Spray nozzle and method for cleaning the same

Abstract

To provide a spray nozzle which enables cleanliness to be secured after cleaning, and to provide a cleaning method which allows the spray nozzle to secure cleanliness easily.SOLUTION: A spray nozzle 31 is attached to an opening of a hollow cleaned body to clean an inner wall surface of the cleaned body having the opening with a cleaning liquid. The cleaning liquid flows in a nozzle body to be supplied to a tip of the nozzle body and discharged from a through hole drilled and provided in the nozzle body. The nozzle body comprises multiple members and the multiple members include a first member and a second member connected in a cleaning liquid flow direction. The second member is connected to the downstream side of the first member. The spray nozzle is provided with at least one of a diameter reduction part in which an outer diameter is reduced toward the downstream side and a diameter expansion part in which the outer diameter is expanded toward the downstream side.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a spray nozzle and a method for cleaning the spray nozzle, and more particularly to a spray nozzle that is attached to an opening in order to clean the inner wall surface of a hollow object having an opening with a cleaning liquid, and a method for cleaning the spray nozzle. [Background technology]

[0002] Conventionally, spray nozzles have been used to clean the inner wall surfaces of hollow objects to be cleaned, such as tanks and large pipes. Known spray nozzles of this type include a nozzle body that enters the interior space of the object through an opening provided in the object and sprays a cleaning liquid toward the inner wall surface. Known spray nozzles of this type are configured to spray the cleaning liquid over a wide area in order to remove as many target substances adhering to the object as possible. Known spray nozzles include fixed spray nozzles in which a head from which the cleaning liquid is sprayed is fixedly disposed in the nozzle body, and rotary spray nozzles in which a portion of the nozzle body rotates to spray the cleaning liquid. For example, Patent Document 1 listed below discloses a rotary spray nozzle in which the nozzle body is formed of multiple components, including a liquid supply shaft tube and a rotor rotatably attached to the tip of the liquid supply shaft tube, and the cleaning liquid supplied to the nozzle body is sprayed from the rotor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 5-23621 Summary of the Invention [Problem to be solved by the invention]

[0004] Regarding spray nozzles, while methods for improving the cleanliness of objects to be cleaned after cleaning have been studied, there has been insufficient research into improving the cleanliness of the spray nozzle itself. If substances to be removed adhere to the outer surface of the spray nozzle after cleaning, these adhered substances may fall off and impair the cleanliness of the objects to be cleaned. Therefore, an object of the present invention is to provide a spray nozzle that easily ensures cleanliness after cleaning and a cleaning method that easily ensures the cleanliness of a spray nozzle. [Means for solving the problem]

[0005] In order to solve the above problems, the present invention provides: A spray nozzle attached to an opening of a hollow object to be cleaned in order to clean the inner wall surface of the object with a cleaning liquid, a fixing part attached to the opening of the object to be cleaned; a hollow nozzle body portion that is disposed so as to extend from the fixing portion into the internal space of the object to be cleaned when the fixing portion is attached to the opening, the cleaning liquid flows through the inside of the nozzle body and is supplied to the tip of the nozzle body, and the cleaning liquid is discharged from a through hole formed in the nozzle body, The nozzle body is made up of a plurality of members, the plurality of members include a first member and a second member connected in a flow direction of the cleaning liquid, the second member is connected to the downstream side of the first member; the nozzle body includes a first portion made of the first member, a second portion made of the second member, and a connecting portion that contacts the first portion and the second portion; an outer peripheral surface of the nozzle body exposed to the internal space includes a first region formed by the outer peripheral surface of the first part, a second region formed by the outer peripheral surface of the second part, and a connection region formed by the outer peripheral surface of the connection part, The first region and the connection region are continuous at a downstream edge portion of the first region, the second region is provided downstream of the connection region, At least one of the second region and the connection region has: A spray nozzle is provided which is provided with at least one of a reduced diameter section whose outer diameter decreases toward the downstream side and an expanded diameter section whose outer diameter increases toward the downstream side.

[0006] In order to solve the above problems, the present invention provides: 1. A method for cleaning a spray nozzle attached to an opening of a hollow object to be cleaned in order to clean the inner wall surface of the object with a cleaning liquid, comprising: The spray nozzle is a fixing part attached to the opening of the object to be cleaned; a hollow nozzle body portion that is disposed so as to extend from the fixing portion into the internal space of the object to be cleaned when the fixing portion is attached to the opening, the cleaning liquid flows through the inside of the nozzle body and is supplied to the tip of the nozzle body, and the cleaning liquid is discharged from a through hole formed in the nozzle body, The nozzle body is made up of a plurality of members, the plurality of members include a first member and a second member connected in a flow direction of the cleaning liquid, the second member is connected to the downstream side of the first member; the nozzle body includes a first portion made of the first member, a second portion made of the second member, and a connecting portion that contacts the first portion and the second portion; an outer peripheral surface of the nozzle body exposed to the internal space includes a first region formed by the outer peripheral surface of the first part, a second region formed by the outer peripheral surface of the second part, and a connection region formed by the outer peripheral surface of the connection part, The first region and the connection region are continuous at a downstream edge portion of the first region, the second region is provided downstream of the connection region, At least one of the second region and the connection region has: At least one of a reduced diameter section whose outer diameter decreases toward the downstream side and an expanded diameter section whose outer diameter increases toward the downstream side is provided, In cleaning the spray nozzle, the cleaning liquid discharged from the through hole is sprayed onto the outer peripheral surface of the nozzle main body to clean the nozzle main body, The present invention provides a method for cleaning a spray nozzle, in which the cleaning liquid is sprayed onto the outer peripheral surface of the nozzle body so that the cleaning liquid flows from the first region to the connection region. [Effects of the Invention]

[0007] According to the present invention, a spray nozzle can be provided that is easy to ensure cleanliness after cleaning. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 2 is a schematic front view showing the spray nozzle in use. [Figure 2] 1 is a schematic cross-sectional view showing a vertical cross section of a spray nozzle according to an embodiment of the present invention; [Figure 3] FIG. 4 is a schematic enlarged view showing the joining state between the fixing portion and the nozzle body of the spray nozzle. [Figure 4A] FIG. 3 is a schematic enlarged view showing the joined state of the members that make up the nozzle body of the spray nozzle. [Figure 4B] FIG. 3 is a schematic enlarged view showing the joined state of the members that make up the nozzle body of the spray nozzle. [Figure 5] FIG. 2 is a schematic cross-sectional view showing a vertical cross section of a head portion of a spray nozzle. [Figure 6] FIG. 2 is a schematic front view showing the head portion of the spray nozzle. [Figure 7] FIG. 10 is a schematic front view showing the head portion of a spray nozzle of another embodiment. [Figure 8A] FIG. 10 is a schematic front view showing another embodiment of a spray nozzle. [Figure 8B] FIG. 10 is a schematic front view showing another embodiment of a spray nozzle. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Note that the embodiment of the present invention will be described below using, as an example, a case where an object to be cleaned by the spray nozzle of this embodiment is a reaction tank in a reaction apparatus.

[0010] 1 shows a reaction apparatus 1, which includes a reaction vessel 10, which is the object to be cleaned in this embodiment. The reaction vessel 10 is hollow and has an internal space 10c capable of accommodating the object to be treated. The reaction apparatus 1 includes an agitator 20 for agitating the object to be reacted inside the reaction vessel 10, and a cleaning device 30 for cleaning the agitator 20 and the reaction vessel 10 with a cleaning liquid (e.g., ion-exchanged water).

[0011] In the reaction vessel 10 of this embodiment, liquid or powdered raw materials contained in the internal space 10c are chemically treated. The reaction vessel 10 of this embodiment is provided with a glass lining at the portions exposed to the internal space 10c to provide corrosion resistance. The reaction vessel 10 of this embodiment includes a bottom wall portion 12 that is circular in plan view, a peripheral wall portion 13 that is cylindrical and extends upward from the outer periphery of the bottom wall portion 12, and a ceiling wall portion 14 that is circular in plan view and is arranged opposite the bottom wall portion 12 in the vertical direction to close the upper end of the peripheral wall portion 13. The internal space 10c is defined by the inner wall surface of the reaction vessel 10. That is, the inner wall surface of the reaction vessel 10 is an exposed surface that is exposed to the internal space 10c.

[0012] The spray nozzle 31 in this embodiment is provided in the cleaning device 30. The spray nozzle 31 in this embodiment is a fixed spray nozzle, but the spray nozzle 31 may also be a rotary spray nozzle. As shown in FIGS. 1 and 2 , the spray nozzle 31 has a first direction that is the direction of insertion into the reaction vessel 10. The spray nozzle 31 in this embodiment has a central axis Cx that is an imaginary line that is parallel to the first direction and passes through the center of the spray nozzle 31. The direction along the central axis Cx of the spray nozzle 31 is the length direction XL, and the direction perpendicular to the central axis Cx is the radial direction XD. In the following, the direction revolving around the central axis Cx may be referred to as the circumferential direction.

[0013] The reaction vessel 10 of this embodiment has openings at three locations on the ceiling wall 14. One of the three openings is located in the center of the ceiling wall 14 and is used as an agitator mounting port 14a for mounting the agitator 20. In this embodiment, one of the remaining two openings is used as a cleaning device mounting port 14b for mounting the cleaning device 30.

[0014] Each of the three openings is configured to protrude upward from the ceiling wall 14 of the reaction tank 10 in a cylindrical shape. That is, the three openings are provided at the upper end of the reaction tank 10 as a first cylindrical portion 11a, a second cylindrical portion 11b, and a third cylindrical portion 11c. Each of the three openings opens upward at the upper end of the reaction tank 10. The openings can be used to communicate the internal space 10c with the space outside the reaction tank (external space).

[0015] The first cylindrical portion 11a, whose upper opening is the agitator mounting port 14a, extends vertically and has an outward-flaring flange at its upper end. An agitator blade 21 for agitating the contents of the tank is inserted into the first cylindrical portion 11a. The agitator blade 21 has an agitator shaft 21a extending downward through the first cylindrical portion 11a and an agitator blade 21b attached to the lower end of the agitator shaft 21a.

[0016] The second cylindrical portion 11b, whose upper end opening serves as the cleaning device mounting port 14b, extends vertically in this embodiment and has an outwardly extending flange at its upper end.

