Substrate processing method, semiconductor device manufacturing method, substrate processing system, and program

Abstract

To provide a substrate processing method capable of highly accurately and selectively forming a film on a desired surface, and a method for manufacturing a semiconductor device.SOLUTION: A substrate processing method includes: step F of supplying an etching agent to a substrate and removing a natural oxide film formed on a surface; step A of exciting an oxidizing agent and a reducing agent to a plasma state and supplying the agents to a substrate having a first surface and a second surface; step B of removing an oxide formed on the first surface by sublimation while causing the oxide (oxide film) formed on the second surface to remain; step C of forming an inhibitor layer on the second surface by supplying a modifier to the substrate; step D of forming a film on the first surface by supplying a deposition agent to the substrate; and step E of performing post-treatment for the formed film by performing anneal processing for the substrate.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present disclosure relates to a substrate processing method, a semiconductor device manufacturing method, a substrate processing system, and a program. [Background technology]

[0002] As one step in the manufacturing process of a semiconductor device, a process of selectively growing and forming a film on a specific surface among multiple types of surfaces of different materials exposed on the surface of a substrate (hereinafter, this process is also referred to as selective growth or selective film formation) may be performed (see, for example, Patent Documents 1 to 3). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-106242 [Patent Document 2] Japanese Patent Publication No. 2020-155452 [Patent Document 3] Japanese Patent Publication No. 2020-155607 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique for selectively forming a film on a desired surface with high precision. [Means for solving the problem]

[0005] According to one aspect of the present disclosure, (a) (a1) a step of exciting an oxidizing agent and a reducing agent into a plasma state and supplying the excited oxidizing agent and a reducing agent to a substrate having a first surface and a second surface, and (a2) a step of exciting a reducing agent into a plasma state and supplying the reducing agent to the substrate; (b) heat-treating the substrate after (a); The present invention provides a technique including: [Effects of the Invention]

[0006] According to the present disclosure, it is possible to selectively form a film on a desired surface with high precision. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a schematic configuration diagram of a vertical processing furnace of a substrate processing apparatus suitably used in one embodiment of the present disclosure, showing a processing furnace 202 portion in vertical cross section. [Figure 2] FIG. 2 is a schematic configuration diagram of a vertical processing furnace of a substrate processing apparatus suitably used in one embodiment of the present disclosure, and is a cross-sectional view of the processing furnace 202 taken along line AA in FIG. [Figure 3] FIG. 3 is a schematic configuration diagram of a controller 121 of a substrate processing apparatus suitably used in one embodiment of the present disclosure, and is a block diagram showing a control system of the controller 121. [Figure 4] FIG. 4 is a diagram showing a processing sequence according to one embodiment of the present disclosure. [Figure 5] 5(a) is a partial cross-sectional view of a substrate having a layered structure formed by alternating layers of a first material (SiGe) and a second material (Si), on which a fourth material (SiO), a third material (SiN), and another fourth material (SiO) are layered; a portion of the sidewall of the layered structure of the first and second materials, which is made of the first material, is removed to form a recess in the sidewall of the layered structure, the depth direction of which is parallel to the surface of the substrate (horizontal direction). FIG. 5(b) is a partial cross-sectional view of a substrate having the structure of FIG. 5(a) after an inhibitor layer has been formed by the processing sequence of this embodiment. FIG. 5(c) is a partial cross-sectional view of a substrate having the structure of FIG. 5(a) after an inhibitor layer has been formed by the processing sequence of this embodiment and a film (SiOC) has been formed. FIG. 5(d) is an enlarged cross-sectional view of a portion of the surface of a substrate having the structure shown in FIG. 5(a) on its surface, after forming an inhibitor layer and forming a film (SiOC) by the processing sequence of this embodiment, and then performing a heat treatment on the substrate. [Figure 6] 6(a) is a partial cross-sectional view of a substrate having a layered structure formed on its surface by alternating layers of a first material (SiGe) and a second material (Si), on which a fourth material (SiO), a third material (SiN), and another fourth material (SiO) are layered. A portion of the sidewall of the layered structure of the first and second materials, which is made of the first material, is removed to form a recess in the sidewall of the layered structure, the depth direction of which is parallel to the surface of the substrate (horizontal direction). FIG. 6(b) is a partial cross-sectional view of a substrate having the structure shown in FIG. 6(a) after a film (SiOC) is formed on the substrate by a conventional film formation method. FIG. 6(c) is a partial cross-sectional view of a substrate having the structure shown in FIG. 6(b) after an etching process is performed to remove excess film formed on the top surface of the recess. [Figure 7] FIG. 7 is a block diagram illustrating an example of a substrate processing system that can be suitably used in another aspect of the present disclosure. [Figure 8] FIG. 8 is a block diagram illustrating another example of a substrate processing system that can be suitably used in another aspect of the present disclosure. [Figure 9] FIG. 9 is a cross-sectional TEM image of evaluation sample 1 in the example. [Figure 10] FIG. 10 is a cross-sectional TEM image of evaluation sample 2 in the example. DETAILED DESCRIPTION OF THE INVENTION

[0008] <One aspect of the present disclosure> Hereinafter, one embodiment of the present disclosure will be described mainly with reference to Figures 1 to 4 and 5(a) to 5(d). Note that all drawings used in the following description are schematic, and the dimensional relationships between elements, the ratios of elements, etc. shown in the drawings do not necessarily match those in reality. Furthermore, the dimensional relationships between elements, the ratios of elements, etc. do not necessarily match between multiple drawings.

[0009] (1) Configuration of the substrate processing apparatus (substrate processing system) 1, the processing furnace 202 has a heater 207 as a temperature regulator (heating unit). The heater 207 is cylindrical and is installed vertically by being supported by a holding plate. The heater 207 also functions as an activation mechanism (excitation unit) that activates (excites) gases with heat.

[0010] A reaction tube 203 is disposed concentrically with the heater 207 inside the heater 207. The reaction tube 203 is made of a heat-resistant material such as quartz (SiO2) or silicon carbide (SiC) and has a cylindrical shape with a closed upper end and an open lower end. A manifold 209 is disposed concentrically with the reaction tube 203 below the reaction tube 203. The manifold 209 is made of a metal material such as stainless steel (SUS) and has a cylindrical shape with open upper and lower ends. The upper end of the manifold 209 engages with the lower end of the reaction tube 203 and is configured to support the reaction tube 203. An O-ring 220a is provided between the manifold 209 and the reaction tube 203 as a sealing member. The reaction tube 203 is installed vertically, similar to the heater 207. The reaction tube 203 and the manifold 209 mainly constitute a processing vessel (reaction vessel). A processing chamber 201 is formed in the cylindrical hollow portion of the processing vessel. The processing chamber 201 is configured to be able to accommodate wafers 200 as substrates. In the processing chamber 201, processing of the wafers 200 is performed.

[0011] Nozzles 249a to 249c serving as first to third supply units are respectively provided in the processing chamber 201 so as to penetrate the sidewall of the manifold 209. The nozzles 249a to 249c are also referred to as first to third nozzles, respectively. The nozzles 249a to 249c are made of a heat-resistant material such as quartz or SiC. Gas supply pipes 232a to 232c are connected to the nozzles 249a to 249c, respectively. The nozzles 249a to 249c are different nozzles, and each of the nozzles 249a and 249c is provided adjacent to the nozzle 249b.

[0012] Gas supply pipes 232a-232c are provided with mass flow controllers (MFCs) 241a-241c, which are flow rate control devices (flow rate control parts), and valves 243a-243c, which are on-off valves, in order from the upstream side of the gas flow. Gas supply pipes 232d and 232f are connected to gas supply pipe 232a downstream of valve 243a. Gas supply pipes 232e and 232g are connected to gas supply pipe 232b downstream of valve 243b. Gas supply pipe 232h is connected to gas supply pipe 232c downstream of valve 243c. Gas supply pipes 232d-232h are provided with MFCs 241d-241h and valves 243d-243h, in order from the upstream side of the gas flow. Gas supply pipes 232a-232h are made of a metal material, such as SUS.

[0013] As shown in FIG. 2, the nozzles 249a to 249c are respectively provided in an annular space between the inner wall of the reaction tube 203 and the wafers 200 in a plan view, extending from the lower part to the upper part of the inner wall of the reaction tube 203 and rising upward in the arrangement direction of the wafers 200. That is, the nozzles 249a to 249c are respectively provided in regions horizontally surrounding the wafer arrangement region on the sides of the wafer arrangement region where the wafers 200 are arranged, and extending along the wafer arrangement region. In a plan view, the nozzle 249b is disposed so as to face an exhaust port 231a (described later) on a straight line across the center of the wafer 200 loaded into the processing chamber 201. The nozzles 249a and 249c are disposed so as to sandwich a line L passing through the nozzle 249b and the center of the exhaust port 231a along the inner wall of the reaction tube 203 (the outer periphery of the wafers 200) from both sides. The line L also passes through the nozzle 249b and the center of the wafer 200. In other words, the nozzle 249c can be said to be provided on the opposite side of the nozzle 249a across the line L. The nozzles 249a and 249c are arranged symmetrically with respect to the line L as the axis of symmetry. Gas supply holes 250a to 250c for supplying gas are provided on the side surfaces of the nozzles 249a to 249c, respectively. Each of the gas supply holes 250a to 250c opens to face (face) the exhaust port 231a in a plan view, and is able to supply gas toward the wafers 200. A plurality of the gas supply holes 250a to 250c are provided from the bottom to the top of the reaction tube 203.

[0014] A modifying agent (modifying gas) is supplied from the gas supply pipe 232a into the processing chamber 201 via the MFC 241a, the valve 243a, and the nozzle 249a.

[0015] From the gas supply pipe 232b, a raw material (raw material gas) which is one of the film forming agents (film forming gas) and a reducing agent (reducing gas) are supplied into the processing chamber 201 via the MFC 241b, the valve 243b, and the nozzle 249b.

[0016] A reactant (reaction gas), which is one of the film forming agents (film forming gas), is supplied from the gas supply pipe 232c into the processing chamber 201 via the MFC 241c, the valve 243c, and the nozzle 249c.

[0017] A catalyst (catalytic gas), which is one of the film forming agents (film forming gas), is supplied from the gas supply pipe 232d into the processing chamber 201 via the MFC 241d, the valve 243d, the gas supply pipe 232a, and the nozzle 249a.

[0018] An etching agent (etching gas) and an oxidizing agent (oxidizing gas) are supplied from the gas supply pipe 232e into the processing chamber 201 via the MFC 241e, the valve 243e, the gas supply pipe 232b, and the nozzle 249b.

[0019] Inert gas is supplied from the gas supply pipes 232f to 232h through the MFCs 241f to 241h, the valves 243f to 243h, the gas supply pipes 232a to 232c, and the nozzles 249a to 249c into the processing chamber 201. The inert gas acts as a purge gas, a carrier gas, a dilution gas, etc.

[0020] A remote plasma unit (hereinafter, RPU) 300 is provided downstream of the gas supply pipe 232b's connection with the gas supply pipe 232g. The remote plasma unit (hereinafter, RPU) 300 serves as a plasma excitation unit (plasma generation unit) that excites gas into a plasma state. Exciting gas into a plasma state is also referred to simply as plasma excitation. The RPU 300 applies radio frequency (RF) power to the gas inside the RPU 300 to excite it, i.e., to excite the gas into a plasma state. The plasma generation method may be a capacitively coupled plasma (CCP) method or an inductively coupled plasma (ICP) method. The RPU 300 is configured to excite a reducing agent, an oxidizing agent, or an inert gas supplied from the gas supply pipes 232b, 232e, and 232g into a plasma state and supply the plasma to the processing chamber 201.

[0021] The modifying agent supply system mainly comprises the gas supply pipe 232a, MFC 241a, and valve 243a. The raw material supply system and reducing agent supply system mainly comprise the gas supply pipe 232b, MFC 241b, and valve 243b. The reactant supply system mainly comprises the gas supply pipe 232c, MFC 241c, and valve 243c. The catalyst supply system mainly comprises the gas supply pipe 232d, MFC 241d, and valve 243d. The etching agent supply system and oxidizing agent supply system mainly comprise the gas supply pipe 232e, MFC 241e, and valve 243e. The inert gas supply system mainly comprises the gas supply pipes 232f-232h, MFCs 241f-241h, and valves 243f-243h. Either or both of the raw material supply system and reactant supply system are also referred to as a film-forming agent supply system. The raw material supply system, reactant supply system, and catalyst supply system may be individually or entirely referred to as a film-forming agent supply system.

[0022] Any or all of the various supply systems described above may be configured as an integrated supply system 248 in which the valves 243a-243h, MFCs 241a-241h, etc. are integrated. The integrated supply system 248 is connected to each of the gas supply pipes 232a-232h, and is configured so that the supply operation of various substances (various gases) into the gas supply pipes 232a-232h, i.e., the opening and closing operation of the valves 243a-243h and the flow rate adjustment operation by the MFCs 241a-241h, etc., are controlled by a controller 121, which will be described later. The integrated supply system 248 is configured as an integrated or separate integrated unit, and can be attached and detached to and from the gas supply pipes 232a-232h, etc., so that maintenance, replacement, expansion, etc. of the integrated supply system 248 can be performed on an integrated unit basis.

[0023] An exhaust port 231a for exhausting the atmosphere inside the processing chamber 201 is provided at the bottom of the sidewall of the reaction tube 203. As shown in FIG. 2, the exhaust port 231a is provided at a position facing (opposite) the nozzles 249a-249c (gas supply holes 250a-250c) across the wafer 200 in a plan view. The exhaust port 231a may be provided along the sidewall of the reaction tube 203 from the bottom to the top, i.e., along the wafer arrangement area. An exhaust pipe 231 is connected to the exhaust port 231a. A vacuum pump 246 serving as a vacuum exhaust device is connected to the exhaust pipe 231 via a pressure sensor 245 serving as a pressure detector (pressure detection unit) for detecting the pressure inside the processing chamber 201 and an APC (Auto Pressure Controller) valve 244 serving as a pressure regulator (pressure adjustment unit). The APC valve 244 is configured to be able to evacuate and stop the evacuation of the processing chamber 201 by opening and closing the valve while the vacuum pump 246 is operating, and further, to be able to adjust the pressure inside the processing chamber 201 by adjusting the valve opening based on pressure information detected by the pressure sensor 245 while the vacuum pump 246 is operating. An exhaust system is mainly configured by the exhaust pipe 231, the APC valve 244, and the pressure sensor 245. The vacuum pump 246 may be considered to be included in the exhaust system.

