Inlet Nozzle Assembly

Abstract

An inlet nozzle assembly, abatement apparatus and method are disclosed. The inlet nozzle assembly is for an abatement apparatus for treating an exhaust stream from a semiconductor processing tool, the inlet nozzle assembly comprising an inlet nozzle configured to deliver the exhaust stream into an abatement chamber, a head defining an opening for receiving the inlet nozzle, and a thermally insulated mount configured to hold the inlet nozzle within the opening. In this manner, a thermal path between the inlet nozzle and the head is blocked by the thermally insulated mount, which helps prevent the inlet nozzle from being cooled by the head and helps prevent condensation from collecting as powder or particulates on the inlet nozzle.

Description

[Technical Field]

[0001] The field of the invention relates to inlet nozzle assemblies, abatement devices and methods. [Background technology]

[0002] Abatement devices, such as radiant burners or other types of abatement devices, are known and are typically used to treat exhaust gas streams from manufacturing process tools used, for example, in the semiconductor or flat panel display manufacturing industries. During such manufacturing, residual perfluorinated compounds (PFCs) and other compounds are present in the exhaust gas streams pumped from the process tools. PFCs are difficult to remove from the exhaust gases, and their release into the environment is undesirable because they are known to have a relatively high greenhouse effect.

[0003] Known radiant burners, such as those described in European Patent Publication No. 0,694,735, use combustion to remove PFCs and other compounds from an exhaust gas stream. Typically, the exhaust gas stream is a nitrogen stream containing PFCs and other compounds. The exhaust gas stream is conveyed to a combustion chamber laterally surrounded by an exit face of an effective gas burner. In some cases, a treatment material, such as a fuel gas, can be mixed with the exhaust gas stream before entering the combustion chamber. The fuel gas and air are simultaneously supplied to the effective burner to affect combustion at the exit face. Combustion products from the effective burner react with the exhaust stream mixture to combust the compounds in the exhaust stream. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] European Publication No. 0,694,735 Summary of the Invention [Problem to be solved by the invention]

[0005] Although abatement designs exist, each has its own drawbacks. It would therefore be desirable to provide an improved design for an abatement design. [Means for solving the problem]

[0006] According to a first aspect, an inlet nozzle assembly for an abatement apparatus for treating an exhaust stream from a semiconductor processing tool is provided, the inlet nozzle assembly comprising: an inlet nozzle configured to deliver the exhaust stream into an abatement chamber; a head defining an opening for receiving the inlet nozzle; and an insulated mounting portion configured to hold the inlet nozzle within the opening.

[0007] The first aspect recognizes that a problem with existing inlet assemblies is that the assembly's operating life can be insufficient, which impacts performance and shortens the time between maintenance intervals. Specifically, particulates or powder can accumulate in the inlet nozzle assembly, affecting fluid flow and even leading to blockages.

[0008] Accordingly, an inlet nozzle assembly is provided. The inlet nozzle assembly can be for use in an abatement apparatus. The abatement apparatus can process an exhaust stream from a semiconductor processing tool. The inlet assembly can include an inlet nozzle. The inlet nozzle can be configured to deliver or convey the exhaust stream to an abatement chamber. The inlet nozzle assembly can include a head. The head can define an opening to receive the inlet nozzle. The inlet nozzle assembly can include an insulated mount. The insulated mount is configured or arranged to hold the inlet nozzle within the opening. In this manner, a thermal path between the inlet nozzle and the head is blocked by the insulated mount, which helps prevent the inlet nozzle from being cooled by the head, which helps prevent condensable materials from forming deposits on cooling components of the inlet nozzle.

[0009] The insulating mount may be configured to surround or enclose the inlet nozzle. The insulating mount may be interposed or disposed between the inlet nozzle and the head.

[0010] The thermally insulating mount may be configured or arranged to space or position the inlet nozzle away from the head, which helps to prevent a thermal path.

