Coating film forming method, coating film forming device, and program

Abstract

To enhance controllability of a film thickness of a coating film in an inner surface of a substrate.SOLUTION: A coating film formation method executing: a coating step of supplying a coating liquid to a center part of a front surface of a substrate, and rotating the substrate in order to expand the coating liquid to a peripheral edge part of the substrate and form the coating film; a high-temperature gas supply step of supplying a high-temperature gas of which a temperature is higher than that of the substrate to which the coating liquid is supplied to one part of a region where a back surface of the rotated substrate is exposed; a film thickness distribution adjustment step of adjusting a film thickness distribution of the coating film in the inner surface of the substrate by rotating the surface at a first rotational number; and a drying step of rotating the surface at a second rotational number different from the first rotational number after the film thickness distribution adjustment step and adjusting and drying the film thickness of the coating film in a whole of the inner surface of the substrate. In a period of the drying step, a period of stopping the supply of the high-temperature gas to the substrate may be contained.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a coating film forming method, a coating film forming apparatus, and a program. [Background technology]

[0002] 2. Description of the Related Art In a manufacturing process of a semiconductor device, various coating liquids such as resist are supplied to a semiconductor wafer (hereinafter referred to as a wafer) to form a coating film. Patent Document 1 describes a resist coating device that includes a rotary table that is fixed to overlap the center of the backside of a substrate and a nozzle that is provided below the fixed substrate, and shows that heated high-pressure gas is sprayed from the nozzle onto the entire peripheral edge of the substrate that is not overlapping the rotary table. It also describes that the resist supplied to the front side of the substrate is prevented from adhering to the peripheral edge of the backside of the substrate by the action of the high-pressure gas. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 10-261579 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique for improving controllability of the thickness of a coating film within the surface of a substrate when a coating liquid is supplied to the substrate to form the coating film. [Means for solving the problem]

[0005] The method for forming a coating film according to the present disclosure includes a coating step of supplying a coating liquid to a center portion of a surface of a substrate and rotating the substrate to spread the coating liquid toward a peripheral portion of the substrate to form a coating film; a high-temperature gas supplying step of supplying high-temperature gas having a temperature higher than that of the substrate onto which the coating liquid has been supplied, to a part of an exposed region on the rear surface of the rotating substrate; a film thickness distribution adjusting step of adjusting a film thickness distribution of the coating film within a surface of the substrate by rotating the substrate at a first rotation speed; a drying step of rotating the substrate at a second rotation speed different from the first rotation speed after the film thickness distribution adjusting step, thereby adjusting the film thickness of the coating film over the entire surface of the substrate and drying the film. picture, supply of the high-temperature gas to the substrate is started before the coating liquid supplied to the substrate covers the entire surface of the substrate by rotation of the substrate; a period during which the film thickness distribution adjustment step is performed, or A period during which the drying step is carried out In The supply of the hot gas to the substrate is stopped. will be done. [Effects of the Invention]

[0006] The present disclosure makes it possible to improve the controllability of the thickness of a coating film within the surface of a substrate when a coating liquid is supplied to the substrate to form the coating film. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a plan view of a coating film forming apparatus according to the present disclosure. [Figure 2] FIG. 4 is a graph illustrating the effect of the coating film forming apparatus. [Figure 3] FIG. 2 is a vertical cross-sectional side view of a processing section included in the coating film forming apparatus. [Figure 4] 10 is a plan view showing a state in which high-temperature gas and cleaning liquid are discharged from a gas nozzle and a cleaning nozzle included in the processing section. FIG. [Figure 5] FIG. 2 is a side view of the gas nozzle and the cleaning nozzle. [Figure 6A] 3A to 3C are process diagrams showing the processing in the coating film forming apparatus. [Figure 6B] 3A to 3C are process diagrams showing the processing in the coating film forming apparatus. [Figure 6C] 3A to 3C are process diagrams showing the processing in the coating film forming apparatus. [Figure 6D] 3A to 3C are process diagrams showing the processing in the coating film forming apparatus. [Figure 7A] 3A to 3C are process diagrams showing the processing in the coating film forming apparatus. [Figure 7B] 3A to 3C are process diagrams showing the processing in the coating film forming apparatus. [Figure 7C] 3A to 3C are process diagrams showing the processing in the coating film forming apparatus. [Figure 7D] 3A to 3C are process diagrams showing the processing in the coating film forming apparatus. [Figure 8] 10 is a chart showing the state of high-temperature gas being discharged from the gas nozzle and the change in the rotation speed of the wafer being processed in the apparatus. FIG. [Figure 9] FIG. 10 is a chart showing the discharge period of the high-temperature gas from the gas nozzle and the wafer transfer interval. [Figure 10] FIG. 10 is a chart showing the discharge period of the high-temperature gas from the gas nozzle and the wafer transfer interval. [Figure 11] FIG. 10 is a plan view showing a modified example of the coating film forming apparatus. [Figure 12] FIG. 10 is a plan view showing another modified example of the coating film forming apparatus. [Figure 13] FIG. 10 is a plan view showing still another modified example of the coating film forming apparatus. [Figure 14] FIG. 10 is a graph showing the results of an evaluation test. [Figure 15] FIG. 10 is a graph showing the results of an evaluation test. DETAILED DESCRIPTION OF THE INVENTION

[0008] A coating film forming apparatus 1, which is one embodiment of the coating film forming apparatus of the present disclosure, will be described below. The coating film forming apparatus 1 will be outlined with reference to the plan view of FIG. 1 . The coating film forming apparatus 1 supplies resist as a coating liquid to the center of the surface of a wafer W, which is a circular substrate having a diameter of, for example, 300 mm, and then rotates the wafer W to spread the resist toward the peripheral edge of the wafer W by centrifugal force, thereby forming a resist film R. In other words, the coating film, or resist film R, is formed by spin coating. The viscosity of the resist used in this example is relatively high, for example, 10 cP or higher at room temperature. The coating film forming apparatus 1 is configured to perform a pre-treatment (pre-wet) in which thinner is spin-coated in the same manner as the resist before supplying the resist. This pre-wet is a process to improve the wettability of the resist on the surface of the wafer W.

[0009] The coating film forming apparatus 1 is configured to eject high-temperature gas, the temperature of which is higher than that of the wafer W, from a nozzle onto a localized radial region on the periphery of the backside of the rotating wafer W. To explain the role of this high-temperature gas, we will assume that the apparatus is configured so that the high-temperature gas is not supplied to the wafer W. In the manufacturing process of semiconductor devices, it is desirable to reduce the amount of resist used to process each wafer W. However, if the amount of resist supplied to the wafer W is small, supplying the above-mentioned thinner to the center of the wafer W and spin-coating it, followed by the above-mentioned spin-coating of the resist, may not achieve sufficiently high film thickness uniformity of the resist film R within the surface of the wafer W.

[0010] This will be explained in more detail with reference to the graph in Figure 2. The horizontal axis of the graph represents the distance (unit: mm) from the center of the wafer W to each position on the diameter of the wafer W, with positions on one end of the wafer W and positions on the other end of the wafer W being indicated by distances marked with a + sign and distances marked with a - sign, respectively. The vertical axis of the graph represents the thickness of the resist film R (unit: nm), with scale marks indicating an increase of b nm from an m. a and b are predetermined positive values. Forming the resist film R without supplying high-temperature gas may result in a film thickness distribution as shown by the dashed line in the graph. Specifically, the film thickness distribution may be such that the film thickness in an annular region along the periphery of the wafer W at the peripheral edge of the wafer W is smaller than the film thickness in other regions. Hereinafter, this annular region may be referred to as an annular low-film-thickness region. As will be shown later as an evaluation test, by adjusting the position where the thinner is supplied during prewetting, it is possible to prevent the formation of an annular low-film-thickness region and reduce the variation in film thickness within the surface of the wafer W. However, in this case, the coverage of the surface of the wafer W by the resist film R decreases.

[0011] Therefore, the coating film forming apparatus 1 is configured to discharge the above-mentioned high-temperature gas onto the backside of the rotating wafer W so as to prevent the formation of the annular low-film-thickness region while ensuring sufficient coverage of the resist film R. This high-temperature gas is discharged onto the backside of the annular low-film-thickness region that would be formed if the high-temperature gas was not discharged, and raises the temperature of the annular region into which the high-temperature gas is discharged.

