CVD deposition method of N-type doped silicon carbide and epitaxial reactor

Abstract

The method serves to deposit, by a CVD-type process, a layer of silicon carbide having n-type doping on a surface of a substrate horizontally arranged on a rotating susceptor in a reaction chamber, the rotating susceptor being adapted to support a single substrate, the method comprising introducing and flowing a gas mixture along the reaction chamber from a first side to a second side, passing through a portion of a lower wall of the reaction chamber, and then onto one substrate supporting the rotating susceptor, the gas mixture consisting of one or more gases that are precursors of the silicon carbide to be deposited and a carrier gas containing a substance adapted to produce n-type doping, the dopant substance being adapted to undergo thermal decomposition catalyzed by contact with the inner surface of the reaction chamber consisting of silicon carbide having a stoichiometry NHxCySiz, where x, y, and z are comprised between 0 and 3 and x+y+z>0, and the reaction chamber is at a temperature comprised between 1450°C. At 1800°C and a pressure in the range of 5 kPa to 30 kPa; the substrate is placed in the reaction chamber in a region where the trends of Si, C, and N availability are all reduced and the temperature is within the deposition temperature range.

Description

[Technical Field]

[0001] The present invention relates to a method and epitaxial reactor for depositing a layer of silicon carbide with n-type doping on a silicon carbide substrate by a CVD-type process at high temperature. [Background technology]

[0002] In some known epitaxial reactors for depositing silicon carbide on substrates, n-type doping is often obtained by adding gaseous nitrogen, i.e., N2, to the gas mixture introduced into the reaction chamber, as generally disclosed, for example, in WO2008011022A1.

[0003] The n-type doping uniformity of the layer thus obtained is not particularly high.

[0004] In other known epitaxial reactors for the deposition of silicon carbide on substrates, n-type doping is often obtained by adding gaseous ammonia, i.e., NH3, to the gas mixture introduced into the reaction chamber. This is disclosed, for example, in US2017345658A1 (see, for example, claim 4) in connection with a reaction chamber having a "showerhead" structure, in which the gas inlets are above the substrate and suitably spaced from it, and the various precursor gases are mixed in the reaction chamber at high temperature.

[0005] It should be noted that the structure of the reaction chamber, particularly its configuration, affects the doping uniformity. Summary of the Invention [Problem to be solved by the invention]

[0006] A general object of the present invention is to improve the n-type doping uniformity of silicon carbide layers obtained by a high temperature CVD-type process carried out through an epitaxial reactor comprising a reaction chamber and a rotating susceptor therein, wherein a gas mixture flows internally along the reaction chamber from a first side passing over the rotating susceptor supporting one substrate to a second side. [Means for solving the problem]

[0007] This object is achieved by a method having the technical features described in the appended claims, which are considered an integral part of this description.

[0008] The first key idea underlying the present invention is to use, as a precursor for n-type doping, a dopant substance adapted to be subjected to thermal decomposition catalyzed by contact with the inner surfaces of the reaction chamber to form species with stoichiometry NHxCySiz (where x, y, and z are comprised between 0 and 3 and x+y+z>0), making nitrogen readily available for incorporation into silicon carbide. Alternatively, gaseous nitrogen requires significant energy to make nitrogen available in atomic form, and as will be apparent to those skilled in the art, nitrogen, i.e., N2, is unable to form species with the stoichiometry defined above.

[0009] The second key idea underlying the present invention is to position the substrate in the reaction chamber in a region where the trends in the respective availability of Si, C, and N are all decreasing and the temperature is within a (narrow) range of the deposition temperature.

[0010] According to the present invention, the reactor is of the "single wafer" type, ie, only one substrate is present on a rotating susceptor inside the reaction chamber during the deposition process.

[0011] US2020043725A1 discloses a "multi-wafer" reactor having a reaction chamber with the above structure, in which, according to the embodiment of Figure 3, three substates are stably supported by a rotating susceptor, and according to the embodiment of Figure 13, three substates are rotatably supported by a rotating susceptor.

