Method for generating a wire loop profile of a wire loop and verifying that there is sufficient clearance between adjacent wire loops

Abstract

To provide a method for generating a wire loop profile associated with a semiconductor package.SOLUTION: A method includes step 900 for providing package data for a semiconductor package and step 902 for generating loop profiles for wire loops in the semiconductor package. The loop profiles include a tolerance band-shaped area along at least a portion of the length of the wire loops. The method also includes step 904 for verifying whether the generated loop profiles for a plurality of wire loops meet predefined criteria, and step 906 for, when the predefined criteria are met, generating loop parameters for each wire loop using the loop profiles.SELECTED DRAWING: Figure 9

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of U.S. Provisional Patent Application No. 62 / 357,006, filed June 30, 2016, the contents of which are incorporated herein by reference.

[0002] The present invention relates to forming wire loops, and more particularly to an improved method for creating wire loop profiles for wire loops in semiconductor packages. [Background technology]

[0003] In semiconductor device processing and packaging, wire bonding remains the primary method for providing an electrical interconnection between two locations within a package (e.g., between a die pad of a semiconductor die and a lead of a lead frame). More specifically, a wire bonder (also known as a wire bonding machine) is used to form a wire loop between the locations where the electrical interconnection is to be provided. For example, wire loops can be formed using a ball bonding machine, a wedge bonding machine, a ribbon bonding machine, etc. An exemplary wire loop formed on a ball bonding machine includes (i) a ball bond bonded to a first location (e.g., a die pad of a semiconductor die), (ii) a stitch bond bonded to a second location (e.g., a lead of a lead frame), and (iii) a length of wire between the ball bond and the stitch bond. Patent documents relevant to the wire bonding industry include U.S. Pat. No. 8,302,840, U.S. Pat. No. 9,496,240, and U.S. Patent Application No. 2001 / 0072406, each of which is incorporated herein by reference in its entirety.

[0004] In packages with a large number of wire loops (e.g., wire bond applications with a large number of pins), the wire loops may overlap in space (e.g., cross each other in three-dimensional space). Optimizing the loop formation process on a bonder is a difficult process that often takes weeks or even months. Furthermore, once the loop formation process optimization is complete, there is no guarantee that all wire loops intended for implementation in a particular package will actually be implemented. The uncertainty of the feasibility of the wire loop formation process forces package designers to consider alternative packaging technologies (other than wire bonding).

[0005] It would therefore be desirable to provide an improved method for creating wire loop profiles for wire loops in semiconductor packages. Summary of the Invention [Means for solving the problem]

[0006] According to an exemplary embodiment of the present invention, there is provided a method for generating a wire loop profile associated with a semiconductor package, the method including: (a) providing package data related to the semiconductor package; and (b) generating a loop profile for a wire loop in the semiconductor package, the loop profile including a tolerance band along at least a portion of a length of the wire loop.

[0007] The methods of the present invention may also be embodied in an apparatus (e.g., as part of the intelligence of a wire bonding apparatus) or as instructions in a computer program on a computer-readable medium (e.g., a computer-readable medium used in connection with a wire bonding apparatus). [Brief explanation of the drawings]

