High-throughput multiplex spectroscopy

Abstract

A method for measuring properties of radiation from different sources, such as moving particles or different spatial locations on each particle, comprising: providing a spatial modulator common to all of the sources having a series of configurations, each of which passes a radiation flux along a path to a respective modulation port; and circulating the common spatial modulator past each of the modulation ports, whereby a series of configurations is applied to each modulation port. The series of configurations comprises a regular array of optical elements on a substrate. In one embodiment, the modulators are arranged in a circular pattern around the axis of rotation of a rotating singulation disk. At least one source is a reference source, which does not interact with the source being analyzed, and the sample source and the reference source are compared.

Description

[Technical Field]

[0001] The present invention relates to a method for increasing the throughput and speed of multiplexed imaging, spectroscopy, and spectral imaging systems. The present invention is primarily targeted to applications requiring high throughput across a large number of channels.

[0002] The present disclosure generally relates to multiplexed spectrometer arrays. One example described herein is a spectrometer array used to classify objects based on their spectral characteristics. The methods described herein can be used to measure the spectral characteristics of multiple streams of objects.

[0003] Related Applications The inventor's prior U.S. Patent No. 8,227,719, published July 24, 2012, describes a method for optically detecting diseased kernels, the disclosure of which may be referenced for further details below.

[0004] The present disclosure relates to the spectrometer disclosed in the High Efficiency Multiplexing patent (hereinafter referred to as the "HEMS patent") by the present inventors, described in U.S. Patent No. 10,585,044, issued March 10, 2020, the disclosure of which may be referenced for the following details.

[0005] The present disclosure relates to modulation devices disclosed in the inventors' patent application entitled "Spatial Modulation Device" (hereinafter referred to as the "SMD Patent"), which is set forth in International Publication No. WO2020 / 097733, published on May 22, 2020, the disclosure of which may be referenced for the following details, corresponding to U.S. 16 / 683,376, filed November 14, 2019.

[0006] The present disclosure relates to the present inventors' "Method and Apparatus for Singulating Particles in a Stream" (hereinafter referred to as the "Singulation Patent"), which is described in U.S. Patent No. 10,933,447, issued on March 2, 2021, and which corresponds to International Publication No. WO2018 / 018155, published on February 1, 2018, the disclosure of which may be referenced for the following details. [Background technology]

[0007] As shown in the singulation patent defined above, food quality characteristics can be noninvasively assessed using spectral measurements. Items with different quality characteristics are then directed along different paths based on the spectral measurements. The commercial uptake of spectral inspection systems is limited by the number of items that can be inspected per unit time (throughput) and the cost per item of inspection. Increasing the speed of measurement leads to a decrease in the signal-to-noise ratio (SNR), thereby reducing the utility of the collected spectral data. While throughput can be improved by increasing the number of spectrometer units, the cost of such units limits the range of economically viable applications. Furthermore, the spectrometer units must be calibrated to a common standard, which further complicates the system. Thus, there is a need for a spectral system with improved SNR performance that can increase throughput at a lower cost per measured item. Summary of the Invention

[0008] According to the present invention, there is provided a method for measuring a characteristic of each of a plurality of radiation fluxes, each originating from a different radiation source of a plurality of radiation sources, comprising the steps of: collecting each radiant flux independently of other radiant fluxes of the plurality of radiant fluxes; providing a spatial modulator common to all of the plurality of radiation sources; the common spatial modulator having a series of structures, each of which passes the radiant flux along one or more modulated flux paths; each radiant flux is associated with a respective modulation port of a separate plurality of modulation ports, and each radiant flux passes through a respective modulation port of the plurality of modulation ports; cycling the common spatial modulator past each of the plurality of modulation ports, whereby the series of configurations is applied to each modulation port; providing a plurality of detectors associated with the radiative fluxes and, for each radiative flux, measuring an amplitude of the radiative flux along each modulated flux path; analyzing the amplitude of the radiative flux associated with each modulation port to provide information regarding a characteristic of the radiative flux from each of the plurality of radiation sources.

[0009] In one important feature, the radiant flux from each different source is further directed in a different direction by the series of arrangements based on a characteristic of the radiant flux.

[0010] In one important feature, the detectors are carried on a first member that moves relative to the common spatial modulator.

[0011] In one important feature, the common spatial modulator is moved relative to the modulation ports, such that the series of structures moves past each of the plurality of modulation ports in turn.

[0012] In one important feature, the common spatial modulator is circularly arranged around a rotation axis, and the common spatial modulator and at least one of the plurality of modulation ports are rotated relative to each other around the rotation axis.

[0013] In one important feature, the common spatial modulator is disposed on a cylindrical surface surrounding the rotation axis.

[0014] In one important feature, the common spatial modulator is stationary and the modulation ports are carried on a rotor.

[0015] In one important feature, each radiation source comprises particles whose properties are to be analyzed, and the radiation flux is interaction radiation reflected, scattered or emitted from the particles.

[0016] In one important feature, at least one source is a reference source, the radiative flux of which does not interact with the particles.

[0017] In one important feature, the particles are singulated into an ordered array of particles in each singulation conduit of the plurality of singulation conduits.

[0018] In one important feature, the method includes measuring the position of the common spatial modulator at at least two different times.

[0019] In one important feature, the series of arrangements includes a regular array of optical elements on a substrate, the array of optical elements having at least three optical elements and at least two optical elements that differentially modulate the radiation incident thereon.

