Clamping jig for chemical washing process

Abstract

This prevents the quality of the workpiece from deteriorating due to the accumulation and remaining of attached liquid. [Solution] Each of the multiple clampers (20) of the clamping jig (10) includes a first clamp piece (21) formed on a holding frame (11) and a second clamp piece (25) that grips the peripheral edge of a sheet-like workpiece (8) together with the first clamp piece (21). A pair of bearing members (31), each having a bearing hole (36), is provided on both sides of each second clamp piece (25) in the vertical direction (Y) of the holding frame (11). A pair of axle pins (45) and an elastic member (57) are housed in the housing hole (41) of the second clamp piece (25). The pair of axle pins (45) are supported by the pair of bearing members (31) by fitting into the bearing holes (36) at their portions protruding from the housing hole (41). Each bearing member (31) is fixed to the holding frame (11) with at least the outer edge of a gap (34) formed between the holding frame (11) and the bearing member (31) filled. Each axle pin (45) has a severable portion (49) between the second clamp piece (25) and the bearing member (31).

Description

[Technical Field]

[0001] The present invention relates to a clamping jig for use in a chemical washing process, which grips the peripheral edge of a sheet-like workpiece when the workpiece is transported in the chemical washing process. [Background technology]

[0002] When plating, etching, or the like is performed on a sheet-like workpiece, the workpiece is transported through a chemical washing process. During this transport, the peripheral edge of the workpiece is gripped by a clamp jig for a chemical washing process, for example, as described in Patent Document 1.

[0003] 11 and 12, this clamping jig 100 includes an annular holding frame 102 and a plurality of clampers 103 arranged at a plurality of locations on the holding frame 102 so as to face inward of the holding frame 102. The plurality of clampers 103 each grip the peripheral edge of a workpiece 101 (see FIG. 13).

[0004] 11 and 13, each clamper 103 has a first clamp piece 104 and a second clamp piece 115 arranged side by side in the thickness direction of the workpiece 101 (the vertical direction in FIG. 13). The first clamp piece 104 of each clamper 103 is formed on the holding frame 102 so as to protrude inward from the holding frame 102. A permanent magnet 105 is built into the first clamp piece 104.

[0005] As shown in FIGS. 12 and 13 , the second clamp piece 115 of each clamper 103 is supported on the holding frame 102 by one shaft 116. As shown in FIGS. 11 and 12 , the holding frame 102 is formed with pairs of recesses 106 spaced apart from each other. A portion of a bearing member 107 is fitted into each recess 106. Each bearing member 107 is fixed to the holding frame 102 by threading a screw 110 into a threaded hole 111 formed in the holding frame 102 and the fitting portion of the recess 106. Both ends of the shaft 116 protruding from the second clamp piece 115 are supported by the pair of bearing members 107. As shown in FIG. 13 , a permanent magnet 117 is built into the second clamp piece 115 in an orientation such that an attractive force acts between the permanent magnet 105 and the permanent magnet 105.

[0006] The magnetic force of the permanent magnets 105, 117 causes the second clamp piece 115 to rotate toward the first clamp piece 104, and as a result, the peripheral edge of the workpiece 101 is gripped between the second clamp piece 115 and the first clamp piece 104, as shown by the solid line in Fig. 13. Furthermore, a force is applied to the second clamp piece 115 to move it away from the first clamp piece 104 against the magnetic force, and as a result, the workpiece 101 is released, as shown by the two-dot chain line in Fig. 13. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Patent No. 6715445 Summary of the Invention [Problem to be solved by the invention]

[0008] However, in the conventional clamping jig 100 described above, as shown in Figures 11 and 12, the bearing member 107 fitted into the recess 106 is fixed to the holding frame 102 by a screw 110. Therefore, during the chemical washing process, liquid such as chemical liquid or water adhering to the clamping jig 100 accumulates and remains in a gap 108 between the opening of the recess 106 and the bearing member 107, a gap 112 between the opening of the screw hole 111 and the head 110a of the screw 110, and the like. The liquid remaining in the gaps 108 and 112 may cause a deterioration in the quality of the workpiece 101. [Means for solving the problem]

[0009] Various aspects of a clamp jig for use in a chemical washing process to solve the above problems will be described. [Mode 1] A clamper includes an annular holding frame that surrounds the outer periphery of a sheet-like workpiece, and a plurality of clampers that are arranged at a plurality of locations in the circumferential direction of the holding frame, each of which faces inward. Each clamper includes a first clamp piece formed on the holding frame so as to protrude inward from the holding frame, and a second clamp piece that is aligned with the first clamp piece in the thickness direction of the workpiece. A pair of bearing members, each having a bearing hole, is provided on both sides of each second clamp piece in the circumferential direction of the holding frame. Each second clamp piece is penetrated by an accommodating hole that extends in the circumferential direction, and a pair of axial pins that extend in the circumferential direction are accommodated in each accommodating hole so as to be able to protrude and retract from the accommodating hole, and the pair of axial pins are arranged so as to be spaced apart from each other in the circumferential direction. a clamping jig for a chemical water washing process, which houses an elastic member that urges the workpiece away from the workpiece, and the pair of axle pins are supported by the pair of bearing members by fitting into the bearing holes at their portions that protrude from the housing holes, and when the workpiece is subjected to a chemical water washing process, each second clamp piece rotates relative to the pair of bearing members around the pair of axle pins to grasp and release the peripheral portion of the workpiece from both sides in the thickness direction together with the first clamp piece, and each bearing member is fixed to the holding frame with at least the outer edge portion of the gap formed between it and the holding frame filled, and the axle pins supported by the bearing members have a cuttable portion between the second clamp piece and the bearing member that allows it to be cut with a blade.

