Load adjustment system and load adjustment method

Abstract

To perform load adjustment of a polishing device with good efficiency.SOLUTION: A load adjustment system comprises a bevel polishing device including a polishing head for polishing a bevel part of a base plate, and a control device. From a load measurement device for performing measurement of a pressing load from the polishing head, the control device acquires measurement data obtained by measurement, calculates an adjustment value for adjusting the pressing load on the basis of the measurement data and set parameters set in the polishing head, and controls a pressing operation of the polishing head on the basis of the adjustment value.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a load adjustment system and a load adjustment method.

Background Art

[0002] Conventionally, in a bevel polishing apparatus for polishing a bevel portion of a substrate such as a wafer, a pad called a polishing pad or a pressing pad is pressed against the bevel portion of the substrate with an appropriate load via a polishing tape, thereby controlling the polishing amount and shape of the substrate.

[0003] When installing or maintaining the bevel polishing apparatus, it is necessary to adjust so that the bevel portion is pressed with an appropriate load by the polishing pad. In such an adjustment operation, a load measuring device is attached to the bevel polishing apparatus, and the pressing load of the polishing pad is measured by the load measuring device (see Patent Document 1).

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the load adjustment operation of the above-described bevel polishing apparatus, complicated operations such as an operator visually reading information on the pressing load of the polishing pad obtained by the load measuring device and inputting it into the bevel polishing apparatus are required. [[ID=4l]]

[0006] The present invention has been made in view of the above circumstances, and one of its objects is to efficiently adjust the load of the bevel polishing apparatus.

Means for Solving the Problems

[0007] According to one embodiment of the present invention, the load adjustment system comprises a bevel polishing apparatus equipped with a polishing head for polishing the bevel portion of a substrate, and a control device, wherein the control device acquires measurement data obtained from a load measuring device that measures the pressing load from the polishing head, calculates an adjustment value for adjusting the pressing load based on the measurement data and setting parameters set for the polishing head, and controls the pressing operation of the polishing head based on the adjustment value.

[0008] According to another embodiment of the present invention, the load adjustment method is a load adjustment method for a bevel polishing apparatus, and includes a control device that controls a bevel polishing apparatus equipped with a polishing head for polishing the bevel portion of a substrate, which includes acquiring measurement data obtained from a load measuring device that measures the pressing load from the polishing head, calculating an adjustment value for adjusting the pressing load based on the measurement data and setting parameters set for the polishing head, and controlling the pressing operation of the polishing head based on the adjustment value. [Brief explanation of the drawing]

[0009] [Figure 1] Figure 1 is a schematic plan view showing a load adjustment system according to one embodiment of the present invention. [Figure 2] Figure 2 is a schematic plan view showing the polishing apparatus in the above embodiment. [Figure 3] Figure 3 is a schematic cross-sectional view showing an example of the internal structure of the polishing head assembly and tape supply and recovery mechanism in the above embodiment. [Figure 4] Figure 4 is a diagram illustrating an example of the pressurization mechanism of the polishing head in the above embodiment. [Figure 5] Figure 5 is an overhead perspective view of the load measuring device in the above embodiment. [Figure 6] Figure 6 is a downward perspective view of the load measuring device in the above embodiment. [Figure 7] Figure 7 is a side cross-sectional view of the load measuring device in the above embodiment. [Figure 8]FIG. 8 is a side view of the load measuring device in the above-described embodiment as viewed from the polishing head side. [Figure 9] FIG. 9 is a conceptual diagram showing the configuration of the load adjustment system in the above-described embodiment. [Figure 10] FIG. 10 is a conceptual diagram showing an example of the display screen in the above-described embodiment. [Figure 11] FIG. 11 is a flowchart showing the flow of the load adjustment method in the above-described embodiment. [Figure 12A] FIG. 12A is a diagram showing the usage state of the load measuring device in the above-described embodiment. [Figure 12B] FIG. 12B is a diagram showing the usage state of the load measuring device in the above-described embodiment. [Figure 13] FIG. 13 is a conceptual diagram showing the configuration of the load adjustment system in Modification 1. [Figure 14] FIG. 14 is a flowchart showing the flow of the load adjustment method in Modification 1. [Figure 15] FIG. 15 is a schematic cross-sectional view showing the load measuring device in Modification 2. [Figure 16] FIG. 16 is a diagram showing an example of the image taken in Modification 2. [Figure 17] FIG. 17 is a conceptual diagram showing the configuration of the load adjustment system in Modification 2. [Figure 18] FIG. 18 is a flowchart showing the flow of the load adjustment method in Modification 2. [Figure 19] FIG. 19 is a conceptual diagram showing the bevel portion of the substrate.

BEST MODE FOR CARRYING OUT THE INVENTION

[0010] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings described below, the same or corresponding components are denoted by the same reference numerals, and redundant description is omitted.

[0011] FIG. 1 is a plan view schematically showing a load adjustment system according to the present embodiment. The load adjustment system 10 includes a polishing apparatus 100, a load measuring apparatus 200, and an information processing apparatus 500. The polishing apparatus 100 includes polishing head assemblies 1A, 1B, 1C, 1D and tape supply and recovery mechanisms 2A, 2B, 2C, 2D. In the example of FIG. 1, in adjusting the load of the polishing apparatus 100, the arrangement in the case where the load measuring apparatus 200 measures the pressing load of the polishing head assembly 1A via the polishing tape 23 is shown.

