Tilt adjustment device

Abstract

To provide a tilt adjusting device capable of adjusting a reference surface and a first crimping tool end face parallel without generating a load on the reference surface during the operation of adjusting the reference surface parallel to the first crimping tool end face.SOLUTION: A control device 70 has an actuator control unit 71 that drives a first bellows actuator A1 to a fourth bellows actuator A4. The control device 70 drives the first bellows actuator A1 to the fourth bellows actuator A4 by the actuator control unit 71 so that a reference surface and a first crimping tool end surface are parallel based on the results measured by an inclination detection sensor 80.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to an inclination adjustment device. [Background technology]

[0002] 2. Description of the Related Art Conventionally, a bonding device in a semiconductor manufacturing device that bonds a workpiece to a reference stage includes a copying device that adjusts a tool having a crimping tool end face and the reference stage so that they are parallel to each other. For example, Patent Document 1 discloses a copying device including a device base having a concave hemispherical surface and a copying member including a tool and a moving body having a convex hemispherical surface with the same radius of curvature as the concave hemispherical surface of the device base. The copying device disclosed in Patent Document 1 also includes a holding member that engages with the copying member and an actuator that presses the copying member against the device base via the holding member. The copying member is attached to the device base so that its convex and concave hemispherical surfaces overlap and can rotate along the concave hemispherical surface. The copying device presses the tip surface of the tool, which is the end surface of the crimping tool, against the top surface of the reference stage and rotates the copying member along the concave hemispherical surface of the device base, thereby copying the copying member so that it is parallel to the reference stage. The copying device maintains the copying state of the copying member by pressing the copying member, which is parallel to the reference stage, against the device base via the holding member using the actuator. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 4081247 Summary of the Invention [Problem to be solved by the invention]

[0004] In conventional copying devices, there is a risk of a load being generated on the reference stage during a copying operation that adjusts the tool tip surface and the reference stage so that they are parallel. The present invention has been made in view of these circumstances, and its object is to provide an inclination adjustment device that can adjust the reference surface and the end face of the first crimping tool so that they are parallel without generating a load on the reference surface during the operation of adjusting the reference surface and the end face of the first crimping tool so that they are parallel. [Means for solving the problem]

[0005] [Aspect 1] a crimping tool having a second crimping tool end face that is a convex spherical surface and a first crimping tool end face that is attached to the first crimping tool end face, and a first base end face that is a concave spherical surface that engages with the second crimping tool end face, and a second crimping tool end face that is a convex spherical surface and a second crimping tool end face that is a concave spherical surface that engages with the second crimping tool end face, and an apparatus base having two base end faces as base end faces, and a base inner peripheral surface that defines an insertion hole through which the drive shaft is inserted and connects the second base end face and the first base end face, wherein the tilt adjustment device adjusts the tilt of the oscillator so that a reference plane and the first crimping tool end face are parallel while oscillating the second oscillator end face along the first base end face, and wherein an axial end of the drive shaft is different from a first drive shaft end on the oscillator side. a spherical tip portion provided at a second drive shaft end, which is an end portion of the second base, and protruding from the second base end face; a positioning mechanism provided on the second base end face and positioning the spherical tip portion; a tilt detection sensor measuring the tilt of the first crimping tool end face relative to the reference plane; and a control device controlling the positioning mechanism, wherein the positioning mechanism changes the position of the spherical tip portion in a plane parallel to the second base end face and comprises a plurality of actuators arranged to surround the spherical tip portion along the second base end face, and the control device comprises an actuator control unit that drives the plurality of actuators, and the actuator control unit drives the plurality of actuators based on the results measured by the tilt detection sensor so that the reference plane and the first crimping tool end face are parallel.

[0006] [Aspect 2] A tilt adjustment device as described in [Aspect 1], which includes a driver having an inner surface against which the tip spherical portion slides while defining an insertion hole into which the tip spherical portion is inserted, and the multiple actuators are arranged to surround the driver along the second base end face and change the position of the tip spherical portion in a plane parallel to the second base end face via the driver.

[0007] [Aspect 3] The tilt adjustment device described in [Aspect 2], wherein the driver comprises a cylindrical bearing that defines the insertion hole and a bearing holder that holds the cylindrical bearing, and the central axis of the cylindrical bearing extends in the axial direction of the device base.

[0008] [Aspect 4] The cylindrical bearing has an inner diameter smaller than the diameter of the tip spherical portion, and has a gap extending in the axial direction of the cylindrical bearing so that the inner diameter of the cylindrical bearing can be expanded.

[0009] [Aspect 5] A tilt adjustment device according to any one of [Aspect 1] to [Aspect 4], comprising an air bearing port and an air bearing that receives air supply and exhaust from the air bearing port, the first base end surface being the air bearing surface of the air bearing, the device base supporting the oscillator so that it can oscillate away from the air bearing surface, and fixing the tilted attitude of the oscillator by vacuum suction through the air bearing port.

[0010] [Aspect 6] A tilt adjustment device described in any one of [Aspect 2] to [Aspect 5], wherein the driving body is connected to the plurality of actuators via a plurality of linear slide mechanisms, and the positioning mechanism moves the driving body by pushing and pulling the driving body via each of the plurality of linear slide mechanisms using each of the plurality of actuators.

[0011] [Aspect 7] A tilt adjustment device described in any one of [Aspect 2] to [Aspect 6], wherein the plurality of actuators include four bellows actuators, and the four bellows actuators form two bellows actuator pairs each consisting of two opposing bellows actuators, and each of the two bellows actuator pairs holds the driving body between them.

[0012] [Aspect 8] A tilt adjustment device as described in [Aspect 7], which has a housing portion that is attached to the end surface of the second base and houses the four bellows actuators, and is polygonal when viewed in the axial direction of the device base, and both ends of each of the two pairs of bellows actuators are fixed to each corner of the housing portion.

[0013] [Aspect 9] The tilt adjustment device according to [Aspect 7] or [Aspect 8], wherein the four bellows actuators are arranged so that the two straight lines formed by each of the two bellows actuator pairs are perpendicular to each other.

[0014] [Aspect 10] The control device is equipped with a drive amount calculation unit that calculates the value of pressure to be supplied to each of the four bellows actuators required to make the reference plane and the first crimping tool end face parallel based on the inclination of the first crimping tool end face relative to the reference plane measured by the inclination detection sensor, and the actuator control unit drives the four bellows actuators based on the result of the drive amount calculation unit.A tilt adjustment device described in any one of [Aspect 7] to [Aspect 9].

[0015] [Aspect 11] A tilt adjustment device described in any one of [Aspect 1] to [Aspect 10], which is equipped with a locking mechanism including: an intermediate spherical portion located on the drive shaft between the oscillator and the tip spherical portion; a locking member that is arranged to be able to move back and forth in the axial direction of the device base along the inner surface of the base and is arranged spaced apart from the outer surface of the drive shaft and has an inner surface that surrounds the drive shaft; and a retaining portion through which the drive shaft is inserted and has an inner surface that engages with the intermediate spherical portion.

[0016] [Aspect 12] The tilt adjustment device described in [Aspect 11] includes a support member positioned between the inner surface of the locking member and the outer surface of the drive shaft, and having an inner surface of the support member that is spaced from the drive shaft and surrounds the drive shaft, a first seal that seals between the support member and the locking member, a second seal that seals between the locking member and the device base, a locking air supply / discharge chamber defined by the locking member, the device base, and the support member, and a locking port that supplies and discharges air to and from the locking air supply / discharge chamber.

[0017] [Aspect 13] a lock chamber formed by the inner circumferential surface of the locking member and the inner circumferential surface of the support member, and communicating with the storage space via a gap between the locking member and the retaining portion; a ventilation port provided on the device base and communicating with the storage space, an air bearing port, and an air bearing that receives air supply and exhaust from the air bearing port, wherein the first base end surface is an air bearing surface of the air bearing, the device base supports the oscillator so that it can oscillate at a distance from the air bearing surface, and the ventilation port communicates with the gap formed by the oscillator and the air bearing via the lock chamber, and communicates with the outside of the tilt adjustment device via the storage space.

[0018] [Aspect 14] a lock chamber formed by the inner circumferential surface of the locking member and the inner circumferential surface of the support member, and communicating with the storage space via a gap between the locking member and the retaining portion; a ventilation port provided on the device base and communicating with the storage space, an air bearing port, and an air bearing that receives air supply and exhaust from the air bearing port, wherein the first base end surface is an air bearing surface of the air bearing, the device base supports the oscillatory body at a distance from the air bearing surface so that it can oscillate, and the storage space communicates with the outside of the device base via the ventilation port and communicates with the air bearing port via the lock chamber. [Effects of the Invention]

[0019] According to the present invention, when adjusting the reference surface and the end face of the first crimping tool so that they are parallel to each other, the reference surface and the end face of the first crimping tool can be adjusted so that they are parallel to each other without generating a load on the reference surface. [Brief explanation of the drawings]

[0020] [Figure 1] FIG. 1 is a perspective view showing an inclination adjustment device. [Figure 2] FIG. 2 is a vertical cross-sectional view showing the tilt adjustment device. [Figure 3] FIG. 3 is an exploded view showing the positioning mechanism. [Figure 4] FIG. 4 is an exploded view showing the drive shaft and the driver. [Figure 5] FIG. 5 is a block diagram showing the relationship between the control device, the tilt detection sensor, and the first to fourth bellows actuators. [Figure 6] FIG. 6 is a horizontal cross-sectional view showing the positioning mechanism. [Figure 7] FIG. 7 is a horizontal cross-sectional view showing the positioning mechanism. [Figure 8] FIG. 8 is a vertical cross-sectional view showing the tilt adjustment device. [Figure 9] FIG. 9 is an enlarged vertical cross-sectional view showing the locking mechanism. [Figure 10] FIG. 10 is a vertical cross-sectional view schematically showing the operation of the tilt adjusting device. [Figure 11] FIG. 11 is a horizontal cross-sectional view of a positioning mechanism in a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0021] Hereinafter, one embodiment of the tilt adjustment device will be described with reference to FIGS. <Overall view of the tilt adjustment device> As shown in FIGS. 1 to 5, the tilt adjusting device 100 includes a crimping portion rocking body 20, a device base 30, a locking mechanism 40, a positioning mechanism 50, a control device 70, and a tilt detecting sensor 80.

