Physical Quantity Sensors and Inertial Measurement Units

Abstract

To provide a physical quantity sensor and the like which can avoid a failure caused by an excessive impact.SOLUTION: A physical quantity sensor 1 detects a physical quantity in at least one of a first direction DR1 and a second direction DR2. The physical quantity sensor comprises a fixed electrode portion 20 provided on a substrate 2, a movable body 60 having a movable electrode portion 20 provided such that a movable electrode 26 faces a fixed electrode 16 of the fixed electrode portion 10, a fixed portion 40 fixed to the substrate 2, a support beam 42 having one end coupled to the fixed portion 40 and the other end coupled to the movable body 60, and a restricting portion 50 that restricts displacement of the movable body 60. The restricting portion 50 includes a first portion 51 having one end coupled to the movable body 60 and extending in the first direction DR1, and a second portion 52 having one end coupled to the other end of the first portion 51 and extending in the second direction DR2.SELECTED DRAWING: Figure 11

Description

[Technical Field]

[0001] The present invention relates to a physical quantity sensor, an inertial measurement unit, and the like. [Background technology]

[0002] Patent Document 1 discloses a physical quantity sensor that detects a physical quantity such as acceleration. The physical quantity sensor detects acceleration in the X-axis and Y-axis directions, and has stoppers on each of the X-axis and Y-axis that limit displacement within the XY plane. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2011-247714 Summary of the Invention [Problem to be solved by the invention]

[0004] The physical quantity sensor disclosed in Patent Document 1 has a problem in that if an excessive impact is applied to the physical quantity sensor, the physical quantity sensor may malfunction. [Means for solving the problem]

[0005] One aspect of the present disclosure relates to a physical quantity sensor that detects a physical quantity in at least one of two directions parallel to a substrate and perpendicular to each other, where the first direction and the second direction are defined as a first direction and a second direction, and includes: a fixed electrode portion provided on a substrate; a movable body having a movable electrode portion provided so that a movable electrode faces the fixed electrode of the fixed electrode portion; a fixed portion fixed to the substrate; a support beam having one end connected to the fixed portion and the other end connected to the movable body; and a regulating portion that regulates displacement of the movable body, wherein the regulating portion includes a first portion having one end connected to the movable body and extending in the first direction, and a second portion having one end connected to the other end of the first portion and extending in the second direction.

[0006] Another aspect of the present disclosure relates to an inertial measurement unit including the physical quantity sensor described above and a control unit that performs control based on a detection signal output from the physical quantity sensor. [Brief explanation of the drawings]

[0007] [Figure 1] 1 shows an example of the configuration of a physical quantity sensor according to the present embodiment. [Figure 2] FIG. 1 is a schematic cross-sectional view of a physical quantity sensor according to an embodiment of the present invention. [Figure 3] FIG. 1 is a schematic cross-sectional view of a physical quantity sensor according to an embodiment of the present invention. [Figure 4] FIG. 1 is a schematic cross-sectional view of a physical quantity sensor according to an embodiment of the present invention. [Figure 5] FIG. [Figure 6] FIG. [Figure 7] FIG. [Figure 8] FIG. [Figure 9] FIG. [Figure 10] FIG. [Figure 11] FIG. 4 is a plan view of a restriction portion of the physical quantity sensor of the embodiment. [Figure 12] 10 shows a modified example of the physical quantity sensor of the present embodiment. [Figure 13] FIG. 10 is a plan view of a restriction portion of a modified example of the physical quantity sensor of the present embodiment. [Figure 14] 1 shows a first detailed example of the physical quantity sensor of the present embodiment. [Figure 15] Example of stress distribution in the restriction section. [Figure 16] Example of stress distribution in the restriction section. [Figure 17] 10 is a modified example of the first detailed example of the physical quantity sensor of the present embodiment. [Figure 18] 10 shows a second detailed example of the physical quantity sensor of the present embodiment. [Figure 19] 10 shows a third detailed example of the physical quantity sensor of the present embodiment. [Figure 20]10 shows a fourth detailed example of the physical quantity sensor of the present embodiment. [Figure 21] FIG. 1 is an exploded perspective view showing a schematic configuration of an inertial measurement unit having a physical quantity sensor. [Figure 22] FIG. 1 is a perspective view of a circuit board of a physical quantity sensor. DETAILED DESCRIPTION OF THE INVENTION

[0008] The present embodiment will be described below. Note that the present embodiment described below does not unduly limit the content of the claims. Furthermore, not all of the configurations described in the present embodiment are necessarily essential components.

[0009] 1. Physical quantity sensors An example of the configuration of the physical quantity sensor 1 of this embodiment will be described with reference to Fig. 1, taking an acceleration sensor that detects acceleration in the horizontal direction as an example. Fig. 1 is a plan view of the physical quantity sensor 1 of this embodiment as seen in a direction perpendicular to the substrate 2. The physical quantity sensor 1 is a MEMS (Micro Electro Mechanical Systems) device, such as an inertial sensor.

[0010] Note that in FIG. 1 and FIGS. 2 to 20 described below, the dimensions of each component, the spacing between components, and the like are shown schematically for ease of explanation, and not all components are shown. For example, electrode wiring, electrode terminals, and the like are not shown. In the following description, the physical quantity detected by the physical quantity sensor 1 will be mainly described as an example in which acceleration is the physical quantity. However, the physical quantity is not limited to acceleration and may be other physical quantities such as velocity, pressure, displacement, angular velocity, or gravity. The physical quantity sensor 1 may also be used as a pressure sensor or a MEMS switch. In FIG. 1, directions perpendicular to each other are designated as a first direction DR1, a second direction DR2, and a third direction DR3. The first direction DR1, the second direction DR2, and the third direction DR3 are, for example, the X-axis direction, the Y-axis direction, and the Z-axis direction, respectively, but are not limited thereto. For example, the third direction DR3 corresponding to the Z-axis direction is a direction perpendicular to the substrate 2 of the physical quantity sensor 1, such as the vertical direction. For example, the first direction DR1 corresponding to the X-axis direction and the second direction DR2 corresponding to the Y-axis direction are perpendicular to the third direction DR3, and the XY plane, which is a plane along the first direction DR1 and the second direction DR2, is, for example, along a horizontal plane. The fourth direction DR4 is the opposite direction to the third direction DR3, for example, the direction opposite the Z-axis direction. Note that "perpendicular" includes cases where the two directions intersect at an angle slightly inclined from 90 degrees, as well as cases where the two directions intersect at a 90-degree angle. The XY plane viewed from the Z-axis direction is considered to be a planar view.

[0011] As shown in FIG. 1 , the physical quantity sensor 1 of this embodiment includes a substrate 2, a movable body 60, fixed portions 40A, 40B, 40C, and 40D, fixed electrode portions 10A, 10B, 10C, and 10D, support beams 42A, 42B, 42C, and 42D, and restricting portions 50A, 50B, 50C, and 50D. The movable body 60 also includes a mass portion 62 and movable electrode portions 20A, 20B, 20C, and 20D. The physical quantity sensor 1 detects a physical quantity, such as acceleration, in at least one of a first direction DR1 and a second direction DR2 using detection portions ZA, ZB, ZC, and ZD. The detection portion ZA includes a first detection element ZA1 and a second detection element ZA2. Similarly, the detection unit ZB includes a first detection element ZB1 and a second detection element ZB2, the detection unit ZC includes a first detection element ZC1 and a second detection element ZC2, and the detection unit ZD includes a first detection element ZD1 and a second detection element ZD2.

[0012] The substrate 2 is, for example, a silicon substrate made of semiconductor silicon or a glass substrate made of glass material such as borosilicate glass, etc. However, the constituent material of the substrate 2 is not particularly limited, and a quartz substrate, an SOI (Silicon On Insulator) substrate, etc. may also be used.