[0008] The invention is best understood by reading the following detailed description in conjunction with the accompanying drawings. It should be noted that, according to common practice, the various features of these drawings are not drawn to scale. Rather, the dimensions of the various features have been appropriately increased or decreased for clarity. The figures included in the drawings are as follows: [Figure 1A] FIG. 1A is a side view of a wire loop useful in illustrating certain exemplary embodiments of the present invention. [Figure 1B] FIG. 1B is a top view of the wire loop of FIG. 1A. [Figure 1C] FIG. 1C is a perspective view of the wire loop of FIG. 1A. [Figure 2A] FIG. 2A is a side view of a wire loop including a tolerance band, according to an example embodiment of the present invention. [Figure 2B] FIG. 2B is a top view of the wire loop of FIG. 2A. [Figure 2C] FIG. 2C is a perspective view of the wire loop of FIG. 2A. [Figure 3A] FIG. 3A is a side view of the wire loop of FIG. 2A having an alternative tolerance banding area, according to an exemplary embodiment of the present invention. [Figure 3B] FIG. 3B is a top view of the wire loop of FIG. 3A. [Figure 3C] FIG. 3C is a perspective view of the wire loop of FIG. 3A. [Figure 4A] FIG. 4A is a side view of two wire loops useful in illustrating certain exemplary embodiments of the present invention. [Figure 4B] FIG. 4B is a top view of the wire loop of FIG. 4A. [Figure 4C] FIG. 4C is a perspective view of the wire loop of FIG. 4A. [Figure 5A] FIG. 5A is a side view of the two wire loops of FIG. 4A including tolerance bands, according to an exemplary embodiment of the present invention. [Figure 5B] FIG. 5B is a top view of the wire loop of FIG. 5A. [Figure 5C]FIG. 5C is a perspective view of the wire loop of FIG. 5A. [Figure 6A] FIG. 6A is a side view of three wire loops useful in explaining certain exemplary embodiments of the present invention, where there is an interference between two of the wire loops. [Figure 6B] FIG. 6B is a side view of the three wire loops of FIG. 6A, where the wire loop profile of one of the wire loops has been adjusted, according to an exemplary embodiment of the present invention. [Figure 7A] FIG. 7A is a side view of the three wire loops of FIG. 6A including tolerance bands, according to an exemplary embodiment of the present invention. [Figure 7B] FIG. 7B is a top view of the wire loop of FIG. 7A. [Figure 7C] FIG. 7C is a perspective view of the wire loop of FIG. 7A. [Figure 8A] FIG. 8A is a side view of the three wire loops of FIG. 7A, where the wire loop profile of one of the wire loops has been adjusted, according to an exemplary embodiment of the present invention. [Figure 8B] FIG. 8B is a top view of the wire loop of FIG. 8A. [Figure 8C] FIG. 8C is a perspective view of the wire loop of FIG. 8A. [Figure 9] FIG. 9 is a method for generating a wire loop profile associated with a semiconductor package according to one exemplary embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0009] As used herein, the term “loop profile” or “wire loop profile” refers to a specification of the shape of a wire loop between a first bonding location (e.g., the location of a ball bond on the wire loop) and a second bonding location (e.g., the location of a stitch bond on the wire loop). The loop profile is often specified by a bonding machine user and includes desired specifications for a given wire loop. For example, the loop profile specification typically includes (i) the number of bends and / or kinks to be included in the wire loop, and (ii) the spatial locations of the bends and / or kinks (e.g., x, y, and z coordinates relative to at least one of the first and second bonding locations). The loop profile may also include the maximum loop height of the resulting wire loop, since the bends and / or kinks of the wire loop often have the greatest loop height. The terms “loop shape” or “wire loop shape” are often used interchangeably with “loop profile” or “wire loop profile.” According to a particular aspect of the invention, the loop profile includes a tolerance band provided around (or adjacent to) at least a portion of the wire loop.

[0010] As used herein, the terms "tolerance swath" or "clearance zone" refer to a region (e.g., a three-dimensional region) surrounding (or adjacent to) a predetermined wire loop profile. According to an exemplary aspect of the present invention, adjacent tolerance swaths desirably do not overlap each other. If they do overlap, they do so within a predetermined specification. Of course, overlapping of adjacent tolerance swaths is an option within the scope of the present invention. Furthermore, tolerance swaths also apply to other obstructions, such as portions of a die (e.g., an edge of a die) or adjacent components (e.g., components mounted on a surface). That is, according to an exemplary aspect of the present invention, it is desirable for the tolerance swath not to overlap locations where such obstructions are present.

[0011] According to certain exemplary embodiments of the present invention, a method for optimizing wire loop profiles (e.g., wire loop shapes) is provided, the method including optimizing wire loops in three dimensions. The method may include generating a three-dimensional wire loop profile for each wire loop in a semiconductor package. Wire loops tend to tilt and sway when bonded on a wire bonder. In some aspects of the present invention, potential defects (e.g., wire tilt, wire sway) are considered based on the physical characteristics of the wire loop, and tolerance zones (also referred to as tolerance zones, gap zones, and collision zones) are established around each wire. Such tolerance zones may be formed to include frustums and ellipsoids. Furthermore, performing gap and interference checks between such tolerance zones can achieve a robust design and significantly reduce the time required to optimize the loop formation process.