[0012] This heating promotes drying of the resist in the annular region, causing solid components in the resist to accumulate, making the film thickness in this annular region equal to that in other regions, thereby improving the uniformity of the resist film thickness across the wafer W and achieving a film thickness distribution as shown by the solid line in Figure 2. However, if the supply of high-temperature gas continues during processing of the wafer W, the film thickness in this annular region may become too large, which could reduce the uniformity of the film thickness distribution across the wafer W. To prevent this, the supply of high-temperature gas is stopped midway through processing of the wafer W.

[0013] Returning to FIG. 1, the configuration of the coating film forming apparatus 1 will be described in detail. The coating film forming apparatus 1 includes two processing sections 2, a main processing mechanism 4, and two EBR (Edge Bead Removal) mechanisms 5. The two processing sections 2 are configured identically to each other and each includes a circular cup 21 that stores wafers W for processing. The main processing mechanism 4 includes nozzles that eject the thinner and resist, respectively, and a mechanism for moving each nozzle, and is shared by the two processing sections 2. An EBR mechanism 5 is provided for each processing section 2, and is a mechanism for performing EBR, which supplies thinner to the peripheral edge of the wafer W to remove unnecessary resist film R. The two EBR mechanisms 5 are configured identically to each other.

[0014] As described above, two cups 21 are provided, positioned at the same height. The direction in which these cups 21 are lined up will be described as the left-right direction. Wafers W are transported to each cup 21 from the rear by a transport mechanism. To distinguish between the left and right processing sections 2, the processing section 2 on the right side may be referred to as 2A and the processing section 2 on the left side as 2B when viewed from the front to the rear. Furthermore, the cup 21 in processing section 2A and the cup 21 in processing section 2B may be referred to as 21A and 21B, respectively.

[0015] The processing section 2 will be described below with reference to the longitudinal side view of FIG. 3. In addition to the cup 21 described above, the processing section 2 includes a spin chuck 22, a rotation mechanism 24, a gas nozzle 31, and a cleaning nozzle 34. The spin chuck 22 is a circular stage on which the wafer W is placed. It is positioned over the center of the backside of the wafer W and holds the wafer W horizontally by suctioning the center. The spin chuck 22 is connected to the rotation mechanism 24 via a vertically extending rotation shaft 23. The rotation mechanism 24, which includes a motor, rotates the spin chuck 22 about the vertical axis, and the wafer W held by the spin chuck 22 also rotates accordingly. The central axes of the spin chuck 22 and the cup 21 are aligned, and the wafer W is held by the spin chuck 22 so that its center is aligned with this central axis and rotates about this central axis. The rotation direction of the wafer W is clockwise in a plan view.

[0016] The cup 21 is composed of a base 25 and a main body 26. The main body 26 forms the side wall of the cup 21 that surrounds the spin chuck 22, which is a stage for the wafer W, and the wafer W held by the spin chuck 22. The lower end of the side wall of the cup 21 extends toward the center of the cup 21 and further extends upward to form an annular recess 27 that is formed along the rotation direction of the spin chuck 22. The annular recess 27 is provided with a drainage port and an exhaust pipe for evacuating the inside of the cup 21, but these are not shown in the figure. The upper end of the inner periphery of the annular recess 27 extends toward the center of the cup 21 to form a flange.

[0017] The base 25 is formed in a horizontal disk shape and forms the bottom of the cup 21. The peripheral edge of the base 25 protrudes upward and forms a connecting portion formed along the periphery of the flange of the main body 26, and the connecting portion and the flange are connected to each other. The spin chuck 22 is disposed above the base 25, and the rotation mechanism 24 is disposed below the base 25, with the rotation shaft 23 passing through the base 25. In FIG. 3, 28 is a support member that supports the base 25 on the rotation mechanism 24.

[0018] A gas nozzle 31 having a vertically elongated block shape is provided to penetrate the base 25. A gas outlet 32 ​​is formed at the upper end of the gas nozzle 31 located above the base 25. The gas outlet 32, which is a first outlet, injects the high-temperature gas described above into a localized position on the backside of the rotating wafer W. More specifically, the peripheral portion of the backside of the wafer W is exposed and not covered by the spin chuck 22. The high-temperature gas is injected toward a partial region of this exposed peripheral portion along the radial direction of the wafer W. The high-temperature gas has a temperature of, for example, about 50°C at the gas outlet 32 ​​so that it can heat the wafer W when it is injected onto the wafer W, as described below. The lower end of the gas nozzle 31 is located above the rotation mechanism 24. The gas nozzle 31 is disposed forward of the spin chuck 22 in a plan view.

[0019] A cleaning nozzle 34 is provided at a position offset from the gas nozzle 31 in the circumferential direction of the base 25. Like the gas nozzle 31, the cleaning nozzle 34 is also configured as a vertically elongated block. A cleaning liquid outlet 35, which is a second outlet, is formed at the upper end of the cleaning nozzle 34, which is located above the base 25. The cleaning nozzle 34 discharges the cleaning liquid supplied from a cleaning liquid supply source via a flow path (not shown) to a localized position on the backside of the rotating wafer W, thereby cleaning the backside of the wafer W. In other words, the cleaning liquid is also discharged to an exposed area not covered by the spin chuck 22. The temperature of the cleaning liquid discharged from the cleaning nozzle 34 is lower than the temperature of the high-temperature gas discharged from the gas nozzle 31 and is at room temperature (specifically, for example, 20°C to 30°C). The cleaning liquid is, for example, thinner. The gas nozzle 31 and the cleaning nozzle 34 will be described in more detail later.

[0020] 3, three pins 36 extending vertically are provided in the cup 21, as shown in FIG. 1, and each pin 36 penetrates the base 25. The pins 36 are raised and lowered by an elevating mechanism to transfer the wafer W between the transfer mechanism and the spin chuck 22. The elevating mechanism and the transfer mechanism are not shown.

[0021] Next, the main processing mechanism 4 will be described. The main processing mechanism 4 includes an arm 41 with its tip facing rearward, a resist discharge nozzle 42 and a thinner discharge nozzle 43 for pre-wetting, both of which are provided at the tip of the arm 41, and a moving mechanism 44. The moving mechanism 44 is located in front of the cup 21, and the base end of the arm 41 is connected to the moving mechanism 44. The moving mechanism 44 can move left and right together with the arm 41 and can also raise and lower the arm 41. The moving mechanism 44 allows the resist discharge nozzle 42 and the thinner discharge nozzle 43 to move between a waiting area (not shown) outside the cup 21 and a discharge position above the center of the wafer W. At their discharge positions, the resist discharge nozzle 42 and the thinner discharge nozzle 43 discharge resist and thinner, respectively, supplied from a resist supply source and a thinner supply source (not shown), onto the center of the wafer W. The resist discharge nozzle 42 constitutes a coating liquid supply unit.

[0022] Next, the EBR mechanism 5 will be described. The EBR mechanism 5 includes an arm 51 with a front end facing rearward, a thinner discharge nozzle 52 for EBR provided at the front end of the arm 51, and a moving mechanism 53. The moving mechanism 53 is located near the front side of the cup 21 to be processed by the EBR mechanism 5, which includes the moving mechanism 53, and the base end of the arm 51 is connected to the moving mechanism 53. The moving mechanism 53 can move left and right together with the arm 51 and can also raise and lower the arm 51. The moving mechanism 53 allows the thinner discharge nozzle 52 to move between a waiting area (not shown) outside the cup 21 and a discharge position within the cup 21. At the discharge position, the thinner discharge nozzle 52 discharges thinner supplied from a thinner supply source (not shown) toward the peripheral edge of the wafer W below.

[0023] Incidentally, a heating mechanism 61 equipped with a heater is provided, for example, behind cup 21A. Heating mechanism 61 is positioned away from cup 21A so as not to affect the processing of wafer W in cup 21A. Air purified through a filter (not shown) is supplied from air supply source 62 to heating mechanism 61, where it is heated. This air is then supplied as the above-mentioned high-temperature gas to each gas nozzle 31 in processing units 2A and 2B through the flow paths formed by the piping. An example of the layout of this piping in a plan view will be described below.

[0024] The downstream side of pipe 63 extends rearward from heating mechanism 61, passes to the right of cup 21A, is bent at a position forward of cup 21A, and extends leftward behind cup 21A. This leftward-extending pipe 63 branches into two, for example, between cups 21A and 21B, forming pipes 64A and 64B extending leftward. The downstream side of pipe 64A turns back between cups 21A and 21B toward the right, enters the area overlapping cup 21A, and then bends forward. The forward-bent portion extends between base 25 and rotation mechanism 24 (see FIG. 3 ), bypassing rotation shaft 23 and support 27 to avoid interference with these components, and is connected to the lower end of gas nozzle 31 below base 25. The downstream side of pipe 64B enters the area overlapping cup 21B, and then bends forward. The forward bent portion, like the same portion of piping 64A, extends between base 25 and rotation mechanism 24, bypassing rotation axis 23 and support portion 27, and is connected to the lower end of gas nozzle 31.