[0020] In one important feature, the optical elements of the spatial modulator direct the modulated electromagnetic radiation in at least two, and preferably three, different directions.

[0021] In one important feature, the optical elements of the common spatial modulator produce at least two, and preferably at least three, different phase changes in the modulated electromagnetic radiation.

[0022] In one important feature, the optical elements of the common spatial modulator change the polarization of the incident radiation being modulated in at least two, and preferably three, different ways.

[0023] In one important feature, the optical elements of the spatial modulator are integrated with the substrate material.

[0024] In one important feature, the optical element is selected from the set of an aperture, a mirror, a diffraction grating, a phase plate, a reflective wedge, a refractive prism, and a polarizer.

[0025] In one important feature, the optical element includes a mirror that can assume at least two different configurations.

[0026] In one important feature, the mirror undergoes at least one change in configuration, the change in configuration occurring when the mirror is not exposed to modulated electromagnetic radiation.

[0027] In one important feature, the position measurement is integrated with the common spatial modulator and uses components in close proximity to the optical elements thereon.

[0028] In one important feature, a common spatial modulator is a flexure forming a closed loop, where the flexure is translated around the loop and optical elements are positioned along the direction of translation.

[0029] In one important feature, the substrate is a rotating disk and the optical elements are positioned at a common radial distance from the axis of rotation.

[0030] The present invention is an array of logical multiplex spectrometer units, each of which accepts an independent radiant flux as input and outputs a spectrum of that radiant flux. Each independent unit is referred to as a channel. Each logical multiplex spectrometer unit has all the physical parts of an independent multiplex spectrometer, but shares at least the physical spatial modulator with other logical units. The logical multiplex spectrometer units can be of the Hadamard type, Fourier transform type, or the type described in the above-mentioned HEMS patent. However, the multiplex spectrometer described in the above-mentioned HEMS patent is preferred because its signal-to-noise ratio is more than 2.5 times better than other types.

[0031] Each logical multiplexed spectrometer unit in the array receives an input flux of radiation and uses a directing arrangement to direct input radiation with different properties to different locations on a common spatial modulator. The spatial modulator is cycled through a series of different configurations, each directing radiation with a different combination of properties to one or more detectors. The amplitude of each modulated radiation combination is measured, and a set of linear equations is solved to determine the properties of the input flux. The radiation can be directed based on a set of properties selected from wavelength, phase, polarization, propagation direction, or source position, or a combination thereof. For example, the directing can be performed by a diffraction grating or a prism directing radiation along different paths based on wavelength. For example, the directing can be performed by an interferometer, which directs an interference pattern onto the spatial modulator. The interference pattern consists of a spatially varying phase difference between two or more interfering radiation beams. For example, the directing can be performed by optical elements such as lenses or mirrors that focus radiation from different positions or directions onto different locations on the spatial modulator. System cost and system complexity are reduced by the arrangement herein of sharing spatial modulators.

[0032] The input flux for each channel is directed onto a modulation region of a common spatial modulator over a range of incidence angles. The modulation region is obtained as the intersection of radiation directed using a logical mask stationary in the reference frame of the directing arrangement, slightly proximate to the spatial modulator. The combination of incidence angle and modulation region proximate to the spatial modulator is called a "modulation port." The common spatial modulator has multiple unique modulation ports. Each logical multiplexing spectrometer unit has one exclusive modulation port. Each modulation port contains N modulator optical elements, where N is the length of the modulation code. The common spatial modulator is moved through a regular, temporary sequence of M configuration states, where M = qM, where q is a real number greater than or equal to 1 and M is an integer. At least N of the M configuration states are different. The configuration states associated with some or all modulation ports may be degraded. That is, the configuration states of the degraded modulation ports modulate radiation in the same way. The configuration states associated with some or all modulation ports may be different. That is, the configuration states associated with different modulation ports modulate the radiation in different ways.

[0033] According to an important feature of the present invention, there is provided a radiation directing arrangement which operates to direct radiation having different characteristics to different locations on the modulating surface. The radiation directing arrangement may, for example, be a grating or a prism which directs radiation having different wavelengths to different locations on the modulating surface.

[0034] According to an important feature of the present invention, a common spatial modulator includes a substrate having an array of spatial regions, where at least two different types of spatial regions exist, and each type of spatial region directs incident radiation in a common direction different from the other types of spatial regions. Each different direction is referred to as a "modulated flux path." The array of spatial regions can be one-dimensional or two-dimensional. The spatial modulator contains at least M=qN spatial regions, where M and N are integers greater than 2 and q is a real number greater than or equal to 1. The spatial modulator has multiple modulation ports, each containing N spatial regions and each having a unique mean angle of incidence. The arrangement of two or more different types of spatial regions within a modulation port forms a code sequence of length N. The spatial regions within a modulation port are referred to herein as "code positions." The spatial modulator can be, for example, an encoder belt, as described in the above-mentioned SMD patent. The common spatial modulator can be, for example, a cylindrical encoder. The spatial modulator can be, for example, a disk encoder. The spatial modulator may be, for example, a micromirror array with each modulation port defined by a different angle of incidence. In some embodiments, the different modulation ports may overlap.

[0035] According to an important feature of the present invention, at least one measurement arrangement is provided for each modulated particle flux path. There may be multiple measurement arrangements for each modulation port. For example, as described in the above-mentioned HEMS patents, multiple measurement arrangements exist in a HEMS spectrometer. For example, a measurement arrangement may be a detector array that measures a modulated characteristic in one direction and an unmodulated characteristic in another (usually orthogonal) direction. The modulated characteristic may be, for example, wavelength, and the unmodulated characteristic may be, for example, spatial coordinate. Upon demodulation, this example produces a linear spectral image.