[0012] To perform the gap and interference verification, an algorithm (e.g., an algorithm running on the wire bonder's computer, an algorithm running on a computer separate from the wire bonder, etc.) utilizes wire loop shape, bend location, total wire length, wire length, wire bond location, etc. After a wire loop profile that meets the criteria (including an acceptable swath that meets the criteria) is determined, additional steps (including other algorithms) determine the order in which the wire loops in the semiconductor package are formed (e.g., automatically using one or more algorithms running on the wire bonding machine's computer or a separate computer).

[0013] Referring now to the drawings, FIG. 1A shows a wire loop 100 extending between a semiconductor die 102 and a lead 104a of a lead frame. As can be seen in FIG. 1A, the wire loop 100 has a loop profile (e.g., loop shape) including, for example, various inflections, bends, and an overall length of the wire. FIG. 1B shows the wire loop 100 with a first end connected to a die pad 102a (of the semiconductor die 102) and a second end connected to a lead 104a. FIG. 1C shows a perspective view of the wire loop 100.

[0014] According to certain exemplary embodiments of the present invention, a tolerance swath is included in a loop profile. FIGS. 2A-2C show examples of such loop profiles. More specifically, the loop profile of wire loop 100 shown in FIG. 2A includes tolerance swath 100a. Tolerance swath 100a includes multiple sections, including sections 100a1, 100a2, 100a3, and 100a4. The various sections of tolerance swath 100a may have shapes such as spheres, ellipsoids, etc. In the example shown in FIGS. 2A-2C, the tolerance swath has a circular shape with a uniform diameter along its length. However, it should be understood that tolerance swaths included in loop profiles according to the present invention may vary widely. For example, the tolerance swath may have a non-circular shape (e.g., an elliptical or other shape) and may have a diameter (or other measurable quantity) that varies along the length of the wire loop.

[0015] 3A-3C illustrate tolerance swath 200a, which differs from tolerance swath 100a shown in FIGS. 2A-2C, in relation to wire loop 100. As shown in FIGS. 3A-3C, tolerance swath 200a includes sections 200a1, 200a2, 200a3, and 200a4. As further shown in FIGS. 3A-3C, each of sections 200a1, 200a2, 200a3, and 200a4 has a shape that varies along the length of the respective section. For example, with particular reference to section 200a1, the size of this tolerance swath increases as it extends upwardly away from the first bonding location on semiconductor die 102.

[0016] According to the present invention, loop profiles including tolerance bands are particularly useful in applications involving multiple wire loops in a semiconductor package (e.g., where one or more wire loops overlap or cross other wire loops). Figures 4A-4C show wire loops 400 and 410 extending between a semiconductor die 402 and lead frame leads 404a, 404b. More specifically, wire loop 400 extends between die pad 402a and lead 404a. Similarly, wire loop 410 extends between die pad 402b and lead 404b.

[0017] 5A-5C show loop profiles of wire loops 400 and 410, each including a tolerance swath. More specifically, wire loop 400 includes tolerance swath 400a (where tolerance swath 400a includes the sections described above in relation to other tolerance swaths), and wire loop 410 includes tolerance swath 410a (where tolerance swath 410a includes the sections described above). As shown in FIG. 5C, there is sufficient clearance between tolerance swaths 400a and 410a.

[0018] To determine whether there is sufficient clearance between the tolerance swaths of adjacent wire loops, an algorithm or the like is used to verify whether the adjacent tolerance swaths meet a predetermined criterion (e.g., the clearance between adjacent tolerance swaths is within an acceptable range). The algorithm may rely on existing data (in a data structure, database, or lookup table) used to determine the acceptable clearance size for a given application. If the verification indicates that the predetermined criterion is not met (e.g., if there is no acceptable clearance between at least a portion of the loop profile that includes the tolerance swaths), one or more loop profiles are adjusted. After the adjustment, another verification is performed to determine whether the predetermined criterion is met.

