Winding unit

Abstract

To provide a winding unit that can reliably pull out a cylindrical film from a winding part and dispose of the same.SOLUTION: The winding unit includes winding mechanisms 20, 20', rotation mechanisms 30, 30', and advancing / retracting mechanisms 40, 40'. One winding mechanism 20 is equipped with an out-pulling mechanism that pulls out a cylindrical film 120 from a winding part 22, the out-pulling mechanism includes a plate (pushing part) 51 and a moving mechanism (advancing / retracting mechanism 40), a gripping part of the other winding mechanism 20' releases the film 12, and the advancing / retracting mechanisms 40, 40' move the winding mechanisms 20, 20' in a direction in which they are relatively separated. After the cylindrical film 120 is pulled out from the other winding mechanism 20', the plate 51 pushes the side end of the cylindrical film 120 by the moving mechanism (advancing / retreating mechanism 40) and pulls out the cylindrical film 120.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a winding unit for winding up a strip of film from which adhesive tape has been peeled off in a tape application device. [Background technology]

[0002] When processing a plate-shaped workpiece such as a semiconductor wafer, a tape application device is used to integrate the workpiece and the ring frame surrounding it with adhesive tape to form a work set, and this work set is then set on the chuck table of the processing device (see, for example, Patent Document 1).

[0003] The adhesive tape used in the tape application device is constructed by forming an adhesive layer on a circular substrate large enough to cover the opening of the ring frame. The adhesive layer of this adhesive tape is adhered to a strip-shaped film, and multiple pieces of this adhesive tape are arranged at equal intervals along the extending direction of the film. The film to which multiple pieces of adhesive tape are adhered is set in a rolled state in the tape application device.

[0004] In the tape application device, the adhesive tape is peeled off from the film and applied to the ring frame and the workpiece, integrating them into a work set. The film from which the adhesive tape has been peeled is then wound up by a winding unit provided in the tape application device. When the winding unit has wound up a certain amount of film, the application of the adhesive tape to the workpiece and ring frame is temporarily stopped, and the rolled film (hereinafter referred to as the "tubular film") is removed from the winding unit and discarded by an operator. The operator then loads the tape roll containing the adhesive tape and the film into the tape application device, and the application of the adhesive tape to the workpiece and ring frame is resumed.

[0005] As described above, when disposing of the tubular film wound into a roll by the winding unit, the tape application device must be temporarily stopped and the worker must remove the tubular film from the winding unit, which not only reduces the efficiency of the adhesive tape application work but also requires a great deal of effort and time.

[0006] Therefore, Patent Document 2 proposes a winding unit that allows a cylindrical film wound in a roll to be removed and discarded without the need for manual work by an operator.

[0007] The winding unit is configured with a pair of winding sections arranged facing each other and each having a gripping portion for gripping the strip-shaped film, a rotation mechanism for rotating the winding sections, and an advancing / retracting means for moving one winding section toward or away from the other winding section. With this winding unit, when winding the film, the gripping portions grip the film, and the rotation mechanism rotates the winding sections to wind the film onto the winding sections. When disposing of the wound roll of tubular film, the gripping portions release the film, and the advancing / retracting means moves the winding sections apart so that the distance between them is greater than the width of the film, allowing the rolled tubular film to be removed and discarded. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] Japanese Patent Application Laid-Open No. 2015-220365 [Patent Document 2] Japanese Patent Application Publication No. 2019-104563 Summary of the Invention [Problem to be solved by the invention]

[0009] However, in the winding unit proposed in Patent Document 2, when the cylindrical film is disposed of, the pair of winding sections are moved away from each other by the advancing / retracting means, so the pair of winding sections do not necessarily come off the cylindrical film at the same time, and in some cases, one winding section may come off the cylindrical film before the other winding section. In such cases, the cylindrical film moves together with the other winding section while remaining supported by the other winding section, which creates the problem that the cylindrical film cannot be reliably removed from the pair of winding sections and discarded. Therefore, there is a need to reliably remove the cylindrical film from the winding portion of the winding unit and discard it. [Means for solving the problem]