[0017] In this embodiment, the third cylindrical portion 11c extends upward at an angle (for example, greater than 0 degrees and less than 45 degrees) relative to the vertical direction. The third cylindrical portion 11c also has an outward-extending flange. A lid with a viewing window (glass window) is attached to the third cylindrical portion 11c so that it can be opened and closed freely.

[0018] The spray nozzle 31 in this embodiment is configured so that the cleaning liquid flows along the length direction XL. Hereinafter, the downstream end of the spray nozzle 31 in the direction of flow of the cleaning liquid will be referred to as the tip end, and the end opposite to the tip end will be referred to as the base end. The spray nozzle 31 in this embodiment is hollow, with the base end being an open end and the tip end being a closed end. The spray nozzle 31 also has a through hole TH for discharging the cleaning liquid to the outside, as shown in FIG. 5.

[0019] The spray nozzle 31 in this embodiment includes a fixing part 311 provided on the base end side, and a nozzle main body part 312 extending toward the tip side from the fixing part 311. The spray nozzle 31 in this embodiment is used by attaching the fixing part 311 to the reaction vessel 10.

[0020] The spray nozzle 31 in this embodiment is used with the nozzle body 312 inserted into the internal space 10c of the reaction tank 10 through the cleaning device mounting port 14b (second cylindrical portion 11b). That is, the spray nozzle 31 in this embodiment is used with the fixing portion 311 positioned on the upper end side, the length direction XL being the vertical direction, the radial direction XD being the horizontal direction, and the direction from the fixing portion 311 to the tip of the nozzle body 312 being downward.

[0021] The spray nozzle 31 of this embodiment is provided so that the tip of the nozzle body 312 extends beyond the lower edge of the second cylindrical portion 11b and is positioned below the ceiling wall portion 14. The tip of the nozzle body 312 is disposed close to the ceiling wall portion 14 in the vertical direction and is located on the upper side of the internal space 10c of the reaction tank 10.

[0022] In the reaction vessel 10 of this embodiment, for example, the reaction treatment of the material to be treated is carried out batchwise. In the reaction apparatus 1 of this embodiment, the inner wall surface of the reaction vessel 10 and the outer surface of the stirring blade 21 are exposed surfaces that are exposed to the internal space 10c. If any foreign matter adheres to the equipment having such exposed surfaces, the foreign matter may be mixed into the material to be treated. Furthermore, after treatment, some of the material to be treated may remain attached to the exposed surfaces. This attached material may become foreign matter in the next batch. Therefore, in this embodiment, cleaning is performed using a cleaning device 30 at least either before or after treatment to remove any adhering matter attached to the exposed surfaces.

[0023] The cleaning device 30 of this embodiment includes the spray nozzle 31 and a liquid supply pipe 32 that supplies the cleaning liquid under pressure to the spray nozzle 31. In the cleaning device 30, the liquid supply pipe 32 is connected to a fixed portion 311 of the spray nozzle 31.

[0024] As shown in Fig. 2, the fixed portion 311 of this embodiment has a disk-shaped flange portion whose plate surface is parallel to the radial direction XD. The fixed portion 311 has multiple flange portions, namely, a first flange portion 3111 and a second flange portion 3112. The first flange portion 3111 and the second flange portion 3112 are arranged so that the central axis Cx passes through their respective centers, and are arranged at a distance in the longitudinal direction XL. The fixed portion 311 further includes a connecting portion 3113 between the first flange portion 3111 and the second flange portion 3112 that connects the first flange portion 3111 and the second flange portion 3112 at their centers.

[0025] The second flange portion 3112 has a diameter larger than the opening diameter of the second cylindrical portion 11b of the reaction tank 10 and is fixed to the second cylindrical portion 11b so as to close the cleaning device mounting port 14b from the outside (upper side). More specifically, the outer diameter of the second flange portion 3112 in this embodiment corresponds to the outer diameter of the second cylindrical portion 11b (the outer diameter of the flange of the second cylindrical portion 11b). In this embodiment, the second flange portion 3112 and the second cylindrical portion 11b are flange-joined. In this embodiment, a gasket material may be interposed between the second flange portion 3112 and the flange of the second cylindrical portion 11b.

[0026] The first flange portion 3111, the second flange portion 3112, and the connecting portion 3113 each have a through-hole passing through the center in the longitudinal direction XL, and the respective through-holes are connected in the longitudinal direction to form a flow path for the cleaning liquid on the base end side of the spray nozzle 31. The first flange portion 3111 is located closer to the base end than the second flange portion 3112 and is disk-shaped with a smaller diameter than the second flange portion 3112. The connecting portion 3113 is cylindrical with an outer diameter smaller than that of the first flange portion 3111. That is, the fixing portion 311 of this embodiment has a bobbin shape including two flange portions extending in the radial direction XD (outward) from both ends of the cylindrical connecting portion 3113 extending in the longitudinal direction XL.

[0027] The fixing portion 311 of this embodiment is configured as a composite member including a base body 311a, which is a metal member, and a cover material 311b, which is a resin member. The base body 311a and the cover material 311b each have a bobbin shape with a cylindrical tubular portion and two flange portions extending outward from both ends of the tubular portion. In the first flange portion 3111 and the second flange portion 3112, flange portions 311b1 and 311b2 of the cover material 311b cover flange portions 311a1 and 311a2 of the base body 311a from the outside (the base end side and the tip end side), respectively. In the connecting portion 3113, the tubular portion 311a3 of the base body 311a and the tubular portion 311b3 of the cover material 311b form a double-tube structure with the cover material 311b disposed inside.

[0028] The base 311a may be made of a corrosion-resistant metal such as stainless steel, a nickel-based alloy, or a titanium alloy. The cover 311b may be made of a resin composition containing a fluororesin such as polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene (PCTFE), a tetrafluoroethylene-perfluoroalkoxy ether copolymer (PFA), a tetrafluoroethylene-hexafluoropropylene copolymer (FEP), an ethylene-tetrafluoroethylene copolymer (ETFE), or an ethylene-chlorotrifluoroethylene copolymer (ECTFE); a silicone resin; a polyamide resin such as polyamide 6, polyamide 66, polyamide 610, or polyamide 612; or a polyolefin resin such as polypropylene. Among these, fluororesins such as PTFE are preferred because they have excellent chemical resistance and heat resistance, can reduce surface free energy, and are less likely to deposit on the base 311a. The resin composition may contain inorganic fillers such as calcium carbonate, talc, titania, zirconia, alumina, silica, carbon black, and short fibers (cellulose, polyamide, polyether ether ketone, cotton, hemp, metal fibers, etc.).

[0029] At the base end side of the fixing part 311, the tubular portion 311b3 of the cover material 311b protrudes further toward the base end than the tubular portion 311a3 and flange portion 311a1 of the base body 311a. The flange portion 311b1 of the cover material 311b extending outward from this protruding portion covers the flange portion 311a1 of the base body 311a from the base end side. Similarly, at the tip end side of the fixing part 311, the tubular portion 311b3 of the cover material 311b protrudes further toward the tip end than the tubular portion 311a3 and flange portion 311a2 of the base body 311a. Furthermore, the flange portion 311b2 of the cover material 311b covers the flange portion 311a2 of the base body 311a from the tip end side.

[0030] At the base end side of the fixing portion 311, the flange portion 311a1 of the base 311a has a larger diameter than the flange portion 311b1 of the cover material 311b, and the flange portion 311a1 of the base 311a extends radially outward beyond the flange portion of the cover material 311b. The outer peripheral edge of the first flange portion 3111 is defined by the flange portion 311a1 of the base 311a.

[0031] As with the base end side, the distal end side of the fixing part 311 has a flange portion 311a2 of the base 311a that is larger in diameter than the flange portion 311b2 of the cover material 311b, and the flange portion 311a2 of the base 311a extends radially outward beyond the flange portion 311b2 of the cover material 311b. As with the base end side, the outer peripheral edge of the second flange portion 3112 is also defined by the flange portion 311a2 of the base 311a.

[0032] A main body attachment portion is provided on the distal end side of the fixing portion 311. The main body attachment portion 3114 is provided to extend the tubular portion 311b3 of the cover material 311b toward the distal end side. The main body attachment portion 3114 is made of the same resin as the cover material 311b and is integrated with the tubular portion 311b3 and the flange portions 311b1 and 311b2. In other words, the main body attachment portion 3114 is formed as part of a single member (a resin molded product) that forms the tubular portion 311b3 and the flange portions 311b1 and 311b2.

[0033] The main body mounting portion 3114 is cylindrical and has an inner diameter larger than that of the tubular portion 311b3. The main body mounting portion 3114 is used to join the nozzle main body 312 and the fixing portion 311. While the inner wall surface of the tubular portion 311b3 of the cover material 311b is smooth, the inner wall surface of the main body mounting portion 3114 is helically threaded as shown in Fig. 3, and the inner wall surface is threaded so that thread ridges and thread grooves alternate from the base end side to the tip end side.

[0034] The nozzle main body 312 includes a pipe 3121 whose base end is attached to the main body attachment part 3114, and a head part 3122 attached to the tip of the pipe 3121. The pipe 3121 is cylindrical and has the same inner diameter as the tubular part 311b3 of the cover material 311b. The pipe 3121 is threaded on the outside of the end on the base end side so that it can be threadedly engaged with the main body attachment part 3114.

[0035] The nozzle main body 312 is fixed only by fixing the base end to the main body mounting portion 3114. The nozzle main body 312 is attached to the reaction vessel 10 in a cantilevered manner, with the base end being a fixed end and the tip end being a free end. The main body mounting portion 3114 has a thickness of at least a certain level up to the tip end to firmly support the nozzle main body 312. Therefore, the tip end face of the main body mounting portion 3114 expands in the radial direction XD. When viewed from the tip end to the base end in the direction of the central axis Cx, the shape of the end face is annular (donut-shaped). In the spray nozzle 31 of this embodiment, when the nozzle main body 312 is simply attached to the main body mounting portion 3114, when the nozzle main body 312 moves tip-wise along the outer peripheral surface of the main body mounting portion 3114, it has a step that drops down one level toward the central axis Cx once it passes the edge of the main body mounting portion 3114.

