Electronic Components

Abstract

This electronic component comprises: a glass substrate having a first surface and a second surface that are positioned on opposite sides from each other; a coil a portion of which is embedded in the glass substrate and which is wound about a shaft ; and a capacitor provided to the glass substrate, electrically connected to the coil, and having a first electrode and a second electrode that face each other, wherein the first electrode and the second electrode overlap the coil in a direction perpendicular to the shaft.

Description

[Technical Field]

[0001] The present invention relates to electronic components. [Background technology]

[0002] A conventional electronic component is described in Japanese Patent Application Laid-Open No. 2020-174169 (Patent Document 1). This electronic component includes a glass substrate, an outer conductor in contact with the outer surface of the glass substrate, and a protective film in contact with the outer surface of the glass substrate and the outer conductor so as to cover the outer conductor. This electronic component includes a capacitor and a coil (FIG. 16). The capacitor has a first electrode and a second electrode, and the coil is configured by winding a conductor spirally around an axis. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2020-174169 Summary of the Invention [Problem to be solved by the invention]

[0004] In conventional electronic components, the first electrode of the capacitor is arranged horizontally in the axial direction relative to the coil, but this configuration poses a problem in that it is difficult to reduce the size of the component in a plane parallel to the axial direction.

[0005] SUMMARY OF THE INVENTION An object of the present invention is to provide an electronic component that can be made smaller. [Means for solving the problem]

[0006] In order to solve the above problems, an electronic component according to one aspect of the present disclosure comprises: a glass substrate having a first surface and a second surface opposite to each other; a coil partially embedded in the glass substrate and wound around an axis; a capacitor provided on the glass substrate, electrically connected to the coil, and having a first electrode and a second electrode facing each other; Equipped with The first electrode and the second electrode overlap the coil in a direction perpendicular to the axis.

[0007] In the above embodiment, the first electrode and the second electrode of the capacitor and the coil are overlapped in a direction perpendicular to the axis (plan view), thereby reducing the size in a planar direction parallel to the axis and enabling miniaturization of the electronic component. For example, when the second surface of the glass substrate is used as the mounting surface, the mounting area can be reduced. [Effects of the Invention]

[0008] According to the present disclosure, it is possible to provide an electronic component that can be made smaller. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 2 is a top view of the electronic component according to the first embodiment. [Figure 2] FIG. 2 is a cross-sectional view taken along line II-II of FIG. [Figure 3] FIG. 3 is a cross-sectional view taken along the line III-III in FIG. [Figure 4] FIG. 10 is a top view of the electronic component according to the second embodiment. [Figure 5] FIG. 5 is a cross-sectional view of FIG. 4 . [Figure 6] 6 is a cross-sectional view taken along the line VI-VI in FIG. 4. [Figure 7] FIG. 10 is a top view of the electronic component according to the third embodiment. [Figure 8] FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. 7. [Figure 9] 9 is a cross-sectional view taken along line IX-IX in FIG. 8. [Figure 10] FIG. 10 is a top view of the electronic component according to the fourth embodiment. [Figure 11] 11 is a cross-sectional view taken along the line XI-XI in FIG. [Figure 12] 12 is a cross-sectional view taken along the line XII-XII of FIG. 11. [Figure 13] FIG. 10 is a top view of the electronic component according to the fifth embodiment. [Figure 14] 14 is a cross-sectional view taken along the line XIV-XIV in FIG. 13. [Figure 15] 15 is a cross-sectional view taken along the line XV-XV in FIG. 13. [Figure 16] FIG. 13 is a top view of the electronic component according to the sixth embodiment. [Figure 17] 17 is a cross-sectional view taken along the line XVII-XVII in FIG. 16. [Figure 18] 18 is a cross-sectional view taken along the line XVIII-XVIII in FIG. 16. [Figure 19] FIG. 13 is a top view of the electronic component according to the seventh embodiment. [Figure 20] 20 is a cross-sectional view taken along the line XX-XX in FIG. 19. [Figure 21] 21 is a cross-sectional view taken along the line XXI-XXI in FIG. 19. [Figure 22] 22-XXII cross-sectional view of FIG. 19. [Figure 23] FIG. 13 is a top view of the electronic component according to the eighth embodiment. [Figure 24] 24-24 cross-sectional view of FIG. 23. [Figure 25] 25 is a cross-sectional view taken along the line XXV-XXV of FIG. 23. [Figure 26] FIG. 13 is a top view of the electronic component of the ninth embodiment. [Figure 27] 27 is a cross-sectional view taken along line XXVII-XXVII in FIG. 26. [Figure 28] 28 is a cross-sectional view taken along line XXVIII-XXVIII of FIG. 26. [Figure 29] FIG. 19 is a top view of the electronic component of the tenth embodiment. [Figure 30] This is a cross-sectional view taken along the line XXX-XXX in Figure 29. [Figure 31] 31 is a cross-sectional view taken along the line XXXI-XXXI in FIG. 29. [Figure 32] FIG. 30 is an exploded plan view of FIG. 29. [Figure 33] FIG. 20 is a cross-sectional view of an electronic component according to an eleventh embodiment. [Figure 34] FIG. 22 is a cross-sectional view of an electronic component according to a twelfth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] The magnetic particles according to one embodiment of the present disclosure will be described in detail below with reference to the illustrated embodiments. Note that the drawings include some schematic illustrations and may not reflect actual dimensions or proportions.

[0011] First Embodiment [Summary configuration] FIG. 1 is a schematic top view of electronic component 1 as viewed from the top side. FIG. 2 is a cross-sectional view taken along line II-II in FIG. 1. FIG. 3 is a cross-sectional view taken along line III-III in FIG. 1. For convenience, FIG. 1 depicts the electronic component 1 as transparent so that its structure can be easily understood, but it may also be semi-transparent or opaque. In FIG. 1, first external terminals 41 and second external terminals 42 are depicted with double-dashed diagonal lines, and first protective layer 15 and third protective layer 17 are omitted.

[0012] 1, 2, and 3, the electronic component 1 includes a glass substrate 10, a coil 20, a capacitor 30, a third protective layer 17, a first protective layer 15, a second protective layer 16, a first external terminal 41, and a second external terminal 42. The electronic component 1 is a surface-mount electronic component used in, for example, a high-frequency signal transmission circuit. The glass substrate 10 has a first surface 10t and a second surface 10b located on opposite sides to each other. The coil 20 is partially embedded in the glass substrate 10 and wound around the axis AX. A portion of the coil 20 is exposed from the first surface 10t of the glass substrate 10. A portion of the coil 20 is exposed from the second surface 10b of the glass substrate 10. The capacitor 30 is provided on the first surface 10t of the glass substrate 10 and is electrically connected to the coil 20. The capacitor 30 has a first electrode 31 and a second electrode 32 that face each other, and the first electrode 31 and the second electrode 32 overlap the coil 20 in a direction perpendicular to the axis AX. This configuration allows the size in a planar direction parallel to the axis AX to be reduced, thereby enabling the miniaturization of the electronic component 1. For example, when the second surface 10b of the glass substrate 10 is used as a mounting surface, the mounting area can be reduced.

[0013] The third protective layer 17 covers the capacitor 30 and is provided on the first surface 10t of the coil 20. The first protective layer 15 covers a part of the exposed coil 20 and is provided on the third protective layer 17 . The second protective layer 16 covers a part of the exposed coil 20 and is provided on the second surface 10 b of the coil 20 .

[0014] The first external terminal 41 and the second external terminal 42 are provided on the second protective layer 16. The first external terminal 41 is electrically connected to the coil 20, and the second external terminal 42 is electrically connected to the capacitor 30. The coil 20 and the capacitor 30 are connected in series. Alternatively, the coil 20 and the capacitor 30 may be connected in parallel.