[0010] The present invention, which solves the above-mentioned problems, provides a winding unit that winds up a strip-shaped film around a shaft extending parallel to the width direction of the film, and includes two winding mechanisms with gripping portions that grip side end portions of the film arranged facing each other, two rotation mechanisms that rotate the winding mechanisms, respectively, and an advancing / retreating mechanism that moves the two winding mechanisms toward and away from each other in the axial direction. The winding mechanisms include a cylindrical winding portion that houses the gripping portions and winds up the film on its outer circumferential surface, and an entrance portion formed in the winding portion through which the film enters to be gripped by the gripping portions. One of the winding mechanisms has a winding portion that has a winding mechanism that winds up the film. The winding unit includes a removal mechanism that removes the tubular film formed by taking the tubular film from the winding section, the removal mechanism including a pushing section that pushes the side end of the tubular film in the axial direction to separate the tubular film from the gripping section, and a moving mechanism that moves the gripping section that has released the film and the pushing section relatively in the axial direction, and the removal mechanism removes the tubular film from the other winding mechanism by moving the advancing / retreating mechanism in a direction separating the one winding mechanism from the other winding mechanism, and then the moving mechanism causes the pushing section to push the side end of the tubular film to remove the tubular film. The pushing portion is a plate having an opening through which the winding portion can pass, and the base on which the advancing / retreating mechanism is arranged is provided with a plate holding portion that holds the plate, and the winding mechanism is provided with a guide portion that allows the plate to be moved in the axial direction, and the winding mechanism may be configured so that by moving the winding mechanism in the axial direction, the plate is held by the plate holding portion, the winding portion is removed from the opening of the plate held by the plate holding portion, and the plate pushes the side end of the tubular film wound on the winding portion, thereby removing the tubular film from the winding portion. The pushing portion may also be a plate having an opening through which the winding portion can pass, and may include a moving mechanism that is disposed on the winding portion and moves the plate in the axial direction, and the winding unit may be configured so that the plate is moved in the axial direction by the moving mechanism, the winding portion is removed from the opening in the plate, and the plate pushes the side end of the tubular film wound on the winding portion, thereby removing the tubular film from the winding portion. [Effects of the Invention]

[0011] According to the present invention, when the cylindrical film is removed from a pair of winding mechanisms and discarded, after the gripping portion of the other winding mechanism releases the film, the advancing / retracting mechanism moves both winding mechanisms away from each other, the cylindrical film is removed from the other winding mechanism, and then the movement mechanism provided in the removal mechanism moves one winding mechanism and the cylindrical film held therein in the direction away from both winding mechanisms, so that the side end of the cylindrical film held by one winding mechanism is pushed in the removal direction by the pushing portion. As a result, the cylindrical film held by the other winding mechanism is forcibly and reliably removed from one winding mechanism as well, and the cylindrical film removed from both winding mechanisms falls under its own weight and is discarded. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a cutaway side view showing the basic configuration of a tape application device including a winding unit according to the present invention. [Figure 2] FIG. 2 is a perspective view showing the state of the winding unit according to the first embodiment of the present invention when winding a film. [Figure 3] 1 is a perspective view showing a state in which the winding unit according to the first embodiment of the present invention is removing a tubular film. FIG. [Figure 4] FIG. 10 is a perspective view showing a state in which a winding unit according to a second embodiment of the present invention is winding a film. [Figure 5] FIG. 10 is a perspective view showing a state in which the winding unit according to the second embodiment of the present invention is removing a tubular film. [Figure 6] FIG. 10 is a perspective view showing a state in which a winding unit according to a third embodiment of the present invention is winding a film. [Figure 7] FIG. 10 is a perspective view showing a state in which the winding unit according to the third embodiment of the present invention is removing a tubular film. DETAILED DESCRIPTION OF THE INVENTION

[0013] [Tape application device] 1 is used to continuously form work units 200 one after another by integrating a wafer 201, which is a workpiece, and a ring frame 202 arranged around the wafer 201 with adhesive tape 11, and includes, for example, a box-shaped housing 300. Inside this housing 300, there are disposed a chuck table 400 that supports the wafer 201 and the ring frame 202, a support roller 410 that supports the tape roll 10 wound around a cylindrical reel 13, a peeling plate 420, a pressure roller 430, and a winding unit 1 according to the present invention. Details of the winding unit 1 will be described later.

