Jig for substrate dividing device, jig placement device for placing the jig

Abstract

To provide a jig for a substrate dividing device, which can reduce the number of steps and costs involved in dividing a substrate, and a jig arrangement device for arranging the jig.SOLUTION: A jig arrangement device 1 according to the present disclosure is for placing a jig used in a substrate dividing device 2, and includes jig pins 2 that supports a pre-division substrate W1, a stage 3 that places the jig pins 2, a platform robot hand 14 that places the jig pins 2 at predetermined positions on the stage 3, and a first control unit 7 that controls the first robot hand 14. The jig pins 2 include a magnet 25. The stage 3 includes a first magnetized surface 33 to which the magnet 25 can be magnetically attracted.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a jig for a substrate dividing device and a jig placement device for placing the jig. [Background technology]

[0002] Conventionally, there has been known a technique for jigs that fix pre-separated substrates when dividing the substrates using a substrate dividing apparatus. For example, in the example of a conventional jig shown in Fig. 8, a pair of jigs (upper jig 71 and lower jig 72) is manufactured according to the size of the pre-separated substrate W1 and the shape of the dividing line (slit S), and the pre-separated substrate W1 is held between the upper jig 71 and the lower jig 72. The upper jig 71 and the lower jig 72 have openings 73 that are aligned with the slit S. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2003-163437 Summary of the Invention [Problem to be solved by the invention]

[0004] However, each type of pre-separation substrate differs in size, layout of electronic circuits, layout of slits, etc. Therefore, it is necessary to manufacture a jig for each type of pre-separation substrate, which increases the number of steps and costs required for separating the substrates.

[0005] Therefore, an object of the present disclosure is to provide a jig for a substrate dividing device that can reduce the number of steps and costs involved in dividing a substrate, and a jig placement device for placing the jig. [Means for solving the problem]

[0006] In order to solve the above problems, the jig for a substrate dividing apparatus according to the present disclosure has the following features: (1) A jig used in a substrate dividing apparatus, the jig comprising: jig pins for supporting a pre-divided substrate; and a stage for arranging the jig pins, wherein the jig pins include magnets, and the stage includes a magnetizable surface to which the magnets can be magnetically attracted.

[0007] (2) In the case of (1), a resin film is provided on the surface of the stage to prevent the jig pins from shifting out of position.

[0008] (3) In the case of (1) or (2), the substrate before division includes a slit that forms the division line, and the jig pin includes an insertion portion that is inserted into the slit.

[0009] (4) In the case of any one of (1) to (3), the jig pin includes a step that receives the edge of the unseparated substrate.

[0010] In order to solve the above problems, the jig placement device of the present disclosure has the following features. (5) A jig placement device for placing jigs used in a substrate dividing device, comprising: jig pins for supporting the substrate before division; a stage for placing the jig pins; a robot hand for placing the jig pins at predetermined positions on the stage; and a control means for controlling the robot hand, wherein the jig pins include magnets, and the stage includes a magnetizable surface to which the magnets can be magnetized.

[0011] (6) In the case of (5), a stocker is provided for storing the jig pins in a spaced-apart state, the stocker includes storage holes for individually storing the jig pins, and the storage holes include a magnetizable surface to which the magnet can be magnetized. [Effects of the Invention]

[0012] According to the jigs and jig placement device for the substrate dividing device disclosed herein, different types of pre-divided substrates can be accommodated by changing the arrangement of the jig pins, so there is no need to manufacture a jig for each type of pre-divided substrate, which has the effect of reducing the labor and cost required for dividing substrates while being able to accommodate the division of small quantities of many different types of substrates. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is a schematic diagram of a jig placement device according to an embodiment of the present disclosure; [Figure 2] FIG. [Figure 3] FIG. 2A is a perspective view of a jig pin, and FIG. 2B is a side view thereof. [Figure 4] FIG. 10 is an explanatory diagram illustrating the operation of the first robot hand gripping the jig pin. [Figure 5] FIG. 10 is a plan view showing a state in which jig pins are arranged on a stage. [Figure 6] FIG. 10 is a perspective view showing a state in which a jig for the substrate dividing device is removed from the jig placement device. [Figure 7] FIG. 2 is a perspective view of the substrate dividing device. [Figure 8] FIG. 10 is a plan view showing a jig for a substrate dividing apparatus according to a conventional example. DETAILED DESCRIPTION OF THE INVENTION

[0014] An embodiment of a jig placement device and a substrate dividing device embodying the present disclosure will be described below with reference to the drawings. In the following description, the horizontal (front and back) directions of the jig placement device and the substrate dividing device are defined as the X direction, the horizontal (right and left side) directions are defined as the Y direction, and the vertical direction is defined as the Z direction.