[0010] According to the above configuration, when the bearing member, which is a separate component, is fixed to the holding frame, a gap occurs between the bearing member and the holding frame. However, at least the outer edge of this gap is filled. Therefore, liquids such as chemicals and water that adhere to the clamping jig, particularly the clamper and its surrounding areas, during the chemical washing process are less likely to accumulate and remain in the gap. Furthermore, because the bearing member is not fixed to the holding frame by screws, the liquids do not accumulate and remain in the gap between the openings of the screw holes and the heads of the screws. In this way, there are fewer areas in the clamping jig where adhered liquids accumulate and remain than in conventional clamping jig.

[0011] Furthermore, the axle pin supported by the bearing member has a cuttable portion between the second clamp piece and the bearing member. Therefore, when the cuttable portion is cut with a blade, the axle pin is separated between the second clamp piece and the bearing member. Although the pair of bearing members fixed to the holding frame cannot be removed from the holding frame, the second clamp piece can be removed from the pair of bearing members.

[0012] [Aspect 2] The entire shaft pin is formed from a material that can be cut by the blade, and when the shaft pin is supported by the bearing member, the cuttable portion is formed by the portion of the shaft pin between the second clamp piece and the bearing member. This clamp jig is for use in a chemical water washing process as described in [Aspect 1].

[0013] According to the above configuration, any part of the shaft pin can be cut with a blade. When the shaft pin is supported by the bearing member, the part of the shaft pin between the second clamp piece and the bearing member functions as the cuttable part.

[0014] [Aspect 3] A clamp jig for a chemical water washing process described in [Aspect 1] or [Aspect 2], in which the bearing member is fixed to the holding frame by a weld provided on the outer edge of the gap between the bearing member and the holding frame.

[0015] According to the above configuration, the welded portion functions to fix the bearing member to the holding frame and to fill the outer edge of the gap that occurs between the bearing member and the holding frame. [Embodiment 4] A clamping jig for a chemical water washing process according to [Embodiment 3], wherein a recess is formed in the holding frame, a portion of the bearing member on the holding frame side is fitted into the recess as a fitting portion, the gap is formed between the inner wall surface of the recess and the fitting portion, and the outer edge portion is constituted by the portion of the gap that is located at the opening of the recess.

[0016] According to the above configuration, the bearing member is positioned relative to the holding frame by fitting the fitting portion of the bearing member into the recess. In this case, a gap is formed between the inner wall surface of the recess and the fitting portion. The portion of this gap located at the opening of the recess is defined as an outer edge portion, and a weld is provided on this outer edge portion.

[0017] [Aspect 5] A clamping jig for a chemical water washing process described in any one of [Aspect 1] to [Aspect 4], wherein the second clamping piece has a permanent magnet built in, and the first clamping piece has a magnetic member built in that is thinner than the permanent magnet.

[0018] According to the above configuration, the weight of the clamping jig can be reduced by reducing the thickness of the first clamp piece and therefore the thickness of the holding frame compared to when a permanent magnet is built into the first clamp piece. Also, because the cost of the magnetic member is lower than the cost of the permanent magnet, the cost of the clamping jig can be reduced compared to when a permanent magnet is built into the first clamp piece.

[0019] Furthermore, by incorporating a magnetic member into the first clamp piece, leakage magnetic flux in the first clamp piece is reduced compared to when a permanent magnet is incorporated. Therefore, when multiple workpieces are transported using multiple clamp jigs arranged in the thickness direction of the workpieces, the distance at which the first clamp piece of one of the adjacent clamp jigs and the second clamp piece of the other clamp jig attract each other is narrowed. This makes it possible to transport multiple workpieces with two adjacent clamp jigs close to each other. This increases the number of clamp jigs that can be placed in a space per unit volume during transportation. [Effects of the Invention]

[0020] According to the present invention, it is possible to prevent the quality of the workpiece from being reduced due to the accumulation and remaining of adhered liquid. [Brief explanation of the drawings]

[0021] [Figure 1]FIG. 1 is a front view of a clamping jig according to one embodiment. [Figure 2] FIG. 2 is a side view of the clamping jig of FIG. [Figure 3] FIG. 3 is a bottom view of the clamping jig of FIG. [Figure 4] FIG. 4 is an enlarged view of part A in FIG. [Figure 5] FIG. 5 is an enlarged view of part B in FIG. [Figure 6] FIG. 6 is a cross-sectional view illustrating the operation of the clamper in the above embodiment. [Figure 7] FIG. 7 is a cross-sectional view taken along line 7-7 in FIG. [Figure 8] FIG. 8 is a partially exploded cross-sectional view of the second clamp piece, the pivot pin, the elastic member, the bushing, and the washer in the embodiment. [Figure 9] FIG. 9 is a view corresponding to FIG. 7, and is a partial cross-sectional view showing the state before the second clamp piece is supported by the pair of bearing members. [Figure 10] FIG. 10 is an explanatory diagram illustrating how a plurality of workpieces are transported using a plurality of clamping jigs in the embodiment. [Figure 11] FIG. 11 is a partial perspective view showing a clamper and its surroundings in a conventional clamping jig. [Figure 12] FIG. 12 is a partial plan view showing a clamper and its surrounding area in a conventional clamping jig. [Figure 13] FIG. 13 is a cross-sectional view illustrating the operation of a clamper in a conventional clamping jig. DETAILED DESCRIPTION OF THE INVENTION

