Mass spectrometer and method for disassembling a mass spectrometer

Abstract

The present invention makes it possible to avoid damaging an optical element during maintenance or component replacement work of a mass spectrometer, while enabling easy maintenance work and the like. The present disclosure proposes a mass spectrometer which is provided with: a first vacuum chamber which houses a first multipolar electrode that transports sample ions ionized at an ion source; a second vacuum chamber which is adjacent to the first vacuum chamber and houses a second multipolar electrode that transports the sample ions output from the first vacuum chamber; a latter-stage vacuum chamber which houses at least a third multipolar electrode that transports the sample ions output from the second vacuum chamber; and a detector which is provided in the succeeding stage of the latter-stage vacuum chamber so as to detect the sample ions. This mass spectrometer is configured such that the first vacuum chamber can be separated from the second vacuum chamber, which is in the succeeding stage of the first vacuum chamber (see Fig. 2).

Description

Technical Field

[0001] The present disclosure relates to a mass spectrometer and a method for disassembling the mass spectrometer.

Background Art

[0002] When analyzing a sample, a mass spectrometer ionizes the sample to be analyzed and analyzes the ions according to the mass-to-charge ratio. Generally, a mass spectrometer includes an ion source that ionizes a sample, a mass analysis unit that separates ions according to the mass-to-charge ratio, and a detection unit that detects the amount of ions that have passed through the mass analysis unit.

[0003] Among the components of a mass spectrometer, the mass analysis unit is housed in a vacuum chamber, but when performing maintenance or replacing parts, the mass analysis unit may be taken out of the vacuum chamber.

[0004] Regarding the removal of the mass analysis unit during the above-mentioned maintenance, for example, Patent Document 1 discloses a configuration in which an ion optical element (ion lens) is detached from the side of the device. In addition, when performing maintenance such as cleaning various ion optical elements disposed in an intermediate vacuum chamber, Patent Document 2 discloses a configuration in which the ion optical elements are not removed from the device one by one, but are removed from the device integrally as a unit.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0006] However, in the technology described in Patent Document 1, it is difficult to secure sufficient working space on the side of the second vacuum chamber when removing the second multipole electrode (optical element in the second vacuum chamber: Q0), which is located downstream of the first multipole electrode (optical element in the first vacuum chamber: Q00). This is because several other analytical devices (e.g., liquid chromatographs for sample preparation) are fixedly positioned on the side of the second vacuum chamber, resulting in many spatial constraints (design constraints). Furthermore, in the technology described in Patent Document 2, there is a risk of damaging the optical element by bumping it against the wall of the first vacuum chamber when removing the unit.

[0007] In light of these circumstances, this disclosure provides a technology that avoids damage to optical elements during maintenance and parts replacement work on mass spectrometers, and enables easy maintenance and other operations. [Means for solving the problem]

[0008] To solve the above problems, this disclosure proposes a mass spectrometer comprising: a first vacuum chamber housing a first multipole electrode for transporting sample ions ionized by an ion source; a second vacuum chamber adjacent to the first vacuum chamber and housing a second multipole electrode for transporting sample ions output from the first vacuum chamber; a subsequent vacuum chamber housing at least a third multipole electrode for transporting sample ions output from the second vacuum chamber; and a detector provided downstream of the subsequent vacuum chamber for detecting sample ions, wherein the first vacuum chamber is configured to be separable from the subsequent second vacuum chamber.

[0009] Further features relating to this disclosure will become apparent from the description herein and the accompanying drawings. Furthermore, aspects of this disclosure are achieved and realized by elements and various combinations of elements and the modes of the claims described herein in detail thereafter. The descriptions herein are typical examples only and do not limit in any way the claims or applications of this disclosure. [Effects of the Invention]

[0010] The technology disclosed herein makes it possible to avoid damaging optical elements during maintenance and parts replacement of a mass spectrometer, and to easily disassemble the mass spectrometer and perform maintenance and other operations. [Brief explanation of the drawing]