[0015] As shown in FIG. 1, the jig placement device 1 is provided adjacent to the substrate dividing device 11.

[0016] As shown in Figure 2, the jig placement device 1 includes jig pins 2 that support the pre-division substrate W1, a stage 3 on which the jig pins are placed, a first set base 6 on which the stage 3 is installed, a first robot hand 4 that places the jig pins 2 at predetermined positions on the stage 3, a first control unit 7 that controls the first robot hand 4, and placement information (not shown) that indicates the placement positions of the jig pins 2.

[0017] As shown in FIG. 3 , the jig pin 2 is formed in a cylindrical shape. The jig pin 2 is composed of a tip portion 21 that supports the pre-separation substrate W1, a base portion 24 that is magnetically attached to the stage 3, and a chucked portion 22 that is gripped by the chuck portion 5 of the first robot hand 4. A magnet 25 is provided on the base portion 24 of the jig pin 2. A protrusion 23 that protrudes in the outer circumferential direction of the chucked portion 22 is provided on the side surface of the chucked portion 22. The material of the jig pin 2 can be selected, for example, from aluminum, brass, magnesium, etc. Selecting aluminum, brass, magnesium, etc. prevents the jig pin 2 from being magnetized by the magnet 25, allowing for smooth insertion and removal of the jig pin from the stocker 61 and placement and removal on and from the stage 3. In particular, selecting aluminum, etc., can reduce the weight of the jig pin 2 and the burden on the first robot hand 4.

[0018] The jig pins 2 include a first jig pin 2-1, a second jig pin 2-2, and a third jig pin 2-3. The jig pins 2 include a support portion 21a at at least a portion of their tip portions 21 that supports the pre-separation substrate W1 and / or the substrate W2. The tip portion 21 of the first jig pin 2-1 includes an insertion portion 21b that is inserted into the slit S. By inserting the insertion portion 21b into the slit S, it is possible to prevent the pre-separation substrate W1 from shifting in position. The tip portion 21 of the second jig pin 2-2 is formed flat. The tip portion 21 of the third jig pin 2-3 has a larger diameter than the chucked portion 22. The tip portion 21 of the third jig pin 2-3 is also formed with a step 21c that receives the edge E of the pre-separation substrate W1 and an inclined surface 21d that guides the edge E to the step 21c. A flat portion 24a for determining the direction of the step 21c is formed on the side surface of the base portion 24 of the third jig pin 2-3.

[0019] The first robot hand 4 includes a chuck portion 5 that grips the jig pin 2, a slide mechanism (not shown) that slides the entire first robot hand 4 in the Y direction, and a lifting mechanism that moves (lifts) the entire first robot hand 4 in the Z direction.

[0020] As shown in FIG. 4 , the chuck portion 5 is composed of a pair of gripping portions 51 that can be opened and closed. Each gripping portion 51 includes a semi-cylindrical groove 52 and a recess 53 that accommodates the protrusion 23 provided around the chucked portion 22. The groove 52 is formed to have approximately the same diameter as the chucked portion 22 of the jig pin 2. The material of the chuck portion 5 can be selected from, for example, aluminum, brass, magnesium, etc. By selecting aluminum, brass, magnesium, etc., magnetization of the chuck portion 5 by the magnet 25 can be prevented, allowing the jig pin 2 to be gripped and released smoothly. In particular, selecting brass, magnesium, etc. can increase the rigidity of the chuck portion 5 and improve durability.

[0021] 4(b), when the gripping portion 51 is closed, the groove portion 52 grips the outer peripheral surface of the chucked portion 22, and the protrusion portion 23 of the jig pin 2 is housed in the recess portion 53. At this time, the protrusion portion 23 functions as a retainer, preventing the gripped jig pin 2 from falling off.

[0022] The first set base 6 includes a stocker 61 for storing the jig pins 2, a first origin block 8 indicating the origin 6a of the first set base 6, and rollers 9 for moving the entire first set base 6 in the X direction.