[0036] The nozzle main body 312 is made of resin, as is the cover material 311b of the fixing portion 311. Since there is a possibility of loosening if the main body attachment portion 3114 and the nozzle main body 312 are fixed together only by screwing, they may be further fixed together using a welding material or the like. In this embodiment, welding is performed at the corner where the end face of the main body attachment portion 3114 and the outer circumferential surface of the member constituting the nozzle main body 312 intersect, so that the welding material F is thermally fused to the end face of the main body attachment portion 3114 and the outer circumferential surface of the member constituting the nozzle main body 312. That is, in the spray nozzle 31 of this embodiment, the welding material F is used to build up the outer circumferential surface of the member constituting the nozzle main body 312 on the lower step side (tip side) so as to prevent a large step from occurring between the main body attachment portion 3114 and the nozzle main body 312.

[0037] The welding material can be one containing a material that has a high affinity with the constituent materials of the nozzle main body 312 and the cover material 311b. When the members constituting the nozzle main body 312 and the cover material 311b are made of a resin composition containing PTFE, the welding material F preferably contains PFA. When the fixing part 311 and the nozzle main body 312 are made entirely of metal, the welding material F can be a brazing material used in general electric welding, arc welding, or the like. The welding may be by thermal spraying or the like. The welding in this embodiment may be a method that does not use a brazing material. The welding material constituting the connection part may be a melted and solidified part of either or both of the first member and the second member.

[0038] The welding material does not need to be composed of a single type of composition; multiple types may be used. For example, when the welding material is composed of a resin composition, the corner where the end face of the body attachment portion 3114 intersects with the outer peripheral surface of the member constituting the nozzle body 312 may be welded with a first resin composition that exhibits high adhesive strength to each surface, and then a second resin composition suitable for the surface properties required of the nozzle body 312 may be welded onto the first resin composition. The same applies when the body attachment portion 3114 or the nozzle body 312 is made of metal and the welding material is composed of a metal composition. In such a case, for example, the corner may be arc-welded with the first metal composition, and the second metal composition may be sprayed onto the arc-welded first metal composition. Furthermore, welding materials composed of multiple compositions may be composed of different compositions. For example, only the corner may be arc-welded with the metal composition, and then a resin composition may be overlaid on the arc-welded metal composition. The same applies when different components are welded together. Furthermore, when there are multiple steps to be welded, the welding material filled in one step may be the same as or different from the welding material filled in the other steps. The fact that multiple types of welding material can be used in one welding location is also true for other welding locations.

[0039] If the corners (steps) are left as they are without being filled with the welding material F, powder and liquids are likely to accumulate, so overlay welding performed to fill the steps with the welding material F is also effective in reducing the amount of accumulated material. In this case, the diameter RF of the edge at the base end of the welding material F may be made to match the diameter RM of the edge at the tip end of the main body mounting portion 3114 to eliminate the step. For example, the outer circumferential surface of the welding material F may be gradually tapered toward the tip end, gradually reducing in diameter as it reaches the outer circumferential surface of the member threaded into the main body mounting portion 3114, thereby tapering the outer circumferential surface of the welding material F. In this way, no step is formed at the joint between the fixing portion 311 and the nozzle main body 312. In this embodiment, the outer surface of the spray nozzle 31 from the body attaching portion 3114 to the tip side, beyond the weld material F, does not have any orthogonal surfaces, which are surfaces whose normals toward the space tangent to the outer surface are parallel to the central axis Cx (surfaces perpendicular to the central axis), or inward-facing surfaces, whose normals point toward the central axis Cx. Instead, the outer peripheral surface, whose normals point away from the central axis Cx, is continuous in the length direction XL. In this way, the outer peripheral surface is smoothly continuous from the body attaching portion 3114 to the tip side, beyond the weld material F, thereby suppressing the formation of residue in the spray nozzle 31. In this embodiment, the nozzle body 312 has an outer peripheral surface, the normals of which point outward, that is continuous from the base end to the lower end of the nozzle body 312.

[0040] To form a portion with such a shape using welding material F, the welding itself may be performed in that manner, or welding may be performed with an amount of buildup greater than the final finish and then the excess welding material may be cut off.

[0041] The nozzle body 312 of this embodiment is a joint of multiple resin members. In the nozzle body 312 of this embodiment, the pipe portion 3121 and the head portion 3122 are each made up of multiple resin members. In this embodiment, similar to the method of joining the body attachment portion 3114 and the nozzle body 312, the members that make up the nozzle body 312 can be joined together using both screwing and welding.

[0042] As shown in FIG. 2, the nozzle main body 312 in this embodiment is composed of four members arranged from the base end to the tip end, including, in order from the base end, a base end member B1, a first intermediate member M1, a second intermediate member M2, and a tip end member T1. The base end member B1 is a member that is threadedly and welded to the main body mounting portion 3114. The base end member B1 and the first intermediate member M1 each constitute a portion of the pipe portion 3121, and the second intermediate member M2 is disposed at the connection between the pipe portion 3121 and the head portion 3122 and constitutes a portion of both. More specifically, the second intermediate member M2 in this embodiment constitutes the tip end of the pipe portion 3121 and approximately half of the base end of the head portion 3122. The tip end member T1 constitutes approximately half of the tip end of the head portion 3122.

[0043] The base end member B1 and the first intermediate member M1 are cylindrical with constant outer and inner diameters along their entire length. They have the same outer diameter and are joined together to appear as a single pipe. The base end side of the second intermediate member M2 is cylindrical with a smaller outer diameter than the base end member B1 and the first intermediate member M1. Meanwhile, the inner diameter of the base end side of the second intermediate member M2 is the same as those of the base end member B1 and the first intermediate member M1. That is, in the pipe portion 3121 of this embodiment, the area of ​​the cleaning liquid flow path (the cross-sectional area when the internal space is cut along a plane perpendicular to the longitudinal direction XL) is constant all the way to the head portion 3122. Meanwhile, on the outer peripheral surface side of the pipe portion 3121, a step is formed between the first intermediate member M1 and the second intermediate member M2 at the joint between them, as shown in FIG. 4A .

[0044] In this embodiment, like the joint between the body mounting portion 3114 and the nozzle body 312, the end face of the first intermediate member M1 is also annular and parallel to the radial direction XD. The end face and the outer peripheral surface of the second intermediate member M2 are welded at the corner where the end face intersects with the welding material F to thermally fuse the two members. The buildup of the welding material F reaches the corner (outer corner) where the outer peripheral surface and the end face of the first intermediate member M1 intersect. The buildup of the welding material F gradually decreases in height toward the tip. In this embodiment, the outer peripheral surface of the connection formed by the welding material F gradually decreases in diameter toward the tip and reaches the outer peripheral surface of the second intermediate member M2, tapering toward the tip. In this way, in the spray nozzle 31 of this embodiment, the welding material F eliminates any step between the first intermediate member M1 and the second intermediate member M2.

[0045] The welding is performed so as not to reach the head portion 3122. In other words, the connecting portion is formed so as to provide a distance between the edge on the tip side of the connecting portion and the head portion 3122.

[0046] The head portion 3122 is located at the most distal end of the spray nozzle 31. The head portion 3122 is hollow, having an internal space that communicates with the internal space of the pipe portion 3121, and in this embodiment, has a spherical shape with a larger diameter than the pipe portion 3121. Therefore, in this embodiment, the distal end portion of the second intermediate member M2 and the tip member T1 are cup-shaped, formed by cutting the spherical shape in half midway in the longitudinal direction, and the distal end portion of the second intermediate member M2 is cup-shaped and opens toward the distal end. In other words, the second intermediate member M2 has a structure in which an introduction pipe M21 that introduces cleaning liquid into the head portion 3122 and a receiving cup M22 that receives cleaning liquid from the introduction pipe M21 are integrated, and the overall shape is an inverted funnel. The tip of the cleaning liquid pipe section is a cup-shaped portion at the tip side of the second intermediate member M2 (hereinafter also referred to as the "upstream cup portion 3122a") that opens toward the tip side, while the portion formed by the tip member T1 (hereinafter referred to as the "downstream cup portion 3122b") is cup-shaped and opens toward the base end side.

[0047] The diameter of the opening on the tip side of the tip portion of the second intermediate member M2 corresponds to the outer diameter of the tip member T1, and the second intermediate member M2 and the tip member T1 are joined by inserting a portion of the base end side of the tip member T1 into the second intermediate member M2. That is, at the joint between the tip member T1 and the second intermediate member M2, the tip member T1 and the second intermediate member M2 overlap in the radial direction, with the second intermediate member M2 on the inside and the tip member T1 on the outside. Therefore, in this embodiment, a step is also formed at the joint between the tip member T1 and the second intermediate member M2.

[0048] In this embodiment, the end surface on the tip side of the second intermediate member M2 is also annular and parallel to the radial direction XD, and is welded so that the welding material F is thermally fused to each of the corners where the end surface and the outer circumferential surface of the tip member T1 intersect, as shown in Figures 3, 5, and 6. In the spray nozzle 31 of this embodiment, similar to the joint between the first intermediate member M1 and the second intermediate member M2, a step that occurs between the outer circumferential surface of the second intermediate member M2 and the outer circumferential surface of the tip member T1 is eliminated by filling in the welding material F.

[0049] In the head portion 3122 of this embodiment, a portion of the base end side of the tip member T1 is inserted into the second intermediate member M2 to join these members, but as shown in Fig. 7, the opening facing upward of the tip member T1 may be sized to receive the tip portion of the second intermediate member M2, and the tip member T1 and the second intermediate member M2 may be overlapped at the joint so that the tip member T1 is on the inside and the second intermediate member M2 is on the outside. In this case, too, the step formed at the joint between the tip member T1 and the second intermediate member M2 can be eliminated by the welding material F.

[0050] The buildup by welding to eliminate the step between the first intermediate member M1 and the second intermediate member M2 can be applied so as to reach the corner between the end face and outer circumferential surface of the first intermediate member M1. The welding in this embodiment is applied so that the height in the radial direction XD is the same as the position of the outer circumferential surface of the first intermediate member M1, and is applied so as to cover the entire end face of the first intermediate member M1.