[0012] The general teaching of US2020043725A1 is to obtain doping from a mixture of ammonia and nitrogen (see Abstract, paragraphs

[0004] and

[0023] , claims 1 and 3), and indeed the flow of ammonia is much smaller than the flow of nitrogen, i.e., a ratio of less than 0.0089.

[0013] According to the experiments described in this patent document, when only ammonia was used as the doping material, the doping uniformity was 26% (see Figure 6), when only nitrogen was used as the doping material, the doping uniformity was 22% (see Figure 5), and when a mixture of ammonia and nitrogen in a ratio of 0.022 / 7.8 = 0.0028 was used, the doping uniformity was 20% (see Figure 7).

[0014] Therefore, undoubtedly, US2020043725A1 also provides general teachings to avoid the use of pure ammonia as a doping substance.

[0015] In any case, this patent document does not provide the scientific reasons behind the three experiments and their different doping uniformities.

[0016] Applicants have discovered a method for using only ammonia (or a similar gas) as the doping gas by utilizing a reaction chamber design that has significant advantages in the resulting doping uniformity.

[0017] Typically, the invention is applied to reaction chambers having "hot walls" (heated by induction) made of silicon carbide, or better graphite coated with silicon carbide, with longitudinal flow of gas inside the chamber.

[0018] Typically, according to the present invention, the cross section of the reaction chamber has a rectangular shape, and the rectangle may have a width that is much larger than its height, particularly 5 to 20 times larger, more particularly about 10 times larger.

[0019] Typically according to the invention, the width of the reaction chamber (corresponding approximately to the width of the above-mentioned rectangle) is larger than the diameter of the substrate support element, in particular 10-30% larger, more particularly about 20% larger.

[0020] Typically, according to the invention, the length of the reaction chamber is greater than the diameter of the substrate support element, in particular 60-120% greater, more particularly about 80% greater.

[0021] Typically, according to the present invention, the distance (along the axis of the reaction chamber) between the initial point of the reaction chamber and the initial point of the substrate support element is L times the diameter of the substrate support element and / or M times the width of the reaction chamber and / or N times the height of the reaction chamber, in particular, L is 0.3 to 0.5, more particularly about 0.4, M is 0.25 to 0.45, more particularly about 0.35, and N is 2.5 to 4.5, more particularly about 3.5.

[0022] Typically, according to the present invention, the substrate is supported by a substrate support element (preferably fully or partially removable) that rotates during the deposition process, the substrate support element being disposed on a rotating susceptor.

[0023] According to a further aspect, the present invention relates to an epitaxial reactor.

[0024] The present invention will become more readily apparent from the following detailed description considered in conjunction with the accompanying drawings. [Brief explanation of the drawings]

[0025] [Figure 1] FIG. 1 shows a schematic cross-sectional view of Applicant's epitaxial reaction chamber suitable for carrying out the method according to the present invention. [Figure 2] FIG. 2 shows a schematic view of the reaction chamber of FIG. 1 in longitudinal section. [Figure 3] FIG. 3 shows a schematic (partial) top view of the reaction chamber of FIG. 1 with a substrate therein. [Figure 4] FIG. 4 shows a schematic (partial) top view of the reaction chamber of FIG. 3 preceded by an innovative assembly for introducing a gas mixture into the chamber. [Figure 5] FIG. 5 shows approximate plots (not to the same scale) of the availability of Si, C, and N, as well as the temperature inside an embodiment of a reaction chamber according to the present invention, when an embodiment of a deposition method according to the present invention is carried out. DETAILED DESCRIPTION OF THE INVENTION

[0026] As can be readily understood, there are various ways of actually implementing the present invention, as defined in its principal advantageous aspects in the appended claims, and not limited to either the following detailed description or the appended claims.

[0027] In the diagrams of Figures 1 to 3, an embodiment of a reaction chamber 1 of an epitaxial reactor is shown.

[0028] The reaction chamber 1 has similar technical features to those shown and described in International Patent Applications WO2004053187, WO2004053188, WO2007088420 and WO2015092525, which are incorporated herein by reference.