[0015] [Preferable configuration of each component] (glass substrate 10) The glass substrate 10 is a rectangular parallelepiped having a length, width, and height. The glass substrate 10 has a first end face 10e1 and a second end face 10e2 at both ends in the length direction, a first side face 10s1 and a second side face 10s2 at both ends in the width direction, and a second face 10b and a first face 10t at both ends in the height direction. That is, the outer surface 100 of the glass substrate 10 includes the first end face 10e1 and the second end face 10e2, the first side face 10s1 and the second side face 10s2, the second face 10b, and the first face 10t. The second face 10b is one of the main faces of the glass substrate 10, and the first face 10t is located on the back side of the second face 10b. The first face 10t and the second face 10b are parallel to the axis AX.

[0016] In this specification, "parallel" does not only mean being completely parallel to the axis AX of the coil, but also means being substantially parallel, such as being slightly curved relative to the axis AX, for example, having an angle of ±5% relative to the axis AX. In this specification, the outer surface 100 of the glass substrate 10 does not simply mean the surface facing the outer periphery of the glass substrate 10, but rather refers to the surface that forms the boundary between the outside and the inside of the glass substrate 10. Furthermore, "above the outer surface 100 of the glass substrate 10" does not refer to an absolute direction such as vertically upward, which is determined by the direction of gravity, but rather refers to a direction toward the outside of the outside and the inside, with the outer surface 100 as the boundary, based on the outer surface 100. Therefore, "above the outer surface 100" is a relative direction determined by the orientation of the outer surface 100. Furthermore, "above" with respect to a certain element includes not only an upper position away from the element, i.e., an upper position via another object on the element or an upper position with a gap therebetween, but also a position directly above the element (on).

[0017] As shown in the drawings, for the sake of convenience, the lengthwise direction (longitudinal direction) of the glass substrate 10, which is the direction from the first end face 10e1 to the second end face 10e2, is referred to as the X direction. The widthwise direction of the glass substrate 10, which is the direction from the first side face 10s1 to the second side face 10s2, is referred to as the Y direction. The heightwise direction of the glass substrate 10, which is the direction from the second face 10b to the first face 10t, is referred to as the Z direction. The X direction, Y direction, and Z direction are perpendicular to each other, and when arranged in the order X, Y, Z, they form a left-handed system.

[0018] The glass substrate 10 has insulating properties. The glass substrate 10 is preferably a photosensitive glass substrate, such as Foturan II (a registered trademark of Schott AG). In particular, the glass substrate 10 preferably contains cerium oxide (ceria: CeO), which acts as a sensitizer and makes photolithographic processing easier.

[0019] However, the glass substrate 10 may be a glass plate that does not have photosensitivity, since it can be processed by mechanical processing such as drilling or sandblasting, dry / wet etching using a photoresist or metal mask, laser processing, etc. Furthermore, the glass substrate 10 may be formed by sintering a glass paste, or by a known method such as the float method.

[0020] (Coil 20) The coil 20 is wound spirally along an axis AX. The axis AX of the coil 20 is arranged parallel to the second surface 10b of the glass substrate 10. The coil 20 includes a plurality of second coil conductors 21b, a plurality of first coil conductors 21t, a plurality of first through conductors 23, and a plurality of second through conductors 24. The coil 20 forms a spiral by electrically connecting the first through conductors 23, the first coil conductor 21t, the second through conductors 24, and the second coil conductor 21b in this order. The coil 20 has a first end and a second end, the second end being connected to the first external terminal 41, and the first end being connected to the capacitor 30 via the third via conductor 243v. The third via conductor 243v is the via conductor located closest to the second end face 10e2 of the glass substrate 10, and has only a pad portion. The coil 20 has a plurality of turns.

[0021] The plurality of first through conductors 23 penetrate the glass substrate 10, extend from the second coil conductor 21b toward the first coil conductor 21t, and are arranged along the axis AX. The plurality of first coil conductors 21t are provided on the third protective layer 17. The second through conductors 24 are provided on the opposite side of the axis AX to the first through conductors 23. The multiple second through conductors 24 penetrate the glass substrate 10, extend from the first coil conductor 21t toward the second coil conductor 21b, and are arranged along the axis AX. The plurality of second coil conductors 21b are provided on the second surface 10b of the glass substrate 10. That is, a part of the coil 20 is exposed from the first surface 10t of the glass substrate 10, and a part of the coil 20 is exposed from the second surface 10b of the glass substrate 10.

[0022] The first coil conductor 21t extends in the Y direction. All of the first coil conductors 21t are arranged in parallel along the X direction. The second coil conductors 21b extend in the Y direction at a slight incline toward the X direction. All of the second coil conductors 21b are arranged in parallel along the X direction.

[0023] The first through conductors 23 and the second through conductors 24 extend in a direction perpendicular to the second surface 10b and the first surface 10t, respectively. All of the first through conductors 23 and all of the second through conductors 24 are arranged in parallel along the X direction. The first through conductor 23 is disposed on the first side surface 10s1 side with respect to the axis AX within the through hole of the glass substrate 10. The first through conductor 23 is connected to the first coil conductor 21t through a first via conductor 23v that penetrates the third protective layer 17. The first via conductor 23v has a first pad portion 23v1 provided on the first through conductor 23 and a first via wiring 23v2 provided on the first pad portion 23v1 and connected to the first coil conductor 21t. The second through conductor 24 is disposed on the second side surface 10s2 side with respect to the axis AX within the through hole of the glass substrate 10. The second through conductor 24 is connected to the second coil conductor 21b, and is further connected to the first coil conductor 21t via a second via conductor 24v that penetrates the third protective layer 17. The second via conductor 24v has a second pad portion provided on the second through conductor 24 and a second via wiring provided on the second pad portion and connected to the first coil conductor 21t.

[0024] The second coil conductor 21b and the first coil conductor 21t are made of a conductive material such as copper, silver, gold, or an alloy thereof. The second coil conductor 21b and the first coil conductor 21t may be a metal film formed by plating, vapor deposition, sputtering, or the like, or may be a metal sintered body formed by applying and sintering a conductive paste. The first through conductor 23 and the second through conductor 24 are made of the same material as the second coil conductor 21b and the first coil conductor 21t.

[0025] The second coil conductor 21b and the first coil conductor 21t are preferably formed by a semi-additive method, which allows the second coil conductor 21b and the first coil conductor 21t to be formed with low electrical resistance, high precision, and a high aspect ratio. The first through conductors 23 and the second through conductors 24 can be formed in through holes formed in advance in the glass substrate 10 using the materials and manufacturing methods exemplified for the second coil conductor 21b and the first coil conductor 21t.

[0026] The first via conductor 23v, the second via conductor 24v, and the third via conductor 243v can be formed using the same material and method as the first coil conductor.

[0027] (Capacitor 30) The capacitor 30 is provided on the first surface 10t of the glass substrate 10 and is electrically connected to the coil 20. The capacitor 30 has a first electrode 31 and a second electrode 32 facing each other, and a dielectric film 33 disposed between the first electrode 31 and the second electrode 32. In a direction perpendicular to the axis (in a plan view), the first electrode 31 and the second electrode 32 of the capacitor 30 overlap the coil 20. This configuration allows the size in a planar direction parallel to the axis AX to be reduced, thereby enabling the miniaturization of the electronic component 1. For example, when the second surface 10b of the glass substrate 10 is used as a mounting surface, the mounting area can be reduced.

[0028] The capacitor 30 is disposed inside the coil 20. The above configuration makes it possible to further reduce the size of the electronic component 1. The capacitor 30 may also be disposed outside the coil 20. The capacitor 30 is provided between the first coil conductor 21t and the second coil conductor 21b of the coil 20, and between the first through conductor 23 and the second through conductor 24. A part of the capacitor 30 is disposed inside the coil 20. Note that the entire capacitor 30 may be disposed inside the coil 20. In this specification, "inside coil 20" refers to the area surrounded by the surfaces that contact the inner circumferences of the first penetrating conductor 23 and the second penetrating conductor 24 that face each other, and the surfaces that contact the inner circumferences of the first coil conductor 21t and the second coil conductor 21b that face each other.