[0036] According to an important feature of the present invention, there is provided a control system comprising a processing unit, a data storage device, and a communication device. The processing unit comprises an algorithm for analyzing measurements to provide information about the incident particle flux. The processing unit comprises an algorithm that functions to align a common spatial modulator with the position measurements. The control unit may be shared with multiple logically multiplexed spectrometer units.

[0037] According to an important optional feature of the present invention, at least one position measurement device is provided. The position measurement device measures at least one configuration parameter of the spatial modulator, which configuration parameter is used to determine current code sequences for one or more modulation ports. For example, the position measurement device may be a position measurement device described in the above-referenced SMD patent.

[0038] In an important exemplary embodiment that may be used in combination with any of the preceding or following embodiments, the common spatial modulator is an encoded cylinder having a plurality of code sequences of length N arranged around its periphery. A plurality of modulation ports are arranged symmetrically around the axis of the code cylinder on a frame in relative rotational motion with respect to the encoded cylinder. As the cylinder is rotated relative to itself, the code sequence on the cylinder within each modulation port changes. The amplitude of the modulated radiation is measured for each code sequence. In some embodiments, the relative rotation is at a uniform angular velocity. For example, a synchronous motor may provide uniform relative rotation. In some embodiments, the relative rotation is discontinuous. For example, a stepper motor may provide discontinuous relative rotation.

[0039] In an important embodiment that may be used in combination with any of the preceding or following embodiments, modulation may be performed by a digital micro mirror array. For example, multiple modulation ports may be defined by different ranges of incidence angles and micro mirror areas. For example, multiple modulation ports may be defined by distinct regions of the micro mirror array.

[0040] In an important embodiment, which may be used in combination with any of the preceding or following embodiments, the modulation may be performed by an encoder belt, where different modulation patterns are generated by relative rotation between the incident particle flux and the encoder belt, which may be, for example, of the type described in the SMD patents referenced above.

[0041] In an important embodiment, which may be used in combination with any of the above or below embodiments, the code sequence is a cyclic permutation of the base sequence.

[0042] In an important embodiment, which may be used in combination with any of the above or below embodiments, the encoder is a disk.

[0043] In an important embodiment, which may be used in combination with any of the preceding or following embodiments, the encoder sequence is spatially discontinuous. The encoder may, for example, contain both coated and uncoated regions. The uncoated regions may, for example, correspond to the location of seams or structural supports.

[0044] In an important embodiment that may be used in combination with any of the preceding or following embodiments, at least one radiation source is a sample radiation source and at least one radiation source is a reference radiation source, and the sample and reference sources are compared. For example, radiation from a blackbody radiator may be split into two portions using a beam splitter, with the first portion directed to a first modulation port (reference) and the second portion incident on a sample material producing interaction radiation that is directed to a second modulation port (sample). In some embodiments, there may be a single modulation port that receives the reference radiation and multiple modulation ports that receive sample interaction radiation from multiple sample materials.

[0045] In an important embodiment that may be used in combination with any of the preceding or following embodiments, multiple modulation ports may receive interaction radiation from different spatial regions of the sample material. This embodiment may be used to generate a two-dimensional spectral image. For example, each detector position at each modulation port may be a linear array of detectors, where the array axis is perpendicular to the modulation direction and adjacent elements of the detector array measure the radiation amplification from adjacent regions in the unmodulated direction. The detector columns form a column of pixels in the spectral image. Multiple modulation ports configured in the same manner may each receive radiation amplification along the modulation direction from the sample region, with each modulation port corresponding to a column of pixels in the spectral image.

[0046] Implementation of the methods and systems herein includes performing or completing selected tasks or steps manually, automatically, or a combination thereof. Furthermore, depending on the actual implementation of preferred embodiments of the methods and systems herein, some selected steps may be implemented by any firmware, hardware, or software on any operating system, or a combination thereof. For example, as hardware, selected steps of the present invention may be implemented as a chip or circuit. As software, selected steps of the present invention may be implemented as multiple software instructions performed by a computer using any suitable operating system. In any case, selected steps of the methods and systems herein may be described as being performed by a data processor, such as a computing platform, for executing multiple instructions. [Brief explanation of the drawings]

[0047] [Figure 1A] FIG. 1A is a schematic diagram showing a top view of a high-throughput multiplexed spectroscopy system with a cylindrical spatial modulator according to the present invention. [Figure 1B] FIG. 1B is a cross-sectional view taken along line 1B-1B of FIG. 1A. [Figure 2A] FIG. 2A is a schematic diagram showing three modulation ports on a portion of a spatial modulator. [Figure 2B] FIG. 2B is a cross-sectional view taken along line 2B-2B of FIG. 2A. [Figure 3] Figure 3 is taken from the above-mentioned International Publication No. 2020 / 097733 and shows a set of optical elements in an example series configuration on a common spatial modulator. [Figure 4] 4 and 5 show an arrangement according to the present invention using components cited from the above-mentioned U.S. Pat. No. 10,933,447, illustrating the source of the radiative flux as particles are singulated on a disk carrying the singulation conduit. DETAILED DESCRIPTION OF THE INVENTION

[0048] Embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. Detailed descriptions of structures or processes well known in the art may be omitted to avoid obscuring the subject matter of the present disclosure. Furthermore, in the following description of the present disclosure, various specific definitions found in the following description are provided to provide a general understanding of the present disclosure, and it is apparent to those skilled in the art that the present disclosure can be implemented without such definitions.