[0029] The reaction chamber 1 extends uniformly along its longitudinal direction. It defines a reaction and deposition zone 10 and comprises a susceptor assembly comprising four susceptor elements 2, 3, 4, and 5 housed in a casing 7 made of a thermally insulating material. The casing 7 is inserted into a quartz tube 8, which may be hollow and can be cooled through an internal liquid flow. The casing 7 comprises a tube 71 and two circular caps 72 and 73. An inductor 9 is wound around the tube 8 and is adapted to heat the elements 2, 3, 4, and 5 by electromagnetic induction, suitably driven by a generator. Since the inductor 9 is not strictly speaking part of the reaction chamber 1, it is indicated by a dashed line. Elements 4 and 5 are two laths and constitute the side walls of the zone 10. Elements 2 and 3 are two protruding solid bodies with a circular segment-shaped cross section and through-holes 20 and 30 with a circular segment-shaped cross section. They are therefore composed of flat plates 21 and 31 and curved plates 22 and 32, which respectively constitute the upper and lower walls of zone 10. Elements 2, 3, 4, and 5 are made of graphite and are coated with silicon carbide (and / or tantalum carbide) at least on their surface facing zone 10. Lower wall 31 is adapted to accommodate, among other things, an assembly 6 comprising a support element 61 (typically rotating during the deposition process) adapted to support one substrate 62 to be deposited; according to this embodiment, support element 61 can be inserted and removed from zone 10. Two caps 72 and 73 have openings, in particular an opening in cap 73 for the inflow of a gas mixture with precursor gas (see black arrow on the left) and an opening in cap 72 for the outflow of exhaust gas (see black arrow on the right).

[0030] The reaction chamber of Figure 1 can be the subject of many variations. For example, elements 4 and 5 can be made entirely of an electrically insulating material, in particular silicon carbide and / or tantalum carbide, in which case it would be more correct to call them "separator elements."

[0031] 2 highlights a series of planes at successive longitudinal positions P0, P1, P2, P3, P4, P5, P6, P7, P8, and P9, which are successive in the direction of flow of the gas mixture in zone 10 of the chamber. In particular, P0 is at the beginning of zone 10 (the actual start of the reaction chamber), P1 is immediately after the beginning of zone 10, P2 is forward relative to the beginning of zone 10, P3 is at the beginning of the support element, P4 is at the beginning of the substrate, P5 is at the edge of the substrate, P6 is at the end of the support element, P7 is returned relative to the end of zone 10, P8 is immediately before the end of zone 10, and P9 is at the end of zone 10 (the actual end of the reaction chamber). With certain simplifications, planes P1-P8 can be considered to represent the front of the gas mixture progressively advancing within zone 10.

[0032] As mentioned above, the present invention considers the thermal decomposition of a substance catalyzed by contact with the inner surface of the reaction chamber. In Figures 1 to 3, the zone Z affected by this phenomenon, which is particularly relevant for the purposes of the present invention, is highlighted as it has a greater influence on the doping of the layer deposited on the substrate 62. Zone Z is located above the upper surface of plate 31 of lower wall 3, extends laterally between walls 4 and 5, and extends longitudinally from plane P1 to approximately plane P6. It is clear that before plane P1, the gas is still very cold and the designation of zone Z is merely illustrative.

[0033] The method according to the invention serves to deposit a layer of silicon carbide with n-type doping by a CVD-type process at high temperature on the surface of a substrate, in particular a substrate made of silicon carbide, which is arranged horizontally on a rotating susceptor (not shown in Figures 1 to 4 for simplicity, which is part of the assembly 6 and which is located below the support element 61 according to the embodiment of Figures 1 and 2), wherein according to the embodiment of Figures 1 to 4 the deposition can be carried out only on one substrate at a time.