[0022] <Crimping part oscillator> 2, 4 and 9, the crimping portion oscillator 20 is integrally formed with the crimping tool 10 that crimps the workpiece, the oscillator 21, the drive shaft 22, and the spherical tip portion 23. The direction in which the crimping portion axis LP of the crimping portion oscillator 20 extends coincides with the direction in which the crimping tool 10, the oscillator 21, the drive shaft 22, and the spherical tip portion 23 are aligned.

[0023] The crimping tool 10 is columnar and has a first crimping tool end face 10a and a second crimping tool end face 10b as end faces. The first crimping tool end face 10a is the opposite face to the second crimping tool end face 10b in the axial direction of the crimping tool 10. Therefore, the crimping tool 10 has the second crimping tool end face 10b, and also has an end face different from the second crimping tool end face 10b as the first crimping tool end face 10a. The crimping tool 10 is attached to the oscillator 21 so that the first crimping tool end face 10a faces a reference plane S, which will be described later, and so that the second crimping tool end face 10b faces a first oscillator end face 21a, which will be described later. That is, the crimping tool 10 has a second crimping tool end face 10b attached to the first oscillator end face 21a, and also has an end face different from the second crimping tool end face 10b as a first crimping tool end face 10a.

[0024] The oscillator 21 has a cylindrical shape and includes a first oscillator end face 21a to which the crimping tool 10 is attached and a second oscillator end face 21b that is a convex spherical surface. The oscillator 21 also has an oscillator insertion hole 21d defined by an oscillator inner circumferential surface 21c at the second oscillator end face 21b. A female thread is formed on the oscillator inner circumferential surface 21c, and a male thread formed on a first drive shaft end portion 22a of a drive shaft 22 (described later) is threadedly engaged with the female thread. This allows the drive shaft 22 to protrude from the second oscillator end face 21b of the oscillator 21. The axial direction of the oscillator 21 coincides with the direction in which the crimping portion axis LP extends. The axial direction of the oscillator insertion hole 21d coincides with the axial direction of the oscillator 21. The first oscillator end face 21a and the second oscillator end face 21b are end faces of the oscillator 21 that are located on opposite sides of each other in the axial direction.

[0025] The drive shaft 22 has a cylindrical shape extending from the first drive shaft end 22a to the second drive shaft end 22b. The axial direction of the drive shaft 22 coincides with the direction in which the crimping portion axis LP extends. The drive shaft 22 has an intermediate spherical portion 22d between the first drive shaft end 22a and the second drive shaft end 22b. The intermediate spherical portion 22d is formed by bulging a portion of the drive shaft outer circumferential surface 22c in the radial direction of the drive shaft 22. The intermediate spherical portion 22d has a convex hemispherical surface whose diameter decreases in the direction from the second drive shaft end 22b to the first drive shaft end 22a.

[0026] The second drive shaft end 22b of the drive shaft 22 is provided with a tip spherical portion 23. That is, the tip spherical portion 23 is provided at the second drive shaft end 22b, which is the axial end of the drive shaft 22 that is different from the first drive shaft end 22a on the oscillator 21 side. The intermediate spherical portion 22d is provided on the drive shaft 22, between the oscillator 21 and the tip spherical portion 23. The tip spherical portion 23 is spherical. The axial direction of the tip spherical portion 23 coincides with the extension direction of the crimping portion axis LP. The tip spherical portion 23 has an insertion hole defined by the tip spherical portion inner circumferential surface 23a. The insertion hole extends in the direction of the crimping portion axis LP. The second drive shaft end 22b of the drive shaft 22 is inserted into the insertion hole.

[0027] <Equipment base> As shown in FIGS. 2, 3, and 9, the device base 30 has a columnar shape with a first base end face 30a as a first axial end face and a second base end face 30b as a second axial end face. Therefore, the device base 30 has a second base end face 30b as an end face different from the first base end face 30a. The device base 30 has an extension portion 30e to increase the area of ​​the second base end face 30b compared to the area of ​​the first base end face 30a. The extension portion 30e is a portion of the device base 30 that extends outward in a flat plate shape from the first base end face 30a. The device base 30 has a base axis LB that is perpendicular to the first base end face 30a and the second base end face 30b. In the following description, the direction in which the base axis LB extends will be referred to as the axial direction of the device base 30. The device base 30 has a base inner peripheral surface 30c that defines a base insertion hole 30d that extends in the axial direction of the device base 30. The base inner peripheral surface 30c connects the second base end face 30b and the first base end face 30a. As will be described later, the drive shaft 22 is inserted through the base insertion hole 30d. In other words, the device base 30 has the base inner peripheral surface 30c that defines the base insertion hole 30d through which the drive shaft 22 is inserted and connects the second base end face 30b and the first base end face 30a.

[0028] The first base end face 30a is a concave spherical surface. The radius of curvature of the first base end face 30a is the same as the radius of curvature of the second oscillator end face 21b, which is a convex spherical surface. The first base end face 30a engages with the second oscillator end face 21b. In other words, the device base 30 has the first base end face 30a, which is a concave spherical surface, that engages with the second oscillator end face 21b. Almost the entire first base end face 30a is formed of an annular porous material 37 that serves as an air bearing. Therefore, the first base end face 30a is the air bearing surface of the air bearing.

[0029] The second base end surface 30b is a flat surface and is formed by using an extension portion 30e. The device base 30 has an air bearing air supply / discharge chamber 32. The air bearing air supply / discharge chamber 32 communicates with the outside of the device base 30 via a plurality of holes that the annular porous material 37 has.

[0030] As shown in FIG. 9, the base inner peripheral surface 30c is formed by a first base inner peripheral surface 301c and a second base inner peripheral surface 302c. The first base inner peripheral surface 301c is located on the first base end surface 30a side of the base inner peripheral surface 30c. The second base inner peripheral surface 302c is located on the second base end surface 30b side of the base inner peripheral surface 30c. The inner diameter of the second base inner peripheral surface 302c is larger than the inner diameter of the first base inner peripheral surface 301c. The first base inner peripheral surface 301c and the second base inner peripheral surface 302c are connected by a base step surface 303c. The base step surface 303c is perpendicular to the first base inner peripheral surface 301c and the second base inner peripheral surface 302c and is parallel to the second base end surface 30b. That is, the base step surface 303c faces away from the first base end surface 30a and faces in the same direction as the second base end surface 30b.

[0031] The device base 30 has a locking port 33 and an air bearing port 34. The locking port 33 communicates with a portion of the base insertion hole 30d defined by the second base inner peripheral surface 302c. The air bearing port 34 communicates with the air bearing air supply / discharge chamber 32.

[0032] 6, the device base 30 includes first to fourth drive base ports 351 to 354 that supply air to first to fourth bellows actuators A1 to A4, which will be described later. The first to fourth drive base ports 351 to 354 are provided on the extension portion 30e.

[0033] 2, the device base 30 is provided with a ventilation port 36 in the extension portion 30e of the device base 30. The ventilation port 36 communicates with an actuator accommodating space 54, which will be described later. <Locking mechanism> 2 and 9, the locking mechanism 40 includes a support member 42, a locking member 43, and a holding portion 44. The locking mechanism 40 may also include a magnet 41, a first seal 42e, and a second seal 43d.

[0034] The axial direction of the support member 42 coincides with the axial direction of the device base 30. The support member 42 is housed in the base insertion hole 30d and is fixed to the device base 30. An inner peripheral surface 42a of the support member 42 defines a support member insertion hole 42d that extends in the axial direction of the support member 42. The inner peripheral surface 42a of the support member has a recessed portion 421a.

[0035] The support member 42 has a protrusion 42c on its outer peripheral surface 42b that protrudes radially from the support member insertion hole 42d. The support member outer peripheral surface 42b is formed by a first support member outer peripheral surface 421b that faces the first base inner peripheral surface 301c, and a second support member outer peripheral surface 422b that faces the second base inner peripheral surface 302c and includes the protrusion 42c. The second support member outer peripheral surface 422b has a support member recess 423b. Of the ends of the support member 42, the end of the support member 42 that is located on the first support member outer peripheral surface 421b side holds a magnet 41. The magnet 41 is fixed to the support member 42.

[0036] The support member 42 is fixed to the device base 30 in the base insertion hole 30d by the abutment between the first base inner peripheral surface 301c and the first support member outer peripheral surface 421b. The axial direction of the locking member 43 coincides with the axial direction of the device base 30. The locking member 43 is housed in the base insertion hole 30d. The locking member 43 is provided so as to be reciprocable in the axial direction of the device base 30 along the base inner peripheral surface 30c.

[0037] The locking member inner peripheral surface 43a of the locking member 43 defines a locking member insertion hole 43c. The locking member inner peripheral surface 43a is formed by a first locking member inner peripheral surface 431a and a second locking member inner peripheral surface 432a. The first locking member inner peripheral surface 431a is located on the first base end face 30a side of the locking member inner peripheral surface 43a. The second locking member inner peripheral surface 432a is located on the second base end face 30b side of the locking member inner peripheral surface 43a. The inner diameter of the first locking member inner peripheral surface 431a is smaller than the inner diameter of the second locking member inner peripheral surface 432a. The first locking member inner peripheral surface 431a and the second locking member inner peripheral surface 432a are connected by a locking member step surface 433a. The locking member step surface 433a faces away from the first base end surface 30a and faces in the same direction as the base step surface 303c and the second base end surface 30b.

[0038] The locking member 43 has a locking member outer peripheral surface 43b. The locking member outer peripheral surface 43b faces the second base inner peripheral surface 302c. The locking member 43 has a locking member recess 431b on the locking member outer peripheral surface 43b.

[0039] A portion of the first locking member inner peripheral surface 431a faces the second support member outer peripheral surface 422b and the support member recessed portion 423b. The first seal 42e is provided in the support member recessed portion 423b and provides a seal between the first locking member inner peripheral surface 431a and the second support member outer peripheral surface 422b. The first seal 42e provides a seal between the support member 42 and the locking member 43. Therefore, the locking mechanism 40 has the first seal 42e that provides a seal between the support member 42 and the locking member 43.

[0040] The locking member outer peripheral surface 43b faces the second base inner peripheral surface 302c. The second seal 43d is provided in the locking member recess 431b and seals the gap between the locking member outer peripheral surface 43b and the second base inner peripheral surface 302c. Therefore, the locking mechanism 40 has the second seal 43d that seals the gap between the locking member 43 and the device base 30.

[0041] The protrusion 42c on the support member outer peripheral surface 42b is located between the base step surface 303c and the locking member 43 in the axial direction of the device base 30. In other words, the protrusion 42c limits the movement of the locking member 43 in the base insertion hole 30d and prevents contact between the locking member 43 and the base step surface 303c.