[0022] Hereinafter, one embodiment of a clamp jig for use in a chemical washing process will be described with reference to FIGS. As shown in Fig. 1, the clamping jig 10 of this embodiment is a jig for gripping the peripheral edge of a sheet-like workpiece 8, for example, the peripheral edge of a rectangular substrate. In the chemical washing process, the workpiece 8 whose peripheral edge is gripped by the clamping jig 10 is transported in the thickness direction of the workpiece 8 while hung on a hanger conveyor (not shown) or the like, as shown in Fig. 10. During this transport, the workpiece 8 is subjected to a chemical washing process. The chemical washing process includes chemical treatments such as plating and etching, as well as a water washing process in which chemicals adhering to the workpiece 8 are washed away with water.

[0023] 1 to 3, the clamping jig 10 includes a holding frame 11 and a plurality of clampers 20. Next, each part constituting the clamping jig 10 will be described. 10, the direction in which the workpiece 8 is transported is defined as the front-rear direction X, and the direction in which the workpiece 8 is suspended (vertical direction) is defined as the up-down direction Y. The front-rear direction X coincides with the thickness direction of the workpiece 8. As shown in FIG. 1, the direction perpendicular to the front-rear direction X and the up-down direction Y is defined as the width direction Z.

[0024] <Holding frame 11> The holding frame 11 comprises a pair of first frame portions 12 and a pair of second frame portions 14. The pair of first frame portions 12 extend in the vertical direction Y while being spaced apart from each other in the width direction Z by a distance greater than the dimension of the workpiece 8 in the width direction Z. The pair of second frame portions 14 extend in the width direction Z while being spaced apart from each other in the vertical direction Y by a distance greater than the dimension of the workpiece 8 in the vertical direction Y. The upper second frame portion 14 connects the upper ends of the pair of first frame portions 12 to each other. The lower second frame portion 14 connects the lower ends of the pair of first frame portions 12 to each other. The holding frame 11 has a rectangular ring shape overall and surrounds the outer periphery of the gripped workpiece 8.

[0025] In addition, when there is no need to distinguish between the up-down direction Y, which is the direction in which each first frame portion 12 extends, and the width direction Z, which is the direction in which each second frame portion 14 extends, both are referred to as the circumferential direction. Therefore, for each first frame portion 12, the up-down direction Y is the circumferential direction. For each second frame portion 14, the width direction Z is the circumferential direction.

[0026] In addition, in the holding frame 11, the side (direction) approaching the gripped workpiece 8 is defined as the inside (inner side), and the side (direction) going away from the workpiece 8 is defined as the outside (outer side). <Clamper 20> The multiple clampers 20 are arranged at multiple locations in the circumferential direction of the holding frame 11, each facing inward. Half of the multiple clampers 20 are arranged at multiple locations spaced apart from each other in the up-down direction Y on one first frame portion 12. The remaining multiple clampers 20 are arranged at multiple locations spaced apart from each other in the up-down direction Y on the other first frame portion 12. The multiple clampers 20 on one first frame portion 12 face the multiple clampers 20 on the other first frame portion 12 in the width direction Z.

[0027] The multiple clampers 20 have the same configuration. As shown in Figures 6 and 7, each clamper 20 has a first clamp piece 21 and a second clamp piece 25 arranged side by side in the thickness direction of the workpiece 8 (front-rear direction X). The first clamp piece 21 of each clamper 20 is integrally formed with the first frame portion 12 so as to protrude inward from the holding frame 11. A first clamp tooth 22 protruding toward the second clamp piece 25 is formed at the inner end of each first clamp piece 21. As shown in Figures 4 and 5, a second clamp tooth 26 (see Figure 6) protruding toward the first clamp piece 21 is formed at the inner end of each second clamp piece 25, facing the first clamp tooth 22.

[0028] 7, in this embodiment, the first clamp piece 21 is formed to have a shape narrower in the vertical direction Y than the second clamp piece 25. Conversely, the second clamp piece 25 may be formed to have a shape narrower in the vertical direction Y than the first clamp piece 21. Furthermore, the first clamp piece 21 and the second clamp piece 25 may be formed to have the same width in the vertical direction Y.

[0029] As shown in Figures 4, 5 and 7, a pair of bearing members 31 are provided on both sides of each second clamp piece 25 in the circumferential direction of the retaining frame 11, that is, in this embodiment, on the upper and lower sides of each first frame portion 12 of the second clamp piece 25.

[0030] Each bearing member 31 is fixed to the first frame portion 12 with at least the outer edge of a gap 34 formed between the bearing member 31 and the holding frame 11 filled. More specifically, a pair of recesses 33 are formed in each first frame portion 12 at locations on both the upper and lower sides of the second clamp piece 25 (see FIG. 5). Each recess 33 opens on the outer circumferential surface of the first frame portion 12 (see FIG. 4).

[0031] Each bearing member 31 has a fitting portion 31a on the first frame portion 12 side in the front-rear direction X (see FIG. 5). The fitting portion 31a of each bearing member 31 is fitted into a corresponding recess 33 (see FIG. 5). This fitting determines the position of each bearing member 31 relative to the holding frame 11. Of the gap 34 formed between the inner wall surface of the recess 33 and the fitting portion 31a, the portion located at the opening 33a of the recess 33 forms the outer edge of the gap 34. A weld 35 is provided on this outer edge, and the bearing member 31 is fixed to the first frame portion 12 by this weld 35. The weld 35 is formed by, for example, laser welding, and fills the outer edge of the gap 34.