[0029] The principal surfaces of the first electrode 31 and the second electrode 32 of the capacitor 30 are parallel to the axis AX of the coil 20. Specifically, the principal surface of the first electrode 31 is parallel to the first surface 10t of the glass substrate 10, the principal surface of the second electrode 32 is parallel to the first surface 10t of the glass substrate 10, and the axis AX is parallel to the first surface 10t of the glass substrate 10. With the above configuration, the axis AX of the coil 20 is parallel to the first electrode 31 and the second electrode 32 that form the capacitor 30, and the magnetic flux of the coil 20 is not obstructed by the capacitor 30. As a result, eddy current loss in the coil 20 and the capacitor 30 can be suppressed. Note that the principal surfaces of the first electrode 31 and the second electrode 32 of the capacitor 30 do not have to be parallel to the axis AX of the coil 20.

[0030] The dielectric film 33 of the capacitor 30 completely covers the first electrode 31. This configuration prevents contact between the first electrode 31 and the second electrode 32. Note that the dielectric film 33 of the capacitor 30 does not necessarily have to completely cover the first electrode 31.

[0031] The second electrode 32 of the capacitor 30 is electrically connected to the first coil conductor 21t of the coil 20. Specifically, the second electrode 32 of the capacitor 30 is connected to the first coil conductor 21t through the third via conductor 243v. The first electrode 31 of the capacitor 30 is provided on the first surface 10t of the glass substrate 10 and is connected to the lead conductor 34, which is connected to the second external terminal 42 via a fourth via conductor 34v. The fourth via conductor 34v has a fourth pad portion 34v1 provided on the lead conductor 34 and a fourth via wiring 34v2 provided on the fourth pad portion 34v1. The lead conductor 34 and the third via conductor 243v are spaced apart in a direction perpendicular to the axis AX, i.e., in a plan view.

[0032] The material of the first electrode 31 and the second electrode 32 is the same as the material of the first coil conductor 21t and the second coil conductor 21b.

[0033] (First protective layer 15, second protective layer 16, and third protective layer 17) The third protective layer 17 is provided on the first surface 10t of the glass substrate 10, and covers the first surface 10t of the glass substrate 10 and the capacitor 30. By covering the capacitor 30, the third protective layer 17 protects the capacitor 30 from external forces and prevents damage to the capacitor 30.

[0034] The first protective layer 15 is provided on the third protective layer 17 and covers the third protective layer 17 and the first coil conductor 21t. By covering the first coil conductor 21t, the first protective layer 15 protects the first coil conductor 21t from external forces and prevents damage to the first coil conductor 21t.

[0035] The second protective layer 16 is provided on the second surface 10b of the glass substrate 10, and covers the second surface 10b of the glass substrate 10 and the second coil conductor 21b. By covering the second coil conductor 21b, the second protective layer 16 protects the second coil conductor 21b from external forces and prevents damage to the second coil conductor 21b.

[0036] The first protective layer 15, the second protective layer 16, and the third protective layer 17 have insulating properties and are made of a resin such as epoxy or polyimide.

[0037] (First external terminal 41 and second external terminal 42) The first external terminal 41 is provided on the second protective layer 16 on the first end face 10e1 side with respect to the center of the glass substrate 10 in the X direction. The second external terminal 42 is provided on the second protective layer 16 on the second end face 10e2 side with respect to the center of the glass substrate 10 in the X direction.

[0038] The first external terminal 41 is connected to a second end of the coil 20. Specifically, the first external terminal 41 is electrically connected to the first through conductor 23. That is, the first external terminal 41 is connected to the first through conductor 23 via a first via conductor 23v embedded in the second protective layer 16. The second external terminal 42 is electrically connected to the first electrode 31 of the capacitor 30. Specifically, the second external terminal 42 is connected to the first electrode 31 via a fourth via conductor 34v embedded in the second protective layer 16 and the lead conductor 34.

[0039] The first external terminal 41 has an underlayer and a plating layer covering the underlayer. The underlayer contains a conductive material such as Ag or Cu. The plating layer contains a conductive material such as Ni, Sn, Pd, or Au. Similarly, the second external terminal 42 has an underlayer and a plating layer covering the underlayer. Note that the first external terminal 41 and the second external terminal 42 may be made of a single layer of conductive material.

[0040] (Method of manufacturing electronic component 1) Next, a method for manufacturing the electronic component 1 will be described with reference to FIGS.

[0041] A glass substrate 10 is prepared. The glass substrate 10 is made of, for example, photosensitive glass, which allows easy processing of through-holes, etc. Furthermore, it is desirable that the surface of the glass substrate 10 has a very high degree of flatness.

[0042] A through hole is provided in the glass substrate 10, penetrating from the first surface 10t to the second surface 10b. A first through conductor 23, a second through conductor 24, and an extraction conductor 34 are each disposed in the through hole. Specifically, the first through conductor 23 is disposed on the first side surface 10s1 side with respect to the axis AX within the through hole of the glass substrate 10, the second through conductor 24 is disposed on the second side surface 10s2 side with respect to the axis AX within the through hole of the glass substrate 10, and the extraction conductor 34 is disposed in the through hole of the glass substrate 10 closest to the second end surface 10e2.

[0043] A first electrode 31 of the capacitor 30 is provided on the first surface 10t of the glass substrate 10 so as to be connected to the lead conductor 34. Furthermore, a dielectric film 33 is provided on the first electrode 31, and a second electrode 32 of the capacitor 30 is provided on the dielectric film 33. Furthermore, on the first surface 10t of the glass substrate 10, a first pad portion 23v1 connected to the first through conductor 23 and a second pad portion (not shown) connected to the second through conductor 24 are provided.

[0044] The third protective layer 17 is provided so as to cover the capacitor 30, the first pad portion 23v1, and the second pad portion. A through hole for forming a via wiring is provided in the third protective layer 17, and the via wiring is formed. Specifically, a through hole is provided between the first surface, which is the surface of the third protective layer 17 opposite the glass substrate 10, and the first pad portion 23v1, and a first via wiring 23v2 is formed. The first pad portion 23v1 and the first via wiring 23v2 are connected to form the first via conductor 23v. Although not shown, a through hole is provided between the first surface of the third protective layer 17 and the second pad portion, and a second via wiring 24v2 is formed. The second pad portion and the second via wiring 24v2 are connected to form the second via conductor 24v. Furthermore, a through hole is provided between the first surface of the third protective layer 17 and the second electrode 32 of the capacitor 30, and a third via conductor 243v is formed.

[0045] A first coil conductor 21t is formed on the third protective layer 17. The first coil conductor 21t connects the first via conductor 23v and the second via conductor 24v. The first coil conductor 21t also connects the third via conductor 243v that is closest to the second end face 10e2 of the glass substrate 10 and the first via conductor 23v that is closest to the third via conductor 243v.

[0046] The first protective layer 15 is provided on the third protective layer 17 so as to cover the first coil conductor 21t.

[0047] On the other hand, the second coil conductor 21b is provided on the second surface 10b of the glass substrate 10. The second coil conductor 21b connects the first through conductor 23 and the second through conductor 24 together. Furthermore, the fourth pad portion 34v1 is provided on the second surface 10b of the glass substrate 10 so as to be connected to the lead conductor .

