the groove formed to be wider than the sealing material, and forming a slit by the eave portion that communicates the inside and outside of the groove; placing the seal material in the groove; making the width of the slit smaller than the width of the sealing material; and a step of fixing the pressing member. [Explanation of symbols]

[0078] 1 Film deposition equipment 10d O-ring 11c Fixed groove 100 holding member 101 Eaves 110 Holding member 111 Eaves 120 Fixing mechanism 130 Fixing mechanism 300 Holding member 320 Fixing mechanism S seal structure SL Slit W wafer

Claims

1. a groove formed with a width larger than that of the sealing material; a pressing member that is disposed in an area on one side in the groove width direction so as to be adjustable in its position in the groove width direction, that extends toward the other side in the groove width direction, that forms a slit that connects the inside and outside of the groove, and that has a canopy portion that presses the sealing material into the groove; a fixing mechanism for fixing the pressing member.

2. The fixing mechanism includes: a tension portion that protrudes from the pressing member toward one side in the groove width direction in an adjustable manner; a protrusion protruding from the bottom of the groove, The seal structure according to claim 1 , wherein the pressing member is pressed against the protruding portion by the tensioning portion to fix the pressing member.

3. The sealing structure according to claim 2 , wherein the tensioning portion is a screw that is threaded into a screw hole formed in a surface of the pressing member on one side in the groove width direction.

4. The seal structure according to claim 2 , wherein the tension portion is an elastic member having elasticity.

5. The fixing mechanism includes: a screw that penetrates the pressing member in the groove depth direction and is screwed into a screw hole formed in the bottom surface of the groove; The seal structure according to claim 1 , wherein the pressing member is fixed by the screw.

6. The sealing structure according to any one of claims 1 to 5, wherein the pressing members are disposed on both sides of the groove in the width direction.

7. The sealing structure according to any one of claims 1 to 5, wherein the pressing member is disposed on only one side in the groove width direction.

8. The sealing structure according to any one of claims 1 to 5, wherein when the pressing member is positioned closer to one side in the groove width direction, the eave portion forms the slit wider than the sealing material, and when the pressing member is positioned closer to the other side in the groove width direction, the eave portion forms the slit narrower than the sealing material and presses the sealing material.

9. 6. The seal structure according to claim 1, wherein the groove is formed in a ceramic member.

10. A chamber having the seal structure according to any one of claims 1 to 5, configured to be depressurized, and configured to accommodate a substrate to be processed in a substrate processing operation.

11. A substrate processing apparatus comprising the chamber of claim 10.

12. a step of disposing a pressing member having an eave portion extending to one side of the groove width direction in a region of the groove formed to be wider than the sealing material, and forming a slit by the eave portion that communicates the inside and outside of the groove; placing the seal material in the groove; making the width of the slit smaller than the width of the sealing material; and a step of fixing the pressing member.

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