[0025] Valves 65A and 65B are provided in the pipes 64A and 64B near the cups 21A and 21B, respectively. The valves 65A and 65B are located below the cups 21A and 21B and outside the cups 21A and 21B in a plan view. The upstream end of pipe 66A is connected to the upstream side of the valve 65A in the pipe 64A, and the connection position of the pipe 66A is near the valve 65A and, for example, outside the cup 21A in a plan view. The downstream side of the pipe 66A extends to the right behind the cup 21A, then bends forward and extends to pass to the right of the cup 21A. The upstream end of pipe 66B is connected to the upstream side of the valve 65B in the pipe 64B, and the connection position of the pipe 64B is near the valve 65B and, for example, outside the cup 21B in a plan view. The downstream side of the pipe 66B extends to the right behind the cup 21B, then bends forward and extends to pass the right side of the cup 21A.

[0026] The downstream ends of the pipes 66A and 66B are connected via valves 67A and 67B to exhaust passages to which the downstream sides of the exhaust pipes of the cups 21A and 21B are connected. Therefore, in this embodiment, the pipes 66A and 66B are exhaust pipes for exhausting high-temperature gas. As described above, except for the portions of the pipes 64A and 64B routed between the rotation mechanism 12 and the base 25, the pipes 63, 64A, 64B, 66A, and 66B are routed in areas below the cups 21A and 21B.

[0027] During operation of the coating film forming apparatus 1, high-temperature gas is constantly supplied from the air supply source 62 to the pipe 63 via the heating mechanism 61. Regarding valve 65A of pipe 64A connected to the gas nozzle 31 of cup 21A and valve 67A of pipe 66A connected to the exhaust path, one of them is open, while the other is closed. Similarly, regarding valve 65B of pipe 64B connected to the gas nozzle 31 of cup 21B and valve 67B of pipe 66B connected to the exhaust path, one of them is open, while the other is closed. Therefore, during periods other than when high-temperature gas is discharged from the gas nozzle 31 of cup 21A, high-temperature gas is supplied to pipe 66A and discharged to the exhaust path. During periods other than when high-temperature gas is discharged from the gas nozzle 31 of cup 21B, high-temperature gas is supplied to pipe 66B and discharged to the exhaust path.

[0028] Therefore, the flow path from the heating mechanism 61 to the valves 65A and 65B is heated by the high-temperature gas even during periods when the high-temperature gas is not being discharged from the gas nozzle 31. Because the valves 65A and 65B are located near the cups 21A and 21B, i.e., relatively close to the gas nozzle 31, as described above, a relatively wide area of ​​the flow path from the heating mechanism 61 to the gas nozzle 31 is heated. Therefore, the difference in temperature between the high-temperature gas immediately after the start of discharge and the temperature at other times is reduced, allowing high-temperature gas at a desired temperature to be quickly supplied to the wafers W, thereby improving the throughput of the apparatus. Furthermore, when the gas nozzle 31 repeatedly starts and stops discharging the high-temperature gas to sequentially process multiple wafers W, the temperature variation of the high-temperature gas immediately after the start of discharge can be reduced, thereby reducing process variations (i.e., variations in the thickness of the resist film R) among the wafers W.

[0029] From the viewpoint of suppressing temperature variations in the discharged high-temperature gas by adjusting the temperature of the flow path, it is preferable that the distance between the valves 65A, 65B and the gas nozzle 31 be short. However, if the distance is too short, the high-temperature gas supplied toward the valves 65A, 65B when the valves 65A, 65B are closed may heat the base 25 and the spin chuck 22 located within the cup 21. In this case, variations in processing within the wafer W and between wafers W may occur due to heat conduction and radiant heat from the heated components to the wafer W. To prevent such problems, in this embodiment, the valves 65A, 65B are disposed at a height below the cup 21 and outside the cup 21 in a plan view. Note that, since it is only necessary to prevent the distance between the valves 65A, 65B and the gas nozzle 31 from becoming too short, the valves 65A, 65B may be disposed so as to satisfy only one of the conditions of being below the cup 21 and being outside the cup 21 in a plan view.

[0030] Valves 67A and 67B and the above-mentioned valves 45A and 65B form a switching unit for switching the supply destination of high-temperature gas. The high-temperature gas flow path formed by pipes 63, 64A, and 64B forms a gas supply path. The high-temperature gas flow path formed by pipes 66A and 66B forms a branch path.

[0031] Next, the gas nozzle 31 and cleaning nozzle 34 provided in the same cup 21 will be described with reference to the plan view of FIG. 4 and the side view of FIG. 5. The gas outlet 32 ​​of the gas nozzle 31 has a projection area P1 on the back surface of the wafer W, directed in the direction of high-temperature gas ejection. The projection area P1, which is the first projection area, is set so as to overlap with the annular low-film-thickness area where the resist film thickness is small when high-temperature gas is not ejected, as described in FIG. 2. The position of the annular low-film-thickness area varies depending on the type of resist used and the processing conditions, so the position of the projection area P1 in the radial direction of the wafer W can be set to match the position of the annular low-film-thickness area.

[0032] In order to prevent the high-temperature gas discharged into the projection area P1 from flowing toward the peripheral edge of the wafer W and being discharged from the cup 21 without resisting the action of centrifugal force due to the rotation of the wafer W, and from becoming a turbulent flow, the gas discharge port 32 opens obliquely upward, from the center side toward the peripheral edge side of the wafer W. In a plan view, a straight line drawn from the gas discharge port 32 in the discharge direction of the high-temperature gas is designated as L1. If a tangent line L2 to the wafer W is drawn that passes through an intersection Q1 between the straight line L1 and the peripheral edge of the wafer W, the straight line L1 is not perpendicular to the tangent line L2 in a plan view but is inclined.

[0033] If the tangent line L2 and the straight line L1 were perpendicular to each other, the distance from the projection area P1 along the straight line L1 to the peripheral edge of the wafer W would be relatively short, and the high-temperature gas would flow from the peripheral edge of the wafer W to the outside at a relatively high flow rate. This would cause a mist of thinner and / or resist on the backside of the wafer W to flow out of the cup 21. To prevent this mist from flowing out, the discharge direction of the high-temperature gas is set so that the tangent line L2 and the straight line L1 are not perpendicular to each other. To fully achieve the effect of preventing the mist from flowing out, the angle θ1 between the tangent line L2 and the straight line L1 is preferably less than 90°, for example, and specifically, is set to 70°.

[0034] Furthermore, the high-temperature gas is discharged from the gas discharge port 32 in a direction following the rotation direction of the wafer W in a plan view, i.e., in a direction not opposing the rotation of the wafer W. More specifically, a point on the back surface of the wafer W in the projection area P1 moves circularly at a uniform velocity due to the rotation of the wafer W. When the angle θ2 between the direction of a velocity vector (shown as L3) having the circularly moving point as a base point in a plan view and a line L1 extending along the discharge direction of the high-temperature gas is an obtuse angle, the high-temperature gas is discharged following the rotation direction of the wafer W. Discharging the high-temperature gas in this manner prevents the high-temperature gas heading toward the back surface of the wafer W from being repelled and scattered from the back surface of the wafer W due to the rotation of the wafer W. In other words, the discharged high-temperature gas flows along the rotation of the wafer W and remains in contact with the wafer W for a relatively long period of time, thereby enabling efficient heating of the wafer W.

[0035] The cleaning nozzle 34 will now be described. The cleaning liquid discharge port 35 of the cleaning nozzle 34 has a projection area P2 on the back surface of the wafer W in the direction of the cleaning liquid discharge. The cleaning nozzle 34 discharges the cleaning liquid obliquely upward from the center side of the wafer W toward the peripheral edge side. The centrifugal force of the rotation of the wafer W spreads the cleaning liquid, cleaning the area on the back surface of the wafer W from the projection area P2, which is the second projection area, to the peripheral edge of the wafer W.

