Step-structure optical filter

Abstract

When sensing multiple wavelengths of light, filters are provided to ensure that each wavelength of light is directed to a different sensor. The filter may include a substrate. The filter may include a stepped medium disposed on the substrate. The filter may include a first mirror disposed on the stepped medium. The first mirror may form a stepped mirror surface. Each step of the stepped mirror surface may correspond to a set of channels of the filter. The filter may include a spacer disposed on the stepped mirror surface. The filter may include a second mirror disposed on another surface of the spacer.

Description

[Background technology]

[0001] The optical transmitter may emit light toward an object. For example, in a gesture recognition system, the optical transmitter may emit light toward an object. The transmitter may transmit near-infrared light toward the user, and the near-infrared light may be directed from the user to the optical receiver. In this case, the optical receiver may obtain information about the near-infrared light, That information may be used to identify the gesture being performed by the user. In another example, information about visible light, such as information about different wavelengths of visible light, can be obtained. The object can be imaged.

[0002] However, light of the wavelength of interest may be received while propagating towards and / or from the object. During reflection towards the receiver, ambient light may be introduced along with the wavelength of interest. When an optical receiver receives near-infrared light reflected from an object (such as a light bulb or the sun), The optical receiver may also receive visible light (from another source). band to allow one or more wavelengths of light to pass through to the optical receiver. Additionally or alternatively, the optical filter may be optically coupled to an optical filter such as a double-pass filter. When detecting multiple wavelengths of light, each wavelength of light is directed to a different sensor. To ensure that the signal is filtered, a filter may be provided.

[0003] The multispectral sensor device may be an optical receiver that receives information about multiple wavelengths of light. The multispectral sensor device can be used to acquire information and A set of sensor elements (e.g., optical sensors, spectral For example, an array of sensor elements may include a sensor element array (e.g., a sensor element array, a sensor element array, and / or an image sensor). A multispectral filter may be used to obtain information relating to multiple frequencies. The sensor may direct light corresponding to a different frequency at each sensor element. A single binary multispectral filter is used to cover each sensor element in the array. The sensor element array may be arranged to form a channel set for the sensor element array. Summary of the Invention

[0004] According to some possible embodiments, the filter may include a substrate. The filter may include a stepped media disposed on a plate. The first mirror may form a stepped mirror surface. Each step on the stepped mirror surface corresponds to a channel or set of channels in the filter. The filter may include a spacer disposed on the stepped mirror surface. The mirror may include a second mirror disposed on another surface of the spacer.

[0005] According to some possible embodiments, the system comprises a plurality of cells associated with a plurality of channels. The system may include a sensor element array having a variable spacer filter. The variable spacer filter may include a first substrate. The variable spacer filter may include a stepped medium disposed on a first substrate. The first mirror may include a first mirror disposed on a stepped medium. Each step of the stepped mirror surface may form a channel of the filter, The variable spacer filter may correspond to the first mirror set. The cavity may include a second mirror that is alignable with the first mirror. The second mirror may be separated from the first mirror by a distance of 0.05 mm. The first mirror may be translatable relative to the first mirror so as to be variable.

[0006] According to some possible embodiments, the multi-channel filter is configured to form a staircase structure. The multi-channel filter may be disposed on the stepped structure, and the stepped structure may include a medium for The mirror may include a first mirror forming a stepped mirror structure, each step of the stepped mirror structure being The wavelength channels of the multi-channel filter may be formed by a first The first mirror may include a spacer disposed on the first mirror. The first surface of the spacer may be a second surface of the spacer positioned relative to the first mirror to form a stepped surface; The multichannel filter is located on the opposite side of the spacer, forming a flat surface. A second mirror is placed on the surface to form a flat mirror for the multichannel filter. It may include. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a diagram of an exemplary embodiment of a multispectral filter as described herein. [Figure 2] 1 is a diagram of an example embodiment of response balancing of filter channels of a multi-spectral filter described herein. [Figure 3A] FIG. 1 is a diagram of an exemplary embodiment of a multispectral filter as described herein. [Figure 3B] FIG. 1 is a diagram of an exemplary embodiment of a multispectral filter as described herein. [Figure 3C] FIG. 1 is a diagram of an exemplary embodiment of a multispectral filter as described herein. [Figure 3D] FIG. 1 is a diagram of an exemplary embodiment of a multispectral filter as described herein. [Figure 4] FIG. 1 is a diagram of an exemplary process for manufacturing a multispectral filter as described herein. [Figure 5A] 5 is a diagram of an exemplary embodiment of a multispectral filter associated with the exemplary process in FIG. 4. [Figure 5B] 5 is a diagram of an exemplary embodiment of a multispectral filter associated with the exemplary process in FIG. 4. [Figure 5C] 5 is a diagram of an exemplary embodiment of a multispectral filter associated with the exemplary process in FIG. 4. [Figure 5D] 5 is a diagram of an exemplary embodiment of a multispectral filter associated with the exemplary process in FIG. 4. [Figure 5E] 5 is a diagram of an exemplary embodiment of a multispectral filter associated with the exemplary process in FIG. 4. [Figure 5F] 5 is a diagram of an exemplary embodiment of a multispectral filter associated with the exemplary process in FIG. 4. [Figure 5G] 5 is a diagram of an exemplary embodiment of a multispectral filter associated with the exemplary process in FIG. 4. [Figure 5H] 5 is a diagram of an exemplary embodiment of a multispectral filter associated with the exemplary process in FIG. 4. [Figure 5I] 5 is a diagram of an exemplary embodiment of a multispectral filter associated with the exemplary process in FIG. 4. [Figure 5J] 5 is a diagram of an exemplary embodiment of a multispectral filter associated with the exemplary process in FIG. 4. [Figure 5K] 5 is a diagram of an exemplary embodiment of a multispectral filter associated with the exemplary process in FIG. 4. [Figure 6]FIG. 1 is a diagram of an exemplary embodiment of a sensor system including a multispectral filter as described herein. DETAILED DESCRIPTION OF THE INVENTION