[0051] The same applies to buildup by welding to eliminate the step that occurs between the outer circumferential surface of the second intermediate member M2 and the outer circumferential surface of the tip member T1. The buildup can be applied so as to reach the corner where the end face and outer circumferential surface of the second intermediate member M2 intersect. The welding in this embodiment is applied so that the height in the radial direction XD is the same as the position of the outer circumferential surface of the second intermediate member M2, and is applied so as to cover the entire end face of the second intermediate member M2.

[0052] When a step occurs at the joint between an upstream member and a downstream member due to a difference in outer diameter, the step can be eliminated by filling the gap downstream of the end face of the upstream member with welding material. The filler for filling this gap and eliminating the step is not limited to welding material, but may also be a molded product that has been pre-formed. That is, the connection portion may be formed by a molded product, etc. The molded product may be, for example, a ring-shaped molded product that has a thickness corresponding to the step on the side that abuts the end face of the higher-stage member and gradually decreases in thickness with increasing distance from the end face. That is, the filler may be a ring-shaped molded product whose cross-section in a plane perpendicular to the circumferential direction is a right triangle. The ring-shaped molded product may be divisible circumferentially. That is, it may be composed of multiple segments that can be connected to form a ring. Such a molded product can be attached to the second intermediate member M2 after it has been joined to the first intermediate member M1, simplifying the formation of the joint.

[0053] 7, when the distal end member T1 side is the higher step side, the outer circumferential surface of the connecting portion is provided so as to taper from the higher step side to the lower step side (base end side) of the step. In other words, the outer circumferential surface of the connecting portion in this case becomes an expanding portion whose diameter expands toward the distal end side.

[0054] The first intermediate member M1 has chamfered outer corners at the tip end where it will be joined to the second intermediate member M2, and the outer circumferential surface tapers down in diameter just before the edge at the tip end. The welding is performed so as to extend the reduced diameter of the outer circumferential surface toward the tip end.

[0055] As described above, the nozzle main body 312 of this embodiment is provided with a first intermediate portion made of the first intermediate member M1, a second intermediate portion made of the second intermediate member M2, and a first connecting portion (hereinafter also referred to as the "first connecting portion") made of a welding material that contacts the first intermediate portion and the second intermediate portion. Further, the nozzle main body 312 of this embodiment is provided with a main body base end portion made of a base end member B1, and a main body tip portion made of a tip member T1.

[0056] The first connecting portion has an outer circumferential surface whose diameter decreases toward the tip in the longitudinal direction XL, and the tip edge of the first connecting portion contacts the second intermediate member M2 without forming a substantial step.

[0057] The absence of steps in the first connecting portion or other portions of the nozzle main body 312 can be confirmed by, for example, measuring the height (height in the radial direction XD) from the central axis Cx of the first connecting portion at two points separated by a small distance (e.g., 0.5 mm) in the length direction XL and finding that the difference in height is 0.5 mm or less. The difference in height in the radial direction XD may be, for example, 0.4 mm or less, 0.3 mm or less, 0.2 mm or less, or 0.1 mm or less. The difference in height in the radial direction XD can be measured using, for example, a non-contact (e.g., laser) contour measuring device.

[0058] In this embodiment, the outer peripheral surface of the nozzle main body 312 is an exposed surface that is exposed to the internal space 10c of the reaction vessel 10. The outer peripheral surface of the nozzle main body 312 exposed to the internal space 10c includes a base end region AB1 formed by the outer peripheral surface of the base end member B1, a first intermediate region AM1 formed by the outer peripheral surface of the first intermediate portion, a second intermediate region AM2 formed by the outer peripheral surface of the second intermediate portion, and a first connection region AC1 formed by the outer peripheral surface of the first connection portion. In this embodiment, the outer peripheral surface of the nozzle main body 312 further includes a tip region AT1 formed by the outer peripheral surface of the tip member T1. In addition, in this embodiment, a second connection portion (second connection portion) is provided between the second intermediate member M2 and the tip member T1, and a second connection region AC2, which is the outer peripheral surface of the second connection portion, is included in the outer peripheral surface of the nozzle main body 312. The first intermediate region AM1 and the first connection region AC1 are continuous at the downstream edge of the first intermediate region AM1, and the second intermediate region AM2 is provided downstream of the first connection region AC1.

[0059] Furthermore, the first connection region AC1, which is the outer peripheral surface of the first connection portion in this embodiment, is tapered and has a reduced diameter, with no steps provided throughout the entire section from the base end edge to the tip end edge. Also, there is no step between the first connection region AC1 and the second intermediate region AM2 downstream of it. Therefore, in the nozzle main body 312 of this embodiment, even though the first intermediate member M1 and the second intermediate member M2 have different outer diameters, no steps are formed at the connection portion, making it difficult for the workpiece or cleaning liquid to remain, and thus reducing the likelihood of problems caused by foreign matter.

[0060] In this embodiment, the cleaning liquid can flow continuously along the outer circumferential surface of the nozzle main body 312 from the first intermediate region AM1 through the first connection region AC1 to the second intermediate region AM2. In this embodiment, a first connection portion is provided so as to continue from the edge of the first intermediate member M1, and the outer circumferential surface of the first connection portion is a reduced-diameter portion. That is, in this embodiment, a reduced-diameter portion whose outer diameter changes in the longitudinal direction is provided so as to continue from the edge of the first intermediate region AM1, allowing the cleaning liquid to flow continuously between the first intermediate region AM1 and the reduced-diameter portion. A similar continuous flow of cleaning liquid can be achieved even when an expanded-diameter portion is provided so as to continue from the edge of the first intermediate region AM1. In this embodiment, the cleaning liquid can flow continuously in the longitudinal direction XL across multiple regions on the outer circumferential surface of the nozzle main body 312. This prevents the workpiece or cleaning liquid from accumulating at the boundary between adjacent regions (boundaries between members), reducing the likelihood of problems caused by foreign matter.

[0061] The nozzle main body 312 may include multiple reduced diameter sections and multiple expanded diameter sections. For example, a first reduced diameter section may be provided continuously from the edge of the first intermediate region AM1, and a second reduced diameter section may be provided downstream of the first reduced diameter section. The second reduced diameter section may be provided in the first connection region AC1, like the first reduced diameter section, or in the second intermediate region AM2. When multiple reduced diameter sections are provided in the first connection region AC1 at intervals in the longitudinal direction XL, a constant diameter section whose distance from the central axis Cx is constant in the longitudinal direction XL may be provided between the upstream first reduced diameter section and the downstream second reduced diameter section. In other words, the first connection region AC1 may be formed so that reduced diameter sections and constant diameter sections are alternately arranged and the diameter changes stepwise in the longitudinal direction XL. Even in such a case, the cleaning liquid that has flowed from the first intermediate area AM1 into the first connection area AC1 can flow into the second intermediate area AM2, making it difficult for the object to be treated or the cleaning liquid to remain, and making it less likely for problems caused by foreign matter to occur.

[0062] The fact that cleaning liquid flowing from the upstream region into the connection region can continuously flow down to the downstream region is the same even when the downstream member is the higher stage and the connection region is the expanded diameter portion. When a plurality of expanded diameter portions including a first expanded diameter portion and a second expanded diameter portion are provided in the connection region at intervals in the length direction XL, the connection region may be formed so that the expanded diameter portions and constant diameter portions are alternately arranged and the diameter changes stepwise in the length direction XL.

[0063] In the present embodiment, the welding material also eliminates any step at the joint between the second intermediate member M2 and the tip member T1, and therefore the same effect as above is also exerted at the joint between the second intermediate member M2 and the tip member T1. That is, in the present embodiment, the second connection region AC2, which is the outer circumferential surface of the second connection portion between the second intermediate member M2 and the tip member T1, is provided so as to be continuous with the edge portion on the tip side of the second intermediate region AM2, and no step is formed at the boundary between the second connection region AC2 and the second intermediate region AM2, so that problems due to foreign matter are unlikely to occur.

[0064] The same is true for the second connection area AC2, as the cleaning liquid can flow continuously along the outer surface of the nozzle main body 312, making it difficult for the workpiece or cleaning liquid to remain, and preventing problems caused by foreign matter.

[0065] In the nozzle main body 312 illustrated in FIG. 4A, a reduced diameter portion whose outer diameter decreases toward the downstream side is provided at the tip end of the first intermediate region AM1 and the connection region. The reduced diameter portion may be provided in the second intermediate region AM2. The reduced diameter portion is preferably provided in at least one of the second intermediate region AM2 and the connection region. In this embodiment, instead of a reduced diameter portion whose outer diameter decreases toward the downstream side, an expanded diameter portion whose outer diameter increases toward the downstream side may be provided. In the nozzle main body 312 of this embodiment, it is preferable that at least one of the second intermediate region AM2 and the connection region be provided with at least one of a reduced diameter portion whose outer diameter decreases toward the downstream side and an expanded diameter portion whose outer diameter increases toward the downstream side.

[0066] The reduced diameter portion and the expanded diameter portion may have a curved outline when viewed perpendicular to the central axis Cx, but are preferably linear. In this embodiment, the reduced diameter portion preferably has a tapered diameter with a constant change in outer diameter. In this embodiment, the expanded diameter portion preferably has a tapered diameter with a constant change in outer diameter. When measuring the dimensional change from the central axis Cx to the outer circumferential surface while moving the measurement point in the length direction XL, the dimensional change in the reduced diameter portion and the expanded diameter portion is preferably relatively gradual. The spray nozzle 31 preferably has a tapered reduced diameter portion, and the distance (L2 in FIG. 4B) by which the outer circumferential surface approaches the center of the nozzle body in the reduced diameter portion is shorter than the length (L1 in FIG. 4B) of the reduced diameter portion in the flow direction of the cleaning liquid (L1 > L2). The spray nozzle 31 has an enlarged diameter portion that is tapered in diameter, and it is preferable that the distance by which the outer peripheral surface of the enlarged diameter portion moves away from the center of the nozzle main body portion is shorter than the length of the enlarged diameter portion in the flow direction of the cleaning liquid.

[0067] The length (L1) of the reduced diameter portion and the length of the expanded diameter portion can be, for example, 0.5 mm or more. The length may be 1 mm or more, 1.5 mm or more, or 2 mm or more. The length may be, for example, 25 mm or less. The length may be 20 mm or less, or 15 mm or less.