[0011] [Figure 1] This figure shows an example of the external configuration of the mass spectrometer 100 according to the embodiment of this disclosure. [Figure 2] This diagram illustrates the procedure for removing each component of the mass spectrometer 100 (such as the first vacuum chamber 103 and the second vacuum chamber 104). [Figure 3A] This figure shows an example of the cross-sectional configuration (basic configuration example) of each component of the mass spectrometer 100 (from the ion source 101 to the downstream vacuum chamber 105) along the ion optical axis. [Figure 3B] This figure shows an example (modified) of the cross-sectional configuration of each component of the mass spectrometer 100 (from the ion source 101 to the downstream vacuum chamber 105) along the ion optical axis. [Figure 4A] This figure shows an example of the configuration of the back surface (the surface facing the first vacuum chamber 103) of the ion source side partition wall 102. [Figure 4B] This figure shows an example of the configuration of the front surface of the first vacuum chamber 103 (the surface facing the ion source side partition wall 102). [Figure 4C] This figure shows an example of the configuration of the rear surface of the first vacuum chamber 103 (the surface facing the front surface of the second vacuum chamber 104). [Figure 4D] This figure shows an example of the configuration of the front surface of the second vacuum chamber 104 (the surface facing the back surface of the first vacuum chamber 103). [Figure 4E] This figure shows an example of the configuration of the rear surface of the second vacuum chamber 104 (the surface facing the front surface of the subsequent vacuum chamber 105). [Figure 4F] This figure shows an example of the configuration of the front surface of the downstream vacuum chamber 105 (the surface facing the rear surface of the second vacuum chamber 104). [Figure 5] This diagram illustrates the connection between the first vacuum chamber 103 and the second vacuum chamber 104. [Modes for carrying out the invention]

[0012] Embodiments of the present disclosure relate to a technique for reducing the restriction of a working space by a vacuum chamber wall surface while making it accessible from a common working space (ion incident side in the ion optical axis direction) for an ion source, a first vacuum chamber, and a second vacuum chamber in a mass spectrometer.

[0013] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. In the accompanying drawings, functionally identical elements may sometimes be denoted by the same number. Note that the accompanying drawings show specific embodiments in accordance with the principles of the present disclosure, but these are for the purpose of understanding the present disclosure and are not used to limit the interpretation of the present disclosure in any way.

[0014] In addition, in this embodiment, although the description is made in sufficient detail for those skilled in the art to implement the present disclosure, other implementations and forms are possible, and it is necessary to understand that changes in configuration and structure and replacement of various elements are possible without departing from the scope and spirit of the technical idea of the present disclosure. Therefore, the following description should not be construed as being limited thereto.

[0015] <Example of the external configuration of the mass spectrometer 100> FIG. 1 is a diagram showing an example of the external configuration of a mass spectrometer 100 according to an embodiment of the present disclosure. The mass spectrometer 100 includes an ion source side partition wall 102 to which an ion source 101 is attached, a first vacuum chamber 103, a second vacuum chamber 104, a subsequent stage vacuum chamber 105, a turbo molecular pump 106 that can rotate about a rotation axis 1061 (the front part can be lifted) and evacuates the second vacuum chamber 104 and the subsequent stage vacuum chamber 105, a first support base 107 that supports the first vacuum chamber 103, a second support base 108 that supports the subsequent stage vacuum chamber 105, and a detector 109.

[0016] The ion source side partition wall 102 has pores (see FIG. 4A) and is detachable from the first vacuum chamber 103. The detachable structure between the ion source side partition wall 102 and the first vacuum chamber 103 will be described later.

[0017] The first vacuum chamber 103 houses the ion lens (first multipole electrode Q00). The ion source 101 side (upstream of the mass spectrometer 100) is detachably connected to the ion source side partition wall 102, and the detector 109 side (downstream of the mass spectrometer 100) is detachably connected to the front of the second vacuum chamber 104 by a joint 110. The detachable structure between the first vacuum chamber 103 and the second vacuum chamber 104 will be described later. The inside of the first vacuum chamber 103 is maintained at an atmospheric pressure of several hundred Pascals (e.g., 200 Pascals) by an external vacuum pump (not shown).

