Parts replacement system and parts replacement device

Abstract

To reduce an installation area of a system in the manufacture of a semiconductor device.SOLUTION: A component replacement system for replacing a consumable component includes a component accommodating device and a component replacement device. The component accommodating device accommodates a consumable component before use. The component replacement device is connected to a processing device and the component accommodating device, and replaces a consumable component after use installed in the processing device with a consumable component before use housed in the component accommodating device. Further, the component replacement device moves to the position of the processing device to which the consumable component to be replaced is attached so as to be connected to the processing device. Further, the component accommodating device moves to the position of the component replacement device connected to the processing device to which the consumable component to be replaced is attached so as to be connected to the component replacement device.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] Various aspects and embodiments of the present disclosure relate to a part replacement system and a part replacement device. [Background technology]

[0002] Inside a processing apparatus for processing substrates are consumable parts that wear out as substrate processing continues. When the amount of wear of such consumable parts exceeds a predetermined amount, they are replaced with unused consumable parts. To replace the consumable parts, substrate processing in the processing apparatus is stopped, and the container of the processing apparatus is opened to the atmosphere. Then, the used consumable parts are manually removed and new consumable parts are installed. The container is then closed again, a vacuum is drawn inside the container, and substrate processing is resumed.

[0003] In this way, replacing consumable parts requires opening the interior of the processing equipment to the atmosphere, which requires vacuuming the processing equipment after replacing the consumable parts, resulting in extended downtime for processing. In addition, some consumable parts are large, so manual replacement can take a long time.

[0004] To avoid this, a replacement station is known that includes unused consumable parts and a replacement handler for replacing the consumable parts (see, for example, Patent Document 1 below). In such a replacement station, the processing equipment and the replacement station are connected, and after the inside of the replacement station is evacuated, a shutoff valve between the processing equipment and the replacement station is opened. The replacement handler in the replacement station then removes the used consumable parts from the processing equipment and replaces them with unused consumable parts loaded in the replacement station. This makes it possible to replace consumable parts without opening the inside of the processing equipment to the atmosphere, thereby reducing processing downtime. Furthermore, because the replacement of consumable parts is performed by the replacement handler rather than by human hands, the replacement of consumable parts can be completed in a short time. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2017-85072 Summary of the Invention [Problem to be solved by the invention]

[0006] The present disclosure provides a part replacement system and a part replacement device that can reduce the installation area of ​​a system in the manufacture of semiconductor devices. [Means for solving the problem]

[0007] One aspect of the present disclosure is a part replacement system for replacing consumable parts, comprising a part storage device and a part replacement device. The part storage device stores unused consumable parts. The part replacement device is connected to a processing device and the part storage device, and replaces used consumable parts installed in the processing device with unused consumable parts stored in the part storage device. The part replacement device also moves to the position of the processing device on which the consumable part to be replaced is installed and connects to the processing device. The part storage device also moves to the position of the part replacement device connected to the processing device on which the consumable part to be replaced is installed and connects to the part replacement device. [Effects of the Invention]

[0008] According to various aspects and embodiments of the present disclosure, the footprint of a system in the manufacture of semiconductor devices can be reduced. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a system configuration diagram illustrating an example of a manufacturing system according to an embodiment of the present disclosure. [Figure 2] FIG. 2 is a schematic cross-sectional view showing an example of a processing apparatus. [Figure 3] FIG. 3 is a schematic cross-sectional view showing an example of a part replacement device. [Figure 4]FIG. 4 is a diagram showing an example of a cross section taken along line AA of the part replacement device illustrated in FIG. [Figure 5] FIG. 5 is an enlarged cross-sectional view showing an example of a connection portion between a processing device and a part replacement device. [Figure 6] FIG. 6 is an enlarged cross-sectional view showing an example of a connection portion between a processing device and a part replacement device. [Figure 7] FIG. 7 is a schematic cross-sectional view showing an example of a component receiving device. [Figure 8] FIG. 8 is a schematic cross-sectional view showing an example of a jig receiving device. [Figure 9] FIG. 9 is a diagram illustrating a procedure for replacing consumable parts. [Figure 10] FIG. 10 is a diagram illustrating the procedure for replacing consumable parts. [Figure 11] FIG. 11 is a diagram illustrating a procedure for replacing consumable parts. [Figure 12] FIG. 12 is a diagram illustrating a procedure for replacing consumable parts. [Figure 13] FIG. 13 is a diagram illustrating a procedure for replacing consumable parts. [Figure 14] FIG. 14 is a diagram illustrating a procedure for replacing consumable parts. [Figure 15] FIG. 15 is a diagram illustrating a procedure for replacing consumable parts. [Figure 16] FIG. 16 is a diagram illustrating a procedure for replacing consumable parts. [Figure 17] FIG. 17 is a diagram illustrating a procedure for replacing consumable parts. [Figure 18] FIG. 18 is a diagram illustrating the procedure for replacing consumable parts. [Figure 19] FIG. 19 is a block diagram illustrating an example of a control device. [Figure 20] FIG. 20 is a diagram illustrating an example of the management table. [Figure 21] FIG. 21 is a flowchart illustrating an example of processing by the control device. [Figure 22] FIG. 22 is a flowchart illustrating an example of processing by the control device. [Figure 23]FIG. 23 is a flowchart illustrating an example of processing by the part replacement device. [Figure 24] FIG. 24 is a flowchart illustrating an example of processing by the part replacement device. [Figure 25] FIG. 25 is a flowchart showing an example of the processing of the component accommodation device and the jig accommodation device. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, embodiments of a part replacement system and a part replacement device will be described in detail with reference to the drawings. Note that the disclosed part replacement system and part replacement device are not limited to the following embodiments.

[0011] In mass production, substrates are processed using multiple processing equipment, and consumable parts are replaced in processing equipment installed in different locations. Therefore, the replacement station carrying the unused consumable parts must be moved to the location of the processing equipment where the consumable parts need to be replaced.

[0012] If only one unused consumable part is stored in the replacement station, the replacement station cannot begin the next replacement operation immediately after the replacement of the consumable part until the unused consumable part is replenished. As a result, processing equipment that has a consumable part due for replacement will have to wait until the consumable part is replaced, which reduces processing throughput. In contrast, if multiple unused consumable parts are stored in the replacement station, consumable part replacement can continue until the unused consumable parts stored there are used up, thereby preventing a decrease in processing throughput.

[0013] However, as the number of consumable parts accommodated in the replacement station increases, the replacement station becomes larger, which requires a wider passageway through which the replacement station moves, increasing the footprint of the entire semiconductor device manufacturing system.

[0014] Therefore, the present disclosure provides a technique that can reduce the installation area of ​​a system in manufacturing semiconductor devices.

[0015] [Configuration of manufacturing system 10] 1 is a system configuration diagram illustrating an example of a manufacturing system 10 according to an embodiment of the present disclosure. The manufacturing system 10 is an example of a part replacement system. In one embodiment, the manufacturing system 10 includes a control device 20, a plurality of process groups 30, a plurality of part replacement devices 50, a plurality of part storage devices 60, and a plurality of jig storage devices 70. The control device 20 communicates with each of the process groups 30, the part replacement devices 50, the part storage devices 60, and the jig storage devices 70, and controls each of the process groups 30, the part replacement devices 50, the part storage devices 60, and the jig storage devices 70.

[0016] Each processing group 30 includes a vacuum transfer chamber 31, a plurality of processing devices 40-1 to 40-6, a plurality of load lock chambers 32, and an atmospheric transfer chamber 33. In the following description, the processing devices 40-1 to 40-6 will be collectively referred to as processing device 40 when they are not distinguished from one another.

[0017] A plurality of processing devices 40 and a plurality of load lock chambers 32 are connected to the vacuum transfer chamber 31. In this embodiment, six processing devices 40 are connected to the vacuum transfer chamber 31, but five or fewer processing devices 40 may be connected to the vacuum transfer chamber 31, or seven or more processing devices 40 may be connected to the vacuum transfer chamber 31. Furthermore, in this embodiment, two load lock chambers 32 are connected to the vacuum transfer chamber 31, but one load lock chamber 32 may be connected to the vacuum transfer chamber 31, or three or more load lock chambers 32 may be connected to the vacuum transfer chamber 31.

[0018] Each processing apparatus 40 performs processing such as etching or film formation on a substrate W in a low-pressure environment. Each processing apparatus 40 is equipped with consumable parts that are consumed depending on the processing performed on the substrate W. Each processing apparatus 40 is separated from the vacuum transfer chamber 31 by a gate valve 400. Each processing apparatus 40 is also provided with a gate valve 401 for carrying out used consumable parts and carrying in new consumable parts. Each processing apparatus 40 may be apparatuses that perform the same process in a manufacturing process, or may be apparatuses that perform different processes.

[0019] Each load lock chamber 32 has a gate valve 320 and a gate valve 321, which switch the internal pressure from a predetermined vacuum level to atmospheric pressure or from atmospheric pressure to a predetermined vacuum level. The load lock chamber 32 and the vacuum transfer chamber 31 are separated by the gate valve 320. The load lock chamber 32 and the atmospheric transfer chamber 33 are also separated by the gate valve 321.

[0020] A robot arm 310 is disposed in the vacuum transfer chamber 31. The interior of the vacuum transfer chamber 31 is maintained at a predetermined vacuum level. In this embodiment, the robot arm 310 removes an unprocessed substrate W from the load lock chamber 32, which has been depressurized to a predetermined vacuum level, and transfers it into one of the processing devices 40. The robot arm 310 also removes a processed substrate W from the processing device 40 and transfers it into another processing device 40 or the load lock chamber 32.