[0024] Below the manifold 209, a seal cap 219 is provided as a furnace port cover capable of airtightly closing the lower end opening of the manifold 209. The seal cap 219 is made of a metal material such as SUS and is formed in a disk shape. An O-ring 220b is provided on the upper surface of the seal cap 219 as a sealing member that abuts against the lower end of the manifold 209. Below the seal cap 219, a rotation mechanism 267 is provided to rotate the boat 217 (described later). A rotation shaft 255 of the rotation mechanism 267 penetrates the seal cap 219 and is connected to the boat 217. The rotation mechanism 267 is configured to rotate the boat 217, thereby rotating the wafers 200. The seal cap 219 is configured to be vertically raised and lowered by a boat elevator 115 as a lifting mechanism installed outside the reaction tube 203. The boat elevator 115 is configured as a transfer device (transfer mechanism) that transfers the wafers 200 into and out of the processing chamber 201 by raising and lowering the seal cap 219.

[0025] A shutter 219s is provided below the manifold 209 as a furnace port cover that can airtightly close the lower end opening of the manifold 209 when the seal cap 219 is lowered and the boat 217 is removed from the processing chamber 201. The shutter 219s is made of a metal material such as SUS and has a disk shape. An O-ring 220c is provided on the upper surface of the shutter 219s as a sealing member that abuts against the lower end of the manifold 209. The opening and closing operation (lifting and lowering operation, rotating operation, etc.) of the shutter 219s is controlled by a shutter opening and closing mechanism 115s.

[0026] The boat 217 as a substrate support is configured to support a plurality of wafers 200, for example, 25 to 200 wafers 200, in a horizontal position and aligned vertically with their centers aligned, i.e., arranged at intervals, in multiple stages. The boat 217 is made of a heat-resistant material such as quartz or SiC. At the bottom of the boat 217, heat insulating plates 218, also made of a heat-resistant material such as quartz or SiC, are supported in multiple stages.

[0027] A temperature sensor 263 serving as a temperature detector is installed inside the reaction tube 203. By adjusting the power supply to the heater 207 based on the temperature information detected by the temperature sensor 263, the temperature inside the processing chamber 201 can be adjusted to a desired temperature distribution. The temperature sensor 263 is installed along the inner wall of the reaction tube 203.

[0028] 3, the controller 121, which is a control unit (control means), is configured as a computer including a CPU (Central Processing Unit) 121a, a RAM (Random Access Memory) 121b, a storage device 121c, and an I / O port 121d. The RAM 121b, the storage device 121c, and the I / O port 121d are configured to be able to exchange data with the CPU 121a via an internal bus 121e. An input / output device 122 configured as, for example, a touch panel is connected to the controller 121. An external storage device 123 can also be connected to the controller 121.

[0029] The storage device 121c is configured with, for example, a flash memory, an HDD (Hard Disk Drive), an SSD (Solid State Drive), etc. Control programs for controlling the operation of the substrate processing apparatus, process recipes describing procedures and conditions for substrate processing (described later), etc., are readably recorded and stored in the storage device 121c. The process recipe is a combination of procedures for substrate processing (described later) that are executed by the controller 121 in the substrate processing apparatus (substrate processing system) to obtain a predetermined result, and functions as a program. Hereinafter, the process recipes, control programs, etc. are collectively referred to simply as programs. The process recipes are also simply referred to as recipes. In this specification, the term "program" may refer to a recipe alone, a control program alone, or both. The RAM 121b is configured as a memory area (work area) for temporarily storing programs, data, etc. read by the CPU 121a.

[0030] The I / O port 121d is connected to the above-mentioned MFCs 241a to 241h, valves 243a to 243h, pressure sensor 245, APC valve 244, vacuum pump 246, temperature sensor 263, heater 207, rotation mechanism 267, boat elevator 115, shutter opening / closing mechanism 115s, RPU 300, etc.

[0031] The CPU 121a is configured to read and execute a control program from the storage device 121c, and to read a recipe from the storage device 121c in response to an input of an operation command from the input / output device 122. The CPU 121a is configured to control, in accordance with the contents of the read recipe, the flow rate adjustment operation of various substances (various gases) by the MFCs 241a to 241h, the opening and closing operation of the valves 243a to 243h, the opening and closing operation of the APC valve 244 and the pressure adjustment operation by the APC valve 244 based on the pressure sensor 245, the start and stop of the vacuum pump 246, the temperature adjustment operation of the heater 207 based on the temperature sensor 263, the rotation and rotation speed adjustment operation of the boat 217 by the rotation mechanism 267, the lifting and lowering operation of the boat 217 by the boat elevator 115, the opening and closing operation of the shutter 219s by the shutter opening and closing mechanism 115s, the plasma excitation operation of gas by the RPU 300, and the like.

[0032] The controller 121 can be configured by installing the above-mentioned program recorded and stored in the external storage device 123 into a computer. The external storage device 123 includes, for example, a magnetic disk such as an HDD, an optical disk such as a CD, a magneto-optical disk such as an MO, and a semiconductor memory such as a USB memory or an SSD. The storage device 121c and the external storage device 123 are configured as computer-readable recording media. Hereinafter, these will be collectively referred to simply as recording media. When the term recording media is used in this specification, it may include only the storage device 121c alone, only the external storage device 123 alone, or both. Note that the program may be provided to the computer using a communication means such as the Internet or a dedicated line, without using the external storage device 123.

[0033] (2) Substrate processing process A method of processing a substrate as one step in the manufacturing process of a semiconductor device using the above-described substrate processing apparatus (substrate processing system), i.e., an example of a processing sequence for forming a film on the first surface of the first and second surfaces of a wafer 200 serving as a substrate, will be described mainly with reference to Figures 4 and 5(a) to 5(d). Here, an example of a processing sequence for forming a film on the first surface of the first, second, third, and fourth surfaces of the wafer 200 will be described. In the following description, the operation of each component constituting the substrate processing apparatus is controlled by a controller 121.

[0034] As shown in FIG. 5(a), a recess is formed on the surface of the wafer 200. The bottom surface is made of a first material containing a first element, and the side and top surfaces are made of a second material containing a second element different from the first element. The depth direction is parallel to the surface of the wafer 200 (horizontal direction). The first surface is the bottom surface of the recess, and the second surface is the side surface or the side and top surface of the recess. The third and fourth surfaces are surfaces of portions of the surface of the wafer 200 that are different from the recess. The third surface is made of a third material containing a third element different from the first and second elements, and the fourth surface is made of a fourth material containing a fourth element different from the first, second, and third elements. The first element includes a Group 14 element, the second element includes a Group 14 element, the third element includes a Group 15 element, and the fourth element includes a Group 16 element.

[0035] FIG. 5(a) shows an example in which the first element is germanium (Ge), the second element is silicon (Si), the third element is nitrogen (N), and the fourth element is oxygen (O), the first material is silicon germanium (SiGe), the second material is silicon (Si), the third material is silicon nitride (SiN), and the fourth material is silicon oxide (SiO), and the wafer 200 is single-crystal Si. That is, the first material includes the second element in addition to the first element. The third material includes the second element in addition to the third element. The fourth material includes the second element in addition to the fourth element. The wafer 200 also includes the first element. That is, in this example, the first surface is composed of a silicon germanium film (SiGe film) as a germanium-containing film, the second surface is composed of a silicon film (Si film) as a silicon-containing film, the third surface is composed of a silicon nitride film (Si3N4 film, hereinafter also referred to as SiN film) as a nitrogen-containing film, and the fourth surface is composed of a silicon oxide film (SiO2 film, hereinafter also referred to as SiO film) as an oxygen-containing film.

[0036] More specifically, a layered structure formed by alternately stacking a first material (SiGe) and a second material (Si) is provided on the surface of the wafer 200, a third material (SiN) is provided thereon, and a fourth material (SiO) is provided thereon. The fourth material (SiO) is provided between the layered structure of the first material (SiGe) and the second material (Si) and the third material (SiN). That is, a layered structure formed by alternately stacking SiGe films and Si films is provided on the surface of the wafer 200, a SiO film is provided thereon, a SiN film is provided thereon, and a SiO film is provided thereon. By removing a portion of the SiGe film on the sidewall of the layered structure of the SiGe film and the Si film, a recess is provided on the sidewall of the layered structure, the top and side surfaces of which are made of the second material (Si) and the bottom surface of which is made of the first material (SiGe), with the depth direction being parallel to the surface of the wafer 200 (horizontal direction). In this specification, as shown in Figure 5(a), the portion of the recess made of the first material (SiGe) is referred to as the bottom surface, and based on that, the portion of the recess made of the second material (Si), which is in contact with the bottom surface and is arranged perpendicular to the bottom surface, is referred to as the side surface, and the portion of the recess made of the second material (Si), which is not in contact with the bottom surface and is arranged parallel to the bottom surface, is referred to as the top surface.

[0037] In addition, the symbols A, A1, A2, B, C, D, E, and F in Figure 4 represent steps A, A1, A2, B, C, D, E, and F, respectively, which will be described later, and the symbol P indicates purging performed in a step other than step D.

[0038] 4 includes step A1, in which an oxidizing agent and a reducing agent are excited into a plasma state and supplied to a wafer 200 having a first surface and a second surface; step A2, in which a reducing agent is excited into a plasma state and supplied to the wafer 200; and step B, in which the wafer 200 is heat-treated after step A is performed. The wafer 200 further has at least one of a third surface and a fourth surface. FIG. 5(a) shows an example in which the wafer 200 has a first surface (a surface of a SiGe film), a second surface (a surface of a Si film), a third surface (a surface of a SiN film), and a fourth surface (a surface of a SiO film).

[0039] It is preferable that the processing temperature in step B be equal to or higher than the processing temperature in step A. It is also preferable that the processing temperature in step B be equal to or higher than the processing temperatures in steps A and C. It is also preferable that the processing temperature in step B be equal to or higher than the processing temperatures in steps A, C, and D. The processing sequence shown in FIG. 4 illustrates an example in which the processing temperature in step B is higher than the processing temperature in step A. It is also preferable that the processing temperature in step B is higher than the processing temperatures in steps A and C. It is also preferable that the processing temperature in step B is higher than the processing temperatures in steps A, C, and D. In the processing sequence shown in FIG. 4, for example, the processing temperature in step B can be set to 100° C. or higher and 400° C. or lower.

[0040] In step A, high-density hydroxyl terminations (hereinafter also referred to as OH terminations or OH groups) are formed on the first and second surfaces of the wafer 200. In step B, the OH terminations formed on the first surface are removed while leaving the high-density OH terminations formed on the second surface. More specifically, in step A, high-density OH terminations are formed on the first, second, and at least one of the third and fourth surfaces of the wafer 200. In step B, the OH terminations formed on the first surface are removed while leaving the high-density OH terminations formed on the second, third, and at least one of the fourth surfaces. Note that in this embodiment, high-density OH terminations are formed on the first, second, and third surfaces of the wafer 200 in step A. Because the fourth surface is made of a SiO film, a sufficient amount of OH terminations are formed on the fourth surface before performing step A. However, if the OH terminations on the fourth surface are insufficient, the OH terminations on the fourth surface can be reinforced in step A. As a result, in this embodiment, by performing step A, it is possible to form a state in which high-density OH terminations are formed on each of the first surface, the second surface, the third surface, and the fourth surface (a state in which each surface has high-density OH terminations), and by performing step B, it is possible to remove the OH terminations formed on the first surface while maintaining a state in which high-density OH terminations are formed on each of the second surface, the third surface, and the fourth surface (a state in which each surface has high-density OH terminations).

[0041] That is, in step A, the first and second surfaces are oxidized (plasma oxidized) to modify the surface, and in step B, the oxide (oxide film) formed on the second surface is left behind, while the oxide formed on the first surface is sublimated and removed. More specifically, in step A, the first surface, the second surface, and at least one of the third and fourth surfaces are oxidized to modify the surface, and in step B, the oxide formed on the first surface is sublimated and removed, while the oxide formed on the second surface, the third surface, and at least one of the fourth surfaces is left behind. Note that in this embodiment, in step A, the first, second, and third surfaces of the wafer 200 are oxidized to modify the surface. Since the fourth surface is made of an SiO film, the fourth surface is not oxidized. However, if the fourth surface contains an element that can be oxidized, the fourth surface can also be oxidized to modify the surface. As a result, in this embodiment, by performing step A, the first, second, third, and fourth surfaces of wafer 200 can each be oxidized (each surface has an oxide), and by performing step B, the oxide formed on the first surface can be sublimated and removed while maintaining the second, third, and fourth surfaces in an oxidized state (each surface has an oxide). Note that in step A, the oxide formed on the first, second, and third surfaces of wafer 200 is composed of a very thin, uniform layer or film-like substance. This very thin, uniform layer or film-like oxide is also simply referred to as an oxide layer or oxide film.

[0042] By oxidizing and modifying each surface as described above, it is possible to form high-density OH terminations on each surface. Furthermore, by leaving (maintaining) oxides on a specific surface, it is possible to leave (maintain) high-density OH terminations on the specific surface. Furthermore, by sublimating and removing oxides on a specific surface, it is possible to remove the OH terminations on the specific surface. As a result, the second, third, and fourth surfaces have high-density OH terminations before performing step C. Meanwhile, the first surface has no OH terminations or has an amount of OH terminations that is much less than the amount of OH terminations on the second, third, and fourth surfaces before performing step C.

