Electromagnetic wave inspection device and program

Abstract

To provide an electromagnetic examination device that is easy to observe a change in images before and after a change of a parameter.SOLUTION: A device, which is the device that achieves an examination of an examined object on the basis of examined data serving as two-dimensional image data obtained by detecting an electromagnetic wave through the examined object, comprises: an image processing unit that outputs post-image processed data obtained by applying image processing to examined data, using a prescribed parameter; and a display control unit that generates a three-dimensional image having a value of each pixel of the post-image processed data represented as three-dimension information, and makes the three-dimensional image displayed on a display unit. The image processing unit is configured to receive a change instruction input of the parameter, output, to the examined data, post-image processed data having image processing applied, using a post-changed parameter in accordance with an instruction content, and the display control unit is configured to update the three-dimensional image displayed on the display unit to a three-dimensional image having a value of each pixel of the post-image processed data by the post-changed parameter the image processing unit outputs represented as three-dimension information.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an electromagnetic wave inspection apparatus and a program for irradiating a test object with electromagnetic waves to perform inspections such as for foreign objects.

Background Art

[0002] Generally, in each process from the manufacture of a product to its packaging and shipping, inspections are performed, such as for the presence or absence of foreign objects mixed into the product or packaging, by an inspection method suitable for the test object to be inspected and the types of foreign objects (materials, sizes, etc.) that may be contained in the test object. Among these, in an electromagnetic wave inspection apparatus that can inspect a test object non-destructively, the test object is irradiated with electromagnetic waves such as X-rays, and from the intensity distribution of the transmitted electromagnetic waves, the presence or absence and location of internal foreign objects that cannot be seen from the outside can be inspected.

[0003] Specifically, for example, while the test object crosses a line sensor on which a plurality of detection elements are arranged in a row in a direction orthogonal to the conveyance direction of the test object, at each detection element of the line sensor, the transmitted electromagnetic waves are repeatedly detected at a detection period corresponding to the conveyance speed of the test object, whereby a group of detection values two-dimensionally arranged by the number of detection elements of the line sensor × the number of detection periods is obtained. Then, by using the position in the two-dimensional arrangement of each detection value as the position of a pixel and expressing the magnitude of the detection value by the brightness or darkness of the pixel, etc., a two-dimensional image in which the intensity distribution of the transmitted electromagnetic waves of the test object is expressed by the shading of the pixels can be generated.

[0004] Prior to converting the two-dimensional group of detection values into a two-dimensional image, generally, image processing using predetermined parameters is performed to enhance the sensitivity of foreign object inspection. The parameters used in the image processing are identified as optimal by observing how the two-dimensional image changes while adjusting the parameters beforehand.

[0005] In order to be able to observe the change in the two-dimensional image before and after the change of the parameters, a parameter is changed while visually observing a display unit on which the two-dimensional image before the change of the parameter is displayed, so that a real-time update of the display to the two-dimensional image after the change of the parameter is disclosed in Patent Document 1 for an X-ray inspection apparatus. [Prior art documents] [Patent Documents]

[0006] [Patent Document 1] Japanese Patent Publication No. 2009-80029 [Overview of the Initiative] [Problems that the invention aims to solve]

[0007] Even if it is possible to visually observe how the image changes due to parameter adjustments, the changes occur in multiple locations and vary in degree, making them easy to miss, and accurate observation of the changes requires skill. Specifically, for example, in a two-dimensional image where the magnitude of detected electromagnetic waves is represented by light and dark shades, areas with foreign objects are represented darker than areas without them. Therefore, by estimating the presence of foreign objects in areas with a density above a certain threshold and displaying those areas in a different color, such as red, the areas containing foreign objects can be clarified. However, when fine-tuning parameters to improve inspection accuracy, the visual change in the colored areas does not always occur significantly, and it was difficult to appropriately recognize the visual changes unless the operator was skilled enough to predict the visual changes after parameter changes. Therefore, inexperienced operators had to collect multiple two-dimensional images with different thresholds when changing parameters and understand the density profile of the uncolored areas in each image, which was a complicated and time-consuming process. Furthermore, it was difficult to adequately explain the visual changes in the colored areas due to parameter changes to other workers or customers.

