Equipment equipped with a flexible cold plate

Abstract

An apparatus comprising a cold plate for contacting various and variable chip heights, one or more of the chips having a first height and one or more of the chips having a second height, the first height being greater than the second height. A cold plate disposed above a plurality of chips, the cold plate including a bottom wall and a top wall, the cold plate including a plurality of cooling fins attached to the bottom wall of the cold plate, the cold plate conforming to the plurality of chips, the chips including chips having a first height and chips having a second height.

Description

Technical Field

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[0001] The present invention generally relates to the field of heat sinks, and more particularly to using only one heat sink for a plurality of different chips having different vertical heights.

Background Art

[0002] As the speed and bandwidth of electronic signals continue to increase, the length of the electrical channels between electronic components continues to decrease. This requires placing multiple chips more closely together in one place. Multichip modules packaged at high density are likely to include processor chips, network chips, and high-bandwidth memory chip stacks (HBMs). Each HBM stack currently consists of 4 to 8 chips at the current state of the art. In the future, it seems likely to increase to 12 to 16 chips. Processor chips can also be stacked. As a result of stacking the chips, it may lead to an increase in the overall height of the stack of chips.

Summary of the Invention

[0003] Additional aspects or advantages, or both, are in part described in the following description, in part will become apparent from the description, or may be known by the practice of the present invention. <00000​​​​​​In one embodiment, a device is provided comprising: chips mounted on a substrate, one or more of the chips having a first height, one or more of the chips having a second height, the first height being greater than the second height; and a cold plate positioned above the plurality of chips, the cold plate including a bottom wall and an upper wall, the cold plate including a plurality of cooling fins attached to the bottom wall of the cold plate, the cold plate accommodating the plurality of chips, the chips including chips having a first height and chips having a second height.

[0006] In another aspect, the present invention provides a device comprising: chips mounted on a substrate, one or more of the chips having a first height, one or more of the chips having a second height, the first height being greater than the second height; and a cold plate positioned above the plurality of chips, the cold plate including a bottom wall and an upper wall, the cold plate including a plurality of cooling fins attached to the bottom wall of the cold plate, the bottom wall of the cold plate being flexible in a longitudinal dimension and at least one transverse dimension to accommodate manufacturing variations in the heights of the plurality of chips, the cold plate having at least one section where the bottom wall is of uniform height to accommodate chips having the same height, and the cold plate having at least one section where the bottom wall has a stepped profile to accommodate chips including one or more chips having the first height and one or more chips having the second height.

[0007] In another aspect, the present invention provides a device comprising a plurality of chips, one or more of which have a first height, one or more of which have a second height, the first height being greater than the second height, and a cold plate positioned above the plurality of chips, the cold plate including a bottom wall and an upper wall, the cold plate including a plurality of cooling fins attached to the bottom wall of the cold plate, the cold plate conforming to the chips, the plurality of chips including chips having the first height and chips having the second height, and the cold plate being bent into a dome shape to correspond to the arc shape of the substrate. [Brief explanation of the drawing]

[0008] The aspects, features, and advantages of the above-described and several other exemplary embodiments of the present invention will become even more apparent from the following description made in conjunction with the accompanying drawings. [Figure 1] This is a 3D (three-dimensional) diagram showing a multi-chip module mounted on a printed circuit board (PCB) according to one embodiment of the present invention. [Figure 2] This is a 3D diagram showing a multi-chip module mounted on a PCB using a cold plate and a loading mechanism placed on the PCB, according to one embodiment of the present invention. [Figure 3] This figure shows a cross-section A of a multi-chip module mounted on a PCB using a linear fin cold plate according to an embodiment of the present invention. [Figure 4] This figure shows a cross-section A of a multichip module mounted on a PCB using a straight-fin cold plate in which each fin has a different height, according to an embodiment of the present invention. [Figure 5] This figure shows a cross-section B of a multi-chip module mounted on a PCB using a linear fin cold plate according to an embodiment of the present invention. [Figure 6]This figure shows a cross-section A of a multichip module mounted on a PCB using a pin-fin cold plate in which all fins have the same height, according to an embodiment of the present invention. [Figure 7] This shows a cross-section A of a multi-chip module mounted on a PCB using a pin-fin cold plate in which each fin has a different height, according to an embodiment of the present invention. [Figure 8] This shows a cross-section A of a multi-chip module mounted on a PCB using a pin-fin cold plate with different fin heights and pitches, according to an embodiment of the present invention. [Modes for carrying out the invention]

