Package substrate processing method

Abstract

To provide a processing method for suppressing elongation of burrs generated when cutting an electrode portion in processing for dividing a package substrate by cutting.SOLUTION: In a processing method of a package substrate 10, a plurality of intersecting cutting scheduled lines 24 are set on a surface, and a plurality of electrodes 25 are formed on the cutting scheduled lines 24. The processing method includes: a protective tape sticking step for sticking a protective tape 5 to a surface 10a of the package substrate 10; and a cutting step for cutting the package substrate 10 together with the protective tape 5 along the cutting scheduled lines 24 with a cutting blade 51.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a method for processing a package substrate, and more particularly to a technique for suppressing the extension of burrs that occur when cutting an electrode portion. [Background technology]

[0002] Conventionally, as disclosed in Patent Document 1, for example, it is known to use a cutting device to cut a package substrate and divide it into multiple chips (package chips), and the divided chips are then mounted on a mounting substrate. During mounting, electrodes made of copper or the like exposed on the chip are joined to electrodes on the mounting substrate using solder. The electrodes on the chip side (package substrate) are plated to improve solder wettability during joining.

[0003] As electrical devices become smaller, chip sizes are becoming smaller, for example, to 1mm square or less, and the area of ​​the electrodes is also becoming smaller. This has created a need to strengthen the joints and make it easier to check the joint status. One known solution is to plate not only the electrode ends on the mounting surface of the chip, but also on the electrode ends on the side of the chip.

[0004] This technology is called Wettable Flank, and involves half-cutting the package substrate along the intended cutting line to expose the electrodes in the half-cut groove, then plating the substrate, and then fully cutting the substrate with a blade thinner than the one used for the half-cut to form plated electrodes. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 2019-102757 Summary of the Invention [Problem to be solved by the invention]

[0006] Here, because the electrodes are made of metal, there is a concern that burrs may be generated when cutting with a cutting blade. Because the cutting blade cuts into the surface side of the package substrate, burrs are particularly likely to extend on the surface side of the package substrate, and there is a concern that the extended burrs may fall off during mounting, causing mounting defects.

[0007] In view of the above problems, the present invention proposes a novel technique for suppressing the extension of burrs that occur when cutting electrode portions in a process for dividing a package substrate by cutting. [Means for solving the problem]

[0008] The problem to be solved by the present invention is as described above, and the means for solving this problem will now be described.

[0009] According to one aspect of the present invention, The method for processing a package substrate has a plurality of intersecting cutting lines set on its surface and a plurality of electrodes formed on the cutting lines, and includes a protective tape application step of applying a protective tape to the surface of the package substrate, and a cutting step of cutting the package substrate together with the protective tape along the cutting lines with a cutting blade.

[0010] According to another aspect of the present invention, A non-cutting area is set on the intended cutting line where the cutting blade will not make any cuts, and the protective tape will not be cut in the non-cutting area and will therefore remain in the form of a single piece of tape without separating, and can be peeled off as a single piece of tape after the cutting step.

[0011] According to another aspect of the present invention, The planned cutting lines include a plurality of first planned cutting lines extending in a first direction and a plurality of second planned cutting lines extending in a second direction intersecting the first direction, and the package substrate has a chip formation area including a plurality of chips partitioned by the first planned cutting lines and the second planned cutting lines, and a surplus area surrounding the chip formation area, and a plurality of electrodes crossing the first planned cutting lines are formed on the first planned cutting lines and no electrodes are formed on the second planned cutting lines, and in the cutting step, the surplus areas on both ends of the first planned cutting lines are designated as non-cutting areas, and cutting is performed along the first planned cutting lines excluding the non-cutting areas.

[0012] According to another aspect of the present invention, In the cutting step, the cutting blade is lowered from the surface side of the package substrate toward the electrode area where the electrode is located on the side of each device chip, the electrode area is cut by chopper cutting, and the non-cut area is formed by the other areas excluding the electrode area.

[0013] According to another aspect of the present invention, The cutting lines include a plurality of first cutting lines extending in a first direction and a plurality of second cutting lines extending in a second direction intersecting the first direction, and a plurality of electrodes are formed on the first cutting lines so as to cross the first cutting lines, and a plurality of electrodes are formed on the second cutting lines so as to cross the second cutting lines. or A plurality of electrodes are formed on the first cutting line so as to cross the first cutting line, and no electrodes are formed on the second cutting line.

