Mask and mask manufacturing method

Abstract

To provide a mask having reliability improved to a vapor deposition process, and a method for manufacturing the same.SOLUTION: A method for manufacturing a mask comprises steps of: preparing a mask sheet and a frame; pulling the mask sheet to fix the pulled mask sheet to the frame; and forming a plurality of cell openings on the mask sheet fixed to the frame. The step of forming the plurality of cell openings may includes steps of forming a plurality of preliminary cell openings on the mask sheet fixed to the frame and forming the plurality of cell openings so as to correspond to the plurality of preliminary cell openings, respectively.SELECTED DRAWING: Figure 4D

Description

[Technical Field]

[0001] The present invention relates to a mask and a mask manufacturing method, and more particularly to a mask and a mask manufacturing method with improved reliability. [Background technology]

[0002] The display panel includes a plurality of pixels, each of which includes a driving element such as a transistor and a display element such as an organic light-emitting diode (OLED). The display element is formed by laminating electrodes and a light-emitting pattern on a substrate.

[0003] The light emitting pattern is patterned using a mask that defines a through-hole so that the light emitting pattern is formed in a predetermined area. The light emitting pattern is formed in the area exposed by the through-hole. The shape of the light emitting pattern is controlled according to the shape of the through-hole. Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE INVENTION An object of the present invention is to provide a mask and a method for manufacturing the mask that have improved reliability in the deposition process.

[0005] In one embodiment of the present invention, after the mask stretching and welding process, laser processing of the cell openings is performed to improve the processing precision of the cell openings and reduce the dead space.

[0006] A mask and a mask manufacturing method according to one embodiment of the present invention aim to improve the processing precision of cell openings by reducing the tensile force of a mask sheet that is stretched through pre-processing before laser processing of the cell openings. [Means for solving the problem]

[0007] The mask manufacturing method of the embodiment includes the steps of preparing a mask sheet and a frame, stretching the mask sheet and fixing the stretched mask sheet to the frame, and forming a plurality of cell openings on the mask sheet fixed to the frame.

[0008] The step of forming the plurality of cell openings includes the steps of forming a plurality of spare cell openings on the mask sheet fixed to the frame, and forming the plurality of cell openings to respectively correspond to the plurality of spare cell openings.

[0009] The size of each of the plurality of spare cell openings is 25% to 90% of the size of each of the plurality of cell openings.

[0010] The shape of the plurality of spare cell openings is different from the shape of the plurality of cell openings.

[0011] The step of preparing the mask sheet includes a step of forming a plurality of preliminary cell openings on the mask sheet, and the step of forming the plurality of cell openings includes a step of forming the plurality of cell openings to respectively correspond to the preliminary cell openings.

[0012] Any of the preliminary cell openings is removed in the step of forming the cell openings.

[0013] The step of forming the plurality of cell openings includes the step of irradiating a laser onto the mask sheet fixed to the frame.

[0014] The inner surface of the mask sheet that defines the plurality of cell openings has a tapered shape.

[0015] The method further includes, between the step of fixing the mask sheet to the frame and the step of forming the plurality of cell openings, the step of disposing an electrostatic chuck on the mask sheet fixed to the frame.

[0016] The step of forming the plurality of cell openings includes the step of forming a plurality of spare cell openings before forming the plurality of cell openings, each of the plurality of cell openings corresponding to one of the plurality of spare cell openings, and the size of each of the plurality of cell openings being larger than the size of each of the plurality of spare cell openings.

[0017] The method further includes removing the electrostatic chuck from the mask sheet after the step of forming the plurality of cell openings.

[0018] The mask manufacturing method of the embodiment includes the steps of preparing a mask sheet and a frame, stretching the mask sheet and fixing the stretched mask sheet to the frame, forming a plurality of slit openings on the mask sheet fixed to the frame, and forming a plurality of cell openings between the plurality of slit openings.

[0019] The number of the plurality of slit openings is greater than the number of the plurality of cell openings.

[0020] The size of each of the plurality of slit openings is smaller than the size of each of the plurality of cell openings.

[0021] The step of forming the plurality of cell openings includes the steps of forming spare cell openings between the plurality of slit openings, and forming the plurality of cell openings to correspond to the spare cell openings, respectively.