[0009] The following description relating to the accompanying drawings is provided to facilitate a comprehensive understanding of the exemplary embodiments of the invention as defined by the claims and their equivalents. Various specific details are provided to facilitate this understanding, but these should be considered merely illustrative. Therefore, those skilled in the art will recognize that various changes and modifications of the embodiments described herein can be made without departing from the scope of the invention. In addition, well-known functions and structures may be omitted for clarity and brevity.

[0010] The terms and phrases used in the following description and claims are not limited to their bibliographic meanings, but are used solely to enable a clear and consistent understanding of the invention. Accordingly, it will be apparent to those skilled in the art that the following description of exemplary embodiments of the invention is provided for illustrative purposes only and is not intended to limit the invention as defined by the appended claims and their equivalents.

[0011] The singular forms "a," "an," and "the" are understood to include multiple references unless the context clearly indicates otherwise. Therefore, for example, a reference to "a component surface" includes one or more such surfaces unless the context clearly indicates otherwise.

[0012] Detailed embodiments of the claimed structure and method are disclosed herein, but it should be understood that the disclosed embodiments are merely illustrative examples of the claimed structure and method, which can be embodied in various forms. However, since the present invention can be embodied in many different forms, it should not be construed as being limited to the exemplary embodiments described herein. Rather, these exemplary embodiments are provided so that this disclosure is thorough and complete and so that the scope of the invention can be fully conveyed to those skilled in the art. In this specification, well-known features and technical details may be omitted to avoid unnecessarily obscuring these embodiments.

[0013] References in this specification to “one embodiment,” “an embodiment,” and “exemplary embodiment” indicate that the embodiments described may include certain features, structures, or characteristics, but not all embodiments will include such features, structures, or characteristics. Furthermore, such expressions do not necessarily refer to the same embodiment. Moreover, if certain features, structures, or characteristics are described in relation to one embodiment, it is assumed that the effect on such features, structures, or characteristics in relation to other embodiments, whether explicitly stated or not, is within the scope of knowledge of those skilled in the art.

[0014] For the purposes of the following description, the terms “upper,” “lower,” “right,” “left,” “vertical,” “horizontal,” “top,” and “bottom,” and their derivatives, shall be those of the disclosed structures and methods as oriented in the drawings. The terms “overlying,” “atop,” “on top,” “positioned on,” or “positioned atop” mean that a first element, such as a first structure, is located on a second element, such as a second structure, and an intervening element, such as an interface structure, may be located between the first and second elements. The term “direct contact” means that a first element, such as a first structure, and a second element, such as a second structure, are connected at the interface of the two elements without an intermediate conductive, insulating, or semiconductor layer.

[0015] To avoid obscuring the presentation of embodiments of the present invention, some processing steps or operations known in the art may be combined into one for the purpose of presentation and explanation in the following detailed description, and in some cases, detailed explanation may be omitted. In other examples, some processing steps or operations known in the art may not be described at all. It should be understood that the following description focuses rather on the notable features or elements of various embodiments of the present invention.

[0016] Various embodiments of the present invention are described herein with reference to the relevant drawings. Alternative embodiments may be devised without departing from the scope of the invention. Note that in the following description and drawings, various connections and positional relationships (e.g., above, below, adjacent, etc.) are defined between elements. These connections or positional relationships, or both, may be direct or indirect unless otherwise specified, and the invention is not intended to limit itself in this respect. Thus, the joining of entities may refer to either direct or indirect joining, and the positional relationships between entities may be direct or indirect. As an example of an indirect positional relationship, the meaning of forming layer "A" on layer "B" as used herein includes a situation in which one or more intermediate layers (e.g., layer "C") are between layer "A" and layer "B", provided that the relevant properties and functionalities of layers "A" and "B" are not substantially altered by the intermediate layers.