[0021] A robot arm 330 is provided within the atmospheric transfer chamber 33. The atmospheric transfer chamber 33 is also provided with a plurality of load ports 331 to which containers (e.g., FOUPs: Front Opening Unified Pods) capable of accommodating a plurality of unprocessed or processed substrates W are connected. The robot arm 330 removes the unprocessed substrate W from the container connected to the load port 331 and transfers it into the load lock chamber 32. The robot arm 330 also removes the processed substrate W from the load lock chamber 32 and transfers it into the container connected to the load port 331. The atmospheric transfer chamber 33 may be provided with an alignment unit that adjusts the orientation of the substrate W removed from the container connected to the load port 331.

[0022] Each part replacement device 50 has a robot arm and a movement mechanism for replacing consumable parts, and moves to the position of a processing device 40 having a consumable part that needs to be replaced in response to an instruction from the control device 20, and connects to that processing device 40. Each part storage device 60 has a plurality of unused consumable parts and a movement mechanism, and moves to the position of a part replacement device 50 connected to a processing device 40 having a consumable part that needs to be replaced in response to an instruction from the control device 20, and connects to that part replacement device 50. Each jig storage device 70 has a jig for replacing consumable parts and a movement mechanism, and moves to the position of a part replacement device 50 connected to a processing device 40 having a consumable part that needs to be replaced in response to an instruction from the control device 20, and connects to that part replacement device 50.

[0023] The robot arm of part replacement device 50 removes a jig for replacing consumable parts from jig storage device 70, uses the jig to remove used consumable parts from processing device 40, and stores the removed consumable parts in part storage device 60. Then, the robot arm of part replacement device 50 removes unused consumable parts from inside part storage device 60 and installs the removed consumable parts in processing device 40. In this way, used consumable parts are replaced with unused consumable parts in processing device 40.

[0024] In this way, in the manufacturing system 10 of this embodiment, the part replacement device 50 that replaces consumable parts and the part storage device 60 that stores a plurality of consumable parts move separately to the location of the processing device 40 that has the consumable parts that need to be replaced. This allows the part replacement device 50 and the part storage device 60 to be made smaller than a replacement station that includes the part replacement device 50 and the part storage device 60. This allows the width of the passage through which the part replacement device 50 and the part storage device 60 move to be narrower. This allows the installation area of ​​the entire manufacturing system 10 to be reduced.

[0025] [Configuration of processing device 40] 2 is a schematic cross-sectional view showing an example of a processing apparatus 40. In this embodiment, the processing apparatus 40 includes a chamber 41, a gas supply unit 44, an RF (Radio Frequency) power supply unit 45, and an exhaust system .

[0026] The chamber 41 has a support 42 and an upper electrode showerhead assembly 43. The support 42 is disposed in a lower region of a processing space 41s in the chamber 41. The upper electrode showerhead assembly 43 is disposed above the support 42 and can function as part of the top plate of the chamber 41.

[0027] The support part 42 is configured to support the substrate W in the processing space 41s. In this embodiment, the support part 42 includes a lower electrode 421 and an electrostatic chuck 422. The electrostatic chuck 422 is disposed on the lower electrode 421 and configured to support the substrate W on the upper surface of the electrostatic chuck 422. An edge ring 423 is provided on the upper surface of the peripheral edge of the lower electrode 421. The edge ring 423 is disposed on the upper surface of the peripheral edge of the lower electrode 421 so as to surround the electrostatic chuck 422 and the substrate W. The edge ring 423 is an example of a consumable part.

[0028] Through holes are formed in the bottom of the chamber 41, the lower electrode 421, and the electrostatic chuck 422 to allow the lift pins 47 to pass through. The lift pins 47 are raised and lowered by a drive unit 470 when the substrate W is loaded and unloaded. This allows the unprocessed substrate W loaded into the chamber 41 to be received from the robot arm 310 and placed on the electrostatic chuck 422, and the processed substrate W to be handed over to the robot arm 310 and unloaded from the chamber 41.

[0029] The upper electrode showerhead assembly 43 is configured to supply one or more gases from a gas supply unit 44 into the processing space 41s. In this embodiment, the upper electrode showerhead assembly 43 includes an electrode support unit 43d and an upper electrode 43e. The upper electrode 43e is fixed to the electrode support unit 43d with fixing members 43f such as screws. The electrode support unit 43d has a gas inlet 43a and a gas diffusion chamber 43b, and the gas supply unit 44 and the gas diffusion chamber 43b are in fluid communication with each other via the gas inlet 43a.

[0030] The electrode support 43d and the upper electrode 43e are formed with a plurality of gas outlets 43c, and the gas diffusion chamber 43b and the processing space 41s are in fluid communication with each other via the plurality of gas outlets 43c. In this embodiment, the upper electrode showerhead assembly 43 is configured to supply one or more gases from the gas inlet 43a into the processing space 41s via the gas diffusion chamber 43b and the plurality of gas outlets 43c.

[0031] The gas supply unit 44 includes multiple gas sources 440a-440c, multiple flow rate controllers 441a-441c, and multiple valves 442a-442c. The gas source 440a is, for example, a processing gas source, the gas source 440b is, for example, a cleaning gas source, and the gas source 440c is, for example, an inert gas source. In this embodiment, the inert gas is, for example, nitrogen gas. The flow rate controllers 441a-441c may include, for example, mass flow controllers or pressure-controlled flow rate controllers. The gas supply unit 44 may also include one or more flow rate modulation devices that modulate or pulse the flow rates of one or more processing gases.

[0032] The RF power supply 45 is configured to supply RF power, e.g., one or more RF signals, to one or more electrodes, such as the lower electrode 421, the upper electrode showerhead assembly 43, or both the lower electrode 421 and the upper electrode showerhead assembly 43. In this embodiment, the RF power supply 45 includes two RF generators 450a and 450b and two matching circuits 451a and 451b. The RF power supply 45 in this embodiment is configured to supply a first RF signal from the RF generator 450a to the lower electrode 421 via the matching circuit 451a. The RF spectrum encompasses a portion of the electromagnetic spectrum ranging from 3 Hz to 3000 GHz. For electronic material processes such as semiconductor processes, the frequency of the RF spectrum used for plasma generation is preferably within the range of 100 kHz to 3 GHz, more preferably 200 kHz to 150 MHz. For example, the frequency of the first RF signal may be within the range of 27 MHz to 100 MHz.

[0033] Furthermore, the RF power supply unit 45 in this embodiment is configured to supply a second RF signal from an RF generating unit 450b to the lower electrode 421 via a matching circuit 451b. For example, the frequency of the second RF signal may be within a range of 400 kHz to 13.56 MHz. Alternatively, the RF power supply unit 45 may have a DC (Direct Current) pulse generating unit instead of the RF generating unit 450b.

[0034] Furthermore, although not shown, other embodiments are contemplated herein. For example, in an alternative embodiment of the RF power supply 45, an RF generator may be configured to supply a first RF signal to the lower electrode 421, and another RF generator may be configured to supply a second RF signal to the lower electrode 421. Yet another RF generator may be configured to supply a third RF signal to the upper electrode showerhead assembly 43. Additionally, in another alternative embodiment, a DC voltage may be applied to the upper electrode showerhead assembly 43. Furthermore, in various embodiments, the amplitude of one or more RF signals (i.e., the first RF signal, the second RF signal, etc.) may be pulsed or modulated. Amplitude modulation may include pulsing the amplitude of an RF signal between an on state and an off state or between multiple different on states. Furthermore, phase matching of the RF signals may be controlled, and the phase matching of the amplitude modulation of multiple RF signals may be synchronized or asynchronous.

[0035] The exhaust system 46 is connected to, for example, an exhaust port 41e provided at the bottom of the chamber 41. The exhaust system 46 may include a pressure valve, a vacuum pump such as a turbomolecular pump, a roughing pump, or a combination thereof.

[0036] [Parts replacement device 50] FIG. 3 is a schematic cross-sectional view showing an example of a component replacement apparatus 50. FIG. 4 is a view showing an example of an AA cross-section of the component replacement apparatus 50 shown in FIG. 3. The component replacement apparatus 50 includes an upper container 510, a lower container 511, and a moving mechanism 56. The upper container 510 is provided with an opening 512a connected to the processing device 40 and a gate valve 513a for opening and closing the opening 512a. Furthermore, as shown in FIG. 4, the upper container 510 is provided with an opening 512b connected to the component accommodation device 60 and a gate valve 513a for opening and closing the opening 512b. Furthermore, the upper container 510 is provided with an opening 512c connected to the jig accommodation device 70 and a gate valve 513c for opening and closing the opening 512c. The opening 512a is an example of a first component transfer port, and the gate valve 513a is an example of a first gate valve. Moreover, the opening 512b is an example of a second component transfer port, and the gate valve 513b is an example of a second gate valve.

[0037] An operation robot 52a, an operation robot 52b, and a transport robot 53 are provided in the upper container 510. In the following, the operation robot 52a and the operation robot 52b will be collectively referred to as the operation robot 52 without distinguishing between them.

[0038] The operation robot 52a has an operation arm 520a, and the operation robot 52b has an operation arm 520b. End effectors are attached to the tips of the operation arms 520a and 520b. The operation robots 52a and 52b use the end effectors attached to the tips of the operation arms 520a and 520b to perform tasks such as sensing inside the processing device 40, removing consumable parts, and installing consumable parts.