[0049] FIG. 1A shows a schematic plan view of a preferred embodiment of the present invention, generally designated 41. A first platform (42) has a cylindrical spatial modulator (43) rigidly attached thereto. A second platform (45) is rotated relative to the first platform (42) about axis (47A) by a motor (46) attached to a drive shaft (7). As shown, the first platform (42) is stationary, and the second platform (45) rotates as indicated at (44). In an alternative embodiment, the second platform (45) is stationary, and the first platform (42) rotates. In another alternative embodiment, the platforms (42) and (45) rotate relative to a stationary frame of reference at different rotational rates. Only relative rotation between the platforms (42) and (45) is required.

[0050] As shown, the second platform (45) is rigidly mounted and has six identical logical multiplex spectrometer units designated (48), (49), (50), (51), (52), and (53). The logical multiplex spectrometer (48) includes a radiation source (54), collimating optics (55), a dispersive element (56), focusing optics (57), a modulation port (58), collection optics (61), and a radiation detector (62). The optical arrangement shown is for illustrative purposes only. Other optical arrangements may be used. The only optical elements essential to the present invention are the radiation source (54), modulation port (58), and detector (62).

[0051] The radiation source (54) represents the flux of radiation collected from the sample region. The radiation source (54) can be, for example, a relay mirror that directs the radiation collected from the sample region by focusing optical elements (not shown). The radiation source (54) can be, for example, an optical fiber that transmits the radiation flux collected from the sample region by focusing optical elements (not shown). The primary rotating source (64) can be, for example, a relay mirror that directs the radiation collected directly from a blackbody or bulb by focusing optical elements (not shown). This source (64) directs radiation to the flux source (54) of the spectrometer unit (48) and to the flux source (63) of the spectrometer unit (49). The source (53) therefore originates directly from the primary source (64) without interaction with the sample. If the radiation source (54) is an interaction radiation resulting from radiation from a blackbody or bulb source incident on the sample, the ratio of the amplifications from the radiation sources (54) and (63) can be used to calculate a transmittance spectrum, a reflectance spectrum, or an absorbance spectrum. Each of the radiation sources (54), (63), (65), (66), (67), and (68) of units (48) to (53) can be, for example, an optical element transmitting flux from adjacent regions of the sample material, and the spectra calculated for each region from the modulated fluxes are combined to form a spectral image.

[0052] However, units 48 to 53 may further comprise independent units each associated with a separate channel of the singulator and operating independently in each channel on the singulated particles.

[0053] In an exemplary embodiment, the sample region is a food particle illuminated by broadband near-infrared radiation, and radiation scattered and / or transmitted by the food particle is collected and directed to a radiation source (54). Further, in an exemplary embodiment, the food particle is singulated by the arrangement described in the singulation patents referenced above. The singulation arrangement may be integral to a second platform (45) having a motor (46) that provides relative rotation for both the singulation process and the spatial modulation process. The food particle to be singulated may be, for example, wheat kernels.

[0054] The collimating optics (55) can be a first optical element that focuses radiation from the source (54) through an aperture, and a second optical element that focuses divergent radiation from the aperture into a collimated beam. In some arrangements, the radiation source (54) may be small enough to function as an aperture, in which case only the second optical element is used.

[0055] The collimated radiation is directed to a dispersive element (56), which may be, for example, a prism, as shown schematically. Alternatively, the dispersive element (56) may be a diffraction grating. A dispersive element is generally any optical element that directs radiation in different directions based on properties of the radiation, such as wavelength, phase, or polarization.

[0056] The dispersed radiation is directed to a focusing element (57) that images radiation with different properties onto a modulation port (58). The extent of the modulation port (58) is represented by (59) and (60). The modulation port (58) is a surface slightly closer to the spatial light modulator (43) bounded by the lines at (59) and (60). For example, radiation dispersed by the dispersive element (56) may be focused by element (57) such that the wavelength increases along the modulation port (58) from (59) to (60).

[0057] In the axial direction (47A), the focused radiation incident on the modulation port may vary along several spatial dimensions of the sample region, for example, the radiation in the axial direction of the modulation port may vary along the wheat kernel axis in the exemplary embodiment.

[0058] Incident radiation on the modulation port (58) is modulated by the spatial modulator (43), and the modulated radiation is focused by the focusing element (61) onto the detector (62), which measures the amplitude of the modulated radiation. As shown in Figure 1A, there is one modulation path and one detector associated with each modulation port, corresponding to the Hadamard case.