[0011] The thermal insulating mount may comprise a plurality of protrusions, members or fingers constructed or arranged to contact the inlet nozzle. The provision of protrusions helps to reduce the contact area, which helps to impede the thermal path.

[0012] A protrusion extends from the opposing surface of the insulating mount to space or position the inlet nozzle away from the opposing surface.

[0013] The thermally insulated fitting can define a purge conduit that can be constructed or arranged to carry or deliver purge gas from a purge gas supply to a purge gas plenum in the head. Thus, the thermally insulated fitting can serve a dual purpose.

[0014] The inlet nozzle can comprise an exhaust stream nozzle for delivering or conveying the exhaust stream. The inlet nozzle can also comprise a concentric combustion reactant nozzle for delivering or conveying the combustion reactants. The thermally insulated attachment can define a combustion reactant conduit. The combustion reactant conduit can be configured to convey or deliver the combustion reactants from the combustion reactant supply to the concentric combustion reactant nozzle.

[0015] A concentric combustion reactant nozzle may surround the exhaust flow nozzle.

[0016] The inlet nozzle can include an upstream inlet portion. The upstream inlet portion can define an inlet chamber. The inlet chamber can receive the exhaust flow. The inlet nozzle can include a downstream delivery portion. The downstream delivery portion can define a delivery chamber. The delivery chamber can deliver or convey the exhaust flow into the abatement chamber. The upstream inlet portion can be configured to be spaced apart or located away from the head. The distance from the head helps prevent a thermal path.

[0017] The upstream inlet portion may be configured to be spaced or spaced apart from the head by an insulated mounting.

[0018] The upstream inlet portion may be constructed or arranged to be spaced or located away from the upstream surface of the head.

[0019] The insulating mount may be constructed of an insulating material.

[0020] The insulating mount may have a lower thermal conductivity than the inlet nozzle and / or head.

[0021] According to a second aspect, there is provided an abatement apparatus comprising the inlet nozzle assembly of the first aspect.

[0022] The abatement device may include the inlet nozzle assembly features described above.

[0023] According to a third aspect, there is provided a method, the method including the steps of defining an opening in the head for receiving an inlet nozzle for delivering an exhaust flow into an abatement chamber, and retaining the inlet nozzle in the opening using an insulated mounting portion.

[0024] The method may include surrounding the inlet nozzle with a thermally insulating mounting.

[0025] The method may include interposing a thermally insulating mount between the inlet nozzle and the head.

[0026] The method may include spacing the inlet nozzle from the head with an insulated mounting.

[0027] The method may include contacting the inlet nozzle with a plurality of protrusions of the insulating mount.

[0028] The method may include extending a protrusion from the opposing surface of the insulating mount to space the inlet nozzle from the opposing surface.

[0029] The method can include defining a purge conduit in the mount configured to carry purge gas from a purge gas supply to a purge gas plenum in the head.

[0030] The method may include providing the inlet nozzle with an exhaust flow nozzle for delivering an exhaust flow and a concentric combustion reactant nozzle for delivering a combustion reactant, and defining a combustion reactant conduit configured to convey the combustion reactant from the combustion reactant supply to the concentric combustion reactant nozzle.

[0031] The method may include surrounding the exhaust flow nozzle with a concentric combustion reactant nozzle.

[0032] The method may include defining an inlet chamber at an upstream inlet portion of the inlet nozzle for receiving the exhaust flow, defining a delivery chamber at a downstream delivery portion of the inlet nozzle for delivering the exhaust flow to an abatement chamber, and spacing the upstream inlet portion from the head.

[0033] The method may include spacing the upstream inlet portion from the head with an insulating mount.

[0034] The method may include spacing the upstream inlet portion from an upstream surface of the head.

[0035] The method may include forming the insulating mount from an insulating material.

[0036] The method may include selecting the thermally insulating mount to have a lower thermal conductivity than at least one of the inlet nozzle and the head.

[0037] Further particular and preferred aspects are set out in the accompanying independent and dependent claims. Features of the dependent claims may be combined with features of the independent claims as appropriate, and in combinations other than those explicitly set out in the claims.