[0013] Fixed electrode units 10A, 10B, 10C, and 10D are provided as probes in the detection units ZA, ZB, ZC, and ZD, respectively. As shown in FIG. 5 and other figures, fixed electrode units 10A, 10B, 10C, and 10D each include a plurality of fixed electrodes 11, a plurality of fixed electrodes 12, a plurality of fixed electrodes 13, and a plurality of fixed electrodes 14. These electrodes form a fixed electrode group. FIG. 2 is a diagram schematically illustrating the arrangement of fixed electrode units 10A and 10C, fixed electrode support units 3A and 3C, movable body 60, and substrate 2 in the second direction DR2. Fixed electrode units 10A and 10C are fixed to substrate 2 by fixed electrode support unit 3A and fixed electrode support unit 3C, respectively. As shown in FIG. 4, movable body 60 is connected to substrate 2 via support beams 42A, 42B, 42C, and 42D. 3 is a diagram schematically showing the positional relationship in first direction DR1 among fixed electrode portions 10B and 10D, fixed electrode support portions 3B and 3D, movable body 60, and substrate 2. Fixed electrode portions 10B and 10D are fixed to substrate 2 by fixed electrode support portion 3B and fixed electrode support portion 3D, respectively. In the following description, fixed electrodes 11, 12, 13, and 14 will be collectively referred to as fixed electrode 16 where appropriate.

[0014] The fixed portions 40A, 40B, 40C, and 40D connect the movable body 60 to the substrate 2 via the support beams 42A, 42B, 42C, and 42D. The fixed portions 40A, 40B, 40C, and 40D are provided on the substrate 2, respectively.

[0015] 4 is a diagram schematically showing the arrangement and connection relationship of the movable body 60, support beams 42A, 42B, 42C, and 42D, and fixed portions 40A, 40B, 40C, and 40D in the second direction DR2. As shown in Fig. 4, the movable body 60 of the physical quantity sensor 1 is connected to the fixed portions 40A, 40B, 40C, and 40D via the support beams 42A, 42B, 42C, and 42D, respectively, and is capable of moving within a certain range on the XY plane relative to the substrate 2.

[0016] The mass portion 62 functions as a mass when the movable body 60 moves in the X and Y directions, which will be described later with reference to Figures 9 and 10. As shown in Figure 1, the mass portion 62 has a rectangular shape in a plan view from the third direction DR3, and is the main part of the mass of the movable body 60. Then, with the mass portion 62 as the base of the movable body 60, movable electrode portions 20A, 20B, 20C, and 20D are provided on the X direction side, Y direction side, -X direction side, and -Y direction side, respectively.

[0017] The movable electrode portions 20A, 20B, 20C, and 20D are provided as probes for the detection portions ZA, ZB, ZC, and ZD, respectively. FIGS. 5, 6, 7, and 8 are diagrams schematically illustrating the configuration of the detection portions ZA, ZB, ZC, and ZD when viewed in a plan view in the third direction DR3. As shown in FIG. 5, the movable electrode portion 20A has a plurality of movable electrodes 21, which constitute a movable electrode group. As shown in FIGS. 6, 7, and 8, the movable electrode portions 20B, 20C, and 20D also have a plurality of movable electrodes 22, a plurality of movable electrodes 23, and a plurality of movable electrodes 24, respectively. The plurality of movable electrodes 22, the plurality of movable electrodes 23, and the plurality of movable electrodes 24 constitute a movable electrode group. In the detection portion ZA, the movable electrodes 21 extend from the mass portion 62, which corresponds to the base, in the first direction DR1 and are alternately opposed in the second direction DR2 to the fixed electrodes 11, which extend from the fixed electrode portion 10A in the −X direction. The first detection element ZA1 and the second detection element ZA2 of the detection unit ZA differ in the arrangement of the fixed electrodes 11 and the movable electrodes 21. As shown in FIG. 5, in the first detection element ZA1, the movable electrode 21 is arranged so as to be close to the fixed electrode 11 on the -Y direction side, and in the second detection element ZA2, the movable electrode 21 is arranged so as to be close to the fixed electrode 11 on the +Y direction side. As shown in FIGS. 6, 7, and 8, in the detection unit ZB, the fixed electrodes 12 and the movable electrodes 22, in the detection unit ZC, the fixed electrodes 13 and the movable electrodes 23, and in the detection unit ZD, the fixed electrodes 14 and the movable electrodes 24 are arranged so as to face each other alternately. As shown in FIG. 6, the first detection element ZB1 and the second detection element ZB2 of the detection unit ZB differ in the arrangement of the fixed electrodes 12 and the movable electrodes 22, similar to the case of the detection unit ZA. Specifically, in the first detection element ZB1, the movable electrode 22 is arranged so as to be close to the fixed electrode 12 on the -X direction side, and in the second detection element ZB2, the movable electrode 22 is arranged so as to be close to the fixed electrode 12 on the +X direction side. As shown in Fig. 7, the first detection element ZC1 and the second detection element ZC2 of the detection unit ZC also have different arrangements of the fixed electrode 13 and the movable electrode 23, and as shown in Fig. 8, the first detection element ZD1 and the second detection element ZD2 of the detection unit ZD also have different arrangements of the fixed electrode 14 and the movable electrode 24.In the following description, the movable electrodes 21, 22, 23, and 24 will be collectively referred to as the movable electrode 26, where appropriate.

[0018] Next, the basic operation of the physical quantity sensor 1 of this embodiment will be described. The movable body 60 is connected to the fixed parts 40A, 40B, 40C, and 40D via support beams 42A, 42B, 42C, and 42D at each corner of the movable body 60, respectively. The movable body 60 remains stationary at an equilibrium position when no external force is applied, but can move freely within the XY plane when an external force is applied.

[0019] 9 and 10 are diagrams illustrating the operation of the physical quantity sensor 1 of this embodiment in a plan view in the third direction DR3, respectively, in a stationary state and in a state where it is subjected to acceleration. FIG. 9 is a diagram illustrating the operation of the detection unit ZA. First, in an initial state, the movable body 60 is connected to the support beams 42A, 42B, 42C, and 42D and is stationary at an equilibrium position. In the detection unit ZA, the fixed electrode 11 and the movable electrode 21 are arranged side by side along the second direction DR2 at a predetermined distance from each other. Here, in the first detection element ZA1, as described above, the fixed electrode 11 and the movable electrode 21 are arranged side by side along the second direction DR2 in a plan view in the third direction DR3, so that the movable electrode 21 is close to the fixed electrode 11 on the -Y direction side. In the second detection element ZA2, the fixed electrode 11 and the movable electrode 21 are arranged side by side along the second direction DR2 in a plan view in the third direction DR3, so that the movable electrode 21 is close to the fixed electrode 11 on the +Y direction side. When acceleration occurs in the direction opposite to the second direction DR2, the movable electrode 21 is displaced in the second direction DR2. As a result, the opposing distance between the closely-located fixed electrode 11 and the movable electrode 21 in the first detection element ZA1 of the detection unit ZA becomes even smaller, while the opposing distance between the closely-located fixed electrode 11 and the movable electrode 21 in the second detection element ZA2 becomes larger and larger. On the other hand, when acceleration occurs in the second direction DR2, the movable electrode 21 is displaced in the direction opposite to the second direction DR2. As a result, the opposing distance between the closely-located fixed electrode 11 and the movable electrode 21 in the first detection element ZA1 becomes larger and larger, while the opposing distance between the closely-located fixed electrode 11 and the movable electrode 21 in the second detection element ZA2 becomes even smaller. Similarly, in the detection unit ZC, when acceleration occurs in the second direction DR2, for example, if the opposing distance between the fixed electrode 13 and the movable electrode 23 in the first detection element ZC1 increases, the opposing distance between the fixed electrode 13 and the movable electrode 23 in the second detection element ZC2 decreases.