[0032] 7, the upper bearing member 31 has a bearing hole 36 that opens at the bottom surface and extends upward. The lower bearing member 31 has a bearing hole 36 that opens at the top surface and extends downward.

[0033] As shown in Figures 7 and 8, each second clamp piece 25 is formed with an accommodating hole 41 extending in the up-down direction Y. The accommodating hole 41 of each second clamp piece 25 has a small diameter hole portion 42 and a pair of large diameter hole portions 43. The small diameter hole portion 42 is located in the middle of each accommodating hole 41, excluding both end portions in the up-down direction Y. The pair of large diameter hole portions 43 are located at both end portions of each accommodating hole 41 in the up-down direction Y. Each large diameter hole portion 43 has an inner diameter larger than the inner diameter of each small diameter hole portion 42. Each large diameter hole portion 43 is connected to each small diameter hole portion 42 via a step portion 44.

[0034] A pair of shaft pins 45 extending in the vertical direction Y are accommodated in the accommodation hole 41 of each second clamp piece 25 so as to be able to protrude and retract. Each shaft pin 45 has a large diameter shaft portion 46 and a small diameter shaft portion 47 adjacent to each other in the vertical direction Y. The small diameter shaft portion 47 of one shaft pin 45 is located between the large diameter shaft portion 46 and the other shaft pin 45. The same is true for the small diameter shaft portion 47 of the other shaft pin 45. The small diameter shaft portion 47 of each shaft pin 45 is formed with a smaller diameter than the large diameter shaft portion 46. Each small diameter shaft portion 47 is connected to the large diameter shaft portion 46 via a step portion 48. Each small diameter shaft portion 47 is arranged in the accommodation hole 41. The large diameter shaft portions 46 of the pair of shaft pins 45 are supported by the pair of bearing members 31 by fitting into the adjacent bearing holes 36 at the portions protruding from the accommodation hole 41.

[0035] The clamping jig 10 further includes a pair of cylindrical bushings 51 for each second clamp piece 25, each bushing 51 being fitted onto the outer periphery of each shaft pin 45. Each bushing 51 includes a large-diameter annular portion 52 and a small-diameter annular portion 53 adjacent to each other in the vertical direction Y, and is entirely formed from a resin material. The small-diameter annular portion 53 has a smaller diameter than the large-diameter annular portion 52 and the small-diameter hole portion 42, and is disposed in the small-diameter hole portion 42. The large-diameter annular portion 52 is formed to be longer in the vertical direction Y than the depth of the large-diameter hole portion 43. A portion of the large-diameter annular portion 52 in the vertical direction Y is fitted into the large-diameter hole portion 43, and the remaining portion of the large-diameter annular portion 52 protrudes from the large-diameter hole portion 43.

[0036] A pair of washers 55 formed in an annular shape from a resin material is disposed in each accommodating hole 41. Each washer 55 has an outer diameter that is slightly smaller than the inner diameter of the small-diameter hole portion 42 and larger than the outer diameter of the small-diameter annular portion 53. Each washer 55 has an outer diameter that is smaller than the outer diameter of the large-diameter shaft portion 46. Each washer 55 has an inner diameter that is slightly larger than the outer diameter of the small-diameter shaft portion 47, and is engaged on the small-diameter shaft portion 47 so as to be movable in the up-down direction Y.

[0037] The accommodation holes 41 of each second clamp piece 25 accommodate elastic members 57 that urge the pair of shaft pins 45 in the vertical direction Y toward sides that move away from each other. In this embodiment, a coil spring is used as the elastic member 57. The elastic member 57 is disposed between the pair of washers 55 in a state where it is compressed in the vertical direction Y. Both ends of the elastic member 57 in the vertical direction Y are located on the outer periphery of the small diameter shaft portion 47.

[0038] As shown in FIG. 7 , a pair of shaft pins 45 supported by a pair of bearing members 31 have a cuttable portion 49 between the second clamp piece 25 and the bearing member 31 that can be cut with a blade 70. In this embodiment, the entire shaft pin 45 is formed from a material that can be cut with the blade 70. Examples of such materials include metal materials such as SUS316, titanium, and Hastelloy. These materials are preferably selected depending on the type of chemical solution used in the chemical washing treatment process. When the pair of shaft pins 45 is supported by the pair of bearing members 31, the cuttable portion 49 is formed by the portion of each shaft pin 45 between the second clamp piece 25 and the bearing member 31.

[0039] Each second clamp piece 25 rotates around a pair of shaft pins 45 relative to a pair of bearing members 31, thereby gripping and releasing the peripheral portion of the workpiece 8 from both sides in the front-to-rear direction X together with the first clamp piece 21. As shown by solid lines in Figures 3 and 6, the second clamp piece 25 is rotated toward the first clamp piece 21 and becomes parallel or nearly parallel to the first clamp piece 21, thereby gripping the peripheral portion of the workpiece 8 between the first clamp teeth 22 and the second clamp teeth 26. As shown by two-dot chain lines in Figures 3 and 6, the second clamp piece 25 is rotated away from the first clamp piece 21 and becomes inclined relative to the first clamp piece 21, thereby releasing the workpiece 8.