[0008] The following detailed description of the embodiments refers to the accompanying drawings. Reference numbers may identify the same or similar elements.

[0009] The sensor element (e.g., an optical sensor) receives information about a set of electromagnetic frequencies (e.g., spectrum It may also be incorporated into an optical sensor device to acquire the desired vector data. For example, The optical sensor device may be an image sensor, a multispectral sensor, and / or Other light sensor measurements may also be performed. Optical sensor devices are based on complementary metal-oxide semiconductor (CMOS) technology, charge-coupled device (CCD) ) technology and / or one or more other sensor technologies. The device has multiple sensors, each configured to capture information about different frequencies of light. The sensor element may include a sensor element (e.g., an array of sensor elements).

[0010] The sensor element may be associated with a filter that filters light onto the sensor element. For example, the sensor element may be a linear variable filter (LVF), a circular barrier Alignment with CVF, Fabry-Perot filter and / or other The Fabry-Perot method may filter out some of the light directed onto the sensor element. In the case of a binary filter structure such as a quartz filter, the reflector (for example, A spacer may be placed between the reflector layer, the spacer layer and / or the mirror. Others, such as refractive index, thickness and / or other configurations, can be used to form binary filter structures. It may be possible to configure the structure to form a set of channels. It may be part of a filter that directs long-range light onto the sensor elements of the sensor element array. In this way, the array of sensor elements can obtain information about multiple different wavelengths of light.

[0011] However, depending on the selected refractive index, spacer thickness and / or other factors, at least A fixed set of channels configured based in part on the wavelength of the sensor element array. Therefore, multi-channel filters and Also called binary multispectral filters, configured to capture light at wavelengths of interest To ensure that the binary multispectral filter is may be designed with more than The array may contain an amount of sensor elements that exceeds a threshold, thereby allowing binary multi-sensing. To allow flexibility in the use of spectral filters, size and / or cost may be excessive.

[0012] Additionally, some binary multispectral filters use different spacer thicknesses. These binary multispectral filters are used to form different channels in different wavelength ranges. The filter consists of multiple layers of spacer material on top of a first flat mirror that is placed directly on the substrate. By disposing the spacer material in a different thickness, different spacer thicknesses can be formed. The layers are arranged to form a spacer with a stepped structure, and the second mirror is attached to the stepped structure of the spacer. However, placing multiple layers of spacer material creates imperfections This may result in a decrease in the optical performance of the binary multispectral filter. For example, if hydrogenated silicon is used as the spacer material, the surface of each layer of hydrogenated silicon The surface may be partially oxidized to silicon dioxide between layers to reduce transmission and angle shift. may cause an increase, and / or other

[0013] Some embodiments described herein include multi-spaced devices with improved spacers. For example, a binary multispectral filter may include: A stepped medium may be included, disposed between the substrate and the first mirror, the first mirror having a stepped a stepped surface; a monolithic spacer disposed on the stepped surface of the mirror; and and a second mirror disposed on the planar surface of the spacer. Forming the spacer in a single step, rather than building a stepped structure by stacking layers Based on this, defects such as surface oxidation may be avoided, which may improve optical performance. For example, monolithic spacers can improve transmission, reduce angular shift, and / or Others may be possible.

[0014] Additionally, some embodiments described herein may be implemented such that the second mirror is directly mounted on the spacer. The second mirror is arranged adjacent to the first mirror and moves relative to the first mirror, rather than being in a fixed position. For example, the second mirror may be translatable relative to the first mirror. (i.e., either the first mirror or the second mirror, or the first The second mirror may be moved), thereby eliminating the gap formed by the spacer. A gap can be provided between the first mirror and the second mirror, and the second mirror can be As the laser moves, the thickness changes. In this way, the wavelength range of a series of channels can be varied. This allows the signal to be dynamically reconfigured to be captured by a sensor element aligned with a series of channels. In this way, it is possible to increase the amount of spectral bands. The amount of multispectral filter channels to cover depends on the fixed gap between the mirrors. This reduces the size and cost compared to fixed multispectral filters. Reductions and / or other effects are achieved.

