Information processing device, inference device, machine learning device, substrate plating device, information processing method, inference method, and machine learning method

Abstract

To provide an information processing device capable of properly predicting vibration characteristics of a paddle, according to an operation state of a substrate plating device.SOLUTION: An information processing device 4 comprises: an information acquisition part 400 for acquiring plating processing information which is formed of operation motion information including object paddle motion information which indicates an agitation motion of an object paddle corresponding to a paddle to be processed, plating solution motion information which indicates a supply motion of a plating solution to a plating tank, and transport machine motion information which indicates a transport motion of the substrate, as operation motions performed by a substrate plating device, and paddle vibration information during operation motions which indicates vibration characteristics of the object paddle when the operation motions are performed; and an information generation part 401 for inputting the plating processing information acquired by the information acquisition part 400, to a learning model 10 which has learned a correlation between the plating processing information and the paddle vibration information during operation motions, by machine learning, for generating paddle vibration information during an agitation motion with respect to the plating processing information.SELECTED DRAWING: Figure 14

Claims

1. An information acquisition unit acquires plating process information, which consists of operation information including target paddle operation information indicating the stirring operation of a target paddle corresponding to the paddle to be processed, plating solution operation information indicating the supply operation of the plating solution to the plating tank, and conveyor operation information indicating the transport operation of the substrate, as an operation performed by a substrate plating apparatus comprising one or more plating tanks for storing a plating solution used for plating substrates, one or more paddles installed in the plating tanks for stirring the plating solution, and one or more conveyors for transporting the substrates to the plating tank, and operation operation paddle vibration information indicating the vibration characteristics of the target paddle when the operation is performed. The system includes an information generation unit that generates the paddle vibration information during stirring operation for the plating process information by inputting the plating process information acquired by the information acquisition unit into a learning model that has been trained by machine learning to determine the correlation between the plating process information and the paddle vibration information during stirring operation, which shows the vibration characteristics of the target paddle when only the stirring operation indicated by the target paddle operation information among the operating operation information constituting the plating process information is performed. Information processing device.

2. The aforementioned target paddle operation information is: The operating speed of the aforementioned target paddle, The operating frequency of the target paddle, and Including at least one of the operating strokes of the target paddle, The information processing apparatus according to claim 1.

3. The aforementioned plating solution operation information is, The amount of the plating solution stored in the plating tank, The operating status, which indicates whether or not the circulation pump that circulates the aforementioned plating solution is in operation, and The rotational speed of the circulation pump includes at least one of the following: The information processing apparatus according to claim 1.

4. The aforementioned conveyor operation information is, An operating state indicating whether the conveyor is in operation or not, The operating speed of the conveyor, The position of the conveyor relative to the target paddle, and The distance between the target paddle and the conveyor, including at least one of the following: The information processing apparatus according to claim 1.

5. The substrate plating apparatus is The plurality of plating tanks include a target plating tank corresponding to the plating tank on which the target paddle is installed, and a surrounding plating tank corresponding to the plating tank arranged around the target plating tank, The plurality of paddles include the target paddle and a surrounding paddle that corresponds to the paddle installed in the surrounding plating tank. The aforementioned operating information is, The information further includes peripheral paddle operation information indicating the stirring operation of the peripheral paddles, The information processing apparatus according to claim 1.

6. The surrounding paddle operation information is, An operating state indicating whether the surrounding paddle is in operation or not, The operating speed of the surrounding paddles, The operating frequency of the surrounding paddles, The operating stroke of the surrounding paddle, and Including at least one of the phase differences of the surrounding paddles with respect to the target paddle, The information processing apparatus according to claim 5.

7. The aforementioned operating information is, The system further includes apparatus arrangement information relating to the arrangement of the plating tank and the paddle, The aforementioned device arrangement information is The position of the surrounding paddles relative to the target paddle, The distance between the target paddle and the surrounding paddles, The position of the surrounding plating tank relative to the target plating tank, and The distance between the target plating tank and the surrounding plating tank is at least one of the following: The information processing apparatus according to claim 5.

8. The aforementioned operating information is, The information further includes anode electrode information relating to the anode electrode installed in the plating tank, The anode electrode information is, The weight of the anode electrode is at least: The information processing apparatus according to claim 1.

9. The system further includes an abnormality determination unit that determines the occurrence of an abnormality in the target paddle based on the paddle vibration information during the stirring operation generated by the information generation unit. The information processing apparatus according to any one of claims 1 to 8.