[0042] The locking member 43 forms a locking air supply / discharge chamber 46 with the second base inner peripheral surface 302c, the base step surface 303c, and the second support member outer peripheral surface 422b. The locking air supply / discharge chamber 46 communicates with the outside of the device base 30 via the locking port 33. That is, by connecting to a pressure supply source (not shown) described below, the locking port 33 supplies and discharges air to the locking air supply / discharge chamber 46. Therefore, the locking air supply / discharge chamber 46 is defined by the locking member 43, the device base 30, and the support member 42. The locking mechanism 40 described above includes the locking air supply / discharge chamber 46 and the locking port 33.

[0043] The axial direction of the holding portion 44 coincides with the axial direction of the device base 30. The holding portion 44 is housed inside the locking member 43. The holding portion 44 has a holding portion inner circumferential surface 44a that engages with the spherical surface formed by the intermediate spherical portion 22d of the drive shaft 22. The holding portion inner circumferential surface 44a defines a holding portion insertion hole 44c that extends in the axial direction of the holding portion 44. The drive shaft 22 is inserted into the holding portion insertion hole 44c. In other words, the holding portion 44 has the holding portion inner circumferential surface 44a through which the drive shaft 22 is inserted and which engages with the intermediate spherical portion 22d.

[0044] The holder outer peripheral surface 44b is formed by a first holder outer peripheral surface 441b and a second holder outer peripheral surface 442b. The first holder outer peripheral surface 441b is located on the first base end face 30a side of the holder outer peripheral surface 44b. The second holder outer peripheral surface 442b is located on the second base end face 30b side of the holder outer peripheral surface 44b. The first holder outer peripheral surface 441b has a smaller outer diameter than the second holder outer peripheral surface 442b. The first holder outer peripheral surface 441b and the second holder outer peripheral surface 442b are connected by a holder step surface 443b.

[0045] The holding portion 44 is provided at a position where the first holding portion outer peripheral surface 441b faces the first locking member inner peripheral surface 431a, and where the second holding portion outer peripheral surface 442b faces the second locking member inner peripheral surface 432a. The holding portion step surface 443b of the holding portion 44 faces the locking member step surface 433a. The locking member step surface 433a can come into contact with the holding portion step surface 443b of the holding portion 44. When the locking member step surface 433a comes into contact with the holding portion step surface 443b of the holding portion 44, the holding portion 44 is supported by the locking member 43.

[0046] The first locking member inner peripheral surface 431a, the second locking member inner peripheral surface 432a, and the support member inner peripheral surface 42a form a lock chamber 47. In other words, the lock chamber 47 is formed by the first locking member inner peripheral surface 431a, the second locking member inner peripheral surface 432a, and the support member inner peripheral surface 42a, and communicates with the actuator accommodating space 54 via a gap between the locking member 43 and the retaining portion 44.

[0047] <Positioning mechanism and linear slide mechanism> 1 to 3 and 6, the positioning mechanism 50 includes a positioning mechanism housing 51 as a housing portion and an actuator accommodating top plate 51a. The positioning mechanism 50 also includes first to fourth bellows actuators A1 to A4 as a plurality of actuators, first to fourth linear slide mechanisms 61 to 64 as a plurality of linear slide mechanisms, and a driver 55. The driver 55 is made up of a cylindrical bearing 52 and a bearing holder 53.

[0048] 2 to 4 and 6, the axial direction of the positioning mechanism housing 51 coincides with the axial direction of the device base 30. The positioning mechanism housing 51 has a polygonal shape when viewed from the axial direction of the device base 30. In this embodiment, the positioning mechanism housing 51 has a substantially rectangular shape formed by four long sides and four short sides arranged alternately in the circumferential direction when viewed from the axial direction of the device base 30. The positioning mechanism housing 51 is attached to the second base end surface 30b of the device base 30.

[0049] The positioning mechanism housing 51 is a rectangular column having an end face facing the second base end face 30b. A cross section of the positioning mechanism housing 51 perpendicular to the axial direction is a substantially rectangular shape with four sets of opposing sides. The positioning mechanism housing 51 also has a positioning mechanism housing end face as an end face different from the end face facing the second base end face 30b. The positioning mechanism housing 51 has first to eighth side walls W1 to W8 as eight side faces.

[0050] The positioning mechanism housing 51 also has first to fourth isosceles trapezoidal portions T1 to T4, which are trapezoidal columns whose cross sections perpendicular to the axial direction of the positioning mechanism housing 51 have an isosceles trapezoidal shape.

[0051] The first isosceles trapezoid portion T1 is an isosceles trapezoid whose lower base is along the first side wall W1 and whose two legs extending from the lower base are perpendicular to the eighth side wall W8 and the second side wall W2. The second isosceles trapezoid portion T2 is an isosceles trapezoid whose lower base is along the third side wall W3 and whose two legs extending from the lower base are each perpendicular to the second side wall W2 and the fourth side wall W4.

[0052] The third isosceles trapezoid portion T3 is an isosceles trapezoid whose bottom base is along the fifth side wall W5 and whose two legs extending from the bottom base are perpendicular to the fourth side wall W4 and the sixth side wall W6. The fourth isosceles trapezoid portion T4 is an isosceles trapezoid whose lower base is along the seventh side wall W7 and whose two legs extending from the lower base are perpendicular to the sixth side wall W6 and the eighth side wall W8.

[0053] The height of the isosceles trapezoid, which is the cross section of each of the first to fourth isosceles trapezoidal portions T1 to T4, is set so that a bearing holder 53, which will be described later, can be accommodated therein. The side surfaces of the first to fourth isosceles trapezoidal portions T1 to T4, which are the inner surfaces of the positioning mechanism housing 51, together with the second base end face 30b, define an actuator accommodating space 54 as an accommodating space. Therefore, the tilt adjustment device 100 has the actuator accommodating space 54 defined by the side surfaces of the first to fourth isosceles trapezoidal portions T1 to T4 and the second base end face 30b. The actuator accommodating top plate 51a closes the actuator accommodating space 54 from the axial direction of the device base 30. The actuator accommodating space 54 accommodates the first to fourth bellows actuators A1 to A4, the first to fourth linear slide mechanisms 61 to 64, the cylindrical bearing 52, the bearing holder 53, the second drive shaft end portion 22b, and the tip spherical portion 23.

[0054] The axial direction of each of the first to fourth bellows actuators A1 to A4 is perpendicular to the base axis LB. Each of the first to fourth bellows actuators A1 to A4 has first to fourth drive ports A11 to A14 at one end and first to fourth connection portions A21, A22, A23, and A24 at the other end. Each of the first to fourth drive ports A11 to A14 communicates with first to fourth drive base ports 351 to 354 provided on the extension portion 30e of the device base 30. Each of the first to fourth bellows actuators A1 to A4 has a bellows portion formed by a plurality of grooves between the corresponding first to fourth drive ports A11 to A14 and the corresponding first to fourth connection portions A21 to A24.

[0055] In each of the first to fourth bellows actuators A1 to A4, the internal pressure increases or decreases when the pressure of the air supplied from the first to fourth drive ports A11 to A14 is increased or decreased. When the internal pressure of each of the first to fourth bellows actuators A1 to A4 is increased, the bellows portion expands in the axial direction. When the internal pressure of each of the first to fourth bellows actuators A1 to A4 is reduced, the grooves formed in the bellows portion deepen and the actuator contracts in the axial direction.

[0056] The first bellows actuator A1 and the third bellows actuator A3 form a first bellows actuator pair AA1 consisting of opposing bellows actuators. The second bellows actuator A2 and the fourth bellows actuator A4 form a second bellows actuator pair AA2 consisting of opposing bellows actuators. In other words, the first to fourth bellows actuators A1 to A4 form first and second bellows actuator pairs AA1, AA2 consisting of two opposing bellows actuators.

[0057] One end of the first bellows actuator A1, which has the first drive port A11, is fixed to the second side wall W2. The first bellows actuator A1 expands or contracts along a passage formed by the side surfaces of the first isosceles trapezoidal portion T1 and the second isosceles trapezoidal portion T2 in the actuator accommodating space 54, toward or away from the sixth side wall W6, in response to an increase or decrease in the pressure of the air supplied from the first drive port A11.

[0058] The end of the second bellows actuator A2, which has the second drive port A12, is fixed to the fourth side wall W4. That is, the second bellows actuator A2 expands and contracts along the passage formed by the side surfaces of the second isosceles trapezoidal portion T2 and the third isosceles trapezoidal portion T3 in the actuator accommodating space 54, in a direction toward or away from the eighth side wall W8, in response to an increase or decrease in the pressure of the air supplied from the second drive port A12.

[0059] One end of the third bellows actuator A3, which has the third drive port A13, is fixed to the sixth side wall W6. That is, the third bellows actuator A3 expands and contracts along the passage formed by the third isosceles trapezoidal portion T3 and the fourth isosceles trapezoidal portion T4 in the actuator accommodating space 54, and toward or away from the second side wall W2, in response to an increase or decrease in the pressure of the air supplied from the third drive port A13.

[0060] Of the ends of the fourth bellows actuator A4, the end having the fourth drive port A14 is fixed to the eighth side wall W8. That is, the fourth bellows actuator A4 expands and contracts along the passage formed by the fourth isosceles trapezoidal portion T4 and the first isosceles trapezoidal portion T1 in the actuator accommodating space 54, and in the direction toward or away from the fourth side wall W4, in response to an increase or decrease in the pressure of the air supplied from the fourth drive port A14.

[0061] The first bellows actuator pair AA1 has both ends fixed to the second side wall W2 and the sixth side wall W6. The axial direction of the first bellows actuator pair AA1 coincides with the expansion and contraction directions of the first and third bellows actuators A1 and A3. The second bellows actuator pair AA2 has both ends fixed to the fourth side wall W4 and the eighth side wall W8. The axial direction of the second bellows actuator pair AA2 coincides with the expansion and contraction directions of the second and fourth bellows actuators A2 and A4. The positioning mechanism 50 is attached to the second base end surface 30b and houses the first to fourth bellows actuators A1 to A4. The positioning mechanism 50 further includes a polygonal positioning mechanism housing 51 when viewed from the axial direction of the device base 30. The first and second bellows actuator pairs AA1 and AA2 have both ends fixed to the corners of the positioning mechanism housing 51.