[0012] In the following embodiments, the Z-axis is taken in the vertical direction, the X-axis is taken in the direction in which the polishing head assembly 1A faces the central axis Cr (see FIG. 2) of the horizontal rotation holding mechanism 3, and the Y-axis is taken perpendicular to the Z-axis and the X-axis (see the coordinate system CS).

[0013] FIG. 2 is a plan view schematically showing the polishing apparatus 100. FIGS. 2 to 4 show the arrangement of each part when the polishing apparatus 100 polishes the substrate W. In the polishing apparatus 100, a rotation holding mechanism 3 for horizontally holding and rotating a substrate W such as a wafer to be polished is provided at the central part thereof. Specifically, the rotation holding mechanism 3 includes a vacuum suction table 4 that holds the back surface of the substrate W by vacuum suction and a shaft 5 (see FIG. 12A) attached to the central part of the vacuum suction table 4. The shaft 5 is rotated by a motor (not shown) so as to rotate the substrate W around the central axis Cr of the vacuum suction table 4. In addition, a vacuum passage for introducing a negative pressure for sucking the substrate W onto the vacuum suction table 4 is formed in the vacuum suction table 4 and the shaft 5.

[0014] The polishing apparatus 100 polishes the bevel portion of a substrate W such as a wafer. FIG. 19 is a side view of the substrate W and is a view showing an enlarged peripheral portion of the substrate W. In FIG. 19, a semiconductor device or the like is formed on the flat portion D of the substrate W, and the flat portion D is located at a position on the inner peripheral side within several millimeters from the end face G. No semiconductor device or the like is formed on the flat portion E outside the region D. In this specification, a region B having an inclination from the upper slope F outside the flat portion E through the end face G to the lower slope F is referred to as a bevel portion.

[0015] As shown in Figure 2, four polishing head assemblies 1A, 1B, 1C, and 1D are arranged around the substrate W held by the rotation holding mechanism 3. On the radially outer side of the polishing head assemblies 1A, 1B, 1C, and 1D are tape supply and recovery mechanisms 2A, 2B, 2C, and 2D, which supply polishing tapes 23, which are polishing tools, to the polishing head assemblies 1A, 1B, 1C, and 1D and recover the polishing tapes 23 after use. The polishing head assemblies 1A, 1B, 1C, and 1D and the tape supply and recovery mechanisms 2A, 2B, 2C, and 2D are separated by a partition wall 20. The internal space of the partition wall 20 constitutes a polishing chamber 21, and the four polishing head assemblies 1A, 1B, 1C, and 1D and the vacuum suction table 4 are located inside the polishing chamber 21. On the other hand, the tape supply and recovery mechanisms 2A, 2B, 2C, and 2D are located outside the partition wall 20 (i.e., outside the polishing chamber 21). Each polishing head assembly 1A, 1B, 1C, 1D and tape supply and retrieval mechanism 2A, 2B, 2C, 2D has the same configuration. The number of polishing head assemblies and tape supply and retrieval mechanisms is not limited to four.

[0016] Figure 3 is a schematic cross-sectional view showing the internal structure of the polishing head assembly 1A and the tape supply and recovery mechanism 2A. The polishing head assembly 1A includes a polishing head 30 for bringing the polishing tape 23 supplied from the tape supply and recovery mechanism 2A into contact with the peripheral edge of the substrate W. The polishing tape 23 is supplied to the polishing head 30 so that the polishing surface of the polishing tape 23 faces the substrate W.

[0017] The polishing head 30 is fixed to one end of the arm 60 shown in Figure 2, and the arm 60 is configured to rotate freely around an axis Ct parallel to the tangent to the substrate W. The other end of the arm 60 is connected to a motor M4 via a pulley and belt. When the motor M4 rotates clockwise and counterclockwise by a predetermined angle, the arm 60 rotates around axis Ct by a predetermined angle. This allows the inclination angle of the polishing head 30 to be changed to match the shape of the bevel portion of the substrate W, making it possible to polish a desired area of ​​the bevel portion of the substrate W.

[0018] Furthermore, as shown in Figure 3, the front-to-back position of the polishing head 30 (in other words, the position along the radial direction of the substrate W) can be adjusted by a linear actuator 67 that is directly or indirectly fixed to the base plate 65.

[0019] Figure 4 illustrates an example of a pressurizing mechanism 41 for the polishing head 30. This pressurizing mechanism 41 includes a polishing pad 50 positioned on the back side of a polishing tape 23 stretched between two guide rollers 46 and 47 positioned vertically on the front surface of the polishing head 30, a pad holder 51 that holds the polishing pad 50, and an air cylinder 52 that moves the pad holder 51 toward the substrate W. The surface of the polishing pad 50 that faces the polishing tape 23 being pressed is called the polishing pad surface 50S.

[0020] The air cylinder 52 is a so-called single-rod cylinder, and two air pipes 53 are connected to it via two ports. Each of these air pipes 53 is equipped with an electro-pneumatic regulator (e.g., a solenoid valve) 54. The primary side of the electro-pneumatic regulator 54 is connected to an air supply source (e.g., a compressor) 55, and the secondary side is connected to a port on the air cylinder 52. The electro-pneumatic regulator 54 is controlled by a signal from the information processing device 500, making it possible to adjust the air pressure supplied to the air cylinder 52 to a desired pressure. In other words, the information processing device 500 can apply a pressing force according to the setting value entered by the user. The electro-pneumatic regulator 54 is controlled in this manner. By controlling the air pressure supplied to the air cylinder 52 in this way, the polishing pad 50 connected to the piston rod of the air cylinder 52 is pushed out, and the pressure that presses the polishing surface of the polishing tape 23 against the substrate W can be controlled.