[0015] FIG. 1 illustrates an exemplary embodiment of a multispectral filter 100 described herein. As shown in FIG. 1, a multispectral filter 100 (e.g., a binary The optical filter array (structure) includes a substrate 110, a medium 120, a first mirror 130-1, a second mirror 130-2, a third mirror 130-3, a fourth mirror 130-4, a fourth mirror 130-5, a fourth mirror 130-6, a fifth mirror 130-7, a fifth mirror 130-8, a fifth mirror 130-9, a fifth mirror 130-1, a sixth mirror 1 The optical system may include two mirrors 130-2, and a spacer 140.

[0016] In some embodiments, the substrate 110 may be associated with an optical sensor device. For example, the substrate 110 may be a substrate for a sensor element for acquiring information (e.g., spectral data). Additionally or alternatively, the substrate 110 does not include any sensor elements. The multispectral filter 100 is aligned with the sensor elements located on a separate substrate. Additionally or alternatively, the multi-spectral filter 100 may be formed on a substrate 1 For example, the multispectral filter 100 may be designed without the on a substrate of an optical sensor device that is not part of the multispectral filter 100; and / or may be placed on other

[0017] In some embodiments, the multi-spectral filter 100 is configured to filter a specific spectral range. For example, the multi-spectral filter 100 may be configured to cover a range of wavelengths in the visible spectrum. near-infrared (NIR) spectral range, mid-infrared (MIR) spectral range and / or It may also be associated with multiple other channels, in which case the multispectral filter 100 is approximately 300 nanometers (nm) to 2500 nm, 360 nanometers (nm ) to 2500nm, about 600nm to about 2000nm, about 350nm to about 750nm , 380nm to about 780nm, about 750nm to about 1500nm, 750nm to about 1 100nm, 900nm to about 2500nm, about 900nm to about 1700nm, about 90 0 nm to approximately 1500 nm, and / or other spectral ranges. In some embodiments, the multi-spectral filter 100 may have eight or more channels. 16 channels or more, 32 channels or more, 64 channels or more, 128 channels or more, 256 It may include more than one and / or other threshold amount of channels.

[0018] As further shown in FIG. 1, the medium 120 is For example, the present invention may be associated with a stepped structure that may form a set of channels. As will be described in more detail below, photolithography procedures are used to form the staircase structure. In some embodiments, as shown, medium 120 may be formed by 20 is stepped along a single axis (i.e., stepped in one dimension) For example, the medium 120 may be composed of eight different channels extending along a single axis. In some embodiments, the medium 120 may be stepped to form a set. , if stepped along multiple axes (i.e., stepped in two dimensions) For example, the medium 120 may be stepped orthogonally along a single axis, resulting in a total of 64 different In some embodiments, the medium 120 may include one or more repeating For example, as shown, the channel formed by the medium 120 The filter 7 may be disposed at the end of the multispectral filter 100, In some embodiments, the medium 120 may provide structural stability to the filter 100. One or more channels may be inactive. For example, one of the channels of medium 120 forming channel 7 may be inactive. The portions of the first mirror 130-1 and the second mirror 130-2 aligned with the pillars are Sometimes, part of the pacer 140 is not clamped, which causes channel 7 to become inactive. may be installed (but remain for structural support). A part of the spacer 140 is sandwiched between the first mirror 130-1 and the second mirror 130-2. Then, channel 7 may be made the active channel.

[0019] In some embodiments, the medium 120 may be formed using a particular material. For example, The medium 120 is a wavelength range over which the multispectral filter 100 acquires spectral data. In this case, the material may be a tantalum-based medium material, a niobium-based medium material, or the like. Silicon dioxide-based media materials, oxide-based media materials, III-V semiconductor-based media Materials, gallium phosphide-based medium materials, germanium-based medium materials, germanium silicon-based medium materials Body materials, dielectric medium materials, polymer medium materials, nitride medium materials, phosphide medium materials The materials may include, for example, carbide-based media materials, combinations thereof, and / or others.

[0020] As further shown in FIG. 1, the first mirror 130-1 and the second mirror 130-2 are In other words, the spacer 140 may sandwich the first mirror 130- The first and second mirrors 130-2 may be separated by a set distance and / or spaced apart. The surface of the mirror 140 is surrounded by a first mirror 130-1 and a second mirror 130-2. In this case, a set of distances may form different channels. For example, The first mirror 130-1 and the first portion of the second mirror 130-2 are aligned to 0. may be separated by a first distance and may define a first channel passing a first wavelength band of light. Similarly, a first mirror 130-1 aligned with channel 1 and The second portion of the second mirror 130-2 is spaced a second distance apart as described. As a result, the medium 120 has a stepped structure, and the spacer 140 also has a stepped structure. and a second filter that passes a second wavelength band of light, as described in more detail herein. A channel may be formed, where the first channel is aligned with the first sensor element. a first component flow for obtaining spectral data relating to a first spectral range; A filter may be formed, the second channel being aligned with the second sensor element and the second scan Form a second component filter to obtain spectral data for the spectral range. That's fine.