[0020] FIG. 10 is a diagram illustrating the operation of the detection unit ZB. As in FIG. 9, in the initial state, the movable body 60 is stationary at the equilibrium position. In the detection unit ZB, the fixed electrode 12 and the movable electrode 22 are arranged side by side along the first direction DR1, with a predetermined distance between them. In the first detection element ZB1, as described above, the fixed electrode 12 and the movable electrode 22 are arranged side by side along the first direction DR1 in a plan view of the third direction DR3, so that the movable electrode 22 is close to the fixed electrode 12 on the -X direction side. In the second detection element ZB2, the fixed electrode 12 and the movable electrode 22 are arranged side by side along the second direction DR2 in a plan view of the third direction DR3, so that the movable electrode 22 is close to the fixed electrode 12 on the +X direction side. When acceleration occurs in the first direction DR1, the movable electrode 22 is displaced in the direction opposite to the first direction DR1. As a result, in the first detection element ZB1 of the detection unit ZB, the opposing distance between the closely-located fixed electrodes 12 and the movable electrodes 22 increases as the distance increases, while in the second detection element ZB2, the opposing distance between the closely-located fixed electrodes 12 and the movable electrodes 22 decreases even further. On the other hand, when acceleration occurs in the direction opposite to the first direction DR1, the movable electrode 22 is displaced toward the first direction DR1. Therefore, in the first detection element ZB1, the opposing distance between the closely-located fixed electrodes 12 and the movable electrodes 22 decreases even further as the distance decreases, while in the second detection element ZB2, the opposing distance between the closely-located fixed electrodes 12 and the movable electrodes 22 decreases as the distance increases. Similarly, in the detection unit ZD, when acceleration occurs in the first direction DR1, for example, if the opposing distance between the fixed electrodes 14 and the movable electrodes 24 in the first detection element ZD1 increases, the opposing distance between the fixed electrodes 14 and the movable electrodes 24 in the second detection element ZD2 decreases. Therefore, for example, when acceleration occurs in the first direction DR1, the acceleration in the first direction DR1 can be detected by detecting the difference ΔC1-ΔC2 between the decrease ΔC1 in capacitance C at the first detection elements ZB1 and ZD1 and the increase ΔC2 in capacitance C at the second detection elements ZB2 and ZD2. Furthermore, detection of the change in capacitance at each detection unit can be achieved by, for example, connecting the fixed electrode units 10A, 10B, 10C, and 10D and the movable electrode units 20A, 20B, 20C, and 20D to a differential amplifier circuit QV (not shown).

[0021] Next, the detailed configuration near each corner of the physical quantity sensor 1 will be described with reference to FIG. 11 and other figures. In the following description, in a plan view in the third direction DR3, the corner close to the fixed portion 40A of the movable body 60 will be referred to as the first corner. Similarly, the corner close to the fixed portion 40B will be referred to as the second corner, the corner close to the fixed portion 40C will be referred to as the third corner, and the corner close to the fixed portion 40D will be referred to as the fourth corner. The description will be given using the arrangement configuration near the first corner of the physical quantity sensor 1 as an example, but the same can be said for the second corner, third corner, and fourth corner. Furthermore, hereinafter, the fixed electrode portions 10A-10D, movable electrode portions 20A-20D, fixed portions 40A-40D, detection portions ZA-ZD, support beams 42A-42D, and restriction portions 50A-50D at the first, second, third, and fourth corner portions will be collectively referred to as fixed electrode portion 10, movable electrode portion 20, fixed portion 40, detection portion Z, support beam 42, and restriction portion 50, respectively. Furthermore, the first portion, second portion, third portion, and the like at the first, second, third, and fourth corner portions will be collectively referred to as first portion 51, second portion 52, third portion 53, and the like, respectively.

[0022] 11 is a plan view of the vicinity of a first corner portion of the physical quantity sensor 1. The support beams 42 of the physical quantity sensor 1 connect the movable body 60 to the substrate 2 via the fixed portion 40. The support beams 42 are provided near each corner portion of the substrate 2 in a plan view in the third direction DR3. The support beams 42 have, for example, a thin wire shape in a plan view in the third direction DR3, and one end of the support beams 42 is connected to the mass portion 62 of the movable body 60 and the other end is connected to the fixed portion 40. Then, for example, due to the shape of the thin wire folded in an accordion-like manner as shown in FIG. 11, the support beams 42 can be distorted and deformed within the XY plane.

[0023] The restricting portion 50 restricts the movement of the movable body 60 within a certain range. As shown in FIG. 11 , the restricting portion 50 is provided near each corner of the mass portion 62 of the movable body 60. The restricting portion 50 includes a first portion 51, a second portion 52, and a third portion 53. One end of the first portion 51 is connected to the movable body 60 near a corner of the mass portion 62 in a planar view and extends from the corner of the mass portion 62 along a first direction DR1. One end of the second portion 52 is connected to the other end of the first portion 51 that is not connected to the mass portion 62 and extends along a second direction DR2. As shown in FIG. 11 , the third portion 53 has, for example, a recessed hexagonal shape in a planar view. One of the convex corners is connected to the other end of the second portion 52, and two sides constituting the recessed corner are arranged to face the fixed portion 40.

[0024] As described above, when two directions parallel to the substrate 2 and perpendicular to each other are defined as the first direction DR1 and the second direction DR2, the physical quantity sensor 1 of this embodiment detects a physical quantity in at least one of the first direction DR1 and the second direction DR2. The physical quantity sensor 1 includes the fixed electrode portion 10 provided on the substrate 2, the movable body 60 having the movable electrode portion 20 provided such that the movable electrode 26 faces the fixed electrode 16 of the fixed electrode portion 10, the fixed portion 40 fixed to the substrate 2, the support beam 42 having one end connected to the fixed portion 40 and the other end connected to the movable body 60, and the restricting portion 50 that restricts displacement of the movable body 60. The restricting portion 50 includes a first portion 51 having one end connected to the movable body 60 and extending in the first direction DR1, and a second portion 52 having one end connected to the other end of the first portion 51 and extending in the second direction DR2.

[0025] According to this embodiment, the physical quantity sensor 1 includes a fixed electrode unit 10, a movable body 60 having a movable electrode unit 20 in which movable electrodes 21, 22 face fixed electrodes 11, 12 of the fixed electrode unit 10, and a support beam 42 having one end connected to a fixed unit 40 fixed to a substrate 2 and the other end connected to the movable body 60, thereby enabling detection of a physical quantity such as acceleration in at least one of a first direction DR1 and a second direction DR2. In this embodiment, a restricting unit 50 is provided to restrict displacement of the movable body 60. The restricting unit 50 is a member that, for example, displaces in accordance with the displacement of the movable body 60 and restricts the displacement of the movable body 60 by contacting another part of the restricting unit 50. The restricting unit 50 includes a first portion 51 having one end connected to the movable body 60 and extending in the first direction DR1, and a second portion 52 having one end connected to the other end of the first portion 51 and extending in the second direction DR2. In this way, even if the movable body 60 is displaced significantly in an in-plane direction including the first direction DR1 and the second direction DR2 due to an external impact or vibration, and the restricting part 50 receives an impact by hitting another part of the physical quantity sensor 1, such as a stopper, the impact can be absorbed by the elastic function of the first part 51 and the second part 52 of the restricting part 50. Therefore, it becomes possible to absorb the impact regardless of the direction of the impact in the in-plane direction, and it is possible to provide a physical quantity sensor 1 that is highly resistant to impacts.