[0021] Figure 5 is an upper perspective view of the load measuring device 200. Figure 6 is a lower perspective view of the load measuring device 200. Figure 7 is a side cross-sectional view of the load measuring device 200. Figure 8 is a side view of the load measuring device 200 as seen from the polishing head 30 side. The load measuring device 200 comprises a load measuring device body 300 capable of measuring the pressing load from the polishing pad 50 of the polishing device 100, and a base plate 400 on which the load measuring device body 300 can be placed.

[0022] The base plate 400 can be fixed onto the vacuum suction table 4 of the polishing device 100. In the illustrated example, the base plate 400 has a configuration in which substantially circular plate-like members having different diameters are arranged coaxially vertically, and comprises a small-diameter upper plate portion 401 and a large-diameter lower plate portion 402. The load measuring device body 300 is fixed to the base plate 400 via a mounting plate 307 using adjustment screws 307a and slots 307b.

[0023] The load measuring device body 300 includes a force gauge 301. The hatching of the cross-section of the force gauge 301 is omitted, and the same applies to the following figures. The force gauge 301 is mounted on the upper plate portion 401 such that the measuring shaft 302 extending from its body is oriented toward the polishing head 30 arranged around the base plate 400. The load measuring device body 300 may include a load support member 303 that can be fixed to the measuring shaft 302 of the force gauge 301. In the illustrated example, the load support member 303 includes a bracket 304, which includes a mounting portion 304a attached to the measuring shaft 302 and a load support portion 304b configured to receive the pressing load from the polishing pad 50. At the mounting portion 304a, the bracket 304 can be fixed to the measuring shaft 302 by a combination of bolts and nuts. The load-bearing member 303 includes a resin (e.g., PEEK) pad 305 fixed to the outer surface of the mounting portion 304a of the metal bracket 304. The pad 305 is optional. The outer surface 305a of the pad 305, or the outer surface of the load-bearing portion 304b when the pad 305 is absent, becomes the load-bearing surface S1 that is pressed by the polishing pad 50.

[0024] In the illustrated example, the load measuring device 200 includes a spacer 306. The spacer 306 can be removably positioned in the stepped portion 404 formed between the upper plate portion 401 and the lower plate portion 402. Preferably, one end of the spacer 306 has a shape that conforms to the outer circumferential surface of the upper plate portion 401. By bringing the load support portion 304b of the bracket 304 into contact with the other end of the spacer 306, the position of the load support surface S1 with respect to the base plate 400, and consequently the vacuum suction table 4 to which the base plate 400 is fixed, can be adjusted. The load measuring device 200 is not particularly limited in its form, as long as it can measure load and send the measurement data to the information processing device 500.

[0025] Figure 9 is a conceptual diagram showing the configuration of the load adjustment system 10 of this embodiment. The load measuring device 200 includes a communication unit 210 and a measuring unit 220. The information processing device 500 includes a communication unit 510, an input unit 520, a storage unit 530, a display unit 540, and a control unit 550. The control unit 550 includes a communication control unit 551, an adjustment value calculation unit 552, a first determination unit 553, a display control unit 554, and a device control unit 555.

[0026] The communication unit 210 of the load measuring device 200 is equipped with a communication device capable of communicating with at least the communication unit 510 of the information processing device 500 via wireless or wired connection. The communication unit 210 is an information processing device. The communication unit 510 of the device 500 functions as a data output unit that outputs data obtained by load measurement. Hereinafter, the data including the measured load values ​​obtained by load measurement will be referred to as measurement data.

[0027] The measuring unit 220 of the load measuring device 200 is equipped with a load measuring instrument such as a digital force gauge. In this embodiment, the force gauge 301 functions as the measuring unit 220. The measuring unit 220 performs load measurement and generates measurement data including the measured pressure load value.

[0028] The information processing device 500 includes an information processing device such as a computer, and acts as an interface with the user as appropriate, as well as performing various data-related processing such as communication, storage, and calculation. The information processing device 500 may have its various components physically located on different devices. Furthermore, at least a portion of the data processed by the information processing device 500 may be stored on a remote server or the like. For example, a portion of the control unit 550 can be controlled by a programmable logic controller (PLC) integrated with the polishing device 100 or load measuring device 200, while other functions of the information processing device 500 can be mounted on a computer physically located separately from the PLC. In this case, for example, the PLC may contain a communication unit 510, a communication control unit 551, an adjustment value calculation unit 552, and a device control unit 555, while the computer may contain an input unit 520, a storage unit 530, a display unit 540, a first determination unit 553, and a display control unit 554.

[0029] The communication unit 510 of the information processing device 500 includes a communication device capable of communicating with at least the communication unit 210 of the load measuring device 200 via wireless or wired connection. The communication unit 510 functions as a data acquisition unit that acquires measurement data from the communication unit 210 of the load measuring device 200.

[0030] The input unit 520 of the information processing device 500 is equipped with an input device such as a mouse, keyboard, various buttons, or touch panel. The input unit 520 receives input from the user that is necessary for the operation of the polishing device 100 or the load measuring device 200.

[0031] The storage unit 530 of the information processing device 500 is equipped with a non-volatile or volatile storage medium. The storage unit 530 stores measurement data, design parameters (described later), and programs for the control unit 550 to execute processing.

[0032] The display unit 540 of the information processing device 500 is equipped with a display device such as a liquid crystal monitor. The display unit 540 displays information obtained through processing by the control unit 550.