[0039] The transfer robot 53 has a transfer arm 530. A holding member for holding consumable parts is attached to the tip of the transfer arm 530. The transfer robot 53 holds the consumable parts removed by the operation robot 52 using the holding member attached to the tip of the transfer arm 530. The transfer robot 53 then removes the held consumable parts from the processing device 40 and stores the removed consumable parts in the component storage device 60. The transfer robot 53 also removes unused consumable parts from the component storage device 60 using the holding member attached to the tip of the transfer arm 530. The transfer robot 53 then carries the unused consumable parts removed from the component storage device 60 into the processing device 40. The unused consumable parts carried into the processing device 40 are attached to the processing device 40 by end effectors attached to the tips of the operation arms 520a and 520b.

[0040] An exhaust device 554, a gas supply device 556, a communication unit 557, a control unit 558, and a memory unit 559 are provided inside the lower container 511. The communication unit 557 is, for example, a wireless communication circuit, and performs wireless communication with the control device 20, the component accommodation device 60, and the jig accommodation device 70. A sensor 551 is provided on the outer wall of the component replacement device 50. The sensor 551 senses the surroundings of the component replacement device 50 and outputs the sensing result to the control unit 558. In this embodiment, the sensor 551 is, for example, an image sensor, and outputs an image of the surroundings of the component replacement device 50 to the control unit 558. The sensor 551 is an example of a first sensor.

[0041] The exhaust device 554 is connected to the space inside the upper container 510 via a valve 552. The exhaust device 554 sucks gas inside the upper container 510 via the valve 552 and discharges the sucked gas to the outside of the component replacement apparatus 50. This makes it possible to reduce the pressure inside the upper container 510 to a predetermined vacuum level.

[0042] Furthermore, exhaust device 554 is connected to opening 512a via valve 553a and piping 550a. After component replacement device 50 and processing device 40 are connected, exhaust device 554 exhausts air from the connection portion between component replacement device 50 and processing device 40 via piping 550a and valve 553a. This allows the connection portion between component replacement device 50 and processing device 40 to be depressurized to a predetermined vacuum level before gate valve 513a is opened.

[0043] 5 and 6 are enlarged cross-sectional views showing an example of a connection portion between processing equipment 40 and part replacement equipment 50. A convex portion 410 is provided on the side surface of chamber 41 of processing equipment 40 that is connected to part replacement equipment 50. In addition, a concave portion 514 having a shape corresponding to convex portion 410 is provided on the side surface of part replacement equipment 50 that is connected to processing equipment 40. When processing equipment 40 and part replacement equipment 50 are connected, convex portion 410 and concave portion 514 fit together as shown in FIG. 6, for example, to support alignment of processing equipment 40 and part replacement equipment 50.

[0044] Furthermore, a sealing member 515 such as an O-ring is disposed on the side of the part replacement device 50 so as to surround the opening 512a. This increases the airtightness of the space 90 surrounded by the chamber 41, the gate valve 401, the opening 512a, and the gate valve 513a. After the processing device 40 and the part replacement device 50 are connected, gas in the space 90 is exhausted via the pipe 550a, thereby reducing the pressure in the space 90 to a predetermined vacuum level. This reduces the pressure in the space 90, further strengthening the connection between the processing device 40 and the part replacement device 50. When the processing device 40 and the part replacement device 50 are disconnected, the pressure in the space 90 is returned to atmospheric pressure by opening a valve (not shown) connected to the pipe 550a.

[0045] Returning to FIG. 4, the explanation will be continued. Exhaust device 554 is connected to opening 512b via valve 553b and piping 550b. After component replacement device 50 and component storage device 60 are connected, exhaust device 554 exhausts air from the connection portion between component replacement device 50 and component storage device 60 via piping 550b and valve 553b. This allows the connection portion between component replacement device 50 and component storage device 60 to be depressurized to a predetermined vacuum level before gate valve 513b is opened. Note that the connection portion between component replacement device 50 and component storage device 60 is also provided with recesses and protrusions as exemplified in FIGS. 5 and 6, and these recesses and protrusions support the alignment of component replacement device 50 and component storage device 60.

[0046] 4, for example. After the component replacement device 50 and the jig accommodating device 70 are connected, the exhaust device 554 exhausts air from the connection between the component replacement device 50 and the jig accommodating device 70 via the piping 550c and the valve 553c. This allows the connection between the component replacement device 50 and the jig accommodating device 70 to be depressurized to a predetermined level before the gate valve 513c is opened. Note that the connection between the component replacement device 50 and the jig accommodating device 70 is also provided with recesses and protrusions, as exemplified in FIGS. 5 and 6, which support the alignment of the component replacement device 50 and the jig accommodating device 70.

[0047] A gas supply device 556 is connected to the upper container 510 via a valve 555. The gas supply device 556 supplies an inert gas, such as nitrogen gas, into the upper container 510 via the valve 555. A control unit 558 controls the valve 555 to supply gas into the upper container 510, thereby maintaining the pressure inside the upper container 510 at a pressure higher than the pressure inside the processing device 40. This makes it possible to prevent particles inside the processing device 40 from entering the upper container 510. The valve 555 is an example of a pressure adjustment mechanism.

[0048] The inert gas may be supplied to a connection portion between part replacement device 50 and processing device 40. This generates a gas flow from the connection portion between part replacement device 50 and processing device 40 into processing device 40, and a gas flow from the connection portion between part replacement device 50 and processing device 40 into part replacement device 50. This makes it possible to suppress the intrusion of particles in processing device 40 into upper container 510, and also to suppress the intrusion of particles in upper container 510 into processing device 40. Opening and closing of valve 552, valves 553a to 553c, and valve 555 is controlled by control unit 558.

[0049] The storage unit 559 is a ROM (Read Only Memory), HDD (Hard Disk Drive), SSD (Solid State Drive), or the like, and stores data, programs, and the like used by the control unit 558. The control unit 558 is a processor, for example, a CPU (Central Processing Unit) or a DSP (Digital Signal Processor), and controls each unit of the part replacement device 50 by reading and executing the programs in the storage unit 559.

[0050] The control unit 558 controls the movement mechanism 56 using, for example, the sensing result by the sensor 551, thereby moving the part replacement device 50 to the position of the processing device 40 instructed by the control device 20. The control unit 558 is an example of a first control unit, and the movement mechanism 56 is an example of a first movement mechanism.

[0051] The moving mechanism 56 has a main body 560 and wheels 561. A power source such as a battery, a power source, a steering mechanism, and the like are provided inside the main body 560. The wheels 561 are rotated by the power source inside the main body 560, and move the part replacement device 50 in a direction controlled by the steering mechanism inside the main body 560. Note that the moving mechanism 56 may move the part replacement device 50 by a method other than the wheels 561, such as a walking type, as long as it can move the part replacement device 50.

[0052] [Parts storage device 60] FIG. 7 is a schematic cross-sectional view showing an example of the component storage device 60. The component storage device 60 includes an upper container 610, a lower container 611, and a moving mechanism 66. The upper container 610 includes an opening 612 connected to the component replacement device 50 and a gate valve 613 for opening and closing the opening 612. A stage 63 and a driving unit 64 are provided inside the upper container 610. A cassette 62 is placed on the stage 63, and the cassette 62 contains a plurality of unused consumable parts 80 arranged vertically. The cassette 62 includes a space for storing at least one used consumable part 80. In this embodiment, the cassette 62 stores a plurality of types of consumable parts 80. The consumable parts 80 include, for example, an edge ring 423 and an upper electrode 43e.

[0053] The stage 63 is raised and lowered by a drive unit 64. This allows the transfer robot 53 in the component exchange device 50 connected to the component storage device 60 to remove unused consumable parts 80 from the cassette 62 through the opening 612 and store used consumable parts 80 in the cassette 62. When all the consumable parts 80 in the cassette 62 have become used consumable parts 80, the cassette 62 as a whole is replaced with a cassette 62 storing unused consumable parts 80.

[0054] The lower container 611 is provided with an exhaust device 652, a gas supply device 654, a communication unit 655, a control unit 656, and a memory unit 657. The communication unit 655 is, for example, a wireless communication circuit, and performs wireless communication with the control device 20 and the component replacement device 50. A sensor 650 is provided on the outer wall of the component storage device 60. The sensor 650 senses the surroundings of the component storage device 60 and outputs the sensing result to the control unit 656. In this embodiment, the sensor 650 is, for example, an image sensor, and outputs an image of the surroundings of the component storage device 60 to the control unit 656. The sensor 650 is an example of a second sensor.

[0055] The exhaust device 652 is connected to the space inside the upper container 610 via a valve 651. The exhaust device 652 sucks gas inside the upper container 610 via the valve 651 and exhausts the sucked gas to the outside of the component accommodation device 60. This allows the pressure inside the upper container 610 to be reduced to a predetermined vacuum level.

[0056] The gas supply device 654 is connected to the upper container 610 via a valve 653. The gas supply device 654 supplies an inert gas, such as nitrogen gas, into the upper container 610 via the valve 653. By supplying gas into the upper container 610, the pressure inside the upper container 610 can be maintained at a pressure higher than the pressure inside the upper container 510 of the component replacement device 50. This makes it possible to prevent particles inside the upper container 510 of the component replacement device 50 from entering the upper container 610.

[0057] The inert gas may be supplied to a connection portion between the component storage device 60 and the component replacement device 50. This generates a gas flow from the connection portion between the component storage device 60 and the component replacement device 50 into the upper container 610, and a gas flow from the connection portion between the component storage device 60 and the component replacement device 50 into the upper container 510. This makes it possible to suppress intrusion of particles in the component replacement device 50 into the upper container 610, and also to suppress intrusion of particles in the upper container 610 into the upper container 510. Opening and closing of the valves 651 and 653 is controlled by a control unit 656.