[0017] The following definitions and abbreviations shall be used for the purposes of the claims and interpretation of this specification. As used herein, the terms “comprises,” “comprising,” “includes,” “including,” “has,” “having,” “contains,” or “containing,” or other variations thereof, are intended to include non-exclusive inclusion. For example, a composition, mixture, process, method, article, or apparatus constituting a list of elements is not necessarily limited to those elements alone and may include other elements not expressly enumerated, i.e., inherently present in such composition, mixture, process, method, article, or apparatus.

[0018] Furthermore, the term “exemplary” is used herein to mean “useful as an example, illustration, or explanation.” Embodiments or designs shown as “exemplary” herein should not necessarily be construed as being preferable or advantageous to other embodiments or designs. The terms “at least one” and “one or more” may be understood to include one or more integers, i.e., 1, 2, 3, 4, etc. The term “multiple” may be understood to include two or more integers, i.e., 2, 3, 4, 5, etc. The term “connection” may include both indirect and direct “connections.”

[0019] When used herein, the term “about” modifying the amount of a component, element, or reactant of the present invention adopted refers to the variation in numerically expressed quantities that may arise, for example, from typical measurement and liquid handling practices used to prepare concentrates or solutions. Further variations may arise from errors due to carelessness during measurement, differences in the manufacture, source, or purity of components used in the preparation of a composition or the implementation of a method. The terms “about” or “substantially” are intended to include the degree of error in measuring a particular quantity based on the equipment available at the time of filing. For example, this may include ranges of ±8%, ±5%, ±2% of a given value. In another embodiment, the term “about” means within 5% of the reported numerical value. In another embodiment, the term “about” means within 10%, 9%, 8%, 7%, 6%, 5%, 4%, 3%, 2%, or 1% of the reported numerical value.

[0020] Next, reference is made in detail to embodiments of the present invention, examples of which are shown in the accompanying drawings, and like reference numerals refer to like elements throughout. By stacking components or chips, an increase in the heat generation per chip stack is caused. By stacking components or chips, a difference in height between different types of chips that need to be close to each other is also caused. By stacking components and bringing chips close together, an increase in the heat generation by the chips is caused. Cooling technology needs to manage the increased heat generation to keep the chip temperature below the thermal limit. The present invention is directed to a heat sink / cold plate that can be adapted to a plurality of chips in proximity to each other, chips of the same height, or chips having different heights, or a combination thereof.

[0021] FIG. 1 shows a 3D view of a multi-chip module mounted on a printed circuit board (PCB) 102 according to an embodiment of the present invention.

[0022] The printed circuit board (PCB) 102 can have a plurality of chips mounted on the top surface of the PCB 102. The plurality of chips 106, 108, 110, 112, 114, 116, 118, 120, and 122 are soldered onto the substrate 104. The chips 106, 108, 110, 112, 114, 116, 118, |20, and 122 can be arranged in any desired pattern. A certain chip 110 and the chip 116 are close to each other, and a certain chip 110 and the chip 106 are far from each other. The chips 106, 108, 110, 112, 114, 116, 118, 120, and 122 can have different dimensions from each other. For example, the chips 106, 108, 110, 112, and 122 are wider than the other chips 114, 116, 118, and 120. Further, the heights of the chips 106, 108, 110, 112, 114, 116, 118, 120, and 122 can vary. For example, the chips 114, 116, 118, and 120 may be taller than the other chips 106, 108, 110, 112, and 122.

[0023] Figure 2 shows a 3D view of a multi-chip module mounted on a PCB 202 using a cold plate 224 and a loading mechanism disposed on the PCB 202. The cold plate 224 is mounted on top of a chip (not shown), and an absorption layer 292 (e.g., rubber) is mounted on the cold plate 224. A metal plate 290 is mounted on the absorption layer 292. The metal plate 290 and the absorption layer 292 have cutouts for receiving an inlet fitting 230 and an outlet fitting 232. The coolant enters through the inlet fitting 230 and passes through the cold plate 224 and exits through the outlet fitting 232. The cold plate 224 absorbs heat from the chip, and the coolant removes heat from the cold plate 224. A loading force 294 is applied on the metal plate 290. The loading force 294 is transmitted from the metal plate 290, through the absorption layer 292, the cold plate 224, and a thermal interface material, to the multi-chip module disposed under the cold plate 224. Figure 2 identifies cross-sections A and B of the printed circuit board, which will be described in more detail below.