[0022] The size of the spare cell opening is smaller than the size of the cell opening, and the shape of the spare cell opening is different from the shape of the cell opening.

[0023] The method further includes, after the step of fixing the mask sheet to the frame, placing an electrostatic chuck on the mask sheet.

[0024] In one embodiment, the mask includes a frame and a mask sheet disposed on the frame, the mask sheet having a plurality of cell openings and a plurality of slit openings between the cell openings, each of the slit openings having a width smaller than that of the cell openings.

[0025] The ink jet head further includes a plurality of shielding members disposed above the slit openings and shielding the slit openings, respectively.

[0026] The material of the shielding member is the same as the material of the mask sheet. [Effects of the Invention]

[0027] In one embodiment of the present invention, the drawing and welding are performed first and then the processing is performed, thereby improving the processing precision and reducing shadowing.

[0028] A mask manufactured by a mask manufacturing method according to an embodiment of the present invention has improved accuracy of cell position on the mask, preventing shadowing during deposition processes, and a display panel manufactured using a mask according to the present invention has reduced dead space, preventing defects. [Brief explanation of the drawings]

[0029] [Figure 1] 1 is a perspective view showing a mask according to an embodiment of the present invention. [Figure 2] 1 is a flowchart illustrating a mask manufacturing method according to an embodiment of the present invention. [Figure 3] 1 is a flowchart illustrating a mask manufacturing method according to an embodiment of the present invention. [Figure 4A] 1A to 1C illustrate a mask manufacturing method according to an embodiment of the present invention. [Figure 4B] 1A to 1C illustrate a mask manufacturing method according to an embodiment of the present invention. [Figure 4C] 1A to 1C illustrate a mask manufacturing method according to an embodiment of the present invention. [Figure 4D] 1A to 1C illustrate a mask manufacturing method according to an embodiment of the present invention. [Figure 4E] 1A to 1C illustrate a mask manufacturing method according to an embodiment of the present invention. [Figure 5] 1 is a flowchart illustrating a mask manufacturing method according to an embodiment of the present invention. [Figure 6A] 1A to 1C illustrate a mask manufacturing method according to an embodiment of the present invention. [Figure 6B] 1A to 1C illustrate a mask manufacturing method according to an embodiment of the present invention. [Figure 6C] 1A to 1C illustrate a mask manufacturing method according to an embodiment of the present invention. [Figure 7] 1 is a flowchart illustrating a mask manufacturing method according to an embodiment of the present invention. [Figure 8A] 1A to 1C illustrate a mask manufacturing method according to an embodiment of the present invention. [Figure 8B] 1A to 1C illustrate a mask manufacturing method according to an embodiment of the present invention. [Figure 8C] 1A to 1C illustrate a mask manufacturing method according to an embodiment of the present invention. [Figure 8D] 1A to 1C illustrate a mask manufacturing method according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0030] As used herein, when a component (or region, layer, portion, etc.) is referred to as being "on," "connected," or "coupled" to another component, it means that it may be directly disposed on, connected to, or coupled to the other component, or that a third component may be disposed therebetween.

[0031] The same reference numerals refer to the same elements. In the drawings, the thickness, proportions, and dimensions of the elements are exaggerated for the purpose of effectively explaining the technical content. "And / or" includes all combinations of one or more elements defined by the associated elements.

[0032] Terms such as "first," "second," etc. are used to describe various components, but the components are not limited to these terms. These terms are used only to distinguish one structural element from another. For example, a first component may be designated as a "second component," and similarly, a second component may be designated as a "first component," without departing from the scope of the present invention. A singular expression includes a plural expression unless the context clearly dictates otherwise.

[0033] Furthermore, terms such as "under," "below," "on," and "above" are used to describe the relative relationships of components shown in the drawings. These terms are relative concepts and are described based on the directions shown in the drawings.

[0034] It should be understood that the use of terms such as "comprise" or "have" specifies the presence of any feature, number, step, operation, component, part, or combination thereof stated above in the specification, but does not exclude the possible presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0035] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Furthermore, terms such as those defined in commonly used dictionaries should be interpreted to have a meaning consistent with the meaning in the context of the relevant art, and are expressly defined herein unless interpreted in an idealized or overly formal sense.