[0058] The storage unit 657 is a ROM, HDD, SSD, or the like, and stores data, programs, and the like used by the control unit 656. The control unit 656 is a processor, for example, a CPU, a DSP, or the like, and controls each unit of the component storage device 60 by reading and executing the programs in the storage unit 657.

[0059] The control unit 656 controls the moving mechanism 66 using, for example, the sensing result by the sensor 650, thereby moving the component storage device 60 to the position of the component exchange device 50 connected to the processing device 40 instructed by the control device 20. The control unit 656 is an example of a second control unit, and the moving mechanism 66 is an example of a second moving mechanism.

[0060] The moving mechanism 66 has a main body 660 and wheels 661. A power source such as a battery, a power source, a steering mechanism, etc. are provided inside the main body 660. The wheels 661 are rotated by the power source inside the main body 660, and move the component storage device 60 in a direction controlled by the steering mechanism inside the main body 660. Note that the moving mechanism 66 may move the component storage device 60 by a method other than the wheels 661, such as a walking type, as long as it can move the component storage device 60.

[0061] [Jig storage device 70] 8 is a schematic cross-sectional view showing an example of a jig accommodating device 70. The jig accommodating device 70 has an upper container 710, a lower container 711, and a movement mechanism 76. The upper container 710 is provided with an opening 712 connected to the part replacement device 50 and a gate valve 713 that opens and closes the opening 712. A stage 73 and a drive unit 74 are provided inside the upper container 710. A cassette 72 is placed on the stage 73, and the cassette 72 contains a plurality of end effectors 81 and a plurality of holding members 82 arranged vertically.

[0062] The stage 73 is raised and lowered by a drive unit 74. This allows the operation robot 52 in the part exchange device 50 connected to the jig accommodation device 70 to attach the end effector 81 in the cassette 72 to the tip of the operation arm 520a through the opening 712. Also, the transport robot 53 can attach the holding member 82 in the cassette 72 to the tip of the transport arm 530 through the opening 712.

[0063] An exhaust device 752, a gas supply device 754, a communication unit 755, a control unit 756, and a storage unit 757 are provided inside the lower container 711. The communication unit 755 is, for example, a wireless communication circuit, and performs wireless communication with the control device 20 and the part replacement device 50. A sensor 750 is provided on the outer wall of the jig accommodating device 70. The sensor 750 senses the surroundings of the jig accommodating device 70 and outputs the sensing result to the control unit 756. In this embodiment, the sensor 750 is, for example, an image sensor, and outputs an image of the surroundings of the jig accommodating device 70 to the control unit 756.

[0064] The exhaust device 752 is connected to the space inside the upper container 710 via a valve 751. The exhaust device 752 sucks gas inside the upper container 710 via the valve 751 and discharges the sucked gas to the outside of the jig accommodating device 70. This makes it possible to reduce the pressure inside the upper container 710 to a predetermined vacuum level.

[0065] The gas supply device 754 is connected to the upper container 710 via a valve 753. The gas supply device 754 supplies an inert gas, such as nitrogen gas, into the upper container 710 via the valve 753. By supplying gas into the upper container 710, the pressure inside the upper container 710 can be maintained at a pressure higher than the pressure inside the upper container 510 of the component replacement device 50. This makes it possible to prevent particles inside the upper container 510 from entering the upper container 710.

[0066] The inert gas may be supplied to a connection portion between the jig accommodating device 70 and the component replacement device 50. This generates a gas flow from the connection portion between the jig accommodating device 70 and the component replacement device 50 into the upper container 710, and a gas flow from the connection portion between the jig accommodating device 70 and the component replacement device 50 into the upper container 510. This makes it possible to suppress the intrusion of particles in the component replacement device 50 into the upper container 710, and also to suppress the intrusion of particles in the upper container 710 into the upper container 510. The opening and closing of the valves 751 and 753 is controlled by a control unit 756.

[0067] The storage unit 757 is a ROM, HDD, SSD, or the like, and stores data, programs, and the like used by the control unit 756. The control unit 756 is a processor, for example, a CPU, a DSP, or the like, and controls each part of the jig accommodating device 70 by reading and executing the programs in the storage unit 757.

[0068] The control unit 756 controls the moving mechanism 76 using, for example, the sensing results from the sensor 750, thereby moving the jig accommodation device 70 to the position of the part replacement device 50 connected to the processing device 40 instructed by the control device 20.

[0069] The moving mechanism 76 has a main body 760 and wheels 761. A power source such as a battery, a power source, a steering mechanism, and the like are provided inside the main body 760. The wheels 761 rotate using the power source inside the main body 760, and move the jig accommodating device 70 in a direction controlled by the steering mechanism inside the main body 760. Note that the moving mechanism 76 may move the jig accommodating device 70 by a method other than the wheels 761, such as a walking type, as long as it can move the jig accommodating device 70.

[0070] [Consumable part 80 replacement procedure] Next, the procedure for replacing the consumable part 80 will be described with reference to FIGS.

[0071] First, the part replacement device 50, the part storage device 60, and the jig storage device 70 move to the position of the processing device 40 that has the consumable part 80 to be replaced in response to instructions from the control device 20. Then, the part replacement device 50 connects to the processing device 40 that has the consumable part 80 to be replaced, and the part storage device 60 and the jig storage device 70 connect to the part replacement device 50. Then, the processing device 40, the part replacement device 50, the part storage device 60, and the jig storage device 70 each adjust their internal pressure and open their gate valves.

[0072] 9, for example, a sensing end effector 81 is attached to the tip of the operation arm 520a of the operation robot 52a and the tip of the operation arm 520b of the operation robot 52b. The sensing end effector 81 is, for example, an image sensor or a distance sensor. Used consumable parts 80 (edge ​​ring 423 in the example of FIG. 9) are attached inside the processing device 40, and unused consumable parts 80 (edge ​​ring 423' in the example of FIG. 9) are stored inside the cassette 62 of the component storage device 60.

[0073] Next, as shown in FIG. 10 , the operation robots 52a and 52b use end effectors 81, such as image sensors, to sense the used edge ring 423 in the processing device 40. The sensing results are output to a control unit 558 in the part replacement device 50. Based on the sensing results, the control unit 558 determines whether the operation robots 52a and 52b can replace the edge ring 423. If it is determined that the operation robots 52a and 52b cannot replace the edge ring 423, the control unit 558 notifies an operator of the manufacturing system 10 or the like of the determination. For example, if a large amount of reaction by-products (so-called deposits) is attached to the edge ring 423 or the edge ring 423 is deformed, the control unit 558 determines that the operation robots 52a and 52b cannot replace the edge ring 423. The control unit 558 is an example of a determination unit.

[0074] 11, for example, end effectors 81 for removing the edge ring 423 are attached to the tips of operation arms 520a and 520b. Also, a holding member 82 for holding the edge ring 423 is attached to the tip of transfer arm 530 of transfer robot 53.

[0075] Next, as shown in Fig. 12, for example, the tips of operating arms 520a and 520b enter processing apparatus 40, and operating arms 520a and 520b remove edge ring 423 from processing apparatus 40. When edge ring 423 is removed, as shown in Fig. 13, for example, edge ring 423 is sandwiched between end effector 81 at the tip of operating arm 520a and end effector 81 at the tip of operating arm 520b. Then, operating arms 520a and 520b rise, thereby lifting edge ring 423 and removing edge ring 423 from lower electrode 421.

[0076] 14, for example, holding member 82 attached to the tip of transfer arm 530 is inserted between lifted edge ring 423 and lower electrode 421. Then, operation arms 520a and 520b are lowered to place edge ring 423 on holding member 82. Then, as shown in FIG. 15, for example, end effectors 81 at the tips of operation arms 520a and 520b are separated from edge ring 423.

[0077] Next, the transfer robot 53 places the used edge ring 423 on the holding member 82 into the cassette 62 of the component storage device 60, as shown in FIG. 16 , for example. The transfer robot 53 then removes the unused edge ring 423′ from the cassette 62 and loads it into the processing device 40, as shown in FIG. 17 , for example. Before the unused edge ring 423′ is removed from the cassette 62, the end effectors 81 at the tips of the operation arms 520a and 520b and the holding member 82 at the tip of the transfer arm 530 may be cleaned. This prevents deposits and other particles peeled off from the used edge ring 423 from adhering to the unused edge ring 423 via the end effector 81 or the holding member 82. Cleaning can be performed, for example, by gas purging using an inert gas.

[0078] Then, the edge ring 423 is sandwiched between the end effector 81 at the tip of the operation arm 520a and the end effector 81 at the tip of the operation arm 520b. Then, the operation arms 520a and 520b are raised, whereby the edge ring 423 is lifted from the holding member 82 at the tip of the transfer arm 530. Then, the holding member 82 is retracted from between the lifted edge ring 423′ and the lower electrode 421, and the operation arms 520a and 520b are lowered, whereby the edge ring 423 is attached to the lower electrode 421.

[0079] 18, for example, end effector 81 at the tip of operating arm 520a and end effector 81 at the tip of operating arm 520b are moved away from edge ring 423. Then, end effector 81 and holding member 82 are returned into cassette 72. Then, the gate valves of processing device 40, component replacement device 50, component storage device 60, and jig storage device 70 are closed. Then, the connections between processing device 40 and component replacement device 50, between component replacement device 50 and component storage device 60, and between component replacement device 50 and jig storage device 70 are respectively released.

[0080] When the upper electrode 43e is replaced as the consumable part 80, first, a holding member 82 attached to the tip of the transfer arm 530 is inserted below the upper electrode 43e. Then, the transfer arm 530 is raised, so that the holding member 82 comes into contact with the underside of the upper electrode 43e. Then, the fixing members 43f, such as screws, are removed by the end effectors 81 attached to the tips of the operation arms 520a and 520b. As a result, the upper electrode 43e is carried out of the processing device 40 by the transfer arm 530 via the holding member 82 and then accommodated in the component accommodation device 60.