[0024] Figure 3 shows a cross-section A of a multi-chip module mounted on PCB 302 using a linear fin cold plate 324. Chips 314, 318, and 322 are mounted on the substrate 304, and the cold plate 324 is positioned above chips 314, 318, and 322. Chips 314, 318, and 322 each have different heights; for example, chips 314 and 318 are taller than chip 322. The bottom of the cold plate 324 has different sections 362, 366, and 370, respectively, to accommodate chips 314, 318, and 322. The bottom of the cold plate 324 has stepped sections with different dimensions, such that sections 370 and 366 are taller than section 362. The taller sections 366 and 370 accommodate the taller chips 314 and 318. Thermal interface materials 336, 338, and 340 are positioned between the chips 314, 318, and 322 and the bottom sections 364, 362, and 370 of the cold plate 324. The top of the cold plate 324 has different upper sections 360, 364, and 368, respectively. The cold plate 324 is designed with steps so that each of the different sections is higher than the others to accommodate chips of different heights. Upper sections 364 and 368 are higher than upper section 360 to accommodate the raised bottom sections 370 and 366. Upper sections 364 and 368 are raised, and therefore the fins 326, 328, and 330 are all the same height in all sections of the cold plate 324. The fins 326, 328, and 330 are made up of straight fins. The load force 394 was applied to the metal plate 390 such that the tips 314, 318, and 322 had good thermal contact through the thermal interface materials 336, 338, and 340, respectively. The load force 394 was transmitted from the metal plate 390 to the tips 314, 318, and 322 via the absorption plate 392 (e.g., rubber), the cold plate 324, and the thermal interface materials 336, 338, and 340.The upper sections 360, 364, and 368 and the lower sections 362, 366, and 370 of the cold plate 324 are thin. Because the upper sections 360, 364, and 368 and the lower sections 362, 366, and 370 are thin, the cold plate 324 can be flexible in both the longitudinal and transverse dimensions. This flexibility in the longitudinal and transverse dimensions allows for variations in chip height due to the manufacturing process. For example, a chip may be designed to have a vertical height of H1, but due to manufacturing tolerances, the chip may end up with a longitudinal height of H2, where H2 can be smaller or larger than H1. The thin upper wall sections 360, 364, and 368 and the bottom sections 362, 366, and 370 of the cold plate 324 can be bent into a dome shape to obtain low thermal resistance throughout the thermal interface material 336, 338, and 340. The dome shape of the cold plate 324 will conform to the dome shape of the multichip module. The dome shape of the multichip module was caused by the thermal cycling of the multichip module.

[0025] Figure 4 shows a cross-section A of a multi-chip module mounted on PCB 302A using a straight-fin cold plate 324A with fins of varying heights. Chips 314A, 318A, and 322A are mounted on substrate 304A, and the cold plate 324A is positioned above chips 314A, 318A, and 322A. Chips 314A, 318A, and 322A each have different heights; for example, chips 314A and 318A are taller than chip 322A. The bottom of the cold plate 324A has different sections 362A, 366A, and 370A, each formed in a stepped manner to fit chips 314A, 318A, and 322A. The upper wall 360A of the cold plate 324A is flat and parallel to the bottom sections 362A, 366A, and 370A. The height of the fins extends from the bottom sections 362A, 366A, and 370A of the cold plate 324A to the upper wall 360A. Since the bottom sections 362A, 366A, and 370A can be higher or lower than each other, the heights of the fins 326A, 328A, and 330A can differ from section to section. The upper wall 360A of the cold plate 324A is flat, as shown in Figure 4, in contrast to the stepped upper sections 360, 364, and 368, as shown in Figure 3.