[0026] Furthermore, if stoppers are provided on each of the X-axis and Y-axis and an elastic mechanism is provided for them, additional space is required. However, in this embodiment, the elastic mechanism is L-shaped and has elastic functions in both the X-axis direction and the Y-axis direction, which is effective in miniaturizing the physical quantity sensor 1.

[0027] As described above, in this embodiment, the restricting portion 50 may include the third portion 53 in addition to the first portion 51 and the second portion 52. That is, in this embodiment, the restricting portion 50 includes the third portion 53 that faces the fixing portion 40.

[0028] A physical quantity sensor that detects acceleration in the XY plane is disclosed in Patent Document 1. This physical quantity sensor also has stoppers on the X and Y axes that limit the range of movement of the movable body within a certain range. This allows the movable body's range of movement to be limited to a certain range even if the physical quantity sensor is subjected to an excessive impact. However, because the stoppers in this physical quantity sensor do not have elasticity, excessive impact can cause stress to concentrate in a specific location, potentially resulting in breakage. Such excessive impact can also cause the movable electrode to come into contact with the fixed electrode with too much force, potentially resulting in sticking. Thus, in a physical quantity sensor that detects acceleration in the XY plane, it is necessary to limit the movable body's range of movement to a certain range while avoiding problems such as breakage and sticking that are caused by excessive impact.

[0029] In this regard, in the present embodiment, the restricting portion 50 includes the third portion 53 facing the fixed portion 40. Therefore, when an excessive impact is applied to the physical quantity sensor 1 in the first direction DR1, the movable body 60 is displaced in the direction opposite to the first direction DR1, and the first surface S1 of the third portion 53 hits the facing surface of the fixed portion 40, thereby suppressing the excessive displacement. In this case, the restricting portion 50, which is L-shaped in a plan view in the third direction DR3, bends, thereby absorbing the excessive impact applied to the physical quantity sensor 1. Similarly, when an excessive impact is applied to the physical quantity sensor 1 in the direction opposite to the second direction DR2, the movable body 60 is displaced in the second direction DR2, and the second surface S2 of the third portion 53 hits the facing surface of the fixed portion 40, thereby suppressing the excessive displacement. In this case, the L-shaped restricting portion 50 bends, thereby absorbing the excessive impact applied to the physical quantity sensor 1.

[0030] 11 , the fixed portion 40 of the physical quantity sensor 1 of this embodiment may have a first convex portion 71 on the first direction DR1 side and a second convex portion 72 on the side opposite to the second direction DR2. The first convex portion 71 is provided so as to extend toward the first surface S1 of the third portion 53 of the restricting portion 50. The second convex portion 72 is provided so as to extend toward the second surface S2 of the third portion 53. The distance between the second convex portion 72 and the second surface S2 is smaller than the opposing distance between the fixed electrode 11 and the movable electrode 21.

[0031] That is, in the physical quantity sensor 1 of this embodiment, the fixed portion 40 includes a first convex portion 71 facing the first surface S1 of the third portion 53 in the first direction DR1, and a second convex portion 72 facing the second surface S2 of the third portion 53 in the second direction DR2.

[0032] In this way, when a large acceleration such as an impact is applied, the second convex portion 72 comes into contact with the second surface S2, suppressing further displacement. This avoids direct contact between the fixed electrode 11 and the movable electrode 21, preventing damage due to contact between the fixed electrode 11 and the movable electrode 21. The reason why the second convex portion 72 has a convex shape is that if the contact area between the second convex portion 72 and the second surface S2 is large, sticking may occur. Note that although an example of the relationship between the fixed electrode 11, the movable electrode 21, the second convex portion 72, and the second surface S2 has been described above, the same can be said for the relationship between the fixed electrode 12, the movable electrode 22, the first convex portion 71, and the first surface S1.

[0033] In this embodiment, the movable body 60 may be configured to be displaceable relative to the fixed electrode portion 10 in the first direction DR1 and the second direction DR2.

[0034] As described above, this allows the movable body 60 to be displaced in the first direction DR1 or the second direction DR2 in response to acceleration in the XY plane. Accordingly, the opposing distance between the fixed electrode 16 and the movable electrode 26 increases or decreases. Therefore, by detecting the change in capacitance at the detection unit Z, the acceleration in the XY plane can be detected.

[0035] In this embodiment, the support beam 42 may be disposed in a region surrounded by the first portion 51 and the second portion 52 of the restriction portion 50, as shown in FIG.

[0036] In this way, the fixing portion 40, the restricting portion 50 having an elastic function, and the support beam 42 can be arranged compactly at the corner portions of the physical quantity sensor 1 without creating dead space, thereby making it possible to reduce the size of the physical quantity sensor 1.

[0037] In addition, in this embodiment, the support beam 42 may include a first support beam portion 43 extending in the first direction DR1 and a second support beam portion 44 having one end connected to the first support beam portion 43 and extending in the second direction DR2.

[0038] By providing the support beam 42 with the first support beam portion 43 and the second support beam portion 44, the second support beam portion 44 functions as a spring for displacement of the movable body 60 in the first direction DR1, and the first support beam portion 43 functions as a spring for displacement of the movable body 60 in the second direction DR2. Therefore, by providing one support beam 42 at each corner of the physical quantity sensor 1, it is possible to ensure the mobility of the movable body 60 within a plane including the first direction DR1 and the second direction DR2.

[0039] In this embodiment, the mass portion 62 has, for example, a rectangular shape in a plan view from the third direction DR3. The mass portion 62 may be connected to one end of the first portion 51 of the restriction portion 50, for example, near the vertex of the first corner portion. That is, in this embodiment, the restriction portion 50 may include a mass portion 62 to which one end of the first portion 51 is connected.

[0040] In this way, the restricting portion 50 can move integrally with the movable body 60, which moves in the XY plane when accelerated. Therefore, if the movable body 60 having the mass portion 62 moves excessively, the third portion 53 connected to the first portion 51 and the second portion 52 hits the fixed portion 40, causing the entire restricting portion 50 to bend. Therefore, the restricting portion 50 can absorb excessive impacts applied to the physical quantity sensor 1.

[0041] 1 and 11, in this embodiment, in a plan view in the third direction DR3, the fixed portion 40 and the restricting portion 50 are arranged adjacent to the outside of the vertex closest to the first corner of the rectangular movable body 60. That is, in this embodiment, in a plan view in the third direction DR3 that is orthogonal to the first direction DR1 and the second direction DR2, the fixed portion 40 and the restricting portion 50 are arranged at the corner of the substrate 2.

[0042] In this way, the mobility of the movable body 60 within a plane including the first direction DR1 and the second direction DR2 can be ensured, and the fixing portion 40 and the regulating portion 50 can be arranged at the corners of the substrate 2 so as not to create dead space.

[0043] As described above, in this embodiment, the fixed electrode group of the fixed electrode section 10 has a plurality of fixed electrodes 16, and the movable electrode group of the movable electrode section 20 has a plurality of movable electrodes 26. In the detection section Z, the fixed electrodes 16 and the movable electrodes 26 are arranged to face each other alternately in the first direction DR1 or the second direction DR2. As described above, in the physical quantity sensor 1 of this embodiment, the fixed electrode section 10 includes a fixed electrode group, and the movable electrode section 20 includes a movable electrode group in which each movable electrode 26 faces each fixed electrode 16 of the fixed electrode group of the fixed electrode section 10 in the first direction DR1 or the second direction DR2.

[0044] According to this embodiment, the fixed electrode section 10 has a fixed electrode group having a plurality of fixed electrodes 16, and the movable electrode section 20 has a movable electrode group having a plurality of movable electrodes 26. Then, for example, a large number of capacitors each consisting of the fixed electrodes 16 and the movable electrodes 26 can be provided along each side of the mass section 62. Therefore, displacement of the movable body 60 in the XY plane can be detected as a change in the capacitance of a large number of capacitors, thereby improving the acceleration detection sensitivity.