[0043] 4 further includes step C of forming an inhibitor layer on the second surface by supplying a modifying agent to the wafer 200 after step B has been performed. More specifically, in step C, an inhibitor layer is formed on the second surface and at least one of the third and fourth surfaces. In this embodiment, as shown in FIG. 5(b), an example is shown in which an inhibitor layer is formed on each of the second, third, and fourth surfaces. In this embodiment, a high-density inhibitor layer can be formed on each of the second, third, and fourth surfaces.

[0044] 4 further includes step D of forming a film on the first surface by supplying a film-forming agent to the wafer 200 after step C. Note that Fig. 5(c) shows an example in which a film is selectively grown on the first surface among the first, second, third, and fourth surfaces, thereby filling the recesses with the film.

[0045] 4, in step D, a cycle of non-simultaneously performing step D1 of supplying a raw material and a catalyst as film-forming agents to wafer 200 and step D2 of supplying a reactant and a catalyst as film-forming agents to wafer 200 is performed a predetermined number of times. This allows a film to grow starting from the first surface, i.e., the bottom surface of the recess, and the film grows bottom-up within the recess, thereby filling the recess with the film.

[0046] In this specification, the above-mentioned processing sequence may be expressed as follows for convenience. The same notation will be used in the following explanations of modified examples and other aspects. * ", "reducing agent * The expressions "oxidizing agent" and "reducing agent" respectively refer to an oxidizing agent and a reducing agent excited to a plasma state.

[0047] oxidizing agent * +Reducing agent * →Reducing agent * → Heat treatment → Modifier → (Feedstock + catalyst → Reactant + catalyst) × n

[0048] At this time, as in the process sequence shown below, depending on the process conditions, the catalyst may not be supplied, or the catalyst may be supplied to the wafer 200 in at least one of step D1 and step D2. Fig. 4 shows an example in which the catalyst is supplied to the wafer 200 in each of step D1 and step D2.

[0049] oxidizing agent * +Reducing agent * →Reducing agent * → Heat treatment → Modifier → (raw material → reactant) × n oxidizing agent * +Reducing agent * →Reducing agent * → Heat treatment → Modifier → (Feedstock + Catalyst → Reactant) × n oxidizing agent * +Reducing agent * →Reducing agent * → Heat treatment → Modifier → (raw material → reactant + catalyst) × n oxidizing agent * +Reducing agent* →Reducing agent * → Heat treatment → Modifier → (Feedstock + catalyst → Reactant + catalyst) × n

[0050] Furthermore, the processing sequence shown in FIG. 4 further includes step E, in which, after step D, wafer 200 is heated and heat-treated, thereby performing post-treatment, i.e., post-treatment (hereinafter also referred to as PT), on the film formed to fill the recesses.

[0051] 4 further includes step F of supplying an etching agent to wafer 200 and removing native oxide films formed on at least one of the first, second, third, and fourth surfaces before performing step A. In this embodiment, step F can remove native oxide films formed on the first, second, and third surfaces.

[0052] In this embodiment, the first surface is the surface of a SiGe film, the second surface is the surface of a Si film, the third surface is the surface of a SiN film, and the fourth surface is the surface of a SiO film. In step D, a silicon oxycarbide film (SiOC film), which is a film containing silicon (Si), oxygen (O), and carbon (C), or a silicon oxide film (SiO film), which is a film containing silicon (Si) and oxygen (O), is grown as the film.

[0053] The term "wafer" used in this specification may refer to the wafer itself or to a laminate of the wafer and a predetermined layer or film formed on its surface. The term "surface of a wafer" used in this specification may refer to the surface of the wafer itself or to the surface of a predetermined layer or the like formed on the wafer. When described in this specification, "forming a predetermined layer on a wafer" may mean forming a predetermined layer directly on the surface of the wafer itself or forming a predetermined layer on a layer or the like formed on the wafer. When used in this specification, the term "substrate" is synonymous with the term "wafer".

[0054] The term "agent" used in this specification includes at least one of a gaseous substance and a liquid substance. Liquid substances include mist substances. That is, each of the etching agent, oxidizing agent, reducing agent, modifier, and film-forming agent (raw material, reactant, catalyst) may contain a gaseous substance, a liquid substance such as a mist substance, or both.

[0055] The term "layer" as used herein includes at least one of a continuous layer and a discontinuous layer. For example, the inhibitor layer may include a continuous layer, a discontinuous layer, or both, as long as it is capable of exerting a film formation inhibitory effect (adsorption inhibitory effect, reaction inhibitory effect).

[0056] (Wafer charge and boat load) When a plurality of wafers 200 are loaded into the boat 217 (wafer charge), the shutter 219s is moved by the shutter opening / closing mechanism 115s, and the lower end opening of the manifold 209 is opened (shutter open). Thereafter, as shown in FIG. 1 , the boat 217 supporting the plurality of wafers 200 is lifted by the boat elevator 115 and carried into the processing chamber 201 (boat load). In this state, the seal cap 219 seals the lower end of the manifold 209 via the O-ring 220b. In this manner, the wafers 200 are prepared in the processing chamber 201.

[0057] (pressure and temperature regulation) After the boat loading is completed, the processing chamber 201, i.e., the space in which the wafers 200 are present, is evacuated (reduced pressure exhausted) by the vacuum pump 246 so that the interior of the processing chamber 201 is at a desired pressure (vacuum level). At this time, the pressure inside the processing chamber 201 is measured by the pressure sensor 245, and the APC valve 244 is feedback-controlled based on the measured pressure information. Furthermore, the wafers 200 inside the processing chamber 201 are heated by the heater 207 so that the processing temperature is at a desired processing temperature. At this time, the power supply to the heater 207 is feedback-controlled based on temperature information detected by the temperature sensor 263 so that the processing chamber 201 has a desired temperature distribution. Furthermore, the rotation mechanism 267 starts to rotate the wafers 200. The evacuation inside the processing chamber 201 and the heating and rotation of the wafers 200 are all continued at least until the processing of the wafers 200 is completed.

[0058] (Step F: Remove native oxide film) Then, an etching agent is supplied to the wafer 200.

[0059] Specifically, the valve 243e is opened to allow an etchant (etching gas) to flow into the gas supply pipe 232e. The flow rate of the etchant is adjusted by the MFC 241e, and the etchant is supplied into the processing chamber 201 via the gas supply pipe 232b and the nozzle 249b, and is exhausted from the exhaust port 231a. At this time, the etchant is supplied to the wafer 200 from the side of the wafer 200 (etchant supply). At this time, the valves 243f to 243h may be opened to supply an inert gas into the processing chamber 201 via the nozzles 249a to 249c, respectively.

[0060] By supplying an etching agent to the wafer 200 under processing conditions described below, it is possible to remove a native oxide film formed on the surface of the wafer 200. That is, it is possible to remove the native oxide film on the first and second surfaces of the wafer 200. Specifically, it is possible to remove the native oxide film on the surface of a recess formed on the surface of the wafer 200, the top and side surfaces of which are made of a Si film, the bottom surface of which is made of a SiGe film, and whose depth direction is parallel to the surface of the wafer 200 (lateral direction). It is also possible to remove the native oxide film on the third surface of the wafer 200. Specifically, it is possible to remove the native oxide film on the third surface of the wafer 200, which is a surface of a portion of the wafer 200 other than the recess and is made of a SiN film. Note that since the fourth surface of the wafer 200 is made of a SiO film, a native oxide film will not be formed on the fourth surface. However, if a native oxide film has formed on the fourth surface for some reason, it is possible to remove the native oxide film.

[0061] The processing conditions for supplying the etching agent in step F are as follows: Treatment temperature: room temperature (25°C) to 200°C, preferably 50 to 150°C Processing pressure: 10~13332Pa, 20~1333Pa Treatment time: 1 to 120 minutes, preferably 10 to 60 minutes Etching agent supply flow rate: 0.05 to 5 slm, preferably 0.5 to 2 slm Inert gas supply flow rate (per gas supply pipe): 0 to 20 slm is exemplified.

[0062] In this specification, when a numerical range such as "25 to 200°C" is expressed, it means that the lower limit and the upper limit are included in the range. Therefore, for example, "25 to 200°C" means "25°C or higher and 200°C or lower." The same applies to other numerical ranges. In this specification, the processing temperature means the temperature of the wafer 200 or the temperature inside the processing chamber 201, and the processing pressure means the pressure inside the processing chamber 201. A gas supply flow rate of 0 slm means that the gas is not supplied. These also apply to the following explanations.

[0063] After removing the native oxide film formed on the surface of the wafer 200, the valve 243e is closed to stop the supply of the etching agent into the processing chamber 201. Then, the processing chamber 201 is evacuated to remove gaseous substances remaining in the processing chamber 201. At this time, the valves 243f to 243h are opened to supply an inert gas into the processing chamber 201 through the nozzles 249a to 249c. The inert gas supplied from the nozzles 249a to 249c acts as a purge gas, thereby purging the processing chamber 201.

[0064] The processing conditions for purging in step F are as follows: Processing pressure: 1 to 30 Pa Treatment time: 1 to 120 seconds, preferably 1 to 60 seconds Inert gas supply flow rate (per gas supply pipe): 0.5 to 20 slm The processing temperature when purging in this step is preferably the same as the processing temperature when the etching agent is supplied.

[0065] As the etching agent, for example, a fluorine (F)-containing gas can be used. As the F-containing gas, for example, chlorine trifluoride (ClF3) gas, chlorine fluoride (ClF) gas, nitrogen fluoride (NF3) gas, hydrogen fluoride (HF) gas, fluorine (F2) gas, etc. can be used. Also, various cleaning solutions can be used as the etching agent. For example, an HF aqueous solution can be used as the etching agent to perform DHF cleaning. For example, a cleaning solution containing ammonia water, hydrogen peroxide water, and pure water can be used as the etching agent to perform SC-1 cleaning (APM cleaning). For example, a cleaning solution containing hydrochloric acid, hydrogen peroxide water, and pure water can be used as the etching agent to perform SC-2 cleaning (HPM cleaning). For example, a cleaning solution containing sulfuric acid and hydrogen peroxide water can be used as the etching agent to perform SPM cleaning. One or more of these can be used as the etching agent.

[0066] As the inert gas, nitrogen (N2) gas or a rare gas such as argon (Ar) gas, helium (He) gas, neon (Ne) gas, or xenon (Xe) gas can be used. This also applies to each step described later. As the inert gas, one or more of these can be used.

[0067] (Step A: Plasma treatment) Thereafter, step A1 of exciting an oxidizing agent and a reducing agent into a plasma state and supplying them to the wafer 200, and step A2 of exciting a reducing agent into a plasma state and supplying it to the wafer 200 are carried out in sequence.

[0068] [Step A1: First Plasma Treatment] In step A1, an oxidizing agent and a reducing agent are excited into a plasma state and supplied to the wafer 200.

[0069] Specifically, the valves 243e and 243b are opened, and an oxidizing agent and a reducing agent are respectively flowed into the gas supply pipes 232e and 232b. The flow rates of the oxidizing agent and the reducing agent are adjusted by the MFCs 241e and 241b, respectively, and the oxidizing agent and the reducing agent are mixed in the gas supply pipe 232b and excited into a plasma state by the RPU 300. The oxidizing agent and the reducing agent are then supplied into the processing chamber 201 through the nozzle 249b and exhausted from the exhaust port 231a. At this time, the oxidizing agent and the reducing agent excited into a plasma state are supplied to the wafer 200 from the side of the wafer 200 (oxidizing agent * +Reducing agent * (Supply). In this way, the oxidizing agent and reducing agent can be excited into a plasma state and supplied to the wafer 200, thereby supplying oxygen (O)-containing radicals, hydrogen (H)-containing radicals, and the like to the wafer 200. These radicals may include O radicals, H radicals, and OH radicals. The process using the oxidizing agent and reducing agent excited into a plasma state can be said to include at least one of plasma oxidation process, oxidizing agent plasma process (oxygen plasma process, etc.), plasma reduction process, reducing agent plasma process (hydrogen plasma process), and plasma oxidation-reduction process. At this time, the valves 243f to 243h may be opened to supply an inert gas into the process chamber 201 via the nozzles 249a to 249c, respectively, or no inert gas may be supplied.

[0070] By supplying an oxidizing agent and a reducing agent excited into a plasma state to the wafer 200 under processing conditions described below, OH terminations can be formed on the first and second surfaces of the wafer 200 after the native oxide film has been removed. More specifically, OH terminations can be formed on at least one of the first, second, third, and fourth surfaces of the wafer 200 after the native oxide film has been removed. In this embodiment, OH terminations can be formed on the first, second, and third surfaces of the wafer 200 after the native oxide film has been removed. Since the fourth surface is made of an SiO film, a sufficient amount of OH terminations are formed on the fourth surface before performing this step. However, if the OH terminations on the fourth surface are insufficient, this step can reinforce the OH terminations on the fourth surface. As a result, in this embodiment, by performing this step, OH terminations can be formed on each of the first, second, third, and fourth surfaces of the wafer 200 after the native oxide film has been removed (each surface has an OH termination).

[0071] That is, by supplying an oxidizing agent and a reducing agent excited into a plasma state to the wafer 200 under processing conditions described below, the first and second surfaces of the wafer 200 after the native oxide film has been removed can be oxidized (plasma oxidation). More specifically, at least one of the first, second, third, and fourth surfaces of the wafer 200 after the native oxide film has been removed can be oxidized. In this embodiment, the first, second, and third surfaces of the wafer 200 after the native oxide film has been removed can be oxidized. Since the fourth surface is made of an SiO film, the fourth surface will not be oxidized. However, if the fourth surface contains an element that can be oxidized, the fourth surface can also be oxidized. Thus, in this embodiment, by performing this step, the first, second, third, and fourth surfaces of the wafer 200 after the native oxide film has been removed can each be oxidized (a state in which each surface has an oxide). As a result, after the native oxide film is removed, OH terminations are formed on each of the first, second, third, and fourth surfaces of wafer 200 (each surface has OH terminations). As described above, the oxides formed on the first, second, and third surfaces of wafer 200 are composed of a very thin, uniform layer or film-like substance.