[0026] Figure 5 shows a cross-section B of a multi-chip module mounted on a PCB 402 using a linear fin cold plate 424. Closely positioned chips 414, 418, and 422 are mounted on the substrate 404, and these chips 414, 418, and 422 have approximately the same height. Thermal interface materials 436, 438, and 440 are attached to the top of chips 414, 418, and 422, respectively. The bottom wall 462 of the cold plate 424 is uniform, but the bottom wall 462 has a thickness that allows the cold plate 424 to bend. A force 494 is applied to a metal plate 490 and transmitted to the cold plate 424 by an absorption layer 492 (e.g., rubber). The cold plate 424 can flex in the lateral and longitudinal dimensions to conform to the curvature of the substrate 404. The upper wall 460 is parallel to the bottom wall 462 of the cold plate 424.

[0027] Figure 6 shows a cross-section A of a multi-chip module mounted on PCB 502 using a pin-fin cold plate 524 in which all fins have the same height. Chips 514, 518, and 522 are mounted on the substrate 504. Chips 514, 518, and 522 have different longitudinal heights; for example, chips 514 and 518 are taller than chip 522. Similarly, as shown in Figure 3, the bottom sections 562, 566, and 570 of the cold plate 524 are at different heights, respectively, to fit chips 514, 518, and 522. The distances between the top sections 560, 564, and 568 of the cold plate 524 and the bottom sections 562, 566, and 570 are the same. Therefore, the fins 526, 528, and 530 in each section have the same height. The fins 526, 528, and 530 are made up of pin fins. The thermal interface layers 536, 538, and 540 are positioned between the chips 514, 522, and 518 and the bottom sections 562, 566, and 570, respectively. A load force 594 is applied to the top of the metal plate 590. The load force 594 is transmitted through the metal plate 590 to the absorption plate 592 (e.g., rubber), to the cold plate 524, to the thermal interface materials 536, 538, and 540, and to the chips 514, 518, and 522. The upper sections 560, 564, 568 and the bottom sections 562, 566, 570 of the cold plate 524 are relatively thin. The cold plate 524 is flexible in the longitudinal dimension and two transverse dimensions, i.e., three-dimensionally, because the thickness of the upper wall sections 560, 564, 568 and the bottom wall sections 562, 566, 570 is relatively thin and it has pin fins 526, 528, 530. The load force 594 bends the flexible cold plate 524 into a dome shape. This dome shape is due to the warping of the multi-chip module (substrate) after thermal cycling. In a warped, dome-shaped multi-chip module, the thermal resistance of the thermal interface materials 536, 538, and 540 is reduced by bringing the flexible, dome-shaped cold plate 525 into contact with 514, 518, and 522.

[0028] Figure 7 shows a cross-section A of a multi-chip module mounted on PCB 602 using a pin-fin cold plate with fins of varying heights. Chips 614, 618, and 622 are mounted on PCB 604. Chips 614, 618, and 622 have different longitudinal heights; for example, chips 614 and 618 are taller than chip 622. Similarly, as shown in Figure 6, the bottom sections 662, 666, and 670 of the cold plate 624 are of different heights to accommodate chips 614, 618, and 622, respectively. The top wall 660 of the cold plate 624 is flat and parallel to the bottom sections 662, 666, and 670. The height of the fins extends from the bottom sections 662, 666, and 670 to the top of the cold plate 624. Since the bottom sections 663, 666, and 670 can be higher or lower than each other, the heights of the fins 626, 628, and 630 can differ from section to section. As shown in Figure 6, the heights of the fins 626 and 630 in the left section 667 and the right section 669 are lower than the height of the fin 628 in the central section 665. A load force 694 is applied to the top of the metal plate 690. The load force 694 is transmitted through the metal plate 690 to the absorption plate 692 (e.g., rubber), to the cold plate 624, to the thermal interface materials 636, 638, and 640, and to the tips 614, 618, and 622. The upper wall 660 of the cold plate 624 and the bottom sections 662, 666, and 670 have a relatively thin thickness. The cold plate 624 is flexible in the longitudinal dimension and two transverse dimensions, i.e., three-dimensionally, because the thickness of the upper wall 660 and the bottom wall sections 662, 666, and 670 are relatively thin, and it has pin fins 626, 628, and 630. The load force 694 bends the flexible cold plate 624 into a dome shape. This dome shape is due to the warping of the multi-chip module (substrate) after thermal cycling. In a warped dome-shaped multi-chip module, the thermal resistance of the thermal interface materials 636, 638, and 640 is reduced by bringing the flexible dome-shaped cold plate 624 into contact with 614, 618, and 622.