[0018] The second vacuum chamber 104 houses the ion lens (second multipole electrode Q0), and its ion source 101 side (upstream side of the mass spectrometer 100) is detachably connected to the rear of the first vacuum chamber 103 by a joint 110, while its detector 109 side (downstream side of the mass spectrometer 100) is detachably connected to the front of the downstream vacuum chamber 105. The detachable structure between the second vacuum chamber 104 and the downstream vacuum chamber 105 will be described later. Furthermore, the turbomolecular pump 106 is detachably connected (engaged) to a vacuum exhaust hole 1042 (see Figure 2) provided on the top surface (top surface) of the second vacuum chamber 104 (see Figure 2). In this case, an O-ring may be attached to the periphery of the vacuum exhaust hole 1042 to improve the degree of contact between the top surface (top surface) of the second vacuum chamber 104 and the suction port (not shown) of the turbomolecular pump 106. Furthermore, the inside of the second vacuum chamber 104 is maintained at an atmospheric pressure of a few pascals (for example, 3 pascals) by the turbomolecular pump 106.

[0019] The downstream vacuum chamber 105 houses the ion lens (multipole electrodes Q1 to Q3), and its ion source 101 side (upstream side of the mass spectrometer 100) is detachably connected to the rear of the second vacuum chamber 104 by a joint 110. Furthermore, a turbomolecular pump 106 is connected to a vacuum evacuation hole (not shown) provided on the top surface of the downstream vacuum chamber 105 (see Figure 2). The interior of the downstream vacuum chamber 105 is evacuated by the turbomolecular pump 106. -3 The atmospheric pressure is maintained at approximately 10°C. In the mass spectrometer 100, the atmospheric pressure (atmospheric pressure at the location of the ion source 101) is maintained at approximately 10°C. -3Because it is not possible to achieve a vacuum level immediately, differential pumping is performed to gradually achieve a vacuum starting from several hundred Pascals (inside the first vacuum chamber 103).

[0020] <Procedure for removing each component> Figure 2 is a diagram illustrating the procedure for removing each component of the mass spectrometer 100 (such as the first vacuum chamber 103 and the second vacuum chamber 104).

[0021] (I) For example, when performing maintenance (cleaning), the ion source 101 is first removed from the mass spectrometer 100 (see Figure 1) with all its components attached.

[0022] (II) Next, the ion source side partition wall 102 is removed, and the front of the first vacuum chamber 103 is opened. For example, the ion source side partition wall 102 is attached to the front of the first vacuum chamber 103 by fitting a connecting projection 1032 provided on the first vacuum chamber 103 into a projection receiving hole 1021 (see Figure 4A) provided at a corresponding position on the ion source side partition wall 102. Therefore, by pulling the ion source side partition wall 102 toward the ion source 101, the fitting is released, and the ion source side partition wall 102 can be removed from the first vacuum chamber 103.

[0023] In Figure 2, protrusions are provided at the four corners of the opening, but more protrusions may be provided. Also, the connection between the ion source side partition wall 102 and the first vacuum chamber 103 may be achieved by a joint 110, similar to the connection method between the rear wall of the first vacuum chamber 103 and the front part (opening) of the second vacuum chamber. When the ion source side partition wall 102 is removed, the ion lens (first multipole electrode Q00) can be accessed from the front of the first vacuum chamber 103. Therefore, the ion lens (first multipole electrode Q00) can be easily cleaned.

[0024] (III) Next, the connection (fixing) between the first vacuum chamber 103 and the second vacuum chamber 104 by the joint 110 is released, the first vacuum chamber 103 is removed from the second vacuum chamber 104, and the front of the second vacuum chamber 104 is opened. This allows the first vacuum chamber 103 to be completely separated from the mass spectrometer 100, so that the first vacuum chamber 103 can be moved to a maintenance location (cleaning location) separate from where the mass spectrometer 100 is installed, and the first vacuum chamber 103 and the ion lens 1031 can be maintained (cleaning with a cleaning agent (organic solvent), replacement of parts, etc.).

[0025] Furthermore, by separating the first vacuum chamber 103 from the mass spectrometer 100, the ion lens (second multipole electrode Q0) can be accessed from the front of the second vacuum chamber 104. This allows for simple cleaning of the ion lens (second multipole electrode Q0).

[0026] (IV) Furthermore, by rotating the turbomolecular pump 106 upward around the rotation axis 1061 (by lifting the ion source end of the turbomolecular pump 106) and tilting it, the engagement of the turbomolecular pump 106 with the vacuum exhaust hole 1042 of the second vacuum chamber 104 and with the vacuum exhaust hole (not shown) of the downstream vacuum chamber 105 is disengaged.