[0072] By performing this step, an oxide film (oxide), such as a silicon oxide film (SiO film), a germanium oxide film (GeO film), or a silicon germanium oxide film (SiGeO film), is formed on the first surface composed of the SiGe film, and OH termination is formed on the surface. An oxide film (oxide), such as a SiO film, is formed on the second surface composed of the Si film, and OH termination is formed on the surface. An oxide film (oxide), such as a SiO film or a silicon oxynitride film (SiON film), is formed on the third surface composed of the SiN film, and OH termination is formed on the surface. The fourth surface composed of the SiO film maintains its state, and the state in which OH termination is formed on the surface is maintained, or the OH termination on the surface is reinforced.

[0073] The processing conditions for supplying the oxidizing agent and the reducing agent after exciting them into a plasma state in step A1 are as follows: Treatment temperature: room temperature (25°C) to 300°C, preferably room temperature to 200°C Treatment pressure: 1 to 10,000 Pa, preferably 50 to 1,000 Pa Treatment time: 1 to 1000 seconds, preferably 60 to 500 seconds Oxidant supply flow rate: 0.01 to 1 slm, preferably 0.1 to 0.5 slm Reducing agent supply flow rate: 0.01 to 1 slm, preferably 0.1 to 0.5 slm Inert gas supply flow rate (per gas supply pipe): 0 to 10 slm RF power: 1 to 10,000 W, preferably 100 to 5,000 W is exemplified.

[0074] After OH terminations are formed on the first, second, and third surfaces of the wafer 200, and the first, second, third, and fourth surfaces are respectively formed with OH terminations, the valves 243e and 243b are closed to stop the supply of the oxidizing agent and reducing agent into the processing chamber 201. Then, gaseous substances remaining in the processing chamber 201 are removed from the processing chamber 201 (purging) using the same processing procedures and conditions as those for purging in step F. Note that the processing temperature during purging is preferably the same as the processing temperature during supply of the oxidizing agent and reducing agent excited into a plasma state.

[0075] As the oxidizing agent, for example, an oxygen (O)-containing gas can be used. As the O-containing gas, for example, oxygen (O) gas, ozone (O) gas, water vapor (HO gas), hydrogen peroxide (HO) gas, nitrous oxide (NO) gas, nitric oxide (NO) gas, nitrogen dioxide (NO) gas, carbon monoxide (CO) gas, carbon dioxide (CO) gas, etc. can be used. As the oxidizing agent, one or more of these can be used.

[0076] The reducing agent may be, for example, a hydrogen (H)-containing gas such as hydrogen (H) gas or a deuterium (D)-containing gas such as deuterium (D) gas. One or more of these may be used as the reducing agent. This also applies to step A2 described later.

[0077] [Step A2: Second Plasma Treatment] After step A1 is completed, step A2 is performed in which a reducing agent is excited into a plasma state and supplied to the wafer 200.

[0078] Specifically, the valve 243b is opened to allow the reducing agent to flow into the gas supply pipe 232b. The reducing agent has its flow rate adjusted by the MFC 241b, is excited into a plasma state by the RPU 300, and is then supplied into the processing chamber 201 through the nozzle 249b and exhausted from the exhaust port 231a. At this time, the reducing agent excited into a plasma state is supplied to the wafer 200 from the side of the wafer 200 (reducing agent * In this way, the reducing agent can be excited into a plasma state and supplied to the wafer 200, thereby supplying hydrogen (H)-containing radicals to the wafer 200. The H-containing radicals may include H radicals. The process using the reducing agent excited into a plasma state can be said to be a process including at least one of a plasma reduction process and a reducing agent plasma process (hydrogen plasma process). At this time, the valves 243f to 243h may be opened to supply an inert gas into the process chamber 201 through the nozzles 249a to 249c, respectively, or no inert gas may be supplied.

[0079] By exciting a reducing agent into a plasma state and supplying it to the wafer 200 under processing conditions to be described later, the first and second surfaces of the wafer 200 on which OH terminations are formed are treated with the reducing agent. * More specifically, the first surface, the second surface, the third surface, and / or the fourth surface of the wafer 200 on which OH termination is formed is treated with a reducing agent *In this embodiment, the first surface, the second surface, the third surface, and the fourth surface of the wafer 200 in a state where OH terminations are formed (a state where OH terminations are present) are each treated with a reducing agent. * The surface can be modified by plasma treatment using a silicon dioxide gas. This removes impurities such as carbon (C) and nitrogen (N) that may be present on each surface, increasing the purity of the oxide film (oxide) on each surface and improving the state of OH termination. This increases the density of OH termination (Si-OH termination) on each surface, creating a state in which each surface has a high density of OH termination. That is, by performing steps A1 and A2, it is possible to create a state in which each of the first, second, third, and fourth surfaces of the wafer 200 has a high density of OH termination.

[0080] At this time, since an oxide film (oxide) is formed on each surface, each surface is not directly exposed to the plasma-excited reducing agent, i.e., the H-containing radicals, and plasma damage to the underlying layers (SiGe film, Si film, SiN film, SiO film) constituting each surface can be prevented. Note that, if step A2 is performed before step A1, since no oxide film (oxide) is formed on each surface when step A2 is performed, each surface is directly exposed to the plasma-excited reducing agent, i.e., the H-containing radicals. As a result, the underlying layers (SiGe film, Si film, SiN film, SiO film) constituting each surface may be plasma-damaged. In particular, the Si film constituting the second surface tends to be more susceptible to plasma damage than other surfaces, and its shape may be changed by exposure to the H-containing radicals. In contrast, according to this embodiment, the oxide film (oxide) formed on each surface in step A1 acts as a protective film (block film, barrier film), and plasma damage to the underlying layers (SiGe film, Si film, SiN film, SiO film) constituting each surface can be prevented.

[0081] The processing conditions for exciting the reducing agent into a plasma state and supplying it in step A2 are as follows: Treatment temperature: room temperature (25°C) to 300°C, preferably room temperature to 200°C Treatment pressure: 1 to 10,000 Pa, preferably 50 to 1,000 Pa Treatment time: 1 to 1000 seconds, preferably 60 to 500 seconds Reducing agent supply flow rate: 0.01 to 1 slm, preferably 0.1 to 0.5 slm Inert gas supply flow rate (per gas supply pipe): 0 to 10 slm RF power: 1 to 10,000 W, preferably 100 to 5,000 W is exemplified.

[0082] The first surface, the second surface, the third surface, and the fourth surface of the wafer 200 in a state having OH termination are each treated with a reducing agent. * After the modification by plasma processing using the reducing agent, the valve 243b is closed to stop the supply of the reducing agent into the processing chamber 201. Then, gaseous substances remaining in the processing chamber 201 are removed from the processing chamber 201 (purging) using the same processing procedure and processing conditions as those used for purging in step F. Note that the processing temperature during purging is preferably the same as the processing temperature during the supply of the reducing agent after exciting it into a plasma state.

[0083] As the reducing agent, for example, the same reducing agents as those exemplified in step A1 above can be used.

[0084] (Step B: Heat treatment) After step A is completed, step B is performed. In step B, a heat treatment (annealing treatment) is performed on the wafer 200 after step A has been performed. In step B, the output of the heater 207 is adjusted to set the temperature of the wafer 200 to a state equal to or higher than the temperature of the wafer 200 in step A, preferably, to a state higher than the temperature of the wafer 200 in step A, and this state is maintained.

[0085] 4, the temperature of wafer 200, i.e., the processing temperature, in step B is set higher than the processing temperature in step A. As shown in FIG. 4, the processing temperature in step B is preferably set higher than the processing temperatures in steps A and C, and more preferably the processing temperature in step B is set higher than the processing temperatures in steps A, C, and D, and more preferably the processing temperature in step B is set higher than the processing temperatures in steps A, C, D, and F. Hereinafter, the processing temperature in step B will also be simply referred to as the heat treatment temperature.

[0086] 4, step B may be performed in parallel with purging performed after step A (step A2). That is, in step B, the heat treatment may be performed on the wafer 200 while supplying an inert gas into the processing chamber 201.

[0087] In this case, the valves 243f to 243h are opened to allow the inert gas to flow into the gas supply pipes 232a to 232c, respectively. The inert gas has its flow rate adjusted by the MFCs 241f to 241h, is supplied into the processing chamber 201 via the nozzles 249a to 249c, respectively, and is exhausted from the exhaust port 231a. At this time, the inert gas is supplied to the wafer 200 from the side of the wafer 200. However, after sufficient purging performed after step A (step A2), the inert gas may not be supplied into the processing chamber 201 in step B.

[0088] By subjecting the wafer 200 to a heat treatment under the processing conditions described below, it is possible to remove the OH terminations formed on the first surface of the wafer 200 while leaving the high-density OH terminations formed on the second surface of the wafer 200. More specifically, it is possible to remove the OH terminations formed on the first surface of the wafer 200 while leaving the high-density OH terminations formed on the second surface and at least one of the third and fourth surfaces of the wafer 200. Note that in this embodiment, the OH terminations formed on the first surface of the wafer 200 can be removed while maintaining the state in which the high-density OH terminations are formed on each of the second, third, and fourth surfaces of the wafer 200 (a state in which each surface has a high-density OH termination). Note that there are cases in which not all of the OH terminations formed on the first surface of the wafer 200 are removed, and only a small portion remains.

[0089] That is, by subjecting wafer 200 to a heat treatment under processing conditions described below, it is possible to sublimate and remove the oxide (e.g., a GeO film) formed on the first surface of wafer 200 while leaving the oxide formed on the second surface of wafer 200. More specifically, it is possible to sublimate and remove the oxide formed on the first surface of wafer 200 while leaving the oxide formed on the second surface and at least one of the third and fourth surfaces of wafer 200. Note that in this embodiment, it is possible to sublimate and remove the oxide formed on the first surface of wafer 200 while maintaining the second, third, and fourth surfaces of wafer 200 in an oxidized state (a state in which each surface has an oxide). Note that there are cases in which not all of the oxide formed on the first surface of wafer 200 is removed, and only a small portion remains.

[0090] In this way, among the first, second, third, and fourth surfaces of wafer 200, the oxide formed on the first surface can be selectively sublimated and removed because, under the processing conditions described below, oxides such as a GeO film formed on the first surface are more easily sublimated than oxides formed on the second, third, and fourth surfaces. Under the processing conditions described below, it is also possible to sublimate oxides such as a GeO film formed on the first surface while preventing oxides formed on the second, third, and fourth surfaces from sublimating. In other words, under the processing conditions described below, it is also possible to perform heat treatment under processing conditions in which oxides such as a GeO film formed on the first surface are sublimated but oxides formed on the second, third, and fourth surfaces are not sublimated.

[0091] By retaining (maintaining) oxides on the second, third, and fourth surfaces of wafer 200, high-density OH terminations can be retained on the second, third, and fourth surfaces. Sublimating and removing oxides on the first surface of wafer 200 removes the OH terminations on the first surface. As a result, the second, third, and fourth surfaces have high-density OH terminations before performing step C. Meanwhile, the first surface before performing step C has no OH terminations or a much smaller amount of OH terminations than the amount of OH terminations on the second, third, and fourth surfaces. That is, the amount (density, concentration) of OH terminations on the second, third, and fourth surfaces before performing step C can be greater than the amount (density, concentration) of OH terminations on the first surface. The amount (density, concentration) of OH terminations on the first surface can also be zero.

[0092] The processing conditions for the heat treatment of the wafer 200 in step B are as follows: Treatment temperature (heat treatment temperature): 100 to 400°C, preferably 100 to 350°C, more preferably 100 to 300°C Treatment pressure: 1 to 10,000 Pa, preferably 1 to 2,000 Pa Treatment time: 1 to 180 minutes, preferably 10 to 60 minutes Inert gas supply flow rate (per gas supply pipe): 0 to 20 slm is exemplified.

[0093] If the heat treatment temperature is less than 100°C, the oxides formed on the first surface of the wafer 200 may not be sufficiently sublimated, and the oxides may not be sufficiently removed. If the heat treatment temperature is 100°C or higher, the oxides formed on the first surface of the wafer 200 can be sufficiently sublimated and removed.

[0094] If the heat treatment temperature exceeds 400°C, at least a portion of the OH terminations on the second, third, and fourth surfaces of the wafer 200 may be desorbed and removed, resulting in a decrease in the density of OH terminations on these surfaces. In this case, the film-forming inhibitory effect (adsorption inhibitory effect, reaction inhibitory effect) of the inhibitor layer formed on the second, third, and fourth surfaces of the wafer 200 in step C may be reduced, resulting in a decrease in the selectivity of the selective growth in step D. By setting the heat treatment temperature to 400°C or less, the desorption and removal of the OH terminations on the second, third, and fourth surfaces of the wafer 200 can be sufficiently suppressed, and a decrease in the density of OH terminations on these surfaces can be sufficiently suppressed. In this case, the film-forming inhibitory effect of the inhibitor layer formed on the second, third, and fourth surfaces of the wafer 200 can be sufficiently obtained in step C, thereby ensuring sufficient selectivity in the selective growth in step D. Setting the heat treatment temperature to 350°C or less makes it possible to effectively suppress the desorption and removal of OH terminations on the second, third, and fourth surfaces of wafer 200, thereby effectively suppressing a decrease in the density of OH terminations on these surfaces. Setting the heat treatment temperature to 300°C or less makes it possible to more effectively suppress the desorption and removal of OH terminations on the second, third, and fourth surfaces of wafer 200, thereby effectively suppressing a decrease in the density of OH terminations on these surfaces.

[0095] For these reasons, in step B, the heat treatment temperature is desirably set to 100°C or higher and 400°C or lower, preferably 100°C or higher and 350°C or lower, and more preferably 100°C or higher and 300°C or lower.