[0036] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0037] Fig. 1 is a perspective view showing a mask according to an embodiment of the present invention, Fig. 1 shows an exploded perspective view of a mask according to an embodiment of the present invention.

[0038] 1, a mask MK is used in a process of depositing a deposition material. In one embodiment of the present invention, the mask MK includes a frame FR and a mask sheet MS.

[0039] The top surface of each component is parallel to the plane defined by the first direction DR1 and the second direction DR2. The thickness direction of each component is the third direction DR3. The top side (or upper surface) and bottom side (or lower surface) of each component are defined by the third direction DR3. However, the directions indicated by the first to third directions DR1, DR2, and DR3 are relative concepts and may be converted to other directions.

[0040] The frame FR has an annular shape in a plan view. That is, an open area is provided in an area including the center of the frame FR. The open area is a hole that penetrates from the upper surface of the frame FR to the lower surface of the frame FR.

[0041] Although Fig. 1 illustrates a rectangular ring as an example of the shape of the frame FR, the shape of the frame FR is not limited thereto. For example, the frame FR may have various shapes such as a circular ring or a polygonal ring. Although Fig. 1 simply illustrates a configuration in which the frame FR is disposed below the mask sheet MS to support the mask sheet MS, the configuration is not limited thereto. The frame FR may be disposed above and below the edges of the mask sheet MS to support the mask sheet MS and extend the mask sheet MS in the first direction DR1 and the second direction DR2.

[0042] The mask sheet MS according to one embodiment includes a plurality of cell openings CA arranged along a first direction DR1 and a second direction DR2. In this embodiment, five cell openings CA are arranged along the first direction DR1 and two along the second direction DR2, spaced apart from each other, but this is merely an illustrative example, and the mask sheet MS may include a greater number of cell openings CA, and the cell openings CA may be arranged along either the first direction DR1 or the second direction DR2, and is not limited to any one embodiment.

[0043] The mask sheet MS according to one embodiment may have a plate shape extending along the first direction DR1 and the second direction DR2. The mask sheet MS includes a plurality of cell openings CA arranged along the first direction DR1 and the second direction DR2, and has an integral plate shape such that the cell openings CA are connected to each other. The mask sheet MS includes a plurality of cell openings CA and extended regions surrounding each of the cell openings CA, and the cell openings CA are connected by the extended regions, so that the mask sheet MS has an integral plate shape. The mask sheet MS according to this embodiment is not a stick shape extending in only one of the first direction DR1 and the second direction DR2, but is formed in a plate shape extending in both the first direction DR1 and the second direction DR2. However, the present invention is not limited thereto, and the mask sheet MS according to other embodiments of the present invention may have a rod shape extending in one of the first direction DR1 and the second direction DR2 and spaced apart in the other direction.

[0044] In one embodiment, the mask sheet MS and the frame FR are formed of the same material. For example, the mask sheet MS and the frame FR may include an alloy of iron (Fe) and nickel (Ni). In one embodiment, the mask sheet MS and the frame FR include nickel and iron, and further include cobalt (Co). In this case, the mask sheet MS and the frame FR each include about 5% cobalt (Co).

[0045] Figure 2 is a flowchart illustrating a mask manufacturing method according to an embodiment of the present invention. Figure 3 is a flowchart illustrating a mask manufacturing method according to an embodiment of the present invention. Figures 4A to 4E are views illustrating a mask manufacturing method according to an embodiment of the present invention.

[0046] 4A to 4E show a mask manufacturing method according to the flowcharts of FIGS.

[0047] 2, the mask manufacturing method includes the steps of preparing a frame and a spare mask sheet. The spare mask sheet corresponds to a plate-like member for forming a mask sheet. The spare mask sheet refers to a mask sheet before cell openings are formed. For convenience of explanation, the term "spare mask sheet" is used to distinguish it from a mask sheet including cell openings.

[0048] The mask manufacturing method according to the embodiment of the present invention includes step S100 of stretching a preliminary mask sheet to fit a frame. The preliminary mask sheet is stretched to approximately the size of the frame so as to be fixed onto the frame.