[0027] (V) The connection (fixing) between the second vacuum chamber 104 and the subsequent vacuum chamber 105 by the joint 110 is released, the second vacuum chamber 104 is removed from the subsequent vacuum chamber 105, and the front of the subsequent vacuum chamber 105 is opened. This allows the second vacuum chamber 104 to be completely separated from the mass spectrometer 100, so that the second vacuum chamber 104 can be moved to a maintenance location (cleaning location) separate from where the mass spectrometer 100 is mounted, and the second vacuum chamber 104 can be maintained (cleaned with a cleaning agent (organic solvent) and parts replaced). In addition, the ion lens (multipole electrodes Q1 to Q3) can be accessed from the front (opening) of the subsequent vacuum chamber 105 and removed from the housing of the subsequent vacuum chamber 105. Therefore, the ion lens (multipole electrodes Q1 to Q3) can be moved to a maintenance location (cleaning location) separate from where the mass spectrometer 100 is located, and the ion lens can be maintained (cleaned with a cleaning agent (organic solvent) or parts replaced).

[0028] The components of the mass spectrometer 100 that are located closer to the ion source 101 are more prone to contamination. Therefore, components closer to the ion source 101 are maintained (cleaned) more frequently. For example, the ion source side partition 102 and the first vacuum chamber 103 are separated from the mass spectrometer 100 and maintained once every three months. The second vacuum chamber 104 is separated from the mass spectrometer 100 and maintained once a year. Furthermore, the multipole electrodes Q1 to Q3 housed in the downstream vacuum chamber 105 are removed from the downstream vacuum chamber 105 and maintained once every seven years. Thus, the components up to the first vacuum chamber 103 are separated from the mass spectrometer 100 once every three months, and the components up to the second vacuum chamber 104 are separated from the mass spectrometer 100 once a year.

[0029] <Example of cross-sectional configuration of each component of the mass spectrometer 100> Figures 3A and 3B show examples of cross-sectional configurations of each component of the mass spectrometer 100 (from the ion source 101 to the downstream vacuum chamber 105) along the ion optical axis, respectively. Figure 3A shows a basic configuration example, and Figure 3B shows a modified example.

[0030] (i) Basic configuration example As shown in Figure 3A, the first vacuum chamber 103 and the second vacuum chamber 104 have an open structure on the front (upstream direction: ion source side) and a structure with only ion passage holes on the back (downstream direction: detector side), and their cross-section along the ion optical axis is approximately U-shaped. The downstream vacuum chamber 105 has an open structure on the front and a completely closed structure on the back, and its cross-section along the ion optical axis is also U-shaped.

[0031] Regarding the first vacuum chamber 103, the ion source side partition wall 102 covers the opening at its front. Furthermore, regarding the second vacuum chamber 104, the rear wall surface of the first vacuum chamber 103 covers the opening at its front. Finally, regarding the subsequent vacuum chamber 105, the rear wall surface of the second vacuum chamber 104 covers the opening at its front.

[0032] In this way, the first vacuum chamber 103 and the second vacuum chamber 104 can be completely separated from the mass spectrometer 100, making it easier to work on components closer to the ion source 101, which have shorter maintenance cycles. Furthermore, since the back wall of the upstream component (e.g., the first vacuum chamber 103) covers the front opening of the downstream component (e.g., the second vacuum chamber 104), the number of parts is reduced, and the separation (disassembly) of each component becomes easier.

[0033] (ii) Variations As shown in Figure 3B, the first vacuum chamber 103' and the second vacuum chamber 104' may be configured in a cylindrical shape. In this case, in addition to the ion source side partition wall 102, a partition wall 102' covering the back of the first vacuum chamber 103' and the front of the second vacuum chamber 104', and a partition wall 102'' covering the back of the second vacuum chamber 104' and the front of the subsequent vacuum chamber 105 are provided. According to this modification, the number of parts increases compared to the basic configuration example (Figure 3A), so the separation (disassembly) of each component from the mass spectrometer 100 becomes more complicated, but on the other hand, it becomes possible to carefully maintain (clean) even the smallest details of each component.