[0048] The second protective layer 16 is provided on the second surface 10b of the glass substrate 10 so as to cover the second coil conductor 21b and the fourth pad portion 34v1. A through hole for providing a via wiring is provided in the second protective layer 16, and a fourth via wiring 34v2 is formed in the through hole. The fourth pad portion 34v1 and the fourth via wiring 34v2 are connected to each other to form the fourth via conductor 34v.

[0049] Furthermore, a first external terminal 41 and a second external terminal 42 are provided on a surface of the second protective layer 16 opposite the second surface 10b of the glass substrate 10. The first external terminal 41 and the second external terminal 42 are spaced apart. The first external terminal 41 is electrically connected to an end of the coil 20 on the second surface 10b of the glass substrate 10, and the second external terminal 42 is connected to the fourth via conductor 34v.

[0050] In this manner, the electronic component 1 is formed.

[0051] In the first embodiment, the lead conductor 34 and the third via conductor 243v are spaced apart from each other in a plan view, but they may overlap each other in a plan view. The above embodiment allows the electronic component 1 to be miniaturized.

[0052] Second Embodiment Fig. 4 is a schematic top view of electronic component 1A as viewed from the top side. Fig. 5 is a cross-sectional view taken along line VV of Fig. 4. Fig. 6 is a cross-sectional view taken along line VI-VI of Fig. 4. The second embodiment differs from the first embodiment in the positions of capacitor 30 and third protective layer 17. This difference in configuration will be described below. The other configurations are the same as those of the first embodiment, and description thereof will be omitted.

[0053] Capacitor 30 is provided on second surface 10b of glass substrate 10 and electrically connected to second external terminal 42. By providing capacitor 30 on the second external terminal 42 side of glass substrate 10, when capacitor 30 is connected to the ground of the mounting board, the L component between the capacitor and ground can be reduced, and as a result, degradation of high-frequency characteristics can be suppressed. Furthermore, when the second external terminal 42 side is used as the mounting surface, providing capacitor 30 on the second external terminal 42 side of glass substrate 10 can lower the center of gravity of electronic component 1A. Unlike the first embodiment in which the capacitor 30 is provided on the first surface 10t of the glass substrate 10, the capacitor 30 is provided on the second surface 10b of the glass substrate 10. A first electrode 31 of the capacitor 30 is provided on the second surface 10b of the glass substrate 10. A dielectric film 33 is provided on the first electrode 31 of the capacitor 30, and a second electrode 32 of the capacitor 30 is provided on the dielectric film 33. That is, the capacitor 30 has a first electrode 31 and a second electrode 32 that face each other and are provided on the second surface 10b of the glass substrate 10, and a dielectric film 33 disposed between the first electrode 31 and the second electrode 32.

[0054] The third protective layer 17 covers the capacitor 30 and is provided on the second surface 10b of the coil 20. The first protective layer 15 is provided on the first surface 10t of the glass substrate 10. The second protective layer 16 is provided on the third protective layer 17.

[0055] As in the first embodiment, the coil 20 has a spiral configuration in which the first through conductor 23, the first coil conductor 21t, the second through conductor 24, and the second coil conductor 21b are electrically connected in this order. The first through conductor 23 and the second through conductor 24 are provided on the first surface 10t and connected to the first coil conductor 21t.

[0056] In the coil 20, the first coil conductor 21t is present on the first surface 10t of the glass substrate 10, and the second coil conductor 21b is present on the surface of the third protective layer 17 opposite to the glass substrate 10. In the coil 20, a first via conductor 23v connected to the first through conductor 23 and a second via conductor 24v connected to the second through conductor 24 are formed on the second surface 10b of the glass substrate 10. The first via conductor 23v includes a first pad portion 23v1 provided on the first through conductor 23 and a first via wiring 23v2 provided on the first pad portion 23v1, and the second via conductor 24v includes a second pad portion provided on the second via conductor 24v and a second via wiring 24v2 provided on the second pad portion.

[0057] The first coil conductor 21t is covered with the first protective layer 15. The second coil conductor 21b is covered with the second protective layer 16. The first via conductor 23v and the second via conductor 24v pass through the third protective layer 17.

[0058] The second through conductor 24 provided in the through hole closest to the second end face 10 e 2 of the glass substrate 10 is connected to the first electrode 31 of the capacitor 30 . The second electrode 32 of the capacitor 30 is connected to the second external terminal 42 via a fifth via wiring 35v1 that penetrates the third protective layer 17, and a fifth pad portion 35v2 and a fifth via wiring 35v3 that penetrate the second protective layer 16. The fifth pad portion 35v2 and the fifth via wiring 35v3, and the fifth via wiring 35v3 that is connected to the fifth pad portion 35v2 and connected onto the second electrode 32, form a fifth via conductor 35v. The capacitor 30 is provided between the second surface 10b of the glass substrate 10 and the second protective layer, and between the first through conductor 23 and the second through conductor 24.

[0059] <Third embodiment> FIG. 7 is a schematic top view of electronic component 1B as viewed from the top side. FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. 7. FIG. 9 is a cross-sectional view taken along line IX-IX in FIG. 7. The third embodiment differs from the second embodiment in the positions of dielectric film 33 of capacitor 30 and fifth via conductor 35v. This difference in configuration will be described below. The other configurations are the same as those in the second embodiment, and description thereof will be omitted.

[0060] When viewed from a direction perpendicular to the first surface 10t, the second through conductors 24 and the dielectric film 33 are spaced apart. With this configuration, even if stress occurs between the glass substrate 10 and the second through conductors 24, which have a linear expansion coefficient greater than that of the glass substrate 10, due to the difference in the linear expansion coefficient between the glass substrate 10 and the second through conductors 24, damage to the dielectric film 33 can be prevented. This improves the reliability of the electronic component 1B.

[0061] The first electrode 31 of the capacitor 30 is provided on the second surface 10b of the glass substrate 10. Unlike the second embodiment, the first electrode 31 of the capacitor 30 has a surface that does not contact the dielectric film 33 and the second electrode 32. The first electrode 31 has a surface on the side opposite the second surface 10b of the glass substrate 10 that does not overlap with the dielectric film 33 and the second electrode 32. Specifically, as shown in FIG. 9 , the first electrode 31 does not have the dielectric film 33 or the second electrode 32 on an extension of the second through conductor 24. Furthermore, in a plan view, the second through conductor 24 and the second electrode 32 are spaced apart. This configuration allows the dielectric film 33 and the second electrode 32 to be made smaller, and the amount of material used can be reduced. Furthermore, the fifth via conductor 35v and the second through conductor 24 are spaced apart.

[0062] <Fourth embodiment> Fig. 10 is a schematic top view of electronic component 1C as viewed from the top side. Fig. 11 is a cross-sectional view taken along line XI-XI in Fig. 10. Fig. 12 is a cross-sectional view taken along line XII-XII in Fig. 10. The fourth embodiment differs from the third embodiment in the position of capacitor 30. This difference in configuration will be described below. The other configurations are the same as those in the third embodiment, and description thereof will be omitted.

[0063] The coil 20 has a first end 210 and a second end 220. The first end 210 is connected to the first electrode 31 of the capacitor 30. The second end 220 is connected to a via conductor (not shown) that penetrates the second protective layer 16 and the third protective layer 17. The first end 210 is the end of the second through conductor 24 that is connected to the first electrode 31. The second end 220 is the end of the first through conductor 23 that is connected to a via conductor (not shown). The capacitor 30 is located closer to the first end 210 than to the second end 220. That is, the coil 20 is located on the second end surface 10e2 side in a plan view. With the above configuration, it is possible to effectively reduce the parasitic capacitance between the wiring of the coil 20 (the second coil conductor 21b in this embodiment) and the capacitor 30, and to suppress deterioration of the Q value of the coil 20 due to the parasitic capacitance. 10 (plan view), the phrase "located closer to the first end 210 than to the second end 220" means that the capacitor 30 is located closer to the second end face 10e2 than a plane that passes through the center of the coil 20 on the axis AX of the coil 20 and is perpendicular to the axis AX of the coil 20. Note that, with the plane that passes through the center of the coil 20 on the axis AX of the coil 20 and is perpendicular to the axis AX of the coil 20 as a reference, the capacitor 30 may be located closer to the second end face 10e2 than the first end face 10e1.