[0045] FIG. 12 illustrates another configuration example of this embodiment. The configuration example illustrated in FIG. 12 is a physical quantity sensor 1 that detects acceleration in a single axis direction along the second direction DR2. Therefore, unlike the configuration example illustrated in FIG. 1, the detection units ZB and ZD and the fixed electrode units 10B and 10D are not provided. Furthermore, the movable body 60 does not have the movable electrode units 20B and 20D. FIG. 13 is a plan view of the vicinity of a first corner portion of the configuration example illustrated in FIG. 12. Compared to FIG. 11, which illustrates the plan view of the vicinity of the first corner portion of the configuration example illustrated in FIG. 1, the support beam 42 has a first support beam portion 43 but does not have a second support beam portion 44. Furthermore, the first support beam portion 43 has a shape in which multiple thin wires aligned along the first direction DR1 are connected in an accordion-like manner. Furthermore, unlike the case illustrated in FIG. 11, the second protrusion 72 of the fixed portion 40 is provided to extend toward the second direction DR2.

[0046] This embodiment can be applied to such a physical quantity sensor 1 that detects acceleration along a single axis, and the same effects as those described above can be obtained. Note that if the configuration example shown in Fig. 12 is modified, it can also be applied to a physical quantity sensor 1 that detects acceleration in the first direction DR1.

[0047] 2. Detailed configuration example Next, a detailed configuration example of the physical quantity sensor 1 of this embodiment will be described. FIG. 14 shows a first detailed example of the physical quantity sensor 1 of this embodiment. FIG. 14 is a view of a corner portion including the fixing portion 40 and the like as seen in a plan view in the third direction DR3. The difference from the configuration example in FIG. 1 is that a protrusion 76 is provided at the connection portion between the first portion 51 and the second portion 52 of the restriction portion 50. The protrusion 76 has a shape, for example, as shown in FIG. 1 as seen in a plan view in the third direction DR3.

[0048] 15 and 16 are diagrams showing the stress distribution when an external force F is applied to the restriction portion 50 of the physical quantity sensor 1 of this embodiment, as viewed in a plan view in the third direction DR3. FIG. 15 shows the stress distribution in the configuration example of FIG. 1, and FIG. 16 shows the stress distribution in the first detailed example. Specifically, in FIGS. 15 and 16, the mass portion 62 of the movable body 60 is fixed at a specific position on the XY plane, and the restriction portion 50 is connected to the mass portion 62. A force F in the -Y direction is applied to the portion indicated by a triangle in the third portion 53 of the restriction portion 50. Here, the regions indicated by patterns ST1 and ST2 in FIGS. 15 and 16 indicate portions where tensile stress occurs, with the ST1 pattern indicating a case where the tensile stress is moderate and the ST2 pattern indicating a case where the tensile stress is high. Furthermore, the areas indicated by the SR1 and SR2 patterns in Figures 15 and 16 indicate areas where shrinkage stress is occurring, with the SR1 pattern indicating a case where shrinkage stress is medium and the SR2 pattern indicating a case where shrinkage stress is high.

[0049] First, in the configuration example shown in FIG. 15 where the restriction portion 50 does not have a protrusion 76, it can be seen that stress is generated mainly at the connection portion between the first portion 51 and the second portion 52, the connection portion between the restriction portion 50 and the mass portion 62, and the +X direction side of the third portion 53 in a plan view in the third direction DR3. Specifically, strong contractile stress, indicated by the SR2 pattern, is generated inside the corner of the connection portion between the first portion 51 and the second portion 52, indicated by c1 in FIG. 15 . Furthermore, moderate tensile stress, indicated by the ST1 pattern, is generated outside the corner, indicated by d1. Furthermore, at the connection portion between the restriction portion 50 and the mass portion 62, moderate or higher tensile stress, indicated by the ST1 and ST2 patterns, is generated at the +Y direction side of the first portion 51, indicated by a1, and moderate or higher contractile stress, indicated by the SR1 and SR2 patterns, is generated at the −Y direction side of the first portion 51, indicated by b1.

[0050] On the other hand, when the restriction portion 50 shown in FIG. 16 is provided with a protrusion 76, the stress distribution in the restriction portion 50 is generally similar to that described above. However, in the configuration with the protrusion 76, the stress is distributed over a wide area near the corners of the restriction portion 50, as indicated by c2, d2, and e2 in FIG. 16. Specifically, at the inner side of the L-shaped corner indicated by c2, moderate or higher stress, as indicated by the SR1 and SR2 patterns, is distributed over a wider area than in the configuration shown in FIG. 15. Furthermore, in the configuration example shown in FIG. 16, tensile stress, as indicated by the ST1 and ST2 patterns, is generated in the areas indicated by d2 and e2. Furthermore, compared to the configuration example shown in FIG. 15, the area where tensile stress is generated is wider. Furthermore, at the connection between the restriction portion 50 and the mass portion 62, the area where high contractile stress, as indicated by the SR2 pattern, is generated is increased in the area on the −Y direction side of the first portion 51, as indicated by b2.

[0051] 1 to a structure in which the convex portions 76 are provided at the corners of the L-shape as in the first detailed example, it can be seen that the area in which stress occurs spreads over a wide area, and the restriction portion 50 becomes more likely to bend. That is, this has the effect of preventing stress from concentrating on one part of the restriction portion 50 and causing the restriction portion 50 to break. As such, in the physical quantity sensor 1 of this embodiment, the restriction portion 50 may include the convex portion 76 provided at the connection portion between the first portion 51 and the second portion 52.

[0052] In this way, the restricting portion 50 is more flexible and has improved elasticity compared to a configuration in which the restricting portion 50 has a simple L-shape when viewed in a plane in the third direction DR3. Therefore, when an excessive impact is applied to the physical quantity sensor 1, it is possible to prevent stress from concentrating on one part of the restricting portion 50 and causing breakage. Note that the shape of the protrusion 76 is not limited to that shown in FIG. 14 , and similar effects can be obtained with other shapes.

[0053] FIG. 17 is a diagram showing a modified example of the first detailed example. The difference from the first detailed example is that the inside of the L-shaped corner of the restriction portion 50 is tapered. The tapered shape is a shape in which the inside portion of the corner indicated by c2 in FIG. 17 is rounded, for example. The configuration example of the tapered shape is not limited to the configuration shown in FIG. 17. For example, the outside of the corner may be rounded. In this way, in the physical quantity sensor 1 of this embodiment, the corner of the connection portion between the first portion 51 and the second portion 52 of the restriction portion 50 may have a tapered shape.

[0054] Even in this case, as in the first detailed example, the distribution of stress generated in the restricting portion 50 becomes uniform, making it easier for the restricting portion 50 to bend. Therefore, the elastic function can be improved, and a structure with excellent impact resistance can be realized.

[0055] FIG. 18 shows a second detailed example of the physical quantity sensor 1 of this embodiment. Compared to the configuration example of FIG. 1 , the L-shape of the restriction portion 50 is further bent at one end of the second portion 52. Specifically, the restriction portion 50 includes a fourth portion 54 and a fifth portion 55. The fourth portion 54 is connected to one end of the second portion 52 that is not connected to the first portion 51 and extends in the opposite direction of the first direction DR1. The fifth portion 55 is connected to one end of the fourth portion 54 that is not connected to the second portion 52 and extends in the opposite direction of the second direction DR2. The one end of the fifth portion 55 that is not connected to the fourth portion 54 is connected to the third portion 53. Thus, in this embodiment, the regulating portion 50 may include a fourth portion 54 having one end connected to the second portion 52 and extending in the opposite direction of the first direction DR1, and a fifth portion 55 having one end connected to the fourth portion 54 and extending in the opposite direction of the second direction DR2.