[0040] As shown in Figures 5 to 7, the rotation of second clamp piece 25 for gripping the peripheral edge of workpiece 8 is achieved by magnetic force. A plate-shaped permanent magnet 61 is built into second clamp piece 25 to apply magnetic force from second clamp piece 25 to first clamp piece 21. A plate-shaped magnetic member 62 that is thinner than the permanent magnet 61 is built into first clamp piece 21 and first frame portion 12. Magnetic member 62 is made of, for example, SS material (general structural rolled steel), which is low cost and highly workable, but may also be made of a different material.

[0041] The rotation of the second clamp piece 25 to release the workpiece 8 is achieved by, for example, pushing the second clamp piece 25 away from the first clamp piece 21 with a push pin (not shown) or the like.

[0042] The above-described holding frame 11, first clamp piece 21 and second clamp piece 25 are formed from, for example, a corrosion-resistant material such as titanium or a titanium alloy. <Operation of this embodiment> When manufacturing the clamping jig 10, a plurality of clampers 20 are formed. When forming each clamper 20, the fitting portion 31a of the bearing member 31 is fitted into the recess 33, as shown in FIG. 5 . This fitting positions the bearing member 31 relative to the holding frame 11. In this case, a gap 34 is formed between the inner wall surface of the recess 33 and the fitting portion 31a. The portion of this gap 34 located at the opening 33a of the recess 33 is defined as an outer edge, and a welded portion 35 is formed at this outer edge by laser welding or the like. The bearing member 31 is fixed to the first frame portion 12 with this welded portion 35 filling the outer edge of the gap 34.

[0043] As shown in Fig. 7, the second clamp piece 25 is supported by a pair of bearing members 31 via a pair of shaft pins 45. During this support, for example, the large diameter shaft portions 46 of the pair of shaft pins 45 are inserted into the bearing holes 36 of the pair of bearing members 31, as shown in Figs.

[0044] More specifically, since no pressing force is applied to the pair of shaft pins 45 , a part of the large diameter shaft portion 46 of each shaft pin 45 is biased in the opposite direction by the elastic member 57 and protrudes from the receiving hole 41 .

[0045] The second clamp piece 25 is tilted together with the shaft pins 45 and the like in the vertical direction Y and the width direction Z. In this tilted state, the second clamp piece 25, together with the shaft pins 45 and the like, is moved close to the space between the pair of bearing members 31. For example, the upper end of the large diameter shaft portion 46 of the upper shaft pin 45 comes into contact with the peripheral portion of the bearing hole 36 of the upper bearing member 31. This contact restricts the upper shaft pin 45 from moving upward.

[0046] An upward pressing force is applied to the lower pivot pin 45. This pressing force causes a part (upper part) of the lower pivot pin 45 to sink from below into the accommodating hole 41 against the biasing force of the elastic member 57. Also, a part (upper part) of the upper pivot pin 45 is caused to sink from above into the accommodating hole 41 against the biasing force of the elastic member 57. This sinking causes the second clamp piece 25 to approach the upper bearing member 31.

[0047] Furthermore, the second clamp piece 25 is tilted downward around the contact point of the upper pivot pin 45 with the bearing member 31. As the tilting progresses, the angle that the axis of the pivot pin 45, the receiving hole 41, etc. form with the axis of the bearing hole 36 becomes smaller.

[0048] As each axle pin 45 sinks into the accommodating hole 41, the upper bushing 51 approaches the upper bearing member 31, and the lower bushing 51 approaches the bearing hole 36 of the lower bearing member 31. When the axes of both axle pins 45 etc. approach a state in which they extend in the vertical direction Y, most of each axle pin 45 is sunk into the accommodating hole 41 and the bushing 51. Meanwhile, the lower bushing 51 comes into contact with the upper end surface of the lower bearing member 31. In addition, the downward movement of the lower axle pin 45 is restricted by the lower bearing member 31. Therefore, even if no upward pressing force is applied to the lower axle pin 45, the lower axle pin 45 is maintained in a state in which it is sunk into the bushing 51 and the accommodating hole 41.

[0049] The tilting continues without any upward pressing force being applied to the lower axle pin 45. When the axes of the upper and lower axle pins 45 are aligned with the axis of the bearing hole 36, as shown in Figures 7 and 8, the biasing force of the elastic member 57 causes parts of the large-diameter shaft portions 46 of the pair of axle pins 45 to protrude from the accommodating holes 41 and enter the bearing holes 36. The pair of axle pins 45 are supported by the pair of bearing members 31. In this state, the portion of each axle pin 45 located between the second clamp piece 25 and the bearing member 31 functions as a severable portion 49.

[0050] Furthermore, when a portion of each large diameter annular portion 52 of the pair of bushings 51 is fitted into the large diameter hole portion 43, the remaining portion of the large diameter annular portion 52 protrudes from the large diameter hole portion 43. The portion of each large diameter annular portion 52 protruding from the large diameter hole portion 43 comes into contact with the bearing member 31, thereby positioning the second clamp piece 25 in the up-down direction Y via the pair of bushings 51. In this way, the second clamp piece 25 is supported by the pair of bearing members 31 via the pair of shaft pins 45.

