Transistor with ohmic contacts

Abstract

The transistor includes a semiconductor layer and a channel region. The transistor further includes a first doped contact region in the semiconductor layer adjacent the channel region. The transistor further includes a first ohmic contact including an interface region having a first interface length between the first ohmic contact and the first doped contact region, the first interface length being greater than a length of the interface region. The interface has at least one recess to increase the perimeter of the interface, thereby improving the overall contact resistance of the transistor.

Description

Technical Field

[0001] This application claims the priority of U.S. Patent Application No. 17 / 508,846, filed on October 22, 2021, and the entire disclosure of this U.S. Patent Application is incorporated herein by reference.

[0002] This disclosure relates to transistor structures, particularly high electron mobility transistors.

Background Art

[0003] Narrow bandgap semiconductor materials such as silicon (Si) and gallium arsenide (GaAs) are widely used in semiconductor devices for low-power applications and, in the case of Si, for low-frequency applications. However, these semiconductor materials have a relatively small bandgap (1.12 eV for Si and 1.42 eV for GaAs at room temperature) and a relatively small breakdown voltage, so they may not be very suitable for high-power and / or high-frequency applications.

[0004] Due to the interest in high-power, high-temperature, and / or high-frequency applications and devices, wide bandgap semiconductor materials such as silicon carbide (3.2 eV for 4H-SiC at room temperature) and group III nitrides (e.g., 3.36 eV for GaN at room temperature) have attracted attention. These materials can have a higher breakdown field strength and a higher electron saturation velocity than GaAs and Si.

[0005] A particularly interesting device for high-power and / or high-frequency applications is the high-electron-mobility transistor (HEMT), also known as the modulation-doped field-effect transistor (MODFET). In HEMT devices, a two-dimensional electron gas (2DEG) can be formed in the heterojunction of two semiconductor materials with different bandgap energies, where the material with the smaller bandgap has a higher electron affinity than the material with the larger bandgap. The 2DEG is an accumulation layer of the undoped small bandgap material with a relatively high sheet electron concentration, e.g., 10⁻¹⁰ 13 Career / cm 2 It can contain sheet electron concentrations exceeding 2DEG. Furthermore, electrons originating from the wider bandgap semiconductor can transition to 2DEG, and relatively high electron mobility is possible due to reduced scattering of ionized impurities. This combination of relatively high carrier concentration and carrier mobility can give HEMTs relatively large transconductance, resulting in a performance advantage over metal-semiconductor field-effect transistors (MESFETS) for high-frequency applications.

[0006] HEMTs fabricated from gallium nitride / aluminum gallium nitride (GaN / AlGaN) material systems can generate large amounts of RF power due to a combination of material properties such as a relatively high dielectric breakdown field, a relatively wide band gap, a relatively large conduction band offset, and / or a relatively high saturation electron drift rate. The majority of electrons in 2DEG may be due to polarization in the AlGaN.

[0007] Figure 1 shows the structure of a conventional gallium nitride-based HEMT. This structure includes a substrate 10, which may be a semi-insulating 4H silicon carbide (SiC) substrate. Optional buffer layers, nucleation layers, and / or transition layers (not shown) may be provided on the substrate 10. A channel layer 20 is provided on the substrate 10. The channel layer 20 may be a group III nitride such as GaN. A barrier layer 22 is provided on the channel layer 20. The barrier layer 22 may have a larger band gap than the channel layer 20, and the channel layer 20 may have a larger electron affinity than the barrier layer 22. The barrier layer 22 may be AlN, AlInN, AlGaN, or AlInGaN, and is sufficiently thick, has a sufficiently high Al composition and doping to induce a significant carrier concentration at the interface between the channel layer 20 and the barrier layer 22. This induced carrier concentration forms a 2DEG, which provides a conductive channel within the device. The conductivity of the 2DEG channel can be modulated by applying a voltage to a gate contact 32 formed on the barrier layer 22.

[0008] Figure 1 also shows a cap layer 24 on the barrier layer 22, with a gate contact 32 provided in a recess 36 that penetrates the cap layer 24. The cap layer 24 may physically separate the top (outer) surface of the device from the channel, thereby reducing the surface effects of the device. The cap layer 24 may be a blanket formed on the barrier layer 22, or it may be formed by epitaxial growth and / or deposition. Typically, the cap layer 24 may have a thickness of about 2 nm to about 500 nm.

[0009] As further shown in Figure 1, the ohmic source / drain contact 30 is provided on the barrier layer 22, and the gate recess is provided through the cap layer 24, exposing a portion of the barrier layer 22. The gate contact 32 is formed within the recess and contacts the exposed portion of the barrier layer 22. The gate contact 32 may be a "T" gate as shown in Figure 1. [Overview of the project] [Problems that the invention aims to solve]

[0010] In conventional HEMT structures, ohmic contact resistance can be undesirable, potentially contributing to an increase in the transistor's on-resistance. [Means for solving the problem]

[0011] A transistor according to some embodiments includes a semiconductor layer, a channel region, and a first doped contact region located within the semiconductor layer and adjacent to the channel region. The transistor further includes a first ohmic contact having an interface region having a first interface length between the first ohmic contact and the first doped contact region, the first interface length being longer than the length of the interface region.

[0012] The semiconductor layer may also be a group III nitride layer.

[0013] In some embodiments, the first resistance of the first ohmic contact is smaller than the second resistance of the channel region.

[0014] The first ohmic contact may be either an ohmic source contact or an ohmic drain contact.

[0015] In some embodiments, the length of the first interface has at least one recess. The at least one recess may be multiple recesses. The multiple recesses may be teeth having a space between adjacent teeth.

[0016] The multiple recesses may also have a sawtooth shape with spaces between adjacent sawtooth shapes.

[0017] The channel region may have a width of 5 μm or less.

[0018] In some embodiments, the first doped contact region includes a first portion covered by the first ohmic contact and a second portion adjacent to the channel region not covered by the first ohmic contact.