10. An inference device comprising memory and a processor, The aforementioned processor, Information acquisition process for acquiring plating process information, which is comprised of operation information including target paddle operation information indicating the stirring operation of a target paddle corresponding to the paddle to be processed, plating solution operation information indicating the supply operation of the plating solution to the plating tank, and conveyor operation information indicating the transport operation of the substrate, as an operation performed by a substrate plating apparatus comprising one or more plating tanks for storing a plating solution used for plating substrates, one or more paddles installed in the plating tanks for stirring the plating solution, and one or more conveyors for transporting the substrates to the plating tank, and operation operation paddle vibration information indicating the vibration characteristics of the target paddle when the operation is performed, When the plating process is acquired in the information acquisition process, an inference process is performed to infer paddle vibration information during stirring, which indicates the vibration characteristics of the target paddle when only the stirring operation indicated by the target paddle operation information is performed among the operating operation information constituting the plating process information. Reasoning device.

11. Plating process information comprising: operation information for a substrate plating apparatus comprising one or more plating tanks for storing a plating solution used for plating substrates, one or more paddles installed in the plating tanks for stirring the plating solution, and one or more conveyors for transporting the substrates to the plating tanks, which includes operation information including target paddle operation information indicating the stirring operation of a target paddle corresponding to the paddle to be processed, plating solution operation information indicating the supply operation of the plating solution to the plating tanks, and conveyor operation information indicating the transport operation of the substrates; operation paddle vibration information during operation indicating the vibration characteristics of the target paddle when the operation is performed; and stirring paddle vibration information indicating the vibration characteristics of the target paddle when only the stirring operation indicated by the target paddle operation information is performed among the operation information constituting the plating process information. A learning data storage unit that stores multiple sets of learning data consisting of information, A machine learning unit that inputs multiple sets of the aforementioned training data into a learning model to train the learning model to learn the correlation between the plating process information and the paddle vibration information during the stirring operation using machine learning, The system includes a trained model storage unit that stores the trained model in which the correlation has been learned by the machine learning unit, Machine learning device.

12. The substrate plating apparatus that performs the aforementioned operating operation, The information processing apparatus according to claim 1, and A machine learning device according to claim 11, which operates as at least one of the devices, PCB plating equipment.

13. Information acquisition step for acquiring plating process information, which is comprised of operation information including target paddle operation information indicating the stirring operation of a target paddle corresponding to the paddle to be processed, plating solution operation information indicating the supply operation of the plating solution to the plating tank, and conveyor operation information indicating the transport operation of the substrate, as an operation performed by a substrate plating apparatus comprising one or more plating tanks for storing a plating solution used for plating substrates, one or more paddles installed in the plating tanks for stirring the plating solution, and one or more conveyors for transporting the substrates to the plating tank, and operation operation paddle vibration information indicating the vibration characteristics of the target paddle when the operation is performed, The system includes an information generation step which generates the paddle vibration information during stirring for the plating process information by inputting the plating process information acquired in the information acquisition step into a learning model that has been trained by machine learning to determine the correlation between the plating process information and the paddle vibration information during stirring, which shows the vibration characteristics of the target paddle when only the stirring operation indicated by the target paddle operation information among the operating operation information constituting the plating process information is performed. Information processing methods.

14. An inference method performed by an inference device comprising memory and a processor, The aforementioned processor, Information acquisition process for acquiring plating process information, which is comprised of operation information including target paddle operation information indicating the stirring operation of a target paddle corresponding to the paddle to be processed, plating solution operation information indicating the supply operation of the plating solution to the plating tank, and conveyor operation information indicating the transport operation of the substrate, as an operation performed by a substrate plating apparatus comprising one or more plating tanks for storing a plating solution used for plating substrates, one or more paddles installed in the plating tanks for stirring the plating solution, and one or more conveyors for transporting the substrates to the plating tank, and operation operation paddle vibration information indicating the vibration characteristics of the target paddle when the operation is performed, When the plating process is acquired in the information acquisition process, an inference process is performed to infer paddle vibration information during stirring, which indicates the vibration characteristics of the target paddle when only the stirring operation indicated by the target paddle operation information is performed among the operating operation information constituting the plating process information. Reasoning method.

15. The operating operations performed by a substrate plating apparatus comprising one or more plating tanks for storing a plating solution used for plating substrates, one or more paddles installed in the plating tanks for stirring the plating solution, and one or more conveyors for transporting the substrates to the plating tanks, include operating operation information including target paddle operation information indicating the stirring operation of the target paddle corresponding to the paddle to be processed, plating solution operation information indicating the supply operation of the plating solution to the plating tanks, and conveyor operation information indicating the transport operation of the substrates, and the corresponding when the operating operations are performed A learning data storage step involves storing multiple sets of learning data in a learning data storage unit, each set consisting of plating process information comprising paddle vibration information during operation showing the vibration characteristics of an elephant paddle, and paddle vibration information during stirring operation showing the vibration characteristics of the target paddle when only the stirring operation indicated by the target paddle operation information among the operating operation information constituting the plating process information is performed. A machine learning process in which multiple sets of the aforementioned training data are input into the training model to train the training model to learn the correlation between the plating process information and the paddle vibration information during the stirring operation, The system includes a trained model storage step, which stores the trained model, which has learned the correlation relationship through the machine learning step, in a trained model storage unit. Machine learning methods.

Images