[0059] In the HEMS embodiment (shown in FIGS. 2A and 2B), there may be multiple modulation paths and a detector associated with each modulation path. Detector (62) is in communication with controller (78), as represented by (79C). Controller (78) is in communication with motor (46) and is operable to adjust the speed of relative rotation between first platform (42) and second platform (45), respectively, as represented by (76C). Control means (78) is in communication with displacement sensor (79), as represented by (79C), operable to measure the relative angular displacement between first platform (42) and second platform (45), respectively. Sensor (79) is preferably a displacement measurement arrangement as described in the SMD patents referenced above. Alternatively, sensor (79) may be any magnetic or optical device that measures relative angular displacement. The control means 78 uses the measured angular displacement to determine the code sequence operable at each instant in each of the modulation ports 58, 581, 582, 583, 584, and 585 of the logical multiplex spectrometers 48 through 53. Each logical multiplex spectrometer communicates with the control unit 78 in the same manner as shown for unit 48. For simplicity, only the connections to unit 48 are illustrated. The control unit 78 uses the code sequence operating at each modulation port to construct a data vector for each channel and associated modulation port and determines a position within that data vector assigned to each measurement of modulated flux amplitude. Each element of the data vector corresponds to a different displacement between the platforms 42 and 45 measured by the sensor 79. As described in the SMD patent, the amplitude assigned to each element of the data vector can be obtained via a least-squares fit to a series of measurements taken at positions proximate to the calibrated edges of the code sequence. In the Hadamard case, one modulated flux amplitude is associated with each modulation port per code sequence, whereas in the HEMS case, multiple flux amplitudes are associated with each modulation port per code sequence.The controller 78 solves a system of equations involving the code sequences and associated amplitudes to determine the characteristics of the radiated flux at each channel and associated modulation port. A complete description of the calculations is given in the HEMS patent referenced above.

[0060] The spatial modulation is affected by the rotation of the modulation ports (58) and (581) through (585) of the cylindrical spatial modulator (43). Each modulation port uses a portion of the spatial modulator (43) over one complete rotation of the platform (45) relative to the spatial modulator (43). At any instant, only the portion of the spatial modulator (43) immediately adjacent to each modulation port is used. The spatial modulator (43) can have a fixed modulation pattern, in which case the modulation code sequence operable at each modulation port depends only on the angular displacement between the first and second platforms. Alternatively, the modulation pattern can change dynamically, as discussed in the SMD patents mentioned above. The code sequence operable at each modulation port at any instant can generally be different. In some embodiments, the number of code sequences on the spatial modulator (43) is an integer multiple of the number of modulation ports. In this special case, the code sequence operable at each modulation port at any instant can be identical.

[0061] FIG. 1B shows a cross-sectional view of FIG. 1A illustrating the axial arrangement of the structures discussed above.

[0062] Figure 2A shows a portion of the spatial modulator (43) that is translated as indicated at (44). While the features of the spatial modulator are discussed with reference to the cylindrical example of Figure 1A, the following description also applies to the other tape, disk, and mirror array spatial modulator layouts discussed in the above-mentioned SMD patents. The spatial modulator (43) includes regions (91) that reflect incident radiation and regions (92) that transmit incident radiation. The spatial modulator may further absorb, refract, diffract, and phase modulate the incident radiation, as discussed in further detail in the above-mentioned SMD patents.

[0063] As shown, spatial modulator 43 includes registration marks 93 and 94 that encode the beginning of a code sequence and a displacement within the code sequence, respectively, features used by displacement sensor 79, as discussed in further detail in the SMD patent.

[0064] Three modulation ports are shown in FIG. 2A and labeled (101), (102), and (103), respectively. Modulation port (101) has a linear range denoted by (A1). Modulation port (102) has a linear range denoted by (A2). Modulation port (103) has a linear range denoted by (A3). In some embodiments, the spatial modulation ports are spatially separated, as exemplified by ports (101) and (102). The start of modulation port (102) is Φ from the beginning of modulation port (101). 12 offset by Φ 12 is greater than the port range (A1). Here, there is no spatial overlap between modulation ports (101) and (102). In some embodiments, the modulation ports overlap spatially but differ in angle of incidence, as exemplified by modulation ports (102) and (103). The offset from the start of modulation port (102) to the start of modulation port is Φ 23 which is smaller than the range (A2) of the modulation port (102).

[0065] Radiation flux is incident on the modulation port, as shown at (71), and is either reflected along path (81A) to detector (62A) or transmitted along path (81B) to detector (62B). In FIG. 1A, a single detector (62) is shown corresponding to a Hadamard-type embodiment of the present invention. In FIG. 2A, detectors (62A) and (62B) correspond to HEMS embodiments of the present invention. HEMS embodiments are discussed in more detail in the HEMS patents referenced above.

[0066] The radiant flux is incident on modulation port (102), as shown at (72), and is either reflected along path (82A) to detector (62C) or transmitted along path (82B) to detector (62D). As shown, the angle of incidence for spatial modulation port (102) is the same as the angle of incidence for spatial modulation port (101). The radiant flux is incident on modulation port (103), as shown at (73), and is either reflected along path (83A) to detector (62E) or transmitted along path (83B) to detector (62F). As best seen in FIG. 2B, the angles of incidence for radiant flux (72) and radiant flux (73) are different. As shown in FIG. 2B, the reflected rays (82A) and (83A) are angularly separated and are independently detected by detectors (29A) and (39A), respectively. Similarly, transmitted beams 82B and 83B are angularly separated and are independently detected by detectors 29B and 39B, respectively.

[0067] Figure 3 shows a perspective view of an optical element configuration that can be used in a preferred embodiment of the present invention. A movable substrate (10) in the form of a tape or strip forming the common modulator (43) of Figure 1A translates from left to right in a direction designated by (30) at a velocity (V) across an area (200) where incident electromagnetic radiation is incident on the substrate (10), while carrying an array (40) of optical elements (111) including components (11), (12), (13), (14), (15), (16), (17), and (19). Area (200) is designated the active area, and adjacent areas (201) are designated the inactive areas. In Figures 1 and 2, the input ports correspond to the active areas in Figure 3. The optical elements within the active area (200) modulate the incident electromagnetic radiation to an "on" state. The optical elements in the active region (201) modulate the incident electromagnetic radiation to an "off" state. The segment shown is preferably part of a closed loop of total length L. The active region (200) has a length A. The optical elements in the active region will direct the incident EM radiation in different directions specified by the type of optical element, for a time period A / v, with a repeating period L / V.