[0021] In some embodiments, the mirror 130 may be associated with a particular material. The mirror 130 comprises a set of metal mirror layers (e.g., silver), a set of dielectric mirror layers (e.g., copper), and a set of dielectric mirror layers (e.g., copper). and / or multiple sources of light. The spectral filter 100 directs a portion of the light toward the associated sensor element. In some embodiments, mirror 130 mirrors each channel of multi-spectral filter 100. may be aligned with each sensor element of the sensor element array associated with

[0022] In some embodiments, the spacer 140 may be a For example, the spacer 140 may be a monolithically formed spacer. The first surface of the spacer 140 at the interface with the layer 130-1 is a stepped surface, and the second surface The second surface of the spacer 140 at the interface with the second mirror 130-2 is a flat surface. The stepped surface of the first mirror 130-1 may be formed by depositing a material on the stepped surface of the first mirror 130-1, such that In some embodiments, the spacer 140 is configured to accommodate the multi-spectral filter 100. Certain wavelength ranges, transmittance (e.g., greater than 50%, greater than 70%, greater than 90%, greater than 95%, greater than 99%, 99.9%, 99.99%, etc.), and / or other characteristics. For example, the spacer 140 may be made of a hydrogenated silicon based spacer. Oxide base spacer, germanium base spacer, silicon germanium base spacers, polymer-based spacers, combinations thereof, and / or others. In some embodiments, the spacer 140 may have a refractive index greater than 1.5, Refractive index greater than 1.7, Refractive index greater than 2.5, Refractive index greater than 3.0, Refractive index less than 3.5 The material may have a refractive index greater than or equal to the refractive index of the material.

[0023] In some embodiments, the spacer 140 may include a non-solid spacer material. For example, the spacer 140 is formed by adjusting the size of the spacer 140 (i.e., the first mirror 130-1 and the second mirror 130-2) may be expanded or reduced as described in more detail herein. To allow the material to shrink, a gaseous material (e.g., air or another gaseous material) or In some embodiments, the spacer 140 may be formed from a plurality of spaces. For example, the spacer 140 may include a material forming a first portion of the spacer 140. A solid spacer covering the first mirror 130-1 and a second part of the spacer 140 are formed. The second mirror 130-2 can be translated relative to the first mirror 130-1. Similarly, the spacer 140 may include a liquid spacer that supports the first mirror 130-1. a first solid spacer covering the second mirror 130-1; a second solid spacer covering the second mirror 130-2; and a second To allow mirror 130-2 to translate relative to the first mirror 130-1 The liquid spacer may include a third liquid spacer disposed between the first solid spacer and the second solid spacer. In this way, the spacer 140 can be multi-spectral based on having a stepped structure. Different portions of the filter 100 pass light in different wavelength bands to form different channels. Furthermore, it allows for the creation of a thin film without multiple layers of material or below a threshold of layers of material. In an amount, the spacers 140 are formed based on the threshold of surface oxidation within the spacers 140. may be associated with less than a threshold value of the defect, such as an amount less than a value, thereby Improves the optical performance of the Ruta 100.

[0024] In some embodiments, for example, the medium 120, the first mirror 130-1, the second mirror The layers forming the reflective layer 130-2, the spacer 140 and / or other layers are preferably made of high refractive index material. For example, a silicon layer, a silicon hydrogen layer, a silicon germanium layer, silicon germanium (SiGe) layer, germanium hydride layer, silicon germanium hydride layer and / or or other layer. In some embodiments, for example, the medium 120, the first forming the first mirror 130-1, the second mirror 130-2, the spacer 140 and / or the like. The layers may include a set of low refractive index materials (L layers). For example, silicon dioxide layers, silicon nitride layers, Silicon layer, tantalum pentoxide (Ta2O5) layer, niobium pentoxide (Nb2O5) layer, titanium dioxide TiO2 layer, aluminum oxide (Al2O3) layer, zirconium oxide (ZrO2) layer, yttrium oxide (Y2O3) layer, silicon nitride (Si3N4) layer, and combinations thereof Some layers may be made of specific materials such as silicon germanium. Although it may be described as a material, some layers contain (small amounts of) phosphors, boron, nitrides and and / or others.

[0025] In some embodiments, for example, the medium 120, the first mirror 130-1, the second mirror The layers forming the spacer 140 and / or other components may range from 2 to 200 layers. The refractive index of the layer is determined by the amount of refractive index of the material, such as alternating high and low refractive index layers in a range of layers. In some embodiments, one or more layers may be formed by a sputtering procedure, photolithography, roughing procedure, etching procedure, lift-off procedure, scraping procedure, annealing procedure , by molding procedures, casting procedures, machining procedures, stamping procedures and / or the like. may be manufactured.

[0026] In some embodiments, for example, the medium 120, the first mirror 130-1, the second mirror Each layer forming the layers 130-2, spacer 140 and / or others may have a particular thickness. For example, each layer may be between about 1 nm and about 1500 nm, and 500 nm to about 500 nm, and / or other thicknesses. Alternatively, the multi-spectral filter 100 may have a wavelength range of about 0.1 μm to about 100 μm. , may be associated with a thickness of about 0.25 μm to about 100 μm, and / or other thicknesses. stomach.

[0027] In this way, the multi-spectral filter 100 is formed by the defect formed in the spacer 140. Multiple channels for obtaining spectral data over multiple wavelength ranges with reduced amount of defects This forms a channel, thereby improving the optical performance of the multispectral filter 100.