[0056] In this way, compared to when the restricting portion 50 is made simply L-shaped in plan view in the third direction DR3, the rigidity in the XY plane is lower due to the increased number of folds. This makes it possible to improve the elastic function of the restricting portion 50 and realize an improvement in the impact resistance of the physical quantity sensor 1.

[0057] FIG. 19 is a plan view of a first corner portion of a third detailed example of this embodiment. Compared to the first corner portion in the configuration example of FIG. 1, the configurations of the restricting portion 50 and the fixing portion 40 are different. Specifically, the restricting portion 50 includes a sixth portion 56 and a seventh portion 57 in addition to the configuration of FIG. 1. The sixth portion 56 is provided to extend from the first corner portion of the mass portion 62 of the movable body 60 in the second direction DR2. The seventh portion 57 is connected to the other end of the sixth portion 56 that is not connected to the mass portion 62 and is provided to extend in the first direction DR1. That is, in the third detailed example, the elastic mechanism of the restricting portion 50 is divided into a portion including the first portion 51, the second portion, and the third portion 53 and a portion including the sixth portion 56 and the seventh portion 57. In this embodiment, the mass portion 62 may include a sixth portion 56 extending in the second direction DR2 from the region where one end of the first portion 51 is connected, and a seventh portion 57 having one end connected to the sixth portion 56 and extending in the first direction DR1.

[0058] In the third detailed example, a third convex portion 73 and a fourth convex portion 74 can be provided on the fixed portion 40. For example, the third convex portion 73 may be provided so as to extend from the fixed portion 40 in the second direction DR2, and the fourth convex portion 74 may be provided so as to extend from the fixed portion 40 in the direction opposite to the first direction DR1.

[0059] In the configuration example shown in FIG. 1 , at the first corner of the physical quantity sensor 1, the third portion 53 is disposed so as to face the first convex portion 71 of the fixed portion 40, thereby providing elasticity in the −X direction. The third portion 53 is disposed so as to face the second convex portion 72 of the fixed portion 40, thereby providing elasticity in the +Y direction. Meanwhile, in the third detailed example, the restricting portion 50 further includes a sixth portion 56 and a seventh portion 57. Therefore, the seventh portion 57 is disposed so as to face the third convex portion 73 of the fixed portion 40, thereby providing elasticity in the −Y direction. The seventh portion 57 is disposed so as to face the fourth convex portion 74 of the fixed portion 40, thereby providing elasticity in the +X direction. That is, in the third detailed example, each corner is provided with elasticity in the +X, −X, +Y, and −Y directions. Therefore, excessive impact applied in a certain direction can be absorbed by the elasticity of each of the four corners. Therefore, the stress applied to each location can be reduced, and the impact resistance of the physical quantity sensor 1 can be improved.

[0060] Furthermore, in the third detailed example, the sixth portion 56 and the seventh portion 57 provided in the restricting portion 50 create a space surrounded by the first portion 51, the second portion 52, the sixth portion 56, and the seventh portion 57. The support beam 42 can then be placed in this space. Thus, in this embodiment, the support beam 42 may be placed in a region surrounded by the first portion 51, the second portion 52, the sixth portion 56, and the seventh portion of the restricting portion 50.

[0061] Even in this way, excessive impacts applied in a certain direction can be absorbed by each corner portion, and the stress applied to each location can be reduced, thereby improving the impact resistance of the physical quantity sensor 1. Furthermore, the support beams 42 can be arranged in the spaces surrounded by the restriction portions 50 at each corner portion, thereby achieving both improved impact resistance and miniaturization of the physical quantity sensor 1.

[0062] 20 is a plan view of the first corner portion of a fourth detailed example of this embodiment. The fourth detailed example differs from the third detailed example in the shape of the restriction portion 50. Specifically, the third portion 53 and the seventh portion 57 of the restriction portion 50 are connected. That is, in the fourth configuration example, the fixing portion 40 and the support beam 42 are surrounded by the first portion 51, the second portion 52, the third portion 53, the sixth portion 56, and the seventh portion 57 of the restriction portion 50. In this manner, in this embodiment, the second portion 52 and the sixth portion 56 may be connected.

[0063] In this way, as in the third detailed example, excessive impact applied in a certain direction can be absorbed by each corner portion, and the stress applied to each location can be reduced. Furthermore, the support beam 42 can be arranged in the space surrounded by the restriction portion 50, and it is possible to achieve both improved impact resistance and miniaturization of the physical quantity sensor 1.

[0064] 3. Inertial Measurement Unit Next, an example of the inertial measurement unit 2000 of this embodiment will be described with reference to Fig. 21 and Fig. 22. The inertial measurement unit 2000 (IMU) shown in Fig. 21 is a device that detects inertial momentum such as the attitude and behavior of a moving body such as an automobile or a robot. The inertial measurement unit 2000 is a so-called six-axis motion sensor that includes acceleration sensors that detect accelerations ax, ay, and az in directions along three axes, and angular velocity sensors that detect angular velocities ωx, ωy, and ωz about the three axes.

[0065] The inertial measurement unit 2000 has a rectangular parallelepiped shape with a substantially square planar shape. Screw holes 2110 serving as mounts are formed near two diagonal vertices of the square. Two screws can be inserted into these two screw holes 2110 to secure the inertial measurement unit 2000 to the mounting surface of a mounting body such as an automobile. By selecting appropriate parts and modifying the design, it is possible to reduce the size of the inertial measurement unit 2000 to a size that can be mounted in a smartphone or digital camera, for example.

[0066] Inertial measurement unit 2000 has outer case 2100, joining member 2200, and sensor module 2300, and is configured such that sensor module 2300 is inserted into outer case 2100 with joining member 2200 interposed therebetween. Sensor module 2300 has inner case 2310 and circuit board 2320. Inner case 2310 is formed with recess 2311 for preventing contact with circuit board 2320 and opening 2312 for exposing connector 2330, which will be described later. Circuit board 2320 is bonded to the bottom surface of inner case 2310 via adhesive.

[0067] 22, a connector 2330, an angular velocity sensor 2340z that detects angular velocity around the Z axis, and an acceleration sensor unit 2350 that detects acceleration in the directions of the X, Y, and Z axes are mounted on the top surface of circuit board 2320. Furthermore, an angular velocity sensor 2340x that detects angular velocity around the X axis and an angular velocity sensor 2340y that detects angular velocity around the Y axis are mounted on the side surface of circuit board 2320.

[0068] The acceleration sensor unit 2350 includes at least the physical quantity sensor 1 for measuring acceleration in the Z-axis direction described above, and can detect acceleration in one axis direction, or in two or three axes directions as necessary. Note that the angular velocity sensors 2340x, 2340y, and 2340z are not particularly limited, but for example, vibration gyro sensors that utilize the Coriolis force can be used.

[0069] A control IC 2360 is mounted on the underside of the circuit board 2320. The control IC 2360, which serves as a control unit that performs control based on the detection signal output from the physical quantity sensor 1, is, for example, an MCU (Micro Controller Unit), and has a built-in storage unit including a nonvolatile memory, an A / D converter, and the like, and controls each unit of the inertial measurement unit 2000. Note that a plurality of other electronic components are also mounted on the circuit board 2320.

[0070] As described above, the inertial measurement unit 2000 of this embodiment includes the physical quantity sensor 1 and the control IC 2360 as a control unit that performs control based on the detection signal output from the physical quantity sensor 1. This inertial measurement unit 2000 uses the acceleration sensor unit 2350 that includes the physical quantity sensor 1, and therefore it is possible to provide an inertial measurement unit 2000 that can enjoy the effects of the physical quantity sensor 1 and achieve high accuracy, etc.