[0033] The control unit 550 of the information processing device 500 includes a control device that includes a processor such as a central processing unit (CPU) or PLC. The control unit 550 functions as the main unit for controlling the load adjustment system 10. The control unit 550 performs various processes by reading programs stored in the storage unit 530, etc., into memory and executing them. The physical configuration of the control unit 550 is not particularly limited as long as it is capable of performing the processing.

[0034] The communication control unit 551 of the control unit 550 controls the communication unit 510 to perform communication. The communication control unit 551 sends and receives necessary data, such as receiving data from the load measuring device 200.

[0035] The adjustment value calculation unit 552 of the control unit 550 calculates an adjustment value for adjusting the pressing load of the polishing head 30 based on the measurement data and the setting parameters set for the polishing head 30. Here, the setting parameters are parameters that are necessary to operate the polishing head 30 in order to achieve the set pressing load value. The setting parameters can be, for example, parameters that need to be determined when controlling the electro-pneumatic regulator 54, or parameters that need to be determined when operating the pressurizing mechanism 41.

[0036] The adjustment value calculation unit 552 can calculate updated values ​​for the setting parameters as adjustment values ​​from the combination of multiple set values ​​of the pressing load and the measured values ​​corresponding to each set value in the measurement data. In other words, the setting parameters can be updated using the adjustment values. For example, suppose that the set value of the pressing load is X, and the actual pressing load Y is expressed as Y = P1 * X + P2 using design parameters P1 and P2. Also, suppose that N is Newton, and the measurement data includes measured values ​​of the pressing load when measured with a set value of 10N and measured values ​​of the pressing load when measured with a set value of 20N. In this case, by using multiple set values ​​and multiple measured values ​​of the pressing load in the measurement data and determining P1 and P2 using the least squares method, it is possible to obtain updated values ​​for the setting parameters that reflect the current state of the polishing device 100 and achieve a pressing load closer to the set value. Note that the method for calculating the adjustment value is not limited to using the least squares method, and various modeling methods can be used.

[0037] The first determination unit 553 of the control unit 550 performs a first determination to determine whether the adjustment value is an appropriate value. First information indicating the range of the appropriate value for the first determination is stored in advance in the storage unit 530, etc. The first information is, for example, a numerical value that defines a numerical range, such as the upper and lower limits of the appropriate value for the first determination. The appropriate value is set based on past data or theory, etc. For example, the appropriate value can be determined in such a way that extremely large or small values ​​are excluded based on the variation of setting parameters in past data.

[0038] The display control unit 554 of the control unit 550 controls the display unit 540 to display information about the polishing head 30 on the display device. This information includes at least one of the information based on measurement data and the adjustment value calculated by the adjustment value calculation unit 552. The information based on measurement data may include the measured value of the pressing load, etc.

[0039] Figure 10 is a conceptual diagram showing an example of a display screen containing information about the polishing head 30. The load adjustment screen 600 includes a first screen element 610, a second screen element 620, a third screen element 630, a fourth screen element 640, a head item 621, setting value items 651A, 651B, measured value items 652A, 652B, setting parameter item 653, parameter lower limit item 654, parameter upper limit item 655, and adjustment value item 656. Note that the load adjustment screen 600 is just an example, and the design or numerical values ​​are not limited to this as long as the measured load or adjusted parameters are shown.

[0040] The first screen element 610 is a screen element that accepts user input, such as a button. Load adjustment is started when the user clicks or touches the first screen element 610. The second screen element 620 is a screen element configured to allow the user to select from multiple options, such as a pull-down list. By clicking or touching the second screen element 620, the user can select the target for load adjustment from the polishing head assemblies 1A, 1B, 1C, and 1D. The third screen element 630 is a screen element that allows the user to select the content to be displayed, such as a tab. By clicking or touching the third screen element 630, the user can selectively display the result of the first, second, or third load adjustment. Here, one load adjustment is performed from load measurements taken for loads with multiple different setting values. The number of load measurements for which content is displayed is not particularly limited to the three shown in the figure. The fourth screen element 640 is a screen element that accepts user input, such as a button. When the user clicks or touches the fourth screen element 610, the contents of the load adjustment screen 600 are output in a predetermined data format. In the example in Figure 10, the data format is CSV (Comma Separated Values), but it is not particularly limited as long as it can represent numerical values.

[0041] On the load adjustment screen 600, polishing head assemblies 1A and 1B are located to the side of the second screen element 620. ,1C and 1D, the head item 621 is displayed, indicating which of these will be displayed on the load adjustment screen 600 as the result of the load adjustment.The setting value items 651A and 651B show the set value of the load during load measurement, and here an example is shown where it was done at two points, 10N and 20N.The measured value items 652A and 652B show the measured value of the load during load measurement.The setting parameter item 653 shows the value of the setting parameter before adjustment.The parameter lower limit item 654 shows the lower limit of the appropriate value of the load in the first judgment.The parameter upper limit item 655 shows the upper limit of the appropriate value of the load in the first judgment.The adjustment value item 656 shows the adjustment value.Here, the adjustment value is shown as the provisional value of the adjusted parameter in the first load adjustment.

[0042] The load adjustment screen 600 clearly displays the results of load adjustment to the user by showing the set value and measured value of the load measurement, as well as the set parameters and the range of appropriate values ​​before and after adjustment.

[0043] The device control unit 555 of the control unit 550 controls each part of the polishing device 100 and controls the polishing operation and adjustment operation.

[0044] Figure 11 is a flowchart showing the flow of the load adjustment method in this embodiment. This load adjustment method is performed by the control unit 550.