[0038] It should be understood that when features of an apparatus are described as being operable to provide a certain function, this includes features of an apparatus that provide that function or that are adapted or configured to provide that function.

[0039] Embodiments of the present invention will now be further described with reference to the accompanying drawings. [Brief explanation of the drawings]

[0040] [Figure 1] 1 is a front cross section through an inlet assembly for an abatement device according to one embodiment. [Figure 2] 2 is a side cross section through the inlet assembly of FIG. 1; [Figure 3] FIG. 2 is an exploded perspective view of a front cross section through the inlet assembly of FIG. 1. [Figure 4] 1 is a front cross section through an inlet assembly for an abatement device according to one embodiment. [Figure 5] FIG. 5 is a front cross-sectional perspective view through the inlet assembly of FIG. 4. DETAILED DESCRIPTION OF THE INVENTION

[0041] Before describing the embodiments in more detail, a brief overview will be provided. Some embodiments provide a configuration that insulates the exhaust inlet nozzle (and typically the reactant inlet nozzle) from the mount or head to help reduce the cooling effect of the mount or head on the inlet nozzle and prevent the buildup of condensate, powder, or particulates on the inlet nozzle. In particular, the head or mount generally has a high thermal mass that would otherwise tend to cool the inlet nozzle, which can cause compounds in the exhaust stream to condense near the inlet nozzle, which can cause particulate matter or powder buildup that can affect the inlet nozzle and / or the fluid flow in the downstream combustion chamber, and / or can result in bridging or blockages that affect the performance of the abatement device. Providing an insulating mount that prevents or reduces the thermal path between the inlet nozzle and the head or mount helps reduce the cooling effect of the head or mount on the inlet nozzle. Typically, the insulating mount is formed of an insulating material that has a lower thermal conductivity than that of the exhaust inlet and / or the head or mount. Additionally, the inlet nozzle components are typically shaped or sized to space them from the head or mount to avoid direct contact between the inlet nozzle components and the insulating mount and / or to reduce the contact area between these components and the insulating mount.

[0042] Inlet Assembly (First Configuration) FIG. 1 is a front cross section through an inlet assembly for an abatement device 10 according to one embodiment. FIG. 2 is a side cross section through the inlet assembly. FIG. 3 is an exploded perspective view of the front cross section through the inlet assembly. A mount 50 is provided, on whose downstream surface 55 a combustion chamber module housing (not shown) is mounted. The combustion chamber module typically includes a perforated sleeve housed within the housing. The perforated sleeve within the housing defines the combustion chamber. The mount 50 defines an inlet opening 910 that receives an inlet nozzle 60. In this embodiment, the inlet nozzle 60 has an oval cross section. However, it should be understood that other shapes of the inlet nozzle 60 are possible, such as those having a circular or other cross section. The inlet nozzle 60 has an upstream inlet portion 63 that attaches to a source of exhaust flow and a downstream delivery portion 67 that delivers the exhaust flow into the combustion chamber.

[0043] The thermal insulation fitting 900 is disposed within the inlet opening 910. The thermal insulation fitting is made of a material with a lower thermal conductivity than the inlet nozzle 60 and / or the mount 50. The thermal insulation fitting 900 has an upstream portion 920 and a downstream portion 930. The upstream portion 920 abuts an upstream ceiling 940 of the mount 50. The thermal insulation fitting 900 is held in place relative to the upstream ceiling 940 by fasteners 950. The upstream portion 920 defines an upstream retention rim 960 that extends radially within the opening 910. Because the upstream portion 920 is potentially process wettable, it can typically be made from filled PTFE (glass-filled or mica-filled) that is chemically compatible and has an operating temperature of up to 260°C. The downstream portion 930 does not require chemical compatibility and can be made from polyamideimide (PAI) or polyetheretherketone (PEEK). The retaining rim 960 cooperates with the radially extending flange 65 on the feed portion 67 to hold the inlet nozzle 60 in place within the mount 50. An annular protrusion 970 upstanding from the upstream surface of the upstream portion 920 spaces the radially outer surface of the feed portion 67 from the radially inner surface of the opening 910. Additionally, the feed portion 67 and the insulating mount 900 are sized to prevent contact between the downstream surface of the inlet portion 63 and the upstream surface of the mount 50. In other words, the inlet portion is slightly raised to provide clearance between the inlet portion 63 and the mount 50.