[0068] The angles (θd, θe) formed by the reduced diameter portion and the expanded diameter portion with respect to the central axis Cx on a plane passing through the central axis Cx are, for example, smaller than 80°. The angles may be smaller than 75°, preferably smaller than 60°, and more preferably smaller than 45°. The angles (θd, θe) may be 40° or smaller, or may be 35° or smaller. The angles (θd, θe) formed by the reduced diameter portion and the expanded diameter portion with respect to the central axis Cx on a plane passing through the central axis Cx are preferably 15° or larger. The angles (θd, θe) may be 30° or larger, or may be 45° or larger. When the spray nozzle 31 has the reduced diameter portion and the expanded diameter portion, the angle θd of the reduced diameter portion and the angle θe of the expanded diameter portion may be the same or different. Furthermore, when the spray nozzle 31 has a plurality of the reduced diameter portions, the angle (θd1) of one of the plurality of reduced diameter portions and the angle (θd2) of another of the plurality of reduced diameter portions may be the same or different. When the spray nozzle 31 has a plurality of the expanded diameter portions, the angle of one of the plurality of expanded diameter portions and the angle of another of the plurality of expanded diameter portions may be the same or different.

[0069] In the cleaning device 30 of this embodiment, a flange portion provided on the liquid supply pipe 32 and a first flange portion 3111 are detachably joined by a flange joint, and cleaning liquid is supplied from the liquid supply pipe 32 to the through hole of the first flange portion 3111.

[0070] The spray nozzle 31 has a flow path formed so that the cleaning liquid supplied from the liquid supply pipe 32 flows through the connecting portion 3113 of the fixed portion 311, the pipe portion 3121 of the nozzle main body portion 312, and the head portion 3122 in that order.

[0071] In this embodiment, the nozzle main body 312 is provided with a plurality of through holes TH for discharging the cleaning liquid. At least some of the through holes TH are provided in the head portion 3122. The through holes TH provided at the lowest position of the tip member T1 also function as a drain. The through holes TH can be provided not only in the tip member T1 but also in the cup-shaped portion (upstream cup portion 3122a) on the tip side of the second intermediate member M2. By providing the through holes TH not only in the portion (downstream cup portion 3122b) formed by the tip member T1 but also in the upstream cup portion 3122a of the head portion 3122, the cleaning liquid can be supplied over a wide area. Therefore, it is preferable that the outer diameter of the portion of the pipe portion 3121 formed by the second intermediate member M2 be smaller than the outer diameters of the base member B1 and the first intermediate member M1, thereby ensuring a larger area in the upstream cup portion 3122a where the through holes TH can be provided. The discharge includes not only the case where the cleaning liquid is forcefully sprayed from the through-hole TH, but also the case where the flow rate is reduced (the spray pressure is reduced) and the cleaning liquid is allowed to drip down the surface of the spray nozzle 31 from the through-hole TH.

[0072] To ensure a larger area in the upstream cup portion 3122a where the through-hole TH can be provided, it may be possible to reduce the diameter of the entire pipe portion 3121. However, since the nozzle main body 312 of this embodiment is cantilevered only at the base end, a thin pipe portion 3121 may not provide sufficient strength and may be prone to bending. Furthermore, a thick pipe portion 3121 is preferable for transmitting the pressure of the cleaning liquid to the head portion 3122. Therefore, it is preferable that the outer diameter of the portion of the pipe portion 3121 connected to the head portion 3122 is smaller than that of the portion upstream (toward the base end) of the pipe portion 3121. That is, it is preferable that the nozzle main body 312 has a large-diameter portion with a relatively large outer diameter and a small-diameter portion with a smaller diameter than the large-diameter portion, and that the portion connected to the head portion 3122 is the small-diameter portion and that the large-diameter portion is located upstream (toward the base end) of the small-diameter portion. In addition, in this embodiment, the minimum diameter of the first intermediate member M1 is larger than the minimum diameter of the second intermediate member M2, which makes it difficult for the nozzle main body 312 to bend.

[0073] In the spray nozzle 31 of this embodiment, it is easy to provide a through-hole in the upstream cup portion 3122a as well, so that the cleaning liquid ejected from the through-hole can be easily sprayed directly onto the pipe portion 3121 or reflected off the wall surface of the reaction vessel 10 and then splashed onto the spray nozzle 31. In other words, the spray nozzle 31 of this embodiment is designed so that the ejected cleaning liquid can be sprayed onto the fixed portion 311 and the nozzle main body 312 to wash away these surfaces, and has excellent self-cleaning properties.

[0074] To improve self-cleaning properties, in this embodiment, the through-holes TH through which the cleaning liquid is released may be provided in the base end member B1, the first intermediate member M1, etc. Because the base end member B1 and the first intermediate member M1 are located close to the inner wall surface of the second cylindrical portion 11b of the reaction tank 10, providing through-holes in these members is expected to provide high self-cleaning properties due to the rebound of the cleaning liquid.

[0075] The through holes TH may be provided so that the cleaning liquid bounces back onto the fixed portion 311, or may be provided so that the cleaning liquid bounces back onto any of the base end member B1, the first intermediate member M1, the second intermediate member M2, and the tip end member T1.

[0076] The through-holes TH are preferably provided so that the rebounded cleaning liquid is sprayed onto the base end side of the spray nozzle 31. For example, when cleaning the spray nozzle 31, the spray nozzle 31 is positioned vertically with its tip facing downward, and the cleaning liquid discharged from the through-holes TH is sprayed onto the outer surfaces of the fixed portion 311 and the nozzle main body 312, and the cleaning liquid flows from the first intermediate region AM1 into the first connection region AC1 to clean the nozzle main body 312. During such cleaning, for example, the cleaning liquid is supplied to the first intermediate region AM1 or a region closer to the base end than the first intermediate region AM1. By performing such cleaning while the spray nozzle 31 is positioned so that the central axis Cx passing through the center of the hollow nozzle main body 312 extending from the fixed portion 311 into the container is vertical, at least a portion of the cleaning liquid drips from the lower edge of the nozzle main body 312, allowing the spray nozzle 31 to be cleaned all the way to the tip.

[0077] In this embodiment, the outer peripheral surfaces of the base end member B1, the first intermediate member M1, etc. have opposing surfaces that face the inner wall surface of the second cylindrical portion 11 b in the horizontal direction. In this embodiment, by drilling through holes that open in the opposing surfaces in the base end member B1, the first intermediate member M1, etc., it is possible to improve the cleanability of the inner wall surface of the second cylindrical portion 11 b and the second flange portion 3112 of the fixing portion 311, and also to cause cleaning liquid that rebounds from these to flow down the outer peripheral surface of the nozzle main body 312. Therefore, good cleanability is also exhibited for the base end side of the spray nozzle 31, and high self-cleaning properties can be expected.

[0078] In this embodiment, the cleaning liquid may be simple water (e.g., ion-exchanged water), an aqueous cleaning agent containing a surfactant or the like (e.g., citric acid aqueous solution, phosphoric acid aqueous solution, alcohol aqueous solution, alkaline electrolyzed water, alkaline aqueous solution), an organic solvent, etc. The first intermediate region AM1 and the first connection region AC1 are preferably continuous such that the direction from the first intermediate region AM1 to the first connection region AC1 is downward and the first intermediate region AM1 is vertically arranged, and when a cleaning liquid is made to flow along the first intermediate region AM1, the cleaning liquid flows into the first connection region AC1.

[0079] In the nozzle main body 312 of this embodiment, multiple tubular members, such as the base end member B1 and the first intermediate member M1, are arranged so that their central axes are aligned in a straight line. Furthermore, the introduction pipe M21 of the second intermediate member M2 of this embodiment is also arranged so that the central axes of the base end member B1 and the first intermediate member M1 are aligned in a straight line, and these members form the central axis Cx of the nozzle main body 312. In this embodiment, it is preferable that the first intermediate region AM1 and the first connection region AC1 are continuous with each other such that the central axis Cx is vertical and the nozzle main body 312 is positioned such that the head portion 3122 is located below the pipe portion 3121, and that when a cleaning liquid flows down the first intermediate member M1, the cleaning liquid flows into the first connection region AC1.

[0080] When the central axes of the upstream and downstream members are neither aligned nor parallel, it is preferable that the nozzle main body 312 be arranged so that the central axis of either the upstream or downstream member (for example, the central axis of the upstream member) is vertical, and that when a cleaning liquid such as water is flowed as described above, the cleaning liquid flows continuously down the outer peripheral surfaces of those members.

[0081] The spray nozzle 31 can exhibit high self-cleaning properties because the nozzle main body 312 is configured so that when cleaning liquid is caused to flow through the first intermediate region AM1 as described above, the cleaning liquid is transferred to the first connection region AC1 and continues to flow through the first connection region AC1.

[0082] Among cleaning liquids, water has low surface energy and spreads less easily on component surfaces than other liquids. Therefore, the nozzle body 312 is preferably configured such that a line segment extending from the boundary line between the downstream edge of the first intermediate region AM1 and the upstream edge of the first connection region AC1, perpendicular to the boundary line, faces the first region and points vertically upward. When room-temperature water (e.g., 23°C) is supplied to the first intermediate region AM1 using a dropper or the like and allowed to flow downward by gravity alone, the water flows not only into the first intermediate region AM1 but also into the first connection region AC1. The nozzle body 312 is configured so that when water flows through the first intermediate region AM1, the water travels to the first connection region AC1 and continues to flow through the first connection region AC1. This configuration allows the spray nozzle 31 to exhibit high self-cleaning properties.

[0083] The spray nozzle 31 of this embodiment may be configured such that water flowing through the first intermediate region AM1, the first intermediate region AM1, the first connecting region AC1, and then the second intermediate region AM2. The spray nozzle 31 of this embodiment may be configured such that water flowing through the second intermediate region AM2 also flows down the second connecting region AC2, flows through the tip region AT1, and drips from the lower edge of the tip region AT1. The tip region AT1 may have a downwardly pointed polygonal pyramid or cone shape, or an obtuse-angled polygonal pyramid or obtuse-angled cone shape. By configuring the nozzle body 312 in this manner so that there are no steps all the way to the tip edge, the spray nozzle 31 can exhibit superior self-cleaning properties.