[0064] Fifth Embodiment Fig. 13 is a schematic top view of electronic component 1D as viewed from the top surface side. Fig. 14 is a cross-sectional view taken along line XIV-XIV of Fig. 13. Fig. 15 is a cross-sectional view taken along line XV-XV of Fig. 13. The fifth embodiment differs from the third embodiment in the number of turns of coil 20D and the shape of capacitor 30, and does not have third protective layer 17. This different configuration will be described below. The other configurations are the same as those of the third embodiment, and description thereof will be omitted.

[0065] The number of turns of the coil 20D is less than one. The coil 20D is composed of a first through conductor 23 that penetrates the glass substrate 10 from the second surface 10b to the first surface 10t, a first coil conductor 21t that is connected to the first through conductor 23 and provided on the glass substrate 10, and a second through conductor 24 that is connected to the first coil conductor 21t and penetrates the glass substrate 10 from the first surface 10t to the second surface 10b. The capacitor 30 is provided on the second surface 10b of the glass substrate 10 and connected to the second through conductor 24. With the above configuration, the wiring of the coil 20D (which is the first external terminal 41 in this embodiment) is reduced, enabling a reduction in manufacturing costs.

[0066] The coil 20D does not have the second coil conductor 21b of the third embodiment. The first through conductor 23 of the coil 20D is connected to the first via conductor 23v. The first via conductor 23v has a first pad portion 23v1 connected to the first through conductor 23 and a first via wiring 23v2 connected to the first pad portion 23v1.

[0067] The capacitor 30 is not located inside the coil 20D. Specifically, the capacitor 30 is not located between the first coil conductor 21t and the second coil conductor 21b, and is not located between the first through conductor 23 and the second through conductor 24. In plan view, the first electrode 31 of the capacitor 30 has a notch at a corner on the side where the second end face 10e2 and the second side face 10s2 intersect. The first electrode 31 has a portion that overlaps the second penetrating conductor 24. The second electrode 32 and the dielectric film 33 are located between the first penetrating conductor 23 and the second penetrating conductor 24 and do not overlap the second penetrating conductor 24. This configuration allows for a reduction in the amount of material used. Note that the first electrode 31 of the capacitor 30 may be rectangular in plan view, having a length equal to the length in the X direction of a region that passes between the first penetrating conductor 23 and the second penetrating conductor 24. The capacitor 30 is connected to the second through conductor 24 at the first electrode 31, and to the sixth via conductor 36v at the second electrode 32. In a plan view, the second through conductor 24 and the sixth via conductor 36v are spaced apart from each other.

[0068] The second protective layer 16 is provided on the second surface 10b of the glass substrate 10 and covers the capacitor 30. The first via conductor 23v and the sixth via conductor 36v pass through the second protective layer 16.

[0069] Sixth Embodiment Fig. 16 is a schematic top view of electronic component 1E as viewed from the top surface side. Fig. 17 is a cross-sectional view taken along line XVII-XVII in Fig. 16. Fig. 18 is a cross-sectional view taken along line XVIII-XVIII in Fig. 16. The sixth embodiment differs from the fifth embodiment in the form of capacitor 30. This different configuration will be described below. The other configurations are the same as those in the fifth embodiment, and description thereof will be omitted.

[0070] In this embodiment, the capacitor 30 is disposed closer to the second external terminal 42 than the first external terminal 41. Specifically, the capacitor 30 is located closer to the second external terminal 42 than the center line between the first external terminal 41 and the second external terminal 42 in a plan view. Note that the capacitor 30 may be located closer to the first external conductor than a plane passing through the center line between the first external terminal 41 and the second external terminal 42. Specifically, the configuration of the fifth embodiment further includes a second protective layer 16 provided on the second surface 10b of the glass substrate 10 to cover the capacitor 30, and a first external terminal 41 and a second external terminal 42 provided on the second protective layer 16. The first external terminal 41 and the coil 20D are connected through a first via conductor 23v that penetrates the third protective layer 17. The second external terminal 42 and the capacitor 30 are connected through a sixth via conductor 36v that penetrates the third protective layer 17. The capacitor 30 is disposed closer to the second external terminal 42 than the first external terminal 41. With the above configuration, it is possible to reduce the parasitic capacitance between the first external terminal 41 and the capacitor 30, and to suppress deterioration of the Q value of the coil 20D due to the parasitic capacitance. The sixth via conductor 36v of this embodiment is an example of the second via conductor described in the claims.

[0071] Seventh Embodiment Fig. 19 is a schematic top view of the electronic component 1F as viewed from the top surface side. Fig. 20 is a cross-sectional view taken along line XX-XX in Fig. 19. Fig. 21 is a cross-sectional view taken along line XXI-XXI in Fig. 19. Fig. 22 is a cross-sectional view taken along line XXII-XXII in Fig. 19. The seventh embodiment differs from the sixth embodiment in the position of the first via conductor 23v. This different configuration will be described below. The other configurations are the same as those in the sixth embodiment, and description thereof will be omitted.

[0072] The first via conductor 23v includes a first pad portion 23v1 connected to the first through conductor 23, and a first via wiring 23v2 connected to the first pad portion 23v1 and the first external terminal 41. When viewed from a direction perpendicular to the first surface 10t, the first through conductor 23 and the first via wiring 23v2 are spaced apart. This configuration prevents the first via wiring 23v2 from being damaged even if stress occurs due to a difference in the linear expansion coefficient between the glass substrate 10 and the first through conductor 23. This improves the reliability of the electronic component 1F. The first via conductor 23v in this embodiment is an example of a first via conductor as defined in the claims. The first pad portion 23v1 is an example of a pad portion as defined in the claims. The first via wiring 23v2 is an example of a via portion as defined in the claims.

[0073] Eighth Embodiment FIG. 23 is a schematic top view of the electronic component 1G as viewed from the top surface side. FIG. 24 is a cross-sectional view taken along line XXIV-XXIV of FIG. 23. FIG. 25 is a cross-sectional view taken along line XXV-XXV of FIG. 23. The eighth embodiment differs from the seventh embodiment in the sizes of the first protective layer 15 and the second protective layer 16. This difference in configuration will be described below. In FIG. 23, the first protective layer 15 is depicted with a dashed line. The other configurations are the same as those of the seventh embodiment, and description thereof will be omitted.

[0074] When viewed from a direction perpendicular to the first surface 10t of the glass substrate 10, the first protective layer 15 is located inside the outer periphery of the first surface 10t of the glass substrate 10. When viewed from a direction perpendicular to the second surface 10b, the second protective layer 16 is located inside the outer periphery of the second surface 10b of the glass substrate 10. Specifically, as shown in FIG. 23 , the area of ​​the first protective layer 15 is smaller than the area of ​​the glass substrate 10 in a direction perpendicular to the axis AX. Although not shown in FIG. 23 , the area of ​​the second protective layer 16 is also smaller than the area of ​​the glass substrate 10. This configuration facilitates processing of the glass substrate 10. For example, when cutting the glass substrate 10, the portion of the glass substrate 10 to be cut can be crystallized and then cut by etching. Furthermore, when cutting the glass substrate 10 with a dicer, for example, the first protective layer 15 and the second protective layer 16 can be prevented from peeling off from the glass substrate 10 due to the load of the dicer.

[0075] When viewed from a direction perpendicular to the first surface 10t, the periphery of the first protective layer 15 preferably has a shape that follows the periphery of the glass substrate 10. The periphery of the second protective layer 16 preferably has a shape that follows the periphery of the glass substrate 10.