[0029] Figure 8 shows a cross-section A of a multi-chip module mounted on PCB 702 using a pin-fin cold plate, where the fins each have different fin heights and pitches (i.e., spacing between fins in each section). Chips 714, 718, and 722 are mounted on the substrate 704. Chips 714, 718, and 722 have different longitudinal heights; for example, chips 714 and 718 are taller than chip 722. Similarly, as shown in Figure 6, the bottom sections 762, 766, and 770 of the cold plate 724 are at different heights to accommodate chips 714, 718, and 722, respectively. The top wall 760 of the cold plate 724 is flat and parallel to the bottom sections 762, 766, and 770. The cold plate 724 includes a left section LS, a middle section MS, and a right section RS. The fin height is constant within each of the left section LS, the central section MS, and the right section RS. The fin height may differ from section to section. For example, the fin height in the left section LS may be smaller than the fin height in the central section MS, and the fin height in the left section LS may be approximately the same as the fin height in the right section RS. The fin pitch, for example, the spacing between fins within a section, is constant within each individual section. However, the fin pitch may differ from section to section. For example, the pitch of fin 726 in the right section RS may be larger than the pitch of fin 728 in the central section MS, and the pitch of fin 730 in the left section LS may be approximately the same as the pitch of fin 726 in the right section RS. Similarly, as shown in Figure 6, the cold plate 724 is three-dimensionally flexible. Corresponding to the dome shape of the warped multichip module, the cold plate 724 may be bent into the same dome shape as a result of the applied load force 794. As shown in Figure 6, the cold plate 724 can be fabricated to have the same dome shape as the warped dome shape of the multichip module.

[0030] While the present invention has been shown and described with reference to several exemplary embodiments, it will be understood by those skilled in the art that various modifications of form and detail are made without departing from the scope of the invention as defined by the appended claims and their equivalents.

[0031] The descriptions of various embodiments of the present invention are presented for illustrative purposes only and are not intended to be exhaustive or limitful to the disclosed embodiments. Many modifications and variations will be apparent to those skilled in the art without departing from the scope of the described embodiments. The terms used herein have been selected to best describe the principles of one or more embodiments, practical applications or technical improvements to marketable technologies, or to enable those skilled in the art to understand the embodiments disclosed herein.

Claims

1. It is a device, A chip mounted on a substrate, wherein one or more of the chips have a first height, one or more of the chips have a second height, and the first height is greater than the second height, A cold plate positioned above a plurality of chips, having an inlet and an outlet, configured such that a coolant enters the inlet, passes through the cold plate, and exits through the outlet, the cold plate includes a bottom wall and an upper wall, the upper wall having a uniform surface profile when the upper wall crosses the cold plate, the cold plate includes a plurality of cooling fins attached to the bottom wall of the cold plate, the entire cold plate is flexible in the longitudinal dimension and at least one transverse dimension to conform to the curvature of the substrate, the cold plate conforms to the plurality of chips, the chips include chips having a first height and chips having a second height, and Equipment equipped with the following features.

2. The apparatus according to claim 1, wherein the bottom wall of the cold plate has a stepped profile that corresponds to and conforms to the one or more chips having a first height and the one or more chips having a second height.

3. The apparatus according to claim 2, wherein the stepped bottom wall has a first step that fits one or more chips having a first height, and the stepped bottom wall has a second step that fits one or more chips having a second height, and the first step is higher than the second step.

4. The apparatus according to claim 1, wherein each of the bottom walls has different sections, and each of the different sections of the bottom wall is flexible in the longitudinal dimension and at least one transverse dimension to accommodate manufacturing variations in the height of each of the plurality of chips.

5. The apparatus according to claim 4, wherein the upper wall has one section that extends over the entire cold plate, and the cold plate is composed of a plurality of regions, each region of which is comprised of a bottom wall section corresponding to the upper wall, and the distance between the section of the upper wall and the corresponding section of the bottom wall may differ between each of the plurality of regions of the cold plate.

6. The apparatus according to claim 5, wherein the bottom wall has stepped profiles that fit the one or more chips having a first height and the one or more chips having a second height, and when the corresponding bottom wall is stepped to fit the one or more chips having the first height or the one or more chips having the second height, the top wall remains at one height over the entire cold plate.