[0034] The method involves introducing and flowing a gas mixture along a reaction chamber at an elevated temperature from a first side to a second side, passing through a portion of the chamber's lower wall, and then onto the rotating susceptor supporting a substrate, the gas mixture comprising or consisting of one or more gases that are precursors to the silicon carbide to be deposited, a carrier gas, and optionally a precursor gas containing a substance adapted to produce n-type doping. The arrows in Figures 2 and 3 schematically illustrate the flow of this gas mixture into and out of the reaction chamber, particularly the reaction zone and deposition zone, particularly their ends. Typically, precursor gases are not fully utilized, i.e., a significant proportion of these gases exit the chamber unexhausted. It should be noted that for dopant materials according to the present invention (particularly in the case of ammonia), the percentage of unexhausted gas exiting the chamber may be low or even zero, as its molecules "easily" decompose.

[0035] The "substance" or "dopant substance" is adapted to be subjected to catalyzed pyrolysis by contact with the interior surfaces of the reaction chamber to form species with the stoichiometry NHxCySiz, where x, y and z are comprised between 0 and 3 and x+y+z>0. In the illustrated embodiment, the interior surface of particular interest for the purposes of the present invention is the upper surface of plate 31 of lower wall 3, i.e., the upper surface on which substrate 62 is placed, which is made of silicon carbide. In the illustrated embodiment, the zone of particular interest for the purposes of the present invention is zone Z, where said pyrolysis occurs - it should be noted that said pyrolysis also occurs elsewhere.

[0036] Typically, the chamber is operated at temperatures in the range of 1450°C to 1800°C and pressures in the range of 5 kPa to 30 kPa, with the effective deposition temperature range and effective deposition pressure range being much narrower depending on the particular deposition process being performed.

[0037] Species with the above stoichiometry make nitrogen readily available for incorporation into silicon carbide.

[0038] According to the present invention, the substrate is placed in the reaction chamber in a region (e.g., P4-P5 in FIG. 5) where the trends of the respective availability of Si, C, and N are decreasing (preferably, as shown in FIG. 5, all decreasing, e.g., approximately linearly), and the temperature is within the deposition temperature range. The availability of Si, C, and N should preferably be higher than their respective predetermined thresholds to ensure layer formation.

[0039] 5 shows approximate plots of Si, C, and N availability as well as temperature inside an embodiment of a reaction chamber in accordance with the present invention when an embodiment of a deposition method in accordance with the present invention is performed, where the x-coordinate corresponds to longitudinal position inside the reaction chamber (e.g., P0 through P9 in FIG. 5), and the plotted values ​​can be considered to correspond to positions along the central longitudinal axis of the reaction chamber (e.g., see FIG. 3) just above the upper surface of the lower wall of the reaction chamber (e.g., see element 31 in FIG. 2). These plots can be obtained by simulations performed on faithful models of real reactors, or by experiments performed on real reactors, or by a combination of simulations and experiments.

[0040] 5 shows a position range (from P4 to P5, or from the bit before P4, e.g., P3 to the bit after P5, e.g., P6) that satisfies the above position conditions. The entire substrate (and the rotating susceptor and, optionally, the support elements) should preferably be positioned within this position range. Typically and advantageously, the diameter of the substrate (and the diameter of the rotating susceptor and, optionally, the diameter of the support elements) is selected to be smaller than the width of the position range.

[0041] As can be seen in all figures, gas is introduced into the reaction chamber only on its first side (see, for example, the arrows on the left side of Figures 2 and 3).

[0042] According to a preferred embodiment of the present invention, the dopant material introduced into the chamber is adapted to be subjected to catalytic pyrolysis to form primarily HSiN and HCN, and even more preferably the material introduced is such that it forms primarily HSiN.

[0043] The silicon precursor gas (for the silicon carbide to be deposited) is preferably a chlorinated compound, in particular dichlorosilane or trichlorosilane or tetrachlorosilane.

[0044] The carbon precursor gas (of the silicon carbide to be deposited) is preferably a hydrocarbon, in particular propane or ethylene or acetylene or methane.

[0045] The substance, i.e., the precursor gas for n-type doping, is preferably ammonia (NH3), acetonitrile (C2H3n), pyrrole (C4H5n), hydrazine (N2H4), hydrogen cyanide (HCN), or methylamine (CH3NH2). According to the applicant's experiments, ammonia is a very advantageous n-type dopant substance for silicon carbide.