[0034] <Examples of rear and front configurations for each component> Figures 4A to 4F show examples of the rear and front configurations of each component (from the ion source side partition wall 102 to the downstream vacuum chamber 105). Figure 4A shows an example of the configuration of the rear side (facing the first vacuum chamber 103) of the ion source side partition wall 102. Figure 4B shows an example of the configuration of the front side (facing the ion source side partition wall 102) of the first vacuum chamber 103. Figure 4C shows an example of the configuration of the rear side (facing the front side of the second vacuum chamber 104) of the first vacuum chamber 103. Figure 4D shows an example of the configuration of the front side (facing the rear side of the first vacuum chamber 103) of the second vacuum chamber 104. Figure 4E shows an example of the configuration of the rear side (facing the front side of the downstream vacuum chamber 105) of the second vacuum chamber 104. Figure 4F shows an example of the configuration of the front side (facing the rear side of the second vacuum chamber 104) of the downstream vacuum chamber 105.

[0035] On the back surface of the ion source side partition wall 102, you can see pores 1023 through which ions emitted from the ion source 101 pass, and multiple projection receiving holes 1021 into which multiple connecting projections 1032 of the first vacuum chamber 103 are fitted (see Figure 4A).

[0036] Looking at the front of the first vacuum chamber 103, one can see the ion lens (multipole electrode Q00) 1031 housed in the lens housing 1034 and the multiple connecting protrusions 1032 provided on the housing frame 1033 (see Figure 4B). Ions pass through the central space surrounded by the multipole electrode Q00 of the ion lens 1031 (in Figure 4B, a quadruple electrode is shown as an example).

[0037] Looking at the back of the first vacuum chamber 103, we can see mounting tabs 1103 for the joint 110, which are provided on the wall surface (at the four corners of the wall in Figure 4C), as well as the ion lens hole 1035 and the ion lens (multipole electrode Q00: quadrupole electrode) 1031 (see Figure 4C). The ion lens 1031 is positioned to be in contact with the inner circumference of the ion lens hole 1035. Ions that pass through the central space surrounded by the multipole electrode Q00 (quadrupole electrode) of the ion lens 1031 are then guided to the central space of the ion lens 1041 in the second vacuum chamber 104.

[0038] Looking at the front of the second vacuum chamber 104, one can see the ion lens (multipole electrode Q0) 1041 housed in the lens housing 1044, and the mounting ears 1103 for the joint 110, which are provided on the wall surface (at the four corners of the wall in Figure 4D) (see Figure 4D). Ions pass through the central space surrounded by the multipole electrode Q0 (quadrupole electrode) of the ion lens 1041.

[0039] Looking at the back of the second vacuum chamber 104, we can see mounting tabs 1103 for the joint 110, which are provided on the wall surface (at the four corners of the wall in Figure 4E), as well as the ion lens hole 1045 and the ion lens (multipole electrode Q00: quadrupole electrode) 1041 (see Figure 4E). The ion lens 1041 is positioned to be in contact with the inner circumference of the ion lens hole 1045. Ions that pass through the central space surrounded by the multipole electrode Q0 (quadrupole electrode) of the ion lens 1031 are then guided to the central space of the ion lens 1051 in the subsequent vacuum chamber 105.

[0040] Looking at the front of the downstream vacuum chamber 105, one can see the ion lens (multipole electrodes Q1 to Q3) 1051 housed in the lens housing 1054, and the mounting ears 1103 for the joint 110, which are provided on the wall surface (at the four corners of the wall in Figure 4F) (see Figure 4F). Ions are guided to the detector 109 by passing through the central space surrounded by the multipole electrode Q0 (quadrupole electrode) of the ion lens 1051.

[0041] Furthermore, the relationship between the diameters of the pores 1023 in the ion source side partition wall 102 (φ1), the ion lens holes 1035 on the back of the first vacuum chamber 103 (φ2), and the ion lens holes 1045 on the back of the second vacuum chamber 104 (φ3) can be such that φ1 < φ3 < φ2.

[0042] <Connections between each component> Figure 5 is a diagram illustrating the connection between the first vacuum chamber 103 and the second vacuum chamber 104. Note that the connection between the second vacuum chamber 104 and the subsequent vacuum chamber 105 is the same as shown in Figure 5, so its explanation is omitted.