[0062] A straight line extending in the axial direction of the first bellows actuator pair AA1 and a straight line extending in the axial direction of the second bellows actuator pair AA2 intersect at right angles at the position of a bearing holder 53, which will be described later. In other words, the first to fourth bellows actuators A1 to A4 are arranged so that the two straight lines formed by the first and second bellows actuator pairs AA1 and AA2 are perpendicular to each other.

[0063] The bearing holder 53 is in the shape of a quadrangular prism and has a bearing holder inner peripheral surface 53a that holds the cylindrical bearing 52. The axial direction of the bearing holder 53 coincides with the axial direction of the device base 30. The bearing holder 53 has four flat side walls K.

[0064] Each of the first to fourth linear slide mechanisms 61 to 64 includes a linear guide portion S1 and a rectangular parallelepiped slide connection portion S11. Each linear guide unit S1 includes a slide plate 661 and a slide portion 662. The slide plate 661 can move relative to the slide portion 662. The slide plate 661 moves linearly. The slide portion 662 includes a slide surface 651 as a surface facing away from the slide plate 661.

[0065] Of the surfaces of each slide portion 662, slide surface 651 is connected to an end of each of the first to fourth bellows actuators A1 to A4 that is different from the end connected to the positioning mechanism housing 51. Each slide portion 662 is attached to the first to fourth bellows actuators A1 to A4 so that each slide plate 661 is movable in a direction perpendicular to the direction of extension and contraction of the first to fourth bellows actuators A1 to A4 and perpendicular to the axial direction of the bearing holder 53.

[0066] Furthermore, each slide portion 662 is attached to each side wall K of the bearing holder 53 via a slide connection portion S11 attached to the slide plate 661. That is, the driver 55 is surrounded by the first to fourth bellows actuators A1 to A4 in a plane perpendicular to the base axis LB. In other words, the first to fourth bellows actuators A1 to A4 are arranged to surround the driver 55 along the second base end surface 30b. The driver 55 is also connected to the first to fourth bellows actuators A1 to A4 via first to fourth linear slide mechanisms 61 to 64. The first and second bellows actuator pairs AA1 and AA2 each hold the driver 55 between them.

[0067] In the driver 55, the bearing holder 53 holds the cylindrical bearing 52. Specifically, the cylindrical bearing 52 is inserted inside the bearing holder 53. An inner peripheral surface 53a of the bearing holder faces an outer peripheral surface 52b of the cylindrical bearing, which will be described later.

[0068] The axial direction of the cylindrical bearing 52 coincides with the axial direction of the device base 30. The cylindrical bearing 52 has a cylindrical bearing inner circumferential surface 52a that defines a cylindrical bearing insertion hole 52d that extends in the axial direction of the cylindrical bearing 52. Therefore, the driver 55 includes the cylindrical bearing 52 that defines the cylindrical bearing insertion hole 52d as an insertion hole, and a bearing holder 53 that holds the cylindrical bearing 52. In addition, the central axis LC of the cylindrical bearing 52 extends in the axial direction of the device base 30.

[0069] Before being inserted into the bearing holder 53, the inner diameter of the cylindrical bearing inner circumferential surface 52a of the cylindrical bearing 52 is smaller than the diameter of the tip spherical portion 23. The cylindrical bearing 52 has a cylindrical bearing outer circumferential surface 52b.

[0070] Before being inserted into the bearing holder 53, the cylindrical bearing 52 has a gap 52c extending in the axial direction of the cylindrical bearing 52 between the cylindrical bearing inner circumferential surface 52a and the cylindrical bearing outer circumferential surface 52b so that the inner diameter of the cylindrical bearing 52 can be expanded. In other words, before being inserted into the bearing holder 53, the cylindrical bearing 52 has an inner diameter smaller than the diameter of the tip spherical portion 23, and has a gap 52c extending in the axial direction of the cylindrical bearing 52 so that the inner diameter of the cylindrical bearing 52 can be expanded.

[0071] The cylindrical bearing 52 inserted into the bearing holder 53 has its diameter expanded by the gap 52c, thereby accommodating the spherical tip portion 23 within the cylindrical bearing insertion hole 52d. The outer surface of the spherical tip portion 23 is in sliding contact with the cylindrical bearing inner circumferential surface 52a. Therefore, the tilt adjustment device 100 includes a driver 55 having the cylindrical bearing inner circumferential surface 52a with which the spherical tip portion 23 is in sliding contact, while defining the cylindrical bearing insertion hole 52d into which the spherical tip portion 23 is inserted. The bearing holder 53 is interlocked with the drive shaft 22 via the cylindrical bearing 52 and the spherical tip portion 23. Therefore, the positioning mechanism 50 drives each of the first to fourth bellows actuators A1 to A4, thereby driving the oscillator 21 via the corresponding first to fourth linear slide mechanisms 61 to 64, the driver 55, and the drive shaft 22. That is, the positioning mechanism 50 is provided on the second base end surface 30b and positions the spherical tip portion 23.

[0072] <Positional relationship between the crimping unit oscillator, device base, and positioning mechanism> The relationship between the crimping portion rocking body 20, the device base 30, and the positioning mechanism 50 will be described with reference to FIGS. 2 to 5 and 9. FIG.

[0073] The drive shaft 22 of the crimping part rocking body 20 is inserted into the base insertion hole 30d so that the tip spherical portion 23 protrudes from the second base end face 30b. That is, the tip spherical portion 23 is provided at the second drive shaft end 22b, which is the end of the drive shaft 22 in the axial direction that is different from the first drive shaft end 22a on the rocking body 21 side, and protrudes from the second base end face 30b. Therefore, the device base 30 defines the base insertion hole 30d as an insertion hole through which the drive shaft 22 is inserted. Furthermore, the rocking body 21 of the crimping part rocking body 20 has the second rocking body end face 21b, which is a convex spherical surface, facing the first base end face 30a, which is a concave spherical surface. The second rocking body end face 21b has the same radius of curvature as the first base end face 30a, and is therefore capable of rocking along the first base end face 30a. The drive shaft 22 is inserted through a support member 42, a lock member 43, and a holding portion 44 in a base insertion hole 30d defined by the base inner peripheral surface 30c.

[0074] The locking member inner peripheral surface 43a faces the drive shaft outer peripheral surface 22c and is spaced radially from the drive shaft outer peripheral surface 22c. Thus, the locking member 43 has the locking member inner peripheral surface 43a that surrounds the drive shaft 22. The support member 42 is located between the locking member inner peripheral surface 43a and the drive shaft outer peripheral surface 22c. The support member 42 also has the support member inner peripheral surface 42a that is spaced from the drive shaft 22 and surrounds the drive shaft 22.

[0075] A packing 45 is provided in the recessed portion 421a of the support member 42 to seal between the drive shaft outer peripheral surface 22c and the support member 42. The packing 45 is expandable and contractible in the radial direction of the base inner peripheral surface 30c. The packing 45 allows the drive shaft 22 to swing, allowing air to flow from the first base end surface 30a to the second base end surface 30b, and also seals between the drive shaft outer peripheral surface 22c and the support member 42.

[0076] The spherical tip portion 23 protrudes from the second base end surface 30b and is housed in a cylindrical bearing insertion hole 52d defined by a cylindrical bearing 52 provided in the positioning mechanism 50. The spherical tip portion 23 expands the gap 52c in the circumferential direction of the cylindrical bearing 52, thereby increasing the diameter of the cylindrical bearing insertion hole 52d. The cylindrical bearing 52 is inserted into a bearing holder 53 and, together with the bearing holder 53, forms a driver 55. In other words, the spherical tip portion 23 is inserted into the driver 55.

[0077] The driver 55 is accommodated in an actuator accommodating space 54. Air is supplied to and exhausted from the actuator accommodating space 54 through a ventilation port 36 provided in the extension portion 30e of the device base 30. The ventilation port 36 communicates with the actuator accommodating space 54, the space formed by the locking member inner circumferential surface 43a and the holding portion outer circumferential surface 44b, and the space formed by the drive shaft outer circumferential surface 22c and the support member inner circumferential surface 42a. In other words, the ventilation port 36 is provided in the device base 30 and communicates with the actuator accommodating space 54.

[0078] The ventilation port 36 also communicates with the outside of the tilt adjustment device 100 via the gap between the actuator accommodating space 54 and the positioning mechanism housing 51 and the actuator accommodating top plate 51a.

[0079] Each of the first to fourth drive base ports 351 to 354 is connected to a pressure supply source (not shown). Each of the first to fourth drive base ports 351 to 354 supplies air supplied from the pressure supply source to each of the first to fourth bellows actuators A1 to A4 via each of the first to fourth drive ports A11 to A14. Each of the first to fourth bellows actuators A1 to A4 expands or contracts in response to increases or decreases in the pressure of the supplied air, thereby positioning the spherical tip portion 23 via each of the first to fourth linear slide mechanisms 61 to 64 and the driver 55. In other words, the positioning mechanism 50 uses the first to fourth bellows actuators A1 to A4 to position the spherical tip portion 23 within a plane parallel to the second base end surface 30b. In other words, the positioning mechanism 50 changes the position of the tip spherical portion 23 in a plane parallel to the second base end face 30b via the driver 55, and is equipped with first to fourth bellows actuators A1 to A4 that are arranged to surround the driver 55 and the tip spherical portion 23 along the second base end face 30b.

[0080] The change in position of the tip spherical portion 23 by the positioning mechanism 50 in a plane parallel to the second base end face 30b induces movement of the tip spherical portion 23 in a direction along the central axis LC inside the cylindrical bearing insertion hole 52d. This movement occurs because the change in position of the tip spherical portion 23 by the positioning mechanism 50 induces the oscillation of the oscillator 21, which is guided by the first base end face 30a, and the tip spherical portion 23 moves in conjunction with this oscillation via the drive shaft 22.

[0081] <Control device and tilt detection sensor> The control device 70 controls the positioning mechanism 50 . As shown in FIG. 5, the control device 70 includes an actuator control section 71 that drives the first to fourth bellows actuators A1 to A4, a drive amount calculation section 72, and first to fourth electropneumatic regulators E1 to E4.

[0082] The control device 70 includes a processor and a storage unit (not shown). The processor included in the control device 70 is, for example, a CPU (Central Processing Unit) or an MPU (Micro Processing Unit). The storage unit included in the control device 70 is, for example, a ROM (Read-Only Memory) or a RAM (Random Access Memory). The processor included in the control device 70 executes instructions included in a program stored in the storage unit, thereby functioning as an actuator control unit 71 and a drive amount calculation unit 72. Therefore, the control device 70 includes the actuator control unit 71 and the drive amount calculation unit 72.