[0023] A plurality of stockers 61 are attached to the surface of the first set base 6. Each stocker 61 has a plurality of accommodation holes 62 that individually accommodate the jig pins 2. The stockers 61 accommodate the first, second, and third jig pins 2-1, 2-2, and 2-3, respectively, according to type. The bottom of the stocker 61 contains a magnetizable member 63 that can be magnetized by a magnet 25, and the bottom surface of the accommodation hole 62 functions as a second magnetizable surface 64 that can magnetize the magnet 25. The material of the magnetizable member 63 can be selected from, for example, steel or SUS430. The size of the stocker 61 and the number of accommodation holes 62 can be changed as appropriate.

[0024] 5 and 6, the stage 3 is provided in a plate shape and is equipped with a handle 34 for lifting the entire stage 3. Corner portions 32 of the stage 3 are formed in a shape complementary to the first origin block 8. When the corner portions 32 of the stage 3 are fitted into the first origin block 8, the origin 3a of the stage 3 and the origin 6a of the first set base 6 can be aligned, reducing the error between the placement information and the actual placement.

[0025] The stage 3 is formed from a material that can be magnetized by the magnet 25 of the jig pin 2, and the surface of the stage 3 functions as a first magnetized surface 33 to which the magnet 25 can be magnetically attracted.

[0026] A resin film 31 that prevents the jig pin 2 from shifting in position is formed on the first magnetically attracted surface 33. The jig pin 2 is held to the stage 3 by magnetic force, and if no measures are taken, it may shift in position. By forming the resin film 31, a frictional force is generated that resists the jig pin 2 from shifting in position, preventing it from shifting. The stage 3 can be made of a material such as steel or SUS430. The resin film 31 can be made of a material such as silicon. An adhesive layer can be formed on the resin film 31 to hold the jig pin 2 more stably.

[0027] The first control unit 7 controls the slide mechanism and lift mechanism of the first robot hand 4 and the rollers 9 of the first set base 6 to adjust the position of the first robot hand 4. Specifically, the first control unit 7 controls the slide mechanism when moving the first robot hand 4 in the Y direction, controls the rollers 9 when moving the first robot hand 4 in the X direction, and controls the lift mechanism when moving the first robot hand 4 in the Z direction.

[0028] The first control unit 7 controls the open / closed state of the gripping unit 51 of the chuck unit 5 of the first robot hand 4. Specifically, the first control unit 7 controls the gripping unit 51 to an open state in the initial state, and controls the gripping unit 51 to a closed state when the first robot hand 4 grips the jig pin 2. The first control unit 7 controls the gripping unit 51 to an open state when the jig pin 2 is released from the gripping unit 51.

[0029] As shown in FIG. 5, the first control unit 7 places the jig pins 2 on the stage 3 based on the placement information. The placement information is information indicating the position of each jig pin 2, and is generated by the user based on an image of the pre-separation substrate W1, etc. The placement information may include, for example, position information on an XY coordinate system and map information. The first jig pin 2-1 is placed along the slit S. The second jig pin 2-2 is placed at a position where there is no slit S, while avoiding the electronic circuit (not shown). The third jig pin 2-3 is placed along the edge E of the pre-separation substrate W1.

[0030] As shown in Figure 7, the substrate dividing device 11 includes a jig pin 2 that supports the pre-divided substrate W1, a stage 3 on which the jig pin is arranged, a second set base 16 on which the stage 3 is mounted, a tool 15 that divides the pre-divided substrate W1, a second control unit 17 that controls the tool 15, a second origin block 18 that indicates the origin 16a of the second set base 16, and a corner block 19 that holds the corners of the pre-divided substrate W1.

[0031] The flow of the substrate dividing process using the jig arrangement device 1 and substrate dividing device 11 configured as above will be described with reference to FIGS.

[0032] 2, the stage 3 is mounted on the first set base 6 of the jig placement device 1. At this time, the corner portion 32 of the stage 3 is fitted into the origin block 8 of the first set base 6, and the XY positions of the origin 3a of the stage 3 and the origin 6a of the first set base 6 are aligned.

[0033] Next, the first control unit 7 controls the first robot hand 4 to place the jig pin 2 on the stage 3 based on the placement map. Below, a detailed description will be given taking as an example a case where the first jig pin 2-1 is placed on the stage 3.

[0034] The first control unit 7 controls the gripper 51 to an open state. The first control unit moves the first robot hand 4 in the ±X directions and / or ±Y directions to position the first robot hand 4 above the stocker 61. The first control unit 7 opens the gripper 51 and moves the first robot hand 4 in the -Z direction to align the positions of the chuck unit 5 and the chucked portion 22 of the first jig pin 2-1. The first control unit 7 controls the gripper 51 to a closed state, and grips the first jig pin 2-1 with the gripper 51. Thereafter, the first control unit 7 moves the first robot hand 4 in the +Z direction.