[0036] As described above, the temperature of the cleaning liquid discharged from the cleaning nozzle 34 is lower than the temperature of the high-temperature gas discharged from the gas nozzle 31. The timing at which the discharge of the cleaning liquid onto the wafer W is completed is later than the timing at which the discharge of the high-temperature gas onto the wafer W is completed. Therefore, when wafers W are sequentially processed in the same cup 21, the inside of the cup 21, which has been heated by the discharge of the high-temperature gas, is cooled by the discharge of the cleaning liquid onto the wafer W and the scattering of the cleaning liquid from the wafer W. This suppresses temperature variations inside the cup 21 during the processing of each wafer W, which are caused by heat accumulation within the cup 21. Therefore, the cleaning liquid also plays a role in improving the uniformity of processing among the wafers W.

[0037] Like the gas nozzle 31, the cleaning nozzle 34 is configured to eject the cleaning liquid in a direction that follows the rotation direction of the wafer W in a plan view, thereby suppressing scattering of the cleaning liquid due to the rotation of the wafer W. The projection area P1 of the gas nozzle 31 and the projection area P2 of the cleaning nozzle 34 are spaced apart from each other in the rotation direction of the wafer W, and when viewed in this rotation direction, the projection area P1 of the gas nozzle 31 is located downstream of the projection area P2 of the cleaning nozzle 34. When viewed along the rotation direction of the wafer W, two arc-shaped areas exist between the projection area P1 and the projection area P2, and the term "downstream" here refers to the downstream side when viewed from the shorter of the two arc-shaped areas.

[0038] Consider a case where the positions of the projection regions P1 and P2 in the rotation direction are reversed, and the interval between the end of the high-temperature gas discharge period onto the wafer W and the end of the cleaning liquid discharge period onto the wafer W is relatively short, or the high-temperature gas discharge period and the cleaning liquid discharge period overlap. In this case, the area on the backside of the wafer W to which the high-temperature gas is supplied moves together with the high-temperature gas due to the rotation of the wafer W to a position near the cleaning liquid supply position after a short time. In other words, the cleaning liquid is supplied to an area on the backside of the wafer W where a relatively large amount of high-temperature gas remains. In this case, the high-temperature gas and the cleaning liquid interfere with each other and are scattered from the backside of the wafer W. The contact time of the high-temperature gas with the backside of the wafer W is relatively short, which may reduce the effectiveness of the high-temperature gas. In addition, the scattered cleaning liquid may become particles and adhere to the wafer W.

[0039] However, since projection area P1 is located downstream of projection area P2 as described above, the area to which the high-temperature gas is supplied to the backside of wafer W moves toward the position where the cleaning liquid is ejected over a relatively long period of time, and by that time the high-temperature gas has flowed outside of wafer W due to the centrifugal force of rotation. Therefore, the interference between the high-temperature gas and the cleaning liquid is more reliably suppressed, and the heating effect of the wafer W by the high-temperature gas can be sufficiently obtained, while the generation of particles in the cleaning liquid can also be suppressed. Furthermore, since scattering of the cleaning liquid is prevented, the cleaning liquid remains in cup 21 for a relatively long time, and the cooling effect of the cleaning liquid described above can be sufficiently obtained.

[0040] It has been described above that interference between the high-temperature gas and the cleaning liquid can be prevented by appropriately setting the positional relationship between the projection areas P1 and P2, but in an example of processing a wafer W by the coating film forming apparatus 1 described later, the discharge of the cleaning liquid onto the wafer W starts a short time after the discharge of the high-temperature gas onto the wafer W stops. In other words, the discharge period of the high-temperature gas and the discharge period of the cleaning liquid are offset, making it difficult for the above-mentioned interference to occur.

[0041] The coating film forming apparatus 1 includes a control unit 10 (see FIG. 1). The control unit 10 is configured with a computer and is provided with a program. The program incorporates steps that enable a series of operations in the coating film forming apparatus 1 to be performed. The program causes the control unit 10 to output control signals to each part of the coating film forming apparatus 1, thereby controlling the operation of each part. Specifically, the control units control operations such as the movement of each nozzle by the movement mechanisms 44 and 53, the opening and closing of the valves 65A, 65B, 67A, and 67B, the discharge of resist and thinner from the resist discharge nozzle 42 and the thinner discharge nozzles 43 and 52, and the rotation of the wafer W by the rotation mechanism 24. The above program is stored on a storage medium such as a compact disc, hard disk, or DVD, and installed in the control unit 10.

[0042] Next, the processing of the wafer W by the coating film forming apparatus 1 will be described with reference to the process diagrams of Figures 6 and 7. Also, reference will be made as appropriate to the chart of Figure 8, which shows the relationship between the change in the rotation speed (unit: rpm) of the wafer W and the period during which high-temperature gas is discharged from the gas nozzle 31 to the wafer W. In the following description, it is assumed that the wafer W is processed in processing unit 2A of processing units 2A and 2B.

[0043] First, the transfer mechanism transfers the wafer W onto cup 21A in processing section 2A. At this time, valve 65A is closed and valve 67A is open, discharging of high-temperature gas from gas nozzle 31 in processing section 2A stops, and high-temperature gas is supplied to pipe 66A for exhaust. Then, when the wafer W is held by spin chuck 22 via pins 36 and begins to rotate, valve 67A is closed and valve 65A is opened. As a result, exhausting of high-temperature gas from pipe 66A stops, and the high-temperature gas is discharged from gas nozzle 31, thereby starting heating of the wafer W (FIG. 6A). This discharge of high-temperature gas corresponds to a high-temperature gas supply step.

[0044] Next, thinner is dispensed from the thinner dispensing nozzle 43 onto the center of the wafer W, and the dispensing stops when a predetermined amount of thinner has been dispensed. The centrifugal force of the rotation of the wafer W causes the thinner to spread toward the periphery of the wafer W, resulting in the pre-wetting described above. After that, a predetermined amount of resist is dispensed from the resist dispensing nozzle 42 onto the center of the wafer W (time t1), and when dispensing stops, the rotation speed of the wafer W increases (time t2) to a relatively high rotation speed d1. Then, the centrifugal force of the rotation of the wafer W causes the resist to spread toward the periphery of the wafer W ( FIG. 6B ). Because high-temperature gas is being dispensed before the supply of resist to the wafer W, the wafer W is sufficiently heated, which promotes drying of the resist in the annular thin-film region, which is the surface side of the position where the high-temperature gas is dispensed, and causes the deposition of solid components in the resist to proceed.

[0045] Subsequently, after the resist spreads over the entire surface of the wafer W to form a resist film R (FIG. 6C), the rotation speed of the wafer W is reduced (time t3) to the first rotation speed, d2. This change in rotation speed and the fluidity remaining in the resist that constitutes the resist film R adjust the film thickness distribution within the surface of the wafer W. Specifically, a portion of the resist that was concentrated toward the periphery of the wafer W due to rotation at rotation speed d1 moves toward the center of the wafer W due to the reduced centrifugal force caused by the reduction in the rotation speed of the wafer W, and the film thickness distribution changes so that the film thickness of the resist film becomes more uniform within the surface of the wafer W (FIG. 6D). Meanwhile, high-temperature gas continues to be ejected toward the backside of the wafer W, and drying progresses in the annular region. This rotation speed d2 is, for example, 50 rpm to 500 rpm, and more specifically, is, for example, 100 rpm. The process of rotating the wafer W at this rotation speed d2 corresponds to the film thickness distribution adjustment process.

[0046] Thereafter, the rotation speed of the wafer W increases (time t4) to rotation speed d3, which is higher than rotation speed d2 but lower than rotation speed d1. The period during which the wafer W is rotated at this second rotation speed d3 is the period during which the film thickness over the entire surface of the wafer W is changed to the desired film thickness. After the rotation speed is changed to rotation speed d3, valve 65A is closed and valve 67A is opened, thereby stopping the discharge of high-temperature gas from gas nozzle 31 and restarting the exhaust of high-temperature gas through pipe 66A (time t5).

[0047] For example, immediately after changing to the rotation speed d3, the resist solvent remaining in the resist film R causes fluctuations in not only the overall film thickness within the surface of the wafer W but also the film thickness distribution within the surface of the wafer W, but as the drying of the resist film R progresses, this fluctuation in the film thickness distribution within the surface stops (FIG. 7A). At this time, as described above, the drying in the annular low-film-thickness region is promoted, so the variation in film thickness between that region and other regions is suppressed, and the film thickness is uniform at each part in the radial direction of the wafer W.