[0045] In step S101, the control unit 550 performs load measurement using predetermined setting parameters. These setting parameters are the initial values ​​before adjustment. The device control unit 555 controls the pressing operation of the polishing device 100 based on the load setting value input from the input unit 520 or stored in the storage unit 530, etc., and the setting parameters stored in the storage unit 530, etc. It is preferable to perform load measurement for multiple different load setting values ​​to obtain setting parameters that realize a more accurate load, but it may also be performed for only one setting value. From the same viewpoint, it is more preferable to perform load measurement for the minimum and maximum values ​​of the load that can be set.

[0046] Figures 12A and 12B are perspective and side views, respectively, showing the load measuring device 200 in use. Note that the abrasive tape 23 is omitted from the illustration in Figures 12A and 12B.

[0047] For example, the rotation of the rotation holding mechanism 3 of the polishing device 100 is stopped, the inclination angle of the polishing heads 30 of each polishing head assembly 1A, 1B, 1C, and 1D is adjusted to 0 degrees (i.e., horizontal as shown in Figure 4), and the front-to-back position of the polishing pads 50 is adjusted to a predetermined polishing position. Next, the base plate 400 is fixed to the vacuum suction table 4 by suction so that the outer circumference of the vacuum suction table 4 and the base plate 400 coincide. After that, the position of the load support surface S1 of the load measuring device 300 relative to the vacuum suction table 4 is adjusted using a spacer 306 or the like. Alternatively, the vacuum suction table 4 can be rotated or otherwise adjusted so that the load support surface S1 is parallel to the polishing pad surface 50S. After alignment, the operator inputs the set value of the pressing load via the input unit 520 as needed, and operates the polishing heads 30 by clicking the first screen element 610 (Figure 10) of the load adjustment screen 600. When the load-bearing surface S1 is pressed, the force gauge 301 of the load measuring device 200 measures the load.

[0048] Returning to Figure 11, step S102 is performed after step S101. In step S102, the communication control unit 551 controls the communication unit 510 and acquires measurement data via the communication unit 210 of the load measuring device 200. The communication control unit 551 stores the acquired measurement data in the storage unit 530 or the like.

[0049] Step S103 is performed after step S102. In step S103, the adjustment value calculation unit 552 calculates an adjustment value from the measurement data and setting parameters stored in the storage unit 530, etc.

[0050] Step S104 is performed after step S103. In step S104, the first determination unit 553 determines whether the adjustment value is an appropriate value. If the adjustment value is an appropriate value, the first determination unit 553 makes a positive determination for step S104 and step S107 is started. If the adjustment value is not an appropriate value, the first determination unit 553 makes a negative determination for step S104 and step S105 is started.

[0051] In step S105, the control unit 550 determines whether the number of load measurements performed is less than a predetermined threshold. This determination is made to prevent undesirable load adjustments from being repeated. If the number of measurements is less than the threshold, the control unit 550 affirms step S105 and step S101 begins. If the number of measurements is equal to or greater than the threshold, the control unit 550 negates step S105 and step S106 begins. Note that the determination is made based on a threshold, and is not limited to "less than the threshold" but can also be "less than or equal to the threshold". The same applies to determinations using the following thresholds.

[0052] In step S106, the display control unit 554 displays an error on the display unit 540 indicating that the load adjustment failed. The method of displaying the error is not particularly limited, and a message or graphic can be displayed in a pop-up window on the display screen as appropriate. After step S106, the process is terminated.

[0053] In step S107, the control unit 550 updates the setting parameters with the adjustment value. After step S107, the process is completed. After the load adjustment, the device control unit 555 performs the pressing operation with the setting parameters updated by the adjustment value.

[0054] In the load adjustment system 10 and load adjustment method of this embodiment, the communication control unit 551 acquires measurement data obtained from the load measuring device 200 that measures the pressing load from the polishing head 30, the adjustment value calculation unit 552 calculates an adjustment value for adjusting the pressing load based on the measurement data and the setting parameters set for the polishing head 30, and the device control unit 555 controls the pressing operation of the polishing head 30 based on the adjustment value. As a result, there is no need for the operator to visually read information about the pressing load and input it into the device, which reduces working time and man-hours and allows for efficient load adjustment. In addition, it suppresses errors caused by manual input of numerical values ​​and allows for more accurate adjustment work.

[0055] Alternatively, the adjustment value calculation unit 552 may be configured to update the setting parameters based on the adjustment value calculated in step S103. In this case, the first determination in step S104 determines whether the updated setting parameters (updated parameters) are appropriate values. The setting parameters before adjustment are kept in the storage unit 530 or the like until the updated parameters are determined to be appropriate values ​​in step S104.

[0056] The following modifications are also within the scope of the present invention and can be combined with the embodiments described above or other modifications. In the following modifications, parts and the like that which have the same structure and function as those in the embodiments described above will be referred to by the same reference numerals, and their descriptions will be omitted as appropriate.

[0057] (Variation 1) In the above-described embodiment, the control unit may perform a second load measurement based on the adjustment value, and then perform a second determination to determine whether the pressing load of the polishing head 30 obtained from the second load measurement is an appropriate value.

[0058] Figure 13 is a conceptual diagram showing the configuration of the load adjustment system of this modified example. The load adjustment system 10A has a configuration similar to the load adjustment system 10 of the above-described embodiment, but differs from the load adjustment system 10 in that it includes a second determination unit 553A instead of a first determination unit 553. The load adjustment system 10A includes an information processing device 500A, and the information processing device 500A includes a control unit 550A which includes the second determination unit 553A.