[0008] The object of the present invention is to provide an electromagnetic wave inspection device and program that make it easy to observe changes in images before and after parameter changes. [Means for solving the problem]

[0009] The electromagnetic wave inspection device of the present invention is an electromagnetic wave inspection device that performs inspection of an object to be inspected based on inspection data, which is two-dimensional image data obtained by irradiating the object to be inspected with electromagnetic waves and detecting the electromagnetic waves that have passed through the object to be inspected. The device comprises an image processing unit that outputs image-processed data, which is two-dimensional image data obtained by performing image processing on the inspection data using predetermined parameters; a display unit; and a display control unit that generates a three-dimensional image in which the values ​​of each pixel of the image-processed data are represented three-dimensionally as third-dimensional information and displays it on the display unit. The image processing unit receives an instruction input for changing parameters and outputs image-processed data obtained by performing image processing on the inspection data using the changed parameters according to the instruction. The display control unit updates the three-dimensional image displayed on the display unit to a three-dimensional image in which the values ​​of each pixel of the image-processed data output by the image processing unit using the changed parameters are represented three-dimensionally as third-dimensional information.

[0010] The display control unit may superimpose a three-dimensional image onto a two-dimensional image of the data being inspected and display it on the display unit.

[0011] The display control unit may be configured to accept instruction input for changing the observation angle and to change the observation angle of the three-dimensional image displayed on the display unit according to the instruction.

[0012] The display control unit may be configured to accept an instruction input for switching images and to switch the three-dimensional image displayed on the display unit to a two-dimensional image that is an image of the inspected data from which the three-dimensional image was generated.

[0013] The display control unit may cause the display unit to display a three-dimensional image and also display a two-dimensional image of the data under inspection that is the source of the three-dimensional image.

[0014] The electromagnetic wave inspection device of the present invention may have an input unit for receiving instruction input located in a position where the operator can operate it while visually viewing the display unit.

[0015] The electromagnetic wave inspection apparatus of the present invention may be realized by causing a computer to execute a program describing the functions of the electromagnetic wave inspection apparatus of the present invention.

Advantages of the Invention

[0016] According to the electromagnetic wave inspection apparatus and program of the present invention, a three-dimensional image in which the values of each pixel of two-dimensional image data are three-dimensionally represented is generated, and the three-dimensional image is updated according to changes in parameters. Therefore, even an operator who is not skilled can easily observe the changes in the images before and after the parameter change, and the workability of parameter adjustment can be improved. Specifically, for example, since the profiles of portions other than the portion where a foreign object exists can be intuitively grasped in a three-dimensional image, even an unskilled operator can quickly perform the parameter adjustment work.

Brief Description of the Drawings

[0017] [Figure 1] It is a functional configuration diagram of the electromagnetic wave inspection apparatus 100 of the present invention. [Figure 2] It is a diagram for explaining the process of generating a three-dimensional image from two-dimensional image data. [Figure 3] It is a diagram showing an example of superimposing and displaying a three-dimensional image on a two-dimensional image based on inspection data. [Figure 4] It is a diagram showing an example of how the three-dimensional image changes due to a change in parameters. [Figure 5] It is a diagram showing an example of the appearance of the electromagnetic wave inspection apparatus 100 of the present invention. [Figure 6] It is a diagram showing an example of the display on the display unit 180 corresponding to FIG. 5. [Figure 7] It is a diagram showing another example of the appearance of the electromagnetic wave inspection apparatus 100 of the present invention. [Figure 8] It is a diagram showing an example of the display on the display unit 180 corresponding to FIG. 7. [Figure 9] It is a diagram for explaining an example of a method of instructing an input for changing the observation angle. [Figure 10] It is a diagram for explaining an example of a method of instructing an input for image switching. [Figure 11] It is another figure for explaining an example of an instruction input method for image switching. [Figure 12] It is a figure showing an example of parallel display of a three-dimensional image and a two-dimensional image.

Embodiments for Carrying out the Invention

[0018] Hereinafter, embodiments of the present invention will be described based on the drawings. In the following description, the same members are denoted by the same reference numerals, and the description of the members once described will be omitted as appropriate.