[0044] It can therefore be seen that the insulating mount 900 prevents contact between the inlet nozzle 60 and the mount 50, and provides a poor thermal conductivity material between the inlet nozzle 60 and the mount 50. This helps to disrupt the thermal path between the inlet nozzle 60 and the mount 50, which helps to prevent cooling of the inlet nozzle 60 by the mount 50 and reduces the buildup of condensation on the inlet nozzle 60.

[0045] The downstream portion 930 also has a radially extending upstream retention rim 980 that receives a radially extending flange 835 on the upstream end of the reactant nozzle 830 (extending to the outlet of the feed portion 67) that surrounds the outer surface of a portion of the feed portion 67. This spaces the reactant nozzle 830 from the inlet nozzle 60, prevents contact between the reactant nozzle 830 and the mount 50, and provides a low thermal conductivity material between the reactant nozzle 830 and the mount 50. This helps to disrupt the thermal path between the reactant nozzle 830 and the mount 50, which helps prevent cooling of the reactant nozzle 830 by the mount 50 and reduces condensation buildup on the reactant nozzle 830.

[0046] The thermally insulated fitting 900 has a reactant inlet 990 that receives the reactants and conveys them via reactant conduit 995 to an annular gallery 997 that is in fluid communication with the upstream end of the reactant nozzle 830. Thus, any reactants supplied to the combustion chamber are conveyed through the thermally insulated fitting 900 to the reactant nozzle 830 and delivered into the combustion chamber, surrounding the exhaust stream.

[0047] The insulating mounting portion 900 has a purge inlet 993 that receives and conveys purge gas into the mounting base 50, and uses an inert gas to provide a positive pressure within the mounting base 50 and prevent backflow of gas into the mounting base 50.

[0048] Inlet Assembly (Second Configuration) 4 and 5 show an inlet assembly for an abatement apparatus 10A according to one embodiment similar to the configuration described above. In this configuration, an insulated mount 900A is provided to receive an inlet nozzle 60A and support a concentric reactant nozzle 830A. In this configuration, the insulated mount 900A has a set of protrusions 915A that contact the inlet nozzle 60A and space it away from the insulated mount 900A, further reducing contact between the inlet nozzle 60A and the insulated mount 900A to further impair the thermal path. It should be understood that similar protrusions can be incorporated into the configurations described above with reference to FIGS. 1 through 3.

[0049] Some embodiments provide a configuration for reducing heat transfer between the inlet system and the head of a thermal / combustion abatement system to minimize the deposition of condensable byproducts. In such thermal / combustion abatement systems, gas to be treated generally enters the combustion chamber through one or more nozzles surrounded by an inlet assembly. Some assemblies may include flow regulators and / or auxiliary inlets. Some processes, such as aluminum etching, LPCVD nitride, and PECVD nitride, may generate condensable byproducts such as AlCl3, NH4Cl, and (NH4)2SiF6. The nozzles are typically placed in register with the head or mount, and similarly, the inlet structure is typically fixed to the head or mount. Therefore, if the inlet structure is in mechanical and therefore thermal contact with the head or mount, which can function as a heat sink, this can cool these structures to the point where condensation can occur. Therefore, in some embodiments, the head is designed to minimize thermal contact with the nozzle(s). In some embodiments, a separate register feature is provided, constructed of a material with the lowest thermal conductivity. In some embodiments, resistor features are modified to reduce contact with the nozzle. In some embodiments, a combination of the lowest thermal conductivity thermally insulating mount and a long thermal path is employed to increase the overall resistance to heat transfer. The inlet assembly is typically designed to avoid direct contact with the head or is placed in a locator and held by a retainer in the thermally insulating mount. The mating surface of the inlet assembly directly contacts the top surface of the nozzle to compress the elastomeric seal and limit its compression. Nozzles are typically made from corrosion-resistant materials such as Inconel 600 or ANC16, which have relatively low thermal conductivity compared to other nozzle materials (although these materials have higher thermal conductivity than the thermally insulating mount). Inlet temperatures can be further increased by replacing the nozzle with one that has a higher thermal conductivity (e.g., copper). This nozzle can be joined to the inlet assembly by brazing, for example.The nozzles can be protected from corrosion by plating, for example electroless nickel plating, which can be between 25 and 75 μm thick, for example 50 μm thick.