[0068] The optical element (11) is an aperture that allows incident EM radiation to pass through it substantially unchanged except for diffraction effects by the edges of the aperture. Diffraction effects are minimized when the sides of the aperture are much larger than the wavelength of the incident EM radiation. The aperture (11) is in the inactive region (201) and therefore no EM radiation passes through it during the illustrated instant of illumination. However, the aperture (11) enters the active region (200) after the substrate (10) has moved in the direction (30). Modulation is achieved because transmission through the aperture (11) occurs only when the aperture (11) is in the active region (200).

[0069] The optical elements (12) and (13) are diffraction gratings with different pitches. Incident EM radiation at each wavelength is diffracted into multiple orders. For order 0, the EM radiation is reflected in the same direction by the diffraction gratings (12) and (13). For orders other than 0 (i.e., + / - 1), the diffraction gratings (12) and (13) diffract the incident EM radiation at different angles. The diffraction grating (12) is entirely in the inactive region (201), and therefore, EM radiation is not observed at angles determined by the pitch of the diffraction grating (12). The diffractive structure (13) is partially in the active region (200), and therefore, as long as the diffraction grating (13) remains within the active region (200), it directs the incident EM radiation at angles determined by the diffraction pitch. The optical elements (12) and (13) may consist of dynamically adjustable micromirror arrays whose pitch can be changed by changing the orientation of the rows of micromirrors while in the inactive region (201).

[0070] Optical elements (14) and (15) are mirrors tilted at different angles relative to the incident EM radiation (100), causing the EM radiation to be reflected at different angles while mirrors (14) and (15) are in the active region (200). Detectors positioned at the appropriate reflection angles for each observe the reflected EM radiation, a possible slight presence that may represent, for example, a binary "1." As substrate tape (10) translates in direction (30), optical element (15) enters inactive region (201), and after a short time, optical element (15) reenters inactive region (201). The absence of reflected EM radiation may represent, for example, a binary "0." In some embodiments, the angle of tilt of mirror elements (14) and (15) may change while the elements are in the inactive region (201).

[0071] Optical elements (16) and (17) are reflective mirrors parallel to the substrate surface. Incident EM radiation is reflected by each at the same angle but with different phases due to differences in height above the average substrate plane. Optical elements (16) and (17) can be, for example, Fabry-Perot filters or part of an interferometer. Optical elements (16) and (17) can be, for example, part of a step-scan Michelson interferometer. As shown, optical elements (16) and (17) are in an active region (200). With translation in direction (30), optical elements (16) and (17) enter a non-active region (201), where, in some embodiments, the height of the mirror surface can be changed to generate a different phase shift at the next repeat period for elements L / V.

[0072] The optical element (19) is a dispersive prism with an adjacent buffer region (18), both of which are within the non-active region (201). When the prism is in the active region (200), incident EM radiation is refracted at an angle determined by the prism geometry and refractive index of the prism. In some embodiments, the buffer region (18) is used to provide an unobstructed optical path for adjacent optical elements. In some embodiments, the optical element is not adjacent to the buffer region.

[0073] The array of position indicators is adjacent to and parallel to the array of optical elements (40) and is designated (20). As shown, the position indicators are apertures that transmit a probe beam (not shown) when a portion of the aperture intersects the probe beam. A detector (not shown) measures the intensity of the transmitted probe beam and a computing device calculates the position of the substrate relative to the probe beam.

[0074] The arrangement herein of Figures 1A and 1B, in which the source, port and detector are carried on a rotating disk (45) and the common modulator remains stationary on a second disk (42) relative to the rotation of disk (45), is particularly useful in the apparatus of the singulation patents mentioned above.

[0075] As shown in Figures 4 and 5, disks 42 and 45 are shown, which in their arrangement include components of spectrometer units 48 to 53, which are not shown for convenience of illustration, each of which is associated with a respective channel 414 of the singulation unit shown.

[0076] As described in the above patents, the singulation unit is arranged to separate particles based on a measurable parameter of the particles.

[0077] The apparatus includes a supply conduit (410) that conveys sorted particles from a feed supply (410A) that delivers the particles in a continuous stream for display, through the conduit to a rotor (411) rotatable about an axis (412). In the embodiment shown, the rotor is a flat disk having an axis (412) that is vertically oriented so that the disk provides an upper horizontal surface onto which the particles (413) are delivered in a stream from the conduit (410). The conduit is positioned at the center of the disk, so that the particles are deposited on the center of the disk as it rotates, but at a location where there is a slight outward velocity. The velocity of the particles, optionally kernels, at this point is from the flow in the supply conduit (410). The velocity at a point on the disk is v = wr, where w is the angular velocity and r is the radius. If the kernels are deposited in an area where the change in velocity is too high, they will bounce around and the flow will become chaotic. The kernels are deposited in a central area to minimize variations in velocity.

[0078] On the upper surface of the disk forming the rotor, a plurality of conduits (414) are provided, each extending from an inner end (415) outwardly adjacent the axis to an outer end (416) spaced outwardly a greater radial distance from the axis than the inner end. In this embodiment, the outer ends (416) of the conduits are adjacent to the edge (417) of the disk (411) but spaced inwardly from the edge. In this embodiment, each conduit (414) extends from a position proximate the center to the periphery (417) of the disk, such that the central conduits are closely spaced side by side, and the conduits diverge outwardly so that they are spaced apart around the periphery (417) at the outer end (416).