[0071] It should be noted that inertial measurement unit 2000 is not limited to the configurations shown in Figures 21 and 22. For example, inertial measurement unit 2000 may be configured to include only physical quantity sensor 1 as an inertial sensor, without including angular velocity sensors 2340x, 2340y, and 2340z. In this case, inertial measurement unit 2000 may be realized by housing physical quantity sensor 1 and control IC 2360 that realizes a control unit in a package that is a housing container.

[0072] As described above, the physical quantity sensor of this embodiment detects a physical quantity in at least one of the first and second directions, where two directions parallel to the substrate and perpendicular to each other are defined as a first direction and a second direction. The physical quantity sensor includes a fixed electrode portion provided on the substrate, a movable body having a movable electrode portion provided such that the movable electrode faces the fixed electrode of the fixed electrode portion, a fixed portion fixed to the substrate, a support beam having one end connected to the fixed portion and the other end connected to the movable body, and a restricting portion that restricts displacement of the movable body. The restricting portion is related to the physical quantity sensor, which includes a first portion having one end connected to the movable body and extending in the first direction, and a second portion having one end connected to the other end of the first portion and extending in the second direction.

[0073] According to this embodiment, when excessive external impact or vibration causes the movable body to be significantly displaced in an in-plane direction including the first direction and the second direction, and the restricting portion hits another part of the physical quantity sensor, such as a stopper, the elastic function of the restricting portion can absorb the impact. Therefore, it is possible to realize a physical quantity sensor that can absorb impact regardless of the direction of the impact in the in-plane direction and has excellent impact resistance.

[0074] In this embodiment, the restricting portion may include a third portion that faces the fixed portion.

[0075] In this way, if an excessive impact is applied to the physical quantity sensor, the first surface of the third part will collide with the surface of the fixed part opposite it, and the second surface of the third part will collide with the surface of the fixed part opposite it, thereby suppressing excessive displacement.

[0076] In this embodiment, the fixing portion may include a first protrusion facing the first surface of the third portion in the first direction, and a second protrusion facing the second surface of the third portion in the second direction.

[0077] This makes it possible to avoid problems caused by direct contact between the surfaces of the movable body and the third portion of the restricting part when the physical quantity sensor receives an excessive impact.

[0078] In this embodiment, the restricting portion may include a protrusion provided at the connection portion between the first portion and the second portion.

[0079] In this way, the restricting portion is more likely to bend in plan view in the third direction than in a configuration in which the restricting portion is simply L-shaped. Therefore, when an excessive impact is applied to the physical quantity sensor, stress can be prevented from concentrating on one part of the restricting portion, which would otherwise cause the restricting portion to break.

[0080] In this embodiment, the corner of the connecting portion between the first and second portions of the restricting portion may have a tapered shape.

[0081] This allows the restricting portion to bend more easily, improving its elasticity and achieving a structure with excellent impact resistance.

[0082] In addition, in this embodiment, the regulating portion may include a fourth portion having one end connected to the second portion and extending in the opposite direction of the first direction, and a fifth portion having one end connected to the fourth portion and extending in the opposite direction of the second direction.

[0083] In this way, compared to when the restricting portion is made into a simple L-shape in plan view in the third direction, the rigidity in the plane including the first direction and the second direction is lowered by the number of folds, which can improve the elastic function of the restricting portion and can improve the impact resistance of the physical quantity sensor.

[0084] In this embodiment, the movable body may be configured to be displaceable in a first direction and a second direction relative to the fixed electrode portion.

[0085] In this way, it is possible to detect an increase or decrease in the opposing distance between the fixed electrode and the movable electrode when the movable body is displaced in the first direction or the second direction, and therefore it is possible to detect a physical quantity in a plane including the first direction and the second direction.

[0086] In this embodiment, the support beam can be disposed in a region surrounded by the first portion and the second portion of the restricting portion.

[0087] In this way, the fixing portion, the restricting portion, and the support beam can be arranged compactly at the corners of the physical quantity sensor without creating dead space, thereby making it possible to reduce the size of the physical quantity sensor.

[0088] In this embodiment, the support beam may include a first support beam portion extending in a first direction, and a second support beam portion having one end connected to the first support beam portion and extending in a second direction.

[0089] In this way, when the movable body is subjected to acceleration in the first direction, the second support beam portion deforms, and when the movable body is subjected to acceleration in the second direction, the first support beam portion deforms. Therefore, by providing one support beam at each corner of the physical quantity sensor, it is possible to ensure the mobility of the movable body within a plane including the first direction and the second direction.

[0090] In addition, this embodiment may include a mass portion to which one end of the first portion of the restriction portion is connected.

[0091] With this configuration, if the movable body moves excessively, the third part hits the fixed part and the restricting part bends, thereby enabling the restricting part to absorb excessive impacts applied to the physical quantity sensor.

[0092] In this embodiment, the mass portion may also include a sixth portion extending in the second direction from a region where one end of the first portion is connected, and a seventh portion having one end connected to the sixth portion and extending in the first direction.

[0093] In this way, the elastic mechanisms provided at the corners of the physical quantity sensor can absorb impacts in the first direction, the direction opposite to the first direction, the second direction, and the direction opposite to the second direction, thereby improving the impact resistance of the physical quantity sensor.

[0094] In this embodiment, the support beam may be disposed in a region surrounded by the first portion, the second portion, the sixth portion, and the seventh portion of the restricting portion.

[0095] In this way, elastic mechanisms in the first direction, the direction opposite to the first direction, the second direction, and the direction opposite to the second direction can be provided at each corner of the physical quantity sensor, and the support beam can be disposed in a space surrounded by the restricting portion, thereby achieving both improved impact resistance and miniaturization of the physical quantity sensor.

[0096] In this embodiment, the second portion and the sixth portion may be connected to each other.

[0097] In this way, it is possible to improve the impact resistance of the physical quantity sensor while also reducing its size.

[0098] In this embodiment, the fixing portion and the restricting portion may be disposed at a corner portion of the substrate in a plan view in a third direction orthogonal to the first and second directions.

[0099] This ensures the mobility of the movable body within a plane including the first direction and the second direction, and also allows the fixing portion and the restricting portion to be arranged at the corners of the substrate so as not to create dead space.

[0100] In this embodiment, the fixed electrode portion may include a group of fixed electrodes, and the movable electrode portion may include a group of movable electrodes in which each movable electrode faces each fixed electrode of the fixed electrode group of the fixed electrode portion in the first direction or the second direction.

[0101] In this way, the displacement of the movable body in a plane including the first direction and the second direction can be detected by a large number of fixed electrodes and movable electrodes, thereby improving the detection sensitivity of the physical quantity sensor.

[0102] This embodiment also relates to an inertial measurement unit including a control unit that performs control based on detection signals output from the physical quantity sensors.