[0014] According to another aspect of the present invention, In the cutting step, the cutting blade having a first blade thickness half-cuts the substrate so as to form an uncut portion below the cutting groove, and the electrode is exposed on a side wall of the cutting groove; a tape peeling step of peeling the protective tape from the package substrate after the cutting step is performed; a plating step of plating the electrode after the tape peeling step is performed; a full cutting step of fully cutting the remaining portion along the intended cutting line with a second cutting blade having a second blade thickness thinner than the cutting blade after the plating step is performed; The method for processing a package substrate comprises: [Effects of the Invention]

[0015] According to one embodiment of the present invention, when cutting a metal electrode, the electrode is protected by a protective tape, which suppresses the extension of burrs and effectively suppresses subsequent mounting defects due to the formation and falling of burr fragments.

[0016] Furthermore, according to one aspect of the present invention, the protective tape remains in the form of a single piece of tape even after cutting, making it easy to peel off.Furthermore, fragments of the protective tape do not remain on the package substrate, preventing problems caused by fragments of the protective tape. [Brief explanation of the drawings]

[0017] [Figure 1] 1A is a diagram showing the configuration of the front side of the package substrate, and FIG. 1B is a diagram showing the configuration of the back side of the package substrate. [Figure 2] FIG. 10 is a diagram showing another example of the configuration of a package substrate. [Figure 3] 10 is a flowchart showing the steps of a method for cutting a package substrate. [Figure 4] 1A is a diagram illustrating a protective tape application step, and FIG. 1B is a diagram illustrating a state in which the protective tape has been applied to the package substrate. [Figure 5] (A) is a diagram explaining the holding step, and (B) is a diagram explaining the cutting step. [Figure 6] (A) is a diagram explaining the tape peeling step, and (B) is a diagram explaining the plating step. [Figure 7] FIG. 10 is a diagram illustrating a full cut step. [Figure 8] 1A is a plan view illustrating an example of a cutting step, FIG. 1B is a side view illustrating an example of a cutting step, and FIG. 1C is a diagram illustrating the protective tape after the cutting step. [Figure 9] 10A is a plan view illustrating another example of the cutting step, FIG. 10B is a side view illustrating another example of the cutting step, and FIG. 10C is a diagram illustrating the protective tape after the cutting step. [Figure 10] 10A and 10B are diagrams showing another example of the protective tape after the cutting step. DETAILED DESCRIPTION OF THE INVENTION

[0018] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The package substrate 10 shown in Figures 1(A) and 1(B) is a QFN (Quad Flat Non-leaded Package) package substrate. For ease of explanation, the surface shown in Figure 1(A) is referred to as the front surface 10a of the package substrate 10, and the surface shown in Figure 1(B) is referred to as the back surface 10b of the package substrate 10. Note that the form of the package substrate 10 is not limited to the QFN form, and the present invention is widely applicable to package substrates in which multiple electrodes are formed along the intended cutting lines 24.

[0019] The package substrate 10 includes a metal plate 12 and a resin layer 13. As shown in Fig. 1(A), the metal plate 12 is formed in a rectangular flat plate shape in plan view, and has three chip formation regions 21 and a surplus region 22 surrounding the chip formation regions 21. The number of chip formation regions 21 is not particularly limited.

[0020] 1(A), in each chip formation region 21, a plurality of cutting lines 24 are set so as to intersect each other at right angles within the plane of the chip formation region 21, and a device chip 23 is sealed in each region partitioned by the cutting lines 24. As will be described later, by performing cutting along each of the cutting lines 24, the device chip 23 is singulated into sealed package chips.

[0021] 1(A), the lines to cut 24 include first lines to cut 241 extending in a first direction D1 and second lines to cut 242 extending in a second direction D2 perpendicular to the first direction D1. Electrodes 25 are provided at predetermined intervals on the sides of each device chip 23 along the first direction D1. Each electrode 25 is connected to the device chip 23 by a wire (not shown), and is cut along the lines to cut 24 by cutting to divide the device chip 23 into two.

[0022] As shown in Fig. 1(B), the resin layer 13 is made of a thermoplastic resin and seals the device chips 23 and wires (not shown) mounted in each chip formation region 21 of the metal plate 12. The resin layer 13 seals (covers) the entire chip formation region 21 on the back surface side of the metal plate 12 shown in Fig. 1(B). On the other hand, the resin layer 13 seals the region of the cutting line 24 on the front surface 10a side of the metal plate 12 shown in Fig. 1(A) while leaving the electrodes 25 exposed.

[0023] As in the package substrate 10A shown in FIG. 2, the electrodes 25 may be provided on cutting lines 241 and 242 extending in the first direction D1 and the second direction D2.