[0076] Ninth Embodiment FIG. 26 is a schematic top view of electronic component 1H as viewed from the top surface side. FIG. 27 is a cross-sectional view taken along line XXVII-XXVII of FIG. 26. FIG. 28 is a cross-sectional view taken along line XXVIII-XXVIII of FIG. 26. Unlike the fifth embodiment, the ninth embodiment has coils 20D and 201D connected in parallel to capacitors 30 and 301. Furthermore, the ninth embodiment differs from the fifth embodiment in the position of sixth via conductors 36v, the number of coils, the number of capacitors, and the number of external terminals. These different configurations are described below. The other configurations are the same as those of the fifth embodiment, and their description will be omitted.

[0077] In this embodiment, as shown in FIG. 26, the electronic component 1H has two coils 20D, 201D, two capacitors 30, 301, and four external terminals 41, 411, 42, 421. That is, the electronic component 1H has a plurality of coils and capacitors. With the above configuration, the number of elements can be increased, and the mounting area can be reduced more effectively. This significantly reduces the size of the electronic component 1H. Note that at least one of the coils and capacitors may be present in multiple numbers.

[0078] A first electrode 31 of the capacitor 30 is connected to the first through conductor 23 of the coil 20D. A second electrode 32 of the capacitor 30 is connected to the second through conductor 24 of the coil 20D. The first electrode 31 of the capacitor 30 is connected to the first external terminal 41 through the first via conductor 23v. The second electrode 32 of the capacitor 30 is connected to the second external terminal 42 through the sixth via conductor 36v. The sixth via conductor 36v is located at a position overlapping the second through conductor 24 when viewed from a direction perpendicular to the first surface 10t.

[0079] The capacitor 301 has a similar configuration to the capacitor 30. Specifically, the first electrode 31 of the capacitor 301 is connected to the first through conductor 23 of the coil 201D. The second electrode 32 of the capacitor 301 is connected to the second through conductor 24 of the coil 201D. The first electrode 31 of the capacitor 301 is connected to the first external terminal 41 through the first via conductor 23v. The second electrode 32 of the capacitor 301 is connected to the second external terminal 421 through the sixth via conductor 36v. The sixth via conductor 36v is located so as to overlap the second through conductor 24 when viewed from a direction perpendicular to the first surface 10t. The dielectric film 33 of the capacitor 30 and the dielectric film 33 of the capacitor 301 are a common member. That is, the dielectric film 33 is located so as to extend inside both the coils 20D and 201D. The dielectric film 33 of the capacitor 30 and the dielectric film 33 of the capacitor 301 may be provided separately.

[0080] Note that coil 20D and coil 201D each have less than one turn, but may have multiple turns.

[0081] Tenth Embodiment FIG. 29 is a schematic top view of electronic component 1J as viewed from the top surface side. FIG. 30 is a cross-sectional view taken along line XXX-XXX of FIG. 29. FIG. 31 is a cross-sectional view taken along line XXXI-XXXI of FIG. 29. FIG. 32 is an exploded plan view of FIG. 29. The tenth embodiment differs from the first embodiment in the structure and position of capacitor 30J and the presence of fourth protective layer 18. These different configurations are described below. The other configurations are the same as those of the first embodiment, and description thereof will be omitted.

[0082] A portion of the capacitor 30J is embedded in the glass substrate 10. The first electrode 31 and the second electrode 32 are embedded in the glass substrate 10. The glass substrate 10 is present between the first electrode 31 and the second electrode 32. The above configuration enables further miniaturization of the electronic component 1J. Furthermore, the dielectric film 33 of the capacitor 30J is made of glass, which provides higher reliability for the electronic component. Furthermore, since there is no need to provide the dielectric film 33 that is typically used in the capacitor 30J, the electronic component 1J can be manufactured more inexpensively.

[0083] The capacitor 30J includes a first electrode portion 310 and a second electrode portion 320. The first electrode portion 310 and the second electrode portion 320 each have a comb-tooth structure. The first electrode portion 310 includes a first support portion 31s and a plurality of first electrodes 31 provided on the first support portion 31s. The first support portion 31s is located on the second surface 10b of the glass substrate 10 and has a base 313 extending from the first side surface 10s1 to the second side surface 10s2 along the first end surface 10e1, and two teeth 311, 312 extending from the base 313 in the direction from the first end surface 10e1 to the second end surface 10e2. The first tooth 311 is provided at a first end 313a of the base 313, and the second tooth 312 is provided in the center of the base 313. One electrode is provided for each tooth. One first electrode 31 is formed on the first tooth portion 311, and another first electrode 31 is provided on the second tooth portion 312. The first tooth portion 311 and the second tooth portion 312 penetrate the glass substrate 10 in the direction from the first surface 10t to the second surface 10b. The second electrode section 320 includes a second support section 32s and a plurality of second electrodes 32 provided on the second support section 32s. The second support portion 32s is located on the second surface 10b of the glass substrate 10 and has a base 323 extending from the second side surface 10s2 to the first side surface 10s1 along the second end surface 10e2, and two teeth 321, 322 extending from the base 323 in the direction from the second end surface 10e2 to the first end surface 10e1. The first tooth 321 is provided at a first end 323a of the base 323, and the second tooth 322 is provided in the center of the base 323. One electrode is provided for each tooth. One second electrode 32 is formed on the first tooth portion 321, and another second electrode 32 is provided on the second tooth portion 322. The first tooth portion 321 and the second tooth portion 322 penetrate the glass substrate 10 in the direction from the first surface 10t to the second surface 10b. Along the direction from the first side surface 10s1 to the second side surface 10s2 of the glass substrate 10, the second tooth portion 312 of the first support portion 31s, the first tooth portion 321 of the second support portion 32s, the first tooth portion 311 of the first support portion 31s, and the second tooth portion 322 of the second support portion 32s are arranged in this order. The number of tooth portions is not particularly limited, and one or three or more tooth portions may be provided on the first support portion 31s. In other words, the first electrode 31 may be one or three or more. The second support portion 32s may be provided in the same manner as the first support portion 31s. The second electrode 32 may be provided in the same manner as the first electrode 31. The main surface of the first electrode 31 is perpendicular to the first surface 10t of the glass substrate 10 and parallel to the axis AX of the coil 20. The main surface of the second electrode 32 is similar to the main surface of the first electrode 31. The glass substrate 10 exists between the second tooth portion 312, the first tooth portion 321, the first tooth portion 311, and the second tooth portion 322, and acts as a dielectric.

[0084] The fourth protective layer 18 covers the bases 313 and 323, and is provided on the second surface 10b of the glass substrate 10. The second protective layer 16 covers the fourth protective layer 18, and is provided on the side of the fourth protective layer 18 opposite to the glass substrate 10.

[0085] The first through conductor 23 is connected to the second coil conductor 21b through an eighth via conductor (not shown) that penetrates the fourth protective layer 18. The eighth via conductor has an eighth pad portion connected to the first through conductor 23 and an eighth coil wiring connected to the eighth pad portion. The second through conductor 24 is connected to the second coil conductor 21b through a tenth via conductor 241v that penetrates the fourth protective layer 18. The tenth via conductor 241v has a tenth pad portion 241v1 connected to the second through conductor 24 and a tenth via wiring 241v2 connected to the tenth pad portion 241v1. The second coil conductor 21b is provided on the fourth protective layer 18 when viewed in a direction perpendicular to the second surface 10b. The first through conductor 23 closest to the first end face 10e1 is connected to the first external terminal 41 via the second end 313b of the base 313, an eighth via conductor, and a ninth via conductor (not shown) provided on the eighth via conductor. The eighth via conductor has an eighth pad provided on the first through conductor 23 and an eighth via wiring provided on the eighth pad. The ninth via conductor has a ninth pad provided on the eighth via wiring and a ninth via wiring provided on the ninth pad and connected to the first external terminal 41. The second through conductor 24 closest to the second end face 10e2 is connected to the second external terminal 42 via the second end 323b of the base 323, the tenth via conductor 241v, and an eleventh via conductor 242v provided on the tenth via conductor 241v. Unlike the first embodiment, in this embodiment, the second through conductor 24 overlaps with the tenth via conductor 241v and the eleventh via conductor 242v in a direction perpendicular to the first surface 10t, i.e., in a plan view. The tenth via conductor 241v has a tenth pad portion 241v1 provided on the second through conductor 24 and a tenth via wiring 241v2 provided on the tenth pad portion 241v1. The eleventh via conductor 242v has an eleventh pad portion 242v1 provided on the tenth via wiring 241v2, and an eleventh via wiring 242v2 provided on the eleventh pad portion 242v1 and connected to the second external terminal .