[0059] The second determination unit 553A performs a second determination. In the second determination, it is determined whether the measured value of the pressing load in the repeated load measurement performed using the adjustment value is an appropriate value. Second information indicating the range of the appropriate value for the second determination is stored in advance in the storage unit 530, etc. The second information is, for example, a numerical value that defines a numerical range indicating what percentage of the set value the appropriate value for the second determination is. This numerical range is set based on past data or theory, etc. For example, this numerical range can be set to 90% to 110%, etc., based on the accuracy of the polishing device 100 or the load measuring device 200, or the accuracy required for load adjustment, etc.

[0060] Figure 14 is a flowchart showing the flow of the load adjustment method in this modified example. This load adjustment method is performed by the control unit 550A. Steps S201 to S203 are the same as steps S101 to S103 in the flowchart of Figure 11, so their explanation is omitted.

[0061] Step S204 is performed after step S203. In step S204, the control unit 550A performs another load measurement using the adjustment value obtained in step S203. The control unit 550A controls the pressing operation of the polishing device 100 based on the load setting value input from the input unit 520 or stored in the memory unit 530, etc., and the adjustment value. The load setting value may be the same as or different from the load setting value in step S201.

[0062] Step S205 is performed after step S204. In step S205, the communication control unit 551 controls the communication unit 510 to acquire measurement data for the load measurement again via the communication unit 210 of the load measuring device 200. The communication control unit 551 stores the acquired measurement data in the storage unit 530 or the like.

[0063] Step S206 is performed after step S205. In step S206, the second determination unit 553A determines whether the load measured in the second load measurement is an appropriate value. If the load is an appropriate value, the second determination unit 553A makes an affirmative judgment in step S206 and step S209 is started. If the load is not an appropriate value, the second determination unit 553A makes a negative judgment in step S206 and step S207 is started.

[0064] In step S207, the control unit 550A determines whether the number of load measurements or load adjustments performed is less than a predetermined threshold. If the number is less than the threshold, the control unit 550A affirms step S207 and step S201 begins. If the number is equal to or greater than the threshold, the control unit 550A negates step S207 and step S208 begins. Steps S208 and S209 are the same as steps S106 and S107 in the flowchart of Figure 11, respectively, so their explanation is omitted. After steps S208 and S209, the process ends.

[0065] Alternatively, the adjustment value calculation unit 552 may be configured to update the setting parameters based on the adjustment value calculated in step S203. In this case, the load measurement in step S204 will be performed based on the updated parameters. The setting parameters before adjustment are kept in the storage unit 530 or the like until the measured load in step S206 is determined to be an appropriate value.

[0066] In this modified load adjustment system 10A, the second determination unit 553A determines whether the pressing load of the polishing head 30 obtained by a second load measurement based on the adjustment value or updated parameters is an appropriate value. This allows for actual load measurement to be performed and confirmation that the set parameters are updated to appropriate values.

[0067] (Modification 2) In the above embodiment, before load measurement, an image including the load support member 303 and the polishing head 30 may be taken, and based on this image, it may be determined whether the load support surface S1 and the polishing pad surface 50S that presses against the load support surface S1 are sufficiently parallel. Hereinafter, this image will be referred to as the determination image, and this determination will be referred to as the third determination.

[0068] Figure 15 is a schematic side cross-sectional view of the load measuring device 201 in this modified example. The load measuring device 201 comprises an imaging unit 230 and an imaging unit support member 240. The imaging unit 230 is equipped with an imaging device such as a camera. In this modified example, the imaging unit 230 is configured to take images vertically downward to acquire images of the load support member 303 and the polishing head 30. However, the imaging unit 230 may take images from any direction as long as the parallel index described later can be calculated. Also, the material and shape of the imaging unit support member 240 are not particularly limited as long as the imaging unit 230 can be fixed.

[0069] Figure 16 shows an example of a judgment image captured by the imaging unit 230. In the example of Figure 16, the judgment image includes the pad 305 of the load support member 303 and the guide roller 46 located above the polishing pad 50 (see Figure 4). Preferably, the judgment image includes an image of the area near where the load support member 303 and the polishing head 30 come into contact via the polishing tape 23 (Figure 4). However, the object to be photographed is not particularly limited as long as the orientation of the load measuring device 200 and the polishing head 30 can be calculated.

[0070] Figure 17 is a conceptual diagram showing the configuration of the load adjustment system 10B of this modified example. The load adjustment system 10B has a similar configuration to the load adjustment system 10 of the above-described embodiment, but differs from the load adjustment system 10 in that it includes an imaging unit 230 and a third determination unit 553B. The load adjustment system 10B includes a load measuring device 201 and an information processing device 500B. The load measuring device 201 includes an imaging unit 230. The information processing device 500B includes a control unit 550B which includes a third determination unit 553B.

[0071] The third determination unit 553B performs a third determination. First, the communication control unit 551 controls the communication unit 210 of the information processing device 500B to acquire a determination image via the communication unit 210 of the load measuring device 201. From the determination image, the third determination unit 553B calculates an index indicating the degree to which the load support surface S1 and the polishing pad surface 50S are parallel through image processing. This index is called the parallelism index. Examples of the parallelism index include the amount of misalignment or the degree of parallelism. The amount of misalignment is the amount of misalignment between the orientation of the load support surface S1 and the orientation of the polishing pad surface 50S. Examples of the amount of misalignment include the angle between the normal of the load support surface S1 and the normal of the polishing pad surface 50S, or the angle between the load support surface S1 and the polishing pad surface 50S in a predetermined cross-section. The method for calculating the amount of misalignment is not particularly limited. For example, the shape of the contour of the part of the load support member 303 and the polishing head 30 that is visible in the determination image is stored in advance as shape data in the storage unit 530 or the like. The third determination unit 553B extracts the contours of the load support member 303 and the polishing head 30 from the determination image by extracting feature points, etc. The third determination unit 553B can analyze the extracted contours based on shape data and calculate the amount of displacement between the load support surface S1 and the polishing pad surface 50S. In the case of parallelism, one surface of the load support surface S1 or the polishing pad surface 50S can be approximated as a reference surface to determine the degree of inclination of the other surface. Note that a mark with a characteristic shape may be formed on the load support member 303 or the polishing head 30 to facilitate the above image processing. stomach.