[0046] The applicant's experiments have shown that only one n-type dopant material for silicon carbide can be used, preferably ammonia.

[0047] The carrier gas is preferably hydrogen, helium or argon or a mixture thereof.

[0048] When introduced into the reaction chamber, the gas mixture preferably has a C / Si ratio of less than 1.5 and greater than 1.0, particularly greater than about 1.3, to form the active layer, and a C / Si ratio of less than 1.0 and greater than 0.5, particularly greater than about 0.8, to form the buffer layer. It should be noted that the dopant material does not substantially affect the C / Si ratio, since its amount is very small compared to the silicon carbide precursor gas.

[0049] To obtain good doping uniformity, it is preferable that all precursor gases behave similarly within the reaction chamber, i.e., within the reaction and deposition zones. In particular, a preferred selection according to the present invention is to select all precursor gases such that the trends of Si, C, and N availability all decrease similarly after they are introduced into the reaction chamber (e.g., after P1), before they reach the substrate (e.g., before P3), and after they reach the substrate (e.g., after P4) (see, for example, the plots in FIG. 5).

[0050] For this purpose, all substances contained in the precursor gas are adapted to undergo pyrolysis catalyzed by contact with the inner surface of the reaction chamber, and all pyrolysis proceeds along the reaction chamber to form species Si, C, and N (i.e., species adapted to be deposited) with at least a constant N / Si ratio. The C / Si, N / Si, and N / C ratios must be considered at the same position in the chamber, e.g., with reference to the figure, particularly in planes P1-P8 within zone Z. In this context, a ratio is considered "constant" if its variation is, for example, less than 30%, and this variation may, for example, result from trends in the availability of N and Si that are identical but similar, i.e., both decreasing.

[0051] The result of having a constant ratio at all locations on the substrate (e.g., P4-P5) is that N availability is higher in regions where silicon carbide growth rate (determined by Si and C availability) is higher and lower in regions where silicon carbide growth rate is lower, thus providing the same density of N atoms per unit of silicon carbide crystal volume across the entire substrate surface.

[0052] Clearly, doping uniformity is significantly improved if the substrate is maintained in a rotating state within the reaction chamber during deposition. For example, considering the plot in FIG. 5, in the case of rotation, each surface point of a single rotating substrate is periodically subjected to variable availability of N, but 1) the average is important, and 2) the ratio between the availability values ​​is important. Thus, very good results have been achieved; for example, in tests conducted by the applicant based on the solution according to the present invention, a uniformity of 4-6% in doped layers deposited on 6-inch silicon carbide substrates was recently achieved using only ammonia as the dopant material, and a uniformity of 12-18% was previously achieved using only N2 as the dopant material.

[0053] In general, it may be useful to introduce and flow at least one first gas mixture and a second gas mixture internally along a reaction chamber at an elevated temperature, the first gas mixture and the second gas mixture comprising or consisting of one or more gases that are precursors of silicon carbide, a carrier gas, and optionally a precursor gas containing a substance adapted to produce n-type doping, the dopant substance being present when a doped deposition layer is desired.

[0054] The first and second gas mixtures may differ from each other at least in composition, and in particular, differences in the amount of dopant material alone may be expected in order to optimize doping uniformity.

[0055] The introduction flow rate and / or introduction ratio of the first air-fuel mixture and the introduction flow rate and / or introduction ratio of the second air-fuel mixture may be different from each other.

[0056] According to a preferred embodiment of the present invention (see, for example, FIG. 4), a first gas mixture is introduced into a central zone of the reaction chamber (see arrow F1 in FIG. 4), and a second gas mixture is introduced into at least one lateral zone of the reaction chamber (see arrows F2A and F2B in FIG. 4, indicating the use of the second gas mixture in both lateral zones).

[0057] An epitaxial reactor for the deposition of silicon carbide on a substrate by a CVD-type process at high temperatures according to the present invention is adapted to carry out the methods described and claimed herein.