[0014] The wafer 201, which is the workpiece placed on the upper surface of the chuck table 400, is, for example, a disk-shaped semiconductor wafer, and is placed in a circular opening at the center of a ring frame 202 that is made of a metal such as SUS and has a ring shape. Here, a first support surface 401 that supports the wafer 201 is formed in the center of the upper surface of the chuck table 400, and a second support surface 402 that supports the ring frame 202 that surrounds the wafer 201 is formed around this first support surface 401. However, because the thickness of the wafer 201 is thinner than the thickness of the ring frame 202, the height of the first support surface 401 is set slightly higher than the height of the second support surface 402 by the difference in thickness between the two. Therefore, the upper surface of the wafer 201 placed on the chuck table 400 and the upper surface of the ring frame 202 are flush (at the same height). A moving mechanism (not shown) is provided below the chuck table 400, and the chuck table 400 can be moved in the horizontal direction (X-axis direction) by the moving mechanism.

[0015] The tape roll 10 wound around the reel 13 is configured by adhering a plurality of circular adhesive tapes 11 at predetermined equal intervals to the outer surface of a strip-shaped film 12 made of a resin such as polyester in the extending direction (longitudinal direction) of the film 12. Here, the adhesive tape 11 is configured of a resin base layer and an adhesive layer (neither of which is shown) provided on one side of the base layer. The adhesive layer is adhered to one side (outer surface) of the film 12, so that the plurality of adhesive tapes 11 are adhered to the outer surface of the film 12 at equal intervals along the extending direction of the film 12, as described above. Therefore, the adhesive layer of the adhesive tape 11 is protected by the film 12 before it is adhered to the wafer 201 and the ring frame 202. The inner diameter of the opening of the ring frame 202 is set larger than the outer diameter of the wafer 201, and the outer diameter of the adhesive tape 11 is set larger than the inner diameter of the opening of the ring frame 202 and smaller than the width of the film 12.

[0016] A support roller 410 attached to the ceiling of the housing 300 via a support member 440 is inserted into the winding tube 13 of the tape roll 20, and the tape roll 10 is rotatably supported by the support roller 410 arranged in the direction perpendicular to the plane of the paper in Fig. 1 (Y-axis direction). Note that a rotational drive source (not shown), such as a motor, is connected to one end of the support roller 410 in the axial direction (Y-axis direction), and the support roller 410 and the tape roll 10 rotate around the axis of the support roller 410 in the Y-axis direction.

[0017] A peeling plate 420 extending in the direction perpendicular to the plane of the paper in FIG. 1 (Y-axis direction) is arranged near the chuck table 400 diagonally below the support roller 410, and a pressing roller 430 is rotatably arranged near this peeling plate 420.

[0018] The peeling plate 420 is used to peel the film 12 from the adhesive tape 11, and is disposed at an angle with respect to the XY plane (horizontal plane) so that its +X-axis direction end (the right end in FIG. 1) is positioned downward. The +X-axis direction end (the right end in FIG. 1) of the peeling plate 420 is shaped so as to taper toward the tip. The width of the peeling plate 420 in the Y-axis direction is set to be larger than the outer diameter of the adhesive tape 11. A pressure roller 430 is rotatably disposed near the tip of the peeling plate 420.

[0019] In addition, below the tape roll 10 in the housing 300, at a position a predetermined distance away from the peeling plate 420 in the -X axis direction (leftward in Figure 1), a winding unit 1 according to the present invention is disposed.

[0020] In the tape application device 100 configured as described above, a film pull-out mechanism (not shown) pulls out the leading end of the film 12 obliquely downward from the tape roll 10. The pulled-out film 12 is then hooked onto the leading end of the peeling plate 420, folded back toward the −X-axis direction, and guided to the winding unit 1. Then, when the film 12 and the plurality of adhesive tapes 11 attached to its outer surface are unwound from the tape roll 10 rotating in the direction of arrow 10a (clockwise) in FIG. 1 toward the peeling plate 420 and the pressure roller 430, the film 12 is peeled off from the adhesive tape 11 by the peeling plate 420. That is, the film 12 is folded back at the leading end of the peeling plate 420 and wound up by the winding unit 1 in the direction of arrow 1a, whereby the film 12 is peeled off from the adhesive tape 11, and the adhesive tape 11 from which the film 12 has been peeled is sequentially adhered, starting from its end, to the upper surfaces of the ring frame 202 and the wafer 201 by the pressure roller 430 rotating in the direction of arrow 430a (counterclockwise). Then, when the chuck table 400 is moved horizontally in the +X direction (to the right in Figure 1) as shown by the dotted line in Figure 1, the adhesive tape 11 from which the film 12 has been peeled off is adhered to the entire surface of the ring frame 202 and the wafer 201, and the wafer 201 and the ring frame 202 are joined together by the adhesive tape 11 to form the work unit 200.