[0081] Then, the unused upper electrode 43e is carried out from the component storage device 60 and carried into the processing device 40, and is transported to a position below the electrode support part 43d. Then, the fixing member 43f is attached by the end effector 81 attached to the tip of the operation arm 520a and the operation arm 520b, thereby fixing the upper electrode 43e to the electrode support part 43d. In this manner, the upper electrode 43e is replaced.

[0082] [Configuration of control device 20] 19 is a block diagram showing an example of the control device 20. The control device 20 includes a storage unit 21, a control unit 22, a wireless communication unit 23, and a wired communication unit 24. The wireless communication unit 23 is, for example, a wireless communication circuit, and performs wireless communication with each of the component replacement device 50, the component accommodation device 60, and the jig accommodation device 70 via an antenna 25. The wired communication unit 24 is, for example, a network interface card (NIC) or the like, and communicates with each of the processing groups 30. The control device 20 may also perform wireless communication with each of the processing groups 30.

[0083] The storage unit 21 is a ROM, HDD, SSD, or the like, and stores data, programs, and the like used by the control unit 22. The storage unit 21 stores a management table 210, for example, as shown in FIG.

[0084] FIG. 20 is a diagram showing an example of the management table 210. The management table 210 stores an individual table 212 for each processing device ID 211 that identifies each processing device 40. The individual table 212 stores a part ID, replacement date and time, RF cumulative time, and the next replacement time. The part ID is information that identifies each consumable part 80. The replacement date and time is the date and time when the consumable part 80 was replaced. The RF cumulative time is information that indicates the cumulative time of processing performed in the processing device 40 using an RF signal. The next replacement time is the date and time when the consumable part 80 will next be replaced.

[0085] The control unit 22 is a processor such as a CPU or a DSP, and controls the entire control device 20 by reading and executing the programs in the storage unit 21.

[0086] [Processing of the control device 20] 21 and 22 are flowcharts showing an example of the processing of the control device 20. FIG. 21 illustrates an example of the processing of the control device 20 when selecting the component replacement device 50, component storage device 60, and 70 to be moved to the position of the processing device 40 having the consumable part 80 to be replaced. FIG. 22 illustrates an example of the processing of the control device 20 after the component replacement device 50, component storage device 60, and 70 have been moved to the position of the processing device 40 to replace the consumable part 80. The processing illustrated in FIGS. 21 and 22 is realized by the control unit 22 of the control device 20 executing a program read from the storage unit 21. Note that FIG. 22 illustrates an example of the processing between the control device 20 and one processing device 40 and one component replacement device 50.

[0087] 21, first, the control unit 22 determines whether there is a consumable part 80 whose replacement time will arrive within a predetermined time from the current time (S100). The control unit 22 determines whether there is a consumable part 80 whose replacement time will arrive within a predetermined time from the current time, for example, by referring to the "next replacement time" column in the management table 210. If there is no consumable part 80 whose replacement time will arrive within a predetermined time from the current time (S100: No), the control unit 22 executes the process shown in step S100 again.

[0088] On the other hand, if there is a consumable part 80 whose replacement time will arrive within a predetermined time from the current time (S100), the control unit 22 identifies the component replacement devices 50, component storage devices 60, and jig storage devices 70 to which replacement work has not been assigned. Then, the control unit 22 instructs the identified component replacement devices 50, component storage devices 60, and jig storage devices 70 to move to the position of the processing device 40 that has the consumable part 80 whose replacement time will arrive within the predetermined time (S101). Then, the control unit 22 again executes the process shown in step S100.

[0089] 22, first, the control unit 22 determines whether or not a process using RF power has been executed in the processing device 40 (S200). If a process using RF power has not been executed (S200: No), the control unit 22 executes the process shown in step S200 again.

[0090] On the other hand, if processing using RF power has been performed (S200: Yes), the control unit 22 updates all "RF accumulated time" in the individual table 212 in the management table 210 that corresponds to the processing device ID 211 of the processing device 40 that performed the processing using RF power. Then, the control unit 22 estimates the "next replacement time" for all consumable parts 80 in the individual table 212 whose "RF accumulated time" has been updated, and updates the "next replacement time" for all consumable parts 80 in the individual table 212 with the estimated "next replacement time" (S201). As a result, the "next replacement time" for each consumable part 80 is updated according to the actual processing time using RF power.

[0091] Next, the control unit 22 determines whether or not the processing of the last lot before the replacement time of the consumable part 80 has been completed based on the updated "next replacement time" (S202). If the processing device 40 has not completed the processing of the last lot before the replacement time of the consumable part 80 (S202: No), the control unit 22 executes the processing shown in step S200 again.

[0092] On the other hand, when the processing of the last lot before the replacement time of the consumable part 80 has been completed in the processing device 40 (S202: Yes), the control unit 22 instructs the processing device 40 to prepare for replacement of the consumable part 80 (S203). In preparation for replacement of the consumable part 80, processes such as exhausting the processing gas in the chamber 41, cleaning the chamber 41, and adjusting the pressure in the chamber 41 are performed.

[0093] Next, the control unit 22 determines whether or not a connection notification has been received from the part replacement device 50 (S204). Note that the part replacement device 50 has started to move to the position of the processing device 40 that has the consumable part 80 to be replaced, by the process exemplified in Fig. 21. If a connection notification has not been received from the part replacement device 50 (S204: No), the control unit 22 executes the process shown in step S204 again.

[0094] On the other hand, when a connection notification is received from the part replacement device 50 (S204: Yes), the control unit 22 instructs the part replacement device 50 to exhaust gas from the space 90 at the connection portion between the processing device 40 and the part replacement device 50 (S205). The control unit 558 of the part replacement device 50 controls the valve 553a and the exhaust device 554a to exhaust gas from the space 90 at the connection portion between the processing device 40 and the part replacement device 50.

[0095] Next, the control unit 22 determines whether the pressure P inside the processing device 40 has reached a predetermined pressure P1 based on the measurement value of the sensor included in the processing device 4 (S206). If the pressure P inside the processing device 40 has not reached the pressure P1 (S206: No), the control unit 22 executes the process shown in step S206 again.

[0096] When the pressure P in the processing device 40 reaches the pressure P1 (S206: Yes), the control unit 22 transmits a gate open request to the part replacement device 50 to request that the gate valve 513a be opened (S207). Then, the control unit 22 determines whether or not a gate open notification indicating that the opening of the gate valve 513a has been completed has been received from the part replacement device 50 (S208). When the gate open notification has not been received (S208: No), the control unit 22 executes the process shown in step S208 again.

[0097] On the other hand, if the gate open notification is received (S208: Yes), the control unit 22 controls the processing device 40 to open the gate valve 401 (S209). Then, the control unit 22 transmits a replacement start instruction to the part replacement device 50 to start replacing the consumable part 80 (S210).

[0098] After the replacement start instruction is transmitted in step S210, the part replacement device 50 starts replacing the consumable part 80. At this time, the control unit 22 may control the processing device 40 to clean the inside of the chamber 41 during the period from when the used consumable part 80 is carried out until when the unused consumable part 80 is carried in. This allows deposits and the like that have fallen off the consumable part 80 and fallen into the chamber 41 when the used consumable part 80 is carried out to be removed before the unused consumable part 80 is carried in.

[0099] Next, the control unit 22 determines whether or not a replacement completion notification indicating that replacement of the consumable part 80 has been completed has been received from the part replacement device 50 (S211). If a replacement completion notification has not been received from the part replacement device 50 (S211: No), the control unit 22 executes the process shown in step S211 again.

[0100] On the other hand, if a replacement completion notification is received from the part replacement apparatus 50 (S211: Yes), the control unit 22 controls the processing apparatus 40 to close the gate valve 401 (S212). Then, the control unit 22 transmits a replacement confirmation notification to the part replacement apparatus 50 (S213). Then, the control unit 22 instructs the part replacement apparatus 50 to stop exhausting the gas within the space 90 at the connection portion between the processing apparatus 40 and the part replacement apparatus 50 (S214). The control unit 558 of the part replacement apparatus 50 controls the valve 553a and the exhaust device 554a to stop exhausting the gas within the space 90 at the connection portion between the processing apparatus 40 and the part replacement apparatus 50, and returns the pressure within the space 90 to atmospheric pressure.

[0101] Next, the control unit 22 deletes the record including the "part ID" of the replaced used consumable part 80 from the individual table 212 in the management table 210. Then, the control unit 22 creates a new record including the "part ID" of the used consumable part 80 and the unusable consumable part 80 that has been replaced in the management table 210 (S215). In the newly created record, the current date and time is registered in the "replacement date and time" field, and 0 is registered in the "RF accumulated time" field.

[0102] Then, the control unit 22 estimates the replacement time of the replaced consumable part 80 before use, and registers the estimated replacement time in the "next RF accumulated time" of the newly created record (S216).Then, the control unit 22 executes the process shown in step S200 again.

[0103] [Processing of the part replacement device 50] 23 and 24 are flowcharts showing an example of the processing of the part replacement device 50. For example, when the part replacement device 50 is instructed by the control device 20 to move to the location of the processing device 40 having the consumable part 80 to be replaced and starts moving to the location of the processing device 40, the part replacement device 50 starts the processing illustrated in Fig. 23 and 24. The processing illustrated in Fig. 23 and 24 is realized by the control unit 558 executing a program read from the storage unit 559.