[0019] In some embodiments, the transistor further includes a second doped contact region located within a semiconductor layer and adjacent to the channel region. The transistor further includes a second ohmic contact comprising an interface region having a second interface length between the second ohmic contact and the second doped contact region, the second interface length being longer than the length of the interface region.

[0020] In some embodiments, the second doped contact region includes a first portion covered by the second ohmic contact and a second portion adjacent to the channel region not covered by the second ohmic contact.

[0021] In some embodiments, the length of the second interface has at least one recess. The at least one recess may be multiple recesses. The multiple recesses may be teeth having a space between adjacent teeth.

[0022] The multiple recesses may also have a sawtooth shape with spaces between adjacent sawtooth shapes.

[0023] The depth of at least one recess may be between 1 μm and 5 μm.

[0024] The width of at least one recess may be between 1.4 μm and 3 μm.

[0025] The first ohmic contact may be an ohmic source contact or an ohmic drain contact. The second ohmic contact may be (i) an ohmic drain contact if the first ohmic contact is an ohmic source contact, or (ii) an ohmic source contact if the first ohmic contact is an ohmic drain contact.

[0026] In some embodiments, the length of the second interface has at least one recess offset from at least one recess of the length of the second interface.

[0027] In some embodiments, the depth of at least one recess may be between 1 μm and 5 μm.

[0028] In some embodiments, the width of at least one recess may be between 1.4 μm and 3 μm.

[0029] A high electron mobility transistor (HEMT) having an ohmic source contact and an ohmic drain contact according to some embodiments includes a semiconductor layer, a channel region, a first doped contact region within the semiconductor layer and adjacent to the channel region, and a second doped contact region within the semiconductor layer and adjacent to the channel region. The HEMT further includes a first ohmic contact including an interface region having a length of a first interface between the first ohmic contact and the first doped contact region, the length of the first interface being longer than the length of the interface region. The HEMT further includes a second ohmic contact including an interface region having a length of a second interface between the second ohmic contact and the second doped contact region, the length of the second interface being longer than the length of the interface region.

[0030] The first resistance of at least one of the first ohmic contact and the second ohmic contact may be smaller than the second resistance of the channel region.

[0031] The first ohmic contact may be an ohmic source contact or an ohmic drain contact. The second ohmic contact may be (i) an ohmic drain contact if the first ohmic contact is an ohmic source contact, or (ii) an ohmic source contact if the first ohmic contact is an ohmic drain contact.

[0032] In some embodiments, the length of the first interface has at least one recess, and the length of the second interface has at least one recess.

[0033] At least one recess of the length of the first interface may be offset from at least one recess of the length of the second interface.

[0034] The depth of at least one recess in at least one of the lengths of the first interface and the second interface may be between 1 μm and 5 μm, and the width of at least one recess in at least one of the lengths of the first interface and the second interface may be between 1.4 μm and 3 μm. [Brief explanation of the drawing]

[0035] [Figure 1] This is a cross-sectional view of a conventional transistor element. [Figure 2A] This is a schematic cross-sectional view of a HEMT element according to several embodiments. [Figure 2B] Figure 2A is a schematic plan view of the ohmic contact and channel regions of the GaN HEMT structure 200. [Figure 3A] These are schematic cross-sectional views of transistors according to various embodiments. [Figure 3B] These are schematic cross-sectional views of transistors according to various embodiments. [Figure 4A] These are schematic cross-sectional views of transistors according to various embodiments. [Figure 4B] These are schematic cross-sectional views of transistors according to various embodiments. [Figure 5] The results of test setups including gallium nitride (GaN) HEMTs with ohmic contacts without recesses and GaN HEMTs with ohmic contacts with recesses, based on various embodiments, are shown. [Figure 6A] This is a schematic block diagram of a multi-stage amplifier circuit that can use an RF transistor amplifier incorporating transistor elements according to the embodiment. [Figure 6B] This is a schematic block diagram of a multi-stage amplifier circuit that can use an RF transistor amplifier incorporating transistor elements according to the embodiment. [Figure 6C] This is a schematic block diagram of a multi-stage amplifier circuit that can use an RF transistor amplifier incorporating transistor elements according to the embodiment. [Figure 7] This is a schematic diagram of an MMIC amplifier including a HEMT transistor, based on several examples. [Figure 8A] This is a schematic cross-sectional view showing some examples of packages for RF transistor amplifier dies according to several embodiments. [Figure 8B] This is a schematic cross-sectional view showing some examples of packages for RF transistor amplifier dies according to several embodiments. [Figure 8C] This is a schematic cross-sectional view showing some examples of packages for RF transistor amplifier dies according to several embodiments. [Modes for carrying out the invention]

[0036] Embodiments of the concept of the present invention will now be described in reference to the accompanying drawings. Some embodiments described herein provide a transistor comprising a first ohmic contact comprising an interface region having a first interface length between the first ohmic contact and the first doped contact region, the first interface length being longer than the length of the interface region. In some embodiments, the transistor further comprises a second ohmic contact comprising a second interface region having a second interface length between the second ohmic contact and the second doped contact region, the second interface length being longer than the length of the interface region. In further embodiments, the second interface has at least one recess offset from at least one recess of the length of the second interface.

[0037] In this specification, various elements may be described using ordinal numbers, such as 1st, 2nd, 3rd, etc., but it should be understood that these elements should not be limited by these terms. These terms are used solely to distinguish one element from another. For example, the 1st element may also be called the 2nd element, and similarly, the 2nd element may also be called the 1st element without departing from the scope of this disclosure.

[0038] Furthermore, relative terms such as “lower” or “bottom,” and “upper” or “top” may be used herein to describe the relationship between one element and another, as shown in the drawings. It should be understood that relative terms are intended to encompass different orientations of elements, in addition to the orientation depicted in the drawings. For example, if an element is turned upside down in one of the drawings, a feature described as being on the “lower” side of the element will be oriented towards the “upper” side of that element. Thus, the exemplary term “lower” can describe both downward and upward orientations, depending on the specific orientation of the element. Similarly, if an element is turned upside down in one of the drawings, an element described as “below” or “beneath” other elements will be oriented above those other elements. Thus, the exemplary terms “downward” or “beneath” can describe both upward and downward orientations.