[0021] Although not shown, a pair of anti-slack rollers extending in the Y-axis direction are arranged at a position at least as far away from the peeling plate 420 in the -X-axis direction as the outer diameter of the ring frame 202, and the film 12 from which the adhesive tape 11 has been peeled off is clamped from above and below by the pair of anti-slack rollers, so that it is wound onto the winding unit 1 without slack.

[0022] As described above, the work unit 200 in which the wafer 201 and the ring frame 202 are integrated by the tape application device 100 is transported to a processing device (not shown), such as a grinding device, and the wafer 201, which is the workpiece, is subjected to processing such as grinding.

[0023] [Take-up unit] Next, an embodiment of the winding unit 1 according to the present invention will be described.

[0024] First Embodiment As shown in Figure 2, the winding unit 1 of this embodiment includes a pair of winding mechanisms 20, 20' arranged in the width direction (Y-axis direction) of the strip-shaped film 12, a pair of rotation mechanisms 30, 30' that rotate each of the winding mechanisms 20, 20', and advancing / retreating mechanisms 40, 40' that move the pair of winding mechanisms 20, 20' toward and away from each other along the Y-axis direction.

[0025] For example, one winding mechanism 20 is provided with a gripping portion 21 that grips one side edge portion of film 12, and the other winding mechanism 20' is provided with a gripping portion (not shown) that grips the other side edge portion, and both winding mechanisms 20, 20' are arranged so that their gripping portions 21 (the other not shown) face each other. Note that both winding mechanisms 20, 20' have the same configuration, and therefore only the configuration of one winding mechanism 20 will be shown and described below.

[0026] Winding mechanism 20 is provided with a substantially cylindrical winding unit 22 that houses gripping unit 21 and winds film 12 around its outer circumferential surface. Winding unit 22 includes gripping unit 21, a rotating shaft 23, a casing 24 that houses gripping unit 21 therein, and a support base 25 fixed to the tip of rotating shaft 23. Support base 25 is a member that is bent in an L-shape in side view, is fixed to casing 24 with fixing bolts (not shown), and supports gripping unit 21 inside casing 24.

[0027] The casing 24 is formed in a substantially cylindrical shape, and the side ends of the film 12 are wound around its outer peripheral surface, with the tip portion formed in a tapered cylindrical shape with the outer diameter decreasing from the middle portion in the longitudinal direction (Y-axis direction) toward the tip side (negative Y-axis side). The tip portion of the casing 24 is formed with a pair of entrance portions 26 through which the film 12 passes when gripped by the gripping portion 21. Here, the entrance portions 26 are formed as slits cut from the tip of the casing 24 to the middle position in the longitudinal direction.

[0028] The gripping section 21 also includes a clamp plate 27 fixed to the support base 25, a clamp plate 28 supported on the support base 25 so as to be movable up and down, and a cylinder mechanism (not shown) for moving the clamp plate 28 up and down, and the side end of the film 12 that has entered between the clamp plates 27, 28 is gripped by the clamp plates 27, 28.

[0029] One rotation mechanism 30 that rotates one winding section 22 has a motor 31 as a drive source, and this motor 31 is attached to the inner surface of the end of a support plate 32. An output shaft (motor shaft) 311 of this motor 31 passes through a circular hole (not shown) formed in the support plate 32 and protrudes to the outer surface side of the support plate 32, and a drive pulley 33 is attached to the protruding end.

[0030] The winding unit 22 is disposed on the inner surface of the support plate 32, and the rotary shaft 23 of the winding unit 22 passes through a circular hole (not shown) formed in the support plate 32 and protrudes to the outer surface of the support plate 32, with a driven pulley 34 attached to its protruding end. An endless transmission belt 35 is wound between the driven pulley 34 and the drive pulley 33. Therefore, when the motor 31 is driven, the rotation of the output shaft 311 of the motor 31 is transmitted from the drive pulley 33 to the driven pulley 34 via the transmission belt 35, and the driven pulley 34, the rotary shaft 23, and the winding unit 22 are rotated at a predetermined speed.