[0049] The mask manufacturing method according to the embodiment of the present invention includes a step S200 of fixing a preliminary mask sheet to a frame. The preliminary mask sheet is fixed on the frame in a tensioned state by welding.

[0050] The mask manufacturing method according to the embodiment of the present invention includes a step S300 of forming a plurality of cell openings on a preliminary mask sheet welded to a frame. The mask sheet is formed by forming a plurality of cell openings on the preliminary mask sheet.

[0051] 3, the step S300 of forming a plurality of cell openings (see FIG. 2) includes the step S310 of forming a plurality of preliminary cell openings on a preliminary mask sheet, and the step S320 of forming a plurality of cell openings corresponding to the formed preliminary cell openings, where the preliminary cell openings correspond to temporary openings that are formed in advance at positions where the cell openings will be formed, before the cell openings are formed.

[0052] In another embodiment, the spare cell openings are formed in the step of preparing a spare mask sheet, i.e., before the spare mask sheet is tensioned and fixed to the frame, because the spare mask sheet does not need to be precisely formed and does not need to be formed after the spare mask sheet is tensioned and fixed to the frame.

[0053] 4A to 4E, a mask manufacturing method according to an embodiment of Figures 2 and 3 will be described in detail. Figures 4A to 4E are views sequentially illustrating a mask manufacturing method of the present invention.

[0054] 4A shows the step of preparing a spare mask sheet P-MS and a frame FR. In FIG. 4A, a spare mask sheet P-MS and a frame FR are prepared. The size of the spare mask sheet P-MS in the first direction DR1 and the second direction DR2 is smaller than the size of the frame in the first direction DR1 and the second direction DR2. The thickness, which is the length in the third direction DR3, of the spare mask sheet P-MS and the frame FR is not limited to that shown in the figure, and the thickness of the spare mask sheet P-MS and the thickness of the frame FR may be the same.

[0055] 4B shows a step of pulling the spare mask sheet P-MS. In FIG. 4B, the spare mask sheet P-MS is pulled in the first direction DR1 and the second direction DR2 by the size of the frame FR to be fixed on the frame FR.

[0056] Fig. 4C shows a step of fixing a preliminary mask sheet P-MS onto a frame FR to form preliminary cell openings, and Fig. 4D shows a step of forming cell openings corresponding to the preliminary cell openings.

[0057] 4C and 4D, the tensioned preliminary mask sheet P-MS is seated on the frame FR and welded to the frame FR using welding members AD. The preliminary mask P-MK, with the preliminary mask sheet P-MS fixed to the frame FR by welding, does not yet have cell openings CA for deposition. In the next step, cell openings CA are formed in the preliminary mask sheet P-MS to form the mask sheet MS, and the mask MK is formed together with the frame FR.

[0058] In one embodiment, a laser LS1 is irradiated onto the spare mask sheet P-MS to form a spare cell opening P-CA. After the spare cell opening P-CA is formed, a cell opening CA corresponding to the spare cell opening P-CA can be formed. The cell opening CA is formed by irradiating with a laser LS2. In this embodiment, only the formation of the spare cell opening P-CA and the cell opening CA through irradiation with lasers LS1 and LS2 is illustrated, but the spare cell opening P-CA and the cell opening CA may be formed by other processes, such as etching. In one embodiment, the lasers LS1 and LS2 are irradiated in the third direction DR from a direction closer to the frame FR than the spare mask sheet P-MS.

[0059] The size of each spare cell opening P-CA is smaller than the size of the cell opening CA. For example, the size of each spare cell opening P-CA may be 25% or more and 90% or less of the size of each cell opening CA. The size of each spare cell opening P-CA may vary as long as it does not affect the processing of the cell opening CA. The inner diameter of the spare cell opening P-CA is smaller than the inner diameter of the corresponding cell opening CA by 100 um or more and 1 mm or less. In other words, the difference LT1 between the inner diameter of the spare cell opening P-CA and the inner diameter CA-L of the cell opening is 100 um or more and 1 mm or less.