[0096] While maintaining the second, third, and fourth surfaces of the wafer 200 in a state in which they each have an OH termination, the OH termination formed on the first surface of the wafer 200 is removed, and then gaseous substances remaining in the processing chamber 201 are removed (purged) from the processing chamber 201 using the same processing procedures and conditions as those used for purging in step F. Note that the processing temperature during purging is preferably the same as the processing temperature used when the wafer 200 is subjected to heat treatment, but may also be a temperature different from the processing temperature used when the wafer 200 is subjected to heat treatment.

[0097] (Step C: Inhibitor layer formation) After step B is completed, step C is performed. In step C, a modifying agent is supplied to the wafer 200 after step B has been performed.

[0098] Specifically, the valve 243a is opened to allow the modifying agent to flow into the gas supply pipe 232a. The flow rate of the modifying agent is adjusted by the MFC 241a, and the modifying agent is supplied into the processing chamber 201 through the nozzle 249a and exhausted from the exhaust port 231a. At this time, the modifying agent is supplied to the wafer 200 from the side of the wafer 200 (modifying agent supply). At this time, the valves 243f to 243h may be opened to supply an inert gas into the processing chamber 201 through each of the nozzles 249a to 249c. In step C, the output of the heater 207 is adjusted to set the temperature of the wafer 200 to a state equal to or lower than the temperature of the wafer 200 in step B, preferably to a state lower than the temperature of the wafer 200 in step B, and this state is maintained.

[0099] By supplying the modifying agent to the wafer 200 under processing conditions described below, as shown in FIG. 5(b), at least a portion of the molecular structure of the molecules constituting the modifying agent is selectively (preferentially) adsorbed at high density to the second, third, and fourth surfaces of the first, second, third, and fourth surfaces of the wafer 200, thereby forming a high-density inhibitor layer selectively (preferentially) on the second, third, and fourth surfaces. Specifically, while suppressing adsorption of at least a portion of the molecular structure of the molecules constituting the modifying agent to the first surface, the high-density OH groups terminating the second, third, and fourth surfaces are reacted with the modifying agent, thereby selectively adsorbing at least a portion of the molecular structure of the molecules constituting the modifying agent at high density to the second, third, and fourth surfaces. This makes it possible to densely terminate at least a portion of the molecular structure of the molecules constituting the modifying agent on the second, third, and fourth surfaces. In this manner, the second, third and fourth surfaces can be modified.

[0100] The inhibitor layer formed in this step contains at least a portion of the molecular structure of the molecules that make up the modifier, which is a residue derived from the modifier. The inhibitor layer prevents the raw material (film-forming agent) from adsorbing to the second, third, and fourth surfaces in Step D, which will be described later, and inhibits (suppresses) the progress of the film-forming reaction on the second, third, and fourth surfaces.

[0101] At least a portion of the molecular structure of the molecules constituting the modifier may be, for example, a trialkylsilyl group such as a trimethylsilyl group (Si-Me3) or a triethylsilyl group (Si-Et3). The trialkylsilyl group contains an alkyl group, i.e., a hydrocarbon group. In these cases, Si in the trimethylsilyl group or triethylsilyl group is densely chemically adsorbed to the second, third, and fourth surfaces of the wafer 200, and the outermost surfaces of the second, third, and fourth surfaces are densely terminated by alkyl groups such as methyl groups and ethyl groups, i.e., hydrocarbon groups. The alkyl groups (alkylsilyl groups) such as methyl groups (trimethylsilyl groups) and ethyl groups (triethylsilyl groups) that densely terminate the second, third, and fourth surfaces, i.e., hydrocarbon groups, act as inhibitor layers (film formation-inhibiting layer, adsorption-inhibiting layer, reaction-inhibiting layer) that prevent the adsorption of raw materials onto the second, third, and fourth surfaces in the film formation process (selective growth) described below, and inhibit the progress of film formation reactions on the second, third, and fourth surfaces.

[0102] In this step, at least a portion of the molecular structure of the molecules constituting the modifying agent may be adsorbed to a portion of the first surface of the wafer 200, but the amount of adsorption is small, and the amount of adsorption to the second, third, and fourth surfaces of the wafer 200 is overwhelmingly greater. Such selective (preferential) adsorption is possible because the processing conditions in this step are set to conditions that do not cause vapor-phase decomposition of the modifying agent in the processing chamber 201. Also, this is because the second, third, and fourth surfaces are densely OH-terminated throughout their entire areas, while most areas of the first surface are not OH-terminated. In this step, since the modifier does not undergo vapor-phase decomposition within the processing chamber 201, at least a portion of the molecular structure of the molecules that make up the modifier does not deposit multiple times on the first surface, the second surface, the third surface, and the fourth surface, and at least a portion of the molecular structure of the molecules that make up the modifier is selectively adsorbed at high density on the second surface, the third surface, and the fourth surface, thereby selectively terminating the second surface, the third surface, and the fourth surface at high density with at least a portion of the molecular structure of the molecules that make up the modifier.

[0103] The processing conditions for supplying the modifier in step C are as follows: Treatment temperature: room temperature (25°C) to 500°C, preferably room temperature to 250°C Treatment pressure: 5 to 2000 Pa, preferably 10 to 1000 Pa Processing time: 1 second to 120 minutes, preferably 30 seconds to 60 minutes Modifier supply flow rate: 0.001 to 3 slm, preferably 0.001 to 0.5 slm Inert gas supply flow rate (per gas supply pipe): 0 to 20 slm is exemplified.

[0104] After selectively forming a high-density inhibitor layer on the second, third, and fourth surfaces of the wafer 200, the valve 243a is closed to stop the supply of the modifying agent into the processing chamber 201. Then, gaseous substances remaining in the processing chamber 201 are removed (purged) from the processing chamber 201 using the same processing procedures and conditions as those for purging in step F. Note that the processing temperature during purging is preferably the same as the processing temperature during supply of the modifying agent.

[0105] As the modifier, for example, a compound having a structure in which an amino group is directly bonded to Si, or a compound having a structure in which an amino group and an alkyl group are directly bonded to Si can be used.

[0106] Examples of the modifier include (dimethylamino)silane ((CH3)2NSiH3), (diethylamino)silane ((C2H5)2NSiH3), (dipropylamino)silane ((C3H7)2NSiH3), (dibutylamino)silane ((C4H9)2NSiH3), (dimethylamino)trimethylsilane ((CH3)2NSi(CH3)3), (diethylamino)triethylsilane ((C2H5)2NSi(C2H5)3), (dimethylamino) Examples of compounds that can be used include triethylsilane ((CH3)2NSi(C2H5)3), (diethylamino)trimethylsilane ((C2H5)2NSi(CH3)3), (dipropylamino)trimethylsilane ((C3H7)2NSi(CH3)3), (dibutylamino)trimethylsilane ((C4H9)2NSi(CH3)3), (trimethylsilyl)amine ((CH3)3SiNH2), and (triethylsilyl)amine ((C2H5)3SiNH2).Further, examples of the modifier include bis(dimethylamino)dimethylsilane ([(CH3)2N]2Si(CH3)2), bis(diethylamino)diethylsilane ([(C2H5)2N]2Si(C2H5)2), bis(dimethylamino)diethylsilane ([(CH3)2N]2Si(C2H5)2), bis(diethylamino)dimethylsilane ([(C2H5)2N]2Si(CH3)2), bis(dimethylamino)silane ([(CH3)2N]2SiH2), bis(diethylamino)silane ([(C2H5)2N]2SiH2), bis(dimethylaminodimethylsilyl)ethane ([(CH3)2N(CH3)2Si]2C2H6), bis(dipropylamino)silane ([(C3H7)2N]2S iH2), bis(dibutylamino)silane ([(C4H9)2N]2SiH2), bis(dipropylamino)dimethylsilane ([(C3H7)2N]2Si(CH3)2), bis(dipropylamino)diethylsilane ([(C3H7)2N]2Si(C2H5)2), (dimethylsilyl)diamine ((CH3)2Si(NH2)2), (diethylsilyl)diamine ((C2H5)2Si(NH2)2), (dipropylsilyl)diamine ((C3H7)2Si(NH2)2), bis(dimethylaminodimethylsilyl)methane ([(CH3)2N(CH3)2Si]2CH2), bis(dimethylamino)tetramethyldisilane ([(CH3)2N]2(CH3)4Si2), etc. can also be used as the modifier. One or more of these can be used.

[0107] (Step D: Film formation process (selective growth)) After step C is completed, step D is performed. In step D, a film forming agent is supplied to the wafer 200 after step C is performed. In step D, the output of the heater 207 is adjusted to set the temperature of the wafer 200 to a state where it is equal to or lower than the temperature of the wafer 200 in step C, and steps D1 and D2 are performed sequentially while maintaining this state.

[0108] [Step D1: Formation of the first layer] In step D1, a raw material (raw material gas) and a catalyst (catalyst gas) are supplied as film forming agents to the wafer 200 after step C has been performed, i.e., the wafer 200 after a high-density inhibitor layer has been selectively formed on the second surface, the third surface, and the fourth surface.

[0109] Specifically, valves 243b and 243d are opened to allow the raw material and catalyst to flow into gas supply pipes 232b and 232d, respectively. The raw material and catalyst have their flow rates adjusted by MFCs 241b and 241d, are supplied into processing chamber 201 via nozzles 249b and 249a, are mixed in processing chamber 201, and are exhausted from exhaust port 231a. At this time, the raw material and catalyst are supplied to wafer 200 from the side of wafer 200 (raw material + catalyst supply). At this time, valves 243f to 243h may be opened to supply an inert gas into processing chamber 201 via nozzles 249a to 249c, respectively.

[0110] By supplying the raw material and catalyst to the wafer 200 under processing conditions described below, it is possible to selectively (preferentially) chemisorb at least a portion of the molecular structure of the molecules constituting the raw material onto the first surface of the wafer 200 while suppressing chemisorption of at least a portion of the molecular structure of the molecules constituting the raw material onto the second, third, and fourth surfaces of the wafer 200. As a result, a first layer is selectively (preferentially) formed on the first surface. The first layer contains at least a portion of the molecular structure of the molecules constituting the raw material, which is a residue of the raw material. In other words, the first layer contains at least a portion of the atoms constituting the raw material.

[0111] In this step, by supplying a catalyst together with the raw materials, the above-described reaction can proceed in a non-plasma atmosphere and at a low temperature, as described below. Thus, by forming the first layer in a non-plasma atmosphere and at a low temperature, as described below, it is possible to prevent the inhibitor layer formed on the second, third, and fourth surfaces of the wafer 200 from being removed and / or neutralized. Note that neutralization of the inhibitor layer means that the molecular structure and atomic arrangement of the molecules constituting the inhibitor layer change, allowing the film-forming agent to adsorb to the second, third, and fourth surfaces of the wafer 200 and for the film-forming agent to react with the second, third, and fourth surfaces.

[0112] Furthermore, by forming the first layer in a non-plasma atmosphere and under low temperature conditions as described below, it is possible to prevent the raw material from thermally decomposing (vapor-phase decomposition), i.e., from self-decomposing, in the processing chamber 201. This makes it possible to prevent at least a portion of the molecular structure of the molecules constituting the raw material from being deposited multiple times on the first, second, third, and fourth surfaces of the wafer 200, and makes it possible for the raw material to be selectively adsorbed onto the first surface among the first, second, third, and fourth surfaces of the wafer 200.

[0113] The processing conditions for supplying the raw material and catalyst in step D1 are as follows: Treatment temperature: room temperature (25°C) to 200°C, preferably room temperature to 150°C Processing pressure: 133~1333Pa Treatment time: 1 to 120 seconds, preferably 1 to 60 seconds Raw material supply flow rate: 0.001~2slm Catalyst supply flow rate: 0.001~2slm Inert gas supply flow rate (per gas supply pipe): 0 to 20 slm is exemplified.

[0114] After the first layer is selectively formed on the first surface of the wafer 200, the valves 243b and 243d are closed to stop the supply of the raw material and catalyst into the processing chamber 201. Then, gaseous substances remaining in the processing chamber 201 are removed (purged) from the processing chamber 201 using the same processing procedure and conditions as those for purging in step F. Note that the processing temperature during purging is preferably the same as the processing temperature during supply of the raw material and catalyst.

[0115] In this step, when the first layer is formed, at least a portion of the molecular structure of the molecules constituting the raw material may be adsorbed to portions of the second, third, and fourth surfaces of the wafer 200. However, the amount of adsorption is very small, and the amount of adsorption to the first surface of the wafer 200 is overwhelmingly greater. Such selective (preferential) adsorption is possible because the processing conditions in this step are the low temperature conditions described above, which are conditions under which the raw material does not undergo vapor-phase decomposition in the processing chamber 201. Also, this is because a high-density inhibitor layer is formed over the entire second, third, and fourth surfaces of the wafer 200, while no inhibitor layer is formed in most areas of the first surface of the wafer 200.

[0116] As a raw material, for example, a halosilane-based gas, i.e., a gas containing Si and a halogen (a Si and a halogen-containing substance), can be used. Examples of halogens include chlorine (Cl), fluorine (F), bromine (Br), and iodine (I). The Si and halogen-containing gas preferably contains halogen in the form of a chemical bond between Si and the halogen. Examples of the Si and halogen-containing gas include a silane-based gas having a Si-Cl bond, i.e., a chlorosilane-based gas. The Si and halogen-containing gas may further contain C, and in this case, it is preferable that C be contained in the form of a Si-C bond. Examples of the Si and halogen-containing gas include a silane-based gas containing Si, Cl, and an alkylene group and having a Si-C bond, i.e., an alkylenechlorosilane-based gas. Examples of alkylene groups include methylene, ethylene, propylene, and butylene groups. Examples of the Si and halogen-containing gas include a silane-based gas containing Si, Cl, and an alkyl group and having a Si-C bond, i.e., an alkylchlorosilane-based gas. Examples of alkyl groups include methyl, ethyl, propyl, and butyl groups. The Si- and halogen-containing gas may further contain O, and in this case, it is preferable that O is contained in the form of a Si-O bond, for example, in the form of a siloxane bond (Si-O-Si bond). As the Si- and halogen-containing gas, for example, a silane-based gas having Si, Cl, and a siloxane bond, i.e., a chlorosiloxane-based gas, can be used. It is preferable that all of these gases contain Cl in the form of a Si-Cl bond. In addition to these, amino group-containing gases (amino group-containing substances) such as aminosilane-based gases can also be used as raw materials.