[0019] FIG. 6A illustrates wire loops 600, 610, and 620 extending between semiconductor die 602 and leads 604a, 604b, and 604c of a lead frame. More specifically, wire loop 600 extends between the die pad (not shown) of semiconductor die 602 and lead 604a. Similarly, wire loop 610 extends between the die pad (not shown) of semiconductor die 602 and lead 604b, and wire loop 620 extends between the die pad (not shown) of semiconductor die 602 and lead 604c. To illustrate one aspect of the present invention, assume that the "check" determines that adjacent wire loops 610 and 620 do not meet predetermined criteria. More specifically, assume that there is insufficient clearance between the tolerance zones of wire loops 610 and 620. In the example illustrated in FIG. 6B, the loop profile (e.g., loop shape) of wire loop 620 (referred to here as wire loop 620') has been modified to provide sufficient clearance. In particular, the location of the inflection point of wire loop 620 is changed to provide wire loop 620'. This process is described in more detail with respect to Figures 7A-7C and 8A-8C.

[0020] With particular reference to Figures 7A-7C, wire loops 600, 610, and 620 include tolerance swaths 600a, 610a, and 620a, respectively. As shown in Figure 7C, there is insufficient clearance between tolerance swaths 610a and 620a. With particular reference to Figures 8A-8C, the loop profile of wire loop 620 has been modified (now labeled 620', as described above in connection with Figure 6B) to provide sufficient clearance between tolerance swaths 610a and 620a'.

[0021] 9 is a flow diagram in accordance with certain illustrative embodiments of the present invention. Those skilled in the art will appreciate that certain steps included in the flow diagram may be omitted, certain additional steps may be added, and the order of steps may be changed from the order shown.

[0022] 9 illustrates a method for generating a wire loop profile associated with a semiconductor package. In step 900, package data for a semiconductor package (e.g., a two-dimensional wire layout of the semiconductor package) is provided. This package data is provided to a wire bonding apparatus using computerized data for the package (e.g., CAD data associated with the semiconductor package). In another embodiment, the package data is provided using an online (e.g., on-bonder) teaching reference system of the wire bonding apparatus. Of course, the specific package data will vary depending on the application, but the type of data provided as package data to the wire bonding apparatus (or to an offline system, e.g., an offline computer system) may include the height of the semiconductor die, die pad locations on the semiconductor die, lead locations on the lead frame, the relative distance between the first and second bonding locations, wire diameter, and wire type.

[0023] At step 902, a loop profile is generated for each wire loop of a semiconductor package. The loop profile (e.g., wire loop shape) includes a tolerance band along at least a portion of the length of the wire loop. At step 904, verification is performed to determine whether the loop profiles of the multiple wire loops generated at step 902 meet predetermined criteria (e.g., the predetermined criteria include an acceptable gap between the multiple loop profiles).

[0024] If the predetermined criteria are met (as determined during the verification run of step 904), loop parameters are generated for each wire loop in step 906 using the loop profile. If the predetermined criteria are not met (as determined during the verification run of step 904), at least one loop profile is adjusted in step 908 (see, e.g., the loop profile adjustments shown and described in connection with FIGS. 6B and 7A-7C). After step 908, verification is repeated with the adjusted loop profile in step 904. This process may be repeated until the predetermined criteria are met in step 906. Alternatively, the process may be stopped after a predetermined number of cycles (or times, or other criteria), in which case the semiconductor device is deemed unsuitable for wire bonding. In a further alternative, a user may (e.g., manually or automatically) override the predetermined criteria that are not met.

[0025] According to certain exemplary embodiments of the present invention, loop parameters (and therefore loop trajectories) are defined using an algorithm executed on a computer (e.g., a computer connected to or independent of the wire bonding apparatus). Exemplary loop parameters include: (a) a tool trajectory for forming the wire loop, including endpoint locations and trajectories between the endpoint locations for each segment of motion; (b) a bond energy parameter applied by a transducer of the wire bonding apparatus; (c) a bond force parameter applied by the wire bonding apparatus; (d) a timing parameter related to at least one of the bond energy and bond force; (e) a bonding tool velocity for at least a portion of a bonding cycle for forming the desired wire loop; and (f) a wire clamp position for at least a portion of a bonding cycle for forming the desired wire loop.