[0083] Based on parallelism information transmitted by a tilt detection sensor 80 (described later), the drive amount calculation unit 72 determines, as a target value, the angle by which the crimping portion oscillator 20 is tilted relative to the device base 30 so that the first crimping tool end face 10a and the reference plane S are parallel. The parallelism information includes the tilt angle between the first crimping tool end face 10a and the reference plane S at the time of measurement. In other words, the tilt detection sensor 80 measures the tilt of the first crimping tool end face 10a relative to the reference plane S. Based on the parallelism information and the target value, the drive amount calculation unit 72 calculates the pressure of air to be supplied to the first to fourth bellows actuators A1 to A4. The pressure of the air to be supplied is found as a pressure value to be supplied to each of the first to fourth bellows actuators A1 to A4 using the following equations (1) to (4):

[0084]

number

[0085]

number

[0086]

number

[0087]

number

[0088] As shown in FIGS. 6 to 8, α1 is the angle between the crimping portion axis LP and the base axis LB, as measured by the tilt detection sensor 80. θ1 is the tilt direction of the crimping portion axis LP in a plane perpendicular to the base axis LB, as measured by the tilt detection sensor 80. The tilt direction is an azimuth angle when the base axis LB is used as the origin and the first azimuth axis LA1, which is a line that bisects the angle between the first bellows actuator A1 and the fourth bellows actuator A4, is used as the reference axis. The line that bisects the angle between the second bellows actuator A2 and the third bellows actuator A3 is used as the second azimuth axis LA2. α2 is the target value of the angle between the crimping portion axis LP and the base axis LB. θ2 is the target value of the tilt direction of the crimping portion axis LP in a plane perpendicular to the base axis LB. K is a proportional gain value, which is a predetermined proportionality constant. C is a proportionality constant determined by the rigidity and cross-sectional area of ​​each of the first to fourth bellows actuators A1 to A4. Note that C may be different for each of the first to fourth bellows actuators A1 to A4. L is the distance from the oscillation center of the oscillator 21 to the center of the tip spherical portion 23. φ is the angle between a line extending in the axial direction of the first bellows actuator pair AA1 and a line extending in the axial direction of the second bellows actuator pair AA2. Each of FIGS. 6 and 7 shows the directions of the first azimuthal axis LA1 and the second azimuthal axis LA2, as well as the tilt direction θ. Each of the first azimuthal axis LA1 and the second azimuthal axis LA2 is perpendicular to the base axis LB. Furthermore, the first azimuthal axis LA1 is perpendicular to the second azimuthal axis LA2 and is parallel to the third side wall W3 and the seventh side wall W7.

[0089] Therefore, the drive amount calculation unit 72 calculates the value of the pressure to be supplied to each of the first to fourth bellows actuators A1 to A4 required to make the reference plane S and the first crimping tool end face 10a parallel, based on the inclination of the first crimping tool end face 10a relative to the reference plane S measured by the inclination detection sensor 80.

[0090] An actuator control section 71 provided in the control device 70 supplies air at an appropriate pressure to the first to fourth bellows actuators A1 to A4 by driving the first to fourth electropneumatic regulators E1 to E4 based on the calculation results of the drive amount calculation section 72. In other words, the actuator control section 71 drives the first to fourth bellows actuators A1 to A4 based on the results of the drive amount calculation section 72.

[0091] The tilt detection sensor 80 is a sensor that detects the parallelism between the first crimping tool end face 10a and the reference plane S. The tilt detection sensor 80 is, for example, a plurality of laser sensors attached to a plurality of locations on the crimping portion oscillator 20. The tilt detection sensor 80 measures the tilt of the first crimping tool end face 10a with respect to the reference plane S by measuring the distance between the first crimping tool end face 10a and the reference plane S at a plurality of locations using the laser sensors.

[0092] The tilt detection sensor 80 is electrically connected to the control device 70, detects the parallelism between the first crimping tool end face 10a and the reference plane S, and transmits parallelism information relating to this parallelism to the control device 70. In other words, the control device 70 includes an actuator control unit 71, and drives the first to fourth bellows actuators A1 to A4 using the actuator control unit 71 based on the results of measurements by the tilt detection sensor 80 so that the reference plane S and the first crimping tool end face 10a are parallel to each other.

[0093] <Operation and Function of Tilt Adjustment Device> The operation of the tilt adjustment device 100 will be described with reference to FIG. 2 and FIGS. The tilt adjustment device 100 is in its initial position as shown in FIG. 2. The tilt adjustment device 100 is attached, for example, to a transport device (not shown). The tilt adjustment device 100 is in a position where the first crimping tool end surface 10a faces the reference plane S, and the crimping tool 10 is spaced from the reference plane S. In the initial position, the crimping portion axis LP of the crimping portion oscillator 20 and the base axis LB of the device base 30 coincide. Furthermore, the reference plane axis LS, which extends in a direction perpendicular to the reference plane S, is not parallel to the crimping portion axis LP and the base axis LB. FIG. 6 shows the positioning mechanism 50 in the initial position as viewed in the axial direction of the device base 30. In the initial position, the centers of the positioning mechanism 50 and the driver 55 coincide when viewed in the axial direction of the device base 30.

[0094] In the initial position, each of the first to fourth bellows actuators A1 to A4 is supplied with air from a pressure supply source (not shown). The air is supplied via each of the first to fourth drive base ports 351 to 354 and each of the first to fourth drive ports A11 to A14. When the tilt adjustment device 100 is in the initial position, each of the first to fourth bellows actuators A1 to A4 is supplied with air at the same pressure from the pressure supply source. In other words, in the initial position, the pressure with which the first bellows actuator A1 and the third bellows actuator A3 press the drive body 55 is the same. Furthermore, the pressure with which the second bellows actuator A2 and the fourth bellows actuator A4 press the drive body 55 is the same.

[0095] The tilt detection sensor 80 measures the tilt of the first crimping tool end face 10a relative to the reference plane S. The tilt detection sensor 80 transmits the tilt of the first crimping tool end face 10a relative to the reference plane S to the control device 70 as current angle information. The control device 70 receives the current angle information transmitted from the tilt detection sensor 80. The control device 70 determines, via the drive amount calculation unit 72, the tilt of the crimping part oscillator 20 relative to the device base 30 in an attitude in which the reference plane S and the first crimping tool end face 10a are parallel to each other, as a target value. Furthermore, the drive amount calculation unit 72 of the control device 70 determines the increase or decrease in air pressure required for each of the first to fourth bellows actuators A1 to A4 to achieve the target value, using equations (1) to (4).

[0096] Once the air pressure increase or decrease is determined, a pressure supply source (not shown) supplies air to the air bearing port 34. The supplied air is supplied between the first base end face 30a and the second oscillator end face 21b via the air bearing air supply / discharge chamber 32 and multiple holes in the annular porous material 37. Thus, the annular porous material 37 receives air supply from the air bearing port 34. This air supply pressurizes the gap between the second oscillator end face 21b and the first base end face 30a. As a result, the second oscillator end face 21b moves away from the first base end face 30a. At the same time, the oscillator 21 is attracted toward the first base end face 30a by the magnetic attraction of the magnet 41. As a result, a small gap is formed between the second oscillator end face 21b and the first base end face 30a, and this gap is maintained. Therefore, the device base 30 supports the oscillator 21 so that the oscillator 21 is oscillatably spaced apart from the first base end surface 30a.

[0097] Based on this determination, the actuator control section 71 of the control device 70 supplies air at an appropriate pressure required to increase or decrease the air pressure to the first to fourth bellows actuators A1 to A4 provided in the positioning mechanism 50. The actuator control section 71 supplies air at an appropriate pressure to the first to fourth bellows actuators A1 to A4 by driving a pressure supply source and first to fourth electropneumatic regulators E1 to E4 (not shown).

[0098] Each of the first to fourth bellows actuators A1 to A4 receives air from a pressure supply source via each of the first to fourth drive base ports 351 to 354 and each of the first to fourth drive ports A11 to A14. Each of the first to fourth bellows actuators A1 to A4 expands and contracts along the second base end surface 30b in response to an increase or decrease in the pressure of the supplied air. Each of the first to fourth bellows actuators A1 to A4 expands and contracts to push and pull the drive body 55. In other words, as each of the first to fourth bellows actuators A1 to A4 expands and contracts, the drive body 55 moves in a direction along the second base end surface 30b.

[0099] For example, assume that the positioning mechanism 50 moves the driver 55 in the axial direction of the first bellows actuator pair AA1 from the first bellows actuator A1 to the third bellows actuator A3. In this case, the pressure supply source increases the air pressure supplied to the first bellows actuator A1 and decreases the air pressure supplied to the third bellows actuator A3. The decrease in pressure due to the decrease in air pressure corresponds to the increase in the pressure applied to the first bellows actuator A1. In other words, the increase or decrease in air pressure from the pressure supply source causes the first bellows actuator A1 to expand and the third bellows actuator A3 to contract by a distance equal to the increase in air pressure. As a result, the driver 55 is moved by the first bellows actuator pair AA1 by the distance corresponding to the expansion of the first bellows actuator A1 and the contraction of the third bellows actuator A3. The driver 55 can also be moved by the second bellows actuator pair AA2 in the same manner as the first bellows actuator pair AA1. In other words, by combining the first bellows actuator pair AA1 and the second bellows actuator pair AA2, the positioning mechanism 50 can move the driver 55 along the second base end surface 30b, even in a direction different from the axial direction of the first bellows actuator pair AA1 and the second bellows actuator pair AA2.

[0100] 3, 6, and 7, as the driver 55 moves along the second base end surface 30b, the slide plates 661 of the first to fourth linear guide units S1 to S4 move relative to the corresponding slide units 662. The positioning mechanism 50 moves the driver 55 by pushing and pulling the driver 55 via the first to fourth linear slide mechanisms 61 to 64 using the first to fourth actuators A1 to A4, respectively.