[0024] Next, a method for cutting a package substrate according to the present invention will be described with reference to a flowchart shown in FIG.

[0025] 1A is an example of a processing target. The package substrate 10 has a plurality of cutting lines 24 intersecting the surface 10a, and a plurality of electrodes 25 are formed on the cutting lines 24 extending in the first direction D1.

[0026] <Protective tape application step> 4(A) and 4(B), this is a step of adhering a protective tape 5 to the surface 10a of the package substrate 10. The protective tape 5 can be configured, for example, as a UV tape in which an adhesive layer is formed on a base layer and the adhesive strength is reduced by exposure to ultraviolet light. The adhesive layer side is adhered to the surface 10a of the package substrate 10, and the protective tape 5 is integrated with the package substrate 10.

[0027] <Holding step> As shown in Fig. 5(A), this is a step of holding the package substrate 10 on a holding table 54 of a cutting device 50. In the example of Fig. 5(A), the package substrate 10 is suction-held on the holding table 54 via a jig 56 having an escape groove formed along the planned cutting line 24 (first planned cutting line 241). Note that the package substrate 10 may also be held on the holding table 54 by adhering the resin layer 13 of the package substrate 10 to the holding table 54 via an adhesive tape (not shown).

[0028] <Cutting step> 5(A) and 5(B), this is a step in which the cutting blade 51 cuts the package substrate 10 together with the protective tape 5 along the planned cutting line 24 (first planned cutting line 241). The cutting blade 51 is fixed to the tip of a spindle of a cutting unit (not shown) provided in the cutting device 50, is set to a predetermined cutting height in the vertical direction (Z-axis direction), and is rotated at high speed.

[0029] 5(B) shows an example of half-cutting. At the position of the cutting line 24, the cutting blade 51 cuts into the electrode 25 through the protective tape 5, and a part of the electrode 25 is removed by cutting, forming a cutting groove M1. The half-cutting is performed on all of the cutting lines 24 extending in the first direction D1 shown in FIG. 1(A).

[0030] When the package substrate 10A shown in Figure 2 is to be processed, after half-cutting is performed on all of the intended cutting lines 24 extending in the first direction D1, the package substrate 10 is rotated 90 degrees and half-cutting is also performed on all of the intended cutting lines 24 extending in the second direction D2.

[0031] Here, as shown in Figure 5(B), since the electrode 25 is made of metal, there is a concern that burrs may occur, but because the protective tape 5 is attached, the burrs are prevented from extending to the upper surface side of the package substrate 10A and the burrs are also prevented from separating and scattering.

[0032] 5(B), in half-cutting, a cutting blade 51 having a first blade thickness W1 cuts the package substrate 10 to form a cut groove M1, and an uncut portion 15 is formed below the cut groove M1, with the electrode 25 being exposed on a side wall Ms of the cut groove M1. Note that the electrode 25 may be completely cut and divided into two pieces without leaving the uncut portion 15.

[0033] <Tape removal step> 6(A), after the cutting step is performed, the protective tape 5 is peeled off from the package substrate 10. As a result, the surface 10a side of the package substrate 10 is exposed, and the electrodes 25 are also exposed.

[0034] <Plating step> As shown in Fig. 6(B), after the tape peeling step, the electrode 25 is plated. For example, the surface of the electrode 25 is coated with a thin film 28 of tin by electrolytic plating. This realizes a wettable flank structure, which improves the wettability (bondability) of the solder during mounting.

[0035] <Full Cut Step> As shown in Figure 7, after the plating step is performed, the remaining portion 15 (Figure 5(B)) is fully cut along the intended cutting line 24 with a second cutting blade 52 having a second blade thickness W2 thinner than the cutting blade 51.

[0036] As a result, the package substrate 10 is completely cut in the thickness direction along the cutting lines 24, forming cutting grooves M2. After the full cut is performed on all of the cutting lines 24 extending in the first direction D1 shown in FIG. 1(A), the package substrate 10 is rotated 90 degrees and the full cut is performed on all of the cutting lines 24 extending in the second direction D2. As a result, the package substrate 10 is singulated into package chips.

[0037] In the processing method described above, when the metal electrodes 25 are cut in the cutting step, the electrodes 25 are protected by the protective tape 5, which prevents burrs from extending and effectively prevents subsequent mounting defects caused by the formation and falling of burr fragments. In addition, it is possible to prevent the presence of burrs from having an adverse effect when a thin film is formed in the plating step.