[0039] The terms used in the description of the disclosure herein are intended solely to describe specific embodiments and are not intended to limit the disclosure. Where used in the description of the disclosure and the accompanying claims, the singular forms "an" and "the" are intended to include the plural form unless the context explicitly indicates otherwise. It should also be understood that the terms "and / or" as used herein refer to and encompass any and all possible combinations of one or more of the related enumerated items. Where used herein, the terms "comprise" and "comprising" indicate the presence of the steps, operations, features, elements, and / or components described herein, but do not preclude the presence or addition of one or more other steps, operations, features, elements, components, and / or groups thereof.

[0040] The embodiments of this disclosure are described herein with reference to plan views which are schematic representations of idealized embodiments of this disclosure. Therefore, variations from the shapes shown in the drawings are to be expected, for example, as a result of manufacturing techniques and / or tolerances. Accordingly, the embodiments of this disclosure should not be construed as being limited to specific shapes of the areas shown herein, but should include, for example, deviations in shape resulting from manufacturing. The areas shown in the drawings are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the areas of the elements, nor are they intended to limit the scope of the disclosure unless otherwise specified. Furthermore, for schematic reasons, lines that appear straight, horizontal, or vertical in the following drawings are often inclined, curved, non-horizontal, or non-vertical. Furthermore, it means that the thickness of the elements is schematic in nature.

[0041] Unless otherwise defined, all terms used in disclosing the embodiments of this disclosure, including technical and scientific terms, have the same meaning as commonly understood by those skilled in the art and are not necessarily limited to specific definitions known at the time of this disclosure. These terms may include equivalent terms created after such a time. Furthermore, terms such as those defined in commonly used dictionaries should be understood to have meanings consistent with those in the context of this specification and the art.

[0042] The ohmic contact resistance of transistors such as GaN HEMTs can contribute to the transistor's on-resistance (also referred to herein as "total contact resistance"). To reduce such on-resistance, it is desirable to reduce the ohmic contact resistance of the transistor. While we do not wish to be bound by any particular theory, it is currently believed that the total contact resistance of a transistor may be adversely affected if both of its ohmic contacts have straight ends adjacent to the channel region. Several embodiments provide ohmic contacts (or multiple ohmic contacts) having ends that include recesses adjacent to the channel region. By including recesses in the ends, the circumference of the ends becomes larger compared to ends without recesses, which may result in an improvement in total contact resistance.

[0043] Several embodiments of a GaN HEMT structure 200 are shown in Figure 2A. As shown therein, the structure includes a substrate 210 on which a channel layer 220 is formed. A barrier layer 222 is formed on the channel layer. In some embodiments, the barrier layer 222 and / or the channel layer 220 may be a group III nitride such as GaN. Doped contact regions 223, 225 may be formed within the barrier layer 222 and extend into the channel layer 220.

[0044] In some embodiments, the doped contact regions 223, 225 may be located within the barrier layer 222 or channel layer 220 beneath one or more of the ohmic contacts 224, 226. The bottom surfaces of the ohmic portions of the ohmic contact 224 and / or the ohmic portions of the ohmic contact 226 may be in contact with each of the doped contact regions 223, 225. The doped contact regions 223, 225 may be formed by, for example, injecting an n-type dopant, such as silicon, into the surface of the barrier layer 222. When forming the doped contact regions 223, 225 in the channel layer 220, for example, an n-type dopant, such as silicon, may be injected into the surface of the channel layer 220. In some embodiments, the doped contact regions 223, 225 may be doped to have a higher doping concentration than the barrier layer 222 or channel layer 220. For example, when the barrier layer 222 is an n-type layer, the doped contact regions 223 and 225 may be doped to have a higher concentration of n-type dopant (e.g., N+ or N++) than the barrier layer 222.

[0045] In some embodiments, dopant injection for forming doped contact regions 223, 225 may be performed after the formation of the barrier layer 222 or channel layer 220 and before the formation of ohmic contacts 224 and / or ohmic contacts 226. While some embodiments describe doped contact regions 223, 225 including injected dopants, embodiments of the present disclosure are not limited thereto and include doping the doped contact regions 223, 225 via other techniques. Other techniques include, but are not limited to, regrowth or surface treatment. For example, doped contact regions 223, 225 may be formed by regrowth within the barrier layer 222 or channel layer 220 using n-type dopants and metal-organic chemical vapor deposition (MOCVD), molecular beam epitaxy (MBE), plasma-enhanced chemical vapor deposition (PECVD), sputtering and / or hydrides. For example, if the barrier layer 222 is an n-type layer, the doped contact regions 223 and 225 may be doped to have a higher concentration of n-type dopant (e.g., N+ or N++) than the barrier layer 222.

[0046] Ohmic contacts 224 and 226 may contain metals capable of forming ohmic contacts with gallium nitride-based semiconductor materials. Suitable metals may include heat-resistant metals such as Ti, W, titanium tungsten (TiW), silicon (Si), titanium tungsten nitride (TiWN), tungsten silide (WSi), rhenium (Re), niobium (Nb), Ni, gold (Au), aluminum (Al), tantalum (Ta), molybdenum (Mo), NiSi4, titanium silide (TiSi), titanium nitride (TiN), WSiN, and Pt.