[0031] The other rotation mechanism 30' that rotates the other winding section 22' has the same configuration as the one rotation mechanism 30. That is, as shown in Fig. 2, the rotation mechanism 30' is composed of a motor 31' attached to a support plate 32', a drive pulley 33', a driven pulley 34', and a transmission belt 35'.

[0032] Next, the advancing and retreating mechanisms 40, 40' will be described.

[0033] One of the advancing and retreating mechanisms 40 (on the right side (+Y-axis side) in FIG. 2 ) moves the take-up unit 20 on that side toward or away from the take-up unit 20′ on the other side (on the left side (−Y-axis side) in FIG. 2 ) in the Y-axis direction, and is disposed on the front side of a plate-shaped support base 41 extending in the Y-axis direction. Specifically, this advancing and retreating mechanism 40 includes a rotatable ball screw shaft 42 extending horizontally along the Y-axis direction on the front side of the support base 41, a pair of upper and lower guide rails 43 arranged parallel to each other along the Y-axis direction above and below the ball screw shaft 42 on the front side of the support base 41, a motor 44 serving as a drive source, and a sliding block unit 321 that is slidable in the Y-axis direction along the guide rails 43. The sliding block unit 321 is formed integrally with the base end of the support plate 32, and the ball screw shaft 42 is threadably inserted into this sliding block unit 321.

[0034] One axial end (left end in FIG. 2) of the ball screw shaft 42 is rotatably supported by a bearing 46, and the other end (right end in FIG. 2) of the ball screw shaft 42 is connected to a motor 44.

[0035] The other advancing / retreating mechanism 40' (on the left side in FIG. 2) moves the winding unit 22' on the same side toward or away from the winding unit 22 on one side (on the right side in FIG. 2) in the Y-axis direction, and its basic configuration is the same as that of the one advancing / retreating mechanism 40. That is, the advancing / retreating mechanism 40' includes a ball screw shaft 42', a guide rail 43', a motor 44', a sliding block unit 321', a bearing 46', etc.

[0036] In the winding unit 1 according to the present embodiment, one winding mechanism 20 is provided with a removal mechanism for forcibly removing tubular film 120 (shown by a chain line in FIG. 3 ), which has been formed into a tubular shape by a pair of winding sections 22, 22′ winding up film 12, from winding section 22 of the winding mechanism 20. This removal mechanism is composed of a disk-shaped plate 51, which is a pushing section that pushes the side end of tubular film 120 in the −Y direction to detach tubular film 120 from winding section 22, and a moving mechanism that moves gripping section 21, which has released film 12, and plate 51 relatively in the Y-axis direction. In the present embodiment, the moving mechanism is composed of one of advancing and retreating mechanisms 40.

[0037] 2, a circular opening 511 is formed in the center of plate 51, allowing one winding unit 22 to pass through, and the position of plate 51 in the Y-axis direction is fixed. That is, plate 51 is held by a pair of upper and lower plate holders 52, 53 attached to support base 41 via magnets 54. More specifically, the pair of upper and lower plate holders 52, 53 are members bent in an L shape, and a magnet 54 is attached to each tip of each of these. Plate 51 is attracted to and held by plate holders 52, 53 by the magnetic force of the pair of upper and lower magnets 54, and can freely rotate relative to plate holders 52, 53.

[0038] As shown in FIG. 2, a plate 51' having the same diameter as the plate 51 is provided in the winding section 22' of the other winding mechanism 20', and this plate 51' is movable in the Y-axis direction together with the winding section 22'.

[0039] Next, the operation of the winding unit 1 configured as above will be described.

[0040] As shown in FIG. 2 , when the leading end of film 12 is guided into winding unit 1, one winding section 22 is moved in the −Y direction by advancing / retracting mechanism 40 so as to approach the side edge of film 12, and the side edge of film 12 enters entrance section 26. Also, the other winding section 22′ is moved in the +Y direction by advancing / retracting mechanism 40′ so as to approach the side edge of film 12, and the side edge of film 12 enters entrance section 26 (not shown). Thereafter, for example, in one winding mechanism 20, a cylinder mechanism (not shown) lowers clamp plate 28, and both side edges of film 12 are clamped between clamp plates 27 and 28, causing gripping section 21 of winding section 22 to clamp one side edge of film 12. Similarly, in the other winding mechanism 20′, a gripping section (not shown) of winding section 22′ clamps the other side edge of film 12.