[0101] As shown in FIGS. 2, 8, and 9, the driver 55 moves in a direction along the second base end face 30b and changes the position of the spherical tip portion 23 in a plane parallel to the second base end face 30b. As the position of the spherical tip portion 23 changes in a plane parallel to the second base end face 30b, the oscillator 21 oscillates along the first base end face 30a via the drive shaft 22. This oscillation guides the movement of the spherical tip portion 23 in a direction along the central axis LC within the cylindrical bearing insertion hole 52d via the drive shaft 22. In other words, the movement of the driver 55 by the positioning mechanism 50 guides the movement of the spherical tip portion 23 in a direction along the second base end face 30b and in a direction along the central axis LC within the cylindrical bearing 52. Therefore, the cylindrical bearing 52 absorbs displacement of the tip spherical portion 23 in the direction of the central axis LC relative to each of the first to fourth bellows actuators A1 to A4 so that the tip spherical portion 23 does not interfere with each of the first to fourth bellows actuators A1 to A4 in the direction of the central axis LC. During the oscillation, air is supplied from the air bearing port 34. By supplying air from the air bearing port 34, the oscillator 21 is oscillatably supported on the device base 30 so as to achieve a desired inclination without causing the second oscillator end surface 21b to slide against the first base end surface 30a. Furthermore, at this time, a pressure supply source (not shown) draws air from the locking air supply / discharge chamber 46 via the locking port 33, thereby making the supply pressure to the locking air supply / discharge chamber 46 negative. As a result of the negative supply pressure, the locking member 43 abuts against the protrusion 42c and is separated from the holding portion 44. Furthermore, the inner peripheral surface 44a of the retaining portion 44 is not pressed strongly against the spherical surface formed by the intermediate spherical portion 22d. Therefore, the retaining portion 44 is pivotably engaged with the drive shaft 22 at the intermediate spherical portion 22d, and has the inner peripheral surface 44a that allows the retaining portion 44 to pivot.

[0102] Because the first base end face 30a is a concave spherical surface that engages with the second oscillator end face 21b, which is a convex spherical surface, a change in the position of the tip spherical portion 23 in a plane parallel to the second base end face 30b causes the oscillator 21 to oscillate relative to the first base end face 30a. As a result of this oscillation, a parallel posture between the first crimping tool end face 10a and the reference plane S is achieved. Therefore, the tilt adjustment device 100 drives the positioning mechanism 50 based on a target value determined by the control device 70 and tilts the oscillator 21 relative to the device base 30, thereby achieving a parallel posture between the first crimping tool end face 10a and the reference plane S. Therefore, the tilt adjustment device 100 adjusts the tilt of the oscillator 21 while oscillating the second oscillator end face 21b along the first base end face 30a so that the reference plane S and the first crimping tool end face 10a are parallel.

[0103] Next, the operation of the tilt adjusting device 100 to maintain the posture in which the first crimping tool end surface 10a and the reference plane S are parallel will be described with reference to FIGS. After the first crimping tool end face 10a becomes parallel to the reference plane S, the pressure supply source (not shown) stops supplying air to the air bearing port 34 and sucks air from the air bearing port 34. Thus, the annular porous material 37 receives air exhaust from the air bearing port 34. That is, the pressure supply source applies vacuum suction through the air bearing port 34 to create a negative pressure in the air bearing air supply / discharge chamber 32. This pressure reduction causes the second oscillator end face 21b of the oscillator 21 to abut against and be attracted to the first base end face 30a of the device base 30 while maintaining the parallel orientation of the first crimping tool end face 10a relative to the reference plane S. As a result of this pressure reduction, the tilt adjustment device 100 temporarily locks the first crimping tool end face 10a, maintaining its parallel orientation relative to the reference plane S. That is, the tilt adjustment device 100 fixes the tilted orientation of the oscillator 21 by applying vacuum suction through the air bearing port 34.

[0104] As shown in FIG. 10 , during the provisional locking process, the crimping portion swinging body 20 moves along the base axis LB of the device base 30 in the direction from the first base end face 30a to the second base end face 30b by the gap between the second swinging body end face 21b and the first base end face 30a. As the crimping portion swinging body 20 moves in the axial direction of the device base 30, the second drive shaft end portion 22b and the tip spherical portion 23 are guided by the cylindrical bearing inner circumferential surface 52a. As a result, the tip spherical portion 23 does not change its position in a plane parallel to the second base end face 30b. In other words, during the provisional locking process, the crimping portion swinging body 20 moves in the axial direction of the device base 30 while maintaining the angle α between the crimping portion axis LP and the base axis LB, so that the parallelism between the reference plane S and the first crimping tool end face 10a is maintained.

[0105] After temporary locking is achieved by depressurizing the air bearing air supply / discharge chamber 32, the pressure supply source switches the air pressure supplied to the locking port 33 from negative to positive. This supply leads to pressurization of the locking air supply / discharge chamber 46, with which the locking port 33 communicates. As the locking air supply / discharge chamber 46 is pressurized, the locking member 43 moves in a direction from the first base end face 30a toward the second base end face 30b, as shown by the two-dot chain line in FIG. 9. This movement brings the locking member 43 into contact with the retaining portion 44, which is spaced apart from the locking member 43. When the locking member step surface 433a of the locking member 43 is pressed against the retaining portion step surface 443b of the retaining portion 44, the retaining portion inner circumferential surface 44a of the retaining portion 44 tightly engages with the spherical surface formed by the intermediate spherical portion 22d. As a result, the crimping part rocking body 20 is pressed in the direction from the first base end face 30a to the second base end face 30b. Due to the provisional lock, the rocking body 21 of the crimping part rocking body 20 is in contact with the first base end face 30a at the second rocking body end face 21b. That is, the application of pressure generates a normal force against the pressure at the contact surface between the second rocking body end face 21b and the first base end face 30a. The normal force induces a static friction force at the contact surface that prevents the rocking body 21 from rocking relative to the device base 30. This limits the rocking of the crimping part rocking body 20 relative to the device base 30. As a result of the application of pressure, the tilt adjustment device 100 performs a final lock, which maintains the parallel orientation of the first crimping tool end face 10a with respect to the reference plane S, in addition to the provisional lock.

[0106] Therefore, the tilt adjustment device 100 adjusts the parallelism of the first crimping tool end face 10a and the reference plane S and maintains the parallel posture by temporary locking and final locking by driving the positioning mechanism 50 based on the control device 70 and the tilt detection sensor 80. In other words, the control device 70 drives the first to fourth bellows actuators A1 to A4 so that the reference plane S and the first crimping tool end face 10a are parallel to each other, based on the results of measurements by the tilt detection sensor 80, which measures the tilt of the first crimping tool end face 10a with respect to the reference plane S.

[0107] The ventilation port 36 provided in the tilt adjustment device 100 is connected to a pressure supply source (not shown) and is in communication with the actuator accommodating space 54 and the lock chamber 47. That is, the ventilation port 36 is in communication with the gap formed by the oscillator 21 and the annular porous material 37 via the lock chamber 47, and with the air bearing port 34 via the annular porous material 37. The ventilation port 36 is also in communication with the actuator accommodating space 54 and the outside of the tilt adjustment device 100 via a gap formed by the positioning mechanism housing 51 and the actuator accommodating top plate 51a. That is, when the pressure supply source exhausts air from the ventilation port 36, particles in the actuator accommodating space 54 and the lock chamber 47 are exhausted to the outside of the tilt adjustment device 100. When the pressure supply source exhausts air from the ventilation port 36, particles in the gap formed by the oscillator 21 and the annular porous material 37 are also exhausted to the outside of the tilt adjustment device 100.

[0108] [Effects of this embodiment] The effects of this embodiment will be described. (1) The tilt adjustment device 100 changes the position of the tip spherical portion 23 in a plane parallel to the second base end surface 30b by using the first to fourth bellows actuators A1 to A4 provided in the positioning mechanism 50. This change in the position of the tip spherical portion 23 leads to the tilt of the crimping portion oscillator 20 with respect to the base axis LB.

[0109] Furthermore, the control device 70 controls the actuator control section 71 to drive the first to fourth bellows actuators A1 to A4 based on the measurement results from the tilt detection sensor 80. This driving realizes an attitude of the crimping portion oscillator 20 in which the reference plane S and the first crimping tool end face 10a are parallel to each other.

[0110] Therefore, by using the positioning mechanism 50, the control device 70, and the tilt detection sensor 80, the tilt adjustment device 100 achieves a parallel posture of the crimping portion oscillator 20 with respect to the reference plane S. As a result, the tilt adjustment device 100 can achieve parallelism between the reference plane S and the first crimping tool end face 10a without bringing the reference plane S into contact with the first crimping tool end face 10a. Therefore, when adjusting the reference plane S and the first crimping tool end face 10a to be parallel, the tilt adjustment device 100 can adjust the reference plane S and the first crimping tool end face 10a to be parallel without generating a load on the reference plane S. As described above, the tilt adjustment device 100 can adjust the tilt without being limited by the nature, properties, shape, or dimensions of the object to be crimped.

[0111] (2) The driver 55 is composed of a cylindrical bearing 52 and a bearing holder 53. The driver 55 holds the spherical tip portion 23 by the cylindrical bearing 52 so that the spherical tip portion 23 is reciprocable and slidably in the cylindrical bearing insertion hole 52d. That is, the crimping portion oscillator 20, which has been set to a desired position by the positioning mechanism 50 via the spherical tip portion 23, is attracted to the device base 30 by temporary locking while maintaining the inclination of the crimping portion axis LP relative to the base axis LB. Therefore, the tilt adjustment device 100 can move the crimping portion oscillator 20, which has been adjusted to a desired inclination, in the axial direction of the cylindrical bearing 52 while maintaining the inclination, and fix it to the device base 30. As a result, the tilt adjustment device 100 can maintain the inclination of the oscillator 21 with high precision and fix the inclination by temporary locking, compared to a case in which the driver 55 does not include the cylindrical bearing 52.

[0112] (3) A gap 52c is formed in the cylindrical bearing 52. The tip spherical portion 23, which has a diameter larger than the inner diameter of the cylindrical bearing inner circumferential surface 52a, is inserted into the cylindrical bearing insertion hole 52d, and the cylindrical bearing 52 expands in diameter due to the gap 52c. The cylindrical bearing 52, into which the tip spherical portion 23 is inserted while expanding in diameter, applies a preload to the tip spherical portion 23. In other words, the cylindrical bearing 52 with the gap 52c formed therein can accommodate the tip spherical portion 23 in the cylindrical bearing insertion hole 52d while applying a preload. As a result, the tilt adjustment device 100 can reduce rattle of the tip spherical portion 23 relative to the cylindrical bearing 52. Therefore, the tilt adjustment device 100 can perform highly accurate positioning and parallel adjustment of the crimping portion oscillator 20 compared to a cylindrical bearing 52 without the gap 52c.