[0047] Figure 2B is a schematic plan view of the ohmic contact and channel region of the GaN HEMT structure 200 shown in Figure 2A. As shown in Figure 2B, the ohmic contact 224 lies on a doped contact region 223 adjacent to the channel region 201. The doped contact region 223 may include two parts: a first part of 223 covered by the ohmic contact 224 and a second part 223a not covered by the ohmic contact 224. The ohmic contact 224 includes an interface region between the ohmic contact 224 and the doped contact region 223 (e.g., the second part 223a not covered by the ohmic contact 224) and / or the channel region 201, having a length indicated by the line IR1-IR1'. As shown in Figure 2B, the interface length 224a of the ohmic contact 224 is approximately the same as the length of the interface region IR1-IR1'.

[0048] The ohmic contact 226 lies on a doped contact region 225 adjacent to the channel region 201. The doped contact region 225 may include two parts: a first portion of 225 covered by the ohmic contact 226 and a second portion 225a not covered by the ohmic contact 226. The ohmic contact 226 includes an interface region between the ohmic contact 226 and the doped contact region 225 (e.g., the second portion 225a not covered by the ohmic contact 226) and / or the channel region 201, having a length indicated by the line IR2-IR2'. As shown in Figure 2B, the interface length 226a of the ohmic contact 226 is approximately the same as the length of the interface region IR2-IR2'.

[0049] While we do not wish to be bound by any particular theory, in transistors, the total contact resistance of a transistor is considered to be adversely affected by current concentration due to the presence of interface regions (e.g., interface regions IR1-IR1' and IR2-IR2') having an interface length approximately equal to the length of the interface region (e.g., 224a, 226a). Furthermore, as the overall size of the transistor decreases, including the reduction in the size of the channel region, the total contact resistance may prevent the transistor from achieving adequate performance, for example, at higher frequencies. Some embodiments provide an ohmic contact (or multiple ohmic contacts) that includes an interface region having an interface length between the ohmic contact and a doped contact region that is longer than the length of the interface region. In some embodiments, the interface length has at least one recess. Having at least one recess allows the interface length to be increased. By making the interface length longer than the length of the interface region, current concentration may be reduced and the total contact resistance of the transistor may be improved.

[0050] In some embodiments, the total contact resistance of the transistor can be scaled as the dimensions of the channel region decrease, based on the length of the interface between the ohmic contact and the doped contact region, and on the inclusion of ohmic contacts having an interface length longer than the length of the interface region.

[0051] In some embodiments, the transistor includes a semiconductor layer (e.g., a barrier layer 222 or a channel layer 220). The transistor further includes a channel region (e.g., a channel region 201) and a first doped contact region (e.g., a doped contact region 223) located within the semiconductor layer and adjacent to the channel region. The first doped contact region may include a first portion covered by a first ohmic contact (e.g., an ohmic contact 224) and a second portion (e.g., a second portion 223a) not covered by the first ohmic contact. The first ohmic contact (e.g., an ohmic contact 224) includes an interface region having an interface length that is the length of the interface between the ohmic contact and the doped contact region, and is longer than the length of the interface region (e.g., the end described herein with reference to Figures 3A, 3B, 4A, and 4B).

[0052] In some embodiments, the semiconductor layer includes a group III nitride layer.

[0053] In some embodiments, the transistor is located within a semiconductor layer and further includes a second doped contact region (e.g., doped contact region 225) adjacent to a channel region (e.g., channel region 201). The second doped contact region may include a first portion covered by a second ohmic contact (e.g., ohmic contact 226) and a second portion (e.g., second portion 225a) not covered by the second ohmic contact. The second ohmic contact (e.g., ohmic contact 226) includes an interface region having a second interface length that is the length of the interface between the second ohmic contact and the second doped contact region, and is longer than the length of the interface region (e.g., the end described herein with reference to Figures 3A, 3B, 4A, and 4B).

[0054] In some embodiments, the ohmic contact 224 includes an ohmic source contact or an ohmic drain contact, and the ohmic contact 226 includes (i) an ohmic drain contact when contact 224 is an ohmic source contact, or (ii) an ohmic source contact when contact 224 is an ohmic drain contact.

[0055] In some embodiments, the length of the first interface has at least one recess, and / or the length of the second interface has at least one recess.

[0056] The ohmic contacts (or multiple ohmic contacts) of transistors in various embodiments can take on many different shapes and sizes. Figures 3A, 3B, 4A, and 4B show variations according to some embodiments of the present disclosure. Except for the length of the interface of the ohmic contacts 224, 226 and the shape / length of the second portions 223a, 225a of the doped contact regions 223, 225, some parts of the transistor structure in Figures 3A, 3B, 4A, and 4B are substantially the same as or similar to those shown in Figures 2A and 2B, and for brevity, their redundant descriptions are omitted. The transistor elements in Figures 3A, 3B, 4A, and 4B can share substantially similar cross-sectional views with the GaN HEMT structure 200 in Figure 2A, and therefore their redundant illustrations are omitted.

[0057] Figures 3A, 3B, 4A, and 4B are intended to represent structures for identification and explanation, and not to represent them on a physical scale. Furthermore, while Figures 3A, 3B, 4A, and 4B are shown to allow for an overall comparison with the structure in Figure 2B, it should be understood that the scale of Figure 2B is not intended to be identical to the scales of Figures 3A, 3B, 4A, and 4B.

[0058] The transistors of the embodiments shown in Figures 3A, 3B, 4A, and 4B can have a size of approximately 5 μm to 500 μm in the direction of line B-B' in Figure 3A, and as the size of the transistor structure (e.g., GaN HEMT structure 200) decreases, the distance of the channel region 201 in the direction of line A-A' between the length 224a of the first interface and the length 226a of the second interface also decreases. In some embodiments, the channel region has a width of approximately 5 μm or less.

[0059] Figure 3A shows an exemplary embodiment of the transistor of this disclosure.