[0041] Next, one of the advancing and retracting mechanisms 40 moves the winding section 22 in the +Y direction, and the other advancing and retracting mechanism 40' moves the winding section 22' in the -Y direction, thereby moving the two winding sections 22, 22' away from each other. This is to prevent a situation in which the gripping sections 21, 22' of the winding sections 22, 22' do not grip the side edge portions of the film 12 because the film 12 is not properly positioned with respect to the winding sections 22, 22' when the film unwinding mechanism guides the leading edge side of the film 12 into the winding unit 1. This prevents a malfunction in which the winding sections 22, 22' start rotating when the gripping sections 21 (the other one not shown) of the winding sections 22, 22' are not gripping the side edge portions of the film 12.

[0042] When the gripping portions 21 (the other not shown) of the two winding units 22, 22' grip the side edge portions of the film 12 and the motors 31, 31' of the rotation mechanisms 30, 30' are started, the rotation of the motors 31, 31' is transmitted to the winding units 22, 22' via the drive pulleys 33, 33', the transmission belts 35, 35', and the driven pulleys 34, 34', and the winding units 22, 22' are rotated at the same speed in the same direction (the winding direction of the film 12) as shown by the arrows in Figure 3. Then, the film 12, whose side edge is gripped by the gripping portions 21 (the other not shown) of the winding units 22, 22', is wound around the winding units 22, 22', and the winding of the film 12 in this manner forms a roll of tubular film 120. At this time, plates 51, 51' are arranged on both axial sides of cylindrical film 120, and these plates 51, 51' act as guides for winding film 12, preventing film 12 from meandering in the Y-axis direction during winding.

[0043] Then, when the winding unit 1 starts winding the film 12, the support roller 410 shown in Figure 1 rotates in conjunction with this, and the film 12 and the multiple adhesive tapes 11 attached to its outer surface are unwound from the tape roll 10 supported by this support roller 410 toward the peeling plate 420 and the pressure roller 430.As described above, the film 12 is peeled off from the adhesive tape 11 and wound onto the winding unit 1, and the adhesive tape 11 peeled off from the film 12 is attached to the wafer 201 and the ring frame 202 to form the work unit 200.

[0044] For example, when all of the film 12 is unwound from the tape roll 10 supported by the support roller 410 shown in Figure 1, a predetermined length of film 12 is wound onto the winding sections 22, 22' of the winding unit 1, forming a cylindrical film 120 with a predetermined outer diameter as shown in Figure 3. This cylindrical film 120 is then removed from the winding sections 22, 22' and discarded using the following procedure.

[0045] That is, first, the grip of the side end of film 12 by the gripping portion (not shown) of the other winding unit 22' (left side in FIG. 2) is released, and then the advancing / retracting mechanisms 40, 40' are driven, and one winding mechanism 20 and the other winding mechanism 20' move in directions that move them apart relative to each other (directions in which winding units 22, 22' come out of tubular film 120). That is, one winding mechanism 20 moves in the +Y direction, and the other winding mechanism 20' moves in the -Y direction. At this time, as described above, because the grip of the side end of film 12 by the other gripping portion (not shown) has been released, when the other winding mechanism 20' moves in the -Y direction, the other winding unit 22' comes out of tubular film 120 first.

[0046] In the above state, tubular film 120 moves in the +Y direction together with one of the winding sections 22 while remaining held by the other of the winding sections 22, but because plate 51 does not move, tubular film 120, which moves together with the winding section 22, abuts its side end face against plate 51 and is pushed in the -Y direction by plate 51. As a result, tubular film 120 is forcibly pulled out from one of the winding sections 22 and falls under its own weight to be discarded.

[0047] As described above, according to the winding unit 1 of this embodiment, when the rolled film 120 is removed from the pair of winding mechanisms 20, 20' and discarded, the unillustrated gripping portion of the other winding mechanism 22' releases the film 12, and then the advancing / retreating mechanisms 40, 40' move the two winding mechanisms 20, 20' in a direction away from each other, and the tubular film 120 is first removed from the other winding mechanism 20', and then the moving mechanism provided in the removal mechanism (in this embodiment, the advancing / retreating mechanism 40) moves one of the winding sections 22 and the tubular film 120 held therein in a direction away from the two winding mechanisms 20, 20', so that the side end of the tubular film 120 held by one of the winding mechanisms 20 is pushed in the removal direction by the plate 51. As a result, the cylindrical film 120 held by one of the winding mechanisms 20 is also removed from that other winding mechanism 20, and the cylindrical film 120 removed from both winding mechanisms 20, 20' falls under its own weight and is discarded, as shown in Figure 3.