[0086] Eleventh Embodiment Fig. 33 is a cross-sectional view of electronic component 1K. Fig. 33 corresponds to Fig. 31 of the tenth embodiment. The eleventh embodiment differs from the tenth embodiment in the structure of the dielectric of capacitor 30J. This different configuration will be described below. The other configurations are the same as those of the tenth embodiment, and description thereof will be omitted.

[0087] A crystallized portion 101 exists at least partially between the first electrode 31 and the second electrode 32. With the above configuration, the crystallized portion 101, which is crystallized glass having a higher Q value than ordinary glass, exists between the first electrode 31 and the second electrode 32 of the capacitor 30J. The crystallized portion 101 reduces the dielectric loss of the electronic component 1K, thereby improving the reliability of the electronic component 1K. Furthermore, since there is no need to provide the commonly used dielectric film 33, the electronic component IJ can be manufactured more inexpensively. In this embodiment, the crystallized portion 101 exists in the entire region between the first electrode 31 and the second electrode 32. Note that the crystallized portion 101 may exist only partially between the first electrode 31 and the second electrode 32. The crystallized portion 101 is a crystallized portion of the glass substrate 10. The transparency of the crystallized portion 101 is lower than that of the remaining non-crystallized, amorphous portions of the glass substrate 10. By providing the crystallized portion 101, it is possible to adjust the effective dielectric constant of the glass substrate 10. In other words, the stray capacitance formed between the first electrode 31 and the second electrode 32 can be increased or decreased, and in particular, the self-resonant frequency of the electronic component 1K can be adjusted. For example, if the glass substrate 10 is made of Foturan II, the dielectric constant of the glass substrate 10 is 6.4, while the dielectric constant of the crystallized portion 101 can be reduced to 5.8. This reduces the stray capacitance between conductors near the crystallized portion 101.

[0088] The crystallized portion 101 can be formed by irradiating the portion of the glass substrate 10 to be crystallized with ultraviolet light, followed by heat treatment (e.g., baking). The ultraviolet light irradiation can be performed by irradiating the glass substrate 10 with ultraviolet light having a wavelength of approximately 310 nm. The ultraviolet light irradiation oxidizes metal ions, such as cerium ions, in the glass substrate 10 due to light energy, and releases electrons. Note that when the crystallized portion 101 exists in a portion between the first electrode 31 and the second electrode 32, the processing depth of the crystallized portion 101 can be controlled by adjusting the amount of ultraviolet light irradiation according to the thickness of the glass substrate 10. The exposure device used for the ultraviolet irradiation can be a contact aligner or a stepper capable of obtaining ultraviolet light with a wavelength of approximately 310 nm. Alternatively, a laser irradiation device, including a femtosecond laser, can be used as the light source. When a femtosecond laser is used, the laser light can be focused inside the glass substrate 10, thereby causing electrons to be emitted from the metal oxide only in the focused area. In other words, it is possible to expose only the interior of the glass substrate 10, without exposing the surface of the glass substrate 10 to the laser light. The glass substrate 10 may be crystallized after the first electrode 31 and the second electrode 32 are provided thereon, or the first electrode 31 and the second electrode 32 may be provided after the crystallized portion 101 is formed.

[0089] <Twelfth embodiment> Fig. 34 is a cross-sectional view of electronic component 1L. Fig. 34 corresponds to Fig. 31 of the tenth embodiment. The twelfth embodiment differs from the tenth embodiment in the structure of the dielectric of capacitor 30J. This different configuration will be described below. The other configurations are the same as those of the tenth embodiment, and description thereof will be omitted.

[0090] A cavity 102 exists at least partially between the first electrode 31 and the second electrode 32. With the above configuration, a cavity 102 having a higher Q value than the glass substrate 10 exists between the first electrode 31 and the second electrode 32 of the capacitor 30J. As a result, the dielectric loss of the electronic component 1L is reduced, resulting in higher reliability for the electronic component 1L. Furthermore, since there is no need to provide the commonly used dielectric film 33, the electronic component 1L can be manufactured more inexpensively. Note that the entire space between the first electrode 31 and the second electrode 32 may be a cavity. Neither solid nor liquid exists in the cavity, but gas such as air is present.

[0091] The present disclosure is not limited to the above-described embodiments, and design modifications are possible without departing from the spirit of the present disclosure. For example, the features of the first to twelfth embodiments may be combined in various ways.

[0092] The present disclosure includes the following aspects. <1> a glass substrate having a first surface and a second surface opposite to each other; a coil partially embedded in the glass substrate and wound around an axis; a capacitor provided on the glass substrate, electrically connected to the coil, and having a first electrode and a second electrode facing each other; Equipped with The first electrode and the second electrode overlap the coil in a direction perpendicular to the axis. Electronic components. <2> The capacitor is disposed inside the coil. <1> The electronic component according to claim 1. <3> a main surface of the first electrode and a main surface of the second electrode are parallel to the axis of the coil; <1> or <2> The electronic component according to claim 1. <4> Further, an external terminal is provided on the second surface side of the glass substrate, the capacitor is provided on the second surface of the glass substrate and is electrically connected to the external terminal; <1> ~ <3> 10. An electronic component according to any one of the preceding items. <5> the capacitor has a dielectric film disposed between the first electrode and the second electrode; the coil has a through conductor that penetrates the glass substrate from the first surface to the second surface, the through conductor is connected to the first electrode of the capacitor; When viewed from a direction perpendicular to the first surface, the through conductor and the dielectric film are spaced apart. <1> ~ <4> 10. An electronic component according to any one of the preceding items. <6> the coil has a first end and a second end; the capacitor is connected to the first end and is located closer to the first end than to the second end; <1> ~ <5> 10. An electronic component according to any one of the preceding items. <7> the number of turns of the coil is less than one, and the coil is composed of a first penetrating conductor that penetrates the glass substrate from the second surface toward the first surface, a first coil conductor that is connected to the first penetrating conductor and provided on the glass substrate, and a second penetrating conductor that is connected to the first coil conductor and penetrates the glass substrate from the first surface toward the second surface; the capacitor is provided on the second surface of the glass substrate and connected to the first through conductor; <1> ~ <6> 10. An electronic component according to any one of the preceding items. <8> a protective layer provided on the second surface and covering the capacitor; and a first external terminal and a second external terminal provided on the protective layer, the first external terminal and the coil are connected via a first via conductor that penetrates the protective layer; the second external terminal and the capacitor are connected via a second via conductor that penetrates the protective layer; the capacitor is disposed closer to the second external terminal than the first external terminal; <7> The electronic component according to claim 1. <9> the first via conductor includes a pad portion connected to the first through conductor and a via portion connected to the pad portion and a first external terminal; When viewed from a direction perpendicular to the first surface, the first through conductor and the via portion are spaced apart from each other. <8> The electronic component according to claim 1. <10> Further, a first protective layer covering a first surface of the glass substrate and a second protective layer covering a second surface of the glass substrate are provided, When viewed from a direction perpendicular to the first surface, the first protective layer is located inside the outer periphery of the first surface of the glass substrate, When viewed from a direction perpendicular to the second surface, the second protective layer is located inside the outer periphery of the second surface of the glass substrate. <1> ~ <9> 10. An electronic component according to any one of the preceding items. <11> There are a plurality of at least one of the coil and the capacitor. <1> ~ <10> 10. An electronic component according to any one of the preceding items. <12> the first electrode and the second electrode are embedded in the glass substrate; A glass substrate is present between the first electrode and the second electrode. <1> ~ <11> 10. An electronic component according to any one of the preceding items. <13> the first electrode and the second electrode are embedded in the glass substrate; a crystallized portion is present at least partially between the first electrode and the second electrode; <1> ~ <12> 10. An electronic component according to any one of the preceding items. <14> the first electrode and the second electrode are embedded in the glass substrate; A cavity is present at least partially between the first electrode and the second electrode. <1> ~ <13> 10. An electronic component according to any one of the preceding items.