[0043] When the back of the first vacuum chamber 103 and the front (opening) of the second vacuum chamber 104 are aligned without any gaps, the mounting tabs 1103 of the joints 110 provided at the four corners of each chamber fit together perfectly. Bolt holes are formed in each mounting tab 1103. With the mounting tabs 1103 of the first vacuum chamber 103 and the mounting tabs 1103 of the second vacuum chamber 104 butted together, for example, the mounting tabs 1103 of the first vacuum chamber 103 can be fixed together with a bolt 1101 via an O-ring 1102. Since the bolt is fastened via the O-ring 1102, the torque required to fix the two together can be increased. Alternatively, for example, a recess (around the entire circumference) may be provided in the front housing frame 1043 of the second vacuum chamber 104, and an O-ring may be attached to this recess to fix the back of the first vacuum chamber 103 and the front of the second vacuum chamber 104 without any gaps.

[0044] <Summary> (i) The mass spectrometer 100 according to this embodiment includes a first vacuum chamber 103 housing a first multipole electrode 1031 for transporting sample ions ionized by an ion source 101; a second vacuum chamber 104 adjacent to the first vacuum chamber 103 and housing a second multipole electrode 1041 for transporting sample ions output from the first vacuum chamber 103; a downstream vacuum chamber 105 housing at least a third multipole electrode 1051 for transporting sample ions output from the second vacuum chamber 104; and a detector 109 provided downstream of the sample ion flow from the downstream vacuum chamber for detecting sample ions. Here, the first vacuum chamber 103 is configured to be separable from the subsequent second vacuum chamber 104. In this way, by configuring the first vacuum chamber 103 to be individually separated from the mass spectrometer 100, the electrode 1031 housed in the first vacuum chamber 103, which is closest to the ion source 101 and most prone to contamination, and therefore requires a shorter maintenance cycle than the other electrodes 1041 and 1051, can be efficiently maintained.

[0045] In this embodiment, the first vacuum chamber 103 and the second vacuum chamber 104 are separated by a common wall surface (with a hole for an ion lens). Two configurations for the common wall surface are possible: one where the rear wall surface of the first vacuum chamber 103 covers the front (front opening) of the second vacuum chamber (Configuration I: see Figure 3A), and another where the first vacuum chamber 103 and the second vacuum chamber 104 are each constructed from cylindrical housings, with their openings covered by independent wall surfaces (with holes for ion lenses) (Configuration II: see Figure 3B). Configuration I has the advantage of reducing the number of parts, thus improving work efficiency, while Configuration II has the advantage of increasing the number of parts but allowing for detailed cleaning of each component.

[0046] Furthermore, both configuration I and configuration II can be adopted for the relationship between the second vacuum chamber 104 and the subsequent vacuum chamber 105. However, with respect to the subsequent vacuum chamber 105, only the front surface proximal to the ion source 101 is open, while the rear surface distal to the ion source 101 is sealed (no opening).

[0047] Regarding the separation structure of each vacuum chamber (see Figure 5), the first vacuum chamber 103 has a first joint (mounting ear) 1103 on its rear wall surface for connecting with the second vacuum chamber 104, and the second vacuum chamber 104 has a second joint (mounting ear) 1103 on its front surface for connecting with the first vacuum chamber 103. The first joint (mounting ear) 1103 and the second joint (mounting ear) 1103 each have bolt holes, and the first joint (mounting ear) 1103 and the second joint (mounting ear) 1103 are fixed together by bolts 1101 inserted into the bolt holes. In this way, the first vacuum chamber 103 and the second vacuum chamber 104 are connected. Alternatively, the bolts 1101 may be inserted into the bolt holes of the joint (mounting ear) 1103 via O-rings 1102. The O-rings allow for increased tightening torque by the bolts 1101.