[0051] During the chemical rinsing treatment in the chemical rinsing treatment step, in each clamper 20, the second clamp piece 25 is rotated by magnetic force around the pair of pivot pins 45 toward the first clamp piece 21, as shown by the solid lines in Figures 3 and 6. This causes the peripheral edge of the workpiece 8 to be gripped between the second clamp teeth 26 of the second clamp piece 25 and the first clamp teeth 22 of the first clamp piece 21. Furthermore, in the clamper 20, when the second clamp piece 25 is pushed by a push pin or the like, it is rotated around the pair of pivot pins 45 toward the side away from the first clamp piece 21, as shown by the two-dot chain line in Figures 3 and 6, and the workpiece 8 is released.

[0052] The workpiece 8, whose peripheral edge is gripped by the clamp jig 10, is transported in the forward and backward direction X while being hung on a hanger conveyor or the like, as shown in Fig. 10. During this transport, the workpiece 8 is subjected to a chemical washing treatment. During this chemical washing treatment, liquids such as chemicals and water adhere to the workpiece 8.

[0053] 4 and 5, when each bearing member 31 is fixed to the first frame portion 12, a gap 34 is formed between the inner wall surface of the recess 33 and the fitting portion 31a. However, a welded portion 35 is provided at least on the outer edge of this gap 34. The welded portion 35 functions to fix each bearing member 31 to the retaining frame 11 and to fill the outer edge of the gap 34.

[0054] Therefore, the liquid adhering to the clamping jig 10 is less likely to accumulate and remain in the gap 34. Also, unlike the conventional clamping jig 100, the bearing members 31 are not fixed to the first frame portion 12 by screws. Therefore, in the conventional clamping jig 100, as shown in FIGS. 11 and 12, the liquid accumulates and remains in the gap 112 between the opening of the screw hole 111 in the holding frame 102 and the head 110a of the screw 110, but this phenomenon does not occur in this embodiment. As such, in the clamping jig 10 of this embodiment, there are fewer areas where the adhering liquid accumulates and remains than in the conventional clamping jig 100.

[0055] 7 and 8, when the pair of shaft pins 45 are supported by the pair of bearing members 31, the portion of the large diameter shaft portion 46 of each shaft pin 45 that is biased by the elastic member 57 and that protrudes from the accommodating hole 41 is inserted into the bearing hole 36 of the bearing member 31. Therefore, it is difficult to remove the pair of shaft pins 45 from the bearing hole 36 (to insert them into the accommodating hole 41) against the biasing force of the elastic member 57.

[0056] However, in this embodiment, the entire shaft pin 45 is formed from a material that can be cut with a blade 70. When a pair of shaft pins 45 is supported by a pair of bearing members 31, the portion of each shaft pin 45 between the second clamp piece 25 and the bearing member 31 functions as a severable portion 49. When the severable portion 49 of each shaft pin 45 is cut with a blade 70, the coaxial pin 45 is separated between the second clamp piece 25 and the bearing member 31. Therefore, unlike the conventional clamp jig 100, the pair of bearing members 31 fixed to the holding frame 11 cannot be removed from the holding frame 11. However, the second clamp piece 25 can be removed from between the pair of bearing members 31, making it possible to replace the second clamp piece 25.

[0057] Furthermore, according to this embodiment, the weight of the clamping jig 10 can be reduced by reducing the thickness of the first clamp piece 21, and therefore the thickness of the holding frame 11, compared to when a permanent magnet is built into the first clamp piece 21. The reduced weight makes the clamping jig 10 easier to carry and reduces the burden on the worker. Furthermore, because the cost of the magnetic member 62 is lower than the cost of a permanent magnet, the cost of the clamping jig 10 can be reduced compared to when a permanent magnet is built into the first clamp piece 21.

[0058] Furthermore, if a permanent magnet is built into the first clamp piece 21 as well as the second clamp piece 25, the leakage magnetic flux increases. When performing a chemical washing process, the mutual attractive force between the first clamp piece 21 and the second clamp piece 25 becomes stronger. Therefore, if multiple clamp jigs 10 are used to transport multiple workpieces 8, the following problems may occur.

[0059] 10, if the distance between two adjacent clamping jigs 10 in the front-rear direction X is too small, leakage magnetic flux will cause the clamping jigs 10 to attract each other and stick together. Therefore, it is necessary to arrange the two adjacent clamping jigs 10 apart in the front-rear direction X so that they do not attract each other.

[0060] In this regard, in this embodiment, the magnetic member 62 is built into the first clamp piece 21, so leakage magnetic flux in the first clamp piece 21 is reduced. Of two clamp jigs 10 adjacent in the front-rear direction X, the first clamp piece 21 of one clamp jig 10 and the second clamp piece 25 of the other clamp jig 10 are adjacent to each other. The distance at which these first clamp piece 21 and second clamp piece 25 attract each other becomes narrow. It becomes possible to transport two adjacent clamp jigs 10 in a state where they are close to each other in the front-rear direction X. This increases the number of clamp jigs 10 that can be arranged in a space per unit volume.

[0061] Using a clamping jig 10 in which a magnetic member 62 is built into each first clamp piece 21, the force (attraction force) of attraction between the first clamp piece 21 and the second clamp piece 25 due to magnetic force was measured. More specifically, as shown in FIG. 6, the peripheral edge of the workpiece 8 is gripped by the first clamp tooth 22 of the first clamp piece 21 and the second clamp tooth 26 of the second clamp piece 25. In this state, the second clamp piece 25 is pulled away from the first clamp piece 21. The attractive force was then measured at the moment when the second clamp piece 25 began to rotate away from the first clamp piece 21. As a result, the attractive force measured was greater than the pass / fail judgment value.