[0084] The pipe portion 3121 may have a plurality of through holes. The plurality of through holes may be arranged side by side in the vertical direction, or may be arranged side by side in the circumferential direction, or may be arranged side by side in both the vertical and circumferential directions. The plurality of through holes may be arranged in a spiral shape so as to go around the outer circumferential surface of the pipe portion 3121 and head toward the head portion 3122. When the plurality of through holes are arranged in the pipe portion 3121 with a distance between them in the vertical direction, the through holes may be arranged side by side in the vertical direction, or may be arranged diagonally with their positions shifted in the circumferential direction. The plurality of through holes may be arranged randomly.

[0085] When a through hole is provided to discharge the cleaning liquid toward the inner wall surface of the second cylindrical portion 11b, the direction of the through hole may be inclined toward the base end or tip end (vertical direction) with respect to the radial direction XD, or may be inclined left and right (horizontal direction). If the cleaning liquid is discharged in a direction inclined left and right (horizontal direction), the cleaning liquid will be incident on the inner wall surface of the second cylindrical portion 11b from a direction other than the normal direction when viewed in the central axis direction, and a swirling flow that swirls along the inner wall surface of the second cylindrical portion 11b will likely be formed, making it easier to clean a wider area. On the other hand, in this case, the rebound of the cleaning liquid will be reduced, which may somewhat reduce the self-cleaning ability. Therefore, when providing a through hole for releasing cleaning liquid toward the inner wall surface of the second cylindrical portion 11b, it is possible to provide multiple through holes including a first through hole through which cleaning liquid enters the inner wall surface of the second cylindrical portion 11b from a direction normal to the inner wall surface of the second cylindrical portion 11b, and a second through hole through which cleaning liquid enters the inner wall surface of the second cylindrical portion 11b from a direction inclined with respect to the normal direction.

[0086] The through holes provided in the pipe portion 3121 and the head portion 3122 may have different diameters. Compared to the through holes provided in the pipe portion 3121, the through holes provided in the head portion 3122 are required to allow the released cleaning liquid to reach a longer distance. If a through hole with a larger diameter is provided in the pipe portion 3121, it becomes difficult to increase the pressure in the head portion 3122. Therefore, the flow path area of ​​the through hole provided in the pipe portion 3121 may be equal to or smaller than the flow path area of ​​the through hole in the head portion 3122. Furthermore, if the through hole provided in the pipe portion 3121 is provided so as to penetrate obliquely upward through the base end member B1, the first intermediate member M1, or the like, the length of the through hole becomes longer than when a through hole is provided penetrating radially. Not only does this increase the passage resistance of the cleaning liquid, but the flow of the cleaning liquid in the base end member B1 or the first intermediate member M1 turns at an acute angle before flowing into the through hole, so the cleaning liquid supplied from the liquid supply pipe 32 can be propagated to the head portion 3122 without a significant decrease in pressure.

[0087] The through-holes provided in the pipe portion 3121 may have a direction in which the cleaning liquid is discharged (the penetrating direction of the through-holes) that is the radial direction XD of the nozzle body 312. The direction in which the cleaning liquid is discharged from the through-holes TH may be inclined at an angle in the up-down direction, the left-right direction, or both directions with respect to the radial direction XD. When the through-holes TH provided in the pipe portion 2121 are oriented obliquely upward or downward, the angle (the elevation angle or depression angle with respect to the horizontal plane) may be, for example, 10° or more, 15° or more, 20° or more, or 25° or more. The elevation angle or depression angle may be, for example, 45° or less, 40° or less, or 35° or less. When the through hole TH provided in the pipe part 3121 is inclined to the left or right, the angle (the angle with respect to the radial direction XD when viewed from the direction of the central axis Cx) may be, for example, 10° or more, 15° or more, 20° or more, or 25° or more. The angle may be, for example, 45° or less, 40° or less, or 35° or less.

[0088] When the reaction vessel 10 is cleaned with the spray nozzle 31, the pressure of the cleaning liquid may be reduced so that the cleaning liquid discharged from the through-holes in the pipe portion 3121 does not completely detach from the pipe portion 3121 and fly into the air, and some or all of the cleaning liquid discharged from the pipe portion 3121 drips from the opening of the through-hole and flows down along the surfaces of the pipe portion 3121 and the head portion 3122. That is, during cleaning, the cleaning device 30 may be operated in a plurality of modes, including a high-pressure mode in which the cleaning liquid is supplied from the liquid supply pipe 32 at a relatively high pressure to prioritize cleaning of the reaction vessel 10, and a low-pressure mode in which the cleaning liquid is supplied from the liquid supply pipe 32 at a pressure lower than that in the high-pressure mode. Here, the low-pressure mode is a mode in which the discharge pressure is adjusted so that at least a portion of the cleaning liquid discharged from the through-holes in the pipe portion 3121 of the spray nozzle does not completely detach from the pipe portion 3121 and fly into the air, as described above. The high-pressure mode and the low-pressure mode may each be performed multiple times in a single cleaning process.

[0089] If the pipe portion 3121 or the head portion 3122 is made of a fluororesin such as PTFE, the cleaning liquid will not easily spread over their surfaces and will tend to fall off quickly. In this regard, the pipe portion 3121 or the head portion 3122 may be made of a fluororesin composition containing an inorganic filler in addition to a fluororesin such as PTFE. Adding an inorganic filler to the resin composition that makes up the pipe portion 3121 or the head portion 3122 makes it easier for microscopic irregularities to form on the surface, which is expected to improve the wetting and spreading properties of the cleaning liquid.

[0090] In the reduced diameter portion, the cleaning liquid flowing from above the reduced diameter portion is likely to fall downward without running down the surface of the reduced diameter portion. Therefore, the surface roughness of the reduced diameter portion (the surface roughness of the portion formed by the weld material) may be the same as or rougher than the surface roughness of the outer circumferential surfaces of the members constituting the pipe portion 3121 and the head portion 3122. The surface roughness of the reduced diameter portion and the surface roughness of the members can be compared by comparing the arithmetic mean roughness (Ra). The surface roughness can be determined by taking the arithmetic mean of measurements at several randomly selected locations (e.g., five locations). The arithmetic mean roughness (Ra) of the reduced diameter portion may be 1.5 times or more, 2 times or more, or 3 times or more the arithmetic mean roughness (Ra) of the member surface. However, since an excessively rough surface makes adhesion more likely to occur, the arithmetic mean roughness (Ra) of the reduced diameter portion is preferably 25 μm or less. The arithmetic mean roughness (Ra) of the tapered portion may be 12.5 μm or less, 6.3 μm or less, 3.2 μm or less, or 1.6 μm or less. The arithmetic mean roughness (Ra) can be measured in accordance with JIS B0601 (cutoff 0.8 mm).

[0091] As described above, the spray nozzle of this embodiment is not only less likely to retain liquids or powder particles, but also has excellent self-cleaning properties, making it easier to ensure the cleanliness of the object to be cleaned after cleaning. Furthermore, because the spray nozzle 31 of this embodiment has excellent self-cleaning properties, it is not necessary to remove the cleaning device 30 when treating the object to be treated using the reaction tank 10 after cleaning, which reduces the effort required to treat the object to be treated.

[0092] The cleaning apparatus 30 equipped with the spray nozzle 31 of this embodiment can be used as equipment and / or its auxiliary equipment used in a chemical process that changes chemical substances or compounds contained in a workpiece in some way. To change the chemical substance or compound, the energy supplied to the apparatus may be at least one of, for example, thermal energy, light energy, electrical energy, magnetic energy, and kinetic energy, as well as another chemical substance or compound that can react with the chemical substance or compound to be changed. The apparatus may be supplied with these energies in addition to another chemical substance or compound. When the cleaning apparatus 30 of this embodiment is used as equipment and / or its auxiliary equipment used in a chemical process, the workpiece may contain only chemical substances or compounds, or may contain a solvent or dispersant capable of dissolving the chemical substance or compound.

[0093] The object to be treated may be a food or drink containing the chemical substance or compound to be changed as one of its components, or an organic composition (e.g., a plastic composition, a rubber composition, or a pharmaceutical) or an inorganic composition (e.g., a glass composition, a metal composition, or a ceramic composition) containing the chemical substance or compound as one of its components. The cleaning apparatus 30 of this embodiment is used, for example, in equipment and / or associated facilities in the fields of pharmaceutical manufacturing, food manufacturing, and semiconductor manufacturing. The cleaning apparatus 30 may be used not only in a reaction apparatus that chemically reacts the object to be treated, but also in an apparatus that performs a process other than a chemical reaction. The cleaning apparatus 30 may also be used in a processing apparatus (e.g., a mixer, an agitator, a filter, or a dryer) that performs a physical process such as mixing, stirring, filtering, or drying. These apparatuses may perform both a chemical reaction and a physical process, or may perform only a physical process.

[0094] The cleaning device 30 of this embodiment is not limited to the above-mentioned devices, and can also be used to clean pipes, for example.

[0095] This embodiment illustrates an embodiment in which the outer peripheral surfaces (connection regions) of the first and second connection portions, which are made of welding material, narrow or widen toward their tips. The connection regions of this embodiment may be formed so that the area extending from the first intermediate region AM1 through the connection region (first connection region AC1) to the edge of the second intermediate region AM2 is flush, as shown in Figures 8A and 8B. In this case, the first intermediate region AM1, the connection region (first connection region AC1), and the second intermediate region AM2 can be made continuous without any steps, making it difficult for liquids or powder to accumulate and providing excellent self-cleaning properties.

[0096] In this embodiment, the spray nozzle 31 is exemplified as being arranged so that the central axis Cx is in the vertical direction, but the spray nozzle 31 of the present invention may be arranged at an angle to the vertical direction, or may be arranged horizontally. In such cases, the outer peripheral surface is continuous at the joint between the components that make up the nozzle body, which is the same in that it provides the effect of making it difficult for liquid or powder to remain. The present invention is not limited to the above example, and various modifications can be made to the above example.

[0097] As described above, the present specification includes the following disclosure.