[0028] As noted above, Figure 1 is provided as an example only. Other examples are possible, and Figure 1 The actual results may differ from those described above.

[0029] FIG. 2 illustrates an exemplary embodiment of a multispectral filter 200 described herein. As shown in FIG. 2, the multi-spectral filter 200 includes a first substrate 110- 1, second substrate 110-2, medium 120, first mirror 130-1, second mirror 130- 2, and spacer 140.

[0030] In some embodiments, the second substrate 110-2 is stacked on the second mirror 130-2. For example, the second mirror 130-2 may be placed on a spacer 140. , the second substrate 110-2 may be disposed on the second mirror 130-2. Alternatively, the second mirror 130-2 may be disposed on the second substrate 110-2. For example, medium 120 may be disposed on a first substrate 110-1, and a first mirror 130-1 may be disposed on medium 1. 20, a spacer 140 may be placed on the first mirror 130-1, and a spacer 140 may be placed on the second mirror The second mirror 130-2 may be disposed on the second substrate 110-2, and the second mirror 130-2 and The first mirror 130-1 and the second substrate 110-2 are aligned with the first mirror 130-1 and the first substrate 110-1. It may be combined.

[0031] As noted above, Figure 2 is provided as an example only. Other examples are possible and should not be construed as limiting the scope of the invention. may differ from that described above.

[0032] 3A-3D are exemplary diagrams of a multispectral filter 300 as described herein. 3A, the multi-spectral filter 300 includes a first A substrate 110-1, a second substrate 110-2, a medium 120, a first mirror 130-1, a second mirror 3A, the matrix 130-1 may include a matrix 130-2, and a spacer 140. As further shown in FIG. The multispectral filter 300 is attached to one or more translation devices 310. .

[0033] As further shown in FIG. 3A, the second mirror 130 of the multi-spectral filter 300 -2 is movable relative to the first mirror 130-1 to vary the thickness of the spacer 140; The spectral range of light passing through the channels of a multispectral filter can be changed. Some implementations described herein use a fixed first mirror 130-1. Although the description is given with respect to the second mirror 130-2 being translated, tilted, or moved accordingly, The first mirror 130-1 may be moved relative to the second mirror 130-2, Both the first mirror 130-1 and the second mirror 130-2 are connected to the translation device 310 and / or or otherwise.

[0034] As shown in FIG. 3B, the second mirror 130-2 is The second substrate 110-2 and the second substrate 110-3 are translated by the translation device 310. The mirror 130-2 is positioned relative to the first substrate 110-1 and the first In some embodiments, the mirror 130-1 may be moved further away from the mirror 130-1. The translation device 310 may include a focusing element, a voice coil motor, a piezoelectric transducer, a sine wave transducer, a gyroscope, a laser diode ... Silicon Microelectromechanical Systems (MEMS) devices, thermomechanical devices, bistable beam switches It may be a switch and / or other.

[0035] As shown in FIG. 3C, the second mirror 130-2 is can be translated by the translation device 310 so as to tilt relative to the mirror 130-1. For example, the second substrate 110-2 may include a tilting device, a plurality of translation devices, and / or In this way, the multispectral filter 300 The wavelength range of the channel is further determined by the second mirror 130-2 and the second mirror 130-3 for the first portion of the channel. a second mirror 130-1 for a second portion of the channel, reducing the distance between the first mirror 130-1 and the second mirror 130-2; Regarding the third part, which increases the distance between the mirror 130-2 and the first mirror 130-1, and / or maintain the distance between the second mirror 130-2 and the first mirror 130-1. or other.

[0036] In some embodiments, the mobile device may receive a first The second mirror 130-2 may be moved relative to the mirror 130-1. During readout of a sensor element aligned with a channel of the spectral filter 300, movement The device is activated to move the second mirror 130-2, causing some channels to receive different wavelengths. A long range may be associated with a channel and other channels may be maintained within a predetermined wavelength range. If a spectral filter contains multiple channels with a common wavelength range, see Figs. For multiple channels 7 as shown in Figures 2 and 3, the mobile device may The first sensor element of the associated first channel reads the second mirror 130-2 at a first position. and a second sensor element of a second channel associated with the common wavelength range. The second mirror 130-2 may be actuated to be read out in a second position. In this way, the multi-spectral filter 200 can provide multiple spectral filters using a common channel. Further, the moving device may move the first sensor element to the first position. and a second location, resulting in multiple scans using a single channel. You can get the spectral range.

[0037] In some embodiments, the spacer 140 is a second mirror relative to the first mirror 130-1. to allow the spacer width to be variable based on the translation of mirror 130-2. For example, the spacer 140 may be constrained by the multi-spectral filter 300. The second mirror 130-2 may be a gas spacer or a liquid spacer that can be sealed. As it translates relative to the first mirror 130-1, the gas or liquid spacer Additionally or alternatively, the spacer 140 can be An additional gas or liquid spacer material is provided between the second mirror 130-2 and the first mirror 130-3. 130-1 and / or removed from the gap. The spacers may be constrained to have a variable thickness.