[0062] Furthermore, using the clamping jig 10 with the magnetic member 62 built into each first clamp piece 21, the workpiece 8, whose peripheral edge was gripped by the clamper 20, was pulled in the direction of removal (to the right in FIG. 6), and the pulling force was measured at the moment when the workpiece 8 began to move (begin to be removed). As a result, the pulling force measured was a value greater than the pass / fail judgment value.

[0063] In this way, it was confirmed that although the magnetic member 62 is built into the first clamp piece 21, the clamp jig 10 can exhibit the performance required to grip the peripheral edge of the workpiece 8. <Effects of this embodiment> (1) As shown in FIG. 7, each bearing member 31 is fixed to the holding frame 11 in a state where at least the outer edge of the gap 34 formed between the bearing member 31 and the holding frame 11 is filled.

[0064] Therefore, it is possible to prevent the quality of the workpiece 8 from being reduced due to the liquid remaining on the clamping jig 10, particularly the clamper 20 and its surrounding areas. (2) When the second clamp piece 25 is supported by the pair of bearing members 31, each of the pair of shaft pins 45 has a severable portion 49 between the second clamp piece 25 and the bearing member 31.

[0065] Therefore, by cutting the cuttable portion 49 of the shaft pin 45 with a blade 70, the second clamp piece 25 can be removed from the pair of bearing members 31 fixed to the holding frame 11.

[0066] (3) The entire shaft pin 45 is made of a material that can be cut by the blade 70 . Therefore, when a pair of axial pins 45 are supported by a pair of bearing members 31, the portion of the coaxial pin 45 between the second clamp piece 25 and the bearing member 31 can function as a severable portion 49, thereby achieving the effect of (2) above.

[0067] (4) As shown in FIGS. 4 and 5, welds 35 are provided on the outer edges of the gaps 34 between the bearing members 31 and the holding frames 11. Therefore, the welded portions 35 can fix the bearing members 31 to the holding frame 11 and also fill the outer edge of the gaps 34 that occur between the bearing members 31 and the holding frame 11 .

[0068] (5) As shown in Fig. 5, a portion of the bearing member 31 on the holding frame 11 side is fitted into a recess 33 of the holding frame 11 as a fitting portion 31a. Of the gap 34 formed between the inner wall surface of the recess 33 and the fitting portion 31a, the portion located at the opening 33a of the recess 33 forms an outer edge portion.

[0069] Therefore, by fitting the fitting portion 31a into the recess 33, the bearing member 31 can be positioned relative to the holding frame 11. By providing the welded portion 35 on the outer edge of the gap 34, the effect of (4) above can be obtained.

[0070] (6) As shown in Figures 7 and 8, a pair of bushings 51 fitted onto the outer periphery of each shaft pin 45 is used for each second clamp piece 25. The receiving hole 41 has large diameter hole portions 43 at both ends in the vertical direction Y, the large diameter hole portions 43 having a larger inner diameter than the small diameter hole portion 42 constituting the middle portion in the vertical direction Y. Each bushing 51 has a large diameter annular portion 52, part of which in the vertical direction Y fits into the large diameter hole portion 43, and the remainder of which protrudes from the large diameter hole portion 43.

[0071] Therefore, by bringing the protruding portion of each large diameter annular portion 52 from the large diameter hole portion 43 into contact with the bearing member 31, the second clamp piece 25 can be positioned in the vertical direction Y relative to the retaining frame 11 via the pair of bushings 51.

[0072] (7) Each axle pin 45 has a large diameter shaft portion 46 and a small diameter shaft portion 47 connected to the large diameter shaft portion 46 via a step portion 48. A pair of washers 55 arranged in the small diameter hole portion 42 of the accommodating hole 41 are each engaged on the small diameter shaft portion 47 so as to be movable in the vertical direction Y. The elastic member 57 is arranged between the pair of washers 55 in a state compressed in the vertical direction Y.

[0073] Therefore, by transmitting the biasing force of the elastic member 57 to the large diameter shaft portion 46 via the washer 55 and the step portion 48, a portion of the large diameter shaft portion 46 can be caused to protrude from the accommodating hole 41 and enter the bearing hole 36.

[0074] (8) As shown in FIGS. 5 and 6, a permanent magnet 61 is embedded in the second clamp piece 25, and a magnetic member 62 having a smaller thickness than the permanent magnet 61 is embedded in the first clamp piece 21.

[0075] Therefore, the thickness (dimension in the front-rear direction X) of the first clamp piece 21 and therefore the holding frame 11 can be reduced compared to when a permanent magnet is built into the first clamp piece 21 in addition to the second clamp piece 25. This allows for weight and cost reductions in the clamp jig 10.

[0076] Furthermore, by reducing the leakage magnetic flux in the first clamp piece 21, the workpieces 8 can be transported with two clamp jigs 10 adjacent to each other in the front-rear direction X, as shown in Fig. 10. This makes it possible to perform the chemical washing process on a larger number of workpieces 8, thereby improving the efficiency of the chemical washing process.

[0077] <Example of change> This embodiment can be modified as follows: This embodiment and the following modifications can be combined and implemented within the scope of technical compatibility.

[0078] (Matters related to Work 8) The workpiece 8 may be something different from the substrate, provided that it is in a sheet form.

[0079] The workpiece 8 may have a shape other than rectangular. The workpiece 8 may be flexible. In this case, it is preferable that each clamper 20 grips the peripheral edge of the workpiece 8 while pulling it outward.