[0098] (1) A spray nozzle attached to an opening of a hollow object to be cleaned in order to clean the inner wall surface of the object with a cleaning liquid, a fixing part attached to the opening of the object to be cleaned; a hollow nozzle body portion that is disposed so as to extend from the fixing portion into the internal space of the object to be cleaned when the fixing portion is attached to the opening, the cleaning liquid flows through the inside of the nozzle body and is supplied to the tip of the nozzle body, and the cleaning liquid is discharged from a through hole formed in the nozzle body, The nozzle body is made up of a plurality of members, the plurality of members include a first member and a second member connected in a flow direction of the cleaning liquid, the second member is connected to the downstream side of the first member; the nozzle body includes a first portion made of the first member, a second portion made of the second member, and a connecting portion that contacts the first portion and the second portion; an outer peripheral surface of the nozzle body exposed to the internal space includes a first region formed by the outer peripheral surface of the first part, a second region formed by the outer peripheral surface of the second part, and a connection region formed by the outer peripheral surface of the connection part, The first region and the connection region are continuous at a downstream edge portion of the first region, the second region is provided downstream of the connection region, At least one of the second region and the connection region has: A spray nozzle provided with at least one of a reduced diameter section whose outer diameter decreases toward the downstream side and an expanded diameter section whose outer diameter increases toward the downstream side.

[0099] (2) The spray nozzle according to (1), wherein the minimum diameter of the first member is larger than the minimum diameter of the second member.

[0100] (3) The spray nozzle according to (1) or (2), wherein the connection region includes either the reduced diameter portion or the expanded diameter portion.

[0101] (4) The spray nozzle according to any one of (1) to (3), which is provided with the reduced diameter portion.

[0102] (5) The spray nozzle according to any one of (1) to (4), wherein the reduced diameter is a tapered reduced diameter and the expanded diameter is a tapered expanded diameter.

[0103] (6) The spray nozzle according to any one of (1) to (5), wherein the connecting region and the second region are continuous at a downstream edge of the connecting region.

[0104] (7) The tapered diameter portion has a tapered diameter, The spray nozzle according to (5), wherein the distance by which the outer circumferential surface approaches the center of the nozzle body at the reduced diameter portion is shorter than the length of the reduced diameter portion in the direction of flow of the cleaning liquid.

[0105] (8) A spray nozzle according to any one of (1) to (7), wherein the first region and the connection region are continuous so that when a cleaning liquid is caused to flow through the first region, the cleaning liquid flows into the connection region, and the direction of a line segment extending from the boundary line along the first region, perpendicular to the boundary line where the downstream edge of the first region and the upstream edge of the connection region meet, is oriented vertically upward.

[0106] (9) 1. A method for cleaning a spray nozzle attached to an opening of a hollow object to be cleaned in order to clean the inner wall surface of the object with a cleaning liquid, comprising: The spray nozzle is a fixing part attached to the opening of the object to be cleaned; a hollow nozzle body portion that is disposed so as to extend from the fixing portion into the internal space of the object to be cleaned when the fixing portion is attached to the opening, the cleaning liquid flows through the inside of the nozzle body and is supplied to the tip of the nozzle body, and the cleaning liquid is discharged from a through hole formed in the nozzle body, The nozzle body is made up of a plurality of members, the plurality of members include a first member and a second member connected in a flow direction of the cleaning liquid, the second member is connected to the downstream side of the first member; the nozzle body includes a first portion made of the first member, a second portion made of the second member, and a connecting portion that contacts the first portion and the second portion; an outer peripheral surface of the nozzle body exposed to the internal space includes a first region formed by the outer peripheral surface of the first part, a second region formed by the outer peripheral surface of the second part, and a connection region formed by the outer peripheral surface of the connection part, The first region and the connection region are continuous at a downstream edge portion of the first region, the second region is provided downstream of the connection region, At least one of the second region and the connection region has: At least one of a reduced diameter section whose outer diameter decreases toward the downstream side and an expanded diameter section whose outer diameter increases toward the downstream side is provided, In cleaning the spray nozzle, the cleaning liquid discharged from the through hole is sprayed onto the outer peripheral surface of the nozzle main body to clean the nozzle main body, The method for cleaning a spray nozzle includes spraying the cleaning liquid onto the outer peripheral surface of the nozzle body so that the cleaning liquid flows from the first region to the connection region.

[0107] In addition, in another aspect, the present specification includes the following disclosure.

[0108] (a) A spray nozzle attached to an opening of a hollow object to be cleaned in order to clean the inner wall surface of the object with a cleaning liquid, a fixing part attached to the opening of the object to be cleaned; a hollow nozzle body extending from the fixed portion into the internal space of the object to be cleaned, the cleaning liquid flows through the inside of the main body and is supplied to the tip of the nozzle main body, and the cleaning liquid is discharged from a through hole formed in the nozzle main body, The nozzle body is made up of a plurality of members, the plurality of members include a first member and a second member connected in a flow direction of the cleaning liquid, the second member is connected to the downstream side of the first member; the main body portion is provided with a first portion made of the first member, a second portion made of the second member, and a connecting portion that contacts the first portion and the second portion, an outer circumferential surface of the nozzle body exposed in the internal space includes a first region that is an outer circumferential surface of the first part, a second region that is an outer circumferential surface of the second part, and a connection region that is an outer circumferential surface of the connection part, the first region and the second region are separated in the flow direction of the cleaning liquid, the diameter of the most upstream edge of the second region is equal to or smaller than the diameter of the downstream edge of the first region; A spray nozzle in which the edges of the first region and the second region are connected to each other at the connecting region.

[0109] (b) A spray nozzle attached to an opening of a hollow object to be cleaned in order to clean the inner wall surface of the object with a cleaning liquid, a fixing part attached to the opening of the object to be cleaned; a pipe portion disposed so as to extend from the fixing portion into the internal space of the object to be cleaned when the fixing portion is attached to the opening; a hollow head portion provided at the tip of the pipe portion, The cleaning liquid is supplied to the head portion through the pipe portion, and the cleaning liquid is discharged from a through hole drilled in the head portion, the pipe portion has an outer diameter different between the fixed portion side and the head portion side, has a large diameter portion on the fixed portion side that is larger in diameter than the head portion side, and has a small diameter portion on the head portion side that is smaller in diameter than the large diameter portion, and the small diameter portion is connected to the head portion; The spray nozzle has a tapered portion at the connection point between the small diameter portion and the large diameter portion to eliminate the step caused by the difference in outer diameter. [Explanation of symbols]

[0110] 1: Reactor, 10: Reaction tank, 10c: Internal space, 12: Bottom wall, 13: Peripheral side wall, 14: Ceiling wall 20: stirring device, 21: stirring blade, 21a: stirring shaft, 21b: stirring blade, 30: cleaning device, 31: spray nozzle, 32: liquid supply pipe 311: Fixed part, 311a: Base, 311b: Cover material 312: nozzle body, 3121: pipe, 3122: head AB1: proximal region, AC1: First connection area (connection area), AM1: 1st intermediate area (1st area) AM2: 2nd intermediate area (2nd area) AT1: apical region B1: Base end member Cx: Central axis F: Welding material T1: Tip member TH:Through hole XD: Radial direction XL:Length direction

Claims

1. A spray nozzle attached to an opening of a hollow object to be cleaned in order to clean the inner wall surface of the object with a cleaning liquid, a fixing part attached to the opening of the object to be cleaned; a hollow nozzle body portion that is disposed so as to extend from the fixing portion into the internal space of the object to be cleaned when the fixing portion is attached to the opening, the cleaning liquid flows through the inside of the nozzle body and is supplied to the tip of the nozzle body, and the cleaning liquid is discharged from a through hole formed in the nozzle body, The nozzle body is made up of a plurality of members, the plurality of members include a first member and a second member connected in a flow direction of the cleaning liquid, the second member is connected to the downstream side of the first member; the nozzle body includes a first portion made of the first member, a second portion made of the second member, and a connecting portion that contacts the first portion and the second portion; a step is formed at a boundary between the first member and the second member, and the connection portion is provided so as to fill the step, an outer peripheral surface of the nozzle body exposed to the internal space includes a first region formed by the outer peripheral surface of the first portion, a second region formed by the outer peripheral surface of the second portion, and a connection region formed by the outer peripheral surface of the connection portion; The first region and the connection region are continuous at a downstream edge portion of the first region, the second region is provided downstream of the connection region, The connection region includes: At least one of a reduced diameter portion whose outer diameter decreases toward the downstream side and an expanded diameter portion whose outer diameter increases toward the downstream side is provided, the nozzle body has a pipe portion extending downward from the fixing portion when the fixing portion is disposed at an upper end thereof, and a head portion provided at a lower end of the pipe portion; The through hole is formed at least in the head portion, the pipe portion is composed of a plurality of members connected in the direction of flow of the cleaning liquid, In the pipe portion, the outer diameter of the member at the connection point with the head portion is smaller than the outer diameter of the member located upstream of the member, The step is formed between the members, The spray nozzle has the reduced diameter portion in the connection region formed by the outer peripheral surface of the connection portion that is provided to fill the step.

2. A spray nozzle attached to an opening of a hollow object to be cleaned in order to clean the inner wall surface of the object with a cleaning liquid, a fixing part attached to the opening of the object to be cleaned; a hollow nozzle body portion that is disposed so as to extend from the fixing portion into the internal space of the object to be cleaned when the fixing portion is attached to the opening, the cleaning liquid flows through the inside of the nozzle body and is supplied to the tip of the nozzle body, and the cleaning liquid is discharged from a through hole formed in the nozzle body, The nozzle body is made up of a plurality of members, the plurality of members include a first member and a second member connected in a flow direction of the cleaning liquid, the second member is connected to the downstream side of the first member; the nozzle body includes a first portion made of the first member, a second portion made of the second member, and a connecting portion that contacts the first portion and the second portion; a step is formed at a boundary between the first member and the second member, and the connection portion is provided so as to fill the step, an outer peripheral surface of the nozzle body exposed to the internal space includes a first region formed by the outer peripheral surface of the first portion, a second region formed by the outer peripheral surface of the second portion, and a connection region formed by the outer peripheral surface of the connection portion; The first region and the connection region are continuous at a downstream edge portion of the first region, the second region is provided downstream of the connection region, The connection region includes: At least one of a reduced diameter portion whose outer diameter decreases toward the downstream side and an expanded diameter portion whose outer diameter increases toward the downstream side is provided, the nozzle body has a pipe portion extending downward from the fixing portion when the fixing portion is disposed at an upper end thereof, and a head portion provided at a lower end of the pipe portion; the pipe portion is composed of a plurality of members connected in the direction of flow of the cleaning liquid, an outer diameter of one of the plurality of members is smaller than an outer diameter of a member located upstream of the one of the members; a step is formed between the members, and the connection portion is provided so as to fill the step, The lower end of the member on the upstream side of the step has a diameter that decreases toward the downstream side, The spray nozzle has a reduced diameter portion formed on the outer peripheral surface of the member, and the reduced diameter portion is also provided in the connection region that is continuous with the outer peripheral surface of the member.