[0048] Thereafter, rotation at the rotation speed d3 continues, and the thickness of the resist film R decreases over the entire surface of the wafer W. This rotation speed d3 is, for example, 700 rpm to 2000 rpm, and more specifically, for example, 1000 rpm. The process of rotating the wafer W at the rotation speed d3 to change the film thickness over the entire surface of the wafer W corresponds to the drying process. As described above, the discharge of high-temperature gas onto the wafer W is stopped during rotation at the rotation speed d3, so the period during which the drying process is performed overlaps with the period during which the discharge of high-temperature gas is stopped. This prevents localized regions within the surface of the wafer W from drying excessively, and allows drying to proceed over the entire surface of the wafer W. In other words, by allowing drying to proceed with high uniformity over each portion of the wafer W in the radial direction, the occurrence and expansion of variations in the film thickness of the resist film R is prevented, and the film thickness decreases over the entire surface of the wafer W (FIG. 7B).

[0049] When the resist film R reaches a desired thickness, the rotation speed of the wafer W increases (time t6) to d4, which is higher than d3 but lower than d1. Then, thinner is dispensed from the thinner dispensing nozzle 52 onto the peripheral edge of the front surface of the wafer W, thereby performing EBR to remove the resist film R from the peripheral edge of the wafer W. Concurrently with this dispensing of thinner onto the peripheral edge of the front surface, thinner, a cleaning liquid, is dispensed from the cleaning nozzle 34 onto the back surface of the wafer W, thereby removing any foreign matter adhering to the back surface of the wafer W (FIG. 7C). The interior of the cup 21A, whose temperature has risen due to the high-temperature gas as described above, is cooled by the dispensing of the cleaning liquid. Thereafter, the dispensing of thinner from the thinner dispensing nozzle 52 and the cleaning nozzle 34 stops, and after the thinner is shaken off, the rotation of the wafer W stops (FIG. 7D). The wafer W is then unloaded from the coating film forming apparatus 1 in the reverse order of the loading procedure.

[0050] Although the processing of wafer W in processing section 2A has been described as a representative of processing sections 2A and 2B, when processing wafer W in processing section 2B, each section of the apparatus operates in the same manner as when processing is performed in processing section 2A. However, the operations of valves 65A and 67A in the above description should be interpreted as the operations of valves 65B and 67B.

[0051] As described above, the process in the coating film forming apparatus 1 prevents the formation of the annular low-thickness region described in FIG. 2 and allows the formation of a resist film R with a highly uniform thickness across the wafer W. Furthermore, as will be described later as an evaluation test, this process allows the formation of a resist film R with high coverage on the surface of the wafer W even when a small amount of resist is supplied to the wafer W. The apparatus of Patent Document 1, described above, is configured to supply heated gas to the entire peripheral portion of the substrate (wafer W) that is not coated on the rotary table. With this configuration, each radial portion of the peripheral portion is heated uniformly. Therefore, it is not possible to control the local film thickness in the radial direction, making it difficult to prevent the formation of the annular low-thickness region described above.

[0052] The coating film forming apparatus 1 is incorporated into, for example, a system equipped with a wafer W transfer mechanism, and sequentially processes wafers W transferred by lot through the system. More specifically, for each of the processing sections 2A and 2B, multiple wafers W belonging to one lot are transferred sequentially, and then multiple wafers W belonging to another lot are transferred sequentially. Because the processing sections 2A and 2B sequentially process the transferred wafers W, each of the processing sections 2A and 2B processes wafers W from one lot first, followed by wafers W from another lot. Depending on the interval between transfers of lots to the system and the processing conditions of each device in the system, it may take a relatively long time from the end of processing the last wafer W of one lot in each of the processing sections 2A and 2B until the start of processing the first wafer W of another lot.

[0053] The following description will be given assuming that lots A and B are transferred to processing unit 2A in that order. Transferring each lot as described above means that the transfer interval between the last wafer W of lot A and the first wafer W of lot B (the transfer interval between lots A and B) may be longer than the transfer interval between the second and subsequent wafers W within the same lot. If the transfer interval between lots A and B becomes too long, high-temperature gas will not be supplied for a long time to the flow path from the downstream side of valve 65A of pipe 64A to gas nozzle 31, causing the flow path to cool down before the first wafer W of lot B is processed, and there is a risk that the first wafer W of lot B will not be sufficiently heated.

[0054] To prevent such a problem, the timing at which the high-temperature gas starts to be discharged when processing the first wafer W in a lot may be set earlier than the timing at which the high-temperature gas starts to be discharged when processing other wafers W in the same lot. In other words, the timing at which the heated gas is discharged to the wafer W is set to differ depending on the transfer interval between the wafer W and the wafer W placed on the spin chuck 22 immediately before that wafer W.

[0055] A more detailed explanation will be given with reference to the timing chart in Fig. 9. In Fig. 9, the periods during which the last wafer W (indicated as AX) of lot A, the first wafer W (indicated as B1), and the second wafer W (indicated as B2) of lot B are placed on spin chuck 22 of processing section 2A, and the periods during which high-temperature gas is discharged to process each wafer W are indicated by white arrows. That is, wafers AX, B1, and B2 are wafers W that are subsequently transferred to spin chuck 22, and if wafer AX is one substrate, the next substrate is wafer B1, and if wafer B1 is one substrate, the next substrate is wafer B2.

[0056] In the chart, the time when each wafer W is placed on the spin chuck 22 is indicated as a placement start time s1, and the time when placement by the spin chuck 22 ends (when the wafer W is released from the spin chuck 22) is indicated as a placement end time s4. As described above, the transfer interval E1 between lots A and B (the time from the placement end time s4 of wafer AX to the placement start time s1 of wafer B1) is longer than the transfer interval between wafers B1 and B2 (the time from the placement end time s4 of wafer B1 to the placement start time s1 of wafer B2).

[0057] When processing wafer B2, the discharge of high-temperature gas begins at time s2, a preset time E3 having elapsed since wafer B2 placement start time s1. Processing is then performed according to the procedure described in Figures 6 and 7, and the discharge of high-temperature gas stops at time s3, a predetermined time after wafer placement start time s1. This time s3 corresponds to time t5 in the chart of Figure 8. Each wafer W from the third wafer onward in lot B is processed in the same manner as wafer B2 described here.

[0058] On the other hand, when processing wafer B1, the discharge of high-temperature gas begins at time s2', a predetermined time E3' from the start time s1 when wafer W2 is placed on the spin chuck 22. Time E3' is shorter than time E3, so the discharge of high-temperature gas begins earlier than when processing wafer B2, relative to the start time s1. The discharge of high-temperature gas then stops at time s3, a predetermined time after the start time s1. Therefore, the period during which high-temperature gas is discharged during processing wafer B1 is longer than that during processing wafer B2, due to the time difference between E3 and E3'.

[0059] In this way, the gas nozzle 31 starts discharging high-temperature gas at a timing that corresponds to the interval between wafer W transfers to the spin chuck 22 (which also corresponds to the time during which the apparatus waits without processing the wafer W). As a result, the timing of the start of high-temperature gas discharge for wafer B1 differs from that for wafer B2, relative to the placement start time s1, and this timing is earlier for wafer B1 than for wafer B2. Adjusting the timing of the start of high-temperature gas discharge in this manner is preferable because it more reliably prevents the above-mentioned processing problems due to cooling of the high-temperature gas flow path. Furthermore, in this manner, the start of discharge for processing wafer B1 may be set to a time later than the placement end time s4 of wafer AX and before the placement start time s1 of wafer B1. That is, the discharge of high-temperature gas for processing wafer B1 may start when wafer B1 is not placed on the spin chuck 22.

[0060] Furthermore, the discharge of high-temperature gas does not necessarily have to continue until time s3 after it has started. In the example shown in FIG. 10, the discharge of high-temperature gas starts at time s40 during a period after wafer AX placement finishes at time s4 and before wafer B1 placement starts at time s1, and the discharge of high-temperature gas stops at time s10 during that period. It is sufficient that the high-temperature gas be discharged for a time sufficient to prevent cooling of the high-temperature gas flow path. For example, the time from time s40 to time s10 is shorter than the time from time s2 to time s3, which is the discharge period of heated gas after placement start time s1. Note that, unlike the example shown in FIG. 9, the discharge of high-temperature gas for wafer B1 also starts at time s2 after placement start time s1, similar to that for wafer B2.