[0104] First, the control unit 558 controls the valve 552 and the exhaust device 554 to start exhausting the gas inside the upper container 510, thereby starting adjustment of the pressure inside the upper container 510 (S300). Then, the control unit 558 determines whether the component replacement device 50 is connected to the processing device 40 based on the sensing result of the sensor 551 (S301). If the component replacement device 50 is not connected to the processing device 40 (S301: No), the control unit 558 executes the process shown in step S301 again.

[0105] On the other hand, if the component replacement device 50 is connected to the processing device 40 (S301: Yes), the control unit 558 determines whether the component replacement device 50 is connected to the component accommodation device 60 and the jig accommodation device 70 (S302). The control unit 558 determines whether the component replacement device 50 is connected to the component accommodation device 60 and the jig accommodation device 70, for example, by determining whether a connection notification indicating that the component replacement device 50 is connected to the component accommodation device 60 and the jig accommodation device 70 has been received from the component accommodation device 60 and the jig accommodation device 70. If the component replacement device 50 is not connected to the component accommodation device 60 and the jig accommodation device 70 (S302: No), the control unit 558 executes the process shown in step S302 again.

[0106] On the other hand, when the component replacement device 50 is connected to the component accommodation device 60 and the jig accommodation device 70 (S302: Yes), the control unit 558 controls the valve 555 and the gas supply device 556 to supply inert gas into the upper container 510. Then, the control unit 558 determines whether the pressure P in the upper container 510 has reached a predetermined pressure P2 (S303). In this embodiment, the pressure P2 is higher than the pressure P1 in the processing device 40, which is adjusted when replacing the consumable part 80. When the pressure P in the upper container 510 has not reached the pressure P2 (S303: No), the control unit 558 executes the process shown in step S303 again.

[0107] On the other hand, if the pressure P in the upper container 510 reaches pressure P2 (S303: Yes), the control unit 558 opens the gate valve 513b between the upper container 510 and the component accommodation device 60 and the gate valve 513c between the upper container 510 and the jig accommodation device 70 (S304). Then, the control unit 558 controls the operation robot 52a and the operation robot 52b to insert the tips of the operation arms 520a and 520b into the cassette 72 of the jig accommodation device 70. Then, the control unit 558 attaches the end effectors 81 for sensing to the tips of the operation arms 520a and 520b (S305). Then, the control unit 558 transmits a connection notification to the control device 20 via the communication unit 557, indicating that the component replacement device 50 has been connected to the processing device 40 (S306).

[0108] Next, the control unit 558 determines whether or not a gate open request has been received from the control device 20 via the communication unit 557 (S307). If a gate open request has not been received (S307: No), the control unit 558 executes the process shown in step S307 again. On the other hand, if a gate open request has been received (S307: Yes), the control unit 558 opens the gate valve 513a between the part replacement device 50 and the processing device 40 (S308).

[0109] Next, the control unit 558 determines whether or not a replacement start instruction has been received from the control device 20 via the communication unit 557 (S309). If the replacement start instruction has not been received (S309: No), the control unit 558 executes the process shown in step S309 again. On the other hand, if the replacement start instruction has been received (S309: Yes), the control unit 558 controls the operation arms 520a and 520b, each having a sensing end effector 81 attached to its tip, to sense the inside of the processing device 40 (S310). In step S309, the control unit 558 acquires information indicating the state of the consumable parts 80 in the processing device 40, aligns (teaches) a reference position in the part replacement device 50 with a reference position in the processing device 40, and performs other operations.

[0110] Next, the control unit 558 determines whether or not the replacement of the consumable part 80 instructed by the control device 20 is possible based on the sensing result in step S309 (S311). If it is determined that the replacement of the consumable part 80 is not possible because a large amount of deposits are attached to the consumable part 80 or the consumable part 80 is deformed (S311: No), the control unit 558 notifies the control device 20 of an error via the communication unit 557 (S312). Then, the processing shown in this flowchart ends. Note that if an error is notified, the control device 20 notifies the operator of the manufacturing system 10 of the error. The operator instructs a worker to manually replace the consumable part 80. Note that if an error is notified from the control device 20, the operator may obtain sensing results from the part replacement device 50. Then, the operator may use the sensing results to remotely control the operation robot 52a, the operation robot 52b, and the transport robot 53 to perform the replacement work of the consumable part 80.

[0111] On the other hand, if it is determined that the consumable part 80 can be replaced (S311: Yes), the control unit 558 controls the operation robot 52a and the operation robot 52b to remove the sensing end effector 81 from the tip of the operation arm 520a and the operation arm 520b. Then, the control unit 558 attaches the end effector 81 for attaching and detaching the consumable part 80 to the tip of the operation arm 520a and the operation arm 520b (S312 in FIG. 24). Then, the control unit 558 controls the transfer robot 53 to attach the holding member 82 to the tip of the transfer arm 530 (S313).

[0112] Next, the control unit 558 inserts the tips of the operating arms 520a and 520b into the processing device 40, and controls the operating arms 520a and 520b, which have end effectors 81 attached to their tips, to remove the used consumable parts 80 (S313).

[0113] Next, the control unit 558 controls the transfer robot 53 to insert the holding member 82 at the tip of the transfer arm 530 under the consumable part 80 removed by the operation arms 520a and 520b. Then, the control unit 558 controls the operation robots 52a and 52b to have the holding member 82 hold the removed consumable part 80. Then, the control unit 558 controls the transfer robot 53 to remove the used consumable part 80 from the processing device 40 (S315). Then, the control unit 558 controls the transfer robot 53 to store the used consumable part 80 in the cassette 62 of the part storage device 60.

[0114] Next, the control unit 558 controls the transfer robot 53 to remove the unused consumable part 80 from the cassette 62 of the component storage device 60 and carry it into the processing device 40 (S316). Then, the control unit 558 controls the operation robots 52a and 52b to lift the unused consumable part 80 held by the holding member 82. Then, the control unit 558 controls the transfer robot 53 to retract the transfer arm 530 from the processing device 40. Then, the control unit 558 controls the operation robots 52a and 52b to attach the unused consumable part 80 (S317). Then, the control unit 558 controls the operation robots 52a and 52b to retract the operation arms 520a and 520b from the processing device 40.

[0115] Next, the control unit 558 closes the gate valves 513a, 513b, and 513c (S318). Then, the control unit 558 controls the valve 552 and the exhaust device 554 to stop exhausting the gas from the upper container 510, and controls the valve 555 and the gas supply device 556 to stop supplying the inert gas into the upper container 510. The control unit 558 also controls the valves 553a, 553b, and 553c to stop exhausting the gas from the connection portion with the component replacement device 50. Then, the control unit 558 transmits a replacement completion notice indicating that the replacement of the consumable part 80 has been completed to the control device 20, the component accommodation device 60, and the jig accommodation device 70 via the communication unit 557 (S319). Then, the processing shown in this flowchart ends.

[0116] [Processing of component storage device 60] Fig. 25 is a flowchart showing an example of the processing of the component storage device 60. For example, when the component storage device 60 receives an instruction from the control device 20 to move to the position of the processing device 40 having the consumable part 80 to be replaced and starts moving to the position of the processing device 40, the component storage device 60 starts the processing illustrated in Fig. 25. The processing illustrated in Fig. 25 is realized by the control unit 656 executing a program read from the memory unit 657.

[0117] First, the control unit 656 controls the valve 651 and the exhaust device 652 to start exhausting the gas inside the upper container 610, thereby starting adjustment of the pressure inside the upper container 610 (S400). Then, the control unit 656 determines whether the component accommodation device 60 is connected to the component replacement device 50 based on the sensing result of the sensor 650 (S401). If the component accommodation device 60 is not connected to the component replacement device 50 (S401: No), the control unit 656 executes the process shown in step S401 again.

[0118] On the other hand, if the component accommodation device 60 is connected to the component replacement device 50 (S401: Yes), the control unit 656 transmits a connection notification to the component replacement device 50 indicating that the component accommodation device 60 has been connected to the component replacement device 50 (S402). Then, the control unit 656 controls the valve 653 and the gas supply device 654 to supply an inert gas into the upper container 610. Then, the control unit 656 determines whether the pressure P in the upper container 610 has reached a predetermined pressure P3 (S403). In this embodiment, the pressure P3 is higher than the pressure P2 in the component replacement device 50, which is adjusted when replacing the consumable part 80. If the pressure P in the upper container 610 has not reached the pressure P3 (S403: No), the control unit 656 executes the process shown in step S403 again.

[0119] On the other hand, when the pressure P in the upper container 610 reaches pressure P3 (S403: Yes), the control unit 656 opens the gate valve 613 (S404). Then, the control unit 656 controls the drive unit 64 to move the cassette 62 up and down in accordance with the transfer robot 53 of the part replacement device 50 carrying in used consumable parts 80 and carrying out unused consumable parts 80 (S405).

[0120] Next, the control unit 656 determines whether or not a replacement completion notification has been received from the part replacement apparatus 50 via the communication unit 655 (S406). If the replacement completion notification has not been received (S406: No), the control unit 656 executes the process shown in step S405 again. On the other hand, if the replacement completion notification has been received (S406: Yes), the control unit 656 closes the gate valve 613 (S406). Then, the control unit 656 controls the valve 651 and the exhaust device 652 to stop exhausting the gas inside the upper container 610, and controls the valve 653 and the gas supply device 654 to stop supplying the inert gas into the upper container 610. Then, the process shown in this flowchart ends.

[0121] [Processing of the jig accommodating device 70] The processing of the jig accommodating device 70 can be explained using Figure 25, and therefore will be explained with reference to Figure 25. For example, when the jig accommodating device 70 is instructed by the control device 20 to move to the position of the processing device 40 that has the consumable part 80 to be replaced and starts moving to the position of the processing device 40, the jig accommodating device 70 starts the processing illustrated in Figure 25. The processing illustrated in Figure 25 is realized by the control unit 756 executing a program read from the storage unit 757.