[0113] (4) The first base end surface 30a is formed almost entirely of the annular porous material 37, and forms an air bearing with air supplied from the air bearing port 34. That is, the tilt adjustment device 100 can swing the pressure-bonding part rocking body 20 while separating the second rocking body end surface 21b from the first base end surface 30a using the air bearing. The tilt adjustment device 100 can adjust the parallelism of the pressure-bonding part rocking body 20 with higher precision than when the rocking body 21 and the device base 30 are in sliding contact with each other while rocking the pressure-bonding part rocking body 20. Furthermore, the tilt adjustment device 100 can reduce particles generated between the second rocking body end surface 21b and the first base end surface 30a when rocking the pressure-bonding part rocking body 20.

[0114] (5) When the driver 55 moves along the second base end surface 30b, the relative positions of the driver 55 and each of the first to fourth bellows actuators A1 to A4 change with the movement of the driver 55. Each of the first to fourth linear guide units S1 to S4 moves the slide plate 661 with respect to the slide unit 662 by a distance corresponding to the change in the relative position of the driver 55 with respect to each of the first to fourth bellows actuators A1 to A4. In other words, each of the first to fourth linear slide mechanisms 61 to 64 eliminates distortion that occurs in each of the first to fourth bellows actuators A1 to A4 with the movement of the driver 55. Furthermore, by eliminating this distortion, the first to fourth linear slide mechanisms 61 to 64 prevent each of the first to fourth bellows actuators A1 to A4 from affecting each other via the driver 55. As a result, the tilt adjustment device 100 can adjust the tilt of the pressure-bonding portion oscillator 20 with higher precision than when the positioning mechanism 50 does not include the first to fourth linear slide mechanisms 61 to 64. Furthermore, the first to fourth linear slide mechanisms 61 to 64 can reduce the load generated in the first to fourth bellows actuators A1 to A4 as the driver 55 moves.

[0115] (6) The inclination adjustment device 100 adjusts the inclination of the crimping portion oscillator 20 using the first to fourth bellows actuators A1 to A4. The first to fourth bellows actuators A1 to A4 have a higher thrust than electric actuators when compared at the same volume. Therefore, by using the first to fourth bellows actuators A1 to A4 in the positioning mechanism 50, the inclination adjustment device 100 can position the driver 55 with high efficiency.

[0116] Furthermore, the positioning mechanism 50 includes a first bellows actuator pair AA1 and a second bellows actuator pair AA2. The positioning mechanism 50 can position the driver 55 and adjust the inclination of the crimping portion oscillator 20 with higher accuracy than when the first to fourth bellows actuators A1 to A4 surround the tip spherical portion 23 without forming pairs facing each other.

[0117] (7) The positioning mechanism 50 is attached to the second base end surface 30b and includes a positioning mechanism housing 51 that houses the first to fourth bellows actuators A1 to A4. The first bellows actuator pair AA1 and the second bellows actuator pair AA2 have their respective ends fixed to the corners of the positioning mechanism housing 51. This allows the cross-sectional shape of the positioning mechanism housing 51 as seen from the base axis LB to be changed by changing the angle formed by the first bellows actuator pair AA1 and the second bellows actuator pair AA2. In other words, the cross-sectional shape of the tilt adjustment device 100 as seen from the base axis LB can be selected depending on the situation in which the tilt adjustment device 100 is to be used.

[0118] In particular, the angle formed by the first bellows actuator pair AA1 and the second bellows actuator pair AA2 in the positioning mechanism 50 is 90 degrees. That is, the directions of movement of the driver 55 by the first bellows actuator pair AA1 and the second bellows actuator pair AA2 are independent of each other. This improves the braking performance of the driver 55 by the first bellows actuator pair AA1 and the second bellows actuator pair AA2, and also improves the positioning accuracy of the positioning mechanism 50.

[0119] (8) The control device 70 drives each of the first to fourth bellows actuators A1 to A4 so that the reference plane S and the first crimping tool end face 10a are parallel to each other based on the measurement results of the tilt detection sensor 80. Therefore, the tilt adjustment device 100 can automatically adjust the parallelism of the first crimping tool end face 10a with respect to the reference plane S.

[0120] (9) The first base end face 30a is formed almost entirely of the annular porous material 37, and can adsorb the second oscillator end face 21b by sucking air through the air bearing port 34. This adsorption achieves a temporary lock that limits the oscillation of the oscillator 21 relative to the device base 30. Therefore, the first base end face 30a performs temporary locking by this adsorption, and can also maintain the inclined posture of the crimping portion oscillator 20 relative to the base axis LB.

[0121] (10) The locking mechanism 40 can maintain the inclination of the crimping portion rocking body 20 relative to the base axis LB by moving the locking member 43 by pressurizing the locking air supply / discharge chamber 46 via the locking port 33 .

[0122] (11) The actuator accommodating space 54 and the lock chamber 47 communicate with the outside of the tilt adjustment device 100 via the ventilation port 36. In addition, the ventilation port 36 communicates with the outside of the tilt adjustment device 100 via the gap formed by the positioning mechanism housing 51 and the actuator accommodating top plate 51a, and the actuator accommodating space 54. As a result, the tilt adjustment device 100 can discharge particles generated in the actuator accommodating space 54 and the lock chamber 47 to the outside of the tilt adjustment device 100 by discharging air through the ventilation port 36.

[0123] (12) The ventilation port 36 communicates with the gap formed by the second oscillator end surface 21b and the first base end surface 30a via the lock chamber 47. The ventilation port 36 also communicates with the air bearing air supply / discharge chamber 32 via the gap and the annular porous material 37. That is, when air is supplied from the air bearing port 34, the ventilation port 36 can discharge particles generated in the gap and the lock chamber 47 to the outside of the tilt adjustment device 100. When air is supplied from the air bearing port 34, the ventilation port 36 can also discharge particles generated in the actuator accommodating space 54 to the outside of the tilt adjustment device 100.

[0124] [Example of change] The above embodiment can be modified as follows: The above embodiment and the following modifications can be combined with each other within the scope of technical compatibility.

[0125] The inclination adjustment device 100 does not need to include the packing 45. In this case, the ventilation port 36 communicates with the gap formed by the second oscillator end surface 21b and the first base end surface 30a via the lock chamber 47. The ventilation port 36 also communicates with the air bearing air supply / discharge chamber 32 via the gap and the annular porous material 37. That is, air is supplied from the air bearing port 34, and the supplied air is discharged from the ventilation port 36 to the outside of the inclination adjustment device 100 via the gap and the lock chamber 47. Therefore, even in this case, the ventilation port 36 can discharge particles generated in the actuator accommodating space 54 to the outside of the inclination adjustment device 100.

[0126] The tilt adjustment device 100 does not have to include the ventilation port 36. Furthermore, the actuator accommodating space 54 may be sealed. The tilt adjusting device 100 does not need to include the locking mechanism 40. In this case, the crimping portion rocking body 20 is held relative to the device base 30 by the driver 55 holding the tip spherical portion 23.

[0127] The control device 70 does not have to include the drive amount calculation unit 72. In this case, the control device 70 may store a map that determines the increase or decrease in air pressure required for each of the first to fourth bellows actuators A1 to A4 based on the measurement results of the tilt detection sensor 80. The control device 70 may compare the measurement results of the tilt detection sensor 80 with the map to derive the increase or decrease in air pressure required for each of the first to fourth bellows actuators A1 to A4.

[0128] The line extending in the axial direction of the first bellows actuator pair AA1 and the line extending in the axial direction of the second bellows actuator pair AA2 do not have to be perpendicular to each other. In this case, φ in equations (1) to (4) is changed according to the angle between a line extending in the axial direction of the first bellows actuator pair AA1 and a line extending in the axial direction of the second bellows actuator pair AA2. The cross section of the positioning mechanism housing 51 as viewed from the base axis LB does not have to be substantially rectangular.

[0129] The ends of each of the first bellows actuator pair AA1 and the second bellows actuator pair AA2 do not have to be provided at the corners of the positioning mechanism housing 51. Both end portions of the first bellows actuator pair AA1 and the second bellows actuator pair AA2 may be provided at positions spaced apart from the side walls of the positioning mechanism housing 51. In other words, the first to fourth drive ports A11 to A14 may be provided at positions spaced apart from the side walls of the positioning mechanism housing 51. In this case, the first to fourth drive base ports 351 to 354 and the first to fourth drive ports A11 to A14 communicate with each other through the inside of the device base 30.

[0130] The first and third bellows actuators A1 and A3 do not have to form the first bellows actuator pair AA1. The second and fourth bellows actuators A2 and A4 do not have to form the second bellows actuator pair AA2. That is, the first bellows actuator A1 does not have to be positioned opposite the third bellows actuator A3. And the second bellows actuator A2 does not have to be positioned opposite the fourth bellows actuator A4.

[0131] The positioning mechanism 50 may use two bellows actuators as the multiple actuators. For example, the positioning mechanism 50 may include only a first bellows actuator A1 and a second bellows actuator A2 as the multiple actuators, without including an actuator opposite to the first and second bellows actuators. In this case, the positioning mechanism 50 includes a first linear slide mechanism 61 and a second linear slide mechanism 62 as the multiple linear slide mechanisms. In this case, the positioning mechanism 50 positions the driver 55 in the direction in which each of the two bellows actuators expands and contracts. The two bellows actuators are preferably arranged so that their axes are perpendicular to each other.

[0132] The positioning mechanism 50 does not have to use multiple bellows actuators as the multiple actuators. For example, electric actuators may be used as the actuators.

[0133] The positioning mechanism 50 may use three bellows actuators as the multiple actuators. In this case, for example, it is preferable that the three bellows actuators are provided at equal intervals so as to surround the driver 55.

[0134] The positioning mechanism 50 may include two ball screw actuators B as the multiple actuators. For example, two linear motors, two ultrasonic linear motors, or two voice coil motors may also be used as the multiple actuators.

[0135] As shown in FIG. 11, the ball screw positioning mechanism B50 is attached to the second base end surface 30b. Each of the two ball screw actuators B includes a ball screw shaft B11a, B11b, a ball screw motor B12a, B12b, and a ball screw nut B13a, B13b. Each of the two ball screw actuators B is inserted into two mutually orthogonal ball screw side walls B51 of the side walls of the ball screw positioning mechanism B50. That is, the ball screw shafts B11a, B11b are orthogonal to each other. Each of the two ball screw shafts B11a, B11b is rotated by the drive of each of the ball screw motors B12a, B12b. Each of the ball screw nuts B13a, B13b is threadedly attached to each of the ball screw shafts B11a, B11b. Each of the two ball screw nuts B13a, B13b moves along the corresponding rotating ball screw shaft B11a, B11b. Each of the ball screw nuts B13a, B13b includes a corresponding connecting plate B14a, B14b. Each of the two connecting plates B14a, B14b has a corresponding ball screw shaft B11a, B11b inserted therethrough and includes a corresponding linear guide B15a, B15b extending from the insertion point. The linear guide B15a is provided so as to be movable in the direction in which the ball screw shaft B11b extends. The linear guide B15b is provided so as to be movable in the direction in which the ball screw shaft B11a extends. Each of the connecting plates B14a, B14b is connected to a driver B60 via the corresponding linear guide B15a, B15b. That is, each of the connection plates B14a, B14b connects to each of the ball screw nuts B13a, B13b and the corresponding side surface of the driver B60 on the surface facing away from each of the ball screw side walls B51.