[0048] (ii) This embodiment also proposes a method for disassembling the mass spectrometer 100. As described above, the mass spectrometer 100 includes a first vacuum chamber 103 detachably connected to an ion source 101 via an ion source-side partition wall 102, a second vacuum chamber 104 detachably connected to the first vacuum chamber 103, a subsequent vacuum chamber 105 detachably connected to the second vacuum chamber 104, and a turbomolecular pump 106 for controlling the vacuum levels of the second vacuum chamber 104 and the subsequent vacuum chamber 105. The method for disassembling the mass spectrometer 100 includes removing the ion source 101 from the ion source-side partition wall 102, removing the ion source-side partition wall 102 from the first vacuum chamber 103, and separating the first vacuum chamber 103 from the second vacuum chamber 104 by releasing the connection of the joint 110 between the first vacuum chamber 103 and the second vacuum chamber 104. In this way, the first vacuum chamber 103, located in the preceding stage (proximal to the ion source 101), can be separated individually (without having to disengage the turbomolecular pump 106), allowing for efficient maintenance even when the multi-pole electrode 1031 housed in the easily soiled first vacuum chamber 103 is frequently maintained. The first vacuum chamber 103 and the second vacuum chamber 104 are joined by fastening their respective joints (mounting lugs) 1103 with bolts. Therefore, the first vacuum chamber 103 can be easily separated from the second vacuum chamber 104.

[0049] Furthermore, the disassembly method for the mass spectrometer 100 includes disengaging the turbomolecular pump 106 from the second vacuum chamber 104 and the subsequent vacuum chamber 105, and separating the second vacuum chamber 104 from the subsequent vacuum chamber 105 by disengaging the joint (mounting ear) 1103 between the second vacuum chamber 104 and the subsequent vacuum chamber 105. The turbomolecular pump 106 is installed on the top surface of the subsequent vacuum chamber 105 so as to rotate on an axis about the rotation axis 1061 at its rear end. The second vacuum chamber 104 and the subsequent vacuum chamber 105 each have openings on their top surfaces (opening (vacuum exhaust hole) 1042 of the second vacuum chamber 104; the opening of the subsequent vacuum chamber 105 is not shown), and the turbomolecular pump 106 engages with the second vacuum chamber and the subsequent vacuum chamber so as to cover each opening. Furthermore, the second vacuum chamber 104 and the subsequent vacuum chamber 105 are joined by fastening their respective joints (mounting tabs) 1103 with bolts, similar to the first vacuum chamber 103 and the second vacuum chamber 104. Disengaging the turbomolecular pump 106 involves rotating the turbomolecular pump 106 on its rear end pivot shaft 1061 to expose the opening (vacuum exhaust hole) 1042 of the second vacuum chamber 104 and the opening (not shown) of the subsequent vacuum chamber. Separating the second vacuum chamber 104 from the subsequent vacuum chamber 105 involves releasing the bolt fastenings. By following these procedures, the mass spectrometer 100 can be disassembled into its components with very simple operations. It is also possible to disassemble the mass spectrometer 100 with the amount of work required according to the maintenance level.

[0050] (iii) While specific embodiments are described in this disclosure, they are for illustrative purposes only (to understand the technology of this disclosure) and not for limitation in any respect. Furthermore, a person of ordinary skill in the art can see from the consideration of these embodiments that other implementations of this disclosure may be apparent. The specification and specific examples are typical, and the scope and spirit of the technology of this disclosure are shown in the subsequent claims. [Explanation of Symbols]

[0051] 100 Mass spectrometer 101 Ion source 102 Ion source side partition 103 1st vacuum chamber 104 Second vacuum chamber 105 Post-stage vacuum chamber 106 Turbomolecular pump 107 1st support stand 108 Second support stand 109 detectors 110 Joint

Claims

1. A first vacuum chamber housing a first multipole electrode that transports sample ions ionized by an ion source, A second vacuum chamber adjacent to the first vacuum chamber, which houses a second multipole electrode for transporting the sample ions output from the first vacuum chamber, A downstream vacuum chamber containing at least a third multipole electrode for transporting the sample ions output from the second vacuum chamber, A detector is provided downstream of the flow of sample ions from the aforementioned downstream vacuum chamber, and is used to detect the sample ions. A mass spectrometer in which the first vacuum chamber is configured to be separable from the subsequent second vacuum chamber.

2. In claim 1, A mass spectrometer in which the first vacuum chamber and the second vacuum chamber are combined to form the mass spectrometer, and the first vacuum chamber and the second vacuum chamber are separated by a common wall.