[0060] The preliminary cell openings P-CA are all removed in the step of forming the cell openings CA. That is, the preliminary cell openings P-CA are temporary openings formed at the positions where the cell openings CA will be formed in order to form the cell openings CA. The preliminary cell openings P-CA reduce the tensile force applied to the preliminary mask sheet P-MS. That is, by forming the preliminary cell openings P-CA before forming the cell openings CA, the tensile force applied to the preliminary mask sheet P-MS in the step of forming the cell openings CA can be reduced, thereby reducing the degree of distortion that occurs when processing the cell openings CA.

[0061] Although not shown, the shape of the spare cell opening P-CA may be different from the shape of the cell opening CA. For example, the shape of the cell opening CA may be rectangular, and the shape of the spare cell opening P-CA may be circular. Also, a plurality of spare cell openings P-CA corresponding to one cell opening CA may be provided. For example, two or more spare cell openings P-CA may be formed at the positions where each cell opening CA is to be formed.

[0062] In FIG. 4E, once the cell openings CA corresponding to the spare cell openings P-CA are formed while fixed on the frame FR, a mask sheet MS is provided to form a mask MK together with the frame FR.

[0063] 5 is a flowchart illustrating a method for manufacturing a mask according to an embodiment of the present invention, and FIGURES 6A to 6C are views illustrating a method for manufacturing a mask according to an embodiment of the present invention.

[0064] 6A to 6C show a mask manufacturing method according to the flowchart of FIG.

[0065] 5, the mask manufacturing method includes step S510 of stretching a preliminary mask sheet and welding it onto a frame. Descriptions overlapping with those in FIG. 2 will be omitted.

[0066] According to one embodiment, a mask manufacturing method includes step S520 of forming a plurality of slit openings on the preliminary mask sheet, which reduces the tensile force applied to the preliminary mask sheet, thereby preventing distortion during the formation of cell openings to be formed later.

[0067] According to one embodiment, a method for manufacturing a mask includes step S530 of forming a plurality of cell openings adjacent to each of the plurality of slit openings. Each of the plurality of cell openings is formed adjacent to each of the slit openings. By forming each of the plurality of cell openings adjacent to each of the slit openings, the degree of distortion of the cell openings during the formation process is reduced.

[0068] Figures 6A to 6C are views sequentially showing a method for manufacturing the mask of Figure 5. The method for manufacturing the mask according to one embodiment of Figure 5 will be described in detail with reference to Figures 6A to 6C.

[0069] Fig. 6A shows a step of forming slit openings on a preliminary mask sheet P-MS, Fig. 6B shows a step of forming cell openings adjacent to each of the slit openings on the preliminary mask sheet P-MS, and Fig. 6C shows a step of forming a mask including a plurality of slit openings and cell openings.

[0070] 6A to 6C, a plurality of slit openings SA spaced apart from one another are arranged in a first direction DR1. While the drawings show a total of ten slit openings SA, five in the first direction DR1 and two in the second direction, the number of slit openings SA may vary. The slit openings P-SA are formed by irradiating a laser LS, but may be formed by various methods, such as etching. Cell openings CA are formed between the slit openings SA. The slit openings SA and the cell openings CA are alternately formed in the first direction DR1. The cell openings CA are formed by irradiating a laser LS at positions CA-L where cell openings are to be formed between the slit openings SA. The laser LS is irradiated in a third direction DR3 from a side closer to the frame FR than the spare mask sheet P-MS.

[0071] Although the drawings show 10 slit openings SA and 10 cell openings CA, this is not limiting. The number of slit openings SA may be greater than the number of cell openings CA. The size of each slit opening SA is smaller than the size of each cell opening CA. For example, the width WT2 of the slit opening SA in the first direction DR1 may be smaller than the width of the cell opening CA. The number of slit openings SA and the width or size of the slit openings SA affect the amount of distortion when forming the cell openings CA.

[0072] Generally, if the amount of distortion of the cell opening CA is V, it can be expressed as V = (F * L) / (E * A), where F is the tensile force applied to the spare mask sheet P-MS, E is the elastic modulus, L is the length WT1 of the spare mask sheet P-MS in the first direction DR1, and A is the area of ​​the cross section of the spare mask sheet P-MS in the first direction DR1.