[0035] The first control unit 7 moves the first robot hand 4 in the ±X direction and / or ±Y direction to place the first robot hand 4 above the placement position included in the placement information. The first control unit 7 moves the first robot hand 4 in the -Z direction to place the first jig pin 2-1 on the stage 3. Thereafter, the first control unit controls the gripper 51 to be in an open state. The same applies to the second jig pin 2-2 and the third jig pin 2-3.

[0036] Next, as shown in Fig. 6, the stage 3 is removed from the first set base 6 of the jig placement device 1, and as shown in Fig. 7, the stage 3 is attached to the second set base 16 of the substrate dividing device 11. At this time, the corner portion 32 of the stage 3 is fitted into the origin block 18 of the second set base 16, and the origin 3a of the stage 3 and the origin 16a of the second set base 16 are aligned.

[0037] Finally, the second control unit 17 of the substrate dividing apparatus 11 controls the second robot hand 14 to divide the pre-divided substrate W1 along the slit S. The substrate W2 is held by the support portion 21a of the jig pin 2 and is supported without falling.

[0038] Therefore, the jig placement device 1 of this embodiment can accommodate various types of pre-separation substrates W1 by rearranging the jig pins 2 on the stage 3. This reduces the effort and cost required to manufacture jigs for each type of pre-separation substrate W1.

[0039] The present disclosure is not limited to the above-described embodiments, and can be implemented by appropriately modifying the shape and configuration of each part, as exemplified below, without departing from the spirit of the present disclosure. (1) The jig placement device 1 and the substrate dividing device 11 are provided integrally, thereby reducing the time and effort required to move the stage 3. (2) Automate placement information through programming or machine learning. (3) An electromagnet (not shown) capable of magnetically attaching the stage 3 is provided on the back side of the first set base 6, and an electromagnet (not shown) capable of magnetically attaching the stage 3 is provided on the back side of the second set base 16. By providing the electromagnets on the back sides of the first and second set bases 6 and 16, warping or lifting of the magnetized stage 3 can be prevented, smoothness can be maintained, and the height accuracy of the support portion 21a of the jig pin 2 can be improved. [Explanation of symbols]

[0040] 1 Jig placement device 2 Jig pins 3 Stage (a: Origin) 4. First robot hand 5 Chuck 6 First set base (a: origin) 7 First Control Section 8 First origin block 9. Laura 11. Substrate dividing device 14 Second Robot Hand 15 Tools 16 Second set base (a: origin) 17 Second Control Section 18 Second origin block 19 Corner Block 21 tip portion (a: support portion, b: insertion portion, c: step, c: inclined surface) 22 Chucked part 23 Convex part 24 Base 25 Magnet 31 Resin film 32 Corner section 33 First magnetized surface 34 Handle 51 Gripping part 52 Groove 53 Recess 61 Stocker 62 Storage Cave 63 Magnetized member 64 2nd magnetized surface 71 Conventional jig (upper side) 72 Conventional jig (bottom) 73 Opening E-edge S slit W1 Pre-separation board W2 board

Claims

1. A jig used in a substrate dividing device, jig pins for supporting the pre-separation substrate; and a stage for arranging the jig pins; the fixture pin includes a magnet; the stage includes a surface to which the magnet can be magnetically attracted, A jig for a substrate dividing apparatus, characterized in that a resin film is provided on the surface of the stage to prevent the jig pins from shifting in position.

2. the pre-separation substrate includes slits that form separation lines, The jig for use in a substrate dividing apparatus according to claim 1 , wherein the jig pin includes an insertion portion that is inserted into the slit.

3. The jig for use in a substrate dividing apparatus according to claim 1 , wherein the jig pins include steps that receive edges of the undivided substrate.

4. A jig placement device for placing jigs used in a substrate dividing device, the device comprises jig pins for supporting the substrate before division, a stage for arranging the jig pins, a robot hand for arranging the jig pins at predetermined positions on the stage, a control means for controlling the robot hand, and a stocker for storing the jig pins in a state where the jig pins are spaced apart from each other, the fixture pin includes a magnet; the stage includes a surface to which the magnet can be magnetically attracted, the stocker includes accommodation holes for individually accommodating the jig pins, The jig placement device is characterized in that the accommodation hole includes a magnetizable surface to which the magnet can be magnetically attracted.

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