[0019] FIG. 1 is a functional configuration diagram of the electromagnetic wave inspection apparatus 100 of the present invention.

[0020] The electromagnetic wave inspection apparatus 100 includes a conveyance unit 110, an electromagnetic wave radiation unit 120, a detection unit 130, an image data generation unit 140, a storage unit 150, an image processing unit 160, a display control unit 170, a display unit 180, and an input unit 190.

[0021] The conveyance unit 110 is a conveyor of any system that moves the placed inspection object W in a plane in a certain direction. In a three-dimensional coordinate system composed of an X-axis, a Y-axis, and a Z-axis that are orthogonal to each other, when the plane in which the inspection object W moves is an XY plane, the conveyance unit 110 has a width in the X-axis direction (the direction penetrating the paper surface) and conveys the inspection object W in the Y-axis direction (the horizontal direction in the paper surface).

[0022] The electromagnetic wave radiation unit 120 radiates a predetermined electromagnetic wave toward the inspection object W conveyed by the conveyance unit 110. The radiated electromagnetic wave is typically X-rays or visible light, but may be other electromagnetic waves such as ultraviolet rays or infrared rays.

[0023] The detection unit 130 is positioned to detect electromagnetic waves emitted from the electromagnetic wave emission unit 120 and that have passed through the object under inspection W. It detects electromagnetic waves that have passed through the object under inspection W or have reached it directly, and outputs detection data at predetermined intervals. Figure 1 shows an example in which the detection unit 130 is positioned opposite the electromagnetic wave emission unit 120 in order to detect electromagnetic waves that have passed through the object under inspection W. The detection unit 130 may be installed inside the transport unit 110 as shown in Figure 1 and configured to detect electromagnetic waves that have passed through the conveyor of the transport unit 110, or it may be configured to directly detect electromagnetic waves that have passed through the object under inspection W by providing a small gap between two transport units 110 arranged in the Y-axis direction. When detecting electromagnetic waves that have passed through the conveyor of the transport unit 110, it is advisable to use a conveyor belt or the like made of a material that has high transparency to electromagnetic waves emitted from the electromagnetic wave emission unit 120.

[0024] The detection unit 130 is a line sensor equipped with multiple detection elements arranged in a line in a direction perpendicular to the transport direction (Y-axis direction) (X-axis direction), and each detection element detects the electromagnetic waves it has reached and outputs a detected value.

[0025] The detection unit 130 repeatedly detects electromagnetic waves at a detection cycle corresponding to the transport speed. For example, the detection cycle may be the time required for the object to pass through the width of the detection element at the transport speed of the transport unit 110. By setting the detection cycle in this way, the object to be inspected W passing over the detection unit 130 can be inspected without creating gaps in the transport direction.

[0026] The image data generation unit 140 sequentially arranges the detection values ​​corresponding to the number of detection elements periodically detected by the detection unit 130, and constructs a group of detection values ​​arranged in two dimensions by the number of detection elements of the detection unit 130 × the number of detection cycles, which is then stored in the storage unit 150, which is an arbitrary storage medium.

[0027] The electromagnetic wave emission unit 120 and the detection unit 130 are fixed in position relative to the transport unit 110. Therefore, while the object W under inspection crosses over the detection unit 130, each detection element repeatedly detects electromagnetic waves at a detection cycle corresponding to the transport speed of the object W under inspection, thereby forming a group of detected values ​​arranged in a two-dimensional array of the number of detection elements × the number of detection cycles.

[0028] The detected value set is, in other words, two-dimensional image data that serves as the source data for generating a two-dimensional image in which the position of each detected value in a two-dimensional array is used as the pixel position, and the magnitude of the detected value at each pixel is represented by brightness, etc. This is the data to be inspected. An example of a two-dimensional image obtained by imaging such data to be inspected is shown in Figure 2.

[0029] The image processing unit 160 reads the data to be inspected from the storage unit 150 and outputs image-processed data, which is two-dimensional image data obtained by applying image processing to the data to be inspected using predetermined parameters that contribute to the visual emphasis of the presence of foreign objects. The detected value corresponding to each pixel in the data to be inspected is converted to a value according to the content of the image processing by the image processing, and becomes the value of each pixel in the image-processed data.