[0060] As shown in Figure 3A, the ohmic contact 224 has a first interface length 224a adjacent to the second portion 223a of the doped contact region 223 and adjacent to the channel region 201. The length of the first interface is approximately the same as the length of the interface region IR1-IR1'. The ohmic contact 226 has a second interface length 226a adjacent to the second portion 225a of the doped contact region 225 and adjacent to the channel region 201. As shown in the exemplary embodiment in Figure 3A, the interface length 226a is longer than the length of the interface region IR2-IR2' due to the presence of a recess on the length 226a of the second interface. As shown in Figure 3A, in some embodiments, the recess in the length 226a of the second interface has a segmented tooth shape with space between adjacent teeth. The segmented tooth shape of the recess has a depth D1 and a width D2. In some embodiments, the depth D1 may range from about 1 μm to 5 μm. However, as the depth D1 increases, the total contact resistance increases, which may prevent the transistor from achieving adequate performance at higher frequencies. In some embodiments, the width D2 can range from approximately 1.4 μm to 3 μm. While we do not wish to be bound by any particular theory, it is conceivable that as the sheet resistance of the doped contact region 225 beneath the ohmic contact 226 decreases, the width D2 of the segmented recess on the length 226a of the second interface may increase.

[0061] Figure 3B shows another exemplary embodiment of the present disclosure, similar to the transistor in Figure 3A.

[0062] However, in this embodiment, the lengths 224a and 226a of the interfaces of both ohmic contacts 224 and 226 have multiple recesses. As shown in Figure 3B, the ohmic contact 224 has a first interface length 224a that includes a second portion 223a of the doped contact area 223 and a recess adjacent to the channel area 201, and the ohmic contact 226 has a second interface length 226a that includes a second portion 225a of the doped contact area 225 and a recess adjacent to the channel area 201. As shown in the exemplary embodiment of Figure 3B, the interface lengths 224a and 226a are longer than the lengths of the interface areas IR1-IR1' and IR2-IR2', respectively, due to the presence of recesses on the lengths 224a and 226a of the first and second interfaces. The recesses of the lengths 224a and 226a of the first and second interfaces have a segmented tooth shape with space between adjacent teeth. The segmented tooth shape of the recess has a depth D1 and a width D2. The depth D1 and width D2 are the same as those in Figure 3A.

[0063] Figure 4A shows another exemplary embodiment of the present disclosure, similar to the transistor in Figure 3A.

[0064] However, in this embodiment, the ohmic contact 224 has a length 224a of a first interface adjacent to the second portion 223a of the doped contact region 223 and adjacent to the channel region 201. The length of the first interface is approximately the same as the length of the interface region IR1-IR1'. The ohmic contact 226 has a length 226a of a second interface adjacent to the second portion 225a of the doped contact region 225 and adjacent to the channel region 201. The ohmic contact 226 has a length 226a of a second interface adjacent to the second portion 225a of the doped contact region 225 and adjacent to the channel region 201. As shown in the exemplary embodiment of Figure 4A, the length 226a of the interface is longer than the length of the interface region IR2-IR2' due to the presence of recesses having a sawtooth shape. The recesses of the length 226a of the second interface have a segmented sawtooth shape with space between adjacent sawtooth shapes. The segmented sawtooth shape of the recess has a depth D1 and a width D2. The depth D1 and width D2 are the same as those in Figure 3A.

[0065] Figure 4B shows another exemplary embodiment of the present disclosure, similar to the transistor in Figure 3B.

[0066] However, in this embodiment, the lengths 224a, 226a of the first and second interfaces of both ohmic contacts 224 and 226 include a plurality of recesses having a sawtooth shape. As shown in Figure 4B, ohmic contact 224 has a first interface length 224a that includes a recess adjacent to the second portion 223a of the doped contact region 223 and adjacent to the channel region 201, and ohmic contact 226 has a second interface length 226a that includes a recess adjacent to the second portion 225a of the doped contact region 225 and adjacent to the channel region 201. As shown in the exemplary embodiment of Figure 4B, the interface lengths 224a, 226a are longer than the lengths of interface regions IR1-IR1' and IR2-IR2', respectively, due to the presence of recesses on the length 224a of the first interface and the length 226a of the second interface. The recesses of the lengths 224a, 226a of the first and second interfaces have a segmented sawtooth shape with space between adjacent sawtooth shapes. The segmental sawtooth shape of the recess has a depth D1 and a width D2. The depth D1 and width D2 are the same as those in Figure 3A.

[0067] Figures 3A, 3B, 4A, and 4B show the length of the interface of an ohmic contact including recesses, but the disclosure is not limited thereto. Instead, any shape or pattern may be included along the length of the interface, but is not limited to, including curves, meandering shapes, notches, sawtooth shapes, non-linear boundaries, cutouts (including, but not limited to, surrounding cutouts that still increase the length of the interface), regular or irregular protrusions, or any combination of the foregoing. Furthermore, in some embodiments, multiple recesses are illustrated on the length of the first interface and / or the length of the second interface of a first ohmic contact and / or a second ohmic contact, but the disclosure is not limited thereto. Instead, any amount of recesses may be included along the length of the interface (e.g., one or more recesses along the length of the interface). While we do not wish to be bound by any particular theory, it is generally believed that the total contact resistance decreases as the amount of recesses along the length of the interface increases.

[0068] In some embodiments, as shown in the exemplary embodiments of Figures 3B and 4B, the first and second ohmic contacts have lengths for the first and second interfaces, respectively, which include a plurality of recesses, where the recesses for the length of the first interface are offset from the recesses for the length of the second interface. For example, Figures 3B and 4B illustrate such offset with reference to line A-A', showing that the piecewise shape of the recesses for length 224a of the first interface is offset relative to the piecewise shape of the recesses for length 226a of the second interface. However, if the recesses for the lengths of the first and second interfaces move away from the offset and toward alignment, the total contact resistance may increase.

[0069] Various embodiments are described with reference to recesses including tooth or sawtooth shapes, but the disclosure is not limited thereto and includes many shapes that increase the length of the interface (e.g., rounded shapes, curves, stubs, sawtooth shapes, notches, etc.) such that the length of the interface between the ohmic contact and the doped contact region and / or channel region is longer than the length of the interface region. Furthermore, various embodiments are described with reference to Figures 3A, 3B, 4A, and 4B illustrating interface regions along lines IR1-IR1' and / or lines IR2-IR2' having the same extent as the length of the transistor along line B-B', but the disclosure is not so limited and includes interface regions (or multiple interface regions) having a length shorter than the length of the transistor along line B-B'.