[0103] Although the present embodiment has been described in detail above, it will be readily apparent to those skilled in the art that many modifications are possible without substantially departing from the novel features and advantages of the present disclosure. Therefore, all such modifications are intended to be included within the scope of the present disclosure. For example, a term described at least once in the specification or drawings together with a different term having a broader or equivalent meaning may be replaced with that different term anywhere in the specification or drawings. Furthermore, all combinations of the present embodiment and modifications are also included within the scope of the present disclosure. Furthermore, the configurations and operations of the physical quantity sensor and inertial measurement unit are not limited to those described in the present embodiment, and various modifications are possible. [Explanation of symbols]

[0104] 1...physical quantity sensor, 2...substrate, 3...fixed electrode support portion, 10...fixed electrode portion, 10A...fixed electrode portion, 10B...fixed electrode portion, 10C...fixed electrode portion, 10D...fixed electrode portion, 11...fixed electrode, 12...fixed electrode, 13...fixed electrode, 14...fixed electrode, 16...fixed electrode, 20...movable electrode portion, 20A...movable electrode portion, 20B...movable electrode portion, 20C...movable electrode portion, 20D...movable electrode portion, 21...movable electrode, 22...movable electrode, 23...movable electrode, 24...movable electrode, 26...movable electrode, 40...fixed portion, 40A...fixed portion , 40B...fixed portion, 40C...fixed portion, 40D...fixed portion, 42...support beam, 42A...support beam, 42B...support beam, 42C...support beam, 42D...support beam, 43...first support beam portion, 44...second support beam portion, 50...regulating portion, 50A...regulating portion, 50B...regulating portion, 50C...regulating portion, 50D...regulating portion, 51...first portion, 52...second portion, 53...third portion, 54...fourth portion, 55...fifth portion, 56...sixth portion, 57...seventh portion, 57...seventh portion, 60...movable body, 62...mass portion, 71...first convex portion, 72...second convex portion, 73...Third convex portion, 74...Fourth convex portion, 76...Convex portion, 2000...Inertial measurement unit, 2100...Outer case, 2110...Screw hole, 2200...Joint member, 2300...Sensor module, 2310...Inner case, 2311...Recess, 2312...Opening, 2320...Circuit board, 2330...Connector, 2340x...Angular velocity sensor, 2340y...Angular velocity sensor, 2340z...Angular velocity sensor, 2350...Acceleration sensor unit, ax...Acceleration, ay...Acceleration, az...Acceleration, ωx...Angular velocity , ωy...angular velocity, ωz...angular velocity, C...capacitance, DR1...first direction, DR2...second direction, DR3...third direction, DR4...fourth direction, F...force, IC2360...control, QV...differential amplifier circuit, S1...first surface, S2...second surface, Z...detection unit, ZA...detection unit, ZA1...first detection element, ZA2...second detection element, ZB...detection unit, ZB1...first detection element, ZB2...second detection element, ZC...detection unit, ZC1...first detection element, ZC2...second detection element, ZD...detection unit, ZD1...first detection element, ZD2...second detection element

Claims

1. When two directions parallel to the substrate and perpendicular to each other are defined as a first direction and a second direction, A physical quantity sensor that detects a physical quantity in at least one of the first direction and the second direction, a fixed electrode portion provided on the substrate; a movable body having a movable electrode portion provided so that the movable electrode faces the fixed electrode of the fixed electrode portion; a fixed portion fixed to the substrate; a support beam having one end connected to the fixed portion and the other end connected to the movable body; a restricting portion that restricts displacement of the movable body; Including, The restriction portion is a first portion having one end connected to the movable body and extending in the first direction; a second portion having one end connected to the other end of the first portion and extending in the second direction; Including, The restriction portion is a third portion facing the fixed portion; The fixing portion is a first protrusion facing a first surface of the third portion in the first direction; a second protrusion facing a second surface of the third portion in the second direction; A physical quantity sensor comprising:

2. When two directions parallel to the substrate and perpendicular to each other are defined as a first direction and a second direction, A physical quantity sensor that detects a physical quantity in at least one of the first direction and the second direction, a fixed electrode portion provided on the substrate; a movable body having a movable electrode portion provided so that the movable electrode faces the fixed electrode of the fixed electrode portion; a fixed portion fixed to the substrate; a support beam having one end connected to the fixed portion and the other end connected to the movable body; a restricting portion that restricts displacement of the movable body; Including, The restriction portion is a first portion having one end connected to the movable body and extending in the first direction; a second portion having one end connected to the other end of the first portion and extending in the second direction; Including, The restriction portion is The physical quantity sensor includes a convex portion provided at a connection portion between the first portion and the second portion.

3. In claim 1 or 2, A physical quantity sensor, characterized in that a corner of a connecting portion between the first portion and the second portion of the restricting portion has a tapered shape.

4. In any one of claims 1 to 3, The restriction portion is a fourth portion having one end connected to the second portion and extending in a direction opposite to the first direction; a fifth portion having one end connected to the fourth portion and extending in a direction opposite to the second direction; A physical quantity sensor comprising:

5. In any one of claims 1 to 4, The movable body is A physical quantity sensor configured to be displaceable in the first direction and the second direction relative to the fixed electrode portion.

6. When two directions parallel to the substrate and perpendicular to each other are defined as a first direction and a second direction, A physical quantity sensor that detects a physical quantity in at least one of the first direction and the second direction, a fixed electrode portion provided on the substrate; a movable body having a movable electrode portion provided so that the movable electrode faces the fixed electrode of the fixed electrode portion; a fixed portion fixed to the substrate; a support beam having one end connected to the fixed portion and the other end connected to the movable body; a restricting portion that restricts displacement of the movable body; Including, The restriction portion is a first portion having one end connected to the movable body and extending in the first direction; a second portion having one end connected to the other end of the first portion and extending in the second direction; Including, The support beam is The physical quantity sensor is disposed in an area surrounded by the first portion and the second portion of the restriction portion.

7. In any one of claims 1 to 6, The support beam is a first support beam portion extending in the first direction; a second support beam portion having one end connected to the first support beam portion and extending in the second direction; A physical quantity sensor comprising:

8. When two directions parallel to the substrate and perpendicular to each other are defined as a first direction and a second direction, A physical quantity sensor that detects a physical quantity in at least one of the first direction and the second direction, a fixed electrode portion provided on the substrate; a movable body having a movable electrode portion provided so that the movable electrode faces the fixed electrode of the fixed electrode portion; a fixed portion fixed to the substrate; a support beam having one end connected to the fixed portion and the other end connected to the movable body; a restricting portion that restricts displacement of the movable body; Including, The restriction portion is a first portion having one end connected to the movable body and extending in the first direction; a second portion having one end connected to the other end of the first portion and extending in the second direction; Including, the movable body includes a mass portion to which one end of the first portion of the restriction portion is connected, The restriction portion is a sixth portion extending in the second direction from a region of the mass portion to which one end of the first portion is connected; a seventh portion having one end connected to the sixth portion and extending in the first direction; A physical quantity sensor comprising:

9. In claim 8, The support beam is A physical quantity sensor, characterized in that it is disposed in a region surrounded by the first portion, the second portion, the sixth portion, and the seventh portion of the restriction portion.

10. In claim 8 or 9, A physical quantity sensor, wherein the second portion and the sixth portion are connected to each other.

11. When two directions parallel to the substrate and perpendicular to each other are defined as a first direction and a second direction, A physical quantity sensor that detects a physical quantity in at least one of the first direction and the second direction, a fixed electrode portion provided on the substrate; a movable body having a movable electrode portion provided so that the movable electrode faces the fixed electrode of the fixed electrode portion; a fixed portion fixed to the substrate; a support beam having one end connected to the fixed portion and the other end connected to the movable body; a restricting portion that restricts displacement of the movable body; Including, The restriction portion is a first portion having one end connected to the movable body and extending in the first direction; a second portion having one end connected to the other end of the first portion and extending in the second direction; Including, A physical quantity sensor characterized in that, when viewed in a plan view in a third direction perpendicular to the first direction and the second direction, the fixing portion and the restricting portion are arranged at corner portions of the substrate.

12. In any one of claims 1 to 11, the fixed electrode portion includes a fixed electrode group, The physical quantity sensor, characterized in that the movable electrode portion includes a movable electrode group in which each movable electrode faces each fixed electrode of the fixed electrode group of the fixed electrode portion in the first direction or the second direction.

13. The physical quantity sensor according to any one of claims 1 to 12; a control unit that performs control based on a detection signal output from the physical quantity sensor; 1. An inertial measurement unit comprising:

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