[0072] The third information, which indicates the appropriate range of values ​​for the parallel indicator in the third judgment, is pre-stored in the memory unit 530, etc. The third information can be numerical values ​​such as upper and lower limits indicating the allowable range of the parallel indicator. The appropriate value for the third judgment is set based on past data or theory, etc. For example, the appropriate value can be determined based on the accuracy of the polishing device 100 or the load measuring device 200, or the accuracy required for load adjustment, etc.

[0073] Figure 18 is a flowchart showing the flow of the load adjustment method in this modified example. This load adjustment method is performed by the control unit 550B.

[0074] In step S301, the communication control unit 551 acquires a determination image including the load support member 303 and the polishing head 30 from the load measuring device 201. After step S301, step S302 is performed. In step S302, the third determination unit 553B calculates the parallel index.

[0075] In step S303, the third determination unit 553B performs a third determination to determine whether the parallel indicator is within the acceptable range. If the parallel indicator is within the acceptable range, the third determination unit 553B makes a positive determination for step S303, and step S101 (Figure 11) begins. If the parallel indicator is not within the acceptable range, the third determination unit 553B makes a negative determination for step S303, and step S304 begins.

[0076] In step S304, the display control unit 554 displays the parallel indicator on the display unit 540. After the user adjusts the orientation of the load support member 303 or the polishing head 30 so that the parallel indicator is within an acceptable range based on the displayed parallel indicator, step S301 may be started again.

[0077] In this modified load adjustment system 10B, the imaging unit 230 captures a judgment image including the load support member 303 and the polishing head 30 from a predetermined direction before load measurement. The third judgment unit 553B performs a third judgment based on the judgment image to determine whether the opposing surfaces of the load support member 303 (referred to as the first surface) and the surface of the polishing head 30 (referred to as the second surface) are sufficiently parallel. If the third judgment determines that the parallel index of the first and second surfaces is at an appropriate value, the device control unit 555 executes a pressing operation with the polishing head 30. If the parallel index is determined not to be at an appropriate value, the display control unit 554 displays the parallel index on the display unit 540. This allows for more accurate information about the orientation of the load support member 303 and the polishing head 30, enabling more accurate load adjustment.

[0078] The above-described embodiments, modified example 1, and modified example 2 can be combined as appropriate. For example, the control unit may include any two or more combinations of the first determination unit 553, the second determination unit 553A, and the third determination unit 553B.

[0079] The embodiment described above can also be described in the following form. [Form 1] According to Form 1, a load adjustment system is proposed, which comprises a bevel polishing device equipped with a polishing head for polishing the bevel portion of a substrate, and a control device, the control device acquires measurement data obtained from a load measuring device that measures the pressing load from the polishing head, calculates an adjustment value for adjusting the pressing load based on the measurement data and setting parameters set for the polishing head, and controls the pressing operation of the polishing head based on the adjustment value. According to Form 1, the load adjustment of the bevel polishing device can be performed efficiently.

[0080] [Form 2] According to Form 2, in Form 1, the control device generates updated parameters by updating the setting parameters with the adjustment values. According to Form 2, the setting parameters of the bevel polishing device can be updated efficiently.

[0081] [Embodiment 3] According to Embodiment 3, in Embodiment 2, the control device performs a first determination to determine whether the adjustment value or the update parameter is an appropriate value. According to Embodiment 3, it is possible to suppress the setting of undesirable values ​​for the setting parameters in the bevel polishing apparatus.

[0082] [Form 4] According to Form 4, in Form 2 or 3, the control device performs a second determination to determine whether the pressing load of the polishing head obtained from the repeated measurement based on the adjustment value or the updated parameter is an appropriate value. According to Form 4, it is possible to confirm whether an appropriate pressing load is achieved by updating the setting parameter based on the actual load measurement.

[0083] [Form 5] According to Form 5, in Form 4, the control device makes the second determination based on whether the pressing load of the polishing head obtained from the repeated measurement based on the adjustment value or the updated parameter falls within a predetermined numerical range. According to Form 5, the determination can be made more reliably based on the set numerical range.

[0084] [Embodiment 6] According to Embodiment 6, in Embodiments 1 to 5, the control device displays information regarding the polishing head on the display device, and the display shows at least one of the information based on the measurement data and the adjustment value. According to Embodiment 6, information regarding load adjustment can be conveyed to the user in an easy-to-understand manner.

[0085] [Embodiment 7] According to Embodiment 7, in Embodiments 1 to 6, the setting parameter is a parameter for operating the polishing head to achieve a set pressing load value on the polishing head, and the control device calculates the adjustment value for changing the setting parameter to achieve a set pressing load value on the polishing head more accurately, based on a set of different pressing load settings and a set of corresponding pressing load measurements in the measurement. According to Embodiment 7, load adjustment of the bevel polishing device can be performed more accurately.