[0070] In some embodiments, the presence of an ohmic contact including an interface region having an interface length longer than the length of the interface region, where the interface length is approximately equal to the length of the interface region, can reduce the total contact resistance of the transistor. For example, Figure 5 shows the results of a test setup including a conventional GaN HEMT transistor with two ohmic contacts having interface lengths approximately equal to the length of each interface region, and a GaN HEMT transistor including two ohmic contacts with offset recesses having interface lengths longer than the length of each interface region as described herein. The conventional GaN HEMT transistor and the GaN HEMT transistors according to some embodiments of this disclosure had a gap of approximately 5 μm between the interface region of the first ohmic contact and the second ohmic contact of each element.

[0071] Referring to Figure 5, loads were applied to elements with interface lengths approximately equal to the length of their respective interface regions (upper right graph) and elements with interface lengths longer than the length of their respective interface regions (lower left graph). In particular, the transient operation of the elements was tested with current and voltmeters. A constant current was forced through one ohmic contact, and the other ohmic contact was grounded. The resulting voltage was measured between the two ohmic contacts and used to determine the resistance based on Ohm's law. The total contact resistance of the tested elements is shown in the graph.

[0072] Elements having a first ohmic contact 501 and a second ohmic contact 503 with interface lengths approximately equal to the length of their respective interface regions had a normalized total contact resistance (Res(ohm)) of approximately 0.23 ohm-mm. This is thought to be influenced by the presence of interface lengths approximately equal to the length of their respective interface regions. However, as can be seen from Figure 5, elements having first and second ohmic contacts 505 and 507 with interface lengths longer than the length of their respective interface regions had a normalized total contact resistance (Res(ohm)) that was reduced by approximately 7% (a reduction of approximately 0.4 ohm-mm). It is thought that the total contact resistance was improved by increasing the lengths of the first and second interfaces of the first and second ohmic contacts 505 and 507.

[0073] While we do not wish to be bound by a specific operating theory again, it is conceivable that the total contact resistance could be reduced by reducing the effective width of the channel region, thereby having an interface length between the ohmic contact and the doped contact region and / or channel region that is longer than the length of the interface region. That is, if the interface length of the ohmic contact is longer than the length of the interface region, the sheet resistance of the doped contact region beneath the ohmic contact is thought to be reduced compared to the resistance within the channel region.

[0074] In some embodiments, an ohmic contact having an interface length longer than the length of the interface region, where the interface length is greater than the length of the interface region, has a resistance lower than the resistance of the channel region. As a result, the total contact resistance may be reduced.

[0075] The transistor elements described herein can be used in amplifiers operating in a wide variety of different frequency bands. In some embodiments, an RF transistor amplifier incorporating such transistor elements can be configured to operate at frequencies above 1 GHz. In other embodiments, the RF transistor amplifier can be configured to operate at frequencies above 2.5 GHz. In yet another embodiment, the RF transistor amplifier can be configured to operate at frequencies above 3.1 GHz. In yet another embodiment, the RF transistor amplifier can be configured to operate at frequencies above 5 GHz. In some embodiments, the RF transistor amplifier can be configured to operate in at least one of the frequency bands of 2.5–2.7 GHz, 3.4–4.2 GHz, 5.1–5.8 GHz, 12–18 GHz, 18–27 GHz, 27–40 GHz, or 40–75 GHz, or sub-bands thereof.

[0076] While embodiments of the present invention have been discussed above in relation to HEMT devices, it will be understood that the inventive concepts described herein can be applied to other types of semiconductor devices such as MOSFETs, DMOS transistors, and / or laterally diffused MOS (LDMOS) transistors.

[0077] RF transistor amplifiers incorporating the transistor elements described herein can be used in standalone RF transistor amplifiers and / or multiple RF transistor amplifiers. Examples of how RF transistor amplifiers according to several embodiments can be used in applications involving multiple amplifiers are discussed with reference to Figures 6A-6C.

[0078] Referring to Figure 6A, the RF transistor amplifier 1000A is schematically illustrated, which includes a preamplifier 1010 and a main amplifier 1030 electrically connected in series. As shown in Figure 6A, the RF transistor amplifier 1000A includes an RF input 1001, a preamplifier 1010, an interstage impedance matching network 1020, a main amplifier 1030, and an RF output 1002. The interstage impedance matching network 1020 may include, for example, inductors and / or capacitors arranged in an optional, appropriate configuration to form a circuit that improves impedance matching between the output of the preamplifier 1010 and the input of the main amplifier 1030. Although not shown in Figure 6A, the RF transistor amplifier 1000A may further include an input matching network interposed between the RF input 1001 and the preamplifier 1010, and / or an output matching network interposed between the main amplifier 1030 and the RF output 1002. The RF transistor amplifier according to this embodiment may be used to implement either or both of the preamplifier 1010 and the main amplifier 1030.

[0079] Referring to Figure 6B, an RF transistor amplifier 1000B is schematically illustrated, which includes an RF input 1001, a pair of preamplifiers 1010-1 and 1010-2, a pair of interstage impedance matching networks 1020-1 and 1020-2, a pair of main amplifiers 1030-1 and 1030-2, and an RF output 1002. A splitter 1003 and a combiner 1004 are also provided. Preamplifier 1010-1 and main amplifier 1030-1 (which are electrically connected in series) are electrically connected in parallel with preamplifier 1010-2 and main amplifier 1030-2 (which are electrically connected in series). Similar to the RF transistor amplifier 1000A in Figure 9A, the RF transistor amplifier 1000B may further include an input matching network interposed between the RF input 1001 and preamplifiers 1010-1 and 1010-2, and / or an output matching network interposed between the main amplifiers 1030-1 and 1030-2 and the RF output 1002.