[0026] In connection with deriving the loop parameters, the algorithm can utilize loop model data stored in the wire bonding machine (or stored elsewhere) to more closely approximate the loop parameters for the desired wire loop. For example, through experimentation and testing, desired loop parameters for various types of wire loops using various types of wires can be derived and stored in the memory of the wire bonding machine (e.g., via a look-up table, etc.) or the loop parameters can be made accessible to the wire bonding machine (e.g., via a computer network, etc.).

[0027] The present invention significantly reduces the time required to optimize the loop formation process, provides a robust loop shape design while taking into account the shape of adjacent wire loops, and avoids uncertainty for package designers regarding the feasibility of the loop formation process in modern applications involving a large number of pins.

[0028] Although the invention is illustrated and described herein with reference to specific embodiments, the invention is not limited to the details shown. Rather, various changes in the details may be made within the scope of the claims and within the range of equivalents and without departing from the scope of the invention.

Claims

1. 1. A method for generating a wire loop profile associated with a semiconductor package, comprising: (a) providing package data relating to the semiconductor package; (b) generating a loop profile for a wire loop in the semiconductor package, the loop profile including a tolerance band provided around the wire loop along at least a portion of the length of the wire loop, the tolerance band having a shape that varies along the length of the wire loop; A method having the following.

2. 2. The method of claim 1, wherein step (b) includes generating a three-dimensional loop profile of the wire loop that includes the tolerance swath.

3. 2. The method of claim 1, wherein step (b) includes generating loop profiles for a plurality of wire loops in the semiconductor package.

4. The method of claim 3 further comprising: (c) verifying whether the loop profiles of the plurality of wire loops generated in step (b) meet predetermined criteria.

5. 5. The method of claim 4, wherein the predetermined criteria includes an acceptable gap between the plurality of wire loops.

6. 5. The method of claim 4, wherein at least one of the plurality of wire loops is adjusted if the loop profile does not meet a predetermined criterion.

7. 2. The method of claim 1, wherein step (b) is performed using a computer connected to a wire bonding machine.

8. 2. The method of claim 1, wherein step (b) is performed using a computer that is independent of the wire bonding machine.

9. 2. The method of claim 1, wherein the wire loop connects to at least two contacts on the semiconductor package.

10. 2. The method of claim 1, wherein the tolerance swath indicates acceptable positions of the wire loop at a plurality of positions along the length of the wire loop.

11. 10. The method of claim 1, wherein the loop profile is used to derive loop parameters in a wire bonding machine.

12. 12. The method of claim 11, wherein the derived loop profile includes at least one of: (i) a tool trajectory for forming the wire loop; (ii) a bond energy parameter applied by a transducer of the wire bonding apparatus; (iii) a bond force parameter applied by the wire bonding apparatus; (iv) a timing parameter related to at least one of the bond energy and bond force; (v) a bonding tool velocity for at least a portion of a bonding cycle for forming the wire loop; and (vi) a wire clamp position for at least a portion of a bonding cycle for forming the wire loop.

13. 2. The method of claim 1, wherein the tolerance swath has a circular shape at a plurality of locations along the length of the wire loop.

14. 14. The method of claim 13, wherein the circular shape of the tolerance swath has a uniform diameter.

15. 14. The method of claim 13, wherein the circular shape of the tolerance swath has a diameter that varies at different locations along the length of the wire loop.

16. 2. The method of claim 1, wherein the tolerance swath has a non-circular shape at a plurality of locations along the length of the wire loop.

17. 2. The method of claim 1, wherein the package data provided in step (a) includes (a1) CAD data relating to the semiconductor package and (a2) package data derived using an online teaching reference system.

18. 2. The method of claim 1, wherein the package data provided in step (a) includes at least one of a height of the semiconductor die, a die pad position of the semiconductor die, a lead position of a lead frame, a relative distance between a first bonding position and a second bonding position, a wire diameter, and a wire type.

19. 2. The method of claim 1, wherein the wire loop is formed using a ball bonding process on a ball bonding machine.

20. 2. The method of claim 1, wherein the wire loop is formed using a wedge bonding process on a wedge bonding machine.

21. 10. The method of claim 1, wherein the wire loop is formed using a ribbon bonding process on a ribbon bonding machine.

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