[0086] [Embodiment 8] According to Embodiment 8, in Embodiments 1 to 7, the load adjustment system further comprises an imaging device and a load measuring device, the load measuring device includes a support member that contacts the polishing head and receives the pressing load, the imaging device takes an image of the support member and the polishing head from a predetermined direction before the measurement, the control device performs a third determination based on the image to determine whether the first surface of the opposing support member and the second surface of the polishing head are sufficiently parallel, if the third determination determines that the index indicating the degree of parallelism between the first surface and the second surface is an appropriate value, the pressing operation by the polishing head is performed, and if the index is determined not to be an appropriate value, the index is displayed on the display device. According to Embodiment 8, it is possible to prevent load measurement when the position of the load measuring device and the polishing head is not appropriate and to perform load adjustment more accurately.

[0087] [Embodiment 9] According to Embodiment 9, a load adjustment method for a bevel polishing apparatus is proposed, in which a control device that controls a bevel polishing apparatus equipped with a polishing head for polishing the bevel portion of a substrate acquires measurement data obtained from a load measuring device that measures the pressing load from the polishing head, calculates an adjustment value for adjusting the pressing load based on the measurement data and setting parameters set for the polishing head, and controls the pressing operation of the polishing head based on the adjustment value. According to Embodiment 9, the load adjustment of the bevel polishing apparatus can be performed efficiently.

[0088] Although several embodiments of the present invention have been described above, the embodiments described above are for the purpose of facilitating understanding of the present invention and do not limit it. The present invention can be modified and improved without departing from its spirit, and of course, equivalents thereof are included in the present invention. Furthermore, any combination or omission of the components described in the claims and specification is possible to the extent that at least some of the above-mentioned problems can be solved or at least some of the effects can be achieved. [Explanation of symbols]

[0089] 3. Rotation holding mechanism 4. Vacuum suction table 1A, 1B, 1C, 1D Polishing head assemblies 2A, 2B, 2C, 2D Tape supply and retrieval mechanism 10, 10A, 10B Load Adjustment System 20 Bulkhead 21 Polishing room 23 Abrasive Tape 30 polishing heads 41 Pressurization mechanism 46, 47 Guide rollers 50 polishing pads 50S polishing pad surface 52 Air Cylinder 53 Air Piping 54 Electro-pneumatic regulator 55 Air supply source 100 Polishing equipment 200,201 Load measuring device 210 Communication unit of load measuring device 220 Measurement section of load measuring device 230 Imaging Unit 240 Imaging unit support member 300 Load measuring device main unit 301 Force Gauge 302 Measurement axis 303 Load-bearing member 304 Bracket 304a Mounting section 304b Load support section 305 pad 400 Base Plate 500, 500A, 500B Information Processing Device 510 Communication section of information processing equipment 520 Input section 530 Storage section 540 Display section 550, 550A, 550B Control Unit 551 Communication Control Unit 552 Adjustment Value Control Unit 553 1st Judgment Department 553A 2nd judgment section 553B 3rd judgment section 554 Display Control Unit 555 Device Control Unit 600 Load adjustment screen B Bevel section Cr, Ct axis M3, M4 motors S1 Load bearing surface W board

Claims

1. A bevel polishing apparatus equipped with a polishing head for polishing the bevel portion of a substrate, and a control device, The control device is From a load measuring device that measures the pressing load from the polishing head, the measurement data obtained from the measurement is acquired. Based on the measurement data and the setting parameters for operating the polishing head to achieve the set pressing load value for the polishing head, the updated value of the setting parameter is calculated. Set the aforementioned setting parameter to the aforementioned update value, A load adjustment system that controls the pressing action of the polishing head based on the updated value.

2. The load adjustment system according to claim 1, wherein the control device performs a first determination to determine whether the updated value is an appropriate value.

3. The load adjustment system according to claim 1 or 2, wherein the control device performs a second determination to determine whether the pressing load of the polishing head obtained by the repeated measurement based on the updated value is an appropriate value.

4. The load adjustment system according to claim 3, wherein the control device performs the second determination based on whether the pressing load of the polishing head obtained by the subsequent measurement based on the updated value falls within a predetermined numerical range.

5. The control device displays information regarding the polishing head on the display device, The load adjustment system according to any one of claims 1 to 4, wherein the display shows at least one of the information based on the measurement data and the updated value.

6. The control device, based on a plurality of different pressing load setting values ​​and a plurality of corresponding measured values ​​in the measurement, sets the setting parameter to the polishing head more accurately. A load adjustment system according to any one of claims 1 to 5, comprising calculating the update value for changing the setting parameter to achieve a pressure load value.

7. The load adjustment system further comprises an imaging device and a load measuring device, The load measuring device includes a support member that contacts the polishing head and receives the pressing load, The imaging device, before the measurement, captures an image including the support member and the polishing head from a predetermined direction. The control device is Based on the above image, a third determination is made to determine whether the first surface of the opposing support member and the second surface of the polishing head are sufficiently parallel. In the third determination, if the index indicating the degree to which the first surface and the second surface are parallel is determined to be at an appropriate value, the pressing operation with the polishing head is executed. A load adjustment system according to any one of claims 1 to 6, wherein if it is determined that the index is not of an appropriate value, the index is displayed on a display device.

8. A method for adjusting the load of a bevel polishing apparatus, A control device for controlling a bevel polishing apparatus equipped with a polishing head for polishing the bevel portion of a circuit board, The load measuring device that measures the pressing load from the polishing head acquires the measurement data obtained from the measurement, Based on the measurement data and the setting parameters for operating the polishing head to achieve the set pressing load value for the polishing head, the updated value of the setting parameter is calculated. The setting parameter is set to the updated value, A load adjustment method comprising controlling the pressing operation of the polishing head based on the updated value.

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