[0038] As shown in FIG. 3D, a first spacer 140-1 and a second spacer 140-2, etc. A plurality of spacers 140 are disposed between the first mirror 130-1 and the second mirror 130-2. For example, the first spacer 140-1 may cover the first mirror 130-1. The second spacer 140-2 may be a solid spacer, and is spaced apart from the first mirror 130-1 and the second mirror 130-2. The spacer was a gas (or liquid) spacer that allowed for variable separation between the two mirrors 130-1 and 130-2. That's fine.

[0039] As noted above, Figures 3A-3D are provided as examples only. Other examples are possible. It may differ from what is described with respect to Figures 3A-3D.

[0040] FIG. 4 illustrates an exemplary process for fabricating the multispectral filters described herein. 4 is a flowchart of process 400. In some embodiments, one or more of the processes in FIG. The process block is used for etching devices, sputtering devices, photolithography devices, etc. This may be performed by a placement device during the manufacturing procedure, such as by a vice and / or the like.

[0041] As shown in FIG. 4, the process 400 includes disposing a medium on a substrate to form a stepped structure. For example, the placement device may place the medium on the substrate (block 410). In some embodiments, the placement device may be configured to place multiple layers of the medium. For example, multiple layers of photolithographic material may be stacked to form a stepped structure. The layers may be stacked, with multiple layers of media stacked to form a stepped structure. Multiple layers of photolithographic material can be exposed with respect to a photomask, The step-like structure is formed in the plurality of layers of the media by selectively removing the roughening material. The photolithographic formation of the shaped structures is described in detail with reference to Figures 5A-5K. Additionally or alternatively, a medium may be placed on a substrate and an etching procedure may be used to create a stepped surface. For example, the medium may be deposited on a substrate and then etched. Some embodiments described herein may be photolithographically coupled to form a stepped structure. Although described with respect to a lithographic or etching procedure, the formation of a stepped media structure is not Other procedures for achieving this are possible.

[0042] As shown in FIG. 4, the process 400 includes multi-layer mirrors to form a stepped mirror structure. 4. The method may include placing a first mirror for the channel filter on the medium (block 420 For example, the positioning device may position a first mirror on the medium. The first mirror is arranged on a medium having a stepped structure. may be formed.

[0043] As shown in FIG. 4, a process 400 is performed to fabricate spacers for a multi-channel filter. The method may include placing the alignment device on the mirror of the first alignment member (block 430). For example, the alignment device may include: Spacers may be placed on the first mirror, in which case the spacers may be placed using a single placement procedure. The solid spacers may be deposited in a pattern that requires multiple deposition and etching steps. Compared to the spacer arrangement used, the effect of surface layer oxidation on optical performance is reduced. Additionally or alternatively, the spacer may be arranged to separate the first and second mirrors. The spacer may be a liquid or gas spacer that can be inserted into a cavity formed by the spacer. This allows the use of a variable spacer binary multispectral filter with a translatable mirror. In some embodiments, the spacer may form a flat surface. For example, the spacer may have a stepped first surface that interfaces with the stepped mirror surface of the first mirror. and a second surface opposite the spacer may be placed on the first mirror so that the second surface is flat. In this case, the spacer is etched to remove part of the spacer and form a flat surface. In some embodiments, the first mirror or medium may have etched spacers. This can form an etch stop to create a flat surface.

[0044] As shown in FIG. 4, the process 400 includes forming a second mirror on the second surface of the spacer. to form a flat mirror for a multi-channel filter (block For example, the positioning device may be configured to position the first mirror of the spacer so that the mirror is a flat mirror. A second mirror may be disposed on the second surface. In some embodiments, the second mirror is The second mirror may be aligned to the first mirror, for example by placing it on a separate substrate. Alternatively, a second mirror and another substrate may be aligned with the first mirror to form a second mirror and another substrate. The substrate may be translated relative to the first mirror to form variable thickness spacers. In this way, multiple channels may form a multi-spectral filter.

[0045] Although FIG. 4 illustrates exemplary blocks of process 400, in some embodiments, the process The process 400 may include additional blocks, fewer blocks, or different Additionally or alternatively, the process may include Two or more blocks of process 400 may be executed in parallel.

[0046] 5A-5K are diagrams of an exemplary embodiment relating to process 400. K is an exemplary process for fabricating a multispectral filter described herein. Indicates the service.

[0047] As shown by diagram 500 in FIG. 5A, photoresist 552 is applied to substrate 1. 10. As shown by diagram 502, photomask 554 and 556 may be placed on top of the photoresist 552 .

[0048] As shown by diagram 504 in FIG. 5B, photomasks 554 and 555 6, and photoresist 552 is covered by photomasks 554 and 556. As shown in diagram 506, based on the exposure, The portions of the photoresist 552 that are not covered by the photomasks 554 and 556 , may remain disposed on the substrate 110.

[0049] As shown by diagram 508 in FIG. 5C, the layers of medium 120 are attached to substrate 110 and The remaining portion of the photoresist 552 can be stacked. The remaining portions of the photoresist 552 are removed so that the photoresist 552 is not formed on the substrate 110. The remaining portion of the photoresist 552 was removed, leaving a portion of the layer of the deposited medium 120. As shown in diagram 512, another photoresist A layer 552 may be disposed on the medium 120 and the substrate 110 .