[0122] First, the control unit 756 controls the valve 751 and the exhaust device 752 to start exhausting the gas inside the upper container 710, thereby starting adjustment of the pressure inside the upper container 710 (S400). Then, the control unit 756 determines whether the jig accommodating device 70 is connected to the component replacement device 50 based on the sensing result of the sensor 750 (S401). If the jig accommodating device 70 is not connected to the component replacement device 50 (S401: No), the control unit 756 executes the process shown in step S401 again.

[0123] On the other hand, if the jig accommodating device 70 is connected to the component replacement device 50 (S401: Yes), the control unit 756 transmits a connection notification indicating that the jig accommodating device 70 is connected to the component replacement device 50 to the component replacement device 50 (S402). Then, the control unit 756 controls the valve 753 and the gas supply device 754 to supply an inert gas into the upper container 710. Then, the control unit 756 determines whether the pressure P in the upper container 710 has reached a predetermined pressure P3 (S403). If the pressure P in the upper container 710 has not reached the pressure P3 (S403: No), the control unit 756 executes the process shown in step S403 again.

[0124] On the other hand, when the pressure P in the upper vessel 710 reaches pressure P3 (S403: Yes), the control unit 756 opens the gate valve 713 (S404). Then, the control unit 756 controls the driving unit 74 in accordance with the insertion and removal of the end effector 81 and the holding member 82 by the transfer robot 53 of the part replacement device 50, thereby raising and lowering the cassette 72 (S405).

[0125] Next, the control unit 756 determines whether or not a replacement completion notice has been received from the part replacement apparatus 50 via the communication unit 755 (S406). If the replacement completion notice has not been received (S406: No), the control unit 756 executes the process shown in step S405 again. On the other hand, if the replacement completion notice has been received (S406: Yes), the control unit 756 closes the gate valve 713 (S406). Then, the control unit 756 controls the valve 751 and the exhaust device 752 to stop exhausting the gas inside the upper container 710, and controls the valve 753 and the gas supply device 754 to stop supplying the inert gas into the upper container 710. Then, the process shown in this flowchart ends.

[0126] One embodiment has been described above. As described above, this embodiment relates to a manufacturing system 10 that replaces consumable parts 80 and includes a component replacement device 50 and a component storage device 60. The component storage device 60 stores unused consumable parts 80. The component replacement device 50 is connected to a processing device 40 and the component storage device 60, and replaces used consumable parts 80 installed in the processing device 40 with unused consumable parts 80 stored in the component storage device 60. The component replacement device 50 moves to the location of the processing device 40 on which the consumable part 80 to be replaced is installed and connects to the processing device 40. The component storage device 60 moves to the location of the component replacement device 50 connected to the processing device 40 on which the consumable part 80 to be replaced is installed and connects to the component replacement device 50. This reduces the installation area of ​​the semiconductor device manufacturing system 10.

[0127] Furthermore, the part replacement device 50 in the above-described embodiment has an operation robot 52 and a transport robot 53. The transport robot 53 transports consumable parts 80 between the processing device 40 and the part storage device 60 via the part replacement device 50. The operation robot 52 removes used consumable parts 80 from the processing device 40 and places them on the transport robot 53, and installs unused consumable parts 80 placed on the transport robot 53 into the processing device 40. In this way, the used consumable parts 80 can be exchanged for unused consumable parts 80.

[0128] Moreover, the manufacturing system 10 in the above-described embodiment further includes a jig storage device 70. The jig storage device 70 stores an end effector 81 attached to the tip of the operation robot 52, and autonomously travels to the location of the part replacement device 50 connected to the processing device 40 to which the consumable part 80 to be replaced is attached, and connects to the part replacement device 50. The operation robot 52 removes the end effector 81 used to replace the consumable part 80 to be replaced from the jig storage device 70 and attaches it to the part, and replaces the consumable part 80 to be replaced using the attached end effector 81. By replacing the end effector 81 attached to the tip of the operation robot 52, it is possible to replace different types of consumable parts 80 using a single operation robot 52.

[0129] In the above embodiment, the end effector 81 includes a sensor. Before replacing the consumable part 80, the operation robot 52 uses the sensor attached to its tip to sense the condition inside the processing device 40. The part replacement device 50 has a control unit 558 that determines whether or not the consumable part 80 can be replaced based on the results of sensing by the operation robot 52, and causes the operation robot 52 to replace the consumable part 80 if it is possible to replace the consumable part 80, and notifies the operator if it is not possible to replace the consumable part 80. This makes it possible to replace the consumable part 80.

[0130] In the above embodiment, the jig storage device 70 stores a holding member 82 that is attached to the tip of the transport robot 53. The transport robot 53 takes out the holding member 82 suitable for replacing the consumable part 80 to be replaced from the jig storage device 70, attaches it, and transports the consumable part 80 to be replaced using the attached holding member 82. By replacing the holding member 82 attached to the tip of the transport robot 53, it becomes possible to replace different types of consumable parts 80 using a single transport robot 53.

[0131] In the above embodiment, the component storage device 60 stores at least one of each of a plurality of types of unused consumable components 80. This allows the consumable components 80 to be replaced quickly.

[0132] Furthermore, the part replacement device 50 in the above-described embodiment has a valve 555 that controls the pressure inside the part replacement device 50. When a used consumable part 80 attached to the processing device 40 is replaced, the valve 555 controls the pressure inside the part replacement device 50 so that the pressure inside the part replacement device 50 is higher than the pressure inside the processing device 40. This makes it possible to prevent particles inside the processing device 40 from entering the part replacement device 50.

[0133] In the above embodiment, the component replacement device 50 includes a moving mechanism 56, a sensor 551, and a control unit 558, and the component storage device 60 includes a moving mechanism 66, a sensor 650, and a control unit 656. The moving mechanism 56 has a power source and moves the component replacement device 50. The sensor 551 senses the surroundings of the component replacement device 50. The control unit 558 controls the moving mechanism 56 using the sensing results of the sensor 551 to move the component replacement device 50 to the position of the processing device 40 to which the consumable part 80 to be replaced is attached. The moving mechanism 66 has a power source and moves the component storage device 60. The sensor 650 senses the surroundings of the component storage device 60. The control unit 656 controls the moving mechanism 66 using the sensing results of the sensor 650 to move the component storage device 60 to the position of the component replacement device 50 connected to the processing device 40 to which the consumable part 80 to be replaced is attached. This allows the component replacement device 50 and the component accommodation device 60 to move independently of each other.

[0134] The above-described embodiment also relates to a component replacement device 50 that replaces consumable parts 80, and includes an opening 512a, an opening 512b, a transfer robot 53, and a moving mechanism 56. The opening 512a is connected to the processing device 40 via a gate valve 513a. The opening 512b is connected to a component storage device 60 that stores unused consumable parts 80 via a gate valve 513b. The operation robot 52 replaces a used consumable part 80 installed in the processing device 40 with a used consumable part 80 stored in the component storage device 60. The moving mechanism 56 moves the component replacement device 50 to the position of the processing device 40 where the consumable part 80 to be replaced is installed. The component replacement device 50 and the component storage device 60 can move independently of each other. This allows the installation area of ​​the semiconductor device manufacturing system 10 to be reduced.

[0135] [others] The technology disclosed in this application is not limited to the above-described embodiment, and various modifications are possible within the scope of the gist thereof.

[0136] For example, in the above embodiment, the cassette 62 of the component storage device 60 stores multiple types of consumable parts 80, but the disclosed technology is not limited to this. As another embodiment, the cassette 62 may store multiple consumable parts 80 of the same type. A component storage device 60 may be provided for each type of consumable part 80 stored in the cassette 62. This allows the cassette 62 to store consumable parts 80 with approximately the same replacement cycle, thereby preventing the gate valve 613 of the component storage device 60 from being opened unnecessarily. This prevents particles from adhering to the consumable parts 80 in the cassette 62 before use.

[0137] Furthermore, in the above-described embodiment, the operation robot 52 and the transport robot 53 of the part replacement device 50 come into contact with the unused consumable parts 80 and the used consumable parts 80, but the disclosed technology is not limited to this. As another embodiment, the part replacement device 50 may be provided with an operation robot 52 and a transport robot 53 that come into contact with the unused consumable parts 80, and an operation robot 52 and a transport robot 53 that come into contact with the used consumable parts 80, separately. This makes it possible to prevent depots and the like that peel off from the used consumable parts 80 from becoming particles and adhering to the unused consumable parts 80 via the operation robot 52 or the transport robot 53.

[0138] In the above embodiment, the cassette 62 of the component storage device 60 stores both unused and used consumable parts 80, but the disclosed technology is not limited to this. As another embodiment, the cassette 62 may be partitioned into a space for storing unused consumable parts 80 and a space for storing used consumable parts 80. This prevents deposits and the like that peel off from the used consumable parts 80 from becoming particles and adhering to the unused consumable parts 80.

[0139] Furthermore, in the above-described embodiment, the component replacement device 50, the component storage device 60, and the jig storage device 70 start venting the interior of the device after receiving an instruction from the control device 20, but the disclosed technology is not limited to this. For example, the component replacement device 50, the component storage device 60, and the jig storage device 70 may perform venting so that the pressure inside the device reaches a predetermined pressure P even before receiving an instruction from the control device 20. This allows replacement of the consumable part 80 to start more quickly.