[0093] This application claims priority based on Japanese Patent Application No. 2022-190514, filed on November 29, 2022, the entire contents of which are incorporated herein by reference. [Explanation of symbols]

[0094] 1,1A,1B,1C,1D,1E,1F,1G,1H,1J,1K,1H Electronic Components 10 Glass substrate 100 Outer surface of glass substrate 101 Crystallization Section 102 Cavity 10t 1st page 10b 2nd side 10s1 1st side 10s2 2nd side 10e1 1st end face 10e2 2nd end face 15~18 1st~4th protective layer 20, 20D, 201D coil 21t First coil conductor 21b Second coil conductor 23 First through conductor 24 Second through conductor 210 First end 220 Second end 30,301,30J capacitor 31 1st electrode 32 2nd electrode 33 Dielectric film 34 Lead conductor 310 1st electrode part 31s 1st support part 311 1st tooth part 312 2nd tooth part 313 Base 320 2nd electrode part 32s 2nd support part 321 1st tooth part 322 2nd tooth part 323 Base 41,411 First external terminal 42,421 Second external terminal 23v, 24v, 241v, 34v, 35v, 36v, 241v, 242v Via conductors 1-6, 10-11 23v1, 24v1, 34v1, 35v2, 241v1, 242v1 Pads 1-2, 4-5, 10-11 23v2, 24v2, 34v2, 35v1, 35v3, 241v2, 242v2 1st to 2nd, 4th to 6th, 10th to 11th via wiring

Claims

1. a glass substrate having a first surface and a second surface opposite to each other; a coil partially embedded in the glass substrate and wound around an axis; a capacitor provided on the glass substrate, electrically connected to the coil, and having a first electrode and a second electrode facing each other; Equipped with the first electrode and the second electrode overlap the coil in a direction perpendicular to the axis, The capacitor is disposed inside the coil. Electronic components.

2. a glass substrate having a first surface and a second surface opposite to each other; a coil partially embedded in the glass substrate and wound around an axis; a capacitor provided on the glass substrate, electrically connected to the coil, and having a first electrode and a second electrode facing each other; Equipped with the first electrode and the second electrode overlap the coil in a direction perpendicular to the axis, the capacitor has a dielectric film disposed between the first electrode and the second electrode; the coil has a through conductor that penetrates the glass substrate from the first surface to the second surface, the through conductor is connected to the first electrode of the capacitor; When viewed from a direction perpendicular to the first surface, the through conductor and the dielectric film are spaced apart from each other. Electronic components.

3. a glass substrate having a first surface and a second surface opposite to each other; a coil partially embedded in the glass substrate and wound around an axis; a capacitor provided on the glass substrate, electrically connected to the coil, and having a first electrode and a second electrode facing each other; Equipped with the first electrode and the second electrode overlap the coil in a direction perpendicular to the axis, the first electrode and the second electrode are embedded in the glass substrate; a part of the glass substrate is present between the first electrode and the second electrode; Electronic components.

4. a glass substrate having a first surface and a second surface opposite to each other; a coil partially embedded in the glass substrate and wound around an axis; a capacitor provided on the glass substrate, electrically connected to the coil, and having a first electrode and a second electrode facing each other; Equipped with the first electrode and the second electrode overlap the coil in a direction perpendicular to the axis, the first electrode and the second electrode are embedded in the glass substrate; a crystallized portion is present at least partially between the first electrode and the second electrode; Electronic components.

5. a glass substrate having a first surface and a second surface opposite to each other; a coil partially embedded in the glass substrate and wound around an axis; a capacitor provided on the glass substrate, electrically connected to the coil, and having a first electrode and a second electrode facing each other; Equipped with the first electrode and the second electrode overlap the coil in a direction perpendicular to the axis, the first electrode and the second electrode are embedded in the glass substrate; a cavity is present at least partially between the first electrode and the second electrode; Electronic components.

6. The electronic component according to claim 1 , wherein a main surface of the first electrode and a main surface of the second electrode are parallel to an axis of the coil.

7. Further, an external terminal is provided on the second surface side of the glass substrate, The electronic component according to claim 1 , wherein the capacitor is provided on the second surface of the glass substrate and is electrically connected to the external terminal.

8. the capacitor has a dielectric film disposed between the first electrode and the second electrode; the coil has a through conductor that penetrates the glass substrate from the first surface to the second surface, the through conductor is connected to the first electrode of the capacitor; The electronic component according to claim 1 , wherein the through conductor and the dielectric film are spaced apart when viewed in a direction perpendicular to the first surface.

9. the coil has a first end and a second end; The electronic component according to claim 1 , wherein the capacitor is connected to the first end and is located closer to the first end than to the second end.

10. the number of turns of the coil is less than one, and the coil is composed of a first through conductor penetrating the glass substrate from the second surface toward the first surface, a first coil conductor connected to the first through conductor and provided on the glass substrate, and a second through conductor connected to the first coil conductor and penetrating the glass substrate from the first surface toward the second surface, The electronic component according to claim 1 , wherein the capacitor is provided on the second surface of the glass substrate and connected to the first through conductor.

11. a protective layer provided on the second surface and covering the capacitor; and a first external terminal and a second external terminal provided on the protective layer, the first external terminal and the coil are connected via a first via conductor that penetrates the protective layer; the second external terminal and the capacitor are connected via a second via conductor that penetrates the protective layer; The electronic component according to claim 10 , wherein the capacitor is disposed closer to the second external terminal than the first external terminal.

12. the first via conductor includes a pad portion connected to the first through conductor and a via portion connected to the pad portion and a first external terminal; The electronic component according to claim 11 , wherein the first through conductor and the via portion are spaced apart when viewed in a direction perpendicular to the first surface.

13. Further, a first protective layer covering a first surface of the glass substrate and a second protective layer covering a second surface of the glass substrate are provided, When viewed from a direction perpendicular to the first surface, the first protective layer is located inside an outer periphery of the first surface of the glass substrate, The electronic component according to claim 1 , wherein the second protective layer is located inside an outer periphery of the second surface of the glass substrate when viewed in a direction perpendicular to the second surface.

14. The electronic component according to claim 1 , wherein at least one of the coil and the capacitor is provided in plural.

15. the first electrode and the second electrode are embedded in the glass substrate; The electronic component according to claim 1 , wherein a part of the glass substrate is present between the first electrode and the second electrode.

16. the first electrode and the second electrode are embedded in the glass substrate; The electronic component according to claim 1 , wherein a crystallized portion exists at least partially between the first electrode and the second electrode.

17. the first electrode and the second electrode are embedded in the glass substrate; The electronic component according to claim 1 , wherein a cavity exists at least partially between the first electrode and the second electrode.

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