[0058] The rotating susceptor is located within the reaction chamber in a region where the trends in the respective availability of Si, C, and N are all decreasing and the temperature is within the deposition temperature range (see, eg, FIG. 5).

[0059] Advantageously, the rotating susceptor is adapted for single substrate support.

[0060] Advantageously, the epitaxial reactor comprises an assembly for introducing gases into the reaction chamber in a controlled manner, for which purpose one or more MFCs (= mass flow controllers) can be used. Typically and advantageously, an assembly is placed before the reaction chamber, said assembly being configured such that gases are introduced into the reaction chamber only at a first side of the reaction chamber.

[0061] Typically, the invention is applied to a reaction chamber having a "hot wall" (heated by induction) made of silicon carbide, or better graphite coated with silicon carbide, with longitudinal flow of gas inside the chamber.

[0062] Typically, according to the present invention, the substrate is supported by a substrate support element (preferably fully or partially removable) that rotates during the deposition process, the substrate support element being disposed on a rotating susceptor.

[0063] Typically, according to the present invention, the cross section of the reaction chamber has a rectangular shape, and the rectangle may have a width that is much larger than its height, particularly 5 to 20 times larger, more particularly about 10 times larger.

[0064] Typically according to the invention, the width of the reaction chamber (corresponding approximately to the width of the above-mentioned rectangle) is larger than the diameter of the substrate support element, in particular 10-30% larger, more particularly about 20% larger.

[0065] Typically, according to the invention, the length of the reaction chamber is greater than the diameter of the substrate support element, in particular 60-120% greater, more particularly about 80% greater.

[0066] Typically, according to the present invention, the distance (along the axis of the reaction chamber) between the initial point of the reaction chamber and the initial point of the substrate support element is L times the diameter of the substrate support element and / or M times the width of the reaction chamber and / or N times the height of the reaction chamber, in particular, L is 0.3 to 0.5, more particularly about 0.4, M is 0.25 to 0.35, more particularly about 0.35, and N is 2.5 to 4.5, more particularly about 3.5.

[0067] It should be noted that Figures 1-4 are not to scale, and particularly in Figures 3 and 4 the diameter of the substrate is much smaller than the distance between the sidewall of the reaction zone and the deposition zone, but according to some preferred embodiments the diameter is only 15-30% smaller than the distance.

[0068] In the embodiment of FIG. 4, the reaction chamber (particularly the reaction and deposition zones) is preceded by an assembly for introducing gas mixtures into the chamber. Typically and advantageously, assembly 400 is adapted to be placed before the reaction chamber of FIGS. 1-3 (or similar). Advantageously, it comprises two partition walls 410 and 420 that (together with other walls 430 and 440) define (on either side, respectively) three small chambers adapted to guide the flow of the first and second gas mixtures, with the distance between walls 410 and 420 being 2-4 times greater than the distance between walls 430 and 410 and the distance between walls 420 and 440, according to some preferred embodiments. More specifically, the partition may be fixed to a plate 450, preferably having a plurality of holes (see the small arrows across the plate).

[0069] FIG. 4 emphasizes that each of the three small chambers is fluidly connected to a "source" of the gas mixture (in other words, the mixing of the gases preferably occurs before plate 450, particularly at a temperature that is lower, preferably much lower, than the temperature in the reaction and deposition zones), and conceptually the three "sources" are independent of each other, with typically two small lateral chambers having the same size and being fed by the same source.

[0070] A "partitioned" gas introduction assembly is positioned so that the gas mixture does not substantially mix before reaching the substrate.

[0071] According to an advantageous embodiment not shown in any of the figures, there is a "transition piece" arranged between the gas mixture or mixture introduction assembly and the reaction chamber, through which the gas mixture or mixture flows before entering the reaction chamber (particularly the reaction zone and deposition zone). Such a "transition piece" is used to preheat the gas mixture or mixture. Preferably, such a "transition piece" is made of graphite (possibly with a silicon carbide and / or tantalum carbide coating), and the heating inductor is adapted to heat such a "transition piece" as well, thus starting (to some extent) before the reaction chamber (e.g., slightly to the left of the inductor in FIG. 2).