[0140] Furthermore, in the component replacement device 50, component storage device 60, and jig storage device 70 of the above-described embodiments, the gas exhausted by the exhaust device is discharged to the outside of each device, but the disclosed technology is not limited to this. For example, each device may be connected to a gas processing device that processes exhaust gas provided outside the device by a flexible hose, and the gas exhausted from each device may be sent to the gas processing device. This promotes recycling of the gas exhausted from each device.

[0141] Furthermore, in the above-described embodiment of the component replacement device 50, the component storage device 60, and the jig storage device 70, gas inside each device is exhausted by an exhaust device inside each device, but the disclosed technology is not limited to this. For example, each device may be connected to an exhaust device provided outside each device via a flexible hose, and the gas inside each device may be exhausted by the exhaust device. This allows the component replacement device 50, the component storage device 60, and the jig storage device 70 to be made smaller.

[0142] Furthermore, in the above-described embodiment, the same part replacement device 50 is used to remove used consumable parts 80 from the processing equipment 40 and to carry unused consumable parts 80 into the processing equipment 40. However, the disclosed technology is not limited to this. For example, a part replacement device 50 that removes used consumable parts 80 from the processing equipment 40 and a part replacement device 50 that carries unused consumable parts 80 into the processing equipment 40 may be provided separately. This makes it possible to prevent deposits and the like that peel off from used consumable parts 80 from becoming particles and adhering to unused consumable parts 80.

[0143] In this case, the part replacement device 50 that carries the used consumable part 80 into the processing device 40 may be connected to the vacuum transfer chamber 31 or the atmospheric transfer chamber 33. The part replacement device 50 connected to the vacuum transfer chamber 31 delivers the used consumable part 80 to the robot arm 310 in the vacuum transfer chamber 31. The robot arm 310 carries the received used consumable part 80 into the processing device 40 in which the consumable part 80 needs to be replaced. The part replacement device 50 connected to the atmospheric transfer chamber 33 delivers the used consumable part 80 to the robot arm 330 in the atmospheric transfer chamber 33. The robot arm 330 carries the used consumable part 80 into the load lock chamber 32. The used consumable part 80 carried into the load lock chamber 32 is carried by the robot arm 310 in the vacuum transfer chamber 31 into the processing device 40 in which the consumable part 80 needs to be replaced. When the part replacement device 50 is connected to the atmospheric transfer chamber 33, there is no need to install exhaust devices within the part replacement device 50, the part storage device 60, and the jig storage device 70, and each device can be made smaller.

[0144] In addition, in each of the above-described embodiments, when the component replacement device 50 is connected to the processing device 40, the battery in the movement mechanism 56 may be charged by power supplied from the processing device 40. Furthermore, the component accommodation device 60 and the jig accommodation device 70 may charge the batteries in the movement mechanisms 66 and 76 via the component replacement device 50 connected to the processing device 40.

[0145] It should be noted that the disclosed embodiments are illustrative in all respects and should not be considered limiting. Indeed, the above-described embodiments may be embodied in various forms. Furthermore, the above-described embodiments may be omitted, substituted, or modified in various forms without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0146] W substrate 10 Manufacturing Systems 20 Control device 210 Management Table 30 Processing Groups 31 Vacuum transfer chamber 32 Load Lock Chamber 33 Atmospheric Transfer Chamber 331 Loading Port 40 Processing equipment 41 Chamber 42 Support part 421 Lower electrode 422 Electrostatic Chuck 423 Edge Ring 43 Upper electrode showerhead assembly 44 Gas supply section 45 RF power supply section 46 Exhaust system 50 Parts replacement device 510 Upper vessel 511 Lower vessel 513 Gate Valve 52 Controlled Robot 520 Operating Arm 53 Transport robot 530 Transfer Arm 56 Moving mechanism 60 Parts storage device 610 Upper vessel 611 Lower vessel 613 Gate Valve 62 cassettes 66 Moving mechanism 70 Jig storage device 710 Upper vessel 711 Lower vessel 713 Gate Valve 72 cassettes 76 Moving mechanism 80 Consumable Parts 81 End Effector 82 Retaining member

Claims

1. a first part replacement device that moves to a position of a processing device that performs plasma processing on a substrate in response to an instruction received from a control device via wireless communication and is capable of reducing pressure and is connected to the processing device; a second part replacement device capable of decompression, which moves to the position of the processing device and is connected to the processing device in response to an instruction from the control device received by wireless communication; a component storage device that stores at least unused consumable parts, wherein the first component replacement device removes the unused consumable parts in response to an instruction from the control device; and Equipped with A part replacement system in which, after the second part replacement device removes the consumable part to be replaced from the processing device, the first part replacement device carries the unused consumable part removed from the part storage device into the processing device.

2. A first part replacement device that moves to a processing device that processes a substrate and connects to the processing device in response to instructions from a control device received by wireless communication; a second part replacement device that moves to a position of the processing device and connects to the processing device in response to an instruction from the control device received by wireless communication; a component storage device that stores at least unused consumable parts, wherein the first component replacement device removes the unused consumable parts in response to an instruction from the control device; and Equipped with A part replacement system in which, after the second part replacement device removes the consumable part to be replaced from the processing device, the first part replacement device carries the unused consumable part removed from the part storage device into the processing device.

3. A parts replacement system as described in claim 1 or claim 2, wherein the first parts replacement device has a first transport arm that transports the unused consumable parts into the processing device, and the second parts replacement device has a second transport arm that transports the consumable parts to be replaced out of the processing device.

4. The first part replacement device further has a first operating arm that installs the unused consumable part placed on the first transport arm into the processing device; 4. The part replacement system according to claim 3, wherein the second part replacement device further comprises a second operation arm that removes the consumable part to be replaced from within the processing device and places it on the second transport arm.

5. a jig accommodating device that accommodates an end effector attached to a tip of the second operating arm and is connected to the second part replacement device; The part replacement system according to claim 4, wherein the second operating arm removes an end effector used to remove the consumable part to be replaced from the jig storage device and attaches it, and uses the attached end effector to remove the consumable part to be replaced.

6. the end effector includes a sensor; the second operating arm senses a condition inside the processing device using the sensor before removing the consumable part to be replaced; The part replacement system of claim 5, wherein the second part replacement device has a determination unit that determines whether the consumable part to be replaced can be replaced based on the results of sensing by the second operating arm, and if the consumable part to be replaced can be replaced, causes the second operating arm to remove the consumable part to be replaced, and notifies the user of this fact if the consumable part to be replaced cannot be replaced.

7. the jig accommodating device accommodates a holding member attached to a tip of the second transport arm; The part replacement system described in claim 5 or 6, wherein the second transport arm removes a holding member suitable for transporting the consumable part to be replaced from the jig storage device, and uses the removed holding member to transport the consumable part to be replaced from within the processing device.

8. The part replacement system according to claim 1 , wherein the part storage device stores at least one of each of a plurality of types of consumable parts.

9. The part replacement system according to claim 1 , wherein the part storage device stores a plurality of consumable parts of the same type.

10. the second part replacement device has a pressure adjustment mechanism that controls a pressure inside the second part replacement device, 10. A part replacement system as described in any one of claims 1 to 9, wherein the pressure adjustment mechanism controls the pressure within the second part replacement device so that the pressure within the second part replacement device is higher than the pressure within the processing device when the consumable part to be replaced that is installed within the processing device is removed.

11. A part replacement system described in any one of claims 1 to 10, wherein cleaning is performed within the chamber of the processing device before the second part replacement device removes the consumable part to be replaced from within the processing device.

12. A part replacement system described in any one of claims 1 to 11, wherein cleaning is performed in the chamber of the processing device after the second part replacement device transports the consumable part to be replaced from within the processing device and before the first part replacement device transports the unused consumable part removed from the part storage device into the processing device.

13. A part replacement system described in any one of claims 1 to 12, wherein the consumable part is an edge ring or an upper electrode.

14. The first part replacement device a first receiving unit that receives an instruction from the control device; a first moving mechanism having a power source and configured to move the first part replacement device; a first sensor that senses the surroundings of the first part replacement device; a first control unit that controls the first moving mechanism using the sensing result of the first sensor in response to an instruction from the control device, thereby moving the first part replacement device to a position of the processing device where the unused consumable part is to be attached; 14. The part replacement system according to claim 1, further comprising:

15. The second part replacement device, a second receiving unit that receives an instruction from the control device; a second moving mechanism having a power source and configured to move the second part replacement device; a second sensor that senses the surroundings of the second part replacement device; a second control unit that controls the second movement mechanism using the sensing result of the second sensor in response to an instruction from the control device, thereby moving the second part replacement device to a position of the processing device where the consumable part to be replaced is attached; 15. The part replacement system according to claim 1, further comprising:

16. The component storage device is a third receiving unit that receives an instruction from the control device; a third moving mechanism having a power source and configured to move the component-accommodating device; a third sensor for sensing the surroundings of the component-receiving device; a third control unit that controls the third movement mechanism using the sensing result of the third sensor in response to an instruction from the control unit, thereby moving the component accommodation device to the position of the first component exchange device or the second component exchange device; 16. The part replacement system according to claim 1, further comprising:

17. A parts replacement device that moves to a processing device position where a substrate is processed and connects to said processing device in response to an instruction from a control device received by wireless communication; a component storage device for storing components before use; Equipped with The part replacement device exchanging the part to be replaced installed in the processing device with the part received from the part storage device; The component storage device is a second receiving unit that receives an instruction from the control device; a second moving mechanism having a power source and configured to move the component-accommodating device; a second sensor for sensing the surroundings of the component receiving device; a second control unit that controls the second movement mechanism using the sensing result of the second sensor in response to an instruction from the control unit, thereby moving the component accommodation device to the position of the component replacement device; A parts replacement system having:

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