7. The apparatus according to claim 6, wherein the vertical heights of the plurality of cooling fins differ within each of the regions of the cold plate, and the vertical height is the distance of the cooling fins between the upper wall and the corresponding bottom wall in each region of the cold plate.

8. The apparatus according to claim 7, wherein the height of the plurality of cooling fins located in a first region of the plurality of regions for the cold plate, where the bottom wall is raised to accommodate taller chips, is defined as the first longitudinal height, and the height of the plurality of cooling fins located in a second region of the plurality of regions for the cold plate, where the bottom wall is lowered to accommodate shorter chips, is defined as the second longitudinal height, the first longitudinal height being lower than the second longitudinal height.

9. The apparatus according to claim 7, wherein the height of the plurality of cooling fins located in a first region of the plurality of regions for the cold plate, where the bottom wall rises in stages to accommodate taller chips, is defined as the first vertical height; the height of the plurality of cooling fins located in a second region of the plurality of regions for the cold plate, where the bottom wall drops in stages to accommodate shorter chips, is defined as the second vertical height; and the height of the plurality of cooling fins located in a third region of the plurality of regions for the cold plate, where the bottom wall rises in stages to accommodate taller chips, is defined as the third vertical height, wherein the first vertical height is lower than the second vertical height and the first vertical height is approximately the same as the third vertical height.

10. The apparatus according to claim 7, wherein the plurality of cooling fins are spaced constant apart in each of the regions of the cold plate.

11. The apparatus according to claim 7, wherein the plurality of cooling fins are spaced at a constant distance from each region of the cold plate, and the spacing of the cooling fins differs between the first region and the second region of the plurality of regions of the cold plate.

12. It is a device, A chip mounted on a substrate, wherein one or more of the chips have a first height, one or more of the chips have a second height, and the first height is greater than the second height, A cold plate positioned above a plurality of chips, having an inlet and an outlet, configured such that a coolant enters the inlet, passes through the cold plate, and exits through the outlet, the cold plate includes a bottom wall and an upper wall, the upper wall having a uniform surface profile when the upper wall traverses the cold plate, the cold plate includes a plurality of cooling fins attached to the bottom wall of the cold plate, the bottom wall of the cold plate is flexible in a longitudinal dimension and at least one transverse dimension to accommodate manufacturing variations in the height of the plurality of chips, the cold plate has at least one section where the bottom wall is of uniform height to accommodate chips of the same height, the cold plate has at least one section where the bottom wall has a stepped profile to accommodate chips including the one or more chips having a first height and the one or more chips having a second height, and the entire cold plate is flexible in a longitudinal dimension and at least one transverse dimension to accommodate the curvature of the substrate, the cold plate and Equipment equipped with the following features.

13. It is a device, A plurality of chips mounted on a substrate, wherein one or more of the chips have a first height, one or more of the chips have a second height, and the first height is greater than the second height, A cold plate positioned above the plurality of chips, having an inlet and an outlet, configured such that a coolant enters the inlet, passes through the cold plate, and exits through the outlet, the cold plate includes a bottom wall and an upper wall, the upper wall having a uniform surface profile when the upper wall crosses the cold plate, the cold plate includes a plurality of cooling fins attached to the bottom wall of the cold plate, the entire cold plate is flexible in the longitudinal dimension and at least one transverse dimension to conform to the curvature of the substrate, the cold plate conforms to the chips, the plurality of chips include a chip having a first height and a chip having a second height, and the cold plate is bent into a dome shape to correspond to the arc shape of the substrate, and Equipment equipped with the following features.

14. The apparatus according to claim 13, wherein each of the bottom walls has different sections, and each of the different sections of the bottom wall is flexible in a longitudinal dimension and at least one transverse dimension to accommodate manufacturing variations in the height of each of the plurality of chips.

15. The apparatus according to claim 14, wherein the cold plate is composed of a plurality of regions, each region of which is comprised of an upper wall and a corresponding bottom wall section, and the distance between the upper wall and the corresponding section of the bottom wall differs between each of the plurality of regions of the cold plate.

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