[0050] Although exemplary embodiments of the present invention have been disclosed in detail herein with reference to the accompanying drawings, it is understood that the present invention is not limited to the precise embodiments, and that various changes and modifications can be made by those skilled in the art without departing from the scope of the present invention as defined by the appended claims and their equivalents. [Explanation of symbols]

[0051] 10;10A abatement device 50 Mounting stand 55 Downstream surface 60;60A Inlet Nozzle 63 Entrance section 65;835 flange 67 Feeding part 830;830A Reactant Nozzle 900;900A Insulated Mounting 910 Entrance opening 915A protrusion 920 Upstream part 930 Downstream part 940 Upstream ceiling 960;980 Upstream retaining rim 970 Protrusion 990 Reactant inlet 993 Purge Inlet 995 Reactant conduit 997 Circular Gallery

Claims

1. 1. An inlet nozzle assembly for an abatement system for treating an exhaust stream from a semiconductor processing tool, comprising: an inlet nozzle configured to deliver the exhaust stream into an abatement chamber; a head attached to the abatement chamber, the head defining an opening for receiving the inlet nozzle; an insulated mounting portion configured to hold the inlet nozzle within the opening; an inlet nozzle assembly, wherein the insulating mounting portion is configured to surround the inlet nozzle and / or be interposed between the inlet nozzle and the head to space the inlet nozzle from the head.

2. The inlet nozzle assembly of claim 1 , wherein the thermally insulating mount comprises a plurality of protrusions configured to contact the inlet nozzle.

3. The inlet nozzle assembly of claim 2 , wherein the protrusion extends from an opposing surface of the thermally insulating mount to space the inlet nozzle from the opposing surface.

4. The inlet nozzle assembly of claim 1 , wherein the thermally insulated mounting defines a purge conduit configured to carry purge gas from a purge gas supply to a purge gas plenum in the head.

5. 2. The inlet nozzle assembly of claim 1, wherein the inlet nozzle comprises an exhaust stream nozzle for delivering the exhaust stream and a concentric combustion reactant nozzle for delivering a combustion reactant, and the thermally insulated mounting defines a combustion reactant conduit configured to carry combustion reactants from a combustion reactant supply to the concentric combustion reactant nozzle.

6. 2. The inlet nozzle assembly of claim 1, wherein the inlet nozzle comprises an upstream inlet portion defining an inlet chamber for receiving the exhaust flow and a downstream delivery portion defining a delivery chamber for delivering the exhaust flow to the abatement chamber, the upstream inlet portion being configured to be spaced apart from the head.

7. The inlet nozzle assembly of claim 6 , wherein the upstream inlet section is configured to be spaced from the head by the thermally insulating mounting portion.

8. The inlet nozzle assembly of claim 6 , wherein the upstream inlet portion is configured to be spaced from an upstream surface of the head.

9. The inlet nozzle assembly of claim 1 , wherein the thermally insulating mount is constructed from a thermally insulating material.

10. The inlet nozzle assembly of claim 1 , wherein the thermally insulating mount has a lower thermal conductivity than at least one of the inlet nozzle and the head.

11. An abatement system comprising the inlet nozzle assembly of claim 1.

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