[0073] In one embodiment of the present invention, if the width WT2 of each slit opening SA in the first direction DR1 is a and the number of slit openings SA is x, the distortion amount V' of the cell opening CA formed adjacent to the slit opening SA of the present invention is V' = (F * (L - xa)) / (E * A). In other words, the larger the number x of the slit openings SA and the larger the width a of the slit opening SA in the first direction DR1, the smaller the distortion amount of the cell opening CA.

[0074] Although not shown, in one embodiment, the step of forming the cell openings CA includes forming preliminary cell openings between the plurality of slit openings SA. That is, preliminary cell openings are formed between the plurality of slit openings SA, as in the embodiment of FIGS. 2 to 4E, and cell openings CA corresponding to each preliminary cell opening are formed. The preliminary cell openings, together with the slit openings SA, reduce distortion during the process of forming the cell openings CA. Unlike the slit openings SA, the preliminary cell openings are removed during the formation of the cell openings CA.

[0075] Also, before the step of forming the slit openings SA, a step of placing an electrostatic chuck on the preliminary mask sheet P-MS fixed to the frame FR is further included. The electrostatic chuck reduces the amount of distortion of the cell openings CA. For a detailed description of the electrostatic chuck, please refer to Figures 8A to 8D.

[0076] According to one embodiment of the present invention, a shielding member is disposed over each slit opening SA of the mask MK. The shielding member shields the slit opening SA from the deposition source during the deposition process. The shielding member contains the same metal as the mask sheet. That is, the shielding member contains an alloy of iron (Fe) or nickel (Ni).

[0077] Figure 7 is a flowchart illustrating a method for manufacturing a mask according to an embodiment of the present invention, and Figures 8A to 8D are views illustrating a method for manufacturing a mask according to an embodiment of the present invention.

[0078] 8A to 8D show a mask manufacturing method according to the flowchart of FIG.

[0079] 7, a mask manufacturing method according to an embodiment includes step S710 of tensioning a preliminary mask sheet and welding and fixing it onto a frame. The mask manufacturing method according to an embodiment also includes step S720 of disposing an electrostatic chuck on the preliminary mask sheet. The electrostatic chuck serves to prevent distortion due to tension of the preliminary mask sheet fixed to the frame in a tensioned state.

[0080] The mask manufacturing method according to one embodiment includes a step S730 of forming a plurality of preliminary cell openings on a preliminary mask sheet.

[0081] The mask manufacturing method according to one embodiment includes step S740 of forming a plurality of cell openings corresponding to the plurality of preliminary cell openings, respectively. After the plurality of cell openings are formed to form a mask sheet, the electrostatic chuck is removed from the mask sheet.

[0082] Figures 8A to 8D are cross-sectional views sequentially illustrating a method for manufacturing the mask of Figure 7. The method for manufacturing the mask according to one embodiment of Figure 7 will be described in detail with reference to Figures 8A to 8D.

[0083] FIG. 8A shows a state in which the electrostatic chuck ESC is disposed on a spare mask sheet P-MS fixed on a frame FR. In FIG. 8B, with the electrostatic chuck ESC disposed, a laser beam LS1 is irradiated onto the spare mask sheet P-MS to form spare cell openings P-CA. The cell openings CA are formed corresponding to the spare cell openings P-CA. The cell openings CA are formed by irradiating the periphery of the spare cell openings P-CA with a laser beam LS2. The electrostatic chuck ESC reduces the amount of distortion caused by the tensile force during the formation of the cell openings CA. In other words, the electrostatic force generated by the electrostatic chuck ESC reduces the tensile force applied to the spare cell openings P-CA and the cell openings CA, thereby reducing the amount of distortion.

[0084] A difference LT1 between the width of the cell opening CA in the first direction DR1 and the width of the spare cell opening P-CA in the first direction DR1 is 100 μm or more. After the cell opening CA is formed, the electrostatic chuck ESC is removed.