[0080] As shown in Figure 6C, RF transistor amplifiers according to some embodiments can also be used to implement Doherty amplifiers. As is known in the art, a Doherty amplifier circuit includes first and second (or higher) power-coupled amplifiers. The first amplifier is called the “main” amplifier or “carrier” amplifier, and the second amplifier is called the “peaking” amplifier. The biases of the two amplifiers may be different. For example, in one common Doherty amplifier implementation, the main amplifier may be a Class AB or Class B amplifier, while the peaking amplifier may be a Class C amplifier. Doherty amplifiers can operate more efficiently than balanced amplifiers when operating at power levels retreated from saturation. The RF signal input to the Doherty amplifier is split (e.g., using a quadrature coupler), and the outputs of the two amplifiers are coupled. The main amplifier is configured to turn on first (i.e., at a lower input power level), so that only the main amplifier operates at a lower power level. As the input power level increases towards saturation, the peaking amplifier is turned on, and the input RF signal is split between the main amplifier and the peaking amplifier.

[0081] As shown in Figure 6C, the DohertyRF transistor amplifier 1000C includes an RF input 1001, an input splitter 1003, a main amplifier 1040, a peaking amplifier 1050, an output combiner 1004, and an RF output 1002. The DohertyRF transistor amplifier 1000C includes a 90° transformer 1007 at the input of the peaking amplifier 1050 and a 90° transformer 1005 at the input of the main amplifier 1040, and may optionally include an input matching network and / or an output matching network (not shown). The main amplifier 1040 and / or the peaking amplifier 1050 can be implemented using any of the above-described RF transistor amplifiers according to the embodiment.

[0082] The RF transistor amplifiers according to the embodiments may be formed as discrete components or as part of a monolithic microwave integrated circuit (MMIC). An MMIC is an integrated circuit that operates on radio frequency and / or microwave frequency signals, in which all the circuits for a specific function are integrated on a single semiconductor chip. An example MMIC element is a transistor amplifier, including associated matching circuits, power supply networks, etc., all mounted on a common substrate. An MMIC transistor amplifier typically includes multiple unit cell HEMT transistors connected in parallel.

[0083] Figure 7 is a plan view of an MMIC RF transistor amplifier 400 according to an embodiment of the present invention. As shown in Figure 7, the MMIC RF transistor amplifier 400 includes an integrated circuit chip 430 contained within a package 410. The package 410 may include a protective housing that surrounds and protects the integrated circuit chip 430. The package 410 may be formed from, for example, a ceramic material.

[0084] Package 410 includes input leads 412 and output leads 418. The input leads 412 may be attached to input lead pads 414 by, for example, soldering. One or more input bond wires 420 may electrically connect the input lead pads 414 to input bond pads on the integrated circuit chip 430. The integrated circuit chip 430 includes an input power supply network 438, an input impedance matching network 450, a first RF transistor amplifier stage 460, an intermediate impedance matching network 440, a second RF transistor amplifier stage 462, an output impedance matching stage 470, and an output power supply network 482.

[0085] Package 410 further includes output leads 418 connected to output lead pads 416 by, for example, soldering. One or more output bond wires 490 may electrically connect the output lead pads 416 to the output bond pads on the integrated circuit chip 430. The first RF transistor amplifier stage 460 and / or the second RF transistor amplifier stage 462 may be implemented using any of the RF transistor amplifiers according to embodiments of the concept of the present invention.

[0086] RF transistor amplifiers according to embodiments of the concept of the present invention may be designed to operate in a variety of different frequency bands. In some embodiments, these RF transistor amplifier dies may be configured to operate in at least one of the frequency bands of 0.6–2.7 GHz, 3.4–4.2 GHz, 5.1–5.8 GHz, 12–18 GHz, 18–27 GHz, 27–40 GHz, or 40–75 GHz, or sub-portions thereof. The technology according to embodiments of the concept of the present invention may be particularly advantageous for RF transistor amplifiers operating at frequencies of 10 GHz or higher.

[0087] Figures 8A and 8B are schematic cross-sectional views illustrating several exemplary methods by which an RF transistor amplifier die according to an embodiment of the present invention may be packaged to provide packaged RF transistor amplifiers 600A and 600B, respectively.

[0088] Figure 8A is a schematic side view of the packaged Group III nitride-based RF transistor amplifier 600A. As shown in Figure 8A, the packaged RF transistor amplifier 600A includes an RF transistor amplifier die 100 packaged in an open cavity package 610A. The package 610A includes a metal gate lead 622A, a metal drain lead 624A, a metal submount 630, a side wall 640, and a lid 642.

[0089] The submount 630 may include materials configured to assist in the thermal management of package 600A. For example, the submount 630 may include copper and / or molybdenum. In some embodiments, the submount 630 may consist of multiple layers and / or include vias / interconnections. In an exemplary embodiment, the submount 630 may be a multilayer copper / molybdenum / copper metal flange including a core molybdenum layer with a copper cladding layer on each of its main faces. In some embodiments, the submount 630 may include a metal heat sink which is part of the lead frame or metal slag. The sidewalls 640 and / or lid 642 may be formed from or include insulating materials in some embodiments. For example, the sidewalls 640 and / or lid 642 may be formed from or include ceramic materials.

[0090] In some embodiments, the sidewall 640 and / or lid 642 may be formed from, for example, Al2O3. The lid 642 may be bonded to the sidewall 640 using epoxy adhesive. The sidewall 640 may be attached to the submount 630, for example, via bracing. The gate lead 622A and drain lead 624A may be configured to extend through the sidewall 640, but embodiments of the concept of the present invention are not limited thereto.

[0091] The RF transistor amplifier die 100 is mounted on the upper surface of the metal submount 630 in an air-filled cavity 612 defined by a metal submount 630, a ceramic sidewall 640, and a ceramic lid 642. The gate and drain terminals of the RF transistor amplifier die 100 may be on the upper side of the structure, while the source terminal is on the bottom side of the structure.