[0079] The inner ends (415) are thus arranged in an array adjacent the axis, such that the feed conduits (410) serve to deposit particles to be classified at the inner ends (415) of the conduits for entry of the particles to the inner ends. Because the inner ends are close to each other at the center of the disk, particles present there form a central pile that is automatically sorted uniformly at their inner ends into the openings of the conduits. Assuming a series of piles of particles exist at the center, the rotation of the disk serves to uniformly sort the particles into individual conduits in a stream defined by the size of the openings relative to the size of the particles. At the beginning of their path along the conduit, the particles are close to each other or overlapping. However, as the particles are accelerated by centrifugal force, their path along the conduit serves to spread each particle away from the next to form a line of particles without overlapping. As centrifugal force increases with increasing radial distance from the axis (412), the particles are accelerated further, and therefore the distance between particles increases along the length of the conduit. The kernels are axially aligned with the conduit in a first portion of the conduit, and the kernel lengths define an initial center that is spaced apart with some variation due to differences in kernel size. The centrifugal acceleration is constant at a given radius, but the frictional force on the kernels varies by approximately 20%. The frictional force scale has the Coriolis force = uN (u = coefficient of friction, approximately 0.2 to 0.25; N = normal force against the conduit wall, primarily provided by the Coriolis force). As noted above, the conduit can be shaped to minimize normal force and friction by curving the conduit along the net force line (as described above). Conversely, particle acceleration can be reduced by curving the conduit to increase normal force, curving the conduit to a constant or uniform decreasing radius, or increasing the coefficient of friction of selected portions of the conduit by changing the texture and / or material.

[0080] The selection of conduit length relative to particle size can be made so that the distance between each particle and the particle following it can be selected as a percentage of the particle's length. In instances where a separator is used for seeds, the separation between each seed and the next seed can be at least equal to the seed's length, typically 1.5 or 2.0 times the seed's length.

[0081] Thus, the conduit is shaped and arranged so that the particles are accelerated as they pass from the inner end to the outer end, which causes the particles to align in sequence in a column as they move towards the outer end.

[0082] The outer ends (416) are arranged in an angularly spaced array about the circumference of the rotor, such that the particles in each conduit are expelled outward from the axis of the disc by centrifugal force from the disc. All of the openings lie in a common radial plane of the disc. The conduits can be formed as grooves cut into the top surface of a thicker disc or by additional walls applied to the top surface of the disc, or as guides with two- and / or three-dimensional shapes.

[0083] An array (420) of particle separators (421) is arranged in a ring at the outer edge (417) of the disk, such that the individual separators (421) are positioned at angularly spaced positions around the disk.

[0084] Each separator is operable to direct each particle into one of a plurality of paths defined by operation of the separator.

[0085] To control the separator 421, a measurement system generally designated 428 is provided, which is used to measure a selected parameter or parameters of particles as they move from the end of the conduit at the edge of the disk towards the separator. The measurement system is carried on a mounting ring 428A.

[0086] The measurement system can be of any suitable type known in the art, for example an optical measurement system that detects certain optical properties of the particles in order to determine the particular parameter that needs to be measured. Other measurement systems can also be used, as the type of system used and the parameters selected are not part of the present invention.

[0087] Typically, particle analysis relates to the presence of diseased seed degeneration, which can often be detected optically, for example, using the system disclosed in the above-mentioned earlier U.S. Pat. No. 8,227,719.

[0088] Each separation device (421) is associated with a respective detection device (428), each detection device may include multiple detection components, and each separation device is operable to measure parameters of particles and in response to the parameters measured by the associated detection device, each separation device is operated to select path (422) or path (424).

[0089] It should be understood that the number of paths can be modified to include more than two paths, if necessary, depending on the parameters to be measured. Such an option to increase the number of paths can be implemented by providing a subsequent separation device (421) located downstream of the initial separation. In this case, one or both of the paths can be split into two or more auxiliary paths, with all of the separation devices controlled by a control system (429) that receives data from the measurement device (428).

[0090] The disc (411) therefore has a front face (430) facing the supply conduit, the conduit (414) being in the radial plane of the disc and extending outwardly from the axis to the periphery (417) of the disc (411).

Claims

1. 1. A method for measuring a characteristic of each of a plurality of radiation fluxes, each originating from a different radiation source of a plurality of radiation sources, comprising: collecting each radiant flux independently of other radiant fluxes of the plurality of radiant fluxes; collecting, wherein each independently collected radiative flux from each of the plurality of radiation sources is associated with a respective modulation port of a separate plurality of modulation ports, and each collected radiative flux passes through a respective modulation port of the plurality of modulation ports; providing a spatial modulator common to all of said plurality of radiation sources; providing the common spatial modulator having a series of configurations, in each configuration of the series, the common spatial modulator acting on the radiation flux from each of the plurality of radiation sources to pass the radiation flux along one of a plurality of modulated paths; cycling the common spatial modulator so that it passes through each of the plurality of modulation ports, whereby the series of configurations is applied to the radiation flux from each of the radiation sources associated with each modulation port; providing, for each radiative flux, a plurality of detectors associated with the radiative flux that measure the amplitude of the radiative flux along each modulated path; analyzing the amplitude of the radiative flux associated with each modulation port to provide information regarding a characteristic of the radiative flux from each of the plurality of radiation sources; A method comprising:

2. The method of claim 1 , wherein the radiative flux from each different radiation source is directed in a different direction by the series of arrangements based on a characteristic of the radiative flux.