[0038] Next, a method for peeling off the protective tape 5 in the form of a single tape will be described. As shown in Figures 8(A) to (C), in the cutting step, a non-cutting area Na is set on the intended cutting line 24 where no incision is made by the cutting blade 51, and the protective tape 5 is not cut in the non-cutting area Na, so that it maintains the form of a single piece of tape without separating.

[0039] In the package substrate 10 shown in Figure 1(A), the planned cutting lines 24 include a plurality of first planned cutting lines 241 extending in a first direction D1 and a plurality of second planned cutting lines 242 extending in a second direction intersecting the first direction, and are provided with a chip formation area 21 including a plurality of chips partitioned by the first planned cutting lines 241 and the second planned cutting lines 242, and a surplus area 22 surrounding the chip formation area 21.

[0040] In the package substrate 10 shown in Figure 1(A), multiple electrodes 25 are formed on the first planned cutting lines 241 and cross the first planned cutting lines 241, while no electrodes 25 are formed on the second planned cutting lines 242.

[0041] As shown in Figures 8(A) and (B), in the cutting step, the outer circumferential excess area 22 on both ends of the first planned cutting line 241 is designated as a non-cutting area Na (the area indicated by diagonal lines in Figure 8(A)), and the cutting area Nb excluding the non-cutting area Na is cut along the first planned cutting line 241.

[0042] Specifically, as shown in Fig. 8(B), the package substrate 10 is positioned so that a boundary portion K1 between the non-cut region Na and the cutting region Nb on one end side in the first direction D1 is directly below the cutting blade 52, and then the cutting blade 52 is lowered while rotating to cut into the package substrate 10. Next, the package substrate 10 is processed and fed along the first direction D1 until cutting proceeds to a boundary portion K2 between the non-cut region Na and the cutting region Nb on the opposite side, and then the cutting blade 52 is raised. At this time, a half cut is performed so that an uncut portion 15 is formed, as shown in Fig. 6(B).

[0043] 8(C), in the above cutting, non-cut regions Na remain in the protective tape 5 without being cut, and the tape can be maintained in the form of a single sheet by being connected by the non-cut regions Na. The cut portions remain as slits S on the protective tape 5.

[0044] 8(C), the protective tape 5 remains in the form of a single piece of tape even after cutting, making it easy to peel off the protective tape 5. Furthermore, no fragments of the protective tape 5 remain on the package substrate 10, preventing problems caused by fragments of the protective tape 5.

[0045] As shown in Fig. 8(C), after the protective tape 5 is peeled off, the plating step shown in Fig. 6(B) and the full cutting step shown in Fig. 7 are carried out. The full cutting step is carried out on the half-cut planned cutting lines in the first direction and the half-cut planned cutting lines in the second direction.

[0046] Next, another example of a method for peeling off the protective tape 5 in the form of a single tape will be described. In this method, as shown in Figures 9(A) to (C), in the cutting step, a cutting blade 52 is lowered from the surface side of the package substrate 10A onto the electrode region Nc where the electrode 25 is arranged on the side of the device chip 23, and the electrode region Nc is cut by chopper cutting, and the non-cut region Na is formed by the other regions excluding the electrode region.

[0047] 2, the cutting lines 24 on the package substrate 10A to be processed include a plurality of first cutting lines 241 extending in a first direction D1 and a plurality of second cutting lines 242 extending in a second direction intersecting the first direction. A plurality of electrodes 25 are formed on the first cutting lines 241 so as to cross the first cutting lines 241, and a plurality of electrodes 25 are formed on the second cutting lines 242 so as to cross the second cutting lines 242. In other words, electrodes 25 are formed on each cutting line in the first direction D1 and the second direction D2.

[0048] As shown in the enlarged portion of Figure 9(A), in the package substrate 10A, an electrode region Nc is formed in which multiple electrodes 25 are arranged on the sides of each device chip 23 along the first planned cutting lines 241 and the second planned cutting lines 242.

[0049] 9(A) and 9(B), chopper cutting is performed on the electrode regions Nc. Specifically, the package substrate 10 is positioned so that a certain electrode region Nc is directly below the cutting blade 52, and the cutting blade 52 is then lowered while rotating to cut into the electrode region Nc, and then the cutting blade 52 is raised to complete the cutting. Next, the package substrate 10 is moved along the first direction D1, and similarly, the adjacent electrode region Nc is positioned directly below the cutting blade 52, and the cutting blade 52 is lowered to cut into the electrode region Nc, and then the cutting blade 52 is raised to complete the cutting. Note that during this chopper cutting, an uncut portion 15 is formed, as shown in FIG. 6(B).