[0048] Second Embodiment Next, a winding unit 1' according to a second embodiment of the present invention will be described with reference to Figures 4 and 5. In Figures 4 and 5, the same elements as those shown in Figures 2 and 3 are denoted by the same reference numerals, and further description thereof will be omitted below.

[0049] In the winding unit 1' according to this embodiment, as shown in Fig. 4, a guide plate 60 is attached to the outer periphery of one (right side in Fig. 4) winding mechanism 20, between plate 51 and support plate 32 in the Y-axis direction. Four guide pins 61 (only three are shown in Fig. 4) are provided on the surface of plate 51 facing guide plate 60, protruding horizontally toward guide plate 60, and these guide pins 61 are slidably inserted into circular holes (not shown) formed in guide plate 60. Here, guide plate 60 and guide pins 61 form a guide section that guides movement of winding mechanism 20 along the Y-axis direction.

[0050] In winding unit 1' according to the present embodiment, when tubular film 120 is removed from a pair of winding mechanisms 20, 20' and discarded, after a gripping portion (not shown) of the other winding section 22' releases film 12, advancing / retracting mechanisms 40, 40' move both winding mechanisms 20, 20' in directions away from each other, as shown by the arrows in Figure 5, and tubular film 120 is first removed from the other winding section 22', and then a moving mechanism (in this embodiment, advancing / retracting mechanism 40) moves one winding section 22 and the tubular film 120 held therein in directions away from both winding mechanisms 20, 20'. Therefore, in winding unit 1' according to the present embodiment, when tubular film 120 (see Figure 5) wound around winding sections 22, 22' is removed, the movement of one winding mechanism 20 in the +Y-axis direction is guided smoothly by guide plate 60 and guide pin 61 that form the guide portion.

[0051] Then, the tubular film 20 that was first removed from the other winding section 22' has its side end pushed in the removal direction (-Y axis direction) by plate 51, and the tubular film 120 held in one winding section 22 is also removed from that one winding section 22, and the tubular film 120 removed from both winding sections 22, 22' falls under its own weight and is discarded, as shown in Figure 5. Note that in this embodiment, the number of guide pins 61 that make up the guide section is four, but the number of guide pins 61 can be any number as long as it is more than one.

[0052] Third Embodiment Next, a winding unit 1" according to a third embodiment of the present invention will be described with reference to FIGS. 6 and 7. In FIGS. 6 and 7, the same elements as those shown in FIGS. 2 and 3 are denoted by the same reference numerals, and further description thereof will be omitted below.

[0053] In the first and second embodiments, the advancing / retreating mechanism 40 was also used as a moving mechanism for moving one of the winding mechanisms 20 holding the tubular film 120 in the +Y-axis direction relative to the plate 51. However, in the winding unit 1" of this embodiment, the moving mechanism is composed of an air cylinder 70, and the plate 51 constituting the pushing section is held so as to be movable in the Y-axis direction relative to the winding section 22. Here, three air cylinders 70 are arranged circumferentially at equal angular intervals (120° intervals) on the outer periphery of one of the winding sections 22, and the ends of the rods 71 ​​extending from each air cylinder 70 in the -Y-axis direction are respectively connected to the plate 51.

[0054] In winding unit 1" according to this embodiment, when tubular film 120 is removed from a pair of winding sections 22, 22' and discarded, a gripping section (not shown) of the other winding section 22' releases film 12, and then, as shown by the arrow in FIG. 7, advancing and retreating mechanisms 40, 40' move both winding mechanisms 20, 20' in directions away from each other, so that tubular film 120 is first removed from the other winding section 22'. After that, rods 71 ​​of three air cylinders 70, which constitute the movement mechanism, are extended in the direction of the arrow in FIG. 7 (-Y axis direction). Then, plate 51 moves in the direction of the arrow. The plate 51 moves in the -Y-axis direction, and the tubular film 120 whose side end surface is in contact with the plate 51 is forcibly removed from one of the winding sections 22, and the tubular film 120 removed from both winding sections 22, 22' falls under its own weight and is discarded, as shown in Figure 7. Note that in this embodiment, the number of air cylinders 70 constituting the movement mechanism is three, but the number of air cylinders 70 can be any number as long as it is more than one. Also, in this embodiment, the movement mechanism is constituted by air cylinders 70, but any other mechanism, such as a hydraulic cylinder, may be used instead of the air cylinders 70.