3. 3. The method of claim 1, wherein the plurality of detectors are carried on a first member that moves relative to the common spatial modulator.

4. 4. A method according to claim 1, wherein the common spatial modulator is moved relative to the plurality of modulation ports, whereby the series of arrangements moves past each of the plurality of modulation ports in turn.

5. The method of claim 4 , wherein the common spatial modulator is arranged circularly around an axis of rotation, and the common spatial modulator and at least one of the plurality of modulation ports are rotated around the axis of rotation.

6. The method of claim 5 , wherein the common spatial modulator is disposed on a cylindrical surface surrounding the axis of rotation.

7. The method of claim 5 , wherein the common spatial modulator is stationary and the multiple modulation ports are rotated.

8. 8. The method of claim 1, wherein each radiation source comprises a particle, the properties of which are analyzed, and the radiation flux is interaction radiation reflected, scattered or emitted from the particle.

9. The method of claim 8 , wherein the particles are singulated into aligned rows of particles in each singulation duct of a plurality of singulation ducts.

10. 10. The method according to claim 1, wherein at least one source is a reference source, the radiative flux of said at least one source not interacting with the sample source to be analyzed.

11. The method of claim 10 , wherein the sample source and the reference source are compared.

12. The method of claim 1 , wherein the multiple modulation ports receive the radiative flux from different spatial regions of a single sample material.

13. 13. A method according to any preceding claim, comprising measuring the position of the common spatial modulator at least at two different times.

14. The method of claim 13 , wherein the position is measured by a component integrated with the common spatial modulator.

15. 15. The method of claim 1, wherein the series of arrangements comprises a regular array of optical elements on a substrate, the array of optical elements having at least three optical elements, at least two of the at least three optical elements differently modulating the incident radiation flux.

16. The method of claim 15 , wherein the optical elements of the common spatial modulator direct the radiation flux in at least two different directions.

17. 17. The method of claim 15 or 16, wherein the optical elements of the common spatial modulator generate at least two different phase variations of the radiation flux.

18. 18. The method of any of claims 15 to 17, wherein the optical elements of the common spatial modulator modify the polarization of the radiation flux in at least two different ways.

19. 19. The method of any of claims 15 to 18, wherein the optical elements of the common spatial modulator are integrated with the substrate.

20. 20. The method of any of claims 15 to 19, wherein the substrate is a rotating disk and the optical elements are positioned at a common radial distance from an axis of rotation.

21. 21. The method according to any of claims 15 to 20, wherein the optical element is selected from the set of an aperture, a mirror, a diffraction grating, a phase plate, a reflective wedge, a refractive prism, and a polarizer.

22. 22. The method of any of claims 15 to 21, wherein the optical element comprises at least one mirror that can assume at least two different configurations.

23. 23. The method of claim 22, wherein the at least one mirror undergoes a change of configuration at least once, the change of configuration occurring when the at least one mirror is not exposed to the radiant flux.

24. The method of claim 1, wherein the detector is a linear array that measures a modulated characteristic in one direction and an unmodulated characteristic in another direction to generate a linear spectral image, the modulated characteristic being wavelength and the unmodulated characteristic being spatial coordinates.

25. The method of claim 24, further comprising: each of a plurality of modulation ports configured to receive radiation amplitudes from a sample region along a modulation direction; each of the modulation ports associated with a linear array detector to generate a linear spectral image; and the linear spectral images from the plurality of modulation ports combined to generate a two-dimensional spectral image.

26. A method for measuring a characteristic of each of a plurality of radiant fluxes, each of the radiant fluxes emanating from a different one of a plurality of radiant sources, comprising: collecting each radiant flux independently of other radiant fluxes of the plurality of radiant fluxes; collecting, wherein each independently collected radiative flux from each of the plurality of radiation sources is associated with a respective modulation port of a separate plurality of modulation ports, and each collected radiative flux passes through a respective modulation port of the plurality of modulation ports; providing a spatial modulator common to all of said plurality of radiation sources; providing the common spatial modulator having a series of configurations, in each configuration of the series, the common spatial modulator acting on the radiation flux from each of the plurality of radiation sources to cause a Hadamard modulation of the radiation flux along a modulated path; cycling the common spatial modulator so that it passes through each of the plurality of modulation ports, whereby the series of configurations is applied to the radiation flux from each of the radiation sources associated with each modulation port; providing, for each radiation flux, a respective detector associated with said radiation flux, which measures the amplitude of the Hadamard-modulated radiation flux; analyzing the amplitude of the radiative flux associated with each modulation port to provide information regarding a characteristic of the radiative flux from each of the plurality of radiation sources; A method comprising:

27. ​​The method described in claim 26, wherein the detector is a linear array that measures a modulated characteristic in one direction and an unmodulated characteristic in another direction to generate a linear spectral image, the modulated characteristic being wavelength and the unmodulated characteristic being spatial coordinates.

28. The method of claim 27, further comprising: each of a plurality of modulation ports configured to receive radiation amplitudes from a sample region along a modulation direction; each of the modulation ports associated with a linear array detector to generate a linear spectral image; and the linear spectral images from the plurality of modulation ports combined to generate a two-dimensional spectral image.

Images