[0117] Examples of usable raw materials include 1,1,3,3-tetrachloro-1,3-disilacyclobutane (C2H4Cl4Si2), 1,1,2,2-tetrachloro-1,2-dimethyldisilane ((CH3)2Si2Cl4), 1,2-dichloro-1,1,2,2-tetramethyldisilane ((CH3)4Si2Cl2), bis(trichlorosilyl)methane ((SiCl3)2CH2), 1,2-bis(trichlorosilyl)ethane ((SiCl3)2C2H4), etc. Also usable raw materials include tetrachlorosilane (SiCl4), hexachlorodisilane (Si2Cl6), octachlorotrisilane (Si3Cl8), etc. As raw materials, for example, hexachlorodisiloxane (ClSi-O-SiCl), octachlorotrisiloxane (ClSi-O-SiCl-O-SiCl), etc. can be used. As raw materials, for example, tetrakis(dimethylamino)silane (Si[N(CH)]), tris(dimethylamino)silane (Si[N(CH)]H), bis(diethylamino)silane (Si[N(CH)]H), bis(tertiarybutylamino)silane (SiH[NH(CH)]), (diisopropylamino)silane (SiH[N(CH)]), etc. can also be used. As raw materials, one or more of these can be used.

[0118] The catalyst may be, for example, an amine-based gas (amine substance) containing carbon (C), nitrogen (N), and hydrogen (H). The amine-based gas (amine substance) may be, for example, a chain amine-based gas (chain amine substance) or a cyclic amine-based gas (cyclic amine substance). The catalyst may be, for example, a chain amine such as triethylamine ((C2H5)3N), diethylamine ((C2H5)2NH), monoethylamine ((C2H5)NH2), trimethylamine ((CH3)3N), dimethylamine ((CH3)2NH), or monomethylamine ((CH3)NH2). The catalyst may also be, for example, aminopyridine (C5H6N2), pyridine (C5H5N), picoline (C6H7N), lutidine (C7H9N), pyrimidine (C4H4N2), quinoline (C9H7N), or piperazine (C4H10 N2), piperidine (CH 11 Cyclic amines such as cyclohexane (CHN) and aniline (CHN) can be used. One or more of these can be used as the catalyst. This also applies to the reactant supply step described below.

[0119] [Step D2: Forming the second layer] In step D2, a reactant (reactant gas) and a catalyst (catalyst gas) are supplied as film-forming agents to the wafer 200 after step D1 has been performed, i.e., the wafer 200 after the first layer has been selectively formed on the first surface. Here, an example will be described in which an oxidant (oxidizing gas) is used as the reactant (reactant gas).

[0120] Specifically, valves 243c and 243d are opened to allow reactants and catalysts to flow into gas supply pipes 232c and 232d, respectively. The reactants and catalysts are adjusted in flow rate by MFCs 241c and 241d, respectively, and supplied into processing chamber 201 via nozzles 249c and 249a, where they are mixed in processing chamber 201 and exhausted from exhaust port 231a. At this time, the reactants and catalysts are supplied to wafer 200 from the side of wafer 200 (reactant+catalyst supply). At this time, valves 243f to 243h may be opened to supply inert gas into processing chamber 201 via nozzles 249a to 249c, respectively.

[0121] By supplying a reactant and a catalyst to wafer 200 under processing conditions described below, it is possible to oxidize at least a portion of the first layer formed on the first surface of wafer 200 in step D1, thereby forming a second layer on the first surface that is the oxidized version of the first layer.

[0122] In this step, by supplying a catalyst together with the reactants, the above-described reaction can be carried out in a non-plasma atmosphere and at a low temperature, as described below. In this manner, by forming the second layer on the first surface in a non-plasma atmosphere and at a low temperature, as described below, it is possible to suppress removal and / or deactivation of the inhibitor layers formed on the second, third, and fourth surfaces of the wafer 200.

[0123] The process conditions for supplying the reactants and catalyst in step D2 are as follows: Treatment temperature: room temperature (25°C) to 200°C, preferably room temperature to 150°C Processing pressure: 133~1333Pa Treatment time: 1 to 120 seconds, preferably 1 to 60 seconds Reactant supply flow rate: 0.001~2slm Catalyst supply flow rate: 0.001~2slm Inert gas supply flow rate (per gas supply pipe): 0 to 20 slm is exemplified.

[0124] After the first layer formed on the first surface of wafer 200 is oxidized and converted into the second layer, valves 243c and 243d are closed to stop the supply of the reactant and catalyst into processing chamber 201. Then, gaseous substances remaining in processing chamber 201 are removed (purged) from processing chamber 201 using the same processing procedure and conditions as those for purging in step F. Note that the processing temperature during purging is preferably the same as the processing temperature during supply of the reactant and catalyst.

[0125] The reactant may be, for example, an oxidizing agent similar to the various oxidizing agents exemplified in step A1 above.The catalyst may be, for example, a catalyst similar to the various catalysts exemplified in step D1 above.

[0126] [Perform the specified number of times] By performing the above-described steps D1 and D2 asynchronously, i.e., alternately, a predetermined number of times (n times, where n is an integer of 1 or greater), a film can be selectively (preferentially) grown on the first surface among the first, second, third, and fourth surfaces of the wafer 200, as shown in FIG. 5(c), and the recesses can be filled with the film. That is, the film can be grown starting from the bottom of the recess, which is the first surface of the wafer 200, and the film can be grown bottom-up in the recesses to fill the recesses. For example, when using the above-described raw materials, reactants, and catalysts, a SiOC film or SiO film can be selectively grown on the first surface as the film, and the recesses can be filled with the SiOC film or SiO film. The above-described cycle is preferably repeated multiple times. That is, it is preferable to make the thickness of the second layer formed per cycle thinner than the desired film thickness, and to repeat the above-described cycle multiple times until the film formed by stacking the second layer reaches the desired film thickness.

[0127] By repeating the above-described cycle a predetermined number of times, a film can be grown starting from the bottom (first surface) of the recess on the surface of the wafer 200 toward the opening of the recess. At this time, a high-density inhibitor layer is formed on the second surface, which constitutes the top and side surfaces of the recess, thereby suppressing film growth starting from the second surface. Furthermore, a high-density inhibitor layer is also formed on the third and fourth surfaces, which are surfaces other than the recess on the surface of the wafer 200, thereby suppressing film growth starting from the third and fourth surfaces. That is, by repeating the above-described cycle a predetermined number of times, film growth starting from the bottom of the recess can be promoted while suppressing film growth starting from the top, side, and surfaces other than the recess. As a result, a film can be grown bottom-up in the recess, filling the recess as shown in FIG. 5(c).

[0128] In performing steps D1 and D2, as shown in FIG. 5(c), the inhibitor layers formed on the second, third, and fourth surfaces of the wafer 200 are maintained on the second, third, and fourth surfaces as described above, thereby suppressing film growth originating from the second, third, and fourth surfaces. However, if the inhibitor layers are not sufficiently formed on the second, third, and fourth surfaces due to some factor, film growth originating from the second, third, and fourth surfaces may be slight. Even in this case, however, the thickness of the film formed originating from the second, third, and fourth surfaces will be much thinner than the thickness of the film formed originating from the first surface. Therefore, even in this case, the recesses can be properly filled by the bottom-up growth described above.

[0129] (Step E:PT) After step D is completed, step E is performed. In step E, a heat treatment (annealing treatment) is performed on the wafer 200, thereby performing a post-treatment (PT) on the film formed to fill the recesses. At this time, the output of the heater 207 is adjusted so that the temperature inside the processing chamber 201, i.e., the temperature of the wafer 200 after the film has been formed to fill the recesses, is equal to or higher than the temperature of the wafer 200 in steps A, B, C, and D, and preferably higher than the temperature of the wafer 200 in these steps.

[0130] By performing PT on the wafer 200, impurities contained in the film formed to fill the recesses can be removed, defects can be repaired, and the film can be hardened. Hardening the film improves the processing resistance of the film, i.e., etching resistance.

[0131] Furthermore, by performing PT on the wafer 200, as shown in FIG. 5(d), the inhibitor layer on the second, third, and fourth surfaces of the wafer 200, i.e., the interface between the side surface of the recess and the film (SiOC), other side surfaces of the recess, the top surface of the recess, and surfaces other than the recess, can be removed and / or neutralized.

[0132] This step may be performed while an inert gas is supplied into the processing chamber 201, or while a reactive substance such as an oxidizing agent (oxidizing gas) is supplied. Supplying a reactive substance such as an oxidizing agent can effectively remove impurities contained in the film formed to fill the recess, repair defects, harden the film, and so on. This step also enhances the effect of removing and / or neutralizing inhibitor layers at the interface between the side surface of the recess and the film, other side surfaces of the recess, the top surface of the recess, and surfaces other than the recess. In this case, the reactive substance such as an inert gas or an oxidizing agent (oxidizing gas) is also referred to as an assist substance. The assist substance can also be excited into a plasma state and supplied, further enhancing the above-mentioned effects.

[0133] The processing conditions for performing PT in step E are as follows: Treatment temperature: 200 to 1000°C, preferably 400 to 700°C Processing pressure: 1 to 120,000 Pa Processing time: 1 to 18,000 seconds Assist material supply flow rate: 0 to 50 slm RF power: 0~10000W is exemplified.

[0134] In addition, if there is no need to remove impurities, repair defects, harden, etc. from the film formed to fill the recess, or if there is no need to remove and / or disable the inhibitor layer, step E can be omitted.

[0135] (After purging and atmospheric pressure recovery) After step E is completed (or after step D is completed if step E is omitted), an inert gas is supplied as a purge gas from each of the nozzles 249a to 249c into the processing chamber 201 and exhausted from the exhaust port 231a. This purges the processing chamber 201, and gases and reaction by-products remaining in the processing chamber 201 are removed from the processing chamber 201 (after-purge). Thereafter, the atmosphere in the processing chamber 201 is replaced with the inert gas (inert gas replacement), and the pressure in the processing chamber 201 is returned to normal pressure (atmospheric pressure return).

[0136] (Boat unloading and wafer discharging) Thereafter, the seal cap 219 is lowered by the boat elevator 115, and the lower end of the manifold 209 is opened. Then, the processed wafers 200, supported by the boat 217, are unloaded from the lower end of the manifold 209 to the outside of the reaction tube 203 (boat unloading). After the boat unloading, the shutter 219s is moved, and the opening at the lower end of the manifold 209 is sealed by the shutter 219s via the O-ring 220c (shutter close). After being unloaded to the outside of the reaction tube 203, the processed wafers 200 are removed from the boat 217 (wafer discharge).

[0137] (3) Effects of this mode According to this aspect, one or more of the following effects can be obtained.

[0138] (a) By performing step A including step A1 of exciting an oxidizing agent and a reducing agent into a plasma state and supplying them to the wafer 200 and step A2 of exciting a reducing agent into a plasma state and supplying them to the wafer 200, and step B of heat-treating the wafer 200 after step A, it is possible to achieve a state in which the second surface of the wafer 200 has a high density of OH terminations, and the first surface of the wafer 200 has no OH terminations or has an amount of OH terminations that is far less than the amount of OH terminations on the second surface of the wafer 200. That is, it is possible to achieve a state in which the amount (density, concentration) of OH terminations on the second surface of the wafer 200 is greater (higher) than the amount (density, concentration) of OH terminations on the first surface of the wafer 200. It is also possible to set the amount (density, concentration) of OH terminations on the first surface of the wafer 200 to zero. As a result, in step C, at least a portion of the molecular structure of the molecules constituting the modifier is selectively (preferentially) adsorbed at a high density onto the second surface of the wafer 200, thereby enabling a high-density inhibitor layer to be selectively (preferentially) formed on the second surface. Also, in step D, a film can be selectively (preferentially) grown with high precision on the first surface of the wafer 200 while suppressing film growth on the second surface of the wafer 200. As a result, it becomes possible to fill the recesses with a film with high selectivity while suppressing film growth on the second surface of the wafer 200.

[0139] (b) By performing step A, which includes step A1 of exciting an oxidizing agent and a reducing agent into a plasma state and supplying them to the wafer 200, and step A2 of exciting a reducing agent into a plasma state and supplying it to the wafer 200, and step B of heat-treating the wafer 200 after step A, it is possible to achieve a state in which the second surface and other surfaces (third and fourth surfaces) of the wafer 200 each have a high density of OH terminations, and the first surface of the wafer 200 has no OH terminations or has an amount of OH terminations that is far less than the amount of OH terminations on the second surface and other surfaces (third and fourth surfaces). That is, it is possible to achieve a state in which the amount (density, concentration) of OH terminations on the second surface and other surfaces (third and fourth surfaces) of the wafer 200 is greater (higher) than the amount (density, concentration) of OH terminations on the first surface of the wafer 200. Note that the amount (density, concentration) of OH terminations on the first surface of the wafer 200 can also be zero. As a result, in step C, at least a portion of the molecular structure of the molecules constituting the modifier is selectively (preferentially) adsorbed at high density to the second surface and other surfaces (third surface and fourth surface) of the wafer 200, thereby enabling a high-density inhibitor layer to be selectively (preferentially) formed on the second surface and other surfaces (third surface and fourth surface). Also, in step D, a film can be selectively (preferentially) grown with high precision on the first surface of the wafer 200 while suppressing film growth on the second surface and other surfaces (third surface and fourth surface) of the wafer 200. As a result, it becomes possible to fill the recesses with a film with high selectivity while suppressing film growth on the second surface and other surfaces (third surface and fourth surface) of the wafer 200.