[0050] After chopper cutting is performed on the electrode area Nc on the first cutting line 241 in the first direction D1, the package substrate 10A is rotated 90 degrees and chopper cutting is similarly performed on the electrode area Nc on the second cutting line 242 in the second direction D2.

[0051] 9(C), the chopper cut cuts only the electrode regions Nc in the protective tape 5, leaving the non-cut regions Na uncut, so that the tape remains connected as a single piece of tape. The cut portions remain as slits S on the protective tape 5.

[0052] 9(C), the protective tape 5 remains in the form of one piece of tape even after cutting, which makes it easy to peel off the protective tape 5. Furthermore, no fragments of the protective tape 5 remain on the package substrate 10A, which prevents problems caused by fragments of the protective tape 5.

[0053] As shown in Fig. 9(C), after the protective tape 5 is peeled off, the plating step shown in Fig. 6(B) and the full cutting step shown in Fig. 7 are carried out. The full cutting step is carried out on the half-cut planned cutting lines in the first and second directions.

[0054] 9(A) to 9(C) have been described with reference to the package substrate 10A in which electrodes are arranged along the first and second planned cutting lines 241, 242 as shown in Fig. 2, but the method can also be implemented in processing a package substrate 10 in which electrodes are arranged only along the first planned cutting line 241 as shown in Fig. 1(A). In this case, slits such as those shown in Fig. 10 will be formed in the protective tape 5 after the cutting step has been completed. [Explanation of symbols]

[0055] 5 Protective tape 10 Package substrate 10A package substrate 10a surface 10b back side 12 metal plates 13 Resin layer 15 Remaining part 21 Chip formation area 22 Surplus Area 22 Surplus outer area 23 Device Chips 24 Planned cutting line 25 electrodes 28 Thin Film 501 Cutting equipment 51 Cutting blade 52 Cutting blade 54 Holding Table 56 Jig D1 1st direction D2 2nd direction K1 boundary part K2 boundary part M1 cutting groove Ms side wall Na non-cutting area Nb cutting area Nc electrode area S slit W1 Blade thickness W2 Blade thickness 241 First cutting line 242 Second cutting line

Claims

1. A processing method for a package substrate in which a plurality of intersecting cutting lines are set on a surface, and a plurality of electrodes are formed on the cutting lines, comprising: a protective tape applying step of applying a protective tape to the surface of the package substrate; a cutting step of cutting the package substrate together with the protective tape along the intended cutting line with a cutting blade, A non-cutting area where no cutting is to be performed by the cutting blade is set on the intended cutting line, The protective tape is not cut in the non-cut area, and thus maintains the form of a single piece of tape without separation, After the cutting step, the tape can be peeled off in the form of a single piece of tape. A method for processing a package substrate.

2. The cutting lines include a plurality of first cutting lines extending in a first direction and a plurality of second cutting lines extending in a second direction intersecting the first direction; the package substrate comprises a chip formation area including a plurality of chips partitioned by the first planned cutting lines and the second planned cutting lines, and a surplus area surrounding the chip formation area; a plurality of electrodes are formed on the first cutting line so as to cross the first cutting line, and no electrodes are formed on the second cutting line; In the cutting step, The excess areas on both ends of the first planned cutting line are designated as non-cutting areas, and cutting is performed along the first planned cutting line excluding the non-cutting areas.

2. The method for processing a package substrate according to claim 1.

3. In the cutting step, the cutting blade is lowered from the front surface side of the package substrate onto an electrode region on the side of each device chip where the electrodes are arranged; The electrode area is cut by a chopper cut, The non-cutting area is constituted by the area other than the electrode area.

2. The method for processing a package substrate according to claim 1.

4. The cutting lines include a plurality of first cutting lines extending in a first direction and a plurality of second cutting lines extending in a second direction intersecting the first direction; A plurality of electrodes are formed on the first cutting line so as to cross the first cutting line, and a plurality of electrodes are formed on the second cutting line so as to cross the second cutting line; or A plurality of electrodes are formed on the first cutting line so as to cross the first cutting line, and no electrodes are formed on the second cutting line; 4. The method for processing a package substrate according to claim 3.

5. In the cutting step, the cutting blade having a first blade thickness half-cuts the electrode so as to form an uncut portion below the cutting groove, and the electrode is exposed on a side wall of the cutting groove; a tape peeling step of peeling the protective tape from the package substrate after the cutting step is performed; a plating step of plating the electrode after the tape peeling step is performed; a full cutting step of fully cutting the remaining portion along the intended cutting line with a second cutting blade having a second blade thickness thinner than the cutting blade after the plating step is performed; 5. The method for processing a package substrate according to claim 1, further comprising:

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