[0030] For example, the data generated by taking the difference between the data obtained by applying image processing using predetermined parameters to the data to be inspected and the data to be inspected may be used as the post-image-processed data. That is, if the image shown in Figure 2(a) is a two-dimensional image of the data to be inspected, and the image shown in Figure 2(b) is a two-dimensional image of the data obtained by applying image processing to the data to be inspected, then by taking the difference between the two images, a two-dimensional image based on the post-image-processed data shown in Figure 2(c) can be generated. In a two-dimensional image generated through such image processing, the presence of foreign objects is visually emphasized, as shown within the dotted line in Figure 2(c), making it easier to detect foreign objects.

[0031] The display control unit 170 generates a three-dimensional image in which the values ​​of each pixel in the image-processed data, which is two-dimensional image data output by the image processing unit 160, are represented three-dimensionally as third-dimensional information, and displays it on the display unit 180, which is an arbitrary display means. That is, for each pixel of the image-processed data distributed two-dimensionally in the XY plane of a three-dimensional Cartesian coordinate system consisting of the X, Y, and Z axes, the display unit 180 displays a three-dimensional image in which the magnitude of the pixel value is represented by the height in the Z-axis direction.

[0032] For example, Figure 2(d) shows a three-dimensional image based on the image-processed data from Figure 2(c). The dotted lines in Figure 2(c) and Figure 2(d) correspond to each other. In Figure 2(c), the four brighter areas compared to the surrounding area indicate foreign objects, and the difference in values ​​is represented by the brightness of the areas. However, as shown in Figure 2(d), by creating a three-dimensional image and representing the difference in values ​​by the height in the Z-axis direction of the areas, the difference in values ​​in the four areas can be observed more clearly.

[0033] Furthermore, when the post-processed image data is generated by taking the difference between the two-dimensional image data of the data under inspection and the two-dimensional image data obtained by applying image processing using predetermined parameters to the data under inspection, as shown in Figure 3(a), for pixels whose values ​​are emphasized by image processing, the magnitude of the value is reflected in the height along the Z axis in the three-dimensional image, making the pixel position clear. However, for pixels whose values ​​are not emphasized by image processing, the difference between the two-dimensional image data before and after image processing is small, so the value is not reflected in the height along the Z axis in the three-dimensional image, making the pixel position unclear. Therefore, in the three-dimensional image, areas other than those where the presence of a foreign object is suspected become flat, as shown in Figure 3(a), and the region where the object under inspection W exists may become unclear.

[0034] Therefore, the display control unit 170 may superimpose a three-dimensional image based on the data under inspection onto a two-dimensional image obtained by imaging the data under inspection read from the storage unit 150. The two-dimensional image represents the magnitude of the detected value in each pixel of the two-dimensional arrangement of the data under inspection using brightness, etc. For example, the three-dimensional image shown in Figure 3(a) based on the data under inspection may be superimposed onto the two-dimensional image shown in Figure 3(b) obtained by imaging the data under inspection, and displayed as shown in Figure 3(c).

[0035] In a two-dimensional image of the data being inspected, the extent of the object W being inspected is clearly represented. By superimposing a three-dimensional image onto this, it becomes easier to recognize where on each object W a foreign object is located.

[0036] The image processing unit 160 receives an instruction to change parameters from an input unit 190, which is any input means such as a keyboard, pointing device, or touch panel display. It then performs image processing on the data to be inspected, read from the storage unit 150, using the modified parameters according to the instruction, and outputs the processed image data. At this time, the values ​​corresponding to each pixel in the data to be inspected are converted to values ​​corresponding to the processing performed by the image processing after the parameter change, and these become the values ​​corresponding to each pixel in the processed image data.

[0037] The display control unit 170 updates the three-dimensional image displayed on the display unit 180 by processing the image data obtained using the modified parameters, and each time the image processing data is output from the image processing unit 160, the value of each pixel in the output image processing data using the modified parameters is updated to represent the third dimension as three-dimensional information in a three-dimensional image.