[0140] (c) By selectively forming a high-density inhibitor layer on the second surface constituting the top and side surfaces of the recesses of the wafer 200, it is possible to suppress film growth originating from the top and side surfaces of the recesses while promoting film growth originating from the bottom surface of the recesses. This allows the film to grow from the bottom surface of the recesses toward the opening of the recesses, achieving bottom-up growth within the recesses. As a result, it is possible to fill the recesses with a film without creating voids or seams in the film. In other words, it is possible to form a void-free and seamless film within the recesses, thereby improving filling characteristics.

[0141] (d) By selectively forming a high-density inhibitor layer on the second surface and other surfaces (such as the third and fourth surfaces) constituting the top and side surfaces of the recesses of the wafer 200, it is possible to suppress film growth originating from the top and side surfaces of the recesses and other surfaces (such as the third and fourth surfaces) while promoting film growth originating from the bottom surfaces of the recesses. This allows the recesses to be filled with a film without growing a film on the top surface (the second surface) and other surfaces (such as the third and fourth surfaces). As a result, as shown in FIG. 5(c), it is possible to create a state in which no film (SiOC) is formed on the top surface of the recesses or on other surfaces (such as the third and fourth surfaces) at the end of the film formation process. Furthermore, as shown in FIG. 5(c), it is possible to fill the sidewalls of the recesses on the sidewalls of the layered structure formed by alternating layers of the first material (SiGe) and the second material (Si) on the surface of the wafer 200 with a film (SiOC), thereby flattening the sidewalls. This makes it possible to omit the process previously required after the film formation process of removing excess film formed on the top surface of the recess (second surface) and other surfaces (third surface and fourth surface) by etching.

[0142] As described above, even if an inhibitor layer is formed on the second, third, and fourth surfaces, slight film growth may occur starting from the second, third, and fourth surfaces due to some factors. In this case, a process of etching away excess film formed on the upper surface of the recess (the second surface) and other surfaces (the third and fourth surfaces) may be necessary. However, even in this case, the amount of excess film formed on the upper surface of the recess and other surfaces (the third and fourth surfaces) is very small, as described above, and this significantly reduces the load in the process of etching away excess film, thereby significantly shortening the time required for etching.

[0143] On the other hand, when filling the recess with a film using a conventional film formation method that performs only step D, as shown in FIG. 6(b), a film (SiOC) is formed on the entire sidewall of the layered structure formed by alternating layers of a first material (SiGe) and a second material (Si) on the surface of the wafer 200. A film (SiOC) is also formed on other surfaces (such as the third and fourth surfaces). In this case, as shown in FIG. 6(b), voids or seams may be formed in the film due to the shape of the recess. In this case, to fill the recess on the sidewall of the layered structure formed by alternating layers of the first and second materials with a film and flatten the sidewall, a process of etching excess film formed on the top surface of the recess is required. Furthermore, it may be necessary to etch films formed on other surfaces (such as the third and fourth surfaces). For example, if a substrate having the surface configuration shown in FIG. 6(b) undergoes a process of etching excess film formed on the top surfaces of the recesses and other surfaces (hereinafter referred to as the top surfaces of the recesses, etc.), a state in which no film is formed on the top surfaces of the recesses, etc., can be created, as shown in FIG. 6(c). However, in this case, as shown in FIG. 6(c), voids or seams formed in the film during film formation remain, and in some cases, the voids or seams become deeper due to etching, making it impossible to flatten the sidewalls of the layered structure formed by alternating layers of the first and second materials. Furthermore, when using conventional film formation techniques, a process of etching excess film is necessary, which increases the total processing time and reduces productivity.

[0144] In contrast, according to the present embodiment, as shown in FIG. 5(c), a void-free and seamless film can be formed in the recess while suppressing film growth on the upper surface of the recess. Furthermore, upon completion of the film formation process, the sidewalls of the recess, which are formed by alternating stacked layers of the first material (SiGe) and the second material (Si), can be filled with a film (SiOC), resulting in a flat sidewall. Furthermore, film growth on other surfaces (such as the third and fourth surfaces) can also be suppressed. This eliminates the need for a process of etching away excess film formed on the upper surface of the recess, which is essential in conventional film formation methods. Even if, for some reason, slight film growth originating from the upper surface of the recess occurs despite the formation of an inhibitor layer on the upper surface of the recess, the amount of excess film formed on the upper surface of the recess is minimal. This significantly reduces the load on the process of etching away the excess film and significantly shortens the etching time. That is, according to the present embodiment, void-free and seamless filling becomes possible, and not only can the filling characteristics be improved, but also the total processing time can be significantly shortened by omitting the step of etching away excess film or by reducing the load of the step of etching away excess film, thereby making it possible to significantly improve productivity.

[0145] (e) By setting the processing temperature in step B to be equal to or higher than the processing temperature in step A, it is possible to selectively sublimate and remove the oxide formed on the first surface of wafer 200 while leaving (maintaining) the OH terminations on the second, third, and fourth surfaces of wafer 200, thereby selectively removing the OH terminations on the first surface. Setting the processing temperature in step B higher than the processing temperature in step A makes it possible to perform these operations more effectively. In this case, it is preferable to set the processing temperature in step B to be equal to or higher than the processing temperatures in steps A and C. It is more preferable to set the processing temperature in step B higher than the processing temperatures in steps A and C. It is also preferable to set the processing temperature in step B to be equal to or higher than the processing temperatures in steps A, C, and D. It is more preferable to set the processing temperature in step B higher than the processing temperatures in steps A, C, and D.

[0146] These factors effectively ensure that the amount (density, concentration) of OH terminations on the second, third, and fourth surfaces of the wafer 200 before step C is greater than the amount (density, concentration) of OH terminations on the first surface of the wafer 200. The amount (density, concentration) of OH terminations on the first surface of the wafer 200 can also be set to zero. These factors effectively ensure that, in step C, at least a portion of the molecular structure of the modifier molecules is selectively (preferentially) adsorbed at high density on the second, third, and fourth surfaces of the wafer 200, thereby selectively (preferentially) forming a high-density inhibitor layer on these surfaces. As a result, it is possible to highly selectively fill the recesses with a film while suppressing film growth on the second, third, and fourth surfaces of the wafer 200. In step B, by simply adjusting the temperature of wafer 200, i.e., by simply heating wafer 200 at a predetermined temperature, it is possible to selectively sublimate and remove the oxide formed on the first surface of wafer 200 while leaving (maintaining) the OH terminations on the second, third, and fourth surfaces of wafer 200, thereby selectively removing the OH terminations on the first surface.

[0147] (f) Before performing step A, step F is performed to remove the native oxide film on the surface of the wafer 200. This removes the native oxide film unevenly formed on the first, second, and third surfaces of the wafer 200, thereby removing the OH termination unevenly formed on these surfaces. Then, step A is performed to uniformly oxidize the first, second, and third surfaces of the wafer 200, thereby forming very thin and uniform oxide films on these surfaces. As a result, OH terminations can be uniformly formed on these surfaces. Note that if the fourth surface is made of an SiO film, OH terminations are also uniformly formed on the fourth surface. Then, step B is performed to selectively sublimate and remove the oxide film uniformly formed on the first surface of the wafer 200, while leaving (maintaining) the OH terminations uniformly formed on the second, third, and fourth surfaces of the wafer 200. This selectively removes the OH terminations on the first surface. These allow at least a portion of the molecular structure of the molecules constituting the modifier to be more uniformly adsorbed onto the second, third, and fourth surfaces in step C, making it possible to form a more uniform inhibitor layer, and also to form a uniform film on the first surface in step D.

[0148] (g) After step D is completed, the film formed to fill the recesses can be subjected to a thermal treatment (PT) to remove impurities contained in the film formed to fill the recesses, repair defects, and harden the film. Furthermore, the inhibitor layer on the second, third, and fourth surfaces of the wafer 200, i.e., the interface between the side surface of the recesses and the film, other side surfaces of the recesses, the top surface of the recesses, and surfaces other than the recesses, can be removed and / or neutralized. These effects can be enhanced by maintaining the temperature of the wafer 200 at or above the temperature of the wafer 200 in steps A to D. These effects can be further enhanced by maintaining the temperature of the wafer 200 higher than the temperature of the wafer 200 in steps A to D. A reactive substance, such as an inert gas or an oxidizing agent (oxidizing gas), i.e., an assist substance, may be supplied into the processing chamber 201 at this time. Supplying the assist substance during the thermal treatment can enhance the above-mentioned effects. The assist substance may be excited into a plasma state and supplied at this time. This further enhances the above-mentioned effects.

[0149] (h) When the first surface of the wafer 200 is made of a film containing a first element and the second surface is made of a film containing a second element, the above-mentioned effects are significantly achieved. The first element includes a Group 14 element, and the second element includes a Group 14 element. When the first surface of the wafer 200 is made of a Ge-containing film and the second surface is made of a Si-containing film, the above-mentioned effects are more significantly achieved. When the first surface of the wafer 200 is made of a Si- and Ge-containing film and the second surface is made of a Si-containing film, the above-mentioned effects are even more significantly achieved.

[0150] (i) When the first surface of the wafer 200 is made of a film containing a first element, the second surface is made of a film containing a second element, the third surface is made of a film containing a third element, and the fourth surface is made of a film containing a fourth element, the above-mentioned effects are significantly achieved. The first element includes a Group 14 element, the second element includes a Group 14 element, the third element includes a Group 15 element, and the fourth element includes a Group 16 element. When the first surface of the wafer 200 is made of a Ge-containing film, the second surface is made of a Si-containing film, the third surface is made of an N-containing film, and the fourth surface is made of an O-containing film, the above-mentioned effects are more significantly achieved. When the first surface of the wafer 200 is made of a Si- and Ge-containing film, the second surface is made of a Si-containing film, the third surface is made of a Si- and N-containing film, and the fourth surface is made of a Si- and O-containing film, the above-mentioned effects are more significantly achieved.

[0151] (4) Variations The substrate processing sequence in this embodiment can be modified as shown in the following variations. These variations can be combined as desired. Unless otherwise specified, the processing procedures and processing conditions for each step in each variation can be the same as the processing procedures and processing conditions for each step in the substrate processing sequence described above.

[0152] (Variation 1) As shown in the processing sequence below, in step A, after steps A1 and A2 are performed, step A3 may be further performed in which an oxidizing agent and a reducing agent are excited into a plasma state and supplied to the wafer 200 after steps A1 and A2 have been performed. In this case, step A further includes step A3. That is, step A includes steps A1, A2, and A3. The processing procedure and processing conditions in step A3 may be the same as, for example, the processing procedure and processing conditions in step A1 described above.

[0153] oxidizing agent * +Reducing agent * →Reducing agent* →oxidizing agent * +Reducing agent * → Heat treatment → Modifier → (raw material → reactant) × n oxidizing agent * +Reducing agent * →Reducing agent * →oxidizing agent * +Reducing agent * → Heat treatment → Modifier → (Feedstock + Catalyst → Reactant) × n oxidizing agent * +Reducing agent * →Reducing agent * →oxidizing agent * +Reducing agent * → Heat treatment → Modifier → (raw material → reactant + catalyst) × n oxidizing agent * +Reducing agent * →Reducing agent * →oxidizing agent * +Reducing agent * → Heat treatment → Modifier → (Feedstock + catalyst → Reactant + catalyst) × n

[0154] This modification also provides the same effects as those of the above-described embodiment. Furthermore, according to this modification, by adding step A3 to step A, the density of OH terminations on the first, second, third, and fourth surfaces of wafer 200 can be further increased, making it possible to create a state in which each surface has a higher density of OH terminations. This allows the density of the inhibitor layer formed on the second, third, and fourth surfaces of wafer 200 to be further increased in step C, making it possible to further enhance the film formation inhibition effect (adsorption inhibition effect, reaction inhibition effect) of the inhibitor layer.

[0155] (Variation 2) Depending on the surface condition of the wafer 200, step F (removal of the native oxide film) may be omitted. For example, after forming a layered structure having a first surface (the surface of the SiGe film), a second surface (the surface of the Si film), a third surface (the surface of the SiN film), and a fourth surface (the surface of the SiO film) as shown in FIG. 5(a) on the surface of the wafer 200, each surface may be in an appropriate surface condition if the surface of the wafer 200 is not exposed to the atmosphere, the amount of exposure to the atmosphere is small, or the exposure time to the atmosphere is short. In such cases, step F can be omitted, and the processing sequence can be started from step A. This modification also achieves the same effects as the above-described embodiment. Furthermore, omitting step F can shorten the total processing time, thereby improving productivity.

[0156] (Variation 3) Step E may be omitted if the film formed to fill the recesses does not need to be subjected to impurity removal, defect repair, hardening, or the like, or if the inhibitor layer on each surface of the wafer 200 does not need to be removed and / or neutralized. For example, step E can be omitted if the amount of impurities, defects, and the like contained in the film formed to fill the recesses is within an acceptable range. Step E can also be omitted if the amount of residues and remnants of the inhibitor layer at the interface between the side surface of the recesses and the film, at other side surfaces of the recesses, at the top surface of the recesses, or at surfaces other than the recesses is within an acceptable range. Step E can also be omitted if the residues and remnants of the inhibitor layer at the interface between the side surface of the recesses and the film, at other side surfaces of the recesses, at the top surface of the recesses, or at surfaces other than the recesses are removed by reactions during the film formation process or post-film formation process. This modification also achieves the same effects as the above-described embodiment. Furthermore, omitting step E can shorten the total processing time and improve productivity.

[0157] <Other Aspects of the Present Disclosure> Although the embodiments of the present disclosure have been specifically described above, the present disclosure is not limited to the above embodiments and can be modified in various ways without departing from the spirit and scope of the present disclosure.