[0050] Another photomask (not shown) is then applied, as shown by diagram 514 in FIG. 5D. Based on the use and exposure of the photoresist 552, only a portion of the other layer may remain. As shown by diagram 516, another layer of media 120 may be disposed.

[0051] As shown by diagram 518 in FIG. 5E, the other portions of the photoresist 552 Layers may be removed, resulting in media 120 forming two tiers. As shown, another layer of photoresist 552 is applied over medium 120 and substrate 110. can be placed in

[0052] As shown by diagram 522 in FIG. 5F, another photomask (not shown) ) and exposure, only a portion of the other layer of photoresist 552 may remain. As shown by diagram 524, another layer of media 120 can be placed.

[0053] As shown by diagram 526 in FIG. 5G, the other portions of the photoresist 552 Layers may be removed, resulting in media 120 forming three tiers. Diagram 5 Another layer of photoresist 552 is applied to the medium 120 and the substrate 1, as shown by 28. It can be placed on 10.

[0054] As shown by diagram 530 in FIG. 5H, another photomask 554 and 556 (not shown) and exposure to light, resulting in the formation of a portion of another layer of photoresist 552. As shown by diagram 532, another layer of medium 120 may remain. can be arranged.

[0055] Another layer of photoresist 552, as shown by diagram 534 in FIG. may be removed, resulting in the media 120 forming four tiers. After further photolithography steps, the multispectral filter is The channels at each edge of the medium 120 are common channels, forming a set of six stages. It can be done.

[0056] As shown by diagram 538 in FIG. 5J, first mirror 558 is 20. As shown in diagram 540, A spacer 560 may be disposed on the first mirror 558 so that the first mirror 558 The first surface of the spacer 560 at the interface with the first mirror 5 has a stepped surface. 58. Furthermore, the second surface of the spacer 560 is a non-flat surface. is.

[0057] As shown by diagram 542 in FIG. 5K, the etching procedure removes spacers 560 A portion of the second surface of the spacer 560 may be removed to make the second surface of the spacer 560 a flat surface. As shown in diagram 544, the second mirror 562 is positioned on the flat surface of the spacer 560. In this case, the first surface is stepped and the second surface is flat. In this case, the spacer 560 can be multi-spectral without disposing multiple layers on the spacer 560. This creates multiple channels for the filter.

[0058] As noted above, Figures 5A-5K are provided as examples only. Other examples are possible. It may differ from what is described with respect to Figures 5A-5K.

[0059] FIG. 6 is a diagram of an exemplary embodiment 600 described herein. As such, embodiment 600 includes a sensor system 610. Sensor system 610 includes an optical system The sensor system may be part of the system and may provide an electrical output corresponding to the sensor measurement. The system 610 is used in biometric authentication systems, security systems, and health monitoring systems. systems, object identification systems, spectroscopic identification systems, imaging systems and / or other The sensor system 610 may be part of an optical filter including an optical filter 630. The optical sensor 600 includes a sensor structure 620 and a set of optical sensors 640 (e.g., an array of sensor elements). For example, the optical filter structure 620 may provide bandpass blocking functions and / or other In some embodiments, the optical filter 630 may include an optical filter 630 that performs The paper presents multispectral filters with stepped media and monolithic spacers, as well as tunable Multispectral filters and / or other multispectral filters with thickness spacers The sensor system 610 may transmit the optical signal to a target 660 (e.g., The optical transmitter 650 transmits light toward a target (e.g., a person, an object, etc.).

[0060] The embodiments described herein may be described with respect to optical filters in a sensor system. However, the embodiments described herein may be used in other types of systems and may be implemented in various other ways. The sensor may be used externally and / or elsewhere in the sensor system.

[0061] In some embodiments, alternative arrangements of the optical filter 630 and the optical sensor 640 may be utilized. For example, the optical filter 630 may filter the second portion of the optical signal in the same manner as the input optical signal. Instead of passing the second part of the optical signal in a straight line, the second part of the optical signal is directed to an optical sensor 640 at a different location. In some embodiments, the optical sensor 640 may be oriented in a different direction. Lancchet photodiode, indium gallium arsenide (InGaAs) detector, infrared detector It may be an extractor and / or other.

[0062] As further shown in FIG. 6 and reference numeral 670, the input optical signal is passed through an optical filter. The input optical signal is directed to the structure 620. The input optical signal is a visible, near-infrared, or infrared, mid-infrared and / or other, and the environment in which the sensor system 610 is utilized. For example, the optical filter 630 may include ambient light from the surroundings. If the optical transmitter 650 is a multi-spectral filter, the optical transmitter 650 may be a near field optical transmitter for spectroscopic measurements. Multiple wavelength ranges of infrared light may be directed at the target, and the optical sensor 640 may detect multiple wavelengths of near infrared light. To be able to perform range measurements, the near-infrared light is focused on a target 660 (e.g., The ambient light may be reflected by one or more surrounding objects toward the optical sensor 640. Light may be directed from a light source (eg, a light bulb or the sun) towards the optical sensor 640 .