3. In claim 2, The first vacuum chamber and the second vacuum chamber have a fully open front surface proximal to the ion source, and the back surface distal to the ion source is provided with an ion lens hole for installing the first multipolar electrode or the second multipolar electrode. A mass spectrometer in which, when the first vacuum chamber and the second vacuum chamber are coupled together, the rear wall surface of the first vacuum chamber is configured to cover the front opening of the second vacuum chamber.

4. In claim 3, The front surface of the downstream vacuum chamber, near the ion source, is fully open. A mass spectrometer in which, when the second vacuum chamber and the subsequent vacuum chamber are coupled, the rear wall surface of the second vacuum chamber is configured to cover the front opening of the subsequent vacuum chamber.

5. In claim 2, The first vacuum chamber and the second vacuum chamber are composed of cylindrical housings. Furthermore, the mass spectrometer has a first common wall that covers the distal rear opening of the ion source in the first vacuum chamber and the proximal front opening of the ion source in the second vacuum chamber, and has holes for ion lenses for installing the first multipole electrode, and the first vacuum chamber and the second vacuum chamber are separated by the first common wall.

6. In claim 5, Furthermore, the mass spectrometer has a second common wall that covers the distal rear opening of the ion source in the second vacuum chamber and the proximal front opening of the ion source in the downstream vacuum chamber, and has holes for ion lenses for installing the second multipole electrode, and the second vacuum chamber and the downstream vacuum chamber are separated by the second common wall.

7. In claim 1, Furthermore, the system includes an ion source side partition wall positioned between the ion source and the first vacuum chamber, having pores through which the sample ions pass, The ion source side partition is a mass spectrometer in which the ion source is attached to the front side of the ion source, and the first vacuum chamber is attached to the rear side of the ion source.

8. In claim 3, The first vacuum chamber has a first joint on its rear wall for connecting with the second vacuum chamber. The second vacuum chamber has a second joint on its front surface for coupling with the first vacuum chamber. The first joint and the second joint each have bolt holes, A mass spectrometer in which the first vacuum chamber and the second vacuum chamber are joined by fixing the first joint and the second joint with bolts inserted into the bolt holes.

9. In claim 8, The bolt is inserted into the bolt hole via an O-ring in a mass spectrometer.

10. A method for disassembling a mass spectrometer having a first vacuum chamber detachably connected to an ion source via a partition, a second vacuum chamber detachably connected to the first vacuum chamber, a subsequent vacuum chamber detachably connected to the second vacuum chamber, and a turbomolecular pump for controlling the vacuum levels of the second vacuum chamber and the subsequent vacuum chamber, The ion source is removed from the partition wall, Removing the partition wall from the first vacuum chamber, Disconnecting the connection between the first vacuum chamber and the second vacuum chamber to separate the first vacuum chamber from the second vacuum chamber, A method for disassembling a mass spectrometer, including the disassembly of the instrument.

11. In claim 10, further, Disengaging the engagement between the turbomolecular pump and the second vacuum chamber and the downstream vacuum chamber, Disconnecting the connection between the second vacuum chamber and the subsequent vacuum chamber, thereby separating the second vacuum chamber from the subsequent vacuum chamber, A method for disassembling a mass spectrometer, including the disassembly of the instrument.

12. In claim 10, The connection between the first vacuum chamber and the second vacuum chamber is made up of bolts inserted into bolt holes provided in the first vacuum chamber and bolt holes provided in the second vacuum chamber. A method for disassembling a mass spectrometer, wherein separating the first vacuum chamber from the second vacuum chamber includes releasing the joint.

13. In claim 11, The turbomolecular pump is installed on the top surface of the downstream vacuum chamber such that its rear end rotates on an axis. The second vacuum chamber and the subsequent vacuum chamber each have an opening on their top surfaces, and the turbomolecular pump engages with the second vacuum chamber and the subsequent vacuum chamber such that it covers the opening. The connection between the second vacuum chamber and the subsequent vacuum chamber is made up of bolts inserted into bolt holes provided in the second vacuum chamber and bolt holes provided in the subsequent vacuum chamber. Disengaging the turbomolecular pump includes axially rotating the turbomolecular pump to expose the opening of the second vacuum chamber and the opening of the downstream vacuum chamber. A method for disassembling a mass spectrometer, wherein separating the second vacuum chamber from the subsequent vacuum chamber includes releasing the joint.

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