[0158] For example, in step F, an etching agent may be supplied to the wafer 200 after being plasma-excited. This increases the etching rate when etching a native oxide film. In step B, an inert gas may be supplied after being plasma-excited. This allows oxides such as GeO formed on the first surface to be removed by sublimation, and simultaneously allows plasma treatment of the first surface after the oxides have been removed. In step E, an inert gas or an assist substance may be supplied after being plasma-excited. This allows more effective removal of impurities contained in the film formed to fill the recess, repair of defects, and hardening of the film. This also increases the effectiveness of removing and / or neutralizing inhibitor layers at the interface between the side surface of the recess and the film, other side surfaces of the recess, the upper surface of the recess, and surfaces other than the recess.

[0159] Furthermore, in step D, not only an SiOC film or an SiO film but also a silicon oxide film such as a silicon oxycarbonitride film (SiOCN film), a silicon oxynitride film (SiON film), a silicon boron oxynitride film (SiBON film), a silicon boron oxycarbonitride film (SiBOCN film), etc. Also, in step D, a metal oxide film such as an aluminum oxide film (AlO film), a titanium oxide film (TiO film), a hafnium oxide film (HfO film), a zirconium oxide film (ZrO film), etc. may be formed.

[0160] It is preferable that the recipes used for each process are individually prepared according to the process content and recorded and stored in the storage device 121c via an electric communication line or the external storage device 123. Then, when starting each process, it is preferable that the CPU 121a appropriately selects an appropriate recipe according to the process content from the multiple recipes recorded and stored in the storage device 121c. This makes it possible to form films with various film types, composition ratios, film qualities, and film thicknesses with good reproducibility using a single substrate processing apparatus. It also reduces the burden on the operator, prevents operational errors, and enables each process to be started quickly.

[0161] The above-mentioned recipes do not necessarily have to be newly created, but may be prepared by modifying an existing recipe already installed in the substrate processing apparatus, for example. When modifying a recipe, the modified recipe may be installed in the substrate processing apparatus via an electric communication line or a recording medium on which the modified recipe is recorded. Alternatively, an existing recipe already installed in the substrate processing apparatus may be directly modified by operating the input / output device 122 provided in the existing substrate processing apparatus.

[0162] In the above-described embodiment, an example of forming a film using a batch-type substrate processing apparatus that processes multiple substrates at a time has been described. The present disclosure is not limited to the above-described embodiment and can be suitably applied, for example, to a case where a film is formed using a single-wafer substrate processing apparatus that processes one or several substrates at a time. Furthermore, in the above-described embodiment, an example of forming a film using a substrate processing apparatus having a hot-wall processing furnace has been described. The present disclosure is not limited to the above-described embodiment and can be suitably applied to a case where a film is formed using a substrate processing apparatus having a cold-wall processing furnace.

[0163] In the above-described embodiment, step F and steps A to E are sequentially performed in the same processing chamber (in-situ) of the same substrate processing apparatus (substrate processing system), i.e., in the same processing unit. The present disclosure is not limited to the above-described embodiment and can be suitably applied to a case where, for example, as shown in FIG. 7, a substrate processing system including multiple stand-alone substrate processing apparatuses (first substrate processing apparatus, second substrate processing apparatus, third substrate processing apparatus) is used and each step is performed in a different processing chamber (ex-situ), i.e., in a different processing unit, of each different substrate processing apparatus. In this case, for example, step F can be performed in the first substrate processing apparatus, step A can be performed in the second substrate processing apparatus, and steps B to E can be performed in the third substrate processing apparatus. Furthermore, if step A can be omitted, for example, step A can be performed in the first substrate processing apparatus, steps B to D can be performed in the second substrate processing apparatus, and step E can be performed in the third substrate processing apparatus. Furthermore, when step A and step E can be omitted, for example, step A can be performed in a first substrate processing apparatus, step B can be performed in a second substrate processing apparatus, and steps C to D can be performed in a third substrate processing apparatus. In this case, for example, two substrate processing apparatuses can be used, with step A being performed in the first substrate processing apparatus and steps B to D being performed in the second substrate processing apparatus. In these cases, the first substrate processing apparatus, second substrate processing apparatus, and third substrate processing apparatus are also referred to as the first processing apparatus, second processing apparatus, and third processing apparatus, respectively. Note that the above-mentioned embodiment can also be considered an example in which the first processing apparatus, second processing apparatus, and third processing apparatus are the same processing apparatus.

[0164] 8, the present invention can also be suitably applied to a case where a substrate processing system including a cluster-type substrate processing apparatus having multiple processing chambers (first processing chamber, second processing chamber, third processing chamber) arranged around a transfer chamber is used, and each step is performed in a different processing chamber, i.e., in a different processing section, of the same substrate processing apparatus. In this case, for example, step F can be performed in the first processing chamber, step A can be performed in the second processing chamber, and steps B to E can be performed in the third processing chamber. If step A can be omitted, for example, step A can be performed in the first processing chamber, steps B to D can be performed in the second processing chamber, and step E can be performed in the third processing chamber. If step A and step E can be omitted, for example, step A can be performed in the first processing chamber, step B can be performed in the second processing chamber, and steps C to D can be performed in the third processing chamber. In this case, for example, two processing chambers can be used, and step A can be performed in the first processing chamber and steps B to D can be performed in the second processing chamber. In these cases, the first processing chamber, the second processing chamber, and the third processing chamber are also referred to as the first processing section, the second processing section, and the third processing section, respectively. Note that the above-described embodiment can also be considered an example in which the first processing section, the second processing section, and the third processing section are the same processing section.

[0165] When using these substrate processing systems and substrate processing apparatuses, each process can be performed under the same processing procedures and conditions as in the above-described embodiment, and the same effects as in the above-described embodiment can be obtained.

[0166] The above-described embodiments can be used in combination as appropriate. In this case, the processing procedures and processing conditions can be the same as those of the above-described embodiments, for example. [Example]

[0167] As shown in Figure 5(a), a wafer had a layered structure on the surface consisting of alternating SiGe and Si films, on which a SiO film, a SiN film, and a SiO film were layered. The sidewalls of the layered structure of the SiGe and Si films had a recess with a top and side made of Si film and a bottom made of SiGe film, the depth direction of which was parallel to the wafer surface (horizontal direction). The wafer was subjected to the processing sequence described above to form a SiOC film to fill the recess, producing Evaluation Sample 1. A cross-sectional TEM image of Evaluation Sample 1 was then taken. Figure 9 shows the cross-sectional TEM image of Evaluation Sample 1.

[0168] A wafer having the same configuration as the wafer used to fabricate Evaluation Sample 1 was subjected to the processing sequence of Modification 1 described above to form an SiOC film so as to fill the recesses, thereby fabricating Evaluation Sample 2. A cross-sectional TEM image of Evaluation Sample 2 was then taken. Figure 10 shows the cross-sectional TEM image of Evaluation Sample 2.

[0169] As shown in Figures 9 and 10, in both Evaluation Sample 1 and Evaluation Sample 2, it was confirmed that the SiOC film was selectively formed only within the recesses, without being formed on the upper surfaces of the recesses (the surfaces of the Si film) or on other surfaces (the surfaces of the SiN film and SiO film). Furthermore, in both Evaluation Sample 1 and Evaluation Sample 2, it was confirmed that the SiOC film filled the recesses on the sidewalls of the layered structure formed by alternating SiGe and Si films, and that the sidewalls could be made flat. Furthermore, in both Evaluation Sample 1 and Evaluation Sample 2, it was confirmed that no voids or seams were generated in the SiOC film filling the recesses. Furthermore, in both Evaluation Sample 1 and Evaluation Sample 2, it was confirmed that no plasma damage occurred to the SiGe film, Si film, SiN film, or SiO film on the wafer surface. [Explanation of symbols]

[0170] 200 wafers (substrates)

Claims

1. (a) (a1) a step of exciting an oxidizing agent and a reducing agent into a plasma state and supplying them to a substrate having a first surface made of a first material and a second surface made of a second material different from the first material and provided at a position different from the first surface; and (a2) a step of exciting a reducing agent into a plasma state and supplying it to the substrate. (b) heat-treating the substrate after (a); (c) applying a modifier to the substrate after (b) to form an inhibitor layer on the second surface; A substrate processing method comprising:

2. 2. The substrate processing method according to claim 1, further comprising the step of: (d) supplying a film-forming agent to the substrate after (c) is performed, thereby forming a film on the first surface.

3. 2. The substrate processing method according to claim 1, further comprising: (a3) ​​exciting an oxidizing agent and a reducing agent into a plasma state and supplying the excited oxidizing agent and the reducing agent to the substrate after (a1) and (a2) have been performed.

4. 2. The substrate processing method according to claim 1, wherein the processing temperature in (b) is set to be equal to or higher than the processing temperature in (a).

5. 2. The substrate processing method according to claim 1, wherein the processing temperature in (b) is equal to or higher than the processing temperatures in (a) and (c).

6. 3. The substrate processing method according to claim 2, wherein the processing temperature in (b) is set to be equal to or higher than the processing temperatures in (a), (c) and (d).

7. 2. The substrate processing method according to claim 1, wherein the processing temperature in (b) is 100° C. or higher and 400° C. or lower.

8. 2. The substrate processing method of claim 1, wherein (a) an OH termination is formed on the first surface and the second surface, and (b) an OH termination formed on the first surface is removed while leaving the OH termination formed on the second surface.

9. 2. The substrate processing method of claim 1, wherein (a) oxidizes the first surface and the second surface, and (b) sublimes the oxide formed on the first surface while leaving the oxide formed on the second surface.

10. the substrate further has at least one of a third surface and a fourth surface; the third surface is made of a third material different from the first material and the second material, and is provided at a position different from the first surface and the second surface; 2. The substrate processing method of claim 1, wherein the fourth surface is made of a fourth material different from the first material, the second material, and the third material, and is provided at a position different from the first surface, the second surface, and the third surface.

11. 11. The substrate processing method of claim 10, wherein (a) forms OH terminations on the first surface, the second surface, and at least one of the third surface and the fourth surface, and (b) removes the OH terminations formed on the first surface while leaving the OH terminations formed on the second surface and at least one of the third surface and the fourth surface.

12. 11. The substrate processing method according to claim 10, wherein (a) oxidizes the first surface, the second surface, and at least one of the third surface and the fourth surface, and (b) sublimes the oxide formed on the first surface while leaving the oxide formed on the second surface and at least one of the third surface and the fourth surface.

13. the substrate further has at least one of a third surface and a fourth surface; the third surface is made of a third material different from the first material and the second material, and is provided at a position different from the first surface and the second surface; the fourth surface is made of a fourth material different from the first material, the second material, and the third material, and is provided at a position different from the first surface, the second surface, and the third surface; 2. The substrate processing method according to claim 1, wherein in step (c), the inhibitor layer is formed on the second surface and at least one of the third surface and the fourth surface.

14. the substrate further has at least one of a third surface and a fourth surface; the third surface is made of a third material different from the first material and the second material, and is provided at a position different from the first surface and the second surface; the fourth surface is made of a fourth material different from the first material, the second material, and the third material, and is provided at a position different from the first surface, the second surface, and the third surface; 3. The substrate processing method according to claim 2, wherein in step (c), the inhibitor layer is formed on the second surface and at least one of the third surface and the fourth surface.

15. 10. The substrate processing method according to claim 1, wherein the first surface is made of a germanium-containing film, and the second surface is made of a silicon-containing film.

16. 15. The substrate processing method according to claim 10, wherein the first surface is made of a germanium-containing film, the second surface is made of a silicon-containing film, the third surface is made of a nitrogen-containing film, and the fourth surface is made of an oxygen-containing film.

17. The substrate processing method according to any one of claims 1 to 9, wherein a recess is provided on the surface of the substrate, the first surface is a bottom surface of the recess, and the second surface is a side surface of the recess, or a side surface and an upper surface of the recess.

18. 15. The substrate processing method according to claim 10, wherein a recess is provided on the surface of the substrate, the first surface is a bottom surface of the recess, the second surface is a side surface of the recess, or a side surface and a top surface of the recess, and the third surface and the fourth surface are surfaces of portions of the surface of the substrate that are different from the recess.

19. (a) (a1) a step of exciting an oxidizing agent and a reducing agent into a plasma state and supplying them to a substrate having a first surface made of a first material and a second surface made of a second material different from the first material and provided at a position different from the first surface; and (a2) a step of exciting a reducing agent into a plasma state and supplying it to the substrate. (b) heat-treating the substrate after (a); (c) applying a modifier to the substrate after (b) to form an inhibitor layer on the second surface; A method for manufacturing a semiconductor device having the above structure.

20. A substrate processing system for processing a substrate, an oxidant supply system for supplying an oxidant to the substrate; a reducing agent supply system for supplying a reducing agent to the substrate; a plasma excitation unit that excites the oxidizing agent and the reducing agent into a plasma state; a heater for heating the substrate; a control unit configured to be able to control the oxidizing agent supply system, the reducing agent supply system, and the heater to perform the following processes: (a) (a1) a process of exciting the oxidizing agent and the reducing agent into a plasma state and supplying them to a substrate having a first surface made of a first material and a second surface made of a second material different from the first material and provided at a position different from the first surface; (a2) a process of exciting the reducing agent into a plasma state and supplying it to the substrate; (b) a process of heat-treating the substrate after (a) has been performed; and (c) a process of supplying a modifying agent to the substrate after (b) has been performed, thereby forming an inhibitor layer on the second surface; A substrate processing system comprising:

21. (a) (a1) a step of exciting an oxidizing agent and a reducing agent into a plasma state and supplying them to a substrate having a first surface made of a first material and a second surface made of a second material different from the first material and provided at a position different from the first surface; and (a2) a step of exciting a reducing agent into a plasma state and supplying it to the substrate. (b) heat-treating the substrate after (a); (c) applying a modifier to the substrate after (b) to form an inhibitor layer on the second surface; A program that causes a computer to execute the above in a substrate processing apparatus.

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