[0055] The above has described an embodiment in which the present invention is applied to a winding unit that winds up a film peeled off from an adhesive tape that integrates the wafer, which is the workpiece, and a ring frame as a work unit in a tape application device. However, the present invention can also be applied to a winding unit for winding up a film in any other device other than a tape application device.

[0056] Furthermore, the present invention is not limited to the application of the above-described embodiments, and it goes without saying that various modifications are possible within the scope of the claims and the technical ideas described in the specification and drawings. [Explanation of symbols]

[0057] 1, 1', 1": Winding unit, 10: Tape roll, 11: Adhesive tape, 12: Film, 13: Roll, 20, 20': winding mechanism, 21: gripping portion, 22, 22': winding portion, 23: Rotating shaft, 24: Casing, 25: Support base, 26: Entry portion, 27, 28: clamp plates; 30, 30': rotation mechanism; 31, 31': motor; 311: output shaft (motor shaft), 32, 32': support plate, 321, 321': sliding block portion, 33, 33': driving pulley, 34, 34': driven pulley, 35, 35': transmission belt, 40, 40': advance / retreat mechanism, 41: support base, 42, 42': ball screw shaft, 43, 43': guide rail, 44, 44': motor, 45, 45': bearing, 51: Plate (pressing portion), 511: Opening, 52, 53: Plate holding portion, 54: magnet, 60: guide plate, 61: guide pin, 70: air cylinder (movement mechanism), 71: rod, 100: tape application device, 200: work unit, 201: wafer, 202: ring frame, 300: housing, 400: chuck table, 401: first support surface, 402: second support surface, 410: Support roller, 420: Peeling plate, 430: Pressing roller, 440: Support member

Claims

1. A winding unit that winds a strip-shaped film around a shaft extending parallel to the width direction of the film, the film winding device includes two winding mechanisms, each of which has a gripping portion that grips a side edge portion of the film and is arranged so as to face each other; two rotation mechanisms that rotate the winding mechanisms, respectively; and an advancing / retracting mechanism that moves the two winding mechanisms toward and away from each other in the axial direction; the winding mechanism includes a cylindrical winding section that houses the gripping section and winds the film around its outer circumferential surface, and an entry section that is formed in the winding section and through which the film enters so that the film can be gripped by the gripping section; one of the winding mechanisms includes a removal mechanism that removes the cylindrical film formed by the winding section winding the film from the winding section; the removal mechanism includes a pushing section that pushes the side end of the tubular film in the axial direction to separate the tubular film from the gripping section, and a moving mechanism that moves the gripping section that has released the film and the pushing section relatively in the axial direction; The removal mechanism is a winding unit in which the gripping portion of the other winding mechanism releases the film, the advancing / retreating mechanism moves the one winding mechanism and the other winding mechanism in a direction separating them from each other to remove the tubular film from the other winding mechanism, and then the moving mechanism causes the pushing portion to push the side end of the tubular film to remove the tubular film.

2. The pushing portion is a plate having an opening through which the winding portion can pass, a base on which the advancing / retreating mechanism is disposed includes a plate holding portion that holds the plate; the winding mechanism includes a guide portion that allows the plate to move in the axial direction; The winding mechanism is moved in the axial direction to hold the plate in the plate holding portion; The winding unit according to claim 1, wherein the winding section is removed from the opening of the plate held by the plate holding section, and the plate pushes the side end of the tubular film wound on the winding section, thereby removing the tubular film from the winding section.

3. The pushing portion is a plate having an opening through which the winding portion can pass, a moving mechanism that is disposed in the winding section and moves the plate in the axial direction; The winding unit of claim 1, wherein the plate is moved in the axial direction by the moving mechanism, the winding section is removed from the opening of the plate, and the plate pushes the side end of the tubular film wound on the winding section, thereby removing the tubular film from the winding section.

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