[0063] In another example, as shown, multiple beams of light may be directed at a target 660, with multiple sub-beams of light. The set may be reflected towards an optical filter structure 620, which may then reflect the light The optical sensor 640 may be positioned at an oblique angle. In some embodiments, a different oblique angle may be used. In some embodiments, the optical filter structure 620 may be used to 40, and from the optical sensor 640 and / or other It can be placed at a distance (e.g., via free space optics), e.g., an optical filter The structure 620 can be formed by, for example, photolithography, sputter deposition techniques (e.g., sputter deposition Inert gas mixtures of argon and helium) and / or other can be used to coat and pattern onto the optical sensor 640.

[0064] In another example, the optical transmitter 650 may be used to detect gestures in a vehicle with a gesture recognition system. Detecting objects in close proximity to both the visually impaired and the visually impaired; (e.g., using LIDAR technology) and / or other The target 660 may be of the type described above, and near-infrared and ambient light may be used to and directed towards the optical sensor 640.

[0065] In some embodiments, a portion of the optical signal is filtered by the optical filter 630 and the optical filter structure. For example, different spacer thicknesses in different channels of the optical filter 630 By this, a first portion of the light can be reflected and a second portion of the light can be passed through. The optical filter 630 has multiple channels formed by spacers associated with a stepped medium. Additionally or alternatively, the optical fiber may include a plurality of channels, each of which may pass a different wavelength of light. , two or more channels may pass a common wavelength of light.

[0066] As further shown in FIG. 6 and reference numeral 680, the optical sensor 640 Based in part on the optical signal, the optical sensor 640 may provide the sensor system 610 with spectroscopic measurements, output for user gesture recognition, object presence detection and / or other purposes The force may provide an electrical signal.

[0067] As noted above, Figure 6 is provided as an example only. Other examples are possible and should not be construed as limiting the scope of the invention as defined by the appended claims. may differ from that described above.

[0068] The foregoing disclosure provides illustrations and descriptions, but is not intended to be exhaustive or to disclose embodiments. It is not intended to be limiting to the precise form disclosed. Modifications and variations are possible in light of the above disclosure. Changes can be made or modifications and variations can be obtained from the embodiments.

[0069] Some embodiments are described herein in relation to thresholds. As used herein, Satisfying the threshold means being greater than the threshold, more than the threshold, higher than the threshold, or equal to or greater than the threshold. Smaller, less than threshold, lower than threshold, equal to or less than threshold, same as threshold and / or other It may point to a value.

[0070] Specific combinations of features may be claimed and / or disclosed in the specification. However, these combinations are not intended to limit the disclosure of possible embodiments. Indeed, many of these features are not specifically recited and / or disclosed in the claims. or may be combined in ways not disclosed in the specification. Each dependent claim may depend directly on only one claim, but disclosure of possible embodiments is includes each dependent claim in combination with every other claim in the set of claims.

[0071] Any element, act, or instruction used in this document is irrelevant unless expressly stated. Furthermore, the phrase "based on" should not be construed as being essential or required. Unless otherwise specified, "based at least in part on" is intended to mean "based at least in part on." [Explanation of symbols]

[0072] 100 Multispectral Filters 110 Substrate 110-1 First board 110-2 Second board 120 Medium 130-1 First Mirror 130-2 Second Mirror 140 spacer 140-1 First spacer 140-2 Second spacer 200 Multispectral Filters 300 Multispectral Filters 310 Parallel Moving Device 400 Exemplary Process for Fabricating Multispectral Filters 410 Process for forming a stepped structure by placing a medium on a substrate 420 the first mirror for the multi-channel filter to form a stepped mirror structure The process of placing the 430 Process for placing spacers for multi-channel filters on the first mirror 440 A second mirror is placed on the second surface of the spacer for multi-channel filtering. Process for forming a flat mirror of 552 Photoresist 554 Photomask 556 Photomask 558 First Mirror 560 Spacer 562 Second Mirror 610 Sensor System 620 Optical Filter Structure 630 Optical Filter 640 Optical Sensor 650 Optical Transmitter 660 Target 670 input optical signal 680 Output Electrical Signal

Claims

1. A component for a filter a stepped media including first pillars forming a first channel and second pillars forming a second channel; a mirror disposed on the stepped medium; a monolithic spacer disposed on the stepped surface of the mirror; wherein the second channel is inactive and the monolithic spacer is located on the first channel but not on the second channel.

2. The filter component of claim 1 , wherein the stepped media is stepped along a single axis.

3. The filter component of claim 1 , wherein the stepped media is stepped along multiple axes.

4. The monolithic spacer comprises: hydrogenated silicon based spacers; Oxide-based spacers, germanium-based spacers, Silicon germanium based spacers, or Polymer Spacer 10. A component for a filter according to claim 1, comprising:

5. The monolithic spacer comprises: a first surface that is stepped and that interfaces with the stepped surface of the mirror; a flat second surface; and The component for a filter according to claim 1 , comprising:

6. 10. The component for a filter according to claim 1, wherein the monolithic spacer has a refractive index greater than 1.5.

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