[0061] Although the above description assumes that the timing of the start of high-temperature gas discharge is unconditionally advanced for the first wafer W in a lot compared to other wafers W in the same lot, this is not a limitation. Specifically, for example, the length of the transfer interval E1 is compared with a predetermined set time. If the comparison results in the transfer interval E1 being shorter than the set time, wafer B1 is processed in the same manner as wafer B2. That is, when processing wafer B1, high-temperature gas discharge is started from time s2, as with wafer B2, to process wafer W. Furthermore, high-temperature gas discharge is not performed from time s4 when wafer AX is placed to time s1 when wafer B1 is placed, as shown in FIG. 10. If the comparison results in the transfer interval E1 being shorter than the set time, the start of high-temperature gas discharge for processing wafer B1 is advanced compared to when the transfer interval E1 is shorter than the set time. Therefore, discharge may be started at time s2′, which is earlier than time s2, as shown in FIG. 9, or discharge may be performed from time s40 to time s10, as shown in FIG. 10.

[0062] Next, a coating film forming apparatus 1A, which is a modified example of the coating film forming apparatus 1, will be described with reference to the plan view of Figure 11, focusing on the differences from the coating film forming apparatus 1. Pipe 66A of the coating film forming apparatus 1A is not connected to an exhaust path, and a gas nozzle 71A is provided at the downstream end of the pipe 66A. Gas nozzle 71A, which is a cup temperature adjustment nozzle, is located rearward and near the right end of cup 21A in plan view. The length of pipe 66A is set so that high-temperature gas supplied to pipe 66A is naturally cooled while flowing through pipe 66A and is discharged from gas nozzle 71A as room-temperature gas.

[0063] As described in the description of the coating film forming apparatus 1, the downstream side of pipe 63, the upstream side of pipes 64A and 64B where valves 65A and 65B are installed, and portions of pipes 66A and 66B are located behind cup 21A (i.e., either the front or the back) so as to extend in the left-right direction. As a result, each portion of these pipes is located behind cup 21A. In other words, cup 21A and each portion are aligned in the front-to-back direction. These portions are collectively indicated by a dotted line in the figure as pipe section 72A. The outlet of gas nozzle 71A opens to the left between pipe section 72A and cup 21A. During periods when high-temperature gas is not being discharged from gas nozzle 31 of cup 21A, room-temperature gas is discharged to the left (i.e., either the left or right side) between pipe section 72A and cup 21A in a plan view along the extension direction of each pipe constituting pipe section 72A.

[0064] As described above, the piping section 72A includes the upstream sides of the valves 65A and 65B in the piping 63 and the piping 64A and 64B. Therefore, high-temperature gas flows through the piping section 72A even when the gas nozzle 31 of the cup 21A is not discharging high-temperature gas. If the temperature of the high-temperature gas flowing through the piping section 72A is relatively high, the radiant heat from the piping section 72A becomes relatively large. If the radiant heat heats the cup 21A, the wafer W transferred to the cup 21A and processed therein may be heated by the cup 21A, which may cause the thickness of the resist film R formed on the wafer W to deviate from the set value. However, the room-temperature gas discharged from the gas nozzle 71A as described above blocks the heat radiation from the piping section 72A to the cup 21A, suppressing the temperature rise of the cup 21A. This suppresses deviations in the thickness of the resist film R.

[0065] From another perspective, supplying room temperature gas from gas nozzle 71A in this manner means that, even when the temperature of the high-temperature gas discharged from gas nozzle 31 is relatively high, the pipes constituting pipe section 72A can be routed along the diameter direction of cup 21A, aligned with cup 21A, and disposed close to cup 21A. In other words, the coating film forming apparatus 1A has the advantage of being able to prevent an increase in the floor space occupied by the apparatus 1A.

[0066] In FIG. 11, the room-temperature gas discharged from gas nozzle 71A is indicated by a two-dot chain arrow. In the example shown in FIG. 11, the discharge direction of the room-temperature gas is parallel to the extension direction of the pipes constituting pipe section 72A in a plan view. However, as described above, the discharge direction is not limited to being parallel, as long as heat from pipe section 72A to cup 21A is insulated. For example, gas nozzle 71A may be positioned so that the room-temperature gas is discharged leftward and forward, and the discharge direction of the room-temperature gas may be inclined relative to the extension direction of the pipes constituting pipe section 72A. As described above, the room-temperature gas discharged from gas nozzle 71A is a cup temperature adjustment gas that adjusts the temperature of cup 21A.

[0067] Next, a coating film forming apparatus 1B, which is a modified example of the coating film forming apparatus 1, will be described with reference to the plan view of FIG. 12, focusing on the differences from the coating film forming apparatus 1A. Like the coating film forming apparatus 1A, the coating film forming apparatus 1B is equipped with a gas nozzle 71A, but the length of the piping 66A connected to the gas nozzle 71A is relatively short. Therefore, gas at a temperature higher than room temperature, for example, is discharged from the gas nozzle 71A. Furthermore, in the coating film forming apparatus 1B, the downstream end of the piping 66B is not connected to the exhaust path, but is connected to the gas nozzle 71B. The length of the piping 66B is adjusted so that gas at a temperature higher than room temperature is also discharged from the gas nozzle 71B, similar to the gas nozzle 71A.

[0068] Gas nozzle 71B is disposed rearward and near the left end of cup 21B in plan view. At the rear of cup 21B, a portion of pipe 66B, upstream of valve 65B in pipe 64B, is disposed so as to extend in the left-right direction. As a result, each portion of these pipes is aligned with cup 21B in plan view and extends in the diameter direction of cup 21B; these portions are collectively indicated by a dotted line as pipe section 72B in the drawing. Gas nozzle 71B discharges gas to the right between each pipe constituting pipe section 72B and cup 21B in plan view, along the extension direction of each pipe.

[0069] The cups 21A and 21B are heated by the gases discharged from the gas nozzles 71A and 71B, respectively. As a result, when the wafer W is loaded into the cups 21A and 21B, the wafer W is also heated. The resist supplied to the heated wafer W is dried as it spreads over the wafer W, thereby reducing the amount of resist that scatters from the wafer W. Therefore, the film thickness of the resist film R can be controlled to a relatively large desired film thickness.

[0070] Incidentally, if only the heating of the cups 21A and 21B by gas from the gas nozzles 71A and 71B is considered, the outlets of the gas nozzles 71A and 71B may be directed toward the cups 21A and 21B, respectively. However, as described in the description of the coating film forming apparatus 1A, the temperature of the piping section 72A, including the flow path upstream of the valve 65A, may be relatively high, which may result in relatively large amounts of radiant heat toward the cup 21A. For the same reason, the piping section 72B may also be subject to large amounts of radiant heat toward the cup 21B. By discharging gas between the cups 21A and 21B and the piping sections 72A and 72B as shown in FIG. 12, the radiant heat is blocked by the gas, thereby preventing excessive temperature rise in the cups 21A and 21B. Meanwhile, the heat of the gas from the gas nozzles 71A and 71B can heat the cups 21A and 21B to an appropriate temperature. That is, the configuration of FIG. 12 is preferable from the viewpoint of improving the controllability of the heating temperature of cups 21A and 21B.

[0071] Next, a coating film forming apparatus 1C, which is a modified example of the coating film forming apparatus 1, will be described with reference to the plan view of Fig. 13, focusing on the differences from the coating film forming apparatus 1. In the coating film forming apparatus 1C, of ​​the pipes 66A and 66B, only the pipe 66A is provided, and the upstream end of this pipe 66A is connected to the pipe 63 instead of the pipe 64A. Note that a valve 67A that can adjust the flow rate to the downstream side is used as the valve 67A provided in the pipe 64A, for example.

[0072] For example, during a period when high-temperature gas is not being discharged from the gas nozzle 31 of either cup 21A or 21B, both valves 65A and 65B are closed and the opening of valve 67A is set to a first opening so that all high-temperature gas supplied from heating mechanism 61 is supplied to pipe 66A and exhausted. During a period when high-temperature gas is being discharged from gas nozzle 31 of one of cups 21A and 21B, only one of valves 65A and 65B is opened so that high-temperature gas is supplied to that gas nozzle 31 and to pipe 66A, and the opening of valve 65A is adjusted to a second opening smaller than the first opening.

[0073] Although high-temperature gas may be discharged from both cups 21A and 21B, in this example, in order to supply sufficient high-temperature gas from one gas nozzle 31 and stabilize the gas flow in each pipe, high-temperature gas is not supplied to cups 21A and 21B in parallel. Therefore, in coating film forming apparatus 1C, each valve operates so that high-temperature gas always flows through pipe 66A, which is an exhaust pipe. As described using this coating film forming apparatus 1C as an example, the pipe forming the exhaust pipe is not limited to being provided for each cup 21A and 21B as in the examples described above.