[0136] The direction in which the ball screw nut B13a moves coincides with the direction in which the linear guide B15b moves relative to the driver B60. The direction in which the ball screw nut B13b moves coincides with the direction in which the linear guide B15a moves relative to the driver B60. Therefore, each of the linear guides B15a, B15b reduces the influence that one of the ball screw nuts B13a, B13b has on the other via the driver B60.

[0137] With the above configuration, each of the two ball screw actuators B moves the driver B60 via the connection plates B14a and B14b, respectively. As a result, the ball screw positioning mechanism B50 positions the driver B60 in a plane perpendicular to the two ball screw side walls B51.

[0138] The cylindrical bearing 52 does not need to have a gap 52c extending in the axial direction of the cylindrical bearing 52 between the cylindrical bearing inner surface 52a and the cylindrical bearing outer surface 52b. In this case, the tip spherical portion 23 has an outer diameter that matches the inner diameter of the cylindrical bearing 52.

[0139] The driver 55 does not have to include the cylindrical bearing 52 and the bearing holder 53 as separate bodies. In this case, the driver 55 is formed such that the cylindrical bearing 52 and the bearing holder 53 are integral with each other.

[0140] The driver 55 may be formed solely from a cylindrical body that defines an insertion hole into which the spherical tip portion 23 is inserted. Here, the cylindrical body is a column that defines the insertion hole into which the spherical tip portion 23 is inserted and held. The insertion hole defined by the cylindrical body does not have to be circular. In this case, the driver 55 is formed solely from the bearing holder 53 that can hold the spherical tip portion 23, and does not include the cylindrical bearing 52. In other words, the spherical tip portion 23 is inserted into and held by the bearing holder 53.

[0141] The tilt adjusting device 100 does not have to include the driver 55. In this case, the first to fourth bellows actuators A1 to A4 included in the positioning mechanism 50 are directly connected to the tip spherical portion . [Explanation of symbols]

[0142] 10... Crimping tool, 10a... First crimping tool end surface, 10b... Second crimping tool end surface, 21... Oscillator, 21a... First oscillator end surface, 21b... Second oscillator end surface, 22... Drive shaft, 22a... First drive shaft end surface, 22b... Second drive shaft end surface, 22d... Middle spherical portion, 23... Tip spherical portion, 30... Device base, 30a... First base end surface, 30b... Second base end surface, 30c... Inner peripheral surface of base, 30d...base insertion hole as insertion hole, 33...locking port, 34...air bearing port, 36...ventilation port, 37...annular porous material as air bearing, 40...locking mechanism, 42...support member, 42e...first seal, 43...locking member, 43a...locking member inner peripheral surface, 43d...second seal, 44...holding portion, 46...locking air supply / discharge chamber, 47...lock chamber, 50...positioning mechanism, 51...positioning mechanism housing as housing portion, 52...cylindrical bearing, 52c...gap, 52d...cylindrical bearing insertion hole as insertion hole, 53...bearing holding portion, 54...actuator accommodating space as accommodating space, 55...drive body, 61-64...first to fourth linear slide mechanisms as multiple linear slide mechanisms, 70...control device, 71...actuator control portion, 72...drive amount calculation portion, 80...tilt detection sensor, A1-A4...first to fourth bellows actuators as multiple actuators, AA1-AA2...first bellows actuator pair and second bellows actuator pair as two bellows actuator pairs, LC...center axis, S...reference plane.

Claims

1. a oscillator having a first oscillator end surface and a second oscillator end surface that is a convex spherical surface; a drive shaft protruding from an end surface of the second oscillator; a crimping tool having a second crimping tool end face attached to the first oscillator end face and having a first crimping tool end face different from the second crimping tool end face; an apparatus base having a first base end face that is a concave spherical surface that engages with the second oscillator end face, and a second base end face that is different from the first base end face, and having a base inner circumferential surface that defines an insertion hole through which the drive shaft is inserted and connects the second base end face and the first base end face; a tilt adjustment device that adjusts the tilt of the oscillator so that a reference plane and an end surface of the first crimping tool are parallel to each other while oscillating the end surface of the second oscillator along the end surface of the first base, a spherical tip portion provided at a second drive shaft end portion, which is an axial end portion of the drive shaft different from the first drive shaft end portion on the oscillator side, and protruding from the second base end surface; a positioning mechanism provided on an end surface of the second base and configured to position the spherical tip portion; an inclination detection sensor for measuring an inclination of the end surface of the first crimping tool relative to the reference surface; a control device that controls the positioning mechanism, the positioning mechanism changes the position of the spherical tip portion in a plane parallel to the end face of the second base, and includes a plurality of actuators arranged to surround the spherical tip portion along the end face of the second base; The control device is provided with an actuator control unit that drives the multiple actuators, and the actuator control unit drives the multiple actuators so that the reference surface and the end surface of the first crimping tool are parallel based on the results measured by the tilt detection sensor.

2. 2. The tilt adjustment device of claim 1, further comprising a driver having an inner surface against which the spherical tip portion slides while defining an insertion hole into which the spherical tip portion is inserted, and wherein the plurality of actuators are arranged to surround the driver along the second base end face and change the position of the spherical tip portion in a plane parallel to the second base end face via the driver.

3. The tilt adjustment device according to claim 2 , wherein the driver comprises a cylindrical bearing that defines the insertion hole and a bearing holder that holds the cylindrical bearing, and the central axis of the cylindrical bearing extends in the axial direction of the device base.

4. 4. The tilt adjustment device according to claim 3, wherein the cylindrical bearing has an inner diameter smaller than the diameter of the tip spherical portion, and has a gap extending in the axial direction of the cylindrical bearing so that the inner diameter of the cylindrical bearing can be expanded.

5. an air bearing port; an air bearing that receives air supply and exhaust from the air bearing port, The tilt adjustment device according to any one of claims 1 to 4, wherein the first base end surface is an air bearing surface of the air bearing, and the device base supports the oscillator so that it can oscillate at a distance from the air bearing surface, and fixes the tilted attitude of the oscillator by vacuum suction through the air bearing port.

6. 4. The tilt adjustment device according to claim 2, wherein the driving body is connected to the plurality of actuators via a plurality of linear slide mechanisms, and the positioning mechanism moves the driving body by pushing and pulling the driving body via each of the plurality of linear slide mechanisms using each of the plurality of actuators.

7. 4. The tilt adjustment device according to claim 2 or 3, wherein the plurality of actuators include four bellows actuators, the four bellows actuators form two bellows actuator pairs each consisting of two opposing bellows actuators, and each of the two bellows actuator pairs holds the drive body therebetween.

8. 8. The tilt adjustment device according to claim 7, further comprising a housing portion that is attached to an end surface of the second base and that houses the four bellows actuators and is polygonal when viewed in the axial direction of the device base, and both ends of each of the two pairs of bellows actuators are fixed to each corner of the housing portion.

9. 9. The tilt adjustment device according to claim 8, wherein the four bellows actuators are arranged so that two straight lines formed by each of the two bellows actuator pairs are perpendicular to each other.

10. 10. The tilt adjustment device according to claim 9, wherein the control device includes a drive amount calculation unit that calculates a value of pressure to be supplied to each of the four bellows actuators that is required for the reference plane and the first crimping tool end face to be parallel based on the inclination of the first crimping tool end face relative to the reference plane measured by the inclination detection sensor, and the actuator control unit drives the four bellows actuators based on the result of the drive amount calculation unit.

11. an intermediate spherical portion provided on the drive shaft between the oscillator and the tip spherical portion; a locking member provided along the inner peripheral surface of the base so as to be reciprocable in the axial direction of the device base and spaced apart from the outer surface of the drive shaft, the locking member having an inner peripheral surface surrounding the drive shaft; The tilt adjustment device according to any one of claims 1 to 4, further comprising a locking mechanism including a holding portion through which the drive shaft is inserted and which has an inner surface that engages with the intermediate spherical portion.

12. The locking mechanism includes a support member having an inner peripheral surface that is positioned between an inner peripheral surface of the locking member and an outer surface of the drive shaft and that is spaced apart from the drive shaft and surrounds the drive shaft; a first seal that seals between the support member and the locking member; a second seal for sealing between the locking member and the device base; a locking air supply / discharge chamber defined by the locking member, the device base, and the support member, The tilt adjustment device according to claim 11, further comprising: a lock port for supplying and discharging air to and from the lock air supply and discharge chamber.

13. an accommodation space that accommodates the plurality of actuators; a lock chamber formed by an inner peripheral surface of the locking member and an inner peripheral surface of the support member, the lock chamber communicating with the accommodation space via a gap between the locking member and the holding portion; a ventilation port provided on the device base and communicating with the accommodation space, an air bearing port, and an air bearing that receives air supply and exhaust from the air bearing port, the first base end surface is an air bearing surface of the air bearing, and the device base supports the oscillator so as to be spaced apart from the air bearing surface and to be able to oscillate; 13. The tilt adjustment device according to claim 12, wherein the ventilation port communicates with a gap formed by the oscillator and the air bearing via the lock chamber, and communicates with the outside of the tilt adjustment device via the accommodation space.

14. an accommodation space that accommodates the plurality of actuators; a lock chamber formed by an inner peripheral surface of the locking member and an inner peripheral surface of the support member, the lock chamber communicating with the accommodation space via a gap between the locking member and the holding portion; a ventilation port provided on the device base and communicating with the accommodation space, an air bearing port, and an air bearing that receives air supply and exhaust from the air bearing port, the first base end surface is an air bearing surface of the air bearing, and the device base supports the oscillator so that the oscillator is oscillatably spaced apart from the air bearing surface; 13. The tilt adjustment device according to claim 12, wherein the accommodation space communicates with the outside of the device base through the ventilation port and communicates with the air bearing port through the lock chamber.

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