[0072] Preferably, the reaction chamber according to the present invention is kept isolated from the external environment before, during, and after deposition by using a substrate load lock chamber and an automatic loading / unloading system, thus avoiding the need to purge the chamber after each deposition.

Claims

1. 1. A method for depositing a layer of silicon carbide having n-type doping by a CVD method on a surface of a substrate placed horizontally on a rotating susceptor in a reaction chamber, the rotating susceptor being adapted to support a single substrate; The method includes introducing and flowing a gas mixture internally along the reaction chamber from a first side to a second side through a portion of a bottom wall of the reaction chamber and then onto the rotating susceptor supporting one substrate; the gas mixture one or more gases that are precursors to the silicon carbide to be deposited; a carrier gas, and a precursor gas containing a substance adapted to produce n-type doping; comprising or consisting of the material is adapted to be subjected to pyrolysis catalyzed by contact with an interior surface of the reaction chamber to form species having a stoichiometry of NHxCySiz, where x, y, and z are comprised between 0 and 3, x+y+z>0, and the interior surface is silicon carbide; the reaction chamber is at a temperature comprised between 1450°C and 1800°C and a pressure comprised between 5 kPa and 30 kPa; the substrate is placed in the reaction chamber in a region where the trends of Si, C, and N availability are all decreasing and the temperature is within a deposition temperature range; method.

2. 10. The method of claim 1, wherein the material is adapted to be subjected to thermal decomposition catalyzed by contact with the interior surfaces of the reaction chamber to form primarily HSiN and HCN, with HSiN predominating.

3. introducing and flowing a silicon precursor gas at an elevated temperature along the reaction chamber for depositing silicon carbide; the silicon precursor gas is a chlorinated compound; The method according to claim 1 or claim 2.

4. 4. The method of any one of claims 1 to 3, comprising introducing and flowing a carbon precursor gas of the silicon carbide to be deposited along the reaction chamber at an elevated temperature, the carbon precursor gas being a hydrocarbon.

5. The method according to any one of claims 1 to 4, wherein the substance is ammonia, acetonitrile, pyrrole, hydrazine, hydrogen cyanide, or methylamine.

6. 6. The method of any one of claims 1 to 5, wherein the gas mixture, when introduced into the reaction chamber, has a C / Si ratio of less than 1.5 and greater than 1.0 for forming an active layer, and a C / Si ratio of less than 1.0 and greater than 0.5 for forming a buffer layer.

7. the material contained in the precursor gas is adapted to be subjected to thermal decomposition catalyzed by contact with the interior surfaces of the reaction chamber; The method of any one of claims 1 to 6, wherein the pyrolysis progresses along the reaction chamber to form Si and C and N species having at least a constant N / Si ratio.

8. The method of any one of claims 1 to 7, wherein the substrate is kept rotating in the reaction chamber during deposition.

9. introducing and flowing at least one first gas mixture and a second gas mixture internally along a reaction chamber at an elevated temperature; the first gas mixture and the second gas mixture comprise or consist of one or more gases that are precursors of the silicon carbide to be deposited, a carrier gas, and a precursor gas containing a substance adapted to produce n-type doping; The method according to any one of claims 1 to 8.

10. The method of claim 9 , wherein the first gas mixture and the second gas mixture differ from each other at least in composition.

11. 11. The method according to claim 9 or 10, wherein the introduction flow rate and / or introduction ratio of the first gas mixture and the introduction flow rate and / or introduction ratio of the second gas mixture are different from each other.

12. 12. The method according to any one of claims 9 to 11, wherein the first gas mixture is introduced into a central zone of the reaction chamber and the second gas mixture is introduced into at least one lateral zone of the reaction chamber.

13. 13. The method of any one of claims 1 to 12, wherein the reaction chamber is kept isolated from the external environment before, during and after deposition by using a substrate load lock chamber and an automatic loading and unloading system, thus avoiding the need to purge the chamber after each deposition.

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