[0074] Incidentally, although it has been explained that a resist having a viscosity within the range exemplified above is used in order to form a resist film R having a relatively large thickness, the present technology is not limited to the use of such a resist having a relatively high viscosity, and can also be applied to the case of forming a thin film using a resist having a relatively low viscosity. Note that when a resist film R having a relatively large thickness is formed using a resist having a relatively high viscosity, if any variation in the film thickness occurs due to the large film thickness, the range of the variation (maximum value - minimum value of the film thickness) may also be relatively large. From the viewpoint of being able to reduce such potentially large variations in film thickness, it is particularly effective to apply the present technology when a resist having a relatively high viscosity within the range described above is used.

[0075] The rotation speed d3 for performing the drying step described in FIG. 8 is set according to the desired film thickness, and when forming a thin film in this manner, it may be set to be greater than the rotation speed d4 for performing EBR and backside cleaning. In this way, the magnitude relationship between the rotation speed d3 and the rotation speed d4 can be set arbitrarily. Also, in the example described in FIG. 8, it was stated that the change in film thickness distribution does not end during rotation at the rotation speed d2, but also occurs during rotation at the rotation speed d3. However, the change in film thickness distribution may also end during rotation at the rotation speed d2.

[0076] The timing for starting the discharge of high-temperature gas onto the wafer W is not limited to the example described above. For example, it may be started before the entire surface of the wafer W is covered with resist by the rotation of the wafer W. However, to ensure that the drying of the resist in the annular low-film-thickness region is accelerated, it is preferable to start the discharge of high-temperature gas onto the wafer W after the discharge of the prewet thinner before the discharge of the resist. It is more preferable to start the discharge before the discharge of the thinner, as described in FIG. 6A. Furthermore, the high-temperature gas is not limited to the temperature described above, as long as it can affect the film thickness distribution of the resist film R by heating the wafer W when discharged onto the wafer W. To achieve this effect, the temperature of the high-temperature gas needs to be higher than the temperature of the wafer W at the start of discharge onto the wafer W.

[0077] The timing for stopping the discharge of high-temperature gas is not limited to when the wafer W is rotating at the rotation speed d3 described above, as long as it can sufficiently increase the uniformity of the film thickness within the surface of the wafer W. For example, the discharge may be stopped during the previous rotation at the rotation speed d2. The high-temperature gas may also be intermittently discharged onto the wafer W. The timing of stopping mentioned here does not refer to the timing at which the discharge of high-temperature gas onto the wafer W is temporarily stopped in the case of intermittent discharge, but rather refers to the timing at which the discharge of high-temperature gas onto the wafer W will no longer be performed when the wafer W is processed.

[0078] Any type of high-temperature gas can be used as long as it does not affect the processing of the wafer W, and for example, an inert gas such as N2 (nitrogen) gas can be used. Furthermore, the coating film formed on the wafer W is not limited to a resist film and may be, for example, an anti-reflective film, an insulating film, etc. Furthermore, instead of a resist, a coating liquid appropriate for the film to be formed on the substrate can be used.

[0079] The presently disclosed embodiments should be considered in all respects as illustrative and not restrictive, and the above-described embodiments may be omitted, substituted, modified, and / or combined in various forms without departing from the scope and spirit of the appended claims.

[0080] [Evaluation test] An evaluation test related to this technology will be described. In the evaluation test, the amount of resist discharged onto the wafer W was changed within the range of emL to e+4 mL (e is a positive number), and a process of forming a resist film R on the wafer W was carried out. In this evaluation test, a resist with a viscosity of 610 CP was used. In Example 1-1, the wafer W was processed according to the procedure described in FIGS. 6 and 7 to form a resist film R. That is, a high-temperature gas was discharged onto the back surface of the wafer W to form the resist film R. However, EBR was not performed. The rotation speed when spreading the resist onto the wafer W (the rotation speed d1 described above) was changed for each wafer W, and was set to one of f1 rpm, f2 rpm, and f3 rpm. f1 to f3 are positive numbers, and f1 <f2<f3である。

[0081] In Comparative Example 1-1, processing was performed in the same manner as in Example 1-1, except that high-temperature gas was not sprayed onto the backside of the wafer W and thinner was sprayed onto a position eccentric from the center of the wafer W during prewetting. In Comparative Example 1-2, wafers W were processed in the same manner as in Example 1-1, except that high-temperature gas was not sprayed onto the backside of the wafer W. That is, in Comparative Example 1-2, prewetting was performed by spraying thinner onto the center of the wafer W. For each wafer W processed in Example 1-1, Comparative Examples 1-1, and 1-2, the coverage of the resist film R was confirmed and the maximum and minimum values ​​of the film thickness of the resist film R were measured. Note that hereafter, the maximum and minimum values ​​of the film thickness will be referred to as the film thickness range.

[0082] Table 1 shows the results of comparing coating properties. In the table, A indicates good coating properties and no unevenness in the film. B indicates good coating properties but unevenness in the film. C indicates poor coating properties.

[0083] [Table 1]

[0084] As shown in Table 1, Example 1-1 and Comparative Example 1-2 were better than Comparative Example 1-1, and the results were comparable between Example 1-1 and Comparative Example 1-2. More specifically, in Comparative Example 1-1, when the resist discharge amount was relatively high within the range of the resist discharge amount set in this evaluation test, sufficient coverage was obtained, although spots were observed on the resist film R. However, when the resist discharge amount was relatively low, the coverage was also insufficient. When the rotation speed of the wafer W was f3 rpm, the coverage was insufficient at a discharge amount lower than when it was f2 rpm or f1 rpm.

[0085] Furthermore, regardless of the rotation speed being between f1 and f3 rpm, in Example 1-1 and Comparative Example 1-2, sufficient coverage could be obtained at a discharge amount equal to or less than the discharge amount at which coverage was insufficient in Comparative Example 1-1. When comparing Example 1-1 and Comparative Example 1-2, there was no difference in whether coverage was sufficient or insufficient as long as the rotation speed and discharge amount were the same. Furthermore, no spots were observed in the resist film R having sufficient coverage in Example 1-1 and Comparative Example 1-2.

[0086] The results for the film thickness range are shown as a bar graph in Figure 14. The vertical axis of the graph indicates a positive number, and the vertical axis is graduated at predetermined intervals. For the test conducted with the discharge volume set to e+1 mL, a graph showing the film thickness distribution in the radial direction of the wafer W is shown in Figure 15, similar to Figure 2.

[0087] As shown in FIG. 14, regardless of the discharge rate, Example 1-1 has a smaller film thickness range than Comparative Example 1-2. That is, Example 1-1 has higher film thickness uniformity. Also, as shown in the graph of FIG. 15, in Comparative Example 1-2, the annular low-film thickness region described in FIG. 2 and the like was formed between the center and peripheral edge of the wafer W. However, in Example 1-1, this annular low-film thickness region was not formed, and the film thickness uniformity was high. That is, the effect of discharging the high-temperature gas described above was demonstrated. As described above, this evaluation test demonstrated that the method described in the embodiment can form a resist film R on the wafer W with high coverage and high film thickness uniformity within the wafer W. [Explanation of symbols]

[0088] d2, d3 rotation speed R resist film W wafer

Claims

1. a coating step of supplying a coating liquid to a center portion of a surface of a substrate and rotating the substrate to spread the coating liquid to a peripheral portion of the substrate and form a coating film; a high-temperature gas supplying step of supplying high-temperature gas having a temperature higher than that of the substrate onto which the coating liquid has been supplied, to a part of an exposed region on the rear surface of the rotating substrate; a film thickness distribution adjusting step of adjusting a film thickness distribution of the coating film within a surface of the substrate by rotating the substrate at a first rotation speed; a drying step of rotating the substrate at a second rotation speed different from the first rotation speed after the film thickness distribution adjusting step to adjust the film thickness of the coating film over the entire surface of the substrate, and then drying the substrate; supply of the high-temperature gas to the substrate is started before the coating liquid supplied to the substrate covers the entire surface of the substrate by rotation of the substrate; The method for forming a coated film, wherein the supply of the high-temperature gas to the substrate is stopped during the film thickness distribution adjusting step or the drying step.

2. 2. The method for forming a coating film according to claim 1, further comprising, after the drying step, a back surface cleaning step of supplying a cleaning liquid to an exposed area on the back surface of the rotating substrate.

3. the high-temperature gas supplying step includes a step of discharging the high-temperature gas from a first discharge port provided in a gas nozzle, the back surface cleaning step includes a step of discharging the cleaning liquid from a second discharge port provided in a cleaning nozzle, a first projection area on the rear surface of the substrate facing the ejection direction of the high-temperature gas from the first ejection port, 3. The method for forming a coating film according to claim 2, wherein the second discharge port is located downstream in a rotation direction of the substrate with respect to a second projection area onto the rear surface of the substrate, the second projection area being directed in a direction in which the cleaning liquid is discharged from the second discharge port.