[0085] FIG. 8D is a cross-sectional view taken along line II' in FIG. 1. Referring to FIGS. 8A to 8D, in one embodiment of the present invention, the inner surface SS of the mask sheet MS defining the cell openings CA has a tapered shape. The tapered shape formed by irradiating the laser LS facilitates efficient deposition of the deposition material on the substrate, thereby reducing the shadowing phenomenon and the area of ​​dead space on the substrate. In another embodiment, the inner surface SS of the mask sheet MS defining the cell openings CA has a tapered shape, and the inner surface defining the slit openings SA (see FIG. 6C) has a different shape from the inner surface SS of the mask sheet MS defining the cell openings CA. That is, although not shown, the inner surface of the mask sheet defining the slit openings SA may or may not have a tapered shape.

[0086] As mentioned above, the drawings and the specification disclose embodiments. Although specific terms are used herein, they are used merely for the purpose of describing the present invention and are not used to limit the meaning or the scope of the present invention as described in the claims. Therefore, a person skilled in the art will understand that various modifications and equivalent embodiments are possible. Therefore, the true technical scope of protection of the present invention should be determined by the technical spirit of the appended claims. [Explanation of symbols]

[0087] MK: Mask MS: Mask sheet FR: Frame CA: Cell opening

Claims

1. providing a mask sheet and a frame; Stretching the mask sheet and fixing the stretched mask sheet to the frame; forming a plurality of cell openings on the mask sheet fixed to the frame; The step of forming the plurality of cell openings includes: forming a plurality of spare cell openings on the mask sheet fixed to the frame; forming the plurality of cell openings to correspond respectively to the plurality of spare cell openings; A method for manufacturing a mask, wherein the shape of the plurality of spare cell openings is different from the shape of the plurality of cell openings.

2. 2. The mask manufacturing method according to claim 1, wherein the size of each of the plurality of spare cell openings is 25% to 90% of the size of each of the plurality of cell openings.

3. the step of preparing a mask sheet includes forming a plurality of preliminary cell openings on the mask sheet; 2. The mask manufacturing method according to claim 1, wherein the step of forming the plurality of cell openings includes the step of forming the plurality of cell openings so as to correspond to the spare cell openings, respectively.

4. 4. The mask manufacturing method according to claim 3, wherein the preliminary cell openings are all removed in the step of forming the cell openings.

5. 2. The mask manufacturing method according to claim 1, wherein the step of forming the plurality of cell openings includes the step of irradiating a laser onto the mask sheet fixed to the frame.

6. 6. The method of claim 5, wherein an inner surface of the mask sheet defining the plurality of cell openings has a tapered shape.

7. 2. The mask manufacturing method of claim 1, further comprising the step of placing an electrostatic chuck on the mask sheet fixed to the frame between the step of fixing the mask sheet to the frame and the step of forming the plurality of cell openings.

8. forming the plurality of cell openings includes forming a plurality of preliminary cell openings before forming the plurality of cell openings; each of the plurality of cell openings corresponds to a corresponding one of the plurality of spare cell openings; 8. The method of claim 7, wherein the size of each of the plurality of cell openings is larger than the size of each of the plurality of spare cell openings.

9. 9. The mask manufacturing method according to claim 8, further comprising the step of removing the electrostatic chuck from the mask sheet after the step of forming the plurality of cell openings.

10. providing a mask sheet and a frame; A step of pulling the mask sheet and fixing the pulled mask sheet to the frame; forming a plurality of slit openings on the mask sheet fixed to the frame; forming a plurality of cell openings between the plurality of slit openings, The step of forming the plurality of cell openings includes: A mask manufacturing method comprising the steps of: forming spare cell openings between the plurality of slit openings; and forming the plurality of cell openings to correspond to the spare cell openings.

11. 11. The method of claim 10, wherein the number of the plurality of slit openings is greater than the number of the plurality of cell openings.

12. 11. The method of claim 10, wherein the size of each of the plurality of slit openings is smaller than the size of each of the plurality of cell openings.

13. 11. The mask manufacturing method according to claim 10, wherein the size of the spare cell opening is smaller than the size of the cell opening, and the shape of the spare cell opening is different from the shape of the cell opening.

14. The mask manufacturing method according to claim 10 , further comprising the step of placing an electrostatic chuck on the mask sheet after the step of fixing the mask sheet to the frame.

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