[0092] The gate lead 622A may be connected to the gate terminal of the RF transistor amplifier die 100 by one or more bond wires 654. Similarly, the drain lead 624A may be connected to the drain terminal of the RF transistor amplifier die 100 by one or more bond wires 654. The source terminal may be mounted on a metal submount 630 using, for example, a conductive die mounting material (not shown). The metal submount 630 may provide an electrical connection to the source terminal 126 and may function as a heat dissipation structure to dissipate heat generated in the RF transistor amplifier die 100.

[0093] Heat is mainly generated, for example, in the upper portion of the RF transistor amplifier die 100 where a relatively high current density is generated in the channel region of the unit cell transistor. This heat may be transferred to the source terminal through the source via 146 and the semiconductor layer structure of the device, and then to the metal submount 630.

[0094] Figure 9B is a schematic side view of another packaged group III nitride-based RF transistor amplifier 600B. RF transistor amplifier 600B differs from RF transistor amplifier 600A in that it includes a different package 610B. Package 610B includes a metal submount 630, as well as metal gate leads and drain leads 622B, 624B. RF transistor amplifier 600B also includes a plastic overmolding 660 that at least partially encloses the RF transistor amplifier die 100, leads 622B, 624B, and metal submount 630.

[0095] Many modifications are possible to the features of the above embodiment. Transistor structures having features that can be used in embodiments of the present invention are disclosed in the following generally assigned publications, the contents of which are fully incorporated herein by reference: U.S. Patent No. 6,849,882, Chavarkar et al., "Group-III Nitride Based High Electron Mobility Transistor (HEMT) With Barrier / Spacer Layer"; U.S. Patent No. 7,230,284, Parikh et al., "Insulating Gate AlGaN / GaN HEMT"; U.S. Patent No. 7,501,669, Parikh et al., "Wide Bandgap Transistor Devices With Field Plates"; U.S. Patent No. 7,126,426, Mishra et al., "Cascode Amplifier Structures Including Wide Bandgap Field Effect Transistor With Field Plates"; U.S. Patent No. 7,550,783, Wu et al., "Wide Bandgap HEMTs With Source Connected Field Plates"; U.S. Patent No. 7,573,078, Wu et al., "Wide "Bandgap Transistors With Multiple Field Plates"; U.S. Patent Application Publication No. 2005 / 0253167, Wu et al.; "Wide Bandgap Field Effect Transistors With Source Connected Field Plates"; U.S. Patent Application Publication No. 2008 / 0128752, Wu; "GaN Based HEMTs With Buried Field Plates"; U.S. Patent Application Publication No. 2010 / 0276698, Moore et al.; "Gate Electrodes For Millimeter-Wave Operation and Methods of Fabrication";U.S. Patent Application Publication No. 2012 / 0049973, Smith, Jr. et al., "High Power Gallium Nitride Field Effect Transistor Switches"; U.S. Patent Application Publication No. 2012 / 0194276, Fisher, "Low Noise Amplifiers Including Group III Nitride Based High Electron Mobility Transistors"; and U.S. Patent No. 9,847,411, Sriram et al., "Recessed field plate transistor structures."

[0096] While embodiments of the concept of the present invention have been described in considerable detail with reference to their specific configurations, other versions are also possible. The recesses at the ends of the ohmic contacts can also have many different sizes and shapes. Therefore, the spirit and scope of the present invention should not be limited to the specific embodiments described above.

Claims

1. It is a transistor, Channel layer and The semiconductor layer on the channel layer, The channel region within the semiconductor layer, A first doped contact region located within the semiconductor layer and adjacent to the channel region, The first ohmic contact on the first doped contact region and Equipped with, The first doped contact region has a first portion covered by the first ohmic contact and a second portion adjacent to the channel region that is not covered by the first ohmic contact. The first boundary between the first ohmic contact and the second portion is longer than the length of the boundary between the first ohmic contact and the second portion when the boundary between the first ohmic contact and the second portion is a straight line. A transistor in which the first ohmic contact is either an ohmic source contact or an ohmic drain contact.

2. The transistor according to claim 1, wherein the semiconductor layer includes a group III nitride layer.

3. The transistor according to claim 1, wherein the first resistance of the first ohmic contact is smaller than the second resistance of the channel region.

4. A second doped contact region located within the semiconductor layer and adjacent to the channel region, The second ohmic contact on the second doped contact region and It further includes, The second doped contact region has a third portion covered by the second ohmic contact and a fourth portion adjacent to the channel region that is not covered by the second ohmic contact. The second boundary between the second ohmic contact and the fourth portion is longer than the length of the boundary between the second ohmic contact and the fourth portion when the boundary between the second ohmic contact and the fourth portion is a straight line. The first ohmic contact includes an ohmic source contact or an ohmic drain contact, and the second ohmic contact includes (i) an ohmic drain contact when the first ohmic contact is an ohmic source contact, or (ii) an ohmic source contact when the first ohmic contact is an ohmic drain contact. The transistor according to claim 1.

5. The transistor according to claim 1, wherein the first boundary has at least one recess.

6. The transistor according to claim 5, wherein the at least one recess includes a plurality of recesses, the plurality of recesses include teeth having space between adjacent teeth.

7. The transistor according to claim 6, wherein the at least one recess comprises a plurality of recesses, the plurality of recesses comprising a sawtooth shape with space between adjacent sawtooth shapes.

8. The transistor according to claim 5, wherein the depth of the at least one recess is between 1 μm and 5 μm.

9. The transistor according to claim 5, wherein the width of the at least one recess is between 1.4 μm and 3 μm.

10. The transistor according to claim 4, wherein in the channel region, the distance between the first boundary and the second boundary in a direction perpendicular to the straight line is 5 μm or less.

11. The transistor according to claim 4, wherein the second boundary has at least one recess.

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