4. the high-temperature gas supplying step includes a step of discharging the high-temperature gas from a gas nozzle onto an exposed area of ​​the backside of the substrate; 4. The method for forming a coating film according to claim 1, wherein the direction of ejection of the high-temperature gas follows the direction of rotation of the substrate.

5. 5. The method for forming a coated film according to claim 1, wherein the supply of the high-temperature gas to the substrate is started before the supply of the coating liquid to the substrate.

6. the high-temperature gas supplying step includes a step of discharging the high-temperature gas from a gas nozzle onto an exposed area of ​​the backside of the substrate; the coating step, the high-temperature gas supply step, the film thickness distribution adjustment step, and the drying step are steps performed on the substrate placed on a stage, and a step of sequentially transporting a plurality of the substrates to the stage; starting the discharge of the high-temperature gas from the gas nozzle for processing the next substrate at a timing corresponding to a transfer interval between the first substrate and the next substrate transferred to the stage; The method for forming a coating film according to any one of claims 1 to 5, comprising:

7. the high-temperature gas supplying step includes a step of discharging the high-temperature gas from a gas nozzle onto an exposed area of ​​the backside of the substrate; a gas supply passage having a downstream end connected to the gas nozzle, a branch passage branching from the gas supply passage, and a switching unit switching a supply destination of the high-temperature gas between the gas nozzle and the branch passage, The method for forming a coating film according to any one of claims 1 to 6, wherein the high-temperature gas supply process includes a process of switching by the switching unit from a state in which the high-temperature gas is supplied to the branch path to a state in which the high-temperature gas is supplied to the gas nozzle.

8. the coating step, the high-temperature gas supply step, the film thickness distribution adjustment step, and the drying step are steps performed on the substrate placed on a stage and surrounded by a cup, 8. The method for forming a coating film according to claim 7, wherein the switching portion is provided at a height lower than the cup.

9. the coating step, the high-temperature gas supply step, and the drying step are steps performed on the substrate placed on a stage and surrounded by a cup, the gas supply path includes a portion extending in the left-right direction upstream of a position where the switching unit is provided and provided side by side at either the front or rear of the cup, A method for forming a coating film as described in claim 7 or 8, which includes a step of ejecting the high-temperature gas supplied to the branch passage from a cup temperature adjustment nozzle connected to the downstream end of the branch passage to either the left or right side between the portion and the cup as a temperature adjustment gas for the cup.

10. a rotation mechanism that rotates the substrate; a coating liquid supply unit that supplies a coating liquid to the center of the surface of the substrate to form a coating film; a gas nozzle for supplying a high-temperature gas having a temperature higher than that of the substrate to a part of the rear surface of the rotating substrate; a control unit that supplies the coating liquid to the substrate and dries the coating film by rotating the substrate in order to form the coating film, and outputs a control signal to stop the supply of the high-temperature gas during the period in which the coating film is dried; the control unit carries out a coating step of supplying the coating liquid and rotating the substrate to spread the coating liquid toward a peripheral portion of the substrate surface; a high-temperature gas supply step of supplying high-temperature gas having a temperature higher than that of the substrate to which the coating liquid has been supplied to a part of an exposed region on the back surface of the rotating substrate; a film thickness distribution adjustment step of rotating the substrate at a first rotation speed to adjust a film thickness distribution of the coating film within the surface of the substrate; and a drying step of rotating the substrate at a second rotation speed different from the first rotation speed after the film thickness distribution adjustment step to dry the substrate so that the film thickness of the coating film within the entire surface of the substrate varies, A coating film forming apparatus in which the supply of the high-temperature gas to the substrate is started before the coating liquid supplied to the substrate covers the entire surface of the substrate due to the rotation of the substrate, and a control signal is output so that the supply of the high-temperature gas to the substrate is stopped during the period in which the film thickness distribution adjustment step is performed or the period in which the drying step is performed.

11. 11. The coated film forming apparatus according to claim 10, further comprising a cleaning nozzle that supplies a cleaning liquid to an exposed area on the rear surface of the rotating substrate after drying the coated film.

12. the gas nozzle has a first outlet; the cleaning nozzle has a second outlet, a first projection area on the rear surface of the substrate facing the ejection direction of the high-temperature gas from the first ejection port, The coating film forming apparatus according to claim 11, wherein the second discharge port is located downstream in a rotation direction of the substrate with respect to a second projection area onto the rear surface of the substrate, the second projection area being directed in a discharge direction of the cleaning liquid from the second discharge port.

13. 13. The coating film forming apparatus according to claim 10, wherein the direction in which the high-temperature gas is ejected from the gas nozzle follows the direction of rotation of the substrate.

14. 14. The coating film forming apparatus according to claim 10, wherein the supply of the high-temperature gas to the substrate is started before the supply of the coating liquid to the substrate.

15. a coating step of supplying the coating liquid and rotating the substrate to spread the coating liquid toward the peripheral portion of the substrate surface; a high-temperature gas supply step of supplying high-temperature gas having a temperature higher than that of the substrate to which the coating liquid has been supplied to a part of an exposed area on the back surface of the rotating substrate; a film thickness distribution adjustment step of rotating the substrate at a first rotation speed to adjust a film thickness distribution of the coating film within the surface of the substrate; and a drying step of rotating the substrate at a second rotation speed different from the first rotation speed after the film thickness distribution adjustment step to dry the substrate so that the film thickness of the coating film within the entire surface of the substrate varies, and a control unit is provided to output a control signal so that a period during which the drying step is performed includes a period during which the supply of the high-temperature gas to the substrate is stopped; the coating step, the high-temperature gas supply step, the film thickness distribution adjustment step, and the drying step are performed on the substrate placed on a stage; A plurality of the substrates are sequentially transported to the stage, The control unit A coating film forming apparatus as described in any one of claims 10 to 14, which outputs a control signal so that a step of starting to eject the high-temperature gas from the gas nozzle for processing the next substrate is carried out at a timing corresponding to the transport interval between one substrate and the next substrate transported following the stage.

16. a gas supply passage having a downstream end connected to the gas nozzle; a branch path branching from the gas supply path; a switching unit that switches a supply destination of the high-temperature gas between the gas nozzle and the branch path, The supply of high-temperature gas to the substrate is performed by switching the switching unit from a state in which the high-temperature gas is supplied to the branch path to a state in which the high-temperature gas is supplied to the gas nozzle.

17. a stage on which the substrate is placed for rotation; a cup surrounding the substrate placed on the stage, The coating film forming apparatus according to claim 16, wherein the switching unit is provided at a height lower than the cup.

18. a stage on which the substrate is placed for rotation; a cup surrounding the substrate placed on the stage; a portion of the gas supply path upstream of a position where the switching unit is provided, the portion extending in the left-right direction and being arranged side by side either in front of or behind the cup; a cup temperature adjustment nozzle connected to a downstream end of the branch passage and configured to discharge the high-temperature gas supplied to the branch passage to one of the left and right sides of the space between the portion and the cup as a gas for adjusting the temperature of the cup; The coating film forming apparatus according to claim 16 or 17, comprising:

19. A program used in a liquid processing apparatus including a rotation mechanism that rotates a substrate, a coating liquid supply unit that supplies a coating liquid to a center of a front surface of the substrate, and a gas nozzle that supplies high-temperature gas to a rear surface of the substrate, a coating step of supplying a coating liquid to a center of a surface of a substrate and rotating the substrate to spread the coating liquid to a peripheral portion of the substrate and form a coating film; a high-temperature gas supply step of supplying high-temperature gas having a temperature higher than that of the substrate onto which the coating liquid has been supplied, to a part of an exposed region on the rear surface of the rotating substrate; a film thickness distribution adjusting step of adjusting a film thickness distribution of the coating film within a surface of the substrate by rotating the substrate at a first rotation speed; a drying step of rotating and drying the substrate at a second rotation speed different from the first rotation speed so that the thickness of the coating film across the entire surface of the substrate is varied after the film thickness distribution adjusting step, the high-temperature gas supply step is carried out so that the supply of the high-temperature gas to the substrate is started before the coating liquid supplied to the substrate covers the entire surface of the substrate by rotation of the substrate; A program for stopping the supply of the high-temperature gas to the substrate during the period in which the film thickness distribution adjusting step is performed or the period in which the drying step is performed.

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