[0038] When Figure 4(a) is the three-dimensional image before the parameter change, the three-dimensional image is updated as shown in Figure 4(b) after the parameter change. In this example, the dotted lines in Figures 4(a) and 4(b) correspond to the regions F1 to F4 that indicate the four foreign objects. Before the parameter change, regions F1 and F2 are high and regions F3 and F4 are low, while after the parameter change, region F1 is low and regions F3 and F4 are high. Thus, this function allows for real-time visualization of the image change caused by the input of a parameter change instruction, eliminating the need to transport the object W under inspection and collect and check two-dimensional image data each time a parameter is changed.

[0039] As described above, the electromagnetic wave inspection device 100 generates a three-dimensional image in which the values ​​of each pixel of the image-processed data, which is two-dimensional image data, are represented in three dimensions. Furthermore, the three-dimensional image is updated in accordance with changes in the parameters. Therefore, even operators who are not skilled can easily observe the changes in the image before and after changing the parameters, thereby improving the efficiency of parameter adjustment.

[0040] Furthermore, if the input unit 190 is positioned so that the operator can operate it while visually viewing the display unit 180, the operator can input instructions for parameter changes while observing the changes in the three-dimensional image, thereby improving the efficiency of parameter adjustment.

[0041] Operation of the input unit 190 while viewing the display unit 180 may be achieved, for example, by integrating the input unit 190 with the display unit 180 as a touch panel display and displaying an input interface for changing parameters together with a three-dimensional image. Specifically, for example, the electromagnetic wave inspection device 100 is configured as shown in the external view of Figure 5. The electromagnetic wave inspection device 100 illustrated in Figure 5 includes at least an electromagnetic wave radiation unit 120 inside the upper housing 101, and at least a transport unit 110 and a detection unit 130 inside the lower housing 102. Furthermore, the surface of the upper housing 101 is provided with a display unit 180, which is a touch panel display with the functions of the input unit 190. An example of the display on the display unit 180 is shown in Figure 6. The display unit 180 displays a three-dimensional image 180a and a touch input interface 190a for changing parameters to preset set values. The touch input interface 190a has multiple touch buttons, each corresponding to a different parameter setting value. By touching each button, the current parameter setting value in the image processing unit 160 is changed to the setting value corresponding to the touched button.

[0042] Furthermore, operation of the input unit 190 while viewing the display unit 180 may be achieved, for example, by configuring the input unit 190 as a separate control box with buttons for changing parameters, etc., connected to the main body of the electromagnetic wave inspection device 100 by wired or wireless connection, and positioning it in a location where it can be operated while viewing the display unit 180. Specifically, for example, the electromagnetic wave inspection device 100 is configured as shown in the external view of Figure 7. The electromagnetic wave inspection device 100 shown in Figure 7 is functionally the same as the electromagnetic wave inspection device 100 shown in Figure 5, except for the display unit 180 and the input unit 190. As shown in Figure 8, the display unit 180 displays a three-dimensional image 180a, but does not display the touch input interface 190a. The input unit 190 is equipped with an input interface 190c that has multiple touch buttons corresponding to different parameter setting values. The touch buttons of the input interface 190c may be configured as physical buttons, or a portable terminal equipped with a touch panel display may be used as the control box, and the buttons may be configured as buttons displayed on the touch panel display. Furthermore, in the configuration shown in Figure 5, a control box may be added, allowing for instruction input from both the main unit and the control box.

[0043] The display control unit 170 may receive an instruction input for changing the observation angle from the input unit 190 and change the observation angle of the three-dimensional image displayed on the display unit 180 according to the instruction. The method of inputting the instruction to change the observation angle in the input unit 190 is arbitrary. If the input unit 190 is configured integrally with the display unit 180 as a touch panel display, for example, the instruction input may be made by drawing an arc or the like with a finger on the three-dimensional image 180a displayed on the display unit 180, as shown in Figure 9.

[0044] By allowing the observation angle to be changed, three-dimensional images can be observed from various angles. For example, if peaks overlap when viewed from one direction, changing the observation angle makes it possible to identify and observe each peak, thus improving the efficiency of parameter adjustment.