3. A spray nozzle attached to an opening of a hollow object to be cleaned in order to clean the inner wall surface of the object with a cleaning liquid, a fixing part attached to the opening of the object to be cleaned; a hollow nozzle body portion that is disposed so as to extend from the fixing portion into the internal space of the object to be cleaned when the fixing portion is attached to the opening, the cleaning liquid flows through the inside of the nozzle body and is supplied to the tip of the nozzle body, and the cleaning liquid is discharged from a through hole formed in the nozzle body, The nozzle body is made up of a plurality of members, the plurality of members include a first member and a second member connected in a flow direction of the cleaning liquid, the second member is connected to the downstream side of the first member; the nozzle body includes a first portion made of the first member, a second portion made of the second member, and a connecting portion that contacts the first portion and the second portion; a step is formed at a boundary between the first member and the second member, and the connection portion is provided so as to fill the step, an outer peripheral surface of the nozzle body exposed to the internal space includes a first region formed by the outer peripheral surface of the first portion, a second region formed by the outer peripheral surface of the second portion, and a connection region formed by the outer peripheral surface of the connection portion; The first region and the connection region are continuous at a downstream edge portion of the first region, the second region is provided downstream of the connection region, The connection region includes: At least one of a reduced diameter portion whose outer diameter decreases toward the downstream side and an expanded diameter portion whose outer diameter increases toward the downstream side is provided, the nozzle body has a pipe portion extending downward from the fixing portion when the fixing portion is disposed at an upper end thereof, and a head portion provided at a lower end of the pipe portion; The head portion of the spray nozzle is provided with the through-hole that can spray the cleaning liquid directly onto the pipe portion.

4. A spray nozzle attached to an opening of a hollow object to be cleaned in order to clean the inner wall surface of the object with a cleaning liquid, a fixing part attached to the opening of the object to be cleaned; a hollow nozzle body portion that is disposed so as to extend from the fixing portion into the internal space of the object to be cleaned when the fixing portion is attached to the opening, the cleaning liquid flows through the inside of the nozzle body and is supplied to the tip of the nozzle body, and the cleaning liquid is discharged from a through hole formed in the nozzle body, The nozzle body is made up of a plurality of members, the plurality of members include a first member and a second member connected in a flow direction of the cleaning liquid, the second member is connected to the downstream side of the first member; the nozzle body includes a first portion made of the first member, a second portion made of the second member, and a connecting portion that contacts the first portion and the second portion; a step is formed at a boundary between the first member and the second member, and the connection portion is provided so as to fill the step, an outer peripheral surface of the nozzle body exposed to the internal space includes a first region formed by the outer peripheral surface of the first portion, a second region formed by the outer peripheral surface of the second portion, and a connection region formed by the outer peripheral surface of the connection portion; The first region and the connection region are continuous at a downstream edge portion of the first region, the second region is provided downstream of the connection region, The connection region includes: At least one of a reduced diameter portion whose outer diameter decreases toward the downstream side and an expanded diameter portion whose outer diameter increases toward the downstream side is provided, When the direction perpendicular to the central axis of the spray nozzle is defined as the radial direction, The connection portion is a thickness corresponding to the step on the side that abuts against the end surface of the higher-stage member that forms the step; A spray nozzle whose radial height is the same as the outer circumferential surface of the higher stage member.

5. A spray nozzle attached to an opening of a hollow object to be cleaned in order to clean the inner wall surface of the object with a cleaning liquid, a fixing part attached to the opening of the object to be cleaned; a hollow nozzle body portion that is disposed so as to extend from the fixing portion into the internal space of the object to be cleaned when the fixing portion is attached to the opening, the cleaning liquid flows through the inside of the nozzle body and is supplied to the tip of the nozzle body, and the cleaning liquid is discharged from a through hole formed in the nozzle body, The nozzle body is made up of a plurality of members, the plurality of members include a first member and a second member connected in a flow direction of the cleaning liquid, the second member is connected to the downstream side of the first member; the nozzle body includes a first portion made of the first member, a second portion made of the second member, and a connecting portion that contacts the first portion and the second portion; a step is formed at a boundary between the first member and the second member, and the connection portion is provided so as to fill the step, an outer peripheral surface of the nozzle body exposed to the internal space includes a first region formed by the outer peripheral surface of the first portion, a second region formed by the outer peripheral surface of the second portion, and a connection region formed by the outer peripheral surface of the connection portion; The first region and the connection region are continuous at a downstream edge portion of the first region, the second region is provided downstream of the connection region, The connection region includes: At least one of a reduced diameter portion whose outer diameter decreases toward the downstream side and an expanded diameter portion whose outer diameter increases toward the downstream side is provided, The nozzle body has an outer peripheral surface that is free of steps all the way up to the tip edge.

6. 6. The spray nozzle according to claim 1, wherein the minimum diameter of the first member is larger than the minimum diameter of the second member.

7. 6. A spray nozzle according to claim 3, further comprising a reduced diameter portion.

8. 6. The spray nozzle according to claim 1, wherein the reduced diameter is a tapered reduced diameter and the expanded diameter is a tapered expanded diameter.

9. The spray nozzle according to any one of claims 1 to 3, wherein the connecting region and the second region are continuous at a downstream edge of the connecting region.

10. The tapered diameter portion has a tapered diameter, 9. The spray nozzle according to claim 8, wherein the distance by which the outer circumferential surface approaches the center of the nozzle body at the reduced diameter portion is shorter than the length of the reduced diameter portion in the direction of flow of the cleaning liquid.

11. 4. The spray nozzle according to claim 1, wherein the first region and the connection region are continuous so that when cleaning liquid is caused to flow through the first region, the cleaning liquid flows into the connection region, and the direction of a line segment extending from the boundary line along the first region, perpendicular to the boundary line where the downstream edge of the first region and the upstream edge of the connection region meet, is oriented vertically upward.

12. 1. A method for cleaning a spray nozzle attached to an opening of a hollow object to be cleaned in order to clean the inner wall surface of the object with a cleaning liquid, comprising: The spray nozzle is a fixing part attached to the opening of the object to be cleaned; a hollow nozzle body portion that is disposed so as to extend from the fixing portion into the internal space of the object to be cleaned when the fixing portion is attached to the opening, the cleaning liquid flows through the inside of the nozzle body and is supplied to the tip of the nozzle body, and the cleaning liquid is discharged from a through hole formed in the nozzle body, The nozzle body is made up of a plurality of members, the plurality of members include a first member and a second member connected in a flow direction of the cleaning liquid, the second member is connected to the downstream side of the first member; the nozzle body includes a first portion made of the first member, a second portion made of the second member, and a connecting portion that contacts the first portion and the second portion; a step is formed at a boundary between the first member and the second member, and the connection portion is provided so as to fill the step, an outer peripheral surface of the nozzle body exposed to the internal space includes a first region formed by the outer peripheral surface of the first portion, a second region formed by the outer peripheral surface of the second portion, and a connection region formed by the outer peripheral surface of the connection portion; The first region and the connection region are continuous at a downstream edge portion of the first region, the second region is provided downstream of the connection region, The connection region includes: At least one of a reduced diameter section whose outer diameter decreases toward the downstream side and an expanded diameter section whose outer diameter increases toward the downstream side is provided, In cleaning the spray nozzle, the cleaning liquid discharged from the through hole is sprayed onto the outer peripheral surface of the nozzle main body to clean the nozzle main body, In cleaning the nozzle body, the cleaning liquid is sprayed onto the outer peripheral surface of the nozzle body so that the cleaning liquid flows from the first region to the connection region, A method for cleaning a spray nozzle, in which the cleaning liquid discharged from the through-hole is caused to bounce off the object to be cleaned and splash onto the outer peripheral surface of the nozzle main body, thereby cleaning the nozzle main body.

13. 1. A method for cleaning a spray nozzle attached to an opening of a hollow object to be cleaned in order to clean the inner wall surface of the object with a cleaning liquid, comprising: The spray nozzle is a fixing part attached to the opening of the object to be cleaned; a hollow nozzle body portion that is disposed so as to extend from the fixing portion into the internal space of the object to be cleaned when the fixing portion is attached to the opening, the cleaning liquid flows through the inside of the nozzle body and is supplied to the tip of the nozzle body, and the cleaning liquid is discharged from a through hole formed in the nozzle body, The nozzle body is made up of a plurality of members, the plurality of members include a first member and a second member connected in a flow direction of the cleaning liquid, the second member is connected to the downstream side of the first member; the nozzle body includes a first portion made of the first member, a second portion made of the second member, and a connecting portion that contacts the first portion and the second portion; a step is formed at a boundary between the first member and the second member, and the connection portion is provided so as to fill the step, an outer peripheral surface of the nozzle body exposed to the internal space includes a first region formed by the outer peripheral surface of the first portion, a second region formed by the outer peripheral surface of the second portion, and a connection region formed by the outer peripheral surface of the connection portion; The first region and the connection region are continuous at a downstream edge portion of the first region, the second region is provided downstream of the connection region, The connection region includes: At least one of a reduced diameter section whose outer diameter decreases toward the downstream side and an expanded diameter section whose outer diameter increases toward the downstream side is provided, In cleaning the spray nozzle, the cleaning liquid discharged from the through hole is sprayed onto the outer peripheral surface of the nozzle main body to clean the nozzle main body, In cleaning the nozzle body, the cleaning liquid is sprayed onto the outer peripheral surface of the nozzle body so that the cleaning liquid flows from the first region to the connection region, A method for cleaning a spray nozzle, in which the nozzle body is cleaned by causing at least a portion of the cleaning liquid to drip down from the opening of the through hole without flying into the air.

Images