[0080] The workpiece 8 whose peripheral edge is gripped by the clamp jig 10 may be transported with its thickness direction aligned with the vertical direction Y. (Matters related to Retention Frame 11) The holding frame 11 may be formed in a shape other than rectangular, provided that it is annular.

[0081] (Matters concerning the placement of clamper 20) The multiple clampers 20 may be arranged at positions different from those in the above embodiment in the holding frame 11. For example, the multiple clampers 20 may be arranged on a pair of second frame portions 14 instead of or in addition to the pair of first frame portions 12.

[0082] The clampers 20 may be arranged at equal intervals from one another in the circumferential direction, i.e., at equal intervals, or may not be arranged at equal intervals as shown in FIG. 1.

[0083] The clamper 20 in one first frame portion 12 and the clamper 20 in the other first frame portion 12 may face each other as shown in FIG. 1, but they do not have to face each other. The number of clampers 20 in one first frame portion 12 may be different from the number of clampers 20 in the other first frame portion 12.

[0084] (Matters concerning the structure of the clamper 20) At least one of the bushing 51 and the washer 55 may be omitted as appropriate. In each shaft pin 45, only the portion between the second clamp piece 25 and the bearing member 31 may be made of a material that can be cut by the blade 70.

[0085] Each bearing member 31 may be fixed to the holding frame 11 by an adhesive portion that fills the gap 34 between the bearing member 31 and the holding frame 11. In this case, the adhesive portion is also provided on the outer edge of the gap 34 between the bearing member 31 and the holding frame 11. In other words, the adhesive portion is provided on at least the outer edge of the gap 34.

[0086] A type of spring other than a coil spring may be used as the elastic member 57. Furthermore, a member other than a spring that has elasticity may be used as the elastic member 57.

[0087] The number of magnetic members 62 built into each first clamp piece 21 may be one or more. The number of permanent magnets 61 built into each second clamp piece 25 may be one or more.

[0088] Instead of the magnetic member 62, a permanent magnet may be built into the first clamp piece 21. The second clamp piece 25 may be rotated about the shaft pin 45 by a force other than magnetic force, thereby gripping and releasing the peripheral edge of the workpiece 8.

[0089] The first clamp piece 21 may be formed of a separate member from the holding frame 11 and fixed to the holding frame 11 . The bearing member 31 may be fixed to a holding frame 11 that is not provided with a recess 33. In other words, the bearing member 31 may be fixed to the holding frame 11 in a state where it is not fitted to the holding frame 11. [Explanation of symbols]

[0090] 8...Work 10...Clamp jig 11...Holding frame 20...Clamper 21...First clamp piece 25...Second clamp piece 31...Bearing member 31a...Mating part 33...recess 33a...Opening 34...Gap 35...Welded section 36...Bearing hole 41...Housing hole 45...Axle pin 49…Cuttable part 57...Elastic member 61...Permanent magnet 62...Magnetic member 70...Knives

Claims

1. The apparatus comprises an annular holding frame that surrounds the outer periphery of a sheet-like workpiece, and a plurality of clampers that are arranged at a plurality of locations in the circumferential direction of the holding frame so as to face inward, Each clamper includes a first clamp piece formed on the holding frame so as to protrude inward from the holding frame, and a second clamp piece arranged in a thickness direction of the workpiece relative to the first clamp piece, A pair of bearing members each having a bearing hole is provided on both sides of each second clamp piece in the circumferential direction of the holding frame, Each second clamp piece has an accommodating hole extending in the circumferential direction therethrough, Each of the accommodating holes accommodates a pair of pivot pins extending in the circumferential direction so as to be able to protrude from and retract into the accommodating holes, and accommodates an elastic member that biases the pair of pivot pins in directions away from each other in the circumferential direction, The pair of shaft pins are supported by the pair of bearing members by inserting their protruding portions from the accommodating holes into the bearing holes, When the workpiece is subjected to a chemical washing treatment, each of the second clamp pieces rotates about the pair of shaft pins relative to the pair of bearing members, thereby gripping and releasing the peripheral portion of the workpiece together with the first clamp pieces from both sides in the thickness direction, Each bearing member is fixed to the holding frame in a state where at least an outer edge portion of a gap formed between the bearing member and the holding frame is filled, A clamping jig for a chemical water washing process, wherein the shaft pin supported by the bearing member has a cuttable portion between the second clamp piece and the bearing member that allows it to be cut with a blade.

2. The entire shaft pin is made of a material that can be cut by the blade, 2. The clamping jig for a chemical water washing process according to claim 1, wherein when the shaft pin is supported by the bearing member, the cuttable portion is formed by a portion of the shaft pin between the second clamp piece and the bearing member.

3. 2. The clamping jig for use in a chemical washing process according to claim 1, wherein the bearing member is fixed to the holding frame by a welded portion provided on the outer edge of the gap between the bearing member and the holding frame.

4. A recess is formed in the holding frame, a portion of the bearing member on the holding frame side is fitted into the recess as a fitting portion, the gap is formed between an inner wall surface of the recess and the fitting portion, The clamping jig for use in a chemical washing process according to claim 3 , wherein the outer edge portion is formed by a portion of the gap that is positioned at an opening of the recess.

5. 2. The clamping jig for a chemical water rinsing process according to claim 1, wherein the second clamping piece has a permanent magnet built in, and the first clamping piece has a magnetic member built in that is thinner than the permanent magnet.

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