[0045] The display control unit 170 may receive an instruction input for switching images from the input unit 190 and perform control to switch the three-dimensional image displayed on the display unit 180 to a two-dimensional image obtained by imaging the data under inspection that is the source of the three-dimensional image. The method of inputting the instruction for switching images in the input unit 190 is arbitrary. When the input unit 190 is configured integrally with the display unit 180 as a touch panel display, for example, as shown in Figure 10, the display unit 180 may display a three-dimensional image 180a, a touch input interface 190a for parameter changes, and a touch input interface 190b for switching images, and the instruction input may be performed by touching this interface. In this case, when the touch input interface 190b is touched while the three-dimensional image 180a is displayed, the display may switch to the two-dimensional image 180b as shown in Figure 11, and when the touch input interface 190b is touched again, the display may switch back to the three-dimensional image 180a. Furthermore, as shown in Figure 12, the display control unit 170 may display a three-dimensional image on the display unit 180, as well as a two-dimensional image of the inspected data that is the source of the three-dimensional image.

[0046] This allows inspections to be performed while referring to both three-dimensional and two-dimensional images, thereby improving the efficiency of parameter adjustments.

[0047] The functions of each part of the electromagnetic wave inspection device 100 of the present invention may be described in a program and executed by a computer, thereby allowing the computer to function as the electromagnetic wave inspection device 100.

[0048] The present invention is not limited to the embodiments described above. The embodiments described above are illustrative, and any configuration that is substantially identical to the technical idea described in the claims of the present invention and produces similar effects is included within the technical scope of the present invention. In other words, modifications can be made as appropriate within the scope of the technical idea expressed in the present invention, and such modified or improved forms are also included within the technical scope of the present invention. [Explanation of Symbols]

[0049] 100... Electromagnetic wave inspection device 110... Conveyor Unit 120... Electromagnetic wave emission section 130...Detection unit 140...Image data generation unit 150...Storage section 160...Image Processing Unit 170...Display Control Unit 180...Display section 180a... Three-dimensional image 180b...2D image 190...Input section 190a, 190b… Touch input interface 190c…Input Interface F1~F4…area W...Item under inspection

Claims

1. An electromagnetic wave inspection device that performs inspection of an object to be inspected based on inspection data, which is two-dimensional image data obtained by irradiating the object to be inspected with electromagnetic waves and detecting the electromagnetic waves that have passed through the object to be inspected, An image processing unit that outputs image-processed data, which is two-dimensional image data obtained by applying image processing using predetermined parameters to the data to be inspected, Display unit and A display control unit generates a three-dimensional image in which the values ​​of each pixel of the image-processed data are represented three-dimensionally as third-dimensional information, and displays it on the display unit. Equipped with, The image processing unit receives an instruction input for changing parameters, performs image processing on the data under inspection using the modified parameters according to the instruction, and outputs the image-processed data obtained. The display control unit superimposes the three-dimensional image onto the two-dimensional image obtained by imaging the data to be inspected and displays it on the display unit. The displayed three-dimensional image is updated to a three-dimensional image in which the values ​​of each pixel in the image-processed data output by the image processing unit, based on the modified parameters, are represented three-dimensionally as third-dimensional information. An electromagnetic wave inspection device characterized by the following features.

2. The electromagnetic wave inspection apparatus according to claim 1, wherein the display control unit receives an instruction input for changing the observation angle and changes the observation angle of the three-dimensional image displayed on the display unit according to the instruction.

3. The electromagnetic wave inspection apparatus according to claim 1 or 2, wherein the display control unit receives an instruction input for switching images, and switches the three-dimensional image displayed on the display unit to a two-dimensional image obtained by imaging the data to be inspected, which is the source of the three-dimensional image.

4. The electromagnetic wave inspection apparatus according to claim 1 or 2, wherein the display control unit causes the display unit to display the three-dimensional image and also displays a two-dimensional image obtained by imaging the data to be inspected, which is the source of the three-dimensional image.

5. The electromagnetic wave inspection device according to any one of claims 1 to 4, wherein the input unit for receiving the instruction input is provided in a position where the operator can operate it while visually viewing the display unit.

6. A program for causing a computer to function as an electromagnetic wave inspection device according to any one of claims 1 to 5.

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